TWI771658B - Probe detecting equipment and 3d detecting method of probe - Google Patents

Abstract

The present invention provides a probe detecting equipment, a 3D detecting method of probe, and a probe positioning carrier. The probe detecting equipment includes a plurality of probe positioning carriers, a transporting module, and a photographing module. Each of the probe positioning carriers includes an insulating base and a magnetic unit embedded in the insulating base. The magnetic unit has a first magnetic extreme and a second magnetic extreme with opposite polarities and located on opposite sides. The insulating base can be used for a probe to be inserted, and the first magnetic extreme attracts the probe to keep the probe upright. A plurality of the probe positioning carriers are moved through the transporting module, and the photographing module is used for photographing the probes on at least one of the probe positioning carriers moving on the transmission module.

Description

Probe inspection equipment and probe three-dimensional inspection method

The invention relates to a detection device, in particular to a probe detection device, a three-dimensional detection method of a probe, and a probe positioning carrier.

In the flaw detection process of the existing probes, because the probes are extremely light in weight and small in size, they are not easy to be grasped (or sucked) and placed by automated machines; therefore, it is often impossible to perform 360-degree all-round inspections in an automated way. And because the size of the flaws of such probes is extremely small, often as small as micron (μm), a high-power microscope must be used for visual magnification and image detection.

In the past, when testing, this type of probe needs to manually lay the object to be tested on the platform, place it under a microscope, and perform flipping and artificial visual inspection of the object to be tested. The process is not only time-consuming and labor-intensive, but also the accuracy of manual identification cannot be confirmed.

Therefore, the inventor believes that the above-mentioned defects can be improved. Nate has devoted himself to research and application of scientific principles, and finally proposes an invention with reasonable design and effective improvement of the above-mentioned defects.

The embodiments of the present invention provide a probe detection device, a three-dimensional probe detection method, and a probe positioning carrier, which can effectively improve the defects that may be generated by the defect detection process of the existing probe.

An embodiment of the present invention discloses a probe detection device, comprising: a plurality of probe positioning carriers, each of which is used for placing a probe in any direction; wherein each of the probe positioning carriers includes: an insulating seat , which has a first end face and a limiting groove recessed from the first end face; and a magnetic force unit embedded in the insulating seat, and the magnetic force unit has a first end face with opposite polarity and located on the opposite side A magnetic end and a second magnetic end; wherein, the first magnetic end is adjacent to the limiting slot, and the distance between the first magnetic end and a slot bottom of the limiting slot is not more than 3 millimeters (mm); wherein, the insulating base can be used for a probe to be inserted into the limiting groove and make point contact with each other, and the first magnetic end attracts the probe, so that the probe remain upright on the first magnetic end; a transmission module defines a transmission path, and a plurality of the probe positioning carriers move along the transmission path through the transmission module; and a photographing module , corresponding to the transmission path, and the photographing module can be used to photograph the probe on at least one of the probe positioning carriers moving along the transmission path.

The embodiment of the present invention also discloses a three-dimensional detection method of a probe, which includes: implementing a pre-step: providing the probe detection device as described above; implementing a needle-carrying step: placing the probe in the middle of each probe positioning carrier A probe is inserted so that the probes are inserted into the limiting grooves and are in point contact with each other, and the first magnetic end of each probe positioning carrier attracts the corresponding probes, so that Correspondingly, the probes remain upright on the first magnetic end; and a detection step is performed: using the transmission module to position a plurality of the probes on a carrier and a plurality of the probes adsorbed thereon Moving along the transmission path, and sequentially photographing the probes on a plurality of the probe positioning carriers by the photographing module to obtain a detection information of each of the probes.

An embodiment of the present invention also discloses a probe positioning carrier, comprising: an insulating seat having a first end surface and a limiting groove recessed from the first end surface; and a magnetic force unit embedded in the insulating seat inside the seat, and the magnetic unit has a first magnetic end and a second magnetic end with opposite polarities and located on opposite sides; wherein, the first magnetic end is adjacent to the limiting slot, and the first magnetic end magnetic The distance between the extreme end and a groove bottom of the limiting groove is not more than 3 millimeters (mm); wherein, the insulating seat can be used for a probe to be inserted into the limiting groove and are in point contact with each other, and all the The first magnetic end attracts the probe to keep the probe upright on the first magnetic end.

To sum up, the beneficial effects of the present invention are that the present invention provides a probe detection device, a three-dimensional probe detection method, and a probe positioning carrier, which can attract the probe by the magnetic force unit, so that the probe can be attracted by the magnetic force unit. The probe is upright on the probe positioning carrier, so that the shooting module can take a 360-degree omnidirectional microscopic image shooting of the probe, and quickly perform defect image detection, so as to effectively solve the problems caused by manual inspection. various problems to come.

In order to further understand the features and technical content of the present invention, please refer to the following detailed description and accompanying drawings of the present invention, but these descriptions and drawings are only used to illustrate the present invention, rather than make any claims to the protection scope of the present invention. limit.

100: Probe Inspection Equipment

1: Probe positioning vehicle

11: Insulation seat

111: The first end face

112: Limit slot

113: Barcode

12: Magnetic unit

121: The first magnet

1211: The first magnetic pole

122: Second magnet

1221: second magnetic pole

2: Transmission module

21: Transmission path (conveyor belt)

22: driving wheel

24: idler

25: Positioning the baffle

3: Shooting module

31: High Power Microscope

32: Camera

33: Display screen

4: Processing modules

41: Data storage unit

42: Data conversion unit

43: Data Statistical Analysis Unit

44: Scanning device

5: Continuous carrier device

51: accommodating slot

200: Probe

201: Needle

202: Middle section

S1: Preliminary step

S2: Needle loading step

S3: Detection step

θ1: limit angle

θ2: included angle

A: Cone

d: interval

FIG. 1 is a schematic perspective view of a probe detection device according to Embodiment 1 of the present invention.

FIG. 2 is a schematic perspective view of a single probe positioning carrier according to Embodiment 1 of the present invention.

FIG. 3 is a three-dimensional schematic diagram of a transmission module and a photographing module according to Embodiment 1 of the present invention.

FIG. 4 is a schematic diagram of photographing a single probe positioning carrier by the transmission module according to the first embodiment of the present invention.

FIG. 5 is a schematic plan view of the magnetic force lines of the magnetic force unit according to the first embodiment of the present invention.

FIG. 6 is a schematic diagram of the insulating seat according to the first embodiment of the present invention along the line VI-VI of FIG. 2 (the probe is omitted).

FIG. 7 is a three-dimensional schematic diagram of the limiting groove according to the first embodiment of the present invention.

FIG. 8 is a schematic cross-sectional view of another aspect of FIG. 6 .

FIG. 9 is a schematic cross-sectional view of another aspect of FIG. 6 .

FIG. 10 is a schematic cross-sectional view along the section line VI-VI of FIG. 2 .

FIG. 11 is a schematic cross-sectional view of still another aspect of FIG. 6 .

FIG. 12 is a flowchart showing the steps of the three-dimensional detection method of the probe according to the second embodiment of the present invention.

FIG. 13 is a functional block diagram of the processing module according to the second embodiment of the present invention.

FIG. 14 is a schematic diagram of the detection steps of the three-dimensional detection method of the probe according to the second embodiment of the present invention.

FIG. 15 is a partial enlarged schematic view of FIG. 14 .

The following are specific specific examples to illustrate the embodiments of the probe detection device disclosed in the present invention, and those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are merely schematic illustrations, and are not drawn according to the actual size, and are stated in advance. The following embodiments will further describe the related technical contents of the present invention in detail, but the disclosed contents are not intended to limit the protection scope of the present invention.

It should be understood that although terms such as "first", "second" and "third" may be used herein to describe various elements or signals, these elements or signals should not be limited by these terms. These terms are primarily used to distinguish one element from another element, or a signal from another signal. In addition, the term "or", as used herein, should include any one or a combination of more of the associated listed items, as the case may be.

[Example 1]

Please refer to FIG. 1 to FIG. 11 , which are Embodiment 1 of the present invention, which needs to be explained first. Yes, this embodiment corresponds to the relevant numbers and appearances mentioned in the accompanying drawings, and is only used to specifically describe the embodiments of the present invention to facilitate understanding of the content of the present invention, rather than to limit the protection scope of the present invention.

As shown in FIG. 1 , the present embodiment discloses a probe detection device 100 , which includes a plurality of probe positioning carriers 1 , a transmission module 2 , and a photographing module 3 . The probe positioning carrier 1 can be a needle-carrying box of various shapes, which is not limited, and can be a needle-carrying box in the shape of a cuboid or a trapezoid. The probe positioning carrier 1 is used for a probe 200 (eg probe, terminal, or pogo pin) to be placed in any direction, and after the probe 200 is placed in the probe positioning carrier 1 Upright. It should be noted that the probe positioning carrier 1 is described as being matched with the above-mentioned transmission module 2 and the photographing module 3 in this embodiment, but in other embodiments not shown in the present invention, the The probe positioning carrier 1 can also be used alone (eg, sold) or used in conjunction with other components.

As shown in FIG. 2 , in this embodiment, the probe 200 can be applied to electronic connector testing. The probe 200 has two needles 201 and a middle section 202 , and the two needles 201 are located in the probe. At both ends of the needle 200, the middle section 202 is located in the middle of the probe 200, but the present invention is not limited thereto. Wherein, the overall length of the probe 200 and the shape of the middle section 202 can be adjusted according to actual needs, and the middle section 202 is used for the robot arm or suction head to hold the probe, so as to avoid damage to the probe Needle 201.

As shown in FIG. 3 , in this embodiment, the transmission module 2 is a linear belt conveyor, but the present invention is not limited to this. For example, the conveying module 2 can also be a slat conveyor, a trolley conveyor or other forms of conveyors, but it is preferable to exclude roller conveyors or screw conveyors, because the objects to be transported on such conveyors are often in The shaking state easily affects the measurement results of the probe 200 .

Further, the transmission module 2 in this embodiment includes a conveying belt 21, two driving pulleys 22 that directly drive the conveying belt 21, a plurality of driven pulleys that indirectly support the conveying belt 21 and make the conveying belt 21 run continuously, directly support A plurality of idlers 24 of the conveying belt 21 are located on both sides of the conveying belt 21 A plurality of positioning baffles 25, a belt tensioning mechanism and a motor drive system are provided. Wherein, for the convenience of showing the transmission module 2 in the drawings, the above-mentioned driven pulley, belt tensioning mechanism, and motor drive system are not shown in the drawings. Furthermore, the transmission module 2 (in this embodiment, according to the conveying belt 21 ) defines a transmission path 21 , and a plurality of the probe positioning carriers 1 are placed into the probe through a robotic arm or a suction head. After the needles 200 are placed on the transmission path 21 of the transmission module 2 , a plurality of the probe positioning carriers 1 are moved along the transmission path 21 through the transmission module 2 .

For the convenience of description, FIG. 3 only shows the conveying belt 21, the driving pulley 22, the plurality of idlers 24 and the positioning baffle 25 for the convenience of description. In addition, since the structural elements of the above-mentioned transmission module 2 are not improvements of the present invention, Therefore, this embodiment will not be described in detail in the following.

In this embodiment, the photographing module 3 includes a plurality of cameras 32 , a display screen 33 electrically connected to the plurality of cameras 32 , and a plurality of high-power microscopes 31 disposed in front of the lenses of the plurality of cameras 32 . The display screen 33 is connected to the camera 32 by means of an external image transmission line. The high-power microscope 31 can be arranged in front of the lens of the camera 32 at intervals, or can be directly overlapped on the lens of the camera 32 . It should be noted that, when the camera 32 is photographing, the photographic image can be magnified by the high-power microscope 31 to facilitate defect detection on the surface of the object to be measured, and the photographic image can be directly displayed through the display screen 33 for on-site use inspectors observe.

As shown in FIG. 3 and FIG. 4 , the photographing module 3 is disposed corresponding to the transmission path 21 , and the photographing module 3 can be used to detect at least one of the probes moving along the transmission path 21 . The probe 200 on the positioning carrier 1 is photographed. In more detail, the photographing module 3 is provided with a camera 32 and a high-power microscope 31 on both sides of the transmission path 21. When viewed from the end of the transmission path 21 toward the starting end, so The probe positioning carrier 1 and its positioned probe 200 are located in the center, and the cameras 32 located on both sides can capture a total of 360-degree images of the left and right sides of the probe 200 to perform three-dimensional photomicrography. It should be noted that, in other embodiments not shown in the photographing module 3, other hardware devices may be added according to actual needs.

For example, in another embodiment not shown, the photographing module 3 may be provided with three cameras 32 corresponding to the transmission path 21 , and the photographing module 3 may be provided with two cameras 32 on the left side of the transmission path 21 . There are two cameras 32, and one camera 32 is arranged on the right side of the transmission path 21. The three cameras 32 are arranged at equal distances and at equal angles, so that the probe 200 can be photographed at 360 degrees to perform three-dimensional microphotography. .

Since the specific structures of the plurality of probe positioning carriers 1 in this embodiment are substantially the same, for convenience of description, only one probe positioning carrier 1 is used for description in this embodiment, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, there may be slight differences among the probe positioning carriers 1 .

As shown in FIG. 2 and FIG. 5 , the probe positioning carrier 1 includes an insulating base 11 and a magnetic force unit 12 , and the magnetic force unit 12 is embedded in the insulating base 11 . It should be noted that, the magnetic unit 12 embedded in the insulating base 11 has two magnetic poles 1211 and 1221 with opposite polarities and located on opposite sides, and a closed annular shape is formed between the two magnetic poles 1211 and 1221 Magnetic field line distribution curve. As shown in FIG. 5 , the vertical portions of the two magnetic poles 1211 and 1221 both have a small airspace area of a vertical magnetic field. In this space area, the magnetic field lines tend to be straight lines.

When the robot arm or the suction nozzle places the probe 200 above the probe positioning carrier 1 , that is, when the probe 200 is located in the airspace area above any of the magnetic poles 1211 and 1221 of the magnetic unit 12 , the probe 200 will be affected by the magnetic line of force that tends to be straight, so it is strongly adsorbed by the magnetic poles 1211 and 1221 of the magnetic force unit 12 and is in contact with the insulating seat 11 and stands on the surface of the insulating seat 11 , Thereby, the photographing module 3 can perform a 360-degree omnidirectional microphotograph on the probe 200 .

As shown in FIG. 2 and FIG. 6 , the insulating seat 11 is an integrally formed cube. The insulating seat 11 has a first end surface 111 and a limiting groove 112 recessed from the first end surface 111 . In more detail, the first end surface 111 is the top surface of the insulating seat 11 , and the bottom surface of the top surface is the top surface of the insulating seat 11 . Magnetic unit 12 . In other non-illustrated embodiments, the first end surface 111 may be located on a detachable cover, in other words, the magnetic unit 12 can be seen by opening the top cover.

In other not-shown embodiments, the first end surface 111 may further include a groove, and the groove extends from any side of the first end surface 111 to the limiting groove 112 . In more detail, the groove is recessed from the center point of any side of the first end surface 111 and extends to the limiting groove 112 (the top edge of the limiting groove 112 ), so as to allow the probe to carry the probe. The mechanical arm or suction head of the needle 200 is convenient to travel along the direction from the groove to the limit groove 112 .

The limiting slot 112 is recessed in the center of the first end face 111 , and the space of the limiting slot 112 is similar to a cube, but the present invention is not limited to this, in other embodiments not shown , the limiting groove 112 can also be disposed adjacent to any side of the first end surface 111 , and the space of the limiting groove 112 can also be approximately an ellipsoid.

The limiting groove 112 is mainly used for inserting the probe 200 , and the probe 200 is in point contact with the limiting groove 112 . That is to say, the contact position between the needle head 201 of the probe 200 and the groove bottom of the limiting groove 112 is one point. If the probe 200 encounters external airflow interference during detection, the limiting groove 112 can effectively prevent the airflow from directly impacting the contact point between the probe 200 and the bottom of the limiting groove 112, preventing the probe 200 from being slanted or excessively skewed. The test result is wrong.

As shown in FIG. 6 and FIG. 7 , the top edge of the limiting groove 112 defines a conical surface A with the center point of the groove bottom as the vertex. Wherein, the taper surface A and the normal vector of the groove bottom of the limiting groove 112 contain a limiting angle θ 1 which is not less than 10 degrees. That is to say, any point on the top edge of the limiting slot 112 is connected with the center point of the bottom of the limiting slot 112 to form a straight line, and the straight line is sandwiched by the direction vector parallel to the bottom of the limiting slot 112 The angle is less than 80 degrees.

As shown in FIG. 8 , the two magnetic poles 1211 and 1221 can be respectively defined as a first magnetic pole 1211 and a second magnetic pole 1221 in this embodiment. That is to say, each of the first magnetic end 1211 and the second magnetic end 1221 is one of N pole or S pole. For the convenience of description, the A magnetic end 1211 is an N pole in this embodiment, and the second magnetic end 1221 is an S pole, but the invention is not limited to this. In addition, the first magnetic end 1211 and the second magnetic end 1221 are approximately cylindrical in this embodiment, and the volume of the first magnetic end 1211 is smaller than that of the second magnetic end 1221 . From another perspective, the shape of the magnetic unit 12 is similar to a weight, the shape of the first magnetic end 1211 corresponds to the top of the weight, and the shape of the second magnetic end 1221 corresponds to the weight body, but the present invention is not limited to this.

As shown in FIG. 8 and FIG. 9 , the first magnetic end 1211 is adjacent to the limiting slot 112 , and the distance between the first magnetic end 1211 and the bottom of the limiting slot 112 is not more than 3 meters centimeters (mm). More specifically, the magnetic force unit 12 is buried directly under the limiting slot 112 , and there is a gap d between the magnetic force unit 12 and the bottom of the limiting slot 112 , and the range of the interval d is 0 Between ~3 millimeters (mm). Wherein, when the interval d is 0 millimeters (mm), at least part of the first magnetic pole 1211 constitutes the groove bottom of the limiting groove 112 (eg, FIG. 9 ). More specifically, at this time, The top surface of the first magnetic end 1211 is the groove bottom of the limiting groove 112 .

As shown in FIG. 10 , when the probe 200 is inserted into the limiting groove 112 , the first magnetic end 1211 can absorb the probe 200 , so that the length direction of the probe 200 is aligned with the groove. An angle θ 2 contained by the normal vectors of the base remains less than 10 degrees. That is to say, in cross-section, the angle between the length direction of the probe 200 and the direction vector parallel to the groove bottom of the limiting groove 112 is maintained between 80 degrees and 90 degrees. On the other hand, the angle θ 2 between the length direction of the probe 200 and the normal vector of the groove bottom of the limiting groove 112 is at most the same as the tapered surface A and the limiting groove 112 The normal vector of the bottom of the groove is contained by the limit angle θ 1 which is not less than 10 degrees (the maximum included angle θ 2 is equal to the minimum limit angle θ 1).

As shown in FIG. 11 , the magnetic unit 12 may also be composed of a first magnet 121 and a second magnet 122 that are attracted to each other, and the size of the first magnet 121 is smaller than that of the second magnet 122 . It should be noted that in this embodiment, the first magnet 121 and the second magnet 122 are each a Permanent magnets, the permanent magnets may be selected from the group consisting of AlNiCo magnets, Samarium Cobalt magnets and NdFeB magnets. In other not-shown embodiments, the first magnet 121 and the second magnet 122 may also be electromagnets.

The first magnet 121 has the first magnetic end 1211 , the second magnet 122 has the second magnetic end 1221 , and the first magnet 121 is closer to the second magnet 122 in the limiting groove 112 . When the distance between the first magnetic end 1211 and the bottom of the limiting groove 112 is closer, the magnetic force received by the probe 200 is stronger. The angle θ 2 contained by the normal vectors of the base is also closer to 0 degrees.

[Example 2]

Please refer to FIG. 12 to FIG. 15 , which are the second embodiment of the present invention. It should be noted that this embodiment is similar to the above-mentioned first embodiment, so the similarities between the two embodiments will not be repeated. : the probe detection device 100); furthermore, this embodiment corresponds to the relevant quantity and appearance mentioned in the accompanying drawings, and is only used to specifically describe the embodiments of the present invention, so as to facilitate understanding of the content of the present invention, and It is not intended to limit the protection scope of the present invention.

As shown in FIG. 12 , this embodiment discloses a three-dimensional detection method of a probe, which sequentially includes a pre-step S1 , a needle loading step S2 and a detection step S3 . It should be noted that, the description of the technical features of each step below can be adjusted and changed according to design requirements, and is not limited to what is described in this embodiment.

Wherein, the pre-step S1: providing the probe detection device 100 described in the first embodiment. Furthermore, in the present embodiment, the pre-step S1 may further provide a continuous carrier device 5 having a plurality of accommodating grooves 51 in which the probe positioning carrier 1 can be placed. The operator can A plurality of probe positioning carriers 1 are arranged on the continuous carrier device 5 as required to perform a large number of inspections. In this embodiment, three probe positioning carriers 1 cooperate with the continuous carrier device 5 for description, but the present invention is not limited to this. For example, in other embodiments not shown in the present invention, the continuous carrier device 5 is also Two or more probe positioning carriers 1 can be accommodated.

As shown in FIG. 14 and FIG. 15 , the insulating base 11 of each probe positioning carrier 1 may further be provided with a barcode 113 on the outer surface thereof. The barcode 113 in this embodiment is a plurality of black bars and blanks with different widths, arranged according to certain coding rules, and used to express a graphic identification code of a group of information. Furthermore, each of the barcodes 113 corresponds to each of the probes 200 , that is, each of the barcodes 113 corresponds to the number of each probe 200 . However, in other embodiments not shown in the present invention, the barcode 113 may also be other types of barcodes (eg, QRcode).

The needle loading step S2: inserting a probe 200 into each of the probe positioning carriers 1, so that the probes 200 are inserted into the limiting grooves 112 and are in point contact with each other, and each The first magnetic end 1211 of the probe positioning carrier 1 attracts the corresponding probe 200 to keep the corresponding probe 200 upright on the first magnetic end 1211 .

In more detail, the needle loading step S2: the probe 200 to be tested is clamped out by a robotic arm or a suction head, and a probe 200 is placed in each probe positioning carrier 1, and the probe The probes 200 are inserted into the limiting grooves 112 and are in point contact with each other. That is, the needle head 201 of the probe 200 is in contact with the bottom of the limiting groove 112 . When the probe 200 is in contact with the bottom of the limiting groove 112 , the first magnetic end 1211 of the probe positioning carrier 1 attracts the corresponding probe 200 and is emitted by the first magnetic end 1211 The vertical magnetic line of force is used to keep the corresponding probe 200 upright on the first magnetic pole 1211 by using the magnetic field effect.

The detection step S3: using the transmission module 2 to move a plurality of the probe positioning carriers 1 and the plurality of the probes 200 adsorbed thereon along the transmission path 21, and pass the The photographing module 3 sequentially photographs the probes 200 on a plurality of the probe positioning carriers 1 to obtain a detection information of each of the probes 200 .

More specifically, in the detection step S3 , firstly, a plurality of the probe positioning carriers 1 and the plurality of probes 200 adsorbed thereon are arranged on the transmission module 2 in cooperation with the continuous carrier device 5 , A plurality of the probe positioning carriers 1 are moved along the transport path 21 . When a plurality of the probe positioning carriers 1 pass through the photographing module 3 , the cameras 32 located on both sides of the photographing module 3 sequentially monitor the probes on the plurality of the probe positioning carriers 1 . The needles 200 are photographed to obtain the detection information of each of the probes 200 .

Furthermore, as shown in FIG. 13 , then, the detection information of each probe 200 is transmitted to a processing module 4 , and the processing module 4 includes a data storage unit 41 , a data conversion unit 42 and a Data statistical analysis unit 43 . The detection information first enters the data storage unit 41 for storage, and then the detection information enters the data conversion unit 42 to convert the data into a data form that can be operated on in large quantities. For example, the detection information is image information, and the data conversion unit 42 can convert various data of the image information into specific values, such as the brightness of the image, etc., to facilitate subsequent analysis. Finally, the detection information enters the data statistical analysis unit 43, and the detection result is output after the detection information is analyzed.

In addition, the detection step S3 may further provide a scanning device 44, which can scan the barcode 113 of any one of the probe positioning carriers 1, so that the scanning device 44 can transmit from all the probes through wireless transmission. The processing module 4 obtains the detection information corresponding to the probe 200 . Wherein, the scanning device 44 can be a laser scanner or a CCD scanner.

To sum up, the beneficial effects of the present invention are that the present invention provides a probe detection device, a three-dimensional probe detection method, and a probe positioning carrier, which can attract the probe by the magnetic force unit, so that the probe can be attracted by the magnetic force unit. The probe is upright on the probe positioning carrier, so that the shooting module can take a 360-degree omnidirectional microscopic image shooting of the probe, and quickly perform defect image detection, so as to effectively solve the problems caused by manual inspection. various problems to come.

In addition, the probe detection equipment, the three-dimensional detection method of the probe, and the probe positioning carrier provided by the present invention further include a barcode and a processing module arranged on the outer surface of the insulating base, and the processing module can effectively analyze And integrate the detection information of the probe, with the barcode Numbering is performed for big data analysis to provide process defect correction.

The content disclosed above is only a preferred feasible embodiment of the present invention, and is not intended to limit the patent scope of the present invention. Therefore, any equivalent technical changes made by using the contents of the description and drawings of the present invention are included in the patent scope of the present invention. Inside.

100: Probe Inspection Equipment

1: Probe positioning vehicle

2: Transmission module

3: Shooting module

31: High Power Microscope

32: Camera

33: Display screen

200: Probe

Claims (8)

A probe detection device, comprising: a plurality of probe positioning carriers, each used for placing a probe in any direction; wherein, each probe positioning carrier comprises: an insulating seat with a first an end face and a limiting slot recessed from the first end face; and a magnetic force unit embedded in the insulating seat, and the magnetic force unit has a first magnetic pole with opposite polarity and located on the opposite side and a magnetic force unit The second magnetic end; wherein, the first magnetic end is adjacent to the limiting slot, and the distance between the first magnetic end and a groove bottom of the limiting slot is not more than 3 millimeters (mm) ; wherein, the insulating seat can be used for a probe to be inserted into the limiting groove and make point contact with each other, and the first magnetic end attracts the probe, so that the probe is kept upright on the a first magnetic end; a transmission module defining a transmission path, and a plurality of the probe positioning carriers move along the transmission path through the transmission module; and a photographing module corresponding to the A transmission path is provided, and the photographing module can be used to photograph the probes on at least one of the probe positioning carriers moving along the transmission path. The probe detection device according to claim 1, wherein, in any one of the probe positioning carriers, at least a part of the first magnetic end forms the groove bottom of the limiting groove. The probe detection device according to claim 1, wherein when a probe is inserted in the limit groove of any one of the probe positioning carriers, the first magnetic end can adsorb the probe, so that the length direction of the probe is equal to the normal vector of the groove bottom An included angle between the phases is kept less than 10 degrees. The probe detection device according to claim 3, wherein, in any one of the probe positioning carriers, the top edge of the limiting groove defines a conical surface with the center point of the groove bottom as the vertex , and the tapered surface and the normal vector of the groove bottom contain a limit angle of not less than 10 degrees. The probe detection device according to claim 1, wherein, in any one of the probe positioning carriers, the magnetic force unit includes a first magnet and a second magnet that are attracted to each other, the first magnet The magnet has the first magnetic end, the second magnet has the second magnetic end, the size of the first magnet is smaller than that of the second magnet, and the first magnet is larger than the second magnet more adjacent to the limiting groove. The probe detection device according to claim 5, wherein each of the first magnet and the second magnet of any one of the probe positioning carriers is further defined as a permanent magnet. A three-dimensional detection method for a probe, comprising: implementing a pre-step: providing the probe detection device according to claim 1; implementing a needle-carrying step: placing a probe in each of the probe positioning carriers needles, so that the probes are inserted into the limiting grooves and are in point contact with each other, and the first magnetic end of each probe positioning carrier attracts the corresponding probes, so that the corresponding probes are The probes are kept upright on the first magnetic end; and a detection step is performed: using the transmission module to position a plurality of the probes on a carrier and a plurality of the probes adsorbed thereon along the The transmission path moves, and the probes on a plurality of probes are positioned on the carrier in sequence by the shooting module. The needles are photographed to obtain a detection information of each of the probes. The three-dimensional detection method of a probe according to claim 7, wherein, in the detection step, the detection information of each probe obtained by the photographing module is transmitted to a processing module; wherein , the insulating seat of each probe positioning carrier is provided with a bar code on its outer surface, which is used for a scanning device to scan the bar code of any one of the probe positioning carriers, so that the The scanning device can obtain the detection information corresponding to the probe from the processing module through wireless transmission.

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