TWI775762B - Coating film forming method, coating film forming apparatus, and computer-readable recording medium - Google Patents

Abstract

[Problem] A coating film is uniformly formed along the surface of the object to be processed including the convex portion. [Solution] The method for forming a coating film includes a first step of heating the object to be processed (W) including the substrate (W1) and the projections (W2) provided on the surface of the substrate (W1), and heating The second step of applying the liquid to obtain the heating liquid, and the third step of spraying the heating liquid from the nozzle (N) in the state of droplets on the surface of the object to be processed (W) after being heated in the first step. project.

Description

Coating film forming method, coating film forming apparatus, and computer-readable recording medium

[0001] The present disclosure relates to a coating film forming method, a coating film forming apparatus, and a computer-readable recording medium.

[0002] Patent Document 1 discloses a method of forming a coating liquid (for example, a resist film) on an object to be processed having projections (protrusions, ridges, etc.) provided on the surface of a substrate (wafer). The method includes heating the object to be treated by heating means while spraying droplets of the coating liquid from the nozzle while zigzagging a nozzle above the surface of the object to be treated. [Prior Art Document] [Patent Document] [0003] [Patent Document 1] Japanese Patent Laid-Open No. 2005-019560

[Problem to be Solved by the Invention] [0004] The method disclosed in Patent Document 1 does not use the coating liquid material to bury the space between the convex portions, but follows the surface of the object to be treated (including the surface of the convex portion) The purpose is to form a coating film somewhat uniformly. However, according to this method, the next coating liquid can be sprayed before the solvent of the coating liquid has completely evaporated to the area of the surface of the object where the spray area overlaps with the movement of the nozzle. Therefore, even if the object to be treated is heated by heating means, before the solute of the coating liquid droplet (coating liquid material particle) is fixed on the side wall surface of the convex portion, the coating liquid droplet (solvent) flows, and the coating liquid droplet (solvent) flows in the convex portion. The base end side of the part, especially the case where the film thickness of the coating film becomes large. [0005] Here, the present disclosure describes a coating film forming method, a coating film forming apparatus, and a computer-readable recording medium capable of forming a coating film more uniformly along the surface of an object to be processed including protrusions . [MEANS TO SOLVE THE PROBLEM] [0006] A method for forming a coating film related to one of the viewpoints of the present disclosure includes: a first process, which is a process for treating an object including a substrate and a convex portion provided on the surface of the substrate The second process is to heat the coating liquid to obtain the first heating liquid; and the third process is to heat the surface of the object after being heated in the first process in the state of droplets The first heated liquid is sprayed from the nozzle. [0007] In the method for forming a coating film according to one aspect of the present disclosure, when the coating liquid is sprayed on the surface of the object to be treated, in the second step, the coating liquid is heated to become the first heating liquid. Therefore, when the first heating liquid is ejected from the nozzle, immediately after the solvent (solvent) volatilizes, the concentration of material particles (solutes) in the coating liquid becomes high, so that the fluidity of the coating liquid (first heating liquid) becomes high. state of decline. Therefore, on the surface (concave-convex surface) of the object to be processed, it is suppressed that the liquid droplets agglomerate and flow. As a result, the material particles of the coating liquid easily and uniformly adhere to the surface of the object to be treated. By doing so, the coating film can be formed more uniformly along the surface of the object to be processed including the convex portion. In addition, in the coating film formation method related to one aspect of the present disclosure, in the third process, the surface of the object to be processed after being heated in the first process is in a state of droplets. Next, spray the first heated liquid from the nozzle. Therefore, since the object to be treated is heated before the third process, the solvent (solvent) of the coating liquid sprayed in the third process is volatilized by the heat from the object to be treated over the entire surface of the object to be treated. . Therefore, on the surface (concave-convex surface) of the object to be processed, it is further suppressed that the droplets aggregate and flow. Therefore, the coating film can be formed more uniformly along the surface of the object to be processed including the convex portion. [0009] Even if the coating liquid is heated in the second process, the temperature of the first heating liquid in the outlet of the nozzle may be equal to or less than 1/2 of the boiling point of the solvent contained in the coating liquid. The higher the temperature of the solvent (solvent) of the coating liquid, the more accelerated the volatilization, but when the amount of volatilization increases too much, the droplets ejected from the nozzle will be solidified before reaching the surface of the object to be treated. In addition, when the coating liquid is heated so that the temperature of the first heating liquid at the outlet of the nozzle becomes less than 1/2 of the boiling point of the solvent contained in the coating liquid, the droplets sprayed from the nozzle reach the object to be treated. The surface becomes difficult to cure before. [0010] Even in the second process, the coating liquid may be heated so that the temperature of the first heating liquid in the outlet of the nozzle is 35°C to 60°C. In this case, it becomes more difficult to solidify before the droplets sprayed from the nozzle reach the surface of the object to be processed. [0011] Even in the second process, the first heating liquid can be obtained by heating the coating liquid by mixing the coating liquid and the heated gas in the nozzle. In this case, the fluidity of the coating liquid is maintained in a high state until immediately before the coating liquid is discharged from the nozzle. Therefore, it becomes easy to spray the coating liquid from the nozzle in the state of droplets. Therefore, it is possible to generate droplets by a simple method in order to improve the fluidity of the coating liquid before discharging from the nozzle, and to reduce the fluidity of the coating liquid after discharging from the nozzle, so that the coating liquid is The opposite requirement is that the material particles are uniformly attached to the surface of the object to be treated. [0012] Even in the second process, the first heating liquid may be obtained by heating the coating liquid by a heater on the upstream side of the nozzle. In this case, the fluidity of the coating liquid can be maintained until just before the coating liquid is discharged from the nozzle. Therefore, it becomes easy to spray the coating liquid from the nozzle in the state of droplets. Therefore, it is possible to generate droplets by a simple method in order to improve the fluidity of the coating liquid before discharging from the nozzle, and to reduce the fluidity of the coating liquid after discharging from the nozzle, so that the coating liquid is The opposite requirement is that the material particles are uniformly attached to the surface of the object to be treated. Even if the coating film formation method related to one of the viewpoints of the present disclosure further includes: a fourth step, which is after the third step, heating the coating liquid to obtain a second heating liquid; and a fifth step, which is After the fourth step, the second heating liquid is sprayed from the nozzle in the state of droplets on the surface of the object to be treated on which the coating film is formed, and the temperature of the second heating liquid in the fourth step is set higher than The temperature of the 1st heating liquid in the 2nd process may be sufficient. In this case, since the temperature of the first heating liquid is relatively low and the fluidity of the droplets sprayed from the nozzle tends to be high, the liquid sprayed on the surface of the object to be treated in the third step Droplets easily enter into narrow recesses in the object to be treated. In addition, since the temperature of the second heating liquid is relatively high, and the fluidity of the droplets sprayed from the nozzle tends to be low, the droplets sprayed on the surface of the object to be treated in the fifth step tend to adhere on the side surface of the convex part of the object to be treated. Therefore, the coating film can be formed more uniformly along the surface of the object to be processed including the convex portion. Even in the third process, droplets are sprayed from the nozzle on the surface of the object to be treated, and the gas nozzle is directed to the surface of the object to be treated from the gas nozzle while making a gas nozzle different from the nozzle to follow the nozzle. Heated nitrogen can also be blown at the blowing place. In this case, since the drying of the solvent is performed during the blowing of the droplets, the time required for forming the coating film on the surface of the object to be treated can be shortened. The coating film forming apparatus related to other viewpoints of the present disclosure is provided with: a first heating part configured to heat the coating liquid; The object to be processed on the convex part of the surface; the supply part, which has a nozzle; and the control part, the control part executes the first process, which controls the second heating part to heat the object to be processed, and the second process, which controls the first process The heating section and the supply section eject the coating liquid heated by the first heating section, that is, the first heating liquid, from the nozzle in the state of droplets on the surface of the object to be processed after being heated by the first treatment . [0016] In the coating film forming apparatus related to another aspect of the present disclosure, when the coating liquid is sprayed on the surface of the object to be treated, the control unit performs the second process of heating the coating liquid to become the first heating liquid. Therefore, when the first heating liquid is ejected from the nozzle, immediately after the solvent (solvent) volatilizes, the concentration of material particles (solutes) in the coating liquid becomes high, so that the fluidity of the coating liquid (first heating liquid) becomes high. state of decline. Therefore, on the surface (concave-convex surface) of the object to be processed, it is suppressed that the liquid droplets agglomerate and flow. As a result, the material particles of the coating liquid can easily and uniformly adhere to the surface of the object to be treated. By doing so, the coating film can be formed more uniformly along the surface of the object to be processed including the convex portion. In addition, in the coating film forming apparatus related to other viewpoints of the present disclosure, the control unit controls the first heating unit and the supply unit in the second process, and controls the first heating unit and the supply unit from the nozzle to be processed by the first process. Liquid droplets are sprayed on the surface of the heated object. Therefore, since the object to be treated is heated before the second treatment, the solvent (solvent) of the coating liquid sprayed in the second treatment is volatilized by the heat from the object to be treated over the entire surface of the object to be treated. . Therefore, on the surface (concave-convex surface) of the object to be processed, it is suppressed that the liquid droplets agglomerate and flow. Therefore, the coating film can be formed more uniformly along the surface of the object to be processed including the convex portion. [0018] Even if the coating liquid is heated in the first heating section, the temperature of the first heating liquid in the outlet of the nozzle may be equal to or less than 1/2 of the boiling point of the solvent contained in the coating liquid. The higher the temperature of the solvent (solvent) of the coating liquid, the more accelerated the volatilization, but when the amount of volatilization increases too much, the droplets ejected from the nozzle will be solidified before reaching the surface of the object to be treated. In addition, when the coating liquid is heated so that the temperature of the first heating liquid at the outlet of the nozzle becomes less than 1/2 of the boiling point of the solvent contained in the coating liquid, the droplets sprayed from the nozzle reach the object to be treated. The surface becomes difficult to cure before. [0019] Even if the first heating part heats the coating liquid so that the temperature of the first heating liquid in the outlet of the nozzle is 35°C to 60°C. In this case, it becomes more difficult to solidify before the droplets sprayed from the nozzle reach the surface of the object to be processed. [0020] Even if the first heating part is configured to mix the gas and the coating liquid in the nozzle by supplying the heated gas to the nozzle, the coating liquid may be heated. In this case, the fluidity of the coating liquid is maintained in a high state until immediately before the coating liquid is discharged from the nozzle. Therefore, it becomes easy to spray the coating liquid from the nozzle in the state of droplets. Therefore, it is possible to generate droplets by a simple method in order to improve the fluidity of the coating liquid before discharging from the nozzle, and to reduce the fluidity of the coating liquid after discharging from the nozzle, so that the coating liquid is The opposite requirement is that the material particles are uniformly attached to the surface of the object to be treated. [0021] Even if the first heating part is a heater that heats the coating liquid on the upstream side of the nozzle. In this case, the fluidity of the coating liquid can be maintained until just before the coating liquid is discharged from the nozzle. Therefore, it becomes easy to spray the coating liquid from the nozzle in the state of droplets. Therefore, it is possible to generate droplets by a simple method in order to improve the fluidity of the coating liquid before discharging from the nozzle, and to reduce the fluidity of the coating liquid after discharging from the nozzle, so that the coating liquid is The opposite requirement is that the material particles are uniformly attached to the surface of the object to be treated. Even if the control section further executes the third treatment after the second treatment, it controls the first heating section and the supply section, and sprays the surface of the object to be treated in the state of droplets from the nozzle by the first heating section and the supply section. The coating liquid heated by the heating unit, that is, the second heating liquid, may be set higher in temperature than the temperature of the first heating liquid in the second treatment in the third treatment. In this case, since the temperature of the first heating liquid is relatively low and the fluidity of the liquid droplets sprayed from the nozzle tends to be high, the liquid sprayed on the surface of the object to be treated in the second treatment Droplets easily enter into narrow recesses in the object to be treated. In addition, since the temperature of the second heating liquid is relatively high and the fluidity of the droplets sprayed from the nozzle tends to be low, the droplets sprayed on the surface of the object to be treated in the third treatment tend to adhere on the side surface of the convex part of the object to be processed. Therefore, the coating film can be formed more uniformly along the surface of the object to be processed including the convex portion. Even if the coating film forming apparatus related to other viewpoints of the present disclosure further includes a gas supply unit configured to discharge the heated nitrogen gas from the gas nozzle, the control unit controls the first heating unit and the supply in the second process. It is also possible to spray the heated nitrogen gas from the area where the droplets are sprayed on the surface of the object to be treated by the gas nozzle while the gas nozzle is being controlled to follow the nozzle while spraying droplets from the nozzle. In this case, since the drying of the solvent is performed during the blowing of the droplets, the time required for forming the coating film on the surface of the object to be treated can be shortened. [0024] A computer-readable recording medium related to other viewpoints of the present disclosure records a program for causing a coating film forming apparatus to execute the above-described coating film forming method. In the computer-readable recording medium according to the other aspect of the present disclosure, the coating film can be formed more uniformly along the surface of the object to be processed including the convex portion in the same manner as in the above-described coating film forming method. In this specification, a computer-readable recording medium includes a non-transitory computer recording medium (eg, various main memory devices or auxiliary memory devices), or a transitory computer recording medium (eg, , the data signal available via the Internet). [Effect of the Invention] [0025] If the coating film forming method, the coating film forming apparatus and the computer-readable recording medium related to the present disclosure are used, the surface of the object to be processed including the convex portion can be more uniform. to form a coating film.

[0027] Since the embodiments related to the present disclosure described below are examples for illustrating the present invention, the present invention should not be limited to the following contents. In the following description, the same code|symbol is used for the element which has the same element or the same function, and a repeated description is abbreviate|omitted. [Coated Film Forming Apparatus] First, the outline of the coating film forming apparatus 1 will be described. The coating film forming apparatus 1 is an apparatus for forming a coating film R (see the same figure and the like) on the surface of the object to be processed W (see FIG. 6 , etc.). [0029] Here, as shown in FIG. 6 and the like, the object to be processed W has a substrate (wafer) W1 and at least one convex portion W2. The substrate W1 may be in the shape of a disk, a part of the circle may be cut out, or a shape other than a circle such as a polygon may be formed. The substrate W1 may be various substrates such as a semiconductor substrate, a glass substrate, a mask substrate, and an FPD (Flat Panel Display) substrate. The convex portion W2 is provided on the surface W1a of the substrate W1. The convex part W2 should just protrude outward from the surface W1a of the board|substrate W1. The shape of the convex portion W2 is not limited at all, even if it is a rectangular parallelepiped shape and other various shapes. The material of the convex portion W2 may be an organic material or an inorganic material without any limitation as long as the coating film R can be formed on the surface W2a of the convex portion W2 (the upper surface and outer peripheral surface exposed to the outside). In addition, in this specification, "the surface of the object W to be processed" means the surface where the surface W1a of the board|substrate W1 and the surface W2a of the convex part W2 merge. [0030] The coating film R is formed on the surface of the object to be processed W by the coating film forming apparatus 1. As the material constituting the coating film R, photoresist material, color photoresist material, polyimide material, SOC (Spin On Carbon) material, metal hard mask material and other materials can be used without any limitation. The photoresist material may be any other material, even if it is a resin material, and is not limited at all. The photoresist material may be, for example, a photosensitive material in which light of a specific wavelength expresses photosensitivity. The photosensitive material may be negative type or positive type. [0031] As shown in FIGS. 1 to 3 , the coating film forming apparatus 1 includes a carrier block 2, a processing block 3, and a controller (control unit) CU. [0032] The carrier block 2 has a carrier station 21 and a carry-in and carry-out unit 22. The carrier station 21 supports the plurality of carriers 10 . The carrier 10 accommodates at least one object to be processed W in a sealed state. On the side surface 10a of the carrier 10, a switch door (not shown) for taking out and placing the object to be processed W is provided. [0033] The carry-in and carry-out unit 22 is located between the carrier station 21 and the processing block 3. As shown in FIG. 2, the carrying-in and carrying-out part 22 has a plurality of opening and closing doors 22a. When the carrier 10 is placed on the carrier station 21, the switch door of the carrier 10 is in a state where the switch door 22a faces the switch door 22a. By opening the opening and closing door 22a and the opening and closing door of the side surface 10a at the same time, the inside of the carrier 10 and the inside of the carrying-in/out part 22 communicate with each other. The carry-in and carry-out portion 22 incorporates the receiving and transmitting arm A1. The receiving arm A1 takes out the object to be processed W from the carrier 10 and hands it to the processing block 3 , receives the object to be processed W from the processing block 3 and returns it into the carrier 10 . [0034] As shown in FIG. 2 and FIG. 3 , the processing block 3 includes multiple processing modules 31 and 32, a scaffolding part 33 and a conveying arm A2. The processing modules 31 and 32 are arranged so as to be aligned along the moving direction of the conveyance arm A2, as shown in FIG. 2, for example. [0035] As shown in FIG. 3, the processing module 31 has a plurality of liquid processing units U1, a coating liquid source B1 and a nitrogen gas source B2 arranged in the up-down direction. The liquid processing unit U1 is configured to apply a liquid for forming the coating film R to the surface of the object W to be processed. The coating liquid source B1 and the nitrogen gas source B2 are arranged in the lower part of the liquid processing unit U1. The coating liquid source B1 and the nitrogen gas source B2 accommodate the coating liquid and nitrogen gas (N ₂ gas) to be supplied to the liquid processing unit U1 , respectively. In addition, the coating liquid accommodated in the coating liquid source B1 is what dilutes the material particles (solute) of the coating liquid with a solvent (solvent). The solvent is not limited as long as it is known to be suitable for the dilution of coating liquid material particles. For example, isopropyl alcohol (hereinafter, also referred to as IPA), propylene glycol monomethyl ether acetate (hereinafter, referred to as IPA) is used. , also referred to as PGMEA), γ-butyrolactone (hereinafter, also referred to as GBL), etc. may be used. The boiling point of IPA is 82.4°C. The boiling point of PGMEA is 146°C. The boiling point of GBL is 204°C. [0036] As shown in FIG. 3 , the processing module 32 includes a plurality of thermal processing units U2 (second heating units) arranged in the vertical direction. The heat treatment unit U2 is configured to perform heat treatment on the object to be processed W every time the coating film R is formed. Specific examples of the heat treatment include heat treatment for volatilizing the solvent of the coating liquid or curing the coating liquid material. [0037] As shown in FIG. 2 , the shelf portion 33 is arranged on the side of the carrier block 2 in the processing block 3. As shown in FIG. The shelf part 33 temporarily accommodates the object to be processed W, and is used for receiving and receiving the object to be processed W between the receiving and receiving arm A1 and the processing block 3 . The conveyance arm A2 conveys the object to be processed W between the shelf portion 33 and the processing modules 31 and 32 and between the processing modules 31 and 32. [0038] The controller CU controls the coating film forming apparatus 1 partially or as a whole. As shown in FIG. 4 , the controller CU includes a reading unit M1 , a memory unit M2 , a processing unit M3 , and an instruction unit M4 as functional modules. These functional modules are merely for the convenience of dividing the functions of the controller CU into plural modules, which does not necessarily mean that the hardware constituting the controller CU is divided into such modules. Each functional module is not limited to being realized by the execution of the program, even if it is realized by a dedicated circuit (such as a logic circuit) or an integrated circuit (ASIC: Application Specific Integrated Circuit) that integrates it. can also be. [0039] The reading unit M1 reads a program from the computer-readable recording medium 200. The recording medium 200 records programs for causing the coated film forming apparatus 1 to perform various operations. The recording medium 200 may be, for example, a semiconductor memory, an optical recording disc, a magnetic recording disc, or a magneto-optical recording disc. [0040] The memory part M2 stores various data. The memory part M2 memorize|stores setting data etc. inputted from an operator via an external input device (not shown), for example, in addition to the program read by the reading part M1, for example. [0041] The processing unit M3 processes various data. The processing unit M3 generates a signal for operating the liquid processing unit U1 and the heat treatment unit U2 based on, for example, various data stored in the memory unit M2. [0042] The instruction part M4 sends the signal generated in the processing part M3 to the liquid processing unit U1 or the thermal processing unit U2. [0043] The hardware of the controller CU is constituted by, for example, one or more computers for control. The controller CU has, for example, the circuit CU1 shown in FIG. 5 in terms of the hardware configuration. The circuit CU1 may be constituted by circuit elements (circuitry). The circuit CU1 specifically has a processor CU2, a memory CU3, a storage CU4, a driver CU5 and an input/output port CU6. The processor CU2 cooperates with at least one of the memory CU3 and the storage CU4 to execute the program, and execute the input and output of the signal through the input/output port CU6, thereby constituting the above functional modules. The driver CU5 is a circuit for driving various devices of the coating film forming apparatus 1, respectively. The input/output port CU6 is used to input and output signals between the driver CU5 and various devices of the coating film forming apparatus 1 . [0044] In the present embodiment, although the coating film forming apparatus 1 is provided with one controller CU, it may be provided with a control group (control unit) composed of a plurality of controllers CU. When the coating film forming apparatus 1 includes a controller group, each of the above functional modules may be realized by one controller CU, or may be realized by a combination of two or more controllers CU. When the controller CU is composed of a plurality of computers (circuit CU1 ), the above functional modules can be realized by one computer (circuit CU1 ) respectively, and even a combination of two or more computers (circuit CU1 ) can be realized. . The controller CU may have a complex number of processors CU2. In this case, each of the above functional modules can be implemented by one processor CU2, or can be implemented by a combination of two or more processors CU2. [Configuration of Liquid Processing Unit] Next, the liquid processing unit U1 will be described in more detail with reference to FIGS. 6 and 7 . As shown in FIG. 6 , the liquid processing unit U1 includes a rotation holding unit 40 , a driving unit 50 , a pump P, a valve V, a heater 71 , and a heat insulating material 72 . [0046] The rotation holding part 40 has a rotating part 41 and a holding part 42. The rotating part 41 has a rotating shaft 43 protruding upward. The rotating part 41 rotates the rotating shaft 43 using, for example, an electric motor or the like as a power source. The holding portion 42 is provided at the front end portion of the rotating shaft 43 . The object to be processed W is arranged on the holding portion 42 . The holding part 42 holds the object to be processed W slightly horizontal by, for example, suction or the like. That is, the rotation holding unit 40 rotates in the vicinity of the axis (rotation axis) perpendicular to the surface of the object W (surface W1a of the substrate W1 ) in a state where the attitude of the object to be processed W is almost horizontal. . In this embodiment, since the rotation axis passes through the center of the object to be processed W (substrate W1) having a circular shape, it is also the central axis. In the present embodiment, as shown in FIG. 6 , the rotation holding unit 20 rotates clockwise when viewed from above to rotate the object W to be processed. [0047] The driving unit 50 is configured to drive the nozzle N. The drive unit 50 has a guide rail 51 , a slider 52 and a robot arm 53 . The guide rail 51 extends in the horizontal direction above the rotation holding portion 40 (the object to be processed W). The slider 52 is connected to the guide rail 51 so as to be movable in the horizontal direction along the guide rail 51 . The robot arm 53 is connected to the slider 52 so as to be movable in the vertical direction. The nozzle N is connected to the lower end of the robot arm 53 . Inside the robot arm 53, a flow path through which the coating liquid can flow is formed. This flow path is connected to the coating liquid source B1 via the pump P. [0048] The driving unit 50 moves the slider 52 and the robot arm 53 by a power source (not shown) such as an electric motor, thereby moving the nozzle N. When viewed from above, the nozzle N moves along the radial direction of the object to be processed W on a straight line orthogonal to the axis of rotation of the object to be processed W when the coating liquid is discharged. [0049] The nozzle N is opened downward toward the surface of the object W to be processed. The nozzle N may be, for example, a 2-fluid nozzle of an internal mixing type, a 2-fluid nozzle of an external mixing type, or a 1-fluid nozzle. In this specification, the structure of the nozzle N will be described with reference to FIG. 7 taking an example of a two-fluid nozzle of an internal mixing type. The nozzle N has a substantially cylindrical body N1 and a pipe N2 connected to the side surface of the body N1. The piping N2 is connected to the nitrogen gas source B2 via the valve V and the heater 71 . [0050] The flow paths N3 and N4 are formed inside the body N1. The flow path N3 communicates with the flow path of the coating liquid formed inside the robot arm 53 . The flow path N3 extends in the vertical direction within the main body N1, and the lower end communicates with the discharge port N5 of the nozzle N. The flow path N4 communicates with the piping N2. The flow channel N4 extends from the outer peripheral surface of the body N1 to the vicinity of the lower end of the flow channel N3 within the body N1. In the junction portion N6 where the flow path N4 and the flow path N3 merge, the coating liquid flowing in the flow path N3 and the nitrogen gas flowing in the flow path N4 are collided and mixed, and minute droplets of the coating liquid (coating liquid liquid) are generated. drop). The droplets are sprayed (sprayed) toward the surface of the object to be processed W from the discharge port N5. The height position of the surface of the object to be treated W from the discharge port N5 (the straight-line distance between the discharge port N5 and the surface of the object to be treated W in the vertical direction) depends on the size of the object to be treated W, the flow rate of the coating liquid, The flow rate of the coating liquid, the heating temperature of the coating liquid (details will be described later), etc. are appropriately set, but for example, it may be about 50 mm to 100 mm, about 65 mm to 80 mm, or about 70 mm to 75 mm. [0051] As shown in FIG. 6, the pump P receives the control signal from the controller CU, and sends the coating liquid from the coating liquid source B1 to the nozzle N. The pump P, the robot arm 53 , the nozzle N (flow path N3 ), and the coating liquid source B1 constitute a supply unit 60 for supplying the coating liquid to the object to be processed W as shown in FIG. 7 . [0052] As shown in FIG. 6, the valve V receives the control signal from the controller CU, and sends nitrogen gas from the nitrogen gas source B2 to the nozzle N. [0053] The heater 71 receives a control signal from the controller CU, and heats the nitrogen gas sent from the nitrogen gas source B2 to a specific temperature (a temperature higher than room temperature). Therefore, when the nitrogen gas heated by the heater 71 merges with the coating liquid at the junction N6, the coating liquid is heated and becomes a heating liquid. That is, the heating liquid is sprayed from the discharge port N5 of the nozzle N in the state of droplets. Here, even if the temperature of the heating liquid (droplets of the coating liquid) at the discharge port N5 of the nozzle N is equal to or less than 1/2 of the boiling point of the solvent (solvent) of the coating liquid, the heater is set. The heating amount of nitrogen gas due to 71 can also be used (the first temperature range). Specifically, the temperature of the heated liquid at the discharge port N5 may be 41.2°C or lower when the solvent is IPA, 73°C or lower when the solvent is PGMEA, and even 73°C or lower when the solvent is GBL. It may be 102°C or lower. In this case, since the coating liquid after mixing with the heated nitrogen gas hardly becomes a high temperature, the volatilization amount of the solvent (solvent) is suppressed from becoming too large, and the droplets sprayed from the nozzle N reach to the treated area. The surface of the body W is difficult to cure before. Alternatively, the heating amount of the nitrogen gas by the heater 71 may be set so that the temperature of the heating liquid (droplets of the coating liquid) at the discharge port N5 of the nozzle N is 35° C. to 60° C. (2nd temperature range). Also in this case, it becomes difficult to solidify before the liquid droplets sprayed from the nozzle reach the surface of the object to be processed. Alternatively, the heating amount of nitrogen gas by the heater 71 may be set so that the temperature of the heating liquid (droplets of the coating liquid) at the discharge port N5 of the nozzle N satisfies both of the above-mentioned first and second temperature ranges Also available (3rd temperature range). [0056] The heat insulating material 72 is arranged around the piping N2, and suppresses the movement of heat inside and outside the piping N2. Therefore, the heat insulating material 72 suppresses the temperature drop of the heating liquid until the coating liquid (heating liquid) heated by the heater 71 is discharged from the discharge port N5. Valve V, piping N2, nozzle N (flow path N4), nitrogen gas source B2 and heater 71 constitute the heating for supplying heated nitrogen gas to nozzle N and simultaneously heating the coating liquid by heated nitrogen gas Supply part 70 (1st heating part). [Configuration of Heat Treatment Unit] Next, with reference to FIGS. 8 and 9 , the configuration of the heat treatment unit U2 will be described. The heat treatment unit U2 includes a heating chamber 110 for heating the object to be processed W and a conveyance mechanism 120 for conveying the object to be processed W in the casing 100 . On both side walls of the portion of the casing 100 corresponding to the conveying mechanism 120 , there are formed loading and unloading ports 101 for transporting the object to be processed W into the casing 100 and unloading the object W to the outside of the casing 100 . [0059] The heating chamber 110 has a cover portion 111 and a hot plate accommodating portion 112. The cover portion 111 is positioned above the hot plate accommodating portion 112 , and can move up and down between an upper position spaced from the hot plate accommodating portion 112 and a lower position placed on the hot plate accommodating portion 112 . When the lid portion 111 is located at the lower position, it constitutes the processing chamber PR together with the hot plate accommodating portion 112 . A vent portion 111a is provided in the center of the cover portion 111 . The exhaust part 111a is used to exhaust gas from the processing chamber PR. [0060] The hot plate accommodating portion 112 has a cylindrical shape, and accommodates the hot plate 113 therein. The outer peripheral portion of the hot plate 113 is supported by the support member 114 . The outer periphery of the support member 114 is supported by a cylindrical support ring 115 . On the upper surface of the support ring 115, a gas supply port 115a opened upward is formed. The gas supply port 115a ejects the inert gas into the processing chamber PR. [0061] As shown in FIG. 9, the hot plate 113 is a flat plate in a circular shape. The outer shape of the hot plate 113 is larger than the outer shape of the object W to be processed. Three through holes HL (refer to FIG. 9 ) extending through the hot plate 113 are formed in the thickness direction thereof. On the upper surface of the hot plate 113, six support pins 113a for supporting the object to be processed W are erected (refer to FIG. 8). The height of the support pins 113a may be, for example, about 100 μm. [0062] Returning to FIG. 8 , the heater 116 is arranged under the hot plate 113. The heater 116 is connected to the controller CU, and is controlled according to an instruction signal from the controller CU. [0063] An elevating mechanism 119 is arranged below the hot plate 113. The elevating mechanism 119 includes a motor 119a disposed outside the casing 100, and three elevating pins 119b that are moved up and down by the motor 119a. The lift pins 119b are configured to pass through the corresponding through holes HL, respectively. When the controller CU sends an up signal or a down signal to the motor 119a, the lift pins 119b move up and down while moving in the corresponding through holes HL. When the leading end of the lift pin 119b protrudes above the hot plate 113, the object to be processed W can be placed on the leading end of the lift pin 119b. The object W placed on the front end of the lift pin 119b moves up and down as the lift pin 119b moves up and down. [0064] The conveying mechanism 120 is provided adjacent to the heating chamber 110. The conveyance mechanism 120 has a conveyance plate 121 on which the object to be processed W is placed. The conveyance plate 121 is a rectangular flat plate as shown in FIG. 9 . The end portion of the conveying plate 121 on the side of the heating chamber 110 has an arc shape protruding toward the heating chamber 110 . [0065] The conveyance plate 121 is mounted on the rail 122 extending toward the heating chamber 110 side. The conveyance plate 121 is driven by the drive part 123 and can move horizontally on the rail 122 . The conveying plate 121 moved to the heating chamber 110 side is positioned above the heating plate 113 . [0066] Two slits 124 extending along the extending direction of the rail 122 are formed on the conveying plate 121. The slit 124 is formed in the conveyance plate 121 and extends from the end portion on the heating chamber 110 side to the vicinity of the center portion of the conveyance plate 121 . Interference between the conveying plate 121 moving to the heating chamber 110 side and the lift pins 119b protruding from the heating plate 113 is prevented by the slit 124 . [0067] As shown in FIG. 8 , the elevating mechanism 125 is arranged below the conveying plate 121. The elevating mechanism 125 has a motor 125a disposed outside the casing 100, and three elevating pins 125b that are moved up and down by the motor 125a. The lift pins 125b are configured to be able to pass through the slits 124, respectively. When the controller CU sends a rising signal or a falling signal to the motor 125a, the lift pin 125b rises and falls while moving in the slot 124. When the leading end of the lift pin 125b protrudes above the conveyance plate 121, the object to be processed W can be placed on the leading end of the lift pin 125b. The object W placed on the front end of the lift pin 125b moves up and down as the lift pin 125b moves up and down. [Method for Forming Coating Film] Next, a method for forming the coating film R on the surface of the object to be processed W (coating film forming method) will be described with reference to FIGS. 10 and 11 . First, the controller CU controls the receiving and transmitting arm A1, and the to-be-processed object W in the carrier 10 is conveyed to the shelf part 33 by the receiving and transmitting arm A1. Next, the controller CU controls the conveyance arm A2, and takes out the object to be processed W from the scaffold portion 33 by the conveyance arm A2, and conveys it to the heat treatment unit U2. In the heat treatment unit U2, the controller CU controls the conveyance mechanism 120 (the conveyance plate 121), and the object to be processed W is conveyed into the heating chamber 110 (step S1). When the object to be processed W is placed on the hot plate 113, the controller CU controls the elevating mechanism 119, and the lid portion 111 is lowered to the lower position by the elevating mechanism 119. In this manner, the object to be processed W is accommodated in the processing chamber PR constituted by the lid portion 111 and the hot plate accommodating portion 112 . [0069] Next, the controller CU controls the heating chamber 110 to heat the object to be processed W to a specific temperature by the heating chamber 110 (step S2: the first process; the first process). The heating temperature of the object W in the heating chamber 110 may be set to a temperature lower than the boiling point of the solvent contained in the droplets by 0°C to 30°C. When the heating temperature of the object W by the heating chamber 110 is 30° C. or more lower than the boiling point of the solvent contained in the droplets, it becomes easy to promote the solvent of the droplets sprayed in the later-described step S5 of volatilization. Therefore, the droplets stay in the concave parts (between the convex parts W2 ) of the object to be processed W, and on the base end side of the convex parts W2 , in particular, the increase in the film thickness of the coating film R is suppressed. When the heating temperature of the object W by the heating chamber 110 is 0°C lower than the boiling point of the solvent contained in the droplets (that is, the temperature equal to the boiling point) or less, it is sprayed in step S5 to be described later. Before the droplets reach the surface of the object to be processed W, it is difficult for the solvent of the droplets to evaporate almost. Therefore, it is suppressed that the coating liquid material particles contained in the coating liquid droplets are successively deposited on the surface of the object to be processed W while maintaining their shape. When the solvent of the coating liquid is IPA, since the boiling point of IPA is 82.4°C, even if the heating temperature of the object W in the heating chamber 110 is set to about 55°C to 85°C. When the solvent of the coating liquid is PGMEA, since the boiling point of PGMEA is 146°C, the heating temperature of the object W in the heating chamber 110 may be set to about 110°C to 150°C. When the solvent of the coating liquid is GBL, since the boiling point of GBL is 204°C, the heating temperature of the object W in the heating chamber 110 may be set to about 150°C to 205°C. [0071] Next, the controller CU controls the elevating mechanism 119 and the conveying mechanism 120 to carry out the heated object W from the heating chamber 110. Next, the controller CU controls the transfer arm A2, and the object to be treated W is taken out from the heat treatment unit U2 by the transfer arm A2, and transferred to the liquid treatment unit U1 (step S3). The time required until the object to be processed W is heated by the heating chamber 110 and then conveyed to the liquid processing unit U1 is, for example, about several seconds to 10 seconds. At the time of this conveyance, the temperature of the to-be-processed object W to be heated can fall, for example, about 20 degreeC - 30 degreeC. [0072] When the object to be processed W is transported to the liquid processing unit U1 and held in the holding part 42 of the rotation holding part 40, the controller CU controls the rotating part 41 to drive the object to be processed W to rotate (step S4). In this state, the controller CU controls the drive unit 50, the pump P, the valve V, and the heater 71 so that the nozzle N follows the diameter of the object W on a straight line perpendicular to the rotation axis of the object W. While moving, spray droplets of the heated coating liquid (droplets of heating liquid) from the discharge port N5 of the nozzle N to the surface of the rotating object W (step S5; refer to FIG. 11(a); 3 works; 2nd treatment). [0073] At this time, the nitrogen gas heated by the heater 71 is supplied to the nozzle N and mixed with the coating liquid to form a heating liquid (first heating liquid) (second process; second treatment). Therefore, as shown in FIG. 11( a ), immediately after the droplets are sprayed from the nozzle N, the solvent of the droplets volatilizes, and the fluidity of the droplets (coating liquid) decreases. In addition, at this time, the object to be processed W is heated in step S2, and the surface of the object to be processed W becomes a specific temperature. Therefore, the liquid droplet just before adhering to the object to be processed W or the solvent of the droplet adhering to the object to be processed W receives heat from the object to be processed W and volatilizes. In this way, the material particles (coating liquid material) of the droplets adhere to the surface of the object to be processed W (see FIG. 11( b )). By moving the nozzle N on the surface of the object to be processed W one or more times, a coating film of a specific thickness is formed on the surface of the object to be processed W (refer to FIG. 11( c )). [0074] Next, the controller CU controls the transfer arm A2, and the object to be processed W is taken out from the liquid processing unit U1 by the transfer arm A2, and after the object to be processed W is cooled to a predetermined temperature, it is transported to the shelf portion 33. At this time, the object to be processed W may be forcibly cooled by using a cooling mechanism such as a cooling plate, or it may be naturally cooled. After that, the controller CU controls the receiving and receiving arm A1, and returns the object to be processed W from the shelf part 33 to the inside of the carrier 10 by the receiving and receiving arm A1 (step S6). In this way, the formation process of the coating film R is completed. [Function] In the present embodiment as described above, when the coating liquid is sprayed on the surface of the object to be treated W, the coating liquid is heated so that it becomes a heating liquid. Therefore, when the heating liquid is ejected from the nozzle N, immediately after the solvent (solvent) volatilizes, the concentration of the material particles (solute) in the coating liquid increases, so that the fluidity of the coating liquid (heating liquid) is lowered. . Therefore, on the surface (concave-convex surface) of the object to be processed W, it is suppressed that the droplets agglomerate and flow. As a result, the material particles of the coating liquid are easily adhered to the surface of the object to be processed W uniformly. By doing so, the coating film R can be more uniformly formed along the surface of the object to be processed W including the convex portion W2. In addition, since the volatilization of the solvent (solvent) is accelerated immediately after the heating liquid is sprayed from the nozzle N, in order to completely volatilize the solvent (solvent) of the droplets reaching the surface of the object to be treated W (solvent) , there is no need to transport the object to be processed W to the heat treatment unit U2. Therefore, in order to form the coating film R of a desired thickness on the surface of the object to be processed W, it is not necessary to make the object to be processed W go back and forth between the liquid processing unit U1 and the heat treatment unit U2. Therefore, the time required to form the coating film R on the object to be processed W can be extremely shortened. [0077] In this embodiment, before spraying droplets on the surface of the object to be processed W, in step S2, the object to be processed W is heated in the heat treatment unit U2. Therefore, over the entire surface of the object to be processed W, the solvent (solvent) of the coating liquid sprayed in step S5 receives heat from the object to be processed W and volatilizes. Therefore, on the surface (concave-convex surface) of the object W to be processed, it is further suppressed that the droplets aggregate and flow. Therefore, the coating film R can be formed more uniformly along the surface of the object to be processed W including the convex portion W2. [0078] In the present embodiment, the heating liquid is obtained by mixing the coating liquid and the heated nitrogen gas in the nozzle N to heat the coating liquid. Therefore, until the coating liquid is discharged from the nozzle N, the fluidity of the coating liquid is maintained in a high state. Therefore, it becomes easy to spray the coating liquid from the nozzle N in the state of droplets. As a result, droplets can be generated by a simple method in order to improve the fluidity of the coating liquid before discharge from the nozzle N, and to reduce the fluidity of the coating liquid after the discharge from the nozzle N to make the coating liquid droplets. The opposite requirement is that the material particles of the liquid distribution are uniformly adhered to the surface of the object W to be treated. [0079] In the present embodiment, in step S5, in a state in which the object to be processed W is rotated, droplets are sprayed from the nozzle N to the surface of the object to be processed W. Therefore, it is more difficult to repeatedly spray the surface of the object to be processed W from the nozzles, compared to the case of spraying droplets from the nozzle N to the surface of the object to be processed W while the nozzle N is meandering on the surface of the object to be processed W that is stationary. Droplets of N. Therefore, the coating film R can be formed more uniformly along the surface of the object to be processed W including the convex portion W2. [Other Embodiments] Although the embodiments related to the present disclosure have been described in detail above, various modifications may be added to the above-described embodiments within the scope of the gist of the present invention. For example, in the present embodiment, although the processing of heating the object W by the heating chamber 110 is performed in the heat treatment unit U2 (step S2), the surface of the object W from the nozzle N is subjected to the liquid processing unit U1. The process of spraying the coating liquid droplets (step S5), however, even if a process chamber having both the liquid process unit U1 and the heat treatment unit U2 is used, both processes may be performed in the process chamber. In this case, when the object to be processed W is heated, the rotation of the object to be processed W may be stopped first. In the case where a plurality of protrusions W2 are present in the radial direction of the substrate W1, the closer to the rotation axis of the substrate W1, the smaller the centrifugal force, so when the droplets condense on the surface of the object to be processed W, the closer to the rotation axis The more easily the coating liquid aggregated in the convex portion W2 of the larger is to stay. Therefore, when the nozzle N is located in the vicinity of the rotation axis, the moving speed of the nozzle N can be increased. In this case, on the surface of the object to be processed W, in the vicinity of the rotation axis, since the spray amount of the droplets decreases, it becomes difficult for the droplets of the coating liquid to agglomerate. [0082] The controller CU may control the rotating part 41 so that the rotation number of the object W to be processed increases as the position of the nozzle N is closer to the rotation axis of the substrate W1. At this time, the controller CU may control the rotating part 41 so that the moving speed (linear velocity) of the object W directly under the nozzle N is constant regardless of the position of the nozzle N. Even if the controller CU executes the control of increasing the rotation number of the object W as the position of the nozzle N is closer to the rotation axis of the substrate W1, and the closer the nozzle N is to the rotation axis, the faster the moving speed of the nozzle N is. Control is also available. The controller CU may control the rotation unit 41 so that the number of rotations of the object W to be processed is constant regardless of the position of the nozzle N with respect to the substrate W1. [0083] In the case where the spray area of the droplets from the nozzle N is larger than the size of the surface of the object to be processed W, etc., the nozzle N may not be moved or the object to be processed W may not be rotated. [0084] In addition to step S2, the object to be processed W may be heated even in the process of blowing droplets from the nozzle N onto the surface of the object to be processed W (step S5). Alternatively, the process of step S2 in which the object to be processed W is heated in advance may not be performed. For example, as shown in FIG. 12 , even if the liquid processing unit U1 further has a gas nozzle GN configured to spray heated nitrogen gas (high temperature nitrogen gas) on the surface of the object to be processed W, according to the instruction from the controller CU Alternatively, the operation of the gas nozzle GN may be controlled by the gas supply unit. More specifically, in step S5, even if the control unit CU controls the gas supply unit, the gas nozzle GN is made to follow the nozzle N, and the high temperature is sprayed from the gas nozzle GN to the spray point of the liquid droplets on the surface of the object W to be processed. Nitrogen can also be used. In this case, since the solvent is dried by high-temperature nitrogen gas from the gas nozzle GN during the blowing of the droplets, the time required to form the coating film R on the surface of the object W can be shortened. In addition, the temperature of the high-temperature nitrogen gas may be about 50°C to 150°C. In the above-mentioned embodiment, although the nitrogen gas is heated by the heater 71, and the coating liquid is heated by the heated nitrogen gas, even as shown in FIG. Instead of the heater 71, a heater 81 may be provided on the upstream side to directly heat the coating liquid. In this case, the fluidity of the coating liquid can be maintained until immediately before the coating liquid is discharged from the nozzle N. Therefore, it becomes easy to spray the coating liquid from the nozzle N in the state of droplets. Therefore, it is possible to use a simple method to generate droplets in order to improve the fluidity of the coating liquid before discharging from the nozzle N, and to reduce the fluidity of the coating liquid after discharging from the nozzle N to apply the liquid droplets. The opposite requirement is that the material particles of the liquid adhere uniformly to the surface of the object W to be treated. [0087] As shown in FIG. 14 , a bypass flow path connecting the upstream side of the valve V and the downstream side of the heater 71 may be further provided, and a valve 73 may be provided in the bypass flow path at the same time. In this case, by controlling the valves V and 73 by the controller CU, nitrogen gas heated by the heater 71 and nitrogen gas not heated by the heater 71 (normal temperature nitrogen gas) can be selectively supplied to the nozzle N . Specifically, in the case where the treatment of spraying droplets on the surface of the object W is the first time, even if the controller CU closes the valve V and opens the valve 73, the heating liquid is relatively reduced (the first The temperature of the heating liquid) can also be used. In addition, when the treatment of spraying droplets on the surface of the object W is the second time, even if the controller CU opens the valve V and closes the valve 73, the heating liquid (second heating liquid) is relatively increased. ) can also be used (the 4th project; the 3rd treatment). In this way, the liquid droplets sprayed on the surface of the treatment object W for the first time (the third process; the second treatment) tend to have high fluidity, and thus easily enter the narrow concave parts (convex parts) in the object to be treated W. between W2). In addition, since the liquid droplets sprayed on the surface of the object W after the second time (the fifth process; the third treatment) tend to have low fluidity, they tend to adhere to the side surface of the convex portion W2 of the object W. Therefore, the coating film R can be formed more uniformly along the surface of the object to be processed W including the convex portion W2. Furthermore, in order to prevent the material particles of the coating liquid from solidifying in the nozzle N and the nozzle N being clogged, the controller CU closes the valve V and opens the valve 73 even after the spraying process of the droplets from the nozzle N is performed. , the nozzle N is supplied with nitrogen at room temperature, and the nozzle N can also be cooled. [0088] As shown in FIG. 15 , in order to prevent the material particles of the coating liquid from being solidified in the nozzle N and the nozzle N being clogged, the liquid processing unit U1 may further include a cleaning unit 82 for the nozzle N. The cleaning unit 82 is a container that stores, for example, a solvent. Cooling and cleaning of the nozzles N are performed by immersing the nozzles N that perform the spraying process of droplets in the solvent in the cleaning section 82 . [0089] As the gas to be mixed into the coating liquid, various gases other than nitrogen (for example, inert gas, air, etc.) may be used. [Example] [0090] In the case of forming the coating film R on the surface of the object to be processed W by using the coating film forming apparatus 1 related to the present embodiment, it was confirmed that the coating film R could be formed along the surface of the object including the convex portion W2. Since the coating film R was uniformly formed on the surface of the treatment body W, the following test was performed. [0091] Prepare the object to be processed W in which a plurality of protrusions W2 are provided on a disk-shaped substrate W1 with a diameter of 150 mm. Furthermore, a photoresist solution prepared by diluting the positive photoresist with PGMEA is prepared. [0092] Next, the object to be processed W is heated at 120° C. for 60 seconds by the heat treatment unit U2. Next, the heated object W is conveyed to the liquid processing unit U1, and the prepared photoresist liquid is sprayed onto the surface of the object W from the nozzle N of the 2-fluid nozzle. At this time, the rotation speed of the object W by the rotation holding unit 40 is changed in the range of 60 rpm to 600 rpm so that the moving speed (linear velocity) of the object W directly under the nozzle N becomes constant. . Furthermore, the moving speed of the nozzle N is 10 mm/sec to 150 mm/sec. In addition, the nozzle N is made to go back and forth on the surface of the object W to be processed 14 times. By the above, the photoresist film (coating film R) is formed on the surface of the object to be processed W. [0093] Next, with respect to the arbitrary two convex portions W2, the state of the cross section was observed with an electron microscope. Electron micrographs of the two convex portions W2 are schematically shown in FIGS. 16( a ) and ( b ). It was confirmed that the photoresist film (coating film R) was extremely uniformly formed along the surface of the object to be processed W including the convex portion W2 in any of the convex portions W2.

1‧‧‧Coated film forming apparatus 60‧‧‧supply part 70‧‧‧heating supply part (first heating part) 71, 81‧‧‧heater 72‧‧‧thermal insulation material CU‧‧‧ Controller (control part)N‧‧‧Nozzle N5‧‧‧Discharge port R‧‧‧Coating film U1‧‧‧Liquid processing unit U2‧‧‧Heat treatment unit (2nd heating part) W‧‧‧Object to be treated W1‧‧‧Substrate W1a‧‧‧Surface W2‧‧‧Protrusion W2a‧‧‧Surface

1 is a perspective view showing a coating film forming apparatus. Figure 2 is a sectional view taken along line II-II of Figure 1. Figure 3 is a sectional view taken along line III-III of Figure 2. Fig. 4 is a block diagram showing a coating film forming apparatus. Figure 5 is a schematic diagram showing the hardware configuration of the controller. Fig. 6 is a schematic diagram showing a liquid processing unit. Fig. 7 is a partial cross-sectional view showing the vicinity of the nozzle. Figure 8 is a cross-sectional view of the heat treatment unit viewed from the side. Fig. 9 is a sectional view taken along the line IX-IX of Fig. 8. Fig. 10 is a flowchart for explaining the procedure of forming the coating film. Fig. 11 is a schematic diagram for explaining the formation sequence of the coating film. Fig. 12 is a schematic diagram partially showing another example of the liquid processing unit. Fig. 13 is a schematic diagram showing another example of the liquid processing unit. Fig. 14 is a schematic diagram showing another example of the liquid processing unit. Fig. 15 is a schematic diagram showing another example of the liquid processing unit. Fig. 16 is a diagram for explaining the embodiment.

42‧‧‧Maintenance Department

43‧‧‧Rotary shaft

53‧‧‧Robot Arm

60‧‧‧Supply Department

70‧‧‧Heating supply part (1st heating part)

71‧‧‧Heater

72‧‧‧Insulation

N‧‧‧Nozzle

N1‧‧‧Main body

N2‧‧‧Piping

N3‧‧‧Flow path

N4‧‧‧Flow path

N5‧‧‧Spit

N6‧‧‧Confluence

W‧‧‧Subject to be processed

W1‧‧‧Substrate

W1a‧‧‧surface

W2‧‧‧Protrusion

W2a‧‧‧surface

B1‧‧‧Coating liquid source

P‧‧‧ pump

B2‧‧‧Nitrogen source

V‧‧‧ valve

R‧‧‧Coating Film

Claims (13)

A method for forming a coating film, comprising: a first step of heating a target object including a substrate and a convex portion provided on a surface of the substrate; and a second step of heating a coating liquid to obtain a first step 1. Heating liquid; and 3rd process of spraying the above-mentioned 1st heating liquid from a nozzle in the state of droplets on the surface of the above-mentioned object to be processed after being heated in the above-mentioned 1st process; 4th process, which After the third step above, heating the coating liquid to obtain the second heating liquid; and the fifth step, after the fourth step, the surface of the object to be treated on which the coating film is formed is heated in liquid The second heating liquid is sprayed from the nozzle in a dripping state, and the temperature of the second heating liquid in the fourth step is set higher than the temperature of the first heating liquid in the second step. The method for forming a coated film according to claim 1, wherein in the third step, a gas nozzle different from the nozzle is caused to follow the surface of the object to be treated by blowing droplets from the nozzle. The nozzle blows heated nitrogen gas from the gas nozzle to the spraying place of the droplets on the surface of the object to be treated. The method for forming a coating film according to claim 1 or 2, wherein In the said 2nd process, the said coating liquid is heated so that the temperature of the said 1st heating liquid in the outlet of the said nozzle becomes 1/2 or less of the boiling point of the solvent contained in the said coating liquid. The coating film forming method according to claim 1 or 2, wherein in the second step, the coating liquid is heated so that the temperature of the first heating liquid at the outlet of the nozzle is 35° C. to 60° C. °C. The method for forming a coating film according to claim 1 or 2, wherein in the second step, the first step is obtained by mixing the coating liquid and the heated gas in the nozzle and heating the coating liquid. Heat the liquid. The method for forming a coating film according to claim 1 or 2, wherein in the second step, the first heating liquid is obtained by heating the coating liquid with a heater on the upstream side of the nozzle. A coating film forming apparatus comprising: a first heating unit configured to heat a coating liquid; and a second heating unit configured to heat an object to be processed including a substrate and a convex portion provided on a surface of the substrate ; a supply section having a nozzle; and a control section that performs: The first treatment is to control the second heating unit to heat the object to be treated; the second treatment is to control the first heating unit and the supply unit to control the object to be treated after being heated by the first treatment. The surface of the treatment body is sprayed from the nozzle in the state of droplets, that is, the coating liquid heated by the first heating part, that is, the first heating liquid; and the third treatment, which is performed after the second treatment, The first heating unit and the supply unit are controlled to spray the coating liquid heated by the first heating unit, that is, the second heating, from the nozzle in the state of droplets on the surface of the object to be treated. In the liquid, the temperature of the second heating liquid in the third treatment is set higher than the temperature of the first heating liquid in the second treatment. The apparatus for forming a coated film according to claim 7, further comprising a gas supply unit configured to discharge heated nitrogen gas from a gas nozzle, wherein the control unit controls the first heating unit and the a supply unit for spraying the droplets from the nozzles, and simultaneously controlling the gas supply unit so that the gas nozzles follow the nozzles to spray the droplets from the gas nozzles on the surface of the object to be treated. Blow heated nitrogen. The coating film forming apparatus according to claim 7 or 8, wherein the first heating section heats the coating liquid so that the output of the nozzle is The temperature of the said 1st heating liquid in the mouth is 1/2 or less of the boiling point of the solvent contained in the said coating liquid. The coating film forming apparatus according to claim 7 or 8, wherein the first heating section heats the coating liquid so that the temperature of the first heating liquid at the outlet of the nozzle becomes 35°C to 60°C. The coating film forming apparatus according to claim 7 or 8, wherein the first heating section is configured to mix the gas and the coating liquid in the nozzle by supplying the heated gas to the nozzle, and heat the coating Cloth liquid. The coating film forming apparatus according to claim 7 or 8, wherein the first heating section is a heater that heats the coating liquid on the upstream side of the nozzle. A computer-readable recording medium on which a program for causing a coating film forming apparatus to execute the coating film forming method as described in claim 1 or 2 is recorded.

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