TWI798125B - Detachable testing device, holder thereof, and space transformer module thereof - Google Patents

Abstract

The present invention provides a detachable testing device, a holder thereof, and a space transformer module thereof. The holder includes a circuit board, an outer frame assembled to the circuit board, a connection layer disposed on the circuit board, and a space transformer module disposed on the connection layer. The connection layer includes a ceramic substrate and a plurality of elastic conductive arms. The ceramic substrate has an arrangement surface and a soldering surface that is opposite to and electrically coupled to the arrangement surface. The elastic conductive arms are connected to the arrangement surface, and detachably abut against and are electrically coupled to the circuit board. The soldering surface of the ceramic substrate is electrically coupled to a wide-interval connection surface of the space transformer module in a soldering manner.

Description

Detachable test device, its holder and rotating plate module

The invention relates to a testing device, in particular to a detachable testing device, a holding seat and a rotating plate module thereof.

The plurality of conductive probes included in the existing probe card testing device is connected to an adapter board, and then welded to a circuit board through the adapter board, so that the plurality of conductive probes can be electrically coupled connected to the circuit board. However, the manufacturing cost of the adapter board and the circuit board is high, so the soldering method adopted by the existing probe card testing device is not conducive to the subsequent use of the adapter board and the circuit board (such as maintenance and replacement) ).

Therefore, the inventor believes that the above-mentioned defects can be improved, Naite devoted himself to research and combined with the application of scientific principles, and finally proposed an invention with reasonable design and effective improvement of the above-mentioned defects.

The embodiment of the present invention provides a detachable testing device, its holding base and rotating plate module, which can effectively improve the possible defects of the existing probe card testing device.

The embodiment of the present invention discloses a detachable test device, which includes: a holding seat, including: a circuit board; an outer frame, installed on the circuit board and surrounding together to form an accommodating space; a connecting layer, including There is a ceramic substrate and a plurality of conductive elastic arms, and the ceramic substrate has There is a configuration surface and a welding surface on the opposite side, and the welding surface is electrically coupled to the configuration surface, and a plurality of the conductive elastic arms are connected to the configuration surface; wherein the connection layer is arranged on The circuit board is located in the accommodating space, a plurality of the conductive elastic arms are detachably abutted against and electrically coupled to the circuit board; and a turntable module is located in the accommodating space It also includes: a line fan-out structure, including an intermediary board and a fan-out adapter board arranged on the intermediary board, and the intermediary board has a wide-distance connection surface, and the fan-out transfer board The board has a narrow-pitch connection surface electrically coupled to the wide-pitch connection surface; wherein, the wide-pitch connection surface and the narrow-pitch connection surface are respectively located on opposite sides of the line fan-out structure, and the The welding surface of the ceramic substrate is electrically coupled to the wide-pitch connection surface by welding; and a housing is installed on the circuit board and pressed against the circuit fan-out structure, and the narrow-pitch connection and a probe head including a positioning plate set and a plurality of conductive probes installed on the positioning plate set; wherein, the positioning plate set of the probe head is installed on the outer frame, and a plurality of the conductive probes are abutted against and electrically coupled to the narrow-pitch connection surface, and then electrically coupled to the connection layer through the circuit fan-out structure. circuit board.

The embodiment of the present invention also discloses a holding seat of a detachable test device, which includes: a circuit board; an outer frame, which is installed on the circuit board and surrounds together to form an accommodating space; a connecting layer, including a ceramic substrate and a plurality of conductive elastic arms, and the ceramic substrate has a configuration surface and a welding surface on opposite sides, and the welding surface is electrically coupled to the configuration surface, and a plurality of the conductive elastic arms are connected to the The configuration surface; wherein, the connection layer is disposed on the circuit board and located in the accommodating space, and a plurality of the conductive elastic arms are detachably abutted against and electrically coupled to the circuit board; and A transfer board module is located in the accommodation space and includes: a line fan-out structure, including an intermediary board and a fan-out adapter board arranged on the intermediary board, and the intermediary board has a The wide-pitch connection surface, and the fan-out adapter board has a narrow-pitch connection surface electrically coupled to the wide-pitch connection surface; wherein, the wide-pitch connection surface and the narrow-pitch connection surface are respectively located at the fan-out junction the opposite sides of the structure, and the soldering surface of the ceramic substrate is electrically coupled to the wide-distance connection surface by soldering; and a housing installed on the circuit board and pressed against the circuit fan-out structure, and the narrow-distance connection surface is exposed outside the housing.

The embodiment of the present invention also discloses a turntable module for a detachable test device, which includes: a circuit fan-out structure, including: an intermediary board with a wide-distance connecting surface; The interposer board, and the fan-out adapter board has a narrow-distance connection surface electrically coupled to the wide-distance connection surface; wherein, the wide-distance connection surface and the narrow-distance connection surface are respectively located The two opposite sides of the circuit fan-out structure; and a housing, which is used to be installed on a circuit board and pressed against the circuit fan-out structure, and the narrow-distance connection surface is exposed outside the housing.

To sum up, the detachable test device and its holder disclosed in the embodiments of the present invention are electrically coupled to the turntable module through the ceramic substrate of the connection layer and a plurality of the conductive elastic arms. and the circuit board, so that the detachable connection layer between the transfer plate module and the circuit board replaces the existing welding method, so as to realize mutual detachment for subsequent use ( Such as: maintenance replacement or transfer to other components). In addition, by using the combination of the ceramic substrate and the plurality of conductive elastic arms, the connection layer can effectively reduce the influence of the ambient temperature and have better heat dissipation performance.

Furthermore, the turntable module disclosed in the embodiment of the present invention can also clamp the fan-out adapter board by using the intermediate board and the housing, so that the detachable test device After the assembly is completed, the fan-out adapter plate can reduce its horizontal deformation (that is, maintain a better levelness).

In order to further understand the characteristics and technical content of the present invention, please refer to the following detailed description and drawings related to the present invention, but these descriptions and drawings are only used to illustrate the present invention, rather than to make any statement on the scope of protection of the present invention. limit.

100: holding seat

1: circuit board

2: Outer frame

21: frame mouth

3: Connection layer

31: Bottom washer

32: ceramic substrate

321: configuration surface

322: welding surface

33: Conductive spring arm

4: Transfer board module

41: shell

411: The first annular step surface

412: Second annular step surface

42: Line fan-out structure

421:Intermediate board

4211: wide distance connecting surface

4212: Wide distance inner joint surface

4213: The first inner contact point

422: Fan-out adapter board

4221: narrow distance connection surface

4222: Fan-out internal interface

4223: The second internal contact point

423: top washer

424: support layer

4241: ceramic plate

4242: film

4243: perforation

425: welded body

S: storage space

200: probe head

201: Positioning plate group

2011: Partition board

2012: Upper guide

2013: Bottom guide

202: Conductive probe

FIG. 1 is a three-dimensional schematic diagram of a detachable testing device according to Embodiment 1 of the present invention.

FIG. 2 is a schematic cross-sectional view of FIG. 1 along the section line II-II.

FIG. 3 is an exploded schematic view of FIG. 1 .

FIG. 4 is an exploded schematic diagram of the connection layer and the transfer plate module in FIG. 3 .

FIG. 5 is an exploded view from another perspective of the connection layer and the transfer plate module in FIG. 3 .

FIG. 6 is a schematic cross-sectional view of another form of the detachable testing device according to Embodiment 1 of the present invention.

FIG. 7 is a schematic cross-sectional view of a detachable testing device according to Embodiment 2 of the present invention.

FIG. 8 is a schematic cross-sectional view of a detachable testing device according to Embodiment 3 of the present invention.

The following is a description of the implementation of the "detachable test device, its holding seat and rotating plate module" disclosed by the present invention through specific specific examples. Those skilled in the art can understand the present invention from the content disclosed in this specification advantages and effects. The present invention can be implemented or applied through other different specific embodiments, and various modifications and changes can be made to the details in this specification based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only for simple illustration, and are not drawn according to the actual size, which is stated in advance. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the protection scope of the present invention.

It should be understood that although terms such as "first", "second", and "third" may be used herein to describe various elements or signals, these elements or signals should not be limited by these terms. These terms are mainly used to distinguish one element from another element, or one signal from another signal. In addition, the term "or" used in this article may include Any one or combination of more of the associated listed items.

[Example 1]

Please refer to FIG. 1 to FIG. 6 , which are the first embodiment of the present invention. As shown in FIGS. 1 to 3 , the present embodiment discloses a detachable testing device, which includes a holding base 100 and a probe head 200 installed on the holding base 100 . It should be noted that although the holding base 100 is described as collaborating with the probe head 200 in this embodiment, the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the holding seat 100 can be used alone (for example: sold) or used in conjunction with other components according to design requirements. The structure of the holding base 100 and the probe head 200 will be introduced first, and then the connection relationship between them will be described in due course.

As shown in Figures 2 to 5, the holding base 100 includes a circuit board 1, an outer frame 2 mounted on the circuit board 1, a connection layer 3 arranged on the circuit board 1, and a The connecting layer 3 is a turntable module 4 located inside the outer frame 2 . It should be noted that, in other embodiments not shown in the present invention, the transfer plate module 4 can also be used independently (for example: sold) or used in conjunction with other components according to design requirements.

Wherein, the circuit board 1 is electrically coupled to a test instrument (not shown in the figure), and the circuit board 1 and the outer frame 2 jointly surround and form an accommodating space S, which communicates with the outer frame 2 A box mouth 21 .

The connection layer 3 is located in the accommodating space S, and the connection layer 3 includes a bottom gasket 31 arranged on the circuit board 1 in this embodiment, a bottom gasket 31 arranged on the bottom gasket 31 A ceramic substrate 32 and a plurality of conductive elastic arms 33 connected in the ceramic substrate 32 , but the present invention is not limited thereto. For example, in other unillustrated embodiments of the present invention, the bottom gasket 31 can be omitted or replaced by other components according to design requirements.

More specifically, the bottom gasket 31 is annular and has elasticity, and the outer part of the ceramic substrate 32 is disposed on the bottom gasket 31; that is, the bottom gasket 31 is clamped on the bottom gasket 31. Between the ceramic substrate 32 and the circuit board 1 , the ceramic substrate 32 , the circuit board 1 , and the bottom gasket 31 together enclose a sealed space.

Moreover, the ceramic substrate 32 has a configuration surface 321 and a welding surface 322 located on opposite sides (such as: the bottom side and the top side of the ceramic substrate 32 in FIG. 2 ), and the welding surface 322 is electrically connected. coupled to the configuration surface 321 . Wherein, the plurality of conductive elastic arms 33 are elastic and arranged at intervals from each other, and the plurality of conductive elastic arms 33 are connected to the configuration surface 321 .

Further, the plurality of conductive elastic arms 33 are located in the sealed space (that is, the bottom gasket 31 surrounds the outer sides of the plurality of conductive elastic arms 33), and the plurality of conductive elastic arms 33 is detachably against and electrically coupled to the circuit board 1 .

The turntable module 4 is located in the accommodating space S, and includes a housing 41 and a circuit fan-out structure 42 located in the housing 41 . Wherein, the housing 41 is installed on the circuit board 1 and pressed against the circuit fan-out structure 42, and in this embodiment, the housing 41 is installed on the circuit board 1 by screw locking, so as to The ceramic substrate 32 (and the bottom gasket 31 ) are clamped between the housing 41 and the circuit board 1 , but the present invention is not limited thereto.

In this embodiment, the line fan-out structure 42 has an intermediary board 421, a fan-out adapter board 422 arranged on the intermediary board 421, and a top board arranged on the fan-out adapter board 422. Gasket 423, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, at least one of the intermediate plate 421 and the top gasket 423 can be omitted or replaced by other components according to design requirements.

The interposer 421 has a wide-distance connecting surface 4211 and a wide-distance inner connection surface 4212 located on opposite sides (such as: the bottom side and the top side of the intermediary board 421 in FIG. 2 ) and electrically coupled to each other; wherein , the spacing and arrangement between the plurality of first internal contact points 4213 of the wide-distance internal connection surface 4212 are approximately the same as the spacing and arrangement between the multiple contact points (not marked) of the wide-distance connecting surface 4211 cloth. Furthermore, the welding surface 322 of the ceramic substrate 32 is electrically coupled to the wide-distance connecting surface 4211 by welding.

The fan-out adapter plate 422 has a narrow-distance connecting surface 4221 and a fan-out adapter plate 4221 located on opposite sides (such as: the top side and the bottom side of the fan-out adapter plate 422 in FIG. 2 ) and electrically coupled to each other. Inner connection surface 4222; wherein, the spacing and arrangement between the plurality of second inner contacts 4223 of the fan-out inner connection surface 4222 are compared with the plurality of contacts (not marked) on the narrow-pitch connection surface 4221 It is wider and dispersed, and it is roughly equal to the spacing and arrangement of the plurality of first internal contact points 4213 of the wide-distance internal contact surface 4212 .

Furthermore, in this embodiment, the intermediary board 421 and the fan-out adapter board 422 are respectively connected (for example: welded) through a plurality of the first internal contact points 4213 of the wide-distance internal contact surface 4212 A plurality of second internal contact points 4223 on the fan-out internal connection surface 4222 are used to electrically couple the wide-pitch connection surface 4211 and the narrow-pitch connection surface 4221 to each other.

Furthermore, the wide-distance connection surface 4211 and the narrow-distance connection surface 4221 are respectively located on opposite sides of the circuit fan-out structure 42 (such as: the bottom side and the top side of the circuit fan-out structure 42 in FIG. 2 ), and the narrow-distance connection surface 4221 is exposed outside the housing 41 . Wherein, the top washer 423 is ring-shaped and has elasticity, and is arranged on the outer part of the narrow-distance connection surface 4221 (such as: a plurality of the contacts of the narrow-distance connection surface 4221 are held by the top washer 423 surrounding and exposed outside the housing 41); that is to say, the top gasket 423 is clamped between the housing 41 and the fan-out adapter plate 422 (for example: the narrow-distance connecting surface 4221) between.

Accordingly, in this embodiment, the holding base 100 electrically couples the turntable module 4 and the circuit through the ceramic substrate 32 of the connection layer 3 and a plurality of the conductive elastic arms 33 board 1, so that the detachable connecting layer 3 is used to replace the existing welding method between the transfer board module 4 and the circuit board 1, so as to realize mutual detachment for subsequent use ( Such as: maintenance replacement or transfer to other components). In addition, by using the combination of the ceramic substrate 32 and the plurality of conductive elastic arms 33 , the connecting layer 3 can effectively reduce the influence of the ambient temperature and have better heat dissipation performance.

Furthermore, in this embodiment, the turntable module 4 clamps the fan-out adapter plate 422 by using the intermediate plate 421 and the housing 41, so that the detachable test device After the assembly is completed, the fan-out adapter plate 422 can reduce its horizontal deformation (that is, maintain a better levelness).

Furthermore, in this embodiment, the holding seat 100 can also be provided with elastic members (such as: the bottom washer 31 and/or the top washer 423 ) at appropriate positions between multiple members, so that The corresponding components can produce expected deformation due to force balance, so that after the detachable test device is assembled, the horizontal deformation of the fan-out adapter plate 422 can be effectively reduced (that is, maintain a better level), and enable the connection layer 3 to be stably connected to the transfer plate module 4.

The probe head 200 includes a positioning plate set 201 and a plurality of conductive probes 202 installed on the positioning plate set 201, and the multiple conductive probes 202 in this embodiment are vertical probes ( vertical probe), but not limited to this. Wherein, the positioning plate group 201 of the probe head 200 is installed on the outer frame 2 (such as: the positioning plate group 201 is installed on the frame opening 21 of the outer frame 2, and then roughly closes the accommodating space S), a plurality of the conductive probes 202 are abutted and electrically coupled to the narrow-distance connection surface 4221 (the plurality of contacts) of the turntable module 4, and then pass through the The circuit fan-out structure 42 and the connection layer 3 are electrically coupled to the circuit board 1 . It should be noted that the distance between any two of the second inner contacts 4223 of the fan-out adapter plate 422 is greater than the two electrically coupled points (through the narrow-distance connection surface 4221 ). The distance between the conductive probes 202 .

More specifically, the positioning plate group 201 includes a partition plate 2011 mounted on the outer frame 2, an upper guide plate 2012 disposed outside the partition plate 2011, and an upper guide plate 2012 disposed inside the partition plate 2011. The click guide 2013. Wherein, the lower guide plate 2013 is matched with the upper guide plate 2012 and its positions correspond to the rotating plate modules 4 respectively.

Furthermore, the upper guide plate 2012 and the lower guide plate 2013 that match each other are fixed with a plurality of the conductive probes 202 for abutting against and electrically coupled to the transfer plate module 4 . The narrow-distance connection surface 4221, but the present invention is not limited thereto. For example, as shown in FIG. 6 , the transfer board module 4 can be multiplied into multiples, and a plurality of the transfer board modules 4 are also arranged on the joint between the circuit board 1 and the outer frame 2 In the surrounding accommodating space S, the probe head 200 and the connection layer 3 are correspondingly adjusted.

[Example 2]

Please refer to FIG. 7 , which is the second embodiment of the present invention. Since this embodiment is similar to the first embodiment above, the similarities between the two embodiments will not be repeated, and the differences between this embodiment and the first embodiment above are roughly described as follows: In this embodiment, the inner edge of the housing 41 has a first annular step surface 411 and a second annular step surface 412 located inside the first annular step surface 411, and the first ring The shaped stepped surface 411 presses against (the outer portion of) the wide-distance inscribed surface 4212 of the intermediate plate 421 , and the second annular stepped surface 412 presses against the top gasket 423 . In addition, in other embodiments not shown in the present invention, if the top gasket 423 is not used in the line fan-out structure 42, the second annular stepped surface 412 of the housing 41 is pressed against the The fan-out adapter plate 422 (the outer part).

Accordingly, in this embodiment, the turntable module 4 can pass through the first annular step surface 411 and the second annular step surface 412 formed by the casing 41, so that the circuit fan The components in the output structure 42 (such as: the intermediate board 421, the fan-out adapter plate 422, and the top gasket 423) can be precisely positioned on the connection layer 3, thereby ensuring electrical connection with each other .

[Embodiment three]

Please refer to FIG. 8 , which is the third embodiment of the present invention. Since this embodiment is similar to the first embodiment above, the similarities between the two embodiments will not be repeated, and the differences between this embodiment and the first embodiment above are roughly described as follows: In this embodiment, the circuit fan-out structure 42 can further include a support layer 424 sandwiched between the intermediary board 421 and the fan-out adapter board 422, and a support layer 424 connecting the intermediary board 421 and the A plurality of welding bodies 425 of the fan-out adapter plate 422 .

The supporting layer 424 has a thickness between 300 micrometers (μm) and 650 micrometers in this embodiment, and the supporting layer 424 is disposed on the wide-distance internal contact surface 4212 of the intermediary board 421 , and the The fan-out adapter plate 422 is disposed on the support layer 424 with its fan-out inner connection surface 4222 , and the periphery of the fan-out adapter plate 422 is preferably aligned with the periphery of the support layer 424 That is to say, the support layer 424 is sandwiched between the wide-distance internal connection surface 4212 and the fan-out internal connection surface 4222 .

In more detail, the supporting layer 424 in this embodiment includes a ceramic plate 4241 and a film 4242 sandwiched between the ceramic plate 4241 and the wide-distance internal contact surface 4212, and the ceramic The board 4241 is glued and fixed to the wide-distance inner surface 4212 of the intermediate board 421 through the adhesive film 4242 , but the invention is not limited thereto.

Furthermore, the support layer 424 is formed with a plurality of perforations 4243 (for example: any one of the perforations 4243 penetrates the ceramic plate 4241 and the film 4242 ), and the plurality of the wide-distance internal contact surface 4212 The first internal contact points 4213 are respectively located on one side of the multiple through holes 4243 , and the multiple second internal contact points 4223 of the fan-out internal contact surface 4222 are respectively located on the other side of the multiple through holes 4243 side.

Further, a plurality of said welding bodies 425 are respectively filled in a plurality of said through holes 4243 (such as: any one of said welding bodies 425 fills up one of said through holes 4243), so that any one of said through holes 4243 The welding body 425 covers and is electrically connected to the corresponding first internal contact 4213 and corresponding to the second internal contact 4223 .

Accordingly, in this embodiment, the transfer plate module 4 is fixed on the fan-out adapter plate 422 by using the intermediary plate 421 together with the support layer 424 and a plurality of welding bodies 425. efficient Structurally support the fan-out adapter plate 422, thereby reducing the influence of ambient temperature on the fan-out adapter plate 422, and effectively reducing the horizontal deformation of the fan-out adapter plate 422 (that is, The fan-out adapter plate 422 can maintain a better level).

[Technical effects of the embodiments of the present invention]

To sum up, the detachable test device and its holder disclosed in the embodiments of the present invention are electrically coupled to the turntable module through the ceramic substrate of the connection layer and a plurality of the conductive elastic arms. and the circuit board, so that the detachable connection layer between the transfer plate module and the circuit board replaces the existing welding method, so as to realize mutual detachment for subsequent use ( Such as: maintenance replacement or transfer to other components). In addition, by using the combination of the ceramic substrate and the plurality of conductive elastic arms, the connection layer can effectively reduce the influence of the ambient temperature and have better heat dissipation performance.

Furthermore, the turntable module clamps the fan-out adapter board by using the intermediate board and the housing, so that after the assembly of the detachable test device is completed, the fan-out The adapter plate can reduce its horizontal deformation (that is, maintain a better levelness).

Furthermore, the holding seat can also be provided with elastic members (such as: the bottom washer, the top washer) at appropriate positions between a plurality of members, so that the corresponding members can produce the desired force due to force balance. deformation, so that after the assembly of the detachable test device is completed, the horizontal deformation of the fan-out adapter plate can be effectively reduced (that is, to maintain a better levelness), and the connecting layer It can be stably connected to the turntable module.

The content disclosed above is only a preferred feasible embodiment of the present invention, and does not limit the patent scope of the present invention, so all equivalent technical changes made by using the description and drawings of the present invention are included in the patent scope of the present invention Inside.

100: holding seat

1: circuit board

2: Outer frame

21: frame mouth

3: Connection layer

31: Bottom washer

32: ceramic substrate

321: configuration surface

322: welding surface

33: Conductive spring arm

4: Transfer board module

41: Shell

42: Line fan-out structure

421:Intermediate board

4211: wide distance connecting surface

4212: Wide distance inner joint surface

4213: The first inner contact point

422: Fan-out adapter board

4221: narrow distance connection surface

4222: Fan-out internal interface

4223: The second inner contact point

423: top washer

S: storage space

200: probe head

201: Positioning plate group

2011: Partition board

2012: Upper guide

2013: Bottom guide

202: Conductive probe

Claims (10)

A detachable test device, which includes: a holding seat, including: a circuit board; an outer frame, installed on the circuit board and together to form an accommodating space; a connecting layer, including a ceramic substrate and multiple a conductive elastic arm, and the ceramic substrate has a configuration surface and a welding surface on opposite sides, and the welding surface is electrically coupled to the configuration surface, and a plurality of the conductive elastic arms are connected to the configuration surface. surface; wherein, the connecting layer is arranged on the circuit board and located in the accommodating space, and a plurality of the conductive elastic arms are detachably abutted against and electrically coupled to the circuit board; and a turn The board module is located in the accommodating space and includes: a circuit fan-out structure, including an intermediary board and a fan-out adapter board arranged on the intermediary board, and the intermediary board has a wide distance The fan-out adapter board has a narrow-pitch connection surface electrically coupled to the wide-pitch connection surface; wherein, the wide-pitch connection surface and the narrow-pitch connection surface are respectively located on the line opposite sides of the fan-out structure, and the soldering surface of the ceramic substrate is electrically coupled to the wide-distance connecting surface by soldering; and a housing mounted on the circuit board and pressed against the circuit A fan-out structure, and the narrow-distance connection surface is exposed outside the housing; and a probe head, including a positioning plate set and a plurality of conductive probes installed on the positioning plate set; wherein, the The positioning plate group of the probe head is installed on the outer frame, and a plurality of the conductive probes are abutted against and electrically coupled to the narrow-distance connection surface, and then connected to the circuit through the fan-out structure. The connection layer is electrically coupled to the circuit board. The detachable test device according to claim 1, wherein the connection layer includes a bottom gasket clamped between the ceramic substrate and the circuit board, and the bottom gasket is surrounded by a plurality of The outer side of the conductive elastic arm; wherein, the ceramic substrate and the bottom gasket are clamped between the housing and the circuit board. The detachable testing device according to claim 1, wherein the circuit fan-out structure includes a top gasket clamped between the housing and the fan-out adapter plate. The detachable test device according to claim 3, wherein the inner edge of the housing has a first annular step surface and a second annular step surface, and the first annular step surface is pressed against the A wide-distance inscribed surface of the intermediate plate, and the second annular stepped surface is pressed against the top gasket. The detachable test device according to claim 1, wherein the intermediary board has a wide-distance internal connection surface electrically coupled to the wide-distance connection surface, and the fan-out adapter board has an electrical coupling A fan-out internal contact surface connected to the narrow-pitch connection surface, and a plurality of first internal contact points of the wide-distance internal contact surface are respectively connected to a plurality of second internal contact points of the fan-out internal contact surface . The detachable test device as claimed in claim 5, wherein a distance between any two of the second inner contacts is greater than a distance between the two conductive probes electrically coupled thereto. A holding seat for a detachable test device, which includes: a circuit board; an outer frame, which is installed on the circuit board and surrounds together to form an accommodating space; a connecting layer, including a ceramic substrate and a plurality of conductive elastic arms , and the ceramic substrate has a configuration surface and a welding surface on opposite sides, and the welding surface is electrically coupled to the configuration surface, and a plurality of the conductive elastic arms are connected to the configuration surface; wherein, The connection layer is disposed on the circuit board and located in the accommodating space, a plurality of the conductive elastic arms are detachably abutted against and electrically coupled to the circuit board; and a turntable module, Located in the accommodating space and including: a line fan-out structure, including an intermediary board and a fan-out adapter board arranged on the intermediary board, and the intermediary board has a wide-distance connection surface, and The fan-out adapter board has a narrow-pitch connection surface electrically coupled to the wide-pitch connection surface; wherein, the wide-pitch connection surface and the narrow-pitch connection surface are respectively located at the sides of the line fan-out structure On opposite sides, and the soldering surface of the ceramic substrate is electrically coupled to the wide-distance connection surface by soldering; and a housing installed on the circuit board and pressed against the circuit fan-out structure, And the narrow-distance connection surface is exposed outside the housing. The holding seat of the detachable test device according to claim 7, wherein the connection layer includes a bottom gasket clamped between the ceramic substrate and the circuit board, and the ceramic substrate and the circuit board The bottom gasket is clamped between the housing and the circuit board. A turntable module of a detachable test device, comprising: A line fan-out structure, comprising: an intermediate board having a wide-distance connection surface; A narrow-distance connection surface of the wide-distance connection surface; wherein, the wide-distance connection surface and the narrow-distance connection surface are respectively located on opposite sides of the line fan-out structure; and a housing, which is used to install on A circuit board is pressed against the circuit fan-out structure, and the narrow-distance connection surface is exposed outside the housing. The turntable module of the detachable test device according to claim 9, wherein the circuit fan-out structure includes a top gasket clamped between the housing and the fan-out adapter plate; Wherein, the inner edge of the housing has a first annular step surface and a second annular step surface, and the first annular step surface is pressed against a wide-distance internal connection surface of the intermediate plate, and the The second annular stepped surface is pressed against the top washer.

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