TWI704355B - Suitable for probe modules with multiple units to be tested with inclined conductive contacts - Google Patents

Abstract

A probe module is used to simultaneously detect first and second units to be tested adjacent to side edges. The first and second units to be tested respectively have first and second boundaries adjacent to their first main edge and adjacent side edges Contact; the probe module includes a probe holder, and the first and second junction probes at different heights of the probe holder, when the probe module detects the first and second units to be tested, each The first main edge of the unit to be tested is closer to the probe holder than the second main edge, and the first and second junction probes are separated by their cantilever sections passing over the first main edge of the first and second units to be tested. Extend to the top of the first and second junction contacts and then touch the first and second junction contacts with its point contact section; thereby, the first and second junction probes can avoid mutual interference.

Description

Suitable for probe modules with multiple units to be tested with inclined conductive contacts

The present invention relates to the probe module of the probe card, and particularly relates to a probe module suitable for multi-UUT with inclined conductive contacts.

Please refer to FIG. 1, which shows a unit under test (UUT) with inclined conductive contacts. The unit under test 10 can be an unpackaged die or a packaged chip. The unit under test 10 has a plurality of first conductive contacts 11 arranged in one or more rows for outputting signals, and a plurality of second conductive contacts 12 arranged in a row for inputting signals, such as the one shown in FIG. 1 The unit under test 10 has three rows of first conductive contacts 11 arranged from a first long side 131 of a substrate 13 toward a second long side 132, and a row of first conductive contacts 11 arranged along the second long side 132 of the substrate 13 Two conductive contacts 12, the first and second conductive contacts 11, 12 are arranged in multiple rows, and the arrangement direction of each row is parallel to a dividing axis L perpendicular to the first and second long sides 131, 132, and is close to The row of the demarcation axis L, such as that contained in a middle block 14 in FIG. 1, wherein the long sides 111, 121 of the first and second conductive contacts 11, 12 are parallel to the demarcation axis L, and are distant from the demarcation axis L The first and second conductive contacts 11 and 12 in the row farther from the axis L are inclined conductive contacts, which are closer to one end of the first long side 131 of the substrate 13 and also closer to the boundary axis L, and farther away from the substrate 13. One end of the long side 131 is also farther away from the demarcation axis L, that is, the inclined conductive contact is inclined from top to bottom and from the inside to the outside in the direction of FIG. 1, and the first one is farther from the demarcation axis L , The greater the angle between the two conductive contacts 11, 12 relative to the demarcation axis L, for example, the longer sides 111, 121 of the first and second conductive contacts 11, 12 included in the two outer blocks 15, 16 in FIG. The angles θ1 and θ2 at the boundary axis L are the largest.

The aforementioned unit under test 10 can be tested by using a probe card with a cantilever probe. To simplify the diagram, only a probe 17 corresponding to the second conductive contact 12 on the left is schematically shown in FIG. Each conductive contact 11, 12 corresponds to a probe, and the cantilever section 171 of the probe 17 can extend from a probe holder 18 above the second long side 132 of the unit under test 10 to the conductive contact Above 12, one of the touch sections (not shown in the figure) extending downward from the end of the cantilever section 171 of the probe 17 can touch the corresponding conductive contact 12.

However, because the unit under test 10 has inclined conductive contacts with inconsistent tilt angles, it is difficult to arrange the probes required for its detection on the probe holder, especially for the detection of multiple units under test, that is, at least two units to be tested at the same time. In the measurement unit 10, there will be doubts that the probes 17 interfere with each other, so there is still no suitable detection device.

In view of the above-mentioned shortcomings, the main purpose of the present invention is to provide a probe module, which is suitable for the detection of multiple units under test with inclined conductive contacts similar to the above-mentioned, so as to avoid mutual interference of probes.

In order to achieve the above object, the probe module provided by the present invention is used to simultaneously detect a plurality of units to be tested. Each unit to be tested has a first main edge, a second main edge, connecting the first main edge and the A first side edge and a second side edge of the second main edge, and a plurality of conductive contacts. The plurality of units under test includes a first unit under test and a second unit under test, the first unit under test The second side edge is adjacent to the first side edge of the second unit under test, and the conductive contacts of the first unit under test include a first main edge and a second side adjacent to the first unit under test The first boundary contact of the edge, and the conductive contact of the second unit to be tested includes a second boundary contact adjacent to the first main edge and the first side edge of the second unit to be tested.

The probe module includes at least one probe holder and a plurality of probes. Each probe includes a cantilever section and a one-point contact section. The cantilever section has a fixed portion fixedly connected to the probe holder and a connection At the fixing portion and extending from an inner side surface of the probe base, the exposed portion is exposed, and the point contact section is connected to the exposed portion. Wherein, the at least one probe holder includes a first probe holder, and the plurality of probes includes a first junction probe and a second junction probe that are arranged on the first probe holder and are located at different heights, When the probe module detects the waiting unit, the first main edge of each unit to be tested is closer to the first probe holder than the second main edge, the first junction probe and the second junction probe The cantilever section of the needle passes over the first main edge of the first unit to be tested and the second unit to be tested, and extends to the first junction contact and the second junction contact respectively, and then touches with its point. The segments respectively touch the first junction contact and the second junction contact.

In other words, the present invention is mainly aimed at the conductive contacts where the adjacent side edges of adjacent units under test are adjacent to the first main edge, that is, the first and second junction contacts. The probe module of the present invention is based on the proximity The first and second junction probes of the first probe holders extending from different heights of the first main edge of the unit to be tested touch the first and second junction contacts respectively. There is no limit to the probe configuration of the probe module used to touch other conductive contacts of the waiting unit.

Since the first and second junction probes are located at different heights, even if the first and second junction points are close to each other in the extension direction of the first main edge, the exposed part of the cantilever section of the first and second junction probes is from the first probe The direction in which the needle holder extends can still be matched with the extension direction of the first and second junction contacts to prevent the probe from accidentally sliding onto the non-corresponding conductive contacts during point measurement, that is, the first and second junction probes The exposed part of the cantilever section can extend obliquely from the first probe holder and gradually approach the corresponding junction point, even if the required inclination angle is large, so that the cantilever sections of the first and second junction probes are quite close to each other or even The parts must be located on the same vertical plane, and the first and second junction probes are located at different heights to avoid mutual interference.

In fact, the probes extending from the different heights of the first probe holder are not limited to touch the first and second junction points adjacent to the first main edge as mentioned above, but can be applied to any position possible Conductive contacts that cause probes of the same height to be too close or interfere with each other, so that the probes corresponding to the conductive contacts that may cause the aforementioned problems (both referred to as the first and second junction probes in the present invention) are arranged It can avoid probe interference at different heights.

The detailed structure, characteristics, assembly or use of the probe module with multiple units to be tested with inclined conductive contacts provided by the present invention will be described in the detailed description of the subsequent embodiments. However, those with ordinary knowledge in the field of the present invention should be able to understand that these detailed descriptions and specific examples for implementing the present invention are only used to illustrate the present invention, and are not intended to limit the scope of the patent application of the present invention.

[Prior Art]

10: Unit to be tested

11: The first conductive contact

111: long side

12: The second conductive contact

121: long side

13: substrate

131: The first long side

132: second long side

14: Middle block

15, 16: Outer block

17: Probe

171: Cantilever section

18: Probe holder

L: Demarcation axis

θ1, θ2: angle

[Example]

20, 20’: Probe module

21: (first) probe holder

211: inside

212: outer side

22: (second) probe holder

221: inside

222: outer side

30a: (first) probe

30b: (second) probe

30c~i: (third) probe

31: Cantilever section

311: Fixed part

311a: inner section

311b: Outer section

312: Exposed

32: Touch segment

40: circuit board

41: Bottom

50A~D: 1st~4th unit to be tested

51: First Main Edge

52: Second Main Edge

53: first side edge

54: second side edge

55a: (first) conductive contact

55b~d: (second) conductive contact

551: first end

552: second end

56: upper surface

57: middle block

58: Left block

59: right block

61: The first junction

62: second junction

63: The first junction probe

64: second junction probe

A1: Demarcation axis

A2: Horizontal axis

D1: Touch direction

D2: Extension direction

d: vertical distance

L1~L3: first to third line

L4: Demarcation axis

L5: First dividing line

L6: Second dividing line

P1~P5: the first to fifth needle layers

Figure 1 is a schematic top view of a unit under test with inclined conductive contacts, a probe and a probe holder.

2 is a schematic top view of a probe module, a first unit under test, and a second unit under test provided by a first preferred embodiment of the present invention, but the third of the probe module is not shown Probe.

Fig. 3 is the right side view of Fig. 2, but it also shows the third probe of the probe module and a circuit board.

Fig. 4 is similar to Fig. 2, except that the probe shown therein is only a part of the third probe.

Fig. 5 is similar to Fig. 4, except that the probe shown therein is only another part of the third probe.

Figure 6 is similar to Figure 5, except that the probe shown therein is only another part of the third probe.

Fig. 7 is similar to Fig. 2, except that the fixed part and the exposed part of the probe in Fig. 7 are in a straight line.

8 is a schematic top view of the probe module and the first to fourth units under test provided by a second preferred embodiment of the present invention, but the probe shown in it is only a part of the third probe .

Fig. 9 is the right side view of Fig. 8, but it shows other probes of the probe module.

The applicant first explains here that in the following embodiments and drawings, the same reference numbers indicate the same or similar elements or structural features. It should be noted that the various elements and structures in the drawings are for illustrative purposes and are not drawn based on actual proportions and quantities, and if possible in implementation, the features of different embodiments can be applied interactively.

2-6, the probe module 20 provided by a first preferred embodiment of the present invention mainly includes a first probe holder 21, a second probe holder 22, and a plurality of probes 30a~e .

Each of the probes 30a~e is made of a conductive material (for example, metal) by bending a straight needle through machining, as shown in FIG. 3, each of the probes 30a~e includes a cantilever section 31 and a one-point contact section 32. The cantilever section 31 has a fixing part 311 fixedly connected to the first probe holder 21 or the second probe holder 22, and a fixing part 311 connected to the fixing part 311 and extending from one of the first probe holders 21 The side surface 211 or an inner side surface 221 of the second probe base 22 extends out of the exposed portion 312. As shown in Figures 2 and 4~6, the cantilever sections 31 of the probes 30a~e are not bent so that the fixed part 311 and the exposed part 312 are in line, while the cantilever sections of the probes 30a~e of the other part 31 is bent so that the fixed portion 311 and the exposed portion 312 are not in a straight line. As shown in FIG. 3, the touch section 32 of each probe 30a~e extends downward from the end of the exposed portion 312.

The first probe holder 21 and the second probe holder 22 are made of insulating material (for example, vinyl), and the first and second probe holders 21, 22 face each other with their inner sides 211, 221 Is arranged and usually fixed on the bottom surface 41 of a circuit board 40 (as shown in FIG. 3), so that the circuit board 40, the first and second probe holders 21, 22 and the probes 30a~e are combined into one probe Needle card.

In the embodiment of the present invention, the fixing portion 311 of each of the probes 30a~e is located in the first or second probe holder 21, 22, and the fixing method is to use vinyl to simultaneously apply the same needle layer (detailed in Below) the probe is set at a predetermined position on the probe base, and then the black glue is dried to fix the probe on the probe base. However, the fixing portion 311 of each probe 30a~e can also be fixed on the outer surface of the first or second probe holder 21, 22 by glue. Each of the probes 30a~e may further have a connecting section (not shown) extending from an outer surface 212 of the first probe holder 21 or an outer surface 222 of the second probe holder 22, to The connecting section is electrically connected to the conductive contacts (not shown in the figure) on the bottom surface 41 of the circuit board 40.

In detail, the fixing portion 311 of the inclined probe 30a~e (where the exposed portion 312 is inclined) in this embodiment includes an inner section 311a connected to the exposed portion 312, and an inner section 311a extending from the inner section 311a to The outer surface of the probe holder is connected to the aforementioned connecting section with the outer section 311b. The inner section 311a is in line with the exposed portion 312 and is inclined, and the outer section 311b is in line with the aforementioned connecting section and perpendicular to The inner and outer sides of the probe holder (that is, parallel to the untilted probe). The way the probe is tilted is to first straighten the line according to the extension direction D2 of the corresponding conductive contact (detailed below) The needle is placed on the probe holder and the inner section 311a of the fixing portion 311 is fixed with black glue to fix the exposed portion 312 of the probe at a desired angle (that is, parallel to the extending direction of the corresponding conductive contact D2). At this time, the probe has been fixed on the probe holder, and then bend its fixing part 311 so that the outer section 311b and the connecting section are perpendicular to the inner and outer sides of the probe holder, and then fix it with vinyl The outer section 311b, in this way, can facilitate the bending operation, and can make the bending angle of the probe well fixed and not easy to rebound.

The probe module of the present invention is used to detect multiple units to be tested, that is, to detect a plurality of units to be tested at the same time. For example, the probe module 20 of this embodiment is used to detect a first unit to be tested 50A at the same time And a second unit under test 50B. The unit under test in the embodiment of the present invention is the same as the unit under test 10 (shown in FIG. 1) described in the prior art, but in order to describe the features of the present invention more clearly, In the embodiments, different description methods are used with different component numbers from FIG. 1 to further illustrate the unit under test.

As shown in FIGS. 2 and 3, an upper surface 56 of each unit under test 50A, 50B has first and second main edges 51, 52 (usually long sides) facing opposite directions, connecting the first and second main edges 51, 52 and the first and second side edges 53, 54 (usually short sides) facing opposite directions, and a plurality of conductive contacts 55a~d. The second side edge 54 of the first unit under test 50A is connected to the first The first side edges 53 of the two test cells 50B are adjacent. When the probe module 20 detects the waiting units 50A, 50B, the first and second probe holders 21, 22 are respectively located on the outer side of the first main edge 51 and the second main edge of the units 50A, 50B to be tested 52 above the outer side, in other words, the first main edge 51 of each unit under test 50A, 50B is closer to the first probe holder 21 than the second main edge 52, and the second main edge of each unit under test 50A, 50B 52 is closer to the second probe holder 22 than the first main edge 51. The probe module 20 as a whole (together with the aforementioned circuit board 40) moves downwards to touch the probes 30a~e. Conductive contacts 55a~d.

It should be noted here that the present invention defines the touch direction D1 of the probes 30a~e (as shown in FIG. 3) as downward, and uses this as a reference to describe the directionality of other features (such as up and down). , Top, bottom, etc.), for example, the upper surface 56 of each of the aforementioned units under test 50A, 50B provided with conductive contacts 55a~d is the surface facing the opposite direction of the touch direction D1, the aforementioned circuit board 40 The bottom surface 41 of the first and second probe holders 21 and 22 is the surface facing the touch direction D1. However, the aforementioned directionality only describes that each feature tends to the touch direction D1 (for example, downward) or the opposite direction of the touch direction D1 (for example, upward), rather than conforms to the touch direction D1 or D1 without error. The direction opposite to the touch direction D1. For example, the touch section 32 of each of the probes 30a~e extends downward from the end of the exposed portion 312, which means that the touch section 32 faces the touch direction D1 Extend, or, as shown in FIG. 3, the touch segment 32 is inclined toward the touch direction D1 with respect to the touch direction D1.

In each of the units under test 50A, 50B, each of the conductive contacts 55a~d has a first end 551 facing the first main edge 51 and a second end 552 facing the second main edge 52, for simplicity In the diagram, only the first end 551 and the second end 552 of the three conductive contacts in FIG. 4 are marked. Each of the conductive contacts 55a~d can define a line from the second end 552 to the first end 551. The extension direction D2. As shown in Figure 2, in this embodiment, each of the units under test 50A, 50B can define a demarcation axis A1, and the conduction between the demarcation axis A1 of each unit under test 50A, 50B and the first side edge 53 The extension direction D2 of the contacts 55a~d is parallel to the demarcation axis A1 (for example, the conductive contact in the middle block 57 marked in FIG. 4) or is close to the demarcation axis A1 toward the first side edge 53 Inclined (for example, the conductive contacts located in the left block 58 marked in FIG. 4), the extending direction D2 of the conductive contacts 55a~d between the dividing axis A1 of each unit under test 50A, 50B and the second side edge 54 Is parallel to the demarcation axis A1 (for example, the conductive contact located in the middle area 57 marked in FIG. 4) or is inclined with respect to the demarcation axis A1 close to the second side edge 54 (for example, in the position marked in FIG. 4 The conductive contacts of the right block 59). More specifically, the extending direction D2 of the conductive contacts 55a~d (located in the middle block 57) near the demarcation axis A1 is parallel to the demarcation axis A1, and the conductive contact 55a farther from the demarcation axis A1 ~d, the greater the degree of inclination relative to the dividing axis A1.

As shown in FIGS. 2 and 4 to 6, in each of the units under test 50A, 50B, the conductive contacts 55a-d are divided into first conductive contacts 55a adjacent to the first main edge 51, and The second conductive contacts 55b~d adjacent to the second main edge 52, wherein the second conductive contacts 55b are parallel to a horizontal axis A2 and are arranged in a first row L1 along the second main edge 52 (as shown in FIG. 4), the second conductive contacts 55c are arranged parallel to the horizontal axis A2 in a second row L2 (as shown in Figure 5) next to the first row L1, and the second conductive contacts 55d are parallel to The horizontal axis A2 is arranged in a third row L3 (as shown in FIG. 6) next to the second row L2, and the first to third rows L1~L3 are in sequence from the second main edge 52 toward the first A main edge 51 is arranged in the direction. As shown in FIG. 2, the first conductive contacts 55a of each unit under test 50A, 50B are arranged in a row along the first main edge 51 parallel to the horizontal axis A2, and the first unit under test The first conductive contact 55a of the element 50A includes a first junction contact 61 adjacent to the second side edge 54 of the first unit under test 50A, and the first conductive contact 55a of the second unit under test 50B includes A second junction point 62 adjacent to the first side edge 53 of the second unit under test 50B.

The probes 30a~e of the probe module 20 are divided into a first probe 30a (as shown in FIG. 2) disposed on the left half of the first probe holder 21, and a first probe 30a disposed on the first probe holder 21. The second probe 30b (shown in Figure 2) on the right half, and the third probe 30c~e (shown in Figures 4 to 6) arranged on the second probe holder 22, the first probes The needles 30a are respectively used to touch the first conductive contact 55a of the first unit under test 50A, and the second probes 30b are respectively used to touch the first conductive contact 55a of the second unit under test 50B , The third probes 30c~e are used to touch the second conductive contacts 55b~d, respectively.

As shown in FIGS. 2 and 3, the first probes 30a are arranged in a row in an arrangement corresponding to the first conductive contacts 55a of the first unit under test 50A to form a first probe base 21 In the first needle layer P1, the second probes 30b are arranged in a row in an arrangement corresponding to the first conductive contacts 55a of the second unit under test 50B, and form a height lower than The first needle layer P1 is the second needle layer P2. As shown in FIGS. 3 and 4, the third probes 30c are arranged in a row corresponding to the arrangement of the second conductive contacts 55b to form a third needle layer P3 on the second probe base 22. As shown in FIGS. 3 and 5, the third probes 30d are arranged in a row corresponding to the arrangement of the second conductive contacts 55c to form a height higher than the third probe base 22 on the second probe base. Needle layer P3 is the fourth needle layer P4. As shown in FIGS. 3 and 6, the third probes 30e are arranged in a row corresponding to the arrangement of the second conductive contacts 55d to form a height higher than the fourth probe base 22 on the second probe base. Needle layer P4 is the fifth needle layer P5.

In other words, the third probes 30c~e are arranged in three rows (the same number of rows as the second conductive contacts 55b~d), and the order is from bottom to top corresponding to the second conductive contacts 55b~d. From the first to the third row L1~L3, the third probe of the higher needle layer is used to touch the conductive contact that is farther from the second probe holder 22, and the higher the position of the needle layer The longer the cantilever section of the third probe. The first and second probes 30a, 30b appear to line up in a row in the top view shown in FIG. 2, but they are actually As shown in Figure 3, they are arranged in two rows at different heights, but the first and second probes 30a, 30b of the two rows extend to the first conductive contacts 55a arranged in the same row, so the first and second probes The vertical distance d between the end of the touch section 32 of the needles 30a and 30b and the inner surface 211 of the first probe holder 21 is the same.

When the probe module 20 detects the waiting units 50A, 50B, the first probes 30a extend to the first probes 30a with their cantilever sections 31 passing over the first main edge 51 of the first unit 50A to be tested. Above the first conductive contact 55a of a unit under test 50A (as shown in FIG. 2), the touch segments respectively touch the first conductive contact 55a of the first unit under test 50A, and the second probes 30b is based on the cantilever section 31 passing over the first main edge 51 of the second unit under test 50B and respectively extending to above the first conductive contact 55a of the second unit under test 50B (as shown in FIG. 2), and then using the The touch segments respectively touch the first conductive contacts 55a of the first unit under test 50B, and the third probes 30c pass over the second main edges 52 of the units under test 50A, 50B with their cantilever segments 31 Extend above the second conductive contacts 55b (as shown in FIG. 4) to touch the second conductive contacts 55b with its point contact section 32, and the third probes 30d pass through the cantilever section 31 The second main edge 52 of the waiting unit 50A, 50B extends above the second conductive contacts 55c (as shown in FIG. 5), and then touches the second conductive contacts 55c with its point contact section 32 , The third probes 30e extend above the second conductive contacts 55d (as shown in FIG. 6) with their cantilever sections 31 passing over the second main edges 52 of the waiting units 50A, 50B to The touch section 32 touches the second conductive contacts 55d.

In this embodiment, the direction in which the exposed portion 312 of each probe 30a~e extends from the probe holder 21, 22 corresponds to the extension of the conductive contact 55a~d to be touched by the probe 30a~e. The direction D2, referred to here as "corresponding", means that the direction in which the exposed portion 312 extends from the probe holders 21 and 22 does not have to be the same or opposite to the extending direction D2 of the corresponding conductive contacts 55a~d, but from When looking from top to bottom (that is, the direction of Figures 2 and 4~6), the exposed portion 312 is almost parallel to the extending direction D2 of the corresponding conductive contacts 55a~d, so as to avoid the touch section of the probe 30a~e 32 Deviation to the corresponding guide when The problem of inaccurate touch occurs outside the electrical contacts 55a~d. In other words, the inclination angle configuration of the exposed portions 312 of the probes 30a~e is similar to the inclination angle configuration of the conductive contacts 55a~d.

In detail, the second probe holder 22 can define a dividing axis L4 perpendicular to the inner side surface 221, and is located on a first side (left side) and a second side (right side) of the dividing axis L4. A first dividing line L5 (coincident with the dividing axis A1 of the first unit under test 50A) and a second dividing line L6 (coincident with the dividing axis A1 of the second unit under test 50B), for the second probe For the probe on the left half of the seat 22, the direction in which the exposed portion 312 extends from the inner side 221 is parallel to the first dividing line L5 (for example, the probe corresponding to the middle block 57 marked in FIG. 4) or far away The first dividing line L5 is inclined with respect to the first dividing line L5 (for example, the probes corresponding to the left and right blocks 58, 59 shown in FIG. 4); for the probes arranged on the right half of the second probe holder 22 The direction in which the exposed portion 312 extends from the inner side surface 221 is parallel to the second dividing line L6 (for example, the probe corresponding to the middle block 57 marked in FIG. 4) or away from the second dividing line The ground of L6 is inclined relative to the second dividing line L6 (for example, the probes corresponding to the left and right blocks 58, 59 marked in FIG. 4). For the first probe holder 21, the first needle layer P1 can define a first dividing line perpendicular to the inner side surface 211 of the first probe holder 21 (the first dividing line with the second probe holder 22) L5 coincides), the direction in which the exposed portions 312 of the first probes 30a extend from the inner side surface 211 is parallel to the first dividing line L5 (for example, the probe corresponding to the middle block 57 marked in FIG. 4) Or approach the first dividing line L5 and be inclined relative to the first dividing line L5 (for example, the probes corresponding to the left and right blocks 58, 59 shown in FIG. 4); the second needle layer P2 can define A second demarcation line perpendicular to the inner side surface 211 of the first probe holder 21 (coincident with the second demarcation line L6 of the second probe holder 22), and the exposed parts 312 of the second probe holders 30b extend from the inside The direction in which the side surface 211 extends is parallel to the second dividing line L6 (for example, the probe corresponding to the middle block 57 marked in FIG. 4) or is close to the second dividing line L6 relative to the second dividing line L6 It is inclined (for example, the probes corresponding to the left and right blocks 58, 59 shown in FIG. 4).

With the probe configuration of the probe module of the present invention, under the premise that so many probes are arranged in the probe holder at an appropriate interval, the aforementioned effect of ensuring the touch of the probe can still be achieved. In addition, in this embodiment, the outer sections 311b of the fixing portions 311 of the probes 30a~e are parallel to each other, which makes it easier to arrange the probes on the probe holder; however, the probes of the present invention The probe configuration of the module can also facilitate the placement of probes with the fixed portion 311 and the exposed portion 312 in line (such as the probe 30a shown in FIG. 7) on the probe base, which simplifies the bending process of the probe. program.

More importantly, as shown in FIG. 2, although the extension direction D2 of the first boundary contact 61 is close to the second side edge 54 of the first unit under test 50A and is inclined to a considerable extent, the second boundary The extension direction D2 of the contact 62 is also inclined to a considerable extent toward the first side edge 53 of the second unit under test 50B. However, the probe module 20 of the present invention uses the rightmost pin layer P1 The first probe 30a touches the first junction contact 61, and the second probe 30b on the leftmost side of the second needle layer P2 touches the second junction contact 62, and the first needle layer P1 and the second needle layer P2 is located at different heights, so even if it is used to touch the exposed parts of the first and second probes 30a, 30b (defined as the first and second junction probes 63, 64, respectively) of the first and second junction contacts 61, 62 The direction 312 extends from the first probe holder 21 is matched with the extending direction D2 of the first and second junction contacts 61 and 62. The first and second junction probes 63 and 64 are located at different heights to avoid mutual interference.

It can be seen from Figure 2 that if the first and second junction probes 63 and 64 are set at the same height, the fixed part 311 or even the exposed part 312 will have the problem of being too close to each other, and even if the first and second junctions are connected When the inclination angle of the points 61 and 62 is larger than that provided in this embodiment, in order to make the inclination angle of the exposed part 312 of the first and second junction probes 63 and 64 correspond to the first and second junction contacts 61 and 62 For the inclination angle, the fixing part 311 of the first junction probe 63 needs to be set further to the right, and the fixing part 311 of the second junction probe 64 needs to be set further to the left. In this way, the first and second junction probes 63, The fixed portion 311 or even the exposed portion 312 of the 64 may interfere with each other. The first and second boundary probes 63 and 64 of the present invention are located at different heights to avoid the aforementioned problems. It is conceivable that in the first unit to be tested When the first side edge 53 of 50A and the second side edge 54 of the second unit under test 50B are also adjacent to other units to be tested (that is, there are four units to be tested side by side), the leftmost first probe The needle 30a and the rightmost second probe 30b can also perform the aforementioned functions.

In this embodiment, since the first probe 30a and the second probe 30b are located at different heights, no matter how large the inclination angle of the first conductive contact 55a is, the inclination angles of the first and second probes 30a and 30b are both It can correspond to the inclination angle of the first conductive contact 55a touched by it without interference. However, the probe module of the present invention is not limited to the first probes 30a being at the same height, nor is it limited to the second probes 30b being at the same height, as long as the rightmost one or several first probes The needle 30a and the leftmost one or several second probes 30b are located at different heights to avoid probe interference problems. That is, the first probe 30a may include one or several first junction probes 63, The two probes 30b can include one or several second junction probes 64, as long as the first junction probe 63 and the second junction probe 64 are located at different heights (different needle layers) to avoid mutual interference, the remaining first The heights of the probes 30a and the second probes 30b are not limited. For example, among the first probes 30a and the second probes 30b, only the first junction probe 63 may be located on the higher first needle layer P1, and the rest The first probe 30a and the second probe 30b are located in the lower second needle layer P2, and the number of the first and second junction probes 63, 64 depends on the neighboring first and second test units 50A, 50B The inclination angle of the first conductive contact 55a of the adjacent side edge. In detail, for the first and second units under test 50A, 50B of this embodiment, the first conductive contact 55a of each unit under test 50A, 50B closest to its adjacent side edge will correspond to The probes of the same height have the problem of being too close, so the first and second junction contacts 61 and 62 have only one each, and the first and second junction probes 63 and 64 respectively have only one each, as long as these two probes Located at different heights can avoid probe interference problems. In the case where the first conductive contact 55a adjacent to the adjacent side edge of the unit under test 50A, 50B has a greater inclination angle, the first and second junction contacts 61, 62 (that is, the probes of the same height may be too close The number of conductive contacts (or interfering conductive contacts) will be set more, and the number of first and second junction probes 63 and 64 will increase accordingly.

Please refer to FIGS. 8 and 9, the probe module 20' provided by a second preferred embodiment of the present invention is used to simultaneously detect the first to fourth units under test 50A~D arranged in a matrix. The first and second units under test 50A, 50B at the bottom left and bottom right in FIG. 8. The probe module 20' adopts the same probe configuration as the probe module 20 of the first preferred embodiment, which is a simplified diagram , Figure 8 does not show this part of the probe. As for the third and fourth test units 50C and 50D in the upper left and upper right of FIG. 8, the first main edge 51 of the third test unit 50C is opposite to the second main edge 52 of the first test unit 50A. Adjacent, the first main edge 51 of the fourth unit under test 50D is adjacent to the second main edge 52 of the second unit under test 50B, and the conductive contacts 55a~d of the third and fourth units under test 50C, 50D All of them are closer to the second probe holder 22 than the first conductive contacts 55a of the first and second test units 50A, 50B. Therefore, the third and fourth test units 50C, 50D have all of the conductive contacts 55a~d. All are touched by the third probes 30f~i arranged on the second probe holder 22, that is, four rows of third probes 30f~i can be added to the second probe holder 22, as shown in FIG. The four rows of third probes 30f~i are located below the third probes 30c~e used to touch the first and second test units 50A, 50B, and are used to touch the 3. The third to first rows L3~L1 of the first conductive contact 55a and the second conductive contact 55b~d of the cells under test 50C, 50D. To simplify the drawing, FIG. 8 only shows the third probe 30f used to touch the first conductive contact 55a of the third and fourth test cells 50C, 50D.

Finally, it must be explained again that the constituent elements disclosed in the previously disclosed embodiments of the present invention are merely examples and are not intended to limit the scope of the case. Alternatives or changes to other equivalent elements should also be the scope of the patent application for this case. Covered.

20: Probe module

21: (first) probe holder

211: inside

212: outer side

22: (second) probe holder

221: inside

222: outer side

30a: (first) probe

30b: (second) probe

30c~e: (third) probe

31: Cantilever section

311: Fixed part

312: Exposed

32: Touch segment

40: circuit board

41: Bottom

50A, 50B: the first and second units to be tested

56: upper surface

D1: Touch direction

d: vertical distance

P1~P5: the first to fifth needle layers

Claims (21)

A probe module suitable for multiple units to be tested with inclined conductive contacts is used to simultaneously detect a plurality of units to be tested. Each unit to be tested has a first main edge, a second main edge, and is connected to the first main edge. A main edge and a first side edge and a second side edge of the second main edge, and a plurality of conductive contacts. The plurality of units under test include a first unit under test and a second unit under test, the The second side edge of the first unit under test is adjacent to the first side edge of the second unit under test. The conductive contacts of the first unit under test include a first main body adjacent to the first unit under test. The first junction point of the edge and the second side edge, the conductive contact of the second unit under test includes a second junction point adjacent to the first main edge and the first side edge of the second unit under test; The probe module includes: at least one probe holder; and a plurality of probes, each of the probes includes a cantilever segment and a point contact segment, the cantilever segment has a fixed part fixed to the probe holder, and a Connected to the fixing part and extending from an inner side surface of the probe holder to protrude out of the exposed part, the point contact section is connected to the exposed part; wherein, the at least one probe holder includes a first probe holder, the The plurality of probes includes a first junction probe and a second junction probe that are arranged on the first probe holder and are located at different heights. When the probe module detects the waiting unit, each unit to be tested The first main edge is closer to the first probe holder than the second main edge, and the first junction probe and the second junction probe pass through the first unit to be tested and the second with their cantilever sections, respectively Above the first main edge of the unit to be tested, it extends above the first junction contact and the second junction contact respectively, and then touches the first junction contact and the second junction contact with its touch segments; The conductive contacts of each unit under test include a plurality of second conductive contacts adjacent to the second main edge of the unit to be tested; at least one probe holder of the probe module further includes a second probe Holder, the probes of the probe module include a plurality of third probes arranged on the second probe holder, when the probe module detects the waiting unit, the second main edge of each unit to be tested Is closer to the first main edge For the second probe holder, at least part of the third probe has its cantilever section passing over the second main edge of the waiting unit and extending above the second conductive contacts to touch the Wait for the second conductive contact. As described in item 1 of the scope of patent application, the probe module is suitable for multiple units to be tested with inclined conductive contacts, wherein the conductive contacts of each unit to be tested include the first master of the unit to be tested to which a plurality of edges belong A first conductive contact with edges in a row, the first conductive contact of the first unit under test includes the first junction contact, and the first conductive contact of the second unit under test includes the second junction Contacts; the plurality of probes include a plurality of first probes and a plurality of second probes arranged in the first probe holder, the first probes form a first needle layer in the first probe holder, The second probes form a second needle layer with a different height from the first needle layer on the first probe holder, the first probes include the first junction probe, and the second probes Includes the second junction probe; when the probe module detects the waiting unit, the first probes respectively touch the first conductive contact of the first unit to be tested with their touch segments, The second probes respectively touch the first conductive contacts of the second unit to be tested with their touch sections. As described in item 1 of the scope of patent application, the probe module is suitable for multiple units to be tested with inclined conductive contacts, wherein the conductive contacts of each unit to be tested include the first master of the unit to be tested to which a plurality of edges belong A first conductive contact with edges in a row, the first conductive contact of the first unit under test includes the first junction contact, and the first conductive contact of the second unit under test includes the second junction Contacts; the plurality of probes include a plurality of first probes and a plurality of second probes arranged in the first probe holder, the first probes include the first junction probe, the second probe The needle includes the second junction probe, and when the probe module detects the waiting unit, the first probes respectively touch the first conductive contact of the first unit to be tested with their touch segments , The second probes respectively touch the first conductive contact of the second unit to be tested with their touch segments; A plurality of needle layers of different heights are formed, and the first boundary probe and the second boundary probe are located on different needle layers. As described in item 3 of the scope of patent application, a probe module suitable for multiple units to be tested with inclined conductive contacts, wherein the needle layer of the first probe holder includes a first needle layer and a lower The second needle layer of the first needle layer, one of the first border probe and the second border probe is located on the first needle layer, and the remaining first probes and second probes are located on the first needle layer. Two needle layer. As described in any one of items 2 to 4 of the scope of patent application, a probe module suitable for multiple units to be tested with inclined conductive contacts, wherein the first probes can define a first probe perpendicular to the first The first dividing line of the inner side surface of the probe holder, the direction in which the exposed portions of the first probes extend from the inner side surface is parallel to the first dividing line or close to the first dividing line relative to the The first dividing line is inclined; the second probes can define a second dividing line perpendicular to the inner surface of the first probe holder, and the exposed portions of the second probes extend from the inner surface The direction is parallel to the second demarcation line or is inclined with respect to the second demarcation line close to the second demarcation line. As described in the first item of the scope of patent application, a probe module suitable for multiple units to be tested with inclined conductive contacts, wherein the second conductive contacts of each unit to be tested are arranged in plural parallel to a horizontal axis The order is arranged in the direction from the second main edge to the first main edge; the third probes are arranged in a manner corresponding to the second conductive contacts to form a plurality of needle layers with different heights, and the order It corresponds to the order of the plurality of rows of the second conductive contacts from bottom to top. As described in item 1 of the scope of patent application, a probe module suitable for multiple units under test with inclined conductive contacts, wherein the plurality of units under test further include a third unit under test and a fourth unit under test , The first main edge of the third unit under test is adjacent to the second main edge of the first unit under test, and the first main edge of the fourth unit under test is the second main edge of the second unit under test The main edges are adjacent; when the probe module detects the waiting unit, part of the third probe touches all the conductive contacts of the third unit to be tested and the fourth unit to be tested with its touch section. As described in item 1 of the scope of patent application, it is suitable for a probe module with multiple units to be tested with inclined conductive contacts, wherein the third probes form a plurality of needle layers with different heights, and the higher the position of the needle layer The third probe is used to touch the conductive contact that is farther from the second probe holder, and the cantilever section of the third probe of the higher needle layer is longer. As described in item 1 of the scope of patent application, it is suitable for a probe module with multiple units to be tested with inclined conductive contacts, wherein the second probe holder can define a boundary axis perpendicular to the inner side of the A demarcation line and a second demarcation line, the first demarcation line and the second demarcation line are respectively located on a first side and a second side of the demarcation axis, and the probe on the first side of the demarcation axis is exposed The direction in which the portion extends from the inner side surface is parallel to the first boundary line or inclined relative to the first boundary line away from the first boundary line, and the exposed portion of the probe located on the second side of the boundary axis is from The direction in which the inner side surface extends is parallel to the second dividing line or inclined with respect to the second dividing line away from the second dividing line. As described in item 1 of the scope of patent application, the probe module is suitable for multiple units to be tested with inclined conductive contacts, wherein the fixed part and exposed part of each probe are in a straight line. As described in item 1 of the scope of patent application, the probe module suitable for multiple units to be tested with inclined conductive contacts, wherein the fixing part of each probe includes an inner section and an outer section, and each probe module The inner section of the fixed part of the needle is connected with the exposed part and is in line with the exposed part, and the outer sections of the fixed part of the probes are parallel to each other. A probe module suitable for multiple units to be tested with inclined conductive contacts, comprising: at least one probe holder; and a plurality of probes, each of the probes includes a cantilever segment and a point contact segment, the cantilever segment having A fixing part fixedly connected to the probe base, and an exposed part connected to the fixing part and extending from an inner side of the probe base, and the point contact section is connected to the exposed part; Wherein, the at least one probe holder includes a first probe holder, and the plurality of probes includes a first junction probe and a second junction probe that are arranged on the first probe holder and are located at different heights, They are respectively used to touch conductive contacts with different inclination directions, and the vertical distances between the end of the touch section of the first junction probe and the second junction probe and the inner surface of the first probe holder are the same. As described in item 12 of the scope of patent application, a probe module suitable for multiple units to be tested with inclined conductive contacts, wherein the exposed part of the first junction probe and the exposed part of the second junction probe are not It is inclined perpendicular to the inner side surface of the first probe holder and the inclination directions are symmetrical to each other. As described in item 12 of the scope of patent application, a probe module suitable for multiple units to be tested with inclined conductive contacts, wherein the plurality of probes includes a plurality of first probes arranged on the first probe holder and A plurality of second probes, the first probes form a first needle layer on the first probe base, and the second probes form a height different from the first needle layer on the first probe base The second needle layer, the first probes include the first junction probe, the second probes include the second junction probe, and the touch sections of the first probe and the second probe The vertical distance between the end and the inner surface of the first probe holder is the same. As described in item 12 of the scope of patent application, a probe module suitable for multiple units to be tested with inclined conductive contacts, wherein the plurality of probes includes a plurality of first probes arranged on the first probe holder and A plurality of second probes. The vertical distances between the end of the touch section of the first probe and the second probe and the inner surface of the first probe holder are the same, and the first probes include the first junction probe Needles, the second probes include the second junction probe, the first probes and the second probes form a plurality of needle layers of different heights on the first probe seat, and the first junction probe is The second interface probe is located on a different needle layer. As described in item 15 of the scope of patent application, a probe module suitable for multiple units to be tested with inclined conductive contacts, wherein the needle layer of the first probe holder includes a first needle layer and a A second needle layer lower than the first needle layer, one of the first boundary probe and the second boundary probe is located on the first needle layer, and the remaining first and second probes are located The second needle layer. As described in any one of items 14 to 16 in the scope of the patent application, a probe module suitable for multiple units to be tested with inclined conductive contacts, wherein the first probes can define a first probe that is perpendicular to the first The first dividing line of the inner side surface of the probe holder, the direction in which the exposed portions of the first probes extend from the inner side surface is parallel to the first dividing line or close to the first dividing line relative to the The first dividing line is inclined; the second probes can define a second dividing line perpendicular to the inner surface of the first probe holder, and the exposed portions of the second probes extend from the inner surface The direction is parallel to the second demarcation line or is inclined with respect to the second demarcation line close to the second demarcation line. As described in item 12 of the scope of patent application, a probe module suitable for multiple units to be tested with inclined conductive contacts, wherein at least one probe holder of the probe module further includes a second probe holder, The probes of the probe module include a plurality of third probes arranged on the second probe holder, and the third probes form a plurality of needle layers with different heights on the second probe holder, the higher the position The longer the exposed part of the cantilever section of the third probe of the needle layer. As described in item 18 of the scope of patent application, it is suitable for a probe module with multiple units to be tested with inclined conductive contacts, wherein the second probe holder can define a boundary axis perpendicular to the inner side of the probe module, and a second A demarcation line and a second demarcation line, the first demarcation line and the second demarcation line are respectively located on a first side and a second side of the demarcation axis, and the probe on the first side of the demarcation axis is exposed The direction in which the portion extends from the inner side surface is parallel to the first boundary line or inclined relative to the first boundary line away from the first boundary line, and the exposed portion of the probe located on the second side of the boundary axis is from The direction in which the inner side surface extends is parallel to the second dividing line or inclined with respect to the second dividing line away from the second dividing line. As described in item 12 of the scope of patent application, it is suitable for a probe module with multiple units under test with inclined conductive contacts, wherein the fixed part and exposed part of each probe are in a straight line. As described in item 12 of the scope of patent application, a probe module suitable for multiple units to be tested with inclined conductive contacts, wherein the fixing part of each probe includes an inner section and an outer section, and each probe module The inner section of the fixed part of the needle is connected with the exposed part and is in line with the exposed part, and the outer sections of the fixed part of the probes are parallel to each other.

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