TWI796655B - Fluid shutoff valve - Google Patents

Abstract

The present invention discloses fluid shutoff valve comprising a valve housing having a fluid passage through which a fluid flows and an accommodation space formed outside the fluid passage, a first shielding module having a first shielding plate which is located at a first standby position of the accommodation space and move to the shielding position to shield the fluid passage, a second shielding module having a second shielding plate which is located at a second standby position of the accommodation space and move to the shielding position to alternately shield the fluid passage with the first shielding module, a first injection module for injecting cleaning gas onto the first shielding plate and a second injection module for injecting cleaning gas onto the second shielding plate.

Description

Fluid Shutoff Valve

The present invention relates to a fluid shutoff valve, which is installed in a process chamber or process piping of a semiconductor production line or a display production line, and temporarily blocks the flow of fluid including exhaust gas and reaction by-products.

A semiconductor production line or a display production line includes process equipment, process piping, and a vacuum pump, and the process equipment and vacuum pump can be connected through process piping. The process device includes a process chamber, and the inside of the process chamber is vacuumed by a vacuum pump. The interior of the above-mentioned process chamber is maintained in a vacuum state, and processes such as evaporation or etching are performed. When maintaining process equipment, maintaining process piping, or maintaining vacuum pumps, the process chamber can be kept in a state of being isolated from large gases through the barrier fluid shut-off valve.

The above-mentioned fluid shutoff valve needs to maintain the shielding force at the time of blocking. In the event of a leak in the fluid shut-off valve described above, it can lead to contamination of the chamber interior and delays in maintenance procedures.

Moreover, during the above-mentioned manufacturing process, it is necessary to repeatedly maintain the process chamber in a vacuum state and an atmospheric pressure state, and frequent maintenance of components connected between the process chamber and the vacuum pump is required. In the above case, the fluid shutoff valve located above the vacuum pump is sealed so that the pressures above and below the fluid shutoff valve can be maintained at atmospheric pressure or in a vacuum state, respectively.

Also, unlike the above case, when replacing and maintaining the vacuum pump, it is necessary to block the fluid shutoff valve and keep the upper part of the fluid shutoff valve in a vacuum state. In this case, the above The fluid shutoff valve needs to repeatedly perform shielding, and especially, when shielding is performed, no leakage can occur. That is, the shielding function of the above-mentioned fluid stop valve is extremely important.

In addition, the above-mentioned fluid stop valve is also used in a process where a large amount of process reaction by-products (process powders) are generated. During the shielding performed by the fluid shutoff valve described above, the shielding is definitely done in such a manner as to prevent leakage from occurring. However, when the above-mentioned fluid cut-off valve is used in a process with many reaction by-products, the reaction by-products may be deposited or fixed on the shield plate blocking the fluid. In this case, the above-mentioned fluid stop valve is not properly shielded and leaks, resulting in a decrease in process efficiency.

An object of the present invention is to provide a fluid shutoff valve capable of maintaining a shielding function by removing reaction by-products accumulated on the upper surface of a shielding plate.

Furthermore, an object of the present invention is to provide a fluid shutoff valve in which the maintenance cycle of the fluid shutoff valve can be extended by configuring at least two shield plates that alternately move to block the flow of fluid.

The fluid cut-off valve of the present invention is characterized in that it includes: a valve housing, including a fluid channel and a housing space, the fluid channel is formed between the upper hole of the housing and the lower hole of the housing, and is used to allow fluid to flow in and flow, and the housing space is formed in The outside of the above-mentioned fluid channel is connected with the above-mentioned fluid channel; the first shielding module includes a first shielding plate, and the above-mentioned first shielding plate is located at the first waiting position of the above-mentioned storage space, and moves to the shielding position of the above-mentioned fluid channel to shield The above-mentioned fluid channel; the second shielding module, including a second shielding plate, the second shielding plate is located at the second waiting position of the above-mentioned accommodation space, and moves to the above-mentioned shielding position to alternately screen with the first shielding module The above-mentioned fluid channel is shielded; the first spraying module is used for spraying cleaning gas to the above-mentioned first shielding plate; and the second spraying module is used for spraying cleaning gas to the above-mentioned second shielding plate.

In addition, the fluid cut-off valve of the present invention is characterized in that it includes: a valve housing including a fluid channel and a housing space, the fluid channel is formed between the upper hole of the housing and the lower hole of the housing for allowing fluid to flow in and flow, the housing space Formed on the outside of the above-mentioned fluid channel and connected to the above-mentioned fluid channel; the first shielding module includes a first shielding plate, the first shielding plate is located at the first waiting position of the above-mentioned accommodation space, and moves to the shielding position of the above-mentioned fluid channel to shield the above-mentioned fluid channel; and the first injection module is used for spraying cleaning gas to the above-mentioned first shielding plate.

In addition, the fluid cut-off valve of the present invention is characterized in that it includes: a valve housing including a fluid channel and a housing space, the fluid channel is formed between the upper hole of the housing and the lower hole of the housing for allowing the fluid gas to flow in and flow, the housing A space is formed on the outside of the above-mentioned fluid channel and connected to the above-mentioned fluid channel; the shielding module includes a shielding plate, the above-mentioned shielding plate is located at the waiting position of the above-mentioned receiving space, and moves to the shielding position of the above-mentioned fluid channel to shield the above-mentioned fluid channel; and The injection module is used for spraying cleaning gas to the above-mentioned shielding plate located at the above-mentioned waiting position.

The fluid stop valve of the present invention can maintain the shielding function of the shielding plate by removing reaction by-products accumulated on the upper surface of the shielding plate.

In addition, the fluid stop valve of the present invention injects or sucks clean gas to or from the upper surface of the shield plate, so that reaction by-products accumulated on the upper surface of the shield plate can be removed without being separated from the vacuum piping or the like.

In addition, the fluid cut-off valve of the present invention includes at least two shielding plates that operate independently of each other. Therefore, when one shields the fluid path, the other can remove reaction by-products on the upper surface of the shielding plate.

In addition, the fluid cut-off valve of the present invention can remove reaction by-products on the upper surface of the shielding plate during the manufacturing process, thereby increasing the process efficiency.

100, 200, 300, 400, 500, 600, 700, 800: fluid stop valve

110, 210, 310, 410, 510, 610, 710: valve cover

110a: Fluid channel

110b: Containment Space

110c: Upper hole of outer cover

110d: Hole at the lower part of the housing

110e, 710e: the first shielding hole

110f: the second shielding hole

110g, 510g: the first injection hole

110h, 510h: the second injection hole

510i: The first jet containment tank

510j: The second jet containment tank

120: The first shielding module

720: shielding module

121: The first pneumatic cylinder

122: The first pneumatic cover

122a: the first piston channel

122b: the first rotation hole

123: The first pneumatic piston

124: The first axis of rotation

125: The first transfer body

126: The first transfer rod

127: The first transfer ring

128: The first shielding plate

129: First O-ring

728: shielding plate

130: The second shielding module

131: Second pneumatic cylinder

132: The second pneumatic cover

132a: the second piston channel

132b: the second rotation hole

133: Second pneumatic piston

134: the second rotation axis

135: The second transfer body

136: the second transfer rod

137: the second transfer ring

138: Second shielding plate

139: Second O-ring

140, 540: The first injection module

740: Injection module

141: The first injection body

141a: the first air supply hole

141b: the first gas guiding groove

141c: the first body steps

142, 542: the first spray plate

742: jet plate

744:Jet support rod

142a, 542a: first gas injection holes

142b: the first combination groove

143: The first air supply pipe

544: First Jet Support Rod

150, 550: the second injection module

151: the second injection body

151a: the second air supply hole

151b: the second gas guide groove

151c: Second body steps

152, 552: the second spray plate

152a, 552a: second gas injection holes

152b: the second combination groove

153: Second air supply pipe

554:Second Jet Support Rod

160: anti-inflow cylinder

160a: Lower fluid channel

161: inflow prevention cover

161a: Prevent piston passage

161b: Prevent channel opening holes

161c: The first prevention channel

161d: Second prevention channel

161e: Barrier gas passage

162: Inflow prevention piston

163: prevent piston body

164: Anti-piston rod

164a: Rod O-ring groove

165: Piston O-ring

166: Inflow barrier unit

167: Inflow barrier ring

167a: barrier gas flow path

168: Inflow blocking flange

170: Lower outflow pipe

170a: Lower outflow channel

200a: Bypass gas channel

200b: Upper bypass channel

200c: lower bypass channel

280: Bypass connecting pipe

290:Bypass channel blocking unit

Fig. 1 is a top view of a fluid stop valve according to an embodiment of the present invention.

Fig. 2a is a vertical cross-sectional view along line A-A of Fig. 1 .

Fig. 2b is an enlarged view of B in Fig. 2a.

FIG. 3 a is an isolated perspective view of the first shielding module in FIG. 1 .

Fig. 3b is a vertical cross-sectional view of the first shielding module in Fig. 3a.

FIG. 4 is a horizontal cross-sectional view of the first pneumatic cylinder of FIG. 1 .

FIG. 5 is a vertical cross-sectional view of the first injection module shown in FIG. 1 .

FIG. 6 is a bottom view of the first injection module shown in FIG. 5 .

Fig. 7 is a vertical sectional view of a fluid stop valve according to another embodiment of the present invention.

8a and 8b are process diagrams showing the operation of the fluid stop valve in the embodiment of FIG. 7 .

Fig. 9a is a vertical sectional view of a fluid stop valve according to another embodiment of the present invention.

Fig. 9b is a vertical cross-sectional view along line C-C of Fig. 9a.

Fig. 10 is a vertical sectional view of a fluid stop valve according to another embodiment of the present invention.

Fig. 11 is a process diagram showing the operation of the fluid shutoff valve of the embodiment shown in Fig. 10 .

Fig. 12 is a top view of a fluid stop valve according to another embodiment of the present invention.

FIG. 13 is a vertical cross-sectional view along line D-D of FIG. 12 .

FIG. 14 is an enlarged view of "E" of FIG. 13 .

Fig. 15 is a horizontal sectional view taken along line F-F of Fig. 14 .

Fig. 16 is a horizontal sectional view taken along line G-G of Fig. 14 .

Fig. 17 is a vertical sectional view of a fluid stop valve according to another embodiment of the present invention.

Fig. 18 is a top view of a fluid stop valve according to another embodiment of the present invention.

Fig. 19 is a vertical sectional view taken along line G-G of Fig. 18 .

Fig. 20 is a vertical cross-sectional view of a state where a shield plate shields a fluid channel in the fluid stop valve of Fig. 18 .

Fig. 21 is a vertical sectional view of a fluid stop valve according to another embodiment of the present invention.

Hereinafter, a fluid stop valve according to a preferred embodiment of the present invention will be described in detail with reference to the drawings.

First, a fluid stop valve according to an embodiment of the present invention will be described.

Fig. 1 is a top view of a fluid stop valve according to an embodiment of the present invention. Fig. 2a is a vertical cross-sectional view along line A-A of Fig. 1 . Fig. 2b is an enlarged view of "B" of Fig. 2a. FIG. 3 a is an isolated perspective view of the first shielding module in FIG. 1 . Fig. 3b is a vertical cross-sectional view of the first shielding module in Fig. 3a. FIG. 4 is a horizontal cross-sectional view of the first pneumatic cylinder of FIG. 1 . FIG. 5 is a vertical cross-sectional view of the first injection module shown in FIG. 1 . FIG. 6 is a bottom view of the first injection module shown in FIG. 5 .

1 to 6, a fluid stop valve 100 according to an embodiment of the present invention may include a valve housing 110, a first shielding module 120, a second shielding module 130, a first injection module 140, and a second injection module 150 And the anti-inflow cylinder 160. Also, the above-mentioned fluid stop valve 100 may further include a lower outflow pipe 170 . On the other hand, the above-mentioned fluid stop valve 100 may only include the first shielding module 120 , the first injection module 140 or the second shielding module 130 and the second injection module 150 .

The fluid cut-off valve 100 may include a fluid channel 110a, and the fluid channel 110a passes through the center of the valve housing 110 from the top to the bottom. The fluid stop valve 100 is combined with the process piping so that the fluid passage 110a communicates with the internal passage of the process piping (not shown). In addition, the above-mentioned fluid stop valve 100 is combined with the process chamber in such a manner that the lower part of the process chamber (not shown) communicates with the inside of the process chamber.

The above-mentioned fluid cut-off valve 100 may include a first shielding module 120 and a second shielding module 130 to alternately shield the fluid channel 110a temporarily. The above-mentioned first shielding module 120 and the second shielding module 130 can alternately shield the fluid channel 110a. In this case, the above-mentioned structure of the first shielding module 120 shielding the fluid channel 110a can repeatedly move between the shielding position a and the first waiting position b to shield the fluid channel 110a. Moreover, the structure of the second shielding module 130 shielding the fluid channel 110a can repeatedly move between the shielding position a and the second waiting position c and shield the fluid channel 110a. Wherein, the above-mentioned shielding position a is the position where the corresponding structures of the first shielding module 120 and the second shielding module 130 move in order to shield the fluid channel 110a, and the first waiting position b and the second waiting position c are the positions of the first shielding module 120 and the second waiting position c. The corresponding structures of 120 and the second shielding module 130 do not respectively shield the waiting positions of the fluid channel 110a. Moreover, the above-mentioned first waiting position b and second waiting position c are the corresponding structures of the first shielding module 120 and the second shielding module 130 respectively sprayed in the first spraying module 140 or the second spraying module 150 Clean the location of the gas purge.

The above valve housing 110 may include: a fluid channel 110a extending up and down inside; and a housing space 110b extending in the circumferential direction on the outer peripheral side of the fluid channel 110a. The valve housing 110 may include a housing upper hole 110c and a housing lower hole 110d respectively opened at the upper and lower parts of the valve housing 110 . In addition, the valve housing 110 may include a first shielding hole 110e, a second shielding hole 110f, a first injection hole 110g, and a second injection hole 110h. The valve housing 110 may be formed by combining an upper housing 111 and a lower housing 112 separated from each other in the horizontal direction. In addition, the valve housing 110 may further include an upper connecting pipe 115 .

The fluid channel 110a may extend up and down inside the valve housing 110, and may be formed in the upper housing upper hole 110c and the lower housing lower hole 110d. The above-mentioned fluid channel 110a provides a path for the particles including exhaust gas and reaction by-products generated in the semiconductor production line to flow from the upper part to the lower part. path. The upper hole 110c of the cover provides a path for the fluid to flow into the fluid channel 110a, and the lower hole 110d of the cover provides a path for the fluid to flow out to the lower portion of the fluid channel 110a. The diameter of the housing lower hole 110d may be larger than the diameter of the housing upper hole 110c. The above-mentioned housing lower hole 110d may provide a space combined with the upper portion of the inflow prevention cylinder 160 .

Moreover, the above-mentioned accommodation space 110 b provides a space for accommodating part or all of the first shielding module 120 and the second shielding module 130 inside the valve housing 110 . The accommodating space 110b has a shape surrounding the outside of the fluid channel 110a, and can be integrated with the fluid channel 110a to communicate with each other.

The above-mentioned first shielding hole 110e can be formed to penetrate from the upper part of one side of the valve housing 110 to the receiving space 110b based on the fluid channel 110a. The above-mentioned first shielding hole 110 e may provide a space combined with a part of the first shielding module 120 .

The above-mentioned second shielding hole 110f is formed through the fluid channel 110a from the upper part of the other side of the valve housing 110 to the receiving space 110b. The above-mentioned second shielding hole 110f may provide a space combined with a part of the second shielding module 130 .

The first injection hole 110g is based on the fluid passage 110a, and can penetrate from the upper part of one side of the valve housing 110 to the accommodation space 110b of the first waiting position b. That is, the first injection hole 110g may penetrate from the upper surface of the upper cover 111 to the lower surface. The first injection hole 110g may be formed at a position corresponding to the first waiting position b in the storage space 110b. The above-mentioned first injection hole 110g can provide a space for combining the first injection module 140 . Therefore, the above-mentioned first injection hole 110g may have a shape corresponding to the shape of the first injection module 140 . For example, when the above-mentioned first injection module 140 is in the shape of a cylinder, the first injection hole 110g may be in the shape of a barrel, and the inner diameter may correspond to the outer diameter of the first injection module 140 . In addition, the above-mentioned first injection hole 110g may form a height difference in the middle according to the shape of the outer surface of the first injection module 140 . The above-mentioned first injection hole 110g can support the first injection module 140 more stably.

The second injection hole 110h can penetrate from the upper part of the other side of the valve housing 110 to the accommodation space 110b of the second waiting position c based on the fluid passage 110a. That is, the second injection hole 110h may penetrate from the upper surface of the upper cover 111 to the lower surface. The second injection hole 110h may be formed at a position corresponding to the second waiting position c in the storage space 110b. The above-mentioned second injection hole 110h can provide a space for combining the second injection module 150 . Same as the first injection hole 110g, the above-mentioned second injection hole 110h may have a shape corresponding to that of the second injection module 150 . Although not specifically shown, the same as the first spray hole 110g, the above-mentioned second spray hole 110h may form a height difference in the middle according to the shape of the outer surface of the second spray module 150 . The second injection hole 110h can support the second injection module 150 more stably.

The above-mentioned upper connecting pipe 115 is coupled to the housing upper hole 110c so as to extend in the upper direction. The upper connecting pipe 115 may be connected to process piping. The above-mentioned upper connecting pipe 115 can provide a path for the inflow to flow into the fluid channel 110a.

On the other hand, although not specifically shown, the valve housing 110 may further include a cleaning gas discharge channel (not shown) for discharging the cleaning gas sprayed from the first spray module 140 or the second spray module 150 . That is, the cleaning gas discharge passage may be formed by a passage penetrating from the housing space 110 b to the outer surface of the valve housing 110 . The above-mentioned cleaning gas discharge channel can be connected to process piping or an additional gas processing device through an additional discharge pipe (not shown). Therefore, the cleaning gas injected from the first injection module 140 or the second injection module 150 is discharged to the outside through the cleaning gas discharge channel without increasing the pressure of the storage space 110b.

The above-mentioned first shielding module 120 may include a first pneumatic cylinder 121 , a first rotating shaft 124 , a first transfer body 125 and a first shielding plate 128 . The above-mentioned first shielding module 120 may be located on the upper part of the valve housing 110 on the side based on the fluid channel 110a. That is, in the above-mentioned first shielding module 120 , the first pneumatic cylinder 121 rotates the first rotating shaft 124 to move the first shielding plate 128 from the first waiting position b to the shielding position a along an arc-shaped path. Wherein, the above-mentioned first waiting position b is when the first The waiting position when the shielding plate 128 does not shield the fluid channel 110a may be a side position inside the receiving space 110b based on the fluid channel 110a. In addition, the shielding position a is a position where the first shielding plate 128 moves to shield the fluid passage 110a, and is a position separated from the lower portion of the upper hole 110c of the housing.

The first pneumatic cylinder 121 includes a first pneumatic housing 122 and a first pneumatic piston 123 . The first pneumatic cylinder 121 linearly moves the first pneumatic piston 123 and rotates the first rotary shaft 124 by the air pressure supplied from the outside. The above-mentioned first pneumatic cylinder 121 may be located on the outside of the valve housing 110 on the side relative to the fluid passage 110a. The above-mentioned first pneumatic cylinder 121 may be located on the outer upper part of the valve housing 110 .

The above-mentioned first pneumatic housing 122 may include a first piston passage 122a and a first rotation hole 122b. The above-mentioned first pneumatic housing 122 may be approximately in the shape of a straight hexahedron block, and the first piston channel 122a is formed along the horizontal direction so that the first rotating hole 122b passes through the first shielding hole 110e of the valve housing 110 and is connected to the valve housing. The upper face of 110 is combined.

The above-mentioned first piston channel 122 may be U-shaped, and may be formed along the horizontal direction inside the first pneumatic housing 122 . Both ends of the above-mentioned first piston channel 122a may open to one side of the first pneumatic housing 122 . Both ends of the first piston passage 122a may be connected to additional pneumatic piping (not shown), and air pressure may be supplied or discharged through the pneumatic piping.

The first rotation hole 122b may be formed as a hole extending from the lower surface of the first pneumatic housing 122 toward the upper direction at a predetermined height. Preferably, the extension height of the above-mentioned first rotation hole 122b may be greater than the height of the first piston channel 122a. The above-mentioned first rotation hole 122b may be connected to the first shielding hole 110e of the valve housing 110 , and may provide a path for inserting the first rotation shaft 124 .

The above-mentioned first pneumatic piston 123 may be formed of a block having a sectional area smaller than the vertical sectional area of the first piston passage 122a and having a predetermined length. The above-mentioned first pneumatic piston 123 can be rotated by the first The shaft 124 is formed to have a length required to rotate from the first waiting position b to the shielding position a. The above-mentioned first pneumatic piston 123 may have teeth formed along the longitudinal direction on the surface facing the first rotation hole 122b.

The above-mentioned first pneumatic piston 123 can move from one side to the other side by air pressure inside the first piston passage 122a. The above-mentioned first pneumatic piston 123 may be formed in one or in two, and may be located in a parallel position forming the first piston passage 122a. In the case where the above-mentioned first air piston 123 is formed as one, it can move in one arrangement of the first piston passage 122a located on one side or the other side of the first rotation hole 122b. In addition, when two first air pistons 123 are formed, they are located on both sides of the first rotation hole 122b and move in opposite directions as shown in FIG. 4 . In the case where two first air pistons 123 are formed, the force for rotating the first rotating shaft 124 increases, so that the first rotating shaft 124 can be easily rotated.

The first rotating shaft 124 may have a cylindrical shape with a predetermined length. In addition, the above-mentioned first rotating shaft 124 may form a tooth portion on the upper peripheral surface facing the first air piston 123 . One side of the first rotating shaft 124 can be connected to the first pneumatic cylinder 121 to rotate, and the other side can extend toward the receiving space 110 b of the valve housing 110 . More specifically, the upper part of the first rotating shaft 124 can be inserted into the first rotating hole 122b and the first shielding hole 110e to rotate, and the lower part can be exposed to the receiving space 110b. A portion of the upper outer peripheral surface of the first rotation shaft 124 may be exposed to the first piston passage 122a through one side and the other side of the first rotation hole 122b. In addition, the tooth portion formed on the exposed outer peripheral surface of the first rotating shaft 124 may mesh with the tooth portion of the first air piston 123 . The above-mentioned first rotating shaft 124 can rotate by a predetermined angle according to the forward and backward movement of the first air piston 123 . That is, the above-mentioned first rotating shaft 124 can convert the linear motion of the first pneumatic piston 123 into a rotary motion.

The first transfer body 125 may include a first transfer rod 126 and a first transfer ring 127. One side of the first transfer body 125 may be combined with the first rotating shaft 124, and the other side may rotate in an arc-shaped trajectory. . The above-mentioned first transfer body 125 can rotate the first rotating shaft 124 to make the first The transfer ring 127 repeatedly moves between the first waiting position b and the shielding position a. The above-mentioned first transfer rod 126 and the first transfer ring 127 may be integrally formed.

The first transfer rod 126 may be in the shape of a rod having a predetermined length, and one side thereof may be connected to the lower portion of the first rotation shaft 124 . In addition, the other side of the first transfer rod 126 may extend along the direction of the first waiting position b.

The above-mentioned first transfer ring 127 may have a ring shape, and may be formed in a ring shape having a predetermined inner diameter. The first transfer ring 127 may have a step formed on the inner peripheral surface from the upper part to the inner part of the lower part. The outer side of the first transfer ring 127 may be combined with the first transfer rod 126 .

The above-mentioned first shielding plate 128 may be in the shape of a circular plate, and its outer diameter may be smaller than the inner diameter of the first transfer ring 127 . The first shielding plate 128 may have a ring-shaped first O-ring groove 128a formed on the upper surface facing outward. The inner diameter of the first O-ring groove 128a may be larger than the inner diameter of the upper hole 110c of the housing. The first O-ring 129 can be inserted and fixed into the first O-ring groove 128a. The first O-ring 129 may protrude more than the upper surface of the first shielding plate 128 . Therefore, when the above-mentioned first shielding plate 128 shields the fluid passage 110a, the first O-ring 129 may contact the lower surface of the valve housing 110 to shield the fluid passage 110a.

The above-mentioned first shielding plate 128 can be inserted into the inner side of the first transfer ring 127 . The above-mentioned first shielding plate 128 may be placed and supported on a step formed on the inner peripheral surface of the first transfer ring 127 . The upper surface of the first shielding plate 128 is joined to the first transfer ring 127 so as to form the same plane as or lower than the upper surface of the first transfer ring 127 . Therefore, the thickness of the first shielding plate 128 may be equal to or smaller than the height from the step of the first transfer ring 127 to the upper surface.

The above-mentioned first shielding plate 128 can move between the first waiting position b and the shielding position a through the first transfer body 125 . After the above-mentioned first shielding plate 128 is moved to the shielding position a, it moves to the upper part of the first transfer ring 127 and contacts with the periphery of the outer cover upper hole 110c of the valve housing 110 to shield the outer shell. Cover the lower part of the upper hole 110c. In addition, the first shielding plate 128 can be separated from the upper hole 110c of the housing to be placed on the upper surface of the first transfer body 125 to open the fluid channel 110a.

The above-mentioned second shielding module 130 may include a second pneumatic cylinder 131 , a second rotating shaft 134 , a second transfer body 135 and a second shielding plate 138 . The structure of the second shielding module 130 may be the same as that of the first shielding module 120 . However, the position where the second shielding module 130 is combined with the valve housing 110 may be on the other side of the side opposite to the first shielding module 120 based on the fluid channel 110 a. Therefore, below, the description will focus on the differences between the second shielding module 130 and the first shielding module 120 .

In the above-mentioned second shielding module 130 , the second pneumatic cylinder 131 can rotate the second rotating shaft 134 to move the second shielding plate 138 from the second waiting position c to the shielding position a. Wherein, the above-mentioned second waiting position c is a waiting position when the second shielding plate 138 does not shield the fluid channel 110a, and may be a position on the other side of the receiving space 110b based on the fluid channel 110a. The second shielding module 130 can rotate the second rotating shaft 134 in the opposite direction to the first rotating shaft 124 , and can rotate the second transfer body 135 and the second shielding plate 138 in the opposite direction.

The above-mentioned second pneumatic cylinder 131 may include a second pneumatic housing 132 and a second pneumatic piston 133 . The above-mentioned second pneumatic cylinder 131 may be located on the outer upper part of the valve housing 110 and on the other side based on the fluid passage 110a.

The above-mentioned second pneumatic housing 132 may include a second piston passage 132a and a second rotation hole 132b. The second piston passage 132 a may be roughly U-shaped, and may be formed along the horizontal direction inside the second pneumatic housing 132 . The above-mentioned second rotating hole 132b may be connected to the second shielding hole 110f of the valve housing 110 , and may provide a path for inserting the second rotating shaft 134 .

The above-mentioned second pneumatic piston 133 may be formed with a length required to rotate the second rotating shaft 134 from the second waiting position c to the shielding position a.

The above-mentioned second rotating shaft 134 forms a tooth portion on the upper peripheral surface facing the second air piston 133 . The upper part of the second rotating shaft 134 is rotatably inserted into the second rotating hole 132b and the second shielding hole 110f, and the lower part is exposed to the storage space 110b. A part of the upper outer peripheral surface of the second rotation shaft 134 may be exposed to the second piston passage 132a through one side and the other side of the second rotation hole 132b. In addition, the teeth formed on the exposed peripheral surface of the second rotating shaft 134 can mesh with the teeth of the second air piston 133 . The second rotating shaft 134 is rotatable by a predetermined angle according to the forward and backward movement of the second air piston 133 . That is, the above-mentioned second rotation shaft 134 can convert the linear motion of the second pneumatic piston 133 into a rotary motion.

The second transfer body 135 can include a second transfer rod 136 and a second transfer ring 137. The second transfer body 135 can make the second transfer ring 137 in the second waiting position c and the shielding position a through the rotation of the second rotating shaft 134. repeatedly move between. One side of the second transfer rod 136 may be combined with a lower portion of the second rotation shaft 134 . Also, the other side of the second transfer rod 136 may extend along the direction of the second waiting position c. The outer side of the second transfer ring 137 may be combined with the second transfer rod 136 .

The above-mentioned second shielding plate 138 may have a ring-shaped second O-ring groove 138a formed on the upper surface facing outward. The second O-ring 139 can be inserted and fixed into the second O-ring groove 138a. Therefore, when the above-mentioned second shielding plate 138 shields the fluid passage 110a, the second O-ring 139 may be in contact with the lower surface of the valve housing 110 to shield the fluid passage 110a. The second shielding plate 138 can be inserted into the inner side of the second transfer ring 137 . The upper surface of the second shielding plate 138 is joined to the second transfer ring 137 so as to form the same plane as the upper surface of the second transfer ring 137 or to have a lower height than the upper surface of the second transfer ring 137 . The above-mentioned second shielding plate 138 can move between the second waiting position c and the shielding position a through the second transfer body 135 .

After the second shielding plate 138 is transferred to the shielding position a, it can move to the upper portion of the second transfer ring 137 to shield the housing upper hole 110 c of the valve housing 110 . Also, the above-mentioned second shielding plate 138 It can be separated from the upper hole 110c of the housing to be placed on the upper surface of the second transfer body 135 to open the fluid channel 110a.

The above-mentioned first injection module 140 may include a first injection body 141 and a first injection plate 142 . Moreover, the above-mentioned first injection module 140 may further include a first air supply pipe 143 .

The above-mentioned first injection module 140 may be combined with the valve housing 110 at the upper part of the first waiting position b. That is, the above-mentioned first injection module 140 may be combined with the first injection hole 110 g of the valve housing 110 . The first injection module 140 can inject cleaning gas to the upper surface of the first shielding plate 128 located in the first waiting position b of the receiving space 110 b to remove the reaction by-product particles attached to the upper surface of the first shielding plate 128 . The above-mentioned first injection module 140 may be connected to a cleaning gas supply device (not shown) for supplying cleaning gas to receive the cleaning gas. On the other hand, the first injection module 140 may be connected to a suction device (not shown) including a vacuum pump to suck fluid including reaction by-product particles to remove reaction by-product particles attached to the upper surface of the shielding plate. Therefore, hereinafter, the meaning that the first injection module 140 injects the cleaning gas may include the meaning that the first injection module 140 sucks the fluid including the reaction by-product particles.

When the fluid channel 110 a is shielded or separated from the receiving space 110 b, the first spray module 140 can spray the cleaning gas to the upper surface of the first shield plate 128 . For example, when the second shielding module 130 shields the fluid channel 110 a, the first spraying module 140 can spray cleaning gas to the first shielding plate 128 . And, when the above-mentioned anti-inflow cylinder 160 separates the fluid channel 110 a and the receiving space 110 b, the first injection module 140 can inject cleaning gas to the first shielding plate 128 .

The first injection body 141 may include a first air supply hole 141a and a first air guide groove 141b. The above-mentioned first injection body 141 may be combined with the first injection hole 110g of the valve housing 110 . The above-mentioned first injection body 141 may have a block shape having a predetermined thickness and diameter or width. The above-mentioned first injection body 141 may have various shapes inserted into and combined with the first injection hole 110g. The above-mentioned first injection body 141 may be in the shape of a cylinder or a polyhedron such as a hexahedron and an octahedron. Also, the above first The ejection body 141 may have a first body step 141c formed at a predetermined height from the lower portion to the upper direction toward the outer peripheral surface or the outer surface.

The above-mentioned first air supply hole 141a may penetrate from the upper surface of the first injection body 141 to the lower surface. Preferably, the above-mentioned first air supply hole 141a is formed at the center based on the plane of the first injection body 141 . The above-mentioned first air supply hole 141 a may be formed with an appropriate diameter so as to supply an amount of cleaning gas required for cleaning the first shielding plate 128 .

The above-mentioned first gas guide groove 141 b may be formed by a groove having a predetermined depth from an upward direction of the first injection body 141 . The first gas guide groove 141b may form a first gas supply hole 141a at the center of the upper bottom surface. That is, the above-mentioned first gas guide groove 141b may be formed toward the outside at the lower end of the first gas supply hole 141a. In addition, the first gas guide groove 141b may have a shape whose depth gradually decreases as it gets closer to the outside of the first injection body 141 . That is, the upper surface of the first gas guide groove 141b may be inclined downward toward the outside from the first gas supply hole 141a. The first gas guide groove 141b can guide the cleaning gas supplied from the first gas supply hole 141a to flow outward.

The above-mentioned first injection plate 142 may include a first gas injection hole 142a. In addition, the above-mentioned first injection plate 142 may further include a first collection groove 142b. The above-mentioned first injection plate 142 may also be combined with the lower surface of the first injection body 141 . The above-mentioned first injection plate 142 may form a cleaning gas passage d through which the cleaning gas flows together with the first gas guide groove 141 b of the first injection body 141 . The above-mentioned cleaning gas passage d may be in a shape whose height gradually decreases from the center to the outside.

The first gas injection holes 142a may penetrate from the upper surface of the first injection plate 142 to the lower surface. A plurality of the above-mentioned first gas injection holes 142a may be formed spaced apart from each other. The first gas injection holes 142a may be radially spaced apart from the center of the first injection plate 142 to the outside. In this case, although not specifically shown, the first injection hole 110g may be formed such that its diameter becomes larger as it is closer to the outside. Also, the above-mentioned first gas injection hole 142a can be connected with the first shield located at the lower part. Positions corresponding to the upper portion of the first O-ring 129 of the plate 128 are formed in a relatively large number. Through the first gas supply hole 141a, the cleaning gas can flow from the cleaning gas passage d to the outside of the first injection plate 142, and can be sprayed more smoothly through the first injection hole 110g located on the outside. Also, the first injection plate 142 may inject more cleaning gas toward the upper portion of the first O-ring 129 . The above-mentioned first O-ring 129 is made of resin, so relatively many reaction by-product particles can be attached. Also, the above-mentioned first O-ring 129 may directly contact the lower surface of the valve housing 110 and shield the fluid passage 110a, and thus may affect the shielding performance. The above-mentioned first injection plate 142 injects a relatively large amount of cleaning gas to the first O-ring 129 and effectively removes reaction by-product particles attached to the first O-ring 129 .

The above-mentioned first collection groove 142b may be formed at a predetermined depth from the upper portion of the first injection plate 142 toward the lower portion. In addition, the above-mentioned first collection groove 142b may be formed in an area and shape corresponding to the lower surface of the first injection body 141 . As the first collecting groove 142b is inserted into the lower part of the first spraying body 141 , the above-mentioned first spraying plate 142 can be stably combined with the first spraying body 141 . In case the first body step 141c is formed at the lower portion of the above-mentioned first injection body 141, the first collection groove 142b can be formed with a depth corresponding to the height of the first body step 141c. Therefore, the above-mentioned first collection groove 142b may be combined with the first body step 141c.

The above-mentioned first gas supply pipe 143 may be combined with the first gas supply hole 141a to supply cleaning gas to the first gas supply hole 141a. Although not specifically shown, the first gas supply pipe 143 may be connected to a solenoid valve and a cleaning gas supply unit. The first gas supply pipe 143 can control the supply of cleaning gas through the solenoid valve and the cleaning gas supply unit.

The above-mentioned second injection module 150 may include a second injection body 151 and a second injection plate 152 . Moreover, the above-mentioned second injection module 150 may further include a second air supply pipe 153 . When the fluid channel 110 a is shielded or separated from the receiving space 110 b, the second spray module 150 can spray the cleaning gas to the upper surface of the second shield plate 138 . For example, when the above-mentioned first shielding module 120 shields the fluid channel 110a , the second spraying module 150 can spray inclined gas toward the second shielding plate 138 . Moreover, when the above-mentioned anti-inflow cylinder 160 separates the fluid channel 110a and the receiving space 110b, the second injection module 150 can inject cleaning gas to the second shielding plate 138 . The structure of the above-mentioned second injection module set 150 may be the same as that of the first injection module set 140 . However, the position where the second injection module 150 is combined with the valve housing 110 may be the other side opposite to the first injection module 140 based on the fluid channel 110 a.

Hereinafter, the description will focus on the difference between the second injection module 150 and the first injection module 140 .

The above-mentioned second injection module 150 may be combined with the valve housing 110 at the upper part of the second waiting position c. That is, the above-mentioned second injection module 150 may be combined with the second injection hole 110 h of the valve housing 110 . The second injection module 150 can inject cleaning gas to the upper surface of the second shielding plate 138 at the second waiting position c to remove the reaction by-product particles attached to the upper surface of the second shielding plate 138 .

The second injection body 151 may include a second air supply hole 151a and a second air guide groove 151b. The above-mentioned second injection body 151 may be combined with the second injection hole 110 h of the valve housing 110 . In addition, the second injection body 151 is formed with a second body step 151c at a predetermined height from the lower portion to the upper direction along the outer peripheral surface or the outer surface.

The above-mentioned second air supply hole 151a may penetrate from the upper surface of the second injection body 151 to the lower surface. The above-mentioned second gas guide groove 151b may be formed with a predetermined depth from the upward direction of the second injection body 151 .

The above-mentioned second injection plate 152 may include a second gas injection hole 152a. In addition, the above-mentioned second ejection plate 152 may further include a second combining groove 152b. The second gas injection holes 152a may pass through from the upper surface to the lower surface of the second injection plate 152 . The above-mentioned second coupling groove 152b may be formed at a predetermined depth in a downward direction from the upper portion of the second injection plate 152 .

The above-mentioned second gas supply pipe 153 may be combined with the second gas supply hole 151a to supply cleaning gas to the second gas supply hole 151a.

The above-mentioned inflow prevention cylinder 160 may include an inflow prevention housing 161 and an inflow prevention piston 162 . Also, the above-mentioned inflow preventing cylinder 160 may further include an inflow blocking unit 166 . The anti-inflow cylinder 160 may include a lower fluid channel 160a penetrating from the upper central part to the lower part.

The above-mentioned inflow prevention cylinder 160 may be combined with the housing lower hole 110 d of the valve housing 110 . The lower fluid channel 160a of the anti-inflow cylinder 160 may be located at the lower part of the fluid channel 110a of the valve housing 110 and communicate with each other. The inflow preventing cylinder 160 may support the lower surface of the first shielding plate 128 or the second shielding plate 138 at the shielding position a to rise and shield the fluid passage 110a. In addition, the inflow prevention cylinder 160 can separate the fluid channel 110a and the receiving space 110b during the manufacturing process. In this case, the above-mentioned first shielding plate 128 and the second shielding plate 138 may be located at the first waiting position b and the second waiting position c, respectively. During the manufacturing process, the inflow prevention cylinder 160 can discharge the fluid flowing in the fluid passage 110a to the process piping through the lower fluid passage 160a, and can prevent the fluid including reaction by-product particles from flowing into the storage space 110b. Therefore, the above-mentioned anti-inflow cylinder 160 can prevent the first shielding module 120, the second shielding module 130, the first injection module 140, and the second injection module 150 housed in the storage space 110b from being polluted by reaction by-product particles. .

The above-mentioned inflow prevention cover 161 may include a prevention piston passage 161a, a prevention passage opening hole 161b, a first prevention passage 161c, and a second prevention passage 161d. In addition, the above-mentioned inflow prevention cover 161 may further include a barrier gas passage 161e.

The above-mentioned inflow prevention cover 161 may have a ring shape as a whole, and a lower fluid passage 160a may be provided inside. The above-mentioned inflow preventing housing 161 may be combined with the central lower portion of the valve housing 110 . The above-mentioned lower fluid channel 160a may be located at the lower part of the fluid channel 110a of the valve housing 110 to communicate with it.

The above-mentioned preventing piston passage 161 a may be formed in a ring shape having a predetermined width or height inside the inflow preventing cover 161 . The above-mentioned prevention piston passage 161 a can be formed at a height greater than the vertical movement distance of the inflow prevention piston 162 .

The above-mentioned prevention passage opening hole 161b may be formed to open with a predetermined width from the upper portion of the prevention piston passage 161a to the upper portion of the inflow prevention housing 161 . The opening hole 161b for the preventing passage may have a shape corresponding to the preventing piston passage 161a as a whole.

On the other hand, the above-mentioned inflow prevention cover 161 may form a piston movement space 161f inwardly from the upper portion of the prevention passage opening hole 161b. The piston moving space 161f described above may provide a space for inflow preventing a part of the piston 162 from ascending or descending. Therefore, the piston movement space 161f may have a shape corresponding to the shape of the inflow preventing piston 162 .

The above-mentioned first prevention passage 161c may be formed to open from the upper portion of the outer peripheral surface of the prevention piston passage 161a to the side surface of the inflow prevention housing 161 . The above-mentioned first prevention passage 161c may provide a path for supplying or discharging air pressure to the upper portion of the prevention piston passage 161a. That is, the above-mentioned first prevention passage 161c can supply air pressure necessary for descending the inflow prevention piston 162 . In addition, the first prevention passage 161c provides a path through which the air pressure supplied to the upper portion of the prevention piston passage 161a is discharged when the inflow prevention piston 162 rises. The above-mentioned first preventing channel 161c may be connected with an external air pressure supply unit and receive air pressure.

The above-mentioned second preventing passage 161d may be opened from the lower part of the outer peripheral surface of the preventing piston passage 161a or the lower part facing the side surface of the inflow preventing housing 161 . The above-mentioned second prevention passage 161d may provide a path for supplying or discharging air pressure to the lower portion of the prevention piston passage 161a. The above-mentioned second prevention passage 161d can supply air pressure necessary for raising the inflow prevention piston 162 . In addition, the second prevention passage 161d provides a passage for discharging the air pressure supplied to the lower portion of the prevention piston passage 161a when the inflow prevention piston 162 descends. The above-mentioned second prevention channel 161d may be connected with an external air pressure supply unit and receive air pressure.

The above-mentioned barrier gas passage 161e can be formed through the lower part of the inflow prevention cover 161 from the outer side to the inner side. The above-mentioned barrier gas channel 161e can prevent the reaction by-product particles from flowing between the inflow prevention outer cover 161 and the inflow prevention piston 162, and can prevent the reaction by-product particles from being evaporated on the inner peripheral surface of the fluid channel 110a or the lower fluid channel 160a or causing corrosion. . More specifically, the above-mentioned inflow preventing housing 161 and the inflow preventing piston 162 may include spaced gaps spaced apart from each other along the direction of the fluid passage 110a. Therefore, the air barrier gas supplied from the barrier gas passage 161e flows in a direction perpendicular to the partition gap to prevent the reaction by-product particles from flowing into the partition gap, and prevent the reaction by-product particles from vapor-depositing on the inner periphery of the valve housing 110. surface or the inner peripheral surface of the anti-inflow cylinder 160 or cause corrosion.

The inflow preventing piston 162 may include a preventing piston body 163 and an preventing piston rod 164 . The above-mentioned inflow prevention piston 162 can be combined with the inflow prevention cover 161 to move up and down, and can shield the accommodation space 110b from the fluid passage 110a. The above-mentioned inflow prevention piston 162 supports the lower surface of the first shielding plate 128 or the second shielding plate 138 in the process of rising to make the first shielding plate 128 or the second shielding plate 138 more firmly connected with the fluid channel 110a of the valve housing 110. The lower faces are in contact.

The preventing piston body 163 may have a ring shape, and may be formed with a width corresponding to that of the preventing piston passage 161a and a height smaller than that of the preventing piston passage 161a. The height of the preventing piston body 163 may be smaller than the height of the preventing piston channel 161 a minus the moving distance of the inflow preventing piston 162 . Therefore, the above-mentioned preventing piston body 163 can move up and down in the preventing piston passage 161a. The above-mentioned prevention piston body 163 can move up and down inside the prevention piston passage 161a by the air pressure supplied through the first prevention passage 161c and the second prevention passage 161d.

The above-mentioned anti-piston rod 164 can be in the shape of a ring, and can be formed by extending upward from the anti-piston body 163 . The anti-piston rod 164 can be formed at an appropriate height by reflecting the height from the anti-piston main body 163 to the lower surface of the housing upper hole 110 c of the valve housing 110 and the movement distance of the inflow prevention piston 162 . The above-mentioned anti-piston rod 164 can move from the bottom to the top together with the anti-piston body 163 to shield the fluid channel 110a from the fluid channel 110a. The above-mentioned anti-piston rod 164 can support the lower surface of the first shielding plate 128 or the second shielding plate 138 so that the lower surface of the first shielding plate 128 or the second shielding plate 138 is in contact with the lower surface of the fluid inflow channel of the valve housing 110 in the process of rising. touch.

The above-mentioned anti-piston rod 164 may be in the shape of a ring having a curved area or a height difference area, and the thickness of each area is different. The anti-piston rod 164 may have a ring shape with the same thickness. The anti-piston rod 164 may be formed in various shapes according to the shapes of the inflow prevention cover 161, the piston prevention passage 161a, and the passage prevention opening hole 161b.

On the upper surface of the above-mentioned anti-piston rod 164, a rod O-ring groove 164a may be formed along the circumferential direction. The above-mentioned rod O-ring groove 164 a may be combined with the piston O-ring 165 . The piston O-ring 165 may be in contact with the inner upper surface of the valve housing 110 to increase the shielding force against the piston rod 164 . Moreover, the piston O-ring 165 can be in contact with the first shielding plate 128 or the second shielding plate 138 to increase the shielding force against the piston rod 164 .

The inflow blocking unit 166 may include an inflow blocking ring 167 and an inflow blocking flange 168 . The above-mentioned inflow blocking unit 166 can be located inside the anti-inflow cylinder 160 to prevent the reaction by-product particles from flowing into the anti-inflow cylinder 160, and can prevent the reaction by-product particles from vaporizing on the inner peripheral surface of the fluid channel 110a or the lower fluid channel 160a or causing corrosion.

The inflow blocking ring 167 may be in the shape of a ring, and its height may correspond to the height of the inflow prevention housing 161 and the inflow prevention piston 162 . The inflow blocking ring 167 may be located inside the inflow preventing housing 161 and the inflow preventing piston 162 . The outer diameter of the inflow blocking ring 167 is such that the outer peripheral surface is separated from the inner peripheral surfaces of the inflow preventing housing 161 and the inflow preventing piston 162 by a predetermined interval. Therefore, the inflow blocking ring 167 can form a barrier gas flow path 167a through which gas flows between the outer peripheral surface and the inner peripheral surfaces of the inflow prevention housing 161 and the inflow prevention piston 162 .

The barrier gas channel 167a may be formed in a ring shape along the outer peripheral surface of the inflow barrier ring 167, and may be connected to the barrier gas channel 161e at the lower portion. The above-mentioned barrier gas flow path 167a enables The barrier gas supplied from the barrier gas passage 161 e flows between the upper portion of the inflow preventing piston 162 and the upper portion of the inflow blocking ring 167 . The barrier gas prevents the reaction by-product particles flowing through the fluid passage 110 a from flowing between the upper portion of the inflow preventing piston 162 and the upper portion of the inflow blocking ring 167 . Moreover, the above-mentioned barrier gas can prevent the reaction by-product particles from flowing into between the inflow prevention outer cover 161 and the inflow prevention piston 162, and can prevent the reaction by-product particles from being deposited on the inner peripheral surface of the fluid channel 110a or the lower fluid channel 160a corrosion.

In addition, the inner diameter of the above-mentioned inflow blocking ring 167 may be larger than the inner diameter of the upper hole 110c of the housing. Therefore, the inner peripheral surface of the above-mentioned inflow blocking ring 167 does not protrude more inwardly than the housing upper hole 110c, providing the fluid passage 110a without being affected by the fluid flow.

The above-mentioned inflow blocking flange 168 may be formed of a ring-shaped flange, and may be joined to the inflow blocking ring 167 so as to extend from the lower end toward the outer peripheral surface. The above-mentioned inflow blocking flange 168 may be combined with the lower portion of the blocking gas passage 161e at the lower portion of the inflow preventing cover 161 . The inflow blocking flange 168 blocks the lower end of the barrier gas flow path 167a so that the barrier gas in the barrier gas flow path 167a flows upward.

The inside of the lower outflow pipe 170 may be hollow, and may be in the shape of a pipe that is open up and down. The above-mentioned lower outflow pipe 170 may be combined with the lower portion of the inflow prevention cylinder 160 . The lower outflow pipe 170 may be connected to process piping. Therefore, the above-mentioned lower outflow pipe 170 connects the fluid passage 110a to the process piping. On the other hand, the above-mentioned lower outflow pipe 170 may be integrally formed with the inflow prevention cover 161 of the inflow prevention cylinder 160 .

Next, a fluid stop valve according to another embodiment of the present invention will be described.

Fig. 7 is a vertical cross-sectional view of a reverse pressure cut-off valve according to another embodiment of the present invention.

Referring to FIG. 7 , compared with the fluid shutoff valve 100 of FIGS. 1 to 6 , a fluid shutoff valve 200 according to another embodiment of the present invention may form a bypass gas passage 200 a for fluid flow. That is, the above-mentioned fluid shut-off valve 200 may include the first shielding module 120 and the second shielding module of the fluid shut-off valve 100 shown in FIGS. 1 to 6 . Group 130, first injection module set 140 and second injection module set 150, and bypass gas channel 200a. Therefore, the fluid stop valve 200 may further include a bypass connection pipe 280 and a bypass channel blocking unit 290 forming the bypass gas channel 200a.

Hereinafter, the description will focus on the difference in structure between the fluid shutoff valve 200 according to another embodiment of the present invention and the fluid shutoff valve 100 shown in FIGS. 1 to 6 .

The bypass gas channel 200 a may pass through the valve housing 210 and be formed by the bypass connection pipe 280 and the lower outflow pipe 170 . The valve housing 210 may include an upper bypass passage 200b and a lower bypass passage 200c forming a part of the bypass gas passage 200a.

The bypass gas passage 200a provides a bypass path for exhaust gas to flow from the vacuum chamber to the vacuum pump when the vacuum pump operates while the fluid passage 110a is shielded by the first shielding plate 128 or the second shielding plate 138 . The above-mentioned bypass gas channel 200a can provide a path for flowing to the lower part of the fluid channel 110a by bypassing the first shielding plate 128 or the second shielding plate 138 at the upper part of the fluid channel 110a. That is, the above-mentioned bypass gas channel 200a can be connected with the fluid channel 110a at the upper part of the shielding position a, penetrate the receiving space 110b to be connected with the fluid channel 110a at the lower part of the shielding position a, and be connected in parallel with the fluid channel 110a to provide fluid flow. channel. The bypass gas channel 200a may be opened while being slowly sucked by a vacuum pump at the beginning of the manufacturing process or during the set-up process of the process chamber. Therefore, the above-mentioned bypass gas passage 200a can flow a gas that does not include reaction by-product particles. For example, the above-mentioned bypass gas channel 200a can flow only cleaning gas or process gas.

In addition, the bypass gas passage 200a may be connected to the storage space 110b. In this case, the above-mentioned fluid cut-off valve 200 is used to discharge the cleaning gas injected by the first injection module 140 or the second injection module 150 to the outside of the storage space 110b through the bypass gas passage 200a and then to the process piping. path, therefore, there is no need to provide an additional discharge channel as mentioned in the embodiment of FIG. 1 . On the other hand, the above-mentioned bypass gas channel 200a is located in the housing space of the valve housing 210. In the room 110b, there may be a passage blocked from the storage space 110b by an additional connecting pipe (not shown). That is, the upper end of the connecting pipe may be connected between the upper bypass passage 200b located above the storage space 110b and the lower bypass passage 200c located below the storage space 110b.

The above-mentioned upper bypass channel 200b can extend from the inner peripheral surface of the upper hole 110c of the outer cover to the inside of the valve outer cover 210, and can penetrate into the receiving space 110b. The above-mentioned upper bypass passage 200b may have a right-angled shape extending in the lower direction after extending in the horizontal direction. Also, the above-mentioned upper bypass passage 200b may have a curved shape extending in the horizontal direction and extending in the lower direction again.

The lower bypass passage 200c may be formed by penetrating downward from the housing space 110b of the valve housing 210 . The above-mentioned lower bypass channel 200c may be located at a lower portion of the upper bypass channel 200b.

One end of the bypass connecting pipe 280 may be connected to the lower bypass passage 200c, and the other end may be connected to the lower outflow passage 170a of the lower outflow pipe 170. The above-mentioned lower outflow channel 170a may be formed through the outer peripheral surface of the lower outflow pipe 170 and the inner peripheral surface. Therefore, the bypass connecting pipe 280 can connect the lower bypass passage 200c of the valve housing 210 and the lower outflow passage 170a of the lower outflow pipe 170 to form the bypass gas passage 200a. On the other hand, the above-mentioned bypass connecting pipe 280 may pass through the lower outflow pipe 170 to directly extend to the lower part of the fluid channel 110a. In addition, the bypass connection pipe 280 may pass through the inflow prevention cylinder 160 and extend toward the fluid passage 110a.

The above-mentioned bypass channel blocking unit 290 may be a unit for opening and closing the bypass gas channel 200a. For example, the above-mentioned bypass channel blocking unit 290 may be in the shape of a plate or a block, and may be disposed in the upper bypass channel 200b. The bypass channel blocking unit 290 can move up and down inside the upper bypass channel 200b and block the upper bypass channel 200b. Although not specifically shown, the bypass channel blocking unit 290 can be moved up and down by a pneumatic cylinder (not shown). Also, the above-mentioned bypass channel blocking unit 290 may include blades, which can block the upper bypass channel 200b by rotating. In this case, the above The passage blocking unit 290 can be rotated by an electric motor (not shown) and blocks the upper bypass passage 200b.

Next, the operation of the fluid stop valve according to another embodiment of the present invention will be described.

8a and 8b are process diagrams showing the operation of the fluid stop valve of the embodiment shown in FIG. 7 .

Next, the operation of the fluid shutoff valve 200 of the embodiment shown in FIG. 7 will be described. As described above, compared with the fluid shutoff valve 100 of FIGS. 1 to 6 , the fluid shutoff valve 200 described above is different in including the bypass gas passage 200 a. Therefore, during the operation of the above-mentioned fluid shutoff valve 200 , the actions other than those in which the bypass gas channel 200 a participates can be similarly applied to the fluid shutoff valve 100 of FIGS. 1 to 6 .

First, as shown in part (a) of Figure 8a, the above-mentioned first shielding module 120 operates the first pneumatic cylinder 121 to rotate the first transfer body 125 and position the first shielding plate 128 in the upper hole 110c of the outer cover. Lower shield position a. In this case, the first pneumatic cylinder 121 is operated by air pressure supplied from the outside. The inflow prevention cylinder 160 raises the first shielding plate 128 together with the inflow prevention piston 162 by the air pressure supplied from the outside. The first shielding plate 128 rises from the first transfer body 125 to come into contact with the bottom surface of the valve housing 210 and shield the fluid channel 110a. In this case, the bypass passage blocking unit 290 maintains a state of shielding the upper bypass passage 200b.

On the other hand, the second injection module 150 may inject cleaning gas to the upper surface of the second shielding plate 138 through the second gas injection holes 152a. The cleaning gas can be removed by cleaning a plurality of particles including reaction by-product particles present on the upper surface of the second shielding plate 138 . The fluid channel 110a is shielded by the first shielding plate 128, so the cleaning gas will not flow into the process chamber through the fluid channel 110a. Moreover, the cleaning gas does not affect the vacuum of the process chamber. The cleaning gas can flow into the lower side of the fluid channel 110a through the bypass gas channel 200a and be discharged to the process piping. On the other hand, in the case where the above-mentioned bypass gas passage 200a is not formed, the cleaning gas may be discharged to the outside by forming an additional cleaning gas discharge passage. The above-mentioned second injection mold The group 150 may interrupt the spraying of the cleaning gas after cleaning the upper surface of the second shield plate 138 by spraying the cleaning gas for an appropriate time.

Next, as shown in part (b) of FIG. 8a , the bypass channel blocking unit 290 may open the upper bypass channel 200b. In this case, the above-mentioned vacuum pump is activated, and the vacuum degree of the process chamber will increase. More specifically, before the start-up of the above-mentioned process chamber, the process chamber and the process piping located on the upper part or front side of the first shielding plate 128 are slowly exhausted, and after a predetermined time, the process chamber located at the lower part of the first shielding plate 128 is exhausted. (or the back side) process piping and vacuum pumps to create a vacuum equal pressure.

Next, as shown in part (c) of Figure 8a, the above-mentioned first shielding module 120 operates the first pneumatic cylinder 121 to rotate the first transfer body 125, so that the first shielding plate 128 moves toward the first shielding plate 128 in the storage space 110b. - waits for position b to move. In this case, the above-mentioned inflow prevention cylinder 160 lowers the first shielding plate 128 together with the inflow prevention piston 162 to place the first shielding plate 128 on the first transfer body 125 . The above-mentioned fluid channel 110a allows fluid to flow from the upper part to the lower part. In this case, the bypass channel blocking unit 290 blocks the upper bypass channel 200b to prevent fluid from flowing into the bypass gas channel 200a.

After the first shielding plate 128 is moved to the first waiting position b, the inflow prevention cylinder 160 raises the inflow prevention piston 162 to bring the piston O-ring 165 into contact with the periphery of the housing upper hole 110c. Therefore, the inflow prevention piston 162 shields the storage space 110b from the fluid passage 110a, and prevents the reaction by-product particles of the fluid from flowing into the storage space 110b. Then, the barrier gas flowing into the barrier gas channel 167a through the barrier gas channel 161e flows upward and is discharged to the fluid channel 110a. Therefore, the barrier gas can prevent the reaction by-product particles from flowing between the inflow prevention cover 161 and the inflow prevention piston 162 .

On the other hand, in the case of an additional bypass passage closing unit (not shown) for shielding the above-mentioned bypass gas passage 200a and the fluid passage 110a, the first injection module 140 and the second spraying module 150 can spray the cleaning gas to the first shielding plate 128 and the second shielding plate 138 respectively. In this case, the cleaning gas sprayed from the above-mentioned first spraying module 140 and the second spraying module 150 may be discharged through an additional cleaning gas discharge passage.

More specifically, the above-mentioned first injection module 140 can inject cleaning gas to the upper surface of the first shielding plate 128 through the first gas injection holes 142a. In addition, the second injection module 150 may inject cleaning gas to the upper surface of the second shielding plate 138 through the second gas injection hole 152a. The cleaning gas can be removed by purging a plurality of particles including reaction by-product particles existing on the upper surface of the first shielding plate 128 or the second shielding plate 138 .

Next, as shown in part (d) of Figure 8b, the above-mentioned second shielding module 130 operates the second pneumatic cylinder 131 to rotate the second transfer body 135, and makes the second shielding plate 138 move from the second waiting position c moves to shielded position a. If the above-mentioned shielding of the fluid channel 110a occurs, the second shielding module 130 operates.

The inflow prevention cylinder 160 and the inflow prevention piston 162 serve as the second shielding plate 138 . The second shielding plate 138 rises from the second transfer body 135 to come into contact with the bottom surface of the valve housing 210 and shield the fluid channel 110a. In this case, the bypass passage blocking unit 290 maintains a state of shielding the upper bypass passage 200b.

And the said 1st shielding plate 128 is transferred to the 1st waiting position b, and is installed. The first spraying module 140 sprays cleaning gas to the upper surface of the first shielding plate 128 through the first gas spraying hole 142a. The cleaning gas can be removed by cleaning a plurality of particles including reaction by-product particles present on the upper surface of the first shielding plate 128 . The fluid channel 110a is shielded by the second shielding plate 138, so the cleaning gas will not flow into the process chamber through the fluid channel 110a. Moreover, the above-mentioned cleaning gas will not affect the vacuum formation of the process chamber. The cleaning gas can flow into the lower side of the fluid channel 110a through the bypass gas channel 200a and be discharged to the process piping. the other party On the other hand, in the case where the above-mentioned bypass gas passage 200a is not formed, the cleaning gas may be discharged to the outside by forming an additional cleaning gas discharge passage.

The above-mentioned first injection module 140 may clean the upper surface of the first shielding plate 128 by injecting the cleaning gas for an appropriate time, and then may terminate the injection of the cleaning gas.

Next, as shown in part (e) of FIG. 8b , the bypass channel blocking unit 290 may open the upper bypass channel 200b. In this case, the above-mentioned vacuum pump is activated, so the vacuum degree of the process chamber will increase. More specifically, before the start-up of the above-mentioned process chamber, the process chamber and process piping located on the upper part (or front side) of the second shielding plate 138 can be slowly exhausted, The process piping and vacuum pump on the lower or rear side of 138 form a vacuum equal pressure.

Next, as shown in part (f) of Figure 8b, the above-mentioned second shielding module 130 operates the second pneumatic cylinder 131 to rotate the second transfer body 135 and move the second shielding plate 138 to the second side of the storage space 110b. Wait for position c to move. In this case, the above-mentioned inflow prevention cylinder 160 lowers the second shielding plate 138 together with the inflow prevention piston 162 and places it on the second transfer body 135 . The above-mentioned fluid channel 110a allows fluid to flow from the upper part to the lower part. In this case, the bypass channel blocking unit 290 blocks the upper bypass channel 200b to prevent fluid from flowing into the bypass gas channel 200a. After the second shielding plate 138 is moved to the second waiting position c, the inflow prevention cylinder 160 raises the inflow prevention piston 162 to bring the piston O-ring 165 into contact with the periphery of the housing upper hole 110c.

Next, as shown in part (a) of FIG. 8a , the first shielding module 120 moves the first shielding plate 128 from the first waiting position b to the shielding position a. The first shielding plate 128 rises from the first transfer body 125 to shield the fluid passage 110a. In this case, the bypass passage blocking unit 290 maintains a state of shielding the upper bypass passage 200b.

And the said 2nd shielding plate 138 is transferred to the 2nd waiting position c, and is installed. The above-mentioned second injection module 150 sprays clean air to the upper surface of the second shielding plate 138 through the second gas injection holes 152a. clean gas. The above cleaning gas can be removed by scrubbing many particles including reaction by-product particles present on the upper surface of the second shielding plate 138 . The cleaning gas can flow into the lower side of the fluid channel 110a through the bypass gas channel 200a and be discharged to the process piping. On the other hand, in the case where the bypass gas passage 200a described above is not formed, the cleaning gas may be discharged to the outside by forming an additional cleaning gas discharge passage.

Next, a fluid stop valve according to another embodiment of the present invention will be described.

Fig. 9a is a vertical sectional view of a fluid cut-off valve according to another embodiment of the present invention, and Fig. 9b is a vertical sectional view along line C-C of Fig. 9a.

Referring to FIGS. 9a and 9b , compared with the fluid shutoff valve 100 of FIGS. 1 to 6 , a fluid shutoff valve 300 according to another embodiment of the present invention only includes the first shielding module 120 and the first injection module 140 . The above-mentioned fluid stop valve 300 does not include the second shielding module 130 and the second injection module 150 . The valve housing 310 may include only the first waiting position b in the storage space 110b. Therefore, the fluid shutoff valve 300 described above may be formed the same as or similar to the fluid shutoff valve 100 of FIGS. 1 to 6 except for changing the structure of the valve housing 310 . Compared with the valve housing 110 of FIGS. 1 to 6 , the diameter of the valve housing 310 described above is relatively small. Therefore, the above-mentioned valve housing 310 can be formed such that the first shielding module 120 and the first injection module 140 are combined or accommodated. A detailed description of other parts of the above-mentioned fluid stop valve 300 is omitted.

On the other hand, in the case that the above-mentioned fluid cut-off valve 300 only includes one of the first shielding module 120, the first injection module 140, the second shielding module 130, and the second injection module 150, it can be expressed as shielding. die set and injection die set. In this case, in the fluid stop valve 300 described above, the shielding module 120 can move the shielding plate 128 along an arcuate path from the waiting position b to the shielding position a.

The above-mentioned fluid stop valve 300 has some differences in the timing at which the first injection module 140 operates. The above-mentioned first injection module 140 operates when the inflow prevention piston 162 of the inflow prevention cylinder 160 separates the fluid channel 110 a from the receiving space 110 b. That is, when the first shielding plate 128 is located at the first waiting position b and the receiving space 110b is shielded from the fluid channel 110a, the above-mentioned first injection module 140 can perform actions. The first injection module 140 can inject cleaning gas to the first shielding plate 128 to remove the reaction by-product particles.

Next, a fluid stop valve according to another embodiment of the present invention will be described.

Fig. 10 is a vertical sectional view of a fluid stop valve according to another embodiment of the present invention.

Referring to FIG. 10 , compared with the fluid shut-off valve 300 in FIGS. 9 a and 9 b , a fluid shut-off valve 400 according to another embodiment of the present invention may further include the gas bypass channel 200 a of the fluid shut-off valve 200 in FIG. 7 . That is, the above-mentioned fluid shutoff valve 400 may add the gas bypass passage 200a of the fluid shutoff valve 200 of FIG. 7 to the fluid shutoff valve 300 of FIGS. 9a and 9b.

The valve housing 410 of the fluid stop valve 400 may include an upper bypass channel 200b and a lower bypass channel 200c. The above-mentioned valve cover 410 may omit the parts forming the second shielding module 130 and the second injection module 150 . Moreover, the above-mentioned fluid stop valve 400 may include a bypass connection pipe 280 and a bypass channel blocking unit 290 . The structure of the above-mentioned fluid shutoff valve 400 has been described in the fluid shutoff valve 200 of FIG. 7 and the fluid shutoff valve 300 of FIGS. 9 a and 9 b , and therefore, detailed description will be omitted.

Next, the operation of the fluid stop valve according to another embodiment of the present invention will be described.

Fig. 11 is a vertical sectional view showing the operation of the fluid stop valve of Fig. 10 .

Next, the operation of the fluid stop valve 400 according to another embodiment of the present invention will be described. Compared with the fluid shutoff valve 300 of FIGS. 9 a and 9 b , the fluid shutoff valve 400 described above is different in that it includes the bypass gas passage 200 a. Therefore, during the action of the above-mentioned fluid shut-off valve 400 , functions other than the role in which the bypass gas passage 200 a participates can be similarly applied to the fluid shut-off valve 300 of FIGS. 9 a and 9 b .

Also, the fluid shutoff valve 400 of FIG. 10 may act the same as or similarly to the fluid shutoff valve of FIG. 7 .

First, as shown in part (a) of FIG. 11 , the above-mentioned first shielding module 120 operates the first pneumatic cylinder 121 to rotate the first transfer body 125, and moves the first shielding plate 128 toward the upper part of the outer cover. The shielding position a of the lower portion of the hole 110c moves. In this case, the first pneumatic cylinder 121 is operated by air pressure supplied from the outside. The inflow prevention cylinder 160 raises the first shielding plate 128 together with the inflow prevention piston 162 by the air pressure supplied from the outside. The first shielding plate 128 rises from the first transfer body 125 to come into contact with the bottom surface of the valve housing 410 and shield the fluid passage 110a. In this case, the bypass passage blocking unit 290 maintains a state of shielding the upper bypass passage 200b.

Next, as shown in part (b) of FIG. 11 , the bypass channel blocking unit 290 may open the upper bypass channel 200b. In this case, the above-mentioned vacuum pump is in the activated state, and the vacuum degree of the process chamber will also increase. More specifically, before the start-up of the above-mentioned process chamber, the process chamber and the process piping located on the upper part (or front side) of the first shielding plate 128 are slowly exhausted, and after a predetermined time, the process chamber and the piping located on the first shielding plate 128 are exhausted. The lower part (or rear side) of the process uses piping and a vacuum pump to form a vacuum equal pressure.

Next, as shown in (c) of FIG. 11 , the above-mentioned first shielding module 120 operates the first pneumatic cylinder 121 to rotate the first transfer body 125, and moves the first shielding plate 128 to the first part of the storage space 110b. Wait for position b to move. In this case, the above-mentioned inflow prevention cylinder 160 lowers the first shielding plate 128 together with the inflow prevention piston 162 to place the first shielding plate 128 on the first transfer body 125 . The above-mentioned fluid channel 110a allows fluid to flow from the upper part to the lower part. In this case, the bypass channel blocking unit 290 shields the upper bypass channel 200b to prevent fluid from flowing into the bypass gas channel 200a.

The first spraying module 140 sprays cleaning gas to the upper surface of the first shielding plate 128 through the first gas spraying hole 142a. The cleaning gas can be removed by scrubbing a plurality of particles including reaction by-product particles existing on the upper surface of the first shielding plate 128 . The cleaning gas can flow into the lower side of the fluid channel 110a through the bypass gas channel 200a and be discharged to the process piping.

In the fluid stop valve 400 of the embodiment of FIG. 10, when the first shielding plate 128 is located at the first waiting position b and the inflow prevention cylinder 160 shields the fluid passage 110a from the accommodation space 110b, the first injection The module 140 may inject cleaning gas. Therefore, the above-mentioned fluid shutoff valve 400 differs from the fluid shutoff valve 200 of the embodiment of FIG. 7 in terms of the timing of injecting the purge gas.

Next, a fluid stop valve according to still another embodiment of the present invention will be described.

Fig. 12 is a top view of a fluid stop valve according to another embodiment of the present invention. FIG. 13 is a vertical cross-sectional view along line D-D of FIG. 12 . FIG. 14 is an enlarged view of "E" of FIG. 13 . Fig. 15 is a horizontal sectional view taken along line F-F of Fig. 14 . Fig. 16 is a horizontal sectional view taken along line G-G of Fig. 14 .

12 to 16, the fluid cut-off valve 500 in another embodiment of the present invention may include a valve housing 510, a first shielding module 120, a second shielding module 130, a first injection module 540, a second injection module 550 and anti-inflow cylinder 160. Also, the above-mentioned fluid stop valve 500 may further include a lower outflow pipe 170 .

Compared with the fluid shut-off valve 100 of FIGS. 1 to 6 , the fluid shut-off valve 500 of another embodiment of the present invention is different in the structure of the first injection module 540 , the second injection module 550 and the valve housing 510 for accommodating them. . And, the remaining structure of the fluid shutoff valve 500 described above may be formed the same as or similar to the fluid shutoff valve 100 of FIGS. 1 to 6 . Therefore, hereinafter, the above-mentioned fluid stop valve 500 will be described centering on the structures of the first injection module 540 , the second injection module 550 , and the valve housing 510 . In addition, the same or similar structures of the fluid shutoff valve 500 as those of the fluid shutoff valve 100 in FIGS. 1 to 6 are assigned the same reference numerals, and detailed description thereof will be omitted.

The valve housing 510 may include a housing upper hole 110c, a housing lower hole 110d, a first shielding hole 110e, a second shielding hole 110f, a first injection hole 510g, a second injection hole 510h, a first injection storage groove 510i and a second injection hole. Storage tank 510j. The above valve housing 510 may be formed by combining an upper housing 511 and a lower housing 512 separated from each other in the horizontal direction.

The first injection hole 510g is formed at a predetermined depth downward from the first waiting position b on one side of the valve cover 510 with reference to the fluid passage 110a. That is, the above-mentioned first injection hole 510g may be located at a position corresponding to the center of the first waiting position b, facing downward from the upper surface of the upper housing 511 The face direction is formed at a predetermined depth. The first injection hole 510g may provide a path through which the cleaning gas supplied to the first injection module 540 flows. Therefore, the above-mentioned first injection hole 510g may be formed of a relatively small diameter or width, unlike the first injection hole 110g of the fluid stop valve 110 of FIGS. 1 to 6 . For example, the diameter of the first injection hole 510 g may be smaller than the diameter of the first injection module 540 . The above-mentioned first injection hole 510g may be formed with an appropriate diameter so as to supply a required amount of cleaning gas to the first injection module 540 .

The second injection hole 510h may be formed at a predetermined depth downward from the center of the second waiting position c on the other side of the valve cover 510 on the basis of the fluid passage 110a. The second injection hole 510h may be formed at a predetermined depth from the upper surface of the upper cover 511 toward the lower surface. The second injection hole 510h may provide a path through which the cleaning gas supplied to the second injection module 550 flows. The shape and size of the second injection hole 510h may be the same as that of the first injection hole 510g.

The upper bottom surface of the first injection storage tank 510i can be connected to the lower end of the first injection hole 510g so as to pass through it, and can have a groove shape open to the upper part of the storage space 110b. That is, the first spray receiving groove 510i may extend from the bottom surface of the upper housing 511 toward the upper surface to the lower end of the first spray hole 510g, and may be connected thereto so as to pass through the first spray hole 510g. The center of the first injection containing groove 510i may be the same as the center of the first waiting position b on one side of the valve housing 510 based on the fluid passage 110a. The diameter of the first injection containing groove 510i may be greater than the diameter of the first injection hole 510g. The above-mentioned first injection storage groove 510i can be formed in a size required to accommodate the first injection module 540 . That is, the inner diameter of the first injection containing groove 510 i may correspond to the outer diameter of the first injection module 540 . The above-mentioned first jet containing groove 510i may be an inclined surface, so that the height of the upper bottom surface gradually decreases from the center to the outside.

The upper end of the second injection storage groove 510j can be connected to the lower end of the second injection hole 510h so as to pass through it, and can have a groove shape open to the upper part of the storage space 110b. That is, the second jet containing groove 510j may extend from the bottom surface of the upper housing 511 toward the upper surface to The lower end of the second injection hole 510h can be connected to the second injection hole 510h so as to pass through the second injection hole 510h. The center of the second injection containing groove 510j may be the same as the center of the second waiting position c on one side of the valve housing 510 based on the fluid passage 110a. The diameter of the second injection containing groove 510j may be larger than the diameter of the second injection hole 510h. The above-mentioned second jetting storage groove 510j can be formed in a size required for housing the second jetting module 550 . That is, the inner diameter of the second injection containing groove 510 j may be the same as the outer diameter of the second injection module 550 . The above-mentioned second jet containing groove 510j may be an inclined surface, so that the upper bottom surface approaches the outer side from the center, and its height gradually decreases.

The above-mentioned first injection module 540 may include a first injection plate 542 . Moreover, the above-mentioned first injection module 540 may further include a first injection support rod 544 . The first injection module 540 is accommodated in the first injection storage tank 510i, and supplies the cleaning gas supplied through the first injection hole 510g to the upper surface of the first shield plate 128 at the first waiting position b.

The above-mentioned first injection plate 542 may include a first gas injection hole 542a. The first injection plate 542 may be formed in a plate shape with a predetermined thickness, and may have a shape corresponding to the planar shape of the first injection storage groove 510i. The upper surface of the first injection plate 542 can be connected to the inside of the first injection storage tank 510i so as to be separated from the upper bottom surface of the first injection storage tank 510i. The first injection plate 542 may form a cleaning gas passage d through which cleaning gas flows together with the upper bottom surface of the first injection receiving tank 510i. The cleaning gas passage d may be formed in a disc shape from the first injection hole 510 g toward the outer peripheral surface of the first injection plate 542 . The first injection plate 542 can inject the cleaning gas supplied to the first injection storage tank 510i through the first injection hole 510g to the shielding plate 128 located in the storage space 110b. The cleaning gas passage d may have a shape whose height gradually decreases from the center to the outside.

The above-mentioned first gas injection holes 542a may be formed through the upper surface of the first injection plate 542 to the lower surface. The above-mentioned first gas injection holes 542a may be spaced apart in the circumferential direction and formed in a ring shape at positions corresponding to the center of the first injection plate 542 and the upper portion of the first O-ring 129 of the first shielding plate 128. configured. In addition, a plurality of first gas injection holes 542a may be additionally formed between the center and the circumference. Although not specifically shown, among the above-mentioned first spray holes 510g, the diameter of the first spray holes 510g located in the circumferential ring is relatively large. Compared with the central area of the first shielding plate 128, the above-mentioned first injection plate 542 can inject relatively more cleaning gas to the first O-ring 129, and can effectively remove the reaction side attached to the first O-ring 129. product particles.

The above-mentioned first injection support rod 544 may be in a column shape, and may be combined between the upper surface of the first injection plate 542 and the upper bottom surface of the first injection storage tank 510i. At least two first spray support rods 544 may be formed, and the two first spray support rods 544 are spaced from the outer side of the upper surface of the first spray plate 542 in the circumferential direction. Preferably, there may be three or four first spray support rods 544 . The first spray support bar 544 can maintain a constant distance between the upper surface of the first spray plate 542 and the upper bottom surface of the first spray storage tank 510i to form the cleaning gas passage d at a predetermined height. Also, although not specifically shown, the above-mentioned first injection support rod 544 may provide a path through which a bolt for combining the first injection plate 542 with the valve housing 510 passes.

The above-mentioned second injection module 550 may include a second injection plate 552 . Moreover, the above-mentioned second injection module 550 may further include a second injection support rod 554 . The second injection module 550 is accommodated in the second injection storage tank 510j, and supplies the cleaning gas supplied through the second injection hole 510h to the upper surface of the second shield plate 138 located at the second waiting position c.

The second injection module 550 can have the same or similar structure as the first injection module 540 except that it is accommodated in the second injection storage tank 510j to inject cleaning gas to the second shielding plate 138 at the second waiting position c. form. Therefore, the above-mentioned second injection plate 552 is formed the same as or similar to the first injection plate 542, and may include the second gas injection hole 552a that is the same as or similar to the first gas injection hole 542a. That is, the above-mentioned second gas injection holes 522a may be spaced apart in the circumferential direction at positions corresponding to the center of the second injection plate 552 and the upper portion of the second O-ring 139 located on the upper surface of the second shielding plate 138 and arranged in a Ring shape configuration. And, the above-mentioned second spray support bar 554 can be connected with the first spray The shoot support rod 544 is formed the same or similarly. That is, the above-mentioned second injection support rod 554 can be in a column shape, and at least two can be formed. Between them, the joints are spaced along the circumferential direction.

Next, a fluid stop valve according to still another embodiment of the present invention will be described.

Fig. 17 is a vertical sectional view of a fluid stop valve according to another embodiment of the present invention.

Referring to FIG. 17 , a fluid stop valve 600 according to another embodiment of the present invention may include a valve housing 610 , a first shielding module 120 , and a first injection module 540 . Compared with the fluid cut-off valve 500 in FIGS. 12 to 16 , the above-mentioned fluid cut-off valve 600 does not include the second shielding module 130 and the second injection module 550 . In addition, the valve housing 610 may only include the first waiting position b in the storage space 110b. The fluid shutoff valve 600 described above may be formed the same as or similar to the fluid shutoff valve 500 of FIGS. 12 to 16 except for a change in the structure of the valve housing 610 . Therefore, the following description will focus on the structure in which the fluid shutoff valve 600 described above is different from the fluid shutoff valve 100 shown in FIGS. 1 to 6 . In addition, in the above-mentioned fluid shutoff valve 600 , the same or similar structures as those of the fluid shutoff valve 100 in FIGS. 1 to 6 are assigned the same reference numerals and detailed description thereof will be omitted.

In addition, the above-mentioned fluid shutoff valve 600 is different from the fluid shutoff valve 500 in FIGS. 12 to 16 in terms of the timing at which the first injection module 540 operates. For example, when the inflow prevention piston 162 of the inflow prevention cylinder 160 space separates the fluid channel 110a and the receiving space 110b, the above-mentioned first injection module 540 can operate. That is, when the first shielding plate 128 is located at the first waiting position b and the receiving space 110b is shielded from the fluid passage 110a, the above-mentioned first injection module 540 can operate. The first injection module 540 can inject cleaning gas to the first shielding plate 128 to remove the reaction by-product particles.

Also, the valve housing 610 described above may be formed of a relatively small diameter compared to the valve housing 510 of FIGS. 12 to 16 . Therefore, the above-mentioned valve housing 610 can be formed so that only the first shielding module 120 and the first injection module 540 are combined or accommodated.

The first shielding module 120 of the above-mentioned fluid cut-off valve 600 can rotate and move the first shielding plate 128 from the waiting position b to the shielding position a. In this case, when the first shielding plate 128 is located at the waiting position b, the above-mentioned first injection module 540 may inject cleaning gas.

On the other hand, as described above, in the fluid cut-off valve of the embodiment of the present invention, the first shielding plate 128 and the second shielding plate 138 are rotated at the first rotation speed by the first shielding module 120 or the second shielding module 130 . The description will focus on the structure in which the shaft 124 or the second rotation shaft 134 is rotated to move from the first waiting position b or the second waiting position c to the shielding position a.

Additionally, the fluid shutoff valve according to the embodiment of the present invention can also be applied to a structure in which the shielding plate is linearly moved from the waiting position to the shielding position a. In this case, the shielding module may include a pneumatic cylinder, a spring or a driving motor to linearly move the shielding plate from the waiting position to the shielding position a. In this case, when the shielding plate is at the waiting position, the spraying module can spray cleaning gas.

Also, like the above-mentioned embodiment, in the above-mentioned fluid stop valve, at least two shielding modules and injection modules are formed, and a plurality of shielding modules are arranged symmetrically around the shielding position a or separated by a predetermined angle. Moreover, the above-mentioned spraying modules can also be located on the upper part of each shielding plate.

Hereinafter, a fluid shutoff valve according to still another embodiment of the present invention in which the above-described shielding plate has a structure in which the shielding plate moves linearly from the waiting position to the shielding position will be described.

Next, a fluid stop valve according to still another embodiment of the present invention will be described.

Fig. 18 is a top view of a fluid stop valve according to another embodiment of the present invention. Fig. 19 is a vertical sectional view taken along line G-G of Fig. 18 . FIG. 20 is a vertical cross-sectional view showing a state where the shield plate shields the fluid channel 110 a in the fluid stop valve of FIG. 18 .

Referring to FIG. 18 to FIG. 19 , a fluid stop valve 700 according to another embodiment of the present invention may include a valve housing 710 , a shielding module 720 and an injection module 740 . Also, the above-mentioned fluid stop valve 700 may further include a lower outflow pipe 170 . On the other hand, although not specifically shown, the above-mentioned fluid stop valve 700 can also be The fluid cut-off valve 200 of the embodiment in FIG. 7 includes a bypass gas channel 200 a , a bypass connecting pipe 280 and a bypass channel blocking unit 290 .

Similar to the fluid shutoff valve 600 of FIG. 17 , the above fluid shutoff valve 700 can linearly move the shielding module 720 shielding the fluid channel 110 a from the waiting position to the shielding position. That is, the above-mentioned fluid cut-off valve 700 can make the shielding plate 728 of the shielding module 720 move repeatedly through a linear path between the shielding position a and the waiting position b to shield the fluid channel 110 a. Since the shielding plate 728 of the shielding module 720 moves linearly, the above-mentioned fluid stop valve 700 is in the same structure as the plurality of fluid stop valves 100, 200, 300, There are some differences between 400 and 500.

Moreover, the injection module 740 of the above-mentioned fluid shutoff valve 700 may be formed the same as or similar to the first injection module 540 of the fluid shutoff valve 500 in the embodiment of FIGS. 12 to 16 . That is, the spray module 740 may include a spray plate 742 and a spray support rod 744 . The above-mentioned injection plate 742 may be formed the same as or similar to the first injection plate 542 of the first injection module 540 . The above-mentioned injection plate 742 may include gas injection holes 742a. Also, the above-mentioned spray support bar 744 may be formed the same as or similar to the first spray support bar 544 of the first spray module 540 . Moreover, the injection module 740 of the above-mentioned fluid shutoff valve 700 may be formed the same as or similar to the first injection module 140 of the fluid shutoff valve 100 in the embodiment of FIGS. 1 to 6 . A detailed description of the injection module 740 described above is omitted.

The following description will focus on the differences between the above-mentioned fluid shut-off valve 700 and the fluid shut-off valve 500 of the embodiment shown in FIGS. 12 to 16 . In addition, in the above-mentioned fluid cutoff valve 700, the same reference numerals are assigned to the same structures as those of the fluid cutoff valve 500 of the embodiment of FIG. 12 to FIG. 16 or the fluid cutoff valve 100 of the embodiment of FIGS. 1 to 6 and omitted. Be specific. In addition, in the above-mentioned fluid shut-off valve 700, the same structural diagrams as those of the fluid shut-off valve 500 of the embodiment of FIG. 12 to FIG. 16 or the fluid shut-off valve 100 of the embodiment of FIGS. illustrate. And, after showing the above flow In FIGS. 18 to 19 of the body cutoff valve 700, the reference signs may be omitted for the same structures shown in FIGS. 12 to 16 or FIGS. 1 to 6 .

The valve housing 710 may include a fluid channel 110a and a receiving space 110b. The fluid channel 110a extends up and down on one side of the valve housing 710, and the receiving space 110b extends from the fluid channel 110a to the other side. In the valve housing 710 described above, the fluid passage 110a and the housing space 110b are located on one side and the other side, respectively, and therefore, may have a substantially rectangular shape.

The valve housing 710 may include a housing upper hole 110c and a housing lower hole 110d which are respectively opened to the upper and lower portions of the fluid passage 110a. In addition, the valve housing 710 may include a housing shielding hole 710e, an injection hole 710g, and an injection receiving groove 710i. In addition, the valve housing 710 may further include an upper connecting pipe 115 .

The cover shielding hole 710e is based on the fluid channel 110a and can pass through from the other side of the valve cover 710 to the receiving space 110b. The shielding hole 710e of the outer cover can provide a space for combining a part of the shielding module 720 .

The spray hole 710g and the spray containment groove 710i described above may be formed the same as or similar to the first spray hole 510g and the first spray containment groove 510i in FIG. 13 , respectively. That is, the injection hole 710g may be formed at a predetermined depth downward from the waiting position on one side of the valve cover 710 . In addition, the upper bottom surface of the spray storage tank 710i can be connected to the lower end of the spray hole 710g so as to pass through the spray hole 710g, and can have a groove shape open to the upper part of the storage space 110b.

The above-mentioned valve housing 710 may form a shielding O-ring groove 710 f on the upper bottom surface of the valve housing 710 in the shielding position a, that is, the shielding bottom surface region d. The shield O-ring groove 710f may be formed in a ring shape along the periphery of the fluid passage 110a, and may open toward the lower portion of the shield bottom surface region d. The shielding O-ring groove 710f described above may be combined with the shielding O-ring 719 . On the other hand, as shown in the fluid cut-off valve 100 of FIGS. 1 to 6 , the shielding O-ring groove 710 f and the shielding O-ring 719 may be formed on the shielding plate 128 of the shielding module 220 .

The above shielding module 720 may include a shielding air cylinder 721 , a shielding transfer ring 724 and a shielding plate 728 . On the other hand, as mentioned above, the shielding module 720 may include a spring or a driving motor.

The above-mentioned shielding module 720 can be located on the other side based on the fluid channel 110 a of the valve housing 710 . As shown in FIG. 19 and FIG. 20 , the above shielding module 720 may include a shielding pneumatic cylinder 721 combined with the valve housing 710 through the housing shielding hole 710e, which can linearly move the shielding transfer ring 724 and the shielding plate 728. That is, the shielding module 720 can move the shielding plate 728 linearly repeatedly to the shielding position a and the waiting position b.

The above-mentioned shielding air cylinder 721 can be formed by a general iso-air pressure cylinder. For example, the shielded pneumatic cylinder 721 may include a shielded pneumatic housing 722 and a shielded pneumatic piston 723 . The air-shielding enclosure 722 may be in the shape of a barrel in which a space for inflow and outflow of air pressure is formed. The above-mentioned shielding pneumatic piston 723 can be in the shape of a rod, one side can flow inside the shielding pneumatic housing 722, and the other side can flow inside the receiving space 110b.

One side of the shielding transfer ring 724 can be combined with the shielding pneumatic piston 723, and can move linearly from the receiving space 110b along the direction of the fluid channel 110a. That is, the shield transfer ring 724 can repeatedly move between the waiting position b and the shield position a by forward and backward movement of the shield air piston 723 . The shield transfer ring 724 may have a ring shape having a predetermined inner diameter. The inner peripheral surface of the shield transfer ring 724 is formed to have a level difference.

The above-mentioned shielding plate 728 can be in the shape of a circular plate, and its outer diameter can correspond to the outer diameter of the shielding transfer ring 724 . The upper surface of the above-mentioned shield plate 728 can be formed as a plane. The upper surface of the shielding plate 728 can be in contact with the shielding O-ring 719 of the valve housing 710 to seal the fluid passage 110a. On the other hand, although not specifically shown, as shown in the shield plate 128 of FIGS. 1 to 6 , a shield O-ring groove 128 a may be formed on the upper surface of the shield plate 728 . Also, the aforementioned shielding O-ring groove 128 a may be combined with the shielding O-ring 719 .

Next, a fluid stop valve according to still another embodiment of the present invention will be described.

Fig. 21 is a vertical sectional view of a fluid stop valve according to another embodiment of the present invention.

Referring to FIG. 21 , a fluid stop valve 800 according to another embodiment of the present invention may include a valve housing 710 , a shielding module 720 , an injection module 740 and an anti-inflow cylinder 160 . Also, the above-mentioned fluid stop valve 800 may further include the lower outflow pipe 170 . On the other hand, although not specifically shown, the above-mentioned fluid shut-off valve 800 may further include the bypass gas channel 200a of the fluid shut-off valve 100 of the embodiment shown in FIGS. 1 to 6 .

The above-mentioned fluid shut-off valve 800 can be formed by combining the fluid shut-off valve 700 of the embodiment of FIG. 18 to FIG. 20 and the anti-inflow cylinder 160 of the fluid shut-off valve 100 of the embodiment of FIGS. 1 to 6 . The valve housing 710 of the above-mentioned fluid cut-off valve 800 is the same or similar to the lower structure of the valve housing 110 shown in FIG. In addition, in the fluid cutoff valve 800 described above, the injection module 740 can be formed in the structure of the first injection module 140 of the fluid cutoff valve 100 shown in FIGS. 1 to 6 . The structure of the above-mentioned fluid stop valve 800 has been described in the above-mentioned embodiment, and therefore, its detailed description will be omitted.

Above, with reference to the drawings, the embodiments of the technical idea of the present invention have been described. Those of ordinary skill in the technical field of the present invention can implement the present invention into other specific forms without changing the essential features of the technical idea of the present invention. . The examples described above are illustrative examples in all respects and are not intended to limit the present invention.

100: Fluid stop valve

110: valve cover

110e: the first shielding hole

110f: the second shielding hole

110g: the first injection hole

110h: Second injection hole

120: The first shielding module

121: The first pneumatic cylinder

124: The first axis of rotation

130: The second shielding module

131: Second pneumatic cylinder

140: The first injection module

150: Second injection module

A-A: line

a: Shield position

b: the first waiting position

c: second waiting position

Claims (15)

A fluid cut-off valve, comprising: a valve housing, including a fluid channel and a housing space, the fluid channel is formed between the upper hole of the housing and the lower hole of the housing, and is used to allow fluid to flow in and flow, and the housing space is formed outside the fluid channel , connected to the fluid channel; the first shielding module includes a first shielding plate, the first shielding plate is located in the first waiting position of the storage space, and moves to the shielding position of the fluid channel to shield the fluid channel; the second Two shielding modules, including a second shielding plate, the second shielding plate is located in the second waiting position of the above-mentioned receiving space, and moves to the above-mentioned shielding position to alternately shield the above-mentioned fluid channel with the first shielding module; the first spraying module , for spraying cleaning gas to the upper surface of the first shielding plate; and a second injection module, for spraying cleaning gas to the upper surface of the second shielding plate, the valve housing includes a first spray hole and a second spray hole The first injection hole penetrates to the first waiting position of the storage space at the upper part of one side of the fluid passage, and the second injection hole penetrates at the second waiting position of the storage space at the upper part of the other side of the fluid passage. , the above-mentioned first injection module includes: a first injection body, including a first air supply hole and a first gas guide groove, the above-mentioned first air supply hole penetrates from the upper surface to the lower surface, and is used to let the clean gas flow in, and the above-mentioned first gas guide A groove is formed from the lower surface toward the upper direction, and the above-mentioned first air supply hole is formed in the center; and the first injection plate includes a first gas injection hole penetrating from the upper surface to the lower surface for spraying the above-mentioned cleaning to the above-mentioned first shielding plate. Gas, combined with the lower part of the above-mentioned first gas guide groove, the above-mentioned second injection module includes: The second injection body includes a second air supply hole and a second gas guide groove. The second air supply hole penetrates from the upper surface to the lower surface for allowing clean gas to flow in. The second gas guide groove is formed from the lower surface toward the upper direction. , forming the second gas supply hole in the center; and the second injection plate, including the second gas injection hole, penetrating from the upper surface to the lower surface, for injecting the cleaning gas, and combining with the lower part of the second gas guide groove. The fluid cut-off valve according to claim 1, wherein the first shielding module further includes: a first pneumatic cylinder, located on one side of the fluid channel outside the valve housing; The first pneumatic cylinder is connected and rotated, and the other side extends toward the housing space of the valve housing; Repeatedly move between the first waiting position and the shielding position, the first shielding plate is placed on the other side of the first transfer body, moves up and down at the shielding position and shields the fluid passage, the second shielding module It also includes: a second pneumatic cylinder, located on the other side of the fluid channel outside the valve housing; a second rotating shaft, one side of which is connected to the second pneumatic cylinder for rotation, and the other side faces the valve housing. The storage space is extended; and the second transfer body is combined with the second rotating shaft on one side, and rotates on the other side in an arc-shaped trajectory to repeatedly move between the second waiting position and the shielding position. The shielding plate is placed on the other side of the second transfer body, moves up and down at the shielding position and shields the fluid channel. The fluid cut-off valve according to claim 1, wherein the first gas guide groove and the second gas guide groove have the following shapes, that is, the closer to the outside of the first injection body and the second injection body, the deeper the depth. The plurality of first gas injection holes and the plurality of second gas injection holes are respectively formed radially at intervals along the center of the first injection plate and the second injection plate toward the outside. The fluid stop valve according to claim 1, wherein, when the second shielding plate shields the fluid channel at the shielding position, and the first shielding plate is at the first waiting position, the first injection module The upper surface of the first shielding plate sprays the cleaning gas. When the first shielding plate shields the fluid channel at the shielding position and the second shielding plate is at the second waiting position, the second injection module sets Cleaning gas is sprayed from the upper surfaces of the two shielding plates. The fluid shut-off valve according to claim 1, further comprising an anti-inflow cylinder, the above-mentioned anti-inflow cylinder is combined with the lower hole of the outer cover of the valve cover, and supports the first shielding plate or the second shielding plate at the shielding position When the first shielding plate and the second shielding plate are respectively located at the first waiting position and the second waiting position, the fluid passage is separated from the receiving space. The fluid cut-off valve according to claim 5, wherein when the inflow prevention cylinder separates the fluid channel from the storage space, the first injection module moves toward the upper surface of the first shielding plate at the first waiting position. The cleaning gas is sprayed, and the second injection module sprays the cleaning gas to the upper surface of the second shielding plate located at the second waiting position. The fluid cut-off valve according to claim 1, further comprising: a bypass gas channel connected to the fluid channel at the upper part of the shielding position, and connected to the fluid channel at the lower part of the shielding position through the accommodation space. The connection is parallel to the above-mentioned fluid channel as a path for the above-mentioned fluid to flow; and the bypass channel blocking unit is used for opening and closing the above-mentioned bypass gas channel. The fluid cut-off valve according to claim 7, wherein the bypass gas channel provides a path for the cleaning gas sprayed by the first injection module and the second injection module to be discharged to the outside of the storage space. A fluid cut-off valve, comprising: a valve housing, including a fluid channel and a housing space, the fluid channel is formed between the upper hole of the housing and the lower hole of the housing, and is used to allow fluid to flow in and flow, and the housing space is formed outside the fluid channel , connected to the fluid channel; the first shielding module includes a first shielding plate, the first shielding plate is located in the first waiting position of the storage space, and moves to the shielding position of the fluid channel to shield the fluid channel; the second Two shielding modules, including a second shielding plate, the second shielding plate is located in the second waiting position of the above-mentioned receiving space, and moves to the above-mentioned shielding position to alternately shield the above-mentioned fluid channel with the first shielding module; the first spraying module , used to inject cleaning gas to the upper surface of the first shielding plate; and a second injection module, used to inject cleaning gas to the upper surface of the second shielding plate, the valve housing includes: a first injection hole, from the above-mentioned The upper part of the first waiting position faces downward and is formed at a predetermined depth; The first spray storage tank, the bottom surface of the upper part is connected with the lower end of the above-mentioned first spray hole, and the lower part is opened towards the upper part of the above-mentioned storage space; Formed at a predetermined depth; and a second spray storage tank, the upper bottom surface is connected to the lower end of the second spray hole, the lower part is open towards the upper part of the storage space, the first spray module includes a first spray plate, The first injection plate includes a plurality of first gas injection holes penetrating from the upper surface to the lower surface, and the upper surface is separated from the upper bottom surface of the first injection storage tank along the horizontal direction with the first injection storage tank. In combination, the above-mentioned second injection module includes a second injection plate, and the above-mentioned second injection plate includes a plurality of second gas injection holes penetrating from the upper surface to the lower surface, and the upper surface is aligned with the upper bottom surface of the second injection storage tank. Separated and combined with the above-mentioned second spray storage tank along the horizontal direction. The fluid cut-off valve according to claim 9, wherein the first gas injection hole is located along the center of the first injection plate and at a position corresponding to the upper part of the first O-ring on the upper surface of the first shielding plate. Spaced apart in the circumferential direction and arranged in a ring shape, the second gas injection holes are located along the circumference at the center of the second injection plate and at positions corresponding to the upper part of the second O-ring on the upper surface of the second shielding plate. The directions are spaced and arranged in a ring shape. The fluid shut-off valve according to claim 9, wherein the first gas injection module further includes at least two first injection support rods, and the at least two first injection support rods are column-shaped, and the first injection plate The upper surface of the upper surface and the upper bottom surface of the first jet storage tank are separated and combined along the circumferential direction, The above-mentioned second gas injection module also includes at least two second injection support rods. Spaced apart and combined along the circumferential direction. A fluid cut-off valve, comprising: a valve housing, including a fluid channel and a housing space, the fluid channel is formed between the upper hole of the housing and the lower hole of the housing, and is used to allow fluid gas to flow in and flow, and the housing space is formed in the fluid channel The outer side is connected with the above-mentioned fluid channel; the shielding module includes a shielding plate, the above-mentioned shielding plate is located at the waiting position of the above-mentioned receiving space, and moves to the shielding position of the above-mentioned fluid channel to shield the above-mentioned fluid channel; and the injection module is used for injecting The above-mentioned shielding plate located at the above-mentioned waiting position sprays cleaning gas, and the above-mentioned valve housing includes: a spray hole formed at a predetermined depth in a downward direction at one side of the waiting position; The lower part is open towards the upper part of the above-mentioned storage space. The above-mentioned injection module includes an injection plate, and the above-mentioned injection plate includes a plurality of gas injection holes penetrating from the upper surface to the lower surface. The method of surface separation is combined with the above-mentioned jet storage tank along the horizontal direction. The fluid shut-off valve according to claim 12, wherein the shielding module moves the shielding plate from the waiting position to the shielding position along an arc path or along a straight path. The fluid stop valve as described in claim 12, wherein, The valve housing also includes a housing shielding hole, which penetrates from the other side of the valve housing to the accommodating space. The shielding module includes a shielding air cylinder combined with the valve housing through the shielding hole of the housing. The shielding air pressure The cylinder linearly moves the shielding plate. The fluid cut-off valve according to claim 12, further comprising an inflow prevention cylinder combined with the lower portion of the valve housing.

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