TWI769455B - Miniaturized moving mechanism and miniaturized operation device using the same - Google Patents
Miniaturized moving mechanism and miniaturized operation device using the same Download PDFInfo
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Abstract
Description
本發明提供一種微型化利於空間配置之移料機構,以及便利搬移應用於不同場所之微型作業裝置。The present invention provides a miniaturized material-moving mechanism that is favorable for space configuration, and a micro-operating device that is convenient to be moved and applied to different places.
在現今,移料機構應用於不同區域移載取放電子元件,移料機構以馬達驅動一皮帶輪組作動,皮帶輪組以皮帶連結帶動拾取器作X方向位移,使拾取器於不同承置件取放電子元件;然,若拾取器於同一區域執行移載電子元件作業,移料機構之皮帶輪組所提供的位移行程,足以使拾取器於同一區域移載電子元件,當拾取器欲在不同區域執行移載電子元件作業,移料機構必須於原有的皮帶輪組側方增加複數層板架及另一皮帶輪組,以延長拾取器之位移行程,方可使拾取器於不同區域移載電子元件,但側向疊置組裝之複數個架體及複數個皮帶輪組,不僅增加移料機構之整體體積,亦不利周遭空間配置,於維修或組裝作業上,也相當繁瑣耗時。Nowadays, the material-moving mechanism is used in different areas to transfer, load, and place electronic components. The material-moving mechanism is driven by a motor to actuate a pulley set. Discharge electronic components; however, if the picker performs the operation of transferring electronic components in the same area, the displacement stroke provided by the pulley set of the moving mechanism is sufficient to enable the picker to transfer electronic components in the same area. To carry out the operation of transferring electronic components, the transfer mechanism must add multiple layers of racks and another pulley set to the side of the original pulley set to extend the displacement stroke of the pickup, so that the pickup can transfer electronic components in different areas However, a plurality of frames and a plurality of pulley sets assembled side by side not only increase the overall volume of the material-moving mechanism, but also disadvantage the surrounding space configuration. It is also cumbersome and time-consuming in maintenance or assembly operations.
本發明之目的一,提供一種微型移料機構,包含第一載送單元、第二載送單元及拾取器,第一載送單元以第一動力器驅動第二載送單元之第二架置器作第一方向位移,第二載送單元於第二架置器與第三架置器間設置呈第二方向配置之擴增器,第三架置器裝配第二動力器,以供驅動拾取器作第二方向之第一行程位移,藉以於第二架置器、擴增器與第三架置器沿同一組裝方向堆疊組裝,利用擴增器驅動第三架置器及拾取器作第二方向擴增之第二行程位移,而於不同區域移載電子元件,使移料機構不僅微型化利於空間配置,並有效提升移料效能。One of the objectives of the present invention is to provide a micro-moving mechanism, which includes a first carrier unit, a second carrier unit, and a picker. The first carrier unit drives the second frame of the second carrier unit with a first power unit. The second carrier displaces in the first direction, the second carrier unit sets the amplifier in the second direction between the second mounter and the third mounter, and the third mounter is equipped with the second power unit for driving The pickup makes a first stroke displacement in the second direction, so that the second mounter, the amplifier and the third mounter are stacked and assembled in the same assembly direction, and the amplifier is used to drive the third mounter and the pickup to operate. The second stroke displacement is amplified in the second direction, and the electronic components are moved in different areas, so that the material moving mechanism is not only miniaturized, which is convenient for space configuration, but also effectively improves the material moving efficiency.
本發明之目的二,提供一種微型移料機構,其第二載送單元之第二架置器、擴增器與第三架置器沿同一組裝方向堆疊組裝,以有效縮減側向體積,而利於拾取器進出空間有限之作業環境,達到擴增應用場所之實用效益。The second objective of the present invention is to provide a micro-moving mechanism, in which the second mounter, the amplifier and the third mounter of the second carrier unit are stacked and assembled in the same assembly direction, so as to effectively reduce the lateral volume, and It is beneficial to the operating environment where the pickup space is limited, and achieves the practical benefit of expanding the application site.
本發明之目的三,提供一種微型作業裝置,包含可搬移式桌板、置料器、作業機構、本發明微型移料機構及中央控制裝置,置料器配置於可搬移式桌板,供承置至少一電子元件,作業機構配置於可搬移式桌板,並設置作業器及接合器,作業器供對電子元件執行預設作業,接合器作至少一方向位移而供接合電子元件,本發明微型移料機構配置於可搬移式桌板,並於置料器與作業機構間移載電子元件,中央控制裝置係用以控制及整合各機構作動,以執行自動化作業;藉以使作業裝置整體微型化,不僅利於搬移擺置在空間有限之承載物(如桌體或小型工作台),並供省力搬運,進而提高使用效能及便利性 。The third object of the present invention is to provide a micro operating device, which includes a movable table board, a feeder, an operating mechanism, the micro-moving mechanism of the present invention, and a central control device. At least one electronic component is arranged, the operating mechanism is arranged on the movable table board, and an operating device and a connector are arranged, the operating device is used to perform a preset operation on the electronic component, and the connector is displaced in at least one direction for connecting the electronic components, the present invention The micro-moving mechanism is arranged on the movable table, and transfers electronic components between the feeder and the operating mechanism. The central control device is used to control and integrate the actions of each mechanism to perform automatic operations; thereby making the operating device as a whole miniature It is not only conducive to moving and placing objects with limited space (such as desks or small workbenches), but also for labor-saving transportation, thereby improving the use efficiency and convenience. .
本發明之目的四,提供一種微型作業裝置,其可搬移式桌板配置至少一把手,以利工作人員搬運。The fourth objective of the present invention is to provide a miniature operating device, the movable table top is equipped with at least one handle, which is convenient for the staff to carry.
本發明之目的五,提供一種微型作業裝置,更包含可分離式腳架 ,以供承置可搬移式之桌板,腳架並於桌板下方提供容置空間,以容置相關作業元件(如測試機、測試電腦或電控元件等),進而提升使用便利性。The fifth object of the present invention is to provide a micro operating device, further comprising a detachable tripod , which is used to hold the movable table board, and the tripod provides accommodating space under the table board to accommodate related operating components (such as testing machines, testing computers or electronic control components, etc.), thereby improving the convenience of use.
本發明之目的六,提供一種微型作業裝置,更包含台車,台車供裝配電控元件或溫控元件等相關作業元件,並可移動式位於腳架之容置空間,以利修護相關作業元件,進而提升使用便利性。The sixth object of the present invention is to provide a miniature operating device, which further includes a trolley, which is used for assembling related operating components such as electric control components or temperature control components, and can be moved in the accommodating space of the tripod, so as to facilitate the maintenance of the related operating components. , thereby improving the convenience of use.
為使 貴審查委員對本發明作更進一步之瞭解,茲舉一較佳實施例並配合圖式,詳述如後:In order to make your examiners further understand the present invention, hereby give a preferred embodiment and cooperate with the drawings, the details are as follows:
請參閱圖1、2,本發明微型移料機構10包含第一載送單元、第二載送單元及至少一拾取器18。Please refer to FIGS. 1 and 2 , the
第一載送單元包含第一架置器11及第一動力器,第一架置器11為長型架體,並呈第一方向(如X方向)配置,第一架置器11之至少一端裝配於周側之固定架或移動臂,例如第一架置器11裝配於移動臂,由移動臂帶動作較大行程之第三方向(如Z方向)位移,於本實施例中,第一架置器11之兩端裝配於固定架;第一動力器裝配於第一架置器11,第一動力器可為線性馬達、壓缸或包含馬達及至少一傳動組,傳動組可為皮帶輪組、螺桿螺座組或滑軌組;於本實施例中,第一動力器包含第一馬達121、一為第一皮帶輪組122之傳動組及另一為第一滑軌組之傳動組,第一馬達121裝配於第一架置器11,以驅動呈第一方向配置之第一皮帶輪組122,第一滑軌組之第一滑軌123呈第一方向配置於第一架置器11之底面,第一滑軌123上之第一滑塊124以第一連結件125連結第一皮帶輪組122之第一皮帶,以供第一皮帶經第一連結件125帶動第一滑塊124沿第一滑軌123作第一方向位移。The first carrier unit includes a
第二載送單元包含第二架置器13、第三架置器14、至少一擴增器及第二動力器,第二架置器13連結第一動力器,以供作第一方向位移,於本實施例中,第二架置器13為一架體,架體可呈L型或方框型,並具有至少一容置部131,第二架置器13連結第一載送單元之第一滑塊124,而由第一滑塊124帶動第二架置器13作第一方向位移;第三架置器14呈第二方向配置,並位於第二架置器13之下方,於本實施例中,第三架置器14為長型架體,並呈第二方向(如Y方向)配置,且與第二架置器13沿同一組裝方向A堆疊組裝,而位於第二架置器13之下方。The second carrier unit includes a
至少一擴增器裝配於第二架置器13與第三架置器14之間,並呈第二方向配置,以供驅動第三架置器14作第二方向擴增之第二行程位移,擴增器可為壓缸或螺桿螺座組,不受限於本實施例,於本實施例中,擴增器為壓缸,壓缸之缸本體151裝配於第二架置器13之容置部131,並位於第三架置器14之上方,壓缸之活塞桿152連結第三架置器14,使得第二架置器13、擴增器與第三架置器14沿同一組裝方向A堆疊組裝,以有效縮減側向體積,進而驅動第三架置器14作第二方向擴增之第二行程位移。At least one amplifier is assembled between the
又為使第三架置器14平穩位移,於第二架置器13與第三架置器14之間配置第二滑軌組,第二滑軌組之第二滑軌161呈第二方向配置於第三架置器14之頂面,第二滑軌161上之第二滑塊162裝配於第二架置器13,以於壓缸之活塞桿152驅動第三架置器14作第二方向位移時,令第二滑軌161沿第二滑塊162位移。In order to make the
第二動力器裝配於第三架置器14,第二動力器可為線性馬達、壓缸或包含馬達及至少一傳動組,傳動組可為皮帶輪組、螺桿螺座組或滑軌組;於本實施例中,第二動力器包含第二馬達171及一為第二皮帶輪組172之傳動組
,第二馬達171裝配於第三架置器14,以驅動呈第二方向配置之第二皮帶輪組172。The second power unit is assembled on the
至少一拾取器18連結第二動力器,以供作第一方向及第二方向位移,而可移載取放電子元件,更進一步,拾取器18作第三方向(如Z方向)位移,以取放電子元件,於本實施例中,拾取器18連結第二動力器之第二皮帶輪組172的第二皮帶,由第二皮帶驅動拾取器18作第二方向之第一行程位移。At least one
請參閱圖3、4,本發明微型移料機構10應用於置料區之供料器21與換料區之載台22間移載電子元件,由於第一架置器11架置於置料區之供料器21的上方,微型移料機構10之第一載送單元以第一馬達121驅動第一皮帶輪組122作動,第一皮帶輪組122經第一連結件125傳動第一滑塊124沿第一滑軌123作X方向位移,第一滑塊124並帶動第二架置器13、第三架置器14、壓缸及拾取器18同步作X方向位移,又由於第二載送單元輕量化,而有效減輕第一載送單元之負荷,使得第一載送單元更加迅速帶動第二載送單元及拾取器18作X方向位移,以提高生產效能;再以第二載送單元之第二馬達171經第二皮帶輪組172驅動拾取器18作Y方向之第一行程L1位移,使拾取器18作X-Y方向位移,而於置料區之供料器21取出電子元件。Please refer to FIGS. 3 and 4 , the
然換料區之載台22位於不同區域,移料機構10控制第二載送單元之壓缸作動,因壓缸之缸本體151固設於第二架置器13,令壓缸的活塞桿152帶動第三架置器14作Y方向位移,第三架置器14以第二滑軌161沿第二架置器13底部之第二滑塊162位移,並帶動裝配於上之第二馬達171、第二皮帶輪組172及拾取器18作Y方向位移,使得拾取器18作Y方向擴增之第二行程L2位移,而將待作業的電子元件跨區移載至換料區之載台22;因此,微型移料機構10不僅可擴增位移行程,並有效縮小整體體積,進而提高使用效能。However, the
請參閱圖1至4、5、6,本發明微型作業裝置之第一實施例,包含可搬移式桌板30、置料器、作業機構、本發明微型移料機構10及中央控制裝置(圖未示出),中央控制裝置係用以控制及整合各機構作動,以執行自動化作業。Please refer to FIGS. 1 to 4 , 5 and 6 , the first embodiment of the micro operation device of the present invention includes a
桌板30為一輕便且可搬移式之板體,以供擺置於承載物(如實驗室的實驗台桌、小型工作腳架或工作箱),桌板30可利用自重及承載之置料器、作業機構、微型移料機構10的重量而平穩放置於承載物,桌板30亦可配置定位用元件(如栓具)而定位於承載物;於本實施例中,桌板30以強度佳之材質製作
,並劃分置料區、換料區及作業區,置料區設置複數個限位件31,限位件31可為限位框或限位桿,以供限位置料器;更進一步,為便利搬移桌板30,桌板30配置至少一把手32,以供工作人員握持把手32而便利搬移桌板30。The
又作業裝置可視作業需求,於桌板30上配置外罩(圖未示出),亦或於作業區配置作業室33,作業室33之通道配置可啟閉之門板(圖未示出),作業室33另可增設溫控件(圖未示出)或防結露件(圖未示出),利用溫控件(如加熱件)使作業室33保持預設作業溫度,以供電子元件於模擬預設作業溫度環境執行預設作業,或者利用防結露件(如乾燥空氣供應管件)防止作業室33結露,以提升作業品質。In addition, depending on the needs of the operation, the operation device can be equipped with a cover (not shown in the figure) on the
置料器配置於桌板30,以供承置至少一電子元件,於本實施例中
,作業裝置配置至少一為供料盤41之置料器及至少另一為收料盤42之置料器,供料盤41及收料盤42配置於桌板30之置料區,並由桌板30之複數個限位件31限位,供料盤41供承置至少一待作業之電子元件,收料盤42供承置至少一已作業之電子元件。The feeder is disposed on the
作業機構配置於桌板30,並設置作業器及接合器,作業器以供對電子元件執行預設作業,接合器以供作至少一方向位移而接合電子元件,更進一步,作業器可為測試器或取像器等,以執行測試作業或檢知作業,測試器依作業需求而可電性連接一測試機、測試用電腦或中央控制裝置;接合器可為移載具、壓接具或壓移具,而執行移載作業、壓接作業或移載及壓接作業,例如接合器為壓接具,以作Z方向位移而供執行壓接電子元件作業,例如接合器為壓移具,以作X-Z方向位移而供執行移載及壓接電子元件作業;於本實施例中
,作業器為測試器,並配置於桌板30之作業區的作業室33,測試器包含電性連接之電路板51及測試座52,以供測試電子元件,電路板51並連接測試用電腦53
;接合器為壓接具54,壓接具54位於測試座52之上方,並由一作業驅動器55驅動作Z方向位移,而供執行壓接電子元件作業。The working mechanism is arranged on the table 30, and is provided with a working device and a connector. The working device is used to perform a preset operation on the electronic components, and the connector is used for at least one direction displacement to connect the electronic components. Furthermore, the working device can be used for testing. The tester can be electrically connected to a testing machine, a testing computer or a central control device according to the needs of the operation; the adapter can be a transfer tool, a crimping tool or a Press and transfer tool to perform transfer operation, crimping operation or transfer and crimping operation, for example, the adapter is a crimping tool, which is used for Z-direction displacement to perform crimping operation of electronic components, such as the adapter is a pressure transfer tool , for the X-Z direction displacement for carrying out the operation of transferring and crimping electronic components; in this embodiment
, the operator is a tester, and is arranged in the
本發明微型移料機構10配置於桌板30,包含第一載送單元、第二載送單元及至少一拾取器18,以於置料器與作業機構間移載電子元件,於本實施例中,微型移料機構10已於上述說明(請配合參閱圖1至4),故不再贅述,微型移料機構10配置於桌板30之置料區,以於供料盤41、收料盤42及測試座52間移載電子元件。The
請參閱圖1至6,微型作業裝置之桌板30為輕便且可搬移式設計,工作人員可手握桌板30之把手32,依作業場所之空間,將桌板30搬移至小型工作台、桌體或箱體等承載物上;於本實施例中,工作人員將桌板30搬移至小型桌體60,以應用測試電子元件,微型移料機構10之第一載送單元以第一馬達121驅動第一皮帶輪組122作動,第一皮帶輪組122經第一連結件125、第一滑塊124帶動第二載送單元及拾取器18於置料區作X方向位移,使拾取器18位移至供料盤41之上方;第二載送單元以第二馬達171經第二皮帶輪組172而驅動拾取器18於置料區作Y方向之第一行程L1位移,使拾取器18位移至供料盤41之預設位置
,以取出待測之電子元件;由於測試座52與供料盤41位於不同區域,移料機構10之第二載送單元以壓缸的活塞桿152帶動第三架置器14作Y方向位移,第三架置器14帶動拾取器18同步作Y方向擴增之第二行程L2位移,使拾取器18由置料區跨區位移至作業區,將待測之電子元件移入作業室33,並置放於測試座52,作業機構之作業驅動器55驅動壓接具54作Z方向位移,而壓接測試座52內之電子元件執行測試作業;於測試完畢,作業驅動器55驅動壓接具54復位,微型移料機構10以第一、二載送單元帶動拾取器18於測試座52取出已測之電子元件,並將已測之電子元件移載至收料盤42收置。Please refer to FIGS. 1 to 6 , the
請參閱圖1至4、7,本發明微型作業裝置之第二實施例,其與第一實施例之差異在於作業機構更包含至少一載送器,以於置料器及接合器間載送電子元件;於本實施例中,載送器包含載台56及載送驅動器57,載台56供承置電子元件,載送驅動器57供驅動載台56作X方向位移,而於桌板30之供料盤41側方的換料區及一壓移具58所在的作業區間載送電子元件;因此,移料機構10之第二載送單元以壓缸的活塞桿152帶動第三架置器14及拾取器18作Y方向擴增之第二行程L2位移,使拾取器18由置料區跨區位移至換料區,將供料盤41上之電子元件移載至載台56,載送驅動器57驅動載台56作X方向位移將電子元件載送至壓移具58之下方,一為壓移具58之接合器,由作業驅動器驅動作Z方向位移,而於載台56取出待測之電子元件,於載台56離開後,壓移具58將待測電子元件移入且壓抵於測試座52而執行測試作業;於測試完畢,壓移具58於測試座52取出已測電子元件,並移載至載台56,載台56載出已測電子元件,移料機構10之拾取器18作X-Y-Z方向位移,於載台56取出已測電子元件,並移載至收料盤42收置。Please refer to FIGS. 1 to 4 and 7 , the second embodiment of the micro operating device of the present invention is different from the first embodiment in that the operating mechanism further includes at least one carrier for carrying between the feeder and the adapter Electronic components; in this embodiment, the carrier includes a
然,載台56可視作業需求,而作固定式或可移動式位於換料區,壓移具58亦可視作業需求,由另一作業驅動器驅動作X-Z方向位移,而於作業區之測試座52及換料區之載台56間執行移載及壓接電子元件作業。Of course, the
請參閱圖1至4、8,本發明微型作業裝置之第三實施例,其與第一實施例之差異在於更包含一可分離式腳架70,以供承置可搬移式之桌板30,於本實施例中,腳架70具有承框71,承框71連接複數個支撐腳件72,並於承框71與複數個支撐腳件72間設有容置空間73,更進一步,承框71可於相對應桌板30之把手32位置設有凹部711,以供容置把手32,因此,腳架70之承框71可供承置桌板30,而承框71下方之容置空間73則供容置作業相關元件(如測試機、測試用電腦、電控元件或溫控元件等)。Please refer to FIGS. 1 to 4 and 8 , the third embodiment of the micro operating device of the present invention is different from the first embodiment in that it further includes a detachable foot stand 70 for supporting the
請參閱圖1至4、9,本發明微型作業裝置之第四實施例,其與第三實施例之差異在於更包含一台車80,台車80可移動式位於腳架70內部;更進一步,台車80與腳架70間設置至少一連接器,連接器可為滑軌組或螺桿螺座組等;於本實施例中,台車80之底面配置滑輪81,並於側面與腳架70間設有為滑軌組82之連接器,台車80供裝配電控元件或溫控元件等物件,並以滑軌組82輔助滑入或滑出腳架70之容置空間73,不僅利於收納電控元件或溫控元件,且不佔空間,進而提升使用效能。Please refer to FIGS. 1 to 4 and 9 , the fourth embodiment of the micro operating device of the present invention is different from the third embodiment in that it further includes a
10:移料機構 11:第一架置器 121:第一馬達 122:第一皮帶輪組 123:第一滑軌 124:第一滑塊 125:第一連結件 13:第二架置器 131:容置部 14:第三架置器 151:缸本體 152:活塞桿 161:第二滑軌 162:第二滑塊 171:第二馬達 172:第二皮帶輪組 18:拾取器 21:供料器 22:載台 30:桌板 31:限位件 32:把手 33:作業室 41:供料盤 42:收料盤 51:電路板 52:測試座 53:測試用電腦 54:壓接具 55:作業驅動器 56:載台 57:載送驅動器 58:壓移具 60:桌體 70:腳架 71:承框 711:凹部 72:支撐腳件 73:容置空間 80:台車 81:滑輪 82:滑軌組 A:組裝方向 L1:第一行程 L2:第二行程10: Moving mechanism 11: The first mounter 121: The first motor 122: The first pulley set 123: The first rail 124: First Slider 125: First Link 13: Second mounter 131: accommodating part 14: The third mounter 151: Cylinder body 152: Piston Rod 161: Second rail 162: Second Slider 171: Second Motor 172: Second pulley set 18: Picker 21: Feeder 22: Carrier 30: Table board 31: Limiter 32: handle 33: Workshop 41: Feeding tray 42: Receiving tray 51: circuit board 52: Test seat 53: Test computer 54: Crimping tool 55: Job Drive 56: Carrier 57: Carrier Drive 58: Press transfer tool 60: table body 70: Tripod 71: Bearing frame 711: Recess 72: Support feet 73: accommodating space 80: Trolley 81: Pulley 82: Slide rail group A: Assembly direction L1: The first trip L2: Second trip
圖1:本發明微型移料機構之俯視圖。 圖2:本發明微型移料機構之側視圖。 圖3:微型移料機構之使用示意圖(一)。 圖4:微型移料機構之使用示意圖(二)。 圖5:本發明微型作業裝置之第一實施例圖。 圖6:微型作業裝置第一實施例擺置於工作台之示意圖。 圖7:本發明微型作業裝置之第二實施例圖。 圖8:本發明微型作業裝置之第三實施例圖。 圖9:本發明微型作業裝置之第四實施例圖。Figure 1: A top view of the micro-moving mechanism of the present invention. Figure 2: A side view of the micro-moving mechanism of the present invention. Figure 3: Schematic diagram of the use of the micro-moving mechanism (1). Figure 4: Schematic diagram of the use of the micro-moving mechanism (2). FIG. 5 is a diagram of the first embodiment of the micro-operating device of the present invention. FIG. 6 is a schematic diagram of the first embodiment of the micro-operating device placed on the workbench. FIG. 7 is a diagram of the second embodiment of the micro-operating device of the present invention. FIG. 8 is a diagram of a third embodiment of the micro-working device of the present invention. FIG. 9 is a diagram of the fourth embodiment of the micro-working device of the present invention.
10:移料機構10: Moving mechanism
11:第一架置器11: The first mounter
121:第一馬達121: The first motor
122:第一皮帶輪組122: The first pulley set
123:第一滑軌123: The first rail
124:第一滑塊124: First Slider
125:第一連結件125: First Link
13:第二架置器13: Second mounter
131:容置部131: accommodating part
14:第三架置器14: The third mounter
151:缸本體151: Cylinder body
152:活塞桿152: Piston Rod
161:第二滑軌161: Second rail
162:第二滑塊162: Second Slider
171:第二馬達171: Second Motor
172:第二皮帶輪組172: Second pulley set
18:拾取器18: Picker
A:組裝方向A: Assembly direction
Claims (10)
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM247567U (en) * | 2003-07-04 | 2004-10-21 | Wecon Automation Co Ltd | Three-axis high-speed hauling system for semiconductor chip |
| CN101180548A (en) * | 2005-04-07 | 2008-05-14 | 株式会社爱德万测试 | Pick-and-place mechanism for electronic components, electronic component processing device, and adsorption method for electronic components |
| TWM584847U (en) * | 2019-06-04 | 2019-10-11 | 上鎰科技有限公司 | Modular structure of smart delivery system |
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2020
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM247567U (en) * | 2003-07-04 | 2004-10-21 | Wecon Automation Co Ltd | Three-axis high-speed hauling system for semiconductor chip |
| CN101180548A (en) * | 2005-04-07 | 2008-05-14 | 株式会社爱德万测试 | Pick-and-place mechanism for electronic components, electronic component processing device, and adsorption method for electronic components |
| TWM584847U (en) * | 2019-06-04 | 2019-10-11 | 上鎰科技有限公司 | Modular structure of smart delivery system |
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