TWI753299B - Optical filters and their uses - Google Patents
Optical filters and their uses Download PDFInfo
- Publication number
- TWI753299B TWI753299B TW108132865A TW108132865A TWI753299B TW I753299 B TWI753299 B TW I753299B TW 108132865 A TW108132865 A TW 108132865A TW 108132865 A TW108132865 A TW 108132865A TW I753299 B TWI753299 B TW I753299B
- Authority
- TW
- Taiwan
- Prior art keywords
- optical filter
- wavelength
- resin
- transmittance
- group
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 218
- 238000002834 transmittance Methods 0.000 claims abstract description 93
- 239000000463 material Substances 0.000 claims description 124
- 239000011347 resin Substances 0.000 claims description 94
- 229920005989 resin Polymers 0.000 claims description 94
- 238000010521 absorption reaction Methods 0.000 claims description 72
- 238000003384 imaging method Methods 0.000 claims description 57
- 239000006096 absorbing agent Substances 0.000 claims description 52
- 239000000758 substrate Substances 0.000 claims description 24
- JFNLZVQOOSMTJK-KNVOCYPGSA-N norbornene Chemical compound C1[C@@H]2CC[C@H]1C=C2 JFNLZVQOOSMTJK-KNVOCYPGSA-N 0.000 claims description 12
- 229920001721 polyimide Polymers 0.000 claims description 11
- 239000004721 Polyphenylene oxide Substances 0.000 claims description 9
- 229920000570 polyether Polymers 0.000 claims description 9
- 239000009719 polyimide resin Substances 0.000 claims description 8
- 238000010030 laminating Methods 0.000 claims description 5
- 239000004642 Polyimide Substances 0.000 claims description 3
- 229920001225 polyester resin Polymers 0.000 claims description 3
- 239000003822 epoxy resin Substances 0.000 claims description 2
- 229920003050 poly-cycloolefin Polymers 0.000 claims description 2
- 229920006122 polyamide resin Polymers 0.000 claims description 2
- 229920005668 polycarbonate resin Polymers 0.000 claims description 2
- 239000004431 polycarbonate resin Substances 0.000 claims description 2
- 229920000647 polyepoxide Polymers 0.000 claims description 2
- 229920005672 polyolefin resin Polymers 0.000 claims description 2
- 229920005990 polystyrene resin Polymers 0.000 claims description 2
- 229920005749 polyurethane resin Polymers 0.000 claims description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims 1
- 125000004432 carbon atom Chemical group C* 0.000 description 111
- 239000010408 film Substances 0.000 description 103
- 230000035945 sensitivity Effects 0.000 description 102
- 239000000975 dye Substances 0.000 description 70
- 238000002835 absorbance Methods 0.000 description 65
- 238000013461 design Methods 0.000 description 40
- 150000001875 compounds Chemical class 0.000 description 35
- 238000011156 evaluation Methods 0.000 description 32
- 238000000034 method Methods 0.000 description 30
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 29
- 125000000962 organic group Chemical group 0.000 description 29
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 28
- 239000011521 glass Substances 0.000 description 28
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 28
- 239000000243 solution Substances 0.000 description 28
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 24
- -1 propyleneoxy, cyclohexyloxy Chemical group 0.000 description 20
- 150000002500 ions Chemical class 0.000 description 18
- 239000000203 mixture Substances 0.000 description 17
- 125000002723 alicyclic group Chemical group 0.000 description 16
- 150000002430 hydrocarbons Chemical group 0.000 description 16
- 239000000126 substance Substances 0.000 description 15
- 230000005540 biological transmission Effects 0.000 description 14
- 230000000694 effects Effects 0.000 description 14
- 239000000377 silicon dioxide Substances 0.000 description 14
- 125000001424 substituent group Chemical group 0.000 description 14
- 229910004298 SiO 2 Inorganic materials 0.000 description 13
- 229910010413 TiO 2 Inorganic materials 0.000 description 13
- 125000002029 aromatic hydrocarbon group Chemical group 0.000 description 13
- 239000003795 chemical substances by application Substances 0.000 description 13
- 125000004430 oxygen atom Chemical group O* 0.000 description 13
- 239000000047 product Substances 0.000 description 13
- 235000012239 silicon dioxide Nutrition 0.000 description 13
- 239000004408 titanium dioxide Substances 0.000 description 13
- 238000007738 vacuum evaporation Methods 0.000 description 13
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 12
- 238000001704 evaporation Methods 0.000 description 12
- 239000007787 solid Substances 0.000 description 12
- IHXWECHPYNPJRR-UHFFFAOYSA-N 3-hydroxycyclobut-2-en-1-one Chemical compound OC1=CC(=O)C1 IHXWECHPYNPJRR-UHFFFAOYSA-N 0.000 description 11
- 239000011248 coating agent Substances 0.000 description 11
- 150000004662 dithiols Chemical class 0.000 description 11
- 230000008020 evaporation Effects 0.000 description 11
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 11
- 238000005259 measurement Methods 0.000 description 11
- 125000004433 nitrogen atom Chemical group N* 0.000 description 11
- QGKMIGUHVLGJBR-UHFFFAOYSA-M (4z)-1-(3-methylbutyl)-4-[[1-(3-methylbutyl)quinolin-1-ium-4-yl]methylidene]quinoline;iodide Chemical compound [I-].C12=CC=CC=C2N(CCC(C)C)C=CC1=CC1=CC=[N+](CCC(C)C)C2=CC=CC=C12 QGKMIGUHVLGJBR-UHFFFAOYSA-M 0.000 description 10
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 10
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 10
- 238000000465 moulding Methods 0.000 description 10
- 239000000049 pigment Substances 0.000 description 10
- 125000000217 alkyl group Chemical group 0.000 description 9
- 238000010586 diagram Methods 0.000 description 9
- 230000009477 glass transition Effects 0.000 description 9
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 9
- 229910052757 nitrogen Inorganic materials 0.000 description 9
- 239000002904 solvent Substances 0.000 description 9
- 239000002250 absorbent Substances 0.000 description 8
- 230000002745 absorbent Effects 0.000 description 8
- 125000003545 alkoxy group Chemical group 0.000 description 8
- 238000005266 casting Methods 0.000 description 8
- 229910052801 chlorine Inorganic materials 0.000 description 8
- 125000005843 halogen group Chemical group 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000012788 optical film Substances 0.000 description 8
- 239000003505 polymerization initiator Substances 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- 150000001450 anions Chemical class 0.000 description 7
- 125000004429 atom Chemical group 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 7
- 125000001309 chloro group Chemical group Cl* 0.000 description 7
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 7
- 229910052731 fluorine Inorganic materials 0.000 description 7
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 7
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 7
- 229920000642 polymer Polymers 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- SIKJAQJRHWYJAI-UHFFFAOYSA-N Indole Chemical compound C1=CC=C2NC=CC2=C1 SIKJAQJRHWYJAI-UHFFFAOYSA-N 0.000 description 6
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 6
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 125000001153 fluoro group Chemical group F* 0.000 description 6
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 6
- 239000011342 resin composition Substances 0.000 description 6
- 125000004453 alkoxycarbonyl group Chemical group 0.000 description 5
- 125000003710 aryl alkyl group Chemical group 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 125000004093 cyano group Chemical group *C#N 0.000 description 5
- 238000001514 detection method Methods 0.000 description 5
- 150000008282 halocarbons Chemical group 0.000 description 5
- 230000001771 impaired effect Effects 0.000 description 5
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 5
- 239000005341 toughened glass Substances 0.000 description 5
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 4
- 239000002216 antistatic agent Substances 0.000 description 4
- 125000003118 aryl group Chemical group 0.000 description 4
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 4
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 125000000753 cycloalkyl group Chemical group 0.000 description 4
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 4
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 4
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 4
- 239000006097 ultraviolet radiation absorber Substances 0.000 description 4
- 230000000007 visual effect Effects 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 3
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical group [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 3
- 125000002252 acyl group Chemical group 0.000 description 3
- 125000001931 aliphatic group Chemical group 0.000 description 3
- 125000003342 alkenyl group Chemical group 0.000 description 3
- 125000002877 alkyl aryl group Chemical group 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 3
- 239000012964 benzotriazole Substances 0.000 description 3
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 3
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 150000001721 carbon Chemical group 0.000 description 3
- 238000012937 correction Methods 0.000 description 3
- 238000001723 curing Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 239000000706 filtrate Substances 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 125000000623 heterocyclic group Chemical group 0.000 description 3
- PZOUSPYUWWUPPK-UHFFFAOYSA-N indole Natural products CC1=CC=CC2=C1C=CN2 PZOUSPYUWWUPPK-UHFFFAOYSA-N 0.000 description 3
- RKJUIXBNRJVNHR-UHFFFAOYSA-N indolenine Natural products C1=CC=C2CC=NC2=C1 RKJUIXBNRJVNHR-UHFFFAOYSA-N 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 3
- 239000002530 phenolic antioxidant Substances 0.000 description 3
- 239000001007 phthalocyanine dye Substances 0.000 description 3
- 239000004417 polycarbonate Substances 0.000 description 3
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910052717 sulfur Inorganic materials 0.000 description 3
- 125000004434 sulfur atom Chemical group 0.000 description 3
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 3
- NAWXUBYGYWOOIX-SFHVURJKSA-N (2s)-2-[[4-[2-(2,4-diaminoquinazolin-6-yl)ethyl]benzoyl]amino]-4-methylidenepentanedioic acid Chemical compound C1=CC2=NC(N)=NC(N)=C2C=C1CCC1=CC=C(C(=O)N[C@@H](CC(=C)C(O)=O)C(O)=O)C=C1 NAWXUBYGYWOOIX-SFHVURJKSA-N 0.000 description 2
- MYRTYDVEIRVNKP-UHFFFAOYSA-N 1,2-Divinylbenzene Chemical compound C=CC1=CC=CC=C1C=C MYRTYDVEIRVNKP-UHFFFAOYSA-N 0.000 description 2
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 2
- 0 CC(CC(*)C=C1[*+])=C1c1nc(-c2c(*)cc(C)cc2*)nc(-c(c(O*)c2*)cc(*)c2O*C=*)n1 Chemical compound CC(CC(*)C=C1[*+])=C1c1nc(-c2c(*)cc(C)cc2*)nc(-c(c(O*)c2*)cc(*)c2O*C=*)n1 0.000 description 2
- 241000196324 Embryophyta Species 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 125000005133 alkynyloxy group Chemical group 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 description 2
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 2
- 239000003963 antioxidant agent Substances 0.000 description 2
- 239000005345 chemically strengthened glass Substances 0.000 description 2
- 125000000392 cycloalkenyl group Chemical group 0.000 description 2
- DMEGYFMYUHOHGS-UHFFFAOYSA-N cycloheptane Chemical group C1CCCCCC1 DMEGYFMYUHOHGS-UHFFFAOYSA-N 0.000 description 2
- 125000000596 cyclohexenyl group Chemical group C1(=CCCCC1)* 0.000 description 2
- LPIQUOYDBNQMRZ-UHFFFAOYSA-N cyclopentene Chemical group C1CC=CC1 LPIQUOYDBNQMRZ-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 2
- 229910003437 indium oxide Inorganic materials 0.000 description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
- 239000003999 initiator Substances 0.000 description 2
- 229910052740 iodine Inorganic materials 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 2
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- RHFUXPCCELGMFC-UHFFFAOYSA-N n-(6-cyano-3-hydroxy-2,2-dimethyl-3,4-dihydrochromen-4-yl)-n-phenylmethoxyacetamide Chemical compound OC1C(C)(C)OC2=CC=C(C#N)C=C2C1N(C(=O)C)OCC1=CC=CC=C1 RHFUXPCCELGMFC-UHFFFAOYSA-N 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- 230000008635 plant growth Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 2
- 150000003254 radicals Chemical class 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000012827 research and development Methods 0.000 description 2
- 239000013557 residual solvent Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 125000000020 sulfo group Chemical group O=S(=O)([*])O[H] 0.000 description 2
- 238000012719 thermal polymerization Methods 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- QNODIIQQMGDSEF-UHFFFAOYSA-N (1-hydroxycyclohexyl)-phenylmethanone Chemical compound C=1C=CC=CC=1C(=O)C1(O)CCCCC1 QNODIIQQMGDSEF-UHFFFAOYSA-N 0.000 description 1
- RHUYHJGZWVXEHW-UHFFFAOYSA-N 1,1-Dimethyhydrazine Chemical compound CN(C)N RHUYHJGZWVXEHW-UHFFFAOYSA-N 0.000 description 1
- CYIGRWUIQAVBFG-UHFFFAOYSA-N 1,2-bis(2-ethenoxyethoxy)ethane Chemical compound C=COCCOCCOCCOC=C CYIGRWUIQAVBFG-UHFFFAOYSA-N 0.000 description 1
- ZXHDVRATSGZISC-UHFFFAOYSA-N 1,2-bis(ethenoxy)ethane Chemical compound C=COCCOC=C ZXHDVRATSGZISC-UHFFFAOYSA-N 0.000 description 1
- BPXVHIRIPLPOPT-UHFFFAOYSA-N 1,3,5-tris(2-hydroxyethyl)-1,3,5-triazinane-2,4,6-trione Chemical compound OCCN1C(=O)N(CCO)C(=O)N(CCO)C1=O BPXVHIRIPLPOPT-UHFFFAOYSA-N 0.000 description 1
- SAMJGBVVQUEMGC-UHFFFAOYSA-N 1-ethenoxy-2-(2-ethenoxyethoxy)ethane Chemical compound C=COCCOCCOC=C SAMJGBVVQUEMGC-UHFFFAOYSA-N 0.000 description 1
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 1
- BNBRIFIJRKJGEI-UHFFFAOYSA-N 2,6-difluorobenzonitrile Chemical compound FC1=CC=CC(F)=C1C#N BNBRIFIJRKJGEI-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- BCHZICNRHXRCHY-UHFFFAOYSA-N 2h-oxazine Chemical compound N1OC=CC=C1 BCHZICNRHXRCHY-UHFFFAOYSA-N 0.000 description 1
- 101710171187 30S ribosomal protein S10 Proteins 0.000 description 1
- 101710171221 30S ribosomal protein S11 Proteins 0.000 description 1
- 101710171220 30S ribosomal protein S12 Proteins 0.000 description 1
- 108050001922 30S ribosomal protein S17 Proteins 0.000 description 1
- 101710192510 30S ribosomal protein S7 Proteins 0.000 description 1
- 101710192522 30S ribosomal protein S8 Proteins 0.000 description 1
- 101710192523 30S ribosomal protein S9 Proteins 0.000 description 1
- LJMPOXUWPWEILS-UHFFFAOYSA-N 3a,4,4a,7a,8,8a-hexahydrofuro[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1C2C(=O)OC(=O)C2CC2C(=O)OC(=O)C21 LJMPOXUWPWEILS-UHFFFAOYSA-N 0.000 description 1
- HESXPOICBNWMPI-UHFFFAOYSA-N 4-[2-[4-[2-(4-aminophenyl)propan-2-yl]phenyl]propan-2-yl]aniline Chemical compound C=1C=C(C(C)(C)C=2C=CC(N)=CC=2)C=CC=1C(C)(C)C1=CC=C(N)C=C1 HESXPOICBNWMPI-UHFFFAOYSA-N 0.000 description 1
- HYDATEKARGDBKU-UHFFFAOYSA-N 4-[4-[4-(4-aminophenoxy)phenyl]phenoxy]aniline Chemical group C1=CC(N)=CC=C1OC1=CC=C(C=2C=CC(OC=3C=CC(N)=CC=3)=CC=2)C=C1 HYDATEKARGDBKU-UHFFFAOYSA-N 0.000 description 1
- YWFPGFJLYRKYJZ-UHFFFAOYSA-N 9,9-bis(4-hydroxyphenyl)fluorene Chemical compound C1=CC(O)=CC=C1C1(C=2C=CC(O)=CC=2)C2=CC=CC=C2C2=CC=CC=C21 YWFPGFJLYRKYJZ-UHFFFAOYSA-N 0.000 description 1
- CYJHHPHKJKGGPG-UHFFFAOYSA-N BC(C)c(c(F)c(c(F)c1F)F)c1F Chemical compound BC(C)c(c(F)c(c(F)c1F)F)c1F CYJHHPHKJKGGPG-UHFFFAOYSA-N 0.000 description 1
- 101000812304 Bacillus subtilis (strain 168) 30S ribosomal protein S16 Proteins 0.000 description 1
- 101000622947 Bacillus subtilis (strain 168) 30S ribosomal protein S3 Proteins 0.000 description 1
- 101001098402 Bacillus subtilis (strain 168) 30S ribosomal protein S4 Proteins 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 1
- NNKKAZXOECERSV-UHFFFAOYSA-N CCCNC(C(F)(F)F)=O Chemical compound CCCNC(C(F)(F)F)=O NNKKAZXOECERSV-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 241001626730 Exyrias Species 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 101000675258 Geobacillus stearothermophilus 30S ribosomal protein S19 Proteins 0.000 description 1
- 101000827984 Geobacillus stearothermophilus 30S ribosomal protein S5 Proteins 0.000 description 1
- 102000001554 Hemoglobins Human genes 0.000 description 1
- 108010054147 Hemoglobins Proteins 0.000 description 1
- 241000282412 Homo Species 0.000 description 1
- 101000970017 Homo sapiens NEDD8 ultimate buster 1 Proteins 0.000 description 1
- 229920004142 LEXAN™ Polymers 0.000 description 1
- 239000004418 Lexan Substances 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- QXQHEUBTDUAPJG-UHFFFAOYSA-N O1CC1.[N+](#[C-])N1C(=O)NC=2NC(=O)NC2C1=O Chemical compound O1CC1.[N+](#[C-])N1C(=O)NC=2NC(=O)NC2C1=O QXQHEUBTDUAPJG-UHFFFAOYSA-N 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- ZCQWOFVYLHDMMC-UHFFFAOYSA-N Oxazole Chemical compound C1=COC=N1 ZCQWOFVYLHDMMC-UHFFFAOYSA-N 0.000 description 1
- WYNCHZVNFNFDNH-UHFFFAOYSA-N Oxazolidine Chemical compound C1COCN1 WYNCHZVNFNFDNH-UHFFFAOYSA-N 0.000 description 1
- 206010034960 Photophobia Diseases 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 229920000297 Rayon Polymers 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical group [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- 238000003848 UV Light-Curing Methods 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- BDAHDQGVJHDLHQ-UHFFFAOYSA-N [2-(1-hydroxycyclohexyl)phenyl]-phenylmethanone Chemical compound C=1C=CC=C(C(=O)C=2C=CC=CC=2)C=1C1(O)CCCCC1 BDAHDQGVJHDLHQ-UHFFFAOYSA-N 0.000 description 1
- BGYHLZZASRKEJE-UHFFFAOYSA-N [3-[3-(3,5-ditert-butyl-4-hydroxyphenyl)propanoyloxy]-2,2-bis[3-(3,5-ditert-butyl-4-hydroxyphenyl)propanoyloxymethyl]propyl] 3-(3,5-ditert-butyl-4-hydroxyphenyl)propanoate Chemical compound CC(C)(C)C1=C(O)C(C(C)(C)C)=CC(CCC(=O)OCC(COC(=O)CCC=2C=C(C(O)=C(C=2)C(C)(C)C)C(C)(C)C)(COC(=O)CCC=2C=C(C(O)=C(C=2)C(C)(C)C)C(C)(C)C)COC(=O)CCC=2C=C(C(O)=C(C=2)C(C)(C)C)C(C)(C)C)=C1 BGYHLZZASRKEJE-UHFFFAOYSA-N 0.000 description 1
- RAOSIAYCXKBGFE-UHFFFAOYSA-K [Cu+3].[O-]P([O-])([O-])=O Chemical class [Cu+3].[O-]P([O-])([O-])=O RAOSIAYCXKBGFE-UHFFFAOYSA-K 0.000 description 1
- RUFZJUYWZZUTJE-UHFFFAOYSA-J [F-].[F-].[F-].[F-].F.F.[Na+].[Al+3] Chemical compound [F-].[F-].[F-].[F-].F.F.[Na+].[Al+3] RUFZJUYWZZUTJE-UHFFFAOYSA-J 0.000 description 1
- 125000000738 acetamido group Chemical group [H]C([H])([H])C(=O)N([H])[*] 0.000 description 1
- 125000002777 acetyl group Chemical group [H]C([H])([H])C(*)=O 0.000 description 1
- 125000004423 acyloxy group Chemical group 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000003302 alkenyloxy group Chemical group 0.000 description 1
- 125000004183 alkoxy alkyl group Chemical group 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 125000003368 amide group Chemical group 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 125000004104 aryloxy group Chemical group 0.000 description 1
- 125000003785 benzimidazolyl group Chemical group N1=C(NC2=C1C=CC=C2)* 0.000 description 1
- 125000003354 benzotriazolyl group Chemical group N1N=NC2=C1C=CC=C2* 0.000 description 1
- 125000004541 benzoxazolyl group Chemical group O1C(=NC2=C1C=CC=C2)* 0.000 description 1
- 125000000051 benzyloxy group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])O* 0.000 description 1
- 235000010290 biphenyl Nutrition 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- 125000002529 biphenylenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3C12)* 0.000 description 1
- 238000000071 blow moulding Methods 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- OCWYEMOEOGEQAN-UHFFFAOYSA-N bumetrizole Chemical compound CC(C)(C)C1=CC(C)=CC(N2N=C3C=C(Cl)C=CC3=N2)=C1O OCWYEMOEOGEQAN-UHFFFAOYSA-N 0.000 description 1
- 125000004106 butoxy group Chemical group [*]OC([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- 125000006309 butyl amino group Chemical group 0.000 description 1
- QHIWVLPBUQWDMQ-UHFFFAOYSA-N butyl prop-2-enoate;methyl 2-methylprop-2-enoate;prop-2-enoic acid Chemical compound OC(=O)C=C.COC(=O)C(C)=C.CCCCOC(=O)C=C QHIWVLPBUQWDMQ-UHFFFAOYSA-N 0.000 description 1
- 235000010354 butylated hydroxytoluene Nutrition 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000003727 cerebral blood flow Effects 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229930002875 chlorophyll Natural products 0.000 description 1
- 235000019804 chlorophyll Nutrition 0.000 description 1
- ATNHDLDRLWWWCB-AENOIHSZSA-M chlorophyll a Chemical compound C1([C@@H](C(=O)OC)C(=O)C2=C3C)=C2N2C3=CC(C(CC)=C3C)=[N+]4C3=CC3=C(C=C)C(C)=C5N3[Mg-2]42[N+]2=C1[C@@H](CCC(=O)OC\C=C(/C)CCC[C@H](C)CCC[C@H](C)CCCC(C)C)[C@H](C)C2=C5 ATNHDLDRLWWWCB-AENOIHSZSA-M 0.000 description 1
- 230000004456 color vision Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000003851 corona treatment Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 125000002993 cycloalkylene group Chemical group 0.000 description 1
- 125000001047 cyclobutenyl group Chemical group C1(=CCC1)* 0.000 description 1
- 125000001995 cyclobutyl group Chemical group [H]C1([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 1
- 125000004976 cyclobutylene group Chemical group 0.000 description 1
- 125000004956 cyclohexylene group Chemical group 0.000 description 1
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 1
- 125000004979 cyclopentylene group Chemical group 0.000 description 1
- 125000001559 cyclopropyl group Chemical group [H]C1([H])C([H])([H])C1([H])* 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- PFBUKDPBVNJDEW-UHFFFAOYSA-N dichlorocarbene Chemical group Cl[C]Cl PFBUKDPBVNJDEW-UHFFFAOYSA-N 0.000 description 1
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 1
- LTVOKYUPTHZZQH-UHFFFAOYSA-N difluoromethane Chemical group F[C]F LTVOKYUPTHZZQH-UHFFFAOYSA-N 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 125000002228 disulfide group Chemical group 0.000 description 1
- 125000004185 ester group Chemical group 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- UIWXSTHGICQLQT-UHFFFAOYSA-N ethenyl propanoate Chemical compound CCC(=O)OC=C UIWXSTHGICQLQT-UHFFFAOYSA-N 0.000 description 1
- 229940052303 ethers for general anesthesia Drugs 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 1
- 238000000799 fluorescence microscopy Methods 0.000 description 1
- DWYMPOCYEZONEA-UHFFFAOYSA-L fluoridophosphate Chemical compound [O-]P([O-])(F)=O DWYMPOCYEZONEA-UHFFFAOYSA-L 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- LWDCPOMFNRJKLX-UHFFFAOYSA-N formic acid;prop-2-enoic acid Chemical compound OC=O.OC(=O)C=C LWDCPOMFNRJKLX-UHFFFAOYSA-N 0.000 description 1
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 1
- 239000005400 gorilla glass Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- VHHHONWQHHHLTI-UHFFFAOYSA-N hexachloroethane Chemical group ClC(Cl)(Cl)C(Cl)(Cl)Cl VHHHONWQHHHLTI-UHFFFAOYSA-N 0.000 description 1
- 125000004836 hexamethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[*:1] 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-M hexanoate Chemical compound CCCCCC([O-])=O FUZZWVXGSFPDMH-UHFFFAOYSA-M 0.000 description 1
- 125000006038 hexenyl group Chemical group 0.000 description 1
- 239000005457 ice water Substances 0.000 description 1
- 125000002883 imidazolyl group Chemical group 0.000 description 1
- 125000001841 imino group Chemical group [H]N=* 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 125000003253 isopropoxy group Chemical group [H]C([H])([H])C([H])(O*)C([H])([H])[H] 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 239000005340 laminated glass Substances 0.000 description 1
- 208000013469 light sensitivity Diseases 0.000 description 1
- 239000004611 light stabiliser Substances 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- 125000004184 methoxymethyl group Chemical group [H]C([H])([H])OC([H])([H])* 0.000 description 1
- 125000003136 n-heptyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001280 n-hexyl group Chemical group C(CCCCC)* 0.000 description 1
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- 125000004957 naphthylene group Chemical group 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 125000003518 norbornenyl group Chemical group C12(C=CC(CC1)C2)* 0.000 description 1
- 150000007530 organic bases Chemical class 0.000 description 1
- WCPAKWJPBJAGKN-UHFFFAOYSA-N oxadiazole Chemical compound C1=CON=N1 WCPAKWJPBJAGKN-UHFFFAOYSA-N 0.000 description 1
- 125000001715 oxadiazolyl group Chemical group 0.000 description 1
- 125000002971 oxazolyl group Chemical group 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- RGSFGYAAUTVSQA-UHFFFAOYSA-N pentamethylene Chemical group C1CCCC1 RGSFGYAAUTVSQA-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 1
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000205 poly(isobutyl methacrylate) Polymers 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 125000001501 propionyl group Chemical group O=C([*])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 238000001226 reprecipitation Methods 0.000 description 1
- 230000003763 resistance to breakage Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- PWEBUXCTKOWPCW-UHFFFAOYSA-N squaric acid Chemical compound OC1=C(O)C(=O)C1=O PWEBUXCTKOWPCW-UHFFFAOYSA-N 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000006058 strengthened glass Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 125000000446 sulfanediyl group Chemical group *S* 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- 239000003017 thermal stabilizer Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 125000000101 thioether group Chemical group 0.000 description 1
- 125000001425 triazolyl group Chemical group 0.000 description 1
- BYMUNNMMXKDFEZ-UHFFFAOYSA-K trifluorolanthanum Chemical compound F[La](F)F BYMUNNMMXKDFEZ-UHFFFAOYSA-K 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- 125000003258 trimethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])[*:1] 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 150000003673 urethanes Chemical class 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B11/00—Filters or other obturators specially adapted for photographic purposes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B17/00—Details of cameras or camera bodies; Accessories therefor
- G03B17/02—Bodies
- G03B17/12—Bodies with means for supporting objectives, supplementary lenses, filters, masks, or turrets
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Optical Filters (AREA)
- Blocking Light For Cameras (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
本發明的課題在於提供一種光學濾波器,兼具近紅外線區域的入射角依存性低與紅色的透過率特性優異,且改善了重影。本發明的光學濾波器的特徵在於,滿足下述必要條件(A)~(D):(A)於波長430nm~580nm的範圍內,從垂直方向測定時的透過率的平均值為75%以上;(B)於波長800nm~1000nm的範圍內,從垂直方向測定時的透過率的平均值為10%以下;(C)於波長700nm~750nm的範圍內,從垂直方向測定時的透過率的平均值超過46%;(D)於波長560nm~800nm的範圍內,從垂直方向測定時的透過率為50%的最短波長的值(Ya)與從相對於垂直方向以30°的角度測定時的透過率為50%的最短波長的值(Yb)之差的絕對值小於15nm。 An object of the present invention is to provide an optical filter which has both low incident angle dependence in the near-infrared region and excellent red transmittance characteristics, and which improves ghosting. The optical filter of the present invention is characterized by satisfying the following requirements (A) to (D): (A) in the wavelength range of 430 nm to 580 nm, the average value of transmittance measured from the vertical direction is 75% or more ; (B) in the range of wavelength 800nm~1000nm, the average value of transmittance when measured from the vertical direction is less than 10%; (C) in the range of wavelength 700nm~750nm, the transmittance when measured from the vertical direction The average value exceeds 46%; (D) in the wavelength range of 560nm ~ 800nm, the value of the shortest wavelength with a transmittance of 50% when measured from the vertical direction (Ya) and when measured from an angle of 30° from the vertical direction The absolute value of the difference between the shortest wavelength values (Yb) with a transmittance of 50% is less than 15 nm.
Description
本發明是有關於一種光學濾波器及其用途。詳細而言,是有關於一種具有特定光學特性的光學濾波器(例如近紅外線截止濾波器)、以及使用該光學濾波器的固體攝像裝置及照相機模組。 The present invention relates to an optical filter and its use. Specifically, it relates to an optical filter having specific optical properties (eg, a near-infrared cut filter), and a solid-state imaging device and a camera module using the optical filter.
攝像機、數位靜物攝影機、帶照相機功能的行動電話等固體攝像裝置使用作為彩色圖像的固體攝像元件的電荷耦合元件(Charge Coupled Device,CCD)或互補金屬氧化物半導體(complementary metal oxide semiconductor,CMOS)影像感測器。該些固體攝像元件於其受光部使用對近紅外線具有感度的感測器,因此需要進行視感度修正,大多使用光學濾波器(例如近紅外線截止濾波器)。 Solid-state imaging devices such as video cameras, digital still cameras, and mobile phones with camera functions use charge-coupled devices (CCDs) or complementary metal oxide semiconductors (CMOS) as solid-state imaging elements for color images. image sensor. These solid-state imaging devices use a sensor having sensitivity to near infrared rays in the light-receiving portion thereof, and therefore require correction of the viewing sensitivity, and optical filters (for example, near-infrared cutoff filters) are often used.
作為所述光學濾波器,自先前以來一直使用利用各種方法製造的光學濾波器,例如已知有於降冰片烯系樹脂上積層了介電質多層膜的具有近紅外線反射膜的近紅外線截止濾波器(例如參照專利文獻1)。然而,於所述具有近紅外線反射膜的近紅外線截止濾波器中,光線透過特性的入射角依存性大,於視場角寬的固體攝像裝置中,於圖像的中央與周邊部產生色調不同的不良情 況。 As the optical filter, an optical filter manufactured by various methods has been conventionally used. For example, a near-infrared cut filter with a near-infrared reflective film in which a dielectric multilayer film is laminated on a norbornene-based resin is known. device (for example, refer to Patent Document 1). However, in the near-infrared cut filter having the near-infrared reflective film, the light transmission characteristic has a large incident angle dependence, and in a solid-state imaging device with a wide angle of view, the color tone is different between the center and the peripheral portion of the image. bad condition.
作為改良入射角依存性的例子,廣為人知的是含有近紅外線吸收劑的近紅外線截止濾波器等光學濾波器。具體而言,已知有如下近紅外線截止濾波器:藉由使用樹脂作為基材,且於樹脂中含有具有陡峭的吸收特性的近紅外線吸收劑而改良了近紅外線區域的入射角依存性(例如參照專利文獻2)。 Optical filters such as near-infrared cut filters containing a near-infrared absorbing agent are widely known as an example of improving the incident angle dependence. Specifically, a near-infrared cut filter is known that uses a resin as a base material and contains a near-infrared absorber having steep absorption characteristics in the resin to improve the incident angle dependence in the near-infrared region (for example, Refer to Patent Document 2).
近年來,正在研究不僅檢測人的視感度高的波長400nm~700nm,而且檢測近紅外線來測量植物的培育程度或人的氧化血紅蛋白量的圖像感測系統(例如參照專利文獻3及專利文獻4)。例如專利文獻3中,已知稻葉於波長500nm~800nm下的反射率根據氮含量而變化,提出了根據可見光的反射強度與近紅外線光的反射強度求出植物的培育指標的方法。 In recent years, an image sensing system that detects not only the wavelengths of 400 nm to 700 nm, which have high human visual sensitivity, but also near-infrared rays to measure the degree of growth of plants or the amount of oxidized hemoglobin in humans has been studied (for example, see Patent Document 3 and Patent Document 4). ). For example, in Patent Document 3, it is known that the reflectance of rice leaves at a wavelength of 500 nm to 800 nm changes depending on the nitrogen content, and a method of obtaining a plant growth index from the reflected intensity of visible light and the reflected intensity of near-infrared light is proposed.
另外,已知例如以波長355nm的紫外線雷射為光源,波長690nm的螢光強度(F690)與波長740nm的螢光強度(F740)之比(F690/F740)可作為植物生物體內的葉綠素濃度的指標進行植被診斷(例如參照非專利文獻1)。 In addition, it is known that the ratio (F690/F740) of the fluorescence intensity (F690) of the wavelength of 690 nm to the fluorescence intensity of the wavelength of 740 nm (F740) can be used as a measure of the chlorophyll concentration in plant organisms, for example, using an ultraviolet laser with a wavelength of 355 nm as a light source. Vegetation diagnosis is performed based on the index (for example, refer to Non-Patent Document 1).
然而,於組合了所述波長400nm~700nm的可見光與近紅外線的圖像感測系統中,於先前的含有近紅外線吸收劑的近紅外線截止濾波器等光學濾波器中,檢測所使用的波長700nm~750nm的光線透過率低,難以保持充分的感度。 However, in an image sensing system combining visible light and near-infrared rays with wavelengths of 400 nm to 700 nm, the wavelength of 700 nm used for detection is used in optical filters such as near-infrared cut-off filters containing near-infrared absorbing agents. The light transmittance of ~750nm is low, and it is difficult to maintain sufficient sensitivity.
已知於具有積層了介電質多層膜的近紅外線反射膜的近紅外線截止濾波器中,藉由增加積層的介電質多層膜的厚度, 使反射頻帶進行長波長偏移。因此,容易設置波長700nm~750nm的透過率高的介電質多層膜,但於所述近紅外線截止濾波器中,存在如下問題:高角度入射時的入射角依存性大,於進行圖像化時在中央與圖像周邊,藉由感測獲得的光的強度根據入射角而不同。 In a near-infrared cut filter having a near-infrared reflective film laminated with a dielectric multilayer film, by increasing the thickness of the laminated dielectric multilayer film, Long wavelength shift of the reflection band. Therefore, it is easy to provide a dielectric multilayer film with a high transmittance at a wavelength of 700 nm to 750 nm. However, in the near-infrared cut filter, there is a problem that the incidence angle dependence at high angle incidence is large, and it is difficult to image At the center and the periphery of the image, the intensity of light obtained by sensing differs depending on the angle of incidence.
另外,固體攝像元件的高性能化不斷發展,於先前的光學濾波器中,有時會由於光學濾波器的反射所產生的重影而使畫質降低。特別是由於波長680nm~720nm的光線引起的光學濾波器的反射,一部分雜散光再次入射到感測器的其他位置而產生的重影成為問題。因此,要求降低波長680nm~720nm的反射率。 In addition, the performance of the solid-state imaging element has been advanced, and in the conventional optical filter, the image quality may be degraded due to the ghost generated by the reflection of the optical filter. In particular, due to reflection by the optical filter caused by light with wavelengths of 680 nm to 720 nm, ghosting caused by a part of stray light re-entering other positions of the sensor becomes a problem. Therefore, it is required to reduce the reflectance at wavelengths of 680 nm to 720 nm.
然而,先前的光學濾波器對於兼具所述重影的抑制與紅色的感測器感度提高的要求無法充分滿足。 However, the conventional optical filter cannot sufficiently satisfy the requirement of both the suppression of the ghost and the enhancement of the red sensor sensitivity.
[專利文獻1]日本專利第4513420號公報 [Patent Document 1] Japanese Patent No. 4513420
[專利文獻2]日本專利特開2012-8532號公報 [Patent Document 2] Japanese Patent Laid-Open No. 2012-8532
[專利文獻3]日本專利特開2016-146784號公報 [Patent Document 3] Japanese Patent Laid-Open No. 2016-146784
[專利文獻4]國際公開第2018/123676號手冊 [Patent Document 4] International Publication No. 2018/123676 Manual
[非專利文獻1]H.K.Lichtenthaler等人:「藉由一種新的高分辨率螢光成像系統來檢測植被應力(Detection of Vegetation Stress Via a New High Resolution Fluorescence Imaging System)」 ,. 植物生理學(Plant Physiol) ., 148, 599-612 (1996) [Non-Patent Document 1] H.K.Lichtenthaler et al.: "Detection of Vegetation Stress Via a New High Resolution Fluorescence Imaging System",. Plant Physiol., 148, 599-612 (1996)
本發明的目的在於提供一種光學濾波器及使用了該光學濾波器的裝置,該光學濾波器兼具近紅外線區域的入射角依存性低與感測所需要的波長700nm~750nm的光的透過率特性優異,且改善了重影。 An object of the present invention is to provide an optical filter and a device using the optical filter which have both low incident angle dependence in the near-infrared region and transmittance of light having a wavelength of 700 nm to 750 nm required for sensing The characteristics are excellent, and ghosting is improved.
本發明的一態樣的光學濾波器的特徵在於,滿足下述必要條件(A)~(D): The optical filter of one aspect of the present invention is characterized by satisfying the following requirements (A) to (D):
(A)於波長430nm~580nm的範圍內,從相對於光學濾波器的面垂直的方向測定時的透過率的平均值為75%以上。 (A) The average value of transmittance when measured from a direction perpendicular to the surface of the optical filter in a wavelength range of 430 nm to 580 nm is 75% or more.
(B)於波長800nm~1000nm的範圍內,從相對於光學濾波器的面垂直的方向測定時的透過率的平均值為10%以下。 (B) The average value of transmittance when measured from a direction perpendicular to the surface of the optical filter in a wavelength range of 800 nm to 1000 nm is 10% or less.
(C)於波長700nm~750nm的範圍內,從相對於光學濾波器的面垂直的方向測定時的透過率的平均值超過46%。 (C) The average value of transmittance when measured from the direction perpendicular to the surface of the optical filter in the wavelength range of 700 nm to 750 nm exceeds 46%.
(D)於波長560nm~800nm的範圍內,從相對於光學濾波器的面垂直的方向測定時的透過率為50%的最短波長的值(Ya)與從相對於光學濾波器的面垂直的方向以30°的角度測定時的透過率為50%的最短波長的值(Yb)之差的絕對值小於15nm。 (D) The value (Ya) of the shortest wavelength with a transmittance of 50% when measured from a direction perpendicular to the surface of the optical filter in the wavelength range of 560 nm to 800 nm The absolute value of the difference between the shortest wavelength values (Yb) at which the transmittance is 50% when the direction is measured at an angle of 30° is less than 15 nm.
根據本發明,可提供一種光學濾波器及使用了該光學濾 波器的裝置,該光學濾波器兼具近紅外線區域的入射角依存性低與感測所需要的波長700nm~750nm的光的透過率特性優異,且改善了重影。本發明的光學濾波器適合作為近紅外線截止濾波器。 According to the present invention, an optical filter and the use of the optical filter can be provided A wave filter device, the optical filter has both low incident angle dependence in the near-infrared region, excellent transmittance characteristics of light with a wavelength of 700 nm to 750 nm required for sensing, and improved ghosting. The optical filter of the present invention is suitable as a near-infrared cut filter.
1:光學濾波器 1: Optical filter
10:基材 10: Substrate
11:支持體 11: Support body
12:樹脂層 12: Resin layer
13:其他功能膜 13: Other functional films
21:近紅外線反射膜 21: Near infrared reflective film
22:近紅外線反射膜 22: Near infrared reflective film
201:檢測器 201: Detector
301:透鏡 301: Lens
302:感測器 302: Sensor
303:帶通濾波器 303: Bandpass filter
304:正常檢測部 304: Normal detection department
305、306、402:重影 305, 306, 402: Ghosting
400:照相機模組 400: Camera Module
401:光源 401: light source
圖1是表示本發明的光學濾波器的一例的示意圖。 FIG. 1 is a schematic diagram showing an example of an optical filter of the present invention.
圖2是表示本發明的光學濾波器的一例的示意圖。 FIG. 2 is a schematic diagram showing an example of the optical filter of the present invention.
圖3是國立研究開發法人新能源產業技術綜合開發機構公開的、將某日期的岐阜的照射量資料以最大值1.0標準化後的不同波長強度的資料。 Figure 3 shows the data of the intensity of different wavelengths after normalizing the exposure data in Gifu on a certain date to a maximum value of 1.0, published by the National Research and Development Corporation for New Energy Industrial Technology Development.
圖4是綠色、近紅外線的各感測器畫素的不同波長感度的一例。 FIG. 4 is an example of different wavelength sensitivities of green and near-infrared sensor pixels.
圖5是表示用於評價綠色感度及近紅外線感度而製作的透過綠色與近紅外線的雙波長區域透過濾波器的光學特性的圖。 FIG. 5 is a diagram showing the optical characteristics of a transmission filter in a dual wavelength region that transmits green and near-infrared rays produced for evaluating green sensitivity and near-infrared sensitivity.
圖6是表示測定從相對於光學濾波器的面垂直的方向測定時的透過率的方法的例子的概略圖。 6 is a schematic diagram showing an example of a method of measuring the transmittance when measured from a direction perpendicular to the surface of the optical filter.
圖7是表示測定從相對於光學濾波器的面垂直的方向以30°的角度測定時的透過率的方法的例子的概略圖。 7 is a schematic diagram showing an example of a method of measuring the transmittance at an angle of 30° from a direction perpendicular to the surface of the optical filter.
圖8是表示測定從相對於光學濾波器的面垂直的方向以5°的角度入射的光的反射率的方法的例子的概略圖。 8 is a schematic diagram showing an example of a method of measuring the reflectance of light incident at an angle of 5° from a direction perpendicular to the surface of the optical filter.
圖9(a)、圖9(b)是表示照相機模組的例子的概略圖。 9(a) and 9(b) are schematic diagrams showing examples of camera modules.
圖10是表示照相機模組中的重影產生機制的例子的概略圖。 FIG. 10 is a schematic diagram showing an example of a ghost generation mechanism in the camera module.
圖11是表示重影的一例的示意圖。 FIG. 11 is a schematic diagram showing an example of ghosting.
圖12是表示實施例1中所得的光學濾波器的光學特性的圖。 FIG. 12 is a graph showing the optical characteristics of the optical filter obtained in Example 1. FIG.
圖13是表示實施例5中所得的光學濾波器的光學特性的圖。 13 is a graph showing the optical characteristics of the optical filter obtained in Example 5. FIG.
圖14是表示比較例1中所得的光學濾波器的光學特性的圖。 FIG. 14 is a graph showing the optical characteristics of the optical filter obtained in Comparative Example 1. FIG.
圖15是表示比較例4中所得的光學濾波器的光學特性的圖。 FIG. 15 is a graph showing the optical characteristics of the optical filter obtained in Comparative Example 4. FIG.
圖16是表示比較例7中所得的光學濾波器的光學特性的圖。 FIG. 16 is a graph showing the optical characteristics of the optical filter obtained in Comparative Example 7. FIG.
視需要基於圖示對本發明的實施方式進行說明,但該些圖示僅為了圖解而提供,本發明不受該些圖示的任何限定。另外,應注意圖示為示意性,厚度與平面尺寸之間的關係、厚度比例等與實際不同。進而,於以下的說明中,對於具有相同或大致相同的功能及構成的構成用途,標注相同的標號,並省略重覆說明。作為本發明的光學濾波器的一實施方式,如圖1所示,可列舉具有基材10及近紅外線反射膜21、近紅外線反射膜22的態樣。另外,如圖2所示,本發明的光學濾波器亦可具有其他功能膜13。
Embodiments of the present invention will be described based on the drawings as necessary, but these drawings are provided for illustration only, and the present invention is not limited to these drawings at all. In addition, it should be noted that the drawings are schematic, and the relationship between the thickness and the plane size, the thickness ratio, and the like are different from actual ones. Furthermore, in the following description, the same code|symbol is attached|subjected about the structural application which has the same or substantially the same function and structure, and a repeated description is abbreviate|omitted. As one Embodiment of the optical filter of this invention, as shown in FIG. 1, the aspect which has the
本發明的光學濾波器滿足下述必要條件(A)~(D)。 The optical filter of the present invention satisfies the following requirements (A) to (D).
(A)於波長430nm~580nm的範圍內,從相對於光學濾波器的面垂直的方向測定時的透過率的平均值為75%以上。 (A) The average value of transmittance when measured from a direction perpendicular to the surface of the optical filter in a wavelength range of 430 nm to 580 nm is 75% or more.
(B)於波長800nm~1000nm的範圍內,從相對於光學濾波器的面垂直的方向測定時的透過率的平均值為10%以下。 (B) The average value of transmittance when measured from a direction perpendicular to the surface of the optical filter in a wavelength range of 800 nm to 1000 nm is 10% or less.
(C)於波長700nm~750nm的範圍內,從相對於光學濾波 器的面垂直的方向測定時的透過率的平均值超過46%。 (C) In the wavelength range of 700nm~750nm, from relative to the optical filter The average value of transmittance measured in the direction perpendicular to the surface of the device exceeded 46%.
(D)於波長560nm~800nm的範圍內,從相對於光學濾波器的面垂直的方向測定時的透過率為50%的最短波長的值(Ya)與從相對於光學濾波器的面垂直的方向以30°的角度測定時的透過率為50%的最短波長的值(Yb)之差的絕對值小於15nm。 (D) The value (Ya) of the shortest wavelength with a transmittance of 50% when measured from a direction perpendicular to the surface of the optical filter in the wavelength range of 560 nm to 800 nm The absolute value of the difference between the shortest wavelength values (Yb) at which the transmittance is 50% when the direction is measured at an angle of 30° is less than 15 nm.
藉由使用滿足必要條件(A)的光學濾波器,可於波長430nm~580nm的範圍內增加固體攝像元件取入的光量。必要條件(A)中的透過率的平均值較佳為80%以上。若為80%以上,則即使在更暗的環境下亦可進行攝像。 By using an optical filter that satisfies the requirement (A), the amount of light captured by the solid-state imaging element can be increased within a wavelength range of 430 nm to 580 nm. The average value of the transmittance in the requirement (A) is preferably 80% or more. If it is 80% or more, shooting can be performed even in a darker environment.
藉由使用滿足必要條件(B)的光學濾波器,可於波長800nm~1000nm的範圍內減少固體攝像元件取入的光量。藉此,可遮蔽人眼看不到且感測中不需要的光。必要條件(B)中的透過率的平均值較佳為7%以下,更佳為6%以下,進而佳為5%以下。 By using an optical filter that satisfies the requirement (B), the amount of light taken in by the solid-state imaging element can be reduced in the wavelength range of 800 nm to 1000 nm. In this way, light that is invisible to human eyes and unnecessary for sensing can be shielded. The average value of the transmittance in the requirement (B) is preferably 7% or less, more preferably 6% or less, and still more preferably 5% or less.
藉由使用滿足必要條件(C)的光學濾波器,於波長700nm~750nm的範圍內確保固體攝像元件取入的光量,感測感度變好。必要條件(C)中的透過率的平均值較佳為55%以上,更佳為65%以上,進而佳為75%以上。所述透過率越高越好,但例如上限較佳為100%,更佳為90%,進而佳為80%。若為所述範圍內,則調整固體攝像元件取入的光量,可效率良好地透過感測所需要的光。 By using an optical filter that satisfies the requirement (C), the amount of light captured by the solid-state imaging element is secured within a wavelength range of 700 nm to 750 nm, and the sensing sensitivity is improved. The average value of the transmittance in the requirement (C) is preferably 55% or more, more preferably 65% or more, and still more preferably 75% or more. The higher the transmittance, the better, but, for example, the upper limit is preferably 100%, more preferably 90%, and still more preferably 80%. Within the range, the amount of light taken in by the solid-state imaging element is adjusted, and light required for sensing can be transmitted efficiently.
藉由使用滿足必要條件(D)的光學濾波器,可於波長560nm~800nm的範圍內降低入射到固體攝像元件的光量的入射 角依存性。結果,可減小該波長範圍內的固體攝像元件的分光感度的入射角依存性。藉由入射角依存性變小,利用固體攝像元件所得的圖像的中央與周邊的色感、或者感測器感度的差變小,而成為更高感度。 By using an optical filter that satisfies the requirement (D), it is possible to reduce the amount of light incident on the solid-state imaging element in the wavelength range of 560 nm to 800 nm. corner dependency. As a result, the incident angle dependence of the spectral sensitivity of the solid-state imaging element in this wavelength range can be reduced. The smaller the incident angle dependence, the smaller the color perception between the center and the periphery of the image obtained by the solid-state imaging element, or the difference in the sensor sensitivity, and the higher the sensitivity.
本發明的光學濾波器進而佳為滿足下述必要條件(E)。 It is further preferable that the optical filter of the present invention satisfies the following requirement (E).
(E)所述必要條件(D)中的波長的值(Ya)為730nm以上且800nm以下。 (E) The value (Ya) of the wavelength in the above-mentioned requirement (D) is 730 nm or more and 800 nm or less.
藉由使用滿足必要條件(E)的光學濾波器,容易兼具較高地保持波長400nm~700nm的可見光透過率與感測所使用的波長700nm~750nm的近紅外線的透過率、以及感測所不需要的波長800nm~1200nm的低透過率(高遮蔽性)。所述波長(Ya)較佳為740nm以上且800nm以下,進而佳為745nm以上且800nm以下。 By using an optical filter that satisfies the requirement (E), it is easy to maintain high transmittance of visible light with wavelengths of 400 nm to 700 nm, transmittance of near-infrared rays with wavelengths of 700 nm to 750 nm used for sensing, and inconvenience of sensing. Low transmittance (high shielding) at the required wavelength of 800nm to 1200nm. The wavelength (Ya) is preferably 740 nm or more and 800 nm or less, and more preferably 745 nm or more and 800 nm or less.
本發明的光學濾波器進而佳為滿足下述必要條件(Z1)及(Z2)。 It is further preferable that the optical filter of the present invention satisfies the following requirements (Z1) and (Z2).
(Z1)於波長700nm下,從相對於光學濾波器的面垂直的方向以5°的角度測定時的反射率無論從光學濾波器的哪一個面入射時均為10%以下。 (Z1) The reflectance when measured at an angle of 5° from a direction perpendicular to the surface of the optical filter at a wavelength of 700 nm is 10% or less when incident from any surface of the optical filter.
(Z2)於波長600nm以上的範圍內,從相對於光學濾波器的面垂直的方向以5°的角度測定時的反射率為50%的最短波長的值(Za)無論從光學濾波器的哪一個面入射時均為730nm以上。 (Z2) The value (Za) of the shortest wavelength with a reflectance of 50% when measured at an angle of 5° from a direction perpendicular to the surface of the optical filter in the wavelength range of 600 nm or more When incident on one surface, both are 730 nm or more.
藉由使用滿足必要條件(Z1)及(Z2)的光學濾波器,可抑 制由光學濾波器反射的光引起的重影的產生。 By using an optical filter that satisfies the necessary conditions (Z1) and (Z2), it is possible to suppress the Controls the generation of ghost images caused by light reflected by the optical filter.
包含介電質多層膜的近紅外線反射膜有隨著從光學濾波器的面以更高角度斜入射,反射頻帶向短波長移動的傾向。因此,所述必要條件(Z2)中的波長(Za)更佳為740nm以上,進而佳為750nm以上,尤佳為780nm以上。藉此,於由人眼確認的光中,即使在相對於光學濾波器的面以高角度入射的光中亦可充分抑制發生重影。 A near-infrared reflective film including a dielectric multilayer film tends to shift the reflection band to a shorter wavelength as the incident is obliquely at a higher angle from the surface of the optical filter. Therefore, the wavelength (Za) in the above-mentioned necessary condition (Z2) is more preferably 740 nm or more, more preferably 750 nm or more, and still more preferably 780 nm or more. Thereby, in the light recognized by the human eye, even in the light incident at a high angle with respect to the surface of the optical filter, the occurrence of ghost images can be sufficiently suppressed.
本發明的光學濾波器較佳為具有含有近紅外線吸收劑的基材與近紅外線反射膜。 The optical filter of the present invention preferably includes a base material containing a near-infrared absorbing agent and a near-infrared reflective film.
具有含有近紅外線吸收劑的基材的光學濾波器可抑制光學濾波器的近紅外線的反射,可減少重影。具有近紅外線反射膜的光學濾波器的近紅外線遮蔽性能優異,且波長430nm~580nm的範圍的可見光線的透過性能優異,可使所得的固體攝像裝置為高感度。 An optical filter having a base material containing a near-infrared absorbing agent can suppress reflection of near-infrared rays of the optical filter, and can reduce ghost images. An optical filter having a near-infrared reflective film is excellent in near-infrared shielding performance and excellent in transmission performance of visible light in the wavelength range of 430 nm to 580 nm, and the obtained solid-state imaging device can be highly sensitive.
所述近紅外線吸收劑於波長751nm~950nm的範圍內具有吸收最大波長、以及以該吸收最大波長下的所述基材的透過率為10%的量含有所述近紅外線吸收劑的情況下,較佳為於波長430nm以上且該吸收最大波長以下的範圍內所述基材的透過率為70%的最長波長(Aa)與於波長580nm以上的範圍內所述基材的透過率為30%的最短波長(Ab)之差的絕對值小於150nm。
In the case where the near-infrared absorber has an absorption maximum wavelength in a wavelength range of 751 nm to 950 nm, and the near-infrared absorber is contained in an amount of 10% of the transmittance of the substrate at the absorption maximum wavelength, Preferably, the longest wavelength (Aa) in which the transmittance of the substrate is 70% in the range of wavelength 430 nm or more and the absorption maximum wavelength or less, and the transmittance of the substrate in the range of
藉由使用具有包含所述(Aa)與所述(Ab)之差的絕對值小於150nm的近紅外線吸收劑的基材的光學濾波器,容易兼具 較高地保持波長700nm~750nm的近紅外線的透過率、以及感測中不需要的波長800nm~1200nm的低透過率(高遮蔽性)。所述差的絕對值越少越好,更佳為小於100nm,進而佳為小於70nm。下限為1nm。 By using an optical filter having a base material containing a near-infrared absorber whose absolute value of the difference between (Aa) and (Ab) is less than 150 nm, it is easy to have both The transmittance of near-infrared rays with wavelengths of 700 nm to 750 nm and the low transmittance of wavelengths of 800 nm to 1200 nm, which are not necessary for sensing, (high shielding properties) are maintained high. The absolute value of the difference is preferably as small as possible, more preferably less than 100 nm, and still more preferably less than 70 nm. The lower limit is 1 nm.
關於作為所述近紅外線吸收劑的較佳的範圍的特性的於波長751nm~950nm具有吸收最大波長、以及所述(Aa)與所述(Ab)之差的絕對值小於150nm,可滿足吸收劑一種的特性,亦可為混合多種的特性。另外,混合了多種的近紅外線吸收劑亦可包含單獨不能滿足特性的物質。 As the characteristics of the near-infrared absorber in a preferable range, it has an absorption maximum wavelength at a wavelength of 751 nm to 950 nm, and the absolute value of the difference between the (Aa) and the (Ab) is less than 150 nm, and the absorber can be satisfied. A characteristic of one, or a mixture of several characteristics. In addition, the near-infrared absorber in which a plurality of kinds are mixed may contain substances that cannot satisfy the characteristics alone.
所述基材較佳為具有透明性。所謂本發明中所說的透明性是指波長420nm~600nm的範圍的透過率的平均值為50%以上。作為所述基材的材質,例如可列舉玻璃、強化玻璃、磷酸玻璃、氟磷酸玻璃、氧化鋁玻璃、鋁酸釔、氧化釔等特殊玻璃及樹脂。 The base material preferably has transparency. Transparency as used in the present invention means that the average value of transmittance in the wavelength range of 420 nm to 600 nm is 50% or more. Examples of the material of the substrate include special glass and resins such as glass, tempered glass, phosphoric acid glass, fluorophosphoric acid glass, alumina glass, yttrium aluminate, and yttrium oxide.
另外,基材可由一層亦可由多層構成,可由選自所述材料中的一種材質構成,亦可由多種構成,亦可為適宜混合的材料。構成基材的層中的至少一層較佳為含有近紅外線吸收劑,另外亦可含有近紫外線吸收劑。包含近紅外線吸收劑的層與包含近紫外線吸收劑的層可為同一層,亦可為不同的層。 In addition, the base material may be composed of one layer or multiple layers, may be composed of one material selected from the above-mentioned materials, may be composed of a plurality of materials, and may be appropriately mixed materials. At least one of the layers constituting the base material preferably contains a near-infrared absorber, and may also contain a near-ultraviolet absorber. The layer containing the near-infrared absorber and the layer containing the near-ultraviolet absorber may be the same layer or different layers.
<玻璃> <glass>
作為所述玻璃,例如可列舉矽酸玻璃、鈉鈣玻璃、硼矽酸玻璃、石英玻璃等。 As said glass, a silicate glass, a soda lime glass, a borosilicate glass, a quartz glass, etc. are mentioned, for example.
<強化玻璃> <Strengthened glass>
作為所述強化玻璃,例如可列舉物理強化玻璃、強化夾層玻璃、化學強化玻璃等。該些中,較佳為壓縮層的厚度薄、可將基材厚度加工得薄的化學強化玻璃。作為化學強化玻璃的具體例,可列舉旭硝子公司製造的「升龍玻璃(Dragontrail)」、康寧(Corning)公司製造的「大猩猩玻璃(Gorilla Glass)」等。 As said tempered glass, physical tempered glass, tempered laminated glass, chemical tempered glass, etc. are mentioned, for example. Among these, the thickness of a compression layer is thin, and the chemically strengthened glass which can process the thickness of a base material thinly is preferable. Specific examples of chemically strengthened glass include "Dragontrail" manufactured by Asahi Glass Co., Ltd., "Gorilla Glass" manufactured by Corning Corporation, and the like.
<特殊玻璃> <Special glass>
作為所述磷酸玻璃或所述氟磷酸玻璃,例如可列舉松浪硝子工業公司製造的BS3、BS4、BS6、BS7、BS8、BS10、BS11、BS12、BS13、BS16、BS17等、國際公開第2012/018026號中記載的氟磷酸鹽系玻璃等。作為所述氧化鋁玻璃,例如可列舉日本礙子公司製造的「海科藍(hiceram)」等。作為所述鋁酸釔或所述氧化釔,例如可列舉闊斯泰(CoorsTek)公司製造的「艾麗婭(EXYRIA)(註冊商標)」等。 Examples of the phosphoric acid glass or the fluorophosphoric acid glass include BS3, BS4, BS6, BS7, BS8, BS10, BS11, BS12, BS13, BS16, BS17, etc. manufactured by Matsunami Glass Co., Ltd., International Publication No. 2012/018026 Fluorophosphate-based glass and the like described in No. As said alumina glass, "hiceram" etc. are mentioned, for example by Nippon Koshi Corporation. Examples of the yttrium aluminate or the yttrium oxide include "EXYRIA (registered trademark)" manufactured by CoorsTek, Inc., and the like.
<樹脂> <resin>
作為所述樹脂,例如可列舉聚酯系樹脂、聚醚系樹脂、丙烯酸系樹脂、聚烯烴系樹脂、聚環烯烴系樹脂、降冰片烯系樹脂、聚碳酸酯系樹脂、烯硫醇系樹脂、環氧系樹脂、聚醯胺系樹脂、聚醯亞胺系樹脂、聚胺基甲酸酯系樹脂、聚苯乙烯系樹脂等。該些中,較佳為降冰片烯系樹脂、聚醯亞胺系樹脂、聚醚系樹脂。 Examples of the resin include polyester-based resins, polyether-based resins, acrylic resins, polyolefin-based resins, polycycloolefin-based resins, norbornene-based resins, polycarbonate-based resins, and enethiol-based resins , epoxy resin, polyamide resin, polyimide resin, polyurethane resin, polystyrene resin, etc. Among these, norbornene-based resins, polyimide-based resins, and polyether-based resins are preferred.
所述樹脂可藉由調整原料成分的分子結構的方法等來調整折射率。具體而言,可列舉對原料成分的聚合物的主鏈或側 鏈賦予特定結構的方法。賦予聚合物內的結構並無特別限定,例如可列舉降冰片烯骨架、芴骨架。 The refractive index of the resin can be adjusted by a method of adjusting the molecular structure of the raw material components or the like. Specifically, the main chain or side of the polymer of the raw material component can be mentioned. A method by which a chain imparts a specific structure. The structure provided in the polymer is not particularly limited, and examples thereof include norbornene skeleton and fluorene skeleton.
作為所述樹脂,可使用市售品。作為市售品,可列舉大阪氣體化學(股)製造的「奧格索(ogsol)(註冊商標)EA-F5003」(丙烯酸系樹脂、折射率:1.60)、東京化成工業(股)製造的「聚甲基丙烯酸甲酯」(折射率:1.49)、東京化成工業(股)製造的「聚甲基丙烯酸異丁酯」(折射率:1.48)、三菱麗陽(Mitsubishi Rayon)(股)製造的「BR50」(折射率:1.56)等。 As the resin, a commercial item can be used. Commercially available products include "ogsol (registered trademark) EA-F5003" (acrylic resin, refractive index: 1.60) manufactured by Osaka Gas Chemical Co., Ltd., "Ogsol (registered trademark) EA-F5003" manufactured by Tokyo Chemical Industry Co., Ltd. "Polymethyl methacrylate" (refractive index: 1.49), "polyisobutyl methacrylate" (refractive index: 1.48) manufactured by Tokyo Chemical Industry Co., Ltd., manufactured by Mitsubishi Rayon Co., Ltd. "BR50" (refractive index: 1.56), etc.
另外,作為聚酯系樹脂的市售品,例如可列舉大阪氣體化學(股)製造的「OKP4HT」(折射率:1.64)、「OKP4」(折射率:1.61)、「B-OKP2」(折射率:1.64)、「OKP-850」(折射率:1.65)、東洋紡(股)製造的「拜龍(Vylon)(註冊商標)103」(折射率:1.55)等,作為聚碳酸酯系樹脂的市售品,例如可列舉沙特基礎工業(sabic)公司製造的「理彥(LeXan)(註冊商標)ML9103」(折射率:1.59)、「西萊絲(xylex)(註冊商標)7507」、三菱氣體化學(股)製造的「EP5000」(折射率:1.63)、帝人化成(股)製造的「SP3810」(折射率:1.63)、「SP1516」(折射率:1.60)、「TS2020」(折射率:1.59)等,作為降冰片烯系樹脂的市售品,例如可列舉捷時雅(JSR)(股)製造的「艾騰(ARTON)」(註冊商標)(折射率:1.51)、日本瑞翁(ZEON)(股)製造的「瑞翁思(ZEONEX)(註冊商標)」(折射率:1.53)等。 In addition, examples of commercially available polyester resins include "OKP4HT" (refractive index: 1.64), "OKP4" (refractive index: 1.61), and "B-OKP2" (refractive index: 1.61) manufactured by Osaka Gas Chemical Co., Ltd. As the polycarbonate resin Commercially available products include, for example, "LeXan (registered trademark) ML9103" (refractive index: 1.59), "xylex (registered trademark) 7507" manufactured by Sabic, Mitsubishi "EP5000" (refractive index: 1.63) manufactured by Gas Chemical Co., Ltd., "SP3810" (refractive index: 1.63), "SP1516" (refractive index: 1.60), "TS2020" (refractive index) manufactured by Teijin Chemical Co., Ltd. : 1.59) and the like, and commercial products of norbornene-based resins include, for example, "ARTON" (registered trademark) (refractive index: 1.51) manufactured by JSR Co., Ltd., "ZEONEX (registered trademark)" (refractive index: 1.53) manufactured by ZEON Co., Ltd., etc.
聚醚系樹脂是藉由在主鏈上形成醚鍵的反應而獲得的 聚合物,較佳為具有選自由下述式(1)及(2)所表示的結構單元所組成的群組中的至少一個結構單元的聚合物。另外,亦可具有下述式(3)所表示的結構單元。 Polyether-based resins are obtained by the reaction of forming ether bonds on the main chain The polymer is preferably a polymer having at least one structural unit selected from the group consisting of structural units represented by the following formulae (1) and (2). In addition, it may have a structural unit represented by the following formula (3).
所述式(1)中,R1~R4分別獨立地表示碳數1~12的一價有機基。a~d分別獨立地表示0~4的整數,較佳為0或1,更佳為0。 In the formula (1), R 1 to R 4 each independently represent a monovalent organic group having 1 to 12 carbon atoms. a to d each independently represent an integer of 0 to 4, preferably 0 or 1, more preferably 0.
作為碳數1~12的一價有機基,可列舉碳數1~12的一價烴基以及含有選自由氧原子及氮原子所組成的群組中的至少一種原子的碳數1~12的一價有機基等。 Examples of the monovalent organic group having 1 to 12 carbon atoms include a monovalent hydrocarbon group having 1 to 12 carbon atoms, and a monovalent organic group having 1 to 12 carbon atoms containing at least one atom selected from the group consisting of an oxygen atom and a nitrogen atom. Valence organic base, etc.
作為碳數1~12的一價烴基,可列舉碳數1~12的直鏈或支鏈的烴基、碳數3~12的脂環式烴基及碳數6~12的芳香族烴基等。 Examples of the monovalent hydrocarbon group having 1 to 12 carbon atoms include linear or branched hydrocarbon groups having 1 to 12 carbon atoms, alicyclic hydrocarbon groups having 3 to 12 carbon atoms, and aromatic hydrocarbon groups having 6 to 12 carbon atoms.
作為所述碳數1~12的直鏈或支鏈的烴基,較佳為碳數1~8的直鏈或支鏈的烴基,更佳為碳數1~5的直鏈或支鏈的烴基。 The linear or branched hydrocarbon group having 1 to 12 carbon atoms is preferably a linear or branched hydrocarbon group having 1 to 8 carbon atoms, more preferably a linear or branched hydrocarbon group having 1 to 5 carbon atoms. .
作為所述直鏈或支鏈烴基的較佳的具體例,可列舉甲基、乙基、正丙基、異丙基、正丁基、第二丁基、第三丁基、正戊基、正己基及正庚基等。 Preferred specific examples of the linear or branched hydrocarbon group include methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, n-pentyl, n-hexyl and n-heptyl, etc.
作為所述碳數3~12的脂環式烴基,較佳為碳數3~8的脂環式烴基,更佳為碳數3或4的脂環式烴基。 The alicyclic hydrocarbon group having 3 to 12 carbon atoms is preferably an alicyclic hydrocarbon group having 3 to 8 carbon atoms, and more preferably an alicyclic hydrocarbon group having 3 or 4 carbon atoms.
作為碳數3~12的脂環式烴基的較佳的具體例,可列舉環丙基、環丁基、環戊基及環己基等環烷基;環丁烯基、環戊烯基及環己烯基等環烯基。所述脂環式烴基的鍵結部位可為脂環上的任意碳。 Preferred specific examples of the alicyclic hydrocarbon group having 3 to 12 carbon atoms include cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, and cyclohexyl; Cycloalkenyl such as hexenyl. The bonding site of the alicyclic hydrocarbon group may be any carbon on the alicyclic ring.
作為所述碳數6~12的芳香族烴基,可列舉苯基、聯苯 基及萘基等。所述芳香族烴基的鍵結部位可為芳香族環上的任意碳。 Examples of the aromatic hydrocarbon group having 6 to 12 carbon atoms include phenyl and biphenyl. base and naphthyl, etc. The bonding site of the aromatic hydrocarbon group may be any carbon on the aromatic ring.
作為含有氧原子的碳數1~12的有機基,可列舉包含氫原子、碳原子及氧原子的有機基,其中,可較佳地列舉包含醚鍵、羰基或酯鍵及烴基的總碳數1~12的有機基等。 Examples of the organic group having 1 to 12 carbon atoms including an oxygen atom include organic groups including a hydrogen atom, a carbon atom, and an oxygen atom, and among them, the total carbon number including an ether bond, a carbonyl group, an ester bond, and a hydrocarbon group is preferably used. 1~12 organic groups, etc.
作為具有醚鍵的總碳數1~12的有機基,可列舉碳數1~12的烷氧基、碳數2~12的烯氧基、碳數2~12的炔氧基、碳數6~12的芳氧基及碳數1~12的烷氧基烷基等,具體而言,可列舉甲氧基、乙氧基、丙氧基、異丙氧基、丁氧基、苯氧基、丙烯氧基、環己氧基及甲氧基甲基等。 Examples of organic groups having 1 to 12 carbon atoms in total including ether bonds include alkoxy groups having 1 to 12 carbon atoms, alkenyloxy groups having 2 to 12 carbon atoms, alkynyloxy groups having 2 to 12 carbon atoms, and alkynyloxy groups having 2 to 12 carbon atoms. Aryloxy group of to 12, alkoxyalkyl group of carbon number of 1 to 12, etc. Specifically, methoxy group, ethoxy group, propoxy group, isopropoxy group, butoxy group, phenoxy group can be mentioned , propyleneoxy, cyclohexyloxy and methoxymethyl, etc.
作為具有羰基的總碳數1~12的有機基,可列舉碳數2~12的醯基等,具體而言,可列舉乙醯基、丙醯基、異丙醯基及苯甲醯基等。 Examples of the organic group having a carbonyl group having 1 to 12 carbon atoms in total include an acyl group having 2 to 12 carbon atoms, and the like, and specifically, an acetyl group, a propionyl group, an isopropyl group, a benzyl group, and the like. .
作為具有酯鍵的總碳數1~12的有機基,可列舉碳數2~12的醯氧基等,具體而言,可列舉乙醯氧基、丙醯氧基、異丙醯氧基及苯甲醯氧基等。 Examples of the organic group having 1 to 12 carbon atoms in total including an ester bond include acyloxy groups having 2 to 12 carbon atoms, and the like. Benzyloxy, etc.
作為含有氮原子的碳數1~12的有機基,可列舉包含氫原子、碳原子及氮原子的有機基,具體而言,可列舉氰基、咪唑基、三唑基、苯並咪唑基及苯並三唑基等。 Examples of the nitrogen atom-containing organic group having 1 to 12 carbon atoms include organic groups including hydrogen atoms, carbon atoms, and nitrogen atoms, and specifically, cyano groups, imidazolyl groups, triazolyl groups, benzimidazolyl groups, and Benzotriazolyl, etc.
作為含有氧原子及氮原子的碳數1~12的有機基,可列舉包含氫原子、碳原子、氧原子及氮原子的有機基,具體而言,可列舉噁唑基、噁二唑基、苯並噁唑基及苯並噁二唑基等。 Examples of the organic group having 1 to 12 carbon atoms including an oxygen atom and a nitrogen atom include organic groups including a hydrogen atom, a carbon atom, an oxygen atom and a nitrogen atom, and specifically, an oxazolyl group, an oxadiazolyl group, benzoxazolyl and benzoxadiazolyl, etc.
作為所述式(1)中的R1~R4,就樹脂(1)的吸水(濕)性的方面而言,較佳為碳數1~12的一價烴基,更佳為碳數6~12的芳香族烴基,進而佳為苯基。 R 1 to R 4 in the formula (1) are preferably monovalent hydrocarbon groups having 1 to 12 carbon atoms, more preferably 6 carbon atoms, from the viewpoint of water absorption (wetting) of the resin (1). An aromatic hydrocarbon group of ~12, more preferably a phenyl group.
所述式(2)中,R1~R4及a~d分別獨立地與所述式(1)中的R1~R4及a~d含義相同,Y表示單鍵、-SO2-或-CO-,R7及R8分別獨立地表示鹵素原子、碳數1~12的一價有機基或硝基,m表示0或1。其中,於m為0時,R7並非為氰基。g及h分別獨立地表示0~4的整數,較佳為0。 In the formula (2), R 1 to R 4 and a to d have the same meanings as R 1 to R 4 and a to d in the formula (1), respectively, and Y represents a single bond, -SO 2 - Or -CO-, R 7 and R 8 each independently represent a halogen atom, a monovalent organic group having 1 to 12 carbon atoms, or a nitro group, and m represents 0 or 1. Wherein, when m is 0, R 7 is not cyano. g and h each independently represent an integer of 0 to 4, preferably 0.
作為碳數1~12的一價有機基,可列舉與所述式(1)中的碳數1~12的一價有機基相同者。 As the monovalent organic group having 1 to 12 carbon atoms, the same ones as the monovalent organic group having 1 to 12 carbon atoms in the above formula (1) can be mentioned.
所述樹脂(1)中,就光學特性、耐熱性及力學特性的觀點而言,所述結構單元(1)與所述結構單元(2)的莫耳比(其中,兩者(結構單元(1)+結構單元(2))的合計為100)較佳為結構單元(1):結構單元(2)=50:50~100:0,更佳為結構單元(1):結構單元(2)=70:30~100:0,進而佳為結構單元(1):結構單元(2)=80:20~100:0。再者,本說明書中,所謂力學特性是指樹脂的拉伸強度、斷裂伸長率及拉伸彈性係數等性質。 In the resin (1), from the viewpoint of optical properties, heat resistance, and mechanical properties, the molar ratio of the structural unit (1) and the structural unit (2) (wherein both (the structural unit ( The total of 1) + structural unit (2)) is 100), preferably structural unit (1): structural unit (2)=50: 50~100: 0, more preferably structural unit (1): structural unit (2 )=70:30~100:0, more preferably, structural unit (1): structural unit (2)=80:20~100:0. In addition, in this specification, the mechanical properties refer to properties such as tensile strength, elongation at break, and tensile modulus of elasticity of the resin.
另外,所述樹脂(1)亦可進一步具有選自由下述式(3)所表示的結構單元及下述式(4)所表示的結構單元所組成的群組中的至少一個結構單元(以下亦稱為「結構單元(3-4)」)。若所述樹脂(1)具有所述結構單元(3-4),則含有該樹脂(1)的基材的力學特性提高,因此較佳。 In addition, the resin (1) may further have at least one structural unit selected from the group consisting of a structural unit represented by the following formula (3) and a structural unit represented by the following formula (4) (hereinafter Also known as "building block (3-4)"). When the resin (1) has the structural unit (3-4), the mechanical properties of the base material containing the resin (1) are improved, which is preferable.
所述式(3)中,R5及R6分別獨立地表示碳數1~12的一價有機基,Z表示單鍵、-O-、-S-、-SO2-、-CO-、-CONH-、-COO-或碳數1~12的二價有機基,n表示0或1。e及f分別獨立地表示0~4的整數,較佳為0。 In the formula (3), R 5 and R 6 each independently represent a monovalent organic group having 1 to 12 carbon atoms, and Z represents a single bond, -O-, -S-, -SO 2 -, -CO-, -CONH-, -COO- or a divalent organic group with 1 to 12 carbon atoms, and n represents 0 or 1. e and f each independently represent an integer of 0 to 4, preferably 0.
作為碳數1~12的一價有機基,可列舉與所述式(1)中的碳數1~12的一價有機基相同的基。 Examples of the monovalent organic group having 1 to 12 carbon atoms include the same groups as those of the monovalent organic group having 1 to 12 carbon atoms in the above formula (1).
作為碳數1~12的二價有機基,可列舉碳數1~12的二價烴基、碳數1~12的二價鹵化烴基、含有選自由氧原子及氮原子所組成的群組中的至少一種原子的碳數1~12的二價有機基、以及含有選自由氧原子及氮原子所組成的群組中的至少一種原子的碳數1~12的二價鹵化有機基等。 Examples of the divalent organic group having 1 to 12 carbon atoms include a divalent hydrocarbon group having 1 to 12 carbon atoms, a divalent halogenated hydrocarbon group having 1 to 12 carbon atoms, and a group containing 1 to 12 carbon atoms selected from the group consisting of an oxygen atom and a nitrogen atom. Divalent organic group having 1 to 12 carbon atoms having at least one atom, and a divalent halogenated organic group having 1 to 12 carbon atoms having at least one atom selected from the group consisting of an oxygen atom and a nitrogen atom.
作為碳數1~12的二價烴基,可列舉碳數1~12的直鏈或支鏈的二價烴基、碳數3~12的二價脂環式烴基及碳數6~12的二價芳香族烴基等。 Examples of the divalent hydrocarbon group having 1 to 12 carbon atoms include a linear or branched divalent hydrocarbon group having 1 to 12 carbon atoms, a divalent alicyclic hydrocarbon group having 3 to 12 carbon atoms, and a divalent hydrocarbon group having 6 to 12 carbon atoms. Aromatic hydrocarbon groups, etc.
作為碳數1~12的直鏈或支鏈的二價烴基,可列舉亞甲基、伸乙基、三亞甲基、伸異丙基、五亞甲基、六亞甲基及七亞甲基等。 Examples of the linear or branched divalent hydrocarbon group having 1 to 12 carbon atoms include methylene, ethylidene, trimethylene, isopropylidene, pentamethylene, hexamethylene, and heptamethylene. Wait.
作為碳數3~12的二價脂環式烴基,可列舉伸環丙基、伸環丁基、伸環戊基及伸環己基等伸環烷基;伸環丁烯基、伸環戊烯基及伸環己烯基等伸環烯基等。 Examples of the divalent alicyclic hydrocarbon group having 3 to 12 carbon atoms include cycloalkylene groups such as cyclopropylidene, cyclobutylene, cyclopentylene, and cyclohexylene; cyclobutenyl, cyclopentene, etc. cycloalkenyl such as cyclohexenyl and cyclohexenyl, etc.
作為碳數6~12的二價芳香族烴基,可列舉伸苯基、伸萘基及伸聯苯基等。 As a C6-C12 divalent aromatic hydrocarbon group, a phenylene group, a naphthylene group, a biphenylene group, etc. are mentioned.
作為碳數1~12的二價鹵化烴基,可列舉碳數1~12的直鏈或支鏈的二價鹵化烴基、碳數3~12的二價鹵化脂環式烴基及碳數6~12的二價鹵化芳香族烴基等。 Examples of the divalent halogenated hydrocarbon group having 1 to 12 carbon atoms include linear or branched divalent halogenated hydrocarbon groups having 1 to 12 carbon atoms, divalent halogenated alicyclic hydrocarbon groups having 3 to 12 carbon atoms, and 6 to 12 carbon atoms. Divalent halogenated aromatic hydrocarbon groups, etc.
作為碳數1~12的直鏈或支鏈的二價鹵化烴基,可列舉二氟亞甲基、二氯亞甲基、四氟乙烯基、四氯乙烯基、六氟三亞甲基、六氯三亞甲基、六氟伸異丙基及六氯伸異丙基等。 Examples of the linear or branched divalent halogenated hydrocarbon group having 1 to 12 carbon atoms include difluoromethylene, dichloromethylene, tetrafluorovinyl, tetrachlorovinyl, hexafluorotrimethylene, and hexachloroethylene. Trimethylene, hexafluoroisopropyl and hexachloroisopropyl.
作為碳數3~12的二價鹵化脂環式烴基,可列舉所述碳數3~12的二價脂環式烴基中例示的基的至少一部分氫原子經氟原子、氯原子、溴原子或碘原子取代而成的基等。 As the divalent halogenated alicyclic hydrocarbon group having 3 to 12 carbon atoms, at least a part of the hydrogen atoms of the groups exemplified in the above-mentioned bivalent alicyclic hydrocarbon group having 3 to 12 carbon atoms are fused with a fluorine atom, a chlorine atom, a bromine atom or A base substituted by an iodine atom, etc.
作為碳數6~12的二價鹵化芳香族烴基,可列舉所述碳數6~12的二價芳香族烴基中例示的基的至少一部分氫原子經氟原子、氯原子、溴原子或碘原子取代而成的基等。 Examples of the divalent halogenated aromatic hydrocarbon group having 6 to 12 carbon atoms include fluorine, chlorine, bromine or iodine atoms in at least a part of the hydrogen atoms of the groups exemplified in the above-mentioned divalent aromatic hydrocarbon groups having 6 to 12 carbon atoms. Substituted bases, etc.
作為含有選自由氧原子及氮原子所組成的群組中的至少一種原子的碳數1~12的有機基,可列舉包含氫原子及碳原子、與氧原子及/或氮原子的有機基,可列舉具有醚鍵、羰基、酯鍵或醯胺鍵與烴基的總碳數1~12的二價有機基等。 Examples of the organic group having 1 to 12 carbon atoms containing at least one atom selected from the group consisting of oxygen atoms and nitrogen atoms include organic groups containing hydrogen atoms, carbon atoms, and oxygen atoms and/or nitrogen atoms, The divalent organic group etc. which have an ether bond, a carbonyl group, an ester bond, an amide bond, and a hydrocarbon group in total of 1-12 carbon atoms are mentioned.
作為含有選自由氧原子及氮原子所組成的群組中的至少一種原子的碳數1~12的二價鹵化有機基,具體而言,可列舉含有選自由氧原子及氮原子所組成的群組中的至少一種原子的碳數1~12的二價有機基中例示的基的至少一部分氫原子經氟原子、氯原子、溴原子或碘原子取代而成的基等。 Specific examples of the divalent halogenated organic group containing 1 to 12 carbon atoms containing at least one atom selected from the group consisting of oxygen atoms and nitrogen atoms include those containing the group selected from the group consisting of oxygen atoms and nitrogen atoms. A group in which at least a part of hydrogen atoms of the groups exemplified in the divalent organic group having 1 to 12 carbon atoms of at least one atom in the group is substituted with a fluorine atom, a chlorine atom, a bromine atom, or an iodine atom, and the like.
作為所述式(3)中的Z,較佳為單鍵、-O-、-SO2-、-CO- 或碳數1~12的二價有機基,就樹脂(1)的吸水(濕)性的方面而言,更佳為碳數1~12的二價烴基、碳數1~12的二價鹵化烴基或碳數3~12的二價脂環式烴基。 As Z in the formula (3), preferably a single bond, -O-, -SO 2 -, -CO- or a divalent organic group having 1 to 12 carbon atoms, the water absorption (wet) of the resin (1) In terms of ) properties, it is more preferably a divalent hydrocarbon group having 1 to 12 carbon atoms, a divalent halogenated hydrocarbon group having 1 to 12 carbon atoms, or a bivalent alicyclic hydrocarbon group having 3 to 12 carbon atoms.
所述基材較佳為具有含有近紅外線吸收劑的樹脂層,且該樹脂層含有選自由降冰片烯系樹脂、聚醯亞胺系樹脂及聚醚樹脂所組成的群組中的至少一種。 The base material preferably has a resin layer containing a near-infrared absorbing agent, and the resin layer contains at least one selected from the group consisting of norbornene-based resin, polyimide-based resin, and polyether resin.
藉由具有所述樹脂層,可獲得波長430nm~580nm下的透明性高、耐熱性高、難以翹曲、難以斷裂、面內相位差R0低的光學濾波器。因此,具備具有所述樹脂層的光學濾波器的固體攝像裝置的畫質高,可容易地製造。 By having the resin layer, an optical filter having high transparency at a wavelength of 430 nm to 580 nm, high heat resistance, hard to warp, hard to break, and low in-plane retardation R 0 can be obtained. Therefore, the solid-state imaging device including the optical filter having the resin layer has high image quality and can be easily manufactured.
就固體攝像裝置成為高感度而言,所述樹脂層於波長430nm~580nm的透過率的平均值在厚度1μm時較佳為70%以上。 In order for the solid-state imaging device to have high sensitivity, the average value of the transmittance of the resin layer at wavelengths of 430 nm to 580 nm is preferably 70% or more when the thickness is 1 μm.
所述樹脂層的玻璃轉移溫度可利用低溫回流步驟製造固體攝像裝置,因此較佳為140℃以上。 The glass transition temperature of the resin layer is preferably 140° C. or higher because a solid-state imaging device can be manufactured by a low-temperature reflow step.
就獲得難以翹曲的光學濾波器的觀點而言,所述樹脂層的楊氏模量較佳為2GPa以上。 From the viewpoint of obtaining an optical filter that is difficult to warp, the Young's modulus of the resin layer is preferably 2 GPa or more.
所述樹脂層的面內相位差R0較佳為50nm以下,更佳為20nm以下,進而佳為10nm以下,尤佳為5nm以下。關於面內相位差R0較少的光學濾波器,於設置了感度對應於偏振光而不同的攝像元件的情況下,可精確地檢測偏振光特性,誤差變少。 The in-plane retardation R 0 of the resin layer is preferably 50 nm or less, more preferably 20 nm or less, still more preferably 10 nm or less, and particularly preferably 5 nm or less. Regarding an optical filter with a small in-plane retardation R 0 , when an imaging element having different sensitivities according to polarized light is provided, the polarized light characteristic can be accurately detected, and the error is reduced.
所述樹脂層於基材中可為一層,亦可含有多層,基材可 僅包含樹脂層。 The resin layer in the base material may be one layer or multiple layers, and the base material may be Contains only the resin layer.
所述基材的厚度可根據所期望的用途適宜選擇,並無特別限制,上限較佳為250μm以下,更佳為200μm以下,進而佳為150μm以下,下限較佳為30μm以上,更佳為40μm以上。若厚度為所述範圍內,則可獲得光學濾波器的翹曲少、充分薄的固體攝像元件。 The thickness of the base material can be appropriately selected according to the intended use, and is not particularly limited, but the upper limit is preferably 250 μm or less, more preferably 200 μm or less, further preferably 150 μm or less, and the lower limit is preferably 30 μm or more, more preferably 40 μm above. When the thickness is within the above range, a sufficiently thin solid-state imaging element can be obtained with less warpage of the optical filter.
<樹脂層的製造方法> <Manufacturing method of resin layer>
所述樹脂層例如可藉由熔融成形或澆鑄成形而形成,可根據需要於成形後藉由塗佈防反射劑、硬塗劑及/或抗靜電劑等塗佈劑的方法而製造。 The resin layer can be formed by, for example, melt molding or casting molding, and can be produced by a method of applying a coating agent such as an antireflection agent, a hard coat agent, and/or an antistatic agent after molding as necessary.
(A)熔融成形 (A) Melt forming
所述樹脂層可藉由將樹脂與近紅外線吸收劑熔融混煉而獲得的顆粒熔融成形的方法;將含有樹脂與近紅外線吸收劑的樹脂組成物熔融成形的方法;或者將從包含近紅外線吸收劑、樹脂及溶劑的樹脂組成物中去除溶劑而獲得的顆粒熔融成形的方法等而製造。作為熔融成形方法,例如可列舉射出成形、熔融擠出成形或吹塑成形等。 The resin layer can be a method of melt-molding a pellet obtained by melt-kneading a resin and a near-infrared absorbent; a method of melt-molding a resin composition containing a resin and a near-infrared absorbent; It is manufactured by the method of melt-molding the pellet obtained by removing the solvent from the resin composition of the agent, the resin and the solvent, and the like. As a melt-molding method, injection molding, melt extrusion molding, blow molding, etc. are mentioned, for example.
(B)澆鑄成形 (B) Casting
所述樹脂層亦可藉由將含有近紅外線吸收劑、樹脂及溶劑的樹脂組成物澆鑄在適當的支持體上而去除溶劑的方法;將含有防反射劑、硬塗劑及/或抗靜電劑等塗佈劑、近紅外線吸收劑及樹脂的樹脂組成物澆鑄在適當的支持體上的方法;或者將含有防反射 劑、硬塗劑及/或抗靜電劑等塗佈劑、色素化合物及樹脂的硬化性組成物澆鑄在適當的支持體上並使其硬化及乾燥的方法等而製造。 The resin layer can also remove the solvent by casting the resin composition containing the near-infrared absorber, the resin and the solvent on a suitable support; the anti-reflection agent, the hard coat agent and/or the antistatic agent will be included. A method of casting a resin composition such as a coating agent, a near-infrared absorber, and a resin on a suitable support; or a method containing an anti-reflection agent It is produced by a method of casting, curing, and drying a curable composition of a coating agent such as an agent, a hard coat agent and/or an antistatic agent, a pigment compound, and a resin on an appropriate support.
作為所述支持體,並無特別限定,可使用作為基材的材質的例子而列舉的包含玻璃、強化玻璃、特殊玻璃或樹脂的支持體,另外,亦可使用基材的材質以外的支持體、例如鋼帶、鋼鼓等。 The support is not particularly limited, and supports made of glass, tempered glass, special glass, or resin exemplified as the material of the base material can be used, and supports other than the material of the base material can also be used , such as steel belts, steel drums, etc.
於所述基材為包含樹脂製基板的基材的情況下,該基材可藉由於澆鑄成形後從支持體剝離塗膜而獲得,另外,於所述基材為於支持體11上積層有樹脂層12的基材的情況下,該基材可藉由於澆鑄成形後不剝離塗膜而獲得。
In the case where the base material is a base material including a resin substrate, the base material can be obtained by peeling the coating film from the support after casting, and the base material is obtained by laminating the
藉由所述方法獲得的樹脂層中的殘留溶劑量較佳為盡可能少,通常相對於樹脂層的重量為3質量%以下,較佳為1質量%以下,進而佳為0.5質量%以下。若殘留溶劑量為所述範圍內,則不易發生光學濾波器的變形或光學特性的變化,可獲得可容易發揮所期望的功能的樹脂層。 The residual solvent amount in the resin layer obtained by the method is preferably as small as possible, and is usually 3 mass % or less, preferably 1 mass % or less, and more preferably 0.5 mass % or less with respect to the weight of the resin layer. When the residual solvent amount is within the above-mentioned range, the deformation of the optical filter and the change in optical properties are less likely to occur, and a resin layer that can easily exhibit a desired function can be obtained.
所述近紅外線吸收劑於較佳為波長751nm~950nm、更佳為760nm~940nm、進而佳為770nm~930nm、尤佳為775nm~925nm的範圍內具有吸收最大波長。藉由使吸收最大波長處於所述範圍內,可於波長700nm~750nm的範圍內調整固體攝像元件取入的光量,且減少人的視感度低的波長751nm以上的範圍的光進入 固體攝像元件的量,可使固體攝像裝置更接近人的視感度。 The near-infrared absorbing agent preferably has a wavelength of 751 nm to 950 nm, more preferably 760 nm to 940 nm, further preferably 770 nm to 930 nm, and particularly preferably 775 nm to 925 nm. The wavelength has the maximum absorption wavelength. By making the absorption maximum wavelength within the above-mentioned range, the amount of light taken in by the solid-state imaging element can be adjusted within the wavelength range of 700 nm to 750 nm, and the entry of light in the wavelength range of 751 nm or more, which is low in human visual sensitivity, can be reduced. The amount of solid-state imaging elements can make the solid-state imaging device closer to human viewing sensitivity.
作為所述近紅外線吸收劑,例如可列舉花青系色素、酞菁系色素、二硫醇系色素、二亞銨系色素、方酸內鎓系色素、克酮鎓系色素、磷酸銅鹽等。該些色素的結構並無特別限定,只要不損害本發明的效果,則可使用通常已知的物質或市售品。另外,只要不損害本發明的效果,則添加於光學濾波器中的近紅外線吸收劑可為一種,亦可為多種。 Examples of the near-infrared absorbing agent include cyanine-based dyes, phthalocyanine-based dyes, dithiol-based dyes, diimmonium-based dyes, squaraine-based dyes, ketonium-based dyes, and copper phosphates. . The structures of these dyes are not particularly limited, and generally known ones or commercially available products can be used as long as the effects of the present invention are not impaired. Moreover, as long as the effect of this invention is not impaired, the near-infrared absorber added to an optical filter may be 1 type or a plurality of types may be sufficient as it.
所述近紅外線吸收劑較佳為相對於所述樹脂層以0.01質量%~60.0質量%的範圍含有。若近紅外線吸收劑的含量為所述範圍內,則容易獲得適當的光學特性。於包含大於60.0質量%的情況下,失去所述透明性高、耐熱性高、難以翹曲、難以斷裂等性能,成為固體攝像裝置的畫質降低、製造難度增加的主要原因。 The near-infrared absorber is preferably contained in a range of 0.01 mass % to 60.0 mass % with respect to the resin layer. When the content of the near-infrared absorber is within the above range, suitable optical properties can be easily obtained. When the content exceeds 60.0 mass %, the properties such as high transparency, high heat resistance, resistance to warpage, and resistance to breakage are lost, which is a factor that reduces the image quality of the solid-state imaging device and increases the difficulty in manufacturing.
另外,所述近紅外線吸收劑較佳為滿足下述條件(a)及(b)。 In addition, the near-infrared absorber preferably satisfies the following conditions (a) and (b).
(a)(吸光度λ700)/(吸光度λmax)≦0.1 (a)(absorbance λ 700 )/(absorbance λ max )≦0.1
(b)(吸光度λ751)/(吸光度λmax)≧0.1 (b) (absorbance λ 751 )/(absorbance λ max )≧0.1
此處,將所述近紅外線吸收劑於波長700nm下的吸光度設為「吸光度λ700」,將波長751nm下的吸光度設為「吸光度λ751」,將吸收最大波長下的吸光度設為「吸光度λmax」,波長λ下的吸光度λ按照通常使用的下式,由波長λ下的透過率λ計算出。 Here, let the absorbance of the near-infrared absorber at a wavelength of 700 nm be “absorbance λ 700 ”, the absorbance at a wavelength of 751 nm to be “absorbance λ 751 ”, and the absorbance at the maximum absorption wavelength to be “absorbance λ 751 ” max ”, the absorbance λ at the wavelength λ is calculated from the transmittance λ at the wavelength λ according to the following formula generally used.
吸光度λ=-Log(內部透過率λ) Absorbance λ=-Log (internal transmittance λ)
於例如內部透過率λ為0.1(10%)的情況下,吸光度為1.0。 所謂內部透過率是指從所得的透過率中去除表面反射率後的值,藉由除以從所得的透過率中去除近紅外線吸收劑後的介質的透過率而獲得。 For example, when the internal transmittance λ is 0.1 (10%), the absorbance is 1.0. The internal transmittance refers to a value obtained by excluding the surface reflectance from the obtained transmittance, and is obtained by dividing the obtained transmittance by the transmittance of the medium excluding the near-infrared absorber.
若滿足所述條件(a)及(b),則感測所需要的波長700nm~750nm的透過率高,可獲得充分遮蔽視感度及感測的任一者均不需要的波長的光學濾波器。且說,為了感測所需要的波長700nm~750nm的透過率高、維持必要條件(C),光學濾波器的吸光度λ700較佳為0.25以下,更佳為0.2以下,進而佳為0.18以下,尤佳為0.16以下。所述光學濾波器的吸光度λ700的下限為0。藉由使用滿足所述條件(a)的近紅外線吸收劑,可使光學濾波器的吸光度λ700為所述範圍內。 If the above-mentioned conditions (a) and (b) are satisfied, the transmittance of the wavelengths 700 nm to 750 nm required for sensing is high, and an optical filter that sufficiently shields the wavelengths that are not required for either the visual sensitivity or the sensing can be obtained. . Moreover, in order to sense the required high transmittance of the wavelength of 700nm~750nm and maintain the necessary condition (C), the absorbance λ700 of the optical filter is preferably 0.25 or less, more preferably 0.2 or less, and more preferably 0.18 or less, especially Preferably, it is 0.16 or less. The lower limit of the absorbance λ 700 of the optical filter is zero. By using the near-infrared absorber that satisfies the above-mentioned condition (a), the absorbance λ 700 of the optical filter can be set within the above-mentioned range.
另外,為了自視感度及感測的任一者均不需要的751nm充分遮蔽長波長的光而達成必要條件(D),光學濾波器的吸光度λ751較佳為0.2以上,更佳為0.21以上,進而佳為0.23以上,尤佳為0.25以上。另外,光學濾波器的吸光度λ751較佳為0.8以下,更佳為0.6以下,進而佳為0.5以下。藉由使用滿足所述條件(b)的近紅外線吸收劑,可使光學濾波器的吸光度λ751為所述範圍內。 In addition, in order to achieve the necessary condition (D) in order to sufficiently shield long-wavelength light at 751 nm, which is not required for either self-viewing sensitivity or sensing, the absorbance λ 751 of the optical filter is preferably 0.2 or more, more preferably 0.21 or more. , more preferably 0.23 or more, particularly preferably 0.25 or more. In addition, the absorbance λ 751 of the optical filter is preferably 0.8 or less, more preferably 0.6 or less, and still more preferably 0.5 or less. By using the near-infrared absorber that satisfies the above-mentioned condition (b), the absorbance λ 751 of the optical filter can be set within the above-mentioned range.
然而,滿足條件(b)的近紅外線吸收劑有隨著吸收最大波長λmax從751nm長波長為950nm而(吸光度λ751)/(吸光度λmax)變小的傾向。因此,隨著吸收最大波長(λmax)從751nm長波長為950nm,必須提高基材中含有的近紅外線吸收劑的濃度。另一方面,若於基材中過剩地含有滿足條件(a)的近紅外線 吸收劑,則有時光學濾波器難以維持必要條件(C)。因此,基材中所含的近紅外線吸收劑較佳為滿足下述條件(c)。 However, the near-infrared absorber satisfying the condition (b) tends to decrease (absorbance λ 751 )/(absorbance λ max ) as the absorption maximum wavelength λ max changes from 751 nm to 950 nm. Therefore, it is necessary to increase the concentration of the near-infrared absorbing agent contained in the base material as the absorption maximum wavelength (λ max ) changes from 751 nm to a long wavelength of 950 nm. On the other hand, when the near-infrared absorber satisfying the condition (a) is excessively contained in the base material, it may be difficult for the optical filter to maintain the required condition (C). Therefore, the near-infrared absorber contained in the base material preferably satisfies the following condition (c).
(c)1.5≧Σdye(n)[((950-最短吸收最大波長)×色素濃度×色素介質厚度)]>0.2 (c)1.5≧Σ dye(n) [((950-shortest absorption maximum wavelength)×dye concentration×dye medium thickness)]>0.2
此處,所謂「Σdye(n)」中的「dye(n)」是指基材中所含的各近紅外線吸收劑。另外,所謂「最短吸收最大波長」是指波長751nm~950nm下的吸收最大波長中最短的波長(nm),所謂「色素濃度」是指基材中所含的近紅外線吸收劑的濃度(質量%),所謂「色素介質厚度」是指含有近紅外線吸收劑的基材的厚度(mm)。 Here, "dye(n)" in "Σ dye(n) " refers to each near-infrared absorber contained in the base material. In addition, the "shortest absorption maximum wavelength" refers to the shortest wavelength (nm) among the absorption maximum wavelengths at wavelengths of 751 nm to 950 nm, and the "dye concentration" refers to the concentration (mass %) of the near-infrared absorber contained in the base material. ), the so-called "dye medium thickness" refers to the thickness (mm) of the base material containing the near-infrared absorber.
藉由以所述條件(c)的濃度使用滿足所述條件(a)及(b)的近紅外線吸收劑,可將光學濾波器的吸光度λ700及吸光度λ751設為所述較佳的範圍,容易滿足必要條件(C)及(D)。 By using the near-infrared absorber that satisfies the above-mentioned conditions (a) and (b) at the concentration of the above-mentioned condition (c), the absorbance λ 700 and the absorbance λ 751 of the optical filter can be set to the above-mentioned preferable range. , it is easy to satisfy the necessary conditions (C) and (D).
<花青系色素> <Cyanine pigment>
作為所述花青系色素,只要不損害本發明的效果,則並無特別限定,例如可列舉日本專利特開2009-108267號公報、日本專利特開2010-72575號公報、日本專利特開2016-060774號公報中記載的花青系色素。 The cyanine-based dye is not particularly limited as long as it does not impair the effects of the present invention, and examples thereof include Japanese Patent Laid-Open No. 2009-108267, Japanese Patent Laid-Open No. 2010-72575, and Japanese Patent Laid-Open No. 2016. - The cyanine-based dye described in Gazette No. 060774.
花青系色素的一部分亦包含在波長751nm~950nm不具有吸收最大波長者,但選擇於波長751nm~950nm具有吸收最 大波長的花青系色素,或者併用於波長751nm~950nm不具有吸收最大波長的花青系色素與於波長751nm~950nm具有吸收最大波長的花青系色素,或者併用於波長751nm~950nm不具有吸收最大波長的花青系色素與於波長751nm~950nm具有吸收最大波長的花青系色素以外的色素,可作為獲得本發明的效果的近紅外線吸收劑使用。 Some cyanine pigments also include those that do not have the maximum absorption wavelength at the wavelength of 751 nm to 950 nm, but are selected to have the maximum absorption wavelength at the wavelength of 751 nm to 950 nm. Large-wavelength cyanine pigments, or used in combination with cyanine pigments that do not have the maximum absorption wavelength at wavelengths of 751 nm to 950 nm and cyanine pigments with maximum absorption wavelengths at wavelengths of 751 nm to 950 nm, or used in combination with wavelengths of 751 nm to 950 nm. The dye other than the cyanine-based dye having the absorption maximum wavelength and the cyanine-based dye having the absorption maximum wavelength at a wavelength of 751 nm to 950 nm can be used as a near-infrared absorber for obtaining the effect of the present invention.
<酞菁系色素> <Phthalocyanine dye>
作為所述酞菁系色素,只要不損害本發明的效果,則並無特別限定,例如可列舉日本專利特開昭60-224589號公報、日本專利特表1005-537319號公報、日本專利特開平4-23868號公報、日本專利特開平4-39361號公報、日本專利特開平5-78364號公報、日本專利特開平5-222047號公報、日本專利特開平5-222301號公報、日本專利特開平5-222302號公報、日本專利特開平5-345861號公報、日本專利特開平6-25548號公報、日本專利特開平6-107663號公報、日本專利特開平6-192584號公報、日本專利特開平6-228533號公報、日本專利特開平7-118551號公報、日本專利特開平7-118552號公報、日本專利特開平8-120186號公報、日本專利特開平8-225751號公報、日本專利特開平9-202860號公報、日本專利特開平10-120927號公報、日本專利特開平10-182995號公報、日本專利特開平11-35838號公報、日本專利特開2000-26748號公報、日本專利特開2000-63691號公報、日本專利特開2001-106689號公報、日本專利特開2004-18561號公報、日 本專利特開2005-220060號公報、日本專利特開2007-169343號公報、日本專利特開2013-195480號公報的段落[0026]~[0027]、國際公開第2015/025779號的表1等中記載的化合物等。 The phthalocyanine-based dye is not particularly limited as long as the effects of the present invention are not impaired, and examples thereof include Japanese Patent Laid-Open No. 60-224589, Japanese Patent Application Laid-Open No. 1005-537319, and Japanese Patent Laid-Open No. Japanese Patent Laid-Open No. 4-23868, Japanese Patent Laid-Open No. 4-39361, Japanese Patent Laid-Open No. 5-78364, Japanese Patent Laid-Open No. 5-222047, Japanese Patent Laid-Open No. 5-222301, Japanese Patent Laid-Open No. 5-222301 Japanese Patent Laid-Open No. 5-222302, Japanese Patent Laid-Open No. 5-345861, Japanese Patent Laid-Open No. 6-25548, Japanese Patent Laid-Open No. 6-107663, Japanese Patent Laid-Open No. 6-192584, Japanese Patent Laid-Open No. 6-192584 Japanese Patent Laid-Open No. 6-228533, Japanese Patent Laid-Open No. 7-118551, Japanese Patent Laid-Open No. 7-118552, Japanese Patent Laid-Open No. 8-120186, Japanese Patent Laid-Open No. 8-225751, Japanese Patent Laid-Open No. 8-225751 Japanese Patent Laid-Open No. 9-202860, Japanese Patent Laid-Open No. 10-120927, Japanese Patent Laid-Open No. 10-182995, Japanese Patent Laid-Open No. 11-35838, Japanese Patent Laid-Open No. 2000-26748, Japanese Patent Laid-Open No. 2000-26748 Japanese Patent Laid-Open No. 2000-63691, Japanese Patent Laid-Open No. 2001-106689, Japanese Patent Laid-Open No. 2004-18561, Japanese JP 2005-220060 A Compounds described in etc.
酞菁系色素的一部分亦包含在波長751nm~950nm不具有吸收最大波長者,但選擇於波長751nm~950nm具有吸收最大波長的酞菁系色素,或者併用於波長751nm~950nm不具有吸收最大波長的酞菁系色素與於波長751nm~950nm具有吸收最大波長的酞菁系色素、或者併用於波長751nm~950nm不具有吸收最大波長的酞菁系色素與於波長751nm~950nm具有吸收最大波長的酞菁系色素以外的色素,可作為獲得本發明的效果的近紅外線吸收劑使用。酞菁系色素大多於吸收最大波長附近具有陡峭的吸收特性,於本發明的光學濾波器中使用酞菁系色素的情況下,較佳為與至少一種其他近紅外線吸收劑併用。 Some of the phthalocyanine dyes also include those that do not have the maximum absorption wavelength at the wavelength of 751 nm to 950 nm, but the phthalocyanine dyes that have the maximum absorption wavelength at the wavelength of 751 nm to 950 nm are selected, or they are used in combination with the wavelengths of 751 nm to 950 nm without the maximum absorption wavelength. Phthalocyanine-based dyes and phthalocyanine-based dyes with maximum absorption wavelengths at wavelengths of 751 nm to 950 nm, or used in combination with phthalocyanine-based dyes without maximum absorption wavelengths at wavelengths of 751 nm to 950 nm and phthalocyanines with maximum absorption wavelengths at wavelengths of 751 nm to 950 nm A dye other than the dye can be used as a near-infrared absorber for obtaining the effect of the present invention. Many phthalocyanine-based dyes have steep absorption characteristics in the vicinity of the absorption maximum wavelength, and when a phthalocyanine-based dye is used in the optical filter of the present invention, it is preferable to use together with at least one other near-infrared absorbing agent.
<二硫醇系色素> <Dithiol-based dye>
作為所述二硫醇系色素,只要不損害本發明的效果,則並無特別限定,例如可列舉日本專利特開2006-215395號公報、WO2008/086931號中記載的二硫醇系色素。 The dithiol-based dye is not particularly limited as long as the effects of the present invention are not impaired, and examples thereof include the dithiol-based dyes described in Japanese Patent Laid-Open No. 2006-215395 and WO2008/086931.
二硫醇系色素的一部分亦包含在波長751nm~950nm不具有吸收最大波長者,但選擇於波長751nm~950nm具有吸收最大波長的二硫醇系色素,或者併用於波長751nm~950nm不具有吸收最大波長的二硫醇系色素與於波長751nm~950nm具有吸收最大波長的二硫醇系色素,或者併用於波長751nm~950nm不 具有吸收最大波長的二硫醇系色素與於波長751nm~950nm具有吸收最大波長的二硫醇系色素以外的色素,可作為獲得本發明的效果的近紅外線吸收劑使用。 Some of the dithiol-based dyes also include those that do not have the maximum absorption wavelength at the wavelength of 751 nm to 950 nm, but the dithiol-based dyes with the maximum absorption wavelength at the wavelength of 751 nm to 950 nm are selected, or they are used in combination with the wavelength of 751 nm to 950 nm. Dithiol-based dyes with wavelengths and dithiol-based dyes with the maximum absorption wavelength at wavelengths of 751nm to 950nm, or used in combination with wavelengths of 751nm to 950nm. Dyes other than the dithiol-based dye having an absorption maximum wavelength and the dithiol-based dye having an absorption maximum wavelength at wavelengths of 751 nm to 950 nm can be used as a near-infrared absorber for obtaining the effects of the present invention.
另外,例如亦可如WO1998/034988號中記載般使用二硫醇系色素的反離子鍵結體。 In addition, for example, as described in WO1998/034988, a counter-ion-bonded body of a dithiol-based dye can also be used.
<方酸內鎓系色素> <Squaric acid ylide pigment>
作為所述方酸內鎓系色素,只要不損害本發明的效果,則並無特別限定,例如可列舉下述式(4)~(6)所表示的方酸內鎓系色素、日本專利特開2014-074002號公報、日本專利特開2014-052431號公報中記載的方酸內鎓系色素等,只要利用通常已知的方法合成即可。 The squaraine-based dye is not particularly limited as long as the effects of the present invention are not impaired, and examples thereof include the squaraine-based dyes represented by the following formulae (4) to (6), Japanese Patent The squaraine-based dyes and the like described in Laid-Open Publication No. 2014-074002 and Japanese Patent Laid-Open No. 2014-052431 may be synthesized by a generally known method.
[化5]
所述式(4)~(6)中,X獨立地表示氧原子、硫原子、硒原子或-NH-,作為所述R1及R1',較佳為分別獨立地為氫原子、氯原子、氟原子、甲基、乙基、正丙基、異丙基、正丁基、第二丁基、第三丁基、環己基、苯基、羥基、胺基、二甲基胺基、硝基,更佳為氫原子、氯原子、氟原子、甲基、乙基、正丙基、異丙基、羥基。R2~R8分別獨立地表示氫原子、鹵素原子、磺基、 羥基、氰基、硝基、羧基、磷酸基、-L1或-NRgRh基。Rg及Rh分別獨立地表示氫原子、-La、-Lb、-Lc、-Ld、-Le、-Lf、-Lg、-Lh或-C(O)Ri基(Ri表示-La、-Lb、-Lc、-Ld或-Le),R9獨立地表示氫原子、-La、-Lb、-Lc、-Ld、-Le、-Lf、-Lg或-Lh。 In the above formulae (4) to (6), X independently represents an oxygen atom, a sulfur atom, a selenium atom or -NH-, and the R 1 and R 1' are preferably a hydrogen atom, a chlorine atom, and a chlorine atom respectively independently. atom, fluorine atom, methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, cyclohexyl, phenyl, hydroxyl, amino, dimethylamine, The nitro group is more preferably a hydrogen atom, a chlorine atom, a fluorine atom, a methyl group, an ethyl group, an n-propyl group, an isopropyl group, and a hydroxyl group. R 2 to R 8 each independently represent a hydrogen atom, a halogen atom, a sulfo group, a hydroxyl group, a cyano group, a nitro group, a carboxyl group, a phosphoric acid group, a -L 1 or -NR g Rh group. R g and R h each independently represent a hydrogen atom, -L a , -L b , -L c , -L d , -L e , -L f , -L g , -L h or -C(O)R i group (R i represents -L a , -L b , -L c , -L d or -L e ), R 9 independently represents a hydrogen atom, -L a , -L b , -L c , -L d , -L e , -L f , -L g or -L h .
L1是La、Lb、Lc、Ld、Le、Lf、Lg或Lh。 L 1 is L a , L b , L c , L d , Le , L f , L g or L h .
所述La~Lh表示以下基。 The L a to L h represent the following groups.
(La)所述可具有取代基L的碳數1~12的脂肪族烴基 (L a ) the aliphatic hydrocarbon group having 1 to 12 carbon atoms which may have a substituent L
(Lb)所述可具有取代基L的碳數1~12的鹵素取代烷基 (L b ) the halogen-substituted alkyl group having 1 to 12 carbon atoms which may have a substituent L
(Lc)所述可具有取代基L的碳數3~14的脂環式烴基 (L c ) the alicyclic hydrocarbon group having 3 to 14 carbon atoms which may have a substituent L
(Ld)所述可具有取代基L的碳數6~14的芳香族烴基 (L d ) the aromatic hydrocarbon group having 6 to 14 carbon atoms which may have a substituent L
(Le)所述可具有取代基L的碳數3~14的雜環基 (L e ) the heterocyclic group having 3 to 14 carbon atoms which may have a substituent L
(Lf)所述可具有取代基L的碳數1~12的烷氧基 (L f ) the alkoxy group having 1 to 12 carbon atoms which may have a substituent L
(Lg)所述可具有取代基L的碳數1~12的醯基 (L g ) the acyl group having 1 to 12 carbon atoms which may have a substituent L
(Lh)所述可具有取代基L的碳數1~12的烷氧基羰基 (L h ) the alkoxycarbonyl group having 1 to 12 carbon atoms which may have the substituent L
(Li)所述可具有取代基L的碳數1~12的硫醚基或二硫醚基 (L i ) the thioether group or disulfide group having 1 to 12 carbon atoms which may have the substituent L
R9獨立地表示氫原子、-La、-Lb、-Lc、-Ld或-Le。 R 9 independently represents a hydrogen atom, -L a , -L b , -L c , -L d or -L e .
化合物(5)可藉由取代基調整吸收最大波長,作為所述X,就容易成為最大吸收波長為751nm~950nm的化合物等的方面而言,較佳為硫原子。 The compound (5) can adjust the absorption maximum wavelength by a substituent, and the X is preferably a sulfur atom from the viewpoint of easily becoming a compound having a maximum absorption wavelength of 751 nm to 950 nm.
方酸內鎓系色素的一部分亦包含在波長751nm~950nm不具有吸收最大波長者,但選擇於波長751nm~950nm具有 吸收最大波長的方酸內鎓系色素,或者併用於波長751nm~950nm不具有吸收最大波長的方酸內鎓系色素與於波長751nm~950nm具有吸收最大波長的方酸內鎓系色素,或者併用於波長751nm~950nm不具有吸收最大波長的方酸內鎓系色素與於波長751nm~950nm具有吸收最大波長的方酸內鎓系色素以外的色素,可作為獲得本發明的效果的近紅外線吸收劑使用。 Some of the squaraine ylide pigments also include those that do not have the maximum absorption wavelength at the wavelength of 751 nm to 950 nm, but are selected to have the wavelength of 751 nm to 950 nm. The squaraine-based dye with the maximum absorption wavelength, or the squaraine-based dye with no absorption maximum wavelength at the wavelength of 751nm~950nm and the squaraine-based dye with the maximum absorption wavelength at the wavelength of 751nm~950nm, or used together Pigments other than squaraine-based dyes having no maximum absorption wavelength at wavelengths of 751 nm to 950 nm and dyes other than squaraine-based dyes having maximum absorption wavelengths at wavelengths of 751 nm to 950 nm can be used as near-infrared absorbers for obtaining the effects of the present invention use.
<二亞銨系色素> <Diimmonium pigment>
作為所述二亞銨系色素,只要不損害本發明的效果,則並無特別限定,例如可列舉下述式(7-1)或(7-2)所表示的二亞銨系色素、日本專利第4168031號公報、日本專利第4252961號公報、日本專利特開昭63-165392號公報、WO2004/048480等中記載的二亞銨系色素等,只要利用通常已知的方法合成即可。 The diimmonium-based dye is not particularly limited as long as it does not impair the effects of the present invention, and examples thereof include diimmonium-based dyes represented by the following formula (7-1) or (7-2), Japanese The diimmonium-based dyes and the like described in Patent No. 4168031, Japanese Patent No. 4252961, Japanese Patent Laid-Open No. 63-165392, WO2004/048480, etc. may be synthesized by a generally known method.
[化7]
式(7-1)及(7-2)中,Rdi1~Rdi12分別獨立地表示氫原子、鹵素原子、磺基、羥基、氰基、硝基、羧基、磷酸基、-SRi基、-SO2Ri基、-OSO2Ri基或下述La~Lh中的任一種,Rg及Rh分別獨立地表示氫原子、-C(O)Ri基或下述La~Le中的任一種,Ri表示下述La~Le的任一種, (La)碳數1~12的脂肪族烴基 In formulas (7-1) and (7-2), Rdi1 to Rdi12 each independently represent a hydrogen atom, a halogen atom, a sulfo group, a hydroxyl group, a cyano group, a nitro group, a carboxyl group, a phosphoric acid group, a -SR i group, and -SO 2 R i group, -OSO 2 R i group or any one of the following L a to L h , R g and R h each independently represent a hydrogen atom, a -C(O)R i group or the following L a to L h Any one of Le , R i represents any one of the following L a to L e , (L a ) an aliphatic hydrocarbon group having 1 to 12 carbon atoms
(Lb)碳數1~12的鹵素取代烷基 (L b ) a halogen-substituted alkyl group having 1 to 12 carbon atoms
(Lc)碳數3~14的脂環式烴基 (L c ) Alicyclic hydrocarbon group having 3 to 14 carbon atoms
(Ld)碳數6~14的芳香族烴基 (L d ) Aromatic hydrocarbon group with 6 to 14 carbon atoms
(Le)碳數3~14的雜環基 (L e ) Heterocyclic group with 3 to 14 carbon atoms
(Lf)碳數1~12的烷氧基 (L f ) alkoxy group having 1 to 12 carbon atoms
(Lg)可具有取代基L的碳數1~12的醯基、(Lh)可具有取代基L的碳數1~12的烷氧基羰基 (L g ) an acyl group having 1 to 12 carbon atoms that may have a substituent L, (L h ) an alkoxycarbonyl group having 1 to 12 carbon atoms that may have a substituent L
取代基L為選自由碳數1~12的脂肪族烴基、碳數1~12的鹵素取代烷基、碳數3~14的脂環式烴基、碳數6~14的芳香族烴基及碳數3~14的雜環基所組成的群組中的至少一種,相鄰的Rdi1與Rdi2、Rdi3與Rdi4、Rdi5與Rdi6以及Rdi7與Rdi8亦可形成可具有取代基L的環,X表示中和電荷所需要的陰離子。 Substituent L is selected from the group consisting of aliphatic hydrocarbon groups having 1 to 12 carbon atoms, halogen-substituted alkyl groups having 1 to 12 carbon atoms, alicyclic hydrocarbon groups having 3 to 14 carbon atoms, aromatic hydrocarbon groups having 6 to 14 carbon atoms, and aromatic hydrocarbon groups having 6 to 14 carbon atoms. At least one of the groups consisting of 3-14 heterocyclic groups, adjacent Rdi1 and Rdi2, Rdi3 and Rdi4, Rdi5 and Rdi6, and Rdi7 and Rdi8 can also form a ring that can have a substituent L, and X represents neutralization Anion required for charge.
所述Rdi1~Rdi8較佳為選自氫原子、甲基、乙基、正丙基、異丙基、正丁基、第二丁基、第三丁基、環己基、苯基、苄基中的基,更佳為選自異丙基、第二丁基、第三丁基、苄基中的基。 Described Rdi1~Rdi8 is preferably selected from hydrogen atom, methyl, ethyl, n-propyl, isopropyl, n-butyl, second butyl, tertiary butyl, cyclohexyl, phenyl, benzyl , more preferably a group selected from isopropyl, sec-butyl, tert-butyl and benzyl.
所述Rdi9~Rdi12較佳為選自氫原子、氯原子、氟原子、甲基、乙基、正丙基、異丙基、正丁基、第二丁基、第三丁基、環己基、苯基、羥基、胺基、二甲基胺基、氰基、硝基、甲氧基、乙氧基、正丙氧基、正丁氧基、乙醯基胺基、丙醯基胺基、N-甲 基乙醯基胺基、三氟甲醯基胺基、五氟乙醯基胺基、第三丁醯基胺基、環己炔醯基胺基、正丁基磺醯基、甲基硫基、乙基硫基、正丙基硫基、正丁基硫基中的基,更佳為選自氯原子、氟原子、甲基、乙基、正丙基、異丙基、第三丁基、羥基、二甲基胺基、甲氧基、乙氧基、乙醯基胺基、丙醯基胺基、三氟甲醯基胺基、五氟乙醯基胺基、第三丁醯基胺基、環己炔醯基胺基中的基,尤佳為選自甲基、乙基、正丙基、異丙基中的基。 Described Rdi9~Rdi12 is preferably selected from hydrogen atom, chlorine atom, fluorine atom, methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, cyclohexyl, Phenyl, hydroxyl, amino, dimethylamino, cyano, nitro, methoxy, ethoxy, n-propoxy, n-butoxy, acetylamino, propionylamino, N-A Acetylamino, trifluoroformylamino, pentafluoroacetylamino, tertiary butylamino, cyclohexynylamino, n-butylsulfonyl, methylthio, ethyl group in thio, n-propylthio, n-butylthio, more preferably selected from chlorine atom, fluorine atom, methyl group, ethyl group, n-propyl group, isopropyl group, tert-butyl group, hydroxyl group , dimethylamino, methoxy, ethoxy, acetylamino, propionylamino, trifluoromethylamino, pentafluoroacetylamino, tertiary butylamino, ring The group in the hexynylamino group is particularly preferably a group selected from the group consisting of methyl, ethyl, n-propyl, and isopropyl.
所述X-是中和電荷所需要的陰離子,如式(7-2)般,於陰離子為二價的情況下需要一個離子,如式(7-1)般,於陰離子為一價的情況下需要兩個離子。於後者的情況下,兩個陰離子X-可相同亦可不同,但就合成上的觀點而言,較佳為相同。X-或X2-若為所述陰離子,則並無特別限制。 The X - is an anion required to neutralize the charge, as in formula (7-2), an ion is required in the case of divalent anion, as in formula (7-1), in the case of monovalent anion two ions are required. In the latter case, the two anions X - may be the same or different, but from the viewpoint of synthesis, they are preferably the same. X - or X 2- is not particularly limited as long as it is the anion.
於所述近紅外線吸收劑中,就可見光透過率的高低、波長700nm~750nm的範圍的吸收特性、波長800nm~1100nm的範圍的遮蔽性能而言,較佳為式(4)、式(5)、式(7-1)及式(7-2)所表示的化合物。 In the near-infrared absorber, in terms of the level of visible light transmittance, the absorption characteristics in the range of wavelength 700nm-750nm, and the shielding performance in the range of wavelength 800nm-1100nm, formula (4), formula (5) are preferred. , compounds represented by formula (7-1) and formula (7-2).
本發明中可使用的近紅外線反射膜是具有反射近紅外線的能力的膜。作為所述近紅外線反射膜,可列舉鋁蒸鍍膜、貴金屬薄膜、分散有以氧化銦為主要成分且含有少量氧化錫的金屬氧化物微粒子的樹脂膜、或者交替積層有高折射率材料層與低折射率材料層的介電質多層膜等。若具有所述近紅外線反射膜,則可更有 效地截止近紅外線。 The near-infrared reflective film that can be used in the present invention is a film having the ability to reflect near-infrared rays. Examples of the near-infrared reflective film include a vapor-deposited aluminum film, a precious metal thin film, a resin film in which metal oxide fine particles containing indium oxide as a main component and a small amount of tin oxide are dispersed, or a high-refractive-index material layer and a low-refractive-index material layer alternately laminated. Dielectric multilayer films of refractive index material layers, etc. If the near-infrared reflective film is provided, more Effectively cut off near infrared rays.
本發明中,近紅外線反射膜可設置於基材的單面,亦可設置於兩面。於設置於單面的情況下,製造成本或製造容易性優異,於設置於兩面的情況下,可獲得具有高強度、不易產生翹曲的光學濾波器。 In the present invention, the near-infrared reflective film may be provided on one side of the base material, or may be provided on both sides. When provided on one side, it is excellent in manufacturing cost and manufacturing easiness, and when provided on both sides, the optical filter which has high intensity|strength and is hard to generate|occur|produce a warp can be obtained.
於所述近紅外線反射膜中,就散射少、或密接性好、波長430nm~580nm的範圍的可見光的透過特性高、波長800nm~1100nm的範圍的光的遮蔽性能高而言,較佳為交替積層有高折射率材料層與低折射率材料層的介電質多層膜。若所述近紅外線反射膜為介電質多層膜,則可使所得的固體攝像裝置的畫質良好。 In the near-infrared reflective film, in terms of less scattering, good adhesion, high transmission characteristics of visible light in the wavelength range of 430 nm to 580 nm, and high shielding performance of light in the wavelength range of 800 nm to 1100 nm, it is preferable to alternately A dielectric multilayer film in which a high-refractive-index material layer and a low-refractive-index material layer are laminated. When the near-infrared reflective film is a dielectric multilayer film, the image quality of the obtained solid-state imaging device can be improved.
<介電質多層膜> <Dielectric multilayer film>
作為構成高折射率材料層的材料,可使用折射率為1.7以上的材料,選擇折射率的範圍通常為1.7~2.5的材料。作為所述材料,例如可列舉以氧化鈦、氧化鋯、五氧化鉭、五氧化鈮、氧化鑭、氧化釔、氧化鋅、硫化鋅或氧化銦等為主要成分且含有少量(例如相對於主要成分為0%~10%)氧化鈦、氧化錫及/或氧化鈰等的材料等。 As the material constituting the high refractive index material layer, a material having a refractive index of 1.7 or more can be used, and a material having a refractive index in the range of usually 1.7 to 2.5 is selected. As the material, for example, titanium oxide, zirconium oxide, tantalum pentoxide, niobium pentoxide, lanthanum oxide, yttrium oxide, zinc oxide, zinc sulfide, or indium oxide, etc. as the main component, and a small amount (for example, relative to the main component) can be mentioned. 0% to 10%) titanium oxide, tin oxide and/or cerium oxide and other materials.
作為構成低折射率材料層的材料,可使用折射率小於1.7的材料,選擇折射率的範圍通常為1.2以上且小於1.7的材料。作為所述材料,例如可列舉樹脂、二氧化矽、氧化鋁、氟化鑭、氟化鎂及六氟化鋁鈉、以及將該些混合而成者、以使所述材料的折射率小於1.7的方式設置耗盡者等。 As the material constituting the low-refractive-index material layer, a material having a refractive index of less than 1.7 can be used, and a material whose refractive index is usually in the range of 1.2 or more and less than 1.7 is selected. Examples of the material include resins, silica, alumina, lanthanum fluoride, magnesium fluoride, and sodium aluminum hexafluoride, and mixtures thereof such that the refractive index of the material is less than 1.7 The way to set the drainer etc.
關於積層有高折射率材料層與低折射率材料層的方法,只要形成積層有該些材料層的介電質多層膜,則並無特別限制。例如可於所述基材上直接利用CVD法、真空蒸鍍法、濺渡法、離子輔助蒸鍍法、離子鍍法、自由基輔助濺渡法、離子束濺渡法等形成交替積層有高折射率材料層與低折射率材料層而成的介電質多層膜。離子輔助蒸鍍法、離子鍍法、自由基輔助濺渡法可獲得所得的多層膜的光學膜厚不易隨環境變化的優質膜而較佳。關於離子輔助蒸鍍法,所得的光學濾波器的翹曲少而進而較佳。 The method of laminating the high-refractive-index material layer and the low-refractive-index material layer is not particularly limited as long as a dielectric multilayer film in which these material layers are laminated is formed. For example, alternating layers can be formed directly on the substrate by CVD method, vacuum evaporation method, sputtering method, ion-assisted evaporation method, ion plating method, radical-assisted sputtering method, ion beam sputtering method, etc. A dielectric multilayer film composed of a refractive index material layer and a low refractive index material layer. Ion-assisted vapor deposition, ion-plating, and radical-assisted sputtering are preferred to obtain a high-quality film in which the optical film thickness of the obtained multilayer film is not easily changed with the environment. Regarding the ion-assisted vapor deposition method, the resulting optical filter has less warpage and is more preferable.
關於該些高折射率材料層及低折射率材料層的各層的厚度,通常若將要遮蔽的近紅外線波長設為λ(nm),則除了與基材相鄰的兩層及最外層以外,較佳為0.1λ~0.5λ的光學厚度。若光學厚度為該範圍內,則折射率(n)與膜厚(d)的積(n×d)成為以λ/4計算的光學膜厚與高折射率材料層及低折射率材料層的各層的厚度大致相同的值,根據反射、折射的光學特性的關係,有可容易控制特定波長的遮蔽、透過的傾向。與基材相鄰的兩層較佳為物理厚度5nm~45nm以下。另外,最外層較佳為0.05λ~0.2λ的光學厚度。若與基材相鄰的兩層及最外層為所述範圍的厚度,則可減少可見光的反射率,藉由與所述必要條件(Z)一致,可減少重影。 Regarding the thickness of each of the high-refractive-index material layers and the low-refractive-index material layers, generally if the near-infrared wavelength to be shielded is λ (nm), the thickness of each layer except for the two layers adjacent to the base material and the outermost layer is relatively large. The optical thickness of 0.1λ~0.5λ is preferable. If the optical thickness is within this range, the product (n×d) of the refractive index (n) and the film thickness (d) becomes the difference between the optical film thickness calculated by λ/4 and the high-refractive-index material layer and the low-refractive-index material layer. When the thickness of each layer is approximately the same value, depending on the relationship between the optical properties of reflection and refraction, the shielding and transmission of specific wavelengths tend to be easily controlled. The two layers adjacent to the base material preferably have a physical thickness of 5 nm to 45 nm or less. In addition, the outermost layer preferably has an optical thickness of 0.05λ to 0.2λ. When the thickness of the two layers adjacent to the base material and the outermost layer are in the above-mentioned range, the reflectance of visible light can be reduced, and by meeting the above-mentioned requirement (Z), ghost images can be reduced.
另外,介電質多層膜中的高折射率材料層與低折射率材料層的合計的積層數理想的是5層~60層、較佳為10層~50層。 In addition, the total number of laminated layers of the high-refractive-index material layer and the low-refractive-index material layer in the dielectric multilayer film is preferably 5 to 60 layers, more preferably 10 to 50 layers.
進而,於在形成介電質多層膜時基材產生翹曲的情況下,為 了消除翹曲,可採用於基材兩面形成介電質多層膜或者對基材的形成有介電質多層膜的面照射紫外線等電磁波的方法等。再者,於照射電磁波的情況下,可於介電質多層膜的形成過程中進行照射,亦可於形成後另外進行照射。 Furthermore, when the substrate is warped during the formation of the dielectric multilayer film, it is In order to eliminate warpage, a method of forming a dielectric multilayer film on both surfaces of the base material, or irradiating electromagnetic waves such as ultraviolet rays to the surface of the base material on which the dielectric multilayer film is formed can be employed. Furthermore, in the case of irradiating electromagnetic waves, the irradiation may be performed during the formation of the dielectric multilayer film, or may be separately irradiated after the formation.
然而,於所述專利文獻1及專利文獻2中記載的先前的設計方法中,於形成遮蔽波長751nm~1200nm的介電質多層膜的情況下,感測所需要的波長700nm~750nm的透過率亦有降低之虞。因此,為了獲得滿足必要條件(C)及必要條件(Z2)的光學濾波器,介電質多層膜較佳為滿足下述條件(e)的設計。
However, in the conventional design methods described in
(e)與基材相鄰的兩層及最外層以外的層不包含光學膜厚205nm以下的層(以下亦稱為「層(e1)」)。 (e) The layers other than the two layers adjacent to the base material and the outermost layer do not include a layer with an optical film thickness of 205 nm or less (hereinafter also referred to as "layer (e1)").
此處,所謂光學膜厚表示物理膜厚×折射率的物理量,折射率是波長550nm下的折射率。 Here, the optical film thickness represents the physical quantity of physical film thickness×refractive index, and the refractive index is the refractive index at a wavelength of 550 nm.
於積層有折射率不同的層的介電質多層膜中,設計成遮蔽光學膜厚×4附近的波長。由於與基材相鄰的兩層及與出射介質接近的最外層以外的層是有助於形成減少透過率的遮蔽層的層,因此為了滿足必要條件(C),較佳為不含所述層(e1)。 In a dielectric multilayer film in which layers having different refractive indices are laminated, it is designed to shield wavelengths around the optical film thickness × 4. Since the two layers adjacent to the base material and the layers other than the outermost layer adjacent to the output medium are layers that contribute to the formation of a shielding layer that reduces transmittance, in order to satisfy the requirement (C), it is preferable not to include the above layer (e1).
為了滿足必要條件(Z2),較佳為於基材兩面形成的介電質多層膜均滿足條件(e)。藉此,獲得感測所需要的波長700nm~750nm的透過率高且遮蔽波長751nm~1200nm的光學濾波器。條件(e)下的所述層(e1)的光學膜厚較佳為210nm以下,更佳為215nm以下。 In order to satisfy the necessary condition (Z2), it is preferable that the dielectric multilayer films formed on both sides of the base material satisfy the condition (e). Thereby, an optical filter with high transmittance at wavelengths of 700 nm to 750 nm required for sensing and shielding wavelengths of 751 nm to 1200 nm is obtained. The optical film thickness of the layer (e1) under the condition (e) is preferably 210 nm or less, more preferably 215 nm or less.
另外,為了滿足必要條件(Z1),介電質多層膜較佳為滿足下述條件(f)的設計。 In addition, in order to satisfy the necessary condition (Z1), the dielectric multilayer film is preferably designed to satisfy the following condition (f).
(f)於與基材相鄰的兩層及最外層以外的層中,光學膜厚的標準偏差為6nm~20nm。 (f) In the two layers adjacent to the base material and the layers other than the outermost layer, the standard deviation of the optical film thickness is 6 nm to 20 nm.
藉由設為滿足條件(f)的介電質多層膜的設計,於必要條件(B)的「於波長800nm~1000nm的範圍內,從相對於光學濾波器的面垂直的方向測定時的透過率的平均值為10%以下」特性及必要條件(Z1)的特性的兼具變得容易。於光學濾波器在基材的兩面具有介電質多層膜的情況下,更佳為兩面的介電質多層膜均滿足條件(f)。條件(f)下的光學膜厚的標準偏差較佳為6nm~18nm,更佳為6nm~16nm。 By designing the dielectric multilayer film that satisfies the condition (f), the transmittance when measured from the direction perpendicular to the surface of the optical filter in the necessary condition (B) "in the wavelength range of 800 nm to 1000 nm" The average value of the ratio is 10% or less" and the characteristics of the necessary condition (Z1) can be easily combined. When the optical filter has a dielectric multilayer film on both sides of the base material, it is more preferable that the dielectric multilayer films on both sides satisfy the condition (f). The standard deviation of the optical film thickness under the condition (f) is preferably 6 nm to 18 nm, more preferably 6 nm to 16 nm.
本發明中可使用的近紫外線吸收劑較佳為選自由偶氮甲鹼系化合物、吲哚系化合物、苯並三唑系化合物、三嗪系化合物、部酞菁系化合物、噁唑系化合物、萘基醯亞胺系化合物、噁二唑系化合物、噁嗪系化合物、噁唑啶系化合物、蒽系化合物所組成的群組中的至少一種,較佳為於波長300nm~420nm具有至少一個吸收最大。藉由除了所述近紅外線吸收劑以外含有所述近紫外線吸收劑,可獲得於近紫外波長區域中入射角依存性亦小的光學濾波器。 The near-ultraviolet absorber that can be used in the present invention is preferably selected from azomethine-based compounds, indole-based compounds, benzotriazole-based compounds, triazine-based compounds, merophthalocyanine-based compounds, oxazole-based compounds, At least one of the group consisting of naphthyl imide-based compounds, oxadiazole-based compounds, oxazine-based compounds, oxazolidine-based compounds, and anthracene-based compounds, preferably having at least one absorption at a wavelength of 300 nm to 420 nm maximum. By containing the near-ultraviolet absorber in addition to the near-infrared absorber, an optical filter having a small incident angle dependence also in the near-ultraviolet wavelength region can be obtained.
(A)偶氮甲鹼系化合物 (A) Azomethine-based compound
所述偶氮甲鹼系化合物並無特別限定,例如可由下述式(8) 所表示。 The azomethine-based compound is not particularly limited, for example, it can be represented by the following formula (8) indicated.
式(8)中,Ra1~Ra5分別獨立地表示氫原子、鹵素原子、羥基、羧基、碳數1~15的烷基、碳數1~9的烷氧基或碳數1~9的烷氧基羰基。 In the formula (8), R a1 to R a5 each independently represent a hydrogen atom, a halogen atom, a hydroxyl group, a carboxyl group, an alkyl group having 1 to 15 carbon atoms, an alkoxy group having 1 to 9 carbon atoms, or an alkoxy group having 1 to 9 carbon atoms. Alkoxycarbonyl.
(B)吲哚系化合物 (B) Indole-based compound
所述吲哚系化合物並無特別限定,例如可由下述式(9)所表示。 The indole-based compound is not particularly limited, and can be represented by, for example, the following formula (9).
式(9)中,Rb1~Rb5分別獨立地表示氫原子、鹵素原子、羥基、羧基、氰基、苯基、芳烷基、碳數1~9的烷基、碳數1~9的烷氧基或碳數1~9的烷氧基羰基。 In formula (9), R b1 to R b5 each independently represent a hydrogen atom, a halogen atom, a hydroxyl group, a carboxyl group, a cyano group, a phenyl group, an aralkyl group, an alkyl group having 1 to 9 carbon atoms, and an alkyl group having 1 to 9 carbon atoms. An alkoxy group or an alkoxycarbonyl group having 1 to 9 carbon atoms.
(C)苯並三唑系化合物 (C) Benzotriazole-based compound
所述苯並三唑系化合物並無特別限定,例如可由下述式(10)所表示。 The benzotriazole-based compound is not particularly limited, and can be represented by the following formula (10), for example.
式(10)中,Rc1~Rc3分別獨立地表示氫原子、鹵素原子、羥基、芳烷基、碳數1~9的烷基、碳數1~9的烷氧基、或具有作為取代基的碳數1~9的烷氧基羰基的碳數1~9的烷基。 In formula (10), R c1 to R c3 each independently represent a hydrogen atom, a halogen atom, a hydroxyl group, an aralkyl group, an alkyl group having 1 to 9 carbon atoms, an alkoxy group having 1 to 9 carbon atoms, or a substituted An alkyl group having 1 to 9 carbon atoms in an alkoxycarbonyl group having 1 to 9 carbon atoms in the group.
(D)三嗪系化合物 (D) Triazine-based compound
所述三嗪系化合物並無特別限定,例如可由下述式(11)、式(12)或式(13)所表示。 The triazine-based compound is not particularly limited, and can be represented by, for example, the following formula (11), formula (12), or formula (13).
[化11]
[化13]
式(11)~式(13)中,Rd1獨立地表示氫原子、碳原子數1~15的烷基、碳原子數3~8的環烷基、碳原子數3~8的烯基、碳原子數6~18的芳基、碳原子數7~18的烷基芳基或芳基烷基。其中,該些烷基、環烷基、烯基、芳基、烷基芳基及芳基烷基可經羥基、鹵素原子、碳原子數1~12的烷基或烷氧基取代,亦可經氧原子、硫原子、羰基、酯基、醯胺基或亞胺基中斷。另外,所述取代及中斷可組合。Rd2~Rd9分別獨立地表示氫原子、鹵素原子、羥基、碳原子數1~15的烷基、碳原子數3~8的環烷基、碳原子數3~8的烯基、碳原子數6~18的芳基、碳原子數7~18的烷基芳基或芳基烷基。 In formulas (11) to (13), R d1 independently represents a hydrogen atom, an alkyl group having 1 to 15 carbon atoms, a cycloalkyl group having 3 to 8 carbon atoms, an alkenyl group having 3 to 8 carbon atoms, An aryl group having 6 to 18 carbon atoms, an alkylaryl group or an arylalkyl group having 7 to 18 carbon atoms. Wherein, these alkyl groups, cycloalkyl groups, alkenyl groups, aryl groups, alkylaryl groups and arylalkyl groups may be substituted by hydroxyl groups, halogen atoms, alkyl groups with 1 to 12 carbon atoms or alkoxy groups, or Interrupted by an oxygen atom, a sulfur atom, a carbonyl group, an ester group, an amide group or an imino group. Additionally, the substitutions and interruptions may be combined. R d2 to R d9 each independently represent a hydrogen atom, a halogen atom, a hydroxyl group, an alkyl group having 1 to 15 carbon atoms, a cycloalkyl group having 3 to 8 carbon atoms, an alkenyl group having 3 to 8 carbon atoms, a carbon atom An aryl group having 6 to 18 carbon atoms, an alkylaryl group having 7 to 18 carbon atoms, or an arylalkyl group.
(E)市售品 (E) Commercially available products
可列舉:飛友化學(FewChemicals)公司製造的「S0511」、巴斯夫(BASF)公司製造的「盧默根(Lumogen)(註冊商標)菲萊特(Fviolet)570」、「維泰思(Uvitex)(註冊商標)OB」、昭和 化學工業(股)製造的「海科(Hakkol)RF-K」、日本化學工業(股)製造的「尼卡富勒(Nikkafluor)EFS」、「尼卡富勒(Nikkafluor)SB-conc)」等。亦可使用艾騰(Exiton)公司製造的「ABS407」、QCR方案公司(QCRSolutions Corp.)製造的「UV 381A」、「UV 381B」、「UV 382A」、「UV 386A」、巴斯夫(BASF)公司製造的「帝奴彬(TINUVIN)326」、「帝奴彬(TINUVIN)460」、「帝奴彬(TINUVIN)479」、歐力特(orient)化學(股)製造的「邦速拉(BONASORB)UA3911」等。 Examples include: "S0511" manufactured by Few Chemicals, "Lumogen (registered trademark) Fviolet 570" manufactured by BASF, "Uvitex (Uvitex) registered trademark) OB", Showa "Hakkol RF-K" manufactured by Chemical Industry Co., Ltd., "Nikkafluor EFS" and "Nikkafluor SB-conc" manufactured by Nippon Chemical Industry Co., Ltd. Wait. Also available are "ABS407" manufactured by Exiton, "UV 381A", "UV 381B", "UV 382A", "UV 386A" manufactured by QCR Solutions Corp., BASF Corporation "TINUVIN 326", "TINUVIN 460", "TINUVIN 479", and "BONASORB" manufactured by Orient Chemical Co., Ltd. )UA3911" etc.
<其他成分> <Other ingredients>
所述樹脂層亦可於不損害本發明的效果的範圍內進一步含有抗氧化劑、分散劑、阻燃劑、塑化劑、熱穩定劑、光穩定劑及金屬錯合物系化合物等添加劑。另外,於藉由所述澆鑄成形而製造樹脂製基材的情況下,藉由添加調平劑或消泡劑,可使樹脂製基材的製造變得容易。該些其他成分可單獨使用一種,亦可併用兩種以上。 The resin layer may further contain additives such as antioxidants, dispersants, flame retardants, plasticizers, thermal stabilizers, light stabilizers, and metal complex compounds within a range that does not impair the effects of the present invention. Moreover, when manufacturing a resin-made base material by the said casting molding, manufacture of a resin-made base material can be made easy by adding a leveling agent or an antifoamer. These other components may be used alone or in combination of two or more.
作為所述抗氧化劑,例如可列舉:2,6-二-第三丁基-4-甲基苯酚、2,2'-二氧基-3,3'-二-第三丁基-5,5'-二甲基二苯基甲烷、及四[亞甲基-3-(3,5-二-第三丁基-4-羥基苯基)丙酸酯]甲烷、1,3,5-三(3,5-二-第三丁基-4-羥基苄基)-1,3,5-三嗪基-2,4,6(1H,3H,5H)-三酮等。再者,該些添加劑可於製造樹脂製基材時與樹脂等一起混合,亦可在製造樹脂時添加。另外,添加量根據所期望的特性適宜選擇,相對於樹脂100質量份,通常為0.01質量份~5.0質量份, 較佳為0.05質量份~2.0質量份。 As the antioxidant, for example, 2,6-di-tert-butyl-4-methylphenol, 2,2'-dioxy-3,3'-di-tert-butyl-5, 5'-dimethyldiphenylmethane, and tetrakis[methylene-3-(3,5-di-tert-butyl-4-hydroxyphenyl)propionate]methane, 1,3,5- Tris(3,5-di-tert-butyl-4-hydroxybenzyl)-1,3,5-triazinyl-2,4,6(1H,3H,5H)-trione and the like. In addition, these additives may be mixed with resin etc. at the time of manufacture of a resin base material, and may be added at the time of resin manufacture. In addition, the amount of addition is appropriately selected according to the desired properties, and is usually 0.01 to 5.0 parts by mass relative to 100 parts by mass of the resin, It is preferably 0.05 to 2.0 parts by mass.
[其他功能膜] [Other functional films]
本發明的光學濾波器於不損害本發明的效果的範圍內可適宜設置功能膜。 In the optical filter of the present invention, a functional film can be appropriately provided within a range that does not impair the effects of the present invention.
本發明的光學濾波器可包含一層由功能膜構成的層,亦可包含兩層以上。於本發明的光學濾波器包含兩層以上由功能膜構成的層的情況下,可包含兩層以上同樣的層,亦可包含兩層以上不同的層。 The optical filter of the present invention may include one layer composed of a functional film, or may include two or more layers. When the optical filter of this invention contains the layer which consists of two or more layers of functional films, it may contain two or more layers of the same layer, and may contain two or more layers of different layers.
作為積層功能膜的方法,並無特別限定,可列舉於基材或近紅外線反射膜上熔融成形或澆鑄成形防反射劑、硬塗劑及/或抗靜電劑等塗佈劑的方法等。 The method of laminating the functional film is not particularly limited, and examples thereof include a method of melt-molding or casting-molding coating agents such as antireflection agents, hard coat agents, and/or antistatic agents on a substrate or a near-infrared reflective film.
另外,所述塗佈劑亦可藉由利用棒塗機等將硬化性組成物塗佈於基材或近紅外線反射膜上後,利用紫外線照射及/或加熱等進行硬化而製造。就提高所得的基材的斷裂強度、不易損傷、減少翹曲等而言,較佳為具有硬化性組成物的功能膜。 Moreover, the said coating agent can also be manufactured by apply|coating a curable composition on a base material or a near-infrared reflective film by a bar coater etc., and hardening by ultraviolet irradiation and/or heating, etc.. From the viewpoint of improving the breaking strength of the obtained base material, being less prone to damage, and reducing warpage, a functional film having a curable composition is preferred.
作為所述硬化性組成物,可列舉紫外線(UV)/電子束(EB)硬化型樹脂或熱硬化型樹脂等,具體而言,可列舉乙烯基化合物類、胺基甲酸酯系、胺基甲酸酯丙烯酸酯系、丙烯酸酯系、環氧系及環氧丙烯酸酯系樹脂等。作為含有該些塗佈劑的所述硬化性組成物,可列舉乙烯基系、胺基甲酸酯系、胺基甲酸酯丙烯酸酯系、丙烯酸酯系、環氧系及環氧丙烯酸酯系硬化性組成物等。 Examples of the curable composition include ultraviolet (UV)/electron beam (EB) curable resins, thermosetting resins, and the like, and specific examples thereof include vinyl compounds, urethanes, and amine groups. Formate acrylate-based, acrylate-based, epoxy-based and epoxy-acrylate-based resins, etc. Examples of the curable composition containing these coating agents include vinyl-based, urethane-based, urethane-acrylate-based, acrylate-based, epoxy-based, and epoxy-acrylate-based Curable composition, etc.
作為所述胺基甲酸酯系或胺基甲酸酯丙烯酸酯系硬化 性組成物中所含的成分,例如可列舉:三(2-羥基乙基)異三聚氰酸酯三(甲基)丙烯酸酯、雙(2-羥基乙基)異三聚氰酸酯二(甲基)丙烯酸酯、於分子中具有兩個以上(甲基)丙烯醯基的寡聚胺基甲酸酯(甲基)丙烯酸酯類。該些成分可單獨使用一種,亦可併用兩種以上。進而,亦可調配聚胺基甲酸酯(甲基)丙烯酸酯等寡聚物或聚合物、或聚酯(甲基)丙烯酸酯等寡聚物或聚合物。 As the urethane-based or urethane-acrylate-based hardening The components contained in the composition include, for example, tris(2-hydroxyethyl)isocyanurate tri(meth)acrylate, bis(2-hydroxyethyl)isocyanurate di(2-hydroxyethyl)isocyanurate (Meth)acrylates and oligomeric urethane (meth)acrylates having two or more (meth)acryloyl groups in the molecule. These components may be used alone or in combination of two or more. Furthermore, oligomers or polymers, such as polyurethane (meth)acrylate, or oligomers or polymers, such as polyester (meth)acrylate, can also be prepared.
作為所述乙烯基化合物類,例如可列舉乙酸乙烯酯、丙酸乙烯酯、二乙烯基苯、乙二醇二乙烯基醚、二乙二醇二乙烯基醚、三乙二醇二乙烯基醚等,但並不限定於該些例示。該些成分可單獨使用一種,亦可併用兩種以上。 Examples of the vinyl compounds include vinyl acetate, vinyl propionate, divinylbenzene, ethylene glycol divinyl ether, diethylene glycol divinyl ether, and triethylene glycol divinyl ether. etc., but are not limited to these examples. These components may be used alone or in combination of two or more.
作為所述環氧系或環氧丙烯酸酯系硬化性組成物中所含的成分,並無特別限定,可列舉(甲基)丙烯酸縮水甘油酯、(甲基)丙烯酸甲基縮水甘油酯、於分子中具有兩個以上(甲基)丙烯醯基的寡聚環氧(甲基)丙烯酸酯類等。該些成分可單獨使用一種,亦可併用兩種以上。進而亦可調配聚環氧(甲基)丙烯酸酯等寡聚物或聚合物。 The components contained in the epoxy-based or epoxy-acrylate-based curable composition are not particularly limited, and examples thereof include glycidyl (meth)acrylate, methyl glycidyl (meth)acrylate, and glycidyl (meth)acrylate. Oligomeric epoxy (meth)acrylates etc. which have two or more (meth)acryloyl groups in a molecule|numerator. These components may be used alone or in combination of two or more. Furthermore, oligomers or polymers, such as polyepoxy (meth)acrylate, can also be prepared.
作為所述硬化性組成物的市售品,可列舉東洋油墨製造(股)製造的「LCH」、「LAS」;荒川化學工業(股)製造的「光束集合」;大賽璐氰特(Daicel Cytec)(股)製造的「艾巴克力(EBECRYL)」、「尤巴固(UVACURE)」;捷時雅(JSR)(股)製造的「歐普斯塔(OPSTAR)」、「德蘇來特(Desolite)Z」等。 Commercially available products of the curable composition include "LCH" and "LAS" manufactured by Toyo Ink Co., Ltd.; "Beam Collection" manufactured by Arakawa Chemical Industry Co., Ltd.; Daicel Cytec ) (stock) "EBECRYL (EBECRYL)", "UVACURE (UVACURE)"; Desolite)Z" and so on.
另外,所述硬化性組成物亦可含有聚合起始劑。作為所 述聚合起始劑,可使用公知的光聚合起始劑或熱聚合起始劑,亦可併用光聚合起始劑與熱聚合起始劑。聚合起始劑可單獨使用一種,亦可併用兩種以上。 In addition, the curable composition may contain a polymerization initiator. as the As the polymerization initiator, a known photopolymerization initiator or thermal polymerization initiator may be used, or a photopolymerization initiator and a thermal polymerization initiator may be used in combination. A polymerization initiator may be used individually by 1 type, and may use 2 or more types together.
所述硬化性組成物中,於將硬化性組成物的總量設為100質量%的情況下,聚合起始劑的調配比例較佳為0.1質量%~10質量%,更佳為0.5質量%~10質量%,進而佳為1質量%~5質量%。若聚合起始劑的調配比例為所述範圍內,則硬化性組成物的硬化特性及處理性優異,可獲得具有所期望的硬度的防反射膜、硬塗膜或防靜電膜等功能膜。 In the curable composition, when the total amount of the curable composition is 100% by mass, the blending ratio of the polymerization initiator is preferably 0.1% by mass to 10% by mass, more preferably 0.5% by mass ~10% by mass, more preferably 1% by mass to 5% by mass. When the mixing ratio of the polymerization initiator is within the above range, the curable composition is excellent in curing properties and handleability, and functional films such as an antireflection film, a hard coat film, or an antistatic film having desired hardness can be obtained.
進而,於所述硬化性組成物中可添加有機溶劑作為溶劑,作為有機溶劑,可使用公知的溶劑。作為有機溶劑的具體例,可列舉甲醇、乙醇、異丙醇、丁醇、辛醇等醇類;丙酮、甲基乙基酮、甲基異丁基酮、環己酮等酮類;乙酸乙酯、乙酸丁酯、乳酸乙酯、γ-丁內酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等酯類;乙二醇單甲醚、二乙二醇單丁醚等醚類;苯、甲苯、二甲苯等芳香族烴類;二甲基甲醯胺、二甲基乙醯胺、N-甲基吡咯啶酮等醯胺類。該些溶劑可單獨使用一種,亦可併用兩種以上。 Furthermore, an organic solvent can be added as a solvent to the said curable composition, and a well-known solvent can be used as an organic solvent. Specific examples of the organic solvent include alcohols such as methanol, ethanol, isopropanol, butanol, and octanol; ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, and cyclohexanone; ethyl acetate Ester, butyl acetate, ethyl lactate, γ-butyrolactone, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate and other esters; ethylene glycol monomethyl ether, diethylene glycol monobutyl ether and other ethers Aromatic hydrocarbons such as benzene, toluene and xylene; amides such as dimethylformamide, dimethylacetamide and N-methylpyrrolidone. These solvents may be used alone or in combination of two or more.
所述功能膜的厚度較佳為0.1μm~20μm,進而佳為0.5μm~10μm,尤佳為0.7μm~5μm。 The thickness of the functional film is preferably 0.1 μm to 20 μm, more preferably 0.5 μm to 10 μm, and particularly preferably 0.7 μm to 5 μm.
另外,為了提高基材與功能膜及/或近紅外線反射膜的密接性、或功能膜與近紅外線反射膜的密接性,亦可對基材或功能膜的表面進行電暈處理或電漿處理等表面處理。 In addition, in order to improve the adhesiveness between the base material and the functional film and/or the near-infrared reflective film, or the adhesiveness between the functional film and the near-infrared reflective film, the surface of the base material or the functional film may be subjected to corona treatment or plasma treatment. and other surface treatment.
所述材料有時於數位靜物攝影機、數位攝像機、監視照相機、車載用照相機、網絡照相機、無人飛機等攝像裝置中用作用以減少雲紋或偽色的低通濾波器或波長板的材料。 The material is sometimes used as a material for a low-pass filter or wavelength plate for reducing moiré or false color in imaging devices such as digital still cameras, digital video cameras, surveillance cameras, in-vehicle cameras, network cameras, and drones.
本發明的光學濾波器具有視場角寬、紅色的感度高、改善了重影的特性。因此,作為照相機模組的CCD或CMOS等固體攝像元件的視感度修正用而有用。特別是於數位靜物攝影機、行動電話用照相機、數位攝像機、PC照相機、監視照相機、汽車用照相機、電視機、導航儀、可攜式資訊終端、個人電腦、視訊遊戲機、可攜式遊戲機、指紋認證系統、距離測定感測器、虹膜認證系統、臉部認證系統、距離測定照相機、數位音樂播放器等中有用。 The optical filter of the present invention has the characteristics of wide viewing angle, high red sensitivity, and improved ghosting. Therefore, it is useful for viewing sensitivity correction of solid-state imaging elements such as CCDs and CMOSs of camera modules. Especially for digital still cameras, mobile phone cameras, digital video cameras, PC cameras, surveillance cameras, automotive cameras, televisions, navigators, portable information terminals, personal computers, video game consoles, portable game consoles, It is useful in fingerprint authentication systems, distance measurement sensors, iris authentication systems, face authentication systems, distance measurement cameras, digital music players, and the like.
<固體攝像裝置> <Solid-state imaging device>
本發明的固體攝像裝置具備本發明的光學濾波器。此處,所謂固體攝像裝置是具備CCD或CMOS等固體攝像元件的影像感測器。作為構成固體攝像元件的構件,可使用矽光電二極體或有機半導體等將特定波長的光轉換為電荷的光電轉換元件。另外,於構成固體攝像元件的畫素中,至少具有對波長700nm~750nm的近紅外線具有感度的畫素。 The solid-state imaging device of the present invention includes the optical filter of the present invention. Here, the solid-state imaging device is an image sensor including a solid-state imaging element such as a CCD or a CMOS. As a member constituting the solid-state imaging element, a photoelectric conversion element that converts light of a specific wavelength into electric charge, such as a silicon photodiode or an organic semiconductor, can be used. In addition, among the pixels constituting the solid-state imaging element, there are at least pixels having sensitivity to near-infrared rays having a wavelength of 700 nm to 750 nm.
於本發明的固體攝像裝置中,亦可於固體攝像元件的整個面設置相位差膜、線柵等偏振器。於設置偏振元件的情況下,可獲得圖像的相位資訊,且可三維測量除了被攝物的反射光之外的圖像、被攝物的形狀而更佳。 In the solid-state imaging device of the present invention, a polarizer such as a retardation film or a wire grid may be provided on the entire surface of the solid-state imaging element. When the polarizing element is provided, the phase information of the image can be obtained, and the image and the shape of the subject can be measured three-dimensionally except for the reflected light of the subject, which is better.
<線柵> <wire grid>
設置於本發明的固體攝像元件中的線柵可使用鋁、鎳、銀、鉑、鎢或者包含該些金屬的合金等,較佳為設置日本專利特開2017-003878號公報、日本專利特開2017-005111號公報中記載的偏振器。 For the wire grid provided in the solid-state imaging element of the present invention, aluminum, nickel, silver, platinum, tungsten, or alloys containing these metals can be used, and it is preferable to provide Japanese Patent Laid-Open No. 2017-003878, Japanese Patent Laid-Open The polarizer described in Publication No. 2017-005111.
<照相機模組> <Camera Module>
本發明的照相機模組具備本發明的光學濾波器。此處,所謂照相機模組是具備影像感測器、焦點調整機構、或相位檢測機構、距離測定機構等且將圖像、距離資訊作為電信號輸出的裝置。此處,關於將本發明的光學濾波器用於照相機模組的情況,進行具體說明。示出照相機模組400的剖面概略圖9(a)、圖9(b)。
The camera module of the present invention includes the optical filter of the present invention. Here, the camera module is a device that includes an image sensor, a focus adjustment mechanism, a phase detection mechanism, a distance measurement mechanism, and the like, and outputs image and distance information as electrical signals. Here, the case where the optical filter of this invention is used for a camera module is demonstrated concretely. 9( a ) and 9( b ) are schematic cross-sectional views of the
於本發明的光學濾波器1的情況下,從垂直方向入射的光、與相對於濾波器1的垂直方向從30°入射的光的透過波長不存在大的差(吸收(透過)波長的入射角依存性小),因此即使於透鏡301與感測器302之間具備,濾波器1的感測器整體的顏色的色感變化亦小。因此,於將本發明的光學濾波器1用於照相機模組的情況下,可使用對應於更高角度入射的透鏡,可實現照相機模組的低背化。
In the case of the
本發明中的引起畫質降低的重影是由被攝物與攝像元件之間的光學零件表面或背面所反射的光被其他零件等反射、並入射至與本來的攝像位置(正常檢測部304)不同的位置的攝像元件的光
所產生的圖像不良。
In the present invention, the ghost that causes image quality degradation is that light reflected from the surface or back of an optical component between the subject and the imaging element is reflected by other components, etc., and is incident on the original imaging position (
如圖10所示,於由光學濾波器1的表面反射的光由透鏡進一步反射,透過光學濾波器1並入射至感測器302時,作為重影306而產生。或者於從感測器302反射的光在光學濾波器1的背面進一步反射並入射至感測器302時,作為重影305而產生。
As shown in FIG. 10 , when the light reflected by the surface of the
先前的光學濾波器尤其於波長680nm~720nm附近的反射大,成為重影產生的原因。但是,本發明的光學濾波器1於波長700nm下的兩面的反射率為10%以下,且兩面的(Za)的值為730nm以上,因此波長700nm~(Za)nm的反射率低於50%。因此,波長680nm~720nm附近的光學濾波器的表面的反射兩面均少。因此,錯誤地入射至感測器的重影305、重影306的產生少,可獲得良好的畫質。
Conventional optical filters have large reflections especially in the vicinity of wavelengths of 680 nm to 720 nm, causing ghosting. However, the
圖11是光源401、重影402的一例。
FIG. 11 is an example of the
以下,藉由實施例說明本發明,但本發明並不受該些實施例的任何限定。再者,「份」及「%」只要未特別說明,則是指「質量份」及「質量%」。 Hereinafter, the present invention will be described by way of examples, but the present invention is not limited by these examples at all. In addition, unless otherwise specified, "part" and "%" refer to "part by mass" and "% by mass".
實施例中的各種物性的測定方法及評價方法如下所述。 The measurement methods and evaluation methods of various physical properties in the examples are as follows.
<透過率> <Transmittance>
透過率使用日立高新技術(Hitachi High-technologies)(股)公司製造的分光光度計「U-4100」進行測定。從相對於基材或光學濾波器的面垂直的方向測定時的透過率如圖6所示測定了相對 於光學濾波器垂直透過的無偏振光光線(檢測器201)。另外,從相對於光學濾波器的面垂直的方向以30°的角度測定時的透過率如圖7所示測定了相對於濾波器的垂直方向以30°的角度透過的P偏振光光線及S偏振光光線,且根據該些的平均而計算。 The transmittance was measured using a spectrophotometer "U-4100" manufactured by Hitachi High-technologies Co., Ltd. The transmittance when measured from a direction perpendicular to the surface of the substrate or the optical filter is measured as shown in FIG. 6 . Unpolarized light (detector 201 ) transmitted vertically through the optical filter. In addition, the transmittance when measured at an angle of 30° from the direction perpendicular to the surface of the optical filter was measured as shown in FIG. Polarized light rays, and calculated from the average of these.
再者,波長A nm~B nm的透過率的平均值是藉由測定A nm以上且B nm以下的、每隔1nm的各波長的透過率,並將該透過率的合計除以測定的透過率的數量(波長範圍、B-A+1)所得的值而計算出。 In addition, the average value of transmittance at wavelengths A nm to B nm is obtained by measuring the transmittance of each wavelength at intervals of 1 nm from A nm to B nm, and dividing the total transmittance by the measured transmittance. Calculated from the value obtained by the number of ratios (wavelength range, B-A+1).
<反射率> <Reflectivity>
分光反射率是使用日立高新技術(Hitachi High-technologies)(股)公司製造的分光光度計「U-4100」,藉由絕對反射率測定法對如圖8所示入射5°時的無偏振光光線的從光學濾波器的一個面入射的自表面及背面反射的光的強度以及從另一個面入射的自表面及背面反射的光的強度進行測定。 Spectroscopic reflectance was measured by the absolute reflectance measurement method using a spectrophotometer "U-4100" manufactured by Hitachi High-technologies Co., Ltd. as shown in Fig. 8 for unpolarized light when incident at 5°. The intensity of light reflected from the front surface and the back surface incident on one surface of the optical filter and the intensity of light reflected from the front surface and the back surface incident from the other surface of the optical filter were measured.
再者,波長A nm~B nm的反射率的平均值是藉由測定A nm以上且B nm以下的、每隔1nm的各波長的反射率,並將該反射率的合計除以測定的反射率的數量(波長範圍、B-A+1)所得的值而計算出。 In addition, the average value of the reflectance at wavelengths A nm to B nm is obtained by measuring the reflectance at each wavelength of A nm or more and B nm or less at every 1 nm, and dividing the total reflectance by the measured reflectance. Calculated from the value obtained by the number of ratios (wavelength range, B-A+1).
<吸收劑的評價> <Evaluation of Absorbents>
關於吸收劑的評價,於捷時雅(JSR)(股)公司製造的降冰片烯樹脂「艾騰(ARTON)」(折射率1.52、玻璃轉移溫度160℃)100質量份中添加各種吸收劑,進而添加二氯甲烷,獲得固體成分
以質量基準計為30%的溶液。繼而,將所得的溶液於平滑的玻璃板上進行澆鑄成形,於50℃下乾燥8小時,進一步於減壓下100℃下乾燥1小時後剝離,獲得厚度0.1mm的基材。各種吸收劑的添加量設為使所得的基材在吸收最大波長下的透過率為10%的濃度。根據所得的基材的透過率,計算出吸收最大波長、最短吸收最大波長、吸光度λ700、吸光度λ751、所述(Aa)與(Ab)之差的絕對值。
Regarding the evaluation of absorbents, various absorbents were added to 100 parts by mass of norbornene resin "ARTON" (refractive index 1.52, glass transition temperature 160°C) manufactured by JSR Co., Ltd., Further, dichloromethane was added to obtain a solution having a solid content of 30% by mass. Next, the obtained solution was cast-molded on a smooth glass plate, dried at 50° C. for 8 hours, further dried at 100° C. under reduced pressure for 1 hour, and peeled off to obtain a base material with a thickness of 0.1 mm. The addition amount of each absorber was made into the density|concentration which makes the transmittance|permeability at the absorption maximum wavelength of the obtained
<折射率> <Refractive Index>
本說明書中的各種材料的折射率於並無指定的情況下設為波長550nm的值。 The refractive index of each material in this specification is set to the value of wavelength 550nm unless it is specified.
<玻璃轉移溫度> <Glass transition temperature>
使用新納科技(siino technology)(股)公司製造的示差掃描熱量計「DSC6200」,在升溫速度:每分鐘20℃、氮氣流下進行測定。 A differential scanning calorimeter "DSC6200" manufactured by Siino Technology Co., Ltd. was used, and the measurement was performed at a temperature increase rate: 20°C per minute and a nitrogen gas flow.
<面內相位差R0> <In-plane phase difference R 0 >
使用相位差計(王子測量機器(股)公司製造的「柯步拉(KOBRA)-HBR」),測定實施例中獲得的基材的550nm的相位差,設為面內相位差R0。 The phase difference at 550 nm of the base material obtained in the example was measured using a phase difference meter (“KOBRA-HBR” manufactured by Oji Measuring Instruments Co., Ltd.), and it was set as the in-plane phase difference R 0 .
<綠色的感度及近紅外線的感度評價> <Green sensitivity and near-infrared sensitivity evaluation>
關於光學濾波器對可見光感度及近紅外線感度的效果,作為相當於圖9(b)的構成(帶通濾波器303)的攝像裝置的評價的數值,使用從光學濾波器的面從垂直方向入射時的不同波長的透 過率T0(λ)、以及從垂直方向以30度的角度入射的不同波長的透過率T30(λ),根據以下的數式(i)~(v)計算綠色畫素的感度、近紅外線畫素的感度。 Regarding the effect of the optical filter on the visible light sensitivity and the near-infrared sensitivity, as a numerical value for the evaluation of the imaging device corresponding to the configuration (band-pass filter 303 ) of FIG. 9( b ), incident from the surface of the optical filter in the vertical direction was used The transmittance T 0 (λ) at different wavelengths at the time, and the transmittance T 30 (λ) at different wavelengths incident at an angle of 30 degrees from the vertical direction, calculate the green color according to the following equations (i)~(v) pixel sensitivity and near-infrared pixel sensitivity.
G0表示太陽光線從光學濾波器的垂直方向入射時的綠色畫素的感度,具體而言,基於數式(i),作為光學濾波器的不同波長的透過率T0(λ)、太陽光線的不同波長的強度I(λ)、綠色感測器畫素的不同波長的感度G(λ)、與使綠色及近紅外線透過的雙波長區域透過濾波器的不同波長的透過率DT(λ)的積的每1nm的計算值的總和而計算出。 G 0 represents the sensitivity of the green pixel when sunlight is incident from the vertical direction of the optical filter. Specifically, based on Equation (i), as the transmittance T 0 (λ) of the optical filter at different wavelengths, the sunlight ray Intensity I(λ) at different wavelengths, sensitivity G(λ) at different wavelengths of the green sensor pixel, and transmittance DT(λ) at different wavelengths through the filter in the dual wavelength region that transmits green and near-infrared The sum of the calculated values per 1 nm of the product is calculated.
IR0表示太陽光線從光學濾波器的垂直方向入射時的近紅外線的畫素的感度,具體而言,基於數式(ii),作為光學濾波器的不同波長的透過率T0(λ)、太陽光線的不同波長的強度I(λ)、近紅外線的感測器畫素的不同波長的感度IR(λ)、與使綠色及近紅外線透過的雙波長區域透過濾波器的不同波長的透過率DT(λ) 的積的每1nm的計算值的總和而計算出。 IR 0 represents the near-infrared pixel sensitivity when sunlight is incident from the vertical direction of the optical filter, and specifically, based on the equation (ii), as the transmittances T 0 (λ) at different wavelengths of the optical filter, Intensity I(λ) at different wavelengths of sunlight, sensitivity IR(λ) at different wavelengths of near-infrared sensor pixels, and transmittance at different wavelengths through filters in the dual-wavelength region that transmits green and near-infrared rays Calculated as the sum of the calculated values per 1 nm of the product of DT(λ).
G30表示太陽光線從光學濾波器的垂直方向以30°的角度入射時的綠色畫素的感度,具體而言,基於數式(iii),作為光學濾波器的不同波長的透過率T0(λ)、太陽光線的不同波長的強度I(λ)、綠色感測器畫素的不同波長的感度G(λ)、與使綠色及近紅外線透過的雙波長區域透過濾波器的不同波長的透過率DT(λ)的積的每1nm的計算值的總和而計算出。 G 30 represents the sensitivity of the green pixel when sunlight is incident at an angle of 30° from the vertical direction of the optical filter. Specifically, based on the equation (iii), as the transmittance T 0 ( λ), the intensity I(λ) of different wavelengths of sunlight, the sensitivity G(λ) of different wavelengths of the green sensor pixel, and the transmission of different wavelengths through the filter in the dual-wavelength region that transmits green and near-infrared rays Calculated as the sum of the calculated values per 1 nm of the product of the rate DT(λ).
IR30表示太陽光線從光學濾波器的垂直方向以30°的角度入射時的近紅外線的畫素的感度,具體而言,基於數式(iv),作為光學濾波器的不同波長的透過率T0(λ)、太陽光線的不同波長的強度I(λ)、近紅外線的感測器畫素的不同波長的感度IR(λ)、與使綠色及近紅外線透過的雙波長區域透過濾波器的不同波長的透過率DT(λ)的積的每1nm的計算值的總和而計算出。 IR 30 represents the near-infrared pixel sensitivity when sunlight enters the optical filter at an angle of 30° from the vertical direction of the optical filter, and specifically, based on the formula (iv), as the transmittance T of the optical filter at different wavelengths 0 (λ), intensity I (λ) of different wavelengths of sunlight, sensitivity IR (λ) of different wavelengths of sensor pixels of near-infrared, and two-wavelength transmission filter that transmits green and near-infrared It is calculated as the sum of the calculated values per 1 nm of the products of the transmittances DT(λ) at different wavelengths.
GN表示綠色畫素中的波長800nm~1200nm的雜訊量,具體而言,基於數式(v),作為光學濾波器的不同波長的透過率T0(λ)、太陽光線的不同波長的強度I(λ)、近紅外線的感測器畫素的不同波長的感度IR(λ)、與使綠色及近紅外線透過的雙波長區域透過濾波器的不同波長的透過率DT(λ)的積的每1nm的計算值的總和而計算出。 G N represents the amount of noise at wavelengths of 800 nm to 1200 nm in the green pixel, and specifically, based on the equation (v), the transmittance T 0 (λ) of the optical filter at different wavelengths, the transmittance T 0 (λ) of the different wavelengths of sunlight, and the Product of intensity I(λ), sensitivity IR(λ) at different wavelengths of sensor pixels of near-infrared, and transmittance DT(λ) at different wavelengths through filter in the dual-wavelength region that transmits green and near-infrared The sum of the calculated values per 1 nm is calculated.
如圖3所示,太陽光線的不同波長強度I(λ)使用國立研究開發法人新能源產業技術綜合開發機構公開的、將某日期的岐阜的照射量資料標準化成最大強度成為1.0的值。綠色及近紅外 線的各感測器畫素的不同波長感度基於日本專利特開2017-216678號公報的記載,使用圖4所示的值。 As shown in FIG. 3 , the intensity I(λ) of sunlight at different wavelengths was published by the National Research and Development Corporation for New Energy Industrial Technology Development Corporation, and the exposure data in Gifu on a certain date were normalized to a value with a maximum intensity of 1.0. Green and NIR The different wavelength sensitivity of each sensor pixel of the line is based on the description of Japanese Patent Laid-Open No. 2017-216678, and the values shown in FIG. 4 are used.
透過綠色及近紅外線的雙波長區域透過濾波器藉由於玻璃基材(肖特(SCHOTT)公司製造的D263、厚度0.1mm)的一個面使用離子輔助真空蒸鍍裝置,於蒸鍍溫度120℃下,形成表2所示的設計(0)[二氧化矽(SiO2:550nm的折射率1.46)層與二氧化鈦(TiO2:550nm的折射率2.48)層交替積層而成者]的介電質多層膜而獲得。雙波長區域透過濾波器的不同波長的透過率DT(λ)如圖5所示。 A two-wavelength transmission filter that transmits green and near-infrared rays is made of a glass substrate (D263 manufactured by SCHOTT, thickness 0.1 mm) on one surface using an ion-assisted vacuum evaporation device at an evaporation temperature of 120°C. , to form a dielectric multilayer of the design (0) shown in Table 2 [a layer of silicon dioxide (SiO 2 : Refractive index 1.46 at 550 nm) and titanium dioxide (TiO 2 : Refractive index 2.48 at 550 nm) layers alternately laminated] film obtained. The transmittance DT(λ) of different wavelengths of the two-wavelength region transmission filter is shown in FIG. 5 .
根據所得的畫素感度,同時滿足下述必要條件(Xa)及(Xb)的光學濾波器於綠色畫素中即使在高入射角時感度的變化量亦少,人的視感度低的波長800nm~1200nm的雜訊量少,設為綠色的感度○。不同時滿足必要條件(Xa)及(Xb)的光學濾波器設為綠色的感度×。 According to the obtained pixel sensitivity, an optical filter satisfying both the following requirements (Xa) and (Xb) has a small amount of change in sensitivity even at a high incident angle in a green pixel, and a wavelength of 800 nm at which the human visual sensitivity is low The amount of noise at ~1200 nm is small, and the green sensitivity is set to ○. An optical filter that does not satisfy both the requirements (Xa) and (Xb) is set to the green sensitivity x.
必要條件(Xa)0.8≦G30/G0≦1.2 Necessary condition (Xa)0.8≦G 30 /G 0 ≦1.2
必要條件(Xb)GN/G0≦0.05 Necessary condition (Xb)G N /G 0 ≦0.05
另外,同時滿足下述必要條件(Y)及(Z)的光學濾波器由於綠色畫素對比的近紅外線感度高且即使於寬視場角時近紅外線感度的變化量亦少,因此設為近紅外線感度○。於不滿足必要條件(Y)的情況下,預想IR0需要提高G0對比約5倍以上的感 測器感度,且雜訊量亦增加到5倍以上。另外,於不滿足必要條件(Z)的情況下,於IR30中IR0對比0.2倍感度發生變動。即,於不滿足必要條件(Y)及(Z)的情況下,於太陽光源下的感測時難以偏移IR30的雜訊量。因此,不同時滿足必要條件(Y)及(Z)的光學濾波器設為近紅外線感度×。 In addition, an optical filter that satisfies both the following requirements (Y) and (Z) has a high near-infrared sensitivity for green pixel contrast and a small amount of change in near-infrared sensitivity even at a wide angle of view. Infrared sensitivity ○. In the case where the necessary condition (Y) is not satisfied, it is expected that IR 0 needs to increase the sensor sensitivity by more than 5 times compared to G 0 , and the amount of noise also increases by more than 5 times. In addition, when the necessary condition (Z) is not satisfied, in IR 30 , the sensitivity of IR 0 to 0.2 times changes. That is, when the necessary conditions (Y) and (Z) are not satisfied, it is difficult to shift the noise amount of the IR 30 during sensing under the sunlight. Therefore, an optical filter that does not satisfy both the requirements (Y) and (Z) is set to near-infrared sensitivity x.
必要條件(Y)IR0/G0為0.21以上 Required condition (Y) IR 0 /G 0 is 0.21 or more
必要條件(Z)0.8≦IR30/IR0≦1.2 Necessary condition (Z)0.8≦IR 30 /IR 0 ≦1.2
<重影評價> <Ghosting Evaluation>
於攝像裝置(西肯高科技(shikino high tech)公司製造的「KBCR-M04VG」)中使用的透鏡與感測器之間,構築了具備所得的光學濾波器的攝像裝置。於遮蔽周圍雜散光的環境下將圖像橫向分割為5份且從左向右設為1列~5列,縱向分割為5份時從上向下設為1行~5行的情況下,以鹵素光源(朝日分光(股)公司製造的「ALA-100」)成為2列-4行的位置的方式進行攝像。此時,於1列-5行的區域發生的重影中,將紅色感度為80以上的區域作為重影的區域,評價其面積。將1列-5行的區域的20%以下者設為重影性能○,超過20%者設為重影性能×。 An imaging device including the obtained optical filter was constructed between the lens and the sensor used in the imaging device ("KBCR-M04VG" manufactured by Shikino High Tech). In an environment where the surrounding stray light is shielded, the image is divided into 5 horizontal parts and 1 to 5 columns from left to right, and 1 to 5 lines from top to bottom when vertically divided into 5 parts. The imaging was performed so that a halogen light source (“ALA-100” manufactured by Asahi Corporation) was at the positions of 2 columns and 4 rows. At this time, among the ghosts that occurred in the regions from 1 column to 5 rows, the region with a red sensitivity of 80 or more was regarded as a ghost region, and its area was evaluated. 20% or less of the area from 1 column to 5 rows was set as ghosting performance ○, and those exceeding 20% were set as ghosting performance ×.
於捷時雅(JSR)(股)製造的降冰片烯樹脂「艾騰(ARTON)」(折射率1.52、玻璃轉移溫度160℃)100質量份中添加下述式(14) 所表示的化合物(14)(吸收最大波長:887nm、所述(Aa)與(Ab)之差的絕對值:94nm、吸光度λ700/吸光度λmax:0.08、吸光度λ751/吸光度λmax:0.31)0.078質量份、以及酚系抗氧化劑(艾迪科(ADEKA)公司製造、「艾迪科斯塔波(Adekastab)AO-20」)0.05質量份,進一步添加二氯甲烷並進行溶解,獲得固體成分以質量基準計為30%的溶液。繼而,將所得的溶液於平滑的玻璃板上進行澆鑄成形,於50℃下乾燥8小時,進一步於減壓下100℃下乾燥1小時後剝離。藉由於180℃下對該樹脂膜進行延伸,獲得厚度0.1mm、一邊為60mm、面內相位差R0為5nm的基材。所得的基材的「(950-最短吸收最大波長)×色素濃度×色素介質厚度」為1.3,滿足條件(c)。 The compound ( 14) (Maximum absorption wavelength: 887 nm, absolute value of the difference between (Aa) and (Ab): 94 nm, absorbance λ 700 / absorbance λ max : 0.08, absorbance λ 751 / absorbance λ max : 0.31) 0.078 parts by mass, and 0.05 part by mass of a phenolic antioxidant ("Adekastab AO-20", manufactured by ADEKA), and dichloromethane was further added and dissolved to obtain a solid content of 30% solution. Next, the obtained solution was cast-molded on a smooth glass plate, dried at 50° C. for 8 hours, further dried at 100° C. under reduced pressure for 1 hour, and then peeled off. By extending this resin film at 180°C, a base material having a thickness of 0.1 mm, one side of 60 mm, and an in-plane retardation R 0 of 5 nm was obtained. "(950 - shortest absorption maximum wavelength) x dye concentration x dye medium thickness" of the obtained base material was 1.3, which satisfies the condition (c).
於所得的基材的兩面,使用離子輔助真空蒸鍍裝置,於蒸鍍溫度120℃下分別以設計(1)及設計(2)[二氧化矽(SiO2: 550nm的折射率1.46)層與二氧化鈦(TiO2:550nm的折射率2.48)層交替積層而成者]形成包含介電質多層膜的近紅外線反射膜,獲得厚度0.107mm的光學濾波器。所述設計(1)及設計(2)如表2所示。再者,波長700nm下的反射率於任一面均為10%以下。 On both sides of the obtained base material, using an ion-assisted vacuum evaporation apparatus, the design (1) and design (2) [silicon dioxide (SiO 2 : 550nm refractive index 1.46) layers and Titanium dioxide (TiO 2 : Refractive index 2.48 at 550 nm) layers were alternately laminated] A near-infrared reflective film including a dielectric multilayer film was formed, and an optical filter having a thickness of 0.107 mm was obtained. The design (1) and design (2) are shown in Table 2. In addition, the reflectance at a wavelength of 700 nm was 10% or less on any surface.
測定所得的光學濾波器的透過率及反射率的所述必要條件(A)~(E)及(Za)的結果如表1及圖12所示。 Table 1 and FIG. 12 show the results of measuring the above-mentioned requirements (A) to (E) and (Za) for the transmittance and reflectance of the obtained optical filter.
對該光學濾波器進行感度評價,結果綠色感度為○,近紅外線感度為○。另外進行重影評價,結果重影性能為○。所得的光學濾波器適合於對近紅外線具有感度的固體攝像裝置。 As a result of sensitivity evaluation of this optical filter, the green sensitivity was ○, and the near-infrared sensitivity was ○. In addition, ghost evaluation was performed, and as a result, the ghost performance was ○. The obtained optical filter is suitable for a solid-state imaging device having sensitivity to near infrared rays.
除了將實施例1中的化合物(14)變為下述式(15)所表示的化合物(15)(吸收最大波長:898nm、所述(Aa)與(Ab)之差的絕對值:110nm、吸光度λ700/吸光度λmax:0.05、吸光度λ751/吸光度λmax:0.1)0.05質量份以外,按照同樣的順序獲得基材。所得的基材的「(950-最短吸收最大波長)×色素濃度×色素介質厚度」為0.74,滿足條件(c)。 Except changing the compound (14) in Example 1 to the compound (15) represented by the following formula (15) (maximum absorption wavelength: 898 nm, absolute value of the difference between (Aa) and (Ab): 110 nm, A substrate was obtained in the same procedure except that the absorbance λ 700 /absorbance λ max : 0.05 and the absorbance λ 751 /absorbance λ max : 0.1) 0.05 parts by mass. "(950 - shortest absorption maximum wavelength) x dye concentration x dye medium thickness" of the obtained base material was 0.74, which satisfies the condition (c).
[化15]
於所得的基材的兩面,使用離子輔助真空蒸鍍裝置,於蒸鍍溫度120℃下以設計(2)[二氧化矽(SiO2:550nm的折射率1.46)層與二氧化鈦(TiO2:550nm的折射率2.48)層交替積層而成者]形成包含介電質多層膜的近紅外線反射膜,獲得厚度0.107mm的光學濾波器。所述設計(2)如表2所示。 On both sides of the obtained substrate, an ion-assisted vacuum evaporation apparatus was used to design (2) [silicon dioxide (SiO 2 : 550 nm refractive index 1.46) layer and titanium dioxide (TiO 2 : 550 nm) layers at an evaporation temperature of 120° C. A refractive index of 2.48) layers were alternately laminated] A near-infrared reflective film containing a dielectric multilayer film was formed to obtain an optical filter with a thickness of 0.107 mm. The design (2) is shown in Table 2.
測定所得的光學濾波器的透過率及反射率的所述必要條件(A)~(E)及(Za)的結果如表1所示。再者,波長700nm下的反射率於任一面均為10%以下。 Table 1 shows the results of measuring the above-mentioned requirements (A) to (E) and (Za) for the transmittance and reflectance of the obtained optical filter. In addition, the reflectance at a wavelength of 700 nm was 10% or less on any surface.
對該光學濾波器進行感度評價,結果綠色感度為○,近紅外線感度為○。另外進行重影評價,結果重影性能為○。所得的光學濾波器適合於對近紅外線具有感度的固體攝像裝置。 As a result of sensitivity evaluation of this optical filter, the green sensitivity was ○, and the near-infrared sensitivity was ○. In addition, ghost evaluation was performed, and as a result, the ghost performance was ○. The obtained optical filter is suitable for a solid-state imaging device having sensitivity to near infrared rays.
除了將實施例1中的化合物(14)變為下述式(16)所表示的化合物(16)(吸收最大波長:897nm、所述(Aa)與(Ab)之差的絕對值:134nm、吸光度λ700/吸光度λmax:0.1、吸光度λ751/ 吸光度λmax:0.2)0.064質量份以外,按照同樣的順序獲得基材。所得的基材的「(950-最短吸收最大波長)×色素濃度×色素介質厚度」為0.32,滿足條件(c)。 Except changing the compound (14) in Example 1 to the compound (16) represented by the following formula (16) (maximum absorption wavelength: 897 nm, absolute value of the difference between (Aa) and (Ab): 134 nm, A substrate was obtained in the same procedure except for absorbance λ 700 /absorbance λ max : 0.1 and absorbance λ 751 / absorbance λ max : 0.2) 0.064 parts by mass. "(950 - shortest absorption maximum wavelength) x dye concentration x dye medium thickness" of the obtained base material was 0.32, which satisfies the condition (c).
於所得的基材的兩面,使用離子輔助真空蒸鍍裝置,於蒸鍍溫度120℃下以設計(3)[二氧化矽(SiO2:550nm的折射率1.46)層與二氧化鈦(TiO2:550nm的折射率2.48)層交替積層而成者]形成包含介電質多層膜的近紅外線反射膜,獲得厚度0.104mm的光學濾波器。所述設計(3)如表2所示。 On both sides of the obtained substrate, an ion-assisted vacuum evaporation apparatus was used to design (3) [silicon dioxide (SiO 2 : 550 nm refractive index 1.46) layer and titanium dioxide (TiO 2 : 550 nm) layers at an evaporation temperature of 120° C. A refractive index of 2.48) layers were alternately laminated] A near-infrared reflective film containing a dielectric multilayer film was formed to obtain an optical filter with a thickness of 0.104 mm. The design (3) is shown in Table 2.
測定所得的光學濾波器的透過率及反射率的所述必要條件(A)~(E)及(Za)的結果如表1所示。再者,波長700nm下的反射率於任一面均為10%以下。 Table 1 shows the results of measuring the above-mentioned requirements (A) to (E) and (Za) for the transmittance and reflectance of the obtained optical filter. In addition, the reflectance at a wavelength of 700 nm was 10% or less on any surface.
對該光學濾波器進行感度評價,結果綠色感度為○,近紅外線感度為○。另外進行重影評價,結果重影性能為○。所得的光學濾波器適合於對近紅外線具有感度的固體攝像裝置。 As a result of sensitivity evaluation of this optical filter, the green sensitivity was ○, and the near-infrared sensitivity was ○. In addition, ghost evaluation was performed, and as a result, the ghost performance was ○. The obtained optical filter is suitable for a solid-state imaging device having sensitivity to near infrared rays.
除了將實施例1中的化合物(14)變為下述式(17)所表示的化合物(17)(吸收最大波長:844nm、所述(Aa)與(Ab)之差的絕對值:84nm、吸光度λ700/吸光度λmax:0.08、吸光度λ751/吸光度λmax:0.26)0.05質量份以外,按照同樣的順序獲得基材。所得的基材的「(950-最短吸收最大波長)×色素濃度×色素介質厚度」為0.54,滿足條件(c)。 Except changing the compound (14) in Example 1 to the compound (17) represented by the following formula (17) (maximum absorption wavelength: 844 nm, absolute value of the difference between (Aa) and (Ab): 84 nm, A substrate was obtained in the same procedure except that the absorbance λ 700 /absorbance λ max : 0.08 and the absorbance λ 751 /absorbance λ max : 0.26) 0.05 parts by mass. "(950 - shortest absorption maximum wavelength) x dye concentration x dye medium thickness" of the obtained base material was 0.54, which satisfies the condition (c).
於所得的基材的兩面,使用離子輔助真空蒸鍍裝置,於蒸鍍溫度120℃下以設計(3)[二氧化矽(SiO2:550nm的折射率1.46)層與二氧化鈦(TiO2:550nm的折射率2.48)層交替積層而成者]形成包含介電質多層膜的近紅外線反射膜,獲得厚度0.104mm的光學濾波器。所述設計(3)如表2所示。 On both sides of the obtained substrate, an ion-assisted vacuum evaporation apparatus was used to design (3) [silicon dioxide (SiO 2 : 550 nm refractive index 1.46) layer and titanium dioxide (TiO 2 : 550 nm) layers at an evaporation temperature of 120° C. A refractive index of 2.48) layers were alternately laminated] A near-infrared reflective film containing a dielectric multilayer film was formed to obtain an optical filter with a thickness of 0.104 mm. The design (3) is shown in Table 2.
測定所得的光學濾波器的透過率及反射率的所述必要條件(A)~(E)及(Za)的結果如表1所示。再者,波長700nm 下的反射率於任一面均為10%以下。 Table 1 shows the results of measuring the above-mentioned requirements (A) to (E) and (Za) for the transmittance and reflectance of the obtained optical filter. Furthermore, the wavelength of 700nm The lower reflectance was 10% or less on any surface.
對該光學濾波器進行感度評價,結果綠色感度為○,近紅外線感度為○。另外進行重影評價,結果重影性能為○。所得的光學濾波器適合於對近紅外線具有感度的固體攝像裝置。 As a result of sensitivity evaluation of this optical filter, the green sensitivity was ○, and the near-infrared sensitivity was ○. In addition, ghost evaluation was performed, and as a result, the ghost performance was ○. The obtained optical filter is suitable for a solid-state imaging device having sensitivity to near infrared rays.
除了將實施例1中的化合物(14)的量變為0.07質量份以外,按照同樣的順序獲得基材。所得的基材的「(950-最短吸收最大波長)×色素濃度×色素介質厚度」為1.1,滿足條件(c)。 A base material was obtained in the same procedure except that the amount of compound (14) in Example 1 was changed to 0.07 part by mass. "(950-shortest absorption maximum wavelength)×dye concentration×dye medium thickness" of the obtained base material was 1.1, and the condition (c) was satisfied.
於所得的基材的兩面,使用離子輔助真空蒸鍍裝置,於蒸鍍溫度120℃下分別以設計(4)及設計(5)[二氧化矽(SiO2:550nm的折射率1.46)層與二氧化鈦(TiO2:550nm的折射率2.48)層交替積層而成者]形成包含介電質多層膜的近紅外線反射膜,獲得厚度0.104mm的光學濾波器。所述設計(4)、設計(5)如表2所示。 On both sides of the obtained substrate, using an ion-assisted vacuum evaporation apparatus, at an evaporation temperature of 120° C., the design (4) and design (5) [silicon dioxide (SiO 2 : 550nm refractive index 1.46) layers and Titanium dioxide (TiO 2 : Refractive index 2.48 at 550 nm) layers are alternately laminated] A near-infrared reflective film including a dielectric multilayer film was formed, and an optical filter having a thickness of 0.104 mm was obtained. The design (4) and design (5) are shown in Table 2.
測定所得的光學濾波器的透過率及反射率的所述必要條件(A)~(E)及(Za)的結果如表1及圖13所示。再者,波長700nm下的反射率於任一面均為10%以下。 The results of measuring the above-mentioned requirements (A) to (E) and (Za) of the transmittance and reflectance of the obtained optical filter are shown in Table 1 and FIG. 13 . In addition, the reflectance at a wavelength of 700 nm was 10% or less on any surface.
對該光學濾波器進行感度評價,結果綠色感度為○,近紅外線感度為○。另外進行重影評價,結果重影性能為○。所得的光學濾波器適合於對近紅外線具有感度的固體攝像裝置。 As a result of sensitivity evaluation of this optical filter, the green sensitivity was ○, and the near-infrared sensitivity was ○. In addition, ghost evaluation was performed, and as a result, the ghost performance was ○. The obtained optical filter is suitable for a solid-state imaging device having sensitivity to near infrared rays.
於厚度0.1mm的玻璃板(肖特(SCHOTT)公司製造的D263) 上藉由旋塗塗佈下述樹脂組成物(1)後,於加熱板上以80℃加熱2分鐘,揮發去除溶劑,藉此形成硬化層。此時,調整旋塗機的塗佈條件,以使該硬化層的膜厚為0.8μm左右。 On a glass plate with a thickness of 0.1 mm (D263 manufactured by SCHOTT) After the following resin composition (1) was applied by spin coating, it was heated at 80° C. for 2 minutes on a hot plate, and the solvent was volatilized and removed, thereby forming a hardened layer. At this time, the coating conditions of the spin coater are adjusted so that the film thickness of the cured layer is about 0.8 μm.
樹脂組成物(1):異三聚氰酸環氧乙烷改質三丙烯酸酯(商品名:阿羅尼斯(Aronix)M-315、東亞合成化學(股)製造)30份、1,9-壬二醇二丙烯酸酯20份、甲基丙烯酸20份、甲基丙烯酸縮水甘油酯30份、3-縮水甘油氧基丙基三甲氧基矽烷5份、1-羥基環己基二苯甲酮(商品名:豔佳固(IRGACURE)184、汽巴精化(Ciba specialty chemical)(股)製造)5份及桑艾德(Sunaide)SI-110主劑(三新化學工業(股)製造)1份混合並溶解於丙二醇單甲醚乙酸酯中以使固體成分濃度成為50質量%,然後利用孔徑0.2μm的微孔過濾器過濾而成的溶液。 Resin composition (1): 30 parts of isocyanuric ethylene oxide modified triacrylate (trade name: Aronix M-315, manufactured by Toa Gosei Chemical Co., Ltd.), 1,9- 20 parts of nonanediol diacrylate, 20 parts of methacrylic acid, 30 parts of glycidyl methacrylate, 5 parts of 3-glycidyloxypropyltrimethoxysilane, 1-hydroxycyclohexylbenzophenone (product Name: IRGACURE 184, 5 copies of Ciba specialty chemical (manufactured by Co., Ltd.) and 1 copy of Sunaide SI-110 main agent (manufactured by Sanxin Chemical Industry Co., Ltd.) A solution obtained by mixing and dissolving in propylene glycol monomethyl ether acetate so that the solid content concentration becomes 50% by mass, and then filtering through a microporous filter having a pore diameter of 0.2 μm.
於捷時雅(JSR)(股)製造的降冰片烯樹脂「艾騰(ARTON)」(折射率1.52、玻璃轉移溫度160℃)100質量份中添加所述式(14)所表示的化合物(14)0.7質量份、以及酚系抗氧化劑(艾迪科(ADEKA)公司製造的「艾迪科斯塔波(Adekastab)AO-20」)0.1質量份,進一步添加二氯甲烷並進行溶解,獲得固體成分以質量基準計為10%的溶液(A)。於所述硬化層上,藉由旋塗機以乾燥後的膜厚成為0.01mm的方式塗佈所述溶液(A),於加熱板上於80℃下加熱30分鐘,揮發去除溶劑,藉此形成樹脂層。繼而,自玻璃板側使用UV傳輸式曝光機進行曝光(曝光量:500mJ/cm2、照度:200mW),然後於烘箱中於210℃下煆燒5分 鐘,獲得包含玻璃基板與樹脂層的基材。所得的基材的「(950-最短吸收最大波長)×色素濃度×色素介質厚度」為1.3,滿足條件(c)。 The compound ( 14) 0.7 part by mass, and 0.1 part by mass of a phenolic antioxidant ("Adekastab AO-20" manufactured by ADEKA), and dichloromethane was further added and dissolved to obtain a solid The composition is a 10% solution (A) on a mass basis. On the hardened layer, the solution (A) was applied by a spin coater so that the film thickness after drying was 0.01 mm, and the solution (A) was heated on a hot plate at 80° C. for 30 minutes to volatilize and remove the solvent. A resin layer is formed. Next, it was exposed using a UV transmission exposure machine from the glass plate side (exposure amount: 500 mJ/cm 2 , illuminance: 200 mW), and then calcined in an oven at 210° C. for 5 minutes to obtain a base comprising a glass substrate and a resin layer. material. "(950 - shortest absorption maximum wavelength) x dye concentration x dye medium thickness" of the obtained base material was 1.3, which satisfies the condition (c).
於所得的基材的兩面,使用離子輔助真空蒸鍍裝置,於蒸鍍溫度120℃下分別以設計(4)及設計(5)[二氧化矽(SiO2:550nm的折射率1.46)層與二氧化鈦(TiO2:550nm的折射率2.48)層交替積層而成者]形成包含介電質多層膜的近紅外線反射膜,獲得厚度0.104mm的光學濾波器。所述設計(4)、設計(5)如表2所示。 On both sides of the obtained substrate, using an ion-assisted vacuum evaporation apparatus, at an evaporation temperature of 120° C., the design (4) and design (5) [silicon dioxide (SiO 2 : 550nm refractive index 1.46) layers and Titanium dioxide (TiO 2 : Refractive index 2.48 at 550 nm) layers are alternately laminated] A near-infrared reflective film including a dielectric multilayer film was formed, and an optical filter having a thickness of 0.104 mm was obtained. The design (4) and design (5) are shown in Table 2.
對該光學濾波器進行感度評價,結果綠色感度為○,近紅外線感度為○。另外進行重影評價,結果重影性能為○。所得的光學濾波器適合於對近紅外線具有感度的固體攝像裝置。 As a result of sensitivity evaluation of this optical filter, the green sensitivity was ○, and the near-infrared sensitivity was ○. In addition, ghost evaluation was performed, and as a result, the ghost performance was ○. The obtained optical filter is suitable for a solid-state imaging device having sensitivity to near infrared rays.
於捷時雅(JSR)(股)製造的降冰片烯樹脂「艾騰(ARTON)」(折射率1.52、玻璃轉移溫度160℃)100質量份中添加QCR方案(QCR Solutions)公司製造的吸收劑「NIR829A」(吸收最大波長:840nm、所述(Aa)與(Ab)之差的絕對值:90nm、吸光度λ700/吸光度λmax:0.15、吸光度λ751/吸光度λmax:0.38,不滿足條件(a))0.113質量份、以及酚系抗氧化劑(艾迪科(ADEKA)公司製造的「艾迪科斯塔波(Adekastab)AO-20」)0.05質量份,進一步添加二氯甲烷並進行溶解,獲得固體成分以質量基準計為30%的溶液。繼而,將所得的溶液於平滑的玻璃板上進行澆鑄成 形,於50℃下乾燥8小時,進一步於減壓下100℃下乾燥1小時後剝離。藉由於150℃下對該樹脂膜進行延伸,獲得厚度0.1mm、一邊為60mm、面內相位差R0為5nm的基材。所得的基材的「(950-最短吸收最大波長)×色素濃度×色素介質厚度」為1.2,滿足條件(c)。 To 100 parts by mass of norbornene resin "ARTON" (refractive index 1.52, glass transition temperature 160°C) manufactured by JSR Co., Ltd., an absorbent manufactured by QCR Solutions was added "NIR829A" (maximum absorption wavelength: 840 nm, absolute value of the difference between (Aa) and (Ab): 90 nm, absorbance λ 700 / absorbance λ max : 0.15, absorbance λ 751 / absorbance λ max : 0.38, the conditions are not satisfied (a)) 0.113 parts by mass, and 0.05 part by mass of a phenolic antioxidant ("Adekastab AO-20" manufactured by ADEKA), and further adding dichloromethane to dissolve, A solution having a solid content of 30% by mass was obtained. Next, the obtained solution was cast-molded on a smooth glass plate, dried at 50° C. for 8 hours, further dried at 100° C. under reduced pressure for 1 hour, and then peeled off. By extending this resin film at 150°C, a base material having a thickness of 0.1 mm, one side of 60 mm, and an in-plane retardation R 0 of 5 nm was obtained. "(950 - shortest absorption maximum wavelength) x dye concentration x dye medium thickness" of the obtained base material was 1.2, which satisfies the condition (c).
於所得的基材的兩面,使用離子輔助真空蒸鍍裝置,於蒸鍍溫度120℃下分別以設計(7)及設計(6)[二氧化矽(SiO2:550nm的折射率1.46)層與二氧化鈦(TiO2:550nm的折射率2.48)層交替積層而成者]形成包含介電質多層膜的近紅外線反射膜,獲得厚度0.106mm的光學濾波器。所述設計(6)及設計(7)如表2所示。 On both sides of the obtained base material, using an ion-assisted vacuum evaporation apparatus, at an evaporation temperature of 120° C., the design (7) and design (6) [silicon dioxide (SiO 2 : 550nm refractive index 1.46) layers and Titanium dioxide (TiO 2 : Refractive index 2.48 at 550 nm) layers are alternately laminated] A near-infrared reflective film including a dielectric multilayer film was formed, and an optical filter having a thickness of 0.106 mm was obtained. The design (6) and design (7) are shown in Table 2.
所得的光學濾波器的透過率及反射率的測定結果、所述必要條件(A)~(E)及(Za)的結果如表1及圖14所示。再者,波長700nm下的反射率於任一面均為10%以下。 Table 1 and FIG. 14 show the measurement results of the transmittance and reflectance of the obtained optical filter, and the results of the requirements (A) to (E) and (Za). In addition, the reflectance at a wavelength of 700 nm was 10% or less on any surface.
對該光學濾波器進行感度評價,結果綠色感度為○,近紅外線感度為×。另外,對所得的光學濾波器進行重影評價,結果重影性能為○。所得的光學濾波器於對近紅外線具有感度的固體攝像裝置中性能不充分。 As a result of sensitivity evaluation of this optical filter, the green sensitivity was ○, and the near-infrared sensitivity was x. In addition, ghost evaluation was performed on the obtained optical filter, and as a result, the ghost performance was ○. The obtained optical filter has insufficient performance in a solid-state imaging device having sensitivity to near infrared rays.
於具備溫度計、攪拌器、氮氣導入管、帶側管的滴液漏斗、迪恩-斯達克(Dean-Stark)管及冷卻管的500mL的五口燒瓶中,於氮氣流下使1,4-雙(4-胺基-α,α-二甲基苄基)苯27.66g(0.08莫 耳)及4,4'-雙(4-胺基苯氧基)聯苯基7.38g(0.02莫耳)溶解於γ-丁內酯68.65g及N,N-二甲基乙醯胺17.16g中。使用冰水浴將所得的溶液冷卻至5℃。於保持相同溫度的同時,向所述溶液中一併添加1,2,4,5-環己烷四羧酸二酐22.62g(0.1莫耳)及作為醯亞胺化觸媒的三乙胺0.50g(0.005莫耳)。於添加結束後,升溫至180℃,隨時蒸餾去除餾出液,同時回流6小時。於反應結束後,於空冷至內溫達到100℃後,添加N,N-二甲基乙醯胺143.6g進行稀釋,一面攪拌一面進行冷卻,藉此獲得固體成分濃度20質量%的聚醯亞胺樹脂溶液264.16g。將該聚醯亞胺樹脂溶液的一部分注入1L的甲醇中,使聚醯亞胺樹脂沈澱。將濾出的聚醯亞胺樹脂利用甲醇清洗後,於100℃的真空乾燥機中乾燥24小時,獲得白色粉末狀的聚醯亞胺樹脂。所得的聚醯亞胺樹脂的玻璃轉移溫度為310℃。 In a 500 mL five-neck flask equipped with a thermometer, a stirrer, a nitrogen introduction tube, a dropping funnel with a side tube, a Dean-Stark tube, and a cooling tube, 1,4- Bis(4-amino-α,α-dimethylbenzyl)benzene 27.66g (0.08mol ear) and 4,4'-bis(4-aminophenoxy)biphenyl 7.38g (0.02mol) dissolved in γ-butyrolactone 68.65g and N,N-dimethylacetamide 17.16g middle. The resulting solution was cooled to 5°C using an ice-water bath. While maintaining the same temperature, 22.62 g (0.1 moles) of 1,2,4,5-cyclohexanetetracarboxylic dianhydride and triethylamine as an imidization catalyst were added to the solution. 0.50 g (0.005 moles). After the addition was completed, the temperature was raised to 180°C, and the distillate was distilled off at any time, while refluxing for 6 hours. After completion of the reaction, after cooling in the air until the internal temperature reached 100°C, 143.6 g of N,N-dimethylacetamide was added for dilution, and it was cooled while stirring to obtain a polyamide having a solid content concentration of 20% by mass. Amine resin solution 264.16g. A part of this polyimide resin solution was poured into 1 L of methanol to precipitate the polyimide resin. The filtered polyimide resin was washed with methanol, and then dried in a vacuum dryer at 100° C. for 24 hours to obtain a white powdery polyimide resin. The glass transition temperature of the obtained polyimide resin was 310°C.
於所得的聚醯亞胺樹脂100質量份中添加所述式(4)中的R1為氫基、R1'為甲基、R2為氫基、R3為異丙基、R4為氫基、R5為氫基、R6為甲基的方酸內鎓系吸收劑(吸收最大波長為770nm,所述(Aa)與(Ab)之差的絕對值:82nm、吸光度λ700/吸光度λmax:0.4、吸光度λ751/吸光度λmax:0.9,不滿足條件(a))0.05質量份、以及所述式(7-1)中的Rdi1~Rdi8為第三丁基、Rdi9~Rdi12為氫基、陰離子(X-)為雙(三氟甲烷磺醯基)醯亞胺陰離子的二亞銨系吸收劑(吸收最大波長:1094nm,所述(Aa)與(Ab)之差的絕對值:124nm)0.0005質量份,進一步添加N,N- 二甲基乙醯胺並進行溶解,獲得固體成分以質量基準計為30%的溶液。繼而,將所得的溶液於平滑的玻璃板上進行澆鑄成形,於50℃下乾燥8小時,進一步於減壓下140℃下乾燥1小時後剝離,獲得厚度0.05mm、一邊為60mm的基材。所得的基材的「(950-最短吸收最大波長)×色素濃度×色素介質厚度」為0.45,滿足條件(c)。 To 100 parts by mass of the obtained polyimide resin, in the formula (4), R 1 is a hydrogen group, R 1' is a methyl group, R 2 is a hydrogen group, R 3 is an isopropyl group, and R 4 is a hydrogen group. Hydrogen group, R 5 is hydrogen group, R 6 is a methyl group of squaraine-based absorber (maximum absorption wavelength is 770nm, the absolute value of the difference between (Aa) and (Ab): 82nm, absorbance λ 700 / Absorbance λ max : 0.4, absorbance λ 751 /absorbance λ max : 0.9, 0.05 parts by mass not satisfying condition (a), and Rdi1 to Rdi8 in the formula (7-1) are tertiary butyl groups, Rdi9 to Rdi12 It is a diimmonium-based absorber in which a hydrogen group and an anion (X − ) is a bis(trifluoromethanesulfonyl)imide anion (maximum absorption wavelength: 1094 nm, the absolute difference between the (Aa) and (Ab) Value: 124 nm) 0.0005 parts by mass, N,N-dimethylacetamide was further added and dissolved to obtain a solution with a solid content of 30% by mass. Next, the obtained solution was cast-molded on a smooth glass plate, dried at 50° C. for 8 hours, and further dried at 140° C. under reduced pressure for 1 hour, and peeled off to obtain a base material having a thickness of 0.05 mm and a side of 60 mm. "(950-shortest absorption maximum wavelength)×dye concentration×dye medium thickness" of the obtained base material was 0.45, and the condition (c) was satisfied.
於所得的基材的兩面,藉由塗佈棒(安田精機製作所製造的自動塗膜機(AUTOMATIC FILM APPLICATOR)、型號No.542-AB)塗佈利用甲基乙基酮稀釋包含聚合起始劑2質量份的丙烯酸酯系紫外線硬化性硬塗劑(捷時雅(JSR)(股)製造的「德蘇來特(Desolite)」Z-7524)且固體成分濃度為45質量%的溶液。將其於80℃下乾燥3分鐘後,使用愛古拉飛克斯(Eye Graphics)公司製造的UV傳輸式紫外線硬化裝置「US2-X040560Hz」,氮氣環境下金屬鹵素燈照度270mW/cm2、累計光量150mJ/cm2進行UV硬化,藉此獲得於樹脂膜的兩面具有厚度1μm的硬塗層的厚度0.052mm的積層體。 Both sides of the obtained base material were coated with a coating bar (AUTOMATIC FILM APPLICATOR, model No. 542-AB, manufactured by Yasuda Seiki Co., Ltd.), diluted with methyl ethyl ketone and containing a polymerization initiator. A solution of 2 parts by mass of an acrylate-based ultraviolet curable hard coat agent ("Desolite" Z-7524 manufactured by JSR Corporation) and a solid content concentration of 45% by mass. After drying at 80°C for 3 minutes, using a UV transmission type ultraviolet curing device "US2-X040560Hz" manufactured by Eye Graphics, the illuminance of a metal halide lamp in a nitrogen atmosphere was 270mW/cm 2 , and the cumulative UV curing was performed with a light amount of 150 mJ/cm 2 to obtain a 0.052 mm-thick laminate having a hard coat layer with a thickness of 1 μm on both surfaces of the resin film.
於所得的積層體的兩面,使用離子輔助真空蒸鍍裝置,於蒸鍍溫度120℃下分別以設計(8)及設計(6)[二氧化矽(SiO2:550nm的折射率1.46)層與二氧化鈦(TiO2:550nm的折射率2.48)層交替積層而成者]形成包含介電質多層膜的近紅外線反射膜,獲得厚度0.056mm的光學濾波器。所述設計(8)及設計(6)如表2所示。 Using an ion-assisted vacuum evaporation apparatus, the design (8) and design (6) [silicon dioxide (SiO 2 : 550nm refractive index 1.46) layers and the Titanium dioxide (TiO 2 : Refractive index 2.48 at 550 nm) layers were alternately laminated] to form a near-infrared reflective film including a dielectric multilayer film to obtain an optical filter with a thickness of 0.056 mm. The design (8) and design (6) are shown in Table 2.
所得的光學濾波器的透過率及反射率的測定結果、所述必要條件(A)~(E)及(Za)的結果如表1所示。再者,波長700nm下的反射率於任一面均為10%以下。 Table 1 shows the measurement results of the transmittance and reflectance of the obtained optical filter, and the results of the above-mentioned requirements (A) to (E) and (Za). In addition, the reflectance at a wavelength of 700 nm was 10% or less on any surface.
對該光學濾波器進行感度評價,結果綠色感度為○,近紅外線感度為×。另外進行重影評價,結果重影性能為○。所得的光學濾波器於對近紅外線具有感度的固體攝像裝置中性能不充分。 As a result of sensitivity evaluation of this optical filter, the green sensitivity was ○, and the near-infrared sensitivity was x. In addition, ghost evaluation was performed, and as a result, the ghost performance was ○. The obtained optical filter has insufficient performance in a solid-state imaging device having sensitivity to near infrared rays.
於3L的四口燒瓶中添加2,6-二氟苯甲腈35.12g(0.253mol)、9,9-雙(4-羥基苯基)芴87.60g(0.250mol)、碳酸鉀41.46g(0.300mol)、N,N-二甲基乙醯胺(以下亦稱為「DMAc」)443g及甲苯111g。繼而,於四口燒瓶中安裝溫度計、攪拌機、帶氮氣導入管的三通旋塞、迪恩-斯達克管及冷卻管。繼而,將燒瓶內進行氮氣置換後,使所得的溶液在140℃下反應3小時,隨時將生成的水從迪恩-斯達克管中去除。未確認到水的生成,使溫度慢慢上升到160℃,於該溫度下反應6小時。冷卻至室溫(25℃)後,利用濾紙去除生成的鹽,將濾液投入甲醇中再沈澱,藉由濾別分離過濾物(殘渣)。將所得的過濾物在60℃下真空乾燥一夜,獲得聚醚樹脂。所得的聚醚樹脂的折射率為1.60,玻璃轉移溫度為285℃。 In a 3L four-necked flask, 35.12 g (0.253 mol) of 2,6-difluorobenzonitrile, 87.60 g (0.250 mol) of 9,9-bis(4-hydroxyphenyl) fluorene, and 41.46 g (0.300 mol) of potassium carbonate were added. mol), N,N-dimethylacetamide (hereinafter also referred to as "DMAc") 443 g and toluene 111 g. Next, a thermometer, a stirrer, a three-way stopcock with a nitrogen introduction tube, a Dean-Stark tube, and a cooling tube were attached to the four-necked flask. Next, after nitrogen-purging the inside of the flask, the obtained solution was allowed to react at 140° C. for 3 hours, and the generated water was removed from the Dean-Stark tube at any time. The generation of water was not confirmed, and the temperature was gradually raised to 160°C, and the reaction was carried out at this temperature for 6 hours. After cooling to room temperature (25°C), the generated salt was removed with filter paper, the filtrate was poured into methanol for reprecipitation, and the filtrate (residue) was separated by filtration. The obtained filtrate was vacuum-dried at 60°C overnight to obtain a polyether resin. The obtained polyether resin had a refractive index of 1.60 and a glass transition temperature of 285°C.
於所得的聚醚樹脂100質量份中添加H.W.桑茲(H.W.SANDS)公司製造的吸收劑「SDB4927」(吸收最大波長: 825nm、所述(Aa)與(Ab)之差的絕對值:98nm、吸光度λ700/吸光度λmax:0.1、吸光度λ751/吸光度λmax:0.3)0.05質量份,進一步添加二氯甲烷並進行溶解,獲得固體成分以質量基準計為15%的溶液。繼而,於平滑的厚度0.1mm的玻璃板(肖特(SCHOTT)公司製造的D263)上旋塗所得的溶液,於50℃下乾燥8小時,進一步於減壓下150℃下乾燥1小時而形成厚度0.01mm的樹脂層,藉此獲得包含玻璃板與樹脂層的一邊為60mm的基材。所得的基材的面內相位差R0為8nm。 To 100 parts by mass of the obtained polyether resin was added an absorber "SDB4927" (maximum absorption wavelength: 825 nm, absolute value of the difference between (Aa) and (Ab): 98 nm, absorbance λ 700 /absorbance λ max : 0.1, absorbance λ 751 /absorbance λ max : 0.3) 0.05 parts by mass, and dichloromethane was further added and dissolved to obtain a solution with a solid content of 15% by mass. Next, the obtained solution was spin-coated on a smooth glass plate with a thickness of 0.1 mm (D263 manufactured by SCHOTT), dried at 50° C. for 8 hours, and further dried at 150° C. under reduced pressure for 1 hour to form A resin layer with a thickness of 0.01 mm was obtained, whereby a base material having a side of 60 mm including a glass plate and a resin layer was obtained. The in-plane retardation R 0 of the obtained base material was 8 nm.
繼而,於所得的基材的兩面,使用離子輔助真空蒸鍍裝置,於蒸鍍溫度120℃下以設計(7)及設計(6)[二氧化矽(SiO2:550nm的折射率1.46)層與二氧化鈦(TiO2:550nm的折射率2.48)層交替積層而成者]形成包含介電質多層膜的近紅外線反射膜,獲得厚度0.116mm的光學濾波器。所述設計(7)及設計(6)如表2所示。 Next, the design (7) and design (6) [silicon dioxide (SiO 2 : refractive index 1.46 at 550 nm) layers were formed on both sides of the obtained base material at an evaporation temperature of 120° C. using an ion-assisted vacuum evaporation device. A near-infrared reflective film including a dielectric multilayer film was formed by alternately laminating layers of titanium dioxide (TiO 2 : 550 nm refractive index 2.48) to obtain an optical filter with a thickness of 0.116 mm. The design (7) and design (6) are shown in Table 2.
所得的光學濾波器的透過率及反射率的測定結果、所述必要條件(A)~(E)及(Za)的結果如表1所示。再者,波長700nm下的反射率於任一面均為10%以下。 Table 1 shows the measurement results of the transmittance and reflectance of the obtained optical filter, and the results of the above-mentioned requirements (A) to (E) and (Za). In addition, the reflectance at a wavelength of 700 nm was 10% or less on any surface.
對該光學濾波器進行感度評價,結果綠色感度為○,近紅外線感度為×。另外進行重影評價,結果重影性能為○。所得的光學濾波器於對近紅外線具有感度的固體攝像裝置中性能不充分。 As a result of sensitivity evaluation of this optical filter, the green sensitivity was ○, and the near-infrared sensitivity was x. In addition, ghost evaluation was performed, and as a result, the ghost performance was ○. The obtained optical filter has insufficient performance in a solid-state imaging device having sensitivity to near infrared rays.
於捷時雅(JSR)(股)製造的降冰片烯樹脂「艾騰(ARTON)」(折射率1.52、玻璃轉移溫度160℃)100質量份中添加飛友化學(FewChemicals)公司製造的吸收劑「S-2084」(吸收最大波長:667nm、所述(Aa)與(Ab)之差的絕對值:26nm、吸光度λ700/吸光度λmax:0.06、吸光度λ751/吸光度λmax:0.0,不滿足條件(b))0.0087質量份,進一步添加二氯甲烷並進行溶解,獲得固體成分以質量基準計為30%的溶液。繼而,將所得的溶液於平滑的玻璃板上進行澆鑄成形,於50℃下乾燥8小時,進一步於減壓下140℃下乾燥3小時後剝離,獲得厚度0.1mm、一邊為60mm的基材。所得的基材的「(950-最短吸收最大波長)×色素濃度×色素介質厚度」為1.26,滿足條件(c)。 To 100 parts by mass of norbornene resin "ARTON" (refractive index 1.52, glass transition temperature 160°C) manufactured by JSR Co., Ltd., an absorbent manufactured by Few Chemicals was added "S-2084" (maximum absorption wavelength: 667 nm, absolute value of the difference between (Aa) and (Ab): 26 nm, absorbance λ 700 / absorbance λ max : 0.06, absorbance λ 751 / absorbance λ max : 0.0, no 0.0087 parts by mass of the condition (b) was satisfied, and dichloromethane was further added and dissolved to obtain a solution having a solid content of 30% by mass. Next, the obtained solution was cast-molded on a smooth glass plate, dried at 50° C. for 8 hours, and further dried at 140° C. under reduced pressure for 3 hours, and then peeled off to obtain a substrate having a thickness of 0.1 mm and a side of 60 mm. "(950 - shortest absorption maximum wavelength) x dye concentration x dye medium thickness" of the obtained base material was 1.26, which satisfies the condition (c).
繼而,於所得的基材的兩面,使用離子輔助真空蒸鍍裝置,於蒸鍍溫度120℃下分別以設計(1)及設計(9)[二氧化矽(SiO2:550nm的折射率1.46)層與二氧化鈦(TiO2:550nm的折射率2.48)層交替積層而成者]形成包含介電質多層膜的近紅外線反射膜,獲得厚度0.106mm的光學濾波器。所述設計(1)及設計(9)如表2所示。 Next, on both sides of the obtained base material, using an ion-assisted vacuum evaporation apparatus, at an evaporation temperature of 120° C., design (1) and design (9) [silicon dioxide (SiO 2 : Refractive index of 550 nm: 1.46) Layers and titanium dioxide (TiO 2 : 550 nm refractive index 2.48) layers were alternately laminated] to form a near-infrared reflective film including a dielectric multilayer film to obtain an optical filter with a thickness of 0.106 mm. The design (1) and design (9) are shown in Table 2.
所得的光學濾波器的透過率及反射率的測定結果、所述必要條件(A)~(E)及(Za)的結果如表1及圖15所示。再者,波長700nm下的反射率超過10%。 Table 1 and FIG. 15 show the measurement results of the transmittance and reflectance of the obtained optical filter, and the results of the requirements (A) to (E) and (Za). Furthermore, the reflectance at a wavelength of 700 nm exceeded 10%.
對該光學濾波器進行感度評價,結果綠色感度為○,近紅外線感度為×。另外進行重影評價,結果重影性能為×。所得的 光學濾波器於對近紅外線具有感度的固體攝像裝置中性能不充分。 As a result of sensitivity evaluation of this optical filter, the green sensitivity was ○, and the near-infrared sensitivity was x. In addition, ghost evaluation was performed, and as a result, the ghost performance was x. earned The performance of an optical filter is insufficient in a solid-state imaging device having sensitivity to near-infrared rays.
於捷時雅(JSR)(股)製造的降冰片烯樹脂「艾騰(ARTON)」(折射率1.52、玻璃轉移溫度160℃)100質量份中添加林原(股)公司製造的吸收劑「SMP-54」(吸收最大波長:721nm、所述(Aa)與(Ab)之差的絕對值:65nm、吸光度λ700/吸光度λmax:0.53、吸光度λ751/吸光度λmax:0.08,不滿足條件(a)及(b))0.05質量份,進一步添加二氯甲烷並進行溶解,獲得固體成分以質量基準計為30%的溶液。繼而,將所得的溶液於平滑的玻璃板上進行澆鑄成形,於50℃下乾燥3小時,進一步於減壓下100℃下乾燥3小時後剝離,獲得厚度0.1mm、一邊為60mm的基材。所得的基材的「(950-最短吸收最大波長)×色素濃度×色素介質厚度」為1.15,滿足條件(c)。 To 100 parts by mass of norbornene resin "ARTON" (refractive index 1.52, glass transition temperature 160°C) manufactured by JSR Co., Ltd., an absorbent "SMP" manufactured by Hayashihara Co., Ltd. was added. -54" (maximum absorption wavelength: 721 nm, absolute value of the difference between (Aa) and (Ab): 65 nm, absorbance λ 700 / absorbance λ max : 0.53, absorbance λ 751 / absorbance λ max : 0.08, the conditions are not satisfied (a) and (b)) 0.05 mass part, dichloromethane was further added, it melt|dissolved, and the solution whose solid content was 30% by mass was obtained. Next, the obtained solution was cast-molded on a smooth glass plate, dried at 50° C. for 3 hours, further dried at 100° C. under reduced pressure for 3 hours, and then peeled off to obtain a base material having a thickness of 0.1 mm and a side of 60 mm. "(950-shortest absorption maximum wavelength)×dye concentration×dye medium thickness" of the obtained base material was 1.15, and the condition (c) was satisfied.
於所得的基材的兩面,使用離子輔助真空蒸鍍裝置,於蒸鍍溫度120℃下分別以設計(2)及設計(10)[二氧化矽(SiO2:550nm的折射率1.45、膜厚37nm~194nm)層與二氧化鈦(TiO2:550nm的折射率2.45、膜厚11nm~108nm)層交替積層而成者]形成包含介電質多層膜的近紅外線反射膜,獲得厚度0.106mm的光學濾波器。 On both sides of the obtained base material, using an ion-assisted vacuum evaporation apparatus, at an evaporation temperature of 120° C., design (2) and design (10) [silicon dioxide (SiO 2 : 550 nm refractive index 1.45, film thickness 1.45) 37nm~194nm) layer and titanium dioxide (TiO 2 : 550nm refractive index 2.45, film thickness 11nm~108nm) layers alternately laminated] to form a near-infrared reflective film containing a dielectric multilayer film to obtain an optical filter with a thickness of 0.106mm device.
所得的光學濾波器的透過率及反射率的測定結果、所述必要條件(A)~(E)及(Za)的結果如表1所示。再者,波長 700nm下的反射率超過10%。 Table 1 shows the measurement results of the transmittance and reflectance of the obtained optical filter, and the results of the above-mentioned requirements (A) to (E) and (Za). Furthermore, the wavelength The reflectance at 700nm exceeds 10%.
對該光學濾波器進行感度評價,結果綠色感度為○,近紅外線感度為×。另外進行重影評價,結果重影性能為×。所得的光學濾波器於對近紅外線具有感度的固體攝像裝置中性能不充分。 As a result of sensitivity evaluation of this optical filter, the green sensitivity was ○, and the near-infrared sensitivity was x. In addition, ghost evaluation was performed, and as a result, the ghost performance was x. The obtained optical filter has insufficient performance in a solid-state imaging device having sensitivity to near infrared rays.
於捷時雅(JSR)(股)製造的降冰片烯樹脂「艾騰(ARTON)」(折射率1.52、玻璃轉移溫度160℃)100質量份中添加所述化合物(15)0.05質量份及下述式(18)所表示的化合物(18)(吸收最大波長:1064nm、所述(Aa)與(Ab)之差的絕對值:139nm、吸光度λ700/吸光度λmax:0.05、吸光度λ751/吸光度λmax:0.1)0.04質量份,進一步添加二氯甲烷並進行溶解,獲得固體成分以質量基準計為30%的溶液。繼而,將所得的溶液於平滑的玻璃板上進行澆鑄成形,於50℃下乾燥3小時,進一步於減壓下100℃下乾燥3小時後剝離,獲得厚度0.1mm、一邊為60mm的光學濾波器。 To 100 parts by mass of the norbornene resin "ARTON" (refractive index 1.52, glass transition temperature 160°C) manufactured by JSR Co., Ltd., 0.05 mass part of the compound (15) and the following were added. Compound (18) represented by the formula (18) (maximum absorption wavelength: 1064 nm, absolute value of the difference between (Aa) and (Ab): 139 nm, absorbance λ 700 / absorbance λ max : 0.05, absorbance λ 751 / Absorbance λ max : 0.1) 0.04 parts by mass, and dichloromethane was further added and dissolved to obtain a solution having a solid content of 30% by mass. Next, the obtained solution was cast-molded on a smooth glass plate, dried at 50° C. for 3 hours, further dried at 100° C. under reduced pressure for 3 hours, and then peeled off to obtain an optical filter with a thickness of 0.1 mm and a side of 60 mm. .
[化18]
所得的光學濾波器的透過率及反射率的測定結果、所述必要條件(A)~(E)及(Za)的結果如表1所示。再者,波長700nm下的反射率於任一面均為10%以下。 Table 1 shows the measurement results of the transmittance and reflectance of the obtained optical filter, and the results of the above-mentioned requirements (A) to (E) and (Za). In addition, the reflectance at a wavelength of 700 nm was 10% or less on any surface.
對該光學濾波器進行感度評價,結果綠色感度為×,近紅外線感度為○。另外進行重影評價,結果重影性能為○。所得的光學濾波器於對近紅外線具有感度的固體攝像裝置中性能不充分。 As a result of sensitivity evaluation of this optical filter, the green sensitivity was x, and the near-infrared sensitivity was ○. In addition, ghost evaluation was performed, and as a result, the ghost performance was ○. The obtained optical filter has insufficient performance in a solid-state imaging device having sensitivity to near infrared rays.
於玻璃基材(肖特(SCHOTT)公司製造的D263、厚度0.1mm)的兩面,使用離子輔助真空蒸鍍裝置,於蒸鍍溫度120℃下分別以表2所示的設計(1)及設計(12)[二氧化矽(SiO2:550nm的折射率1.46)層與二氧化鈦(TiO2:550nm的折射率2.48)層交替積層而成者]形成介電質多層膜,藉此獲得光學濾波器。所得的光學濾波器的透過率及反射率的測定結果、所述必要條件(A)~(E)及(Za)的結果如表1及圖16所示。再者,波長700nm下 的反射率於任一面均為10%以下。 On both sides of a glass substrate (D263 manufactured by SCHOTT, thickness 0.1 mm), an ion-assisted vacuum evaporation device was used, and the design (1) and design shown in Table 2 were used at an evaporation temperature of 120°C, respectively. (12) [Silicon dioxide (SiO 2 : Refractive index 1.46 at 550 nm) layers and titanium dioxide (TiO 2 : Refractive index 2.48 at 550 nm) layers are alternately laminated] A dielectric multilayer film is formed, thereby obtaining an optical filter . Table 1 and FIG. 16 show the measurement results of the transmittance and reflectance of the obtained optical filter, and the results of the above-mentioned requirements (A) to (E) and (Za). In addition, the reflectance at a wavelength of 700 nm was 10% or less on any surface.
對該光學濾波器進行感度評價,結果綠色感度為○,近紅外線感度為×。另外進行重影評價,結果重影性能為○。所得的光學濾波器於對近紅外線具有感度的固體攝像裝置中性能不充分。 As a result of sensitivity evaluation of this optical filter, the green sensitivity was ○, and the near-infrared sensitivity was x. In addition, ghost evaluation was performed, and as a result, the ghost performance was ○. The obtained optical filter has insufficient performance in a solid-state imaging device having sensitivity to near infrared rays.
本發明的光學濾波器對於照相機模組的CCD或CMOS等具有波長700nm~750nm的近紅外線感度的固體攝像元件,作為感度修正用而有用。特別是於數位靜物攝影機、行動電話用照相機、智慧型手機用照相機、數位攝像機、PC照相機、監視照相機、汽車用照相機、電視機、導航儀、可攜式資訊終端、個人電腦、視訊遊戲機、可攜式遊戲機、指紋認證系統、虹膜認證系統、臉部認證系統、距離測定感測器、距離測定照相機、數位音樂播放器、植被感測系統、腦血流量感測系統等中有用。 The optical filter of the present invention is useful as a sensitivity correction for a solid-state imaging element having a near-infrared sensitivity with a wavelength of 700 nm to 750 nm, such as a CCD or a CMOS of a camera module. Especially for digital still cameras, cameras for mobile phones, cameras for smart phones, digital video cameras, PC cameras, surveillance cameras, automotive cameras, televisions, navigators, portable information terminals, personal computers, video game consoles, It is useful in portable game consoles, fingerprint authentication systems, iris authentication systems, face authentication systems, distance measuring sensors, distance measuring cameras, digital music players, vegetation sensing systems, cerebral blood flow sensing systems, and the like.
Claims (12)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018-170316 | 2018-09-12 | ||
| JP2018170316 | 2018-09-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW202022414A TW202022414A (en) | 2020-06-16 |
| TWI753299B true TWI753299B (en) | 2022-01-21 |
Family
ID=69778435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW108132865A TWI753299B (en) | 2018-09-12 | 2019-09-11 | Optical filters and their uses |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP7255600B2 (en) |
| KR (1) | KR102779841B1 (en) |
| CN (1) | CN112585508B (en) |
| TW (1) | TWI753299B (en) |
| WO (1) | WO2020054695A1 (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023535159A (en) * | 2020-07-17 | 2023-08-16 | エヴァテック・アーゲー | biometric authentication system |
| JP7656406B2 (en) * | 2020-07-21 | 2025-04-03 | 東京晨美光学電子株式会社 | Spot imaging device and spot imaging equipment |
| CN116097133A (en) * | 2020-07-24 | 2023-05-09 | 华为技术有限公司 | Infrared cut-off filter, infrared cut-off lens and camera module |
| KR20230074417A (en) * | 2020-09-25 | 2023-05-30 | 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 | Cyanine compounds and photoelectric conversion devices |
| TWI817205B (en) * | 2020-11-25 | 2023-10-01 | 大立光電股份有限公司 | Optical lens assembly, imaging apparatus and electronic device |
| JP7779131B2 (en) * | 2020-12-25 | 2025-12-03 | Jsr株式会社 | Optical filter, solid-state imaging device and camera module |
| JP7586387B1 (en) * | 2022-12-27 | 2024-11-19 | Agc株式会社 | Optical Filters |
| WO2025142714A1 (en) * | 2023-12-25 | 2025-07-03 | 株式会社日本触媒 | Resin composition, method for producing same, application of same, method for producing molded body, and method for producing image sensor |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005338395A (en) * | 2004-05-26 | 2005-12-08 | Jsr Corp | Near-infrared cut filter and manufacturing method thereof |
| TW201710715A (en) * | 2015-07-28 | 2017-03-16 | Jsr Corp | Optical filter and ambient light sensor with optical filter |
| TW201721188A (en) * | 2015-11-30 | 2017-06-16 | Jsr Corp | Optical filter, ambient light sensor and sensor module |
| TW201743439A (en) * | 2016-06-08 | 2017-12-16 | Jsr Corp | Optical filter and optical sensing device |
| WO2018043564A1 (en) * | 2016-08-31 | 2018-03-08 | Jsr株式会社 | Optical filter and device using optical filter |
| WO2018155634A1 (en) * | 2017-02-24 | 2018-08-30 | 株式会社オプトラン | Camera structure and image capturing device |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5810604B2 (en) | 2010-05-26 | 2015-11-11 | Jsr株式会社 | Near-infrared cut filter and device using near-infrared cut filter |
| JP2014048402A (en) * | 2012-08-30 | 2014-03-17 | Kyocera Corp | Optical filter member and imaging device |
| JP6380390B2 (en) * | 2013-05-29 | 2018-08-29 | Jsr株式会社 | Optical filter and apparatus using the filter |
| WO2015056734A1 (en) * | 2013-10-17 | 2015-04-23 | Jsr株式会社 | Optical filter, solid-state image pickup device, and camera module |
| JP6358114B2 (en) * | 2015-02-02 | 2018-07-18 | Jsr株式会社 | Optical filter and device using optical filter |
| JP6451374B2 (en) | 2015-02-12 | 2019-01-16 | コニカミノルタ株式会社 | Plant growth index measuring apparatus and method |
| CN109320992B (en) * | 2015-02-18 | 2020-05-05 | Agc株式会社 | Squarium-based dye, resin film, optical filter, and imaging device |
| CN109923447B (en) * | 2016-11-14 | 2021-03-30 | 日本板硝子株式会社 | Light absorbing composition and optical filter |
| WO2018123676A1 (en) | 2016-12-27 | 2018-07-05 | アルプス電気株式会社 | Sensor module and biometric information display system |
| JP2019012121A (en) * | 2017-06-29 | 2019-01-24 | Agc株式会社 | Optical filter and imaging device |
-
2019
- 2019-09-10 KR KR1020217007260A patent/KR102779841B1/en active Active
- 2019-09-10 CN CN201980054202.5A patent/CN112585508B/en active Active
- 2019-09-10 JP JP2020546021A patent/JP7255600B2/en active Active
- 2019-09-10 WO PCT/JP2019/035476 patent/WO2020054695A1/en not_active Ceased
- 2019-09-11 TW TW108132865A patent/TWI753299B/en active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005338395A (en) * | 2004-05-26 | 2005-12-08 | Jsr Corp | Near-infrared cut filter and manufacturing method thereof |
| TW201710715A (en) * | 2015-07-28 | 2017-03-16 | Jsr Corp | Optical filter and ambient light sensor with optical filter |
| TW201721188A (en) * | 2015-11-30 | 2017-06-16 | Jsr Corp | Optical filter, ambient light sensor and sensor module |
| TW201743439A (en) * | 2016-06-08 | 2017-12-16 | Jsr Corp | Optical filter and optical sensing device |
| WO2018043564A1 (en) * | 2016-08-31 | 2018-03-08 | Jsr株式会社 | Optical filter and device using optical filter |
| WO2018155634A1 (en) * | 2017-02-24 | 2018-08-30 | 株式会社オプトラン | Camera structure and image capturing device |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202022414A (en) | 2020-06-16 |
| WO2020054695A1 (en) | 2020-03-19 |
| JPWO2020054695A1 (en) | 2021-08-30 |
| JP7255600B2 (en) | 2023-04-11 |
| KR102779841B1 (en) | 2025-03-12 |
| CN112585508B (en) | 2023-02-28 |
| CN112585508A (en) | 2021-03-30 |
| KR20210055704A (en) | 2021-05-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI753299B (en) | Optical filters and their uses | |
| JP7088261B2 (en) | Optical filters and devices using optical filters | |
| CN110873914B (en) | Optical filter, method for manufacturing the same, solid-state imaging device, and camera module | |
| KR101661088B1 (en) | Optical filter, solid-state image pickup device, and camera module | |
| JP7163918B2 (en) | Near-infrared cut filter and device using the near-infrared cut filter | |
| KR102547262B1 (en) | Optical filters and devices using optical filters | |
| JP7251423B2 (en) | Optical components and camera modules | |
| CN107076895A (en) | Optical Filters and Cameras | |
| CN105531608B (en) | Optical filter, solid-state imaging device, and camera module | |
| JP2017072748A (en) | Optical filter and imaging device using optical filter | |
| CN111868579A (en) | Optical filters and their uses | |
| CN108693584B (en) | Optical filter and solid-state imaging device using the same | |
| TW202304698A (en) | Optical element, optical filter, solid-state imaging device, and optical sensor device wherein the optical element includes a resin layer that reduces a shoulder peak in the red to near-infrared region based on a near-infrared absorber | |
| KR20220166731A (en) | Composition, optical member and device with optical member | |
| JP2018159925A (en) | Optical filter and use of the same | |
| KR20220146334A (en) | Substrate, optical filter, solid state image pickup device, and camera module | |
| TWI397760B (en) | Lens module and camera module | |
| CN115113314A (en) | Substrates, optical filters and their uses | |
| CN220584520U (en) | Optical filter, imaging device, camera module, and optical sensor | |
| JP7779131B2 (en) | Optical filter, solid-state imaging device and camera module |