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TWI793463B - Electronic component testing equipment - Google Patents

Electronic component testing equipment Download PDF

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Publication number
TWI793463B
TWI793463B TW109135943A TW109135943A TWI793463B TW I793463 B TWI793463 B TW I793463B TW 109135943 A TW109135943 A TW 109135943A TW 109135943 A TW109135943 A TW 109135943A TW I793463 B TWI793463 B TW I793463B
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Taiwan
Prior art keywords
temperature
temperature control
detection
control mechanism
electronic component
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TW109135943A
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Chinese (zh)
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TW202217341A (en
Inventor
盧昱呈
林銘展
林冠龍
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萬潤科技股份有限公司
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Priority to TW109135943A priority Critical patent/TWI793463B/en
Priority to CN202110815258.7A priority patent/CN114371352B/en
Publication of TW202217341A publication Critical patent/TW202217341A/en
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Publication of TWI793463B publication Critical patent/TWI793463B/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/003Environmental or reliability tests
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

本發明提供一種電子元件檢測設備,包括:在一檢測室內設有一供給裝置、一搬送裝置、一檢測裝置及一氣體循環裝置;在該檢測室之外設有一溫控裝置;該氣體循環裝置設有一致冷部、一吸氣口及一排氣口;該溫控裝置設有一溫控機構;該第一溫控機構與該致冷部間設有兩條管路,該第一溫控機構可輸出低溫液體並經其中一條管路至該致冷部,低溫液體通過並使該致冷部冷卻後再經另一條管路回流至該第一溫控機構;該檢測室內之氣體自該吸氣口吸入後經該致冷部冷卻,再由該排氣口排出至該檢測室內以控制該檢測室內之溫度保持在預設值;藉此減少檢測結果失準。 The invention provides an electronic component testing equipment, comprising: a supply device, a conveying device, a detection device and a gas circulation device are provided in a detection chamber; a temperature control device is provided outside the detection chamber; the gas circulation device is equipped with There is a cooling part, a suction port and an exhaust port; the temperature control device is provided with a temperature control mechanism; there are two pipelines between the first temperature control mechanism and the refrigeration part, and the first temperature control mechanism The low-temperature liquid can be output to the refrigerating part through one of the pipelines, the low-temperature liquid passes through and cools the refrigerating part, and then flows back to the first temperature control mechanism through the other pipeline; the gas in the detection chamber flows from the suction After being inhaled by the air port, it is cooled by the refrigeration unit, and then discharged into the detection chamber through the exhaust port to control the temperature in the detection chamber to maintain a preset value; thereby reducing the inaccuracy of detection results.

Description

電子元件檢測設備 Electronic component testing equipment

本發明係有關於一種檢測設備,尤指一種以搬送裝置之間歇性旋轉流路搬送電子元件至檢測裝置進行檢測之電子元件檢測設備。 The present invention relates to a detection device, in particular to a detection device for electronic components that transports electronic components to the detection device through an intermittent rotating flow path between the transfer devices.

按,一般例如LED或被動元件之電子元件在製造完成後,通常需要進行檢測以利後續依其特性進行分選,這些用以進行檢測的設備,常在一基座上設置一周緣環列佈設等間距之載槽的載盤,電子元件被收容於所述載槽內並受該載盤以間歇旋轉流路搬送,該載盤周緣設置各種物理特性檢測儀器以對所述載槽內之電子元件進行檢測;對於一些在特殊溫度環境下需具有良好溫度特性的電子元件,例如熱敏電阻,先前技術採取在該基座上設置一罩蓋罩覆在該載盤與該檢測儀器上方,使該載盤與該檢測儀器位於該基座與該罩蓋所形成之內部空間中,並對該內部空間注入預設溫度之氣體,以令該罩蓋內保持與該罩蓋外不同之溫度;在進行檢測時,該罩蓋外之一供料機構依序將電子元件供給至該罩蓋內之該載盤,使電子元件在預設溫度下被檢測。 Generally speaking, after the manufacture of electronic components such as LEDs or passive components, they usually need to be tested for subsequent sorting according to their characteristics. These devices for testing are often arranged on a base with a peripheral ring. A tray with equally spaced slots. Electronic components are accommodated in the slots and transported by the tray with an intermittent rotating flow path. Components are tested; for some electronic components that need to have good temperature characteristics in a special temperature environment, such as thermistors, the previous technology adopts a cover on the base to cover the carrier plate and the detection instrument, so that The carrier plate and the detection instrument are located in the inner space formed by the base and the cover, and a gas of a predetermined temperature is injected into the inner space to keep the temperature inside the cover different from that outside the cover; When testing, a feeding mechanism outside the cover sequentially supplies electronic components to the tray inside the cover, so that the electronic components are tested at a preset temperature.

先前技術採用設置罩蓋覆蓋方式來進行在特殊溫度環境下需具有良好溫度特性之電子元件的檢測,其設置之罩蓋外與罩蓋內將會具有溫度的差異,導致電子元件由罩蓋外的供料機構被供給至罩蓋內後,會因溫差造成例如濕氣產生、元件溫度尚未達到預設溫度前就被檢測…等不期望之情事,以上不期望之情事都可能導致檢測結果失準。 The prior art adopts the method of setting a cover to detect electronic components that need to have good temperature characteristics in a special temperature environment. There will be a temperature difference between the outside of the cover and the inside of the cover, which will cause the electronic components to be separated from the outside of the cover. After the feeding mechanism is supplied into the cover, unexpected events such as moisture generation, component temperature being detected before reaching the preset temperature due to temperature difference, etc., all of the above unexpected events may lead to the failure of the test results allow.

爰是,本發明的目的,在於提供一種可減少檢測結果失準之電子元件檢測設備。 Therefore, the purpose of the present invention is to provide an electronic component testing device that can reduce the inaccuracy of testing results.

依據本發明目的之電子元件檢測設備,包括:一檢測室,形成於一機台台面與一機台罩殼之間;一供給裝置,設有一供給機構與一震動送料機構;一搬送裝置,設有一載盤與一載盤驅動機構;一檢測裝置,設有一檢測機構;一氣體循環裝置,設有一致冷部、一吸氣口及一排氣口;一溫控裝置,控制該檢測室內之溫度;該供給裝置、該搬送裝置、該檢測裝置及該氣體循環裝置皆設於該檢測室內;該溫控裝置設有一第一溫控機構並設於該檢測室外;該溫控裝置的該第一溫控機構與該氣體循環裝置的該致冷部間設有兩條管路,該第一溫控機構可輸出低溫液體並經其中一條管路至該致冷部,低溫液體通過並使該致冷部冷卻後再經另一條管路回流至該第一溫控機構;該檢測室內之氣體自該吸氣口吸入後經該致冷部冷卻,再由該排氣口排出至該檢測室內以控制該檢測室內之溫度保持在預設值。 The electronic component testing equipment according to the object of the present invention includes: a testing room formed between a machine table and a machine cover; a supply device provided with a supply mechanism and a vibrating feeding mechanism; a conveying device provided with There is a carrier plate and a carrier plate drive mechanism; a detection device with a detection mechanism; a gas circulation device with a cooling unit, a suction port and an exhaust port; a temperature control device to control the temperature in the detection chamber. temperature; the supply device, the conveying device, the detection device and the gas circulation device are all located in the detection chamber; the temperature control device is provided with a first temperature control mechanism and is located outside the detection chamber; There are two pipelines between a temperature control mechanism and the refrigerating part of the gas circulation device. The first temperature control mechanism can output low-temperature liquid and pass through one of the pipelines to the refrigerating part. The low-temperature liquid passes through and makes the After the refrigeration part is cooled, it flows back to the first temperature control mechanism through another pipeline; the gas in the detection chamber is sucked in from the suction port, cooled by the refrigeration part, and then discharged into the detection chamber through the exhaust port To control the temperature in the detection chamber to be kept at a preset value.

本發明實施例之電子元件檢測設備,電子元件在各個裝置間被輸送之過程中,皆可保持在相同之預設溫度,減少了溫差所造成之濕氣且元件溫度可更趨近於預設溫度,藉此減少檢測結果失準。 In the electronic component testing equipment of the embodiment of the present invention, the electronic components can be kept at the same preset temperature during the process of being transported between various devices, reducing the moisture caused by the temperature difference and the component temperature can be closer to the preset temperature temperature, thereby reducing the inaccuracy of test results.

A:檢測室 A: Testing room

B:溫控裝置 B: temperature control device

B1:第一溫控機構 B1: The first temperature control mechanism

B2:第二溫控機構 B2: The second temperature control mechanism

B3:第三溫控機構 B3: The third temperature control mechanism

B4:第四溫控機構 B4: The fourth temperature control mechanism

C:供給裝置 C: supply device

C1:供給機構 C1: supply organization

C11:料斗 C11: Hopper

C12:供料道 C12: Feed channel

C13:消磁器 C13: Degausser

C14:驅動器 C14: drive

C2:震動送料機構 C2: Vibration feeding mechanism

C21:圓震機構 C21: Circular Shock Mechanism

C22:直震機構 C22: Direct shock mechanism

D:搬送裝置 D: Conveyor

D1:載盤 D1: carrier disk

D11:載槽 D11: Load tank

D12:嵌孔 D12: embedded hole

D2:載盤驅動機構 D2: Disk drive mechanism

D21:底座 D21: base

D211:排氣管 D211: exhaust pipe

D22:殼體 D22: shell

D221:殼蓋 D221: Shell cover

D222:開口 D222: Opening

D223:進氣管 D223: Intake pipe

D23:軸管座 D23: Shaft tube seat

D231:座部 D231: Seat

D232:軸管部 D232: Shaft Tube

D233:通道 D233: channel

D234:環形凹溝 D234: Annular groove

D235:進氣管 D235: Intake pipe

D236:排氣管 D236: Exhaust pipe

D24:驅動器 D24: drive

D241:本體 D241: Ontology

D242:驅動軸 D242: Drive shaft

D25:連動軸 D25: linkage shaft

D251:階部 D251: step department

D252:固定件 D252: Fixing parts

D26:軸套 D26: shaft sleeve

D27:連軸件 D27: Coupling

D28:軸承 D28: Bearing

D3:搬送台面 D3: Transfer table

D31:致冷部 D31: refrigeration department

D32:鏤空區間 D32: Hollow out interval

D33:鏤口 D33: Open mouth

D4:排出口 D4: outlet

D5:限制件 D5: Restricted parts

D51:容置區 D51: Containment area

E:檢測裝置 E: detection device

E1:檢測機構 E1: Testing agency

E11:探針架 E11: Probe Holder

E12:第一探針組 E12: first probe set

E121:第一探針 E121: First Probe

E122:第一探針座 E122: First probe seat

E13:第二探針組 E13: second probe set

E131:第二探針 E131: Second probe

E132:第二探針座 E132:Second Probe Holder

E14:驅動架 E14: Drive frame

E15:驅動器 E15: drive

E16:殼體 E16: shell

E161:進氣管 E161: Intake pipe

E162:排氣管 E162: exhaust pipe

E2:檢測儀表 E2: Detection instrument

F:氣體循環裝置 F: gas circulation device

F1:致冷部 F1: refrigeration unit

F2:吸氣口 F2: suction port

F3:排氣口 F3: exhaust port

G:收集裝置 G: collection device

G1:收集盒 G1: collection box

G2:收料管 G2: Receiving tube

G3:氣流放大器 G3: Airflow Amplifier

H1:管路 H1: pipeline

H2:管路 H2: pipeline

H3:管路 H3: pipeline

H4:管路 H4: pipeline

T:機台骨架 T: machine frame

T1:機台台面 T1: machine table

U:機台罩殼 U: machine cover

W:電子元件 W: electronic components

W':樣本元件 W': sample element

d1:最小內徑 d1: minimum inner diameter

d2:最大外徑 d2: Maximum outer diameter

d3:最大外徑 d3: Maximum outer diameter

圖1係本發明實施例中檢測設備之立體示意圖。 Fig. 1 is a three-dimensional schematic diagram of the detection equipment in the embodiment of the present invention.

圖2係本發明實施例中圖1之前視示意圖。 Fig. 2 is a schematic front view of Fig. 1 in an embodiment of the present invention.

圖3係本發明實施例中載盤與檢測機構之示意圖。 Fig. 3 is a schematic diagram of the carrier disc and the detection mechanism in the embodiment of the present invention.

圖4係本發明實施例中供給機構與震動送料機構配置關係之示意圖。 Fig. 4 is a schematic diagram of the configuration relationship between the supply mechanism and the vibrating feeding mechanism in the embodiment of the present invention.

圖5係本發明實施例中載盤驅動機構、搬送台面與載盤配置關係之示意圖。 FIG. 5 is a schematic diagram of the disposition relationship among the drive mechanism of the carrier, the transfer platform and the carrier in the embodiment of the present invention.

圖6係本發明實施例中載盤驅動機構之立體分解示意圖。 FIG. 6 is a three-dimensional exploded schematic view of the drive mechanism of the carrier disk in the embodiment of the present invention.

圖7係本發明實施例中載盤驅動機構不與搬送台面接觸之示意圖。 FIG. 7 is a schematic diagram of the drive mechanism of the carrier disk not in contact with the transfer platform in the embodiment of the present invention.

圖8係本發明實施例中檢測機構之示立體意圖。 Fig. 8 is a perspective view of the detection mechanism in the embodiment of the present invention.

圖9係本發明實施例中收集盒、收料管與氣流放大器配置關係之示意圖。 Fig. 9 is a schematic diagram of the arrangement relationship among the collection box, the material collection pipe and the airflow amplifier in the embodiment of the present invention.

請參閱圖1,本發明實施例可以如圖所示之檢測設備為例作說明,該檢測設備設有:一檢測室A;一溫控裝置B,控制該檢測室A內之溫度;一供給裝置C,設於該檢測室A內,該供給裝置C設有一供給機構C1與一震動送料機構C2;一搬送裝置D,設於該檢測室A內,該搬送裝置D設有一載盤D1與一載盤驅動機構D2;一檢測裝置E,設於該檢測室A內,該檢測裝置E設有一檢測機構E1。 Please refer to Fig. 1, the embodiment of the present invention can be described as an example with the detection equipment as shown in the figure, and this detection equipment is provided with: a detection chamber A; A temperature control device B, controls the temperature in this detection chamber A; Device C is set in the detection chamber A, the supply device C is provided with a supply mechanism C1 and a vibrating feeding mechanism C2; a conveying device D is disposed in the detection chamber A, and the conveying device D is provided with a tray D1 and A disk drive mechanism D2; a detection device E, located in the detection chamber A, the detection device E is provided with a detection mechanism E1.

請參閱圖1,該檢測設備設有一機台骨架T與一機台罩殼U,該機台骨架T設有一水平之機台台面T1,該機台罩殼U設於該機台台面T1上並罩覆設於該機台台面T1上的機構,該檢測室A係形成於該機台台面T1與該機台罩殼U之間。 Please refer to Figure 1, the testing equipment is provided with a machine frame T and a machine cover U, the machine frame T is provided with a horizontal machine table T1, and the machine cover U is set on the machine table T1 And cover the mechanism on the machine table T1, the detection chamber A is formed between the machine table T1 and the machine cover U.

請參閱圖1、2,該溫控裝置B設於該檢測室A外之該機台骨架T內,該溫控裝置B設有一例如冷水機之第一溫控機構B1、一例如冷水機之第二溫控機構B2、一例如渦流管之第三溫控機構B3與一例如渦流管第四溫控機構B4;該檢測室A內設有一氣體循環裝置F,該氣體循環裝置F設有一致冷部F1、一吸氣口F2與一排氣口F3;該第一溫控機構B1與該致冷部F1間設有兩條管路H1,該第一溫控機構B1可輸出低溫液體並經其中一條管路H1至該致冷部F1,低溫液體通過並使該致冷部F1冷卻後再經另一條管路H1回流至該第一溫控機構B1,如此循環輸 送低溫液體;該檢測室A內之氣體自該吸氣口F2吸入後經該致冷部F1冷卻,再由該排氣口F3排出至該檢測室A內,以令該檢測室A內具有冷卻氣體之循環並控制該檢測室A內之溫度保持在一第一溫度。 Please refer to Figures 1 and 2, the temperature control device B is located in the frame T of the machine outside the detection chamber A, and the temperature control device B is provided with a first temperature control mechanism B1 such as a chiller, a first temperature control mechanism B1 such as a chiller The second temperature control mechanism B2, a third temperature control mechanism B3 such as a vortex tube, and a fourth temperature control mechanism B4 such as a vortex tube; a gas circulation device F is provided in the detection chamber A, and the gas circulation device F is provided with a consistent The cold part F1, a suction port F2 and an exhaust port F3; there are two pipelines H1 between the first temperature control mechanism B1 and the refrigeration part F1, the first temperature control mechanism B1 can output low-temperature liquid and Through one of the pipelines H1 to the refrigerating part F1, the low-temperature liquid passes through and cools the refrigerating part F1, and then flows back to the first temperature control mechanism B1 through the other pipeline H1, thus circulating Send low-temperature liquid; the gas in the detection chamber A is inhaled from the suction port F2, cooled by the refrigeration unit F1, and then discharged into the detection chamber A through the exhaust port F3, so that the detection chamber A has The cooling gas is circulated and the temperature in the detection chamber A is controlled to maintain a first temperature.

請參閱圖1、2、3,該搬送裝置D設有一架高於該機台台面T1之上並與該機台台面T1保持間距之搬送台面D3,該載盤D1設於該搬送台面D3上,該載盤D1之周緣佈設有複數個載槽D11,所述載槽D11可承載電子元件W;該搬送台面D3上設有一致冷部D31,該第二溫控機構B2與該致冷部D31間設有兩條管路H2,該第二溫控機構B2可輸出低溫液體並經其中一條管路H2至該致冷部D31,低溫液體通過並使該致冷部D31冷卻後再經另一條管路H2回流至該第二溫控機構B2,如此循環輸送低溫液體,以控制該搬送台面D3之溫度保持在一第二溫度;該第三溫控機構B3與該載盤驅動機構D2間設有一條管路H3,該第三溫控機構B3可輸送低溫氣體並經該管路H3至該載盤驅動機構D2,以控制該載盤驅動機構D2之溫度保持在一第三溫度;該第四溫控機構B4與該檢測機構E1間設有一條管路H4,該第四溫控機構B4可輸送低溫氣體並經該管路H4至該檢測機構E1,以控制該檢測機構E1之溫度保持在一第四溫度;其中,該第一溫度、該第二溫度、該第三溫度與該第四溫度之預設值相同,皆為25±0.05℃;該檢查室A內亦可設置感溫器(圖未示),以在溫度與預設值不同時,可獨立地調整該檢測室A內之溫度;該搬送台面D3、該檢測機構E1與該載盤驅動機構D2上亦可同時設置不同之感溫器(圖未示),以在溫度與預設值不同時,可獨立地調整該搬送台面D3、該檢測機構E1與該載盤驅動機構D2之溫度。 Please refer to Figures 1, 2, and 3, the transfer device D is provided with a transfer table D3 that is higher than the machine table T1 and keeps a distance from the machine table T1, and the carrier D1 is set on the transfer table D3 , the periphery of the carrier disc D1 is provided with a plurality of carrier slots D11, the carrier slots D11 can carry electronic components W; the transfer platform D3 is provided with a consistent cooling part D31, the second temperature control mechanism B2 and the cooling part There are two pipelines H2 between D31, the second temperature control mechanism B2 can output low-temperature liquid and pass through one of the pipelines H2 to the refrigerating part D31, the low-temperature liquid passes through and cools the refrigerating part D31 before passing through the other A pipeline H2 flows back to the second temperature control mechanism B2, so that the cryogenic liquid is circulated to control the temperature of the transfer table D3 to maintain a second temperature; between the third temperature control mechanism B3 and the plate drive mechanism D2 A pipeline H3 is provided, and the third temperature control mechanism B3 can deliver low-temperature gas through the pipeline H3 to the disk drive mechanism D2, so as to control the temperature of the disk drive mechanism D2 to maintain a third temperature; A pipeline H4 is provided between the fourth temperature control mechanism B4 and the detection mechanism E1, and the fourth temperature control mechanism B4 can deliver low-temperature gas to the detection mechanism E1 through the pipeline H4 to control the temperature of the detection mechanism E1 Keep at a fourth temperature; wherein, the first temperature, the second temperature, the third temperature are the same as the preset values of the fourth temperature, all of which are 25±0.05°C; the inspection room A can also be equipped with a sensor A thermostat (not shown in the figure) can independently adjust the temperature in the detection chamber A when the temperature is different from the preset value; the transfer platform D3, the detection mechanism E1 and the carrier disk drive mechanism D2 can also be adjusted at the same time. Different temperature sensors (not shown in the figure) are provided so that when the temperature is different from the preset value, the temperatures of the transfer platform D3, the detection mechanism E1 and the disc drive mechanism D2 can be independently adjusted.

請參閱圖2、3,該檢測室A外之該機台骨架T內設有一收集裝置G於該機台台面T1之下方,該收集裝置G可收集由該載盤D1排出之電子元件W;該 載盤D1之周緣外設有複數個排出口D4,該收集裝置F設有複數個對應所述排出口D4數量之收集盒G1,各收集盒G1與各排出口D4之間各以一收料管G2相連通。 Please refer to Figures 2 and 3, a collecting device G is installed in the frame T of the machine outside the testing room A below the table T1 of the machine, and the collecting device G can collect the electronic components W discharged from the tray D1; Should A plurality of discharge outlets D4 are provided outside the periphery of the tray D1, and the collection device F is provided with a plurality of collection boxes G1 corresponding to the number of the discharge outlets D4. Tube G2 is connected.

請參閱圖3、4,該供給機構C1與該震動送料機構C2皆設於該機台台面T1上;該供給機構C1設有一料斗C11、一供料道C12、一消磁器C13與一例如電磁鐵之驅動器C14;該震動送料機構C2設有一圓震機構C21與一直震機構C22;該驅動器C14可搖晃該料斗C11與該供料道C12,使該料斗C11內之電子元件W由該料斗C11落至該供料道C12,並經該消磁器C13消磁後進入該圓震機構C21,電子元件W經該圓震機構C21與該直震機構C22整序排列後,依序由該直震機構C22供給至該載盤D1之所述載槽D11。 Please refer to Figures 3 and 4, the supply mechanism C1 and the vibrating feed mechanism C2 are all located on the machine table T1; the supply mechanism C1 is provided with a hopper C11, a feed channel C12, a degausser C13 and an electromagnetic Iron driver C14; the vibrating feeding mechanism C2 is provided with a circular vibration mechanism C21 and a straight vibration mechanism C22; the driver C14 can shake the hopper C11 and the feed channel C12, so that the electronic components W in the hopper C11 are released from the hopper C11 It falls to the feed channel C12 and enters the circular shock mechanism C21 after being degaussed by the degausser C13. C22 is supplied to the loading slot D11 of the loading disk D1.

請參閱圖5、6、7,該搬送台面D3設有一圓形之鏤空區間D32,該載盤D1貼覆於該鏤空區間D32之上方,該載盤驅動機構D2由該鏤空區間D32之下方穿經該鏤空區間D32與該載盤D1相連並驅動該載盤D1在該搬送台面D3上進行間歇性旋轉,其中,該載盤驅動機構D2不與該搬送台面D3接觸;該搬送台面D3上設有C形片狀之限制件D5圍設於該載盤D1之周緣外,以防止該載盤D1進行間歇性旋轉時電子元件W由所述載槽D11甩出;該限制件D5上設有一容置區D51供一樣本元件W'容置其中;所述排出口D4(圖3)貫通該搬送台面D3與該限制件D5並對應所述載槽D11,使電子元件W可經所述排出口D4排出該載盤D1;該載盤驅動機構D2之外部設有一底座D21、一殼體D22與一軸管座D23,該載盤驅動機構D2以該底座D21固設於該機台台面T1(圖1)上,該殼體D22係接設於該底座D21與該軸管座D23之間;該殼體D22係由四片殼蓋D221所組成,其上下兩端分別設有開口D222;該軸管座D23設有一座部D231與一軸管部D232,並有一通道D233貫通兩者,該座部D231之寬度較該軸管部D232寬,該殼體D22上下兩端 之開口分別受該軸管座D23之座部D231與該底座D21遮蔽;該座部D231上設有一環形凹溝D234於該通道D233之外周緣,該座部D231上設有一進氣管D235與一排氣管D236分別連通至該環形凹溝D234;該殼體D22之周緣設有複數個進氣管D223,該底座D21之下方設有複數個排氣管D211,所述進氣管D223與排氣管D211連通至該殼體D22內;該第三溫控機構B3(圖2)輸出之低溫氣體係分別經該進氣管D235輸送至該環形凹溝D234內並自該排氣管D236排出與經該進氣管D223輸送至該殼體D22內並自該排氣管D211排出;該載盤驅動機構D2之內部設有一例如馬達之驅動器D24、一連動軸D25與一軸套D26;該驅動器D24固設於該軸管座D23之下方並位於該殼體D22內,該驅動器D24之一本體D241遮蔽該通道D233之下端並貼靠該環形凹溝D234,該驅動器D24上方之一驅動軸D242伸入該通道D233,並藉由一連軸件D27與該連動軸D25之下端相連,使該驅動器D24可驅動該連動軸D25間歇性旋轉;該驅動器D24之下方與該底座D21保持間距且該驅動器D24之側緣亦與該殼體D22保持間距,該驅動器D24不接觸該底座D21與該殼體D22;該軸套D26嵌設於該通道D233之上端,該連動軸D25之上端穿經該軸套D26與該鏤空區間D32並嵌入該載盤D1之一嵌孔D12中以連動該載盤D1,該連動軸D25與該軸套D26之間設有複數個軸承D28;該連動軸D25之上端設有較該連動軸D25外徑略寬之階部D251,該載盤D1夾設於該階部D251與一固定件D252之間受該連動軸D25帶動;該鏤空區間D32之最小內徑d1分別大於該連動軸D25之最大外徑d2與該軸套D26之最大外徑d3,且該軸管部D232之上端設於該鏤空區間D32之底部與該搬送台面D3保持適當間距;因該載盤驅動機構D2之該驅動器D24係設於該殼體D22內,該驅動器D24又僅以上方與該軸管座D23接觸,該驅動器D24作動後所產生之熱,可受該第三溫控機構B3(圖2)控制進行降溫以減少熱向外擴散;且因該載盤驅動機構D2不與該 搬送台面D3接觸,又更減少了熱傳遞至該搬送台面D3進而影響電子元件W之情事發生。 Please refer to Figures 5, 6, and 7, the transfer platform D3 is provided with a circular hollow area D32, the carrier D1 is attached above the hollow area D32, and the carrier drive mechanism D2 passes through the hollow area D32. It is connected with the carrier D1 through the hollow area D32 and drives the carrier D1 to rotate intermittently on the transfer platform D3, wherein the carrier drive mechanism D2 is not in contact with the transfer platform D3; There is a C-shaped sheet-shaped limiting member D5 surrounding the periphery of the carrier D1 to prevent the electronic component W from being thrown out of the carrier slot D11 when the carrier D1 is intermittently rotated; the limiting member D5 is provided with a The accommodating area D51 is for accommodating a sample component W'; the discharge port D4 (FIG. 3) passes through the transfer table D3 and the restricting member D5 and corresponds to the loading slot D11, so that the electronic component W can pass through the discharge port D4 (Fig. 3). The outlet D4 discharges the tray D1; the tray drive mechanism D2 is provided with a base D21, a housing D22 and a shaft socket D23 outside, and the tray drive mechanism D2 is fixed on the machine table T1 with the base D21 ( 1), the housing D22 is connected between the base D21 and the shaft tube seat D23; the housing D22 is composed of four shell covers D221, and the upper and lower ends are respectively provided with openings D222; The shaft tube seat D23 is provided with a seat portion D231 and a shaft tube portion D232, and a channel D233 runs through both. The width of the seat portion D231 is wider than the shaft tube portion D232. The upper and lower ends of the housing D22 The opening is covered by the seat D231 of the shaft tube seat D23 and the base D21 respectively; the seat D231 is provided with an annular groove D234 on the outer periphery of the channel D233, and the seat D231 is provided with an air intake pipe D235 and An exhaust pipe D236 communicates with the annular groove D234 respectively; the periphery of the housing D22 is provided with a plurality of air intake pipes D223, and the bottom of the base D21 is provided with a plurality of air intake pipes D211, and the air intake pipe D223 and The exhaust pipe D211 is connected to the housing D22; the low-temperature gas system output by the third temperature control mechanism B3 (Fig. 2) is delivered to the annular groove D234 through the air inlet pipe D235 respectively, and is discharged from the exhaust pipe D236. It is discharged and transported into the casing D22 through the intake pipe D223 and discharged from the exhaust pipe D211; the disc drive mechanism D2 is provided with a driver D24 such as a motor, a connecting shaft D25 and a shaft sleeve D26; The driver D24 is fixed below the shaft tube seat D23 and is located in the housing D22. A body D241 of the driver D24 covers the lower end of the channel D233 and abuts against the annular groove D234. A drive shaft on the top of the driver D24 D242 extends into the channel D233, and is connected to the lower end of the linkage shaft D25 through a shaft coupling D27, so that the driver D24 can drive the linkage shaft D25 to rotate intermittently; the bottom of the driver D24 is kept at a distance from the base D21 and the The side edge of the driver D24 also keeps a distance from the housing D22, and the driver D24 does not contact the base D21 and the housing D22; the shaft sleeve D26 is embedded in the upper end of the channel D233, and the upper end of the linkage shaft D25 passes through the The shaft sleeve D26 and the hollowed-out area D32 are embedded in one of the embedded holes D12 of the carrier D1 to link the carrier D1, and a plurality of bearings D28 are arranged between the linkage shaft D25 and the shaft sleeve D26; The upper end is provided with a step portion D251 slightly wider than the outer diameter of the linkage shaft D25, and the carrier D1 is sandwiched between the step portion D251 and a fixed piece D252 and driven by the linkage shaft D25; the minimum inner diameter of the hollowed out section D32 d1 is respectively greater than the maximum outer diameter d2 of the linkage shaft D25 and the maximum outer diameter d3 of the shaft sleeve D26, and the upper end of the shaft tube part D232 is set at the bottom of the hollowed-out area D32 and maintains an appropriate distance from the transfer platform D3; The driver D24 of the disc drive mechanism D2 is arranged in the casing D22, and the driver D24 is only in contact with the shaft tube seat D23 from above, and the heat generated by the driver D24 can be controlled by the third temperature. Mechanism B3 (Fig. 2) is controlled to cool down to reduce the outward diffusion of heat; The contact of the conveying table D3 further reduces the occurrence of heat transfer to the conveying table D3 and further affecting the electronic components W.

請參閱圖1、5、8,該檢測裝置E設有一檢測儀表E2設於該檢測室A內並位於該搬送台面D3之旁側,該檢測儀表E2與該檢測機構E1電性連結,以分析該檢測機構E1檢測後之資訊;該檢測機構E1設有一探針架E11、一第一探針組E12、一第二探針組E13、一驅動架E14與一例如電磁鐵之驅動器E15;該探針架E11之上表面可伸經該搬送台面D3上之一長條狀之鏤口D33而顯露於該搬送台面D3;該第一探針組E12設有四根第一探針E121於一第一探針座E122上,該第二探針組E13設有四根第二探針E131於一第二探針座E132上,該第一探針組E12用以檢測該容置區D51內之該樣本元件W',該第二探針組E13用以檢測該載盤D1之載槽D11內受該載盤D1搬送之電子元件W;該第一探針座E122與該第二探針座E132分別間隔設於該驅動架E14之一端,該驅動器E15可對該驅動架E14之另一端作用,使該第一探針座E122與該第二探針座E132受驅動而上下位移,以令所述第一探針E121與所述第二探針E131可穿經該探針架E11之複數個通孔E111,分別對電子元件W與樣本元件W'進行檢測;該驅動器E15設於一呈立體矩形之殼體E16內,該殼體E16上設有一進氣管E161與一排氣管E162,由該第四溫控機構B4(圖2)輸出之低溫氣體係經該進氣管E161輸送至該殼體E16內並自該排氣管E162排出,以降低該殼體E16內之溫度,減少該驅動器E15作動後所產生之熱向外擴散至其它機構;其中,該樣本元件W'係已預先在其他檢測設備中以25±0.05℃之溫度下進行檢測並得知其檢測資訊的元件;本發明實施例將已知檢測資訊之樣本元件W'設置於與該電子元件W幾乎相同之檢測環境中,並同時對兩者進行檢測,以藉由該 樣本元件W'之檢測資訊換算該電子元件W之檢測資訊,但此換算方式並非本發明之重點,在此不多加贅述。 Please refer to Figures 1, 5, and 8. The detection device E is provided with a detection instrument E2 located in the detection chamber A and beside the transfer platform D3. The detection instrument E2 is electrically connected with the detection mechanism E1 to analyze The information after the detection of the detection mechanism E1; the detection mechanism E1 is provided with a probe frame E11, a first probe group E12, a second probe group E13, a driving frame E14 and a driver E15 such as an electromagnet; The upper surface of the probe holder E11 can extend through a strip-shaped hollow D33 on the transfer table D3 to be exposed on the transfer table D3; the first probe group E12 is provided with four first probes E121 in a On the first probe seat E122, the second probe group E13 is provided with four second probes E131 on a second probe seat E132, and the first probe group E12 is used to detect the inside of the accommodation area D51 The sample component W', the second probe set E13 is used to detect the electronic component W transported by the carrier D1 in the carrier D11 of the carrier D1; the first probe seat E122 and the second probe Seats E132 are respectively arranged at one end of the driving frame E14 at intervals, and the driver E15 can act on the other end of the driving frame E14, so that the first probe seat E122 and the second probe seat E132 are driven to move up and down, so as to The first probe E121 and the second probe E131 can pass through a plurality of through holes E111 of the probe frame E11, respectively to detect the electronic component W and the sample component W'; the driver E15 is set in a In the three-dimensional rectangular housing E16, an air intake pipe E161 and an exhaust pipe E162 are arranged on the housing E16, and the low-temperature gas output by the fourth temperature control mechanism B4 (Fig. 2) passes through the air intake pipe E161 transported into the casing E16 and discharged from the exhaust pipe E162 to reduce the temperature inside the casing E16 and reduce the heat generated by the driver E15 from spreading outward to other mechanisms; wherein the sample element W' It is a component that has been tested at a temperature of 25±0.05°C in other testing equipment in advance and its detection information is known; in the embodiment of the present invention, the sample component W' with known detection information is placed almost the same as the electronic component W In the detection environment, and to detect both at the same time, in order to pass the The detection information of the sample component W' is converted into the detection information of the electronic component W, but this conversion method is not the key point of the present invention, and will not be described here.

請參閱圖8,各收集盒G1與各收料管G2之間設有一氣流放大器G3,其使該收料管G2內之電子元件W(圖3)可加速排至該收集盒G1內。 Please refer to FIG. 8 , an airflow amplifier G3 is provided between each collection box G1 and each material collection tube G2 , which accelerates the discharge of the electronic components W ( FIG. 3 ) in the material collection tube G2 into the collection box G1 .

本發明實施例在實施上,以該第一溫控機構B1、該第二溫控機構B2、該第三溫控機構B3與該第四溫控機構B4分別獨立地控制該檢查室A內不同區域的溫度,使該溫控裝置B控制該檢測室A內之溫度保持在預設溫度;使電子元件W由該供給機構C1經該震動送料機構C2輸送至該載盤D1之載槽D11中,並受該載盤D1以間歇性旋轉流路搬送至該檢測機構進E1行檢測,皆在該檢測室A內的預設溫度下被執行;受該檢測機構E1檢測後之電子元件W再依物理特性使電子元件W經對應之排出口D4排出至該收集裝置G收集。 In the implementation of the embodiment of the present invention, the first temperature control mechanism B1, the second temperature control mechanism B2, the third temperature control mechanism B3 and the fourth temperature control mechanism B4 independently control the different The temperature of the area, so that the temperature control device B controls the temperature in the detection chamber A to maintain the preset temperature; the electronic component W is transported from the supply mechanism C1 to the loading slot D11 of the carrier plate D1 through the vibration feeding mechanism C2 , and transported by the carrier disc D1 to the detection mechanism E1 through the intermittent rotating flow path for detection, all of which are carried out at the preset temperature in the detection chamber A; the electronic components W detected by the detection mechanism E1 are then According to the physical characteristics, the electronic components W are discharged to the collection device G through the corresponding discharge port D4 for collection.

本發明實施例之電子元件檢測設備,電子元件W在各個裝置間被輸送之過程中,皆可保持在相同之預設溫度,減少了溫差所造成之濕氣且元件溫度可更趨近於預設溫度,藉此減少檢測結果失準。 In the electronic component testing equipment of the embodiment of the present invention, the electronic component W can be kept at the same preset temperature during the process of being transported between various devices, reducing the moisture caused by the temperature difference and the component temperature can be closer to the preset temperature. Set the temperature to reduce the inaccuracy of the test results.

惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及發明說明內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。 But what is described above is only a preferred embodiment of the present invention, and should not limit the scope of implementation of the present invention with this, that is, all simple equivalent changes and modifications made according to the patent scope of the present invention and the content of the description of the invention, All still belong to the scope covered by the patent of the present invention.

A:檢測室 A: Testing room

B:溫控裝置 B: temperature control device

C:供給裝置 C: supply device

C1:供給機構 C1: supply organization

C2:震動送料機構 C2: Vibration feeding mechanism

D:搬送裝置 D: Conveyor

D1:載盤 D1: carrier disk

D2:載盤驅動機構 D2: Disk drive mechanism

D3:搬送台面 D3: Transfer table

E:檢測裝置 E: detection device

E1:檢測機構 E1: Testing agency

E2:檢測儀表 E2: Detection instrument

F:氣體循環裝置 F: gas circulation device

F2:吸氣口 F2: suction port

F3:排氣口 F3: exhaust port

T:機台骨架 T: machine frame

T1:機台台面 T1: machine table

U:機台罩殼 U: machine cover

Claims (10)

一種電子元件檢測設備,包括:一檢測室,形成於一機台台面與一機台罩殼之間;一供給裝置,設有一供給機構與一震動送料機構;一搬送裝置,設有一載盤與一載盤驅動機構;一檢測裝置,設有一檢測機構;一氣體循環裝置,設有一致冷部、一吸氣口及一排氣口;一溫控裝置,控制該檢測室內之溫度;該供給裝置、該搬送裝置、該檢測裝置及該氣體循環裝置皆設於該檢測室內;該溫控裝置設有一第一溫控機構並設於該檢測室外;該溫控裝置的該第一溫控機構與該氣體循環裝置的該致冷部間設有兩條管路,該第一溫控機構可輸出低溫液體並經其中一條管路至該致冷部,低溫液體通過並使該致冷部冷卻後再經另一條管路回流至該第一溫控機構;該檢測室內之氣體自該吸氣口吸入後經該致冷部冷卻,再由該排氣口排出至該檢測室內以控制該檢測室內之溫度保持在預設值。 An electronic component testing equipment, comprising: a testing room formed between a machine table and a machine cover; a supply device provided with a supply mechanism and a vibrating feeding mechanism; a conveying device provided with a carrier plate and A carrier drive mechanism; a detection device with a detection mechanism; a gas circulation device with a cooling unit, a suction port and an exhaust port; a temperature control device to control the temperature in the detection chamber; the supply The device, the conveying device, the detection device and the gas circulation device are all located in the detection chamber; the temperature control device is provided with a first temperature control mechanism and is located outside the detection chamber; the first temperature control mechanism of the temperature control device There are two pipelines between the refrigerating part of the gas circulation device, the first temperature control mechanism can output the low-temperature liquid and pass through one of the pipelines to the refrigerating part, the low-temperature liquid passes through and cools the refrigerating part Then flow back to the first temperature control mechanism through another pipeline; the gas in the detection chamber is sucked from the suction port, cooled by the refrigeration unit, and then discharged into the detection chamber through the exhaust port to control the detection The temperature in the room is kept at the preset value. 如請求項1所述電子元件檢測設備,其中,該載盤設於一搬送台面上並受一載盤驅動機構驅動,該搬送台面架高於該機台台面之上並設有一鏤空區間,該載盤貼覆於該鏤空區間之上方,該載盤驅動機構由該鏤空區間之下方穿經該鏤空區間與該載盤相連。 The electronic component testing equipment as described in claim 1, wherein, the carrier is set on a transfer table and driven by a carrier drive mechanism, the transfer table frame is higher than the machine table and has a hollow section, the The carrier plate is pasted above the hollow area, and the carrier drive mechanism passes through the hollow area from below the hollow area and is connected with the carrier plate. 如請求項2所述電子元件檢測設備,其中,該載盤驅動機構不與該搬送台面接觸。 The electronic component testing device as claimed in claim 2, wherein, the disk drive mechanism does not contact the conveying platform. 如請求項2所述電子元件檢測設備,其中,該載盤驅動機構設有一底座、一殼體、一驅動器與一軸管座;該驅動器固設於該軸管座之下方並位於該殼體內,該驅動器不接觸該底座與該殼體,低溫氣體可輸送至該殼體內。 The electronic component testing device as described in claim 2, wherein the carrier drive mechanism is provided with a base, a casing, a driver and a shaft socket; the driver is fixed below the shaft socket and is located in the casing, The driver does not contact the base and the casing, and low-temperature gas can be delivered into the casing. 如請求項4所述電子元件檢測設備,其中,該軸管座設有一環形凹溝且該驅動器貼靠該環形凹溝,低溫氣體可輸送至該環形凹溝內。 The electronic component testing device as claimed in claim 4, wherein the shaft socket is provided with an annular groove, and the driver abuts against the annular groove, and the low-temperature gas can be transported into the annular groove. 如請求項2所述電子元件檢測設備,其中,該溫控裝置於該檢測室外設有一第二溫控機構、一第三溫控機構及一第四溫控機構;該第二溫控機構控制該搬送台面之溫度保持在預設值;該第三溫控機構控制該載盤驅動機構之溫度保持在預設值;該第四溫控機構控制該檢測機構之溫度保持在預設值。 Electronic component testing equipment as described in claim 2, wherein the temperature control device is provided with a second temperature control mechanism, a third temperature control mechanism and a fourth temperature control mechanism outside the detection chamber; the second temperature control mechanism controls The temperature of the conveying platform is kept at a preset value; the third temperature control mechanism controls the temperature of the plate driving mechanism to be kept at a preset value; the fourth temperature control mechanism controls the temperature of the detection mechanism to be kept at a preset value. 如請求項6所述電子元件檢測設備,其中,該檢測室內之溫度、該搬送台面之溫度、該載盤驅動機構之溫度及該檢測機構之溫度四者的預設值皆相同。 The electronic component testing device as described in Claim 6, wherein the preset values of the temperature of the testing chamber, the temperature of the transfer platform, the temperature of the carrier driving mechanism, and the temperature of the testing mechanism are all the same. 如請求項6所述電子元件檢測設備,其中,該第二溫控機構係輸送低溫液體,該第三溫控機構與該第四溫控機構係輸送低溫氣體。 The electronic component testing device according to claim 6, wherein the second temperature control mechanism is for delivering low-temperature liquid, and the third temperature control mechanism and the fourth temperature control mechanism are for delivering low-temperature gas. 如請求項1所述電子元件檢測設備,其中,該檢測機構設有一驅動器,該驅動器可驅動複數個探針位移對電子元件進行檢測;該驅動器設於一殼體內,低溫氣體可輸送至該殼體內。 The electronic component testing equipment as described in Claim 1, wherein the detection mechanism is provided with a driver, which can drive a plurality of probes to detect electronic components; in vivo. 如請求項9所述電子元件檢測設備,其中,該檢測裝置在該檢測室內另設有一檢測儀表於該搬送台面之旁側,該檢測儀表與該檢測機構電性連結,以分析該檢測機構檢測後之資訊。 Electronic component testing equipment as described in Claim 9, wherein, the testing device is provided with a testing instrument beside the conveying platform in the testing room, and the testing instrument is electrically connected with the testing mechanism to analyze the detection mechanism detected by the testing mechanism. information later.
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