TWI795397B - High pressure discharge lamp and its control method - Google Patents

Abstract

The high-pressure discharge lamp (1) of the present invention has: a luminous tube (10); a reflector (20), which has a spherical or aspherical reflective surface (22) formed around the length axis of the luminous tube (10); and The insertion hole (23) for the luminous tube (10) can be inserted with a gap (s); the insulator (30), which fixes the luminous tube (10) and the reflector (20) respectively; and a plurality of resistors (37, 38 ), which are arranged inside the insulator (30), have different resistance values, and are respectively connected in parallel. Thereby, the approximate use time of the lamp can be grasped by the lamp itself.

Description

High pressure discharge lamp and its control method

The present invention relates to a high-pressure discharge lamp and a control method thereof, and more specifically relates to a high-pressure discharge lamp constituting a multi-lamp light source portion of an exposure device and a control method thereof.

In recent years, in the exposure apparatuses used in the manufacture of color filters and printed wiring boards of flat panel display devices, in order to enlarge the exposure area, the output of the light source section is also sought to be improved. Therefore, various techniques are known in the industry that constitute a light source unit using a plurality of high-pressure discharge lamps with relatively low illuminance, which are advantageous in terms of manufacturing costs and the like (for example, refer to Patent Document 1). As shown in FIG. 7 , the conventional high-pressure discharge lamp 100 mainly includes: a luminous tube 110 that discharges and emits light; a reflector 120 that emits the light from the luminous tube 110 in a directional manner; an insulator 130 that fixes and emits light. The tube 110 and the reflector 120 ; and the wire 140 electrically connected to the light emitting tube 110 . In the luminous tube 110, there are: a luminous part 111, which has an internal space sealed with halogen gas, mercury, and argon for starting; a pair of sealing parts 112, 113, which seal the internal space of the luminous part 111; and a The counter electrodes 114 and 115 are arranged to face each other in the light emitting unit 111 . In addition, in the light source device described in Patent Document 1, the incandescent lamp 131 is provided inside the insulator 130 so that whether the discharge lamp 100 is authentic can be inspected with high accuracy, in a short time, and at low cost. Prior Art Documents Patent Documents Patent Document 1: Japanese Patent No. 5869713

[Problem to be Solved by the Invention] Furthermore, in a high-pressure discharge lamp, the electric power discharged at the beginning of use is small in order to output the same illuminance, and on the other hand, the electric power discharged becomes larger as the use time becomes longer. Therefore, in order to output the same illuminance, the high-pressure discharge lamp must increase the applied power as the usage time becomes longer. In this way, in order to apply the optimum power, it is desired to be able to confirm the approximate usage time of the lamp itself. In Patent Document 1, grasping of the usage time of the lamp itself is not taken into consideration. The present invention was made in view of the foregoing problems, and an object of the present invention is to provide a high-pressure discharge lamp capable of grasping the approximate usage time of the lamp by the lamp itself, and a control method thereof. [Technical Means for Solving the Problems] The above objects of the present invention are achieved by the following configurations. (1) A high-pressure discharge lamp characterized by comprising: a luminous tube; a reflector having a spherical or aspherical reflective surface formed around the longitudinal axis of the luminous tube, and for inserting the luminous tube with a gap. an insertion hole; an insulator, which respectively fixes the aforementioned light-emitting tube and the aforementioned reflector; and a plurality of resistors, which are arranged inside the aforementioned insulator, have respective different resistance values, and are respectively connected in parallel. (2) The high-pressure discharge lamp as in (1), wherein the insulator has an opening connecting the space formed between the light-emitting tube and the insertion hole of the reflector with the outside; and the housing space for the plurality of resistors is arranged. The tie is formed by the insulator on a side opposite to the reflector with respect to the opening. (3) A control method for a high-pressure discharge lamp, characterized in that it is the control method for a high-pressure discharge lamp of (1) or (2), and the plurality of resistors are arranged in order from the resistor with the lower resistance value The way of fusing controls the voltage applied to the aforementioned resistors. (4) The method for controlling a high-pressure discharge lamp as described in (3), wherein the voltage applied to the high-pressure discharge lamp is controlled in accordance with the combined resistance value of the plurality of resistors. (5) A control method for a high-pressure discharge lamp, which is characterized in that it is the control method for a high-pressure discharge lamp of (1) or (2), and monitors the composite resistance value of the aforementioned plurality of resistors, and simultaneously uses the resistor from the aforementioned resistor Apply current to the plurality of resistors in the manner of sequentially fusing the aforementioned resistors with lower values; when the combined resistance value becomes larger, stop the aforementioned applied current. [Effects of the Invention] According to the high-pressure discharge lamp of the present invention, since a plurality of resistors having different resistance values are respectively connected in parallel and arranged inside the insulator, whether or not the resistors are blown can be grasped by checking the combined resistance value. , and the approximate use time of the lamp can be grasped by the lamp itself.

Hereinafter, a high-pressure discharge lamp according to an embodiment of the present invention will be described in detail with reference to FIGS. 1 to 5 . As shown in FIG. 1 , the high-pressure discharge lamp 1 of the present embodiment mainly includes: a glass-made luminous tube 10 that discharges and emits light; a reflector 20 that directionalally emits light from the luminous tube 10 ; an insulator 30 , which respectively fix the luminous tube 10 and the reflector 20; and wires 16, 17, which are electrically connected with the luminous tube 10 (refer to FIG. 4 ). As shown in FIG. 3 , the luminous tube 10 has: an ellipsoidal luminous tube portion 13 on which a pair of electrodes 11, 12 are arranged oppositely; and a pair of side tube portions 14, 15 connected to the luminous tube portion. The two ends of 13 extend along the length axis X of the pair of electrodes 11 and 12 . In addition, halogen gas, mercury, argon for starting, etc. are sealed in the inner space of the arc tube part 13, and a pair of side tube parts 14, 15 seal the inner space of the arc tube part 13. In addition, the shape of the luminous tube portion 13 may be spherical. The reflector 20 is arranged on one side of the longitudinal axis X direction, and has: an opening 21 protruding from one side pipe portion 14, a parabolic reflective surface 22 formed around the longitudinal axis X, and another formed in the longitudinal axis X direction. An insertion hole 23 into which one side and the other side pipe portion 15 can be inserted with a gap. In addition, the reflective surface 22 of the reflector 20 is not limited to a parabolic shape, and may be elliptical or spherical. That is, the reflecting surface of the reflector of the present invention may be spherical or aspherical. In the luminous tube 10 , one electrode 11 extending into one side tube portion 14 is set as an anode, and the other electrode 12 extending into the other side tube portion 15 is set as a cathode. Electric wires extending from the front end portion of one side pipe portion 14 and the base end portion of the other side pipe portion 15 are respectively connected to a pair of wires 16, 17 for feeding power. Moreover, a pair of lead wires 16 and 17 are connected to a lighting power supply 35 . In addition, the lead wire 16 connected to one side pipe part 14 is led out to the outside through the receiving base 24 attached to the reflector 20 . The base portion 31 of the insulator 30 is covered on the outer side of the bowl-shaped bottom of the reflector 20, and the bonding portion is fixed with an adhesive (see FIG. 4). In addition, the cylindrical center portion of the base portion 31 of the insulator 30 has a holding portion 32 for holding the base end portion of the other pipe portion 15 inserted into the insertion hole 23 of the reflector 20 . The other pipe portion 15 is fixed to the holding portion 32 and the insulator 30 with an adhesive. Therefore, the reflector 20 and the other side tube portion 15 of the luminous tube 10 are respectively fixed to the insulator 30, the reflector 20 and the luminous tube 10 are not bonded, and the other side tube portion 15 and the insertion hole 23 of the reflector 20 The gap forms the space s. The insulator 30 has the above-mentioned base portion 31 and a cover portion 33 including the holding portion 32 and covering the rear of the base portion 31 . The bottom portion 33a of the cover portion 33 is formed flat. Therefore, the lamp pressing cover 50 shown in FIG. 5 can be fixed to the lamp holder 50 by bringing the lamp pressing cover (not shown) into contact with the flat bottom 33a. Returning to FIG. 3 , the base portion 31 of the insulator 30 has two openings that communicate with the space s between the other side tube portion 15 and the insertion hole 23 of the reflector 20 and the outside, and open the other side tube portion 15 to the outside. Section 34. And, as shown in FIG. 5, in the state where the lamp 1 is mounted on the lamp holder 50, by sucking the air behind the lamp holder 50 and discharging it, the air introduced from the front of the lamp 1 passes through the space s and The opening part 34 cools the arc tube 10 . Therefore, the space s and the open portion 34 form a cooling path. In addition, the outer edge of the opening 21 of the reflector 20 is formed into a substantially square shape with corners chamfered, but one of the four corners is used as a notch 26 for alignment, and the three corners are used. different shapes. Thereby, when the lamp 1 is attached to the lamp holder 50, all the lamps 1 are aligned in the same direction. Since the temperature of the upper part of the luminous tube 10 becomes higher, the cooling efficiency will increase if the amount of air passing through the upper side is increased. Therefore, in the lighting device in which the lamp holder 50 is assembled, it is preferable to align and attach the lamp 1 to the lamp holder 50 so that the two openings 34 formed in the insulator 30 are located in the vertical direction. In addition, the shape of the insulator 30 can be made asymmetric so that the opening area of the opening 34 on the upper side is larger than that of the opening 34 on the lower side, thereby further improving the cooling efficiency. For example, in this embodiment, as shown in FIG. 1, the opening gap g of the opening portion 34 is defined by two planes passing through the longitudinal axis X, and the opening gap can be changed by changing the angle formed by the two planes. g even the opening area. Here, in the lamp 1 of this embodiment, as shown in FIG. 4 , in the accommodation space Sp surrounded by the base portion 31 and the cover portion 33 of the insulator 30, a plurality of lamps having different resistance values and connected in parallel are respectively provided. (two in this embodiment) resistors 37 and 38 . As the resistors 37 and 38, in addition to filaments and metal wires of incandescent lamps, as long as they are metal film resistors, carbon resistor fuses, bimetals, and thermocouples that generate loads when current flows, they can be any. . These resistors 37 and 38 are connected to a power supply 39 for resistors via an external feeder lead 36 , and are also connected to a measurement unit 40 that measures the current flowing through the feeder lead 36 . Moreover, the power supply 39 for resistors and the measurement part 40 are connected to the control apparatus 41 which built-in the timer 42 together with the power supply 35 for lighting mentioned above. Since the resistors 37 and 38 are connected in parallel, the voltages applied to both ends of each resistor are equal, and since the generated Joule heat P is V ² /R, the smaller the resistance value, the greater the Joule heat. For example, when the material (ρ: resistivity) and thickness (S: cross-sectional area) of the resistors 37 and 38 are the same, but the lengths d1 and d2 (>d1) are different, the resistance values R1, R2 is R1<R2. At this time, the generated Joule heats P1 and P2 are P1=V ² /R1=V ² /(ρd1/S) P2=V ² /R2=V ² /(ρd2/S). Thus, since P1/P2=R1/R2=d2/d1, the ratio of Joule's heat is the ratio of lengths. In addition, the resistors 37 and 38 start to melt when the Joule heat generated per unit volume exceeds a certain value. Since the cross-sectional area S is the same, as the Joule heat generated per unit volume, the resistor 37 is four times that of the resistor 38, and the resistor 37 melts first and breaks. Therefore, when the usage time of the lamp becomes a specific time, by applying a specific voltage from the power supply 39 for resistors, the resistors with lower resistance values are sequentially fused. Specifically, as shown in FIG. 4 , the timer 42 built in the control device 41 measures the usage time of the lamp 1 by monitoring the power supply 35 for lighting. Then, when the use time of the lamp 1 reaches the first specific time, the resistor 37 with a low resistance value is fused by applying the first specific voltage from the power supply 39 for resistors. And, when the use time of the lamp 1 becomes the second specific time longer than the first required time, by applying a second specific voltage higher than the first specific voltage from the power source 39 for the resistor, the resistor with a high resistance value Body 38 fuses. Also, by measuring the current flowing through the feed wire 36 by the measuring unit 40, the combined resistance value of these resistors 37, 38 can be grasped. Then, by checking whether any one of the resistors 37 and 38 is blown, it is possible to check the approximate usage time of the lamp. In addition, the resistance value of each resistor is measured in advance, and the relationship with the use time is dataized in advance. Moreover, the data can be stored in the control device 41 in a form. Furthermore, the control device 41 controls the voltage of the lighting power supply 35 applied to the lamp 1 according to the use time of the lamp 1 , that is, the combined resistance value of the resistors 37 and 38 measured by the measuring unit 40 . In addition, the resistors 37 and 38 can be controlled not only by voltage, but also by current control or power control. The high-pressure discharge lamp 1 configured as above is used as a light source unit for an exposure device by mounting a plurality of lamp holders 50 vertically and horizontally as shown in FIG. 5 . Therefore, by controlling the voltage applied to each lamp 1 , it is possible to irradiate exposure light with uniform illuminance from each lamp 1 . Also, the air on the back side of the lamp holder 50 is exhausted by an exhaust device not shown, and the air from the front side of the lamp holder 50 is introduced into the lamp 1 by using the space s of each high-pressure discharge lamp 1 as a cooling path. In this way, the individual lamps 1 can be cooled. In addition, it is possible that the back side of the lamp holder 50 cooperates with the lamp pressing cover to form a closed space, and air is exhausted from the closed space. In this case, the air for cooling the lamp 1 passes through the opening 34 of the insulator 30, but on the side opposite to the reflector 20 with respect to the opening 34, the insulator 30 forms a storage space Sp for disposing the resistors 37, 38. Thereby, it is possible to prevent the fusion of the resistors 37 and 38 from being affected by the air passing through the opening 34 . As described above, according to the high-pressure discharge lamp 1 of the present embodiment, since the plurality of resistors 37 and 38 having different resistance values are respectively connected in parallel and arranged inside the insulator 30, by confirming the resultant resistance Whether the resistors 37, 38 are blown can be grasped by the value, and the approximate service time of the lamp can be grasped by the lamp itself. Moreover, according to the control method of the high-pressure discharge lamp of this embodiment, since the voltage applied to the power supply 39 for resistors is controlled in such a manner that the plurality of resistors 37, 38 are fused sequentially starting from the resistor 37 with a low resistance value, by By confirming the combined resistance value, it is possible to know whether the resistors 37 and 38 are blown, and to know the approximate use time of the lamp by the lamp itself. Furthermore, since the voltage applied to the high-pressure discharge lamp 1 is controlled in accordance with the composite resistance value of the plurality of resistors 37, 38, exposure light with uniform illuminance can be irradiated regardless of the length of time the lamp 1 is used. In addition, this invention is not limited to the said embodiment, It can change, improve, etc. suitably. For example, in the present invention, the method of connecting the luminous tube and the wire, and the internal structure of the luminous tube are not limited to this embodiment, and any previous embodiments can be applied. Also, in the present invention, life time management can be performed using a circuit as shown in FIG. 6 . Specifically, n rows of resistors ri and fuses Fi (i=1, 2, . . . , n; n is an integer greater than or equal to 2) arranged in series are arranged in parallel. The resistors ri have different resistance values, and the current values for cutting the fuses Fi are different. When managing the life time, different currents flow from the power supply 39 for resistors, and each fuse Fi is cut off every time a predetermined time elapses. In addition, r of the resistor power supply 39 represents the internal resistance of the power supply. In addition, life time management can be performed by controlling the voltage of the resistor power supply 39 and sequentially cutting off each fuse Fi. Furthermore, by using the determination circuit to determine the combined resistance value of all the resistors ri and the fuses Fi, the specification of the lamp 1 can be determined. In this case, even in the state where the lamp 1 having different specifications is turned on, life management can be performed, and normal and safe lighting can be performed. In addition, it is feasible that the above-mentioned circuit does not provide a fuse Fi, and a plurality of resistors ri having different resistance values are arranged in parallel, and by flowing different currents from the power supply 39 for resistors, each resistor ri passes through a specific Time fuses sequentially. [Example] Hereinafter, two examples in which a current flows through a circuit in which a plurality of resistors ri are connected in parallel to fuse the resistors ri will be described. (Embodiment 1) In Embodiment 1, a resistor r1 including a nickel-chromium wire with a diameter of 0.2 mm and a length of 5 cm and a resistor r2 including a nickel-chromium wire with a diameter of 0.2 mm and a length of 10 cm were used. A circuit in which resistors are connected in parallel. Furthermore, it was confirmed that only the resistor r1 having a length of 5 cm can be fused at about 4.5 A when a current flows in the above circuit. (Example 2) In Example 2, a resistor r1 including a nickel-chromium wire with a diameter of 0.2 mm and a length of 3 cm, a resistor r2 including a nickel-chromium wire with a diameter of 0.3 mm and a length of 3 cm, and a resistor including A circuit in which three resistors of the resistor r3 of the nickel-chromium wire of 0.4 mm and length 3 cm are connected in parallel. Moreover, when the current flows in the above circuit, when the current of 8 A flows, the resistor r3 starts to be red-hot, the resistor r2 is red-hot at 10 A, and the resistor r1 starts to be red-hot at 14 A. Furthermore, when the current continues to flow at 14 A, the resistor r3 is fused, and the monitored combined resistance value increases sharply. At this time, by stopping the flow of current, only the resistor r3 can be fused. That is, in this example, when an increase in the combined resistance value judged to be a magnitude of melting of the resistors is detected, the current flow is temporarily stopped, and only one resistor is melted. Thereafter, it was confirmed similarly that by gradually increasing the current, the resistor r2 and the resistor r1 could be fused sequentially. The present application is based on the Japanese patent application (invention patent application 2017-074742) filed on April 4, 2017, the contents of which are incorporated in this application by reference.

1‧‧‧High pressure discharge lamp/lamp 10‧‧‧luminous tube 11‧‧‧electrode 12‧‧‧electrode 13‧‧‧luminous tube part 14‧‧‧side tube part 15‧‧‧side tube part 16‧‧‧ Conductor 17‧‧‧conductor 20‧‧‧reflector 21‧‧‧opening 22‧‧‧reflecting surface 23‧‧‧insertion hole 24‧‧‧receptor 26‧‧‧notch 30‧‧‧insulator 31‧‧‧ Base part 32‧‧‧holding part 33‧‧‧cover part 33a‧‧‧bottom 34‧‧‧opening part 35‧‧‧lighting power supply 36‧‧‧feeding wire 37‧‧‧resistor 38‧‧ ‧Resistor 39‧‧‧Resistor Power Supply 40‧‧‧Measurement Unit 41‧‧‧Control Device 42‧‧‧Timer 50‧‧‧Lamp Holder 100‧‧‧High Pressure Discharge Lamp/Discharge Lamp 110‧‧‧ Light-emitting tube 111‧‧‧luminescent part 112‧‧‧sealing part 113‧‧‧sealing part 114‧‧‧electrode 115‧‧‧electrode 120‧‧‧reflector 130‧‧‧insulator 131‧‧‧incandescent lamp 140‧‧ ‧Conductor F1‧‧‧Fuse F2‧‧‧Fuse Fn‧‧‧Fuse g‧‧‧opening gapr‧‧‧Internal resistance of power supply r1‧‧‧resistor r2‧‧‧resistor rn‧‧‧resistor Sp ‧‧‧Accommodating space s‧‧‧Gap/space X‧‧‧Long axis

Fig. 1 is a perspective view of a high pressure discharge lamp according to one embodiment of the present invention. Fig. 2 is a side view of the high pressure discharge lamp shown in Fig. 1 . Fig. 3 is a sectional view of the high pressure discharge lamp shown in Fig. 1 . Fig. 4 is a diagram showing a sectional view of the high-pressure discharge lamp shown in Fig. 1 cut at a position perpendicular to Fig. 3 together with a control circuit. Fig. 5 is a perspective view showing a state where the high-pressure discharge lamp of this embodiment is attached to a lamp holder. Figure 6 is a diagram showing a circuit for managing the life time of a lamp. Fig. 7 is a sectional view showing a conventional high pressure discharge lamp.

1‧‧‧High pressure discharge lamp/lamp

10‧‧‧luminous tube

14‧‧‧Side pipe

15‧‧‧Side tube

16‧‧‧wire

17‧‧‧wire

20‧‧‧reflector

21‧‧‧opening

22‧‧‧reflective surface

23‧‧‧Insertion hole

30‧‧‧Insulators

31‧‧‧base part

32‧‧‧Maintenance Department

33‧‧‧Hood

33a‧‧‧bottom

35‧‧‧Power supply for lighting

36‧‧‧Feeder wire

37‧‧‧Resistor

38‧‧‧Resistor

39‧‧‧Resistor power supply

40‧‧‧Determination Department

41‧‧‧Control device

42‧‧‧Timer

Sp‧‧‧containment space

s‧‧‧gap/space

Claims (5)

A high-pressure discharge lamp characterized by comprising: a luminous tube; a reflector having a spherical or aspherical reflective surface formed around the longitudinal axis of the luminous tube, and an insertion hole for the luminous tube to be inserted with a gap ; an insulator, which respectively fixes the aforementioned light-emitting tube and the aforementioned reflector; and a plurality of resistors, which are arranged inside the aforementioned insulator, have respective different resistance values, and are respectively connected in parallel; The resistance value of each resistor and the relationship with the use time are pre-datad, and the approximate use time of the lamp can be confirmed by confirming whether any one of the plurality of resistors is blown. The high-pressure discharge lamp according to claim 1, wherein the insulator has an open portion connecting the space formed between the light-emitting tube and the insertion hole of the reflector with the outside; and the housing space for disposing the plurality of resistors is located opposite to The side opposite to the reflector of the opening portion is formed by the insulator. A control method for a high-pressure discharge lamp, characterized in that it is a control method for a high-pressure discharge lamp according to claim 1 or 2, and the plurality of resistors are controlled to be fused sequentially starting from the resistor with a lower resistance value. The voltage applied by the aforementioned resistor. A method for controlling a high-pressure discharge lamp according to claim 3, wherein the voltage applied to the high-pressure discharge lamp is controlled in accordance with the combined resistance value of the plurality of resistors. A control method for a high-pressure discharge lamp, characterized in that it is a control method for a high-pressure discharge lamp according to claim 1 or 2, and monitors the composite resistance value of the plurality of resistors, and uses the resistor whose resistance value is the lowest Apply current to the aforementioned plurality of resistors in the manner of sequentially fusing; when the aforementioned combined resistance value becomes larger, stop the aforementioned applied current.

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