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TWI761072B - Magnetic Linear Position Sensor - Google Patents

Magnetic Linear Position Sensor Download PDF

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TWI761072B
TWI761072B TW110104628A TW110104628A TWI761072B TW I761072 B TWI761072 B TW I761072B TW 110104628 A TW110104628 A TW 110104628A TW 110104628 A TW110104628 A TW 110104628A TW I761072 B TWI761072 B TW I761072B
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curvature
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cosine
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TW202232056A (en
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陳兆麟
陳秉男
陳聖文
楊仁昌
黃純搖
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經登企業股份有限公司
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Abstract

一種磁性線性位置感應器,用以偵測沿一直線行程往復移動的一磁鐵的位置,其中的一磁性角度型感應元件設於該直線行程的一側以感應該磁鐵的磁場並輸出一正弦訊號和一餘弦訊號,且其中的一處理單元將該正弦訊號和該餘弦訊號數位化為一正弦訊號值和一餘弦訊號值後,進行atan2(減去一第一預設值的該正弦訊號值/減去一第二預設值的該餘弦訊號值)運算,以獲得一曲率值;該處理單元將該曲率值輸入一擬合該磁性角度型感應元件的一特性曲線的數學模型,以求得該磁性角度型感應元件與該磁鐵的一相對距離。A magnetic linear position sensor is used to detect the position of a magnet that reciprocates along a linear stroke, wherein a magnetic angle type induction element is arranged on one side of the linear stroke to sense the magnetic field of the magnet and output a sinusoidal signal and A cosine signal, and one of the processing units digitizes the sine signal and the cosine signal into a sine signal value and a cosine signal value, and then performs atan2 (subtracting the sine signal value of a first preset value/subtraction the cosine signal value from a second preset value) is calculated to obtain a curvature value; the processing unit inputs the curvature value into a mathematical model that fits a characteristic curve of the magnetic angle-type sensing element to obtain the A relative distance between the magnetic angle sensing element and the magnet.

Description

磁性線性位置感應器Magnetic Linear Position Sensor

本發明是有關於一種位置感應器,特別是指一種磁性線性位置感應器。The present invention relates to a position sensor, in particular to a magnetic linear position sensor.

參見圖1所示,現有獲得一磁性角度型感應元件S(例如AMR、Hall、TMR….)的偵測距離的一種方式是令磁性角度型感應元件S感應沿一直線行程P1運動之磁鐵M的磁場,使產生與磁鐵M之一移動距離相關的一正弦波訊號和一餘弦波訊號並輸出至一訊號處理器10,該訊號處理器10將該正弦波訊號和餘弦波訊號數位化為如圖1所示之由複數正弦訊號值Usin形成的數位化正弦波訊號sin以及如圖1示之由複數餘弦訊號值Ucos形成的數位化餘弦波訊號cos,並對該等正弦訊號值Usin和該等餘弦訊號值Ucos進行反正切函數(ARCTAN)的二階導數(atan2)運算,即atan2(Usin/Ucos),可求得複數曲率值,且該等曲率值形成如圖1所示之一曲率曲線C1,該曲率曲線C1中的一有效線段L1上的每一點的曲率值對應一偵測距離,且因為該有效線段L1的曲率值範圍只有從0.2~1.2,代表磁性角度型感應元件S的一有效偵測距離並不長,例如圖1所示只有6mm,因此,假設需要偵測的長度是6mm的6倍,則至少需要並列6顆磁性角度型感應元件S同時進行偵測。Referring to FIG. 1 , one way to obtain the detection distance of a magnetic angle sensing element S (such as AMR, Hall, TMR....) is to make the magnetic angle sensing element S sense the magnet M moving along a linear stroke P1. The magnetic field generates a sine wave signal and a cosine wave signal related to a moving distance of the magnet M and outputs it to a signal processor 10. The signal processor 10 digitizes the sine wave signal and the cosine wave signal as shown in the figure The digitized sine wave signal sin formed by the complex sine signal value Usin shown in Figure 1 and the digitized cosine wave signal cos formed by the complex cosine signal value Ucos shown in Figure 1, and the sine signal values Usin and these The cosine signal value Ucos is subjected to the second derivative (atan2) operation of the arc tangent function (ARCTAN), namely atan2(Usin/Ucos), to obtain complex curvature values, and these curvature values form a curvature curve C1 as shown in Figure 1 , the curvature value of each point on an effective line segment L1 in the curvature curve C1 corresponds to a detection distance, and because the curvature value of the effective line segment L1 only ranges from 0.2 to 1.2, it represents an effective magnetic angle sensing element S. The detection distance is not long. For example, as shown in Figure 1, it is only 6mm. Therefore, if the length to be detected is 6 times that of 6mm, at least 6 magnetic angle sensing elements S need to be connected in parallel for detection at the same time.

因此,本發明之目的,即在提供一種磁性線性位置感應器,其能增長其中之磁性角度型感應元件的偵測距離,進而減少磁性角度型感應元件的使用數量。Therefore, the purpose of the present invention is to provide a magnetic linear position sensor, which can increase the detection distance of the magnetic angle-type sensing element therein, thereby reducing the number of magnetic angle-type sensing elements used.

於是,本發明一種磁性線性位置感應器,用以偵測沿一直線行程往復移動的一磁鐵的位置,並包括一磁性角度型感應元件及一處理單元;該磁性角度型感應元件設於該直線行程的一側以感應該磁鐵的磁場並輸出一正弦訊號和一餘弦訊號;該處理單元與該磁性角度型感應元件電連接,以接收該正弦訊號和該餘弦訊號,並將該正弦訊號和該餘弦訊號數位化為一正弦訊號值和一餘弦訊號值,且對減去一第一預設值的該正弦訊號值和減去一第二預設值的該餘弦訊號值進行反正切函數的二階導數運算,即atan2(減去該第一預設值的該正弦訊號值/減去該第二預設值的該餘弦訊號值),以獲得一曲率值;該處理單元將該曲率值輸入一與該磁性角度型感應元件特性相關的數學模型,以求得該磁性角度型感應元件與該磁鐵的一相對距離;該數學模型是由一多項式方程式

Figure 02_image001
及一曲率值範圍建構以擬合該磁性角度型感應元件的一特性曲線,其中i等於1,2,3…n,y i是該相對距離,xi是該曲率值,β 0m是該磁性角度型感應元件的係數,該曲率值範圍的最小值和最大值是該特性曲線兩端的曲率值。 Therefore, the present invention is a magnetic linear position sensor for detecting the position of a magnet that reciprocates along a linear stroke, and includes a magnetic angle sensing element and a processing unit; the magnetic angle sensing element is arranged on the linear stroke One side of the magnet is used to sense the magnetic field of the magnet and output a sine signal and a cosine signal; the processing unit is electrically connected to the magnetic angle sensing element to receive the sine signal and the cosine signal, and combine the sine signal and the cosine signal The signal is digitized into a sine signal value and a cosine signal value, and the second derivative of the arctangent function is performed on the sine signal value minus a first predetermined value and the cosine signal value minus a second preset value operation, namely atan2 (subtract the sine signal value of the first preset value/subtract the cosine signal value of the second preset value) to obtain a curvature value; the processing unit inputs the curvature value into an and A mathematical model related to the characteristics of the magnetic angle sensing element to obtain a relative distance between the magnetic angle sensing element and the magnet; the mathematical model is composed of a polynomial equation
Figure 02_image001
and a curvature value range is constructed to fit a characteristic curve of the magnetic angle sensing element, where i is equal to 1, 2, 3...n, yi is the relative distance, xi is the curvature value, and β 0m are The coefficient of the magnetic angle type induction element, the minimum value and the maximum value of the curvature value range are the curvature values at both ends of the characteristic curve.

在本發明的一些實施態樣中,該數學模型是於該磁性線性位置感應器的一校正程序中建立,在該校正程序中,該磁鐵沿該直線行程移動,一訊號處理裝置令該處理單元以一取樣頻率要求該磁性角度型感應元件回傳當下產生的該正弦訊號和該餘弦訊號直到該磁鐵走完該直線行程;該處理單元將該等正弦訊號和該等餘弦訊號數位化後輸出至該訊號處理裝置,該訊號處理裝置根據該直線行程的長度和該取樣頻率,獲得該磁鐵在該直線行程中每一個取樣點的位置與數位化的該等正弦訊號值和該等餘弦訊號值的對應關係,該訊號處理裝置將該等正弦訊號值減去一第一預設值,並將該等餘弦訊號值減去一第二預設值,該訊號處理裝置對減去該第一預設值的該等正弦訊號值和減去該第二預設值的該等餘弦訊號值進行反正切函數的二階導數(atan2)運算,即atan2(減去該第一預設值的該正弦訊號值/減去該第二預設值的該餘弦訊號值),而獲得相對應的複數曲率值,該等曲率值構成一曲率曲線,且該訊號處理裝置以該曲率曲線中的一有效線段做為該磁性角度型感應元件的該特性曲線並決定該磁性角度型感應元件的一有效偵測距離以及相對應的一曲率值範圍,且藉由曲線擬合和線性迴歸分析決定該多項式方程式

Figure 02_image001
的m值以及β 0m的值,且該訊號處理裝置將該多項式方程式及該曲率值範圍寫入該處理單元中做為該特性曲線的該數學模型。 In some embodiments of the present invention, the mathematical model is established during a calibration procedure of the magnetic linear position sensor, in which the magnet moves along the linear stroke, and a signal processing device causes the processing unit At a sampling frequency, the magnetic angle sensing element is required to return the sine signal and the cosine signal currently generated until the magnet completes the linear travel; the processing unit digitizes the sine signal and the cosine signal and outputs it to the signal processing device, according to the length of the linear stroke and the sampling frequency, to obtain the position of each sampling point of the magnet in the linear stroke and the digitized sine signal value and the cosine signal value Correspondingly, the signal processing device subtracts a first predetermined value from the sine signal values, and subtracts a second predetermined value from the cosine signal values, and the signal processing device subtracts the first predetermined value from the The sine signal values of the value and the cosine signal values minus the second preset value are subjected to the second derivative (atan2) operation of the arctangent function, namely atan2 (subtract the sine signal value of the first preset value /subtract the cosine signal value of the second preset value) to obtain a corresponding complex curvature value, the curvature values constitute a curvature curve, and the signal processing device uses an effective line segment in the curvature curve as a The characteristic curve of the magnetic angle sensing element determines an effective detection distance and a corresponding curvature value range of the magnetic angle sensing element, and determines the polynomial equation through curve fitting and linear regression analysis
Figure 02_image001
and the signal processing device writes the polynomial equation and the curvature value range into the processing unit as the mathematical model of the characteristic curve.

在本發明的一些實施態樣中,該第一預設值是該等正弦訊號值中的最大值與最小值之合的二之一;該第二預設值是該等餘弦訊號值中的最大值與最小值之合的二之一。In some implementation aspects of the present invention, the first preset value is one of the sum of the maximum value and the minimum value among the sine signal values; the second preset value is one of the cosine signal values Either the maximum value or the minimum value.

在本發明的一些實施態樣中,m為6。In some embodiments of the present invention, m is 6.

在本發明的一些實施態樣中,該磁性角度型感應元件具有兩個相差45°的磁阻電橋,其中一磁阻電橋感應該磁鐵的磁場並產生一正弦波訊號,其中另一磁阻電橋感應該磁鐵的磁場並產生一與該正弦波訊號相位差45°的餘弦波訊號。In some embodiments of the present invention, the magnetic angle sensing element has two magnetoresistive bridges with a difference of 45°, wherein one magnetoresistive bridge induces the magnetic field of the magnet and generates a sine wave signal, and the other magnetoresistive bridge induces a sine wave signal. The resistive bridge senses the magnetic field of the magnet and generates a cosine wave signal with a phase difference of 45° from the sine wave signal.

在本發明的一些實施態樣中,該處理單元判斷該曲率值在該曲率值範圍內,才將該曲率值輸入該數學模型。In some implementation aspects of the present invention, the processing unit determines that the curvature value is within the curvature value range, and then inputs the curvature value into the mathematical model.

本發明之功效在於:藉由該處理單元的該數學模型擬合該磁性角度型感應元件的特性曲線,該處理單元只需將該磁性角度型感應元件傳來的該正弦訊號和該餘弦訊號數位化後,對減去第一預設值的該正弦訊號值和減去第二預設值的該餘弦訊號值進行atan2(減去該第一預設值的該正弦訊號值/減去該第二預設值的該餘弦訊號值)運算獲得一曲率值後,將該曲率值輸入該數學模型,即可透過簡單的一元m次多項式方程式快速求得該磁性角度型感應元件與該磁鐵的一相對距離;而且該數學模型所擬合的該特性曲線決定該磁性角度型感應元件的一有效偵測距離以及相對應的一曲率值範圍,而在校正程序中,藉由將該磁性角度型感應元件感應獲得的該等正弦訊號值和該等餘弦訊號適當平移後再對其進行反正切函數(ARCTAN)的二階導數(atan2)運算,能使該有效偵測距離增長,而減少磁性角度型感應元件的使用數量並使該磁性線性位置感應器的偵測距離變長。The effect of the present invention lies in: fitting the characteristic curve of the magnetic angle sensing element by the mathematical model of the processing unit, the processing unit only needs to digitally transmit the sine signal and the cosine signal from the magnetic angle sensing element After transformation, atan2 is performed on the sine signal value minus the first preset value and the cosine signal value minus the second preset value (minus the sine signal value of the first preset value/subtract the first preset value After a curvature value is obtained by calculating the cosine signal value of the two preset values, the curvature value is input into the mathematical model, and a simple one-variable m-th degree polynomial equation can be used to quickly obtain a relationship between the magnetic angle type induction element and the magnet. relative distance; and the characteristic curve fitted by the mathematical model determines an effective detection distance of the magnetic angle sensing element and a corresponding curvature value range, and in the calibration procedure, the magnetic angle sensing element is The sine signal values and the cosine signals obtained by the element induction are properly shifted and then the second derivative (atan2) of the arc tangent function (ARCTAN) is calculated, which can increase the effective detection distance and reduce the magnetic angle induction. The number of components used increases the detection distance of the magnetic linear position sensor.

在本發明被詳細描述之前,應當注意在以下的說明內容中,類似的元件是以相同的編號來表示。Before the present invention is described in detail, it should be noted that in the following description, similar elements are designated by the same reference numerals.

參閱圖2所示,是本發明磁性線性位置感應器的一實施例,其用以偵測沿一直線行程P2往復移動的一磁鐵M的位置,例如該磁鐵M是設於一氣缸1內的一活塞,且該直線行程P2是該活塞在該氣缸1內往復運動的活塞行程;本實施例的磁性線性位置感應器2主要包括一磁性角度型感應元件21及一處理單元22,例如一微處理器或一微控制器(MCU)。該磁性角度型感應元件21設於該直線行程P2的一側,例如該氣缸1的外壁面,以感應該磁鐵M的磁場並輸出類比的一正弦訊號和一餘弦訊號;該處理單元22與該磁性角度型感應元件21電連接,以接收該正弦訊號和該餘弦訊號,且該處理單元22中存有一與該磁性角度型感應元件21特性相關的一數學模型,該數學模型是由一多項式方程式

Figure 02_image001
及一曲率值範圍建構以擬合該磁性角度型感應元件21的一特性曲線,其中i=1,2,3…n,y i代表該磁性角度型感應元件21與該磁鐵M的一相對距離,xi代表一曲率值,β 0m代表該磁性角度型感應元件21的係數,該曲率值範圍的最小值和最大值是該特性曲線兩端的曲率值。 Referring to FIG. 2 , it is an embodiment of the magnetic linear position sensor of the present invention, which is used to detect the position of a magnet M that reciprocates along a linear stroke P2 . For example, the magnet M is set in a cylinder 1 . piston, and the linear stroke P2 is the piston stroke of the piston reciprocating in the cylinder 1; the magnetic linear position sensor 2 of this embodiment mainly includes a magnetic angle sensing element 21 and a processing unit 22, such as a microprocessor controller or a microcontroller (MCU). The magnetic angle sensing element 21 is arranged on one side of the linear stroke P2, such as the outer wall of the cylinder 1, to sense the magnetic field of the magnet M and output an analogous sine signal and a cosine signal; the processing unit 22 and the The magnetic angle sensing element 21 is electrically connected to receive the sine signal and the cosine signal, and the processing unit 22 stores a mathematical model related to the characteristics of the magnetic angle sensing element 21, and the mathematical model is composed of a polynomial equation
Figure 02_image001
and a curvature value range is constructed to fit a characteristic curve of the magnetic angle sensing element 21, wherein i=1, 2, 3...n, y i represents a relative distance between the magnetic angle sensing element 21 and the magnet M , xi represents a curvature value, β 0m represent the coefficients of the magnetic angle sensing element 21 , and the minimum and maximum values of the curvature range are the curvature values at both ends of the characteristic curve.

具體而言,該數學模型是在該磁性線性位置感應器2的一校正程序中建立,由於每一磁性線性位置感應器2中的該磁性角度型感應元件21的特性都不相同,因此在該磁性線性位置感應器2出廠之前,該磁性線性位置感應器2需先經過校正以找到符合該磁性角度型感應元件21特性的該數學模型;且如圖3所示,該磁性角度型感應元件21(例如AMR、Hall、TMR….)內具有兩個相差45°(即夾45°角)的磁阻電橋(Bridge)211、212;在校正程序中,如圖2所示,會使磁鐵M從該直線行程P2之遠離該磁性角度型感應元件21的一端朝該磁性角度型感應元件21移動,並通過該磁性角度型感應元件21後朝遠離該磁性角度型感應元件21方向移動至該直線行程P2的另一端,在此過程中,這兩個磁阻電橋211、212會持續感應磁鐵M的磁場而產生相位差45°的一正弦波訊號SIN和一餘弦波訊號COS。Specifically, the mathematical model is established in a calibration procedure of the magnetic linear position sensor 2. Since the characteristics of the magnetic angle-type sensing element 21 in each magnetic linear position sensor 2 are different, the Before the magnetic linear position sensor 2 leaves the factory, the magnetic linear position sensor 2 needs to be calibrated to find the mathematical model that conforms to the characteristics of the magnetic angle sensing element 21 ; and as shown in FIG. 3 , the magnetic angle sensing element 21 There are two magnetoresistive bridges (Bridges) 211 and 212 with a difference of 45° (ie, an angle of 45°) in the interior (eg AMR, Hall, TMR....); in the calibration procedure, as shown in Fig. 2, the magnet M moves from the end of the linear stroke P2 away from the magnetic angle sensing element 21 toward the magnetic angle sensing element 21 , and then moves away from the magnetic angle sensing element 21 to the magnetic angle sensing element 21 after passing through the magnetic angle sensing element 21 . At the other end of the linear stroke P2, during this process, the two magnetoresistive bridges 211 and 212 will continue to induce the magnetic field of the magnet M to generate a sine wave signal SIN and a cosine wave signal COS with a phase difference of 45°.

同時,一訊號處理裝置3,例如但不限於一個人電腦,令該處理單元22以一取樣頻率(例如10次/秒)要求該磁性角度型感應元件21回傳當下產生的該正弦訊號(即該正弦波訊號SIN的某一點的值,類比電壓值)和該餘弦訊號(即該餘弦波訊號COS的某一點的值,類比電壓值),直到該磁鐵M走完該直線行程P2,藉此,該磁性角度型感應元件21每秒將回傳10筆正弦訊號和10筆餘弦訊號給該處理單元22,且該處理單元22將收到的該等正弦訊號和該等餘弦訊號數位化後輸出至該訊號處理裝置3。該等正弦訊號值Usin和該等餘弦訊號值Ucos的數位化數值可對照圖4左邊縱軸所標示的數值。At the same time, a signal processing device 3, such as but not limited to a personal computer, causes the processing unit 22 to request the magnetic angle sensing element 21 to return the currently generated sinusoidal signal at a sampling frequency (eg, 10 times/second) (ie the The value of a certain point of the sine wave signal SIN, the analog voltage value) and the cosine signal (that is, the value of a certain point of the cosine wave signal COS, the analog voltage value), until the magnet M completes the linear stroke P2, thereby, The magnetic angle sensing element 21 returns 10 sine signals and 10 cosine signals per second to the processing unit 22 , and the processing unit 22 digitizes the received sine signals and the cosine signals and outputs them to The signal processing device 3 . The digitized values of the sine signal values Usin and the cosine signal values Ucos can be compared with the values indicated by the vertical axis on the left side of FIG. 4 .

因此,該訊號處理裝置3可根據該磁鐵M的一移動距離(即該直線行程P2的長度)以及該取樣頻率,得知該磁鐵M在該直線行程P2中每一個取樣點的位置與數位化的該等正弦訊號值Usin和該等餘弦訊號值Ucos的對應關係,例如圖4所示之由數位化的該等正弦訊號值Usin構成的數位化正弦波訊號sin,以及如圖4所示之由數位化之該等餘弦訊號值Ucos構成的數位化餘弦波訊號cos。Therefore, the signal processing device 3 can know and digitize the position and digitization of each sampling point of the magnet M in the linear stroke P2 according to a moving distance of the magnet M (ie the length of the linear stroke P2 ) and the sampling frequency The corresponding relationship between the sine signal values Usin and the cosine signal values Ucos, such as the digitized sine wave signal sin composed of the digitized sine signal values Usin shown in FIG. A digitized cosine wave signal cos composed of the digitized cosine signal values Ucos.

然後,該訊號處理裝置3將該等正弦訊號值Usin減去一第一預設值成為Usin’,如圖5所示,相當於將該數位化正弦波訊號sin向下平移(offset)該第一預設值而成為一平移後數位化正弦波訊號sin’,並且該訊號處理裝置3將該等餘弦訊號值Ucos減去一第二預設值成為Ucos’,如圖5所示,相當於將該數位化餘弦波訊號cos向下平移(offset)該第二預設值而成為一平移後數位化餘弦波訊號cos’;且在本實施例中,該第一預設值是該等正弦訊號值Usin中的最大值與最小值之合的二之一,但不以此為限;該第二預設值是該等餘弦訊號值Ucos中的最大值與最小值之合的二之一,但不以此為限。Then, the signal processing device 3 subtracts a first preset value from the sinusoidal signal values Usin to become Usin', as shown in FIG. 5 , which is equivalent to shifting the digitized sinusoidal signal sin downward (offset) the first predetermined value. A preset value becomes a shifted digitized sine wave signal sin', and the signal processing device 3 subtracts a second preset value from the cosine signal values Ucos to become Ucos', as shown in FIG. 5, equivalent to The digitized cosine wave signal cos is shifted downward by the second preset value to become a shifted digitized cosine wave signal cos'; and in this embodiment, the first preset value is the sinusoids One of the two of the sum of the maximum value and the minimum value in the signal value Usin, but not limited thereto; the second default value is one of the two of the sum of the maximum value and the minimum value in the cosine signal values Ucos , but not limited to this.

接著,該訊號處理裝置3對減去該第一預設值的該等正弦訊號值Usin’(即平移後數位化正弦波訊號sin’)和減去該第二預設值的該等餘弦訊號值Ucos’(即平移後數位化餘弦波訊號cos’)進行反正切函數(ARCTAN)的二階導數(atan2)運算,即atan2(Usin’/Ucos’),而獲得相對應的複數曲率值,該等曲率值可對照圖6右邊縱軸所標示的數值,而該等曲率值構成如圖6所示的一曲率曲線C2,且該曲率曲線C2的一有效線段L2代表該磁性角度型感應元件21的該特性曲線並決定該磁性角度型感應元件21的一有效偵測距離以及相對應的該曲率值範圍,例如當曲率值為-1時,可以從該有效線段L2(該特性曲線)得知距離值為-2mm,對照圖2來看,其可以代表磁鐵M是位在該磁性角度型感應元件21的左側且與該磁性角度型感應元件21相距2mm的位置;同理,當曲率值為2時,可以得知距離值為2.6mm,這代表磁鐵M位是在該磁性角度型感應元件21的右側且與該磁性角度型感應元件21相距約2.6mm的位置;且如圖6所示,在本實施例中,由於該曲率值範圍可以達到-π~π,因此其相對應的該有效偵測距離可以增長至14mm,由此可知,本實施例透過上述將該磁性角度型感應元件21感應獲得的訊號值平移後,再進行反正切函數(ARCTAN)的二階導數(atan2)運算,能將該磁性角度型感應元件21的偵測距離(14mm)增長至習知技術(6mm)的兩倍以上,因此,假設需要偵測的長度是6mm的6倍,則只需要並列3顆磁性角度型感應元件21同時進行偵測,而能減少磁性角度型感應元件21的使用數量。Next, the signal processing device 3 compares the sine signal values Usin' (ie, the digitized sine wave signal sin' after the translation) minus the first preset value and the cosine signals minus the second preset value The value Ucos' (that is, the digitized cosine wave signal cos' after translation) is subjected to the second derivative (atan2) operation of the arc tangent function (ARCTAN), that is, atan2(Usin'/Ucos'), and the corresponding complex curvature value is obtained, the The equal curvature values can be compared to the values indicated by the vertical axis on the right side of FIG. 6 , and these curvature values constitute a curvature curve C2 as shown in FIG. 6 , and an effective line segment L2 of the curvature curve C2 represents the magnetic angle sensing element 21 and determine an effective detection distance of the magnetic angle sensing element 21 and the corresponding curvature value range. For example, when the curvature value is -1, it can be known from the effective line segment L2 (the characteristic curve) The distance value is -2mm, compared to FIG. 2, it can represent that the magnet M is located on the left side of the magnetic angle type induction element 21 and is 2mm away from the magnetic angle type induction element 21; Similarly, when the curvature value is 2, it can be known that the distance value is 2.6mm, which means that the magnet M is located on the right side of the magnetic angle type induction element 21 and is about 2.6mm away from the magnetic angle type induction element 21; and as shown in Figure 6 , in this embodiment, since the curvature value range can reach -π~π, the corresponding effective detection distance can be increased to 14mm. It can be seen that in this embodiment, through the above-mentioned magnetic angle sensing element 21 After the signal value obtained by induction is shifted, the second derivative (atan2) of the arc tangent function (ARCTAN) is calculated, which can increase the detection distance (14mm) of the magnetic angle sensing element 21 to that of the conventional technology (6mm). Therefore, assuming that the length to be detected is 6 times of 6mm, only three magnetic angle sensing elements 21 need to be connected in parallel for detection at the same time, thereby reducing the number of magnetic angle sensing elements 21 used.

然後,該訊號處理裝置3以該有效線段L2(即該有效偵測距離與相對應的該曲率值範圍)做為該磁性角度型感應元件21的該特性曲線並決定該磁性角度型感應元件21的該有效偵測距離以及相對應的該曲率值範圍,且該訊號處理裝置3根據該有效偵測距離和該曲率值範圍,藉由曲線擬合和線性迴歸分析決定該多項式方程式

Figure 02_image001
的m值以及β 0m的值。 Then, the signal processing device 3 uses the effective line segment L2 (ie, the effective detection distance and the corresponding curvature value range) as the characteristic curve of the magnetic angle sensing element 21 and determines the magnetic angle sensing element 21 the effective detection distance and the corresponding curvature value range, and the signal processing device 3 determines the polynomial equation by curve fitting and linear regression analysis according to the effective detection distance and the curvature value range
Figure 02_image001
The m value of , and the value of β 0m .

具體而言,如圖7(A)所示,假設該有效線段L2是由對應100個位置(即100個磁鐵M與該磁性角度型感應元件21的距離值,亦即該有效偵測距離) 的100筆曲率值(該曲率值範圍)構成,則在本實施例中,該訊號處理裝置3會先將該有效線段L2的X軸與Y軸的數據置換,使X軸改為呈現該等曲率值而Y軸呈現相對應的該等距離值,而使該有效線段L2變成置換後有效線段L2’,如圖7(B)所示。然後,該訊號處理裝置3決定最適合該置換後有效線段L2’的多項式方程式

Figure 02_image001
,例如採用多項式擬合(Polynomial Fitting),以一元m次多項式回歸方程式
Figure 02_image001
來擬合該置換後有效線段L2’,並以如下所示的矩陣解多項式回歸方程式:
Figure 02_image007
Specifically, as shown in FIG. 7(A) , it is assumed that the effective line segment L2 corresponds to 100 positions (that is, the distance values between 100 magnets M and the magnetic angle-type sensing element 21 , that is, the effective detection distance). In this embodiment, the signal processing device 3 will first replace the data of the X-axis and the Y-axis of the effective line segment L2, so that the X-axis changes to show these The curvature value and the Y-axis show the corresponding equidistant value, so that the effective line segment L2 becomes the post-replacement effective line segment L2', as shown in FIG. 7(B). Then, the signal processing device 3 determines the most suitable polynomial equation for the permuted effective line segment L2'
Figure 02_image001
, for example, using polynomial fitting (Polynomial Fitting), a univariate m-degree polynomial regression equation
Figure 02_image001
to fit the permuted effective line segment L2' and solve the polynomial regression equation with the matrix shown below:
Figure 02_image007

其中i=1,2,3…n,y 1~y n代表該100個距離值,x 1~x n代表該100個曲率值,β 0m是係數,且由於每個該磁性角度型感應元件21的特性不同,因此其係數β 0m亦不相同,所以藉由上述矩陣運算,可以找出該磁性角度型感應元件21的該等係數β 0m的值,以及決定要採用之擬合該置換後有效線段L2’的多項式方程式。例如,本實施例可以應用METLAB提供的polyfit指令找出上述一元m次多項式方程式的最佳參數以及最符合該置換後有效線段L2’的方程式。 where i=1,2,3...n, y 1 ~y n represent the 100 distance values, x 1 ~x n represent the 100 curvature values, β 0m are coefficients, and since each of the magnetic angles The characteristics of the magnetic angle-type induction element 21 are different, so the coefficients β 0m are also different, so through the above matrix operation, the values of the coefficients β 0m of the magnetic angle type induction element 21 can be found, and Determines the polynomial equation to be used to fit the permuted effective line segment L2'. For example, in this embodiment, the polyfit instruction provided by METLAB can be used to find out the optimal parameters of the above-mentioned one-variable m-th degree polynomial equation and the equation that best matches the effective line segment L2' after replacement.

舉例來說,藉由polyfit指令將上述已知的該100筆曲率值(x 1~x n)與相對應的該100筆距離值(y 1~y n)分別代入1元1次~1元8次共8個多項式方程式中,將求得這8個多項式方程式各自的最佳係數及其與該置換後有效線段L2’的擬合結果,且從這8個多項式方程式中發現一元6次多項式方程式擬合該置換後有效線段L2’的結果最佳時,該訊號處理裝置3則採用具有最佳擬合結果的一元6次多項式方程式,該方程式例如為y = 2.4431x 6- 8.2418x 5+ 15.967x 4- 10.349x 3+ 7.6091x 2+ 1.567x + 1.0009,並以該一元6次多項式方程式做為該數學模型;其中y代表磁鐵M與該磁性角度型感應元件21的距離值,x代表曲率值。然後,該訊號處理裝置3將該一元6次多項式方程式及該曲率值範圍寫入該處理單元22中做為該數學模型,即完成該校正程序。 For example, use the polyfit command to substitute the 100 known curvature values (x 1 ~x n ) and the corresponding 100 distance values (y 1 ~y n ) into 1 yuan 1 ~1 yuan respectively Among the 8 polynomial equations of the 8th degree, the respective optimal coefficients of these 8 polynomial equations and their fitting results with the effective line segment L2' after replacement will be obtained, and the univariate 6th degree polynomial will be found from these 8 polynomial equations. When the result of the equation fitting the effective line segment L2' after replacement is the best, the signal processing device 3 uses the unary 6th degree polynomial equation with the best fitting result, for example, the equation is y = 2.4431x 6 - 8.2418x 5 + 15.967x 4 - 10.349x 3 + 7.6091x 2 + 1.567x + 1.0009, and the univariate 6th degree polynomial equation is used as the mathematical model; y represents the distance between the magnet M and the magnetic angle sensing element 21, and x represents the Curvature value. Then, the signal processing device 3 writes the unary sixth-order polynomial equation and the curvature value range into the processing unit 22 as the mathematical model, and the calibration procedure is completed.

藉此,當該磁性線性位置感應器2實際應用於例如圖2所示的氣缸1時,該處理單元22接收到該磁性角度型感應元件21傳來之類比的該正弦訊號和該餘弦訊號時,該處理單元22將該正弦訊號和該餘弦訊號數位化為一正弦訊號值和一餘弦訊號值,且將該正弦訊號值減去該第一預設值以及將該餘弦訊號值減去該第二預設值後,對減去該第一預設值的該正弦訊訊號值和減去該第二預設值的該餘弦訊號值進行反正切函數(ARCTAN)的二階導數(atan2)運算,即atan2(減去該第一預設值的該正弦訊號值/減去該第二預設值的該餘弦訊號值),以獲得一曲率值;然後,該處理單元22判斷該曲率值是在該曲率值範圍內時,將該曲率值代入該數學模型中,即可藉由該一元6次多項式方程式求得一距離值,該距離值即代表該磁性角度型感應元件21與該磁鐵M的一相對距離;然後,該處理單元22可以直接輸出該距離值供後端應用,或者將該距離值轉成相對應的一類比訊號,例如類比電壓(比如1~5V其中的一電壓值)或類比電流(比如4~20mA其中的一電流值)再輸出給後端應用。Therefore, when the magnetic linear position sensor 2 is actually applied to the cylinder 1 shown in FIG. 2 , the processing unit 22 receives the analogous sine signal and the cosine signal from the magnetic angle sensing element 21 . , the processing unit 22 digitizes the sine signal and the cosine signal into a sine signal value and a cosine signal value, and subtracts the first preset value from the sine signal value and subtracts the first predetermined value from the cosine signal value. After two preset values, the second derivative (atan2) of the arc tangent function (ARCTAN) is performed on the sine signal value minus the first preset value and the cosine signal value minus the second preset value, That is, atan2 (subtract the sine signal value of the first preset value/subtract the cosine signal value of the second preset value) to obtain a curvature value; then, the processing unit 22 determines whether the curvature value is in When the curvature value is within the range, the curvature value is substituted into the mathematical model, and a distance value can be obtained by the univariate sixth-order polynomial equation, and the distance value represents the distance between the magnetic angle sensing element 21 and the magnet M. A relative distance; then, the processing unit 22 can directly output the distance value for back-end application, or convert the distance value into a corresponding analog signal, such as an analog voltage (such as a voltage value in 1~5V) or The analog current (such as a current value of 4~20mA) is output to the back-end application.

綜上所述,上述實施例藉由該處理單元中的該數學模型擬合該磁性角度型感應元件21的特性曲線,該處理單元只需將該磁性角度型感應元件21傳來的該正弦訊號和該餘弦訊號數位化後,對減去第一預設值的該正弦訊號值和減去第二預設值的該餘弦訊號值進行atan2(減去該第一預設值的該正弦訊號值/減去該第二預設值的該餘弦訊號值)運算,獲得對應的一曲率值後,將該曲率值輸入計算距離的該數學模型,即可透過簡單的一元m次多項式方程式快速求得該磁性角度型感應元件21與該磁鐵M的一相對距離;並且,該數學模型所擬合的該特性曲線決定該磁性角度型感應元件21的一有效偵測距離以及相對應的一曲率值範圍,而本實施例在校正程序中,藉由將該磁性角度型感應元件21感應獲得的該等正弦訊號值和該等餘弦訊號適當平移後再對其進行反正切函數(ARCTAN)的二階導數(atan2)運算,能使該有效偵測距離增長,而達到減少磁性角度型感應元件21的使用數量並使該磁性線性位置感應器2的偵測距離變長的功效與目的。To sum up, the above-mentioned embodiment uses the mathematical model in the processing unit to fit the characteristic curve of the magnetic angle sensing element 21 , and the processing unit only needs to transmit the sinusoidal signal from the magnetic angle sensing element 21 After digitizing with the cosine signal, atan2 is performed on the sine signal value minus the first preset value and the cosine signal value minus the second preset value (the sine signal value minus the first preset value) /Subtract the cosine signal value of the second default value) operation, after obtaining a corresponding curvature value, input the curvature value into the mathematical model for calculating distance, and then quickly obtain through a simple one-variable m-th degree polynomial equation A relative distance between the magnetic angle sensing element 21 and the magnet M; and the characteristic curve fitted by the mathematical model determines an effective detection distance of the magnetic angle sensing element 21 and a corresponding curvature value range , and in the calibration procedure of this embodiment, the sine signal values and the cosine signals obtained by the induction of the magnetic angle sensing element 21 are appropriately shifted and then the second derivative of the arc tangent function (ARCTAN) is performed on them ( atan2) operation can increase the effective detection distance, thereby reducing the number of magnetic angle sensing elements 21 used and making the detection distance of the magnetic linear position sensor 2 longer.

惟以上所述者,僅為本發明之實施例而已,當不能以此限定本發明實施之範圍,凡是依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。However, the above are only examples of the present invention, and should not limit the scope of the present invention. Any simple equivalent changes and modifications made according to the scope of the application for patent of the present invention and the content of the patent specification are still within the scope of the present invention. within the scope of the invention patent.

1:氣缸 2:磁性線性位置感應器 21:磁性角度型感應元件 211、212:磁阻電橋 22:處理單元 3:訊號處理裝置 M:磁鐵(活塞) P2:直線行程 SIN:正弦波訊號 COS:餘弦波訊號 sin:數位化正弦波訊號 cos:數位化餘弦波訊號 sin’:平移後數位化正弦波訊號 cos’:平移後數位化餘弦波訊號 C2:曲率曲線 L2:有效線段 L2’:置換後有效線段1: Cylinder 2: Magnetic Linear Position Sensor 21: Magnetic angle sensing element 211, 212: Magnetoresistive bridge 22: Processing unit 3: Signal processing device M: Magnet (Piston) P2: Linear stroke SIN: Sine wave signal COS: cosine wave signal sin: digitized sine wave signal cos: digitized cosine wave signal sin': digitized sine wave signal after translation cos': digitized cosine wave signal after translation C2: Curvature Curve L2: valid line segment L2': Effective line segment after replacement

本發明之其他的特徵及功效,將於參照圖式的實施方式中清楚地顯示,其中: 圖1說明現有獲得磁性角度型感應元件的偵測距離的一種方法; 圖2說明本發明磁性線性位置感應器的一實施例包含的元件及其應用例; 圖3是本實施例的磁性角度型感應元件包含的細部電路示意圖; 圖4是經由本實施例的處理單元數位化後的數位化正弦波訊號sin和數位化餘弦波訊號cos的波形示意圖; 圖5說明將圖4的數位化正弦波訊號sin和數位化餘弦波訊號cos分別向下平移一第一預設值和一第二預設值; 圖6說明對圖5所示的正弦波訊號sin’和餘弦波訊號cos’進行反正切函數(ARCTAN)的二階導數(atan2)運算以獲得相對應的複數曲率值,該等曲率值構成一曲率曲線C2;及 圖7說明將圖6所示的曲率曲線C2之有效線段L2的X軸數據與Y軸數據置換,而變成置換後有效線段L2’。 Other features and effects of the present invention will be clearly shown in the embodiments with reference to the drawings, wherein: FIG. 1 illustrates a method for obtaining the detection distance of the magnetic angle sensing element in the prior art; FIG. 2 illustrates the elements included in an embodiment of the magnetic linear position sensor of the present invention and an application example thereof; 3 is a schematic diagram of a detailed circuit included in the magnetic angle sensing element of the present embodiment; 4 is a schematic diagram of waveforms of the digitized sine wave signal sin and the digitized cosine wave signal cos after being digitized by the processing unit of the present embodiment; 5 illustrates that the digitized sine wave signal sin and the digitized cosine wave signal cos of FIG. 4 are shifted downward by a first preset value and a second preset value, respectively; FIG. 6 illustrates the operation of the second derivative (atan2) of the arc tangent function (ARCTAN) on the sine wave signal sin' and the cosine wave signal cos' shown in FIG. 5 to obtain corresponding complex curvature values, which constitute a curvature curve C2; and Fig. 7 illustrates that the X-axis data and the Y-axis data of the effective line segment L2 of the curvature curve C2 shown in Fig. 6 are replaced to become the post-replacement effective line segment L2'.

1:氣缸 1: Cylinder

2:磁性線性位置感應器 2: Magnetic Linear Position Sensor

21:磁性角度型感應元件 21: Magnetic angle sensing element

22:處理單元 22: Processing unit

3:訊號處理裝置 3: Signal processing device

M:磁鐵(活塞) M: Magnet (Piston)

P2:直線行程 P2: Linear stroke

Claims (7)

一種磁性線性位置感應器,用以偵測沿一直線行程往復移動的一磁鐵的位置,並包括: 一磁性角度型感應元件,設於該直線行程的一側以感應該磁鐵的磁場並輸出一正弦訊號和一餘弦訊號;及 一處理單元,與該磁性角度型感應元件電連接,以接收該正弦訊號和該餘弦訊號,並將該正弦訊號和該餘弦訊號數位化為一正弦訊號值和一餘弦訊號值,且對減去一第一預設值的該正弦訊號值和減去一第二預設值的該餘弦訊號值進行反正切函數的二階導數運算,即atan2(減去該第一預設值的該正弦訊號值/減去該第二預設值的該餘弦訊號值),以獲得一曲率值;該處理單元將該曲率值輸入其中的一與該磁性角度型感應元件特性相關的數學模型,以求得該磁性角度型感應元件與該磁鐵的一相對距離;該數學模型是由一多項式方程式
Figure 03_image001
及一曲率值範圍建構以擬合該磁性角度型感應元件的一特性曲線,其中i=1,2,3…n,y i代表該相對距離,xi代表該曲率值,β 0m是該磁性角度型感應元件的係數,該曲率值範圍的最小值和最大值是該特性曲線兩端的曲率值。
A magnetic linear position sensor is used to detect the position of a magnet that reciprocates along a linear stroke, and includes: a magnetic angle type induction element arranged on one side of the linear stroke to sense the magnetic field of the magnet and output a sine signal and a cosine signal; and a processing unit electrically connected with the magnetic angle-type sensing element to receive the sine signal and the cosine signal, and digitize the sine signal and the cosine signal into a sine signal value and a cosine signal value, and the second derivative operation of the arc tangent function is performed on the sine signal value minus a first preset value and the cosine signal value minus a second preset value, namely atan2 (minus the first preset value). Set the sine signal value of the value/subtract the cosine signal value of the second default value) to obtain a curvature value; the processing unit inputs the curvature value into one of the parameters related to the characteristics of the magnetic angle type inductive element. Mathematical model to obtain a relative distance between the magnetic angle sensing element and the magnet; the mathematical model is composed of a polynomial equation
Figure 03_image001
and a curvature value range is constructed to fit a characteristic curve of the magnetic angle sensing element, where i=1, 2, 3...n, yi represents the relative distance, xi represents the curvature value, and β 0m are The coefficient of the magnetic angle type induction element, the minimum value and the maximum value of the curvature value range are the curvature values at both ends of the characteristic curve.
如請求項1所述的磁性線性位置感應器,其中該數學模型是於該磁性線性位置感應器的一校正程序中建立,在該校正程序中,該磁鐵沿該直線行程移動,一訊號處理裝置令該處理單元以一取樣頻率要求該磁性角度型感應元件回傳當下產生的該正弦訊號和該餘弦訊號直到該磁鐵走完該直線行程;該處理單元將該等正弦訊號和該等餘弦訊號數位化後輸出至該訊號處理裝置,該訊號處理裝置根據該直線行程的長度和該取樣頻率,獲得該磁鐵在該直線行程中每一個取樣點的位置與數位化的該等正弦訊號值和該等餘弦訊號值的對應關係,該訊號處理裝置將該等正弦訊號值減去一第一預設值,並將該等餘弦訊號值減去一第二預設值,該訊號處理裝置對減去該第一預設值的該等正弦訊號值和減去該第二預設值的該等餘弦訊號值進行反正切函數的二階導數(atan2)運算,即atan2(減去該第一預設值的該正弦訊號值/減去該第二預設值的該餘弦訊號值),而獲得相對應的複數曲率值,該等曲率值構成一曲率曲線,且該訊號處理裝置以該曲率曲線中的一有效線段做為該磁性角度型感應元件的該特性曲線,並根據該特性曲線決定該磁性角度型感應元件的一有效偵測距離以及相對應的該曲率值範圍,且藉由曲線擬合和線性迴歸分析決定該多項式方程式
Figure 03_image001
的m值以及β 0m的值,且該訊號處理裝置將該多項式方程式及該曲率值範圍寫入該處理單元中做為該特性曲線的該數學模型。
The magnetic linear position sensor of claim 1, wherein the mathematical model is established in a calibration procedure of the magnetic linear position sensor, in which the magnet moves along the linear stroke, a signal processing device Make the processing unit request the magnetic angle-type induction element to return the sine signal and the cosine signal currently generated at a sampling frequency until the magnet completes the linear travel; the processing unit digitizes the sine signal and the cosine signal The signal processing device obtains the position of each sampling point of the magnet in the linear travel and the digitized sinusoidal signal values and the The corresponding relationship of cosine signal values, the signal processing device subtracts a first predetermined value from the sine signal values, and subtracts a second predetermined value from the cosine signal values, the signal processing device subtracts the The sine signal values of the first preset value and the cosine signal values minus the second preset value are subjected to the second derivative (atan2) operation of the arc tangent function, that is, atan2 (subtracting the first preset value) the sine signal value/subtract the cosine signal value of the second preset value) to obtain a corresponding complex curvature value, the curvature values constitute a curvature curve, and the signal processing device uses one of the curvature curves The effective line segment is used as the characteristic curve of the magnetic angle sensing element, and an effective detection distance of the magnetic angle sensing element and the corresponding curvature value range are determined according to the characteristic curve, and the curve fitting and linear Regression analysis determines the polynomial equation
Figure 03_image001
and the signal processing device writes the polynomial equation and the curvature value range into the processing unit as the mathematical model of the characteristic curve.
如請求項2所述的磁性線性位置感應器,其中該第一預設值是該等正弦訊號值中的最大值與最小值之合的二之一;該第二預設值是該等餘弦訊號值中的最大值與最小值之合的二之一。The magnetic linear position sensor as claimed in claim 2, wherein the first predetermined value is one of a maximum value and a minimum value among the sinusoidal signal values; the second predetermined value is the cosine signal values One of the sum of the maximum value and the minimum value in the signal value. 如請求項1至3其中任一項所述的磁性線性位置感應器,其中m為6。The magnetic linear position sensor of any one of claims 1 to 3, wherein m is six. 如請求項1至3其中任一項所述的磁性線性位置感應器,其中該磁性角度型感應元件具有兩個相差45°的磁阻電橋,其中一磁阻電橋感應該磁鐵的磁場並產生一正弦波訊號,其中另一磁阻電橋感應該磁鐵的磁場並產生一與該正弦波訊號相位差45°的餘弦波訊號。The magnetic linear position sensor as claimed in any one of claims 1 to 3, wherein the magnetic angle-type sensing element has two magnetoresistive bridges that differ by 45°, wherein one magnetoresistive bridge induces the magnetic field of the magnet and A sine wave signal is generated, wherein another magnetoresistive bridge induces the magnetic field of the magnet and generates a cosine wave signal with a phase difference of 45° from the sine wave signal. 如請求項1至3其中任一項所述的磁性線性位置感應器,其中該曲率值範圍是-π~π。The magnetic linear position sensor according to any one of claims 1 to 3, wherein the curvature value ranges from -π to π. 如請求項1至3其中任一項所述的磁性線性位置感應器,其中,該處理單元判斷該曲率值在該曲率值範圍內,才將該曲率值輸入該數學模型。The magnetic linear position sensor according to any one of claims 1 to 3, wherein the processing unit determines that the curvature value is within the curvature value range, and then inputs the curvature value into the mathematical model.
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JP2003344108A (en) * 2002-05-29 2003-12-03 Mitsubishi Electric Corp Position detecting device, its position detecting circuit and its inspection method
WO2017065307A1 (en) * 2015-10-16 2017-04-20 日本電産株式会社 Linear motion and rotation detector
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