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TWI778409B - Superconducting Composite Quantum Computing Circuit - Google Patents

Superconducting Composite Quantum Computing Circuit Download PDF

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TWI778409B
TWI778409B TW109129565A TW109129565A TWI778409B TW I778409 B TWI778409 B TW I778409B TW 109129565 A TW109129565 A TW 109129565A TW 109129565 A TW109129565 A TW 109129565A TW I778409 B TWI778409 B TW I778409B
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electrode
ground
qubit
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ground electrode
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TW202119659A (en
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中村泰信
田渕豊
玉手修平
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國立研究開發法人科學技術振興機構
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Abstract

超導複合量子計算電路具有:電路基板,在基板表面形成有包含量子位元與觀測量子位元之狀態之觀測電極之電路元件之配線圖案、及、身為接地電位之接地圖案,具有將在基板表面中之第1面形成之接地圖案、及、在身為第1面之反面之第2面形成之接地圖案在基板內部予以連接之貫通電極;第1接地電極,具有與在電路基板之第1面形成之接地圖案接觸之第1接觸部、及、與在第1面形成之配線圖案之形狀對應之形狀之第1非接觸部;第2接地電極,具有與在電路基板之第2面形成之接地圖案接觸之第2接觸部;在前端設有接觸彈簧銷之控制訊號線,該接觸彈簧銷是接觸與量子位元對應之位置,而將電路基板之第1面推擠在第1接地電極、或者、將電路基板之第2面推擠在第2接地電極;賦予勢能構件,將第1接地電極推擠在電路基板之第1面、或者、將第2接地電極推擠在電路基板之第2面;第1接地電極是透過第1延展部而與接地圖案接觸,該第1延展部是藉由具有比接地圖案之延展性還高之延展性之超導體而形成;第2接地電極是透過第2延展部而與接地圖案接觸,該第2延展部是藉由具有比接地圖案之延展性還高之延展性之超導體而形成。The superconducting composite quantum computing circuit has: a circuit substrate, a wiring pattern of a circuit element including a qubit and an observation electrode for observing the state of the qubit is formed on the surface of the substrate, and a ground pattern serving as a ground potential, which has a The ground pattern formed on the first surface of the substrate surface, and the ground pattern formed on the second surface, which is the opposite surface of the first surface, are connected inside the substrate through electrodes; the first ground electrode has a The ground pattern formed on the first surface is in contact with a first contact portion, and the first non-contact portion has a shape corresponding to the shape of the wiring pattern formed on the first surface. The second ground electrode has a second contact portion on the circuit board. The ground pattern formed on the surface contacts the second contact part; the front end is provided with a control signal line that contacts the spring pin, the contact spring pin is in contact with the position corresponding to the qubit, and pushes the first surface of the circuit substrate on the first surface of the circuit board. 1 ground electrode, or, push the second surface of the circuit board against the second ground electrode; impart potential energy to the member, push the first ground electrode against the first surface of the circuit board, or push the second ground electrode on the The second surface of the circuit board; the first ground electrode is in contact with the ground pattern through the first extension portion, and the first extension portion is formed by a superconductor having a ductility higher than that of the ground pattern; the second The ground electrode is in contact with the ground pattern through a second extending portion formed of a superconductor having a ductility higher than that of the ground pattern.

Description

超導複合量子計算電路Superconducting Composite Quantum Computing Circuit

發明領域 本發明是涉及超導複合量子計算電路。Field of Invention The present invention relates to a superconducting composite quantum computing circuit.

發明背景 與量子計算機相關之技術是正受到研究、開發。關於與量子計算機相關之技術,在用到超導量子位元之量子計算機進行2量子位元閘操作之方法已為人知(參考專利文獻1、2)。 先行技術文獻Background of the Invention Technologies related to quantum computers are being researched and developed. As a technique related to a quantum computer, a method of performing a 2-qubit gate operation in a quantum computer using a superconducting qubit is known (refer to Patent Documents 1 and 2). prior art literature

專利文獻 專利文獻1:美國專利第7613765號說明書 專利文獻2:美國專利申請案公開第2016/0380636號   說明書Patent Literature Patent Document 1: Specification of US Patent No. 7613765 Patent Document 2: US Patent Application Publication No. 2016/0380636 Specification

發明概要 發明欲解決之課題 為了實現用到超導電路之量子電腦而開發之習知之量子電路,是難以將演算上必要之量子位元間之不需要之相互作用完全關閉之電路構成。若關閉時有殘留之相互作用存在,則殘留之相互作用不但本身會成為量子位元之控制誤差之原因,還會成為將在量子位元發生之錯誤朝周圍傳播、擴散之因素。殘留之相互作用本身成為量子位元之控制誤差之原因,或是令在量子位元發生之錯誤朝周圍傳播、擴散,對安裝具有誤差耐性之量子電腦而言是大問題,且是導致不具有誤差耐性之近似型計算之計算精度下降之大問題。Summary of Invention The problem to be solved by the invention A conventional quantum circuit developed to realize a quantum computer using a superconducting circuit is a circuit configuration in which it is difficult to completely shut off unnecessary interactions between qubits that are computationally necessary. If there is residual interaction when it is turned off, the residual interaction will not only become the cause of the control error of the qubit itself, but also become the factor that propagates and diffuses the error that occurs in the qubit to the surrounding. The residual interaction itself becomes the cause of the control error of the qubit, or the error that occurs in the qubit is propagated and diffused around, which is a big problem for installing a quantum computer with error tolerance, and it is a problem that does not have the The big problem is that the calculation accuracy of the approximate calculation of error tolerance is reduced.

本發明是鑑於上述情形而建構之發明,提供可抑制量子位元間之相互作用或串擾之超導複合量子計算電路。 用以解決課題之手段The present invention is an invention constructed in view of the above circumstances, and provides a superconducting composite quantum computing circuit capable of suppressing interaction or crosstalk between qubits. means of solving problems

本發明是為了解決上述之課題而建構之發明,本發明之一態樣是一種超導複合量子計算電路,具有:電路基板,在基板表面形成有包含量子位元與觀測前述量子位元之狀態之觀測電極之電路元件之配線圖案、及接地電位即接地圖案,且具備貫通電極,前述貫通電極將在前述基板表面中之第1面形成之前述接地圖案、及在身為前述第1面之反面之第2面形成之前述接地圖案,在基板內部予以連接;第1接地電極,具備與在前述電路基板之前述第1面形成之前述接地圖案接觸之第1接觸部、及與在前述第1面形成之前述配線圖案之形狀對應之形狀之第1非接觸部;第2接地電極,具備與在前述電路基板之前述第2面形成之前述接地圖案接觸之第2接觸部;控制訊號線,在前端設有接觸彈簧銷,前述接觸彈簧銷是接觸與前述量子位元對應之位置,而將前述電路基板上推、或者將前述電路基板下推;及賦予勢能構件,將前述第1接地電極推擠在前述電路基板之前述第1面、或者將前述第2接地電極推擠在前述電路基板之前述第2面,前述第1接地電極是透過第1延展部而與前述接地圖案接觸,前述第1延展部是藉由具有比前述接地圖案之延展性還高之延展性之超導體而形成,前述第2接地電極是透過第2延展部而與前述接地圖案接觸,前述第2延展部是藉由具有比前述接地圖案之延展性還高之延展性之超導體而形成。The present invention is an invention constructed to solve the above-mentioned problems, and one aspect of the present invention is a superconducting composite quantum computing circuit comprising: a circuit substrate, a surface of the substrate having qubits formed on the substrate and observing the state of the qubits The wiring pattern of the circuit element of the observation electrode, and the ground potential, that is, the ground pattern, and the through electrode is provided with the ground pattern formed on the first surface of the substrate surface and the ground pattern formed on the first surface of the substrate surface. The ground pattern formed on the second surface of the reverse side is connected inside the substrate; the first ground electrode includes a first contact portion that is in contact with the ground pattern formed on the first surface of the circuit board, and a first contact portion that is in contact with the ground pattern formed on the first surface of the circuit board. a first non-contact portion having a shape corresponding to the shape of the wiring pattern formed on one side; a second ground electrode having a second contact portion that contacts the ground pattern formed on the second side of the circuit board; a control signal line , a contact spring pin is arranged at the front end, and the contact spring pin is in contact with the position corresponding to the qubit, and pushes the circuit substrate up or down the circuit substrate; and gives the potential energy member, grounding the first The electrode is pushed against the first surface of the circuit board, or the second ground electrode is pushed against the second surface of the circuit board, and the first ground electrode is in contact with the ground pattern through the first extension portion, The first extension portion is formed of a superconductor having a ductility higher than that of the ground pattern, the second ground electrode is in contact with the ground pattern through the second extension portion, and the second extension portion is It is formed by a superconductor having a ductility higher than that of the aforementioned ground pattern.

又,本發明之一態樣是在上述之超導複合量子計算電路更具有:賦予勢能構件,將前述第1接地電極推擠在前述電路基板之前述第1面、或者將前述第2接地電極推擠在前述電路基板之前述第2面,前述第1接地電極是透過第1延展部而與前述接地圖案接觸,前述第1延展部是藉由具有比前述接地圖案之延展性還高之延展性之超導體而形成,前述第2接地電極是透過第2延展部而與前述接地圖案接觸,前述第2延展部是藉由具有比前述接地圖案之延展性還高之延展性之超導體而形成。Furthermore, in one aspect of the present invention, in the above-mentioned superconducting composite quantum computing circuit, the above-mentioned superconducting composite quantum computing circuit further includes: a potential energy imparting member that pushes the first ground electrode against the first surface of the circuit substrate, or pushes the second ground electrode Pushed on the second surface of the circuit board, the first ground electrode is in contact with the ground pattern through a first extension portion, and the first extension portion is extended by having a higher ductility than the ground pattern. The second ground electrode is in contact with the ground pattern through a second extension portion, and the second extension portion is formed of a superconductor having a ductility higher than that of the ground pattern.

又,本發明之一態樣是在上述之超導複合量子計算電路中,前述量子位元包含:第1電極,與接地部具有第1耦合電容;及第2電極,與接地部具有比前述第1耦合電容還大之第2耦合電容,且藉由約瑟夫森接合而與前述第1電極連接。Another aspect of the present invention is that in the above-mentioned superconducting composite quantum computing circuit, the qubit includes: a first electrode having a first coupling capacitance with the ground portion; A second coupling capacitor having a larger first coupling capacitance is connected to the first electrode by a Josephson junction.

又,本發明之一態樣是在上述之超導複合量子計算電路中,前述電路基板在量子位元對應位置具有中心部電極、將該中心部電極之周圍圍住之周圍電極、及將該中心部電極與該周圍電極連接之連接電極,前述量子位元對應位置是前述第2面中之與在前述第1面形成之前述配線圖案所包含之前述量子位元之位置對應之位置。Another aspect of the present invention is that in the above-mentioned superconducting composite quantum computing circuit, the circuit substrate has a center electrode at a position corresponding to a qubit, a peripheral electrode surrounding the center electrode, and the In the connection electrode connecting the central electrode and the peripheral electrode, the position corresponding to the qubit is a position in the second surface corresponding to the position of the qubit included in the wiring pattern formed on the first surface.

又,本發明之一態樣是在上述之超導複合量子計算電路中,前述控制訊號線是在與形成於前述第1面之前述配線圖案所包含之前述量子位元之位置對應之位置,配置在前述第1接地電極具有之前述第1非接觸部之內部,或者是在與量子位元對應位置對應之位置,配置在前述第2接地電極具有之第2非接觸部之內部,而將控制訊號供給至前述量子位元,前述量子位元對應位置是前述第2面中之與在前述第1面形成之前述配線圖案所包含之前述量子位元之位置對應之位置。Furthermore, in one aspect of the present invention, in the above-mentioned superconducting composite quantum computing circuit, the control signal line is at a position corresponding to the position of the qubit included in the wiring pattern formed on the first surface, It is arranged inside the first non-contact part of the first ground electrode, or is arranged inside the second non-contact part of the second ground electrode at a position corresponding to the position corresponding to the qubit, and the A control signal is supplied to the qubit, and the position corresponding to the qubit is a position in the second surface corresponding to the position of the qubit included in the wiring pattern formed on the first surface.

又,本發明之一態樣是在上述之超導複合量子計算電路中,前述第1非接觸部及前述第2非接觸部之寬及高度是比前述控制訊號之波長還小之尺寸。Another aspect of the present invention is that in the above-mentioned superconducting composite quantum computing circuit, the width and height of the first non-contact portion and the second non-contact portion are smaller than the wavelength of the control signal.

又,本發明之一態樣是在上述之超導複合量子計算電路中,前述控制訊號之頻帶是微波頻帶。 發明效果Furthermore, in one aspect of the present invention, in the above-mentioned superconducting composite quantum computing circuit, the frequency band of the control signal is a microwave frequency band. Invention effect

根據本發明,可抑制量子位元間之相互作用或串擾。According to the present invention, interaction or crosstalk between qubits can be suppressed.

用以實施發明之形態 (實施形態) 以下,一面參考圖面、一面詳細說明本發明之實施形態。圖1是顯示與本實施形態相關之超導複合量子計算電路QC之構成之一例的圖。超導複合量子計算電路QC具有電路基板1、第1接地電極2、第2接地電極3。電路基板1是被第1接地電極2、第2接地電極3夾住。 將從電路基板1觀看時之具有第1基地電極2之側稱作上側,將從電路基板1觀看時之具有第2基地電極3之側稱作下側。Form for carrying out the invention (Embodiment) Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a diagram showing an example of the configuration of a superconducting composite quantum computing circuit QC according to the present embodiment. The superconducting composite quantum computing circuit QC includes a circuit board 1 , a first ground electrode 2 , and a second ground electrode 3 . The circuit board 1 is sandwiched by the first ground electrode 2 and the second ground electrode 3 . The side having the first base electrode 2 when viewed from the circuit board 1 is referred to as the upper side, and the side having the second base electrode 3 as viewed from the circuit substrate 1 is referred to as the lower side.

電路基板1之一例是矽等之介電體基板。電路基板1是在矽等之介電體基板之基板表面S上藉由超導膜而形成電路元件之配線圖案CP及接地圖案GP。另,當電路基板1之材質是矽的情況下,電路基板1是位在比預定之溫度還低之溫度,而該矽成為介電體。An example of the circuit substrate 1 is a dielectric substrate such as silicon. In the circuit substrate 1, the wiring pattern CP and the ground pattern GP of the circuit element are formed on the substrate surface S of a dielectric substrate such as silicon through a superconducting film. In addition, when the material of the circuit substrate 1 is silicon, the circuit substrate 1 is located at a temperature lower than a predetermined temperature, and the silicon becomes a dielectric.

配線圖案CP包含量子位元4、觀測量子位元4之狀態之觀測電極8、超導共振器7、電容器9。在圖1是顯示量子位元4-1~4-6來作為量子位元4之一例。在圖1是顯示超導共振器7-1~7-4來作為超導共振器7之一例。在圖1是顯示電容器9-1~9-4來作為電容器9之一例。The wiring pattern CP includes a qubit 4 , an observation electrode 8 for observing the state of the qubit 4 , a superconducting resonator 7 , and a capacitor 9 . In FIG. 1, qubits 4-1 to 4-6 are shown as an example of qubit 4. FIG. 1 shows superconducting resonators 7-1 to 7-4 as an example of the superconducting resonator 7. As shown in FIG. In FIG. 1 , capacitors 9 - 1 to 9 - 4 are shown as an example of the capacitor 9 .

接地圖案GP是接地電位。接地圖案GP有第1接地圖案GP1、第2接地圖案GP2。第1接地圖案GP1是形成在基板表面S中之上側之第1面S1。第2接地圖案GP2是形成在身為第1面S1之反面之第2面S2。第1接地圖案GP1是包含基板上表面接地電極11。在圖1是顯示基板上表面接地電極11-1~11-4來作為基板上表面接地電極11之一例。The ground pattern GP is a ground potential. The ground pattern GP includes a first ground pattern GP1 and a second ground pattern GP2. The first ground pattern GP1 is formed on the first surface S1 on the upper side of the substrate surface S. As shown in FIG. The second ground pattern GP2 is formed on the second surface S2 which is the opposite surface of the first surface S1. The first ground pattern GP1 includes the ground electrode 11 on the upper surface of the substrate. In FIG. 1 , the substrate upper surface ground electrodes 11 - 1 to 11 - 4 are displayed as an example of the substrate upper surface ground electrode 11 .

貫通電極10是將在電路基板1之第1面S1形成之第1接地圖案GP1、及、在身為第1面S1之反面之第2面S2形成之第2接地圖案GP2在基板內部予以連接。第1接地圖案GP1、第2接地圖案GP2是利用貫通電極10而電性接觸。在圖1是顯示貫通電極10-1、及貫通電極10-2來作為貫通電極10之一例。The through electrode 10 connects the first ground pattern GP1 formed on the first surface S1 of the circuit board 1 and the second ground pattern GP2 formed on the second surface S2 which is the opposite surface of the first surface S1 inside the substrate. . The first ground pattern GP1 and the second ground pattern GP2 are in electrical contact with each other by the through electrode 10 . In FIG. 1 , a through electrode 10 - 1 and a through electrode 10 - 2 are shown as an example of the through electrode 10 .

又,將在電路基板1之基板表面S上以如量子位元4-1~4-4般地鄰接之4個量子位元4作為頂點之四角形區域稱作觀測用區域X。在圖1是顯示觀測用區域X1及觀測用區域X2來作為觀測用區域X之一例。 將在電路基板1之介電體基板上以如鄰接之量子位元4-4、量子位元4-3、量子位元4-5、及量子位元4-6般地鄰接之4個量子位元4作為頂點之四角形區域稱作間隙接地區域Y。在圖1是顯示第1間隙接地區域Y1及第1間隙接地區域Y2來作為間隙接地區域Y之一例。 在基板表面S是反覆著觀測用區域X、及將觀測用區域X包圍之間隙接地區域Y的圖案。圖1是顯示該圖案中之一部分。In addition, a quadrangular area with four qubits 4 adjacent to each other as qubits 4-1 to 4-4 on the substrate surface S of the circuit substrate 1 as vertices is referred to as an observation area X. In FIG. 1, the observation area X1 and the observation area X2 are shown as an example of the observation area X. On the dielectric substrate of the circuit substrate 1, four qubits adjacent to each other such as qubits 4-4, qubits 4-3, qubits 4-5, and qubits 4-6 will be adjacent to each other. The quadrangular area with bit 4 as the vertex is called the gap ground area Y. In FIG. 1 , the first gap contact region Y1 and the first gap contact region Y2 are shown as an example of the gap contact region Y. As shown in FIG. The substrate surface S is a pattern in which the observation area X and the gap ground area Y surrounding the observation area X are repeated. Figure 1 shows a part of this pattern.

如上述,在電路基板1,於基板表面S形成有包含量子位元4與觀測量子位元4之狀態之觀測電極8之電路元件之配線圖案CP、及、接地電位之接地圖案GP。電路基板1具有將在基板表面S中之第1面S1形成之第1接地圖案GP1、及、在身為第1面S1之反面之第2面S2形成之第2接地圖案GP2在基板內部予以連接之貫通電極10。As described above, in the circuit substrate 1, the wiring pattern CP of the circuit element including the qubit 4 and the observation electrode 8 for observing the state of the qubit 4, and the ground pattern GP of the ground potential are formed on the substrate surface S. The circuit board 1 has a first ground pattern GP1 formed on the first surface S1 of the substrate surface S, and a second ground pattern GP2 formed on the second surface S2, which is the opposite surface of the first surface S1, inside the substrate. The through electrodes 10 are connected.

在第1接地電極2,於與基板表面S對向之面,配合基板表面S上之配線圖案CP而施加蝕刻加工後,形成超導膜。在第1接地電極2,利用該蝕刻加工而形成第1非接觸部20。 第1非接觸部20未與基板表面S中之第1面S1接觸。第1非接觸部20與第1面S1之間的距離之一例是如下:當控制訊號頻率是10GHz程度的情況下,距離是數十至數百微米。第1非接觸部20(第2非接觸部30亦同樣)之寬及高度是比控制訊號之波長還小的尺寸。第1非接觸部20是與在基板表面S中之第1面S1形成之配線圖案CP之形狀對應之形狀。On the surface of the first ground electrode 2 facing the substrate surface S, a superconducting film is formed after an etching process is performed in accordance with the wiring pattern CP on the substrate surface S. In the first ground electrode 2, the first non-contact portion 20 is formed by this etching process. The first non-contact portion 20 is not in contact with the first surface S1 of the substrate surfaces S. An example of the distance between the first non-contact portion 20 and the first surface S1 is as follows: when the frequency of the control signal is about 10 GHz, the distance is tens to hundreds of micrometers. The width and height of the first non-contact portion 20 (similar to the second non-contact portion 30 ) are smaller than the wavelength of the control signal. The first non-contact portion 20 has a shape corresponding to the shape of the wiring pattern CP formed on the first surface S1 of the substrate surface S. As shown in FIG.

另一方面,在第1接地電極2,於第1接地電極2之與基板表面S對向之面中之第1非接觸部20以外之部分具有第1接觸部21。 第1接觸部21是透過上表面超導微凸塊12-1而與在電路基板1之第1面S1形成之第1接地圖案GP1接觸。上表面超導微凸塊12-1之一例是具有比接地圖案GP之延展性還高之延展性的超導體。上表面超導微凸塊12-1是第1延展部12之一例。On the other hand, in the 1st ground electrode 2, the 1st contact part 21 is provided in the part other than the 1st non-contact part 20 in the surface which opposes the board|substrate surface S of the 1st ground electrode 2. As shown in FIG. The first contact portion 21 is in contact with the first ground pattern GP1 formed on the first surface S1 of the circuit board 1 through the upper surface superconducting microbumps 12-1. An example of the upper surface superconducting microbump 12-1 is a superconductor having a ductility higher than that of the ground pattern GP. The upper surface superconducting microbump 12 - 1 is an example of the first extension 12 .

在本實施形態,延展性是指展性或延性、或是展性與延性雙方之性質。在圖1是顯示第1接觸部21-1、第1接觸部21-2、及第1接觸部21-3來作為第1接觸部21之一例。In the present embodiment, ductility refers to ductility or ductility, or a property of both ductility and ductility. In FIG. 1 , the first contact portion 21 - 1 , the first contact portion 21 - 2 , and the first contact portion 21 - 3 are shown as an example of the first contact portion 21 .

如上述,第1接地電極2是透過利用具有比接地圖案GP之延展性還高之延展性的超導體而形成之第1延展部12,來接觸接地圖案GP。As described above, the first ground electrode 2 contacts the ground pattern GP through the first extension 12 formed by using a superconductor having a ductility higher than that of the ground pattern GP.

在此,參考圖2及圖3來說明第1非接觸部20及第1接觸部21。 圖2是與本實施形態相關之基板表面S中之觀測用區域X1的上視圖。 在圖2是顯示第1非接觸部20-3、第1非接觸部20-4、第1非接觸部20-5、及第1非接觸部20-6來作為第1非接觸部20之一例。Here, the first non-contact portion 20 and the first contact portion 21 will be described with reference to FIGS. 2 and 3 . FIG. 2 is a top view of the observation area X1 in the substrate surface S according to the present embodiment. 2 shows the first non-contact portion 20-3, the first non-contact portion 20-4, the first non-contact portion 20-5, and the first non-contact portion 20-6 as the first non-contact portion 20. An example.

圖3是顯示與本實施形態相關之第1非接觸部20及第1接觸部21之一例的圖。在圖3是顯示第1接觸部21-1~21-12來作為第1接觸部21之一例。第1非接觸部20是第1接觸部21以外之部分,如上述般地藉由蝕刻加工而形成。在圖3是顯示第1非接觸部20-1及第1非接觸部20-2來作為第1非接觸部20之一例。FIG. 3 is a diagram showing an example of the first non-contact portion 20 and the first contact portion 21 according to the present embodiment. FIG. 3 shows the first contact portions 21 - 1 to 21 - 12 as an example of the first contact portion 21 . The first non-contact portion 20 is a portion other than the first contact portion 21, and is formed by etching as described above. FIG. 3 shows the first non-contact portion 20 - 1 and the first non-contact portion 20 - 2 as an example of the first non-contact portion 20 .

如上述,第1接地電極2具有與在電路基板1之第1面S1形成之第1接地圖案GP1接觸之第1接觸部21、及、與在第1面S1形成之配線圖案CP之形狀對應之形狀之第1非接觸部20。As described above, the first ground electrode 2 has the first contact portion 21 that is in contact with the first ground pattern GP1 formed on the first surface S1 of the circuit board 1, and the shape of the wiring pattern CP formed on the first surface S1. The first non-contact portion 20 of the shape.

回到圖1來接著說明超導複合量子計算電路QC。 量子位元4是在超導薄膜上形成之超導量子位元。在此,參考圖4及圖5來說明量子位元4。 圖4是顯示與本實施形態相關之量子位元4之一例的圖。量子位元4具有內側圓盤40、外環41、約瑟夫森接合42、量子位元手部43-1、量子位元手部43-2。內側圓盤40、外環41、量子位元手部43-1、量子位元手部43-2分別是金屬電極。Returning to FIG. 1, the superconducting composite quantum computing circuit QC will be described next. Qubit 4 is a superconducting qubit formed on a superconducting thin film. Here, the qubit 4 will be described with reference to FIGS. 4 and 5 . FIG. 4 is a diagram showing an example of the qubit 4 according to the present embodiment. Qubit 4 has an inner disk 40, an outer ring 41, a Josephson junction 42, a qubit hand 43-1, and a qubit hand 43-2. The inner disk 40, the outer ring 41, the qubit hand 43-1, and the qubit hand 43-2 are metal electrodes, respectively.

內側圓盤40與外環41形成同心圓之金屬電極。內側圓盤40與外環41是藉由約瑟夫森接合42而接合。外環41是與量子位元手部43-1、量子位元手部43-2、量子位元手部43-3、量子位元手部43-4連接。在圖4並未顯示量子位元手部43-3、量子位元手部43-4。 外環41是被基板上表面接地電極11圍住周圍。基板上表面接地電極11-1及基板上表面接地電極11-2是基板上表面接地電極11之一例。The inner disk 40 and the outer ring 41 form concentric metal electrodes. The inner disc 40 and the outer ring 41 are joined by a Josephson joint 42 . The outer ring 41 is connected with the qubit hand 43-1, the qubit hand 43-2, the qubit hand 43-3, and the qubit hand 43-4. The qubit hand 43-3 and the qubit hand 43-4 are not shown in FIG. 4 . The outer ring 41 is surrounded by the ground electrode 11 on the upper surface of the substrate. The substrate upper surface ground electrode 11 - 1 and the substrate upper surface ground electrode 11 - 2 are examples of the substrate upper surface ground electrode 11 .

在此,參考圖5來說明身為量子位元4之等價電路之第1等價電路4C。 圖5是顯示與本實施形態相關之第1等價電路4C之一例的圖。在身為同心圓之金屬電極之內側圓盤40與外環41之間形成電容器Cdq。第1等價電路4C是利用電容器Cdq與源自約瑟夫森接合42之電感器而形成非線形之LC共振器LCR。電容器Cdq具有電容Cq。Here, the first equivalent circuit 4C which is the equivalent circuit of the qubit 4 will be described with reference to FIG. 5 . FIG. 5 is a diagram showing an example of the first equivalent circuit 4C according to the present embodiment. A capacitor Cdq is formed between the inner disk 40 and the outer ring 41 which are metal electrodes which are concentric circles. The first equivalent circuit 4C uses the capacitor Cdq and the inductor derived from the Josephson junction 42 to form a nonlinear LC resonator LCR. Capacitor Cdq has capacitance Cq.

將第1接地電極2、第2接地電極3、基板上表面接地電極11、及基板下表面接地電極13總稱為接地部GE。 在內側圓盤40與接地部GE之間形成第1電容器Cd1。第1電容器Cd1具有第1電容C1。第1電容C1主要是由內側圓盤40與基板上表面接地電極11的距離而決定。在圖4之例,內側圓盤40與基板上表面接地電極11的距離是由內側圓盤40之半徑而決定。 在外環41與接地部GE之間形成第2電容器Cd2。第2電容器Cd2具有第2電容C2。第2電容主要是由外環41與基板上表面接地電極11的距離而決定。外環41與基板上表面接地電極11的距離是由外環41之半徑而決定。The first ground electrode 2 , the second ground electrode 3 , the substrate upper surface ground electrode 11 , and the substrate lower surface ground electrode 13 are collectively referred to as a ground portion GE. The first capacitor Cd1 is formed between the inner disk 40 and the ground portion GE. The first capacitor Cd1 has a first capacitance C1. The first capacitance C1 is mainly determined by the distance between the inner disk 40 and the ground electrode 11 on the upper surface of the substrate. In the example of FIG. 4 , the distance between the inner disk 40 and the ground electrode 11 on the upper surface of the substrate is determined by the radius of the inner disk 40 . A second capacitor Cd2 is formed between the outer ring 41 and the ground portion GE. The second capacitor Cd2 has a second capacitance C2. The second capacitance is mainly determined by the distance between the outer ring 41 and the ground electrode 11 on the upper surface of the substrate. The distance between the outer ring 41 and the ground electrode 11 on the upper surface of the substrate is determined by the radius of the outer ring 41 .

在量子位元4與第1接地電極2之間、量子位元4與接地部GE之間可能發生不需要之輻射電場E。不需要之輻射電場E1是量子位元4與接地部GE之間之不需要之輻射電場E之一例。不需要之輻射電場E2是量子位元4與接地部GE之間之不需要之輻射電場E之一例。Unwanted radiation electric field E may occur between the qubit 4 and the first ground electrode 2 and between the qubit 4 and the ground portion GE. The unnecessary radiation electric field E1 is an example of the unnecessary radiation electric field E between the qubit 4 and the ground portion GE. The unwanted radiation electric field E2 is an example of the unwanted radiation electric field E between the qubit 4 and the ground portion GE.

在量子位元4,內側圓盤40之半徑及外環41之半徑是基於第2電容C2比第1電容C1大這樣之條件而決定。在量子位元4,以第2電容C2比第1電容C1大的方式而將外環41之半徑變大。 在量子位元4,因為第2電容C2比第1電容C1大,故由不需要之輻射電場E造成之電位之變動是透過外環41而往接地部GE傳播。亦即,第2電容器Cd2發揮所謂去耦電容之功能。In the qubit 4, the radius of the inner disk 40 and the radius of the outer ring 41 are determined based on the condition that the second capacitor C2 is larger than the first capacitor C1. In the qubit 4, the radius of the outer ring 41 is increased so that the second capacitance C2 is larger than the first capacitance C1. In the qubit 4, since the second capacitor C2 is larger than the first capacitor C1, the potential fluctuation caused by the unnecessary radiation electric field E propagates through the outer ring 41 to the ground portion GE. That is, the second capacitor Cd2 functions as a so-called decoupling capacitor.

因為由不需要之輻射電場E造成之電位之變動會透過外環41而往接地部GE傳播,故與第2電容C2不比第1電容C1大的情況相比,內側圓盤40與外環41之間的電位差是較不容易被由不需要之輻射電場E造成之電位之變動影響。在此,內側圓盤40與外環41之間的電位差是作為量子位元4用於記錄位元資訊之元件而發揮功能,故其必須是相對於不需要之輻射電場E而穩定。Since the fluctuation of the potential caused by the unnecessary radiated electric field E propagates to the ground portion GE through the outer ring 41 , the inner disk 40 and the outer ring 41 can be compared with the case where the second capacitor C2 is not larger than the first capacitor C1. The potential difference between is less susceptible to changes in potential caused by the unwanted radiated electric field E. Here, the potential difference between the inner disk 40 and the outer ring 41 functions as an element for the qubit 4 to record bit information, so it must be stable against the unwanted radiated electric field E.

如上述,量子位元4包含:內側圓盤40,與接地部GE具有第1電容C1;外環41,與接地部GE具有比第1電容C1還大之第2電容C2,藉由約瑟夫森接合42而與內側圓盤40連接。As described above, the qubit 4 includes: an inner disk 40 having a first capacitance C1 with the ground portion GE; an outer ring 41 having a second capacitance C2 with the ground portion GE that is larger than the first capacitance C1, by Josephson The joint 42 is connected to the inner disk 40 .

回到圖1來接著說明超導複合量子計算電路QC之構成。 第2接地電極3之一例是鋁電極。第2接地電極3具有第2非接觸部30與第2接觸部31。Returning to FIG. 1, the configuration of the superconducting composite quantum computing circuit QC will be described next. An example of the second ground electrode 3 is an aluminum electrode. The second ground electrode 3 has a second non-contact portion 30 and a second contact portion 31 .

第2非接觸部30未與電路基板1之基板表面S中之下側之面、亦即第2面S2接觸。第2接地電極3是在與量子位元對應位置對應之位置具有第2非接觸部30。在此,量子位元對應位置是指第2面S2中之、與在電路基板1之基板表面S中之上側之面、亦即第1面S1形成之配線圖案CP所包含之量子位元4之位置對應之位置。在圖1是顯示第2非接觸部30-1、及第2非接觸部30-2來作為第2非接觸部30之一例。The second non-contact portion 30 is not in contact with the second surface S2 , which is the lower surface of the substrate surface S of the circuit board 1 . The second ground electrode 3 has a second non-contact portion 30 at a position corresponding to the position corresponding to the qubit. Here, the position corresponding to the qubit refers to the qubit 4 included in the second surface S2 and the upper surface of the substrate surface S of the circuit board 1, that is, the qubit 4 included in the wiring pattern CP formed on the first surface S1 The location corresponds to the location. In FIG. 1 , the second non-contact portion 30 - 1 and the second non-contact portion 30 - 2 are shown as an example of the second non-contact portion 30 .

第2接觸部31是透過第2延展部14而與在第2面S2形成之第2接地圖案GP2接觸。在此,第2延展部14是銦等具有比接地圖案GP之延展性還高之延展性的超導體。第2延展部14有後述之導電接觸部14-1及導電接觸部14-2。 亦即,第2接地電極3是透過利用具有比接地圖案GP之延展性還高之延展性的超導體而形成之第2延展部14,來接觸接地圖案GP。The second contact portion 31 is in contact with the second ground pattern GP2 formed on the second surface S2 through the second extension portion 14 . Here, the second extended portion 14 is a superconductor such as indium having a ductility higher than that of the ground pattern GP. The second extension portion 14 has a conductive contact portion 14-1 and a conductive contact portion 14-2, which will be described later. That is, the second ground electrode 3 contacts the ground pattern GP through the second extension 14 formed by using a superconductor having a ductility higher than that of the ground pattern GP.

在第2非接觸部30之內部,控制訊號線5是相對於第2面S2從下側朝垂直方向延伸而配置。控制訊號線5有控制用訊號線5A與觀測用訊號線5B之2種類。控制用訊號線5A是用於朝量子位元4傳達控制訊號之控制訊號線5。 觀測用訊號線5B是用於將量子位元4之狀態之觀測結果作為訊號(稱作觀測訊號)而取出之控制訊號線5。觀測訊號之生成是如下:將探針訊號傳達通過觀測用訊號線5B,在觀測電極8之第2面S2反射該探針訊號,藉此,反映量子位元4之狀態之觀測結果而生成。Inside the second non-contact portion 30, the control signal line 5 is arranged to extend in the vertical direction from the lower side with respect to the second surface S2. The control signal line 5 has two types: the control signal line 5A and the observation signal line 5B. The control signal line 5A is a control signal line 5 for transmitting a control signal to the qubit 4 . The observation signal line 5B is a control signal line 5 for taking out the observation result of the state of the qubit 4 as a signal (referred to as an observation signal). The observation signal is generated as follows: the probe signal is transmitted through the observation signal line 5B, and the probe signal is reflected on the second surface S2 of the observation electrode 8 , thereby reflecting the observation result of the state of the qubit 4 .

關於控制訊號及觀測訊號,作為一例,通常是使用4~12吉赫帶之微波。亦即,在超導複合量子計算電路QC,控制訊號之頻帶是微波頻帶。As for the control signal and the observation signal, as an example, microwaves in the 4 to 12 GHz band are usually used. That is, in the superconducting composite quantum computing circuit QC, the frequency band of the control signal is the microwave frequency band.

量子位元之控制訊號即控制電流是傳播通過控制用訊號線5A,藉由在控制用訊號線5A之前端具備之接觸彈簧銷50A而往在基板下表面接地電極13形成之濾波器圖案6流入。流入至形成於電路基板1之下側之面即第2面S2之濾波器圖案6後的控制電流,從形成於第2面S2之濾波器圖案6通過幾個地方之細線而往基板下表面接地電極13回流。The control signal of the qubit, that is, the control current, propagates through the control signal line 5A, and flows into the filter pattern 6 formed by the ground electrode 13 on the lower surface of the substrate through the contact spring pin 50A provided at the front end of the control signal line 5A. . The control current flowing into the filter pattern 6 formed on the second surface S2, which is the lower surface of the circuit board 1, passes from the filter pattern 6 formed on the second surface S2 through thin lines in several places to the lower surface of the board. The ground electrode 13 returns.

如上述,第2接地電極3具有與在電路基板1之第2面S2形成之第2接地圖案GP2接觸之第2接觸部31。 又,控制訊號線5是在與量子位元對應位置對應之位置,配置在第2接地電極3具有之第2非接觸部30之內部,將控制訊號朝量子位元4供給,該量子位元對應位置是第2面S2中之與在第1面S1形成之配線圖案CP所包含之量子位元4之位置對應之位置。控制訊號線5是相對於配置量子位元4之電路基板1之基板表面S而從垂直之方向配置。亦即,控制訊號線5是基於3次元之構造而配置。As described above, the second ground electrode 3 has the second contact portion 31 that is in contact with the second ground pattern GP2 formed on the second surface S2 of the circuit board 1 . In addition, the control signal line 5 is arranged inside the second non-contact portion 30 of the second ground electrode 3 at a position corresponding to the position corresponding to the qubit, and supplies the control signal to the qubit 4, which is the qubit. The corresponding position is a position in the second surface S2 corresponding to the position of the qubit 4 included in the wiring pattern CP formed on the first surface S1. The control signal lines 5 are arranged in a vertical direction with respect to the substrate surface S of the circuit substrate 1 on which the qubits 4 are arranged. That is, the control signal line 5 is arranged based on the 3-dimensional structure.

在此,參考圖6及圖7來說明濾波器圖案6。 圖6是顯示與本實施形態相關之濾波器圖案6之一例的圖。濾波器圖案6是位在與量子位元4之位置對應之第2面S2之位置、亦即量子位元對應位置。Here, the filter pattern 6 will be described with reference to FIGS. 6 and 7 . FIG. 6 is a diagram showing an example of the filter pattern 6 according to the present embodiment. The filter pattern 6 is located at the position of the second surface S2 corresponding to the position of the qubit 4, that is, the position corresponding to the qubit.

濾波器圖案6具有中心部電極60與連接電極62。中心部電極60是圓形之電極。中心部電極60是隔著間隙部61而被基板下表面接地電極13圍住周圍。中心部電極60與基板下表面接地電極13是透過連接電極62而連接。在此,連接電極62是寬度數十微米之細線狀之金屬電極。 在圖6,間隙部61-1~61-4是間隙部61之一例。在圖6,連接電極62-1~62-4是連接電極62之一例。The filter pattern 6 has a center electrode 60 and a connection electrode 62 . The center electrode 60 is a circular electrode. The center portion electrode 60 is surrounded by the ground electrode 13 on the lower surface of the substrate with the gap portion 61 interposed therebetween. The center electrode 60 and the ground electrode 13 on the lower surface of the substrate are connected through the connection electrode 62 . Here, the connection electrode 62 is a thin wire-shaped metal electrode with a width of several tens of micrometers. In FIG. 6 , gap portions 61 - 1 to 61 - 4 are examples of the gap portion 61 . In FIG. 6 , the connection electrodes 62 - 1 to 62 - 4 are examples of the connection electrodes 62 .

在此,參考圖7來說明具備濾波器圖案6的情況下之量子位元4之等價電路、亦即第2等價電路4Ca。 圖7是顯示與本實施形態相關之第2等價電路4Ca之一例的圖。若將第2等價電路4Ca(圖7)與第1等價電路4C(圖5)予以比較,則除了控制用訊號線5A、電感器Ids、及第3電容器Cdc不同之外,其他之構成要素(第1電容器Cd1、第2電容器Cd2、LC共振器LCR、內側圓盤40、外環41、量子位元手部43-1、量子位元手部43-2、及接地部GE)具有之功能是相同。在圖7是以與圖5之第1等價電路4C不同之部分為中心而說明。Here, the equivalent circuit of the qubit 4 when the filter pattern 6 is provided, that is, the second equivalent circuit 4Ca will be described with reference to FIG. 7 . FIG. 7 is a diagram showing an example of the second equivalent circuit 4Ca related to the present embodiment. Comparing the second equivalent circuit 4Ca ( FIG. 7 ) with the first equivalent circuit 4C ( FIG. 5 ), the configuration is different except for the control signal line 5A, the inductor Ids, and the third capacitor Cdc The elements (first capacitor Cd1, second capacitor Cd2, LC resonator LCR, inner disk 40, outer ring 41, qubit hand 43-1, qubit hand 43-2, and ground GE) have The function is the same. In FIG. 7, the part different from the 1st equivalent circuit 4C of FIG. 5 is demonstrated mainly.

在控制用訊號線5A與內側圓盤40之間形成第3電容器Cdc。第3電容器Cdc具有第3電容Cc。 連接電極62是形成與第3電容器Cdc並聯之電感器Ids。電感器Ids是與控制用訊號線5A、接地部GE連接。電感器Ids具有電感Ls。 驅動電場ED是由流過控制用訊號線5A之控制電流造成之電場。A third capacitor Cdc is formed between the control signal line 5A and the inner disk 40 . The third capacitor Cdc has a third capacitance Cc. The connection electrode 62 forms an inductor Ids in parallel with the third capacitor Cdc. The inductor Ids is connected to the control signal line 5A and the ground portion GE. The inductor Ids has an inductance Ls. The driving electric field ED is an electric field caused by the control current flowing through the control signal line 5A.

電感器Ids、第3電容Cc、第1電容器Cd1及第2電容器Cd2形成高通濾波器。在此,由於第2電容器Cd2所具有之第2電容C2是充分地大於第1電容器Cd1所具有之第1電容C1,故在該高通濾波器,就第1電容器Cd1與第2電容器Cd2而言,與第1電容器Cd1之效果相比,第2電容器Cd2之效果是占大部分。該高通濾波器是讓頻率充分地高於微波頻帶之訊號通往控制用訊號線5A等之外部。如上述,量子位元4之控制訊號是使用微波。電感器Ids抑制了量子位元4之能量往外部洩漏之情形。The inductor Ids, the third capacitor Cc, the first capacitor Cd1, and the second capacitor Cd2 form a high-pass filter. Here, since the second capacitance C2 of the second capacitor Cd2 is sufficiently larger than the first capacitance C1 of the first capacitor Cd1, in this high-pass filter, the first capacitor Cd1 and the second capacitor Cd2 are , compared with the effect of the first capacitor Cd1, the effect of the second capacitor Cd2 accounts for most of the effect. The high-pass filter allows signals with frequencies sufficiently higher than the microwave band to pass to the outside of the control signal line 5A and the like. As mentioned above, the control signal of qubit 4 uses microwaves. The inductor Ids suppresses the leakage of the energy of the qubit 4 to the outside.

在此,說明身為電感器Ids之連接電極62的效果。 以從控制用訊號線5A供給之控制電流作為控制電流I,以控制電流I中之朝第3電容器Cdc側流動之電流成分作為電流Ic,以控制電流I中之朝電感器Ids側流動之電流成分作為電流IL。以控制電流I之大小作為大小i,以電流Ic之大小作為大小iC,以電流IL之大小作為大小iL。Here, the effect of the connection electrode 62 serving as the inductor Ids will be described. The control current supplied from the control signal line 5A is used as the control current I, the current component of the control current I flowing toward the third capacitor Cdc side is used as the current Ic, and the current flowing toward the inductor Ids side among the control current I is used as the current Ic. composition as the current IL. The magnitude of the control current I is taken as the magnitude i, the magnitude of the current Ic is taken as the magnitude iC, and the magnitude of the current IL is taken as the magnitude iL.

當電感器Ids之電感Ls是無限大的情況下,電流IL之大小iL變成零,電流Ic之大小iC是變成與控制電流I之大小i相等。當LC共振器LCR是共振的情況下,並聯阻抗之大小變成零。 在LC共振器LCR流動之電流是電流Ic之朝第1電容器Cd1側流動之電流成分與朝第2電容器Cd2側流動之電流成分當中,朝第2電容器Cd2側流動之電流成分。在LC共振器LCR流動之電流之大小是如式子(1)般表示。When the inductance Ls of the inductor Ids is infinite, the magnitude iL of the current IL becomes zero, and the magnitude iC of the current Ic becomes equal to the magnitude i of the control current I. When the LC resonator LCR is in resonance, the magnitude of the parallel impedance becomes zero. The current flowing in the LC resonator LCR is the current component flowing to the second capacitor Cd2 side among the current component flowing to the first capacitor Cd1 side and the current component flowing to the second capacitor Cd2 side of the current Ic. The magnitude of the current flowing in the LC resonator LCR is expressed as Equation (1).

[數學式1]

Figure 02_image001
[Mathematical formula 1]
Figure 02_image001

當電感Ls變小的情況下,電流IL之大小iL增加,電流Ic之大小iC減少。所以,根據上述之式子(1),當電感Ls變小的情況下,在LC共振器LCR流動之電流之大小減少。 在此,將控制電流I之大小,大小i是如式子(2)般地表示。When the inductance Ls becomes smaller, the magnitude iL of the current IL increases, and the magnitude iC of the current Ic decreases. Therefore, according to the above-mentioned equation (1), when the inductance Ls becomes small, the magnitude of the current flowing in the LC resonator LCR decreases. Here, the magnitude of the current I is to be controlled, and the magnitude i is expressed as in Equation (2).

[數學式2]

Figure 02_image003
[Mathematical formula 2]
Figure 02_image003

當第2電容C2充分地大於第3電容Cc的情況下,藉由式子(2),將控制電流I之大小,大小i是如式子(3)般地表示。When the second capacitance C2 is sufficiently larger than the third capacitance Cc, the magnitude of the current I is controlled by the equation (2), and the magnitude i is expressed as in the equation (3).

[數學式3]

Figure 02_image005
[Mathematical formula 3]
Figure 02_image005

當第2電容C2充分地大於第3電容Cc的情況下,藉由式子(3),電流Ic之大小iC是如式子(4)般地表示。When the second capacitance C2 is sufficiently larger than the third capacitance Cc, the magnitude iC of the current Ic is represented by the equation (3) as in the equation (4).

[數學式4]

Figure 02_image007
[Mathematical formula 4]
Figure 02_image007

在此,參考圖8來說明在第3電容器Cdc流動之電流Ic對於控制電流I之頻率ω之關係。 圖8是顯示與本實施形態相關之在第3電容器Cdc流動之電流Ic對於控制電流I之頻率ω之關係之一例的圖。曲線G1是顯示相對於控制電流I之頻率ω之對數的電流Ic之大小iC之對數。在此,曲線G1之橫軸是,控制電流I之頻率ω是藉由電感器Ids與第3電容器Cdc之LC共振器的共振頻率而規格化。Here, the relationship between the current Ic flowing in the third capacitor Cdc and the frequency ω of the control current I will be described with reference to FIG. 8 . FIG. 8 is a diagram showing an example of the relationship between the current Ic flowing in the third capacitor Cdc and the frequency ω of the control current I according to the present embodiment. The curve G1 shows the logarithm of the magnitude iC of the current Ic with respect to the logarithm of the frequency ω of the control current I. Here, the horizontal axis of the curve G1 is that the frequency ω of the control current I is normalized by the resonance frequency of the LC resonator of the inductor Ids and the third capacitor Cdc.

在此,LC共振器LCR的共振頻率是由式子(5)而表示。Here, the resonance frequency of the LC resonator LCR is represented by the formula (5).

[數學式5]

Figure 02_image009
[Mathematical formula 5]
Figure 02_image009

微波頻帶之LC共振器LCR的共振頻率是與橫軸之座標之值為0.1之附近之範圍X包含之值對應。因為控制電流I之頻率ω是微波頻帶,故電感器Ids是作為不讓比範圍X還低之頻率通過之高通濾波器而發揮功能。The resonance frequency of the LC resonator LCR in the microwave band corresponds to the value included in the range X in the vicinity of the value of the coordinate of the horizontal axis of 0.1. Since the frequency ω of the control current I is in the microwave band, the inductor Ids functions as a high-pass filter that does not pass frequencies lower than the range X.

如上述,電路基板1是在量子位元對應位置、亦即第2面S2中之與在第1面S1形成之第1接地圖案GP1所包含之量子位元4之位置對應之位置,具有中心部電極60、將中心部電極60之周圍圍住之基板下表面接地電極13、將該中心部電極60與基板下表面接地電極13連接之連接電極62。As described above, the circuit substrate 1 has a center at the position corresponding to the qubit, that is, the position in the second surface S2 corresponding to the position of the qubit 4 included in the first ground pattern GP1 formed on the first surface S1. The bottom electrode 60 , the ground electrode 13 on the lower surface of the substrate surrounding the center electrode 60 , and the connection electrode 62 connecting the center electrode 60 and the ground electrode 13 on the bottom surface of the substrate.

在此,參考圖9來說明超導複合量子計算電路QC之量子位元4之部分之截面。 圖9是顯示與本實施形態相關之超導複合量子計算電路QC之量子位元4之部分之截面之一例的圖。 控制用訊號線5A具備接觸彈簧銷50A、同軸線介電體部52A。接觸彈簧銷50A是在內部含有彈簧51A,藉由彈簧51A之彈力而將電路基板1推擠在第1接地電極2。同軸線介電體部52A是令接觸彈簧銷50A對第2接地電極3絕緣。同軸線介電體部52A之形狀是圓筒狀,在圖9是顯示同軸線介電體部52A-1及同軸線介電體部52A-2來作為同軸線介電體部52A之截面之一例。Here, a cross section of a portion of the qubit 4 of the superconducting composite quantum computing circuit QC will be described with reference to FIG. 9 . FIG. 9 is a diagram showing an example of a cross section of a portion of the qubit 4 of the superconducting composite quantum computing circuit QC according to the present embodiment. The control signal line 5A includes a contact spring pin 50A and a coaxial line dielectric portion 52A. The contact spring pin 50A includes a spring 51A inside, and pushes the circuit board 1 against the first ground electrode 2 by the elastic force of the spring 51A. The coaxial line dielectric portion 52A insulates the contact spring pin 50A from the second ground electrode 3 . The shape of the coaxial line dielectric body portion 52A is a cylindrical shape, and FIG. 9 shows the coaxial line line dielectric body portion 52A-1 and the coaxial line line dielectric body portion 52A-2 as the cross section of the coaxial line line dielectric body portion 52A. An example.

在基板下表面接地電極13-1與第2接觸部31-1之間具有導電接觸部14-1。在基板下表面接地電極13-2與第2接觸部31-2之間具有導電接觸部14-2。如上述,導電接觸部14-1及導電接觸部14-2是第2延展部14之一例。 另,亦可以是具有超導微凸塊來代替導電接觸部14-1及導電接觸部14-2。A conductive contact portion 14-1 is provided between the ground electrode 13-1 on the lower surface of the substrate and the second contact portion 31-1. A conductive contact portion 14-2 is provided between the ground electrode 13-2 on the lower surface of the substrate and the second contact portion 31-2. As described above, the conductive contact portion 14 - 1 and the conductive contact portion 14 - 2 are examples of the second extension portion 14 . In addition, superconducting micro-bumps may be provided instead of the conductive contact portion 14-1 and the conductive contact portion 14-2.

在此,超導複合量子計算電路QC是在第1接地電極2之上側具有將第1接地電極2推擠在電路基板1之第1面S1之賦予勢能構件P(未圖示)。在此,賦予勢能構件P是與彈簧51A彈力反向地將第1接地電極2推擠在電路基板1之第1面S1。 賦予勢能構件P是藉由將第1接地電極2推擠在電路基板1之第1面S1,而令第1接地電極2密接於電路基板1,且令電路基板1密接於第2接地電極3。賦予勢能構件P之一例是板片彈簧、或接觸彈簧銷。 藉由如此之構成,基板下表面接地電極13-1與基板下表面接地電極13-2是密接於第2接地電極3,該等之電位是與接地部GE之電位均一化。藉此,因為外環41之電位是透過第2電容C2而實質上亦與接地部GE同一,故可令往量子位元之控制訊號在幾乎沒有洩漏・串擾之情形下到達構成量子位元之內側圓盤40與約瑟夫森接合42。Here, the superconducting composite quantum computing circuit QC has a potential energy imparting member P (not shown) on the upper side of the first ground electrode 2 for pressing the first ground electrode 2 against the first surface S1 of the circuit board 1 . Here, the potential energy imparting member P pushes the first ground electrode 2 against the first surface S1 of the circuit board 1 in the opposite direction to the elastic force of the spring 51A. The potential energy imparting member P pushes the first ground electrode 2 against the first surface S1 of the circuit board 1 so that the first ground electrode 2 is in close contact with the circuit board 1 and the circuit board 1 is in close contact with the second ground electrode 3 . An example of the potential energy imparting member P is a leaf spring or a contact spring pin. With this configuration, the substrate lower surface ground electrode 13-1 and the substrate lower surface ground electrode 13-2 are in close contact with the second ground electrode 3, and these potentials are equalized with the potential of the ground portion GE. In this way, since the potential of the outer ring 41 passes through the second capacitor C2 and is substantially the same as that of the ground portion GE, the control signal to the qubit can be made to reach the qubit with almost no leakage and crosstalk. The inner disc 40 engages 42 with Josephson.

回到圖1來接著說明超導複合量子計算電路QC。 超導共振器7是藉由與量子位元4相互作用而讀取量子位元4之狀態。鄰接之4個超導共振器7-1~7-4是藉由觀測電極8而結合。如上述,讀取出之量子位元4之狀態是透過觀測電極8而在觀測用訊號線5B以觀測訊號被取出。Returning to FIG. 1, the superconducting composite quantum computing circuit QC will be described next. The superconducting resonator 7 reads the state of the qubit 4 by interacting with the qubit 4 . The adjacent four superconducting resonators 7 - 1 to 7 - 4 are connected by the observation electrode 8 . As described above, the read state of the qubit 4 is taken out by the observation signal on the observation signal line 5B through the observation electrode 8 .

在此,參考圖10及圖11來說明超導共振器7及觀測電極8。 圖10是顯示與本實施形態相關之超導共振器7及觀測電極8之一例的圖。超導共振器7之一例是在第1面S1上具有蛇行之形狀。另,只要超導共振器7可作為共振器而發揮功能,則超導共振器7之形狀是何種形狀皆無妨。例如,超導共振器7可以是具有直線狀之形狀來代替蛇行之形狀,亦可以是具有彎曲成U字狀之形狀來代替蛇行之形狀。 觀測電極8具有觀測基板貫通電極80。除了在電路基板1之部位不同之外,觀測基板貫通電極80是與貫通電極10具有同一特徵。Here, the superconducting resonator 7 and the observation electrode 8 will be described with reference to FIGS. 10 and 11 . FIG. 10 is a diagram showing an example of the superconducting resonator 7 and the observation electrode 8 according to the present embodiment. An example of the superconducting resonator 7 has a meandering shape on the first surface S1. In addition, as long as the superconducting resonator 7 can function as a resonator, the shape of the superconducting resonator 7 may be any shape. For example, the superconducting resonator 7 may have a straight shape instead of a meandering shape, or may have a U-shaped curved shape instead of a meandering shape. The observation electrode 8 has the observation substrate through electrode 80 . The observation substrate through-electrode 80 has the same characteristics as the through-electrode 10 except that the position of the circuit board 1 is different.

圖11是顯示與本實施形態相關之超導複合量子計算電路QC之觀測電極8之部分之截面之一例的圖。觀測基板貫通電極80之形狀是圓筒狀,在圖11是顯示觀測基板貫通電極80-1及觀測基板貫通電極80-2來作為觀測基板貫通電極80之截面之一例。FIG. 11 is a diagram showing an example of a cross section of a portion of the observation electrode 8 of the superconducting composite quantum computing circuit QC according to the present embodiment. The shape of the observation substrate through-electrode 80 is a cylindrical shape, and FIG. 11 shows the observation substrate through-electrode 80 - 1 and the observation substrate through-electrode 80 - 2 as an example of the cross section of the observation substrate through-electrode 80 .

觀測用訊號線5B具有接觸彈簧銷50B、同軸線介電體部52B。接觸彈簧銷50B是在內部含有彈簧51B,藉由彈簧51B之彈力而將電路基板1推擠在第1接地電極2。同軸線介電體部52B是令接觸彈簧銷50B對第2接地電極3絕緣。同軸線介電體部52B之形狀是圓筒狀,在圖11是顯示同軸線介電體部52B-1及同軸線介電體部52B-2來作為同軸線介電體部52B之截面之一例。The observation signal line 5B has a contact spring pin 50B and a coaxial line dielectric portion 52B. The contact spring pin 50B includes a spring 51B inside, and pushes the circuit board 1 against the first ground electrode 2 by the elastic force of the spring 51B. The coaxial line dielectric portion 52B insulates the contact spring pin 50B from the second ground electrode 3 . The shape of the coaxial dielectric portion 52B is cylindrical, and FIG. 11 shows the coaxial dielectric portion 52B-1 and the coaxial dielectric portion 52B-2 as the cross section of the coaxial dielectric portion 52B. An example.

另,雖然本實施形態說明的情況是令控制訊號線5從第2接地電極3具有之第2非接觸部30之內部,相對於基板表面S之第2面S2從下側朝垂直方向延伸而配置,但並非限定於此。控制訊號線5亦可以是從第1接地電極2具有之第1非接觸部20之內部,從上側朝垂直方向延伸而配置於基板表面S之第1面S1。 亦即,控制訊號線5亦可以是在與形成於第1面S1之配線圖案CP含有之量子位元4之位置對應之位置,配置在第1接地電極2具有之第1非接觸部20之內部。In addition, although this embodiment describes the case where the control signal line 5 extends from the inside of the second non-contact portion 30 of the second ground electrode 3 to the second surface S2 of the substrate surface S from the lower side in the vertical direction. configuration, but not limited to this. The control signal line 5 may be arranged on the first surface S1 of the substrate surface S by extending from the inside of the first non-contact portion 20 of the first ground electrode 2 in the vertical direction from the upper side. That is, the control signal line 5 may be arranged at a position corresponding to the position of the qubit 4 included in the wiring pattern CP formed on the first surface S1, and arranged on the first non-contact portion 20 of the first ground electrode 2. internal.

當控制訊號線5是從第1接地電極2具有之第1非接觸部20之內部、從上側朝垂直方向沿伸而配置在基板表面S之第1面S1的情況下,超導複合量子計算電路QC亦可以不具有濾波器圖案6。When the control signal line 5 is arranged on the first surface S1 of the substrate surface S from the inside of the first non-contact portion 20 of the first ground electrode 2 and extending from the upper side in the vertical direction, the superconducting composite quantum computing The circuit QC may also not have the filter pattern 6 .

又,控制訊號線5亦可以是依各個量子位元4及觀測電極8而有:從第2接地電極3具有之第2非接觸部30之內部、相對於基板表面S之第2面S2從下側朝垂直方向延伸而配置的情況;及從第1接地電極2具有之第1非接觸部20之內部、從上側朝垂直方向延伸而配置在基板表面S之第1面S1的情況。In addition, the control signal line 5 may also be provided for each qubit 4 and the observation electrode 8: from the inside of the second non-contact part 30 of the second ground electrode 3, from the second surface S2 opposite to the substrate surface S from the inside of the second non-contact part 30 of the second ground electrode 3 The case where the lower side extends vertically, and the case where the first surface S1 of the substrate surface S extends from the inside of the first non-contact portion 20 of the first ground electrode 2 and extends vertically from the upper side.

另,雖然本實施形態說明的情況是令賦予勢能構件P將第1接地電極2推擠在電路基板1之第1面S1,但並非限定於此。賦予勢能構件P亦可以是將第2接地電極3推擠在電路基板1之第2面S2。又,超導複合量子計算電路QC亦可以是具有將第1接地電極2推擠在電路基板1之第1面S1之賦予勢能構件、及、將第2接地電極3推擠在電路基板1之第2面S2之賦予勢能構件的2種類賦予勢能構件。In addition, although this embodiment demonstrated the case where the potential energy imparting member P pushed the 1st ground electrode 2 to the 1st surface S1 of the circuit board 1, it is not limited to this. The potential energy imparting member P may push the second ground electrode 3 against the second surface S2 of the circuit board 1 . Also, the superconducting composite quantum computing circuit QC may have a potential energy imparting member that pushes the first ground electrode 2 against the first surface S1 of the circuit board 1 , and a member that pushes the second ground electrode 3 against the circuit board 1 . The two types of potential energy imparting members of the second surface S2 are potential energy imparting members.

如以上之說明,與本實施形態相關之超導複合量子計算電路QC具有電路基板1、第1接地電極2、第2接地電極3。 電路基板1是在基板表面S形成有包含量子位元4與觀測量子位元4之狀態之觀測電極8之電路元件之配線圖案CP、及、身為接地電位之接地圖案GP,具有將在基板表面S中之第1面S1形成之第1接地圖案GP1、及、在身為第1面S1之反面之第2面S2形成之第2接地圖案GP2在基板內部予以連接之貫通電極10。 第1接地電極2具有與在電路基板1之第1面S1形成之第1接地圖案GP1接觸之第1接觸部21、及、與在第1面S1形成之配線圖案CP之形狀對應之形狀之第1非接觸部20。 第2接地電極3具有與在電路基板1之第2面S2形成之第2接地圖案GP2接觸之第2接觸部31。As described above, the superconducting composite quantum computing circuit QC according to the present embodiment includes the circuit board 1 , the first ground electrode 2 , and the second ground electrode 3 . The circuit substrate 1 is formed on the substrate surface S with the wiring pattern CP of the circuit element including the qubit 4 and the observation electrode 8 for observing the state of the qubit 4, and the ground pattern GP which is a ground potential, and has The through-electrode 10 which connects the 1st ground pattern GP1 formed on the 1st surface S1 among the surface S, and the 2nd ground pattern GP2 formed on the 2nd surface S2 which is the opposite surface of the 1st surface S1 in the board|substrate. The first ground electrode 2 has a first contact portion 21 in contact with the first ground pattern GP1 formed on the first surface S1 of the circuit board 1, and a shape corresponding to the shape of the wiring pattern CP formed on the first surface S1. The first non-contact portion 20 . The second ground electrode 3 has a second contact portion 31 that is in contact with the second ground pattern GP2 formed on the second surface S2 of the circuit board 1 .

藉由此構成,與本實施形態相關之超導複合量子計算電路QC可抑制量子位元4之上側之空間或電路基板1內之不需要之電磁模式(電磁波之共振現象)之發生或擴展,故可抑制量子位元間之相互作用或串擾。With this configuration, the superconducting composite quantum computing circuit QC related to the present embodiment can suppress the occurrence or expansion of an unnecessary electromagnetic mode (resonance phenomenon of electromagnetic waves) in the space above the qubit 4 or in the circuit substrate 1, Therefore, interaction or crosstalk between qubits can be suppressed.

在超導複合量子計算電路QC,第1接地電極2將量子位元4之上側之空間變成比不具有第1接地電極2的情況下還小。在量子位元4之上側之空間可能發生不需要之電磁模式。超導複合量子計算電路QC可令不需要之電磁模式之模式頻率離開量子位元4之頻率。又,超導複合量子計算電路QC可藉由將在量子位元4之上側之空間之不需要之電磁模式之擴展予以局部化,而抑制量子位元4之控制訊號之往廣範圍之串擾。 貫通電極10可抑制電路基板1內之不需要之電磁模式之發生、抑制量子位元4間之控制訊號之往廣範圍之串擾。In the superconducting composite quantum computing circuit QC, the first ground electrode 2 makes the space above the qubit 4 smaller than that in the case where the first ground electrode 2 is not provided. Unwanted electromagnetic modes may occur in the space above qubit 4. The superconducting composite quantum computing circuit QC can shift the mode frequency of the unwanted electromagnetic mode away from the frequency of the qubit 4. Also, the superconducting composite quantum computing circuit QC can suppress the wide-ranging crosstalk of the control signal of the qubit 4 by localizing the expansion of unwanted electromagnetic modes in the space above the qubit 4. The through electrode 10 can suppress the occurrence of unwanted electromagnetic modes in the circuit substrate 1 and suppress the crosstalk of the control signal between the qubits 4 in a wide range.

又,與本實施形態相關之超導複合量子計算電路QC更具有將第1接地電極2推擠在電路基板1之第1面S1、或者、將第2接地電極3推擠在電路基板1之第2面S2之賦予勢能構件P。 在此,第1接地電極2是透過利用具有比接地圖案GP之延展性還高之延展性之超導體而形成之第1延展部12,來與接地圖案GP接觸。 第2接地電極3是透過利用具有比接地圖案GP之延展性還高之延展性之超導體而形成之第2延展部14,來與接地圖案GP接觸。In addition, the superconducting composite quantum computing circuit QC related to the present embodiment further includes pressing the first ground electrode 2 against the first surface S1 of the circuit board 1 , or pressing the second ground electrode 3 against the circuit board 1 . The potential energy imparting member P of the second surface S2. Here, the first ground electrode 2 is in contact with the ground pattern GP through the first extension 12 formed by using a superconductor having a ductility higher than that of the ground pattern GP. The second ground electrode 3 is in contact with the ground pattern GP through the second extension 14 formed by using a superconductor having a ductility higher than that of the ground pattern GP.

藉由此構成,與本實施形態相關之超導複合量子計算電路QC可將第1接地電極2與電路基板1之第1面S1上之接地圖案GP之間之空隙、或者、第2接地電極3與電路基板1之第2面S2上之接地圖案GP之間之空隙去除,故可抑制在鄰接之控制訊號線5傳播之控制用訊號或觀測用訊號相互間之串擾。With this configuration, the superconducting composite quantum computing circuit QC according to the present embodiment can connect the gap between the first ground electrode 2 and the ground pattern GP on the first surface S1 of the circuit board 1, or the second ground electrode. The gap between 3 and the ground pattern GP on the second surface S2 of the circuit board 1 is removed, so that the crosstalk between the control signals and the observation signals propagating on the adjacent control signal lines 5 can be suppressed.

又,在與本實施形態相關之超導複合量子計算電路QC,量子位元4包含:第1電極(在此一例是內側圓盤40),與接地部GE具有第1耦合電容(在此一例是第1電容C1);第2電極(在此一例是外環41),與接地部GE具有比第1耦合電容(在此一例是第1電容C1)還大之第2耦合電容(在此一例是第2電容C2),藉由約瑟夫森接合42而與第1電極(在此一例是內側圓盤40)連接。In addition, in the superconducting composite quantum computing circuit QC related to the present embodiment, the qubit 4 includes a first electrode (in this example, the inner disk 40 ), and a first coupling capacitor (in this example, the inner disk 40 ) with the ground portion GE is the first capacitor C1); the second electrode (in this example, the outer ring 41) and the ground portion GE have a second coupling capacitance (here the One example is the second capacitor C2 ), which is connected to the first electrode (in this example, the inner disk 40 ) by the Josephson junction 42 .

藉由此構成,與本實施形態相關之超導複合量子計算電路QC可利用外環41而遮蔽在構成量子位元4之金屬電極(在此一例是內側圓盤40、及外環41)傳播之不需要之電磁模式,故可抑制量子位元4之錯誤率。在此,在構成量子位元4之金屬電極(在此一例是內側圓盤40、及外環41)傳播之不需要之電磁模式是例如即便具有第1接地電極2、貫通電極10等仍殘存之不需要之電磁模式。With this configuration, the superconducting composite quantum computing circuit QC related to the present embodiment can be shielded by the outer ring 41 from the metal electrodes (in this example, the inner disk 40 and the outer ring 41 ) constituting the qubit 4 from propagating. Therefore, the error rate of qubit 4 can be suppressed. Here, the unwanted electromagnetic mode propagating through the metal electrodes (in this example, the inner disk 40 and the outer ring 41 ) constituting the qubit 4 remains, for example, even with the first ground electrode 2 , the through electrode 10 , and the like. The unwanted electromagnetic mode.

習知,形成量子位元之二個金屬電極是相對於接地電極而對稱,或者其中一側之金屬電極是接地。二個金屬電極相對於接地電極而對稱是指:二個金屬電極中之一金屬電極與該接地電極之間之耦合電容、及、二個金屬電極中之另一金屬電極與該接地電極之間之耦合電容相等。又,形成量子位元之二個金屬電極中之一側之金屬電極接地是意指:一側之金屬電極具有與接地電極同等之功能。 與本實施形態相關之超導複合量子計算電路QC是藉由不讓形成量子位元之二個金屬電極中之一側之金屬電極對接地電極短路,而可排除接地電極面之電位波動之影響。Conventionally, two metal electrodes forming qubits are symmetrical with respect to the ground electrode, or one side of the metal electrode is grounded. The symmetry of the two metal electrodes with respect to the ground electrode means: the coupling capacitance between one of the two metal electrodes and the ground electrode, and between the other metal electrode of the two metal electrodes and the ground electrode The coupling capacitances are equal. In addition, the grounding of the metal electrode on one side of the two metal electrodes forming the qubit means that the metal electrode on one side has the same function as the ground electrode. The superconducting composite quantum computing circuit QC related to this embodiment can eliminate the influence of potential fluctuations on the ground electrode surface by preventing the metal electrode on one side of the two metal electrodes forming the qubit from being short-circuited to the ground electrode. .

又,在與本實施形態相關之超導複合量子計算電路QC,電路基板1是在量子位元對應位置、亦即第2面S2中之與在第1面S1形成之第1接地圖案GP1所包含之量子位元4之位置對應之位置,具有中心部電極60、將中心部電極60之周圍圍住之周圍電極(在此一例是基板下表面接地電極13)、將中心部電極60與周圍電極(在此一例是基板下表面接地電極13連接之連接電極62。In addition, in the superconducting composite quantum computing circuit QC related to the present embodiment, the circuit board 1 is located at the position corresponding to the qubit, that is, on the second surface S2 and the first ground pattern GP1 formed on the first surface S1. The position corresponding to the position of the included qubit 4 has the center electrode 60, the surrounding electrodes (in this example, the ground electrode 13 on the lower surface of the substrate) surrounding the center electrode 60, and the center electrode 60 and the surrounding electrodes. The electrode (in this example, the connection electrode 62 connected to the ground electrode 13 on the lower surface of the substrate.

藉由此構成,與本實施形態相關之超導複合量子計算電路QC可抑制當量子位元4之控制關閉時因為量子位元4與控制訊號線5之相互作用而造成量子位元4之能源往外部洩漏之情形,故可抑制量子位元4之計算之錯誤率。With this configuration, the superconducting composite quantum computing circuit QC related to this embodiment can suppress the energy of the qubit 4 caused by the interaction between the qubit 4 and the control signal line 5 when the control of the qubit 4 is turned off. In the case of leakage to the outside, the error rate of the calculation of the qubit 4 can be suppressed.

又,與本實施形態相關之超導複合量子計算電路QC更具有控制訊號線5。控制訊號線5是在與在第1面S1形成之配線圖案CP所包含之量子位元4之位置對應之位置,配置在第1接地電極2具有之第1非接觸部20之內部,或者,在與量子位元對應位置對應之位置,配置在第2接地電極3具有之第2非接觸部之內部,而將控制訊號朝量子位元4供給,該量子位元對應位置是第2面S2中之與在第1面S1形成之配線圖案CP所包含之量子位元4之位置對應之位置。In addition, the superconducting composite quantum computing circuit QC related to the present embodiment further includes a control signal line 5 . The control signal line 5 is arranged inside the first non-contact portion 20 of the first ground electrode 2 at a position corresponding to the position of the qubit 4 included in the wiring pattern CP formed on the first surface S1, or, The position corresponding to the position corresponding to the qubit is arranged inside the second non-contact part of the second ground electrode 3, and the control signal is supplied to the qubit 4, the position corresponding to the qubit is the second surface S2 Among them, the position corresponds to the position of the qubit 4 included in the wiring pattern CP formed on the first surface S1.

藉由此構成,與本實施形態相關之超導複合量子計算電路QC可在電路基板1之基板表面S上不論量子位元4之數量而確保一定之配線圖案CP之密度,故可抑制在電路基板1之基板表面S上之配線圖案CP之密度變大之情形。With this configuration, the superconducting composite quantum computing circuit QC according to the present embodiment can secure a constant density of the wiring pattern CP on the substrate surface S of the circuit substrate 1 irrespective of the number of qubits 4, so that it is possible to suppress the density of the wiring pattern CP. The case where the density of the wiring pattern CP on the substrate surface S of the substrate 1 increases.

習知,控制訊號線是從基板之側面導入,從基板之周邊來對配置在基板之表面之二維平面之量子位元進行控制。在習知之電路,電路之配線密度是隨著量子位元之數量之增大而增加,遲早會達到極限。 另一方面,與本實施形態相關之超導複合量子計算電路QC是採用將控制訊號線5配置在電路基板1之下側之第2面S2或上側之第1面S1之三維構造,藉此,可不論量子位元4之數量而確保一定之配線圖案CP之密度。因為與本實施形態相關之超導複合量子計算電路QC可不論量子位元4之數量而確保一定之配線圖案CP之密度,故可保障適合讓電路大規模化之擴張性。Conventionally, the control signal lines are introduced from the side of the substrate to control the qubits arranged on the two-dimensional plane on the surface of the substrate from the periphery of the substrate. In conventional circuits, the wiring density of the circuit increases with the number of qubits and reaches a limit sooner or later. On the other hand, the superconducting composite quantum computing circuit QC related to the present embodiment adopts a three-dimensional structure in which the control signal line 5 is arranged on the second surface S2 on the lower side or the first surface S1 on the upper side of the circuit board 1, thereby , regardless of the number of qubits 4 , a certain density of the wiring pattern CP can be ensured. Since the superconducting composite quantum computing circuit QC related to the present embodiment can ensure a certain density of the wiring pattern CP regardless of the number of qubits 4, it can ensure the scalability suitable for circuit scale.

又,在與本實施形態相關之超導複合量子計算電路QC,控制訊號線5朝量子位元4供給之控制訊號之頻帶是微波頻帶。In addition, in the superconducting composite quantum computing circuit QC related to the present embodiment, the frequency band of the control signal supplied from the control signal line 5 to the qubit 4 is the microwave frequency band.

因為與本實施形態相關之超導複合量子計算電路QC可在控制、觀測方面使用微波訊號,故與習知之利用RF(Radio Frequency,無線電頻率)之控制相比,可令在接地電極流動之表面電流面積最小化而抑制電極電位之波動。Since the superconducting composite quantum computing circuit QC related to this embodiment can use microwave signals for control and observation, it can make the surface flowing on the ground electrode compared with the conventional control using RF (Radio Frequency). The current area is minimized and the fluctuation of the electrode potential is suppressed.

(構成量子位元之金屬電極之變形例) 雖然在上述之實施形態說明的情況是令身為構成量子位元4之金屬電極之內側圓盤40、外環41形成同心圓之金屬電極,但構成量子位元4之金屬電極之形狀並非限定於同心圓。 在此,參考圖12~18來說明構成量子位元4之金屬電極之形狀之變形例。變形例是以與上述之實施形態之構成量子位元4之金屬電極(圖4)不同之部分為中心而進行說明。(Variation of metal electrodes constituting qubits) Although the above-mentioned embodiment describes the case where the inner disk 40 and the outer ring 41, which are the metal electrodes constituting the qubit 4, form concentric metal electrodes, the shape of the metal electrodes constituting the qubit 4 is not limited. in concentric circles. Here, a modified example of the shape of the metal electrode constituting the qubit 4 will be described with reference to FIGS. 12 to 18 . The modified example will be described focusing on the part different from the metal electrode ( FIG. 4 ) constituting the qubit 4 in the above-described embodiment.

圖12是顯示與本實施形態之變形例相關之量子位元4a之一例的圖。量子位元4a具有內側圓盤40a、外環41a、約瑟夫森接合42a、量子位元手部43a-1、量子位元手部43a-2。 外環41a是不同於外環41(圖4),並未封閉,具有間隙44a。FIG. 12 is a diagram showing an example of a qubit 4a related to a modification of the present embodiment. Qubit 4a has inner disk 40a, outer ring 41a, Josephson junction 42a, qubit hand 43a-1, qubit hand 43a-2. The outer ring 41a is different from the outer ring 41 (FIG. 4), is not closed, and has a gap 44a.

圖13是顯示與本實施形態之變形例相關之量子位元4b之一例的圖。量子位元4b具有內側圓盤40b、外環41b、約瑟夫森接合42b、量子位元手部43b-1、量子位元手部43b-2。 外環41b是不同於外環41(圖4),並未封閉,具有間隙44b。外環41b是不同於外環41a(圖12),未與量子位元手部43b直接連繫。FIG. 13 is a diagram showing an example of a qubit 4b related to a modification of the present embodiment. Qubit 4b has inner disk 40b, outer ring 41b, Josephson junction 42b, qubit hand 43b-1, qubit hand 43b-2. The outer ring 41b is different from the outer ring 41 (FIG. 4), is not closed, and has a gap 44b. The outer ring 41b is different from the outer ring 41a (FIG. 12) and is not directly connected to the qubit hand 43b.

外環41b具有凸部45b-1及凸部45b-2。量子位元手部43b-1具有前端部46b-1,量子位元手部43b-2具有前端部46b-2。凸部45b-1及凸部45b-2是形成與前端部46b-1及前端部46b-2之形狀對應之凹部。The outer ring 41b has a convex portion 45b-1 and a convex portion 45b-2. The qubit hand 43b-1 has a front end 46b-1, and the qubit hand 43b-2 has a front end 46b-2. The convex portion 45b-1 and the convex portion 45b-2 are concave portions formed corresponding to the shapes of the front end portion 46b-1 and the front end portion 46b-2.

圖14是顯示與本實施形態之變形例相關之量子位元4c之一例的圖。量子位元4c具有第1長方形40c、第2長方形41c、約瑟夫森接合42c、量子位元手部43c-1、量子位元手部43c-2。 第1長方形40c與第2長方形41c是藉由約瑟夫森接合42c而連接。第1長方形40c與基板上表面接地電極11c-6的距離是大到讓第1電容C1之值成為與第2電容C2相較之下充分地小之程度。在圖14,作為一例,將第1長方形40c之面積變小而使第1長方形40c與基板上表面接地電極11c-6的距離變大。第2長方形41c之與第1長方形40c之對向之邊的長度是相較於第1長方形40c之與第2長方形41c對向之邊的長度而言為長。 量子位元手部43c-1及量子位元手部43c-2是未與第2長方形41c直接連繫。FIG. 14 is a diagram showing an example of a qubit 4c related to a modification of the present embodiment. The qubit 4c has a first rectangle 40c, a second rectangle 41c, a Josephson junction 42c, a qubit hand 43c-1, and a qubit hand 43c-2. The first rectangle 40c and the second rectangle 41c are connected by a Josephson junction 42c. The distance between the first rectangle 40c and the ground electrode 11c-6 on the upper surface of the substrate is large enough to make the value of the first capacitance C1 sufficiently smaller than that of the second capacitance C2. In FIG. 14 , as an example, the area of the first rectangle 40c is reduced to increase the distance between the first rectangle 40c and the ground electrode 11c-6 on the upper surface of the substrate. The length of the side of the second rectangle 41c facing the first rectangle 40c is longer than the length of the side of the first rectangle 40c facing the second rectangle 41c. The qubit hand 43c-1 and the qubit hand 43c-2 are not directly connected to the second rectangle 41c.

基板上表面接地電極11c-5與基板上表面接地電極11c-6之形狀、及、基板上表面接地電極11-5(圖4)與基板上表面接地電極11-6(圖4)是因應第1長方形40c之形狀與第2長方形41c之形狀而不同。The shapes of the substrate upper surface ground electrode 11c-5 and the substrate upper surface ground electrode 11c-6, and the substrate upper surface ground electrode 11-5 (Fig. 4) and the substrate upper surface ground electrode 11-6 (Fig. The shape of the first rectangle 40c is different from the shape of the second rectangle 41c.

圖15是顯示與本實施形態之變形例相關之量子位元4d之一例的圖。量子位元4d具有第1長方形40d、第2長方形41d、約瑟夫森接合42d、量子位元手部43d-1、量子位元手部43d-2。 第1長方形40d與基板上表面接地電極11d-6的距離是大到讓第1電容C1之值成為與第2電容C2相較之下充分地小之程度。在圖15,作為一例,將第1長方形40d之面積變小而使第1長方形40d與基板上表面接地電極11d-6的距離變大。在圖15顯示之例是令第2長方形41d之與第1長方形40d對向之邊的長度相等於第1長方形40d之與第2長方形41d對向之邊的長度。另,第2長方形41d之與第1長方形40d對向之邊的長度、及、第1長方形40d之與第2長方形41d對向之邊的長度亦可以是如圖14之第1長方形40c及第2長方形41c般地不相等。 量子位元手部43d-1具有折曲之前端部46d-1,量子位元手部43d-2具有折曲之前端部46d-2。基板上表面接地電極11d-5具有凸部110d。前端部46d-1、前端部46d-2、及凸部110d是朝第2長方形41d對向。在圖15之量子位元4d,因為前端部46d-1、前端部46d-2、及凸部110d,故與不具有前端部46d-1、前端部46d-2、及凸部110d的情況相比,第2電容C2是變大。FIG. 15 is a diagram showing an example of a qubit 4d related to a modification of the present embodiment. The qubit 4d has a first rectangle 40d, a second rectangle 41d, a Josephson junction 42d, a qubit hand 43d-1, and a qubit hand 43d-2. The distance between the first rectangle 40d and the ground electrode 11d-6 on the upper surface of the substrate is large enough to make the value of the first capacitance C1 sufficiently smaller than that of the second capacitance C2. In FIG. 15 , as an example, the area of the first rectangle 40d is reduced, and the distance between the first rectangle 40d and the ground electrode 11d-6 on the upper surface of the substrate is increased. In the example shown in FIG. 15, the length of the side of the second rectangle 41d facing the first rectangle 40d is equal to the length of the side of the first rectangle 40d facing the second rectangle 41d. In addition, the length of the side of the second rectangle 41d facing the first rectangle 40d and the length of the side of the first rectangle 40d facing the second rectangle 41d may also be the same as the first rectangle 40c and the second rectangle 41d shown in FIG. 14 . 2 rectangles 41c are generally unequal. The qubit hand 43d-1 has a curved front end 46d-1, and the qubit hand 43d-2 has a curved front end 46d-2. The ground electrode 11d-5 on the upper surface of the substrate has a convex portion 110d. The front end portion 46d-1, the front end portion 46d-2, and the convex portion 110d face the second rectangle 41d. In the qubit 4d of FIG. 15, since the front end portion 46d-1, the front end portion 46d-2, and the convex portion 110d are present, it is different from the case where the front end portion 46d-1, the front end portion 46d-2, and the convex portion 110d are not provided. ratio, the second capacitor C2 becomes larger.

圖16是顯示與本實施形態之變形例相關之量子位元4e之一例的圖。量子位元4e具有第1長方形40e、十字41e、約瑟夫森接合42e。十字部分43e-1、十字部分43e-2是分別顯示與量子位元4e鄰接之量子位元之十字的一部分。 第1長方形40e與十字41e是藉由約瑟夫森接合42e而連接。 基板上表面接地電極11e-5與基板上表面接地電極11e-6之形狀之形狀、及、基板上表面接地電極11-5(圖4)與基板上表面接地電極11-6(圖4)是因應第1長方形40e與十字41e之形狀而不同。FIG. 16 is a diagram showing an example of a qubit 4e related to a modification of the present embodiment. The qubit 4e has a first rectangle 40e, a cross 41e, and a Josephson junction 42e. The cross portion 43e-1 and the cross portion 43e-2 are part of a cross showing a qubit adjacent to the qubit 4e, respectively. The first rectangle 40e and the cross 41e are connected by a Josephson junction 42e. The shape of the substrate upper surface ground electrode 11e-5 and the substrate upper surface ground electrode 11e-6, and the shape of the substrate upper surface ground electrode 11-5 (FIG. 4) and the substrate upper surface ground electrode 11-6 (FIG. 4) are It differs depending on the shape of the first rectangle 40e and the cross 41e.

圖17是顯示與本實施形態之變形例相關之量子位元4f之一例的圖。量子位元4f具有第1長方形40f、十字41f、約瑟夫森接合42f。十字部分43f-1、十字部分43f-2是分別顯示與量子位元4f鄰接之量子位元之十字的一部分。 量子位元4f(圖17)與量子位元4e(圖16)具有如下之不同:第1長方形40f(圖17)與基板上表面接地電極11f-2(圖17)的距離變成比第1長方形40e(圖16)與基板上表面接地電極11e-2(圖16)的距離還大。在此一例,基板上表面接地電極11f-2(圖17)之與十字41f(圖17)、第1長方形40f(圖17)對向之部分之形狀是曲線,相對於此,基板上表面接地電極11e-2(圖16)之與十字41e(圖16)、第1長方形40e(圖16)對向之部分之形狀是直線,因此,第1長方形40f(圖17)與基板上表面接地電極11f-2(圖17)的距離是變大。 在量子位元4f(圖17),因為第1長方形40f(圖17)與基板上表面接地電極11f-2(圖17)的距離大,故與量子位元4e(圖16)相比,第1電容C1是小。FIG. 17 is a diagram showing an example of a qubit 4f related to a modification of the present embodiment. The qubit 4f has a first rectangle 40f, a cross 41f, and a Josephson junction 42f. The cross portion 43f-1 and the cross portion 43f-2 are a part of a cross showing a qubit adjacent to the qubit 4f, respectively. The difference between the qubit 4f ( FIG. 17 ) and the qubit 4e ( FIG. 16 ) is that the distance between the first rectangle 40f ( FIG. 17 ) and the ground electrode 11f - 2 ( FIG. 17 ) on the upper surface of the substrate is larger than that of the first rectangle 40f ( FIG. 17 ) The distance between 40e (FIG. 16) and the ground electrode 11e-2 (FIG. 16) on the upper surface of the substrate is still larger. In this example, the shape of the portion of the ground electrode 11f-2 (FIG. 17) facing the cross 41f (FIG. 17) and the first rectangle 40f (FIG. 17) is a curved line, and the top surface of the board is grounded The shape of the portion of the electrode 11e-2 (FIG. 16) facing the cross 41e (FIG. 16) and the first rectangle 40e (FIG. 16) is a straight line, so the first rectangle 40f (FIG. 17) is connected to the ground electrode on the upper surface of the substrate The distance of 11f-2 (Fig. 17) is larger. In the qubit 4f (FIG. 17), since the distance between the first rectangle 40f (FIG. 17) and the ground electrode 11f-2 (FIG. 17) on the upper surface of the substrate is large, compared with the qubit 4e (FIG. 16), the 1 Capacitor C1 is small.

圖18是顯示與本實施形態之變形例相關之量子位元4g之一例的圖。量子位元4g具有第1電極40g、第2電極41g、約瑟夫森接合42g、量子位元手部43g-1、量子位元手部43g-2。 第1電極40g與第2電極41g是藉由約瑟夫森接合42g而連接。第1電極40g與第2電極41g分別具有梳子型之形狀且互相對向,藉此形成梳子型電極。在圖18顯示之例中,第1電極40g具有2個突出,第2電極41g具有3個突出。 第1電極40g與基板上表面接地電極11g-6的距離是大到讓第1電容C1之值成為與第2電容C2相較之下充分地小之程度。在圖18,作為一例,將第1電極40g之面積變小而使第1電極40g與基板上表面接地電極11g-6的距離變大。FIG. 18 is a diagram showing an example of a qubit 4g related to a modification of the present embodiment. The qubit 4g has a first electrode 40g, a second electrode 41g, a Josephson junction 42g, a qubit hand 43g-1, and a qubit hand 43g-2. The first electrode 40g and the second electrode 41g are connected by the Josephson junction 42g. The first electrode 40g and the second electrode 41g each have a comb-shaped shape and face each other, thereby forming a comb-shaped electrode. In the example shown in FIG. 18 , the first electrode 40g has two protrusions, and the second electrode 41g has three protrusions. The distance between the first electrode 40g and the ground electrode 11g-6 on the upper surface of the substrate is large enough to make the value of the first capacitance C1 sufficiently smaller than that of the second capacitance C2. In FIG. 18, as an example, the area of the 1st electrode 40g is made small, and the distance of the 1st electrode 40g and the board|substrate upper surface ground electrode 11g-6 is made large.

在上述之變形例,內側圓盤40a、內側圓盤40b、第1長方形40c、第1長方形40d、第1長方形40e、第1長方形40f、及第1電極40g是第1電極之一例。外環41a、外環41b、第2長方形41c、第2長方形41d、十字41e、十字41f、及第2電極41g是第2電極之一例。In the above modification, the inner disk 40a, the inner disk 40b, the first rectangle 40c, the first rectangle 40d, the first rectangle 40e, the first rectangle 40f, and the first electrode 40g are examples of the first electrodes. The outer ring 41a, the outer ring 41b, the second rectangle 41c, the second rectangle 41d, the cross 41e, the cross 41f, and the second electrode 41g are examples of the second electrode.

第2電極與接地部GE之間的耦合電容是大於第1電極與接地部GE之間的耦合電容。相較於第2電極與接地部GE之間之耦合電容未大於第1電極與接地部GE之間之耦合電容的情況,第1電極與第2電極之間的電位差會較不易被由不需要之輻射電場E造成之電位之變動影響。The coupling capacitance between the second electrode and the ground portion GE is larger than the coupling capacitance between the first electrode and the ground portion GE. Compared with the case where the coupling capacitance between the second electrode and the ground portion GE is not larger than the coupling capacitance between the first electrode and the ground portion GE, the potential difference between the first electrode and the second electrode is less likely to be caused by unnecessary The effect of the change in the potential caused by the radiated electric field E.

(濾波器圖案之變形例) 雖然在上述之實施形態是說明濾波器圖案6藉由4個連接電極62而將中心部電極60與基板下面接地電極13連接的情況,但並非限定於此。 在此,參考圖19~21來說明濾波器圖案6之變形例。變形例是以與上述之實施形態之濾波器圖案6(圖6)不同之部分為中心而進行說明。(Variation of filter pattern) In the above-described embodiment, the case where the filter pattern 6 is connected to the central electrode 60 and the ground electrode 13 under the substrate by the four connection electrodes 62 is described, but the present invention is not limited to this. Here, a modification of the filter pattern 6 will be described with reference to FIGS. 19 to 21 . The modified example will be described centering on the part different from the filter pattern 6 ( FIG. 6 ) of the above-described embodiment.

圖19是顯示與本實施形態相關之濾波器圖案6a之一例的圖。濾波器圖案6a具有中心部電極60a與連接電極62a。中心部電極60a是隔著間隙部61a而被基板下面接地電極13a圍住周圍。中心部電極60a與基板下面接地電極13a是藉由1個連接電極62a而連接。 另,連接電極62之數量並非限定於圖6所說明之4個的情況、圖19所說明之1個的情況,亦可以是2個、3個、5個以上。FIG. 19 is a diagram showing an example of the filter pattern 6a related to the present embodiment. The filter pattern 6a has the center part electrode 60a and the connection electrode 62a. The center portion electrode 60a is surrounded by the substrate lower surface ground electrode 13a with the gap portion 61a interposed therebetween. The center part electrode 60a and the board|substrate lower surface ground electrode 13a are connected by one connection electrode 62a. In addition, the number of the connection electrodes 62 is not limited to the case of 4 described in FIG. 6 and the case of 1 described in FIG. 19 , and may be 2, 3, or 5 or more.

圖20是顯示與本實施形態相關之濾波器圖案6b之一例的圖。濾波器圖案6b具有中心部電極60b與連接電極62b。中心部電極60b是隔著間隙部61b而被基板下面接地電極13b圍住周圍。中心部電極60b與基板下面接地電極13b是透過連接電極62b而連接。 在濾波器圖案6b,具有之中心部電極60b與連接電極62b是成為一體。作為一例,中心部電極60b與連接電極62b是形成曲線狀之輪廓。連接電極62b(圖20)之寬是從中心部電極60b往基板下面接地電極13b而越來越窄。 另,連接電極62b之數量並非限定於圖20所說明之1個的情況,亦可以是2個以上。FIG. 20 is a diagram showing an example of the filter pattern 6b according to the present embodiment. The filter pattern 6b has the center part electrode 60b and the connection electrode 62b. The center portion electrode 60b is surrounded by the substrate lower surface ground electrode 13b with the gap portion 61b interposed therebetween. The center portion electrode 60b and the substrate lower surface ground electrode 13b are connected through the connection electrode 62b. In the filter pattern 6b, the center part electrode 60b and the connection electrode 62b are integrated. As an example, the center electrode 60b and the connection electrode 62b have a curved outline. The width of the connection electrode 62b (FIG. 20) becomes narrower from the center electrode 60b toward the ground electrode 13b below the substrate. In addition, the number of the connection electrodes 62b is not limited to the one described in FIG. 20, and may be two or more.

圖21是顯示與本實施形態相關之濾波器圖案6c之一例的圖。濾波器圖案6c具有中心部電極60c、連接電極62c-1及連接電極62c-2。中心部電極60c是隔著間隙部61b-1及間隙部61b-2而被基板下面接地電極13c圍住周圍。中心部電極60c與基板下面接地電極13c是透過連接電極62c-1及連接電極62c-2而連接。 中心部電極60c之形狀是長方形。 另,連接電極62c-1及連接電極62c-2之數量並非限定於圖21所說明之2個的情況,亦可以是1個或3個以上。FIG. 21 is a diagram showing an example of the filter pattern 6c according to the present embodiment. The filter pattern 6c has the center part electrode 60c, the connection electrode 62c-1, and the connection electrode 62c-2. The center portion electrode 60c is surrounded by the lower substrate ground electrode 13c with the gap portion 61b-1 and the gap portion 61b-2 interposed therebetween. The center part electrode 60c and the board|substrate lower surface ground electrode 13c are connected through the connection electrode 62c-1 and the connection electrode 62c-2. The shape of the center electrode 60c is a rectangle. In addition, the number of the connection electrodes 62c-1 and the connection electrodes 62c-2 is not limited to the case of the two described in FIG. 21, and may be one or three or more.

雖然以上是參考圖面來詳細說明此發明之一實施形態,但具體之構成並非限定於上述內容,可在不超脫此發明之主旨之範圍內進行各式各樣之設計變更等。Although one embodiment of the present invention has been described in detail above with reference to the drawings, the specific configuration is not limited to the above, and various design changes and the like can be made without departing from the gist of the present invention.

1:電路基板 2:第1接地電極 3:第2接地電極 4,4-1~4-6,4a,4b,4c,4d,4e,4f,4g:量子位元 4C:第1等價電路 4Ca:第2等價電路 5:控制訊號線 5A:控制用訊號線 5B:觀測用訊號線 6,6a,6b,6c:濾波器圖案 7,7-1~7-4:超導共振器 8:觀測電極 9,9-1~9-4,Cdq:電容器 10,10-1~10-2:貫通電極 11,11-1~11-6,11a-5~11a-6,11b-5~11b-6,11c-5~11c-6,11d-5~11d-6,11e-2,11e-5~11e-6,11f-2,11f-5~11f-6,11g-5~11g-6:基板上表面接地電極 12:第1延展部 12-1:上表面超導微凸塊 13,13-1,13-2,13a,13b,13c:基板下面接地電極 14:第2延展部 14-1,14-2:導電接觸部 20,20-1~20-6:第1非接觸部 21,21-1~21-12:第1接觸部 30,30-1~30-2:第2非接觸部 31,31-1,31-2:第2接觸部 40,40a,40b:內側圓盤 40c,40d,40e,40f:第1長方形 40g:第1電極 41,41a,41b:外環 41c,41d:第2長方形 41e,41f:十字 41g:第2電極 42,42a,42b,42c,42d,42e,42f,42g:約瑟夫森接合 43,43-1~43-4,43a-1~43a-2,43b,43b-1~43b-2,43c-1~43c-2,43d-1~43d-2,43g-1~43g-2:量子位元手部 43e-1~43e-2,43f-1~43f-2:十字部分 44a,44b:間隙 45:基板下面接地電極 45b-1~45b-2,110d:凸部 46:壕部 46b-1~46b-2,46d-1~46d-2:前端部 50:接觸銷 50A,50B:接觸彈簧銷 51A,51B:彈簧 52A,52A-1,52A-2,52B,52B-1,52B-2:同軸線介電體部 60,60a,60b,60c:中心部電極 61,61-1~61-4,61a,61b,61b-1~61b-2,61c-1:間隙部 62,62-1~62-4,62a,62b,62c-1~62c-2:連接電極 80,80-1,80-2:觀測基板貫通電極 C1:第1電容 C2:第2電容 Cc:第3電容 Cq:電容 CP:配線圖案 Cd1:第1電容器 Cd2:第2電容器 Cdc:第3電容器 E,E1,E2:不需要之輻射電場 ED:驅動電場 G1:曲線 GE:接地部 GP:接地圖案 GP1:第1接地圖案 GP2:第2接地圖案 I:控制電流 Ic,IL:電流 i,iC,iL:電流之大小 Ids:電感器 LCR:LC共振器 Ls:電感 P:賦予勢能構件 QC:超導複合量子計算電路 S:基板表面 S1:第1面 S2:第2面 X,X1,X2:觀測用區域 Y,Y1,Y2:間隙接地區域1: circuit board 2: 1st ground electrode 3: 2nd ground electrode 4,4-1~4-6,4a,4b,4c,4d,4e,4f,4g: qubits 4C: 1st Equivalent Circuit 4Ca: 2nd Equivalent Circuit 5: Control signal line 5A: control signal line 5B: Signal line for observation 6, 6a, 6b, 6c: filter pattern 7,7-1~7-4: Superconducting resonator 8: Observation electrode 9,9-1~9-4,Cdq: capacitor 10,10-1~10-2: Through electrode 11,11-1~11-6,11a-5~11a-6,11b-5~11b-6,11c-5~11c-6,11d-5~11d-6,11e-2,11e-5~ 11e-6, 11f-2, 11f-5~11f-6, 11g-5~11g-6: Ground electrode on the upper surface of the substrate 12: Extension 1 12-1: Superconducting microbumps on the upper surface 13, 13-1, 13-2, 13a, 13b, 13c: Ground electrodes under the substrate 14: Extension 2 14-1, 14-2: Conductive Contacts 20, 20-1~20-6: 1st non-contact part 21, 21-1~21-12: The first contact part 30, 30-1~30-2: 2nd non-contact part 31, 31-1, 31-2: 2nd contact part 40, 40a, 40b: inner disc 40c, 40d, 40e, 40f: 1st rectangle 40g: 1st electrode 41, 41a, 41b: outer ring 41c, 41d: 2nd rectangle 41e, 41f: Cross 41g: 2nd electrode 42, 42a, 42b, 42c, 42d, 42e, 42f, 42g: Josephson engagement 43,43-1~43-4,43a-1~43a-2,43b,43b-1~43b-2,43c-1~43c-2,43d-1~43d-2,43g-1~43g- 2: qubit hand 43e-1~43e-2, 43f-1~43f-2: Cross section 44a, 44b: Clearance 45: Ground electrode under the substrate 45b-1~45b-2, 110d: convex part 46: Trench 46b-1~46b-2, 46d-1~46d-2: Front end 50: Contact Pin 50A, 50B: Contact spring pins 51A, 51B: Spring 52A, 52A-1, 52A-2, 52B, 52B-1, 52B-2: Coaxial line dielectric body 60, 60a, 60b, 60c: center electrode 61, 61-1~61-4, 61a, 61b, 61b-1~61b-2, 61c-1: Clearance 62, 62-1~62-4, 62a, 62b, 62c-1~62c-2: connecting electrodes 80, 80-1, 80-2: Observation of substrate through electrodes C1: 1st capacitor C2: 2nd capacitor Cc: 3rd capacitor Cq: Capacitance CP: Wiring pattern Cd1: 1st capacitor Cd2: 2nd capacitor Cdc: 3rd capacitor E, E1, E2: Unwanted radiated electric field ED: Driving Electric Field G1: Curve GE: Ground GP: Ground Pattern GP1: 1st ground pattern GP2: 2nd ground pattern I: control current Ic,IL: current i,iC,iL: the magnitude of the current Ids: Inductors LCR:LC Resonator Ls: Inductance P: Give Potential Energy Component QC: Superconducting Composite Quantum Computing Circuit S: Substrate surface S1: Side 1 S2: Side 2 X, X1, X2: area for observation Y, Y1, Y2: Clearance ground area

圖1是顯示與本發明之實施形態相關之超導複合量子計算電路之構成之一例的圖。 圖2是與本發明之實施形態相關之基板表面中之觀測用區域的上視圖。 圖3是顯示與本發明之實施形態相關之第1非接觸部及第1接觸部之一例的圖。 圖4是顯示與本發明之實施形態相關之量子位元之一例的圖。 圖5是顯示與本發明之實施形態相關之第1等價電路之一例的圖。 圖6是顯示與本發明之實施形態相關之濾波器圖案之一例的圖。 圖7是顯示與本發明之實施形態相關之第2等價電路之一例的圖。 圖8是顯示與本發明之實施形態相關之在第3電容器流動之電流對於控制電流之頻率之關係之一例的圖。 圖9是顯示與本發明之實施形態相關之超導複合量子計算電路之量子位元之部分之截面之一例的圖。 圖10是顯示與本發明之實施形態相關之超導共振器及觀測電極之一例的圖。 圖11是顯示與本發明之實施形態相關之超導複合量子計算電路之觀測電極之部分之截面之一例的圖。 圖12是顯示與本發明之變形例相關之量子位元之一例的圖。 圖13是顯示與本發明之變形例相關之量子位元之一例的圖。 圖14是顯示與本發明之變形例相關之量子位元之一例的圖。 圖15是顯示與本發明之變形例相關之量子位元之一例的圖。 圖16是顯示與本發明之變形例相關之量子位元之一例的圖。 圖17是顯示與本發明之變形例相關之量子位元之一例的圖。 圖18是顯示與本發明之變形例相關之量子位元之一例的圖。 圖19是顯示與本發明之變形例相關之濾波器圖案之一例的圖。 圖20是顯示與本發明之變形例相關之濾波器圖案之一例的圖。 圖21是顯示與本發明之變形例相關之濾波器圖案之一例的圖。FIG. 1 is a diagram showing an example of the configuration of a superconducting composite quantum computing circuit according to an embodiment of the present invention. Fig. 2 is a top view of an observation area on the surface of the substrate according to the embodiment of the present invention. 3 is a diagram showing an example of a first non-contact portion and a first contact portion according to the embodiment of the present invention. FIG. 4 is a diagram showing an example of a qubit related to the embodiment of the present invention. FIG. 5 is a diagram showing an example of a first equivalent circuit according to the embodiment of the present invention. FIG. 6 is a diagram showing an example of a filter pattern according to an embodiment of the present invention. FIG. 7 is a diagram showing an example of a second equivalent circuit according to the embodiment of the present invention. 8 is a diagram showing an example of the relationship between the current flowing in the third capacitor and the frequency of the control current according to the embodiment of the present invention. 9 is a diagram showing an example of a cross section of a portion of a qubit of a superconducting composite quantum computing circuit according to an embodiment of the present invention. FIG. 10 is a diagram showing an example of a superconducting resonator and an observation electrode according to an embodiment of the present invention. FIG. 11 is a diagram showing an example of a cross section of a portion of the observation electrode of the superconducting composite quantum computing circuit according to the embodiment of the present invention. FIG. 12 is a diagram showing an example of a qubit related to a modification of the present invention. FIG. 13 is a diagram showing an example of a qubit related to a modification of the present invention. FIG. 14 is a diagram showing an example of a qubit related to a modification of the present invention. FIG. 15 is a diagram showing an example of a qubit related to a modification of the present invention. FIG. 16 is a diagram showing an example of a qubit related to a modification of the present invention. FIG. 17 is a diagram showing an example of a qubit related to a modification of the present invention. FIG. 18 is a diagram showing an example of a qubit related to a modification of the present invention. FIG. 19 is a diagram showing an example of a filter pattern related to a modification of the present invention. FIG. 20 is a diagram showing an example of a filter pattern related to a modification of the present invention. FIG. 21 is a diagram showing an example of a filter pattern related to a modification of the present invention.

1:電路基板1: circuit board

2:第1接地電極2: 1st ground electrode

3:第2接地電極3: 2nd ground electrode

4-1~4-6:量子位元4-1~4-6: Qubits

5A:控制用訊號線5A: control signal line

5B:觀測用訊號線5B: Signal line for observation

6:濾波器圖案6: Filter Pattern

7-1~7-4:超導共振器7-1~7-4: Superconducting Resonator

8:觀測電極8: Observation electrode

9-1~9-4:電容器9-1~9-4: Capacitors

10-1~10-2:貫通電極10-1~10-2: Through electrode

11-1~11-4:基板上面接地電極11-1~11-4: Ground electrode on the top of the substrate

12-1:上面超導微凸塊12-1: Superconducting microbumps on top

20-1~20-2:第1非接觸部20-1~20-2: 1st non-contact part

21-1~21-3:第1接觸部21-1~21-3: The first contact part

30-1~30-2:第2非接觸部30-1~30-2: 2nd non-contact part

31:第2接觸部31: 2nd contact part

QC:超導複合量子計算電路QC: Superconducting Composite Quantum Computing Circuit

S:基板表面S: Substrate surface

X1,X2:觀測用區域X1, X2: area for observation

Y1,Y2:間隙接地區域Y1, Y2: Clearance ground area

Claims (5)

一種超導複合量子計算電路,其包含電路基板,前述電路基板在基板表面形成有包含量子位元與觀測前述量子位元之狀態之觀測電極之電路元件的配線圖案、及接地電位即接地圖案,且具備貫通電極,前述貫通電極將在前述基板表面中之形成於第1面之前述接地圖案、及形成於前述第1面之反面即第2面之前述接地圖案,在基板內部予以連接,前述超導複合量子計算電路是在與形成於前述第1面的前述配線圖案所包含之前述量子位元的位置對應的前述第2面的位置,從相對於前述第2面垂直的方向供給控制訊號線。 A superconducting composite quantum computing circuit, comprising a circuit substrate, the circuit substrate having a wiring pattern of circuit elements including qubits and observation electrodes for observing the state of the qubits formed on the substrate surface, and a ground potential, that is, a ground pattern, Furthermore, a through electrode is provided, and the through electrode connects the ground pattern formed on the first surface on the surface of the substrate and the ground pattern formed on the second surface, which is the opposite surface of the first surface, inside the substrate. The superconducting composite quantum computing circuit supplies a control signal from a direction perpendicular to the second surface at the position of the second surface corresponding to the position of the qubit included in the wiring pattern formed on the first surface Wire. 如請求項1之超導複合量子計算電路,其中前述量子位元包含:第1電極,與接地部具有第1耦合電容;及第2電極,與接地部具有比前述第1耦合電容還大之第2耦合電容,且藉由約瑟夫森接合而與前述第1電極連接。 The superconducting composite quantum computing circuit of claim 1, wherein the qubits comprise: a first electrode having a first coupling capacitance with the ground portion; and a second electrode having a larger coupling capacitance with the ground portion than the first coupling capacitance The second coupling capacitor is connected to the first electrode by Josephson junction. 如請求項1之超導複合量子計算電路,其在與形成於前述第1面的前述配線圖案所包含之前述量子位元的位置對應的前述第2面的位置,具備中心部電極、將該中心部電極之周圍圍住之周圍電極、及將該中心部電極與該周圍電極連接之連接電極。 The superconducting composite quantum computing circuit according to claim 1, comprising a center electrode at a position on the second surface corresponding to the position of the qubit included in the wiring pattern formed on the first surface, and the A peripheral electrode surrounding the center electrode, and a connecting electrode connecting the center electrode and the peripheral electrode. 如請求項1至3中任一項之超導複合量子計算電路,其中在形成於前述第1面的前述配線圖案 上,對每個前述量子位元設置單一的超導共振器,且前述觀測電極是經由前述超導共振器而連接於複數個前述量子位元。 The superconducting composite quantum computing circuit according to any one of claims 1 to 3, wherein the wiring pattern formed on the first surface is Above, a single superconducting resonator is provided for each of the aforementioned qubits, and the aforementioned observation electrode is connected to a plurality of the aforementioned qubits through the aforementioned superconducting resonator. 如請求項4之超導複合量子計算電路,其中前述觀測電極貫通前述電路基板,並在前述第2面上被觀測用訊號線推擠,前述觀測用訊號線是從相對於前述第2面垂直的方向來供給且前端設有接觸彈簧銷。 The superconducting composite quantum computing circuit according to claim 4, wherein the observation electrode penetrates the circuit substrate and is pushed by the observation signal line on the second surface, and the observation signal line is perpendicular to the second surface. The direction is supplied and the front end is provided with a contact spring pin.
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