TWI781642B - Static charge measuring sensor module and static charge monitoring system - Google Patents

Abstract

The invention relates to a static charge measurement sensor that can use a static charge measurement sensor module formed in a plate shape so as to be able to be as close as possible to the actual measurement position to monitor the static charge existing in a static elimination device, a static elimination object, etc. in real time. The module and the static charge monitoring system using the same. The static charge monitoring system of the present invention includes: a static charge measurement sensor module, which transmits the charged voltage of a charged plate into an electrical signal; AMP module Group, the AMP module receives the input electrical signal from the static charge measurement sensor module, transforms it into a voltage signal and amplifies it; ADC module, the ADC module transforms the voltage signal output from the AMP module into a digital signal; MCU module Based on the digital signal, the MCU module calculates the voltage average value during the predetermined period set in advance, detects the amount of static charge as the voltage value, and compares the amount of the detected static charge with the preset reference value, and senses the anion and the the balance change of cations; LED modules, LED modules display the balance change state of ions.

Description

Static charge measurement sensor module and static charge monitoring system using it

The present invention relates to an electrostatic charge measurement sensor module and an electrostatic charge monitoring system using the same. More specifically, it uses an electrostatic charge measurement sensor module that can be formed in a plate shape so as to be as close as possible to the actual measurement position , an electrostatic charge measurement sensor module for real-time monitoring of static charge for static elimination devices and static removal objects, and an electrostatic charge monitoring system using it.

In general, electrostatic charge sensing technology means a technology that senses external input and external state changes, the presence of charged objects, etc., using changes in electrostatic charge. This electrostatic charge sensing technology is used to sense user A touch sensing device that uses a liquid with a dielectric constant greater than air, powdery particles, etc., to sense the level of the measured object by using the electrostatic capacity that rises as it approaches the electrode included in the level sensing device ( As a device for measuring the level (height) of liquid, liquid particles or powder particles in industrial automation equipment or personal equipment, for example, it is used to measure the amount of refueling in automobile fuel tanks, etc. In automated factories, it is also used Used to measure the amount of injection that is filled and injected into the product in the filling box), using the change of electrostatic charge to sense Temperature sensing devices for temperature changes, etc., but recently, the demand for non-contact electrostatic charge sensors that can instantly sense the level of electrostatic charge generated in semiconductor or display device process operations is increasing.

Korean Authorized Patent No. 10-1554509 "Electrostatic charge sensor and its measuring device for charged body", as the applicant's application on July 1, 2014 and authorized on September 15, 2015, uses The conductive shutter plate of the conductive plate that separates the charged body at a predetermined distance makes the conductive plate generate a predetermined current, converts it into a voltage, senses and measures the amount of static charge existing in the charged body, and can instantly sense the presence of the charged body. Therefore, it has the effect that follow-up measures can be taken immediately against charged objects such as wafers or display devices that have static electricity above a predetermined level (for example, above a critical value).

However, in this prior art, there is a problem that it is difficult to install the electrostatic charge sensor at the actual measurement position due to the size of the electrostatic charge sensor and the conditions of the narrow installation site.

The purpose of the present invention is to solve the above problems, to provide a static charge measurement sensor module and a static charge monitoring system using it, in order to be installed in a position that can be as close as possible to the actual measurement position, it is formed in the form of a plate The electrostatic charge measurement sensor module can be installed in the production lines of thin films, semiconductors, and display devices, etc., to sense the static charges existing in thin films, wafers, and display devices, etc. in real time.

The purpose of the present invention is not limited to the above-mentioned purpose, and other unmentioned These are intended to be clearly understood by those skilled in the technical field of the present invention from the following description.

In order to achieve the above object, the electrostatic charge measurement sensor module of the present invention includes: a plate, the plate is made of metal material; a charged plate, the charged plate is combined on the top of the plate, and a part of the upper surface is gold-plated with conductive metal; the connecting part, the connecting part combined with one side of the electrified plate; and a fixing member, which is combined with the plate at the upper part of the connection part to fix the connection part.

In addition, the board may be composed of a metal material including aluminum, SUS, or the like that maintains the ground potential of the mounting equipment.

In addition, the connection part is a BNC (Bayone Neil-Conseman) connector which is a connector for a coaxial cable in which a connector formed on a coaxial cable is inserted into the connection part and rotated and locked.

In addition, the electrified plate protrudes from one side to form a connecting portion for connection with the connecting portion, and the connecting portion is configured to be detachable from the connecting portion.

Another point of view of the electrostatic charge monitoring system as an electrostatic charge monitoring system using the electrostatic charge measurement sensor module includes: the electrostatic charge measurement sensor module, the electrostatic charge measurement sensor module transmits the charged voltage of the charged plate It is an electrical signal; a controller, the controller includes an AMP module, an ADC module, an MCU module and an LED module, wherein the AMP module receives an input electrical signal from the electrostatic charge measurement sensor module, transforms it into a voltage signal and To amplify, the ADC (Analog to Digital Converter) module converts the voltage signal output from the AMP (Amplifier) module into a digital signal, and the MCU (Micro Program Controller) module calculates the voltage during the preset period based on the digital signal. Voltage average value and peak voltage (peak voltage), the amount of static charge is detected as a voltage value, based on the amount of detected static charge, compared with the preset reference value, the difference between anion and cation is sensed balance change, the LED (light emitting diode) module displays the ion balance change state; and a power supply device, the power supply device supplies power to the controller.

In addition, the electrostatic charge measurement sensor module includes: a plate, the plate is made of metal material; a charged plate, the charged plate is combined on the top of the plate, and a part of the upper surface is plated with conductive metal; a connecting part, the connecting part is combined on one side of the charged plate ; and a fixing member, the fixing member is combined with the plate at the upper part of the connecting part to fix the connecting part.

In addition, the plate can be made of a metal material including aluminum, SUS (stainless steel), or the like that maintains the ground potential of the mounting equipment.

In addition, the connection part is a BNC (Bayone Neil-Conseman) connector which is a connector for a coaxial cable in which a connector formed on a coaxial cable is inserted into the connection part and rotated and locked.

In addition, the electrified plate protrudes from one side to form a connecting portion for connection with the connecting portion, and the connecting portion is configured to be detachable from the connecting portion.

In addition, the electrostatic charge measurement sensor module further includes a fixing member, which is combined with the board on the upper part of the connection part to fix the connection part.

In addition, the controller also includes an LPF (Low-Pass Filter) module. The LPF module receives the input voltage signal, passes the signal in the low frequency region and cuts off the high frequency component.

In addition, the controller also includes a BPF (Band Pass Filter) module. The BPF module receives an input voltage signal, selects only the desired frequency band, and selectively outputs the required signal.

In addition, the controller can be connected with at least one electrostatic charge detector Quantity sensor module.

In addition, it also includes an administrator terminal connected to and controlling the controller, and the administrator terminal can be connected to at least one or more controllers.

In addition, when the detected voltage value of the MCU module is higher than the preset reference range, it is judged that the amount of positive charge has increased; when the voltage value is higher than the preset reference range, it is judged as a normal state; When the set reference range is set, it is judged that the negative charge is increasing; according to the judgment result, if the positive charge increases, the LED module will display in red, in the normal state, it will display in green, and if the negative charge increases, it will display in yellow .

In addition, the controller further includes a discharge circuit section that periodically discharges electric charges charged by the charging plate.

The electrostatic charge measurement sensor module of the present invention and the electrostatic charge monitoring system utilizing the same form the electrostatic charge measurement sensor module in the shape of a plate, so that it can be installed at a position as close as possible to the actual measurement position, thereby having It is easy to install and use even in a small space.

In addition, it can be installed in film, semiconductor and display device manufacturing lines, etc., to monitor the amount of static charge existing in various charged bodies such as films, wafers, display devices or specific spaces in real time. The effect of taking immediate follow-up measures on charged objects such as wafers and display devices.

In addition, when installed together with the static elimination device, it has the effect of being able to sense whether the static removal device is running or malfunctioning.

100: Electrostatic charge measurement sensor module

110: board

120: electrified plate

121: Gilded part

122: the first binding member

123: junction

130: connection part

140: fixed component

141: second binding member

200: controller

210: AMP module

220: ADC module

230: MCU module

240: LED module

250: Discharge circuit department

300: controller

400: Admin terminal

Fig. 1 is a diagram showing the composition of the electrostatic charge monitoring system of the present invention.

FIG. 2 is an exploded perspective view showing the electrostatic charge measurement sensor module of the present invention.

FIG. 3 is a diagram for explaining an example of a controller constituting the electrostatic charge monitoring system of the present invention.

FIG. 4 is a conceptual diagram for explaining the electrostatic charge monitoring system of the present invention.

The advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described in detail below together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, and can be embodied in various forms that are different from each other. However, this embodiment is provided to make the disclosure of the present invention more complete, and to fully explain to those skilled in the art to which the present invention belongs. To inform the scope of the invention, the present invention is defined only by the scope of the claims.

Referring to the accompanying drawings, the specific content required for implementing the present invention will be described in detail below. Regardless of the drawings, the same component symbols refer to the same constituent elements, and "and/or" includes the mentioned items and all combinations of more than one.

Although "first" and "second" etc. are used to describe various constituent elements, these constituent elements are of course not limited by these terms. These terms are only used to A constituent element is distinguished from other constituent elements. Therefore, the first component mentioned below falls within the technical idea of the present invention, and of course may also be the second component.

The terms used in this specification are for describing the embodiments, and are not intended to limit the present invention. In this specification, the singular also includes the plural as long as there is no particular mention in the sentence. "comprises" and/or "comprising" used in the specification does not exclude the existence or addition of one or more other constituent elements in addition to the mentioned constituent elements.

If there is no different definition, all terms (including technical and scientific terms) used in this specification can be used as meanings that can be commonly understood by those skilled in the art to which the present invention belongs. In addition, terms defined in dictionaries that are generally used should not be construed excessively or excessively unless they are clearly defined in particular.

Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

FIG. 1 is a diagram showing the configuration of an electrostatic charge monitoring system of the present invention.

Referring to FIG. 1 , the electrostatic charge monitoring system of the present invention generally includes an electrostatic charge measurement sensor module 100 , a controller 200 and a power supply device 300 .

Firstly, the electrostatic charge measurement sensor module 100 is installed at a measuring position for measuring the electrostatic charge in real time, and plays the role of transmitting the voltage charged on the charging plate 120 into an electrical signal.

FIG. 2 is an exploded perspective view showing the electrostatic charge measurement sensor module of the present invention.

Referring to FIG. 2 , the electrostatic charge measurement sensor module 100 is described in more detail. The electrostatic charge measurement sensor module 100 may include a plate 110 , a charging plate 120 , a connecting portion 130 and a fixing member 140 .

The board 110 may be made of a metal material including aluminum, SUS, etc. that maintains the ground potential of the mounting equipment.

In addition, the board 110 may form a receiving groove 111 for receiving a charged board.

The charging plate 120 is bonded to the upper part of the plate 110, and a gold-plated part 121 plated with a highly conductive metal including gold, copper, and silver is formed on a part of the upper surface.

Preferably, the charging plate 120 is placed in the receiving groove 111 and screwed together by the first coupling member 122 . At this time, a coupling hole is formed at the central portion of the charging plate 120 and the plate 110 so that the first coupling member 122 can be screwed. Female threads may be formed only on the inner peripheral surface of the coupling hole formed on the plate 110 . Wherein, the first combining member 122 may mean a common screw, and may be made of non-conductive material including plastic material.

In addition, a joint part 123 for connecting the connecting part 130 may protrude from one side of the charging plate 120 .

The connecting part 130 is as a connector combined with one side of the electrified plate 120, one side of the connecting part 130 can be configured to be detachable at the connecting part 123, and the other side is configured so that the connector connecting part of the cable can be folded.

Here, the connection part 130 may mean a BNC connector which is a connector for a coaxial cable in which a connector connection part formed on a coaxial cable is inserted into the connection part 130 and rotated and locked. Preferably, the connection part 130 means a 50Ω or 75Ω BNC connector as a connector for a common coaxial cable.

The fixing member 140 is combined with the board 110 so as to cover the connecting portion 130 on the upper portion of the connecting portion 130 , and plays a role of fixing and protecting the connecting portion 130 .

The fixing member 140 may be made of a resin material such as PEEK (polyether ether ketone), and is screwed to the plate 110 via the second coupling member 141 . At this time, the fixing member 140 and the plate 110 are formed with connection holes on both sides based on the connection portion 130 or the connection portion 123 so that the second connection member 141 can be screwed together. Preferably, coupling holes with female threads are formed on the lower parts of both sides of the fixing member 140 .

Therefore, the electrostatic charge measurement sensor module 100 having such a configuration is a sensor for measuring electrostatic charges, and can transmit the voltage charged by the charged plate 120 to the outside through the coaxial cable connected to the connection member 130 as an electric signal. , formed in the shape of a plate, has the effect that it can be installed and used as close as possible to the measurement position of use.

Then, the controller 200 receives an input electrical signal from the electrostatic charge measurement sensor module 100, uses the electrical signal to detect the amount of electrostatic charge, and based on the detected amount of electrostatic charge, compares it with a preset reference value to sense negative ions and positive ions. The balance of ions and the change of peak voltage (peak voltage) play the role of informing the balance of ions and the change state of peak voltage.

In more detail, the controller 200 may include an AMP module 210 , an ADC module 220 , an MCU module 230 and an LED module 240 .

The AMP module 210 plays the role of receiving an input electrical signal from the electrostatic charge measurement sensor module 100 , converting it into a voltage signal and amplifying it.

The AMP module 210 can be used to introduce the actual voltage and stably use the input voltage.

The ADC module 220 plays a role of converting the voltage signal output from the AMP module 210 into a digital signal. Wherein, the ADC module 220 means a common analog-digital converter (analog-digital converter: ADC).

The role played by the MCU module 230 is to calculate the average value and peak voltage (peak voltage) of the pre-set predetermined period based on the digital signal, and detect the amount of electrostatic charge as a voltage value. Based on the amount of detected electrostatic charge, Compared with the preset reference value, the balance of anion and cation and the peak voltage change are sensed.

As for the average value of the voltage, if you observe the actual voltage signal, it can be seen that the signal fluctuates repeatedly as it reflects various environmental factors such as the measurement distance. When the signal fluctuates, detect the maximum value (Max) and minimum value during a predetermined period (Min), from which the average value is calculated, so that the average value of the voltage can be obtained. At this time, the amplitude of the dither signal can mean the peak voltage. That is, the peak voltage means the magnitude of the maximum value and the minimum value (Generally speaking, the performance of an antistatic device (ionizer) is indicated by a peak voltage.).

As far as the perception of balance changes is concerned, when the detected voltage value (average value) is higher than the preset reference range, it is judged as a state where the amount of positive charge has increased, and when the voltage value is within the preset reference range, it is judged as In the normal state, if the voltage value is lower than the preset reference range, it is judged as a state in which the amount of anions has increased.

The LED module 240 can be configured so that according to the judgment result of the change state of the ion balance sensed by the MCU module 230, if the amount of positive charge increases, it will be displayed as red; when it is in a normal state, it will be displayed as green; if the amount of negative charge increases, it will be displayed as yellow.

In addition, the LED module 240 may be configured to display the average value (Vout) of the voltage calculated by the MCU module 230 .

On the other hand, the controller 200 may further include a discharge circuit unit 250 .

The discharge circuit unit 250 plays the role of periodically discharging the charge charged on the charging plate 120 . If the discharge circuit unit 250 is not provided, the charge continues to be charged to the charging plate 120 , so the measured value is not accurate enough.

FIG. 3 is a diagram for explaining an example of a controller constituting the electrostatic charge monitoring system of the present invention.

On the other hand, referring to FIG. 3 , the controller 200 may further include an LPF module 250 . The LPF module 250 receives an input voltage signal, passes signals in a low frequency region and cuts off high frequency components.

In addition, the controller 200 may further include a BPF module 260. The BPF module 260 receives an input voltage signal, selects only a desired frequency band, and selectively outputs a required signal.

Preferably, the LPF module 250 and the BPF module 260 are configured before the voltage signal is converted into a digital signal by the ADC module 220 .

Then, the power supply device 300 plays a role of supplying power to the controller 200 .

FIG. 4 is a conceptual diagram for explaining the electrostatic charge monitoring system of the present invention.

Referring to FIG. 4 , the electrostatic charge monitoring system of the present invention may further include an administrator terminal 400 connected to the controller 200 and controlling the controller 200 .

Wherein, the administrator terminal 400 means a commonly known desktop computer, and according to the embodiment, it can be understood as also covering the meaning of software components running in corresponding hardware devices. For example, a terminal can be understood as meaning that all include smart phones, tablet PCs, desktop PCs, notebook PCs, and user clients and applications driven in each device, and it is not limited thereto.

In addition, the administrator terminal 400 preferably has an RS-485 interface module, and is configured to send and receive data with the controller 200 through RS-485 communication.

As shown in FIG. 4 , the administrator terminal 400 may be connected to at least one or more controllers 200 .

On the other hand, although not shown, the controller 200 may be configured such that at least one electrostatic charge measurement sensor module 100 can be connected to one controller 200 . The electrostatic charge measurement sensor module 100 and the controller 200 can be configured at a ratio of 5:1. Of course, the electrostatic charge measurement sensor module 100 can be formed by variously changing the sensor size and composition ratio, for example, it can be small, According to 1:1 composition and so on.

The embodiments of the present invention have been described above with reference to the accompanying drawings, but those skilled in the art to which the present invention pertains can understand that the present invention can be implemented in other specific forms without changing its technical idea or essential features. Therefore, it should be understood that the above-described embodiments are illustrative and not restrictive in any respect.

100: Electrostatic charge measurement sensor module; 200: Controller 210: AMP module 220: ADC module 230: MCU module 240: LED module 250: Discharge circuit 300: Controller 400: Administrator terminal

Claims (12)

An electrostatic charge measurement sensor module, including: a plate made of metal material; a charged plate, combined with the upper part of the plate, and a part of the upper surface is plated with conductive metal to generate an electrical signal for inducing electrostatic charge; and A connecting part, combined with one side of the electrified plate, is used for transmitting the electric signal to the coaxial cable. The electrostatic charge measurement sensor module according to claim 1, wherein the board is made of a metal material including aluminum or SUS that maintains the ground potential of the mounting equipment. The electrostatic charge measurement sensor module as claimed in claim 1, wherein the connection part is a Neil-Conseman bayonet connector, which is used for inserting into the coaxial cable for rotation locking. The electrostatic charge measurement sensor module as claimed in claim 1, wherein the charging plate protrudes from one side to form a joint for connecting the connecting part, and the connecting part is configured to be disassembled at the joint. The electrostatic charge measurement sensor module as claimed in claim 1, further comprising a fixing member, which is combined with the board on the upper part of the connecting part to fix the connecting part. An electrostatic charge monitoring system, as an electrostatic charge monitoring system using an electrostatic charge measurement sensor module, comprising: an electrostatic charge measurement sensor module, which is the electrostatic charge measurement described in any one of request items 1 to 5 The sensor module is used for inductively generating an electrical signal; At least one controller, the controller includes an AMP module, an ADC module, an MCU module and an LED module, wherein the AMP module receives the electrical signal input from the electrostatic charge measurement sensor module , converted into a voltage signal and amplified, the ADC module converts the voltage signal output from the AMP module into a digital signal, and the MCU module calculates the average voltage and Peak voltage, which detects the amount of static charge as a voltage value, and compares the detected amount of static charge with a preset reference value to sense the balance change between anion and cation, and the LED module displays the state of ion balance change; and A power supply device supplies power to the controller. The electrostatic charge monitoring system according to claim 6, wherein the controller further includes an LPF module, which receives the input voltage signal, passes the signal in the low frequency region and cuts off the high frequency component. The electrostatic charge monitoring system according to claim 6, wherein the controller further includes a BPF module, which receives the input voltage signal, selects only the desired frequency band, and selectively outputs the required signal. The static charge monitoring system as claimed in claim 6, wherein the at least one static charge measurement sensor module is a plurality, and the controller is connected to one of the static charge measurement sensor modules. The electrostatic charge monitoring system according to claim 6, further comprising an administrator terminal connected to at least one of the controllers, and the administrator terminal controls the at least one controller. The electrostatic charge monitoring system as described in claim 6, wherein the MCU module determines that the positive charge is increasing when the detected voltage value is higher than the preset reference range, and the voltage value is the preset reference range When the voltage value is lower than the preset reference range, it is judged as a state where the amount of negative charge increases. According to the judgment result, if the positive charge increases, the LED module will display red; it is normal When in the negative state, it is displayed in green; if the negative charge is increasing, it is displayed in yellow. The electrostatic charge monitoring system as claimed in claim 6, wherein the controller further includes a discharge circuit part, which periodically discharges the charge stored in the charged plate of the electrostatic charge measurement sensor module.

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