TWI716783B - Resin molding device and resin molded product manufacturing method - Google Patents
Resin molding device and resin molded product manufacturing method Download PDFInfo
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- TWI716783B TWI716783B TW107143831A TW107143831A TWI716783B TW I716783 B TWI716783 B TW I716783B TW 107143831 A TW107143831 A TW 107143831A TW 107143831 A TW107143831 A TW 107143831A TW I716783 B TWI716783 B TW I716783B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/12—Moulds or cores; Details thereof or accessories therefor with incorporated means for positioning inserts, e.g. labels
- B29C33/14—Moulds or cores; Details thereof or accessories therefor with incorporated means for positioning inserts, e.g. labels against the mould wall
- B29C33/18—Moulds or cores; Details thereof or accessories therefor with incorporated means for positioning inserts, e.g. labels against the mould wall using vacuum
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/02—Moulds or cores; Details thereof or accessories therefor with incorporated heating or cooling means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/10—Moulds or cores; Details thereof or accessories therefor with incorporated venting means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/12—Moulds or cores; Details thereof or accessories therefor with incorporated means for positioning inserts, e.g. labels
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/52—Heating or cooling
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/58—Measuring, controlling or regulating
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- H10P72/0441—
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- H10P72/0606—
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- H10P72/0614—
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- H10W74/01—
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- H10W74/016—
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
- B29C2037/80—Identifying, e.g. coding, dating, marking, numbering
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
- B29C2037/90—Measuring, controlling or regulating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
- B29C2043/181—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles encapsulated
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
- B29C2043/181—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles encapsulated
- B29C2043/182—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles encapsulated completely
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
- B29C2043/3602—Moulds for making articles of definite length, i.e. discrete articles with means for positioning, fastening or clamping the material to be formed or preforms inside the mould
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
- B29C2043/3602—Moulds for making articles of definite length, i.e. discrete articles with means for positioning, fastening or clamping the material to be formed or preforms inside the mould
- B29C2043/3605—Moulds for making articles of definite length, i.e. discrete articles with means for positioning, fastening or clamping the material to be formed or preforms inside the mould vacuum
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Moulds For Moulding Plastics Or The Like (AREA)
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Abstract
本發明提供一種能夠實現樹脂成形品的生產效率的提高的樹脂成形裝置。樹脂成形裝置10是使用在彼此相向的第1模(上模151)及第2模(下模152)的至少一者上設置有腔室的成形模,將成形對象物S保持於所述第1模來進行樹脂成形的裝置,且包括:孔部形成部18,設置於所述成形模的外部,且在脫模膜FU上形成孔部H;搬送部17,將形成有孔部H的脫模膜FU搬送至所述第1模與所述第2模之間;以及保持部16,藉由經由脫模膜FU的孔部H而從所述第1模中所設置的抽吸口162抽吸氣體,來保持成形對象物S。The present invention provides a resin molding device capable of improving the production efficiency of resin molded products. The resin molding apparatus 10 uses a molding die provided with a cavity on at least one of a first mold (upper mold 151) and a second mold (lower mold 152) facing each other, and holds the molded object S on the second mold. A device for performing resin molding with a mold, and includes: a hole forming part 18, which is provided on the outside of the mold and forms a hole H on the release film FU; and a conveying part 17, which forms a hole H The mold release film FU is transported between the first mold and the second mold; and the holding portion 16 is passed through the hole H of the mold release film FU from the suction port provided in the first mold 162 sucks gas to hold the molded object S.
Description
本發明關於一種樹脂成形裝置以及樹脂成形品製造方法。The present invention relates to a resin molding device and a method for manufacturing a resin molded product.
為了保護電子零件不受光、熱、濕氣等環境的影響,電子零件通常由樹脂密封而進行樹脂成形。作為樹脂成形法,通常使用壓縮成形法或轉移成形法等。在利用這些方法進行樹脂成形的樹脂成形裝置中,使用具有第1模與第2模的成形模,所述第1模設置有腔室(cavity),所述第2模與第1模相向配置,在與腔室相向的面上設置有保持成形對象物(例如,裝配有電子零件的基板)的保持部。多數情況下,在保持部設置有抽吸空氣的抽吸口,從抽吸口抽吸空氣,由此將成形對象物保持於保持部。In order to protect electronic parts from the environment such as light, heat, moisture, etc., electronic parts are usually sealed with resin and resin molded. As the resin molding method, a compression molding method, a transfer molding method, or the like is generally used. In a resin molding apparatus that performs resin molding by these methods, a molding die having a first mold and a second mold is used, the first mold is provided with a cavity, and the second mold and the first mold are arranged facing each other , A holding portion that holds a molded object (for example, a substrate on which electronic components are mounted) is provided on the surface facing the cavity. In many cases, a suction port for sucking air is provided in the holding portion, and air is sucked from the suction port, thereby holding the molded object in the holding portion.
當對保持於保持部的成形對象物進行樹脂成形時,存在如下擔憂:樹脂滲出至成形對象物的外側而附著在第2模。因此,在專利文獻1及專利文獻2記載的樹脂成形裝置中,藉由在保持部及其周圍的第2模的表面鋪設脫模膜,來防止樹脂附著在第2模的表面。但是,若脫模膜介隔存在於抽吸口與成形對象物之間,則無法利用抽吸口抽吸氣體,從而無法保持成形對象物,因此在專利文獻1及專利文獻2中記載有利用針或銷對所述脫模膜中的對應於抽吸口的部位進行穿孔。 [現有技術文獻] [專利文獻]When resin molding is performed on the molding object held by the holding portion, there is a concern that the resin oozes out of the molding object and adheres to the second mold. Therefore, in the resin molding apparatuses described in Patent Document 1 and Patent Document 2, by laying a release film on the surface of the second mold around the holding portion and the surroundings, the resin is prevented from adhering to the surface of the second mold. However, if the release film is interposed between the suction port and the molded object, the suction port cannot suck gas and the molded object cannot be retained. Therefore, Patent Literature 1 and Patent Literature 2 describe the use of The needle or pin perforates the part corresponding to the suction port in the release film. [Prior Art Document] [Patent Document]
[專利文獻1]日本專利特開2013-153146號公報 [專利文獻2]日本專利特開2013-162041號公報[Patent Document 1] Japanese Patent Application Publication No. 2013-153146 [Patent Document 2] Japanese Patent Application Publication No. 2013-162041
[發明所欲解決之問題] 在專利文獻1及專利文獻2記載的樹脂成形裝置中,因在成形模的位置對脫模膜進行穿孔而導致成形模的結構複雜化,或為了不使成形模破損而要求精度等,會成為生產效率下降的要因。[Problems to be Solved by the Invention] In the resin molding apparatus described in Patent Document 1 and Patent Document 2, the structure of the mold is complicated by perforating the release film at the position of the mold, or the mold is not made Damaged and required precision, etc., will become the main cause of the decline in production efficiency.
本發明所要解決的課題在於提供一種能夠實現樹脂成形品的生產效率的提高的樹脂成形裝置以及樹脂成形品製造方法。 [解決問題的技術手段]The problem to be solved by the present invention is to provide a resin molding apparatus and a resin molded product manufacturing method capable of improving the production efficiency of resin molded products. [Technical means to solve the problem]
為了解決所述課題而成的本發明的樹脂成形裝置的第1形態是使用在彼此相向的第1模及第2模的至少一者上設置有腔室的成形模,將成形對象物保持於所述第1模來進行樹脂成形,且所述樹脂成形裝置包括: a)孔部形成部,設置於所述成形模的外部,且在脫模膜上形成孔部; b)搬送部,將形成有所述孔部的所述脫模膜搬送至所述第1模與所述第2模之間;以及 c)保持部,藉由經由所述脫模膜的所述孔部而從所述第1模型中所設置的抽吸口抽吸氣體,來保持所述成形對象物。The first aspect of the resin molding apparatus of the present invention to solve the above-mentioned problems is to use a molding die provided with a cavity in at least one of a first mold and a second mold facing each other, and to hold the molded object in The first mold performs resin molding, and the resin molding device includes: a) a hole forming part, which is provided on the outside of the mold and forms a hole on the release film; b) a conveying part, The release film formed with the hole portion is transported between the first mold and the second mold; and c) a holding portion that passes through the hole portion of the release film and is removed from the mold. The suction port provided in the first mold sucks gas to hold the molded object.
本發明的樹脂成形裝置的第2形態是使用在彼此相向的第1模及第2模的至少一者上設置有腔室的成形模,將成形對象物保持於所述第1模來進行樹脂成形,且所述樹脂成形裝置包括: a)搬送部,將形成有孔部的所述脫模膜搬送至所述第1模與所述第2模之間;以及 b)保持部,藉由經由所述脫模膜的所述孔部而從所述第1模中所設置的抽吸口抽吸氣體,來保持所述成形對象物。The second aspect of the resin molding apparatus of the present invention uses a molding die provided with a cavity in at least one of the first mold and the second mold facing each other, and the molding object is held in the first mold to perform resin Molding, and the resin molding device includes: a) a conveying part that conveys the release film formed with a hole part between the first mold and the second mold; and b) a holding part, by A gas is sucked from a suction port provided in the first mold through the hole of the release film to hold the molded object.
本發明的樹脂成形品製造方法是使用在彼此相向的第1模及第2模的至少一者上設置有腔室的成形模,將成形對象物保持於所述第1模來進行樹脂成形,且所述樹脂成形品製造方法包括: 搬送步驟,將形成有孔部的脫模膜搬送至所述第1模與所述第2模之間; 保持步驟,藉由經由所述脫模膜的所述孔部而從所述第1模中所設置的抽吸口抽吸氣體,來保持所述成形對象物;以及 樹脂成形步驟,將所述第1模及所述第2模合模來對保持於所述第1模的所述成形對象物進行樹脂成形。 [發明的效果]The method of manufacturing a resin molded product of the present invention uses a molding die provided with a cavity in at least one of a first mold and a second mold facing each other, and resin molding is performed by holding the molded object in the first mold, and And the method for manufacturing a resin molded product includes: a conveying step of conveying a release film formed with a hole between the first mold and the second mold; and a holding step, by passing through the release film The hole portion sucks gas from a suction port provided in the first mold to hold the molded object; and a resin molding step of clamping the first mold and the second mold together The molding object held in the first mold is resin molded. [Effects of the invention]
根據本發明,能夠實現樹脂成形品的生產效率的提高。。According to the present invention, the production efficiency of resin molded products can be improved. .
在本發明的樹脂成形裝置以及樹脂成形品製造方法中,將形成有孔部的脫模膜搬送至第1模與第2模之間。即,關於脫模膜,在搬送至第1模與第2模之間前,在成形模的外部形成孔部。藉由經由所述孔部而從第1模中所設置的抽吸口抽吸氣體,來將成形對象物保持於保持部。In the resin molding apparatus and the resin molded product manufacturing method of the present invention, the release film in which the hole is formed is transported between the first mold and the second mold. That is, with regard to the release film, before being transported between the first mold and the second mold, a hole is formed on the outside of the forming mold. By sucking gas from the suction port provided in the first mold through the hole, the molded object is held in the holding portion.
關於在成形模的外部形成孔部的方法以及裝置,可使用以下兩個形態的任一者或兩者。在第1形態中,在樹脂成形裝置內且為成形模的外部事先設置孔部形成部,利用所述孔部形成部在脫模膜上形成孔部。作為孔部形成部,可使用在脫模膜上用刀形成狹縫(細長孔、切口)者、或按壓針等而對脫模膜進行穿孔者、藉由對脫模膜照射電漿來形成微小的孔者等。在第2形態中,(不在樹脂成形裝置中設置孔部形成部)使用預先在樹脂成形裝置的外部形成孔部的脫模膜。作為在樹脂成形裝置的外部形成孔部的脫模膜,可列舉:利用與第1形態同樣的方法在樹脂成形裝置的外部進行形成孔部的操作的脫模膜、或如多孔質膜或無紡布那樣包含具有通氣性的原材料的脫模膜。Regarding the method and apparatus for forming the hole on the outside of the forming mold, either or both of the following two forms can be used. In the first aspect, a hole forming part is provided in advance in the resin molding apparatus and outside the mold, and the hole forming part is used to form the hole in the release film. As the hole forming part, a slit (elongated hole, cut) is formed on the release film with a knife, or a needle is pressed to perforate the release film, and it is formed by irradiating the release film with plasma Those with tiny holes etc. In the second aspect, (without providing the hole forming portion in the resin molding device), a release film in which holes are formed in advance outside the resin molding device is used. Examples of the release film for forming pores on the outside of the resin molding apparatus include: a release film in which pores are formed on the outside of the resin molding apparatus by the same method as in the first embodiment, or a porous film or non-reinforced film. A release film containing a material having air permeability like a woven fabric.
孔部只要能夠通過氣體即可,形狀及大小並無特別限定。可使用將脫模膜的材料的一部分去除而成的貫通孔、脫模膜的切縫、多孔質材料的孔、無紡布的纖維的間隙等作為孔部。As long as the hole can pass gas, the shape and size are not particularly limited. A through hole obtained by removing a part of the material of the release film, a slit of the release film, a hole of a porous material, a gap between fibers of a nonwoven fabric, etc. can be used as the hole.
當將脫模膜搬送至第1模與第2模之間時,無需使保持部的抽吸口與形成在脫模膜的孔部的位置對準。即便這些抽吸口與孔部的位置不對準,也可從孔部經由保持部與脫模膜的間隙,在抽吸口抽吸氣體。從抽吸口抽吸的氣體,通常為空氣,但在將氮氣或氬氣等惰性氣體、或其他的空氣以外的氣體導入至成形模的周圍的情況下,也可抽吸所述氣體。When the release film is transported between the first mold and the second mold, it is not necessary to align the suction port of the holding portion with the position of the hole formed in the release film. Even if the positions of these suction ports and the holes are not aligned, gas can be sucked from the holes through the gap between the holding portion and the release film. The gas sucked from the suction port is usually air. However, when an inert gas such as nitrogen or argon, or other gas other than air is introduced around the molding die, the gas may be sucked.
根據本發明的樹脂成形裝置以及樹脂成形品製造方法,不存在因在成形模的位置對脫模膜進行穿孔而導致成形模的結構複雜化,或為了不使成形模破損而要求精度的情況,從而能夠實現生產效率的提高。According to the resin molding apparatus and resin molded product manufacturing method of the present invention, there are no cases where the structure of the molding die is complicated by perforating the release film at the position of the molding die, or accuracy is required to prevent damage to the molding die. Thereby, the production efficiency can be improved.
另外,無需之前在將脫模膜搬送至第1模與第2模之間後進行的對脫模膜進行穿孔的步驟,因此能夠提高生產效率。In addition, since the step of perforating the release film which is performed after the release film is transported between the first mold and the second mold is unnecessary, the production efficiency can be improved.
進而,由於不在成形模內對脫模膜進行穿孔,因此能夠防止脫模膜的渣滓混入樹脂中,從而提高樹脂成形品的品質。Furthermore, since the release film is not perforated in the molding die, it is possible to prevent the dross of the release film from being mixed into the resin, thereby improving the quality of the resin molded product.
近年來,一直使用進行樹脂成形直至比成形對象物更靠外側為止的被稱為二次成型(overmold)的方法。二次成型是當生產在比經樹脂密封的芯片更靠外側處也設置配線或輸入輸出端子的扇出型晶片級封裝(Funout-Wafer Level Package,FO-WLP)或扇出型面板級封裝(Funout-Panel LeveL Package,FO-PLP)等樹脂成形品時等使用。若進行二次成型,則至成形對象物的外側為止的區域有意地成為成形範圍。根據本發明的樹脂成形裝置以及樹脂成形品製造方法,成形對象物的周圍的樹脂不會附著在成形模上,能夠以高生產效率及高品質生產使用二次成型的樹脂成形品。In recent years, a method called overmold (overmold) in which resin molding is performed to the outside of the molded object has been used. Overmolding is when the production of a fan-out wafer level package (Funout-Wafer Level Package, FO-WLP) or a fan-out panel level package ( Funout-Panel LeveL Package, FO-PLP) and other resin molded products. If secondary molding is performed, the area to the outside of the molding object becomes the molding range intentionally. According to the resin molding apparatus and resin molded product manufacturing method of the present invention, the resin around the molded object does not adhere to the molding die, and the resin molded product using secondary molding can be produced with high production efficiency and high quality.
本發明的樹脂成形裝置可還包括位置檢測感測器,所述位置檢測感測器對設置於所述脫模膜的位置檢測用標記的位置進行檢測。另外,在本發明的樹脂成形品製造方法中,可採取如下構成:對設置於所述脫模膜的位置檢測用標記的位置進行檢測,並基於所述位置檢測用標記的位置,在所述搬送步驟中使所述脫模膜的形成所述孔部的位置對準保持所述成形對象物的位置。由此,能夠抑制在成型模中的保持成形對象物的位置以外的部分配置孔部,更不易產生樹脂附著在成形模的情況。The resin molding apparatus of the present invention may further include a position detection sensor that detects the position of the position detection mark provided on the release film. In addition, in the resin molded product manufacturing method of the present invention, a configuration may be adopted: detecting the position of the position detection mark provided on the release film, and based on the position of the position detection mark, In the conveying step, the position where the hole portion of the release film is formed is aligned with the position where the molded object is held. As a result, it is possible to suppress the placement of the hole in the molding die other than the position where the molded object is held, and it is more difficult to cause the resin to adhere to the molding die.
在本發明的樹脂成形裝置以及樹脂成形品製造方法中,可在與成形對象物接觸的脫模膜的面上塗布有黏合劑。由此,成形對象物與脫模膜由黏合劑黏接,從而可將成形對象物保持於保持部。In the resin molding apparatus and the resin molded product manufacturing method of the present invention, an adhesive may be applied to the surface of the release film in contact with the molded object. Thereby, the molded object and the mold release film are bonded by the adhesive, and the molded object can be held in the holding portion.
以下,使用圖1~圖11對本發明的樹脂成形裝置以及樹脂成形品製造方法的更具體的實施方式進行說明。Hereinafter, more specific embodiments of the resin molding apparatus and resin molded product manufacturing method of the present invention will be described using FIGS. 1 to 11.
(1)本實施方式的樹脂成形裝置的構成 圖1中表示本實施方式的樹脂成形裝置10。樹脂成形裝置10是進行壓縮成形的裝置,且包括:襯底111、直立設置於襯底111上的四根(圖1中僅示出兩根)繫桿(tie bar)112、以能夠進行上下移動的方式保持於繫桿112的可動台板121、固定於繫桿112的上端的固定台板122、以及設置於襯底111上的使可動台板121上下移動的曲柄連桿113。在可動台板121的上表面與固定台板122的下表面之間配置有具有上模(第1模)151和下模(第2模)152的成形模15。在上模151與固定台板122的下表面之間,在靠近上模151處設置有加熱器141,在靠近固定台板122處設置有隔熱材142。在下模152與可動台板121的上表面之間也同樣,在靠近下模152處設置有加熱器141,在靠近可動台板121處設置有隔熱材142。(1) Configuration of the resin molding apparatus of the present embodiment Fig. 1 shows a
再者,可使用在襯底111上相向直立設置的一對板狀構件即艙肋骨(hold frame)(注冊商標)來代替繫桿112(棒材)。In addition, a pair of plate-shaped members, namely, hold frames (registered trademarks), which are arranged upright on the
在上模151的下表面設置有保持成形對象物的保持部16。保持部16具有作為與成形對象物S接觸的平面的成形對象物接觸面161、以及設置於成形對象物接觸面161的抽吸口162。抽吸口162經由氣體抽吸管163而連接於第1抽吸機構(未圖示)。作為第1抽吸機構,例如可使用真空泵。The lower surface of the
另外,在上模151中設置有預備抽吸系統165。預備抽吸系統165與抽吸口162及氣體抽吸管163獨立設置,從設置於成形對象物接觸面161的開口,利用與所述第1抽吸機構不同的第2抽吸機構(未圖示)抽吸氣體。作為第2抽吸機構,例如可使用真空排出器或(與第1抽吸機構獨立設置的)真空泵。In addition, a
下模152具有包含平面形狀(俯視時)為長方形的框的側面構件1521、裝入至側面構件1521的框內的呈長方體的底面構件1522、以及設置於側面構件1521的下表面的彈性構件1523。由所述側面構件1521及底面構件1522所包圍的空間成為供給樹脂材料的腔室C。再者,側面構件1521及底面構件1522的平面形狀可根據製造的樹脂成形品的形狀而設為長方形以外的圓形等形狀。The
在成形模15的外部的隔著上模151的兩個側方配置有將上模脫模膜FU(相當於所述脫模膜)搬送至上模151與下模152之間的搬送部17。搬送部17具有配置在所述兩個側方的一個側方的第1卷軸171、配置在另一側方的第2卷軸172、以及使所述卷軸旋轉的旋轉機構(未圖示)。在搬送部17上安裝有長條的上模脫模膜FU。上模脫模膜FU捲繞在第1卷軸171,從第1卷軸171抽出並通過保持部16的正下方,將與所述上模脫模膜FU的端部連接的空芯固定在第2卷軸172,由此安裝在搬送部17。從圖1所示的方向觀察,旋轉機構對第1卷軸171順時針賦予扭矩T1
,並且對第2卷軸172逆時針賦予扭矩T2
。扭矩T2
大於扭矩T1
。由此,上模脫模膜FU在被賦予張力的狀態下,逐漸纏繞在第2卷軸172,並且將未使用的部分從孔部形成部18朝保持部16的正下方抽出。上模脫模膜FU的輸送量可基於第2卷軸172的旋轉量、或使第2卷軸172旋轉的旋轉機構的旋轉量來進行控制。Conveying parts 17 for conveying the upper mold release film FU (corresponding to the mold release film) between the
在從第1卷軸171抽出上模脫模膜FU的部位的正上方設置有在上模脫模膜FU上形成孔部(狹縫、細長的開口、切口)的孔部形成部(狹縫形成裝置)18。孔部形成部18設置有朝向抽出上模脫模膜FU的方向的刀181,並且設置有使所述刀上下移動的刀移動機構182。The upper mold release film FU is formed with a hole (slit, elongated opening, cut) directly above the part where the upper mold release film FU is drawn out from the first reel 171 (slit formation). Device) 18. The
在下模152的側方設置有下模脫模膜搬送部(省略圖示),所述下模脫模膜搬送部將匹配側面構件1521及底面構件1522的腔室C內表面及側面構件1521的上表面的大小來切斷的脫模膜(下模脫模膜)搬送至所述下模152上。可從下模152的側面構件1521與底面構件1522的間隙,利用第1抽吸機構來抽吸氣體,藉由所述氣體的抽吸,側面構件1521的內側面及底面構件1522的上表面,即腔室C的內表面被下模脫模膜覆蓋。再者,所述下模脫模膜與本發明的形成有孔部的脫模膜不同。A lower mold release film conveying part (not shown) is provided on the side of the
(2)本實施方式的樹脂成形裝置的動作以及本實施方式的樹脂成形品製造方法 使用圖2~圖7對樹脂成形裝置10的動作以及本實施方式的樹脂成形品製造方法進行說明。(2) The operation of the resin molding apparatus of this embodiment and the resin molded product manufacturing method of this embodiment The operation of the
首先,在使上模151與下模152上下分離的開模狀態下,對搬送部17的第1卷軸171賦予順時針的扭矩T1
,並且對第2卷軸172賦予逆時針的扭矩T2
(>T1
),由此在對上模脫模膜FU賦予張力的狀態下,從第1卷軸171抽出上模脫模膜FU,並利用孔部形成部18在上模脫模膜FU上形成孔部H。繼而,搬送部17將形成有孔部H的上模脫模膜FU搬送至上模151與下模152之間,並鋪設在上模151的保持部16及其周圍(圖2)。關於孔部形成部18,在上模脫模膜FU中的鋪設在保持部16時配置在所述保持部16的部分通過刀181的正下方的期間,利用刀移動機構182使刀181下降而與上模脫模膜FU接觸,在所述部分通過後,利用刀移動機構182使刀181上升。由此,形成在抽出上模脫模膜FU的方向上延伸的狹縫狀的孔部H(圖3)。在圖3中,示出藉由在孔部形成部18設置三個刀181而形成三個(三根)孔部H的例子,但孔部H的個數並不限定於此。First, in the mold opening state in which the
在上模151鋪設上模脫模膜FU,與此同時(再者,並非必須同時),利用下模脫模膜搬送部將匹配側面構件1521及底面構件1522的腔室C內表面及側面構件1521的上表面的大小來切斷的下模脫模膜FD搬送至下模152上。在所述狀態下,從側面構件1521與底面構件1522的間隙抽吸氣體(空氣),由此,如圖2所示,腔室C的內表面被下模脫模膜FD覆蓋。The upper mold release film FU is laid on the
接著,關於成形對象物S,從成形模15的外側使成形對象物S移動至保持部16的成形對象物接觸面161,經由上模脫模膜FU而與成形對象物接觸面161接觸。此處,在本實施方式中,將成形對象物S設為使安裝有多個電子零件的安裝面朝向下側的基板。在成形對象物S的移動過程中,使用使成形對象物S在橫方向及上下方向上移動的成形對象物搬送機構(未圖示)。在所述狀態下,使用第1抽吸機構經由孔部H而從抽吸口162抽吸成形對象物S與上模脫模膜FU之間的氣體(空氣),由此經由上模脫模膜FU而使成形對象物S保持於保持部16(圖4)。與此同時,使用第2抽吸機構從預備抽吸系統165也抽吸氣體。由此,即便第1抽吸機構與第2抽吸機構的任一者因故障等而停止,也可利用另一者繼續抽吸氣體,因此防止成形對象物S從保持部16落下。再者,當成形對象物S被保持部16保持時,上模脫模膜FU成為被搬送部17鋪設的狀態。Next, with regard to the molded object S, the molded object S is moved from the outside of the molding die 15 to the molded
另外,將樹脂材料搬送機構(未圖示)配置在腔室C的正上方,將樹脂材料P供給至腔室C內(圖4)。或者,也可使用將成形對象物搬送機構與樹脂材料搬送機構一體化而成者,同時進行成形對象物S對於保持部16的保持與下模脫模膜FD及樹脂材料P向腔室C內的供給。In addition, a resin material transport mechanism (not shown) is arranged directly above the cavity C, and the resin material P is supplied into the cavity C (FIG. 4 ). Alternatively, it is also possible to use an integrated molding object conveying mechanism and a resin material conveying mechanism, and simultaneously hold the molded object S in the holding
關於上模151及下模152,預先利用加熱器141而進行加熱。供給至腔室C內的樹脂材料P因下模152的熱而熔融或軟化。The
接著,利用曲柄連桿113使可動台板121上升。由此,首先,上模151與下模152抵接。進而,藉由利用曲柄連桿113使可動台板121上升,下模152被強力按壓至上模151而合模(圖5)。在保持所述狀態的期間,樹脂材料P因熱而硬化,從而形成樹脂成形品(樹脂密封品)PM。Next, the
其後,利用曲柄連桿113使可動台板121下降,由此使成形模15開模。由此,樹脂成形品PM在被保持部16保持的狀態下,從下模152脫模(圖6)。此時,腔室C的內表面由下模脫模膜FD覆蓋,由此能夠順利進行樹脂成形品PM從下模152的脫模。After that, the
繼而,停止從抽吸口162及預備抽吸系統165抽吸氣體,將樹脂成形品PM從保持部16取下。此處,如進行二次成型時那樣,即便樹脂成形品PM的樹脂進行成形直至成形對象物(基板)S的外側為止,由於在保持部16及其周圍鋪設有上模脫模膜FU,因此樹脂不會附著在上模151,從而能夠順利地取出樹脂成形品PM。藉由以上操作,一個樹脂成形品PM的製造完成。Then, the suction of gas from the
根據本實施方式的樹脂成形裝置10以及樹脂成形品製造方法,在將上模脫模膜FU搬送至上模151與下模152之間的操作中,藉由在成形模15的外部在上模脫模膜FU上形成孔部H,而無需在鋪設脫模膜後形成孔部H的步驟,因此可提高生產效率。另外,藉由在成形模15的外部形成孔部H,能夠抑制上模脫模膜FU的渣滓落下至腔室C而混入樹脂成形品PM中,從而提高樹脂成形品PM的品質。According to the
(3)變形例 在樹脂成形裝置10中,作為孔部形成部18,使用形成狹縫狀的孔部H者,但也可使用在上模脫模膜FU上形成圓形的孔部H(參照圖8)的孔部形成部來代替孔部形成部18。所述孔部形成部可設為如下者:設置針來代替刀181,設置使針上下移動的針移動機構來代替刀移動機構182。在上模脫模膜FU中的鋪設在保持部16時成為配置在所述保持部16的部分通過針的正下方的期間,藉由利用針移動機構重複進行針的上下移動,來製作具有多個孔部H的上模脫模膜FU。設置於孔部形成部的針的根數及形成在上模脫模膜FU的孔部H的個數並無特別限定。(3) Modified example In the
已知如下的電漿照射裝置:藉由對樹脂制的膜照射電漿,將所述膜改質成多孔質膜。例如,可藉由從電漿照射裝置對作為氟樹脂的聚四氟乙烯制的膜照射氬電漿,來製作具有多個孔徑為0.5 μm~2 μm程度的圓形小孔的能夠用作氣體透過膜的多孔質膜。在本發明中,可將此種電漿照射裝置用作孔部形成部。具體而言,在所述實施方式的樹脂成形裝置10中,配置此種電漿照射裝置(孔部形成部)18A(圖9)來代替孔部形成部18。此外,當將上模脫模膜FU鋪設在保持部16及其周圍時,在上模脫模膜FU中的鋪設在保持部16時成為配置在所述保持部16的部分通過電漿照射裝置18A的期間,藉由從電漿照射裝置18A對上模脫模膜FU照射電漿PL,可在所述部分形成多個孔。A plasma irradiation device is known that irradiates a resin film with plasma to modify the film into a porous film. For example, by irradiating a membrane made of polytetrafluoroethylene, which is a fluororesin, with argon plasma from a plasma irradiation device, it is possible to produce a gas with a plurality of circular pores with a pore diameter of about 0.5 μm to 2 μm. Permeable porous membrane. In the present invention, such a plasma irradiation device can be used as the hole forming portion. Specifically, in the
或者,也可不在樹脂成形裝置內設置孔部形成部而使用在樹脂成形裝置的外部形成狹縫狀或圓形形狀等的孔部的脫模膜。或者,也可將例如如無紡布那樣包含具有通氣性的原材料的膜作為本發明中所使用的脫模膜。所述情況下,在如下方面與之前的樹脂成形裝置以及樹脂成形品製造方法不同,即,樹脂成形裝置內,不僅在成形模15的外部,而且在成形模15內也不存在孔部形成部。Alternatively, instead of providing the hole forming portion in the resin molding device, a release film in which a hole portion such as a slit shape or a circular shape is formed outside the resin molding device may be used. Alternatively, for example, a film containing a raw material having air permeability such as a nonwoven fabric may be used as the release film used in the present invention. In the above case, it is different from the previous resin molding apparatus and resin molded product manufacturing method in the following point, that is, in the resin molding apparatus, not only the outside of the molding die 15 but also the hole forming portion does not exist in the molding die 15 .
在使用預先在樹脂成形裝置的外部形成孔部的脫模膜的情況下,理想的是在利用成形模保持成形對象物S的區域以外未形成孔部。如此,在使用在吸附區域以外未形成孔部的脫模膜FA的情況下,若在與脫模膜FA中的形成孔部的孔部形成區域HA之間具有規定的位置關係的部位設置位置檢測用標記MK(圖10(a)),並在樹脂成形裝置中設置檢測所述位置檢測用標記MK的位置檢測感測器19(圖10(b))即可。根據此種構成,藉由利用位置檢測感測器19對位置檢測用標記MK進行檢測,樹脂成形裝置的控制部可識別脫模膜FA中的孔部形成區域HA的位置,從而以使孔部形成區域HA的位置對準利用成形模保持成形對象物S的區域的方式搬送脫模膜FA。In the case of using a release film in which holes are formed in the outside of the resin molding apparatus in advance, it is desirable that no holes are formed other than the region where the molded object S is held by the mold. In this way, in the case of using the release film FA in which holes are not formed outside of the suction area, the position is provided at a location having a predetermined positional relationship with the hole forming area HA where the holes are formed in the release film FA The detection mark MK (FIG. 10(a)), and the position detection sensor 19 (FIG. 10(b)) which detects the position detection mark MK may be provided in the resin molding apparatus. According to this configuration, by detecting the position detection mark MK with the
位置檢測用標記MK的形狀並無特別限定。另外,位置檢測用標記MK的位置也(只要與孔部形成區域HA之間具有預定的位置關係)無特別限定,可處於孔部形成區域HA內,也可處於孔部形成區域HA外。位置檢測感測器19的位置在圖10(b)所示的例子中,配置在將脫模膜FA搬送至成形模15(在圖10(b)中僅示出上模151)的近前即比成形模15更靠第1卷軸171處,但也可配置在比成形模15更靠第2卷軸172處。The shape of the position detection mark MK is not particularly limited. In addition, the position of the position detection mark MK (as long as it has a predetermined positional relationship with the hole formation area HA) is not particularly limited, and may be inside the hole formation area HA or outside the hole formation area HA. In the example shown in FIG. 10(b), the position of the
位置檢測感測器19例如可使用包含發光元件與接收從所述發光元件發出的光的光接收元件的光學感測器。作為此種光學感測器,可使用反射型光學感測器或透過型光學感測器,所述反射型光學感測器利用光接收元件接收從發光元件發出並經脫模膜反射的光,所述透過型光學感測器利用光接收元件接收從發光元件發出並透過脫模膜的光。As the
再者,可不使用所述位置檢測感測器19,而基於搬送部17的動作來檢測脫模膜FA的位置並且利用搬送控制部來控制搬送部17搬送的脫模膜FA的長度。具體而言,當將脫模膜FA安裝在第1卷軸171及第2卷軸172時,在進行相對於成形模15的對位後,基於第2卷軸172的旋轉量或旋轉機構的旋轉量,使用搬送控制部來進行脫模膜FA的輸送量的檢測及控制。由此,控制部可識別脫模膜FA的孔部形成區域HA的位置,從而以使孔部形成區域HA的位置對準利用成形模保持成形對象物S的區域的方式搬送脫模膜FA。Furthermore, instead of using the
可在本實施方式的樹脂成形裝置10以及樹脂成形品製造方法中所使用的上模脫模膜FU或脫模膜FA的與成形對象物S接觸的面上塗布有黏合劑。由此,當經由上模脫模膜FU(或脫模膜FA)而使成形對象物S保持於保持部16時,上模脫模膜FU(同上)與成形對象物S被黏合劑黏接,從而使成形對象物S保持於保持部16。The surface of the upper mold release film FU or the release film FA used in the
在本實施方式的樹脂成形裝置10以及樹脂成形品製造方法中,將捲繞在第1卷軸171的上模脫模膜FU從所述第1卷軸171抽出來使用,但也可代替所述上模脫模膜FU而使用在成形模15的外部預先將膜切斷成匹配鋪設在上模151的保持部16及其周圍的範圍的大小後,形成氣體通過部的上模脫模膜;或將形成有氣體通過部的膜或包含具有通氣性的材質的膜切斷成所述大小而成的上模脫模膜。此種情況下,在將已切斷的上模脫模膜載置在成形對象物上的狀態下,藉由利用成形對象物搬送機構將成形對象物搬送至保持部16,並從抽吸口162抽吸氣體,從而使上模脫模膜及成形對象物吸附於成形對象物接觸面161,由此可經由上模脫模膜而使成形對象物保持於保持部16。此種情況下,可使用具有長方形以外的圓形等平面形狀的上模脫模膜。In the
在本實施方式的樹脂成形裝置10中使用進行壓縮成形的成形模15,但在進行轉移成形的成形模中,也可使用與樹脂成形裝置10同樣的具有保持部16的上模151、搬送部17及孔部形成部(包含電漿照射裝置18A)18。In the
圖11中示出具有本實施方式的樹脂成形裝置的樹脂成形單元50。樹脂成形單元50具有一台成形對象物搬出搬入模塊51、一台或多台成形模塊52以及一台樹脂材料供給模塊53。成形對象物搬出搬入模塊51是將成形對象物S從外部搬入,並且將樹脂成形品PM搬出至外部的裝置,且具有成形對象物接收部511及樹脂成形品保持部512。關於成形模塊52,每一個均具備一組所述樹脂成形裝置10。圖11中示出了三台成形模塊52,但在樹脂成形單元50中可設置任意台數的成形模塊52。另外,即便在已組成樹脂成形單元50並開始使用後,也可增減成形模塊52。樹脂材料供給模塊53具有樹脂材料供給裝置531,所述樹脂材料供給裝置531將用於樹脂成形的樹脂材料供給至用以從樹脂材料供給模塊53轉移至成形模塊52的樹脂材料轉移托盤58。The
在樹脂成形單元50中以貫穿成形對象物搬出搬入模塊51、一台或多台成形模塊52及樹脂材料供給模塊53的方式,設置有對成形對象物S、樹脂材料轉移托盤58及樹脂成形品進行搬送的主搬送裝置56。另外,在各模塊內,在主搬送裝置56與所述模塊內的裝置之間設置有對成形對象物S、樹脂材料轉移托盤58及樹脂成形品PM進行搬送的副搬送裝置57。The
在使用搬送部17將上模脫模膜FU搬送至上模151與下模152之間的情況下,將長條的上模脫模膜FU配設在各成形模塊52內所設置的上模脫模膜鋪設裝置17的第1卷軸171,並且將纏繞用的空芯配設在第2卷軸172,將已使用的上模脫模膜FU纏繞在第2卷軸172。另一方面,在將已切斷的上模脫模膜搬送至上模151與下模152之間的情況下,使用主搬送裝置56及副搬送裝置57,將上模脫模膜從成形對象物搬出搬入模塊51供給至各成形模塊52,並且將已使用的上模脫模膜轉移至樹脂材料供給模塊53。In the case where the upper mold release film FU is transported between the
此外,樹脂成形單元50具有用以使所述各模塊動作的電源及控制部(均未圖示)。In addition, the
以下,對樹脂成形單元50的動作進行說明。成形對象物S由作業者保持於成形對象物搬出搬入模塊51的成形對象物接收部511。另外,上模脫模膜FU由作業者以所述方式配設在上模脫模膜鋪設裝置17。Hereinafter, the operation of the
首先,在成形模塊52中的一台模塊上,利用樹脂成形裝置10的搬送部17將上模脫模膜FU搬送至上模151與下模152之間。另外,利用下模脫模膜FD覆蓋腔室C的內表面。接著,利用主搬送裝置56及副搬送裝置57,將成形對象物S從成形對象物接收部511搬送至位於成形模塊52中的一台模塊中的樹脂成形裝置10,並配置在所述樹脂成形裝置10的保持部16的正下方。而且,如上所述使成形對象物S保持於保持部16。繼而,將樹脂材料從樹脂材料供給裝置531供給至樹脂材料轉移托盤58,利用主搬送裝置56及副搬送裝置57,使樹脂材料轉移托盤58移動至使成形對象物S保持於保持部16的成形模塊52,並從樹脂材料轉移托盤58將樹脂材料P供給至所述成形模塊52的下模152的腔室C。First, on one of the
其後,在已將樹脂材料P供給至腔室C的成形模塊52中,將上模151與下模152合模來進行樹脂成形。在所述樹脂成形期間,對其他成形模塊52進行脫模膜的鋪設、成形對象物S的安裝及樹脂材料對於腔室C的供給,由此做好利用所述成形模塊52進行樹脂成形的準備。After that, in the
在一台成形模塊52的樹脂成形裝置10內,樹脂材料P硬化後,將上模151與下模152開模,使樹脂成形品PM從腔室C脫模。進而,將樹脂成形品PM從保持部16取下,利用主搬送裝置56及副搬送裝置57,將樹脂成形品PM搬送至成形對象物搬出搬入模塊53的樹脂成形品保持部512。作業者適當地將樹脂成形品PM從樹脂成形品保持部512取出。In the
10‧‧‧樹脂成形裝置15‧‧‧成形模16‧‧‧保持部17‧‧‧搬送部(上模脫模膜鋪設裝置)18‧‧‧孔部形成部18A‧‧‧電漿照射裝置(孔部形成部)19‧‧‧位置檢測感測器50‧‧‧樹脂成形單元51‧‧‧成形對象物搬出搬入模塊52‧‧‧成形模塊53‧‧‧樹脂材料供給模塊56‧‧‧主搬送裝置57‧‧‧副搬送裝置58‧‧‧樹脂材料轉移托盤111‧‧‧襯底112‧‧‧繫桿113‧‧‧曲柄連桿121‧‧‧可動台板122‧‧‧固定台板141‧‧‧加熱器142‧‧‧隔熱材151‧‧‧上模(第1模)152‧‧‧下模(第2模)161‧‧‧成形對象物接觸面162‧‧‧抽吸口163‧‧‧氣體抽吸管165‧‧‧預備抽吸系統171‧‧‧第1卷軸172‧‧‧第2卷軸181‧‧‧刀182‧‧‧刀移動機構511‧‧‧成形對象物接收部512‧‧‧樹脂成形品保持部531‧‧‧樹脂材料供給裝置1521‧‧‧側面構件1522‧‧‧底面構件1523‧‧‧彈性構件C‧‧‧腔室FA‧‧‧脫模膜FD‧‧‧下模脫模膜FU‧‧‧上模脫模膜(脫模膜)H‧‧‧孔部HA‧‧‧孔部形成區域MK‧‧‧位置檢測用標記P‧‧‧樹脂材料PL‧‧‧電漿PM‧‧‧樹脂成形品S‧‧‧成形對象物T1、T2‧‧‧扭矩10‧‧‧Resin molding equipment 15‧‧‧Forming mold 16‧‧‧Holding part 17‧‧‧Transfer part (upper mold release film laying device) 18‧‧‧Hole forming part 18A‧‧‧Plasma irradiation device (Hole forming part) 19‧‧‧Position detection sensor 50‧‧‧ Resin molding unit 51‧‧‧ Molding object loading/unloading module 52‧‧‧ Molding module 53‧‧‧Resin material supply module 56‧‧‧ Main conveyor 57‧‧‧Sub conveyor 58‧‧‧Resin material transfer tray 111‧‧‧Substrate 112‧‧‧Tie rod 113‧‧‧Crank connecting rod 121‧‧‧Movable platen 122‧‧‧Fixed table Plate 141‧‧‧Heater 142‧‧‧Insulation material 151‧‧‧Upper mold (first mold) 152‧‧‧Lower mold (second mold) 161‧‧‧Forming object contact surface 162‧‧‧Drawing Suction port 163‧‧‧Gas suction pipe 165‧‧‧Preparation suction system 171‧‧‧First scroll 172‧‧‧Second scroll 181‧‧Knife 182‧‧‧Knife moving mechanism 511‧‧‧Shaped object Object receiving part 512‧‧‧Resin molded product holding part 531‧‧‧Resin material supply device 1521‧‧‧Side member 1522‧‧‧Bottom member 1523‧‧‧Elastic member C‧‧‧Cavity FA‧‧‧Release Membrane FD‧‧‧Lower mold release film FU‧‧‧Upper mold release film (release film) H‧‧‧Hole HA‧‧‧Hole forming area MK‧‧‧Mark for position detection P‧‧‧ Resin material PL‧‧‧Plasma PM‧‧‧Resin molded product S‧‧‧Molding object T 1 , T 2 ‧‧‧Torque
圖1是本發明的樹脂成形裝置的概略構成圖。 圖2是說明本實施方式的樹脂成形裝置的動作的圖,且是表示在上模及下模中鋪設脫模膜的過程的圖。 圖3是表示形成有作為氣體通過部的狹縫的脫模膜的一例的平面圖。 圖4是說明本實施方式的樹脂成形裝置的動作的圖,且是表示將成形對象物保持於上模的保持部,將樹脂材料供給至下模的腔室的狀態的圖。 圖5是說明本實施方式的樹脂成形裝置的動作的圖,且是表示進行合模的狀態的圖。 圖6是說明本實施方式的樹脂成形裝置的動作的圖,且是表示進行開模的狀態的圖。 圖7是說明本實施方式的樹脂成形裝置的動作的圖,且是表示將樹脂成形品從保持部取下的狀態的圖。 圖8是表示形成有作為氣體通過部的孔的脫模膜的一例的平面圖。 圖9是表示使用電漿照射裝置作為氣體通過部形成機構的樹脂成形裝置的例子的局部放大圖。 圖10(a)是表示設置有位置檢測用標記的脫模膜的一例的平面圖,及圖10(b)是表示具有位置檢測感測器的樹脂成形裝置的例子的局部放大圖。 圖11是表示具有本實施方式的樹脂成形裝置的樹脂成形單元的構成的概略圖。Fig. 1 is a schematic configuration diagram of a resin molding apparatus of the present invention. It is a figure explaining the operation|movement of the resin molding apparatus of this embodiment, and is a figure which shows the process of laying a release film in an upper mold and a lower mold. Fig. 3 is a plan view showing an example of a release film in which a slit as a gas passage portion is formed. 4 is a diagram explaining the operation of the resin molding apparatus of the present embodiment, and is a diagram showing a state in which the molding object is held in the holding portion of the upper mold and the resin material is supplied to the cavity of the lower mold. Fig. 5 is a diagram illustrating the operation of the resin molding apparatus of the present embodiment, and is a diagram showing a state where mold clamping is performed. FIG. 6 is a diagram explaining the operation of the resin molding apparatus of the present embodiment, and is a diagram showing a state in which mold opening is performed. Fig. 7 is a diagram explaining the operation of the resin molding apparatus of the present embodiment, and is a diagram showing a state where the resin molded product is removed from the holding portion. Fig. 8 is a plan view showing an example of a release film formed with a hole as a gas passage portion. Fig. 9 is a partially enlarged view showing an example of a resin molding apparatus using a plasma irradiation apparatus as a gas passage portion forming mechanism. Fig. 10 (a) is a plan view showing an example of a release film provided with a position detection mark, and Fig. 10 (b) is a partial enlarged view showing an example of a resin molding apparatus having a position detection sensor. FIG. 11 is a schematic diagram showing the configuration of a resin molding unit including the resin molding apparatus of this embodiment.
15‧‧‧成形模 15‧‧‧Forming die
16‧‧‧保持部 16‧‧‧Retention Department
17‧‧‧搬送部(上模脫模膜鋪設裝置) 17‧‧‧Conveying part (upper mold release film laying device)
18‧‧‧孔部形成部 18‧‧‧Hole forming part
111‧‧‧襯底 111‧‧‧Substrate
112‧‧‧繫桿 112‧‧‧Tie rod
113‧‧‧曲柄連桿 113‧‧‧Crank connecting rod
121‧‧‧可動台板 121‧‧‧movable table
122‧‧‧固定台板 122‧‧‧Fixed platen
141‧‧‧加熱器 141‧‧‧Heater
142‧‧‧隔熱材 142‧‧‧Insulation material
151‧‧‧上模(第1模) 151‧‧‧Upper mold (1st mold)
152‧‧‧下模(第2模) 152‧‧‧Lower die (2nd die)
161‧‧‧成形對象物接觸面 161‧‧‧Shaped object contact surface
162‧‧‧抽吸口 162‧‧‧Suction port
163‧‧‧氣體抽吸管 163‧‧‧Gas Suction Pipe
165‧‧‧預備抽吸系統 165‧‧‧Preparation suction system
171‧‧‧第1卷軸 171‧‧‧Volume 1
172‧‧‧第2卷軸 172‧‧‧Volume 2
181‧‧‧刀 181‧‧‧Knife
182‧‧‧刀移動機構 182‧‧‧Knife moving mechanism
1521‧‧‧側面構件 1521‧‧‧Side members
1522‧‧‧底面構件 1522‧‧‧Bottom member
1523‧‧‧彈性構件 1523‧‧‧Elastic member
C‧‧‧腔室 C‧‧‧ Chamber
FU‧‧‧上模脫模膜(脫模膜) FU‧‧‧Upper mold release film (release film)
Claims (11)
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| JP7341112B2 (en) * | 2020-10-06 | 2023-09-08 | Towa株式会社 | Manufacturing method for resin molded products |
| JP7360407B2 (en) * | 2021-02-10 | 2023-10-12 | Towa株式会社 | Resin molding equipment and method for manufacturing resin molded products |
| JP2022173612A (en) * | 2021-05-10 | 2022-11-22 | Towa株式会社 | Method for producing resin molding, molding die and resin molding device |
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| JP4077118B2 (en) | 1999-06-25 | 2008-04-16 | 富士通株式会社 | Semiconductor device manufacturing method and semiconductor device manufacturing mold |
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