TWI797801B - Method for examining gluing quality of overlaying member - Google Patents

Abstract

A method for examining gluing quality of overlaying member includes at least one step as follows, providing a carrying platform to support an examining overlaying member, wherein the overlaying member has a first board, a second board overlaid on the first board, and a gluing area on a periphery of the overlaying member, and the first board is transparent, setting a predetermined threshold depth of the gluing area, photographing a plurality of glue images of the gluing area through the first board, measuring a glue permeating depth of the glue images, and comparing each glue permeating depth with the predetermined threshold depth. If the glue permeating depth is smaller than the predetermined threshold depth, a warning message is alerted.

Description

Inspection method of dispensing quality of laminated parts

The invention relates to a method for detecting the glue dispensing quality of a laminate, in particular to a method for detecting the glue dispensing quality of a laminate (such as a wafer assembly), which can check whether the glue dispensing area of the laminate is not dispensing Whether the condition before glue and the dispensing penetration rate after dispensing meet expectations.

According to, the three-dimensional chip (3D IC) is manufactured by using the three-dimensional stacking technology, and the stacking technology between the chips is very critical. After the two wafers are bonded, it is usually necessary to use a glue dispenser to seal the gap around the two wafers for the next step of the process.

The bonded two wafers can be called a wafer assembly, and the joint of the wafer assembly is located between the two wafers with a small gap. The process of dispensing is usually to place the wafer horizontally, with the part to be glued horizontally outward, and to dispense glue towards the part to be glued on the side of the wafer assembly.

The applicant of this case has proposed related ROC patents for the dispensing method and device of wafer components, for example, ROC Patent Publication No. I558470 "Horizontal Dispensing Device and Method for Automatically Fine-tuning the Dispensing Path", and ROC Patent Bulletin No. I566841, "Detection method of dispensing status and detection mechanism of dispensing status". These prior documents provide methods for dispensing glue horizontally and detecting whether there are glue spots all around the wafer assembly.

However, the glue around the wafer assembly may not all be able to get into the gap between the two wafers well. Glue may only be on the surface of the wafer assembly edge.

Therefore, how to improve the inspection effect of the wafer assembly after dispensing through the improvement of the structural design, and further inspect the dispensing penetration rate of the stacked parts, so as to overcome the above-mentioned defects, has become an important issue to be solved in this technical field. one.

The technical problem to be solved by the present invention is to provide a method for detecting the glue dispensing quality of laminated parts in view of the deficiencies in the prior art, so as to detect whether the glue around the wafer assembly enters the gap between the two wafers well and achieves the desired result. depth of penetration.

In order to solve the above-mentioned technical problems, one of the technical solutions adopted by the present invention is to provide a method for detecting the dispensing quality of laminated parts, which is applied to a laminated part to be inspected, and the laminated part has a transparent The first plate body and a second plate body stacked on the first plate body, there are multiple dispensing areas around the stacked piece, the detection method includes at least the following steps: providing a carrying platform to carry the stacked Colloid imaging step, capture the colloid image of each of the dispensing area through the first plate body; detect the area of the colloid in each of the colloid images and the blank area before the dispensing area is not dispensed, wherein the The ratio of the colloid area to the blank area is defined as a permeability; and the comparison step is to compare whether the error of each of the colloid image and the blank area before the dispensing area exceeds a predetermined error threshold value, and if so, send An exception message.

One of the beneficial effects of the present invention is that the detection method of the dispensing quality of the laminate provided by the present invention can at least check whether the glue in the dispensing area around the laminate penetrates into the interior of the dispensing area. Is the condition as expected.

In order to further understand the features and technical content of the present invention, please refer to the following detailed description and drawings related to the present invention. However, the provided drawings are only for reference and description, and are not intended to limit the present invention.

100: Dispensing and testing machine

10: base

12: Man-machine interface module

121: Display

122: keyboard

123: mouse

124: Recording and control device

20: Bearing platform

31: The first camera lens

32: Second camera lens

33: The third camera lens

40: jet dispensing head

8:S wafer conveyor

9: Composite

90: Dispensing area

901: Groove

91: The first plate body

92: The second board body

G: colloid

R: mechanical arm

D0: predetermined depth threshold

D1: blank depth value

FIG. 1 is a perspective view of a dispensing and inspection machine and a loading wafer assembly of the present invention.

Fig. 2 is a front view of the dispensing and testing machine of the present invention.

FIG. 3 is a top view of the dispensing and testing machine of the present invention.

Fig. 4 is a schematic diagram of the detection process before dispensing of the present invention.

Fig. 5 is a flow chart of the steps of the detection process before dispensing of the present invention.

FIG. 6A is a partially enlarged view of the glue dispensing area (not glue dispensing) of the comparison reference laminate.

FIG. 6B is a partially enlarged view of the dispensing area (undispensed) of an exemplary laminate.

Fig. 7 is a schematic diagram of detecting quality after dispensing of the present invention.

Fig. 8 is a flow chart of the steps of detecting the quality after dispensing of the present invention.

FIG. 9A is a partial enlarged view of the dispensing area (dispensed glue) of the laminate for comparison and reference.

FIG. 9B is a partially enlarged view of the dispensing area (dispensed) of an exemplary laminate.

The following is an illustration of the disclosed embodiments of the present invention through specific specific examples, and those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various modifications and changes can be made to the details in this specification based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only for simple illustration, and are not drawn according to the actual size, which is stated in advance. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the protection scope of the present invention.

It should be understood that although terms such as "first", "second", and "third" may be used herein to describe various elements or signals, these elements or signals should not be limited by these terms. These terms are primarily used to distinguish one element from another, or one signal from another Number. In addition, the term "or" used herein may include any one or a combination of more of the associated listed items depending on the actual situation.

The present invention provides a method for detecting glue dispensing quality of laminated parts, which is applied to laminated parts 9 having glue dispensing areas 90 (or called gaps) (refer to FIG. 1 ). Wherein the situation to be achieved by the laminate 9, not only the glue dispensing area 90 of the laminate 9 really needs to be glued, but also to detect whether the glue point in the glue dispensing area 90 of the laminate 9 is toward the laminate 9 The internal penetration of the seal reaches a certain depth to achieve a certain sealing effect.

The stacked component 9 of this embodiment is a wafer assembly, which has a first board 91 and a second board 92 stacked on the first board 91 . Specifically, the first plate body 91 of the laminated component 9 is a transparent glass carrier, and the second plate body 92 is a semiconductor wafer. In addition, the diameter of the first plate body 91 is slightly larger than the diameter of the second plate body 92 . The surrounding gaps of the bonded laminate 9 need to be glued, including the notch 901 or the flat edge of the wafer. However, the application object of the present invention is not limited thereto. The present invention can also be applied to other workpieces that require side gluing.

As shown in FIGS. 1 to 3 , the present invention provides a dispensing and testing machine 100 to achieve related dispensing and testing procedures. The dispensing and testing machine 100 has a base 10 , a man-machine interface module 12 , a carrying platform 20 , a plurality of camera lenses ( 31 , 32 , 33 ), and a dispensing head 40 . The man-machine interface module 12 includes a display 121 , a keyboard 122 and a mouse 123 , but is not limited thereto. For example, a touch screen is also possible. The man-machine interface module 12 can be set inside the base 10 or outside the dispensing and testing machine 100 . The carrying platform 20 can rotate the laminated part 9 . The first camera lens 31 (or top-view lens) is vertically arranged above the carrying platform 20 to capture top-view image information of the glue dispensing areas 90 . The second camera lens 32 (or side-view lens) is disposed on the side of the laminated component 9 to capture information on the side positions of the dispensing areas 90 . The process of capturing images includes rotating the lamination 9 on the carrying platform 20 one turn and recording in a recording and control device 124 . The third camera lens 33 (or referred to as the upward-looking lens) is vertically arranged on the side of the carrying platform 20 to capture the upward-looking image information of the dispensing areas 90 . Multiple camera lenses (31, 32, 33) A ring-shaped light source is also configured to provide illuminating light, and the illuminating light can preferably be reflected or refracted by the colloid.

The present invention provides a method for detecting the glue dispensing quality of laminated parts, which includes two main processes, the first process, the detection process before dispensing as shown in Figure 4 to Figure 5, and the second process, as shown in Figure 7 As shown in Figure 8, the process of detecting the permeability after dispensing.

The first process shown in Figures 4 to 5, the pre-dispensing detection process, the main purpose is to determine whether all dispensing areas 90 of the first plate body 91 and the second plate body 92 have the same radial direction. distance. In other words, whether the centers of circles of the first plate body 91 and the second plate body 92 are aligned without deviation, or in other words, the degree of deviation is acceptable. Assuming that the centers of circles of the first plate 91 and the second plate 92 are not aligned, an offset will occur. In particular, the circumferential edges of the laminate 9 will produce different distances, where the dispensing area may be too short on one side and too long on the other side. Some places where the dispensing area is too short, the penetration depth of the colloid after dispensing may not meet the sealing requirements.

Please refer to FIG. 5 and FIG. 4 , the pre-dispensing detection process includes multiple steps as follows: First, step S10 "Start", which can be regarded as having completed the following actions. Move the composite part 9 to the carrying platform 20 of the dispensing and testing machine 100 (refer to FIGS. 1 to 3 ). The lamination 9 can be transferred to the carrier platform 20 of the dispensing and inspection machine 100 through a wafer transfer device, such as a robot arm R.

Next, in step S11 , a photographic lens is activated and the carrying platform is rotated for one turn, so as to visually scan the laminated part 9 . Specifically, the carrying platform 20 rotates the laminate 9, and the photographic lens of this embodiment captures the upward-looking image information of the dispensing areas 90 through the third photographic lens 33 (or called an upward-looking lens). The purpose is to obtain the position information of the glue dispensing area 90 of the laminate 9 and the lamination status before dispensing.

In capturing the images of the dispensing areas 90 of the first plate 91 and the second plate 92 , the edge of the laminate 9 is photographed upward by the third camera lens 33 facing upward. The third camera lens 33 The third camera lens 33 captures the colloidal image along a direction perpendicular to the first plate 91 and records the position of the colloidal image. coordinate. For example, the sensor area of the third camera lens 33, or the field of view (FOV), can be 14.1mm (length) × 10.3mm (width), wherein 14.1mm (length) is along the tangential direction of the laminated part 9, Half of the 10.3mm width (5.15mm) falls within the vertical projection range of the laminated part 9, and half is outside, so the area that can be detected by such an image is 14.1mm x 5.15mm. In this embodiment, every rotation of the laminated part 9 at an angle of 3 degrees is used as a dispensing area 90 and an image is taken, and a total of 120 images can be obtained. However, the present invention is not limited thereto, and the angle covered by each image is determined according to the field of view of the camera lens. In addition, the analysis and calculation time of each image is also considered. In principle, each glue dispensing area 90 has the same area to be glued. In addition, the third camera lens 33 is also configured with a ring-shaped light source to provide a light source for taking pictures. The light of the ring light source preferably produces greater refraction or reflection on the colloid, such as light with a shorter wavelength, depending on the difference in the material of the colloid.

Step S12, image analysis, that is to say, analyzing the image through the image recognition mechanism of the computer for the obtained image. To put it further, it is to detect whether the blank depth value at the edge of the stack 9 (that is, the wafer assembly) meets the predetermined depth threshold. More specifically, the step S12 includes at least the following steps of obtaining each image and measuring the blank depth value of each of the dispensing regions 90 . Comparing whether the error value between each blank depth value and the predetermined depth threshold value is within an allowable range; if the error value exceeds the allowable range, displaying a message to be confirmed.

To illustrate step S14, please refer to FIG. 6A and FIG. 6B. FIG. 6A is one of the reference images of the stacked part 9, and the right side of the first plate 91 is the background of the shooting, which is usually blurred and dark. The second board body 92 is slightly smaller than the first board body 91 . Inside the second plate body 92 is a dispensing area 90 , where D0 is a predetermined depth threshold, which is assumed to be 3000 μm±1000 μm (μm, micrometer). Sequentially take a captured image, as shown in FIG. 6B , measure the width of the glue dispensing area 90 , that is, the blank depth D1 , for example, 2900 microns (μm, micrometer). Compare D1 and D0, if the error value of D1-D0 is Exceeding a tolerance range, for example, the tolerance range of error is plus or minus 100 microns, 2900 microns-3000 microns is equal to minus 100 microns, which is within 100 microns of the tolerance range, which means that the dispensing area 90 represented by the image in FIG. 6B is qualified. Assume that the error value of D1-D0 exceeds the allowable range of 100 microns, which means that the dispensing area 90 is unqualified. Then, the unqualified image (such as FIG. 6B ) can be automatically stored through the image recognition mechanism of the computer, and its location information, that is, the coordinates, can be recorded. For example, it is recorded to the recording and control device 124 .

Step S14, whether to automatically detect whether the image is normal. That is to say, for these unqualified images, it is automatically detected that the images are normal, and if so, the process proceeds to the next process, step S140. In this embodiment, it may be connected to the dispensing process, as shown in the lower right corner of FIG. 4 . If not, as shown in step S15, it is to be confirmed whether to re-inspect, that is, to re-inspect unqualified images, and the re-inspection can be performed manually. For re-inspection, as shown in step S17, check the images of abnormal positions. This step can be reviewed one by one manually, and it is to be confirmed how to deal with these unqualified images.

After the re-inspection, proceed to another inquiry step S18, whether to let it go, that is, to confirm that the laminated part 9 can go to the next manufacturing process (step S140). Wherein, after the re-inspection process and completion, as shown in step S16 , an abnormal report is output and an image of the abnormal location is stored, for example, stored in the recording and control device 124 . If re-inspection is not required, as shown in step S19, the wafer assembly (that is, the laminated part 9) is withdrawn.

Please refer to Figure 8 and cooperate with Figure 7, the process of detecting permeability after dispensing includes multiple steps as follows:

Step S20, start, this step is after the laminate 9 (wafer assembly) is dispensed. If the post-dispensing permeability detection process is not started, the laminate 9 (wafer assembly) can be retrieved, for example via the wafer conveyor (EFEM) 8 . For the process of dispensing, please refer to the applicant's ROC Patent Publication No. I558470 "Horizontal dispensing device and method for automatically fine-tuning the dispensing path". In addition, after dispensing, it can be further confirmed whether there is glue in the dispensing area around the laminated part 9. This method can refer to another ROC patent announcement number I566841 of the applicant of the present invention, "Glue Dispensing Status" The detection method and the detection mechanism of the dispensing status". Then, it is the second process of the present invention, the process of detecting the permeability after dispensing.

The first step of detection is, step S21 , the camera lens is activated and the carrying platform ( 20 ) is rotated for a circle, so as to visually scan the laminated part 9 . That is to say, a carrying platform 20 is provided to carry a laminated part 9 to be inspected, and the laminated part 9 has a dispensing area 90 around the laminated part 9 . The colloid imaging step is performed by the photographic lens (the third camera lens 33 ), and a plurality of colloid images of the glue dispensing area 90 are captured through the first plate 91 , as in the above process, for example, 225 images are obtained.

Step S22 , image analysis, specifically, detecting the penetration rate of the colloid penetration depth at the edge of the wafer component (stack 9 ). For example, it includes the following steps, the threshold setting step is to set a predetermined error threshold of the glue dispensing area 90 .

One way to compare is to compare the difference between the before and after dispensing images. Detecting the colloid area in each colloid image and the blank area of the dispensing area before dispensing the colloid, wherein the ratio of the colloid area to the blank area is defined as a permeability. Finally, the comparison step is to compare whether the error between each colloid image and the blank area of the glue dispensing area before dispensing glue exceeds a predetermined error threshold, and if so, send an abnormal message.

For example, referring to FIG. 9A and FIG. 9B , FIG. 9A is a schematic diagram of an idealized colloid penetration in the dispensing area 90 , wherein the colloid G completely penetrates into the dispensing area 90 . FIG. 9B is an example of the possible penetration of the colloid, in which the colloid G is not completely filled, and is slightly biased downward, resulting in a blank space above.

Regarding the method of comparing the difference between the images before and after dispensing, for example, overlay FIG. 9B on the contrasting FIG. 9A , and compare whether the glue in FIG. 9B completely penetrates to the left to the inner edge of the dispensing area 90 . If there is a difference from Figure 9A, the unqualified image (such as Figure 9B) can be automatically stored through the computer's image recognition mechanism, and its location information, that is, the coordinates, can be recorded. For example, it is recorded to the recording and control device 124 .

Another method is to compare the error values for the penetration depths at multiple locations. Measure the colloid step, Discriminating and measuring the colloid penetration depth of each of the colloid images, wherein the colloid penetration depth is the radial distance from the edge of the second plate 92 to the center of the circle along the diameter direction. Finally, the comparison step is to compare whether each colloid penetration depth is less than the predetermined error threshold, and if so, send an abnormal message.

The image is analyzed through the image recognition mechanism of the computer. For example, the colloid penetration depth of multiple positions of the colloid in FIG. 9B can be scanned, and then compared with a predetermined error threshold value, that is, the idealized colloid penetration depth of FIG. 9A . a comparison step. Comparing whether each colloid penetration depth is less than the predetermined error threshold, if so, sending an abnormal message.

When the abnormal message is sent out, the unqualified images are processed first in step S24, whether to automatically detect whether the images are normal? If so, after the detection, no re-inspection is required, and the next process is directly entered, as shown in step S290. If not, enter the inquiry step S25 of whether to manually re-inspect.

Regarding the step S25 of manual re-inspection, if yes, it means manual re-examination of the colloid infiltration images of the abnormal positions, then proceed to step S27 to check the abnormal position images. Step S27, specifically, the computer directly rotates the stacked part 9 to the position of the abnormal colloid infiltration image through the carrying platform 20 according to the coordinate data of the colloid infiltration image at the abnormal position, and obtains the abnormality at the location through the third camera lens 33 Colloid penetration image. Step S271, whether to manually replenish the glue, if yes, means to manually replenish the glue, then enter the step S272 of manually replenishing the glue. If not, it means that the glue is not manually replenished, and it can be regarded as that the inspector thinks that the glue can not be replenished, so it goes to step S29 and asks whether to let it go. In step S29, if yes, it means that the laminated part 9 is released for the next process, as shown in step S290. Step S29, if not, do not release, and return to the initial step S20.

In step S272 of manually replenishing the glue, after the glue is replenished, the penetration condition of the glue point can be detected again. Specifically, the laminated part 9 is rotated to recapture the glue-replenishment image of the dispensing area 90 after the glue-replenishment, and the image after the glue-replenishment is displayed on a display device (such as a man-machine interface module). Display 121) of group 12 for confirmation. Finally, wait for the operator to confirm the completion, or repeat the glue replenishing process.

Regarding the step S25 of manual re-inspection, if no, just go to step S28 and ask whether to automatically replenish the glue? If it is necessary to automatically replenish the glue, then enter the step S281 of automatic glue replenishment. After the glue replenishment is completed, proceed to step S29 and ask whether to release it? If not, without automatic glue replenishment, then directly go to step S29 to ask whether to release?

The process of automatic glue replenishment is illustrated as follows, which may include at least the following steps, rotating the laminated part 90 to the corresponding glue dispensing area 90 to the glue dispensing device 40 . Carry out the step of replenishing glue, and replenish the glue to the abnormal glue dispensing area 90 . After the automatic glue filling, ask "whether to release" the step S29 of the laminated part 9, if yes, it means that the laminated part 9 enters the next process; if not, return to the initial step S20.

In the step S25 of inquiring whether to manually re-inspect, step S26 can be performed at the same time to output an abnormality report and store abnormality location images. Specifically, it can be stored in the recording and control device 124 , including saving the colloid images of the abnormal positions and the post-glue images.

As a supplementary note, the two main processes of the method for detecting the dispensing quality of laminated parts according to the present invention can be completed on the same machine. Or, in order to improve the utilization rate, the first process, the detection process before dispensing (as shown in Figure 4 to Figure 5) can be in a machine, the second process, the detection of permeability after dispensing process (as shown in Figure 7 to Figure 5) Shown in Figure 8) can be in another machine platform. In other words, in addition, the method for detecting the glue dispensing quality of the laminated part of the present invention may also only include the second process "the process of detecting the permeability after dispensing".

[Advantageous Effects of Embodiment]

One of the beneficial effects of the present invention is that the method for detecting the dispensing quality of the laminate provided by the present invention can pass through the process of detecting the permeability after dispensing to check the periphery of the laminate 9 (that is, the wafer assembly). The dispensing area 90. The first process can check whether the glue dispensing area 90 around the laminated part 9 is unsuitable for dispensing due to abnormal lamination. The second process can check whether the glue in the glue dispensing area 90 around the laminate 9 penetrates into the glue dispensing area 90 as expected.

The content disclosed above is only a preferred feasible embodiment of the present invention, and does not therefore limit the scope of the patent application of the present invention. Therefore, all equivalent technical changes made by using the description and drawings of the present invention are included in the application of the present invention. within the scope of the patent.

9: Composite

90: Dispensing area

901: Groove

91: The first plate body

92: The second board body

G: colloid

33: The third camera lens

40: jet dispensing head

124: Recording and control device

D0: predetermined depth threshold

Claims (9)

A method for detecting the glue dispensing quality of laminated parts is applied to a laminated part to be inspected, and the laminated part has a transparent first plate body and a second plate laminated on the first plate body There are a plurality of dispensing areas around the lamination, and the detection method includes at least the following steps: providing a carrying platform to carry the lamination; a glue imaging step, capturing each point through the first plate The colloid image of the glue area; Detect the colloid area in each of the colloid images and the blank area before the dispensing area of the glue, wherein the ratio of the colloid area to the blank area is defined as a permeability; and a comparison step, comparing Whether the error between each colloid image and the blank area of the glue dispensing area before dispensing glue exceeds a predetermined error threshold, if so, send an abnormal message. The method for inspecting the dispensing quality of laminated parts as described in claim 1 further includes a pre-dispensing inspection process, including the following steps: before dispensing, capture the first plate and the second plate The images of the dispensing areas; measuring the blank depth value of each of the dispensing areas; comparing each error value between the blank depth value and the predetermined depth threshold value within an allowable range; and if the If the error value exceeds the allowable range, a confirmation message is displayed. The method for inspecting the dispensing quality of laminated parts according to claim 2, wherein the message to be confirmed includes an option of whether to re-inspect. The detection method of the glue dispensing quality of laminated parts as described in claim item 2, wherein said error The difference is plus or minus 20 microns. The method for detecting the dispensing quality of laminated parts as described in claim 1, wherein the first plate is a transparent glass, and the second plate is a semiconductor wafer, wherein the first plate is The diameter is greater than the diameter of the second plate, wherein the radial distance from the edge of the second plate to the center of the circle along the diameter direction in each glue dispensing area is defined as a glue penetration depth. The method for detecting glue dispensing quality of laminated parts as described in claim 1, wherein the colloid imaging step is through a photographic lens, and the photographic lens is arranged below the first plate and faces the On the edge of the first board, the photographic lens captures the colloidal image along a direction perpendicular to the first board, and records the position coordinates of the colloidal image. The method for detecting glue dispensing quality of laminated parts as described in claim 1, wherein when the abnormal message is sent, it also includes a glue replenishing process, including at least the following steps: rotating the laminated part to the abnormal glue dispensing area to the glue dispensing device; carry out the glue replenishing step, and the glue is added to the abnormal glue dispensing area; rotate the laminate to recapture the image after glue replenishment of the glue dispensing area after the glue has been replenished; The image after glue filling is displayed on a display device for confirmation; and the operator waits for the confirmation to be completed, or repeats the glue filling process. The method for detecting glue dispensing quality of laminated parts according to claim 7 further includes saving the glue images and the image after glue replenishment. The method for detecting glue dispensing quality of laminated parts as claimed in item 1, wherein the colloid imaging step further includes providing illuminating light, and the illuminating light can be reflected or refracted by the colloid.

Images