TWI799298B - Stretchable container - Google Patents

Abstract

A stretchable container, comprising: at least two first containing plates, at least two second containing plates, and a plurality of stretchable elements, each first containing plate has a first top surface, a first bottom surface, at least one first upper positioning member protruding upward from the first top surface, and at least one first lower positioning member protruding downward from the first bottom surface, the second containing plates are arranged interval with the first containing plates, each second containing plates has a second top surface, a second bottom surface, at least one second upper positioning member protruding upward from the second top surface, and at least one second lower positioning member protrudes downward from the second bottom surface. The stretchable elements can effectively reduce the volume of the stretchable container, and the edge of the substrate can be positioned by the positioning members to avoid storage position error.

Description

retractable carrier

The present invention relates to a carrying device, in particular to a retractable wafer carrying device.

The conventional wafer box mainly uses stacking method to store multiple wafers, but the distance between the stored wafers is fixed. For example, the distance between each carrier plate in the wafer box is about 10mm. Therefore, the wafer box often has a certain volume, which takes up a lot of work space; in addition, each carrier tray has a carrier portion for placing the wafer, and a hollow portion surrounded by the carrier portion for a robot arm to access the crystal. In order to prevent the mechanical arm from storing the wafer, the partial edge of the wafer accidentally falls into the hollow part due to the error of the storage position, causing the wafer to tilt and fail to store. Therefore, the conventional carrying part will try to move towards the hollow The direction of the upper part increases its area, which greatly increases the weight of each carrier tray and even the entire wafer box, which not only increases the production cost, but also is not conducive to the efficiency of wafer box transportation.

In view of this, one of the objectives of the present invention is to provide a retractable carrying device, which has a telescopic function to save the overall volume, and also has a positioning effect when storing items on it, so that the items are not easily displaced and dropped.

To achieve the above purpose, the present invention discloses a telescopic carrying device for carrying a plurality of substrates, which includes at least two first carrying trays, at least two second carrying trays, and a plurality of telescopic components; each of the first carrying trays has A first top surface, a first bottom surface, and at least one first upper positioning member are formed by the first top surface. protruding upwards, and at least one first lower positioning member protruding downwards from the first bottom surface; the second carrier trays are respectively spaced up and down with the first carrier trays, each of the second carrier trays The disc has a second top surface, a second bottom surface, at least one second upper positioning piece protruding upward from the second top surface, and at least one second lower positioning piece protruding downward from the second bottom surface. Out; the telescopic components are set on the first carrier trays and the second carrier trays, so that the distance between each of the first carrier trays and each of the second carrier trays can be increased to form an extended state, or reduced And form a compressed state.

In this way, the telescopic components can make each carrier plate stretch for the robot arm to conveniently access the substrate, or compress to effectively reduce the overall volume of the retractable carrier device, thereby saving working space; in addition, when the substrate Placed on each of the carrier trays, its edges can be positioned by the positioning members, so as to avoid partial edges of the substrate falling due to displacement due to errors in the storage position, causing the substrate to tilt and fail to store.

10: Retractable carrying device

20: The first carrying plate

21: first top surface

22: The first bottom surface

23: The first bearing part

24: The first hollow part

25: The first upper positioning part

26: The first lower positioning piece

27: The first storage hole

30: The second carrying plate

31: second top surface

32: second bottom surface

33: The second carrying part

34: the second hollow part

35: The second upper positioning piece

36: The second lower positioning piece

37: the second accommodation hole 37

40: telescopic components

L: imaginary center line

Fig. 1 is a perspective view of a telescopic carrying device in a preferred embodiment of the present invention; Fig. 2 is a partially enlarged perspective view of a retractable carrying device in a preferred embodiment of the present invention; Fig. 3 is a perspective view of a preferred embodiment of the present invention A perspective view of the first carrier tray of the telescopic carrier; Figure 4 is a perspective view of the second carrier tray of the telescopic carrier in a preferred embodiment of the present invention; Figure 5 is a perspective view of the retractable carrier in a preferred embodiment of the present invention Partial side view. Fig. 6 is a partial perspective view of a retractable carrying device according to another embodiment of the present invention.

The technical contents and characteristics of the present invention will be described in detail below by a preferred embodiment in conjunction with the drawings. As shown in FIG. A base plate (not shown in the figure), which includes at least two first carrier trays 20, at least two second carrier trays 30, and a plurality of telescopic components 40; in this embodiment, the first carrier tray 20, the second carrier tray 30 can each be used to carry a substrate thereon, and the total number of the first carrier tray 20 and the second carrier tray 30 is 25, but it is not limited thereto.

As shown in Figure 2, these first carrier discs 20 are respectively spaced up and down with these second carrier discs 30; As shown in Figure 3, each of these first carrier discs 20 has a first top surface 21, a first A bottom surface 22 and a first carrying portion 23 extend obliquely from the first top surface 21 toward an imaginary centerline L for the substrate to rest on, and a first hollow portion 24 is surrounded by the first carrying portion 23 for A robot arm (not shown) accesses the substrate, a plurality of first upper positioning members 25 protrude upward from the first top surface 21 and surround the first bearing portion 23, a plurality of first lower positioning members 26 are formed by the The first bottom surface 22 protrudes downwards and surrounds the first bearing portion 23 , and a plurality of first accommodating holes 27 simultaneously pass through the first top surface 21 and the first bottom surface 22 and surround the first bearing portion. twenty three. In other possible embodiments, the number of the first upper positioning member 25 and the first lower positioning member 26 can be changed according to requirements, but there must be at least one.

As shown in FIG. 4 , each of the second carrier trays 30 has a second top surface 31 , a second bottom surface 32 , and a second carrier portion 33 extending obliquely from the second top surface 31 toward the imaginary centerline L. For supporting the substrate, a second hollow portion 34 is surrounded by the second carrying portion 33 for a robot arm (not shown) to access the substrate, and a plurality of second upper positioning members 35 are defined by the second top surface 31 protruding upwards and surrounding the second bearing part 33, a plurality of second lower positioning parts 36 protruding downwards from the second bottom surface 32 and surrounding the second bearing part 33, and a plurality of second receiving parts The hole 37 simultaneously passes through the second top surface 31 and the second bottom surface 32 and surrounds the second bearing portion 33 . In other possible embodiments, the number of the second upper positioning member 35 and the second lower positioning member 36 can be changed according to requirements, but there must be at least one.

As shown in Figures 2 to 5, in this embodiment, the positions of each of the first lower positioning members 26 and each of the second upper positioning members 35 do not overlap each other in the vertical direction and the horizontal direction, and each of the first upper positioning members 25 pieces The positions of each of the second lower positioning members 36 do not overlap each other in the vertical direction and the horizontal direction, and each of the first upper positioning members 25, each of the first lower positioning members 26, each of the first accommodating holes 27 and The imaginary centerline L is at a similar distance, and the distances between each of the second upper positioning members 35 , each of the second lower positioning members 36 , and each of the second accommodating holes 37 are equivalent to the imaginary centerline L. However, in other possible embodiments, it is not limited to the above, for example, the distance between the first lower positioning members 26 and the imaginary center line L may be greater than that between the second upper positioning members 35 and the imaginary center line The distance of L, if viewed from the perspective of Figure 5 in this situation, the positions of the first lower positioning members 26 and the second upper positioning members 35 may overlap each other in the horizontal direction, even, as shown in Figure 6 As shown, the second upper positioning members 35 can be provided with a groove for the first lower positioning members 26 to extend into. In this case, the second accommodating hole 37 of the second carrier plate 30 can be omitted. That is to say, the second accommodating hole 37 can be recessed in the second upper positioning member 35 instead, so that the positions of the first lower positioning members 26 and the second upper positioning members 35 are in the vertical direction will overlap each other, the same reason the first lower positioning part 26 can be recessed with a groove for these second upper positioning parts 35, in this case the second accommodating hole 37 of the second carrier plate 30 can also be omitted. Alternatively, the first accommodating hole 27 can also be recessed in the first upper positioning member 25 or the second lower positioning member 36, as long as they can be butted with each other.

The telescopic components 40 are arranged on the first carrier trays 20 and the second carrier trays 30, so that the distance between each of the first carrier trays 20 and each of the second carrier trays 30 can be increased to form an extended state. , or reduced to form a compressed state.

When the first carrier trays 20 and the second carrier trays 30 are in the compressed state, each of the first lower positioning members 26 can extend into the second accommodating holes 37 located below and corresponding in position. An upper positioning member 25 can extend into the second accommodating hole 37 located above and corresponding to the position. In addition, each of the second upper positioning members 35 can extend into the first accommodating hole 27 located above and corresponding to the position. The second lower positioning member 36 can extend into the first accommodating hole 27 located below and corresponding to the position.

On the other hand, as shown in Figure 5, when the first carrier trays 20 and the second carrier trays 30 are in the extended state, the horizontal position of the bottom edge of each of the first lower positioning members 26 is lower than that of each The horizontal position of the top edge of the second upper positioning member 35 , the horizontal position of the top edge of each of the first upper positioning members 25 is higher than the horizontal position of the bottom edge of the second lower positioning member 36 . However, in other possible embodiments, the horizontal position of the bottom edge of each of the first lower positioning members 26 can be aligned with the horizontal position of the top edge of each of the second upper positioning members 35, but each of the first lower positioning members 26 The horizontal position of the bottom edge cannot be higher than the horizontal position of the top edge of each of the second upper positioning members 35. Similarly, the horizontal position of the top edge of each of the first upper positioning members 25 can be aligned with the second lower positioning member. The horizontal position of the bottom edge of 36, but the horizontal position of the top edge of each of the first upper positioning member 25 cannot be lower than the horizontal position of the bottom edge of the second lower positioning member 36, so that the substrate will not be placed on When placed, it penetrates the gap between the upper and lower parts of the positioning parts, causing positioning failure.

With the above-mentioned structure, the telescopic components 40 can make each of the first carrier tray 20 and each of the second carrier tray 30 expand for the robot arm to conveniently access the substrate, or compress to make the retractable carrier device 10 The overall volume is effectively reduced, thereby saving working space; in addition, when the first carrier trays 20 and the second carrier trays 30 are in the extended state, the robotic arm can place the substrate on the first carrier trays 20 or On the second carrier tray 30, at this time, the edge of the substrate can be positioned by the first upper positioning pieces 25, the first lower positioning pieces 26, the second upper positioning pieces 35, and the second lower positioning pieces 36, so as to avoid The error of the storage position causes the partial edge of the substrate to accidentally fall into the first hollow part 24 or the second hollow part 34, causing the substrate to tilt and fail to store. As a result, the first carrier part 23, the second The carrying portion 33 can reduce the area as much as possible during manufacture, that is, the scope of the first hollow portion 24 and the second hollow portion 34 can be enlarged, so that each of the first carrying tray 20, each of the second carrying tray 30, and even The weight of the entire retractable carrying device 10 is greatly reduced, which can not only reduce the production cost, but also facilitate the transportation efficiency of the retractable carrying device 10 .

Based on the design spirit of the present invention, the structure of the retractable carrying device 10 can have other changes. As shown in FIG. It can be a groove for the second upper positioning member 35 or the second lower positioning member 36 to partially extend into, and similarly the second accommodating hole 37 can also be changed similarly; the first accommodating hole 27 and the second accommodating hole 27 The two accommodating holes 37 can be omitted. In this case, the first upper locating member 25, the first lower locating member 26, the second upper locating member 35, or the second lower locating member 36 can be a spring, etc. device, when these carrier trays 20, 30 are in the compressed state, the above-mentioned positioning members 25, 26, 35, 36 can abut against the top surface or bottom surface of each of the carrier trays 20, 30, and when the carrier trays 20 , 30 In the stretched state, the above-mentioned positioning members 25, 26, 35, 36 are no longer compressed and can be used for the abutment positioning of the substrate. All these easily conceivable structural changes should be covered by the patent scope of the present invention.

20: The first carrying plate

21: first top surface

22: The first bottom surface

23: The first bearing part

24: The first hollow part

25: The first upper positioning piece

26: The first lower positioning piece

27: The first storage hole

L: imaginary center line

Claims (7)

A retractable carrying device, used to carry a plurality of substrates, including: At least two first carrier trays, each of the first carrier trays has a first top surface, a first bottom surface, at least one first upper positioning member protruding upward from the first top surface, and at least one first lower The positioning piece protrudes downward from the first bottom surface; At least two second carrier trays are respectively spaced up and down with the first carrier trays, each of the second carrier trays has a second top surface, a second bottom surface, and at least one second upper positioning member is formed from the second top surface. protruding from the upper side, and at least one second lower positioning member protruding downward from the second bottom surface; and A plurality of telescopic components are arranged on the first carrier trays and the second carrier trays, so that the distance between each of the first carrier trays and each of the second carrier trays can be increased to form an extended state, or reduced to form a stretched state. a compressed state. The positionable carrying device as described in claim 1, wherein each of the first carrying trays further has a first receiving hole, and each of the second carrying trays further has a second receiving hole, when the first carrying trays When the tray and the second carrier trays are in the compressed state, each of the first lower positioning members can extend into the second accommodating hole located at the bottom and corresponding to the position, and each of the first upper positioning members can extend into the upper and lower positioning holes. In the second accommodating hole corresponding to the position, in addition, each of the second upper positioning members can extend into the first accommodating hole located above and corresponding in position, and each of the second lower positioning members can extend into the corresponding position located below in the first receiving hole. The positionable carrying device as described in claim 1, wherein the positions of each of the first lower positioning members and each of the second upper positioning members do not overlap each other in the vertical direction, and each of the first upper positioning members and each of the second upper positioning members The positions of the lower positioning parts do not overlap each other in the vertical direction. The positionable carrying device as described in claim 1, wherein when the first carrying trays and the second carrying trays are in the stretched state, the horizontal position of the bottom edge of each of the first lower positioning members is lower than that of each of the The horizontal position of the top edge of the second upper locator. The positionable carrier device as described in claim 1, wherein when the first carrier trays and the second carrier trays are in the stretched state, the horizontal position of the top edge of each of the first upper positioning members is higher than that of the first carrier tray 2. The horizontal position of the bottom edge of the lower positioning piece. The positionable carrying device as described in claim 2, wherein each of the first receiving holes penetrates the first top surface and the first bottom surface at the same time, and each of the second receiving holes passes through the second top surface and the first bottom surface at the same time. second bottom surface. The positionable carrying device as described in claim 2, wherein each of the first accommodating holes is recessed in each of the first upper positioning members or each of the first lower positioning members, and each of the second accommodating holes is recessed in each of the first lower positioning members. Each of the second upper positioning pieces 35 or each of the second lower positioning pieces.

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