TWI762200B - Solder alloy, solder powder, solder paste, solder ball, solder preform and solder joint - Google Patents
Solder alloy, solder powder, solder paste, solder ball, solder preform and solder joint Download PDFInfo
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- TWI762200B TWI762200B TW110105772A TW110105772A TWI762200B TW I762200 B TWI762200 B TW I762200B TW 110105772 A TW110105772 A TW 110105772A TW 110105772 A TW110105772 A TW 110105772A TW I762200 B TWI762200 B TW I762200B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/26—Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
- B23K35/262—Sn as the principal constituent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
- B23K35/0244—Powders, particles or spheres; Preforms made therefrom
- B23K35/025—Pastes, creams, slurries
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/26—Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C13/00—Alloys based on tin
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- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Abstract
Description
本發明係關於焊料合金、焊料粉末、焊膏、焊料球、焊料預成形物及焊料接頭。 The present invention relates to solder alloys, solder powders, solder pastes, solder balls, solder preforms and solder joints.
本申請案係依據在2020年4月10日向日本提出申請之日本申請案特願2020-070927號主張優先權,並在此援引其內容。 This application claims priority based on Japanese Patent Application No. 2020-070927 for which it applied to Japan on April 10, 2020, the content of which is incorporated herein by reference.
在印刷基板所搭載之電子零件中,漸漸要求小型化、高性能化。如此之電子零件例如可列舉半導體封裝體。在半導體封裝體中,係以樹脂成分封裝具有電極之半導體元件。在該電極係形成有以焊料材料所產生的焊料凸塊。又,焊料材料係連接半導體元件與印刷基板。 In electronic components mounted on printed circuit boards, miniaturization and high performance are increasingly required. As such an electronic component, a semiconductor package is mentioned, for example. In the semiconductor package, a semiconductor element having electrodes is packaged with a resin composition. Solder bumps made of solder material are formed on the electrode system. In addition, the solder material connects the semiconductor element and the printed circuit board.
在焊料材料中,α射線對於軟錯誤(soft error)的影響係變成問題。為了減輕如此之對半導體元件運作造成之不良影響,遂進行開發含有焊料材料之低α射線量材料。 In solder materials, the effect of alpha rays on soft errors becomes problematic. In order to alleviate such adverse effects on the operation of semiconductor devices, development of low alpha radiation dose materials containing solder materials has been carried out.
造成α射線源之主因係例如在焊料材料中之焊料合金,尤其是成為基材之錫(Sn)基底金屬中所含有的微量之放射性元素。焊料合金係可使原料金屬進行熔融混合而製造。在如此之焊料合金中,為了設計低α射線量材料,重要的是從合金組成去除如鈾(U)、釷(Th)、釙(Po)之成為上游的放射性元素。 The main cause of the α-ray source is, for example, the solder alloy in the solder material, especially the trace amount of radioactive elements contained in the tin (Sn) base metal that becomes the base material. Solder alloys can be produced by melting and mixing raw material metals. In such solder alloys, in order to design low alpha dose materials, it is important to remove upstream radioactive elements such as uranium (U), thorium (Th), and polonium (Po) from the alloy composition.
相對於此,在Sn基底金屬之精煉中,去除U、Th、Po在技術上並不難(例如參照專利文獻1)。 On the other hand, it is not technically difficult to remove U, Th, and Po in the refining of Sn base metal (for example, refer to Patent Document 1).
一般而言,在Sn中係包含鉛(Pb)、鉍(Bi)作為雜質。Pb及Bi中屬於放射性同位素的210Pb及210Bi會進行β衰變而成為210Po,而210Po進行α衰變而生成206Pb時會產生α射線。該一連串之衰變(鈾系列)據說係從焊料材料產生α射線的主要原因。 Generally, lead (Pb) and bismuth (Bi) are contained in Sn as impurities. Among Pb and Bi, 210 Pb and 210 Bi, which are radioactive isotopes, undergo beta decay to become 210 Po, while 210 Po undergoes alpha decay to generate 206 Pb, which generates alpha rays. This series of decays (uranium series) is said to be the main cause of the generation of alpha rays from the solder material.
又,在從材料發生之α射線量的評估中,單位經常使用「cph/cm2」。「cph/cm2」係“counts per hours/cm2”之簡稱,意指每1cm2每1小時之α射線的計數量。 In addition, in the evaluation of the amount of alpha radiation generated from the material, the unit "cph/cm 2 " is often used. “cph/cm 2 ” is the abbreviation of “counts per hours/cm 2 ”, which means the number of alpha rays per 1 cm 2 per hour.
有關Pb及Bi之半衰期係如以下。 The half-lives of Pb and Bi are as follows.
有關Bi,210Bi之半衰期約為5日。有關Pb,210Pb之半衰期約為22.3年。再者,此等之影響度(存在比)係可以下式表示(參照非專利文獻1)。亦即,相較於Pb,Bi對α射線發生之影響為非常低。 Regarding Bi, the half-life of 210 Bi is about 5 days. Regarding Pb, the half-life of 210 Pb is about 22.3 years. In addition, these influence degrees (existence ratio) can be represented by the following formula (refer nonpatent literature 1). That is, the influence of Bi on the generation of alpha rays is very low compared to that of Pb.
[210Bi]≒[210Pb]/1.6×103 [ 210 Bi]≒[ 210 Pb]/1.6×10 3
式中,[210Bi]係表示210Bi之莫耳濃度。[210Pb]係表示210Pb之莫耳濃度。 In the formula, [ 210 Bi] represents the molar concentration of 210 Bi. [ 210 Pb] represents the molar concentration of 210 Pb.
如以上,以往,在低α射線量材料之設計中,一般係去除U、Th,並進一步徹底去除Pb。 As described above, conventionally, in the design of low α radiation dose materials, U and Th are generally removed, and Pb is further removed completely.
又,從焊料材料產生之α射線量係已知會隨時間經過變化,基本上使α射線量增加。據說此原因係焊料合金中之放射性Pb及放射性Bi進行β衰變而增加Po量,接著,Po進行α衰變產生α射線。 In addition, the amount of alpha radiation generated from the solder material is known to vary with time, substantially increasing the amount of alpha radiation. It is said that the reason for this is that radioactive Pb and radioactive Bi in the solder alloy undergo beta decay to increase the amount of Po, and then Po undergoes alpha decay to generate alpha rays.
在極低α射線量之材料中,雖然幾乎不含有此等放射性元素,但有時會因210Po之偏析,使α射線量隨時間經過變化而增加。210Po本來會放射α射線,但焊料合金凝固時,在焊料合金中心部分進行偏析,故進行放射之α射線會被焊料合金遮蔽。接著,隨時間經過同時,210Po會均勻地分散在合金中,亦存在於α射線被檢測出之表面,故α射線量會隨經時變化而增加(參照非專利文獻2)。 In materials with extremely low alpha radiation doses, although these radioactive elements are hardly contained, the alpha radiation dose may increase over time due to the segregation of 210 Po. 210 Po originally emits alpha rays, but when the solder alloy solidifies, segregation occurs at the center of the solder alloy, so the alpha rays emitted are shielded by the solder alloy. Then, as time elapses, 210 Po is uniformly dispersed in the alloy and also exists on the surface where the α-rays are detected, so the amount of α-rays increases with time (see Non-Patent Document 2).
如上述,因在焊料合金中所含有的極微量之雜質的影響,產生之α射線量增加。因此,在低α射線量材料之設計中,如焊料合金之習知的製造方法,難以僅添加各種元素。 As described above, due to the influence of the extremely small amount of impurities contained in the solder alloy, the amount of α rays generated increases. Therefore, it is difficult to add only various elements in the design of low alpha radiation dose materials, such as the conventional manufacturing methods of solder alloys.
例如,為了抑制焊膏經時的黏度增加之增黏抑制,已知有在焊料合金中添加砷(As)之方法(例如參照專利文獻2)。 For example, a method of adding arsenic (As) to a solder alloy is known in order to suppress the viscosity increase of the solder paste over time (for example, refer to Patent Document 2).
對如上述之印刷基板的封裝中,從連接強度等之觀點,具有某種程度大小之電子零件的封裝時,採用在基板之通孔插入端子並封裝之方法。如此之電子零件的封裝操作通常係使用流焊(flow soldering)。流焊係藉由使焊料浴槽之焊料噴流面接觸於印刷基板之連接面,而進行焊接之方法。 In the packaging of the printed circuit board as described above, from the viewpoint of connection strength, etc., when packaging electronic components having a certain size, a method of inserting terminals into through holes of the substrate and packaging is adopted. The packaging operation of such electronic components is usually performed using flow soldering. Flow soldering is a method of soldering by bringing the solder jet surface of the solder bath into contact with the connection surface of the printed circuit board.
在流焊中必須有焊料槽。在焊料浴槽內,高溫之熔融焊料會長時間進行流動。因此,從耐蝕性之觀點而言,在焊料浴槽之材料係使用主成分為鐵(Fe)之不鏽鋼等。但,因長時間之使用,有時焊料浴槽之內面會受到Fe蝕而被侵蝕。 There must be a solder bath in flow soldering. In a solder bath, hot molten solder flows for a long time. Therefore, from the viewpoint of corrosion resistance, stainless steel or the like whose main component is iron (Fe) is used for the material of the solder bath. However, due to prolonged use, the inner surface of the solder bath may be corroded by Fe corrosion.
在專利文獻3係為了抑制在流焊之焊料浴槽的Fe蝕,而揭示一種含有預定量之Fe與Ge的焊料合金。 Patent Document 3 discloses a solder alloy containing predetermined amounts of Fe and Ge in order to suppress Fe corrosion in a solder bath for flow soldering.
[先前技術文獻] [Prior Art Literature]
[專利文獻] [Patent Literature]
[專利文獻1]日本特開2010-156052號公報 [Patent Document 1] Japanese Patent Laid-Open No. 2010-156052
[專利文獻2]日本特開2015-98052號公報 [Patent Document 2] Japanese Patent Laid-Open No. 2015-98052
[專利文獻3]日本特開2008-168322號公報 [Patent Document 3] Japanese Patent Laid-Open No. 2008-168322
[非專利文獻] [Non-patent literature]
[非專利文獻1] Radioactive Nuclei Induced Soft Errors at Ground Level; IEEE TRANSACTIONS ON NUCLEAR SCIENCE,DECEMBER 2009,VOL.56,NO.6,p.3437-3441 [Non-Patent Document 1] Radioactive Nuclei Induced Soft Errors at Ground Level; IEEE TRANSACTIONS ON NUCLEAR SCIENCE, DECEMBER 2009, VOL.56, NO.6, p.3437-3441
[非專利文獻2] Energy Dependent Efficiency in Low Background Alpha Measurements and Impacts on Accurate Alpha Characterization; IEEE TRANSACTIONS ON NUCLEAR SCIENCE,DECEMBER 2015,VOL.62,NO.6,p.3034-3039 [Non-Patent Document 2] Energy Dependent Efficiency in Low Background Alpha Measurements and Impacts on Accurate Alpha Characterization; IEEE TRANSACTIONS ON NUCLEAR SCIENCE, DECEMBER 2015, VOL.62, NO.6, p.3034-3039
為了抑制焊膏之經時的增黏,例如,如在專利文獻2所記載之方法,在焊料合金中添加As之方法,係藉由添加As,而使合金中亦含有雜質。此時,因其雜質中存在放射性元素,故從焊料材料產生之α射線量會增加。 In order to suppress the thickening of the solder paste over time, for example, as described in Patent Document 2, the method of adding As to the solder alloy is to add As to make the alloy also contain impurities. At this time, the amount of alpha rays generated from the solder material increases due to the presence of radioactive elements in impurities.
又,如專利文獻3所記載之焊料合金,以Sn作為主成分之焊料合金中含有較多Fe時,會析出源自SnFe化合物之針狀結晶,有電路短路之虞。 Further, as in the solder alloy described in Patent Document 3, when a large amount of Fe is contained in the solder alloy containing Sn as a main component, needle-like crystals derived from the SnFe compound are precipitated, and there is a possibility of short circuit.
又,以Sn作為主成分之焊料合金中,為了提高潤濕性,可含有大量之鎳(Ni)。若Ni含量多,在焊料合金之接合界面附近會析出SnCuNi化合物,有焊料接頭之機械強度降低之虞。 Moreover, in the solder alloy containing Sn as a main component, in order to improve wettability, a large amount of nickel (Ni) may be contained. If the Ni content is large, the SnCuNi compound will precipitate in the vicinity of the bonding interface of the solder alloy, and there is a possibility that the mechanical strength of the solder joint may be lowered.
本發明係有鑑於上述之事情而研創者,其目的在於提供一種焊料合金、由該焊料合金所構成的焊料粉末、含有該焊料粉末與助焊劑之焊膏、由該焊料合金所構成的焊料球、焊料預成形物及焊料接頭,其中該焊料合金係可抑制焊膏經時的黏度增加,不易產生電路之短路,提高焊料接頭之機械強度,且抑制軟錯誤之發生者。 The present invention has been made in view of the above-mentioned matters, and its object is to provide a solder alloy, a solder powder composed of the solder alloy, a solder paste containing the solder powder and a flux, and a solder ball composed of the solder alloy , Solder preforms and solder joints, wherein the solder alloy can inhibit the viscosity increase of the solder paste over time, it is difficult to cause short circuits in the circuit, the mechanical strength of the solder joints is improved, and the occurrence of soft errors is suppressed.
本發明人等以在不添加伴隨含有放射性元素之雜質的As之情況下,設計可抑制焊膏經時的增黏之低α射線量的焊料合金作為目的而進行研究。藉由如此之研究,發現設為含有作為主成分之Sn、及預定量之如基底金屬之精煉時或加工時被高溫加熱之屬於高熔點金屬的熔點1455 ℃之Ni及熔點1538℃之Fe的合金組成,可達成前述目的,終於完成本發明。 The inventors of the present invention have conducted studies with the aim of designing a solder alloy with a low alpha radiation dose that can suppress the temporal thickening of the solder paste without adding As accompanying an impurity containing a radioactive element. Through such research, it was found that the melting point of 1455, which is a high-melting-point metal, is made to contain Sn as the main component and a predetermined amount such as that of the base metal, which is heated at high temperature during refining or processing. The alloy composition of Ni with a melting point of 1538°C and Fe with a melting point of 1538°C can achieve the aforementioned objects, and finally the present invention is completed.
亦即,本發明係為了解決上述之課題,採用以下之手段。 That is, in order to solve the above-mentioned subject, this invention employs the following means.
[1]一種焊料合金,係具有一合金組成,該合金組成包含U:未達5質量ppb、Th:未達5質量ppb、Pb:未達5質量ppm、As:未達5質量ppm、Ni:0質量ppm以上600質量ppm以下、及Fe:0質量ppm以上100質量ppm以下、以及剩餘部分為Sn的合金組成;該焊料合金滿足下述(1)式,且α射線量為0.02cph/cm2以下。 [1] A solder alloy having an alloy composition comprising U: less than 5 mass ppb, Th: less than 5 mass ppb, Pb: less than 5 mass ppm, As: less than 5 mass ppm, Ni : 0 mass ppm or more and 600 mass ppm or less, and Fe: 0 mass ppm or more and 100 mass ppm or less, and the remainder is Sn; the solder alloy satisfies the following formula (1), and the α radiation dose is 0.02cph/ cm 2 or less.
20≦Ni+Fe≦700 (1) 20≦Ni+Fe≦700 (1)
(1)式中,Ni及Fe係分別表示前述合金組成中之含量(質量ppm)。 In the formula (1), Ni and Fe represent the content (mass ppm) in the aforementioned alloy composition, respectively.
[2]一種焊料合金,係具有一合金組成,該合金組成包含U:未達5質量ppb、Th:未達5質量ppb、Pb:未達5質量ppm、As:未達5質量ppm、Ni:0質量ppm以上600質量ppm以下、及Fe:超過0質量ppm且100質量ppm以下、以及剩餘部分為Sn;焊料合金滿足下述(1)式,且α射線量為0.02cph/cm2以下; [2] A solder alloy having an alloy composition including U: less than 5 mass ppb, Th: less than 5 mass ppb, Pb: less than 5 mass ppm, As: less than 5 mass ppm, Ni : 0 mass ppm or more and 600 mass ppm or less, and Fe: more than 0 mass ppm and 100 mass ppm or less, and the remainder is Sn; the solder alloy satisfies the following formula (1), and the α radiation dose is 0.02 cph/cm 2 or less ;
20≦Ni+Fe≦700 (1) 20≦Ni+Fe≦700 (1)
(1)式中,Ni及Fe係分別表示前述合金組成中之含量(質量ppm)。 In the formula (1), Ni and Fe represent the content (mass ppm) in the aforementioned alloy composition, respectively.
[3]如[1]或[2]所述之焊料合金,其中,前述合金組成更滿足下述(1’)式; [3] The solder alloy according to [1] or [2], wherein the alloy composition further satisfies the following formula (1');
40≦Ni+Fe≦200 (1’) 40≦Ni+Fe≦200 (1’)
(1’)式中,Ni及Fe係分別表示前述合金組成中之含量(質量ppm)。 In the formula (1'), Ni and Fe represent the contents (mass ppm) in the aforementioned alloy composition, respectively.
[4]如[1]至[3]中任一項所述之焊料合金,其中,Pb為未達2質量ppm。 [4] The solder alloy according to any one of [1] to [3], wherein Pb is less than 2 mass ppm.
[5]如[1]至[4]中任一項所述之焊料合金,其中,As為未達2質量ppm。 [5] The solder alloy according to any one of [1] to [4], wherein As is less than 2 mass ppm.
[6]如[1]至[5]中任一項所述之焊料合金,其中,前述合金組成更含有Ag:0質量%以上4質量%以下、及Cu:0質量%以上0.9質量%以下之至少一種。 [6] The solder alloy according to any one of [1] to [5], wherein the alloy composition further contains Ag: 0 mass % or more and 4 mass % or less, and Cu: 0 mass % or more and 0.9 mass % or less at least one of them.
[7]一種焊料合金,係具有一合金組成,該合金組成包含U:未達5質量ppb、Th:未達5質量ppb、Pb:未達5質量ppm、As:未達5質量ppm、Ni:超過0質量ppm且600質量ppm以下、及Fe:超過0質量ppm且100質量ppm以下;Ag:超過0質量%且4質量%以下、及Cu:超過0質量%且0.9質量%以下之至少一種;剩餘部分為Sn;焊料合金滿足下述(1)式,且α射線量為0.02cph/cm2以下。 [7] A solder alloy having an alloy composition comprising U: less than 5 mass ppb, Th: less than 5 mass ppb, Pb: less than 5 mass ppm, As: less than 5 mass ppm, Ni : more than 0 mass ppm and 600 mass ppm or less, and Fe: more than 0 mass ppm and 100 mass ppm or less; Ag: more than 0 mass % and 4 mass % or less, and Cu: more than 0 mass % and 0.9 mass % or less at least One; the remainder is Sn; the solder alloy satisfies the following formula (1), and the α radiation dose is 0.02 cph/cm 2 or less.
20≦Ni+Fe≦700 (1) 20≦Ni+Fe≦700 (1)
(1)式中,Ni及Fe係分別表示前述合金組成中之含量(質量ppm)。 In the formula (1), Ni and Fe represent the content (mass ppm) in the aforementioned alloy composition, respectively.
[8]一種焊料合金,係具有一合金組成,該合金組成包含U:未達5質量ppb、Th:未達5質量ppb、Pb:未達5質量ppm、As:未達5質量ppm、Ni:超過0質量ppm且600質量ppm以下、及Fe:0質量ppm以上100質量ppm以下;Cu:0質量%以上0.9質量%以下;剩餘部分為Sn;該焊料合金滿足下述(1)式,Cu與Ni之比率以Cu/Ni所示之質量比計為8以上175以下,且α射線量為0.02cph/cm2以下。 [8] A solder alloy having an alloy composition including U: less than 5 mass ppb, Th: less than 5 mass ppb, Pb: less than 5 mass ppm, As: less than 5 mass ppm, Ni : more than 0 mass ppm and 600 mass ppm or less, and Fe: 0 mass ppm or more and 100 mass ppm or less; Cu: 0 mass % or more and 0.9 mass % or less; the remainder is Sn; the solder alloy satisfies the following formula (1), The ratio of Cu to Ni is 8 or more and 175 or less in terms of the mass ratio represented by Cu/Ni, and the α radiation dose is 0.02 cph/cm 2 or less.
20≦Ni+Fe≦700 (1) 20≦Ni+Fe≦700 (1)
(1)式中,Ni及Fe係分別表示前述合金組成中之含量(質量ppm)。 In the formula (1), Ni and Fe represent the content (mass ppm) in the aforementioned alloy composition, respectively.
[9]一種焊料合金,係具有包含U:未達5質量ppb、Th:未達5質量ppb、Pb:未達5質量ppm、As:未達5質量ppm、Ni:0質量ppm以上600質量ppm以下、及Fe:0質量ppm以上100質量ppm以下、Cu:超過0質量%且0.9質量%以下、剩餘部分為Sn的合金組成,並滿足下述(1)式,Cu與Ni與Fe之比率以Cu/(Ni+Fe)所示之質量比計為7以上350以下,且α射線量為0.02cph/cm2以下。 [9] A solder alloy containing U: less than 5 mass ppb, Th: less than 5 mass ppb, Pb: less than 5 mass ppm, As: less than 5 mass ppm, Ni: 0 mass ppm or more 600 mass ppm ppm or less, and Fe: 0 mass ppm or more and 100 mass ppm or less, Cu: more than 0 mass % and 0.9 mass % or less, and the remainder is Sn in an alloy composition that satisfies the following formula (1), and the ratio of Cu, Ni and Fe is The ratio is 7 or more and 350 or less as a mass ratio represented by Cu/(Ni+Fe), and the α radiation dose is 0.02 cph/cm 2 or less.
20≦Ni+Fe≦700 (1) 20≦Ni+Fe≦700 (1)
(1)式中,Ni及Fe係分別表示前述合金組成中之含量(質量ppm)。 In the formula (1), Ni and Fe represent the content (mass ppm) in the aforementioned alloy composition, respectively.
[10]一種焊料合金,係具有一合金組成,該合金組成包含U:未達5質量ppb、Th:未達5質量ppb、Pb:未達5質量ppm、As:未達5質量ppm、Ni:0質量ppm以上600質量ppm以下、及Fe:超過0質量ppm且100質量ppm以下;Cu:超過0質量%且0.9質量%以下;剩餘部分為Sn;該焊料合金滿足下述(1)式,Cu與Fe之比率以Cu/Fe所示之質量比計為50以上350以下,且α射線量為0.02cph/cm2以下。 [10] A solder alloy having an alloy composition comprising U: less than 5 mass ppb, Th: less than 5 mass ppb, Pb: less than 5 mass ppm, As: less than 5 mass ppm, Ni : 0 mass ppm or more and 600 mass ppm or less, and Fe: more than 0 mass ppm and 100 mass ppm or less; Cu: more than 0 mass % and 0.9 mass % or less; the remainder is Sn; the solder alloy satisfies the following formula (1) , the ratio of Cu to Fe is 50 or more and 350 or less in terms of the mass ratio represented by Cu/Fe, and the α radiation dose is 0.02 cph/cm 2 or less.
20≦Ni+Fe≦700 (1) 20≦Ni+Fe≦700 (1)
(1)式中,Ni及Fe係分別表示前述合金組成中之含量(質量ppm)。 In the formula (1), Ni and Fe represent the content (mass ppm) in the aforementioned alloy composition, respectively.
[11]如[7]至[10]中任一項所述之焊料合金,其中,Ni與Fe之比率以Ni/Fe所示之質量比計為0.4以上30以下。 [11] The solder alloy according to any one of [7] to [10], wherein the ratio of Ni to Fe is 0.4 or more and 30 or less as a mass ratio represented by Ni/Fe.
[12]如[8]至[11]中任一項所述之焊料合金,其中,前述合金組成更含有Ag:超過0質量%且4質量%以下。 [12] The solder alloy according to any one of [8] to [11], wherein the alloy composition further contains Ag: more than 0 mass % and 4 mass % or less.
[13]如[1]至[12]中任一項所述之焊料合金,其中,前述合金組成更含有Bi:0質量%以上0.3質量%以下、及Sb:0質量%以上0.9質量%以下之至少一種。 [13] The solder alloy according to any one of [1] to [12], wherein the alloy composition further contains Bi: 0 mass % or more and 0.3 mass % or less, and Sb: 0 mass % or more and 0.9 mass % or less at least one of them.
[14]如[13]所述之焊料合金,其中,前述合金組成更滿足下述(2)式, [14] The solder alloy according to [13], wherein the alloy composition further satisfies the following formula (2),
0.03≦Bi+Sb≦1.2 (2) 0.03≦Bi+Sb≦1.2 (2)
(2)式中,Bi及Sb係分別表示前述合金組成中之含量(質量%)。 (2) In the formula, Bi and Sb represent the contents (mass %) in the aforementioned alloy composition, respectively.
[15]如[1]至[14]中任一項所述之焊料合金,其中,對於成形為一面之面積為900cm2的片狀之焊料合金片,在100℃施予1小時之加熱處理後的α射線量為0.02cph/cm2以下。 [15] The solder alloy according to any one of [1] to [14], wherein the solder alloy sheet formed into a sheet having an area of 900 cm 2 on one side is subjected to a heat treatment at 100° C. for 1 hour The latter alpha radiation dose is 0.02 cph/cm 2 or less.
[16]如[1]至[15]中任一項所述之焊料合金,其中,α射線量為0.002cph/cm2以下。 [16] The solder alloy according to any one of [1] to [15], wherein the α radiation dose is 0.002 cph/cm 2 or less.
[17]如[16]中任一項所述之焊料合金,其中,α射線量為0.001cph/cm2以下。 [17] The solder alloy according to any one of [16], wherein the α radiation dose is 0.001 cph/cm 2 or less.
[18]一種焊料粉末,係包含[1]至[17]中任一項所述之焊料合金。 [18] A solder powder comprising the solder alloy according to any one of [1] to [17].
[19]如[18]所述之焊料粉末,係同時具有粒度分布不同的2種以上之焊料合金粒子群。 [19] The solder powder according to [18], comprising two or more types of solder alloy particle groups having different particle size distributions at the same time.
[20]一種焊膏,係含有[18]或[19]所述之焊料粉末、及助焊劑。 [20] A solder paste containing the solder powder according to [18] or [19] and a flux.
[21]一種焊料球,係包含[1]至[17]中任一項所述之焊料合金。 [21] A solder ball comprising the solder alloy according to any one of [1] to [17].
[22]一種焊料預成形物,係包含[1]至[17]中任一項所述之焊料合金。 [22] A solder preform comprising the solder alloy according to any one of [1] to [17].
[23]一種焊料接頭,係包含如[1]至[17]中任一項所述之焊料合金所。 [23] A solder joint comprising the solder alloy according to any one of [1] to [17].
若依據本發明,可提供一種焊料合金、由該焊料合金所構成的焊料粉末、含有該焊料粉末與助焊劑之焊膏、由該焊料合金所構成的焊料球、焊料預成形物及焊料接頭,其中該焊料合金係可抑制焊膏經時的黏度增加,不易產生電路之短路,提高焊料接頭之機械強度,且抑制軟錯誤之發生。 According to the present invention, a solder alloy, a solder powder composed of the solder alloy, a solder paste containing the solder powder and a flux, a solder ball composed of the solder alloy, a solder preform and a solder joint can be provided, The solder alloy system can inhibit the viscosity increase of the solder paste over time, is not easy to cause short circuit in the circuit, improves the mechanical strength of the solder joint, and inhibits the occurrence of soft errors.
藉由以下詳細說明本發明。 The present invention will be explained in detail below.
在本說明書中,有關焊料合金組成之「ppb」係只要無特別指定,為「質量ppb」。「ppm」係只要無特別指定,為「質量ppm」。「%」係只要無特別指定,為「質量%」。 In this specification, the "ppb" concerning the composition of the solder alloy is "mass ppb" unless otherwise specified. "ppm" means "mass ppm" unless otherwise specified. "%" means "mass %" unless otherwise specified.
(焊料合金) (solder alloy)
有關本發明之一態樣的焊料合金係具有包含U:未達5質量ppb、Th:未達5質量ppb、Pb:未達5質量ppm、As:未達5質量ppm、Ni:0質量ppm以上600質量ppm以下、及Fe:0質量ppm以上100質量ppm以下、以及剩餘部分為Sn的合金組成,並滿足下述(1)式,且α射線量為0.02cph/cm2以下。 The solder alloy system according to one aspect of the present invention has U: less than 5 mass ppb, Th: less than 5 mass ppb, Pb: less than 5 mass ppm, As: less than 5 mass ppm, Ni: 0 mass ppm An alloy composition of 600 mass ppm or more and Fe: 0 mass ppm or more and 100 mass ppm or less, and the remainder being Sn, which satisfies the following formula (1), and the α radiation dose is 0.02 cph/cm 2 or less.
20≦Ni+Fe≦700 (1) 20≦Ni+Fe≦700 (1)
(1)式中,Ni及Fe係分別表示前述合金組成中之含量(質量ppm)。 In the formula (1), Ni and Fe represent the content (mass ppm) in the aforementioned alloy composition, respectively.
<合金組成> <Alloy composition>
本實施型態之焊料合金係具有包含U:未達5質量ppb、Th:未達5質量ppb、Pb:未達5質量ppm、As:未達5質量ppm、Ni:0質量ppm以上600質量ppm以下、及Fe:0質量ppm以上100質量ppm以下、以及剩餘部分為Sn的合金組成,並滿足前述(1)式。 The solder alloy of the present embodiment has U: less than 5 mass ppb, Th: less than 5 mass ppb, Pb: less than 5 mass ppm, As: less than 5 mass ppm, Ni: 0 mass ppm or more and 600 mass ppm ppm or less, and Fe: 0 mass ppm or more and 100 mass ppm or less, and an alloy composition in which the remainder is Sn, and satisfies the above-mentioned formula (1).
≪U:未達5質量ppb、Th:未達5質量ppb≫ ≪U: Less than 5 quality ppb, Th: less than 5 quality ppb≫
U及Th為放射性元素。為了抑制軟錯誤之發生,必須抑制焊料合金中之該等的含量。 U and Th are radioactive elements. In order to suppress the occurrence of soft errors, the content of these in the solder alloy must be suppressed.
在本實施型態中,就將從焊料合金產生之α射線量設為0.02cph/cm2以下之觀點而言,相對於焊料合金之總質量(100質量%),焊料合金中之U及Th的含量分別為未達5ppb。從抑制在高密度封裝之軟錯誤發生的觀點而言,U及Th之含量較佳係分別為2ppb以下,愈低愈佳。 In the present embodiment, from the viewpoint of setting the amount of α radiation generated from the solder alloy to 0.02 cph/cm 2 or less, U and Th in the solder alloy relative to the total mass of the solder alloy (100% by mass) The content of each is less than 5ppb. From the viewpoint of suppressing the occurrence of soft errors in high-density packaging, the contents of U and Th are preferably 2 ppb or less, respectively, and the lower the better.
≪Pb:未達5質量ppm≫ ≪Pb: Less than 5 mass ppm≫
一般而言,在Sn中,含有Pb作為雜質。該Pb中之放射性同位體進行β衰變而成為210Po,而210Po進行α衰變而生成206Pb時會產生α射線。就此情況而言,較佳係在焊料合金中屬於雜質的Pb之含量亦極少。 Generally, Sn contains Pb as an impurity. The radioisotope in the Pb undergoes beta decay to become 210 Po, and 210 Po undergoes alpha decay to generate 206 Pb, which produces alpha rays. In this case, it is preferable that the content of Pb which is an impurity in the solder alloy is also extremely small.
本實施型態中,相對於焊料合金之總質量(100質量%),焊料合金中之Pb的含量為未達5ppm,較佳為未達2ppm,更佳為未達1ppm。又,焊料合金中之Pb的含量之下限可為0ppm以上。 In this embodiment, the content of Pb in the solder alloy is less than 5 ppm, preferably less than 2 ppm, more preferably less than 1 ppm, relative to the total mass (100% by mass) of the solder alloy. In addition, the lower limit of the content of Pb in the solder alloy may be 0 ppm or more.
≪As:未達5質量ppm≫ ≪As: Less than 5 mass ppm≫
在焊料合金中添加As係對抑制焊膏經時的增黏為有效,但伴隨As之添加,在合金中亦會包含放射性元素,使從焊料材料產生之α射線量增加。 The addition of As to the solder alloy is effective for suppressing the thickening of the solder paste over time, but along with the addition of As, radioactive elements are also included in the alloy, which increases the amount of alpha rays generated from the solder material.
在本實施型態中,其目的係在不添加伴隨包含放射性元素之雜質的As之情況下,試圖抑制焊膏經時的增黏。 In the present embodiment, the purpose is to suppress the increase in viscosity of the solder paste over time without adding As accompanying impurities containing radioactive elements.
本實施型態中,相對於焊料合金之總質量(100質量%),焊料合金中之As的含量為未達5ppm,較佳為未達2ppm,更佳為未達1ppm。又,焊料合金中之As的含量之下限可為0ppm以上。 In this embodiment, the content of As in the solder alloy is less than 5 ppm, preferably less than 2 ppm, more preferably less than 1 ppm, relative to the total mass (100% by mass) of the solder alloy. In addition, the lower limit of the content of As in the solder alloy may be 0 ppm or more.
≪Ni:0質量ppm以上600質量ppm以下、Fe:0質量ppm以上100質量ppm以下、(1)式≫ ≪Ni: 0 mass ppm or more and 600 mass ppm or less, Fe: 0 mass ppm or more and 100 mass ppm or less, formula (1)≫
藉由焊接,在焊料合金中之接合界面附近中,會形成含有Sn的金屬間化合物(包含Sn之金屬間化合物),若該含有Sn之金屬間化合物析出,焊料接頭之機械強度會變差。 By soldering, a Sn-containing intermetallic compound (Sn-containing intermetallic compound) is formed in the vicinity of the bonding interface in the solder alloy. When the Sn-containing intermetallic compound is precipitated, the mechanical strength of the solder joint is deteriorated.
Ni:0質量ppm以上600質量ppm以下 Ni: 0 mass ppm or more and 600 mass ppm or less
Ni係抑制在接合界面形成含有Sn的金屬間化合物之元素。 Ni is an element that suppresses the formation of Sn-containing intermetallic compounds at the bonding interface.
藉由焊料合金含有Ni,可抑制前述含有Sn的金屬間化合物之形成,並維持焊料接頭之機械強度。另一方面,若焊料合金中之Ni的含量超過600ppm,在焊料合金中之接合界面附近中,會析出SnNi化合物,有焊料接頭之機械強度變差之虞。 By containing Ni in the solder alloy, the formation of the aforementioned Sn-containing intermetallic compound can be suppressed, and the mechanical strength of the solder joint can be maintained. On the other hand, when the content of Ni in the solder alloy exceeds 600 ppm, SnNi compounds are precipitated in the vicinity of the bonding interface in the solder alloy, and the mechanical strength of the solder joint may be deteriorated.
在本實施型態中,相對於焊料合金之總質量(100質量%),焊料合金中之Ni的含量為0ppm以上600ppm以下,較佳為超過0ppb且600ppm以下,更佳為20ppm以上600ppm以下,再更佳為40ppm以上600ppm以下。 In this embodiment, the content of Ni in the solder alloy is 0 ppm or more and 600 ppm or less, preferably more than 0 ppb and 600 ppm or less, more preferably 20 ppm or more and 600 ppm or less, relative to the total mass (100 mass %) of the solder alloy, More preferably, it is 40 ppm or more and 600 ppm or less.
Fe:0質量ppm以上100質量ppm以下 Fe: 0 mass ppm or more and 100 mass ppm or less
與Ni同樣地,Fe係抑制在接合界面形成含有Sn的金屬間化合物之元素。尚且,在預定之含量的範圍內,可抑制因SnFe化合物所產生之針狀結晶之析出,而防止電路之短路。 Like Ni, Fe is an element that suppresses the formation of Sn-containing intermetallic compounds at the bonding interface. In addition, within a predetermined content range, precipitation of needle-like crystals generated by the SnFe compound can be suppressed, thereby preventing short circuit of the circuit.
此處所謂之「針狀結晶」係指在1個源自SnFe化合物之結晶中,長徑與短徑之比亦即長寬比為2以上之結晶。 The "needle crystal" as used herein refers to a crystal in which the ratio of the major axis to the minor axis, that is, the aspect ratio is 2 or more in one crystal derived from the SnFe compound.
在本實施型態中,相對於焊料合金之總質量(100質量%),焊料合金中之Fe的含量為0ppm以上100ppm以下,較佳為超過0ppb且100ppm以下,更佳為20ppm以上100ppm以下,再更佳為40ppm以上80ppm以下。 In this embodiment, the content of Fe in the solder alloy is 0 ppm or more and 100 ppm or less, preferably more than 0 ppb and 100 ppm or less, more preferably 20 ppm or more and 100 ppm or less, relative to the total mass (100 mass %) of the solder alloy, More preferably, it is 40 ppm or more and 80 ppm or less.
在本實施型態之焊料合金中之合金組成中係滿足下述(1)式。 The alloy composition in the solder alloy of the present embodiment satisfies the following formula (1).
20≦Ni+Fe≦700 (1) 20≦Ni+Fe≦700 (1)
(1)式中,Ni及Fe係分別表示前述合金組成中之含量(質量ppm)。 In the formula (1), Ni and Fe represent the content (mass ppm) in the aforementioned alloy composition, respectively.
在(1)式中之Ni及Fe皆為抑制在接合界面形成含有Sn的金屬間化合物之元素。尚且,在本實施型態中,Ni及Fe皆有助於抑制焊膏經時之增黏的效果。 Both Ni and Fe in the formula (1) are elements that suppress the formation of Sn-containing intermetallic compounds at the bonding interface. Furthermore, in this embodiment, both Ni and Fe contribute to the effect of suppressing the viscosity increase of the solder paste over time.
為了獲得前述抑制含有Sn的金屬間化合物之形成的效果、及抑制焊膏經時的增黏之效果,相對於焊料合金之總質量(100質量%),焊料合金中之Ni與Fe的合計之含量必須為20ppm以上700ppm以下。Ni與Fe之合計的含量較佳為40ppm以上700ppm以下,更佳為40ppm以上600ppm以下,最佳為40ppm以上200ppm以下。 In order to obtain the aforementioned effect of suppressing the formation of intermetallic compounds containing Sn and the effect of suppressing the thickening of solder paste over time, the sum of Ni and Fe in the solder alloy relative to the total mass of the solder alloy (100% by mass) The content must be 20 ppm or more and 700 ppm or less. The total content of Ni and Fe is preferably 40 ppm or more and 700 ppm or less, more preferably 40 ppm or more and 600 ppm or less, and most preferably 40 ppm or more and 200 ppm or less.
但,前述「Ni與Fe之合計的含量」係在焊料合金中之Ni的含量為0ppm時為Fe之含量,在焊料合金中之Fe的含量為0ppm時為Ni之含量,在同時具有Ni與Fe時為該等之合計的含量。 However, the aforementioned "content of Ni and Fe in total" refers to the content of Fe when the content of Ni in the solder alloy is 0 ppm, and the content of Ni when the content of Fe in the solder alloy is 0 ppm. In the case of Fe, it is the total content of these.
又,在本實施型態中,同時具有Ni與Fe時,焊料合金中之Ni與Fe的比率以Ni/Fe所示之質量比計,較佳為0.4以上30以下,更佳為0.4以上10以下,再更佳為0.4以上5以下,特別佳為0.4以上2以下。 Further, in the present embodiment, when both Ni and Fe are present, the ratio of Ni to Fe in the solder alloy is preferably 0.4 or more and 30 or less, more preferably 0.4 or more and 10, in terms of the mass ratio represented by Ni/Fe. Hereinafter, it is more preferably 0.4 or more and 5 or less, particularly preferably 0.4 or more and 2 or less.
如此之質量比的Ni/Fe若為前述之較佳的範圍,更容易獲得本發明之效果。 If such a mass ratio of Ni/Fe is within the aforementioned preferable range, the effect of the present invention can be more easily obtained.
≪任意元素≫ ≪Any element≫
本實施型態之焊料合金中之合金組成係可依需要而含有上述之元素以外的元素。 The alloy composition in the solder alloy of the present embodiment may contain elements other than the above-mentioned elements as required.
例如,在本實施型態之焊料合金中的合金組成係除了上述元素以外,可更含有Ag:0質量%以上4質量%以下、及Cu:0質量%以上0.9質量%以下之至少一種。 For example, the alloy composition system in the solder alloy of the present embodiment may further contain at least one of Ag: 0 mass % or more and 4 mass % or less, and Cu: 0 mass % or more and 0.9 mass % or less, in addition to the above elements.
Ag:0質量%以上4質量%以下 Ag: 0 mass % or more and 4 mass % or less
Ag係可在結晶界面形成Ag3Sn而提高焊料合金之可靠性的任意元素。又,Ag係離子化傾向相對於Sn為貴金屬元素,藉由Ni及Fe共存,提高焊膏經時的增黏抑制效果。再者,焊料合金中之Ag的含量若為上述範圍內,可抑制合金之熔點的上昇,故不須過度提高回焊溫度。 Ag is an arbitrary element that can form Ag 3 Sn at the crystal interface to improve the reliability of the solder alloy. In addition, the Ag-based ionization tendency is a noble metal element compared to Sn, and the coexistence of Ni and Fe improves the effect of suppressing the thickening of the solder paste over time. Furthermore, if the content of Ag in the solder alloy is within the above-mentioned range, the rise of the melting point of the alloy can be suppressed, so it is not necessary to increase the reflow temperature excessively.
在本實施型態中,相對於焊料合金之總質量(100質量%),焊料合金中之Ag的含量係以0%以上4%以下為較佳,更佳為超過0%且4%以下,再 更佳為0.5%以上3.5%以下,特別佳為1.0%以上3.0%以下,最佳為2.0%以上3.0%以下。 In this embodiment, the content of Ag in the solder alloy is preferably 0% or more and 4% or less, more preferably more than 0% and 4% or less, relative to the total mass (100% by mass) of the solder alloy. Again More preferably, it is 0.5% or more and 3.5% or less, particularly preferably 1.0% or more and 3.0% or less, and most preferably 2.0% or more and 3.0% or less.
Cu:0質量%以上0.9質量%以下 Cu: 0 mass % or more and 0.9 mass % or less
Cu係在一般的焊料合金被使用,且可提高焊料接頭之接合強度的任意元素。又,Cu係離子化傾向相對於Sn為貴金屬元素,藉由Ni及Fe共存,而提高焊膏經時的增黏抑制效果。 Cu is an arbitrary element that is used in general solder alloys and can improve the bonding strength of solder joints. In addition, Cu-based ionization tends to be a noble metal element relative to Sn, and the coexistence of Ni and Fe improves the effect of suppressing the thickening of the solder paste over time.
在本實施型態中,相對於焊料合金之總質量(100質量%),焊料合金中之Cu的含量係以0%以上0.9%以下為較佳,更佳為超過0%且0.9%以下,再更佳為0.1%以上0.8%以下,特別佳為0.2%以上0.7%以下。 In this embodiment, the content of Cu in the solder alloy is preferably 0% or more and 0.9% or less, more preferably more than 0% and 0.9% or less, relative to the total mass (100% by mass) of the solder alloy. More preferably, it is 0.1% or more and 0.8% or less, and particularly preferably 0.2% or more and 0.7% or less.
在本實施型態中,同時具有Cu與Ni時,焊料合金中之Cu與Ni的比率係以Cu/Ni所示之質量比計,較佳為8以上175以下,更佳為10以上150以下。 In this embodiment, when both Cu and Ni are present, the ratio of Cu to Ni in the solder alloy is based on the mass ratio represented by Cu/Ni, preferably 8 or more and 175 or less, more preferably 10 or more and 150 or less. .
如此之質量比的Cu/Ni若為前述之較佳的範圍,更容易獲得本發明之效果。 If the mass ratio of Cu/Ni is within the aforementioned preferable range, the effect of the present invention can be more easily obtained.
在本實施型態中同時具有Cu與Fe時,焊料合金中之Cu與Fe的比率係以Cu/Fe所示之質量比計,較佳為50以上350以下,更佳為70以上250以下。 In the present embodiment, when both Cu and Fe are present, the ratio of Cu to Fe in the solder alloy is preferably 50 or more and 350 or less, more preferably 70 or more and 250 or less, in terms of the mass ratio represented by Cu/Fe.
如此之質量比的Cu/Fe若為前述之較佳的範圍,更容易獲得本發明之效果。 If the mass ratio of Cu/Fe is within the aforementioned preferable range, the effect of the present invention can be more easily obtained.
在本實施型態中同時具有Cu、Ni與Fe時,焊料合金中之Cu、Ni與Fe之比率以Cu/(Ni+Fe)所示之質量比計,較佳為7以上350以下,更佳為10以上250以下。 In this embodiment, when Cu, Ni and Fe are present at the same time, the ratio of Cu, Ni and Fe in the solder alloy is preferably 7 or more and 350 or less in terms of the mass ratio represented by Cu/(Ni+Fe), and more Preferably it is 10 or more and 250 or less.
如此之質量比的Cu/(Ni+Fe)若為前述之較佳的範圍,更容易獲得本發明之效果。 If the mass ratio of Cu/(Ni+Fe) is within the aforementioned preferable range, the effect of the present invention can be more easily obtained.
作為焊料合金之一實施型態可為具有包含U:未達5質量ppb、Th:未達5質量ppb、Pb:未達5質量ppm、As:未達5質量ppm、Ni:0質量ppm以上600質量ppm以下、及Fe:超過0質量ppm且100質量ppm以下、以及剩餘部分為Sn的合金組成,並滿足上述(1)式,且α射線量為0.02cph/cm2以下者。 As one embodiment of the solder alloy, U: less than 5 mass ppb, Th: less than 5 mass ppb, Pb: less than 5 mass ppm, As: less than 5 mass ppm, Ni: 0 mass ppm or more 600 mass ppm or less, and Fe: more than 0 mass ppm and 100 mass ppm or less, and the remainder is Sn alloy composition, which satisfies the above formula (1), and the α radiation dose is 0.02 cph/cm 2 or less.
在該焊料合金中之合金組成可更含有Ag:0質量%以上4質量%以下、及Cu:0質量%以上0.9質量%以下之至少一種。 The alloy composition in the solder alloy may further contain at least one of Ag: 0 mass % or more and 4 mass % or less, and Cu: 0 mass % or more and 0.9 mass % or less.
又,作為焊料合金之一實施型態可為具有包含U:未達5質量ppb、Th:未達5質量ppb、Pb:未達5質量ppm、As:未達5質量ppm、Ni:超過0質量ppm且600質量ppm以下、及Fe:超過0質量ppm且100質量ppm以下、Ag:超過0質量%且4質量%以下、及Cu:超過0質量%且0.9質量%以下之至少一種、及剩餘部分為Sn的合金組成,並滿足上述(1)式,且α射線量為0.02cph/cm2以下者。在該焊料合金中之合金組成中,Ni與Fe之比率以Ni/Fe所示之質量比計可更為0.4以上30以下。 In addition, as one embodiment of the solder alloy, U: less than 5 mass ppb, Th: less than 5 mass ppb, Pb: less than 5 mass ppm, As: less than 5 mass ppm, Ni: more than 0 mass ppm and 600 mass ppm or less, Fe: more than 0 mass ppm and 100 mass ppm or less, Ag: more than 0 mass % and 4 mass % or less, and Cu: at least one of more than 0 mass % and 0.9 mass % or less, and The remainder is an alloy composition of Sn, which satisfies the above-mentioned formula (1), and has an α radiation dose of 0.02 cph/cm 2 or less. In the alloy composition in the solder alloy, the ratio of Ni to Fe may be more than 0.4 to 30 in terms of mass ratio represented by Ni/Fe.
又,作為焊料合金之一實施型態可為具有包含U:未達5質量ppb、Th:未達5質量ppb、Pb:未達5質量ppm、As:未達5質量ppm、Ni:超過0質量ppm以上600質量ppm以下、及Fe:0質量ppm以上100質量ppm以下、Cu:超過0質量%且0.9質量%以下、及剩餘部分為Sn的合金組成,並滿足上述(1)式,Cu與Ni之比率以Cu/Ni所示之 質量比計為8以上175以下,且α射線量為0.02cph/cm2以下者。在該焊料合金中之合金組成中,Ni與Fe之比率以Ni/Fe所示之質量比計可更為0.4以上30以下。尚且,前述合金組成可更含有Ag:超過0質量%且4質量%以下。 In addition, as one embodiment of the solder alloy, U: less than 5 mass ppb, Th: less than 5 mass ppb, Pb: less than 5 mass ppm, As: less than 5 mass ppm, Ni: more than 0 Mass ppm or more and 600 mass ppm or less, and Fe: 0 mass ppm or more and 100 mass ppm or less, Cu: more than 0 mass % and 0.9 mass % or less, and an alloy composition in which the remainder is Sn, and satisfies the above formula (1), Cu The ratio to Ni is 8 or more and 175 or less in terms of the mass ratio represented by Cu/Ni, and the α radiation dose is 0.02 cph/cm 2 or less. In the alloy composition in the solder alloy, the ratio of Ni to Fe may be more than 0.4 to 30 in terms of mass ratio represented by Ni/Fe. Furthermore, the aforementioned alloy composition may further contain Ag: more than 0 mass % and 4 mass % or less.
又,作為焊料合金之一實施型態可為具有包含U:未達5質量ppb、Th:未達5質量ppb、Pb:未達5質量ppm、As:未達5質量ppm、Ni:超過0質量ppm且600質量ppm以下、及Fe:0質量ppm以上100質量ppm以下、Cu:超過0質量%且0.9質量%以下、及剩餘部分為Sn的合金組成,並滿足上述(1)式,Cu、Ni與Fe之比率以Cu/(Ni+Fe)所示之質量比計為7以上350以下,且α射線量為0.02cph/cm2以下者。在該焊料合金中之合金組成中,Ni與Fe之比率以Ni/Fe所示之質量比計可更為0.4以上30以下。尚且,前述合金組成可更含有Ag:超過0質量%且4質量%以下。 In addition, as one embodiment of the solder alloy, U: less than 5 mass ppb, Th: less than 5 mass ppb, Pb: less than 5 mass ppm, As: less than 5 mass ppm, Ni: more than 0 Mass ppm and 600 mass ppm or less, Fe: 0 mass ppm or more and 100 mass ppm or less, Cu: more than 0 mass % and 0.9 mass % or less, and an alloy composition with the remainder being Sn, and satisfying the above formula (1), Cu The ratio of Ni to Fe is 7 or more and 350 or less in terms of mass ratio represented by Cu/(Ni+Fe), and the α radiation dose is 0.02 cph/cm 2 or less. In the alloy composition in the solder alloy, the ratio of Ni to Fe may be more than 0.4 to 30 in terms of mass ratio represented by Ni/Fe. Furthermore, the aforementioned alloy composition may further contain Ag: more than 0 mass % and 4 mass % or less.
又,作為焊料合金之一實施型態可為具有包含U:未達5質量ppb、Th:未達5質量ppb、Pb:未達5質量ppm、As:未達5質量ppm、Ni:0質量ppm以上600質量ppm以下、及Fe:超過0質量ppm且100質量ppm以下、Cu:超過0質量%且0.9質量%以下及剩餘部分為Sn的合金組成,並滿足上述(1)式,Cu與Fe之比率以Cu/Fe所示之質量比計為50以上350以下,且α射線量為0.02cph/cm2以下。在該焊料合金中之合金組成中,Ni與Fe之比率以Ni/Fe所示之質量比計可為0.4以上30以下。尚且,前述合金組成可更含有Ag:超過0質量%且4質量%以下。 Moreover, as one embodiment of the solder alloy, U: less than 5 mass ppb, Th: less than 5 mass ppb, Pb: less than 5 mass ppm, As: less than 5 mass ppm, Ni: 0 mass ppm ppm or more and 600 mass ppm or less, Fe: more than 0 mass ppm and 100 mass ppm or less, Cu: more than 0 mass % and 0.9 mass % or less, and an alloy composition with the remainder being Sn, and satisfying the above formula (1), Cu and The ratio of Fe is 50 or more and 350 or less as a mass ratio represented by Cu/Fe, and the α radiation dose is 0.02 cph/cm 2 or less. In the alloy composition in the solder alloy, the ratio of Ni to Fe may be 0.4 or more and 30 or less as a mass ratio represented by Ni/Fe. Furthermore, the aforementioned alloy composition may further contain Ag: more than 0 mass % and 4 mass % or less.
例如,在本實施型態之焊料合金中之合金組成係除了上述之元素以外,尚且,可更含有Bi:0質量%以上0.3質量%以下、及Sb:0質量%以上0.9質量%以下之至少一種。 For example, the alloy composition in the solder alloy of the present embodiment may further contain at least Bi: 0 mass % or more and 0.3 mass % or less, and Sb: 0 mass % or more and 0.9 mass % or less in addition to the above-mentioned elements. A sort of.
Bi:0質量%以上0.3質量%以下 Bi: 0 mass % or more and 0.3 mass % or less
Bi係與助焊劑之反應性低,並顯示焊膏經時的增黏抑制效果之元素。又,Bi係降低焊料合金之液相線溫度,以及降低熔融焊料之黏性,故為可抑制潤濕性變差之元素。 Bi is an element that has low reactivity with flux and exhibits the effect of inhibiting viscosity increase of solder paste over time. In addition, Bi is an element which reduces the liquidus temperature of the solder alloy and reduces the viscosity of the molten solder, so that it is an element that can suppress the deterioration of the wettability.
在本實施型態中,相對於焊料合金之總質量(100質量%),焊料合金中之Bi的含量係以0%以上0.3%以下為較佳,更佳為0.0020%以上0.3%以下,再更佳為0.010%以上0.3%以下。 In this embodiment, the content of Bi in the solder alloy is preferably 0% or more and 0.3% or less, more preferably 0.0020% or more and 0.3% or less, relative to the total mass (100% by mass) of the solder alloy. More preferably, it is 0.010% or more and 0.3% or less.
Sb:0質量%以上0.9質量%以下 Sb: 0 mass % or more and 0.9 mass % or less
與Bi同樣地,Sb係與助焊劑之反應性低,並顯示焊膏經時的增黏抑制效果之元素。若焊料合金中之Sb的含量過多,因潤濕性變差,添加Sb時,必須設為適度的含量。 Like Bi, Sb is an element that has low reactivity with the flux and exhibits the effect of suppressing the thickening of the solder paste over time. If the content of Sb in the solder alloy is too large, the wettability will be deteriorated, so when Sb is added, it must be set to an appropriate content.
在本實施型態中,相對於焊料合金之總質量(100質量%),焊料合金中之Sb的含量係以0%以上0.9%以下為較佳,更佳為0.0020%以上0.9%以下,再更佳為0.010%以上0.9%以下。 In this embodiment, the content of Sb in the solder alloy is preferably 0% or more and 0.9% or less, more preferably 0.0020% or more and 0.9% or less, relative to the total mass (100% by mass) of the solder alloy. More preferably, it is 0.010% or more and 0.9% or less.
在本實施型態之焊料合金中的合金組成更含有Bi:0質量%以上0.3質量%以下、及Sb:0質量%以上0.9質量%以下之至少一種時,前述合金組成係以滿足下述(2)式為較佳。 When the alloy composition in the solder alloy of the present embodiment further contains at least one of Bi: 0 mass % or more and 0.3 mass % or less, and Sb: 0 mass % or more and 0.9 mass % or less, the alloy composition system satisfies the following ( 2) formula is better.
0.03≦Bi+Sb≦1.2 (2) 0.03≦Bi+Sb≦1.2 (2)
(2)式中,Bi及Sb係分別表示前述合金組成中之含量(質量%)。 (2) In the formula, Bi and Sb represent the contents (mass %) in the aforementioned alloy composition, respectively.
在(2)式中之Bi及Sb皆為顯示焊膏經時之增黏抑制效果的元素。尚且,在本實施型態中,Bi及Sb皆有助於焊料合金之潤濕性。 Both Bi and Sb in the formula (2) are elements that exhibit the effect of inhibiting the viscosity increase of the solder paste over time. Furthermore, in this embodiment, both Bi and Sb contribute to the wettability of the solder alloy.
相對於焊料合金之總質量(100質量%),焊料合金中之Bi與Sb的合計之含量以0.03%以上1.2%以下為較佳,更佳為0.03%以上0.9%以下,再更佳為0.3%以上0.9%以下。 With respect to the total mass (100 mass %) of the solder alloy, the total content of Bi and Sb in the solder alloy is preferably 0.03% or more and 1.2% or less, more preferably 0.03% or more and 0.9% or less, and still more preferably 0.3% % above and 0.9% below.
但,前述「Bi與Sb之合計的含量」係在焊料合金中之Bi的含量為0%時為Sb之含量,在焊料合金中之Sb的含量為0%時為Bi之含量,在同時具有Bi與Sb時為此等之合計的含量。 However, the aforementioned "content of Bi and Sb in total" refers to the content of Sb when the content of Bi in the solder alloy is 0%, and is the content of Bi when the content of Sb in the solder alloy is 0%. Bi and Sb are the total content of these.
在本實施型態中同時具有Bi與Sb時,焊料合金中之Bi與Sb的比率係以Sb/Bi所示之質量比計,較佳為0.01以上10以下,更佳為0.1以上5以下。 When both Bi and Sb are present in the present embodiment, the ratio of Bi to Sb in the solder alloy is preferably 0.01 or more and 10 or less, more preferably 0.1 or more and 5 or less, in terms of the mass ratio represented by Sb/Bi.
如此之質量比的Sb/Bi若為前述之較佳的範圍,更容易獲得本發明之效果。 If the mass ratio of Sb/Bi is within the aforementioned preferable range, the effect of the present invention can be more easily obtained.
≪剩餘部分:Sn≫ ≪Remainder: Sn≫
在本實施型態之焊料合金中的合金組成的剩餘部分由Sn所構成。上述之元素以外,亦可含有不可避免的雜質。含有不可避免的雜質時,不影響上述之效果。 The remainder of the alloy composition in the solder alloy of the present embodiment is composed of Sn. In addition to the above-mentioned elements, unavoidable impurities may be contained. When unavoidable impurities are contained, the above-mentioned effects are not affected.
<α射線量> <alpha radiation dose>
本實施型態之焊料合金係α射線量為0.02cph/cm2以下。 The alpha radiation dose of the solder alloy of the present embodiment is 0.02 cph/cm 2 or less.
此為在電子零件之高密度封裝中不會使軟錯誤成為問題之程度的α射線量。 This is the amount of alpha radiation that does not cause soft errors to be a problem in high-density packaging of electronic components.
從抑制更高密度封裝之軟錯誤的觀點而言,在本實施型態之焊料合金中之α射線量較佳為0.01cph/cm2以下,更佳為0.002cph/cm2以下,再更佳為0.001cph/cm2以下。 From the viewpoint of suppressing soft errors in higher-density packaging, the alpha radiation dose in the solder alloy of the present embodiment is preferably 0.01 cph/cm 2 or less, more preferably 0.002 cph/cm 2 or less, and still more preferably 0.001cph/cm 2 or less.
從焊料合金產生之α射線量係可如以下方式而測定。如此之α射線量的測定方法係依據國際標準之JEDEC STANDARD。 The amount of alpha radiation generated from the solder alloy can be determined in the following manner. The measurement method of such a radiation dose is based on JEDEC STANDARD of international standards.
順序(i): Sequence (i):
使用氣流型之α射線量測定裝置。 An air-flow type alpha dose measuring device was used.
就測定試樣而言,使用焊料合金片,該焊料合金片係熔融焊料合金,而成形為一面之面積為900cm2之片狀者。 For the measurement sample, a solder alloy sheet is used, which is a sheet of molten solder alloy formed into a sheet having an area of 900 cm 2 on one side.
在前述α射線量測定裝置內設置前述焊料合金片作為測定試樣,在此排出PR氣體。 The above-mentioned solder alloy sheet was set as a measurement sample in the above-mentioned α-ray dose measuring apparatus, and PR gas was exhausted there.
又,PR氣體係使用依據屬於國際標準之JEDEC STANDARD者。亦即,使用於測定之PR氣體係設為將氬90%-甲烷10%之混合氣體填充於氣體鋼瓶之後,經過3週以上之氡(Rn)的衰變。 In addition, the PR gas system is used in accordance with the JEDEC STANDARD which is an international standard. That is, the PR gas system used for the measurement is set to decay of radon (Rn) after 3 weeks or more after the gas cylinder is filled with a mixed gas of 90% argon-10% methane.
順序(ii): Sequence (ii):
在設置有前述焊料合金片之前述α射線量測定裝置內,使前述PR氣體流動12小時並靜置之後,進行72小時之α射線量測定。 In the alpha dose measuring apparatus provided with the solder alloy sheet, the PR gas was allowed to flow for 12 hours, and then the alpha dose was measured for 72 hours.
順序(iii): Sequence (iii):
計算出平均α射線量作為「cph/cm2」。異常點(藉由裝置振動測得之計量等)係去除其1小時份之計量。 The average alpha radiation dose was calculated as "cph/cm 2 ". The abnormal point (measurement by vibration of the device, etc.) is excluding the measurement of 1 hour.
[焊料合金之製造方法] [Manufacturing method of solder alloy]
本實施型態之焊料合金係例如可藉由使用具有對含有Ni及Fe之至少一種、以及Sn之原料金屬進行熔融混合之步驟的製造方法來製造。 The solder alloy of the present embodiment can be produced, for example, by using a production method having a step of melt-mixing at least one of Ni and Fe and a raw material metal containing Sn.
因以低α射線量之焊料合金之設計作為目的,故較佳係使用低α射線量材作為其原料金屬,例如,作為原料金屬之Sn、Ni及Fe較佳係分別使用高純度者、以及去除U、Th及Pb者。 For the purpose of designing a solder alloy with a low alpha radiation dose, it is preferable to use a low alpha radiation dose material as its raw metal. Remove U, Th and Pb.
作為原料金屬之Sn係例如可使用依據日本特開2010-156052號公報(專利文獻1)記載之製造方法來製造。 The Sn-based metal as the raw material can be produced, for example, by using the production method described in Japanese Patent Laid-Open No. 2010-156052 (Patent Document 1).
作為原料金屬之Ni及Fe係例如可分別使用依據日本專利第5692467號公報所製造者。 Ni and Fe-based raw materials can be used, for example, respectively, according to Japanese Patent No. 5692467 .
使原料金屬熔融混合之操作可使用以往公知之方法。 For the operation of melt-mixing the raw materials, a conventionally known method can be used.
一般而言,在焊料合金中,構成焊料合金之各構成元素並非獨自地發揮功能,而是在各構成元素之含量全部在預定之範圍時,始可發揮各種之效果。若依據以上說明之實施型態的焊料合金,藉由各構成元素之含量為上述之範圍,可抑制焊膏經時之黏度增加,不易產生電路之短路,並提高焊料接頭之機械強度,且抑制軟錯誤之發生。亦即,本實施型態之焊料合金係可用作為目標之低α射線量材料,並可應用於記憶體周邊之焊料凸塊的形成,以抑制軟錯誤之發生。 In general, in a solder alloy, each constituent element constituting the solder alloy does not function independently, and various effects can be exhibited only when the content of each constituent element is all within a predetermined range. According to the solder alloy of the embodiment described above, the content of each constituent element is in the above-mentioned range, the viscosity of the solder paste can be suppressed from increasing with time, the short circuit of the circuit is less likely to occur, the mechanical strength of the solder joint can be improved, and the The occurrence of soft errors. That is, the solder alloy of the present embodiment can be used as a target low alpha radiation dose material, and can be applied to the formation of solder bumps around the memory to suppress the occurrence of soft errors.
若為本實施型態,各構成元素之含量為上述之範圍以外,且使與Fe蝕之抑制、焊膏經時之增黏抑制、焊料接頭之機械強度的提升、及電路之短路的抑制相關之Fe與Ni為滿足預定之關係,可更充分發揮本發明之效果。 In the present embodiment, the content of each constituent element is outside the above-mentioned ranges, and is related to the inhibition of Fe corrosion, the inhibition of the thickening of the solder paste over time, the improvement of the mechanical strength of the solder joint, and the inhibition of the short circuit of the circuit. The Fe and Ni satisfy the predetermined relationship, and the effect of the present invention can be more fully exerted.
又,在本實施型態係在不積極添加As的情況下,以可抑制焊膏經時之增黏的低α射線量焊料合金之設計作為目的。相對於此,採用以特定之比率含有如基底金屬之精煉時或加工時被高溫加熱之屬於高熔點金屬的Ni及Fe之焊料合金,以達成目的。 In addition, the present embodiment aims to design a low α radiation dose solder alloy which can suppress the viscosity increase of the solder paste over time without actively adding As. In contrast to this, a solder alloy containing Ni and Fe, which are refractory metals, which are heated at high temperatures during refining or processing of the base metal at a specific ratio, is used to achieve the purpose.
可獲得如此之效果的理由並無一定,但推測如以下。 There is no certain reason why such an effect can be obtained, but it is presumed as follows.
低α射線量之焊料合金用的Sn為非常高純度,且使經熔融之合金凝固時,Sn之結晶大小變大。又,該Sn中之氧化膜亦形成順應之疏鬆的氧化膜。因此,藉由添加屬於高熔點金屬之Ni及Fe,以減少結晶大小,形成緻密的氧化膜,因抑制合金與助焊劑之反應性,故可抑制焊膏經時的增黏。 Sn for a solder alloy with a low alpha radiation dose is of very high purity, and when the molten alloy is solidified, the crystal size of Sn becomes large. In addition, the oxide film in the Sn also forms a loose oxide film that complies with it. Therefore, by adding Ni and Fe, which are high melting point metals, to reduce the crystal size and form a dense oxide film, the reactivity of the alloy and the flux can be suppressed, so the viscosity increase of the solder paste over time can be suppressed.
尚且,本實施型態之焊料合金較佳係對於形成為一面之面積為900cm2之片狀時的焊料合金片,在100℃施予1小時之加熱處理後的α射線量成為0.02cph/cm2以下者,更佳係成為0.01cph/cm2以下者,再更佳係成為0.002cph/cm2以下者,特別佳係成為0.001cph/cm2以下者。 In addition, it is preferable that the solder alloy of the present embodiment has an α radiation dose of 0.02 cph/cm after heat treatment at 100° C. for 1 hour when the solder alloy sheet is formed into a sheet with an area of 900 cm 2 on one side. 2 or less, more preferably 0.01 cph/cm 2 or less, still more preferably 0.002 cph/cm 2 or less, and particularly preferably 0.001 cph/cm 2 or less.
顯示如此之α射線量的焊料合金係在合金中不易引起210Po之偏析者,因α射線量之經時變化所致之影響小,而為有用。藉由應用顯示如此之α射線量的焊料合金,以更抑制軟錯誤之發生,更加容易確保半導體元件之安定的運作。 Solder alloys exhibiting such a dose of α radiation are less likely to cause segregation of 210 Po in the alloy, and are useful because the influence of time-dependent changes in the dose of α radiation is small. By using a solder alloy exhibiting such a dose of α radiation, the occurrence of soft errors is further suppressed, and the stable operation of the semiconductor device can be more easily ensured.
(焊料粉末) (solder powder)
有關本發明之一態樣的焊料粉末係由上述有關本發明之一態樣的焊料合金所構成者。 The solder powder according to one aspect of the present invention is composed of the above-described solder alloy according to one aspect of the present invention.
本實施型態之焊料粉末係適合作為後述之焊膏用者。 The solder powder of this embodiment is suitable for use as a solder paste to be described later.
焊料粉末之製造係可採用:滴下經熔融之焊料合金而獲得粒子之滴下法、進行離心噴霧之噴霧法、原子化法、液中造粒法、粉碎塊體之焊料合金的方法等公知之方法。在滴下法或噴霧法中,滴下或噴霧係為了形成粒子狀,以在非活性環境或溶劑中進行為較佳。 The solder powder can be produced by known methods such as the dropping method of dropping molten solder alloy to obtain particles, the spray method of centrifugal spraying, the atomization method, the granulation method in liquid, the method of pulverizing the bulk solder alloy, and the like. . In the dropping method or the spraying method, the dropping or spraying is preferably carried out in an inert environment or a solvent in order to form particles.
本實施型態之焊料粉末係以球狀粉末為較佳。藉由球狀粉末,提高焊料合金之流動性。 The solder powder of this embodiment is preferably spherical powder. The fluidity of the solder alloy is improved by the spherical powder.
本實施型態之焊料粉末為球狀粉末時,在JIS Z 3284-1:2014中之粉末大小的分類(表2)中,以滿足記號1至8為較佳,以滿足記號4至8為更佳。若焊料粉末之粒徑滿足該條件,粉末之表面積不會過大,而抑制焊膏經時之黏度的上昇,且抑制微細粉末之凝集,而抑制焊膏之黏度的上昇。因此,可對更微細的零件進行焊接。 When the solder powder of the present embodiment is spherical powder, in the classification of powder size in JIS Z 3284-1:2014 (Table 2), it is preferable to satisfy symbols 1 to 8, and to satisfy symbols 4 to 8 as better. If the particle size of the solder powder satisfies this condition, the surface area of the powder will not be too large, and the increase in the viscosity of the solder paste over time is suppressed, and the agglomeration of the fine powder is suppressed, and the increase in the viscosity of the solder paste is suppressed. Therefore, finer parts can be welded.
又,本實施型態之焊料粉末較佳係同時具有粒度分布相異的2種以上之焊料合金粒子群。藉此,提高焊膏之平滑性,而提高容易印刷等之作業性。 Moreover, it is preferable that the solder powder of this embodiment has two or more types of solder alloy particle groups with different particle size distributions at the same time. Thereby, the smoothness of the solder paste is improved, and the workability such as easy printing is improved.
在本實施型態之焊料粉末中,球狀粉末之真球度係以0.8以上為較佳,以0.9以上為更佳,以0.95以上為再更佳,以0.99以上為特別佳。 In the solder powder of this embodiment, the sphericity of the spherical powder is preferably 0.8 or more, more preferably 0.9 or more, still more preferably 0.95 or more, and particularly preferably 0.99 or more.
在此所謂之「球狀粉末之真球度」係可使用利用最小區域中心法(MZC法)之CNC圖像測定系統(MITSUTOYO公司製之ULTRA QUICK VISION ULT RA QV350-PRO測定裝置)而進行測定。 The so-called "sphericity of spherical powder" can be measured using a CNC image measuring system (ULTRA QUICK VISION ULT RA QV350-PRO measuring device manufactured by MITSUTOYO) using the minimum zone center method (MZC method). .
所謂真球度係表示與真球相差之偏移,例如將500個之各焊料合金粒子的直徑除以長徑時所算出之算術平均值,表示其值愈接近上限之1.00愈接近真球。 The so-called sphericity refers to the deviation from the true sphere. For example, the arithmetic mean calculated by dividing the diameter of each solder alloy particle of 500 by the major axis indicates that the value is closer to the upper limit of 1.00 and closer to the true sphere.
(焊膏) (Solder Paste)
有關本發明之一態樣的焊膏係含有有關上述本發明之一態樣的焊料粉末、及助焊劑。 The solder paste according to an aspect of the present invention contains the solder powder and flux according to the above-described aspect of the present invention.
<助焊劑> <Flux>
使用於本實施型態之焊膏的助焊劑係例如以樹脂成分、活性成分、溶劑、其他成分之任一者、或此等2個以上之調配成分之組合所構成。 The flux used in the solder paste of the present embodiment is composed of, for example, any one of a resin component, an active component, a solvent, and other components, or a combination of two or more of these preparation components.
樹脂成分係例如可列舉松脂系樹脂。 As a resin component system, rosin-type resin is mentioned, for example.
松脂系樹脂係例如可列舉松脂膠、木松脂及松油松脂等之原料松脂、以及從該原料松脂所得到之衍生物。 Examples of the rosin-based resin include raw material rosin, such as rosin gum, wood rosin, and pine oil rosin, and derivatives obtained from the raw material rosin.
該衍生物係例如精製松脂、氫化松脂、不均化松脂、聚合松脂及α,β不飽和羧酸改性物(丙烯酸化松脂、馬來化松脂、富馬化松脂等)、以及該聚合松脂之純化物、氫化物及不均化物、以及該α,β不飽和羧酸改性物之純化物、氫化物及不均化物等,可使用二種以上。 The derivatives are, for example, purified rosin, hydrogenated rosin, non-homogenized rosin, polymerized rosin, and α,β unsaturated carboxylic acid modified products (acrylated rosin, maleated rosin, fumaricated rosin, etc.), and the polymerized rosin Two or more kinds of purified products, hydrides, and inhomogeneous products, and purified products, hydrides, and heterogeneous products of the α,β-unsaturated carboxylic acid modified products can be used.
又,樹脂成分係除了松脂系樹脂以外,可列舉萜烯樹脂、改性萜烯樹脂、萜烯酚樹脂、改性萜烯酚樹脂、苯乙烯樹脂、改性苯乙烯樹脂、二甲苯樹脂、改性二甲苯樹脂、丙烯酸樹脂、聚乙烯樹脂、丙烯酸-聚乙烯共聚合樹脂、環氧樹脂等。 In addition to rosin-based resins, the resin component system includes terpene resins, modified terpene resins, terpene phenol resins, modified terpene phenol resins, styrene resins, modified styrene resins, xylene resins, and modified terpene resins. Xylene resin, acrylic resin, polyethylene resin, acrylic-polyethylene copolymer resin, epoxy resin, etc.
改性萜烯樹脂可列舉芳香族改性萜烯樹脂、氫化萜烯樹脂、氫化芳香族改性萜烯樹脂等。改性萜烯酚樹脂可列舉氫化萜烯酚樹脂等。改性苯乙 烯樹脂可列舉苯乙烯丙烯酸樹脂、苯乙烯馬來酸樹脂等。改性二甲苯樹脂可列舉酚改性二甲苯樹脂、烷基酚改性二甲苯樹脂、酚改性間苯二甲酚型二甲苯樹脂、多元醇改性二甲苯樹脂、聚氧乙烯加成二甲苯樹脂等。 The modified terpene resins include aromatic modified terpene resins, hydrogenated terpene resins, hydrogenated aromatic modified terpene resins, and the like. Hydrogenated terpene phenol resin etc. are mentioned as a modified terpene phenol resin. Modified styrene The vinyl resin includes styrene acrylic resin, styrene maleic acid resin, and the like. Modified xylene resins include phenol-modified xylene resins, alkylphenol-modified xylene resins, phenol-modified resorcinol-type xylene resins, polyol-modified xylene resins, and polyoxyethylene adducts. Toluene resin, etc.
活性成分係例如可列舉有機酸、胺、鹵素系活性劑、觸變劑、溶劑、金屬非活性化劑等。 Examples of the active ingredient system include organic acids, amines, halogen-based activators, thixotropic agents, solvents, metal inactivating agents, and the like.
有機酸係例如可列舉琥珀酸、戊二酸、己二酸、庚二酸、辛二酸、壬二酸、癸二酸、二聚物酸、丙酸、2,2-雙羥基甲基丙酸、酒石酸、蘋果酸、甘醇酸、二甘醇酸、硫代甘醇酸、二硫代甘醇酸、硬脂酸、12-羥基硬脂酸、棕櫚酸、油酸等。 Examples of organic acids include succinic acid, glutaric acid, adipic acid, pimelic acid, suberic acid, azelaic acid, sebacic acid, dimer acid, propionic acid, and 2,2-bishydroxymethylpropane. acid, tartaric acid, malic acid, glycolic acid, diglycolic acid, thioglycolic acid, dithioglycolic acid, stearic acid, 12-hydroxystearic acid, palmitic acid, oleic acid, etc.
胺係例如可列舉乙胺、三乙胺、乙二胺、三乙四胺、2-甲基咪唑、2-十一烷基咪唑、2-十七烷基咪唑、1,2-二甲基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、2-苯基-4-甲基咪唑、1-苯甲基-2-甲基咪唑、1-苯甲基-2-苯基咪唑、1-氰乙基-2-甲基咪唑、1-氰乙基-2-十一烷基咪唑、1-氰乙基-2-乙基-4-甲基咪唑、1-氰乙基-2-苯基咪唑、1-氰乙基-2-十一烷基咪唑鎓偏苯三甲酸酯、1-氰乙基-2-苯基咪唑鎓偏苯三甲酸酯、2,4-二胺基-6-[2’-甲基咪唑基-(1’)]-乙基-s-三嗪、2,4-二胺基-6-[2’-十一烷基咪唑基-(1’)]-乙基-s-三嗪、2,4-二胺基-6-[2’-乙基-4’-甲基咪唑基-(1’)]-乙基-s-三嗪、2,4-二胺基-6-[2’-甲基咪唑基-(1’)]-乙基-s-三嗪異三聚氰酸加成物、2-苯基咪唑異三聚氰酸加成物、2-苯基-4,5-二羥基甲基咪唑、2-苯基-4-甲基-5-羥基甲基咪唑、2,3-二氫-1H-吡咯[1,2-a]苯并咪唑、1-十二烷基-2-甲基-3-苯甲基咪唑鎓氯化物、2-甲基咪唑啉、2-苯基咪唑啉、2,4-二胺基-6-乙烯基-s-三嗪、2,4-二胺基-6-乙烯基-s-三嗪異三聚氰酸 加成物、2,4-二胺基-6-甲基丙醯氧基乙基-s-三嗪、環氧基-咪唑加成物、2-甲基苯并咪唑、2-辛基苯并咪唑、2-戊基苯并咪唑、2-(1-乙基戊基)苯并咪唑、2-壬基苯并咪唑、2-(4-噻唑基)苯并咪唑、苯并咪唑、2-(2’-羥基-5’-甲基苯基)苯并三唑、2-(2’-羥基-3’-第三丁基-5’-甲基苯基)-5-環苯并三唑、2-(2’-羥基-3’,5’-二-第三戊基苯基)苯并三唑、2-(2’-羥基-5’-第三辛基苯基)苯并三唑、2,2’-亞甲基雙[6-(2H-苯并三唑-2-基)-4-第三辛基酚]、6-(2-苯并三唑基)-4-第三辛基-6’-第三丁基-4’-甲基-2,2’-亞甲基雙酚、1,2,3-苯并三唑、1-[N,N-雙(2-乙基己基)胺基甲基]苯并三唑、羧基苯并三唑、1-[N,N-雙(2-乙基己基)胺基甲基]甲基苯并三唑、2,2’-[[(甲基-1H-苯并三唑-1-基)甲基]亞胺基]雙乙醇、1-(1’,2’-二羧基乙基)苯并三唑、1-(2,3-二羧基丙基)苯并三唑、1-[(2-乙基己基胺基)甲基]苯并三唑、2,6-雙[(1H-苯并三唑-1-基)甲基]-4-甲基酚、5-甲基苯并三唑、5-苯基四唑等。 Examples of amines include ethylamine, triethylamine, ethylenediamine, triethylenetetramine, 2-methylimidazole, 2-undecylimidazole, 2-heptadecylimidazole, and 1,2-dimethylimidazole. Imidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 2-phenyl-4-methylimidazole, 1-benzyl-2-methylimidazole, 1-benzyl-2- Phenylimidazole, 1-cyanoethyl-2-methylimidazole, 1-cyanoethyl-2-undecylimidazole, 1-cyanoethyl-2-ethyl-4-methylimidazole, 1-cyano Ethyl-2-phenylimidazole, 1-cyanoethyl-2-undecylimidazolium trimellitate, 1-cyanoethyl-2-phenylimidazolium trimellitate, 2,4 -Diamino-6-[2'-methylimidazolyl-(1')]-ethyl-s-triazine, 2,4-diamino-6-[2'-undecylimidazolyl -(1')]-Ethyl-s-triazine, 2,4-Diamino-6-[2'-ethyl-4'-methylimidazolyl-(1')]-ethyl-s -Triazine, 2,4-Diamino-6-[2'-methylimidazolyl-(1')]-ethyl-s-triazine isocyanuric acid adduct, 2-phenylimidazole Isocyanuric acid adduct, 2-phenyl-4,5-dihydroxymethylimidazole, 2-phenyl-4-methyl-5-hydroxymethylimidazole, 2,3-dihydro-1H- Pyrro[1,2-a]benzimidazole, 1-dodecyl-2-methyl-3-benzylimidazolium chloride, 2-methylimidazoline, 2-phenylimidazoline, 2, 4-Diamino-6-vinyl-s-triazine, 2,4-diamino-6-vinyl-s-triazine isocyanuric acid Adduct, 2,4-diamino-6-methylpropionyloxyethyl-s-triazine, epoxy-imidazole adduct, 2-methylbenzimidazole, 2-octylbenzene Zimidazole, 2-pentylbenzimidazole, 2-(1-ethylpentyl)benzimidazole, 2-nonylbenzimidazole, 2-(4-thiazolyl)benzimidazole, benzimidazole, 2 -(2'-Hydroxy-5'-methylphenyl)benzotriazole, 2-(2'-hydroxy-3'-tert-butyl-5'-methylphenyl)-5-cyclobenzo Triazole, 2-(2'-hydroxy-3',5'-di-tert-pentylphenyl)benzotriazole, 2-(2'-hydroxy-5'-tert-octylphenyl)benzene Triazole, 2,2'-methylenebis[6-(2H-benzotriazol-2-yl)-4-tert-octylphenol], 6-(2-benzotriazolyl)- 4-Third-octyl-6'-tert-butyl-4'-methyl-2,2'-methylenebisphenol, 1,2,3-benzotriazole, 1-[N,N- Bis(2-ethylhexyl)aminomethyl]benzotriazole, carboxybenzotriazole, 1-[N,N-bis(2-ethylhexyl)aminomethyl]methylbenzotriazole , 2,2'-[[(methyl-1H-benzotriazol-1-yl)methyl]imino]bisethanol, 1-(1',2'-dicarboxyethyl)benzotriazole azole, 1-(2,3-dicarboxypropyl)benzotriazole, 1-[(2-ethylhexylamino)methyl]benzotriazole, 2,6-bis[(1H-benzotriazole Triazol-1-yl)methyl]-4-methylphenol, 5-methylbenzotriazole, 5-phenyltetrazole and the like.
鹵素系活性劑係例如可列舉胺鹵化氫酸鹽、有機鹵化合物等。 Examples of halogen-based activators include amine hydrogen halide salts, organic halogen compounds, and the like.
胺鹵化氫酸鹽係使胺與鹵化氫反應之化合物。在此之胺係例如可列舉乙胺、乙二胺、三乙胺、二苯基胍、二甲苯基胍、甲基咪唑、2-乙基-4-甲基咪唑等,鹵化氫例如可列舉氯、溴、碘之氫化物。 Amine hydrogen halide salts are compounds that react amines with hydrogen halides. Examples of the amines here include ethylamine, ethylenediamine, triethylamine, diphenylguanidine, xylylguanidine, methylimidazole, 2-ethyl-4-methylimidazole, and the like, and examples of hydrogen halide include Chlorine, bromine and iodine hydrides.
有機鹵素化合物係例如可列舉反式-2,3-二溴-2-丁烯-1,4-二醇、三烯丙基異三氫酸酯六溴化物、1-溴-2-丁醇、1-溴-2-丙醇、3-溴-1-丙醇、3-溴-1,2-丙二醇、1,4-二溴-2-丁二醇、1,3-二溴-2-丙醇、2,3-二溴-1-丙醇、2,3-二溴-1,4-丁二醇、2,3-二溴-2-丁烯-1,4-二醇等。 Examples of organohalogen compounds include trans-2,3-dibromo-2-butene-1,4-diol, triallyl isotrihydroester hexabromide, and 1-bromo-2-butanol , 1-bromo-2-propanol, 3-bromo-1-propanol, 3-bromo-1,2-propanediol, 1,4-dibromo-2-butanediol, 1,3-dibromo-2 -Propanol, 2,3-dibromo-1-propanol, 2,3-dibromo-1,4-butanediol, 2,3-dibromo-2-butene-1,4-diol, etc. .
觸變劑例如可列舉蠟系觸變劑、醯胺系觸變劑、山梨醇系觸變劑等。 The thixotropic agent includes, for example, a wax-based thixotropic agent, an amide-based thixotropic agent, and a sorbitol-based thixotropic agent.
蠟系觸變劑例如可列舉蓖麻硬化油等。 As a wax-type thixotropic agent, castor oil etc. are mentioned, for example.
醯胺系觸變劑可列舉單醯胺系觸變劑、雙醯胺系觸變劑、聚醯胺系觸變劑,具體而言,可列舉月桂醯胺、棕櫚醯胺、硬脂醯胺、二十二烷醯胺、羥基硬脂醯胺、飽和脂肪醯胺、油醯胺、芥子醯胺、不飽和脂肪酸醯胺、對甲苯甲醯胺、芳香族醯胺、亞甲基雙硬脂醯胺、伸乙基雙月桂醯胺、伸乙基雙羥基硬脂醯胺、飽和脂肪雙醯胺、亞甲基雙油醯胺、不飽和脂肪雙醯胺、間-二甲苯雙硬脂醯胺、芳香族雙醯胺、飽和脂肪酸聚醯胺、不飽和脂肪酸聚醯胺、芳香族聚醯胺、取代醯胺、羥甲基硬脂醯胺、羥甲基醯胺、脂肪酸酯醯胺等。 Examples of the amide-based thixotropic agent include monoamide-based thixotropic agents, diamide-based thixotropic agents, and polyamide-based thixotropic agents, and specifically, laurylamide, palmitamide, and stearylamide , behenic acid amide, hydroxystearyl amide, saturated fatty acid amide, oleic acid amide, mustard amide, unsaturated fatty acid amide, p-toluamide, aromatic amide, methylene bis-stearyl Amide, diethyl dilauroamide, diethyl dihydroxystearyl amide, saturated aliphatic diamide, methylene dioleamide, unsaturated aliphatic diamide, m-xylene distearyl amide Amines, aromatic diamides, saturated fatty acid polyamides, unsaturated fatty acid polyamides, aromatic polyamides, substituted amides, hydroxymethyl stearyl amides, hydroxymethyl amides, fatty acid ester amides Wait.
山梨醇系觸變劑例如可列舉二苯亞甲基-D-山梨醇、雙(4-甲基苯亞甲基)-D-山梨醇等。 The sorbitol-based thixotropic agent includes, for example, dibenzylidene-D-sorbitol, bis(4-methylbenzylidene)-D-sorbitol, and the like.
溶劑例如可列舉水、醇系溶劑、二醇醚系溶劑、萜烯醇類等。 Examples of the solvent include water, alcohol-based solvents, glycol ether-based solvents, terpene alcohols, and the like.
醇系溶劑例如可列舉異丙醇、1,2-丁二醇、異莰基環己醇、2,4-二乙基-1,5-戊二醇、2,2-二甲基-1,3-丙二醇、2,5-二甲基-2,5-己二醇、2,5-二甲基-3-己炔-2,5-二醇、2,3-二甲基-2,3-丁二醇、1,1,1-參(羥基甲基)乙烷、2-乙基-2-羥基甲基-1,3-丙二醇、2,2’-氧雙(亞甲基)雙(2-乙基-1,3-丙二醇)、2,2-雙(羥基甲基)-1,3-丙二醇、1,2,6-三羥基己烷、雙[2,2,2-參(羥基甲基)乙基]醚、1-乙炔基-1-環己醇、1,4-環己二醇、1,4-環己烷二甲醇、丁四醇、蘇糖醇、癒創木酚甘油醚、3,6-二甲基-4-辛炔-3,6-二醇、2,4,7,9-四甲基-5-癸炔-4,7-二醇等。 Examples of the alcohol-based solvent include isopropanol, 1,2-butanediol, isocamphenylcyclohexanol, 2,4-diethyl-1,5-pentanediol, and 2,2-dimethyl-1 ,3-Propanediol, 2,5-dimethyl-2,5-hexanediol, 2,5-dimethyl-3-hexyne-2,5-diol, 2,3-dimethyl-2 , 3-butanediol, 1,1,1-para(hydroxymethyl)ethane, 2-ethyl-2-hydroxymethyl-1,3-propanediol, 2,2'-oxybis(methylene) ) bis(2-ethyl-1,3-propanediol), 2,2-bis(hydroxymethyl)-1,3-propanediol, 1,2,6-trihydroxyhexane, bis[2,2,2 -Sham (hydroxymethyl) ethyl] ether, 1-ethynyl-1-cyclohexanol, 1,4-cyclohexanediol, 1,4-cyclohexanedimethanol, butane erythritol, threitol, Guaifenesin, 3,6-dimethyl-4-octyne-3,6-diol, 2,4,7,9-tetramethyl-5-decyne-4,7-diol Wait.
二醇醚系溶劑係例如可列舉二乙二醇單-2-乙基己基醚、乙二醇單苯基醚、2-甲基戊烷-2,4-二醇、二乙二醇單己基醚、二乙二醇二丁基醚、三乙二醇單丁基醚等。 Examples of glycol ether-based solvents include diethylene glycol mono-2-ethylhexyl ether, ethylene glycol monophenyl ether, 2-methylpentane-2,4-diol, and diethylene glycol monohexyl ether. ether, diethylene glycol dibutyl ether, triethylene glycol monobutyl ether, etc.
金屬非活性化劑係例如可列舉阻酚系化合物、氮化合物等。藉由使助焊劑含有阻酚系化合物、或氮化合物之任一者,容易提高焊膏之增黏抑制效果。 As a metal inactivating agent system, a hindered phenol type compound, a nitrogen compound, etc. are mentioned, for example. By making the flux contain either a phenolic compound or a nitrogen compound, it is easy to improve the effect of suppressing the increase in viscosity of the solder paste.
在此所謂之「金屬非活性化劑」係指具有藉由與某種化合物的接觸而防止金屬劣化之性能的化合物。 The term "metal deactivator" as used herein refers to a compound having a property of preventing metal deterioration by contact with a certain compound.
所謂阻酚系化合物係指酚之鄰位的至少一者具有體積龐大的取代基(例如,第三丁基等之分支狀或環狀烷基)之酚系化合物。 The hindered phenolic compound refers to a phenolic compound in which at least one of the ortho-positions of the phenol has a bulky substituent (for example, a branched or cyclic alkyl group such as tert-butyl group).
阻酚系化合物並無特別限定,例如可列舉雙[3-(3-第三丁基-4-羥基-5-甲基苯基)丙酸][乙烯雙(氧乙烯)]、N,N’-六亞甲基雙[3-(3,5-二-第三丁基-4-羥基苯基)丙烷醯胺]、1,6-己二醇雙[3-(3,5-二-第三丁基-4-羥基苯基)丙酸酯]、2,2’-亞甲基雙[6-(1-甲基環己基)-對甲酚]、2,2’-亞甲基雙(6-第三丁基-對甲酚)、2,2’-亞甲基雙(6-第三丁基-4-乙基酚)、三乙二醇-雙[3-(3-第三丁基-5-甲基-4-羥基苯基)丙酸酯]、1,6-己二醇-雙-[3-(3,5-二-第三丁基-4-羥基苯基)丙酸酯]、2,4-雙-(正辛基硫)-6-(4-羥基-3,5-二-第三丁基苯胺基)-1,3,5-三嗪、辛戊四醇基-肆[3-(3,5-二-第三丁基-4-羥基苯基)丙酸酯]、2,2-硫-二乙烯雙[3-(3,5-二-第三丁基-4-羥基苯基)丙酸酯]、十八烷基-3-(3,5-二-第三丁基-4-羥基苯基)丙酸酯、N,N’-六亞甲基雙(3,5-二-第三丁基-4-羥基-氫桂皮醯胺)、3,5-二-第三丁基-4-羥基苯甲基磷酸根基-二乙酯、1,3,5-三甲基-2,4,6-參(3,5-二-第三丁基-4-羥基苯 甲基)苯、N,N’-雙[2-[2-(3,5-二-第三丁基-4-羥基苯基)乙基羰氧]乙基]草醯胺、下述化學式所示之化合物等。 The hindered phenol compound is not particularly limited, and examples thereof include bis[3-(3-tert-butyl-4-hydroxy-5-methylphenyl)propionic acid][ethylenebis(oxyethylene)], N,N '-Hexamethylenebis[3-(3,5-di-tert-butyl-4-hydroxyphenyl)propaneamide], 1,6-hexanediol bis[3-(3,5-di - tert-butyl-4-hydroxyphenyl)propionate], 2,2'-methylenebis[6-(1-methylcyclohexyl)-p-cresol], 2,2'-methylene bis(6-tert-butyl-p-cresol), 2,2'-methylenebis(6-tert-butyl-4-ethylphenol), triethylene glycol-bis[3-(3 - tert-butyl-5-methyl-4-hydroxyphenyl)propionate], 1,6-hexanediol-bis-[3-(3,5-di-tert-butyl-4-hydroxy phenyl)propionate], 2,4-bis-(n-octylthio)-6-(4-hydroxy-3,5-di-tert-butylanilino)-1,3,5-triazine , captaerythritol-4[3-(3,5-di-tert-butyl-4-hydroxyphenyl)propionate], 2,2-thio-divinylbis[3-(3,5 -Di-tert-butyl-4-hydroxyphenyl)propionate], octadecyl-3-(3,5-di-tert-butyl-4-hydroxyphenyl)propionate, N, N'-Hexamethylenebis(3,5-di-tert-butyl-4-hydroxy-hydrocinnamamide), 3,5-di-tert-butyl-4-hydroxybenzyl phosphate- Diethyl ester, 1,3,5-trimethyl-2,4,6-para(3,5-di-tert-butyl-4-hydroxybenzene) Methyl)benzene, N,N'-bis[2-[2-(3,5-di-tert-butyl-4-hydroxyphenyl)ethylcarbonyloxy]ethyl]oxamide, the following chemical formula compounds shown, etc.
(式中,Z為可被取代之伸烷基。R1及R2分別獨立地為可被取代之烷基、芳烷基、芳基、雜芳基、環烷基或雜環烷基。R3及R4分別獨立地為可被取代之烷基。)) (In the formula, Z is a substituted alkylene group. R 1 and R 2 are each independently a substituted alkyl group, aralkyl group, aryl group, heteroaryl group, cycloalkyl group or heterocycloalkyl group. R 3 and R 4 are each independently a substituted alkyl group.))
金屬非活性化劑之氮化合物係例如可列舉醯肼系氮化合物、醯胺系氮化合物、三唑系氮化合物、三聚氰胺系氮化合物等。 Examples of the nitrogen compound of the metal inactivator include hydrazine-based nitrogen compounds, amide-based nitrogen compounds, triazole-based nitrogen compounds, melamine-based nitrogen compounds, and the like.
醯肼系氮化合物只要為具有醯肼骨架之氮化合物即可,可列舉十二烷二酸雙[N2-(二羥基苯甲醯基)醯肼]、N,N’-雙[3-(3,5-二-第三丁基-4-羥基苯基)丙醯基]聯胺、癸二羧酸二柳醯基醯肼、N-亞柳基-N’-柳基醯肼、間硝基苯并醯肼、3-胺基鄰苯二甲醯肼、鄰苯二甲酸二醯肼、己二酸醯肼、草醯基雙(2-羥基-5-辛基苯亞甲基醯肼)、N’-苯甲醯基吡咯啶酮甲酸醯肼、N,N’-雙(3-(3,5-二-第三丁基-4-羥基苯基)丙醯基)聯胺等。 As long as the hydrazine-based nitrogen compound is a nitrogen compound having a hydrazine skeleton, dodecanedioic acid bis[N2-(dihydroxybenzyl)hydrazine], N,N'-bis[3-( 3,5-Di-tert-butyl-4-hydroxyphenyl)propionyl]hydrazine, sebacic acid dissalylhydrazine, N-salylidene-N'-salylhydrazine, m-nitro Benzohydrazine, 3-aminophthalic acid hydrazine, phthalic acid dihydrazine, adipic acid hydrazine, oxalylbis(2-hydroxy-5-octylbenzylidene hydrazine) , N'-benzylpyrrolidone formate hydrazine, N,N'-bis(3-(3,5-di-tert-butyl-4-hydroxyphenyl)propionyl)hydrazine, etc.
醯胺系氮化合物只要為具有醯胺骨架之氮化合物即可,可列舉N,N’-雙{2-[3-(3,5-二-第三丁基-4-羥基苯基)丙醯基氧]乙基}草醯胺等。 The amide-based nitrogen compound may be a nitrogen compound having an amide skeleton, and examples thereof include N,N'-bis{2-[3-(3,5-di-tert-butyl-4-hydroxyphenyl)propane] Acyloxy] ethyl} oxalamide and so on.
三唑系氮化合物只要為具有三唑骨架之氮化合物即可,可列舉N-(2H-1,2,4-三唑-5-基)柳醯胺、3-胺基-1,2,4-三唑、3-(N-柳醯基)胺基-1,2,4-三唑等。 As long as the triazole-based nitrogen compound is a nitrogen compound having a triazole skeleton, N-(2H-1,2,4-triazol-5-yl)salamide, 3-amino-1,2, 4-triazole, 3-(N-salamidyl)amino-1,2,4-triazole, etc.
三聚氰胺系氮化合物只要為具有三聚氰胺骨架之氮化合物即可,可列舉三聚氰胺、三聚氰胺衍生物等。更具體而言,例如可列舉參胺基三嗪、烷基化參胺基三嗪、烷氧基烷基化參胺基三嗪、三聚氰胺、烷基化三聚氰胺、烷氧基烷基化三聚氰胺、N2-丁基三聚氰胺、N2,N2-二乙基三聚氰胺、N,N,N’,N’,N”,N”-陸(甲氧基甲基)三聚氰胺等。 The melamine-based nitrogen compound may be a nitrogen compound having a melamine skeleton, and examples thereof include melamine, melamine derivatives, and the like. More specifically, for example, saminotriazine, alkylated saminotriazine, alkoxyalkylated saminotriazine, melamine, alkylated melamine, alkoxyalkylated melamine, N2-butyl melamine, N2,N2-diethylmelamine, N,N,N',N',N",N"-lu (methoxymethyl)melamine, etc.
其他成分例如可列舉界面活性劑、矽烷偶合劑、抗氧化劑、著色劑等。 Examples of other components include surfactants, silane coupling agents, antioxidants, colorants, and the like.
界面活性劑可列舉非離子系界面活性劑、弱陽離子系界面活性劑等。 As a surfactant, a nonionic surfactant, a weak cationic surfactant, etc. are mentioned.
非離子系界面活性劑係例如可列舉聚乙二醇、聚乙二醇-聚丙二醇共聚物、脂肪族醇聚氧乙烯加成物、芳香族醇聚氧乙烯加成物、多元醇聚氧乙烯加成物。 Examples of nonionic surfactants include polyethylene glycol, polyethylene glycol-polypropylene glycol copolymer, aliphatic alcohol polyoxyethylene adduct, aromatic alcohol polyoxyethylene adduct, polyol polyoxyethylene Additives.
弱陽離子系界面活性劑係例如可列舉末端二胺聚乙二醇、末端二胺聚乙二醇-聚丙二醇共聚物、脂肪族胺聚氧乙烯加成物、芳香族胺聚氧乙烯加成物、多價胺聚氧乙烯加成物。 Examples of weak cationic surfactants include terminal diamine polyethylene glycol, terminal diamine polyethylene glycol-polypropylene glycol copolymer, aliphatic amine polyoxyethylene adduct, and aromatic amine polyoxyethylene adduct , Polyvalent amine polyoxyethylene adduct.
上述以外之界面活性劑例如可列舉聚氧伸烷基乙炔二醇類、聚氧伸烷基甘油基醚、聚氧伸烷基烷基醚、聚氧伸烷基酯、聚氧伸烷基烷基胺、聚氧伸烷基烷基醯胺等。 Surfactants other than the above include, for example, polyoxyalkylene glycols, polyoxyalkylene glyceryl ethers, polyoxyalkylene alkyl ethers, polyoxyalkylene esters, and polyoxyalkylene alkanes. base amine, polyoxyalkylene alkyl amide, etc.
相對於焊膏之全質量(100質量%),本實施型態之焊膏中的助焊劑之含量係以5至95質量%為較佳,以5至50質量%為更佳,以5至15質量%為再更佳。 Relative to the total mass of the solder paste (100% by mass), the content of the flux in the solder paste of this embodiment is preferably 5 to 95% by mass, more preferably 5 to 50% by mass, and preferably 5 to 50% by mass. 15 mass % is still more preferable.
助焊劑之含量若為該範圍,充分發揮因焊料粉末導致之增黏抑制效果。 When the content of the flux is within this range, the effect of suppressing the increase in viscosity due to the solder powder can be fully exerted.
本實施型態之焊膏可藉由發明所屬技術領域一般的製造方法進行製造。 The solder paste of this embodiment can be produced by a general production method in the technical field to which the invention pertains.
對構成上述助焊劑之調配成分進行加熱混合而調製助焊劑,在該助焊劑中,藉由攪拌混合上述焊料粉末,可獲得焊膏。又,期待經時之增黏抑制效果,不同於上述焊料粉末,可進一步調配氧化鋯粉末。 A flux is prepared by heating and mixing the preparation components constituting the above-mentioned flux, and by stirring and mixing the above-mentioned solder powder in this flux, a solder paste can be obtained. In addition, the effect of suppressing viscosity increase over time is expected, and zirconia powder can be further prepared, unlike the above-mentioned solder powder.
(焊料球) (solder ball)
有關本發明之一態樣的焊料球係由有關上述本發明之一態樣的焊料合金所構成者。 The solder ball according to an aspect of the present invention is composed of the solder alloy according to the above-described aspect of the present invention.
上述之實施型態的焊料合金係可使用來作為焊料球。 The solder alloys of the above-described embodiments can be used as solder balls.
本實施型態之焊料球係可藉由使用發明所屬技術領域一般的方法之滴下法來製造。 The solder balls of the present embodiment can be produced by a dropping method using a general method in the technical field to which the invention pertains.
焊料球之粒徑係以1μm以上為較佳,以10μm以上為更佳,以20μm以上為再更佳,以30μm以上為特別佳。另一方面,焊料球之粒徑係以3000μm以下為較佳,以1000μm以下為更佳,以600μm以下為再更佳,以300μm以下為特別佳。 The particle size of the solder ball is preferably 1 μm or more, more preferably 10 μm or more, still more preferably 20 μm or more, and particularly preferably 30 μm or more. On the other hand, the particle size of the solder balls is preferably 3000 μm or less, more preferably 1000 μm or less, still more preferably 600 μm or less, and particularly preferably 300 μm or less.
又,焊料球之粒徑係例如,以1μm以上3000μm以下為較佳,以10μm以上1000μm以下為更佳,以20μm以上600μm以下為再更佳,以30μm以上300μm以下為特別佳。 The particle size of the solder ball is, for example, preferably 1 μm or more and 3000 μm or less, more preferably 10 μm or more and 1000 μm or less, still more preferably 20 μm or more and 600 μm or less, and particularly preferably 30 μm or more and 300 μm or less.
(焊料預成形物) (solder preform)
有關本發明之一態樣的焊料預成形物係由有關上述本發明之一態樣的焊料合金所構成者。 The solder preform according to an aspect of the present invention is composed of the solder alloy according to the above-described aspect of the present invention.
上述之實施型態的焊料合金可使用來作為預成形物。 The solder alloy of the above-mentioned embodiment can be used as a preform.
本實施型態之預成形物之形狀可列舉墊圈、環、顆粒、碟片、絲帶、絲線等。 The shape of the preform of this embodiment includes gaskets, rings, pellets, discs, ribbons, threads, and the like.
(焊料接頭) (solder joint)
有關本發明之一態樣的焊料接頭係由有關上述本發明之一態樣的焊料合金所構成者。 The solder joint according to one aspect of the present invention is composed of the solder alloy according to the above-described aspect of the present invention.
本實施型態之焊料接頭係以電極及焊料接合部所構成。所謂焊料接合部係表示主要以焊料合金所形成之部分。 The solder joint of this embodiment is composed of electrodes and solder joints. The so-called solder joint means a portion mainly formed of a solder alloy.
本實施型態之焊料接頭係例如藉由將上述之實施型態的焊料合金接合IC晶片等PKG(Package)之電極、及PCB(printed circuit board)等基板之電極來形成。 The solder joint of this embodiment is formed by, for example, bonding the solder alloy of the above-described embodiment to electrodes of a PKG (Package) such as an IC chip, and electrodes of a substrate such as a PCB (printed circuit board).
又,本實施型態之焊料接頭係可藉由在塗佈有助焊劑之1個電極上,搭載一個之上述實施型態之焊料球而接合等在發明所屬技術領域一般的方法進行加工來製造。 In addition, the solder joint of the present embodiment can be manufactured by performing processing by a general method in the technical field to which the invention pertains, such as mounting one of the solder balls of the above-described embodiment on one electrode coated with flux and bonding it. .
(實施例) (Example)
以下,藉由實施例更詳細說明本發明,但本發明係不受此等之例所限定。 Hereinafter, the present invention will be described in more detail by way of examples, but the present invention is not limited to these examples.
在本實施例中,只要無特別指定,有關焊料合金組成之「ppb」為「質量ppb」,「ppm」為「質量ppm」,「%」為「質量%」。 In this embodiment, unless otherwise specified, "ppb" regarding the composition of the solder alloy is "mass ppb", "ppm" is "mass ppm", and "%" is "mass %".
<焊料合金> <Solder alloy>
(實施例1至370、比較例1至8) (Examples 1 to 370, Comparative Examples 1 to 8)
使原料金屬熔融並攪拌,製作分別具有表1A至表16B所示之合金組成的各例之焊料合金。 The raw material metal was melted and stirred to prepare solder alloys of each example having the alloy compositions shown in Table 1A to Table 16B.
<焊料粉末> <Solder powder>
使各例之焊料合金熔融,藉由原子化法,製作焊料粉末,該焊料粉末係由分別具有表1A至表16B所示之合金組成的各例之焊料合金所構成,且為在JIS Z 3284-1:2014中之粉末大小的分類(表2)中滿足記號4之大小(粒度分布)者。 The solder alloy of each example was melted, and by atomization, a solder powder was prepared, which was composed of the solder alloy of each example having the alloy composition shown in Table 1A to Table 16B, and was specified in JIS Z 3284 -1: Those satisfying the size (particle size distribution) of symbol 4 in the classification of powder size in 2014 (Table 2).
<助焊劑(F0)之調製> <Preparation of Flux (F0)>
使用松脂系樹脂作為樹脂成分。 Rosin-based resin was used as the resin component.
使用觸變劑、有機酸、胺及鹵素系活性劑作為活性成分。 Thixotropic agents, organic acids, amines and halogen-based active agents are used as active ingredients.
使用二醇醚系溶劑作為溶劑。 A glycol ether-based solvent is used as the solvent.
混合松脂42質量份、二醇醚系溶劑35質量份、觸變劑8質量份、有機酸10質量份、胺2質量份、及鹵素系活性劑3質量份而調製助焊劑(F0)。 Flux (F0) was prepared by mixing 42 parts by mass of rosin, 35 parts by mass of glycol ether-based solvent, 8 parts by mass of thixotropic agent, 10 parts by mass of organic acid, 2 parts by mass of amine, and 3 parts by mass of halogen-based activator.
<焊膏之製造> <Manufacture of solder paste>
混合前述助焊劑(F0)、及分別具有表1A至表16B所示之合金組成的各例之焊料合金所構成的焊料粉末,製造焊膏。 The above-mentioned flux (F0) and the solder powders composed of the solder alloys of the respective examples having the alloy compositions shown in Table 1A to Table 16B were mixed to manufacture a solder paste.
助焊劑(F0)與焊料粉末之質量比係設為助焊劑(F0):焊料粉末=11:89。 The mass ratio of flux (F0) to solder powder was set to flux (F0):solder powder=11:89.
<評估> <Assessment>
使用前述之焊膏,進行增黏抑制之評估。 Using the aforementioned solder pastes, evaluations of tackifying inhibition were performed.
又,使用前述之焊料合金,分別進行針狀結晶之抑制析出的評估、含有Sn的金屬間化合物之形成抑制的評估、α射線量之評估。再者,進行綜合評估。 In addition, using the above-mentioned solder alloys, the evaluation of inhibition of precipitation of needle crystals, the evaluation of inhibition of formation of Sn-containing intermetallic compounds, and the evaluation of α radiation dose were performed, respectively. Furthermore, a comprehensive evaluation is carried out.
詳細內容係如以下。經評估之結果表示於表1A至表16B。 Details are as follows. The results of the evaluation are shown in Tables 1A to 16B.
[增黏抑制] [Viscosity Inhibition]
(1)驗證方法 (1) Verification method
有關剛調製後之焊膏,使用Malcohm股份有限公司製:PCU-205,以旋轉數:10rpm、25℃在大氣中測定12小時黏度。 The viscosity of the solder paste immediately after preparation was measured in the air at 10 rpm and 25° C. for 12 hours using PCU-205 manufactured by Malcohm Co., Ltd.
(2)判定基準 (2) Judgment criteria
○:與剛調製焊膏後經過30分鐘時之黏度比較,12小時後之黏度為1.2倍以下。 ○: The viscosity after 12 hours was 1.2 times or less compared to the viscosity immediately after the preparation of the solder paste for 30 minutes.
×:與剛調製焊膏後經過30分鐘時之黏度比較,12小時後之黏度超過1.2倍。 ×: The viscosity after 12 hours was more than 1.2 times the viscosity at 30 minutes after the preparation of the solder paste.
該判定若為「○」,可謂獲得充分的增黏抑制效果者。亦即,可抑制焊膏經時之黏度增加。 When this determination is "○", it can be said that a sufficient effect of suppressing thickening is obtained. That is, the viscosity increase of the solder paste over time can be suppressed.
[針狀結晶之析出抑制] [Precipitation inhibition of needle crystals]
(1)驗證方法 (1) Verification method
使各例之焊料合金在250℃熔融,以10分鐘冷卻至全部合金組成之固相線溫度以下的100℃。對於冷却後之焊料合金,使用掃描型電子顯微鏡(SEM),剖面觀察其300μm×300μm之範圍的任意5處,在其剖面SEM照片中,確認有無源自SnFe化合物之針狀結晶。 The solder alloys of each example were melted at 250°C, and cooled to 100°C below the solidus temperature of the entire alloy composition over 10 minutes. The solder alloy after cooling was cross-sectionally observed at any 5 places in the range of 300 μm×300 μm using a scanning electron microscope (SEM).
所謂在本實施例中之針狀結晶係指在1個源自SnFe化合物的結晶中,屬於長徑與短徑之比的長寬比為2以上之結晶。 The acicular crystal in this example refers to a crystal whose aspect ratio, which is the ratio of the major axis to the minor axis, is 2 or more in one crystal derived from the SnFe compound.
(2)判定基準 (2) Judgment criteria
○:在5處所有的SEM觀察像中,未觀察到針狀結晶。 ○: No needle-like crystals were observed in all the SEM observation images at five places.
×:在至少1處之SEM觀察像中,觀察到針狀結晶。 ×: Needle-shaped crystals were observed in at least one SEM observation image.
該判定若為「○」,可謂具有針狀結晶之析出抑制效果者。亦即,可不易產生電路之短路。 When this judgment is "○", it can be said that it has the effect of suppressing the precipitation of needle-like crystals. That is, the short circuit of the circuit can not be easily generated.
[含有Sn的金屬間化合物之形成抑制] [Inhibition of formation of intermetallic compounds containing Sn]
(1)驗證方法 (1) Verification method
使各例之焊料合金在250℃熔融,以10分鐘冷卻至全部合金組成之固相線溫度以下的100℃。對於冷却後之焊料合金,使用SEM,剖面觀察其300μm×300μm之範圍中的任意5處,確認有無Sn(Cu)Ni化合物。 The solder alloys of each example were melted at 250°C, and cooled to 100°C below the solidus temperature of the entire alloy composition over 10 minutes. About the solder alloy after cooling, the cross section was observed at any five places in the range of 300 μm×300 μm using SEM, and the presence or absence of the Sn(Cu)Ni compound was confirmed.
(2)判定基準 (2) Judgment criteria
○:在5處所有之SEM觀察像中,未觀察到Sn(Cu)Ni化合物。 ○: No Sn(Cu)Ni compound was observed in all the SEM observation images at 5 places.
×:在至少1處之SEM觀察像中,觀察到Sn(Cu)Ni化合物。 ×: Sn(Cu)Ni compound was observed in at least one SEM observation image.
該判定若為「○」,可謂具有含有Sn之金屬間化合物的形成抑制效果者。亦即,可提高焊料接頭之機械強度。 When this determination is "○", it can be said that it has the effect of suppressing the formation of the intermetallic compound containing Sn. That is, the mechanical strength of the solder joint can be improved.
[α射線量] [alpha radiation dose]
(1)驗證方法1 (1) Verification method 1
α射線量之測定係使用氣體流量比例計數器之α射線量測定裝置,藉由依據上述之順序(i)、(ii)及(iii)來進行。 The measurement of the α-ray dose is performed by using the α-ray dose measuring apparatus of the gas flow proportional counter, and according to the above-mentioned procedures (i), (ii) and (iii).
使用剛製造後之焊料合金片作為測定試樣。 The solder alloy sheet immediately after production was used as a measurement sample.
該焊料合金片係藉由使製作後之焊料合金熔融,成形為一面之面積為900cm2之片狀而獲得。 The solder alloy sheet was obtained by melting the produced solder alloy and molding it into a sheet shape having an area of 900 cm 2 on one side.
將該測定試樣置入於α射線量測定裝置內,使PR-10氣體流動12小時,並靜置之後,測定72小時α射線量。 The measurement sample was placed in an α-ray dose measuring apparatus, and the PR-10 gas was allowed to flow for 12 hours, and then the α-ray dose was measured for 72 hours.
(2)判定基準1 (2) Judgment Criteria 1
○○:從測定試樣產生之α射線量為0.002cph/cm2以下。 ○○: The amount of α radiation generated from the measurement sample is 0.002 cph/cm 2 or less.
○:從測定試樣產生之α射線量為超過0.002cph/cm2以上、0.02cph/cm2以下。 ○: The amount of alpha radiation generated from the measurement sample is more than 0.002 cph/cm 2 or more and less than or equal to 0.02 cph/cm 2 .
×:從測定試樣產生之α射線量為超過0.02cph/cm2。 ×: The amount of α radiation generated from the measurement sample exceeded 0.02 cph/cm 2 .
該判定若為「○○」或「○」,可謂為低α射線量之焊料材料。 If the judgment is "○○" or "○", it can be said to be a solder material with a low alpha radiation dose.
(3)驗證方法2 (3) Verification method 2
除了變更測定試樣以外,其餘以與上述之(1)驗證方法1為同樣方式,進行α射線量之測定。 The α radiation dose was measured in the same manner as in the above-mentioned (1) Verification method 1, except that the measurement sample was changed.
就測定試樣而言,使用一種使剛製作後之焊料合金熔融,對於成形為一面之面積為900cm2之片狀的焊料合金片,在100℃進行1小時之加熱處理,並放置冷卻者。 For the measurement sample, a solder alloy sheet formed by melting the solder alloy immediately after fabrication and formed into a sheet with an area of 900 cm 2 on one side was heat-treated at 100° C. for 1 hour and left to cool.
(4)判定基準2 (4) Judgment Criteria 2
○○:從測定試樣產生之α射線量為0.002cph/cm2以下。 ○○: The amount of α radiation generated from the measurement sample is 0.002 cph/cm 2 or less.
○:從測定試樣產生之α射線量為超過0.002cph/cm2、0.02cph/cm2以下。 ○: The amount of α radiation generated from the measurement sample was more than 0.002 cph/cm 2 and not more than 0.02 cph/cm 2 .
×:從測定試樣產生之α射線量為超過0.02cph/cm2。 ×: The amount of α radiation generated from the measurement sample exceeded 0.02 cph/cm 2 .
該判定若為「○○」或「○」,可謂為低α射線量之焊料材料。 If the judgment is "○○" or "○", it can be said to be a solder material with a low alpha radiation dose.
(5)驗證方法3 (5) Verification method 3
保管以上述之(1)驗證方法1測定α射線量之測定試樣之焊料合金片1年後,再度藉由依據上述之順序(i)、(ii)及(iii)測定α射線量,而評估α射線量之經時變化。 After storing the solder alloy sheet of the measurement sample of the α radiation dose measured by the above (1) Verification method 1 for 1 year, by measuring the α radiation dose again according to the above procedures (i), (ii) and (iii), and Time-dependent changes in alpha radiation dose were evaluated.
(6)判定基準3 (6) Judgment Criteria 3
○○:從測定試樣產生之α射線量為0.002cph/cm2以下。 ○○: The amount of α radiation generated from the measurement sample is 0.002 cph/cm 2 or less.
○:從測定試樣產生之α射線量為超過0.002cph/cm2、0.02cph/cm2以下。 ○: The amount of α radiation generated from the measurement sample was more than 0.002 cph/cm 2 and not more than 0.02 cph/cm 2 .
×:從測定試樣產生之α射線量為超過0.02cph/cm2。 ×: The amount of α radiation generated from the measurement sample exceeded 0.02 cph/cm 2 .
該判定若為「○○」或「○」,產生之α射線量不會經時變化,而可謂為安定者。亦即,可抑制在電子機器類中之軟錯誤的發生。 If the judgment is "○○" or "○", the amount of α rays generated does not change over time, and it can be said to be stable. That is, the occurrence of soft errors in electronic devices can be suppressed.
[綜合評估] [Comprehensive Evaluation]
○:表1A至表16B中,增黏抑制、針狀結晶之抑制析出、含有Sn之金屬間化合物的形成抑制、剛製造後之α射線量、加熱處理後之α射線量、α射線量之經時變化的各評估皆為「○○」或「○」。 ○: In Table 1A to Table 16B, inhibition of thickening, inhibition of precipitation of needle-like crystals, inhibition of formation of intermetallic compounds containing Sn, α radiation dose immediately after production, α radiation dose after heat treatment, and α radiation dose Each evaluation of changes over time is "○○" or "○".
×:在表1A至表16B中,增黏抑制、針狀結晶之析出抑制、含有Sn之金屬間化合物的形成抑制、剛製造後之α射線量、加熱處理後之α射線量、α射線量之經時變化的各評估之中,至少1項為×。 ×: In Table 1A to Table 16B, inhibition of thickening, inhibition of precipitation of needle-like crystals, inhibition of formation of intermetallic compounds containing Sn, α radiation dose immediately after production, α radiation dose after heat treatment, α radiation dose At least one of the evaluations of changes over time is ×.
[表1A]
[表1B]
[表2A]
[表2B]
[表3A]
[表3B]
[表4A]
[表4B]
[表5A]
[表5B]
[表6A]
[表6B]
[表7A]
[表7B]
[表8A]
[表8B]
[表9A]
[表9B]
[表10A]
[表10B]
[表11A]
[表11B]
[表12A]
[表12B]
[表13A]
[表13B]
[表14A]
[表14B]
[表15A]
[表15B]
[表16A]
[表16B]
如表1A至表16B所示,使用應用本發明之實施例1至370的焊料合金時,皆確認出可抑制焊膏經時之黏度增加,不易產生電路之短路,並提高焊料接頭之機械強度,且抑制軟錯誤之發生。 As shown in Table 1A to Table 16B, when using the solder alloys of Examples 1 to 370 to which the present invention is applied, it was confirmed that the viscosity increase of the solder paste over time can be suppressed, the short circuit of the circuit is less likely to occur, and the mechanical strength of the solder joint can be improved. , and suppress the occurrence of soft errors.
另一方面,使用屬於本發明之範圍外的比較例1至8之焊料合金時,皆顯示出增黏抑制、針狀結晶之析出抑制、含有Sn的金屬間化合物之形成抑制、及α射線量之評估中之至少1項變差的結果。 On the other hand, when the solder alloys of Comparative Examples 1 to 8, which fall outside the scope of the present invention, were used, all showed inhibition of thickening, inhibition of precipitation of needle-like crystals, inhibition of formation of intermetallic compounds containing Sn, and α radiation dose. Variation in at least one of the assessments.
Claims (23)
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