TWI723099B - Discharge lamp and its exchange method, as well as exposure method and device - Google Patents

Abstract

The discharge lamp includes: a glass tube with electrodes for forming a light-emitting part inside; and a lamp head provided at the end of the glass tube, and a through hole formed by an opening is provided in the lamp head. The light source device includes: an irradiating part that makes the light beam enter the through hole of the lamp head of the discharge lamp; a light receiving part that detects the light beam that has passed through the through hole; and a light source control system that uses the detection result of the light receiving part to obtain the angle of the discharge lamp. It is easy to confirm whether the discharge lamp has been used or the state of rotation angle.

Description

Discharge lamp and its exchange method, as well as exposure method and device

The present invention relates to a discharge lamp and its replacement method, a light source device provided with the discharge lamp, an exposure method using the replacement method, an exposure device provided with the light source device, and a component manufacturing method using exposure technology.

Used in the lithography step for the manufacture of various elements (liquid crystal display elements or semiconductor elements, etc.), in order to transfer the pattern formed on the mask to the substrate (glass plate or semiconductor wafer, etc.) coated with photosensitive material Among them, there are exposure devices such as a unified exposure type projection exposure device and a scanning exposure type projection exposure device that are equipped with a light source device for exposure composed of a combination of a discharge lamp such as an ultra-high pressure mercury lamp and a condenser lens.

In the conventional light source device, there is the following: a flange part and a step part are provided in one of the lamp caps of the discharge lamp, and the flange part is placed on the surface of the base part provided with the opening in the opening The potential energy is applied downward to the stepped portion by a rod member or the like, thereby fixing the discharge lamp (for example, refer to Patent Document 1). In addition, if the discharge lamp for the exposure device is used for more than a predetermined allowable time, the exposure performance (resolution, etc.) may deteriorate due to a decrease in illuminance. Therefore, when the cumulative use time of the discharge lamp has passed the allowable time, it must be exchanged with an unused discharge lamp.

[Prior Technical Literature] [Patent Literature]

[Patent Document 1] International Publication No. 2007/066947 Handbook

In the light source device of the exposure device, for example, when the used discharge lamp and the unused discharge lamp are stored in a common storage part, and the discharge lamp can be exchanged automatically, the previously used discharge lamp and The shape of the unused discharge lamp is the same, so the used discharge lamp may be used again.

Moreover, for example, when a non-axisymmetric discharge lamp is transported from the storage section to the installation position of the discharge lamp, if the rotation angle of the discharge lamp deviates greatly from the target value, the discharge lamp cannot be quickly delivered to the transport section, etc. The fear.

The aspect of the present invention is in view of the above situation, and aims to easily confirm the state of the discharge lamp.

According to a first aspect of the present invention, there is provided a discharge lamp, which is installed in a device equipped with a detection unit for detecting the usage state of the discharge lamp, and includes: an electrode for discharging; and a detected portion by the detection portion It is detected that when the electrode is energized, it changes from the first state to the second state.

According to a second aspect of the present invention, there is provided a discharge lamp, which is provided with a glass member forming a light-emitting portion, and a first base member and a second base member provided to sandwich the glass member, in the first base The member is provided with a through hole.

According to a third aspect, there is provided a light source device, which is a discharge lamp provided with the aspect of the present invention And including: a storage unit for storing the discharge lamp; a conveying unit for transporting the discharge lamp; a light transmitting unit for making the light beam enter the through hole of the first base member of the discharge lamp; and a light receiving unit for detecting that it has passed through the The light beam of the through hole; and the control unit, using the detection result of the light receiving unit to obtain the state of the discharge lamp.

According to a fourth aspect, there is provided an exposure apparatus including: the light source device of the aspect of the present invention; an illumination system for illuminating a photomask with light generated from the discharge lamp of the light source device; and a projection optical system for the photomask The image of the pattern is projected onto the substrate.

According to a fifth aspect, there is provided an exchange method, which is the discharge lamp exchange method of the aspect of the present invention, and includes: storing the discharge lamp; transporting the discharge lamp from the storage part to the installation position; and making the light beam incident on the discharge lamp The through hole of the first base member; detecting the light beam that has passed through the through hole; and using the detection result of the light beam to obtain the state of the discharge lamp.

According to a sixth aspect, there is provided an exposure method including: exchanging the discharge lamp using the discharge lamp exchange method of the aspect of the present invention; illuminating the mask with light generated from the discharge lamp; and an image of the pattern of the mask Project to the substrate.

According to a seventh aspect, there is provided a device manufacturing method, including: forming a pattern of a photosensitive layer on a substrate using the exposure apparatus or exposure method of the aspect of the present invention; and processing the substrate on which the pattern is formed.

EX‧‧‧Exposure Device

M‧‧‧Mask

P‧‧‧Board

PL‧‧‧Projection Optical System

1‧‧‧Discharge lamp

1N‧‧‧Unused discharge lamp

2‧‧‧Oval mirror

13‧‧‧Illumination optical system

20‧‧‧Power Department

23, 24‧‧‧Power cable

25‧‧‧Glass tube

25a‧‧‧Valve

26‧‧‧The lamp head on the cathode side

28‧‧‧The lamp head on the anode side

28a‧‧‧Terminal

28e‧‧‧Detained Department

30‧‧‧Light source device

31‧‧‧Lampshade

32‧‧‧Light source control system

33‧‧‧Supporting component

36‧‧‧Extraction part

50‧‧‧Exchange Device

52‧‧‧Clamping mechanism

54‧‧‧Custody Department

56‧‧‧Light transport system

Fig. 1 is a diagram showing a schematic configuration of the exposure apparatus of the first embodiment.

Fig. 2 is a diagram showing the discharge lamp in Fig. 1;

Figure 3 (A) is a cross-sectional view taken along line AA of Figure 3 (B), and Figure 3 (B) shows the A cross-sectional view of the lamp head on the anode side of the used discharge lamp. Figure 3(C) shows a cross-sectional view of the lamp head on the anode side of the used discharge lamp.

Fig. 4(A) is a plan view of a part of the light source device shown in Fig. 1 cut away, and Fig. 4(B) is a side view of a part of the light source device shown in Fig. 4(A) cut away.

Fig. 5 is a perspective view showing the anode side lamp head and clamping mechanism of the discharge lamp.

FIG. 6(A) is a plan view showing a part of the light source device in which the sliding part is moving, and FIG. 6(B) is a side view showing a part of the light source device in FIG. 6(A).

Fig. 7(A) is a diagram showing a state in which the anode side lamp head of the discharge lamp is clamped, and Fig. 7(B) is a diagram showing a state in which the clamping of the lamp head is released.

Fig. 8 is a side view showing a part of the light source device cut away.

Fig. 9(A) is a plan view showing a state in which the anode-side lamp head is grasped by the claws for holding the lamp, and Fig. 9(B) is a side view of Fig. 9(A).

Fig. 10(A) is a plan view showing a part of the light source device in moving the discharge lamp, and Fig. 10(B) is a side view showing a part of the light source device in Fig. 10(A).

Fig. 11 is a diagram showing a part of a plurality of discharge lamps installed on the lamp storage turntable, which is cut away.

Fig. 12 is a diagram showing the positioning part of the turntable for lamp storage.

Fig. 13 is a flowchart showing an example of a discharge lamp replacement method.

Fig. 14(A) is a cross-sectional view of the anode-side lamp head of an unused discharge lamp of the second embodiment, and Fig. 14(B) is a cross-sectional view of the anode-side lamp head of a used discharge lamp.

Figure 15(A) and Figure 15(B) respectively show the clamping of the anode side lamp head of Figure 14(A) Sectional view of the mechanism.

Fig. 16(A) is a cross-sectional view of the anode-side lamp head of the discharge lamp of the first modification, and Fig. 16(B) is a cross-sectional view of the anode-side lamp head of the discharge lamp of the second modification.

Fig. 17(A) is a cross-sectional view showing the anode side lamp head of the discharge lamp of the third modification, and Fig. 17(B) is a cross-sectional view showing the state in which the sphere of Fig. 17(A) moves downward.

Fig. 18(A) is a diagram showing the state of clamping the anode side lamp head of the discharge lamp of the fourth modification, Fig. 18(B) shows an enlarged cross-sectional view of the anode side lamp head of Fig. 18(A), Fig. 18( C) is a cross-sectional view showing the terminal part of Fig. 18(B), and Fig. 18(D) is a view obtained by observing the inside of the terminal part of Fig. 18(B) in the D direction.

Fig. 19(A) is a diagram showing the inside of the terminal part of the anode side lamp head of the discharge lamp of the fifth modification, and Fig. 19(B) is a diagram showing the increase in the distance between the front ends of the two elastic hinge parts of Fig. 19(A) Picture of the big state.

Fig. 20(A) is a diagram showing the inside of the terminal part of the anode side lamp head of the discharge lamp of the sixth modification, and Fig. 20(B) is a diagram showing the increase in the distance between the front ends of the two elastic hinge parts of Fig. 20(A) Picture of the big state.

Fig. 21(A) is a cross-sectional view showing the terminal part of the anode side lamp head of the discharge lamp of the seventh modification, and Fig. 21(B) is a diagram showing the state where the angle of the mirror part of Fig. 21(A) has changed.

Fig. 22 is a flowchart showing an example of manufacturing steps of an electronic component.

[First Embodiment]

Hereinafter, the first embodiment of the present invention will be described with reference to FIGS. 1 to 13.

FIG. 1 shows a schematic configuration of an exposure apparatus EX equipped with a light source device 30 of this embodiment. The exposure device EX is, as an example, a scanning exposure type projection exposure device. In FIG. 1, the light source device 30 includes: a discharge lamp 1, which is composed of an arc discharge type ultra-high pressure mercury lamp; a supporting member 33, a lamp base 26 that holds the cathode side of the discharge lamp 1, and an extraction portion 36 (refer to FIG. 4(B)), The supporting member 33 can be moved; the driving unit 34 is used to fix and release the lamp head 26 relative to the supporting member 33; the elliptical mirror 2 (condenser) is arranged to surround the glass tube 25 (valve) of the discharge lamp 1; and the box The lampshade 31 in the shape of a lamp accommodates the discharge lamp 1 and the elliptical mirror 2 during exposure (when the discharge lamp 1 is in use). During exposure, the light-emitting part in the glass tube 25 of the discharge lamp 1 is arranged near the first focus of the elliptical mirror 2 as an example.

Furthermore, the light source device 30 includes a power cable 24 that is detachably connected to the base 28 on the anode side of the discharge lamp 1 and has flexibility; the power cable 23 is connected to the cathode side of the discharge lamp 1 via a supporting member 33 The lamp base 26 is flexible; the power supply unit 20 supplies power (current) to the discharge lamp 1 via the power cables 23 and 24 to make the discharge lamp 1 emit light; and a fully automatic exchange device 50 to exchange the used discharge lamp 1 . The exchange device 50 includes: a clamping mechanism 52 for attaching and detaching the power cable 24 to the lamp head 28 on the anode side; a storage section 54 for storing the discharge lamp 1; a lamp transport system 56 for transporting between the support member 33 and the storage section 54 The discharge lamp 1; and a box-shaped housing 51, containing the storage section 54 and the lamp conveying system 56.

In addition, as shown in FIG. 4(B), the supporting member 33 is actually a substantially cylindrical metal (conductive) member with an annular band-shaped flange portion formed on the upper portion. The support member 33 is fixed to the center of the extraction portion 36 supported by the guide member 41 on the inner surface of the lampshade 31 via the flange portion, as described later, and the support member 33 and the extraction portion 36 are electrically insulated. In addition, a drive unit 34 for the lamp base 26 is provided on the bottom surface of the drawing portion 36.

In FIG. 1, the light source device 30 has a control power supply unit 20, a drive unit 34, and The light source control system 32 of the operation of the lamp conveying system 56 and the like. The light source control system 32 monitors the cumulative use time of the discharge lamp 1, and when the cumulative use time reaches a predetermined allowable time, the switching device 50 is activated to exchange the used discharge lamp 1 with an unused discharge lamp. The detailed structure and operation of the light source device 30 will be described later.

The exposure device EX includes: an illumination optical system 13, which illuminates the photomask M with exposure light IL selected from the light beam supplied by the light source device 30; and a projection optical system PL, which projects the image of the pattern of the photomask M based on the exposure light IL To the surface of the plate P (photosensitive substrate) composed of a glass substrate coated with photoresist; the mask platform MST, which moves the photomask M; the substrate platform PST, which moves the plate P; and the main control system 14, which is controlled by a unified It is composed of a computer that includes the entire operation of the exposure device of the light source device 30.

As an example, the exposure device EX is an exposure device for manufacturing liquid crystal display elements. The body of the exposure device EX (including the mask stage MST, the projection optical system PL, and the substrate stage PST) is set in a box-shaped cavity in the manufacturing plant Inside the chamber (not shown), the light source device 30 is installed on the roof RT of the chamber. The light source device 30 supplies this information to the main control system 14 when the cumulative use time of the discharge lamp 1 reaches the allowable time. Corresponding to this, the main control system 14 stops the exposure operation of the exposure device EX until the light source device 30 is supplied with information indicating that the exchange of the discharge lamp 1 has been completed. Hereinafter, the Z axis is set parallel to the optical axis AX of the projection optical system PL, and the X axis is set parallel to the paper surface of FIG. 1 in a plane perpendicular to the Z axis (approximately horizontal in this embodiment), and the paper surface of FIG. 1 The description will be given by setting the Y axis vertically.

The light beam emitted from the discharge lamp 1 is converged near the second focal point by the elliptical mirror 2, passes through the vicinity of a baffle (not shown), becomes divergent light, and enters the optical path bending mirror 3. The mirror 3 is also contained in the lampshade 31. The light beam reflected by the mirror 3 passes through the light transmittance of the lampshade 31 The window member 4 is incident on the interference filter 5, and the interference filter 5 selects only the exposure light IL composed of a predetermined bright line (for example, an i-ray with a wavelength of 365 nm). In addition, as the exposure light IL, in addition to i-rays, g-rays, h-rays, or a mixed light of these, or bright lines of lamps other than mercury lamps, etc. may be used. The selected exposure light IL is incident on the fly-eye lens 6 (optical integrator), and several are formed on the variable aperture diaphragm (hereinafter referred to as the illumination σ diaphragm) 7 arranged on the exit surface of the fly-eye lens 6 2 times the light source. The exposure light IL having passed through the variable σ diaphragm 7 enters the mask shutter (variable field diaphragm) 9 via the first relay lens 8. The disposition surface of the mask shutter 9 and the pattern surface of the mask M are substantially conjugate, and the opening shape of the mask shutter 9 is set via the driving device 9a, thereby setting the illumination area on the mask M. Furthermore, in order to prevent unnecessary exposure light from irradiating the plate P during the stepping movement of the plate P, the platform control system 15 can open and close the mask shutter 9 via the driving device 9a.

The exposure light IL that has passed through the photomask 9 passes through the second relay lens 10, the mirror surface 11 for bending the optical path of the exposure light IL, and the condenser lens 12 to the pattern surface of the photomask M. The area is illuminated. The interference filter 5, the fly-eye lens 6, the variable sigma diaphragm 7, the relay lenses 8, 10, the reticle 9, the mirror 11, and the condenser lens 12 constitute the illumination optical system 13. The light beam from the light source device 30 passes through the illumination optical system 13 to illuminate the elongated illumination area of the mask M (mask) in the Y direction, for example, in the form of exposure light IL. The pattern in the illumination area of the mask M is projected to the exposure area of one exposure area of the plate P (with the illumination area optics) at a projection magnification β (β is equal to, magnification, or reduction) through the projection optical system PL. Conjugation region). In addition, as the projection optical system PL, a plurality of projection optical systems may be used, for example, a multi-projection optical system arranged in two rows in the Y direction. In the case of using a plurality of projection optical systems in this way, the exposure light IL from the illumination optical system 13 is opposed to the light A plurality of illumination areas on the pattern surface of the cover M are illuminated in parallel.

The mask M is held on the upper surface of the mask platform MST on the mask substrate (not shown) that can be slightly moved in the X direction, the Y direction, and the rotation direction around the Z axis. The position of the mask platform MST is measured with high accuracy by the laser interferometer 18R that irradiates the measuring laser beam to the movable mirror 17R fixed to it, and the measured value is supplied to the platform control system 15 and the main control system 14. Based on the measured value and the control information from the main control system 14, the platform control system 15 controls the position of the mask platform MST through a drive system 19R including a linear motor and the like.

On the other hand, the board P is held on the upper surface of the substrate stage PST via a board holder not shown, and the substrate stage PST is placed on a base member (not shown) so as to be movable in the X direction and the Y direction. The position of the substrate platform PST is measured with high accuracy by the laser interferometer 18W that irradiates the measuring laser beam to the movable mirror 17W fixed thereto, and the measured value is supplied to the platform control system 15 and the main control system 14. Based on the measured value and the control information from the main control system 14, the platform control system 15 controls the position of the substrate platform PST (wafer W) via a drive system 19W including a linear motor and the like.

During the exposure of the plate P, the following two actions are repeated in a step and scan manner, that is, each exposure area of the plate P is moved to the front of the exposure area of the projection optical system PL by the substrate platform PST The movement (step movement), and on the one hand, the light beam from the light source device 30 is used to illuminate the mask M through the illumination optical system 13, and on the one hand, the mask M and the plate P are synchronized along X with respect to the projection optical system PL. It moves in the direction (scanning direction), and the image of the pattern of the mask M is exposed to the entire surface of one exposure area of the plate P (scanning exposure). Thereby, the image of the pattern of the mask M is transferred to each exposure and irradiation area of the plate P.

In addition, in order to perform alignment in advance during the exposure, for example, on the substrate stage PST Inside, an aerial image measuring unit 22 for detecting the position of the alignment mark formed on the mask M is provided, and on the side of the projection optical system PL, there is provided for detecting the alignment marks attached to each exposure area of the plate P The position of the alignment system 21. The detection signals of the aerial image measuring unit 22 and the alignment system 21 are supplied to the alignment signal processing system 16. The alignment signal processing system 16 processes the detection signals, for example, to obtain the alignment information of the mask M and the plate P The arrangement information of each exposure area is supplied to the main control system 14 with the obtained information. The main control system 14 performs the alignment of the mask M and the position control of the plate P during exposure based on the information. In this way, high registration accuracy is obtained during the coincidence exposure.

Next, the configuration of the light source device 30 of this embodiment and the replacement operation of the discharge lamp 1 using the light source device 30 will be described in detail.

Fig. 2 shows the discharge lamp 1 of the light source device 30 in Fig. 1. In Fig. 2, the discharge lamp 1 includes: a glass tube 25 composed of a valve portion 25a and two substantially symmetrical cylindrical rod-shaped portions 25b1 and 25c fixed to sandwich the valve portion 25a; a connecting portion 25b2 , Is set to cover the end of a rod-shaped portion 25b1; the lamp head 26 on the cathode side is connected to the end of the connecting portion 25b2; the cover portion 25d is set to cover the middle portion of the other rod-shaped portion 25c; And the lamp head 28 on the anode side is connected to the end of the rod-shaped portion 25c. In the valve portion 25a, the anode EL1 and the cathode EL2 used to form the light-emitting portion are opposed and fixed, and the cathode EL2 and the anode EL1 are electrically connected to the lamp heads 26 and 28, respectively. The whole of the base 26 and most of the base 28 (except the sphere 27 described later) are formed of a metal (such as brass, etc.) with good electrical and thermal conductivity. The base 26, the glass tube 25, and the base 28 are arranged along a straight line connecting the central axis of the rod-shaped parts 25b1 and 25c of the glass tube 25 and passing through the center of the light-emitting part. The direction parallel to the straight line connecting the central axis of the rod-shaped portions 25b1 and 25c is the longitudinal direction L of the discharge lamp 1. In addition, the cover part 25d and the connection part 25b2 do not necessarily need to be provided. In this case, the base 26 may be connected to the end of the rod-shaped portion 25b1.

The bases 26 and 28 are basically used as power receiving terminals for supplying power to the cathode EL2 and the anode EL1 from the power supply unit 20 of FIG. 1 via the power cables 23 and 24. In addition, the base 26 is also used as a supported portion for supporting the glass tube 25 (discharge lamp 1) by the supporting member 33 (refer to FIG. 4(B)). Furthermore, both the lamp head portions 26 and 28 are formed with concave and convex portions (portions with increased surface area) for efficiently dissipating the heat conducted from the glass tube 25.

Furthermore, the lamp head 26 on the cathode side is sequentially formed from the connecting portion 25b2 to the open end side: a ring-shaped flange portion 26a (a predetermined portion of the contact portion and the position in the longitudinal direction L), the outer diameter of which is the connecting portion The outer diameter of the part 25b2 is about twice; the cylindrical shaft part 26b (the fitting part or the predetermined part of the position), the outer diameter is slightly larger than the outer diameter of the connecting part 25b2; the cylindrical small diameter part 26f (step part), The outer diameter is smaller than the shaft portion 26b; and the cylindrical fixing portion 26h, the outer diameter is slightly smaller than the shaft portion 26b or the outer shape is approximately the same as the shaft portion 26b. A chamfered portion (not shown) may be formed at the boundary portion between the shaft portion 26b and the small diameter portion 26f. A chamfered portion 26i is formed on the open end side of the fixed portion 26h, and a rod-shaped guide portion 26j having a smaller diameter than the small diameter portion 26f is formed on the end of the fixed portion 26h. In addition, the outer shape of the cylindrical shaft portion 26b may be substantially the same as the outer shape of the rod-shaped portion 25b1. The small diameter portion 26f is formed by providing a recessed portion (step portion) in a direction intersecting the longitudinal direction L of the discharge lamp 1 between the shaft portion 26b and the fixed portion 26h.

When the discharge lamp 1 is placed on the support member 33 of FIG. 4(B), the flange portion 26a abuts against the stepped portion surrounding the opening in the center of the support member 33, and becomes the longitudinal direction L( As a reference for positioning in the first direction), the shaft portion 26b fits into the opening and becomes a reference for positioning in a plane orthogonal to the longitudinal direction L of the light-emitting portion.

Furthermore, 26 g of pressed surfaces are formed in the small diameter part 26f of the fixed part 26h. The pressed surface 26g is a plane perpendicular to the longitudinal direction L. The driving unit 34 of FIG. 4(B) includes: a rod 38, when the discharge lamp 1 is supported by the supporting member 33, the fixed portion 26h (the pressed surface 26g) of the lamp head 26 is given potential energy downward (-Z direction); The extension coil spring 39 rotates the rod 38 counterclockwise in the direction in which potential energy is applied to the fixing part 26h; and the driving part 40, such as an air cylinder or an electromagnetic cylinder, makes the rod 38 clockwise in order to release the fixing of the rod 38 to the lamp head 26 Rotate. When the discharge lamp 1 is fixed and supported on the supporting member 33, the clockwise rotation of the rod 38 by the driving part 40 can be released. When the discharge lamp 1 is taken out from the supporting member 33, the driving part 40 makes the rod member 38 Rotate clockwise. In addition, as the drive unit 34, the mechanism described in the International Publication No. 2007/066947 manual can also be used.

The heat generated in the discharge lamp 1 flows through the base 26 to the support member 33 having a large surface area and a large heat capacity, so that the temperature rise of the discharge lamp 1 is suppressed. In addition, in order to improve the cooling effect of the discharge lamp 1, the air blowing device (not shown) may also send the cooled gas into the opening of the supporting member 33 of FIG. 4(B) into which the fixing portion 26h of the lamp head 26 is inserted.

In FIG. 2, as an example, a spiral groove portion (not shown) may be formed on the surface of the shaft portion 26b of the base portion 26 from the flange portion 26a to the small diameter portion 26f. By supplying, for example, a gas for cooling to the groove from the outside, the cooling effect of the discharge lamp 1 can be improved.

In addition, in the flange portion 26a of the base portion 26, as an example, two openings AP1 and AP2 (positioning portions) are formed at 90° intervals (the opening AP2 is not shown). Corresponding to this, two pins (not shown) are provided on the surface on which the flange portion 26a of the support member 33 of FIG. 4(B) is placed. When the discharge lamp 1 is placed on the supporting member 33, by inserting these two pins into the opening AP1 of the flange portion 26a, etc., positioning around the axis along the longitudinal direction L of the discharge lamp 1 is performed. These openings AP1, etc. and The relative angle of the lamp head 28 on the anode side is set to an angle (predetermined angle) at which the lamp head 28 and the power cable 24 are easily connected.

In addition, the shape of the lamp head 26 on the cathode side is arbitrary. As the base 26, for example, a member may be used that includes only the flange portion 26a and the shaft portion 26b, and the shaft portion 26b is formed with a recess into which the front end portion of the rod 38 of the drive unit 34 can be inserted.

In Fig. 2, the lamp head 28 on the anode side is provided with the open end side of the rod-shaped portion 25c of the glass tube 25 of the discharge lamp 1 in sequence: a heat dissipation portion 28i formed with a plurality of diameters larger than the diameter of the rod-shaped portion 25c Ring-shaped radiating fin 28j; the gripped portion 28e (holding portion) with a spherical shape; and the non-axisymmetric terminal portion 28a (connected portion) with a substantially triangular column shape (refer to Figure 3(A)), Two flat V-shaped flat portions 28b and 28c are formed.

Fig. 3(B) shows the lamp head 28 on the anode side of the discharge lamp 1 of Fig. 2 in an unused state, and Fig. 3(C) shows the lamp head 28 on the anode side of the discharge lamp 1 in a state in which the discharge lamp 1 is used. 3(A) is a cross-sectional view taken along line AA of Fig. 3(B). In FIG. 3(A), a planar portion 28d is formed to connect two symmetrically (V-shaped) inclined planar portions 28b, 28c of the terminal portion 28a, and a planar portion 28d is formed between the planar portions 28b, 28c, and The flat surface portion 28d has a narrow chamfered portion 28a4 formed in parallel.

In FIG. 3(B), the upper end portion of the portion including the heat dissipation portion 28i of the lamp cap 28 and the gripped portion 28e is fixed to the glass tube 25 of the discharge lamp 1 by, for example, a plurality of bolts (not shown) The connecting portion 25d at the end of the rod-shaped portion 25c. In addition, a circular convex portion 28e2 is provided in the center of the circular concave portion 28e1 formed at the upper end of the grasped portion 28e. Furthermore, in the concave portion 28e1, the flange portion 29e of the accommodating portion 29 having a substantially cylindrical shape and provided with a ring-shaped flange portion 29e at the lower end is placed so as to surround the convex portion 28e2, and is provided so as to cover In Containment Department 29 In the form of the circular opening 29b in the center of the upper part 29a, a spherical body 27 having a high sphericity and a thermal expansion coefficient smaller than the thermal expansion coefficient of the receiving portion 29 is placed. The size of the interior of the receiving portion 29 is such that the sphere 27 can be displaced to a certain extent in the longitudinal direction of the discharge lamp 1 and a plane orthogonal to the longitudinal direction. The diameter of the opening 29b is determined in such a way that the diameter of the opening 29b is smaller than the diameter of the sphere 27 at the temperature (approximately normal temperature) when the discharge lamp 1 is stored, and the lamp heads 26 and 28 of the discharge lamp 1 are energized to discharge In the state where the lamp 1 emits light and the temperature of the discharge lamp 1 rises (the use of the discharge lamp 1 lasts for several hours, for example), the diameter of the opening 29b becomes larger than the diameter of the sphere 27 due to the thermal expansion of the receiving portion 29. Thereby, in a state where the discharge lamp 1 is used, for example, for several hours or more, as shown in FIG. 3(C), the sphere 27 is accommodated in the receiving portion 29 through the opening 29b. As an example, the sphere 27 is, for example, a ceramic ball having a very low thermal expansion coefficient, and the receiving portion 29 is made of metal such as stainless steel or aluminum alloy. In addition, the ball 27 may also be formed of an alloy with a low expansion rate such as nickel steel.

Moreover, in FIG. 3(B), the terminal portion with a substantially triangular column shape and a circular flange portion 28a3 provided at the lower end is placed so as to cover the receiving portion 29 and the sphere 27 located on the upper portion of the receiving portion 29. 28a. The inner surface of the terminal portion 28a is a cylindrical shape obtained by slightly increasing the outer shape of the receiving portion 29, and the gap between the upper end of the inner surface of the terminal portion 28a and the ball 27 is set to be small so that the ball 27 does not self-contain The opening 29b of the portion 29 falls off. The flange portion 29e of the receiving portion 29 overlaps with the flange portion 28a3 of the terminal portion 28a. As an example, the flange portions 29e and 28a2 are fixed to the recessed portion 28e1 of the grasped portion 28e at multiple locations with bolts BA1, thereby, The receiving portion 29 and the terminal portion 28a are fixed to the grasped portion 28e. In addition, for convenience of description, illustration of the flange portions 29e and 28a2 is omitted in FIG. 3(C).

And, along the plane part 28d parallel to the terminal part 28a and pass through the accommodating part 29 The straight line of the central axis is opposite to the side surface of the receiving portion 29, and two circular openings 29c and 29d with a diameter smaller than that of the sphere 27 are formed in the flat portion 28d and the chamfered portion 28a4 including the terminal portion 28a. In the area, circular openings 28a1 and 28a2 having substantially the same diameter as the openings 29c and 29d are formed so as to face the openings 29c and 29d, respectively. Regarding the heights of the openings 29c and 29d, when the ball 27 passes through the opening 29b and falls into the interior of the receiving portion 29 (the upper surface of the grasped portion 28e), the centers of the openings 29c, 29d are approximately the same as the center of the ball 27 It is set that the gap between the inner surface of the receiving portion 29 and the sphere 27 is set to, for example, about 5% to 30% (for example, about 10%) of the diameter of the sphere 27 that the sphere 27 can move.

Furthermore, as shown in FIG. 4(B), a first detection device 94A is arranged above the turntable 79 on which the discharge lamp 1 is placed in the storage portion 54. The first detection device 94A has: a terminal portion for the discharge lamp 1 The center of the opening 28a1, 28a2 of 28a (and the opening 29c, 29d of the receiving portion 29) irradiates the irradiation portion 94Aa of the beam LB1, and it is detected that the sphere 27 has not fallen into the receiving portion 29 through the openings 28a1, 28a2 The light receiving part 94Ab of the light beam LB1 of, 29c, 29d, and the detection signal of the light receiving part 94Ab are supplied to the light source control system 32. Since the light receiving unit 94Ab cannot detect the light beam LB1 when the ball 27 has not fallen into the receiving portion 29, the first detection device 94A is used to detect whether there is the ball 27 in the receiving portion 29, that is, whether the discharge lamp 1 has been used or not. used. That is, by changing the state of the sphere 27 with respect to the receiving portion 29, it is possible to detect whether the discharge lamp 1 has been used or not. In addition, the accommodating portion 29 and the sphere 27 can be said to be a device to be inspected for detecting whether the discharge lamp 1 is used or unused. Furthermore, since the ball 27 moves in the housing part 29, it can be said that it is a movable part.

In addition, a second detection device 94B is provided under the turntable 79 of the storage portion 54. The second detection device 94B includes a fixing portion 26h for the base portion 26 of the discharge lamp 1 The irradiating part 94Ba of the light beam LB2 at a position near the center, and the light receiving part 94Bb that detects the light beam LB2 passing through the position without the discharge lamp 1, the detection signal of the light receiving part 94Bb is supplied to the light source control system 32 . In the state where there is the fixed portion 26h in the optical path of the light beam LB2, the light receiving portion 94Bb cannot detect the light beam LB2. Therefore, the second detection device 94B can be used to detect whether the discharge lamp 1 is present at a predetermined position of the turntable 79.

Furthermore, the base 28 of the present embodiment is provided on the rod-shaped portion 25c of the glass tube 25 by bolts (not shown) provided in the plurality of openings (not shown) of the recessed portion 28e1 of the grasped portion 28e. The end portion is connected to a metal connection portion 25d electrically connected to the anode EL1. Therefore, the base 28 can be removed after the discharge lamp 1 is used, and the removed base 28 can be reused when a new discharge lamp 1 is manufactured. In addition, the lamp head 28 may also be integrated with the glass tube 25 by adhesion, welding, or the like.

Fig. 5 shows a state in which the power cable 24 is connected to the lamp base 28 on the anode side. In FIG. 5, a metal (conductive) member (hereinafter referred to as a power supply block) 66 is connected to the end of the power cable 24, which is formed at the same angle as the flat portions 28b, 28c of the terminal portion 28a of the base 28 V-shaped groove portion 66a. Furthermore, the power supply block 66 is fixed to the lower end of the L-shaped reference rod 67, the L-shaped drive rod 69 is rotatably connected to the reference rod 67 via the connecting pin P51, and the lower end of the drive rod 69 is rotatably fixed via the connecting pin P52. There is a roller 70. The roller 70 is pressed against the flat surface part 28d on the opposite side of the flat surface parts 28b and 28c of the terminal part 28a of the base part 28. As shown in FIG. In addition, a concave portion (not shown) having a size capable of accommodating the roller 70 may be formed in the flat portion 28d.

When connecting the power supply block 66 to the terminal portion 28a as described later, in order to reduce the stress applied to the discharge lamp 1 as much as possible (in order to increase the flexibility of the reference rod 67 and the drive rod 69), and to reduce The amount of shading of the light gathered by the elliptical mirror 2, and as much as possible the reference rod 67 and The drive rod 69 is formed thin. In addition, in FIG. 5, the reference rod 67 is formed by connecting the two ends of two L-shaped members (the other end is not shown), but the reference rod 67 may be formed of one L-shaped member.

The power supply block 66, the reference rod 67, and the drive rod 69 constitute the clamping mechanism 52. The other end sides of the reference rod 67 and the drive rod 69 are each formed to be elongated as shown in FIG. 4(B). In a state where the groove portion 66a of the power supply block 66 is pressed against the flat portions 28b, 28c of the terminal portion 28a of the lamp head 28, the roller 70 at the front end of the drive rod 69 is pressed against the terminal portion 28a. The flat portion 28d rotates the drive rod 69 counterclockwise around the connecting pin P51 (fulcrum), whereby the terminal portion 28a can be stably sandwiched between the roller 70 and the power supply block 66 with a strong force using the principle of leverage. In this state, the power (current) of the power cable 24 is supplied to the lamp head 28 via the power supply block 66 with a small resistance, so that the loss of power is reduced. In addition, when the power cable 24 (power supply block 66) is removed from the base 28 (terminal portion 28a), the drive rod 69 may be rotated clockwise.

The terminal portion 28a of the base 28 can reduce the resistance (contact resistance) between the terminal portion 28a and the power supply block 66 by the V-shaped planar portions 28b and 28c. In addition, the roller 70 may not be provided at the front end of the driving rod 69, and the front end of the driving rod 69 may be shaped as an arc, and the arc-shaped part may be pressed against the flat surface 28d.

Moreover, the shape of the terminal portion 28a of the lamp base 28 on the anode side is not limited to the shape shown in FIG. 2(B), and the cross-sectional shape may be a quadrilateral or polygonal shape.

In addition, in FIGS. 4(A) and (B), etc. referred to below, for the convenience of description, the shapes of the lamp caps 26 and 28 of the discharge lamp 1 are simplified and shown.

Next, FIG. 4(A) is a plan view showing the inside of the lampshade 31 and the housing 51 of the light source device 30 of FIG. 1, and FIG. 4(B) is a side view of the light source device 30 of FIG. 4(A). In addition, the figure 4(A), (B) and FIGS. 6(A), (B), etc. referred to below, the lampshade 31, the housing 51, the supporting member 33 supporting the discharge lamp 1 and the like, the extraction portion 36, etc. are shown in cross section.

In FIGS. 4(A) and (B), the lampshade 31 is divided into a lower cover 31A that houses the discharge lamp 1, and an upper cover 31B that houses the mirror 3 and has a window member 4 on its side. On the adjacent surfaces of the covers 31A and 31B, there is provided an opening 31Ab for the light from the discharge lamp 1 to pass through, and on the side of the lower cover 31A in the +X direction, it is provided for the replacement of the discharge lamp 1 The opening 31Aa through which the discharge lamp 1 etc. pass. The housing 51 of the switching device 50 is provided on the side surface of the lower cover 31A in the +X direction, and the side surface of the housing 51 facing the opening 31Aa is provided with an opening 51a for the discharge lamp 1 to pass through.

A window 51b for carrying out and carrying in the discharge lamp 1 is provided on the side surface in the +X direction of the housing 51, and the window 51b is opened and closed by a door (hereinafter referred to as a lamp exchange door) 45. The housing 51 of the exchange device 50 and the lower cover 31A are connected by a connecting member (not shown) or the like so that the positional relationship does not deviate. A storage portion 54 for the discharge lamp 1 is provided near the window portion 51b at the end in the +X direction in the casing 51, and a lamp conveying system 56 is disposed on the upper part of the casing 51. Moreover, although not shown in the figure, the housing 51 is provided with an outside air extraction port and a filter for removing dust and the like from the extracted outside air.

Furthermore, a pair of guide portions 41 are provided on the two side surfaces in the Y direction of the lower cover 31A so as to face each other in parallel to the X direction, and a drawout portion is arranged along the guide portion 41 so as to be movable in the X direction 36. The discharge lamp 1 is supported on the central part of the drawing part 36 via the supporting member 33. In addition, as the guide member 41, for example, a telescopic (multi-stage) guide mechanism may be used. Furthermore, in the drawing portion 36, an elliptical mirror 2 is provided so as to surround the discharge lamp 1. The elliptical mirror 2 is provided with a circular opening 2a (refer to FIG. 4(A)) on the upper part of the lower cover 31A to cover the connection As for the clamping mechanism 52 of the lamp base 28 of the discharge lamp 1, a light-shielding member 42 having a shape like the side surface of a truncated cone is arranged. An opening (not shown) for the discharge lamp 1 and the clamping mechanism 52 to pass through is provided on the side surface of the light shielding member 42 in the +X direction when the discharge lamp 1 is exchanged.

In addition, the exchange device 50 has the drive unit 34 for the lamp cap 26 on the cathode side, the clamping mechanism 52 for the lamp cap 28 on the anode side, the storage unit 54, and the lamp conveying system 56, in addition to the extraction drive The unit 60 withdraws the extraction portion 36 from the lower housing 31A through the openings 31Aa and 51a to the housing 51 side; and the drive unit 72 performs clamping and releasing of the lamp head 28 by the clamping mechanism 52. As shown in FIG. 4(A), the extraction drive unit 60 has a guide member 61 on the bottom surface of the housing 51, which is closer to the -Y direction than a straight line passing through the center of the lower housing 31A and parallel to the X axis Side, is arranged along the X direction; the base 62 is arranged along the guide member 61 so as to be movable in the X direction; for example, the drive part 63 of the ball screw method, the belt drive method or the linear motor method, the base 62 is arranged along the X direction The guide member 61 is driven in the X direction; and the connecting member 43. The connecting member 43 protrudes from the end of the base 62 in the -X direction in the +Y direction and protrudes in the Z direction. The front end 62a is provided at the end of the +X direction and the center of the Y direction of the extraction portion 36. The protruding portion 36c is connected.

The drive part 63 of the extraction drive unit 60 is used to move the base 62 in the +X direction along the guide member 61, whereby the extraction part 36 in the lower cover 31A can be moved (extracted) to be supported by the extraction part The discharge lamp 1 of 36 enters the position in the housing 51. In addition, the extraction portion 36 is supported by the guide member 41, and the extraction portion 36 can move smoothly in the X direction along the guide member 41, so the load of the extraction portion 36 hardly acts on the base 62. Therefore, regarding the extraction drive unit 60, instead of using a mechanism using the guide member 61, a mechanism for moving the extraction portion 36 in the X direction by an air cylinder or the like may be used, for example.

Moreover, the extraction drive unit 60 includes: a drive unit 72 that drives the clamping mechanism 52 of the lamp head 28 of the discharge lamp 1; and a guide member 73 that is fixed on the upper surface of the base 62 and is slightly ( For example, about 15 degrees) clockwise inclined direction (hereinafter referred to as the retreat direction D of the clamping mechanism 52) (refer to FIG. 4 (A)) is arranged; the flat movable table 75 can be retreated through two sliders 74 The guide member 73 is movably mounted in the direction D; the drive unit 77 such as an air cylinder or an electromagnetic cylinder drives the movable table 75 with respect to the base 62 in the retreat direction D; and a support member 65 elongated in the Z direction is fixed to the movable table 75 above the surface. Furthermore, a relay member 64 elongated in the Z direction is fixed to the end of the upper surface of the movable table 75 in the -X direction, and the other end of the power cable 24 is connected to the upper portion of the relay member 64. In the central part of the direction, the other end of the power cable 23 connected to the supporting member 33 is connected through the opening provided in the drawing part 36. The power cables 23 and 24 are further connected to the power supply unit 20 in FIG. 1 via a flexible extension cable (not shown).

FIG. 7(A) shows the detailed structure of the clamping mechanism 52 and the drive unit 72. As shown in FIG. In Fig. 7(A), the end of the reference rod 67 of the clamping mechanism 52 in the +X direction passes through the shorter linear guide 71H, and can be moved along the movable direction D1 (single) parallel to the retreat direction D of Fig. 4(A) (Axial direction) is slightly movably supported on the upper end of the supporting member 65. Moreover, the drive unit 72 has: a tension coil spring 68, one end is fixed to the bottom near the end of the reference rod 67 in the +X direction, and the end of the drive rod 69 in the +X direction is attracted upward; and an air cylinder or electromagnetic One end of the driving part 76 such as a cylinder is fixed to the upper surface of the movable table 75, and the end of the driving rod 69 in the +X direction can be displaced downward (-Z direction). One end of the driving portion 76 is connected to the movable table 75 via a rotatable joint 76a. The front end of the movable element of the driving part 76 and the end of the driving rod 69 are connected via a rotatable joint 76b. As an example, a so-called U-shaped hook joint can be used as the joint 76a, and a so-called open-close joint can be used as the joint 76a. It is the joint 76b.

In the state of FIG. 7(A), since the driving part 76 does not apply force to the end of the driving rod 69, the tension coil spring 68 acts on the driving rod 69 counterclockwise with respect to the reference rod 67. Thereby, the roller 70 provided at the end of the drive rod 69 in the -X direction imparts the terminal portion 28a of the lamp head 28 with potential energy to the power supply block 66 side, so the terminal 28a can be stably held by the power supply block 66 and the roller 70. At this time, even if the distance between the movable table 75 and the discharge lamp 1 deviates from the target value, the deviation amount is offset by moving the reference rod 67 in the movable direction D1 through the linear guide 71H.

Next, when the clamping mechanism 52 clamps the terminal portion 28a, as shown in FIG. 7(B), the end portion of the driving rod 69 is attracted downward by the driving portion 76, and the roller 70 is moved to a lower position. The terminal portion 28a is at a high position. At this time, the position of the end of the driving rod 69 is close to the discharge lamp 1, and correspondingly, the driving part 76 is slightly rotated by the joint 76a, so the stress to deform the driving rod 69 does not act. In this state, the movable table 75 is moved along the retracting direction D in the direction indicated by the arrow A2 by the driving part 77 of FIG. 4(B), whereby the clamping mechanism 52 and the power cable 24 can be separated from the lamp head 28 .

In addition, the lamp transport system 56 includes three claws 86 that grip the gripped portion 28e of the lamp cap 28 on the anode side of the discharge lamp 1 from above, and a gripping claw opening and closing mechanism 85 that opens and closes the claws 86. A Z-axis drive mechanism 84 that grasps the discharge lamp 1 and moves up and down (in the Z direction), a rotary shaft 83 that makes the Z-axis drive mechanism 84 rotate around an axis parallel to the Z-axis, and supports the rotary shaft 83 on the housing 51 The top support 82.

Fig. 9(A) is a plan view showing a state where the gripped portion 28e of the lamp head 28 is gripped by three claws 86, and Fig. 9(B) is a side view of Fig. 9(A). When the discharge lamp 1 is grasped by the lamp conveying system 56, as shown in FIG. 9(A), it is arranged at the front end of the three claws 86 The concave surfaces respectively face the spherical surfaces of the grasped portion 28e to position the grasping pawl opening and closing mechanism 85. In this state, as shown in FIG. 9(B), the three claws 86 are moved (closed) in the center direction by the gripping claw opening and closing mechanism 85, and the three claws 86 are closed to the concave surface of the three claws 86 Until it comes into contact with the spherical surface of the grasped portion 28e. In addition, since the three claw portions 86 are respectively connected to the gripping claw opening and closing mechanism 85 via a spring mechanism (not shown) that can be displaced in the radial direction, the stress to deform the base portion 28 does not act. Moreover, in order to hold the lamp head 28 more stably, a convex portion (pin) may be provided on the inner surface of the claw portion 86, and a concave portion for receiving the convex portion may be provided in a corresponding portion of the gripped portion 28e.

In Figure 4 (A) and (B), the storage unit 54 includes: a turntable 79 that can rotate, and a plurality of used discharge lamps 1 and unused discharge lamps 1 (hereinafter referred to as discharge lamps 1N) are placed Four (6 in FIG. 4(A)) openings 79a (refer to FIG. 11) are provided concentrically; and a driving unit 80 that rotates the turntable 79. The number of openings 79a is the number of discharge lamps 1 and 1N that can be stored on the turntable 79, and the number of discharge lamps 1 and 1N that can be stored is arbitrary. As an example, the turntable 79 is formed of an insulating material with high heat resistance, such as synthetic resin. Insert the front end of the lamp base 26 on the cathode side of the discharge lamp 1 or 1N into the openings 79a, and the discharge lamp 1 or 1N is carried by its own weight through the flange portion 26a of the lamp base 26 (refer to FIG. 1(A)) Placed on the turntable 79.

As shown in FIG. 12, on the side surface of the turntable 79, corresponding to the plurality of openings 79a, a positioning member 87 having a recess in the center and a semicircular cross section is respectively provided, and a leaf spring portion 88 is arranged on the side surface of the turntable 79. The leaf spring portion 88 is provided with a convex portion that can be engaged with the concave portion of the positioning member 87 and can be deformed in the radial direction of the turntable 79. The turntable 79 is rotated about the rotation shaft 79b, and when the positioning member 87 is engaged with the plate spring portion 88 (elastic member), the rotation of the turntable 79 is stopped, whereby the position of the opening 79a can be reliably positioned in the discharge lamp 1 or 1N Yu and lamp The delivery position between the transport system 56.

Furthermore, as shown in FIG. 11, if necessary, a rotating part 96 for rotating the discharge lamp 1N is arranged at the delivery position of the discharge lamp 1 and 1N below the turntable 79. As an example, the rotating part 96 includes a cylindrical rotating part 95 that is rotatably connected to a support part (not shown) connected to the bottom surface; clamping parts 96A, 96B, 96C (the clamping part 96C is not shown) In order to fix the shaft 26b of the base 26 of the discharge lamp 1N inserted into the rotating part 95, the three driving parts 97A, 97B, and 97C (the driving part 97C is not shown) are radially opposite to the rotating part 95. Directional drive; a gear 98a that rotates the rotating portion 95; and a drive portion 98 that drives the gear 98a. An encoder (not shown) that detects the angle of rotation is provided in the rotating part 95, and the detection result of the encoder is supplied to the light source control system 32, and the light source control system 32 uses the detection result to control the driving parts 98 and 97A~ 97C drive capacity. Furthermore, a lifter (not shown) for retreating the entire rotating portion 96 below the base 26 is arranged, and normally the rotating portion 96 retreats below the base 26. The second detecting device 94B is arranged below the rotating part 96 in the state of FIG. 11, and the first detecting device 94A is arranged above the surface of the turntable 79 on the opposite side to the surface on which the rotating part 96 is located.

Hereinafter, an example of the operation when the discharge lamp 1 is exchanged using the exchange device 50 in the light source device 30 of the present embodiment will be described. This exchange operation is controlled by the light source control system 32.

First, before mounting the unused discharge lamp 1N in the exposure apparatus EX, when performing the energization test (light-emitting test) of the discharge lamp 1N, the lamp head 28 is directed so that the ball 27 does not fall into the receiving portion 29 In the lower state, the lamp heads 28 and 26 are energized. Then, after the energization is completed, the base 28 is directed downward until the temperature of the base 28 returns to the vicinity of normal temperature. Thereby, it is possible to prevent the discharge lamp 1N that is not substantially used from being judged as used.

First, as shown in Figure 4(A), the operator (not shown) opens the lamp exchange door 45 of the housing 51 of the exchange device 50, and inserts the lamp head 26 of the unused discharge lamp 1N into the turntable of the storage section 54 The opening 79a of 79 is installed on the turntable 79 through the flange portion 26a of the base 26 of the discharge lamp 1N (a supplement for the discharge lamp). The turntable 79 can be manually rotated when the power is off. As described with reference to FIG. 12, the turntable 79 is rotated in such a manner that the predetermined positioning member 87 is engaged with the leaf spring portion 88, thereby making it possible to manually rotate the turntable 79 Correctly set the rotation angle of the turntable 79.

In addition, as for the supplement of the discharge lamp, it is desirable to stop the power supply from the power supply unit 20 in FIG. 1 and perform it in a state where the discharge lamp 1 in the lower cover 31A of FIG. 4(B) is turned off. Among them, measures can also be implemented to prevent the light of the discharge lamp 1 in the lower cover 31A from leaking to the outside, and the turntable 79 is formed of an insulating material, so that the discharge lamp 1 can be lit between the turntable 79 and the turntable 79. Perform lamp exchange. As an example, in FIG. 4(A), six discharge lamps 1, 1N can be placed (supplemented) on the turntable 79, and in order to recycle the used lamps, a gap is formed in the turntable 79. 4(A) and (B) show a situation where the discharge lamp 1 is placed in the lampshade 31, and therefore, five discharge lamps 1N are placed in the turntable 79. Then, the lamp exchange door 45 is closed.

After that, when the cumulative use time of the discharge lamp 1 reaches the allowable time, the light source control system 32 sends the information of the intention to the main control system 14, and the main control system 14 stops the exposure operation of the exposure device EX. Then, the light source control system 32 stops the power supply from the power supply unit 20 to the discharge lamp 1 and turns off the discharge lamp 1, and then activates the exchange device 50 to exchange the discharge lamp 1 with the discharge lamp 1N stored in the storage unit 54.

That is, first, in FIG. 4(B), the extraction portion 36 that integrally supports the discharge lamp 1 and the elliptical mirror 2 in the lamp cover 31 is extracted to the +X side by the extraction drive unit 60 as shown by the arrow A1. To the established position. As a result, the extraction part 36 is extracted to the position shown in FIG. 6(B). At this time, together with the drawing portion 36, the clamping mechanism 52, the relay member 64, and the drive unit 72 are also integrally drawn out to the inside of the housing 51 in the +X direction. In addition, FIG. 6(A) is a plan view showing a part of the drawing portion 36 and the exchange device 50 of FIG. 6(B) in a cross-sectional form. In addition, in FIGS. 8 and 10(B) referred to below, in order to avoid the intricacies of the drawings, part of the illustration of the plurality of discharge lamps 1N is omitted.

Next, as described with reference to FIG. 7(B), the drive rod 69 of the clamping mechanism 52 is pulled downward by the drive part 76 of the drive unit 72, so that the terminal part of the base 28 of the discharge lamp 1 is pulled with a strong force. The roller 70 pressed to the power supply block 66 by 28a rotates about the connecting pin P51 (fulcrum) as an axis, and is separated from the terminal portion 28a so that the roller 70 is located at a higher position than the terminal portion 28a. Then, the movable table 75 supporting the clamp mechanism 52 and the driving part 76 is retracted in the direction indicated by the arrow A2 in the retracting direction D by the driving part 77 (refer to FIG. 4(B)). At this time, the roller 70 passes above the lamp head 28.

Thereafter, as shown in FIG. 8, the rod 38 is rotated clockwise by the driving part 40 of the driving unit 34 to release the clamping of the fixing part 26h of the lamp cap 26 on the cathode side. Thereby, the lamp head 26 can be drawn from the supporting member 33. In addition, in order to avoid the intricacies of the drawings, the illustration of the driving unit 34 for the lamp head 26 is omitted in FIG. 10(B) and the like referred to below.

Next, the rotating shaft 83 of the lamp conveying system 56 is rotated to move the gripping claw opening and closing mechanism 85 above the base 28 of the discharge lamp 1. Then, as indicated by arrow A3, the gripping claw opening and closing mechanism 85 is lowered by the Z-axis drive mechanism 84 of the lamp conveying system 56, and the gripping claw opening and closing mechanism 85 is closed by closing the three claws 86 on the bottom surface to grip The gripped portion 28e of the base 28 (refer to FIG. 9(B)). Thereafter, as shown by the arrow A5 in FIG. 10(B), by the Z-axis drive mechanism 84, The claw 86 holding the discharge lamp 1 is raised. At this time, the discharge lamp 1 is raised until the lower end of the lamp cap 26 on the cathode side of the discharge lamp 1 is higher than the upper surface of the extraction portion 36 (that is, the position higher than the upper surface of the elliptical mirror 2).

Thereafter, as shown by arrow A6 in Fig. 10(A), the rotating shaft 83 rotates the gripping claw opening and closing mechanism 85 holding the discharge lamp 1 by about 180 degrees to move the discharge lamp 1 to the top of the turntable 79 . At this time, the drive unit 80 of the storage unit 54 rotates the turntable 79 to move the vacant opening 79a of the turntable 79 below the gripping claw opening and closing mechanism 85 (discharge lamp 1). In this state, the gripping claw opening and closing mechanism 85 is lowered, the front end of the lamp base 26 of the discharge lamp 1 is accommodated in the opening 79a, and then the claw 86 is opened, whereby as shown in FIG. 11, the used discharge lamp 1 is Placed on the turntable 79 at position A7. In this stage, the rotating part 96 is retracted below the lamp base 26 by the lifting part (not shown).

The replacement operation of the subsequent discharge lamp will be described with reference to the flowchart of FIG. 13. First, in FIG. 11, the gripping claw opening and closing mechanism 85 of the lamp conveying system 56 is raised. Then, in step 202 of FIG. 13, using the second detection device 94B, it is confirmed whether there is the lamp head 26 on the cathode side of the discharge lamp 1 (whether the discharge lamp 1 is located at the position A7). In this stage, since there is the lamp head 26, the operation moves to step 204, and the first detection device 94A is used to confirm whether the light beam LB1 passes through the openings 28a1, 28a2 of the lamp head 28 on the anode side (whether the discharge lamp 1 has been used and the lamp head Whether the sphere 27 of the part 28 falls into the receiving part 29).

Furthermore, when the light beam LB1 cannot be detected, as an example, the rotating part 96 is raised, and the discharge lamp 1 is rotated within a range of about ±60 degrees while the light receiving part 94Ab continues to detect the light beam LB1. In addition, the rotation angle of the discharge lamp 1 is set in advance by an operator with an accuracy of about ±30 degrees with respect to the target angle. Then, the light can be detected under a certain rotation angle In the case of the beam LB1, the angle of the discharge lamp 1 is set to the rotation angle at which the amount of light detected by the light receiving portion 94Ab is the maximum. Then, the rotating part 96 is retracted downward. In addition, the angles of the lamp conveying system 56 and the discharge lamps 1 and 1N placed on the turntable 79 by the operator are set to the target angle (in the case of the unused discharge lamp 1N, the light beam LB1 detected by the light receiving unit 94Ab When the light intensity is approximately the maximum angle), the operation of correcting the rotation angle of the discharge lamp 1, 1N can be omitted.

In this stage, since the discharge lamp 1 is used and the light beam LB1 is shielded by the sphere 27, the light source control system 32 can confirm that the discharge lamp 1 is used. After that, it is confirmed whether the turntable 79 is rotated by 360 degrees (step 212). When the turntable 79 is not rotated by 360 degrees, in step 214, the turntable 79 is rotated by 60 degrees, for example, to move to step 202. Here, for the convenience of description, the discharge lamp 1N set at the position A9 is moved to the optical path of the light beams LB1 and LB2 of the detection devices 94A and 94B.

Then, it is confirmed whether there is the base 26 of the discharge lamp 1N (step 202), and it is confirmed whether the light beam LB1 passes through the openings 28a1, 28a2 of the base 28 (step 204). When the light beam LB1 cannot be detected at this time, the rotating part 96 may be raised to rotate the discharge lamp 1N in such a way that the light quantity of the detected light beam LB1 is maximized. Here, since the discharge lamp 1N is not used and the sphere 27 does not shield the light beam LB1, the light source control system 32 can confirm that the discharge lamp 1N is not used. Thereafter, the operation proceeds to step 206, and the discharge lamp 1N is transported to the supporting member 33. Then, in step 202, the operation proceeds to step 212 when there is no lamp head 26 on the cathode side. Moreover, in step 212, even if the turntable 79 is rotated 360 degrees, when the unused discharge lamp 1N cannot be confirmed, the process proceeds to step 216, and the operator requests to replenish the discharge lamp 1N.

In step 206, the gripping claw opening and closing mechanism 85 is lowered again, and the gripping claw opening and closing mechanism 85 is raised after the gripping portion 28e of the base 28 of the unused discharge lamp 1N is gripped by the claws 86. Then, by the opposite action to when the discharge lamp 1 is carried out, as shown in Fig. 10(A) As shown by the broken line arrow B1, the gripping claw opening and closing mechanism 85 is rotated by about 180 degrees by the rotating shaft 83, as shown by the broken line arrow B2 in Fig. 10(B), which opens and closes the gripping claw of the discharge lamp 1N The mechanism 85 is lowered, and the lamp base 26 on the cathode side of the discharge lamp 1N is placed on the supporting member 33. Thereafter, as shown by the dotted arrow B3 in FIG. 8, the gripping pawl opening and closing mechanism 85 is raised, and as shown in FIG. 6(B), the lamp base 26 on the cathode side is clamped to the supporting member 33 by the driving unit 34 .

Furthermore, by the driving part 77 of FIG. 8, as shown in FIG. 7(B), the movable table 75 supporting the clamp mechanism 52 is moved in the direction indicated by the arrow B4 along the retreat direction D (the direction close to the discharge lamp 1N) Move so that the power supply block 66 abuts against the terminal portion 28a of the base portion 28 of the discharge lamp 1N. After that, the driving part 76 squeezes the movable part (in the case of an air cylinder, by gradually weakening the attractive force), the force of the tension coil spring 68 causes the driving rod 69 to rotate around the connecting pin P51, and the roller 70 and The terminal portion 28 a contacts and strongly presses the terminal portion 28 a to the power supply block 66. As a result, power can be supplied to the base 28 on the anode side without power loss.

At this time, the lamp head 26 on the cathode side of the discharge lamp 1N is fixed to the supporting member 33 by the drive unit 34 (refer to FIG. 6(B)), and therefore, if the position of the power supply block 66 in the retreat direction D is fixed, If the position of the power supply block 66 is shifted with respect to the lamp base 28 on the anode side, a large force may be applied to the discharge lamp 1N and the discharge lamp 1N may be damaged. In order to prevent this, in this embodiment, as shown in FIG. 7(A), the reference rod 67 on which the power supply block 66 is mounted can be moved in the direction D1 (in the radial direction with respect to the discharge lamp 1N) by the linear guide 71H. Therefore, the positioning error of the power supply block 66 can be corrected (absorbed). In addition, as an error absorbing mechanism, for example, the movable table 75 may be freely moved in the direction D1.

Moreover, the clamping mechanism 52 for the lamp head 28 has low rigidity in the rotation direction of the drive rod 69 and the rotation direction (the direction of rotation around the axis parallel to the Z axis), and the reference rod 67 and /Or the drive rod 69 flexes to absorb the positioning error of the rotation direction and the rotation direction. Furthermore, the groove portion 66a (refer to FIG. 5), which is the contact surface of the power supply block 66 with the base 28, is a fixed V shape because the cross-sectional shape does not depend on the position in the Z direction. There will be no problem if the position in the Z direction is shifted between 66.

As shown in Fig. 6(B), if the clamping mechanism 52 completes the clamping of the power supply block 66 to the lamp head 28 of the discharge lamp 1N, the drive unit 60 is drawn out, as shown by the dotted arrow in Fig. 4(B) As shown in B5, the base 62 is moved in the -X direction, thereby returning the extraction portion 36 to its original position in the lower casing 31A. Thereby, the used discharge lamp 1 is exchanged with the unused discharge lamp 1N. After that, the discharge lamp 1N is turned on in the exposure apparatus EX to perform exposure (step 210).

In this way, according to the discharge lamp exchange method of this embodiment, the sphere 27 (movable body) is arranged in the terminal portion 28a of the base 28 of the discharge lamp 1. If the temperature of the base 28 rises during use of the discharge lamp 1, Then, the ball 27 falls into the receiving portion 29 through the opening 29b of the receiving portion 29 in the terminal portion 28a. Furthermore, if the discharge lamp 1 is placed on the turntable 79 of the storage part 54, the light beam LB1 of the first detection device 94A is shielded by the ball 27 in the terminal part 28a, so that it can be easily confirmed that the discharge lamp 1 is used. . Therefore, when the discharge lamp 1 is automatically exchanged with the unused discharge lamp 1N, it is possible to prevent the used discharge lamp 1 from being erroneously mounted on the support member 33 of the light source device 30 by mistake.

Furthermore, the exposure apparatus EX of this embodiment is equipped with the light source device 30 for making the discharge lamp 1 (exposure light source) emit light. In addition, the discharge lamp 1 includes a glass tube 25 (glass member) provided with an anode EL1 (first electrode) and a cathode EL2 (second electrode) forming a light-emitting part inside, and is provided so as to sandwich the glass tube 25 The base 28 (first base member) and base 26 (second base member) are provided in the base 28 with openings 28a1, 28a2, 29c, Through hole (opening) formed by 29d.

Furthermore, the light source device 30 includes a storage section 54 for storing the discharge lamp 1, a lamp transport system 56 (transporting section) for transporting the discharge lamp 1, and an irradiation section 94Aa ( Light transmitting part), detecting the light receiving part 94Ab of the light beam LB1 passing through the through hole, and using the detection result of the light receiving part 94Ab to obtain the light source control system 32 (control part) of the angle of the discharge lamp 1 as the state of the discharge lamp 1 .

According to this embodiment, for example, while the discharge lamp 1 is rotated, the angle of the discharge lamp 1 when the light quantity of the detected light beam LB1 is the largest is obtained, and thereby the angle of the discharge lamp 1 can be detected. Since this angle can be used, for example, the angle of the discharge lamp 1 can be set as a target angle. Therefore, when the discharge lamp 1 is not rotationally symmetrical, the discharge lamp 1 can be easily grasped by the lamp conveying system 56. Therefore, the discharge lamp 1 can be exchanged efficiently.

Furthermore, the exposure apparatus EX of the present embodiment includes the above-mentioned light source device 30, and an illumination optical system 13 (illumination system) that illuminates the mask M with light (exposure light IL) generated from the discharge lamp 1 of the light source device 30, And a projection optical system PL that projects the pattern image of the mask M to the plate P (substrate) based on the exposure light IL. According to the exposure apparatus EX, since the replacement time of the discharge lamp 1 can be shortened, the productivity of the exposure step can be increased.

In addition, the following modifications can be made in the above-mentioned embodiment.

First, in the above embodiment, the sphere 27 is arranged in the terminal portion 28a of the base 28 of the discharge lamp 1, but the sphere 27 may be omitted. In this case, the sphere 27 and the accommodating portion 29 may be omitted, and the terminal portion 28a may be formed in a substantially square column shape, and a through hole may be formed so as to pass through the same position as the opening 28a1, 28a2. The light beam LB1 from the first detection device 94A is irradiated to the through hole, and while the discharge lamp 1 is rotated, the light quantity of the light beam LB1 is detected by the light receiving portion 94Ab. The rotation angle of the discharge lamp 1.

Furthermore, in the above embodiment, the power cable 24 is used to supply power to the power supply block 66. As a method of supplying power to the power supply block 66 (discharge lamp 1), the power cable 24 may not be used, and the reference rod 67 and the power supply block 66 ( Conduction). In addition, in the power supply block 66, not only electric power can be supplied, but also compressed air for cooling the lamp head 28 can be supplied to the discharge lamp 1.

7 (A) of the clamping mechanism drive unit 72 is configured to open and close the reference rod 67 and the drive rod 69 of the clamping mechanism 52 up and down (in the Z direction), but it may also be configured to be left and right (with the discharge lamp 1 The length direction is perpendicular to the direction) to open and close. Accordingly, when the clamping mechanism 52 uses the driving portion 77 to move the clamping mechanism 52 in the X direction, there is no need to retract the roller 70 at the front end of the driving rod 69 to a position higher than the lamp head 28. That is, only the opening and closing actions of the clamping mechanism 52 are used, and there is no longer a component of the clamping mechanism 52 above the discharge lamp 1, and the discharge lamp 1 can be transported in the Z direction.

[Second Embodiment]

The second embodiment will be described with reference to FIGS. 14(A) to 15(B). The configuration of the lamp base on the anode side of the discharge lamp of this embodiment is different from that of the first embodiment. In addition, in FIGS. 14(A) to 15(B), parts corresponding to FIGS. 4(A) and (B) are denoted by the same reference numerals, and detailed descriptions thereof are omitted.

14(A) and (B) respectively show the base 28A on the anode side of the discharge lamp 1A of this embodiment, and the power supply socket 152 that detachably connects the base 28A and the power cable 24A. In Figure 14 (A) and (B), the anode side lamp head 28A includes a gripped portion 28Ae, a connecting portion 25d connected to the end of the rod-shaped portion 25c of the glass tube 25 of the discharge lamp 1A, and the outer surface is Spherical; the heat dissipating portion 28Ai is provided at the lower end of the gripped portion 28Ae so as to cover a part of the rod-shaped portion 25c, and has a plurality of ring-shaped radiating fins 28Aj; the terminal portion 28Aa is provided at the upper end of the grasped portion 28Ae; the cylindrical box-shaped receiving portion 29A is arranged in the terminal portion 28Aa and the grasped portion 28Ae; and the sphere 27, when the discharge lamp 1A is not in use, It is placed so as to cover the circular opening 29Ab provided in the center of the upper portion 29Aa of the receiving portion 29A, and has a thermal expansion coefficient lower than that of the receiving portion 29A. The terminal portion 28Aa has two cylindrical portions with gradually decreasing diameters toward the front end. A concave portion 28Ab is formed at the upper end of the substantially axisymmetric terminal portion 28Aa, and a mountain-shaped convex portion 28Ac is provided in the middle of the concave portion 28Ab.

The receiving portion 29A is arranged in a recess formed in the grasped portion 28Ae and the terminal portion 28Aa, and the receiving portion 29A is given potential energy toward the connecting portion 25d side by the compression coil spring SP1 on the terminal portion 28Aa side. The diameter of the opening 29Ab is determined in such a way that the diameter of the opening 29Ab is smaller than the diameter of the sphere 27 at the temperature when the discharge lamp 1A is stored, and the discharge lamp 1A is lit and the temperature of the discharge lamp 1A rises due to the housing The portion 29A thermally expands and the diameter of the opening 29Ab becomes larger than the diameter of the sphere 27. Thereby, when the discharge lamp 1A is used, the sphere 27 falls on the bottom 29Ae in the receiving portion 29A through the opening 29Ab. In addition, instead of providing the compression coil spring SP1, the space in which the receiving portion 29A is arranged (for example, in the terminal portion 28Aa) may be provided with a step so that the upper part is narrower than the lower part, and the lower surface of the step portion and the receiving portion 29A The receiving portion 29A is arranged in such a manner that the upper surface abuts, so that the receiving portion 29A cannot move upward. In this case, the space at the upper part narrower than the lower part may be of a size such that the sphere 27 can be arranged.

And, along a straight line that passes through the center axis of the glass tube 25 and the center of the receiving portion 29A (the center of the sphere 27 when there is a sphere 27 in the center of the bottom 29Ae) and is orthogonal to the longitudinal direction of the glass tube 25, it is grasped The portion 28Ae is provided with a circular through hole 28Ae1 having a diameter smaller than that of the sphere 27, and two circular openings 29Ac, 29Ad with a diameter smaller than that of the sphere 27 are formed on the side surface of the receiving portion 29A so as to face the through hole 28Ae1. The gap between the inner surface of the receiving portion 29A and the sphere 27 is set as The sphere 27 can move, for example, about 5% to 30% (for example, about 10%) of the diameter of the sphere 27.

When the discharge lamp 1A is not in use, the light beam LB1 is irradiated from the irradiation part 94Aa of the first detection device 94A through the center of the through hole 28Ae1 of the discharge lamp 1A and the openings 29Ac and 29Ad of the receiving part 29A, and the light receiving part 94Ab By detecting the light beam LB1 in the middle, it can be confirmed that the sphere 27 has not fallen into the receiving portion 29A, that is, the discharge lamp 1A is not in use. After the discharge lamp 1A is used, as shown in Fig. 14(B), the sphere 27 shields the light beam LB1 in the state where the sphere 27 has fallen into the receiving part 29A, and the light receiving part 94Ab cannot detect the light beam LB1, so the discharge can be confirmed Lamp 1A is used.

In addition, the power supply socket 152 has a small disc-shaped body portion 153, a connecting portion 154 provided on the bottom surface of the body portion 153 and capable of being closely attached to the upper portion (taper portion) of the concave portion 28Ab of the terminal portion 28Aa, and provided on the connecting portion 154 The convex portion 155 at the lower end, and a plurality of (for example, at least 4) spheres 157 provided on the convex portion 155 in a radial direction.

15(A) and (B) are cross-sectional views of the power supply socket 152, respectively. In FIG. 15(A), the main body 153 of the power supply socket 152 is formed by connecting the lower end 153A and the upper end 153B of the connecting portion 154 with bolts (not shown), etc., and is formed in the center of the lower end 153A The circular concave portion 153Aa has a small circular through hole 153Ab formed between the concave portion 153Aa and the lower end of the convex portion 155. In addition, the concave portion 153Aa accommodates the piston portion 158 for the cylinder, and the bottom surface of the piston portion 158 is connected to the bottom surface of the piston portion 158 through a through hole 153Ab, and a shaft portion 158b having a cylindrical shape and a concave portion 158a provided at the front end portion is connected to the bottom surface of the piston portion 158. In the recessed portion 153Aa, compressed and cooled gas (such as air) can be supplied through the pipe in the power cable 24A and the groove portion 153Ac in the main body portion 153. Between the lower end portion 153A and the piston portion 158, the piston The portion 158 is provided with a compression coil spring 160 to impart potential energy to the upper end portion 153B side, and is arranged between the concave portion 153Aa and the piston portion 158 to maintain airtightness. A flexible, flexible and movable sealing member (such as an O-ring) 159. In addition, the spheres 157 are respectively arranged in the plurality of openings 154a (refer to FIG. 15(B)) of the convex portion 155.

When the power supply socket 152 is attached to the terminal portion 28Aa of the lamp head 28A as shown in FIG. 14(B), as shown in FIG. 15(B), compressed gas is supplied to the piston portion 158 from the power cable 24A, so that the piston portion 158 It descends, and the spherical body 157 is accommodated in the recessed part 158a. Thereby, the ball 157 of the convex portion 155 can pass through the inner side of the convex portion 28Ac of the base 28A. Thereafter, the supply of compressed gas from the power cable 24A to the piston portion 158 is stopped, whereby the piston portion 158 rises, as shown in FIG. 14(B), the ball 157 is engaged with the convex portion 28Ac, and the power supply socket 152 is stably connected to The terminal portion 28Aa. When detaching the power supply socket 152 from the terminal portion 28Aa, the compressed gas may be supplied from the power cable 24A so that the piston portion 158 is lowered again.

In addition, in each of the above-mentioned embodiments, the first detection device 94A is arranged in the storage section 54. However, it is not limited to this. It may be substituted in the storage section 54 or in addition to the storage section 54 in the lampshade. A first detection device 94A is installed in 31. In this case, in order to avoid the influence of heat by the discharge lamp 1, it is preferable to arrange|position the irradiation part 94Aa and the light-receiving part 94Ab in the state covered with a heat insulating material etc. Furthermore, it is preferably arranged in the lampshade 31 as far away from the discharge lamp 1 as possible. By disposing the first detection device 94A in the lampshade 31 in this way, it is possible to detect whether the discharge lamp 1 is used or not immediately before lighting the discharge lamp 1. Furthermore, since it is possible to detect whether the sphere 27 has fallen during the lighting of the discharge lamp 1 (and the timing of the fall), it is possible to detect the state of the temperature of the discharge lamp 1, the rising speed of the temperature of the discharge lamp 1, and the temperature in the lamp cover 31 State or cooling state, etc. Moreover, it is also possible to detect an abnormality in the lampshade 31 based on the detection result. In addition, based on the detection result of the first detection device 94A provided in the lampshade 31, the replacement of the discharge lamp 1 or the implementation of reminding the replacement (including the display of the time to be implemented, etc.) may be implemented.

Next, various modifications of the discharge lamp that can be used in the exposure apparatus or light source apparatus of the above-mentioned first and second embodiments will be described. In addition, in the drawings used in the description of the following modification examples, the same or similar symbols are attached to the parts corresponding to FIGS. 3(B), 7(A), and 14(A) and (B). The detailed description is omitted.

Fig. 16(A) is a cross-sectional view of the lamp base 28A on the anode side of the discharge lamp 1B of the first modification. The discharge lamp 1B, with respect to the discharge lamp 1A of Fig. 14(A), is connected to the sphere 27 which is in contact with the contour of the opening 29Ab of the receiving portion 29A arranged inside the base 28, and the terminal portion 28Aa facing the sphere 27 Between the inner surfaces, a compression coil spring SP2 that imparts potential energy to the sphere 27 to the receiving portion 29A side is arranged. Furthermore, the receiving portion 29A is fixed to the connecting portion 25d side of the discharge lamp 1B by, for example, adhesive or the like. The other structure is the same as that of the embodiment shown in FIG. 14(A).

According to this modification, the sphere 27 uses the compression coil spring SP2 to impart potential energy to the opening 29Ab side of the receiving portion 29A. Therefore, even if the longitudinal direction of the discharge lamp 1B is parallel to the horizontal plane during the transportation or use of the discharge lamp 1B, the sphere 27 The location will not change. By installing the compression coil spring SP2, when the discharge lamp 1B is in use (when energized), when the temperature of the lamp head 28A rises, the diameter of the opening 29Ab of the receiving portion 29A becomes larger than the diameter of the sphere 27 due to thermal expansion, the sphere 27 It moves into the accommodating portion 29A through the opening 29Ab with certainty. Therefore, when the discharge lamp 1B is stored, the light beam LB1 of the detection device 94A is shielded by the sphere 27, so it is possible to reliably determine whether the discharge lamp 1B is in use regardless of the posture during conveyance and use of the discharge lamp 1B.

Furthermore, as shown in the discharge lamp 1C of the second modification of FIG. 16(B), the sphere 27 may also move in a direction (lateral direction) orthogonal to the longitudinal direction of the discharge lamp. In the discharge lamp 1C, the concave portion 28Af provided on the side surface of the gripped portion 28Ae of the lamp head 28A is provided with a cylindrical and A receiving portion 29B with a circular opening 29Bb is provided on the side wall portion opposite to the outer side of the grasped portion 28Ae. Furthermore, in the recessed portion 28Af, the cylindrical fixing portion 29C is fixed in contact with the receiving portion 29B, for example, with an endless belt-shaped fixing ring (not shown), and in the fixing portion 29C, the outline of the opening 29Bb is aligned. A ball 27 is then arranged, and a compression coil spring SP2 is arranged between the ball 27 and the inner surface of the side wall of the fixing portion 29C in a manner to impart potential energy to the opening 29Bb side of the ball 27. The diameter of the opening 29Bb is determined in such a way that the diameter of the opening 29Bb is smaller than the diameter of the sphere 27 at the temperature when the discharge lamp 1C is stored, and the discharge lamp 1C emits light while the temperature of the discharge lamp 1C rises. The portion 29B thermally expands and the diameter of the opening 29Bb becomes larger than the diameter of the sphere 27.

Moreover, two circular openings 29Bc and 29Bd with a diameter smaller than the sphere 27 for the light beam LB1 of the detection device 94A to pass through are formed on the side surface of the receiving portion 29B in the direction perpendicular to the paper surface of FIG. In the grasped portion 28Ae of the portion 28A, a through hole (not shown) through which the light beam LB1 passes is also provided in parallel with the straight line passing through the center of the opening 29Bc, 29Bd. The other structure is the same as that of the embodiment shown in FIG. 14(A).

In this modification, the sphere 27 uses the compression coil spring SP2 to impart potential energy to the opening 29Bb side of the receiving portion 29B. Therefore, even when the discharge lamp 1C is transported or used, the length direction of the discharge lamp 1C is parallel to the horizontal plane, or Parallel to the vertical direction, the position of the sphere 27 will not change. Therefore, when the discharge lamp 1C is used (when energized), when the diameter of the opening 29Bb of the receiving portion 29B becomes larger than the diameter of the sphere 27, the sphere 27 surely moves into the receiving portion 29B through the opening 29Bb. Therefore, when the discharge lamp 1C is next stored, the detection device 94A can reliably determine whether the discharge lamp 1C is in use regardless of the posture during transportation and use of the discharge lamp 1C.

Next, FIGS. 17(A) and (B) are cross-sectional views of the lamp base 28B on the anode side of the discharge lamp 1D of the third modification. In this modification, the sphere 27 moves step by step according to the usage time of the discharge lamp 1D. In Fig. 17(A), the lamp head 28B includes: a gripped portion 28Be connected to the connection portion 25d of the discharge lamp 1D and the outer surface is spherical; a plurality of ring-shaped radiating fins 28Bj (heat radiating portion) are arranged in The lower end of the grasped portion 28Be; and the substantially cylindrical terminal portion 28Ba is provided at the upper end of the grasped portion 28Be. A concave portion 28Bb is formed in the center of the terminal portion 28Ba, and a mountain-shaped convex portion 28Bc is provided in the middle of the concave portion 28Bb. The terminal part 28Ba is connected to the connection part 154 of the power supply socket 152 of FIG. 14(A) via the recessed part 28Bb and the convex part 28Bc.

In addition, a first cylindrical receiving portion 29A, a second cylindrical receiving portion 29D, and a spherical body 27 are arranged in the terminal portion 28Ba and the grasped portion 28Be in order to stack from the connecting portion 25d side. The accommodating portion 29A is fixed to the connecting portion 25d by adhesive or the like, and the accommodating portion 29D is fixed to the upper surface of the accommodating portion 29A by adhesive or the like. The accommodating parts 29A and 29B are respectively of sizes capable of accommodating the sphere 27, and the thermal expansion rate of the accommodating parts 29A and 29B is greater than that of the sphere 27. Furthermore, a circular opening 29Ab is formed on the partition wall above the receiving portion 29A of the lower stage, and a circular opening 29Db is formed on the partition wall above the receiving portion 29B of the upper stage with a larger diameter than the opening 29Ab.

At the temperature when the discharge lamp 1D is stored, the diameter d4 of the opening 29Db is smaller than the diameter of the sphere 27, and the diameter d3 of the opening 29Ab is smaller than the diameter d4. On the other hand, when the discharge lamp 1D is installed in the exposure device and the discharge lamp 1D is started to be energized, the discharge lamp 1D is caused to emit light, and the temperature of the discharge lamp 1D rises, for example, to approximately 1/2 of the maximum temperature (the first threshold ), the diameter d4 of the opening 29Db becomes larger than the diameter of the sphere 27 due to the thermal expansion of the receiving portion 29D, the sphere 27 can pass through the opening 29Db, and the diameter d3 of the opening 29Ab of the receiving portion 29A is still smaller than the diameter of the sphere 27, The ball 27 cannot pass through the opening 29Ab. Furthermore, the light emission (energization) of the discharge lamp 1D is continued, and when the temperature of the discharge lamp 1D rises to approximately the highest temperature, the diameter d3 of the opening 29Ab becomes larger than the diameter of the sphere 27 due to the thermal expansion of the receiving portion 29A. Through the opening 29Ab, the diameters of the openings 26Ab and 29Db can be determined in the above-mentioned manner.

And along the center axis of the glass tube 25 (refer to FIG. 2) passing through the discharge lamp 1D and the center of the accommodating parts 29A and 29D (the center of the sphere 27 when there is a sphere 27 in the center of the accommodating parts 29A, 29D), and A straight line perpendicular to the longitudinal direction of the discharge lamp 1D (glass tube 25) is provided with circular through holes 28Be1 and 28Be2 with a diameter smaller than the sphere 27 in the grasped portion 28Be and the terminal portion 28Ba, respectively. Furthermore, two circular openings 29Ac, 29Ad, 29Dc, 29Dd having diameters smaller than the spherical body 27 are formed on the side surfaces of the receiving portions 29A and 29D so as to face the through holes 28Be1 and 28Be2, respectively.

Furthermore, in the state where the discharge lamp 1D is placed on the turntable 79 of the storage section 54 of FIG. 4(B), above the turntable 79, as shown in FIG. 17(A), a first detection device 94A is arranged, and the first detection device 94A is arranged above the turntable 79. 1 The detection device 94A has an irradiating portion 94Aa that irradiates the center of the through hole 28Be1 of the discharge lamp 1D and the openings 29Ac and 29Ad of the receiving portion 29A with a light beam LB1, and a light receiving portion 94Ab that detects the light beam LB1. Furthermore, a second detection device 94C is arranged above the detection device 94A. The second detection device 94C has an irradiation portion 94Ca that irradiates the center of the through hole 28Be2 of the discharge lamp 1D and the openings 29Dc and 29Dd of the receiving portion 29D with the light beam LB3 , And the light receiving part 94Cb that detects the light beam LB3. The detection signals of the light receiving parts 94Ab and 94Cb are processed by the light source control system 32 described above. The other structure is the same as that of the embodiment shown in FIG. 14(A).

In this modification, when the discharge lamp 1D is not in use and the sphere 27 is in contact with the contour of the opening 29Db of the receiving portion 29D, the light beams LB1 and LB3 pass through the receiving portion 29A, 29D is detected by the light receiving parts 94Ab and 94Cb. In other words, when the light beams LB1 and LB3 can be simultaneously detected by the detection devices 94A and 94C, it can be confirmed that the sphere 27 is located above the receiving portion 29D and the discharge lamp 1D is not used.

On the other hand, when the discharge lamp 1D is installed in the exposure device, the discharge lamp 1D emits light and the temperature of the discharge lamp 1D rises to approximately 1/2 of the maximum temperature, due to the thermal expansion of the receiving portion 29D, as shown in Figure 17 (B As shown in ), the ball 27 moves into the receiving portion 29D through the opening 29Db. When the use of the discharge lamp 1D is interrupted in this state and the discharge lamp 1D is returned to the turntable 79 of the storage section 54, the light beam LB1 passes through the receiving section 29A and is detected by the light receiving section 94Ab, but the light beam LB3 is detected by the light receiving section 94Ab. The sphere 27 is shielded and cannot be detected by the light receiving portion 94Cb. In other words, when the light beam LB1 can be detected in the detection device 94A, but the light beam LB3 cannot be detected in the detection device 94B, it can be confirmed that the sphere 27 is located inside the receiving portion 29D, and the discharge lamp 1D has been used within a predetermined period of time (energized , Luminous).

In addition, when the discharge lamp 1D is mounted on the exposure device, the discharge lamp 1D is made to emit light, and the discharge lamp 1D is continuously used until the temperature of the discharge lamp 1D rises to approximately the highest temperature (the second threshold), the storage portion 29A Due to the thermal expansion, the ball 27 passes through the opening 29Ab and moves to the position PA1 shown by the dotted line in the receiving portion 29A. After that, when, for example, the use of the discharge lamp 1D has elapsed after a predetermined useable time, and the discharge lamp 1D is returned to the turntable 79 of the storage section 54, the light beam LB3 passes through the receiving section 29D and is detected by the light receiving section 94Cb , But the light beam LB1 is shielded by the sphere 27 in the receiving portion 29A, and is not detected in the light receiving portion 94Ab. In other words, when the light beam LB1 is not detected by the detection device 94A, but the light beam LB3 can be detected by the detection device 94B, it can be confirmed that the sphere 27 is located inside the receiving portion 29A, and the discharge lamp 1D has been used for a predetermined period of time. (For used).

According to this modified example, it is possible to determine how long the discharge lamp 1D has been used based on which of the accommodating portions 29A and 29D the detection sphere 27 is located. In addition, in this modified example, a compression coil spring (not shown) that imparts potential energy to the opening 29Db side of the accommodating portion 29D of the ball 27 may also be provided. In addition, the accommodating portions 29A and 29D may be formed of materials having different thermal expansion coefficients. The thermal expansion rate of the material forming the receiving portion 29D is higher than the thermal expansion rate of the material forming the receiving portion 29A. In this case, in a state where the discharge lamp 1D emits light and the temperature of the discharge lamp 1D rises to approximately 1/2 of the maximum temperature, for example, if the receiving portion 29D is deformed to the extent that the sphere 27 can pass, the receiving portion 29A is deformed. However, it is deformed to the extent that the sphere 27 cannot pass, the sphere 27 is contained in 29D. Furthermore, in a state where the discharge lamp 1D emits light and the temperature of the discharge lamp 1D rises to substantially the highest temperature, the receiving portion 29A is further deformed, and the spherical body 27 is received in the receiving portion 29A. By forming the accommodating portions 29A and 29D of materials having different thermal expansion coefficients as described above, it is possible to detect whether the discharge lamp 1D is used or not in stages. Moreover, when the accommodating portions 29A and 29D are formed of materials with different thermal expansion coefficients, the diameter of the opening 29Ab and the diameter of the opening 29Db may be formed with the same length. Moreover, when the difference in the thermal expansion coefficient is increased, the diameter of the opening 29Db may be made longer than the diameter of the opening 29Ab. In addition, the use of the discharge lamp 1D can be detected in two stages by providing the receiving portions 29A and 29D, and the use of the discharge lamp 1D can be detected in more than two stages by providing a plurality of receiving portions.

Next, FIG. 18(A) is a diagram showing a state in which the discharge lamp 1E of the fourth modification is held by the clamping mechanism 52 of FIG. 7(A), and FIG. 18(B) is a diagram showing the discharge lamp 1E of FIG. 18(A) An enlarged cross-sectional view of the lamp head 28C, FIG. 18(C) is a cross-sectional view of the terminal portion 28Ca of FIG. 18(B). In this modification, elastic deformation of a predetermined member is used instead of thermal expansion of the predetermined member to move the ball 27.

In FIG. 18(A), the base 26 on the cathode side of the discharge lamp 1E is supported by the support member 33, and the terminal 28Ca of the base 28C on the anode side of the discharge lamp 1E is fed to the power supply block by the roller 70 of the clamping mechanism 52 The 66 side gives potential energy and supports.

As shown in FIG. 18(B), in the terminal portion 28Ca of the discharge lamp 1E, a circular opening 28Ch having a diameter smaller than that of the sphere 27 is formed in a portion opposed to the roller 70. Moreover, inside the terminal portion 28Ca, a U-shaped cutout portion 29Aa is formed as shown in FIG. 18(D) and a thin flat plate-shaped restricting member 29A that can be elastically deformed is fixed to the grasped portion in parallel with the opening 28Ch On the upper surface of 28Ce, a sphere 27 is arranged between the opening 28Ch and the notch 29Aa. The restriction member 29A may be formed of steel, for example. Furthermore, to the upper surface of the gripped portion 28Ce on the center direction side of the terminal portion 28Ca with respect to the restricting member 29A, an inclined member 29B that is inclined so as to gradually decrease from the side of the cutout portion 29Aa of the restricting member 29A is fixed. Furthermore, two openings 28Cf, 28Cg for the light beam LB1 of the detection device 94A shown in FIG. 18(C) to pass through are formed on the two side surfaces of the terminal portion 28Ca in a direction perpendicular to the paper surface of FIG. 18(B) .

In this modification, in a state where no external force is applied to the restricting member 29A, the maximum width d5 of the cutout portion 29Aa of the restricting member 29A is predetermined to be smaller than the diameter of the sphere 27. Therefore, in the state where the discharge lamp 1E is not held by the clamping mechanism 52 (the roller 70 is not in contact with the ball 27), the maximum width d5 of the cut portion 29Aa is smaller than the diameter of the ball 27, and the ball 27 is arranged in the opening 28Ch and the cut portion Between 29Aa, the light beam LB1 of the detection device 94A can pass through the openings 28Cf and 28Cg of the terminal portion 28Ca. Therefore, it can be confirmed that the discharge lamp 1E is not in use based on the detection signal of the detection device 94A.

On the other hand, in the state where the discharge lamp 1E is held by the clamp mechanism 52 (the state where the roller 70 is in contact with the ball 27), the ball 27 is given potential energy toward the restricting member 29A side, because By the elastic deformation of the restricting member 29A, the maximum width of the cut-out portion 29Aa becomes larger than the diameter of the ball 27. The ball 27 passes through the cut-out portion 29Aa, rolls along the upper surface of the inclined member 29B, and stops at approximately the opening 28Cf, 28Cg in the terminal portion 28Ca. Between the location. In this state, the light beam LB1 of the detection device 94A cannot pass through the opening 28Cg of the terminal portion 28Ca. The other structure is the same as that of the embodiment shown in FIG. 3(B).

According to this modification, when the discharge lamp 1E is held by the clamp mechanism 52 in order to use the discharge lamp 1E in the exposure apparatus, the roller 70 of the clamp mechanism 52 imparts potential energy to the sphere 27 in the lamp head 28C to the restricting member 29A side. Move between the openings 28Cf and 28Cg. Therefore, when the discharge lamp 1E is returned to the turntable 79 of the storage section, the light beam LB1 of the detection device 94A is shielded by the sphere 27, and it can be confirmed that the discharge lamp 1E has been used. Furthermore, since the inclined member 29B for moving the ball 27 in the direction between the openings 28Cf and 28Cg is provided in the terminal portion 28Ca, the position of the ball 27 is stably maintained between the openings 28Cf and 28Cg.

In addition, the width of the cutout portion 29Aa of the restricting member 29A is also enlarged to a certain extent due to the thermal expansion of the restricting member 29A caused by the temperature rise of the base 28C caused by the use (energization) of the discharge lamp 1E. Therefore, when the temperature of the lamp head 28C reaches approximately the maximum temperature, the maximum width d5 of the cutout portion 29Aa may also become larger than the diameter of the sphere 27 due to the thermal expansion of the restricting member 29A.

Next, FIGS. 19(A) and (B) are diagrams showing the inside of the terminal portion 28a of the base 28 on the anode side of the discharge lamp of the fifth modification. In this modification, the lever principle is used to expand the width of the gap through which the sphere 27 passes. In the inside of the terminal portion 28a of FIG. 19(A), a substantially U-shaped restraining member 29E made of steel, for example, is fixed to the upper surface of the gripped portion 28e of the base 28. The restricting member 29E has: fixed on the grasped portion 28e A flat plate-shaped fixing portion 29Ec on the surface and a pair of L-shaped hinge portions 29Ea, 29Eb are provided on both ends of the upper surface of the fixing portion 29Ec so as to be openable and closable by elastic deformation through a portion with a small cross-sectional area. The ball 27 is placed on the gap between the front ends of the hinge parts 29Ea and 29Eb. Furthermore, between the hinge parts 29Ea and 29Eb, from the side of the fixed part 29Ec, there are arranged in order from the side of the fixed part 29Ec: a rod-shaped drive member 29H formed of aluminum, for example, having a thermal expansion coefficient greater than that of the restricting member 29E, and to reduce the hinge part 29Ea, The tension coil spring 29I that functions by the interval a between the front end of 29Eb. As an example, the tension coil springs 29I are provided in two places spaced apart in the direction perpendicular to the paper surface of FIG. 19(A), and the sphere 27 can be arranged between the two tension coil springs 29I.

Moreover, two side surfaces of the terminal portion 28a in the direction perpendicular to the paper surface of FIG. 19(A) are formed with a diameter smaller than 2 of the diameter of the sphere 27 for the light beam LB1 of the detection device 94A of FIG. 3(B) to pass through. There are two openings 28a1, 28a2 (the opening 28a1 is not shown).

At the temperature when the discharge lamp of this modification is stored, the length of the driving member 29H and the shape of the restricting member 29E are determined such that the distance a between the front ends of the hinge parts 29Ea and 29Eb is smaller than the diameter d of the sphere 27. On the other hand, in a state where the discharge lamp is lit and the temperature of the discharge lamp reaches approximately the highest temperature, as shown in FIG. 19(B), the lever action caused by the thermal expansion of the driving member 29H is utilized to form the hinge portion 29Ea, The way in which the distance between the front ends of 29Eb becomes much larger than the diameter of the sphere 27 is to determine the length of the drive member 29H. In this case, the sphere 27 moves from its original position PA2 through the gap between its front end and moves on the upper surface of the driving member 29H between the two tension coil springs 29I, and the light beam LB1 of the detection device 94A in FIG. 3(B) is The sphere 27 is obscured. The other structure is the same as that of the embodiment shown in FIG. 3(B).

In this modified example, when the discharge lamp is used (when energized), the distance between the front ends of the hinge parts 29Ea and 29Eb of the restricting member 29E becomes larger due to the thermal expansion of the driving member 29H At the diameter of the sphere 27, the sphere 27 moves on the upper surface of the driving member 29H through the gap between the front end of the sphere 27. Therefore, when the discharge lamp is stored, the light beam LB1 of the detection device 94A is shielded by the sphere 27, so that it can be reliably determined whether the discharge lamp is used.

Furthermore, in this modification, the elongation of the distance a between the front ends of the hinge parts 29Ea, 29Eb due to the thermal expansion of the driving member 29H is much larger than the hinge parts 29Ea, 29Eb caused by the thermal expansion of the restricting member 29E. The amount of elongation between the front ends. Therefore, the machining accuracy of the restricting member 29E and the driving member 29H when manufacturing the discharge lamp can be lower (rougher) than the machining accuracy of the opening 29b of the receiving portion 29 of FIG. 3(B), so that the manufacturing of the discharge lamp is easy.

In addition, in this modified example, instead of the sphere 27, a cylinder 27C with a low thermal expansion coefficient extending in a direction perpendicular to the paper surface of FIG. 19(A) and having the same diameter as the diameter d of the sphere 27 can be used. Even when the cylinder 27C is used, if the distance between the front ends of the hinge parts 29Ea and 29Eb becomes larger than the diameter d, the cylinder 27C passes through the distance between the front ends to reach the position where the light beam LB1 is shielded, and the discharge lamp can be identified Used or not.

Furthermore, as shown in the lamp base 28 on the anode side of the discharge lamp in the sixth modification of Fig. 20(A), (B), in addition to the lever principle used in the modification of Fig. 19(A), it can also be used The bimetal acts to increase the gap for the ball 27 (or cylinder 27C) to pass through. In FIG. 20(A), the inner sides of the hinge parts 29Ea, 29Eb at both ends of the restriction member 29E arranged inside the terminal portion 28a of the base 28 are respectively fixed with a coefficient of thermal expansion greater than that of the restriction member 29E by adhesive or the like. For example, flat drive members 29F and 29G made of aluminum.

At the temperature when the discharge lamp of this modification is stored, the distance a between the front ends of the hinge parts 29Ea, 29Eb is smaller than the diameter d of the sphere 27, and the sphere 27 is placed on the distance between the front ends of the hinge parts 29Ea, 29Eb. On the other hand, when the discharge lamp emits light and the temperature of the discharge lamp reaches When the temperature reaches approximately the highest temperature, as shown in Fig. 20(B), the thermal expansion of the driving members 29F, 29G is greater than the thermal expansion of the restricting member 29E (hinge parts 29Ea, 29Eb), so the bimetallic effect is used to make the hinge parts 29Ea, 29Ea, 29Ea, 29Eb. The distance between the front ends of 29Eb becomes much larger than the diameter of the sphere 27. Therefore, the sphere 27 passes through the interval between the front end portions from the original position PA2, moves on the upper surface of the fixed portion 29Ec, and shields the light beam LB1 of FIG. 3(B) toward the opening 28a2. Therefore, when the discharge lamp is stored, the light beam LB1 of the detection device 94A is shielded by the sphere 27, so that it can be accurately judged whether the discharge lamp is in use.

Furthermore, in this modification, the elongation of the distance a between the front ends of the hinge parts 29Ea, 29Eb due to the bimetallic effect caused by the thermal expansion of the driving members 29F, 29G is much larger than the hinge part 29Ea caused by the thermal expansion of the restricting member 29E , 29Eb The elongation of the gap between the front end. Therefore, the machining accuracy of the restricting member 29E and the driving members 29F, 29G when manufacturing the discharge lamp can be lower (rougher) than the machining accuracy of the opening 29b of the receiving portion 29 of FIG. 3(B), so that the manufacturing of the discharge lamp is easy .

Next, FIGS. 21(A) and (B) are cross-sectional views showing the base 28D on the anode side of the discharge lamp of the seventh modification. In this modified example, the use of the discharge lamp is determined by using the change in the angle of the reflecting surface of the mirror portion provided in the lamp head.

In FIG. 21(A), a circular convex portion 28e2 is provided in the center of a circular concave portion 28e1 formed at the upper end of the gripped portion 28e of the lamp base 28D. In this recessed portion 28e1, the flange portion of the support member 29J having a substantially cylindrical shape and provided with an annular band-shaped flange portion at the lower end is placed so as to surround the convex portion 28e2. Furthermore, on the upper surface of the support member 29J, a disc-shaped intermediate member 29K made of a material plastically deformed by heat, such as an alloy containing lead, is fixed so as to face the upper surface of the intermediate member 29K. A triangular prism-shaped mirror face with a reflective surface facing the outside is fixed MR1, MR4.

In addition, a terminal portion with a substantially triangular prism shape and a circular flange portion 28a3 provided at the lower end is placed so as to cover the support member 29J, the intermediate member 29K, and the mirror portions MR1 and MR2 located on the upper portion of the intermediate member 29K. 28a. At positions opposite to the mirror portions MR1 and MR2 on the inner surface of the terminal portion 28a, triangular-shaped mirror portions MR2 and MR3 are respectively fixed with the reflection surface facing the inner side. The flange part of the support member 29J overlaps with the flange part 28a3 of the terminal part 28a, and the two flange parts 28a3 etc. are fixed to the recessed part 28e1 by the bolt BA1 at a plurality of places.

Furthermore, on the side surface of the terminal portion 28a, two circular openings 28a1 are formed along a straight line passing through the central axis of the support member 29J in a manner opposed to the mirror portions MR1 and MR4 on the intermediate member 29K. 28a2.

When the discharge lamp of this modification is not in use, when the discharge lamp is placed on the turntable 79 of the storage part shown in FIG. 11, the light beam LB1 irradiated from the irradiation part 94Aa of the detection device 94A passes through the opening 28a1, The mirror portions MR1, MR2, MR3, MR4 and the opening 28a2 are received by the light receiving unit 94Ab. It can be confirmed that the discharge lamp is not used according to the detection signal of the light receiving portion 94Ab.

On the other hand, when the discharge lamp is installed in the exposure device and the temperature of the discharge lamp rises (the temperature of the discharge lamp reaches the approximate maximum temperature, or the use of the discharge lamp, for example, continues for a predetermined time or longer), as shown in the figure As shown in 21(B), the intermediate member 29K is plastically deformed due to heat, and the angle of the reflecting surface of the mirror portions MR1 and MR4 changes. After that, when the used discharge lamp is placed on the turntable 79 of the storage section shown in FIG. 11, the light beam LB1 irradiated from the irradiation section 94Aa of the detection device 94A is directed from the mirror portion MR1 (or MR4) to the same as that shown in FIG. 21 In the case of (A), the reflection in a different direction is not received by the light receiving unit 94Ab. Therefore, according to the light receiving part 94Ab The detection signal confirms that the discharge lamp has been used.

In addition, in this modification, as shown in FIG. 21(A), the light-receiving portion 94Ab of the detection device 94A may be arranged at the position PA5 shown by the dotted line close to the irradiating portion 94Aa. In this case, the angle of the reflective surface of the mirror portion MR1 is set so that the light beam LB1 from the irradiating portion 94Aa is received by the light receiving portion 94Ab at the position PA5, and the other mirror portions MR2 to MR4 are omitted. In this case, when the temperature of the discharge lamp rises, the intermediate member 29K is also plastically deformed due to heat, and the angle of the reflective surface of the mirror portion MR1 changes, and the reflected light from the mirror portion MR1 cannot be received by the light receiving portion 94Ab. Therefore, it can be confirmed that the discharge lamp is used based on the detection signal of the light receiving portion 94Ab. In addition, an example in which the mirror portion is provided on the side surface inside the terminal portion 28a is shown, but the present invention is not limited to this, and the mirror portion may be provided on the side surface outside the terminal portion 28a. In this case, the mirror portions MR2 and MR3 may be provided in the housing 51 instead of the terminal portion 28a, for example. By providing the mirror portion on the side surface outside the terminal portion 28a, the openings 28a1 and 28a2 are not formed in the terminal portion 28a, and the effect of increasing the strength and rigidity of the terminal portion 28a or facilitating the manufacture of the terminal portion 28a is obtained.

In addition, it has been described that the detection device 94 has the irradiation section 94Aa and the light receiving section 94Ab that irradiate the light beam LB1, but it is not limited to this. It is also possible to use the irradiating portion 94Aa as a point light source, and to confirm that the discharge lamp has been used by whether or not the light receiving portion 94Ab has detected a predetermined amount of light or more. Furthermore, the light receiving unit 94Ab may be constituted by an imaging device such as a camera. It is also possible to detect whether or not the sphere 27 and the like are contained in the receiving portion 29 by an imaging device using known image processing or the like.

As an eighth modification, when the discharge lamp is used (energized) for a predetermined period of time, when the state of the lamp base 28D on the anode side changes due to discoloration and/or deformation, the detection device 94 detects whether the discharge lamp is used . Moreover, when the discharge lamp is used (energized) for a predetermined period of time, a mark forming part not shown in the figure can be used to connect the lamp cap 26 on the cathode side and the anode side The base 28, the glass tube 25, etc. form a mark, and the mark is detected by the above-mentioned imaging device, thereby detecting whether the discharge lamp is used.

In addition, a groove may be formed in the terminal portion 28a instead of the openings 28a1, 28a2. That is, the light beam LB1 from the irradiating part 94Aa only needs to pass through the receiving part, and therefore it is not a structure that covers the sphere like an opening, and a notch may be provided. In addition, the openings 28a1 and 28a2 may be covered with a material that can transmit the light beam LB1, such as glass. By this, there is no risk of dirt entering the receiving part 29.

In addition, in each of the above embodiments, the anode-side lamp base 28 is used to detect whether the discharge lamp is used, and the cathode-side lamp base 26 may be provided with the same structure as the anode-side lamp base 28 to detect whether the discharge lamp is used. Moreover, it is also possible to provide a structure capable of detecting whether the discharge lamp is used or not in both the lamp caps of the lamp cap 26 on the cathode side and the lamp cap 28 on the anode side.

A predetermined pattern (circuit pattern, electrode pattern, etc.) is formed on a substrate (panel P) using the exposure apparatus of each of the above-mentioned embodiments or the exposure method using the exposure apparatuses, whereby liquid crystal elements such as liquid crystal display elements can be manufactured. Hereinafter, an example of the manufacturing method will be described with reference to steps S401 to S404 of FIG. 22.

In step S401 (pattern forming step) of FIG. 22, first, the following steps are performed: a photoresist is applied to a substrate to be exposed to prepare a photosensitive substrate (panel P), and a liquid crystal display element is used using the above exposure device The pattern transfer of the photomask is an exposure step to expose the photosensitive substrate, and a development step to develop the photosensitive substrate. A predetermined resist pattern is formed on the substrate by a photolithography step including the coating step, the exposure step, and the development step. After the lithography step, a predetermined pattern including a plurality of electrodes and the like is formed on the substrate through an etching step and a resist stripping step of using the resist pattern as a photomask for processing. The lithography step and so on Perform multiple times for the number of layers on the board P.

In the next step S402 (color filter forming step), a plurality of groups of three fine filters corresponding to red R, green G, and blue B are arranged in a matrix, or red R, green G A group of 3 stripe-shaped plural filters of blue B are arranged in the direction of the horizontal scanning line, thereby forming a color filter. In the next step S403 (cell assembly step), for example, liquid crystal is injected between the substrate with a predetermined pattern obtained in step S401 and the color filter obtained in step S402 to manufacture a liquid crystal panel (liquid crystal cell).

In the subsequent step S404 (module assembling step), components such as electrical circuits and backlights for displaying the liquid crystal panel (liquid crystal cell) assembled in this way are installed to complete as a liquid crystal display element. According to the above-mentioned method for manufacturing a liquid crystal display element, since the discharge lamp can be exchanged efficiently in the exposure device, high productivity can be obtained.

In addition, the present invention is not limited to the application of the manufacturing process of liquid crystal display elements, and can also be widely applied to the manufacturing process of display devices such as plasma displays, or imaging devices (CCD (charge-coupled device, charge-coupled device), etc.) , Micromachinery, MEMS (Microelectromechanical Systems: Microelectromechanical Systems), thin film magnetic heads using ceramic wafers as substrates, and semiconductor components and other components in the manufacturing process.

In addition, the light source device of the above-mentioned embodiment can be applied to the scanning exposure type projection exposure device (scanner, etc.) of the step-and-scan method as well as the step-and-repeat projection exposure device (stepper, etc.) The exposure light source. Moreover, the light source device of the above-mentioned embodiment can also be applied to a light source device of an exposure device of a proximity method or a contact method that does not use a projection optical system, or a light source of a machine other than the exposure device.

25c‧‧‧Rod

25d‧‧‧Cover

27‧‧‧Sphere

28‧‧‧The lamp head on the anode side

28a‧‧‧Terminal

28a1, 28a2, 29b, 29c, 29d‧‧‧Circular opening

28a3, 29e‧‧‧Flange

28a4‧‧‧Chamfer

28b, 28c, 28d‧‧‧Plane

28e‧‧‧Detained Department

28e1‧‧‧Concave

28e2‧‧‧Protrusion

28i‧‧‧Radiator

28j‧‧‧Heat sink

29‧‧‧Containment Department

29a‧‧‧Upper

94A‧‧‧The first detection device

94Aa‧‧‧ Irradiation Department

94Ab‧‧‧Light receiving part

BA1‧‧‧Bolt

LB1‧‧‧Beam

Claims (20)

A discharge lamp is installed in a device equipped with a detection part for detecting the usage state of the discharge lamp, and includes: an electrode for discharging; a glass member to form a light-emitting part; an energizing member arranged at the end of the glass member to discharge The electrode used is energized; and the detected portion has an opening provided in the energizing member and a movable portion capable of shielding at least a part of the light beam passing through the opening, and is detected by the detecting portion, and when the electrode is energized, it is from the light beam The first state where at least a part can pass through the opening becomes the second state where at least a part of the light beam is shielded by the movable portion. For example, the discharge lamp of the first item in the scope of patent application, in which the detected part changes from the first state to the second state when the energization time to the electrode has passed a predetermined time or more. For example, the discharge lamp of item 1 or 2 of the scope of patent application, wherein the energizing member includes: a first accommodating part provided with the opening and capable of accommodating the movable part; The second receiving portion is provided adjacent to the movable portion and is capable of receiving the movable portion. In the first state when the electrode is not energized, the movable portion is accommodated in the second accommodating portion, and in the second state when the electrode is energized for a predetermined time Next, the movable part is accommodated in the first accommodation part through the hole. Such as the discharge lamp of item 3 of the scope of patent application, which The detected portion includes a restricting portion that restricts movement so that the movable portion in the first housing portion does not move to the second housing portion in the second state. For example, the discharge lamp of item 1 or 2 of the scope of patent application, wherein the energizing member includes a first energizing member and a second energizing member that are arranged to sandwich the glass member. For example, in the discharge lamp of the 5th patent application, the above-mentioned first energizing member includes: a connected part, which can connect a member connected with a power cable; and a held part, including a non-planar part that can be held by the conveying part. For example, the discharge lamp of item 6 of the scope of patent application, wherein the held portion of the first energizing member includes an axially symmetric portion with a spherical surface. Such as the discharge lamp of item 5 of the scope of patent application, wherein the above-mentioned first energizing member has a heat sink. For example, the discharge lamp of item 5 of the scope of patent application, wherein the second energizing member includes: a flange portion that can be placed on a supporting member, a small diameter portion with a cross-sectional area smaller than the flange portion, and a cross-sectional area larger than the small diameter portion的段差部。 The difference. A light source device includes a light source device such as the discharge lamp of the first item of the scope of patent application, and includes: a storage unit for storing the discharge lamp; a conveying unit for conveying the discharge lamp; a light transmitting unit for causing a light beam to enter the discharge The above-mentioned opening of the above-mentioned first energizing member of the lamp; a light receiving part that detects the above-mentioned light beam that has passed through the above-mentioned opening; and The control unit uses the detection result of the light receiving unit to determine the state of the discharge lamp. For example, the light source device of claim 10 includes a correction unit for correcting the rotation angle of the discharge lamp, and the control unit uses the detection result of the light receiving unit to obtain the rotation angle of the discharge lamp, and based on the obtained The rotation angle of the discharge lamp is corrected by the correction unit. For example, the light source device of claim 11, wherein the discharge lamp includes a movable portion capable of shielding at least a part of the light beam incident to the opening of the first energizing member, and the control portion uses the detection of the light receiving portion As a result, it is determined whether at least a part of the light beam that has entered the opening is shielded by the movable portion, and the use state of the discharge lamp is determined based on the result of the determination. For example, the light source device of claim 10 includes: a connecting portion that detachably connects the power cable to the first energizing member of the discharge lamp; and a supporting portion that connects the second energizing member of the discharge lamp to Loading and unloading place to support. An exposure device, characterized by comprising: a light source device such as the tenth item of the scope of patent application; an illumination system for illuminating a photomask using light generated from the discharge lamp of the light source device; and a projection optical system for illuminating the photomask The image of the pattern is projected onto the substrate. An exchange method, such as the discharge lamp exchange method in item 1 of the scope of the patent application, and includes: Storing the discharge lamp; transporting the discharge lamp from the storage portion to the installation position; making the light beam incident on the opening of the first energizing member of the discharge lamp; detecting the light beam that has passed through the opening; and the detection result using the light beam Determine the state of the above-mentioned discharge lamp. Such as the exchange method of item 15 of the scope of patent application, wherein judging the state of the discharge lamp includes using the detection result of the light beam to obtain the rotation angle of the discharge lamp, and includes correcting the rotation angle of the discharge lamp based on the obtained rotation angle. For example, the exchange method of item 15 of the scope of application, wherein the discharge lamp includes a movable part capable of shielding at least a part of the light beam incident to the opening of the first energizing member, and judging the state of the discharge lamp includes: use As a result of the detection of the light beam, it is determined whether at least a part of the light beam that has entered the opening is shielded by the movable portion; and the use state of the discharge lamp is determined based on the determination result. An exposure method comprising: exchanging the discharge lamp using the discharge lamp exchange method such as the 15th patent application; using the light generated from the discharge lamp to illuminate the photomask; and projecting the image of the photomask pattern onto the substrate . A method for manufacturing a device, including: forming a pattern of a photosensitive layer on a substrate using an exposure device as claimed in item 14 of the scope of the patent application; and The above-mentioned substrate on which the above-mentioned pattern is formed is processed. A method for manufacturing a device includes: forming a pattern of a photosensitive layer on a substrate using an exposure method such as the 18th patent application; and processing the substrate on which the pattern is formed.

Images