TWI702090B - Coating device - Google Patents

Abstract

The coating device of the present invention includes: a host platform on which a first gantry is arranged, one of the first cantilevers of the first gantry is in the Y-axis direction, and a first operating device is arranged on the first cantilever. The operating device includes a first coating head. The first coating head coats a first type of viscous material on a substrate contained in a carrier plate in an operating area; the first cantilever is provided with a The first working head, the first operating device is arranged on one end of the first working head, the first working head is arranged on the upper surface of the first cantilever, and the upper surface of the first cantilever is arranged between the lower surface of the first working head There is a first sliding seat, and the first working head can make X-axis and Y-axis displacement on the upper surface of the first cantilever.

Description

Coating device

The present invention relates to a coating device, in particular to a coating device used for coating a substrate (Substrate) on a carrier plate for carrying a wafer with a viscous material.

According to this, when a wafer is generally cut into chips, each chip must be packaged on a substrate (Substrate Board) before the chip can be used; however, the current operation of placing the chip on the substrate is usually This is done through a boat, so that the carrier provides a number of neatly arranged placement areas for each substrate to be placed in each placement area of the carrier, and then a predetermined position on the substrate is coated with adhesive material to When the chip is placed on the substrate, the adhesive material can be fixed to the predetermined position of the substrate for the next process.

A prior art uses rails under the two gantry, and sets the carrier plate with the substrate on the rail, and jointly erects a horizontal rail seat above the two gantry, and installs an internal container on the rail seat The rubber valve of viscous material can make Y-axis displacement on the two gantry through the horizontal rail seat, and the rubber valve can make X-axis and Z-axis displacement on the rail seat to load the disc in the lower track The upper substrate is applied with viscous material.

Another prior art in order to improve efficiency uses two parallel first and second guide rails under the two gantry to transport the two trays respectively, and a first guide rail and a second guide rail are provided on the first gantry to The detection unit and the first discharging head are respectively arranged, and the third guiding track is arranged on the second gantry to set the second discharging head, so that the tray on the first guide rail passes through the first guiding track on the first gantry When it is down, it is detected by the detection unit, and then continues to be transported under the second guide track on the first gantry It is coated by the first discharging head, and then returned to the original first gantry under the first guide rail to be inspected by the detection unit to complete the coating operation; the second rail is the same procedure and operation as the first rail , But one step later than the operation procedure on the first rail.

The former rubber valve of the prior art can make X-axis displacement on the rail seat. A horizontal rail seat is jointly erected above the two gantry, and a rubber valve containing viscous material is installed on the rail seat. The horizontal rail seat can make X-axis displacement on the two gantry. The horizontal rail seat design allows the coating device to only use one rubber valve for coating operation, which is not efficient; in addition, the latter adopts the first A first guide rail and a second guide rail are provided on the gantry to respectively set the detection unit and the first discharge head, and a third guide rail is provided on the second gantry to set the second discharge head, but in the first The carrier plate carrying the substrate after the first discharge head and the second discharge head are coated must undergo a return procedure, so that the detection unit under the first guide track is detected, resulting in a waste of travel and the entry of the next carrier plate The delay will delay the output efficiency!

The purpose of the present invention is to provide a coating device that can efficiently coat a substrate on a carrier with a viscous material.

The coating device according to the object of the present invention includes: a main machine table on which a first gantry is arranged, a first cantilever of the first gantry is in the Y-axis direction, and a first operating device is arranged on the first cantilever. The first operating device includes a first coating head, and the first coating head coats a first type of viscous material on a substrate contained in a tray in an operating area; the first cantilever is marked with X A first working head is arranged in the axial direction, the first operating device is arranged on one end of the first working head, the first working head is arranged on the upper surface of the first cantilever, the upper surface of the first cantilever and the first working head A first sliding seat is arranged between the lower surfaces, and the first working head can make X-axis and Y-axis displacements on the upper surface of the first cantilever.

In the coating device provided by the embodiment of the present invention, the first and second cantilevers are in the Y-axis direction, and the first and second operating devices are provided on a first and second working heads, and the first and second working heads are provided on the first and second working heads. On the second cantilever, the first and second working heads can perform X-axis displacement; therefore, the first and second operating devices can perform X and Y-axis displacements on the first and second gantry respectively, and there is no need for the two gantry in the prior art. A horizontal rail seat is jointly erected above the room; and the first and second working heads can be displaced in the X axis so that the first and second operating devices can carry a large weight, so that the first and second coating heads are stable Support, when performing X-axis gluing, you can only move the first and second working heads to link the first and second coating heads without moving the carrier plate, so that the carrier plate does not have to be affected by the movement to affect the positioning of the substrate; The first and second working heads are firmly supported. One end of the first and second working heads can bear the weight of the first and second coating heads, the first and second detection devices, and the first and second imaging devices when necessary. Including the operation steps of substrate position positioning, substrate height measurement, and coating of viscous material on the substrate, not only can increase the accuracy of the operation of coating viscous materials, but also help integrate management and control.

A: Host console

A1: The first track

A11: The first fixed rail

A111: Side rail frame

A112: Fixed parts

A113: Belt drive

A114: Belt

A115: Stop mechanism

A116: Stop drive

A117: Stop selling

A2: Second track

A21: Second fixed rail

A3: Disk

A31: hollow section

A32: positioning pin

A33: Slide

A4: The first conversion agency

A41: Driver

A42: The first movable rail

A5: The second conversion mechanism

A51: Driver

A52: The second movable rail

A6: Operating range

A61: First Dragon Gate

A611: First cantilever

A612: The first working head

A613: The first carriage

A614: Linear transmission parts

A615: Linear transmission parts

A62: Second Dragon Gate

A621: second cantilever

A622: The second working head

A623: The second slide

A624: Linear transmission parts

A71: The first operating device

A711: The first detection device

A712: The first imaging device

A713: The first coating head

A72: Second operating device

A721: Second detection device

A722: Second imaging device

A723: The second coating head

A8: Correction seat

A81: Calibration scale

A82: Measuring device

A83: Residual glue removal device

A831: Fixture

A832: Container

A833: Clip holder

A834: Flexible parts

A9: Fixture

A91: Fixture seat

A92: Top seat

A93: Negative pressure channel

B: auxiliary machine

B1: The third fixed rail

B2: X-axis drive

B3: Y axis drive

B4: Second detection device

B5: Pushing device

B51: fixed seat

B52: Slide rail

B521: Slider

B53: mobile seat

B54: Rodless pneumatic cylinder

B541: Slider

B55: putter

B551: Elastic element

B56: Pressure stop

B571: The first sensor

B572: The second sensor

C: Loading device

C1: The first lifting frame

C2: Storage box

C3: opening

C4: Push device

C41: Fixed parts

C42: Rail seat

C43: Slide rail

C44: Pushing piece

C45: mobile seat

C46: Belt

C47: Driver

D: Loading and unloading mechanism

D1: The second lifting frame

D2: Storage box

D3: opening

The first figure is a schematic top view of the conveying flow path for the discs on the host table in the embodiment of the present invention.

The second figure is a three-dimensional schematic diagram of the conveying flow path of the tray on the host table in the embodiment of the present invention.

The third figure is a schematic top view of the coating device in the embodiment of the present invention.

The fourth figure is a three-dimensional schematic diagram of the coating device in the embodiment of the present invention.

The fifth figure is a three-dimensional exploded schematic view of the first fixed rail and jig, and the tray in the embodiment of the present invention.

The sixth figure is a three-dimensional schematic diagram of the measuring device and the glue residue removing device in the embodiment of the present invention.

Figure 7 is a perspective schematic view of the operation of the pushing device at the loading device in the embodiment of the present invention.

Figure 8 is a perspective schematic view of the front side of the pushing device at the loading and unloading device in the embodiment of the present invention.

Figure 9 is a perspective schematic view of the rear side of the pushing device at the loading and unloading device in the embodiment of the present invention.

Figure 10 is a schematic diagram of the operation of the pushing device in the embodiment of the present invention (1).

Figure 11 is a schematic diagram (2) of the operation of the pushing device in the embodiment of the present invention.

Figure 12 is a schematic diagram of the operation of the pushing device in the embodiment of the present invention (3).

Please refer to the first and second figures. The coating device of the embodiment of the present invention can be illustrated by the device embodiment in the figure; it includes: a host station A on which is set a first track A1 relatively close to the operator, and relatively A second track A2 that is a remote operator and parallel to the first track A1. Each of the first track A1 and the second track A2 can provide a carrier A3 for positioning or X-axis transport displacement; The first rail A1 is composed of a first fixed rail A11 that does not move at a fixed position; the second rail A2 is composed of a second fixed rail A21 that does not move at a fixed position; A first conversion mechanism A4 and a second conversion mechanism A5 are respectively provided on both sides of the frame A11 and the second fixed rail frame A21. The first conversion mechanism A4 is provided with a first driving member A41 that can be driven for Y-axis displacement. The movable rail frame A42, the second conversion mechanism A5 is provided with a second movable rail frame A52 which can be driven for Y-axis displacement on a driving member A51; please refer to the third and fourth figures, in the first track A1 and the second Above the track A2 is a first gantry A61 and a second gantry A62 spaced apart. The first fixed rail A11 and the second fixed rail A21 correspond to each other and are located exactly between the first gantry A61 and the second gantry A62. Operation area A6 formed; the first cantilever A611 of the first gantry A61 is in the Y axis, and the first work head A612 is arranged on the X axis. The upper surface of the first cantilever A611 and the lower surface of the first work head A612 are provided There is a first sliding seat A613, between the lower surface of the first sliding seat A613 and the upper surface of the first cantilever A611, and between the upper surface of the first sliding seat A613 and the lower surface of the first working head A612, linear transmission parts A614 and A615 are respectively provided. , It can be composed of a linear slide and a linear motor including a mover and a stator, so that the first working head A612 can make X-axis and Y-axis displacement on the upper surface of the first cantilever A611; the second gantry A62 The second cantilever A621 is in the Y-axis direction, and a second working head A622 is provided on it in the X-axis direction. A second sliding seat A623 is provided between the upper surface of the two cantilevers A621 and the lower surface of the second working head A622, between the lower surface of the second sliding seat A623 and the upper surface of the second cantilever A621, and between the upper surface of the second sliding seat A623 and the second working The lower surfaces of the head A622 are respectively provided with linear transmission parts A624 and A625, which can be composed of linear slides and linear motors including movers and stators, so that the second working head A622 can be on the upper surface of the second cantilever A621 X-axis and Y-axis displacement; the first working head A612 is provided with a first operating device A71 toward one end of the operating section A6, which includes: a first detection device A711, a first image capturing device A712, a first A coating head A713, a second operating device A72 is provided in the second working head room A622 toward one end of the operating section A6, including: a second detecting device A721, a second image capturing device A722, and a second coating head A723, Among them, the first detection device A711 and the second detection device A721 can be a laser head that can be used to measure height, the first image capture device A712 and the second image capture device A722 can be a CCD lens, and the first coating head A713 The second coating head A723 can be a viscous material coating device that uses a glue cylinder to supply glue and a glue valve to spit glue; between the first fixed rail A11 and the second fixed rail A21 in the operation section A6, Equipped with a calibration base A8 with calibration scales A81; between the first track A1 and the operator, there is a glue amount measuring device A82, with residual glue removal devices A83 on both sides; a pair of machines B, it is an independent machine stand separated from the main machine station A, on which there is a third fixed rail frame B1, which corresponds to the first track A1 of the main machine station A, and is the carrier of the first track A1 After A3 is conveyed, the flow path can be transported and parked in the carrier A3; there is also a viscous material that can be driven by an X-axis driving member B2 and a Y-axis driving member B3 to the substrate on the carrier A3 The second detection device B4 for detecting the coating status can be a CCD lens with a higher magnification than the first and second image capturing devices A712 and A722; the third fixed rail B1 is transported and discharged as the tray A3 One end is provided with a pushing device B5; a loading mechanism (Load) C is located on the side of the main machine table A, including a first lifting frame C1, and the lifting frame C1 can be driven by the lifting frame C1 to rise or fall in the Y axis Most storage boxes C2, each storage box C2 forms openings C3 on both sides of the X axis, and can be driven up and down to correspond to the first movable rail A42 of the first conversion mechanism A4, and can be accommodated in the storage box C2 by a pushing device C4 that has not been coated with viscous material The cloth carrier A3 is pushed into the first movable rail A42 of the main table A to be transported for coating of viscous material; an unloading mechanism (Unload) D is arranged on the side of the auxiliary table B, including a second Lifting frame D1, and many storage boxes D2 that can be raised or lowered in the Y-axis driven by the lifting frame D1, each storage box D2 forms openings D3 on both sides of the X-axis, and can be driven to correspond to the second conversion mechanism A5 The second movable rail A52; the storage box D2 is used to contain the carrier plate A3 that has been coated with viscous material.

In the embodiment of the present invention, the flow path transferred by the tray A3 is composed of independent flow paths formed by a plurality of independent rails, including a first fixed rail A11, a second fixed rail A21, and a third fixed rail B1, the structure of the first movable rail A42, the second movable rail A52 and other rails are roughly the same. The following describes the structure of the first fixed rail A11. Please refer to the fifth figure, the first fixed rail The frame A11 uses two side rails A111 spaced apart to form the first track A1 through which the tray A3 can be transported. The two side rails A111 are fixed by a fixing part A112 and the frame is higher than the main station A at a height interval. The opposite inner sides of the side rails A111 are each provided with a belt A114 driven by a belt drive A113 composed of a motor, and the carrier A3 is placed above the belt A114 between the two side rails A111 to be transported; the first track A1 A stop mechanism A115 is also provided at one end. The stop pin A117 driven by a stop driving member A116 composed of a cylinder rises to stop the carrier A3 conveyed in the first track A1 from being positioned, or descends to make the loading Disk A3 passes through; however, there is a fixture A9 under the first fixed rail frame A11 and the second fixed rail frame A21, and a fixture seat A91 that can be driven to move up and down. A91 is provided with a plurality of top seats A92 arranged in a matrix, and each top seat A92 is provided with a recessed cross-opening negative pressure channel A93; in addition, there are a plurality of hollow sections A31 in the carrier A3, and each hollow section A31 There are positioning pins A32 at each of the four feet, and a carrier A33 is placed at each of the hollow sections A31, and the four corner edges are exactly embedded in The positioning pins A32 are positioned; when the carrier A3 is transported in the first fixed rail A11, when the jig seat A91 of the jig A9 is driven to move upward, the top When the upper surface of the seat A92 is linked to the upper surface of the top seat A33, the negative pressure is passed through the negative pressure channel A93, so that the slide A33 is adsorbed on the upper surface of the top seat A92 and the top seat A92 is lifted. Hollow out section A31, so that the wafer-carrying substrate placed on the carrier A33 can be processed; and when the jig holder A91 is driven down, the carrier A33 carrying the chip and the substrate is in contact and positioning When loading disk A3 between pins A32, it will be left on disk A3.

Please refer to the sixth figure. The glue residue removal device A83 on both sides of the glue amount measuring device A82 includes a clamp A831 and a container A832. The two clamp bases of the clamp A831 are equipped with flexible parts A834 inside each of the holders A833. The residual viscous material after dispensing glue from the first coating head A713 and the second coating head A723 in the fourth figure is clamped, and the container A832 is used to provide the first coating head A713 and the second coating head A723 to The remaining viscous material is discharged from the container.

Please refer to the seventh figure, the pushing device C4 includes a rail base C42 that can be fixed to the first lifting frame C1 by means of a fixing member C41. The rail base C42 is provided with a sliding rail C43 for the movement of a pushing member C44 thereon. The seat C45 is pivoted, and the movable seat C45 is linked with a belt C46 and driven by a driving member C47 formed by a motor, which can drive the movable seat C45 to link the pushing member C44 to push the carrier A3.

Please refer to the eighth and ninth figures, the moving device B5 is provided with a fixed seat B51, a slide rail B52 is provided on the fixed seat B51, and a movable seat B53 is provided on the slider B521 of the slide rail B52, so that the movable seat B53 and The slider B541 on a rodless pneumatic cylinder B54 is linked to make a push rod B55 bend and pivoted at one end of the movable base B53. An elastic element B551 is arranged between the push rod B55 and the movable base B53. One end of B54 and the slide rail B52 in the same direction is provided with a bearing stopper B56, and a first sensor B571 and a second sensor B572 are provided on the moving path of the moving base B53 forward and backward.

Please refer to the tenth picture, when the carrier A3 is going to be output from the third fixed rail B1 until it is received Place the second sensing part B572 on the side, and make the push rod B55 touch the bearing of the stopper B56, so that the front end of the push rod B55 is tilted down and the elastic element B551 is compressed, so that the bent position is lowered for the carrier plate A3 to pass; Referring to Figure 11, when the carrier A3 passes, there is a distance between the storage box D2 and the third fixed rail B1, so the carrier A3 cannot be completely pushed into the storage box D2 and part of it protrudes outside; At this time, the moving seat B53 of the pushing device B5 is driven to move forward and away from the second sensing part B572. Because the push rod B55 is separated from the bearing of the pressure stop B56, the restoring force of the elastic element B551 will cause the push rod B55 to rise again to be straight at the front end. Move forward corresponding to the tray A3; please refer to Figure 12, the moving base B53 of the pushing device B5 is driven to move forward and the front end of the push rod B55 pushes the tray A3 into the storage box D2, until the moving base B53 touches the first sensing Piece B571.

In the implementation of the embodiment of the present invention, the tray A3 is pushed by the loading mechanism through the pushing device C4 into the first movable rail A42 of the first conversion mechanism A4, and the first movable rail A42 corresponds to the first rail at this time In the case of A1, the first movable rail A42 transports the tray A3 into the first fixed rail A11 in the operation area A6; the next tray A3 is pushed by the loading mechanism through the pushing device C4 and enters the first conversion mechanism When the first movable rail frame A42 of A4 is used, the first movable rail frame A42 will be driven by the drive member A41 to make Y-axis displacement to the corresponding second track A2, and transport the tray A3 to the second fixed track in the operation area A6 On the A21.

The substrate on the tray A3 that has been placed on the first fixed rail A11 of the first track A1 will first be directed by the first working head A612 toward the first operating device A71 and the second working head A622 at one end of the operating section A6. The second operating device A72 at one end of the operating section A6 performs operations, and the operations include the steps of positioning the substrate position, measuring the height of the substrate, and coating the substrate with viscous material, wherein the substrate position positioning step is performed by the first imaging device A712, the second imaging device A722 is performed, the substrate height measurement step is performed by the first detection device A711 and the second detection device A721, and the substrate coating step is performed by the first coating head A713 and the second coating head A723 get on; The method of coating viscous material differs according to the one or two viscous materials to be coated on the substrate, for example: when coating a viscous material: the first operating device A71 and the second work of the first work head A612 The second operating device A72 of the head A622 adopts a three-step method of simultaneously operating the substrate position and positioning on a carrier A3, measuring the height of the substrate, and coating the adhesive material on the substrate. The first operating device A71 is carried out by the carrier A3. On the left side, the second operating device A72 is located in the center of the carrier A3, and the two are synchronously shifted to the right, down or left. The three steps of positioning according to the substrate position, height measurement of the substrate, and coating of viscous materials on the substrate are successively performed. When coating two different viscous materials: the first operating device A71 of the first working head A612 and the second operating device A72 of the second working head A622 are synchronized on the first fixed rail A11 and the upper plate A3 After operating the position of the substrate and measuring the height of the substrate, move it synchronously to the second fixed rail A21 and the upper tray A3 to operate the position of the substrate and the height of the substrate; then the first operating device A71 of the first working head A612 moves to the first A fixed rail frame A11 is operated on the upper carrier plate A3 to apply the adhesive material on the substrate to coat the first adhesive material on the substrate of the carrier plate A3, while the second operating device A72 of the second working head A622 remains in the first 2. Operation of the carrier plate A3 of the fixed rail frame A21 and the step of coating the adhesive material on the substrate to coat the second type of adhesive material on the substrate of the carrier plate A3; after completion, the first operating device A71 of the first working head A612 Then move to the second fixed rail A21 on the carrier plate A3 to apply the first adhesive material on the substrate of the carrier plate A3, and the second operating device A72 of the second working head A622 is moved to the first The operation of the fixed rail A11 on the carrier plate A3 is to coat the second type of viscous material on the substrate of the carrier plate A3 in an interactive coating method.

The carrier plate A3 on the first fixed rail A11 that has completed the step of applying the adhesive material on the substrate will be transported to the second movable rail A52 of the second conversion mechanism A5, and then to the third fixed of the auxiliary machine B The rail frame B1 is inspected by the CCD lens of the second inspection device B4, and after the inspection is completed, it is transported to the storage box D2 of the unloading mechanism (Unload) D for collection, and enters the storage box on the tray A3 At D2, the pushing device B5 performs a pushing step, so that the push rod B55 can drop down for the carrier A3 to pass when the carrier A passes, and the carrier A3 can move upwards to push the carrier A3 after passing. A3 enters the storage box D2 to be positioned; and after the first fixed rail A11 is transported to the third fixed rail B1 of the auxiliary machine B, the second movable rail A52 of the second conversion mechanism A5 will also be driven Displacement to the second fixed rail A21 to receive the carrier A3 conveyed from it, and transport the carrier A3 to the third fixed rail B1 of the auxiliary machine B for detection with the CCD lens of the second detection device B4, and After the detection is completed, it is transported to the storage box D2 of the unloading mechanism (Unload) D for collection.

In the coating device of the embodiment of the present invention, the flow path transferred by the tray A3 includes the first selective flow path according to the transfer order of the tray A3, and the storage box by the loading mechanism (Load) C D2 is composed of Z-axis displacement; used to transport the trays A3 in the storage box D2 that have not been coated with viscous material out of the storage box one by one; the second selective flow path is the first movement of the first conversion mechanism A4 The rail frame A42 is formed by Y-axis displacement; it is used to sequentially switch and distribute the tray A3 to different conveying flow paths one by one; the first fixed flow path is formed by the first fixed rail frame A11; it is used to make the tray A3 in Positioning is used to perform the steps of substrate position positioning, substrate height measurement, and coating of viscous materials on the substrate; the second fixed flow path is formed by the second fixed rail A21; used to position the carrier A3 for the substrate position The steps of positioning, height measurement of the substrate, coating of viscous material on the substrate, etc.; the third selective flow path, formed by the second movable rail A52 of the second conversion mechanism A5 with Y-axis displacement; A3 is switched from different conveying flow paths one by one to the same conveying flow path; the third fixed flow path is composed of the third fixed rail frame B1 of the auxiliary machine B; it is used to complete the carrier plate for coating the viscous material A3 is positioned for detection; the fourth selective flow path is formed by the Z-axis displacement of the storage box D2 of the unloading mechanism (Unload) D; it is used to receive the carrier plate A3 coated with viscous material one by one Storage Box.

In the coating device of the embodiment of the present invention, the first and second cantilevers A611 and A621 are in the Y-axis direction, and the first and second operating devices A71 and A72 are provided on the first and second working heads A612 and A622. The two working heads A612 and A622 are set on the first and second cantilevers A611 and A621. The first and second working heads A612 and A622 can move in the X-axis direction; therefore, the first and second operating devices A71 and A72 can The gantry A61 and A62 respectively execute the X and Y axial displacements, and there is no need to jointly erect a horizontal rail seat above the two gantry as in the prior art; and the first and second working heads A612 and A622 can be used as the X-axis Displacement enables the first and second operating devices A71 and A72 to carry a relatively large weight, so that the first and second coating heads A713 and A723 are firmly supported, and only the first and second tasks can be moved when performing X-axis gluing. The heads A612 and A622 link the first and second coating heads A713 and A723 without moving the carrier A3, so that the carrier A3 does not have to be affected by the movement of the positioning of the substrate; at the same time, because the first and second working heads A612 and A622 are stable Support, one end of the first and second working heads A612, A622 can bear the first and second coating heads A713, A723, the first and second detection devices A711, A721, and the first and second image capturing devices A712, A722 when necessary. The operation steps including positioning the substrate position, measuring the height of the substrate, and coating the adhesive material on the substrate can not only increase the accuracy of the operation of the adhesive material coating, but also help the integrated management and control.

However, the foregoing are only preferred embodiments of the present invention, and should not be used to limit the scope of implementation of the present invention, that is, simple equivalent changes and modifications made in accordance with the scope of the patent application of the present invention and the description of the invention, All are still within the scope of the invention patent.

A: Host console

A1: The first track

A11: The first fixed rail

A2: Second track

A21: Second fixed rail

A3: Disk

A6: Operating range

A61: First Dragon Gate

A611: First cantilever

A612: The first working head

A62: Second Dragon Gate

A621: second cantilever

A622: The second working head

A71: The first operating device

A72: Second operating device

A721: Second detection device

A722: Second imaging device

A723: The second coating head

A82: Measuring device

A83: Residual glue removal device

B: auxiliary machine

B1: The third fixed rail

B2: X-axis drive

B3: Y axis drive

B4: Second detection device

B5: Pushing device

C: Loading device

D: Loading and unloading mechanism

Claims (8)

A coating device includes: a host table on which a first gantry is arranged, one of the first cantilevers of the first gantry is in the Y-axis direction, and a first operating device is arranged on the first cantilever, and the first operation The device includes a first coating head, and the first coating head coats a first type of viscous material on a substrate contained in a carrier in an operating area; the first cantilever is provided with a first cantilever in the X-axis direction A working head, the first operating device is arranged on one end of the first working head, the first working head is arranged on the upper surface of the first cantilever, and the upper surface of the first cantilever is arranged between the upper surface of the first cantilever and the lower surface of the first working head The first sliding seat, the first working head can make X-axis and Y-axis displacement on the upper surface of the first cantilever. Such as the coating device described in item 1 of the scope of patent application, wherein the first operating device is arranged on one end of the first working head facing the operating section. For example, the coating device described in claim 1, wherein the first operating device includes: a first detection device for positioning the substrate position. For example, the coating device described in item 1 of the scope of patent application, wherein the first operating device includes: a second image capturing device for measuring the height of the substrate. For example, the coating device described in item 1 of the scope of patent application, wherein a linear transmission member is respectively provided between the upper surface of the first sliding seat and the lower surface of the first working head, which can be a linear sliding rail and includes a mover and The stator is composed of linear motors. Such as the coating device described in item 1 of the scope of patent application, wherein the first coating head is a viscous material coating device that uses a glue cylinder to supply glue and a glue valve to spit glue. For example, the coating device described in item 1 of the scope of patent application, wherein the operation section is provided with a first track for the tray to be positioned or transported. For example, the coating device described in item 7 of the scope of patent application, wherein the first rail is provided with a jig, the jig is provided with a jig seat that can be driven to move up and down, and the jig seat is provided with a plurality of The top seat, each top seat is provided with a negative pressure channel; in addition, there are many hollow sections in the carrier plate, and each hollow section is respectively provided with a slide.

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