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TWI799866B - Semiconductor process equipment - Google Patents

Semiconductor process equipment Download PDF

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Publication number
TWI799866B
TWI799866B TW110118219A TW110118219A TWI799866B TW I799866 B TWI799866 B TW I799866B TW 110118219 A TW110118219 A TW 110118219A TW 110118219 A TW110118219 A TW 110118219A TW I799866 B TWI799866 B TW I799866B
Authority
TW
Taiwan
Prior art keywords
process equipment
semiconductor process
semiconductor
equipment
Prior art date
Application number
TW110118219A
Other languages
Chinese (zh)
Other versions
TW202230569A (en
Inventor
劉家寬
Original Assignee
巨臣科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 巨臣科技股份有限公司 filed Critical 巨臣科技股份有限公司
Publication of TW202230569A publication Critical patent/TW202230569A/en
Application granted granted Critical
Publication of TWI799866B publication Critical patent/TWI799866B/en

Links

TW110118219A 2021-01-26 2021-05-20 Semiconductor process equipment TWI799866B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202163141919P 2021-01-26 2021-01-26
US63/141,919 2021-01-26

Publications (2)

Publication Number Publication Date
TW202230569A TW202230569A (en) 2022-08-01
TWI799866B true TWI799866B (en) 2023-04-21

Family

ID=83782614

Family Applications (2)

Application Number Title Priority Date Filing Date
TW110118219A TWI799866B (en) 2021-01-26 2021-05-20 Semiconductor process equipment
TW110118224A TW202230570A (en) 2021-01-26 2021-05-20 Recycle system for semiconductor process equipment

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW110118224A TW202230570A (en) 2021-01-26 2021-05-20 Recycle system for semiconductor process equipment

Country Status (1)

Country Link
TW (2) TWI799866B (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201937540A (en) * 2017-09-22 2019-09-16 日商斯庫林集團股份有限公司 Substrate cleaning method and substrate cleaning apparatus
TWM593058U (en) * 2018-05-16 2020-04-01 日商東京威力科創股份有限公司 Development processing apparatus
TW202025360A (en) * 2018-11-02 2020-07-01 日商斯庫林集團股份有限公司 Substrate processing apparatus and substrate processing mehtod

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201937540A (en) * 2017-09-22 2019-09-16 日商斯庫林集團股份有限公司 Substrate cleaning method and substrate cleaning apparatus
TWM593058U (en) * 2018-05-16 2020-04-01 日商東京威力科創股份有限公司 Development processing apparatus
TW202025360A (en) * 2018-11-02 2020-07-01 日商斯庫林集團股份有限公司 Substrate processing apparatus and substrate processing mehtod

Also Published As

Publication number Publication date
TW202230569A (en) 2022-08-01
TW202230570A (en) 2022-08-01

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