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TWI704016B - Ink coating device and ink coating method - Google Patents

Ink coating device and ink coating method Download PDF

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Publication number
TWI704016B
TWI704016B TW108113693A TW108113693A TWI704016B TW I704016 B TWI704016 B TW I704016B TW 108113693 A TW108113693 A TW 108113693A TW 108113693 A TW108113693 A TW 108113693A TW I704016 B TWI704016 B TW I704016B
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ink
edge
area
inkjet head
coating
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TW108113693A
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Chinese (zh)
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TW201946697A (en
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村野賢一
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日商住友重機械工業股份有限公司
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0091Apparatus for coating printed circuits using liquid non-metallic coating compositions
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061Etching masks
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1241Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing
    • H05K3/125Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing by ink-jet printing
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01Tools for processing; Objects used during processing
    • H05K2203/0104Tools for processing; Objects used during processing for patterning or coating
    • H05K2203/013Inkjet printing, e.g. for printing insulating material or resist
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05Patterning and lithography; Masks; Details of resist
    • H05K2203/0548Masks

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Ink Jet (AREA)

Abstract

本發明提供一種能夠縮短油墨塗佈時的處理時間之油墨塗佈裝置。移動機構使塗佈對象物和噴墨頭中的一個相對於另一個移動,以使對塗佈對象物的油墨的滴落點在塗佈對象物的表面上移動。控制裝置控制噴墨頭及移動機構。使塗佈對象物和噴墨頭中的一個相對於另一個移動的同時,使油墨滴落在沿著待塗佈之區域的邊緣之邊緣區域而在邊緣區域形成由油墨組成之邊緣部。此外,形成邊緣部之後,使塗佈對象物和噴墨頭中的一個相對於另一個以比形成邊緣部時的移動速度快的移動速度移動的同時,將油墨塗佈於被邊緣部包圍之內部區域。The present invention provides an ink coating device capable of shortening the processing time during ink coating. The moving mechanism moves one of the coating object and the inkjet head relative to the other so that the drop point of the ink on the coating object moves on the surface of the coating object. The control device controls the inkjet head and the moving mechanism. While moving one of the coating object and the inkjet head relative to the other, the ink drops on the edge area along the edge of the area to be coated to form an edge portion composed of ink in the edge area. In addition, after the edge portion is formed, one of the coating object and the inkjet head is moved relative to the other at a moving speed faster than the moving speed when the edge portion is formed, and the ink is applied to the edge surrounded by the edge portion. Internal area.

Description

油墨塗佈裝置及油墨塗佈方法Ink coating device and ink coating method

本發明係關於一種油墨塗佈裝置及油墨塗佈方法。The invention relates to an ink coating device and an ink coating method.

在印刷基板製造時的蝕刻用遮罩所使用之抗蝕劑圖案的形成、印刷基板的阻焊劑的形成等中使用噴墨頭之油墨塗佈技術備受矚目。在下述專利文獻1中,揭示有如下方法:將待形成薄膜之區域分為實體區域和邊緣區域,使實體區域的像素稀疏而提取油墨的滴落點。藉此,實體區域內的滴落點的分佈密度降低,但藉由增大液滴的體積能夠將實體區域的膜設為所期望的厚度。 (先前技術文獻) (專利文獻)The ink coating technology using inkjet heads is attracting attention in the formation of the resist pattern used in the etching mask during the manufacture of the printed circuit board and the formation of the solder resist of the printed circuit board. In the following Patent Document 1, a method is disclosed in which the area to be formed into a thin film is divided into a solid area and an edge area, and the pixels in the solid area are thinned to extract ink drop points. Thereby, the distribution density of the drop points in the solid area is reduced, but by increasing the volume of the droplets, the film in the solid area can be set to a desired thickness. (Prior technical literature) (Patent Document)

專利文獻1:國際公開第2013/11775號Patent Document 1: International Publication No. 2013/11775

(本發明所欲解決之課題)(Problems to be solved by the present invention)

使實體區域的像素稀疏而提取油墨的滴落點之方法中,構成圖像資料之像素的個數並不會減少。因此,若著眼於所有噴嘴孔而不是噴墨頭的一個噴嘴孔,則控制噴墨頭之吐出頻率並不會降低。因此,難以加快掃描速度。In the method of thinning the pixels in the solid area and extracting the ink drop points, the number of pixels constituting the image data will not decrease. Therefore, if you focus on all nozzle holes instead of one nozzle hole of the inkjet head, controlling the discharge frequency of the inkjet head will not decrease. Therefore, it is difficult to increase the scanning speed.

本發明的目的在於提供一種能夠縮短油墨塗佈的處理時間之油墨塗佈裝置及油墨塗佈方法。 (用以解決課題之手段)The object of the present invention is to provide an ink coating device and an ink coating method that can shorten the processing time of ink coating. (Means to solve the problem)

依本發明的一觀點,提供一種油墨塗佈裝置,其具有: 噴墨頭,朝向支承於工作台之塗佈對象物吐出油墨; 移動機構,使前述塗佈對象物和前述噴墨頭中的一個相對於另一個移動,以使對前述塗佈對象物的油墨的滴落點在前述塗佈對象物的表面上移動;及 控制裝置,控制前述噴墨頭及前述移動機構, 前述控制裝置控制前述噴墨頭及前述移動機構, 使前述塗佈對象物和前述噴墨頭中的一個相對於另一個移動的同時,使油墨滴落於沿著待塗佈之區域的邊緣之邊緣區域而在前述邊緣區域形成由油墨組成之邊緣部, 形成前述邊緣部之後,使前述塗佈對象物和前述噴墨頭中的一個相對於另一個以比形成前述邊緣部時的移動速度快的移動速度移動的同時,將油墨塗佈於被前述邊緣部包圍之內部區域。According to an aspect of the present invention, an ink coating device is provided, which has: The inkjet head ejects ink toward the coating object supported on the worktable; A moving mechanism for moving one of the coating object and the inkjet head relative to the other, so that the ink drop point on the coating object moves on the surface of the coating object; and The control device controls the inkjet head and the moving mechanism, The aforementioned control device controls the aforementioned inkjet head and the aforementioned moving mechanism, While moving one of the coating object and the inkjet head relative to the other, the ink is dropped on the edge area along the edge of the area to be coated to form an edge composed of ink in the edge area unit, After the edge portion is formed, one of the coating object and the inkjet head is moved relative to the other at a moving speed faster than the moving speed when the edge portion is formed, and the ink is applied to the edge. The internal area enclosed by the Ministry.

依本發明的另一觀點,提供一種油墨塗佈方法, 在塗佈對象物的表面的、沿著待塗佈油墨之區域的邊緣之邊緣區域,使油墨的滴落點移動的同時,滴落油墨的液滴而形成由油墨組成之邊緣部, 形成前述邊緣部之後,在被前述邊緣部包圍之內部區域,使滴落點以比形成前述邊緣部時的滴落點的移動速度快的移動速度移動的同時,滴落油墨的液滴而將油墨塗佈於前述內部區域。According to another aspect of the present invention, an ink coating method is provided, In the edge area of the surface of the coating object along the edge of the area to be coated with the ink, the ink drop point is moved while the ink droplets are dropped to form an edge portion composed of ink, After the edge portion is formed, in the inner region surrounded by the edge portion, the drop point is moved at a moving speed faster than the movement speed of the drop point when the edge portion is formed. The ink is applied to the aforementioned inner area.

依本發明的又一觀點,提供一種油墨塗佈裝置,其具有: 噴墨頭,將油墨液滴化並朝向支承於工作台之塗佈對象物吐出; 移動機構,使前述塗佈對象物和前述噴墨頭中的一個相對於另一個移動,以使對前述塗佈對象物的油墨的滴落點在前述塗佈對象物的表面上移動;及 控制裝置,控制前述噴墨頭及前述移動機構, 前述控制裝置控制前述噴墨頭及前述移動機構, 使前述塗佈對象物和前述噴墨頭中的一個相對於另一個移動的同時,使油墨滴落於沿著待塗佈油墨之區域之邊緣的邊緣區域的複數個滴落點而形成由油墨組成之邊緣部, 形成前述邊緣部之後,使前述塗佈對象物和前述噴墨頭中的一個相對於另一個移動的同時,使油墨滴落於被前述邊緣部包圍之內部區域的複數個滴落點而將油墨塗佈於前述內部區域, 沿著與前述塗佈對象物和前述噴墨頭的相對移動方向平行之第1方向及與前述第1方向正交之第2方向週期性地配置前述邊緣區域的複數個滴落點,並且以比前述邊緣區域的滴落點的間距寬的間距,沿前述第1方向及前述第2方向週期性地配置作為整體的前述內部區域的複數個滴落點。According to another aspect of the present invention, an ink coating device is provided, which has: The inkjet head transforms ink droplets and ejects them toward the coating object supported on the worktable; A moving mechanism for moving one of the coating object and the inkjet head relative to the other, so that the ink drop point on the coating object moves on the surface of the coating object; and The control device controls the inkjet head and the moving mechanism, The aforementioned control device controls the aforementioned inkjet head and the aforementioned moving mechanism, While moving one of the object to be coated and the inkjet head relative to the other, the ink is dropped on a plurality of drop points along the edge of the area where the ink is to be applied. The edge of the composition, After forming the edge portion, while moving one of the coating object and the inkjet head relative to the other, the ink is dropped on a plurality of drop points in the inner region surrounded by the edge portion to remove the ink Coated on the aforementioned internal area, A plurality of dripping points of the edge region are periodically arranged along a first direction parallel to the relative movement direction of the coating target and the inkjet head and a second direction orthogonal to the first direction, and With a pitch wider than the pitch of the dripping points of the edge region, a plurality of dripping points of the inner region as a whole are periodically arranged in the first direction and the second direction.

依本發明的又一觀點,提供一種油墨塗佈方法, 在塗佈對象物的表面的、沿著待塗佈油墨之區域的邊緣之邊緣區域,使油墨的滴落點移動的同時,滴落油墨的液滴而形成由油墨組成之邊緣部, 形成前述邊緣部之後,在被前述邊緣部包圍之內部區域,使油墨的滴落點移動的同時,滴落油墨的液滴而將油墨塗佈於前述內部區域, 沿著相互正交之第1方向及第2方向週期性地配置前述邊緣區域的複數個滴落點,並以比前述邊緣區域的滴落點的間距寬的間距沿前述第1方向及前述第2方向週期性地配置作為整體的前述內部區域的複數個滴落點。 (發明之效果)According to another aspect of the present invention, an ink coating method is provided, In the edge area of the surface of the coating object along the edge of the area to be coated with the ink, the ink drop point is moved while the ink droplets are dropped to form an edge portion composed of ink, After the edge portion is formed, while moving the ink drop point in the inner region surrounded by the edge portion, droplets of ink are dropped to apply the ink to the inner region, A plurality of dripping points in the edge area are periodically arranged along the first direction and the second direction orthogonal to each other, and along the first direction and the second direction at a pitch wider than the pitch of the dripping points in the edge area A plurality of dripping points of the aforementioned inner region as a whole are periodically arranged in two directions. (Effect of Invention)

為了在分開的製程中將油墨塗佈於邊緣區域和內部區域,能夠在適合於每個區域之條件下塗佈油墨。例如,能夠以相對較高的解析度將油墨塗佈於邊緣區域,並能夠以相對較快的掃描速度將油墨塗佈於內部區域。In order to apply ink to the edge area and the inner area in a separate process, the ink can be applied under conditions suitable for each area. For example, the ink can be applied to the edge area with a relatively high resolution, and the ink can be applied to the inner area with a relatively fast scanning speed.

參閱圖1A~圖3,對基於實施例之油墨塗佈裝置進行說明。 圖1A係基於實施例之油墨塗佈裝置的概要圖。支架10上經由XY載台11及θ載台12支承有工作台15。在工作台15的支承面上支承有塗佈對象物50。塗佈對象物50例如為印刷基板等基板。例如,工作台15包括真空卡盤機構,塗佈對象物50真空吸附並固定於支承面上。支承面例如相對於水平面為平行,並且朝向鉛錘上方。1A to 3, the ink coating device based on the embodiment will be described. Fig. 1A is a schematic diagram of an ink coating device based on an embodiment. The stand 10 supports a table 15 via an XY stage 11 and a θ stage 12. The coating object 50 is supported on the support surface of the table 15. The coating object 50 is, for example, a substrate such as a printed circuit board. For example, the table 15 includes a vacuum chuck mechanism, and the coating target object 50 is vacuum sucked and fixed to the support surface. The supporting surface is, for example, parallel to the horizontal plane and faces upwards of the plumb bob.

XY載台11使工作台15相對於支架10沿著與支承面平行且相互正交之兩個方向平移移動。θ載台12改變以相對於支承面垂直之旋轉軸為中心之工作台15的旋轉方向的姿勢。The XY stage 11 moves the table 15 relative to the support 10 in two directions parallel to the supporting surface and orthogonal to each other. The θ stage 12 changes the posture of the rotation direction of the table 15 centered on the rotation axis perpendicular to the supporting surface.

在工作台15的上方,藉由框架17支承有噴墨頭16。噴墨頭16的朝向工作台15之面設置有複數個噴嘴孔。循環系統18與噴墨頭16一同構成油墨的循環路徑19,並使油墨在該循環路徑19中循環。Above the table 15, an inkjet head 16 is supported by a frame 17. A plurality of nozzle holes are provided on the surface of the inkjet head 16 facing the table 15. The circulation system 18 and the inkjet head 16 constitute an ink circulation path 19 and circulate the ink in the circulation path 19.

噴墨頭16將油墨液滴化並朝向支承於工作台15之塗佈對象物50吐出。控制裝置40儲存著定義待形成之膜圖案的平面形狀之圖像資料。該圖像資料例如為複數個像素沿行方向和列方向排列之光柵掃描形式的資料。控制裝置40依據該圖像資料控制XY載台11及噴墨頭16,藉此在塗佈對象物50的上表面形成由油墨組成之膜圖案。此外,控制裝置40控制循環系統18及θ載台12。The inkjet head 16 converts ink droplets and discharges them toward the application target 50 supported by the table 15. The control device 40 stores image data defining the planar shape of the film pattern to be formed. The image data is, for example, data in a raster scan format in which a plurality of pixels are arranged in the row direction and the column direction. The control device 40 controls the XY stage 11 and the inkjet head 16 according to the image data, thereby forming a film pattern composed of ink on the upper surface of the coating object 50. In addition, the control device 40 controls the circulation system 18 and the θ stage 12.

圖1B係基於實施例之油墨塗佈裝置的工作台15的平面圖。在工作台15的支承面上支承有塗佈對象物50。在塗佈對象物50的上方支承有噴墨頭16。在噴墨頭16的每一個朝向下方之面設置有複數個噴嘴孔20。噴墨頭16將油墨液滴化並從噴嘴孔20朝向支承於工作台15之塗佈對象物50吐出。FIG. 1B is a plan view of the workbench 15 of the ink coating device based on the embodiment. The coating object 50 is supported on the support surface of the table 15. The inkjet head 16 is supported above the coating object 50. A plurality of nozzle holes 20 are provided on each downwardly facing surface of the inkjet head 16. The inkjet head 16 converts ink droplets and ejects the ink droplets from the nozzle hole 20 toward the application target 50 supported by the table 15.

此外,在噴墨頭16的兩側(在圖1B中為上側和下側)安裝有用於使油墨硬化之硬化用光源21。例如,油墨為紫外線硬化型,硬化用光源21為發射紫外線之LED。In addition, curing light sources 21 for curing ink are installed on both sides of the inkjet head 16 (upper and lower sides in FIG. 1B). For example, the ink is an ultraviolet curing type, and the curing light source 21 is an LED that emits ultraviolet light.

對將與工作台15的支承面平行且相互正交之兩個方向設為x方向及y方向,並將支承面的法線方向設為z方向之xyz直角座標系進行定義。複數個噴嘴孔20沿x方向以等間隔排列。控制裝置40(圖1A)使工作台15朝y方向(掃描方向)移動的同時,在依據圖像資料之時刻從噴嘴孔20吐出油墨。藉此,能夠將油墨滴落在支承於工作台15之塗佈對象物50的表面的規定位置(滴落點)。The x-direction and the y-direction are defined as the two directions parallel to and orthogonal to the support surface of the table 15 and the normal direction of the support surface is the z-direction. The plurality of nozzle holes 20 are arranged at equal intervals along the x direction. The control device 40 (FIG. 1A) moves the table 15 in the y direction (scanning direction), and discharges ink from the nozzle hole 20 at a timing based on the image data. Thereby, the ink can be dropped on a predetermined position (drop point) on the surface of the application target 50 supported by the table 15.

藉由圖像資料的y方向的像素間距來確定工作台15的掃描速度與從噴嘴孔20吐出油墨之時間間隔。吐出油墨之時間間隔(油墨吐出間隔)的最小值作為噴墨頭16的額定值而確定。工作台15的掃描速度藉由y方向的像素間距和噴墨頭16的油墨吐出間隔的額定值來設定。The time interval between the scanning speed of the table 15 and the ink discharge from the nozzle hole 20 is determined by the pixel pitch in the y direction of the image data. The minimum value of the ink ejection interval (ink ejection interval) is determined as the rated value of the inkjet head 16. The scanning speed of the table 15 is set by the rated value of the pixel pitch in the y direction and the ink discharge interval of the inkjet head 16.

x方向的像素間距依賴於噴嘴孔20的x方向的間距。所期望的像素間距比噴嘴孔20的間距窄時,將噴墨頭16沿x方向錯開像素間距而進行複數次掃描。藉此,關於x方向,能夠以圖像資料中設定之像素間距塗佈油墨。The pixel pitch in the x direction depends on the pitch in the x direction of the nozzle hole 20. When the desired pixel pitch is narrower than the pitch of the nozzle hole 20, the inkjet head 16 is shifted in the x-direction by the pixel pitch to perform multiple scans. Thereby, regarding the x direction, ink can be applied at the pixel pitch set in the image data.

圖1A中,由XY載台11構成之移動機構使塗佈對象物50相對於噴墨頭16移動,藉此使滴落點在塗佈對象物50的表面上移動。與此相反地,移動機構亦可以使噴墨頭16相對於塗佈對象物50移動,藉此使滴落點移動。亦即,使塗佈對象物50與噴墨頭16中的一個相對於另一個移動,以使滴落點在塗佈對象物50的表面上移動即可。塗佈對象物50與噴墨頭16的相對移動方向相當於掃描方向(y方向)。In FIG. 1A, the moving mechanism constituted by the XY stage 11 moves the coating target 50 relative to the inkjet head 16 to thereby move the drop point on the surface of the coating target 50. Contrary to this, the moving mechanism can also move the inkjet head 16 relative to the coating target 50, thereby moving the drop point. That is, it is sufficient to move one of the coating target 50 and the inkjet head 16 relative to the other so that the drop point moves on the surface of the coating target 50. The relative movement direction of the application target 50 and the inkjet head 16 corresponds to the scanning direction (y direction).

圖2A係表示待塗佈油墨之區域51之平面圖。在塗佈對象物50的表面定義待塗佈油墨之區域51。圖2A中,對待塗佈油墨之區域51施加陰影。在本實施例中,將待塗佈油墨之區域51區分為沿著邊緣之邊緣區域52和被邊緣區域52包圍之內部區域53,將油墨塗佈於邊緣區域52之後,再將油墨塗佈於內部區域53。邊緣區域52的油墨的塗佈條件與內部區域53的油墨的塗佈條件不同。Fig. 2A is a plan view showing the area 51 to be coated with ink. An area 51 to be coated with ink is defined on the surface of the coating object 50. In FIG. 2A, the area 51 to be coated with ink is shaded. In this embodiment, the area 51 to be coated with ink is divided into an edge area 52 along the edge and an inner area 53 surrounded by the edge area 52. After the ink is applied to the edge area 52, the ink is applied to Internal area 53. The ink application conditions of the edge area 52 are different from the ink application conditions of the inner area 53.

圖2B係表示待塗佈油墨之區域51為長方形時的邊緣區域52的像素30的配置之圖。在圖2B所示之例子中,邊緣區域52的寬度相當於一個像素30的大小。像素30的各中心點相當於油墨的滴落點CE。滴落點CE沿x方向及y方向以等間距週期性地配置。由PEx表示邊緣區域52的滴落點CE的x方向的間距,由PEy表示y方向的間距。間距PEx與間距PEy相等。另外,亦可沿邊緣區域52的寬度方向配置複數個像素30,放大邊緣區域52的寬度。FIG. 2B is a diagram showing the arrangement of the pixels 30 in the edge area 52 when the area 51 to be coated with ink is rectangular. In the example shown in FIG. 2B, the width of the edge region 52 is equivalent to the size of one pixel 30. Each center point of the pixel 30 corresponds to the ink drop point CE. The dropping points CE are periodically arranged at equal intervals in the x direction and the y direction. The pitch in the x direction of the drop point CE of the edge region 52 is represented by PEx, and the pitch in the y direction is represented by PEy. The pitch PEx is equal to the pitch PEy. In addition, a plurality of pixels 30 may be arranged along the width direction of the edge region 52 to enlarge the width of the edge region 52.

圖2C係表示待塗佈油墨之區域51為長方形時的內部區域53的像素31的配置之圖。內部區域53的像素31大於邊緣區域52的像素30。作為一例,內部區域53的一個像素31的大小相當於邊緣區域52的4個量的像素30的大小。像素31的各中心點相當於油墨的滴落點CI。滴落點CI沿x方向及y方向以等間距週期性地配置。由PIx表示內部區域53的滴落點CI的x方向的間距,由PIy表示y方向的間距。間距PIx與間距PIy相等。並且,間距PIx及間距PIy比間距PEx及間距PEy寬。FIG. 2C is a diagram showing the arrangement of the pixels 31 in the inner area 53 when the area 51 to be coated with ink is rectangular. The pixels 31 of the inner area 53 are larger than the pixels 30 of the edge area 52. As an example, the size of one pixel 31 in the inner region 53 is equivalent to the size of four pixels 30 in the edge region 52. Each center point of the pixel 31 corresponds to the ink drop point CI. The dripping points CI are periodically arranged at equal intervals in the x direction and the y direction. The pitch in the x direction of the drop point CI of the inner region 53 is represented by PIx, and the pitch in the y direction is represented by PIy. The pitch PIx is equal to the pitch PIy. In addition, the pitch PIx and the pitch PIy are wider than the pitch PEx and the pitch PEy.

接著,參閱圖3~圖4C,對基於實施例之油墨塗佈方法進行說明。 圖3係基於實施例之油墨塗佈方法的流程圖。首先,使塗佈對象物50支承於工作台15(步驟S1)。然後,控制裝置40控制XY載台11(圖1A)使塗佈對象物50朝y方向移動的同時,控制噴墨頭16而使油墨滴落在邊緣區域52(圖2A)的滴落點CE(圖2B)(步驟S2)。此時,預先從硬化用光源21向塗佈對象物50照射硬化用光。因此,滴落在塗佈對象物50之油墨在滴落後立即硬化。Next, referring to FIGS. 3 to 4C, the ink coating method based on the embodiment will be described. Fig. 3 is a flow chart of the ink coating method based on the embodiment. First, the application target object 50 is supported by the table 15 (step S1). Then, the control device 40 controls the XY stage 11 (FIG. 1A) to move the coating target 50 in the y direction, and at the same time controls the inkjet head 16 so that the ink drops on the drop point CE of the edge area 52 (FIG. 2A) (FIG. 2B) (Step S2). At this time, the application object 50 is irradiated with curing light from the curing light source 21 in advance. Therefore, the ink dropped on the coating object 50 hardens immediately after dropping.

圖4A係滴落於邊緣區域52之油墨硬化後形成邊緣部55之塗佈對象物50的、沿寬度方向切割邊緣部55之剖面圖。在塗佈對象物50的邊緣區域52形成有邊緣部55。在內部區域53未塗佈有油墨。FIG. 4A is a cross-sectional view of the coated object 50 forming the edge portion 55 after the ink dropped on the edge area 52 is cured, and the edge portion 55 is cut in the width direction. An edge portion 55 is formed in the edge region 52 of the coating object 50. The inner area 53 is not coated with ink.

形成邊緣部55之後,控制裝置40控制XY載台11(圖1A)使塗佈對象物50朝y方向移動的同時,控制噴墨頭16使油墨滴落在內部區域53(圖2A)的滴落點CI(圖2C)(步驟S3)。此時,以比形成邊緣部55時的塗佈對象物50的移動速度(掃描速度)快的速度使塗佈對象物50朝y方向移動。內部區域53的滴落點CI的y方向的間距PIy(圖2C)比邊緣區域52的滴落點CE的y方向的間距PEy(圖2B)寬,因此,即使加快掃描速度,亦能夠使油墨滴落在滴落點CI。將油墨塗佈於內部區域53時,從硬化用光源21不進行硬化用光的照射。After the edge portion 55 is formed, the control device 40 controls the XY stage 11 (FIG. 1A) to move the coating object 50 in the y direction, and at the same time controls the inkjet head 16 to drop ink on the inner area 53 (FIG. 2A). Drop point CI (FIG. 2C) (step S3). At this time, the coating target 50 is moved in the y direction at a speed faster than the movement speed (scanning speed) of the coating target 50 when the edge portion 55 is formed. The pitch PIy (FIG. 2C) of the drop point CI of the inner region 53 in the y direction is wider than the pitch PEy (FIG. 2B) of the drop point CE of the edge region 52. Therefore, even if the scanning speed is increased, the ink Drop at the drop point CI. When the ink is applied to the inner region 53, the curing light source 21 is not irradiated with the curing light.

圖4B係將油墨塗佈於內部區域53之後的塗佈對象物50的剖面圖。由於不進行硬化用光的照射,因此滴落在內部區域53之油墨在面內方向擴散,油墨的複數個液滴彼此一體化。其結果,塗佈於內部區域53之油墨的表面變得平坦,形成液態的油墨的膜56。此時,邊緣部55發揮阻擋液態的油墨流出之作用。FIG. 4B is a cross-sectional view of the coating object 50 after ink is applied to the inner region 53. Since the curing light is not irradiated, the ink dropped on the inner region 53 spreads in the in-plane direction, and the plurality of ink droplets are integrated with each other. As a result, the surface of the ink applied to the inner region 53 becomes flat, and a film 56 of liquid ink is formed. At this time, the edge portion 55 functions to block the outflow of liquid ink.

將油墨塗佈於內部區域53之後使塗佈對象物50移動的同時,從硬化用光源21(圖1B)向液態的油墨的膜56照射硬化用光,藉此使內部區域53的油墨硬化(步驟S4)。After the ink is applied to the inner region 53 while moving the coated object 50, the curing light is irradiated from the curing light source 21 (FIG. 1B) to the liquid ink film 56, thereby curing the ink in the inner region 53 ( Step S4).

圖4C係使塗佈於內部區域53之油墨硬化之後的塗佈對象物50的剖面圖。在內部區域53形成有表面平坦的膜57。4C is a cross-sectional view of the coating object 50 after the ink applied to the inner region 53 is cured. A film 57 having a flat surface is formed in the inner region 53.

接著,參閱圖2C及圖5,對本實施例的優異之效果進行說明。 圖5係表示藉由基於比較例之方法將油墨塗佈於內部區域53(圖2A)時的滴落點CI的分佈之圖。內部區域53的y方向的像素31的間距與邊緣區域52的像素30的y方向的間距PEy(圖2B)相等。比較例中,將從4個像素31提取之一個像素31的中心點設為滴落點CI。Next, referring to FIGS. 2C and 5, the excellent effects of this embodiment will be described. FIG. 5 is a diagram showing the distribution of drop points CI when ink is applied to the inner region 53 (FIG. 2A) by a method based on a comparative example. The pitch of the pixels 31 in the y direction of the inner region 53 is equal to the pitch PEy of the pixels 30 in the edge region 52 in the y direction (FIG. 2B ). In the comparative example, the center point of one pixel 31 extracted from the four pixels 31 is referred to as the drop point CI.

滴落點CI的分佈密度在實施例(圖2C)的情況和比較例(圖5)的情況下相同。然而,圖5所示之比較例的情況下,滴落點CI的y方向的間距的最小值與邊緣區域52的滴落點CE的y方向的間距PEy相同。因此,難以使將油墨塗佈於內部區域53時的掃描速度比起將油墨塗佈於邊緣區域52時的掃描速度更快。The distribution density of the dropping point CI is the same in the case of the example (FIG. 2C) and the case of the comparative example (FIG. 5 ). However, in the case of the comparative example shown in FIG. 5, the minimum value of the pitch in the y direction of the dropping point CI is the same as the pitch PEy in the y direction of the dropping point CE of the edge region 52. Therefore, it is difficult to make the scanning speed when ink is applied to the inner region 53 faster than when the ink is applied to the edge region 52.

例如,在圖5所示之例子中,若著眼於一個列,則滴落點CI的掃描方向的間距成為間距PEy的2倍。然而,作為內部區域53整體,滴落點CI的掃描方向的間距等於間距PEy。相對於此,在本實施例中,內部區域53的滴落點CI的y方向的間距PIy(圖2C)作為整體比邊緣區域52的滴落點CE的y方向的間距PEy寬,例如為2倍。在此,“作為整體”係指不僅為滴落點CI的一個列,而是將所有列作為對象。For example, in the example shown in FIG. 5, if one row is focused on, the pitch of the drop points CI in the scanning direction becomes twice the pitch PEy. However, as a whole of the inner region 53, the pitch in the scanning direction of the dropping points CI is equal to the pitch PEy. On the other hand, in this embodiment, the pitch PIy (FIG. 2C) in the y direction of the dripping point CI of the inner region 53 as a whole is wider than the pitch PEy of the dripping point CE of the edge region 52 in the y direction, for example, 2. Times. Here, "as a whole" means not only one column of the dropping point CI, but all the columns as objects.

因此,能夠使將油墨塗佈於內部區域53時的掃描速度比起將油墨塗佈於邊緣區域52時的掃描速度更快。藉由加快將油墨塗佈於內部區域53時的掃描速度,能夠縮短塗佈油墨所需之時間。Therefore, the scanning speed when the ink is applied to the inner area 53 can be made faster than the scanning speed when the ink is applied to the edge area 52. By increasing the scanning speed when the ink is applied to the inner region 53, the time required to apply the ink can be shortened.

並且,在本實施例中,如圖4B及圖4C所示,能夠將形成於內部區域之油墨的膜的表面平坦化。因此,能夠提高膜的設計性。將該膜用作蝕刻遮罩時,膜的厚度均勻,因此與表面形成有凹凸之膜相比,就蝕刻耐性的觀點而言,能夠提高可靠性。Furthermore, in this embodiment, as shown in FIGS. 4B and 4C, the surface of the ink film formed in the inner region can be flattened. Therefore, the design of the film can be improved. When the film is used as an etching mask, the thickness of the film is uniform, and therefore, the reliability can be improved from the viewpoint of etching resistance compared to a film with unevenness formed on the surface.

接著,參閱圖6A~圖6E,對其他實施例進行說明。以下,關於與圖1A~圖4C所示之實施例共同的結構省略說明。Next, referring to Figs. 6A to 6E, other embodiments will be described. Hereinafter, a description of the structure common to the embodiment shown in FIGS. 1A to 4C will be omitted.

圖6A係表示邊緣區域52的一部分的複數個像素30的配置之圖。並列配置有複數個像素30,像素30的各中心相當於滴落點CE。圖6B係表示塗佈於邊緣區域52之油墨的平面形狀之圖。滴落於塗佈對象物50之油墨大致以圓形擴散,滴落在相鄰之2個滴落點CE之油墨彼此連續而形成邊緣部55。FIG. 6A is a diagram showing the arrangement of a plurality of pixels 30 in a part of the edge region 52. A plurality of pixels 30 are arranged in parallel, and each center of the pixel 30 corresponds to the drop point CE. FIG. 6B is a diagram showing the planar shape of the ink applied to the edge area 52. FIG. The ink dropped on the application target 50 spreads in a substantially circular shape, and the ink dropped on two adjacent dropping points CE is continuous with each other to form an edge portion 55.

圖6C係表示內部區域53的一部分的複數個像素31的配置之圖。複數個像素31沿x方向及y方向二維分佈。像素31大於邊緣區域52的像素30(圖6A)。因此,內部區域53的滴落點CI的間距比邊緣區域52的滴落點CE的間距寬。FIG. 6C is a diagram showing the arrangement of a plurality of pixels 31 in a part of the internal region 53. The plurality of pixels 31 are two-dimensionally distributed along the x direction and the y direction. The pixel 31 is larger than the pixel 30 of the edge area 52 (FIG. 6A). Therefore, the pitch of the drop points CI of the inner area 53 is wider than the pitch of the drop points CE of the edge area 52.

圖6D係表示塗佈於內部區域53之液態的擴散之平面圖。滴落於塗佈對象物50之油墨大致以圓形擴散。將油墨擴散之區域稱為擴散區域58。依滴落點CI的間距和油墨的液滴的體積,油墨的擴散區域58不會完全覆蓋內部區域53的整個區域,有時會產生塗佈疏漏。FIG. 6D is a plan view showing the diffusion of the liquid applied to the inner region 53. The ink dropped on the application target 50 spreads in a substantially circular shape. The area where the ink diffuses is called the diffusion area 58. Depending on the distance between the drop points CI and the volume of the ink droplets, the ink diffusion area 58 may not completely cover the entire area of the inner area 53, which may cause coating omissions.

圖6E係表示藉由能夠防止產生塗佈疏漏之本實施例之方法塗佈油墨時的油墨的擴散區域之平面圖。在本實施例中,使滴落在內部區域53的滴落點CI之油墨的液滴的體積大於滴落在邊緣區域52的滴落點CE(圖6A)之油墨的液滴的體積。液滴的體積設定為油墨的擴散區域58會完全覆蓋內部區域53的整個區域之大小。6E is a plan view showing the diffusion area of the ink when the ink is applied by the method of the present embodiment that can prevent the occurrence of coating omissions. In this embodiment, the volume of the ink droplet that falls on the drop point CI of the inner area 53 is greater than the volume of the ink droplet that falls on the drop point CE (FIG. 6A) of the edge area 52. The volume of the droplet is set so that the diffusion area 58 of the ink will completely cover the entire area of the inner area 53.

接著,對本實施例的優異的效果進行說明。在本實施例中,藉由使滴落在內部區域53的滴落點CI之油墨的液滴的體積大於滴落在邊緣區域52的滴落點CE之油墨的液滴的體積,能夠抑制在內部區域53產生油墨的塗佈疏漏。作為增大滴落在滴落點CI之油墨的液滴的體積之方法,可以增大一個液滴的體積,亦可以藉由增加滴落於一個滴落點CI之液滴的個數來增大液滴的總體積。Next, the excellent effects of this embodiment will be described. In the present embodiment, by making the volume of the ink droplet at the drop point CI of the inner area 53 larger than the volume of the ink droplet at the drop point CE of the edge area 52, it is possible to suppress The internal area 53 causes an oversight of ink application. As a method of increasing the volume of the ink droplet that falls on the CI of the dripping point, the volume of a droplet can be increased, or it can be increased by increasing the number of droplets that fall on the CI of a dripping point. The total volume of large droplets.

接著,參閱圖7A~圖8B,進一步對其他實施例進行說明。以下,關於與圖1A~圖4及圖6E所示之實施例共同的結構省略說明。Next, referring to FIGS. 7A to 8B, other embodiments are further described. Hereinafter, a description of the structure common to the embodiment shown in FIGS. 1A to 4 and 6E is omitted.

圖7A係表示滴落在內部區域53的滴落點CI之油墨的擴散區域58的一例之圖。若增大滴落在滴落點CI之油墨的液滴的體積,則擴散區域58亦變大,有時會超過邊緣部55而擴散至外側。FIG. 7A is a diagram showing an example of the diffusion area 58 of the ink dropped on the drop point CI of the inner area 53. If the volume of the ink droplet dropped on the dropping point CI is increased, the diffusion area 58 will also become larger, and may extend beyond the edge portion 55 and spread to the outside.

圖7B係表示採用基於本實施例之油墨塗佈裝置及油墨塗佈方法時的油墨的擴散區域58之圖。在本實施例中,為了防止滴落在內部區域53的滴落點CI之油墨的擴散區域58超過邊緣部55而擴散至外側,與圖7A的結構相比,使內部區域53的最外側的滴落點CI遠離邊緣部55。FIG. 7B is a diagram showing an ink diffusion area 58 when the ink application device and ink application method according to this embodiment are used. In this embodiment, in order to prevent the diffusion area 58 of the ink dripping on the drop point CI of the inner area 53 from exceeding the edge portion 55 and spreading to the outside, compared with the structure of FIG. 7A, the outermost area of the inner area 53 The drop point CI is far away from the edge portion 55.

圖8A係表示圖1A~圖4及圖6E所示之實施例中所使用之圖像資料的像素及滴落點的分佈之圖。邊緣區域52的滴落點CE沿x方向及y方向以間距PE配置。內部區域53的滴落點CI沿x方向及y方向以間距PI配置。以Gx表示內部區域53的最外周的滴落點CI與相對於該滴落點CI沿x方向相鄰之邊緣區域52的滴落點CE的x方向的間隔。位於內部區域53的最外周之像素31與邊緣區域52的像素30接觸,因此間隔Gx等於間距PE的1/2與間距PI的1/2之和。關於y方向亦相同。FIG. 8A is a diagram showing the distribution of pixels and drop points of the image data used in the embodiment shown in FIGS. 1A to 4 and 6E. The drop points CE of the edge region 52 are arranged at a pitch PE along the x direction and the y direction. The dropping points CI of the inner region 53 are arranged at a pitch PI along the x direction and the y direction. Gx represents the distance in the x direction between the drop point CI of the outermost periphery of the inner region 53 and the drop point CE of the edge region 52 adjacent to the drop point CI in the x direction. The pixel 31 located at the outermost periphery of the inner region 53 is in contact with the pixel 30 of the edge region 52, so the interval Gx is equal to the sum of 1/2 of the pitch PE and 1/2 of the pitch PI. The same applies to the y direction.

圖8B係表示本實施例中使用之圖像資料的像素及滴落點的分佈之圖。在本實施例中,在x方向及y方向上縮小由構成內部區域53之複數個像素31佔據之區域。因此,在位於內部區域53的最外周之像素31與邊緣區域52的像素30之間形成有間隙32。因此,間隔Gx比間距PE的1/2與間距PI的1/2之和寬。除了最外周以外的內側的像素31的位置按照最外周的像素31的位移調整為像素31均勻地分佈。關於y方向亦相同。控制裝置40依據調整後的像素31的位置進行油墨的吐出時刻及待吐出油墨之噴嘴孔20的控制。FIG. 8B is a diagram showing the distribution of pixels and drop points of the image data used in this embodiment. In this embodiment, the area occupied by the plurality of pixels 31 constituting the inner area 53 is reduced in the x direction and the y direction. Therefore, a gap 32 is formed between the pixel 31 located at the outermost periphery of the inner region 53 and the pixel 30 of the edge region 52. Therefore, the gap Gx is wider than the sum of 1/2 of the pitch PE and 1/2 of the pitch PI. The positions of the inner pixels 31 except for the outermost periphery are adjusted to be uniformly distributed in accordance with the displacement of the outermost pixels 31. The same applies to the y direction. The control device 40 controls the discharge timing of the ink and the nozzle hole 20 through which the ink is to be discharged based on the position of the adjusted pixel 31.

在本實施例中,藉由在x方向及y方向上縮小構成內部區域53的圖像資料之複數個像素31,使位於內部區域53的最外周之滴落點CI的位置朝遠離邊緣區域52之方向位移。藉此,如圖7B所示,能夠抑制滴落在內部區域53之油墨擴散至邊緣部55的外側。In this embodiment, by reducing the plurality of pixels 31 constituting the image data of the inner region 53 in the x direction and the y direction, the position of the drop point CI located at the outermost periphery of the inner region 53 is moved away from the edge region 52 The direction of displacement. As a result, as shown in FIG. 7B, it is possible to prevent the ink dropped on the inner region 53 from spreading to the outside of the edge portion 55.

為了抑制油墨擴散至邊緣部55的外側,將間隔Gx設為滴落在內部區域53之油墨的一個液滴擴散之圓形區域的半徑以上為較佳。並且,若過於擴大間隔Gx,則會導致在邊緣區域52與內部區域53之間的邊界產生未塗佈油墨之區域。間隔Gx的上限值設為不產生未塗佈油墨之區域之程度為較佳。In order to prevent the ink from spreading to the outside of the edge portion 55, it is preferable to set the interval Gx to be equal to or greater than the radius of a circular area where one droplet of ink dropped on the inner area 53 spreads. In addition, if the gap Gx is too large, an area where no ink is applied will be generated at the boundary between the edge area 52 and the inner area 53. The upper limit of the interval Gx is preferably set to such a degree that no uncoated ink area is generated.

接著,參閱圖9A及圖9B,進一步對其他實施例進行說明。以下,關於與圖8B所示之實施例共同的結構省略說明。Next, referring to FIGS. 9A and 9B, other embodiments are further described. Hereinafter, the description of the structure common to the embodiment shown in FIG. 8B is omitted.

圖9A係表示本實施例中使用之圖像資料的像素的分佈之圖。在圖8B所示之實施例中,在x方向及y方向這兩個方向上縮小了由構成內部區域53之複數個像素31佔據之區域。在本實施例中,將由構成內部區域53之複數個像素31佔據之區域在x方向(相對於掃描方向正交之方向)上縮小,但在y方向(掃描方向)上不縮小。因此,位於內部區域53的最外周之像素31與相對於該像素在y方向上相鄰之邊緣區域52的像素30接觸。FIG. 9A is a diagram showing the distribution of pixels of the image data used in this embodiment. In the embodiment shown in FIG. 8B, the area occupied by the plurality of pixels 31 constituting the inner area 53 is reduced in the two directions of the x direction and the y direction. In this embodiment, the area occupied by the plurality of pixels 31 constituting the inner area 53 is reduced in the x direction (direction orthogonal to the scanning direction), but not in the y direction (scanning direction). Therefore, the pixel 31 located at the outermost periphery of the inner region 53 is in contact with the pixel 30 of the edge region 52 adjacent to the pixel in the y direction.

圖9B係表示從噴嘴孔20(圖1B)吐出油墨的時刻之時序圖。以下,對滴落點朝向圖9A的y軸的正方向移動,並將油墨滴落在沿y方向排成一列之7個像素31時的掃描的例子進行說明。7個像素31的兩端的像素31位於內部區域53的最外周。對排成一列之7個像素31朝向y軸的正方向附加1至7的編號。由C(i)表示第i個像素31的中心位置,由CI(i)表示與第i個像素31對應之滴落點。FIG. 9B is a timing chart showing the timing when ink is discharged from the nozzle hole 20 (FIG. 1B ). Hereinafter, an example of scanning when the drop point moves in the positive direction of the y-axis in FIG. 9A and ink drops on 7 pixels 31 aligned in the y direction will be described. The pixels 31 at both ends of the seven pixels 31 are located at the outermost periphery of the inner region 53. Numbers 1 to 7 are added to the 7 pixels 31 in a row facing the positive direction of the y-axis. C(i) represents the center position of the i-th pixel 31, and CI(i) represents the drop point corresponding to the i-th pixel 31.

圖9B的上段的時序圖表示與圖像資料對應之吐出時刻,下段的時序圖表示實際的吐出時刻。使滴落點CI(1)的吐出時刻比與像素31的中心位置C(1)對應之吐出時刻慢。並且,使滴落點CI(7)的吐出時刻比與像素31的中心位置C(7)對應之吐出時刻快。關於除了兩端的滴落點CI(1)及CI(7)以外的內側的滴落點CI(2)~CI(6)的吐出時刻,從與中心位置C(2)~C(6)對應之吐出時刻錯開,以使實際的吐出時刻的時間間隔成為恆定。The upper timing chart of FIG. 9B shows the discharge time corresponding to the image data, and the lower timing chart shows the actual discharge time. The discharge time of the drop point CI(1) is made slower than the discharge time corresponding to the center position C(1) of the pixel 31. In addition, the discharge time of the dropping point CI(7) is made faster than the discharge time corresponding to the center position C(7) of the pixel 31. Regarding the discharge time of the inner dripping points CI(2) to CI(6) except for the dripping points CI(1) and CI(7) at both ends, it corresponds to the center position C(2) to C(6) The discharge time is staggered so that the time interval of the actual discharge time becomes constant.

如此,藉由錯開實際的吐出時刻,能夠使位於內部區域53的最外周之滴落點CI(1)、CI(7)遠離邊緣區域52。其結果,與圖8B所示之實施例同樣地,能夠抑制滴落在內部區域53之油墨擴散至邊緣部55的外側。In this way, by shifting the actual discharge time, the drop points CI(1) and CI(7) located at the outermost periphery of the inner region 53 can be moved away from the edge region 52. As a result, as in the embodiment shown in FIG. 8B, it is possible to prevent the ink dropped on the inner region 53 from spreading to the outside of the edge portion 55.

接著,參閱圖10A~圖10D,進一步對其他實施例進行說明。以下,關於與圖1A~圖4C所示之實施例共同的結構省略說明。Next, referring to FIGS. 10A to 10D, other embodiments will be further described. Hereinafter, a description of the structure common to the embodiment shown in FIGS. 1A to 4C will be omitted.

圖10A係表示本實施例中所使用之邊緣區域52的像素30的分佈之圖。在圖2B所示之實施例中,邊緣區域52的各邊的寬度為一個像素30的量。在本實施例中,沿邊緣區域52的各邊的寬度方向排列有複數個像素30,例如3個像素30。亦即,沿邊緣區域52的各邊的寬度方向排列有複數個滴落點CE。對沿寬度方向排列之3個滴落點CE從外側朝向內側附加編號。內部區域53被邊緣區域52包圍。FIG. 10A is a diagram showing the distribution of pixels 30 in the edge region 52 used in this embodiment. In the embodiment shown in FIG. 2B, the width of each side of the edge region 52 is the amount of one pixel 30. In this embodiment, a plurality of pixels 30, for example, three pixels 30, are arranged along the width direction of each side of the edge region 52. That is, a plurality of dripping points CE are arranged along the width direction of each side of the edge region 52. The three drop points CE arranged in the width direction are numbered from the outside to the inside. The inner area 53 is surrounded by the edge area 52.

接著,參閱圖10B~圖10D,對將油墨滴落在沿邊緣區域52的各邊的寬度方向排列之複數個滴落點CE之順序進行說明。Next, referring to FIGS. 10B to 10D, the order in which ink is dropped on the plurality of drop points CE arranged along the width direction of each side of the edge region 52 will be described.

圖10B係圖10A的單點鏈線10B-10B上的塗佈對象物50的剖面圖,表示將油墨滴落在邊緣區域52的最外側的滴落點CE(1)之狀態。滴落在滴落點CE(1)之油墨61在硬化之前的期間沿面內方向擴散,並且到達至超過相鄰的滴落點CE(2)之位置。因此,形成以滴落點CE(1)的位置為中心之油墨的凸部。相鄰的滴落點CE(2)位於與由油墨61形成之凸部的斜面對應之部位。10B is a cross-sectional view of the coating object 50 on the one-dot chain line 10B-10B of FIG. 10A, showing the state where the ink is dropped on the outermost drop point CE(1) of the edge region 52. The ink 61 dropped on the dropping point CE(1) spreads in the in-plane direction during the period before hardening, and reaches a position beyond the adjacent dropping point CE(2). Therefore, a convex portion of the ink centered on the position of the drop point CE(1) is formed. The adjacent drop point CE (2) is located at a position corresponding to the slope of the convex portion formed by the ink 61.

圖10C表示將油墨62滴落在從邊緣區域52的外側起第2個滴落點CE(2)時的狀態。滴落在滴落點CE(2)之油墨沿著由剛吐出之油墨61形成之凸部的斜面朝向內部區域53流動,並且到達至超過相鄰的滴落點CE(3)之位置。FIG. 10C shows a state when the ink 62 is dropped on the second drop point CE(2) from the outside of the edge region 52. The ink dropped on the dropping point CE(2) flows along the slope of the convex portion formed by the ink 61 just discharged toward the inner region 53 and reaches a position beyond the adjacent dropping point CE(3).

圖10D表示將油墨63滴落在邊緣區域52的最內側的滴落點CE(3)時的狀態。滴落在滴落點CE(3)之油墨沿著剛吐出並硬化之油墨62的斜面朝向內部區域53流動。藉由使滴落在滴落點CE(1)~CE(3)之油墨61、62、63硬化而形成邊緣部55。FIG. 10D shows a state when the ink 63 is dropped on the innermost drop point CE(3) of the edge area 52. The ink dropped on the dropping point CE(3) flows toward the inner area 53 along the slope of the ink 62 that has just been discharged and hardened. The edge portion 55 is formed by hardening the inks 61, 62, and 63 dropped on the drop points CE(1) to CE(3).

接著,對本實施例的優異的效果進行說明。在本實施例中,關於邊緣區域52的各邊的寬度方向,從外側的滴落點CE(1)朝向內側的滴落點CE(3)依次滴落油墨。隨後滴落之油墨沿著先前滴落而硬化之油墨的斜面朝向內部區域53(圖10A)流動,因此邊緣部55(圖10D)的內部區域53側的斜面的傾斜度比外側的斜面的傾斜度平緩。換言之,能夠使邊緣部55的外側的斜面的傾斜度變得陡峭。Next, the excellent effects of this embodiment will be described. In this embodiment, with respect to the width direction of each side of the edge region 52, the ink is sequentially dropped from the outer dropping point CE(1) to the inner dropping point CE(3). The subsequently dripped ink flows along the slope of the previously dripped and hardened ink toward the inner region 53 (FIG. 10A). Therefore, the slope of the inner region 53 side of the edge portion 55 (FIG. 10D) is more inclined than the outer slope. The degree is gentle. In other words, the inclination of the slope on the outer side of the edge portion 55 can be made steep.

圖10B~圖10D中,對與x方向平行之邊(相對於掃描方向正交之邊)進行說明。關於與y方向(掃描方向)平行的邊,也是從外側朝向內側將油墨依次滴落在沿寬度方向排列之複數個滴落點CE為佳。例如,藉由複數次掃描將油墨滴落在邊緣區域52的滴落點CE時,在第1次的掃描中將油墨滴落在最外側的滴落點CE,藉由之後的掃描將油墨依次滴落在內側的滴落點CE為佳。In FIGS. 10B to 10D, the side parallel to the x direction (the side orthogonal to the scanning direction) will be described. Regarding the side parallel to the y direction (scanning direction), it is also preferable to sequentially drop the ink on a plurality of drop points CE arranged in the width direction from the outside to the inside. For example, when the ink is dropped on the drop point CE of the edge area 52 by multiple scans, the ink is dropped on the outermost drop point CE in the first scan, and the ink is sequentially ordered by subsequent scans. The drop point CE that drops on the inner side is better.

接著,參閱圖11A及圖11B,進一步對其他實施例進行說明。以下,關於與圖1A~圖4C所示之實施例共同的結構省略說明。在圖1A~圖4C所示之實施例中,為了將油墨塗佈於邊緣區域52及內部區域53(圖2A),使用共同的噴墨頭16(圖1B)。在本實施例中,設置用於將油墨塗佈於邊緣區域之噴墨頭及用於將油墨塗佈於內部區域之噴墨頭。Next, referring to FIGS. 11A and 11B, other embodiments are further described. Hereinafter, a description of the structure common to the embodiment shown in FIGS. 1A to 4C will be omitted. In the embodiment shown in FIGS. 1A to 4C, in order to apply ink to the edge area 52 and the inner area 53 (FIG. 2A), a common inkjet head 16 (FIG. 1B) is used. In this embodiment, an inkjet head for applying ink to the edge area and an inkjet head for applying ink to the inner area are provided.

圖11A係邊緣區域用噴墨頭16E的仰視圖,圖11B係內部區域用噴墨頭16I的仰視圖。在邊緣區域用噴墨頭16E的底面設置有沿x方向排列之複數個噴嘴孔20E,在內部區域用噴墨頭16I的底面設置有沿x方向排列之複數個噴嘴孔20I。噴嘴孔20I的x方向的間距比噴嘴孔20E的x方向的間距寬。並且,內部區域用噴墨頭16I所吐出之油墨的液滴的體積大於邊緣區域用噴墨頭16E所吐出之油墨的液滴的體積。FIG. 11A is a bottom view of the inkjet head 16E for the edge area, and FIG. 11B is a bottom view of the inkjet head 16I for the inner area. The bottom surface of the edge area inkjet head 16E is provided with a plurality of nozzle holes 20E arranged in the x direction, and the bottom surface of the inner area inkjet head 16I is provided with a plurality of nozzle holes 20I arranged in the x direction. The pitch of the nozzle holes 20I in the x direction is wider than the pitch of the nozzle holes 20E in the x direction. In addition, the volume of ink droplets discharged by the inkjet head 16I for the inner area is larger than the volume of ink droplets discharged by the inkjet head 16E for the edge area.

在邊緣區域用噴墨頭16E的兩側分別配置有硬化用光源21E。在內部區域用噴墨頭16I的兩側分別配置有硬化用光源21I。硬化用光源21E、21I朝向塗佈對象物50照射使油墨硬化之硬化用光。Curing light sources 21E are respectively arranged on both sides of the edge area inkjet head 16E. The curing light source 21I is respectively arranged on both sides of the inkjet head 16I for the inner area. The curing light sources 21E and 21I irradiate the coating object 50 with curing light for curing the ink.

內部區域用噴墨頭16I的噴嘴孔20I與硬化用光源21I的y方向的間隔WIy比邊緣區域用噴墨頭16E的噴嘴孔20E與硬化用光源21E的y方向的間隔WEy寬。The distance WIy between the nozzle hole 20I of the inkjet head 16I for inner area and the curing light source 21I in the y direction is wider than the distance WEy between the nozzle hole 20E of the inkjet head 16E for edge area and the curing light source 21E in the y direction.

在圖3所示之實施例中,在步驟S3中進行將油墨塗佈於內部區域53之掃描之後,在步驟S4中使內部區域53的油墨硬化。在本實施例中,使用內部區域用噴墨頭16I進行將油墨塗佈於內部區域53之掃描時,從硬化用光源21I向塗佈對象物50照射硬化用光。In the embodiment shown in FIG. 3, after scanning to apply ink to the inner region 53 in step S3, the ink in the inner region 53 is hardened in step S4. In the present embodiment, when the inkjet head 16I for the inner area is used to scan the ink to be applied to the inner area 53, the curing light is irradiated from the curing light source 21I to the application target 50.

接著,對本實施例的優異的效果進行說明。 間隔WIy比間隔WEy寬,因此從油墨滴落到內部區域53直至硬化為止的時間比油墨滴落到邊緣區域52直至硬化為止的時間長。藉此,能夠使滴落於內部區域53之油墨擴散,油墨的膜的上表面變得大致平坦,然後使油墨硬化。其結果,與圖4A~圖4C所示之實施例同樣地,能夠使內部區域53的油墨的膜57的表面平坦化。在本實施例中,無需單獨進行用於油墨的硬化的處理,因此能夠縮短處理時間。Next, the excellent effects of this embodiment will be described. The interval WIy is wider than the interval WEy, and therefore the time from the ink dripping to the inner region 53 until hardening is longer than the time from ink dripping to the edge region 52 until hardening. Thereby, the ink dropped on the inner region 53 can be diffused, the upper surface of the ink film becomes substantially flat, and then the ink is cured. As a result, as in the embodiment shown in FIGS. 4A to 4C, the surface of the ink film 57 in the inner region 53 can be flattened. In this embodiment, there is no need to separately perform the treatment for hardening the ink, so the treatment time can be shortened.

從內部區域用噴墨頭16I吐出之油墨的液滴的體積大於從邊緣區域用噴墨頭16E吐出之油墨的液滴的體積,因此能夠防止內部區域53(圖2A)的漏塗。The volume of the ink droplets discharged from the inkjet head 16I for the inner area is larger than the volume of ink droplets discharged from the inkjet head 16E for the edge area, so that the leakage of the inner area 53 (FIG. 2A) can be prevented.

上述各實施例為例示,當然能夠進行不同的實施例中所示之結構的局部置換或組合。針對基於複數個實施例的相同的結構的相同的作用效果,並未在每個實施例中依次提及。此外,本發明並不限制於上述實施例。本領域的技術人員應當清楚例如能夠進行各種變更、改良、組合等。The foregoing embodiments are examples, and it is of course possible to perform partial replacement or combination of the structures shown in different embodiments. Regarding the same effects based on the same structure of a plurality of embodiments, they are not mentioned in turn in each embodiment. In addition, the present invention is not limited to the above-mentioned embodiment. It should be clear to those skilled in the art that, for example, various changes, improvements, and combinations can be made.

10‧‧‧支架 11‧‧‧XY載台 12‧‧‧θ載台 15‧‧‧工作台 16‧‧‧噴墨頭 16E‧‧‧邊緣區域用噴墨頭 16I‧‧‧內部區域用噴墨頭 17‧‧‧框架 18‧‧‧循環系統 19‧‧‧循環路徑 20、20E、20I‧‧‧噴嘴孔 21、21E、21I‧‧‧硬化用光源 30‧‧‧邊緣區域的像素 31‧‧‧內部區域的像素 32‧‧‧間隙 40‧‧‧控制裝置 50‧‧‧塗佈對象物 51‧‧‧待塗佈油墨之區域 52‧‧‧邊緣區域 53‧‧‧內部區域 55‧‧‧邊緣部 56‧‧‧塗佈於內部區域之液態油墨的膜 57‧‧‧硬化之油墨的膜 58‧‧‧油墨的擴散區域 61、62、63‧‧‧滴落於邊緣區域之油墨10‧‧‧Support 11‧‧‧XY stage 12‧‧‧θ stage 15‧‧‧Working table 16‧‧‧Inkjet head 16E‧‧‧Inkjet head for edge area 16I‧‧‧Inkjet head for internal area 17‧‧‧Frame 18‧‧‧Circulation system 19‧‧‧Circulation path 20, 20E, 20I‧‧‧Nozzle hole 21, 21E, 21I‧‧‧Light source for curing 30‧‧‧Pixels in the edge area 31‧‧‧Pixels in the inner area 32‧‧‧Gap 40‧‧‧Control device 50‧‧‧Coating object 51‧‧‧The area to be coated with ink 52‧‧‧Edge area 53‧‧‧Internal area 55‧‧‧Edge 56‧‧‧The liquid ink film applied to the inner area 57‧‧‧Film of hardened ink 58‧‧‧Ink diffusion area 61, 62, 63‧‧‧Ink dripping on the edge area

圖1A係基於實施例之油墨塗佈裝置的概要圖,圖1B係基於實施例之油墨塗佈裝置的工作台的平面圖。 圖2A係表示待塗佈油墨之區域之平面圖,圖2B係表示待塗佈油墨之區域為長方形時的邊緣區域的像素的配置之圖,圖2C係表示待塗佈油墨之區域為長方形時的內部區域的像素的配置之圖。 圖3係基於實施例之油墨塗佈方法的流程圖。 圖4A係形成有邊緣部之塗佈對象物的、沿寬度方向切割邊緣部之剖面圖,圖4B係將油墨塗佈於內部區域之後的塗佈對象物的剖面圖,圖4C係使塗佈於內部區域之油墨硬化之後的塗佈對象物的剖面圖。 圖5係表示藉由基於比較例之方法將油墨塗佈於內部區域(圖2A)時的滴落點的分佈之圖。 圖6A係表示邊緣區域的複數個像素的配置之圖,圖6B係表示塗佈於邊緣區域之油墨的平面形狀之圖,圖6C係表示內部區域的複數個像素的配置之圖,圖6D係表示塗佈於內部區域之液態的擴散之平面圖,圖6E係表示藉由基於能夠防止塗佈疏漏的產生之實施例之方法塗佈油墨時的油墨的擴散區域之平面圖。 圖7A係表示滴落在內部區域的滴落點之油墨的擴散區域的一例之圖,圖7B係表示採用基於實施例之油墨塗佈裝置及油墨塗佈方法時的油墨的擴散區域之圖。 圖8A係表示圖1A~圖4及圖6E所示之實施例中所使用之圖像資料的像素及滴落點的分佈之圖,圖8B係表示其他實施例中使用之圖像資料的像素及滴落點的分佈之圖。 圖9A係表示實施例中所使用之圖像資料的像素的分佈之圖,圖9B係表示從噴嘴孔吐出油墨的時刻之時序圖。 圖10A係表示實施例中所使用之邊緣區域的像素的分佈之圖,圖10B係圖10A的單點鏈線10B-10B上的塗佈對象物的剖面圖,並表示將油墨滴落在邊緣區域的最外側的滴落點時的狀態,圖10C係表示將油墨滴落在從邊緣區域的外側開始第2個滴落點時的狀態之剖面圖,圖10D係表示將油墨滴落在邊緣區域的最內側的滴落點時的狀態之剖面圖。 圖11A係邊緣區域用噴墨頭的仰視圖,圖11B係內部區域用噴墨頭的仰視圖。FIG. 1A is a schematic view of the ink coating device based on the embodiment, and FIG. 1B is a plan view of the workbench of the ink coating device based on the embodiment. Figure 2A is a plan view of the area to be coated with ink, Figure 2B is a diagram showing the arrangement of pixels in the edge area when the area to be coated with ink is rectangular, and Figure 2C is a diagram showing the area to be coated with ink is rectangular The layout of the pixels in the inner area. Fig. 3 is a flow chart of the ink coating method based on the embodiment. Fig. 4A is a cross-sectional view of the coated object formed with the edge portion, cutting the edge portion in the width direction, Fig. 4B is a cross-sectional view of the coated object after ink is applied to the inner area, and Fig. 4C is the coated Cross-sectional view of the object to be coated after the ink in the inner area has cured. FIG. 5 is a diagram showing the distribution of dripping points when ink is applied to the inner region (FIG. 2A) by the method based on the comparative example. Fig. 6A is a diagram showing the arrangement of a plurality of pixels in the edge area, Fig. 6B is a diagram showing the plane shape of the ink applied to the edge area, Fig. 6C is a diagram showing the arrangement of a plurality of pixels in the inner area, and Fig. 6D is 6E is a plan view showing the diffusion area of the ink when the ink is applied by the method based on the embodiment capable of preventing the occurrence of coating omissions. FIG. 7A is a diagram showing an example of the diffusion area of the ink at the drop point of the inner region, and FIG. 7B is a diagram showing the diffusion area of the ink when the ink application device and ink application method based on the embodiment are used. 8A is a diagram showing the distribution of pixels and drop points of the image data used in the embodiment shown in FIGS. 1A to 4 and 6E, and FIG. 8B shows the pixels of the image data used in other embodiments And the distribution of the drop points. FIG. 9A is a diagram showing the distribution of pixels of the image data used in the embodiment, and FIG. 9B is a timing diagram showing the timing when ink is discharged from the nozzle hole. 10A is a diagram showing the distribution of pixels in the edge area used in the embodiment, and FIG. 10B is a cross-sectional view of the coating object on the one-dot chain line 10B-10B of FIG. 10A, and shows that the ink drops on the edge Fig. 10C shows a cross-sectional view of the state when the ink is dropped on the second dropping point from the outside of the edge area, and Fig. 10D shows the ink drop on the edge. A cross-sectional view of the state of the drip point at the innermost point of the area. FIG. 11A is a bottom view of the inkjet head for the edge area, and FIG. 11B is a bottom view of the inkjet head for the inner area.

Claims (6)

一種油墨塗佈裝置,其具有:噴墨頭,朝向支承於工作台之塗佈對象物吐出油墨;移動機構,使前述塗佈對象物和前述噴墨頭中的一個相對於另一個移動,以使對前述塗佈對象物的油墨的滴落點在前述塗佈對象物的表面上移動;及控制裝置,控制前述噴墨頭及前述移動機構,前述控制裝置控制前述噴墨頭及前述移動機構,使前述塗佈對象物和前述噴墨頭中的一個相對於另一個移動的同時,使油墨滴落於沿著待塗佈之區域的邊緣之邊緣區域而在前述邊緣區域形成由油墨組成之邊緣部,形成前述邊緣部之後,使前述塗佈對象物和前述噴墨頭中的一個相對於另一個以比形成前述邊緣部時的移動速度快的移動速度移動的同時,將油墨塗佈於被前述邊緣部包圍之內部區域。 An ink coating device comprising: an inkjet head that ejects ink toward an object to be coated on a worktable; and a moving mechanism that moves one of the object to be coated and the inkjet head relative to the other to Moving the drop point of the ink on the coating object on the surface of the coating object; and a control device that controls the inkjet head and the moving mechanism, and the control device controls the inkjet head and the moving mechanism , While moving one of the coating object and the inkjet head relative to the other, the ink is dropped on the edge area along the edge of the area to be coated to form an ink composition in the edge area At the edge portion, after the edge portion is formed, one of the coating object and the inkjet head is moved relative to the other at a moving speed faster than the moving speed when the edge portion is formed, and the ink is applied to The inner area surrounded by the aforementioned edge. 如申請專利範圍第1項所述之油墨塗佈裝置,其中,前述控制裝置沿著與前述塗佈對象物和前述噴墨頭的相對移動方向平行之第1方向、及與前述第1方向正交之第2方向週期性地配置前述邊緣區域的複數個滴落點,並且以比前述邊緣區域的滴落點的間距寬的間距沿前述第1方向及前述第2方向週期性地配置前述內部區域的複數個滴落點。 The ink application device described in claim 1, wherein the control device is along a first direction parallel to the relative movement direction of the coating object and the inkjet head, and is aligned with the first direction In the second direction, a plurality of dripping points in the edge area are periodically arranged, and the inner portion is periodically arranged in the first direction and the second direction at a pitch wider than the pitch of the dripping points in the edge area Plural drop points in the area. 如申請專利範圍第2項所述之油墨塗佈裝置,其中,前述控制裝置將前述內部區域的最外周的滴落點與最靠近該滴落點的前述邊緣區域的滴落點的前述第1方向的間隔,設置成比沿前述內部區域的前述第1方向排列之滴落點的間距與沿前述邊緣區域的前述第1方向排列之滴落點的間距之和的1/2寬。 The ink application device according to the second item of the patent application, wherein the control device adjusts the first drop point of the outermost periphery of the inner region and the drop point of the edge region closest to the drop point. The directional interval is set to be wider than 1/2 of the sum of the pitch of the dripping points arranged in the first direction of the inner region and the pitch of the dripping points arranged in the first direction of the edge region. 如申請專利範圍第3項所述之油墨塗佈裝置,其中,前述控制裝置將定義前述內部區域的形狀之由複數個像素構成之圖像資料的最外周的像素的位置調整為朝遠離前述邊緣區域之方向位移,依據最外周的像素的位移調整內側的複數個像素的位置,並基於調整後的像素的位置控制油墨的吐出時刻。 The ink application device described in claim 3, wherein the control device adjusts the position of the outermost pixel of the image data composed of a plurality of pixels that defines the shape of the inner region to move away from the edge The direction displacement of the area adjusts the positions of a plurality of inner pixels based on the displacement of the outermost pixels, and controls the discharge timing of the ink based on the adjusted pixel positions. 如申請專利範圍第3項所述之油墨塗佈裝置,其中,前述控制裝置藉由從基於定義前述內部區域的形狀之圖像資料之油墨的吐出時刻錯開實際的吐出時刻,將沿前述第1方向排列之前述內部區域的滴落點的兩端的滴落點與前述邊緣區域的間隔設置成比基於前述圖像資料之滴落點與前述邊緣區域的間隔寬。 The ink application device according to the third item of the scope of patent application, wherein the control device shifts the actual discharge time from the ink discharge time based on the image data defining the shape of the inner region, so as to follow the first The distance between the drop points at both ends of the drop points of the inner region arranged in the direction and the edge area is set to be wider than the distance between the drop points based on the image data and the edge area. 一種油墨塗佈方法,在塗佈對象物的表面的、沿著待塗佈油墨之區域的邊 緣之邊緣區域,使油墨的滴落點移動的同時,滴落油墨的液滴而形成由油墨組成之邊緣部,形成前述邊緣部之後,在被前述邊緣部包圍之內部區域,使滴落點以比形成前述邊緣部時的滴落點的移動速度快的移動速度移動的同時,滴落油墨的液滴而將油墨塗佈於前述內部區域。 An ink coating method, on the surface of the coated object, along the edge of the area to be coated with ink The edge area of the edge moves the ink drop point while dropping ink droplets to form an edge portion composed of ink. After the edge portion is formed, the inner area surrounded by the edge portion makes the drop point While moving at a moving speed faster than the moving speed of the drop point when the edge portion is formed, droplets of ink are dropped to apply the ink to the inner region.
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