TWI762105B - touch sensor - Google Patents

Abstract

A touch sensor includes a first electrode, a second electrode arranged at intervals, and an insulating substance arranged between the first electrode and the second electrode, at least one of the first electrode and the second electrode is One is energized, and there is an energy difference between the first electrode and the second electrode. At least one of the first electrode and the second electrode can be a force recipient. When the force recipient is not stressed, the touch sensor does not generate an electrical signal. Deformation is generated at a force point and the distance between the force point and another is changed to determine the generation of a tunneling current, and the touch sensor generates the electrical signal through whether the tunneling current is generated or not. . Thereby, the present invention solves the touch limitation caused by conventional touch, and has good touch sensitivity.

Description

touch sensor

The present invention relates to a touch sensor, in particular to a touch sensor for judging touch by the tunneling current generated by the change of the distance between electrodes.

The current touch devices on the market are controlled by the principles of capacitance, resistance and piezoelectricity. In addition, for a capacitive touch device, the touch device must be operated with a conductor during touch operation. When the touch object is not a conductor, the capacitive touch device cannot be operated. For example, a capacitive touch device Although fingers can be used as touch objects, when the user wears gloves, the touch device cannot be controlled. In addition, for a resistive touch device, it is mainly composed of two sets of upper and lower ITO conductive layers. When in use, pressure is used to make the upper and lower electrodes contact and conduct. The internal controller senses the panel voltage change and calculates the contact point position. Furthermore, the resistive touch device is a contact touch, and this touch method is prone to problems in accuracy and sensitivity. Most of the control devices are single-touch. Although there are currently multi-touch devices, the resolution of the devices is poor. In addition, although the current composite touch panel combining capacitive and resistive touch panels can further improve the shortcomings of capacitive touch panels and resistive touch panels, the thickness of such touch panels cannot be reduced. Furthermore, the current piezoelectric touch device uses piezoelectric material as the basic structure of the panel, but the signal control of the piezoelectric material is unstable, and it is prone to problems such as operation accuracy and sensitivity. Moreover, the current piezoelectric materials are mostly non-optical grade materials and are therefore not suitable for touch panels.

Further, although the patents CN 107562235A, CN 108255296A and US 10296047B disclose that the touch device does not use the aforementioned principle to conduct the upper and lower electrodes, it can be found according to the contents of the aforementioned patent specification that the patent mainly utilizes the arrangement of complex conduction between the upper and lower electrodes. particles, and by shortening the distance between the conductive particles during implementation, the upper and lower electrodes of the conductive particles are made conductive. However, the conventional method still cannot make the touch device accurately cut out the pressure position of the panel, and the touch device is still prone to problems such as insufficient operation accuracy or sensitivity.

The main purpose of the present invention is to solve the problems of limited touch control and insufficient resolution in the implementation of conventional touch devices.

In order to achieve the above object, the present invention provides a touch sensor comprising a first electrode, a second electrode and an insulating material, the second electrode and the first electrode are spaced apart, and the first electrode and the second electrode are spaced apart from each other. At least one of the electrodes is supplied with energy, there is an energy difference between the first electrode and the second electrode, and the insulating substance is provided between the first electrode and the second electrode. Wherein, at least one of the first electrode and the second electrode may be a force recipient, and when the force recipient is not subjected to force, the touch sensor does not generate an electrical signal, and the force recipient is subjected to force When a force point is deformed and the distance between the force point and the other is changed, but it is still not in contact with the other, the distance between the first electrode and the second electrode is shortened by an energy transmission distance When the touch sensor generates the electrical signal.

In one embodiment, the insulating substance is a gas or a tangible substance.

In one embodiment, the insulating substance is a gas, the touch sensor has a spacer plate disposed between the first electrode and the second electrode, and at least one spacer for the gas is disposed on the spacer plate. stomata.

In one embodiment, the touch sensor includes a first substrate disposed on a side of the first electrode away from the insulating substance, and a second substrate disposed on a side of the second electrode away from the insulating substance.

In one embodiment, the first electrode and the second electrode are respectively provided with a plurality of conductive lines with high density.

In one embodiment, the first electrode is composed of a plurality of first sub-electrodes, the first sub-electrodes share the same first substrate, the second electrode is composed of a plurality of second sub-electrodes, the second sub-electrodes The electrodes share the same second substrate.

In one embodiment, the first substrate is composed of a plurality of first sub-substrates, the first sub-substrates share the same first electrode, the second substrate is composed of a plurality of second sub-substrates, and the second sub-substrates The substrates share the same second electrode.

In one embodiment, the first substrate is composed of a plurality of first sub-substrates arranged in parallel and spaced apart, the second substrate is composed of a plurality of second sub-substrates arranged in parallel and spaced apart, and each of the first sub-substrates has a In the first extension direction, each of the second sub-substrates has a second extension direction perpendicular to the first extension direction.

In addition to the foregoing, the present invention also provides a touch sensor comprising a first electrode, a second electrode and an insulating material, the second electrode is disposed corresponding to the first electrode but not in contact with the first electrode, There is an energy transfer distance between the second electrode and the first electrode, at least one of the first electrode and the second electrode is supplied with energy, and there is an energy difference between the first electrode and the second electrode , the insulating substance is arranged between the first electrode and the second electrode. Wherein, at least one of the first electrode and the second electrode can be a force recipient, and the distance between the first electrode and the second electrode is smaller than the energy transmission distance when the force recipient is not subjected to force A tunneling current is generated, the touch sensor generates an electrical signal for a long time and is in a non-touch state, the force receiving force is deformed at one force receiving point and changing the force receiving point and the other When the distance between the first electrode and the second electrode is greater than the energy transmission distance and destroys the generation of the tunneling current, the touch sensor determines that the touch sensor is touched by the change of the electrical signal.

As disclosed in the foregoing summary of the invention, compared with the conventional technology, the present invention has the following features: the touch sensor of the present invention no longer restricts that the touch person needs to be a conductor or a non-conductor, and the tunneling current needs to reach a certain distance Condition can be generated, the magnitude of the tunneling current is more related to the force exerted by the touch user, so that the touch sensor can perform more specific touch recognition. Furthermore, the operation accuracy and sensitivity of the touch sensor disclosed in the present invention are also better than those of conventional touch sensors implemented with a resistive structure or a capacitive structure.

The detailed description and technical content of the present invention are described as follows in conjunction with the drawings:

Please refer to FIG. 1 to FIG. 3 , the present invention provides a touch sensor 10 , and the touch sensor 10 can be applied to products in the related display industries such as mobile phones, tablets, industrial computers, etc. The touch sensor 10 In practical applications, a single number of product panels can be formed, or a plurality of the touch sensors 10 can be implemented. Further, a plurality of the touch sensors 10 need to be arranged at intervals, and can be arranged in a regular or irregular manner, and the drawings herein are not intended to limit the present case. Furthermore, when the touch sensors 10 can be implemented in plural, they will constitute a touch module, and the touch sensors 10 are arranged at appropriate intervals as described above, and each touch sensor 10 can be A position information is respectively defined, so that the touch module can know the position where the touch is generated based on the position information when the touch module is implemented.

On top of that, the touch sensor 10 includes a first electrode 11 , a second electrode 12 and an insulating material 13 , wherein the first electrode 11 and the second electrode 12 have conductive properties. For example, the The first electrode 11 and the second electrode 12 can be respectively a material containing silver nanowires (AgNW), a material containing indium tin oxide (ITO), a copper material or a silver material. Wait. In one embodiment, the resistivity of the first electrode 11 and the second electrode 12 are both less than 10 ² ohmmeter. In addition, the first electrode 11 and the second electrode 12 are spaced apart, and the first electrode 11 and the second electrode 12 can be arranged in a horizontal or non-horizontal manner, as shown in FIG. 1 and FIG. 3 . Further, in the present invention, no matter whether the first electrode 11 and the second electrode 12 are arranged in any of the aforementioned manners, the first electrode 11 and the second electrode 12 are still not in contact with each other. In addition, in order to facilitate the description of the implementation of the first electrode 11 and the second electrode 12, the first electrode 11 and the second electrode 12 are in a horizontal state for example. On the other hand, at least one of the first electrode 11 and the second electrode 12 is energized, for example, the first electrode 11 is not additionally energized, and the second electrode 12 is additionally energized energy, so that there is an energy difference between the first electrode 11 and the second electrode 12 , that is, the first electrode 11 and the second electrode 12 are respectively at a low potential and a high potential. Conversely, the second electrode 12 can also be designed to be at a low potential, and the first electrode 11 is at a high potential by applying energy. In addition, the first electrode 11 and the second electrode 12 can also be designed to have energy, but the energy of the first electrode 11 and the energy of the second electrode 12 are different in magnitude, so that the first electrode There is also an energy difference between 11 and the second electrode 12 . Further, the energy difference between the first electrode 11 and the second electrode 12 is not enough to cause the electrons in the first electrode 11 or the electrons in the second electrode 12 to cross the insulating substance 13 to form a current. In other words, when the first electrode 11 and the second electrode 12 are not subjected to force, the touch sensor 10 is in a steady state without substantial energy transfer between the two electrodes.

In addition, the insulating substance 13 is disposed between the first electrode 11 and the second electrode 12 , and the resistivity of the insulating substance 13 is greater than that of the first electrode 11 and the second electrode 12 , and the insulating substance 13 may be a It can be implemented with tangible objects that are deformable and have good elastic recovery, such as silicone rubber, acrylic, or intangible objects such as gas. In the following description, the tangible material is used. In this embodiment, the insulating material 13 is actually a material that is not doped with conductive materials. The resistivity of the insulating material 13 remains unchanged when it is compressed and deformed. The resistivity is greater than 10 ² ohm m. Therefore, when the insulating substance 13 is pressed, it will deform and change the distance between the first electrode 11 and the second electrode 12. When the insulating substance 13 is not pressed, the insulating substance 13 will return to its original state. The distance between the first electrode 11 and the second electrode 12 is restored to the original distance. In one embodiment, the thickness of the insulating material 13 is about 0.01 nm to 500 μm.

，其中，I為穿隧電流15，k為波數(wave number)，d為該第一電極11與該第二電極12之間的距離。Further, when the touch sensor 10 is implemented, at least one of the first electrode 11 and the second electrode 12 may be a force receiver. In addition, for the convenience of description, the description will first assume that the second electrode 12 is the force-receiving device. When the second electrode 12 is not subjected to force, although there is an energy difference between the second electrode 12 and the first electrode 11, there is no energy transmission between the second electrode 12 and the first electrode 11, and the contact The control sensor 10 does not generate an electrical signal (not shown in the figure). After that, the second electrode 12 is deformed at a force point 121 under the action of external force. With the application of the external force, the distance between the force point 121 and the first electrode 11 is changed. It should be understood that this paper The force bearing point 121 refers to the force bearing position of the second electrode 12 , not a single point. Furthermore, the present invention does not limit the force-receiving direction of the force-receiving person. Whether the touch sensor 10 of the present invention transmits energy or not is affected by the vertical distance between the first electrode 11 and the second electrode 12 Change decides. Taking FIG. 4 as an example, an external force 20 borne by the second electrode 12 is at an angle of 45 degrees relative to the second electrode 12 . At this time, the external force 20 may be a force 20 sandwiched by 45 degrees relative to the external force 20 and has an angle of 45 degrees relative to the second electrode 12 . The two electrodes 12 are parallel to the first component force 201 , and the second component force 202 is sandwiched by 45 degrees relative to the external force 20 and is perpendicular to the second electrode 12 . In addition, the second electrode 12 is acted by the second component force 202 to cause the force point 121 to be displaced in the direction facing the first electrode 11 , so that the distance between the force point 121 and the first electrode 11 is changed , but the second electrode 12 is still not in contact with the first electrode 11 . The second electrode 12 is continuously subjected to force, so that the force-receiving point 121 continues to be displaced in the direction facing the first electrode 11 . When the distance between the force-receiving point 121 and the first electrode 11 reaches an energy transmission distance 14 , A tunneling current 15 is generated between the first electrode 11 and the second electrode 12 , so that a current occurs between the first electrode 11 and the second electrode 12 , thereby causing the touch sensor 10 After generating the electrical signal, the touch sensor 10 enters a state of being touched. The tunneling current 15 can be calculated as follows:

, where I is the tunneling current 15 , k is the wave number, and d is the distance between the first electrode 11 and the second electrode 12 .

As mentioned above, the magnitude of the electrical signal is positively correlated with the magnitude of the force on the person receiving the force (ie, the second electrode 12 ). The larger the electrical signal, the greater the external force 20 the second electrode 12 bears. The more electrons in the two electrodes are transferred to the other electrode, so that the tunneling current 15 increases with the touch. Furthermore, the touch sensor 10 can also perform signal processing such as signal amplification and signal conversion for the electrical signal.

歐姆公尺，該氣體電阻率雖受所含水氣多寡以及溫度作用而有所不同，但該氣體仍相對該第一電極11與該第二電極12具有較大的電阻率。Please refer to FIG. 5 to FIG. 6 , it can be seen from the foregoing that the insulating substance 13 of the present invention can also be implemented by an invisible substance, and gas will be used as an example for illustration in the following. As long as the resistivity of the gas is greater than that of the first electrode 11 and the second electrode 12, it can be used for implementation. For example, the gas can be an inert gas or a nitrogen gas. In this embodiment, the structure of the touch sensor 10 needs to define a closed space 161 first. The spacer 16 sandwiched between the first electrode 11 and the second electrode 12 is formed. For example, when the spacer 16 is implemented as a single plate, the spacer 16 can define at least one air hole 162 . When the spacer plate 16 is assembled with the first electrode 11 and the second electrode 12 , both ends of the air hole 162 will be shielded by the first electrode 11 and the second electrode 12 respectively, and will be closed. At this time, the gas in the air hole 162 is the insulating substance 13 in the present invention. Furthermore, the forming method of the air hole 162 can be formed by applying yellow light, laser, printing, etching, etc. to the spacer plate 16 . In addition, when the partition plates 16 are implemented in plural, at least one hollow area (not shown in the figure) can be defined through the planning of the placement positions of the plural partition plates 16 . The purpose of the hollow area is the same as that of the air hole 162 described above. This is not repeated here. On the other hand, when this embodiment is implemented, the force-receiving person (for example, the second electrode 12 for now) is deformed by external pressure, and while the second electrode 12 is deformed, the closed space 161 is subjected to external pressure. The pressure reduces the volume and increases the air pressure in the closed space 161 . When the external force 20 is released, the second electrode 12 not only returns to its original volume, but also returns to its original volume due to the release of the external pressure of the gas in the closed space 161 . On the other hand, if the gas is composed of air as an example, its resistivity is about

Ohm-meter, although the resistivity of the gas is different depending on the amount of water and temperature, the gas still has a relatively high resistivity relative to the first electrode 11 and the second electrode 12 .

It can be seen from the foregoing that the touch sensor 10 learns the touch based on the generation of the tunneling current 15 . Based on the same technical concept, the touch sensor 10 can also learn the touch without generating the tunneling current 15 . . Accordingly, please refer to FIG. 7 to FIG. 9 . In one embodiment, the touch sensor 10 also includes the first electrode 11 , the second electrode 12 and the insulating substance 13 , and the first electrode 11 corresponds to the first electrode 11 . The two electrodes 12 are disposed without contacting the first electrode 11 , and the first electrode 11 and the second electrode 12 can be disposed correspondingly in a horizontal or non-horizontal manner. At least one of the first electrode 11 and the second electrode 12 is energized, and there is the energy transfer distance 14 between the first electrode 11 and the second electrode 12. As described above, when the first electrode 11 When the distance from the second electrode 12 is smaller than the energy transfer distance 14 , energy transfer occurs between the first electrode 11 and the second electrode 12 , and the tunneling current 15 is present. However, in this embodiment, after the touch sensor 10 is assembled with the first electrode 11 and the second electrode 12 , the distance between the first electrode 11 and the second electrode 12 is shorter than the energy transmission distance 14 , that is, the touch sensor 10 will generate the electrical signal when the touch sensor 10 is not touched. In this embodiment, at least one of the first electrode 11 and the second electrode 12 can be used as the force receiver. When either the first electrode 11 and the second electrode 12 are not subjected to force, the contact The control sensor 10 is in a steady state and generates the electrical signal. It should be understood that in this embodiment, the electrical signal is not generated as the basis for touch, and this state will be regarded as no touch. Furthermore, the force exerted by the touch operator in this embodiment is different from the previous embodiment, but is performed by pulling force. For example, the touch operator can be an object with suction, At the same time when the force recipient exerts force, the suction force will be regarded as a pulling force on the force recipient, and the force receiving point 121 is gradually displaced in the direction away from the other, that is, the distance between the two electrodes becomes larger. The force is continuously subjected to force, so that the distance between the force-receiving point 121 and the other electrode is greater than the energy transmission distance 14 , which will destroy the generation of the tunneling current 15 and make the electrical signal generated by the touch sensor 10 . If the signal changes, the touch sensor 10 can judge that the touch sensor 10 is touched through the change of the electrical signal.

On the basis of the above, the touch sensor 10 of the present invention no longer restricts that the touch person needs to be a conductor or a non-conductor, and since the tunneling current 15 needs to reach a certain distance to be generated, the size of the tunneling current 15 is more similar to The touch user exerts force, so that the touch sensor 10 can perform more specific touch recognition. Furthermore, the operation accuracy and sensitivity of the touch sensor 10 disclosed in the present invention are also better than those of conventional touch sensors implemented with a resistive structure or a capacitive structure. Furthermore, the touch sensor 10 of the present invention can be implemented in conjunction with a display structure, and the display structure can not only have an independent substrate, but also the first electrode 11 or the second electrode 12 as the display structure. The required substrate on which the display structure is stacked.

Please refer to FIG. 10 to FIG. 12. In order to enhance the ability of the present invention to sense the electrical signal, the first electrode 11 and the second electrode 12 are respectively provided with a plurality of conductive lines 113, 124 with high density. The conductive lines 113, 124 They are randomly arranged in the first electrode 11 and the second electrode 12 in a vertical posture, and further, one end of each of the conductive lines 113 ( 124 ) faces the insulating material 13 . In one embodiment, the conductive wires 113 and 124 can be the nanosilver wires, respectively.

Referring to FIGS. 13 to 21 , in one embodiment, the touch sensor 10 may further include a first substrate 111 disposed on the side of the first electrode 11 away from the insulating material 13 , and a first substrate 111 disposed on the first electrode 11 . The second substrate 122 on the side of the two electrodes 12 away from the insulating material 13 . Referring to FIG. 14 , the touch sensor 10 disclosed in this embodiment is not limited to be implemented independently, and the touch sensor 10 can also be implemented in plural, just like the aforementioned touch module.

On top of that, in one embodiment, the first substrate 111 and the second substrate 122 can be implemented as non-conductors. Once a touch user touches the second substrate 122 (or the first substrate 111 ), the touch sensor will be activated. The overall capacitance value of 10 changes, which can be used to determine whether the touch person is a conductor or a non-conductor.

In addition, in one embodiment, the second electrode 12 may be implemented in a plurality of subunits, that is, the second electrode 12 may be composed of a plurality of second sub-electrodes 125, and the second sub-electrodes 125 are arranged on the second substrate at intervals 122 , the second sub-electrodes 125 share the same second substrate 122 , as shown in FIG. 16 . 17, in this embodiment, the touch sensor 10 is implemented by dividing the second sub-electrodes 125, the insulating material 13 can also be arranged in a plurality of sub-units, and the insulating materials 13 Units will be spaced apart from each other when implemented as tangible objects. When the insulating materials 13 are made of the gas, a plurality of the closed spaces 161 are defined in the structure to which the touch sensor 10 belongs, and the closed spaces 161 are not connected. Further, please refer to FIG. 18 , the touch sensor 10 can also make the first electrode 11 also consist of a plurality of first sub-electrodes 112 , and the first sub-electrodes 112 are arranged on the first substrate 111 at intervals above, the first sub-electrodes 112 share the same first substrate 111 . Thereby, the touch sensor 10 can determine the position of the force-receiving point 121 more specifically.

Furthermore, the aforementioned first sub-electrodes 112 and the second sub-electrodes 125 are not limited to be implemented in blocks, but can be implemented in strips, as shown in FIG. 19 . The extending directions of the first sub-electrodes 112 and the extending directions of the second sub-electrodes 125 are perpendicular to each other. Taking the drawing in FIG. 19 as an example, the first sub-electrodes 112 are arranged in a direction parallel to the X-axis, and the second sub-electrodes 112 are arranged in a direction parallel to the X-axis. The sub-electrodes 125 are arranged parallel to the Y-axis direction, so that the present invention can detect signal changes in the Y-axis direction and the X-axis direction by the first sub-electrodes 112 and the second sub-electrodes 125 in different directions. In addition, the structure of this embodiment can further perform the signal change in the Z-axis direction with the relative signal change of the first substrate 111 and the second substrate 122 .

In addition, please refer to FIG. 20 and FIG. 21. In one embodiment, when the two substrates of the touch sensor 10 are implemented as non-conductors or conductors, the first substrate 111 may be composed of a plurality of first sub-substrates 114. The first sub-substrates 114 are disposed on the first electrode 11 at intervals, and the first sub-substrates 114 share the same first electrode 11 . On the other hand, the second substrate 122 can also be composed of a plurality of second sub-substrates 123, the second sub-substrates 123 are disposed on the second electrode 12 at intervals, and the second sub-substrates 123 share the same second electrode 12.

Furthermore, the aforementioned first sub-substrates 114 and the second sub-substrates 123 are not limited to be implemented in blocks, but can be implemented in strips, as shown in FIG. 21 . Further, each of the first sub-substrates 114 has a first extension direction 116 , and each of the second sub-substrates 123 has a second extension direction 127 perpendicular to the first extension direction 116 . In this way, the present invention can detect signal changes in the Y-axis direction and the X-axis direction by the first sub-substrates 114 and the second sub-substrates 123 with different orientations. In addition, the structure of this embodiment can further perform the signal change in the Z-axis direction with the relative signal change of the first electrode 11 and the second electrode 12 .

To sum up, the above is only a preferred embodiment of the present invention, and the scope of implementation of the present invention cannot be limited by this, that is, all equivalent changes and modifications made according to the scope of the patent application of the present invention should still belong to the present invention. patent coverage.

10: Touch Sensor 11: The first electrode 111: The first substrate 112: The first sub-electrode 113: Conductive thread 114: The first sub-substrate 116: The first extension direction 12: The second electrode 121: Force point 122: Second substrate 123: Second sub-substrate 124: Conductive thread 125: Second sub-electrode 127: Second extension direction 13: Insulation 14: Energy transfer distance 15: Tunneling current 16: Spacer 161: Confined Space 162: Stomata 20: External force 201: The first force 202: Second Component

FIG. 1 is a schematic structural diagram of a first embodiment of the present invention. FIG. 2 is a schematic diagram of a complex arrangement structure according to the first embodiment of the present invention. FIG. 3 is another schematic structural diagram of the first embodiment of the present invention. FIG. 4 is a schematic diagram of an implementation state of the first embodiment of the present invention. FIG. 5 is a schematic structural diagram of a second embodiment of the present invention. FIG. 6 is a schematic diagram of an implementation state of the second embodiment of the present invention. FIG. 7 is a schematic structural diagram of a third embodiment of the present invention. FIG. 8 is a schematic diagram of an implementation state of the third embodiment of the present invention. FIG. 9 is a schematic structural diagram of a fourth embodiment of the present invention. FIG. 10 is a schematic structural diagram of a fifth embodiment of the present invention. FIG. 11 is a partial enlarged schematic view of the fifth embodiment of the present invention. FIG. 12 is a schematic structural diagram of a sixth embodiment of the present invention. FIG. 13 is a schematic structural diagram of a seventh embodiment of the present invention. FIG. 14 is a schematic diagram of a complex arrangement structure according to the seventh embodiment of the present invention. FIG. 15 is a schematic structural diagram of an eighth embodiment of the present invention. FIG. 16 is a schematic structural diagram of a ninth embodiment of the present invention. FIG. 17 is a schematic structural diagram of a tenth embodiment of the present invention. FIG. 18 is a schematic structural diagram of an eleventh embodiment of the present invention. FIG. 19 is a schematic structural diagram of a twelfth embodiment of the present invention. FIG. 20 is a schematic structural diagram of a thirteenth embodiment of the present invention. FIG. 21 is a schematic structural diagram of a fourteenth embodiment of the present invention.

10: Touch Sensor

11: The first electrode

12: The second electrode

121: Force point

13: Insulation

14: Energy transfer distance

15: Tunneling current

20: External force

201: The first force

202: Second Component

Claims (5)

A touch sensor, comprising: a first electrode; a second electrode, spaced apart from the first electrode, at least one of the first electrode and the second electrode is applied with energy, the first electrode There is an energy difference with the second electrode; and an insulating substance is arranged between the first electrode and the second electrode; wherein, at least one of the first electrode and the second electrode can be a receiving When the force is not applied, the distance between the first electrode and the second electrode is greater than an energy transmission distance, and the energy difference between the first electrode and the second electrode is not enough to form a current, the The touch sensor does not generate an electrical signal, the force-receiving person is subjected to force and deforms at a force-receiving point and changes the distance between the force-receiving point and the other, but has not yet contacted the other, the When the distance between the first electrode and the second electrode is shortened by the energy transmission distance, a tunneling current is generated between the first electrode and the second electrode, and the touch sensor generates the electrical signal. The touch sensor of claim 1, wherein the insulating substance is a gas or a tangible substance. The touch sensor of claim 1, wherein the insulating substance is a gas, the touch sensor has a spacer plate disposed between the first electrode and the second electrode, and the spacer plate is arranged There is at least one air hole in which the gas is provided. The touch sensor according to any one of claims 1 to 3, wherein the touch sensor comprises a first substrate disposed on a side of the first electrode away from the insulating substance, and a first substrate disposed on the first electrode The second substrate on the side of the two electrodes away from the insulating material. The touch sensor of claim 4, wherein the first electrode and the second electrode are respectively provided with a plurality of conductive lines with high density.

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