TWI791041B - Exposure system alignment and calibration method - Google Patents

Abstract

Methods are provided that, in some embodiments that provide alignment of a first layer of a printing plate on a chuck. For example, in one embodiment, images of reference marks on a chuck are captured to determine the initial positions of the reference marks on the chuck. A reference model is created from those initial positions. Images of alignment marks on a reference plate are captured and the locations of the alignment marks are determined. A reference plate model is created from the positions of the alignment marks. A mapping model is then created from the reference model and the reference plate model.

Description

Exposure system alignment and calibration method

Embodiments of the present disclosure relate generally to lithography, and more particularly to the calibration alignment of a printed layer on a holder.

Photolithography is widely used in the manufacture of semiconductor devices and display devices such as liquid crystal displays (LCDs). However, during lithography exposure, the holder (where the exposure is performed) may be damaged by repeated use , stress, and/or mechanical and/or thermal changes of the tool. These changes may affect the positional accuracy of the pattern printed on the plate. When trying to repeat the pattern printed on another tool from a plate printed with one tool When on, the position of the printed pattern may not be correct.

Therefore, there is a need to calibrate the alignment printed layers used on the tool.

The embodiments described herein relate generally to lithography, and more particularly to the calibration alignment of a printed layer on a holder. For example, in one embodiment, a method is provided for capturing images of reference marks on a holder and determining initial positions of the reference marks. A reference model is generated from the initial positions of the reference marks. Several alignment marks on a reference plate Several images of were acquired. Several positions of these alignment marks are determined. A reference plate model is generated from the positions of the alignment marks. Afterwards, a mapping model is generated from the reference model and the reference panel model.

In another embodiment, a method is proposed to generate a reference model from several initial positions of several reference marks on a clamping member and from several positions of several alignment marks on a first reference plate A reference plate model, and a mapping model is generated from the reference model and the reference plate model.

In yet another embodiment, a method is provided for capturing a plurality of images of a plurality of reference marks on a holder, and determining a plurality of initial positions of the reference marks on the holder. Afterwards, storing the initial positions of the reference marks in memory, capturing images of the alignment marks on a reference plate, and determining the positions of the alignment marks on the reference plate and stored in memory.

Other embodiments of the disclosure are provided to include other methods, apparatuses, and systems having features similar to the methods described herein. In order to have a better understanding of the above-mentioned and other aspects of the present invention, the following specific examples are given in detail with the accompanying drawings as follows:

100: system

110: Bottom frame

112: Passive Air Isolator

120: board

122: support

124, 150: track

126: Encoder

128: Internal wall

130, 130 ₁ , 130 ₂ : clamping parts

131 ₁ , 131 ₂ : platform

140: Substrate

160: Processing equipment

162: support

164: processing unit

165: box

166: opening

202 ₁ , 202 ₂ , 204 ₁ , 204 ₂ : alignment area

206: bridge

208 ₁ , 208 ₄ , 208 ₅ , 208 ₉ , 208 ₁₁ : eyes

300: Reference plate

302 ₁ , 302 ₅ , 304 ₁ , 304 ₄ , 304 ₅ , 308 ₁ , 308 ₂ , 308 ₈ : Reference symbols

306 ₁ , 306 ₄ : guide wire

310, 310 ₁ -310 ₉ : alignment mark

312, 314: field of view

400: blank sheet

500: Angle

502, 504, 506, 508: connection

702: Input and output circuits

704: Memory

706: program

708: Support circuit

710: Processor

712:First layer alignment module

800, 900, 1000: method

802, 804, 806, 808, 810, 812, 814, 902, 904, 906, 1002, 1004, 1006, 1008, 1010, 1012: block

In order that the above-mentioned features of the present disclosure may be understood in detail, the more specific description of the present disclosure, briefly summarized above, may refer to several embodiments. Some embodiments are shown in the attached drawings. It is to be noted, however, that the accompanying drawings depict only typical embodiments of the disclosure and are therefore not to be considered limiting of its scope, for the disclosure may admit to other equivalent embodiments.

Figure 1 depicts a perspective view of a system that may benefit from embodiments disclosed herein.

Figure 2 illustrates a top view of the system shown in Figure 1 according to embodiments disclosed herein.

FIG. 3 shows a top view of a clamping member having reference marks and a reference plate including alignment marks according to embodiments disclosed herein.

Figure 4 shows a top view of a clamp and a blank sheet on the clamp according to embodiments disclosed herein.

Figure 5A shows an example of a reference plate on a clamp according to embodiments disclosed herein.

Figure 5B shows an example of a plate printed on a holder using a calibration model based on the assembly shown in Figure 5A, according to embodiments disclosed herein.

Figure 6A shows an example of a reference plate on a clamp according to embodiments disclosed herein.

Figure 6B shows an example of a plate printed on a holder using a calibration model based on the assembly shown in Figure 6A, according to embodiments disclosed herein.

FIG. 7 illustrates one embodiment of a high level block diagram of a processing unit for aligning blank sheets on a holder according to embodiments disclosed herein.

FIG. 8 illustrates one embodiment of a method of aligning a first layer on a printed board to a holder according to embodiments disclosed herein.

FIG. 9 illustrates one embodiment of a method of aligning a first layer on a printed board to a clamp according to embodiments disclosed herein.

FIG. 10 illustrates one embodiment of a method of aligning a first layer on a printed board to a holder according to embodiments disclosed herein.

To facilitate understanding, like reference numbers have been used, where possible, to refer to like elements that are common to the drawings.

In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present disclosure. However, as will be apparent to those of ordinary skill in the art, several changes using different assemblies can be made without departing from the scope of this document. In other instances, well-known features have not been described in order to avoid obscuring the text. Accordingly, the disclosure is not to be viewed as limited to the particular illustrated embodiments shown in this specification and all such alternative embodiments are intended to be included within the scope of the appended claims.

Application panels, substrates, and wafers are described interchangeably herein. Several embodiments disclosed herein utilize reference marks on the platform and alignment marks on the reference plate. The reference marks and alignment marks disclosed herein can be used to correct misalignment of the first printed layer on the platform.

In short, several embodiments described herein are generally concerned with obtaining the difference between an initial reference mark and a subsequently measured reference mark, and/or a difference between an initial alignment mark and a subsequently measured alignment mark .

FIG. 1 shows a perspective view of a system 100 that may benefit from embodiments disclosed herein. The system 100 includes a base frame 110 , a board 120 , two or more platforms 131 (such as platforms 131 ₁ and 131 ₂ ), and a processing device 160 . The clips 130 (ie clips 130 ₁ and 130 ₂ ) are placed on respective platforms 131 . The base frame 110 can be placed on the floor of the manufacturing facility and can support the board 120 . A passive air separator 112 may be located between the bottom frame 110 and the plate 120 . The board 120 can be a whole piece of granite, and the two or more platforms 131 can be set on the board 120 . The substrate 140 on the holder 130 may be supported by each of the two or more platforms 131 . A plurality of holes (not shown) may be formed in the clamping member 130 for a plurality of lift pins (not shown) to extend therethrough. The lift pins may be lifted, for example, from one or more transfer robots (not shown) to an extended position to receive the substrate 140 . The one or more transfer robots may be used to load and unload substrates 140 from the two or more grippers 130 .

The substrate 140 can be made of quartz, for example, and used as a part of a flat panel display. In other embodiments, the substrate 140 can be made of other materials, such as glass. In some embodiments, the substrate 140 may have a photoresist layer formed thereon. The photoresist is sensitive to radiation, and the photoresist can be a positive photoresist or a negative photoresist. A photoresist is a positive photoresist or a negative photoresist meaning that the portions of the photoresist that are exposed to light will, after the pattern is written in the photoresist, have a negative effect on the photoresist developer provided to the photoresist. soluble or insoluble, respectively. The chemical composition of the photoresist determines whether the photoresist will be a positive photoresist or a negative photoresist. For example, the photoresist may include diazonaphthoquinone, phenol formaldehyde resin, poly(methyl methacrylate), polymethylglutarimide (poly( methyl glutarimide)), and at least one of SU-8. In this manner, a pattern can be created on one surface of the substrate 140 to form a circuit.

The system 100 may further include a pair of supports 122 and a pair of rails 124 . The pair of supports 122 can be disposed on the board 120 . The plate 120 and the pair of supports 122 may be a one-piece material. The pair of rails 124 may thereby be supported by the support 122 . The two or more platforms 131 can move along the track 124 in the X direction. In one embodiment, the pair of tracks 124 is a pair of parallel magnetic channels. As shown, each track 124 of the pair of tracks 124 is linear. In other embodiments, the track 124 may have a non-linear shape. The encoder 126 can be coupled to each platform 131 to provide position information to the controller (not shown).

The processing device 160 may include a support 162 and a processing unit 164 . The support 162 may be disposed on the board 120 and may include an opening 166 . The opening 166 is used for allowing the two or more platforms 131 to pass under the processing unit 164 . The processing unit 164 may be supported by the support 162 . In one embodiment, the processing unit 164 is a pattern generator configured to expose photoresist during photolithography.

In some embodiments, the pattern generator can be configured to perform a maskless lithography process. The processing unit 164 may include several image projection devices (not shown). In one embodiment, the processing unit 164 may include 84 image projection devices. Each image projection device is arranged in the box 165 . The processing equipment 160 may be utilized to perform maskless direct patterning.

During operation, one of the two or more platforms 131 is moved in the X direction from the loading position shown in FIG. 1 to the processing position. When the platform 131 passes under the processing unit 164, the processing location can mean one or more of the platforms 131 Location. During operation, the two or more platforms 131 can be lifted by several air bearings (not shown), and can move along the pair of rails 124 from a loading position to a processing position. Several vertical guiding air bearings (not shown) can be coupled to each platform 131 and adjacent to the inner wall 128 of each supporting member 122 to stabilize the movement of the platform 131 . Each of the two or more stages 131 may also move in the Y direction by moving along the track 150 to process and/or index the substrate 140 . Each of the two or more stages 131 is independently operable and can scan the substrate 140 in one direction and step in the other direction. In some embodiments, when one of the two or more platforms 131 is scanning the substrate 140, the other of the two or more platforms 131 is unloading the exposed substrate and loading the next substrate to be exposed.

The measurement system measures the X and Y lateral position coordinates of the clamping member 130 on each of the two or more platforms 131 in real time, so that each of these image projection devices can accurately locate the pattern, which is written on the cover substrate. in photoresist. The measurement system also measures in real time the angular position of each of the holders 130 on the two or more platforms 131 about the vertical or Z-axis. The angular position measurement can be used during scanning by the servo mechanism to keep the angular position constant, or the angular position measurement can be used to supply a correction to the position of the pattern written on the substrate 140 .

FIG. 2 shows a top view of the system 100 shown in FIG. 1 according to the disclosure herein. In FIG. 2, each of clips ₁₃₀₁ includes a plurality of alignment regions. For example, clip ₁₃₀₂ includes alignment regions ₂₀₂₁ and ₂₀₂₂ (collectively "alignment regions 202") substantially parallel to the X-axis, and alignment regions ₂₀₄₁ and ₂₀₄₂ (collectively Referred to as "alignment region 204") is substantially parallel to the Y-axis. Each of the alignment areas 202 and 204 includes a number of reference marks (not shown).

In FIG. 2 , box 165 is removed to reveal eye 208 supported by bridge 206 . For purposes of illustration, three bridges 206 are shown. However, in other embodiments, the system 100 includes a different number of bridges 206 . Bridge 206 is used to support eye 208 . Below each bridge 206 is a row of eyes 208 ₁ , . . . , 208 ₄ , . . . , and 208 ₁₁ (collectively "eyes 208"). Figure 2 shows a row including eleven eyes 208 for illustration purposes only. In other embodiments, the number of eyes 208 under each bridge 206 is a number other than eleven. Herein, eye 208 may also be referred to as "camera 208".

Eye 208 is used to capture images of reference marks (not shown) in alignment areas 202 and 204 so that processing unit 164 can calculate and store position information for each reference mark. The eye 208 is also used to capture images of the alignment marks on the "reference plate" (not shown in FIG. 2 ), so that the processing unit 164 can calculate and store the position information of each alignment mark. The eye 208 captures images in a "scan and step" manner, or by directly moving the stage 131 to the designed reference marks 304, 308 and alignment marks 310 positions. For example, in a "scan and step" operation, the eye 208 scans a line as the gripper 130 moves in the X direction, then a "step" in the Y direction is made to the adjacent eye 208. The adjacent eye 208 scans a link adjacent to the previously scanned link.

Although the alignment areas 202 and 204 include four areas in total, all four areas do not need to be scanned. In several embodiments, reference signs (not shown in Figure 2 Middle) is placed on the holder 130 such that only one alignment area 202 and one alignment area 204 are scanned to obtain images and position information of these reference marks.

FIG. 3 shows a top view of the clamping member 130 and the reference plate 300 according to the embodiments disclosed herein. The clip 130 includes alignment regions 202 ₁ , 202 ₂ , and 204 ₁ . For simplicity, the alignment area ₂₀₄₂ is not shown in FIG. 3 . When the gripper 130 and the reference sheet 300 move in the X direction, the gripper 130 and the reference sheet 300 eventually pass under the eye 208 . As the clip 130 passes under the eye 208, an image of the reference mark 308 in the alignment area ₂₀₄₁ is captured simultaneously. The alignment area 2041 is shown with nine reference marks for illustrative purposes only. For simplicity in FIG. 3, only three of these reference signs 308 (ie, 308 ₁ , 308 ₂ , and 308 ₈ ) include guidelines and component numbers, and only the field of view of the three eyes 208 view, FOV) (ie, eyes 208 ₁ , 208 ₅ , and 208 ₉ ) are depicted above reference numeral 308 . For illustration purposes, the alignment area 202 ₁ is shown as including five reference marks 302 . However, for simplicity, only two of these reference signs 302 (ie, 302 ₁ and 302 ₅ ) include guide lines and component numbers. Also for illustrative purposes, alignment area 202 ₂ is shown as including five reference marks 304 . However, for simplicity, only three of these reference numerals 304 (ie, 304 ₁ , 304 ₄ , and 304 ₅ ) include guidelines and component numbers.

In FIG. 3, reference marks 302, 304, and 308 are depicted as several "+" symbols. For purposes of illustration, reference numerals 302, 304, and 308 and eye 208 have the same pitch. As used herein, "pitch" is defined as the distance between the reference mark and the eye 208 .

For purposes of illustration only, capturing the images and positions of reference marks 302 , 304 , and 308 is illustrated prior to capturing the images and positions of alignment marks 310 . However, image capture and position determination of reference marks 302 , 304 , and 308 do not have a time limit that occurs before image capture and position determination of alignment mark 310 . That is, image capture and position determination of reference marks 302, 304, and 308 may also occur simultaneously with image capture and position determination of alignment mark 310, or image capture and position determination of reference marks 302, 304, and 308 This may occur after image capture and position determination of alignment marks 310 .

Then, in one embodiment, the eye 208 scans the alignment areas 202 ₁ and/or 202 ₂ . For example, the eye 208 sequentially scans the reference marks 304 as the alignment area 202 ₂ passes under the eye 208 . Guide lines 306 ₁ and 306 ₄ depict the FOV of eye 208 as reference marks 304 ₁ and 304 ₄ pass under eye 208 .

When the gripper 130 moves, the reference plate 300 on the surface of the platform 131 moves in the X direction. When the clamping member 130 passes under the eye 208 , the reference plate 300 also passes under the eye 208 . The reference plate 300 includes at least one alignment mark 310 . For purposes of illustration, reference sheet 300 includes alignment marks 310 ₁ , 310 ₂ , 310 ₄ , 310 ₃ , 310 ₅ , 310 ₆ , 310 ₇ , 310 ₈ , and 310 ₉ (collectively referred to herein as "alignment mark 310"). Each alignment mark 310 ultimately falls within the FOV 312 of the eye 208 . FOV 314 represents the FOV of eye 208 when reference sheet 300 passes under eye 208 and there is no alignment mark 310 in the FOV.

In one embodiment, the reference plate 300 is assumed to be acceptable for use with reference marks 302 on the calibration fixture 130 for subsequent use of the plate. Calibration of 304, and/or 308. The reference plate 300 can be used to calibrate the reference marks 304 , 308 to the alignment marks 310 on the reference plate 300 by creating a “reference plate model”. In another embodiment, the reference plate 300 is a plate that has been used (or is intended to be used) on one tool and can be used in a calibration model of a plate printed on a different tool.

After the reference marks 304, 308 and alignment marks 310 have been scanned and captured, the reference sheet 300 is removed. The processing unit 164 calculates the locations of the reference marks 304, 308 and the alignment sum 310, and generates a calibration model (described in more detail below). In one embodiment, the processing unit 164 determines the reference marks 304, 308 and the alignment mark 310 by applying an image processing algorithm to find the positions of the reference marks 304, 308 and the alignment mark 310 in the FOV relative to the center of the FOV. s position. The distance from the center of each of the reference marks 304 , 308 and the alignment mark 310 from the center of the FOV provides the deviation from the nominal positions of the reference marks 304 , 308 and the alignment mark 310 . Several examples of image processing algorithms may include "correlation method", "edge detection method" or a combination of edge detection and correlation methods, but image processing algorithms do not use these Examples are limited. The locations of reference marks 304 , 308 , alignment marks 310 , and calibration models can be stored in memory 704 .

Calibration models are used during printing of successive panels. FIG. 4 shows a top view of a blank plate 400 on a clamp 130 according to embodiments disclosed herein. FIG. 4 shows the clamp 130 and blank sheet 400 passing under the eye 208 . Before, during and/or printing the first layer on blank sheet 400 Or later, eye 208 may capture new images of reference marks 304,308. After the first layer has been printed on a predetermined number of blank sheets 400 (five for example), the positions of the reference marks 304, 308 (calculated from new images of the reference marks 304, 308) can be used to determine the gripper 130 Whether its mobility characteristics have changed.

FIG. 5A shows an example of a reference plate 300 on a clamp 130 according to embodiments disclosed herein. The eye 208 picks up the reference marks 304 , 308 on the clamp 130 and the alignment mark 310 on the reference sheet 300 . After some calculations by the processing unit 164 , the orientation of the line 504 through the alignment mark 310 is different than the orientation of the line 502 through the reference mark 304 is determined. The difference in pitch is illustratively shown as an angle 500 formed from a horizontal line 502 through reference mark 304 and a line 504 through alignment mark 310 . Although the reference marks 304, 308 are properly located on the clamp 130, the position of the alignment mark 310 indicates that the reference sheet 300 has some orthogonality errors because the angle between the line 504 and the line 508 is not nine. Ten degrees. Line 506 through reference mark 308 and line 508 through alignment mark 310 are substantially parallel to indicate alignment and little or no rotation relative to the Y-axis.

FIG. 5B shows an example of a plate printed on a holder 130 using a calibration model based on the assembly shown in FIG. 5A according to embodiments disclosed herein. The calibration model provides the conversion of the blank sheet 400 . As used herein, "conversion" is defined as the transfer of reference marks 304, 308 and alignment marks 310 (from at least one reference sheet 300) to a subsequent printed sheet (i.e. blank sheet 400) by duplicating the printed features of the reference sheet 300. ) for the processing of converted position measurement data. In Figure 5B, see Images of reference marks 304 and alignment marks 310 indicate that reference marks 304 are properly positioned, proper rotation is applied to the printed sheet, and the calibration model is accurate.

FIG. 6A illustrates another example of a reference plate 300 on a clamp 130 according to embodiments disclosed herein. The eye 208 captures images of the reference marks 304 , 308 on the clamp 130 and the alignment mark 310 on the reference sheet 300 . After some calculations by the processing unit 164, it is determined that the pitch of the alignment marks 310 differs from the pitch of the reference marks 304, 308. The difference in pitch is illustratively shown as an angle 500 formed from a line connecting horizontally through reference mark 304 and a line passing through alignment mark 310 . The position of the alignment mark 310 indicates that the reference sheet 300 has some rotation relative to the X-axis.

FIG. 6B shows an example of a panel printed on a holder 130 using a calibration model based on the assembly shown in FIG. 6A according to embodiments disclosed herein. Eye 208 captures new images of reference marks 304, 308 and alignment marks 310 after some sheets have been printed. Comparing the position calculated from the new image with the positions of the reference marks 304, 308 and alignment mark 310 stored in memory reveals that the reference mark 304 has been shifted from an earlier stored position.

FIG. 7 depicts one embodiment of a high level block diagram of a processing unit 164 for aligning a blank sheet 400 on a holder 130 according to embodiments disclosed herein. For example, the processing unit 164 is adapted to perform the methods of FIGS. 8 and 9 . The processing unit 164 in FIG. 7 includes a processor 710 and a memory 704 . The memory 704 is used to store control programs, measurement data and the like.

In various embodiments, memory 704 also includes programs (illustrated, for example, as "first layer alignment module" 712) for generating calibration models by executing the embodiments described herein. The calibration pattern is used to align the first layer on the printed board with the holder 130 . Memory 704 includes programs (not shown) for masking designs. In one embodiment, the files related to the mask design are stored in a graphic data system (graphic data system) file (eg, "graphical data system (GDS)"). However, the files may be in any format that provides graphical data. Based on the calibration model, it is determined which mirrors deliver unused light to the light dump and which mirrors illuminate the substrate when instructing such programs.

Processor 710 cooperates with support circuits 708 such as power supplies, clock circuits, cache memory and the like, as well as circuits stored in memory 704 that assist in executing program 706 . Thus, it is contemplated that some of the process steps discussed herein as software programs may be loaded from a storage device (such as an optical drive, floppy drive, disk drive, etc. ) and applied in the memory 704 and operated by the processor 710. Therefore, several steps and methods herein can be stored on a computer readable medium. Processing unit 164 also includes input-output circuitry 702 that forms an interface between several functional elements that communicate with processing unit 164 .

Although FIG. 7 depicts a processing unit 164 programmed to perform several control functions according to the present disclosure, the name computer is not limited to meaning only those integrated circuits of a computer in the art, but broadly refers to a computer, processors, microcontrollers, Microcomputers, programmable logic controllers, application specific integrated circuits, and other programmable circuits, and such terms are used interchangeably herein. Additionally, although one processing unit 164 is shown, this illustration is for the sake of brevity. It will be appreciated that the methods described herein may be implemented on separate computers.

FIG. 8 illustrates an embodiment of a method 800 of aligning a printed board to the clamp 130 according to embodiments disclosed herein. At block 802 , the eye 208 captures an image of the reference marks 304 , 308 on the holder 130 . At block 804 , the captured image is used by the processing unit 164 to determine the initial location of the reference marks 304 , 308 . At block 806 , a reference model is generated from the initial positions of the reference markers 304 , 308 . The reference model includes the rotation and/or orientation of the reference markers 304, 308 relative to an axis, such as the X axis. For example, if reference mark 304 is rotated five degrees relative to the X axis, then an inverse rotation is provided. In this example, the reference model would include negative fifths as a correction. The reference model may also include other variations, such as a ratio defined by the spacing between these reference marks 304 , 308 and/or the angle between reference mark 304 and reference mark 308 .

At block 808 , the eye 208 captures an image of the alignment marks 310 on the reference sheet 300 . At block 810 , the processing unit 164 utilizes software to determine the position of the alignment mark 310 on the reference sheet 300 . At block 812 , a reference panel model is generated from the locations of the alignment marks 310 . The rotation and/or orientation of the reference sheet 300 relative to the reference marks 304, 308 are taken into account in the reference sheet model. For example, if the reference plate 300 is rotated ten degrees relative to the X axis, the reference plate model includes the same Ten degree rotation to print other boards. At block 814, a mapping model is generated based on the reference model and the reference panel model.

For example, in FIG. 5A, the position of the alignment mark 310 indicates some rotation of the reference sheet 300 relative to the X-axis. The position of the reference marks 304, 308 indicates that the reference marks 304, 308 are properly positioned and substantially parallel to the X-axis and the Y-axis. In Figure 5A, the reference model is zero. However, the alignment marks 310 on the reference sheet 300 are offset in such a way that the line 504 spanning the centers of the alignment marks 310 creates an angle with respect to the X-axis. As an example, if the angle is one degree, the mapping model includes (from the reference plate model) the same one degree rotation for printing subsequent plates to produce the same mark offset (as shown in Figure 5B) .

FIG. 9 illustrates an embodiment of a method 900 of aligning a printed board to the clamp 130 according to embodiments disclosed herein. At block 902 , a reference model is generated from the initial positions of the reference marks 304 , 308 on the holder 130 . The reference marks 304, 308 can be retrieved from the memory 704 and the first layer alignment module 712 can be used to generate the reference model.

At block 904 , a reference sheet model is generated from the locations of the alignment marks 310 located on the reference sheet 300 . The reference sheet model follows (emulates) the rotation, offset, and/or distortion of the position of the alignment marks 310 on the reference sheet 300 . At block 906, a mapping model is generated from the reference model and the reference panel model.

FIG. 10 illustrates an embodiment of a method 1000 of aligning a printed board to a clamp 130 according to embodiments disclosed herein. At block 1002 , images of reference marks 304 , 308 are captured from holder 130 . At block 1004, the clip 130 The initial position of the reference mark above is determined. At block 1006 , the initial positions of the reference marks 304 , 308 are stored in memory 704 .

At block 1008, an image of the alignment marks 310 on the reference sheet 300 is captured. At block 1010 , the location of the alignment mark 310 is determined by the processing unit 164 . Thereafter, at block 1012 , the location of the alignment mark 310 is stored in the memory 704 .

Alternative embodiments of methods 800 , 900 , and 1000 may include storing images of reference marks 304 , 308 and alignment marks 310 in memory 704 for later determination by processing unit 164 of the positions of these marks. Additionally, several embodiments herein have been described as including determining the initial positions of the reference marks 304 , 308 prior to determining the position of the alignment mark 310 . However, other embodiments include determining the initial position of the alignment mark 310 before determining the position of the reference marks 304 , 308 .

Alternative embodiments of methods 800 and 900 may include the step of capturing an alignment mark on a second reference plate on the gripper, wherein the second reference plate is designed for use in a on the device; generate a variation model based on the difference between the active reference mark position and the initial position of the reference mark; generate an active alignment model based on the variation model and the mapping model; and provide an inverse of the active alignment model ) as a calibration model.

Alternative embodiments of method 900 may include the step of capturing alignment marks on a second reference plate on the holder, wherein the second reference plate is designed for use on a device, to determine active reference mark positions ; and storing the alignment marks from the second reference plate in memory.

An alternative embodiment of the method 1000 may include the steps of: generating a reference tool model based on the initial position of the reference mark and the position of the alignment mark; retrieving the alignment mark on another sheet to determine the active reference mark position; The difference between the position and the initial position of the reference mark generates a variation model; based on the variation model and the reference tool model, an active alignment model is generated; and an inverse of the active alignment model is provided as a calibration model.

As used herein, the terms "having", "containing", "including", "comprising" and the like are open ended terms denoting elements of the statement or the presence of features, but does not preclude additional elements or features. Unless the context clearly dictates otherwise, the articles "a", "an" and "the" are intended to include both the plural and the singular.

To sum up, although the present invention has been disclosed by the above embodiments, it is not intended to limit the present invention. Those skilled in the art of the present invention can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be defined by the scope of the appended patent application.

800: method

802, 804, 806, 808, 810, 812, 814: block

Claims (20)

A method for aligning and correcting an exposure system, comprising: capturing a plurality of images of a plurality of reference marks on a holder; determining a plurality of initial positions of the reference marks on the holder relative to a plurality of eyes position, the eyes are a plurality of cameras; generate a reference model from the initial positions of the reference marks; capture a plurality of images of a plurality of alignment marks on a reference plate; determine the positions of the alignment marks relative to the eyes; removing the reference plate; generating a reference plate model from the positions of the alignment marks; and generating a mapping from the reference model and the reference plate model Model. The method as claimed in claim 1, wherein generating the mapping model includes: providing an inverse (inverse) of an offset in a plurality of reference mark positions; and providing an offset in the reference plate based on the reference plate model shift. The method as described in claim 1, further comprising: using the mapping model to print a first layer on at least one blank plate (blank plate); and then capturing a plurality of images of the reference marks; determining the reference marks a plurality of consecutive positions; and comparing the consecutive positions with the initial positions of the reference marks. The method as described in claim 1, wherein capturing the images of the alignment marks on the reference plate and the reference marks on the holder includes: scanning in an X direction; moving to an adjacent eye on an adjacent line; and repeating the scanning and the moving until the images of the reference marks and the alignment marks are captured. The method of claim 1, wherein the reference marks are movable from the holder. The method as described in claim 1, further comprising: capturing a plurality of alignment marks on a second reference plate on the clamping member to determine positions of a plurality of active reference marks, wherein the second reference plate is designed for use on a device; generating a variation model based on a plurality of differences between the active reference marker positions and the initial positions of the reference markers; generating a variation model based on the variation model and the mapping model an active alignment model; and providing an inverse of the active alignment model as a calibration model. A method for aligning and calibrating an exposure system, comprising: generating a reference model from a plurality of initial positions of a plurality of reference marks on a holder relative to a plurality of eyes, the eyes being a plurality of cameras; The positions of the alignment marks on the first reference plate relative to the eyes generate a reference plate model; and a mapping model is generated from the reference model and the reference plate model. The method of claim 7, wherein the reference marks are removable from the holder. The method as described in Claim 7, further comprising: capturing alignment marks on a second reference plate on the fixture to determine active reference mark positions, wherein the second reference plate is designed for use with a device; based on the A plurality of differences between the positions of the active reference marks and the initial positions of the reference marks to generate a variation model; based on the variation model and the mapping model, generate an active alignment model; and provide the active alignment model One of the inverses is used as a calibration model. The method as claimed in claim 7, wherein generating the reference model includes: capturing a plurality of images of the reference marks on the clamp; and determining the initial values of the reference marks on the clamp position; and generating the reference plate model includes: capturing a plurality of images of the alignment marks on the first reference plate; determining the positions of the alignment marks on the first reference plate. The method as described in claim 7, further comprising: recapturing a plurality of images of the reference marks after printing on at least one blank plate using the mapping model; from the recaptured images determining a plurality of consecutive positions of the reference marks; and comparing the consecutive positions with the initial positions. The method as described in claim 7, further comprising: capturing a plurality of alignment marks on a second reference plate on the clamping member to determine positions of a plurality of active reference marks, wherein the second reference plate is designed for use on a device; and The alignment marks from the second reference plate are stored in memory. The method as described in claim 7, wherein generating the reference model from the initial positions of the reference marks comprises: scanning the holder in an X direction; capturing a plurality of images of the reference marks; moving to an adjacent eye; repeating the scanning and the moving until all the images of the reference marks are captured; calculating a plurality of positions of the reference marks; and storing the positions of the reference marks in memory . The method as described in claim 7, wherein generating the reference plate model from the positions of the alignment marks comprises: scanning the first reference plate in an X direction; capturing a plurality of images of the alignment marks ; move to an adjacent eye; repeat the scanning and the moving until all the images of the alignment marks are captured; calculate the positions of the alignment marks; and store the alignment marks locations in memory. The method as claimed in claim 14, further comprising: capturing a plurality of alignment marks on a second reference plate on the clamping member to determine positions of a plurality of active reference marks, wherein the second reference plate is designed for use on a device; generating a variation model based on the plurality of differences between the active reference mark positions and the initial positions of the reference marks; generating an active alignment model based on the variation model and the mapping model; and providing the active alignment The inverse of one of the quasi-models is used as a calibration model. A method for aligning and correcting an exposure system, comprising: capturing a plurality of images of a plurality of reference marks on a holder; determining a plurality of initial positions of the reference marks on the holder relative to a plurality of eyes position, the eyes are a plurality of cameras; store the initial positions of the reference marks in a memory; capture a plurality of images of a plurality of alignment marks on a reference plate; determine the alignment marks on the reference plate positions of the alignment marks relative to the eyes; removing the reference plate; and storing the positions of the alignment marks in the memory. The method as described in claim 16, further comprising: printing on at least one blank plate; recapturing a plurality of images of the reference marks on the holder; determining a plurality of the reference marks continuation positions; and comparing the continuation positions of the reference marks with the initial positions of the reference marks. The method as described in claim 17, further comprising: replacing the initial positions of the reference marks in the memory with the continuous positions of the reference marks; retrieving the alignments on the reference plate plural images of signs; determining positions of the alignment marks on the reference plate from the re-captured images; and storing the positions of the alignment marks in the memory. The method of claim 16, further comprising generating a reference tool model based on the initial positions of the reference marks and the positions of the alignment marks. The method as described in claim 19, further comprising: capturing a plurality of alignment marks on another plate to determine the positions of a plurality of active reference marks; based on the positions of the active reference marks and the initial positions of the reference marks The plurality of differences between positions generates a variation model; based on the variation model and the reference tool model, an active alignment model is generated; and an inverse of the active alignment model is provided as a calibration model.

Images