TWI773179B - Optical scanning system - Google Patents
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Abstract
Description
本發明是有關於一種光學系統,且特別是有關於一種光學掃描系統。 The present invention relates to an optical system, and in particular to an optical scanning system.
光學雷達(Light(Laser)Detection And Ranging,LiDAR)是一種光學遙感技術,它通過向目標照射一束光,通常是一束脈衝雷射來測量目標距離等參數。光學雷達能高精度地測得距離、辨識物體外型並建立周遭3D地理資訊模型,具有高量測距離、高精度、高辨識度等優點,且不受環境亮度影響,可以不分晝夜地感測周遭障礙物形狀、距離等資訊,建立3D地理資訊模型。光學雷達在測繪學、考古學、地理學、地貌、地震、林業、遙感以及大氣物理等領域都有應用。此外,這項技術還用於機載雷射地圖測繪、雷射測高、雷射雷達等高線繪製等等具體應用中。 LiDAR (Light (Laser) Detection And Ranging, LiDAR) is an optical remote sensing technology that measures parameters such as target distance by irradiating a beam of light, usually a pulsed laser, to the target. Optical radar can measure the distance with high precision, identify the shape of the object and build a 3D geographic information model around it. It has the advantages of high distance measurement, high precision, and high recognition. It is not affected by environmental brightness and can sense day and night. Measure the shape, distance and other information of surrounding obstacles, and build a 3D geographic information model. Lidar has applications in surveying and mapping, archaeology, geography, geomorphology, earthquakes, forestry, remote sensing, and atmospheric physics. In addition, this technology is also used in specific applications such as airborne laser mapping, laser altimetry, and lidar contour drawing.
在自動駕駛汽車(autonomous cars)領域中,感測系統必須在各種環境下均能達到經準偵測100~200公尺內目標的能力,因此光學雷達是目前發展中自動駕駛必備的感測器之一。 In the field of autonomous cars, the sensing system must be able to accurately detect targets within 100-200 meters in various environments. Therefore, LiDAR is an essential sensor for autonomous driving currently under development. one.
光學雷達依照雷射掃描方式,可以區分為Flash、2D Raster-Scan、1D Line-Scan。Flash LiDAR的掃描方式如同照相機的閃光燈,同時照射一整個畫面;2D Raster-Scan LiDAR的掃描方式如同CRT顯示器,由雷射光源發出的光點進行光柵掃描,來構成一個面;1D Line-Scan LiDAR則是先將光源擴張成一維的線,再對另一維做掃描,來達到一個面。Flash LiDAR的優點是掃描速度快,缺點則是偵測距離短;2D Raster-Scan LiDAR則與Flash LiDAR相反,優點是偵測距離長,缺點則是掃瞄速度慢;1D Line Scan LiDAR的特性則介於兩者之間。 According to the laser scanning method, optical radar can be divided into Flash, 2D Raster-Scan, 1D Line-Scan. The scanning method of Flash LiDAR is like the flash of a camera, illuminating an entire screen at the same time; the scanning method of 2D Raster-Scan LiDAR is like a CRT display, and the light spots emitted by the laser light source are raster scanned to form a surface; 1D Line-Scan LiDAR It is to first expand the light source into a one-dimensional line, and then scan the other dimension to reach a surface. The advantage of Flash LiDAR is fast scanning speed, but the disadvantage is short detection distance; 2D Raster-Scan LiDAR is opposite to Flash LiDAR, the advantage is long detection distance, but the disadvantage is slow scanning speed; the characteristics of 1D Line Scan LiDAR are somewhere in between.
目前市場推出的1D Line-Scan LiDAR模組產品,基本上有二種不同的實施方式。 The 1D Line-Scan LiDAR module products currently launched in the market basically have two different implementations.
第一種實施方式如下。光源為垂直排列依序發光的雷射陣列光源,雷射光源為XY非對稱的光學元件(通常使用柱狀透鏡),將每一個雷射光源所發出的“點”橫向擴展成“線”。橫向的“線”搭配縱向排列的雷射陣列光源,掃描出一個面。收光部分最重要的是採用橫向排列的光電二極體(Photodiode)陣列感應器,搭配接收透鏡(Receiver Lens),將照射到目標物上每一條“線”的反射散射光收到感測器上。 The first embodiment is as follows. The light source is a laser array light source that emits light in a vertical arrangement, and the laser light source is an XY asymmetric optical element (usually a cylindrical lens is used), which laterally expands the "point" emitted by each laser light source into a "line". The horizontal "line" is matched with the vertically arranged laser array light source to scan a surface. The most important part of the light-receiving part is to use a photodiode array sensor arranged horizontally, with a receiving lens (Receiver Lens), to receive the reflected scattered light irradiating each "line" on the target to the sensor. superior.
第二種實施方式如下。雷射二極體(Laser diode)所發出的準直雷射光(點),經由微電機系統微鏡(MEMS micro-mirror)橫向掃描成為一條“線”,再經由散光鏡(Diffuser lens)將橫向的“線”縱向拉成一個面。收光部分採用縱向排列的光電二極體陣列感應器,搭配接收透鏡,將照射到目標物上每一條“線”的 反射散射光收到感測器上。 The second embodiment is as follows. The collimated laser light (spot) emitted by the laser diode is scanned laterally into a "line" by the MEMS micro-mirror, and then the lateral The "lines" are drawn lengthwise into a face. The light-receiving part adopts a photodiode array sensor arranged vertically, and is matched with a receiving lens to irradiate the light of each "line" on the target. The reflected scattered light is received on the sensor.
然而,第一種實施方式的光源採用雷射陣列,因此成本較貴;第二種實施方式的光源採用雷射二極體,可有效降低成本但仍需做進一步的光學架構優化。 However, the light source of the first embodiment uses a laser array, so the cost is relatively high; the light source of the second embodiment uses a laser diode, which can effectively reduce the cost, but further optimization of the optical structure is still required.
“先前技術”段落只是用來幫助瞭解本發明內容,因此在“先前技術”段落所揭露的內容可能包含一些沒有構成所屬技術領域中具有通常知識者所知道的習知技術。在“先前技術”段落所揭露的內容,不代表該內容或者本發明一個或多個實施例所要解決的問題,在本發明申請前已被所屬技術領域中具有通常知識者所知曉或認知。 The "prior art" paragraph is only used to help understand the present disclosure, so the content disclosed in the "prior art" paragraph may contain some that do not constitute the prior art known to those with ordinary skill in the art. The content disclosed in the "prior art" paragraph does not represent the content or the problem to be solved by one or more embodiments of the present invention, and has been known or recognized by those with ordinary knowledge in the technical field before the application of the present invention.
本發明提供一種光學掃描系統,其光學架構簡單,且成本較低。 The present invention provides an optical scanning system with simple optical structure and low cost.
本發明的一實施例的光學掃描系統,其包括一雷射光源、一光學模組、一掃描反射元件以及一控制器。雷射光源用以發出一雷射光束。光學模組位於雷射光束的光路徑上且具有相互垂直的一第一軸向以及一第二軸向。雷射光束穿透光學模組後在第一軸向上聚焦至掃描反射元件,並在第二軸向上準直傳遞至掃描反射元件。掃描反射元件反射雷射光束至一待掃描物並於待掃描物上形成一一維掃描光束。控制器電性連接至掃描反射元件。控制器控制掃描反射元件作動,使一維掃描光束沿一掃描方向掃 描待掃描物。 An optical scanning system according to an embodiment of the present invention includes a laser light source, an optical module, a scanning reflection element, and a controller. The laser light source is used for emitting a laser beam. The optical module is located on the light path of the laser beam and has a first axis and a second axis that are perpendicular to each other. After penetrating the optical module, the laser beam is focused on the scanning reflection element along the first axis, and is collimated and transmitted to the scanning reflection element along the second axis. The scanning reflection element reflects the laser beam to an object to be scanned and forms a one-dimensional scanning beam on the object to be scanned. The controller is electrically connected to the scanning reflection element. The controller controls the scanning reflection element to act, so that the one-dimensional scanning beam scans along a scanning direction Scan the object to be scanned.
根據一實施方式,在上述光學掃描系統中,雷射光源包括垂直共振腔面射型雷射或邊緣發射雷射。 According to an embodiment, in the above-mentioned optical scanning system, the laser light source includes a vertical resonant cavity surface-emitting laser or an edge-emitting laser.
根據一實施方式,在上述光學掃描系統中,掃描反射元件包括微機電系統反射鏡、掃描振鏡或捲動稜鏡。 According to an embodiment, in the above-mentioned optical scanning system, the scanning reflective element includes a MEMS mirror, a scanning galvanometer or a scrolling camera.
根據一實施方式,在上述光學掃描系統中,雷射光源為單一顆雷射二極體。 According to an embodiment, in the above-mentioned optical scanning system, the laser light source is a single laser diode.
根據一實施方式,在上述光學掃描系統中,一維掃描光束在待掃描物的平面上呈長條形光斑,且長條形光斑的長邊垂直於掃描方向。 According to an embodiment, in the above-mentioned optical scanning system, the one-dimensional scanning light beam forms a strip-shaped light spot on the plane of the object to be scanned, and the long side of the strip-shaped light spot is perpendicular to the scanning direction.
根據一實施方式,在上述光學掃描系統,更包括:多個感測元件,設置在一維掃描光束經待掃描物反射後的傳遞路徑上,感測元件沿該掃描方向排成陣列。 According to an embodiment, the above-mentioned optical scanning system further includes: a plurality of sensing elements disposed on the transmission path of the one-dimensional scanning beam reflected by the object to be scanned, and the sensing elements are arranged in an array along the scanning direction.
根據一實施方式,在上述光學掃描系統中,從雷射光源所發出的雷射光束具有一長軸以及一短軸,在雷射光束通過光學模組的光路徑中,雷射光束的長軸平行於光學模組的第一軸向,且短軸平行於光學模組的第二軸向。 According to an embodiment, in the above-mentioned optical scanning system, the laser beam emitted from the laser light source has a long axis and a short axis, and in the optical path of the laser beam passing through the optical module, the long axis of the laser beam The short axis is parallel to the first axis of the optical module, and the short axis is parallel to the second axis of the optical module.
根據一實施方式,在上述光學掃描系統中,具有長條形光斑的一維掃描光束的長軸垂直於掃描方向。 According to an embodiment, in the above-mentioned optical scanning system, the long axis of the one-dimensional scanning light beam having the elongated light spot is perpendicular to the scanning direction.
根據一實施方式,在上述光學掃描系統中,掃描方向垂直於光學模組的第一軸向。 According to an embodiment, in the above-mentioned optical scanning system, the scanning direction is perpendicular to the first axis of the optical module.
根據一實施方式,在上述光學掃描系統中,光學模組包 括:一準直透鏡;以及一柱狀透鏡。 According to an embodiment, in the above-mentioned optical scanning system, the optical module package Including: a collimating lens; and a cylindrical lens.
根據一實施方式,在上述光學掃描系統中,柱狀透鏡具有一平面軸以及一屈光軸,在雷射光束通過柱狀透鏡的光路徑中,雷射光束的長軸平行於柱狀透鏡的屈光軸,且短軸平行於柱狀透鏡的平面軸。 According to an embodiment, in the above-mentioned optical scanning system, the cylindrical lens has a plane axis and a refractive axis, and in the light path of the laser beam passing through the cylindrical lens, the long axis of the laser beam is parallel to the long axis of the cylindrical lens. The refractive axis, and the minor axis is parallel to the plane axis of the lenticular lens.
根據一實施方式,在上述光學掃描系統中,準直透鏡及柱狀透鏡依序配置於雷射光源及掃描反射元件之間。 According to an embodiment, in the above-mentioned optical scanning system, the collimating lens and the lenticular lens are sequentially arranged between the laser light source and the scanning reflective element.
基於上述,在本發明的一實施例的光學掃描系統中,由於掃描反射元件反射雷射光束至待掃描物並於待掃描物上形成一維掃描光束,且控制器使一維掃描光束沿掃描方向掃描待掃描物,光學掃描系統可以在簡單的光學架構下,就能完成一整個畫面的掃描,因此,本發明實施例的光學掃描系統的成本較低。 Based on the above, in the optical scanning system of an embodiment of the present invention, since the scanning reflective element reflects the laser beam to the object to be scanned and forms a one-dimensional scanning beam on the object to be scanned, and the controller makes the one-dimensional scanning beam scan along the When scanning the object to be scanned in the direction, the optical scanning system can complete the scanning of an entire screen under a simple optical structure. Therefore, the cost of the optical scanning system in the embodiment of the present invention is low.
100:光學掃描系統 100: Optical scanning system
110:雷射光源 110: Laser light source
112:發光面 112: Glowing Surface
120:光學模組 120: Optical module
122:準直透鏡 122: collimating lens
124:柱狀透鏡 124: Cylindrical lens
130:掃描反射元件 130: Scanning Reflective Elements
140:控制器 140: Controller
150:感測元件 150: Sensing element
B:雷射光束 B: Laser beam
C1:長軸方向 C1: Long axis direction
C2:短軸方向 C2: Short axis direction
D1、F:長軸 D1, F: long axis
D2:短軸 D2: short axis
E1:第一軸向 E1: The first axis
E2:第二軸向 E2: The second axis
O:待掃描物 O: object to be scanned
OA:光軸 OA: Optical axis
P1:平面軸 P1: plane axis
P2:屈光軸 P2: Refractive axis
SD:掃描方向 SD: Scanning direction
SB:一維掃描光束 SB: 1D Scanning Beam
圖1是根據本發明的一實施例的光學掃描系統的示意圖。 FIG. 1 is a schematic diagram of an optical scanning system according to an embodiment of the present invention.
圖2A是根據本發明的一實施例的光學掃描系統在視角垂直於第二軸向的示意圖。 2A is a schematic diagram of an optical scanning system according to an embodiment of the present invention when the viewing angle is perpendicular to the second axis.
圖2B是根據本發明的一實施例的光學掃描系統在視角垂直於第一軸向的示意圖。 2B is a schematic diagram of an optical scanning system according to an embodiment of the present invention when the viewing angle is perpendicular to the first axis.
圖3是根據本發明的一實施例的光學掃描系統的感測元件的排列方式的示意圖。 FIG. 3 is a schematic diagram of an arrangement of sensing elements of an optical scanning system according to an embodiment of the present invention.
關本發明之前述及其他技術內容、特點與功效,在以下配合參考圖式之一較佳實施例的詳細說明中,將可清楚的呈現。以下實施例中所提到的方向用語,例如:上、下、左、右、前或後等,僅是參考附加圖式的方向。因此,使用的方向用語是用來說明並非用來限制本發明。 The aforementioned and other technical contents, features and effects of the present invention will be clearly presented in the following detailed description of a preferred embodiment with reference to the drawings. The directional terms mentioned in the following embodiments, such as: up, down, left, right, front or rear, etc., are only for referring to the directions of the attached drawings. Accordingly, the directional terms used are illustrative and not limiting of the present invention.
圖1是根據本發明的一實施例的光學掃描系統的示意圖。請參考圖1,本發明的一實施例的光學掃描系統100,其包括一雷射光源110、一光學模組120、一掃描反射元件130以及一控制器140。
FIG. 1 is a schematic diagram of an optical scanning system according to an embodiment of the present invention. Please refer to FIG. 1 , an
在本實施例中,雷射光源110用以發出一雷射光束B。雷射光源110可為半導體雷射光源,並可包括垂直共振腔面射型雷射(Vertical Cavity Surface Emitting Laser,VCSEL)或邊緣發射雷射(Edge Emitting Laser,EEL)。在一實施例中,雷射光源110可為單一顆雷射二極體(Laser diode),因此,有利於縮減光學掃描系統100的整體體積與重量,並使成本降低。
In this embodiment, the
在本實施例中,光學模組120具有一光軸OA,雷射光束B與光軸OA正交的剖面具有一長軸(如圖2B的長軸D1)以及一短軸(如圖2A的短軸D2),其中,在雷射光源110的發光面112處,雷射光束B在長軸方向C1的發散角不同於在短軸方向C2的發散角而在與光軸OA正交的剖面形成一橢圓,且從雷射光源110所發出的雷射光束B在發光面112處的長軸方向C1與短軸方向
C2分別平行於雷射光束B在遠場的短軸與長軸。
In this embodiment, the
在本實施例中,光學模組120設置在雷射光源110與掃描反射元件130之間,且包括一準直透鏡122以及一柱狀透鏡124。柱狀透鏡124具有一平面軸(plano axis,如圖2A的平面軸P1)以及一屈光軸(power axis,如圖2B的屈光軸P2),其中平面軸為柱狀透鏡124不具有屈光率的軸向,且屈光軸為柱狀透鏡124具有正屈光率的軸向。準直透鏡122及柱狀透鏡124沿著光軸OA依序配置於雷射光源110及掃描反射元件130之間。
In this embodiment, the
在本實施例中,掃描反射元件130可包括微機電系統反射鏡(microelectromechanical system mirror,MEMS mirror)、掃描振鏡(galvo mirror)或捲動稜鏡(scrolling prism)。
In this embodiment, the scanning
在本實施例中,控制器140例如是包括微控制器單元(Microcontroller Unit,MCU)、中央處理單元(central processing unit,CPU)、微處理器(microprocessor)、數位訊號處理器(digital signal processor,DSP)、可程式化控制器、可程式化邏輯裝置(programmable logic device,PLD)或其他類似裝置或這些裝置的組合,本發明並不加以限制。此外,在一實施例中,控制器140的各功能可被實作為多個程式碼。這些程式碼會被儲存在一個記憶體中,由控制器140來執行這些程式碼。或者,在一實施例中,控制器140的各功能可被實作為一個或多個電路。本發明並不限制用軟體或硬體的方式來實作控制器140的各功能。
In this embodiment, the
圖2A是根據本發明的一實施例的光學掃描系統在視角
垂直於第二軸向的示意圖。圖2B是根據本發明的一實施例的光學掃描系統在視角垂直於第一軸向的示意圖。請同時參考圖1、圖2A與圖2B,在本實施例中,光學模組120位於雷射光束B的光路徑上且具有相互垂直的一第一軸向E1以及一第二軸向E2,且第一軸向E1及第二軸向E2分別垂直於光軸OA。在雷射光束B通過光學模組120的光路徑中,雷射光束B的長軸D1平行於光學模組120的第一軸向E1,且短軸D2平行於光學模組120的第二軸向E2。其中,雷射光束B穿透光學模組120後在第一軸向E1上聚焦至掃描反射元件130,如圖2B所示,雷射光束B穿透光學模組130後在第二軸向E2上準直傳遞至掃描反射元件130,如圖2A所示。詳細來說,在雷射光束B通過柱狀透鏡124的光路徑中,雷射光束B的長軸D1平行於柱狀透鏡124的屈光軸P2以及光學模組120的第一軸向E1,並且雷射光束B的短軸D2平行於柱狀透鏡124平面軸P1以及光學模組120的第二軸向E2。柱狀透鏡124具有正屈光率的屈光軸P2使雷射光束B聚焦至掃描反射元件130,並且柱狀透鏡124不具有屈光率的平面軸P1使雷射光束B準直傳遞至掃描反射元件130。
2A is a view of the optical scanning system according to an embodiment of the present invention
Schematic diagram perpendicular to the second axis. 2B is a schematic diagram of an optical scanning system according to an embodiment of the present invention when the viewing angle is perpendicular to the first axis. Please refer to FIG. 1 , FIG. 2A and FIG. 2B at the same time. In this embodiment, the
在本實施例中,掃描反射元件130反射雷射光束B至一待掃描物O並於待掃描物O上形成一一維掃描光束SB。控制器140電性連接至掃描反射元件130,並控制掃描反射元件130作動,使一維掃描光束SB沿一掃描方向SD掃描待掃描物O。其中,一維掃描光束SB在待掃描物O的平面上呈長條形光斑,且長條
形光斑的長邊L垂直於掃描方向SD。由於雷射光束B在待掃描物O上形成長條形的一維掃描光束SB而非是一整個畫面,因此,本發明實施例的光學掃描系統100的感測距離較長,且光學掃描系統100接收到的訊號強度也較高,使光學掃描系統100的訊噪比提高。而且,控制掃描反射元件130的作動使一維掃描光束SB沿掃描方向SD掃描待掃描物O的方式也使掃描速度較高,因此,光學掃描系統100的畫面更新率(frame rate)也被提高。另外,一維掃描光束SB在待掃描物O的平面上可以是呈長橢圓形光斑,且長橢圓形光斑的長邊垂直於掃描方向SD。
In this embodiment, the
在本實施例中,掃描方向SD垂直於光學模組120的第一軸向E1,且掃描方向SD垂直於雷射光源110的發光面處的雷射光束B之短軸方向C2(如圖1所繪示)。
In this embodiment, the scanning direction SD is perpendicular to the first axis E1 of the
在本實施例中,具有長條形光斑(或長橢圓形光斑)的一維掃描光束SB的長軸F垂直於掃描方向SD。 In this embodiment, the long axis F of the one-dimensional scanning light beam SB having a long strip-shaped light spot (or an oblong light spot) is perpendicular to the scanning direction SD.
圖3是根據本發明的一實施例的光學掃描系統的感測元件的排列方式的示意圖。請參考圖3,在本實施例中,光學掃描系統100更包括多個感測元件150。該些感測元件150設置在一維掃描光束SB經待掃描物O反射後的傳遞路徑上。該些感測元件150沿掃描方向SD排成陣列。在本實施例中,感測元件150可為互補金氧半導體(Complementary Metal-Oxide-Semiconductor,CMOS)、電荷耦合元件(charge coupled device,CCD)或光電二極體(photodiode)陣列的光感測元件,但本發明不以此為限。每
一感測元件150可包括多個感測像素,該些感測像素例如排列成像素陣列(pixel array),其中感測像素的排列方向垂直於掃描方向SD。
FIG. 3 is a schematic diagram of an arrangement of sensing elements of an optical scanning system according to an embodiment of the present invention. Please refer to FIG. 3 , in this embodiment, the
綜上所述,在本發明的一實施例的光學掃描系統中,雷射光束穿透光學模組後在第一軸向上聚焦至掃描反射元件,並在第二軸向上準直傳遞至掃描反射元件。由於掃描反射元件反射雷射光束至待掃描物並於待掃描物上形成一維掃描光束,且控制器使一維掃描光束沿掃描方向掃描待掃描物,光學掃描系統可以在簡單的光學架構下,就能完成一整個畫面的掃描,因此,本發明實施例的光學掃描系統同時兼具掃描速度快及成本較低的優點。 To sum up, in the optical scanning system of an embodiment of the present invention, the laser beam penetrates the optical module and is focused on the scanning reflection element in the first axis, and is collimated and transmitted to the scanning reflection element in the second axis element. Since the scanning reflective element reflects the laser beam to the object to be scanned and forms a one-dimensional scanning beam on the object to be scanned, and the controller makes the one-dimensional scanning beam scan the object to be scanned along the scanning direction, the optical scanning system can operate under a simple optical structure. , the scanning of an entire screen can be completed. Therefore, the optical scanning system of the embodiment of the present invention has the advantages of high scanning speed and low cost at the same time.
惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及發明說明內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。另外本發明的任一實施例或申請專利範圍不須達成本發明所揭露之全部目的或優點或特點。此外,摘要部分和標題僅是用來輔助專利檔搜尋之用,並非用來限制本發明之權利範圍。此外,本說明書或申請專利範圍中提及的“第一”、“第二”等用語僅用以命名元件(element)的名稱或區別不同實施例或範圍,而並非用來限制元件數量上的上限或下限。 However, the above are only preferred embodiments of the present invention, and should not limit the scope of the present invention, that is, any simple equivalent changes and modifications made according to the scope of the patent application of the present invention and the contents of the description of the invention, All still fall within the scope of the patent of the present invention. In addition, it is not necessary for any embodiment of the present invention or the claimed scope of the present invention to achieve all of the objects or advantages or features disclosed in the present invention. In addition, the abstract part and the title are only used to assist the search of patent documents, and are not used to limit the right scope of the present invention. In addition, terms such as "first" and "second" mentioned in this specification or the scope of the patent application are only used to name the elements or to distinguish different embodiments or scopes, and are not used to limit the number of elements. upper or lower limit.
100:光學掃描系統 100: Optical scanning system
110:雷射光源 110: Laser light source
112:發光面 112: Glowing Surface
120:光學模組 120: Optical module
122:準直透鏡 122: collimating lens
124:柱狀透鏡 124: Cylindrical lens
130:掃描反射元件 130: Scanning Reflective Elements
140:控制器 140: Controller
B:雷射光束 B: Laser beam
C1:長軸方向 C1: Long axis direction
C2:短軸方向 C2: Short axis direction
F:長軸 F: long axis
O:待掃描物 O: object to be scanned
SD:掃描方向 SD: Scanning direction
SB:一維掃描光束 SB: 1D Scanning Beam
Claims (11)
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| WO1990003589A1 (en) * | 1988-09-22 | 1990-04-05 | Eastman Kodak Company | Optical scanner |
| TW200844478A (en) * | 2007-05-03 | 2008-11-16 | E Pin Optical Industry Co Ltd | MEMS oscillating laser scanning unit and assembly method of the same |
| US20100046057A1 (en) * | 2007-10-31 | 2010-02-25 | San-Woei Shyu | Micro electronic mechanical system oscillating laser scanning unit |
| TW201205120A (en) * | 2010-07-29 | 2012-02-01 | Pixart Imaging Inc | 3D information generator for use in interactive interface and method for 3D information generation |
| TW201326954A (en) * | 2011-12-21 | 2013-07-01 | Ind Tech Res Inst | Auto-focusing apparatus and method with timing-sequential light spots |
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2021
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| WO1990003589A1 (en) * | 1988-09-22 | 1990-04-05 | Eastman Kodak Company | Optical scanner |
| TW200844478A (en) * | 2007-05-03 | 2008-11-16 | E Pin Optical Industry Co Ltd | MEMS oscillating laser scanning unit and assembly method of the same |
| US20100046057A1 (en) * | 2007-10-31 | 2010-02-25 | San-Woei Shyu | Micro electronic mechanical system oscillating laser scanning unit |
| TW201205120A (en) * | 2010-07-29 | 2012-02-01 | Pixart Imaging Inc | 3D information generator for use in interactive interface and method for 3D information generation |
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