TWI752732B - Via hole alignment assembly and via hole alignment method - Google Patents

Abstract

A via hole alignment assembly and a via hole alignment method are provided. The via hole alignment assembly includes a mold set, a sliding table, and an optical image module. The mold set is configured to dispose a plurality of guide plates. The sliding table includes a hollow region, and the mold set is disposed above the hollow region. The optical image module is configured to photograph the plurality of guide plates on the mold set and detect a plurality of via holes of the plurality of guide plates.

Description

Perforation alignment assembly and perforation alignment method

The present invention relates to an alignment assembly and an alignment method; in particular, to a perforation alignment assembly and a perforation alignment method.

The probe card is the medium between the electronic components to be tested (such as wafers or chips, etc.) and the electronic test system. The use of the probe card is to perform functional testing on the electronic components to be tested with probe electrical contacts before the electronic components to be tested are packaged, so as to screen out defective products before proceeding with the subsequent packaging process.

One end of the probe on the probe card is used for electrical contact with the electronic component to be tested, and the other end is set on the multiple layers of guide plates of the probe card, and the multiple layers of guide plates are used to fix the probe and reduce the test. Signals are disturbed and other effects, so each guide plate will have a plurality of perforations corresponding to the number of probes.

In detail, when assembling the probe card, it is necessary to first align the plurality of perforations on each guide plate, and ensure that the alignment is within the error range, so that the probes can be made correct in the subsequent assembly steps. Installed correctly on the guide plate. In other words, once the alignment of the through holes is inaccurate and the alignment degree exceeds the error range, the assembled probe card will have a low yield rate.

On the other hand, with the advancement of semiconductor technology, the number of contacts to be tested for the electronic components to be tested has also increased correspondingly, so that the number of holes to be detected and positioned on the guide plate has reached more than 10,000 holes. Therefore, in the prior art, it is difficult to accurately detect a single optical detection device such as a CCD (Charge Coupled Device, photosensitive coupling element) by manually operating a single optical detection device to spot the perforations on one side of the guide plate and then perform an overlay detection method. The internal conditions of the through holes and the alignment between the through holes are obtained, which seriously affects the work efficiency of the hole inspection and the assembly yield of the probe card.

In view of this, how to provide a perforation alignment assembly and a perforation alignment method, which can detect and complete the alignment of a plurality of perforations on a plurality of guide plates in an automated manner, thereby improving the work efficiency of perforation detection and the probe The assembly yield of the card is an urgent problem to be solved in this industry.

One object of the present invention is to provide a perforation alignment assembly and a perforation alignment method, which can detect and align a plurality of perforations on a guide plate in an automated manner, thereby improving the work efficiency of perforation detection and the probe card assembly yield.

To achieve the above purpose, a perforation alignment assembly disclosed in the present invention includes a mold set, a slide table and an optical image module. Die set for installation of multiple guide plates. The slide table has a hollow area, so that the die set is arranged on the upper side of the hollow area. The optical image module is arranged relative to the sliding table, and is used for photographing the plurality of guide plates on the die set and detecting the plurality of perforations of the plurality of guide plates.

The optical image module of the perforation alignment assembly of the present invention includes a first optical detection device and a second optical detection device, and the first optical detection device and the second optical detection device are respectively disposed on the upper side of the slide table and the second optical detection device. underside.

The plurality of guide plates of the perforation alignment assembly of the present invention include at least one first guide plate and at least one second guide plate, at least one first guide plate is disposed on the upper side of the die set, and at least one second guide plate is disposed on the underside of the die set.

The first optical detection device of the perforation alignment assembly of the present invention is used to detect the plurality of first perforations of at least one first guide plate, and the second optical detection device is used to detect the at least one second guide plate to have. the plural second perforations.

The die set of the perforation alignment assembly of the present invention further includes an adjustment device, and the adjustment device adjusts the at least one first guide plate and the at least one second guide plate according to the detection results of the first optical detection device and the second optical detection device. The relative positions of the plates are used for alignment of the plurality of first through holes and the plurality of second through holes.

In order to achieve the above-mentioned purpose, the present invention further discloses a perforation alignment method, comprising the following steps: providing a mold set for installing a plurality of guide plates; providing a slide table for carrying the mold set; and providing an optical image module for photographing the mold set The plurality of guide plates on the upper part are detected, and the plurality of perforations of the plurality of guide plates are detected to complete the alignment of the plurality of perforations; wherein, the slide table has a hollow area, and the mold set is arranged on the upper side of the hollow area.

In the perforation alignment method of the present invention, the optical image module includes a first optical detection device and a second optical detection device, and the first optical detection device and the second optical detection device are respectively disposed on an upper side of the slide table and a second optical detection device. down side.

In the perforation alignment method of the present invention, the plurality of guide plates include at least one first guide plate and at least one second guide plate, at least one first guide plate is disposed on an upper side of the die set, and at least one second guide plate is disposed on the underside of one of the die sets.

In the perforation alignment method of the present invention, the first optical detection device is used to detect the plurality of first perforations of at least one first guide plate, and the second optical detection device is used to detect the at least one second guide plate to have. A plurality of second perforations.

The perforation alignment method of the present invention further comprises the following steps:

An adjustment device is provided, and the adjustment device adjusts the relative positions of at least one first guide plate and at least one second guide plate according to the detection results of the first optical detection device and the second optical detection device to perform a plurality of first perforations and a plurality of second holes Perforated alignment.

In order to make the above objects, technical features and advantages more clearly understood, the following is a detailed description of the preferred embodiments in conjunction with the accompanying drawings.

100: perforated alignment assembly

110: Die set

112: Adjustment device

120: Slider

122: hollow area

130: Optical imaging module

132: The first optical detection device

134: Second optical detection device

200: guide plate

202: Perforation

210: First guide plate

212: First Piercing

220: Second guide plate

222: Second Piercing

FIG. 1 is a schematic diagram of a perforation alignment assembly of the present invention; and FIG. 2 is a step diagram of a perforation alignment method of the present invention.

As shown in FIG. 1 , a perforation alignment assembly 100 disclosed in the present invention includes a mold set 110 , a slide table 120 and an optical image module 130 .

The die set 110 is used for installing a plurality of guide plates 200 . The slide table 120 has a hollow area 122 , so that the mold set 110 is disposed on the upper side of the hollow area 122 . The optical image module 130 is disposed relative to the slide table 120 , so that the optical image module 130 can be used to photograph the plurality of guide plates 200 on the mold set 110 and detect the plurality of perforations 202 of the plurality of guide plates 200 .

The following will describe an embodiment in which the number of the guide plates 200 is two, but it is not limited thereto.

Please refer to FIG. 1 again, in the embodiment of the present invention, the optical image module 130 of the perforation alignment assembly 100 includes a first optical detection device 132 and a second optical detection device 134, and the first optical detection device 134 The device 132 and the second optical detection device 134 are respectively disposed on the upper side and the lower side of the slide table 120 .

Correspondingly, the plurality of guide plates 200 include a first guide plate 210 and a second guide plate 220 . The first guide plate 210 is disposed on the upper side of the mold set 110 , and the second guide plate 220 is disposed on the lower side of the mold set 110 .

Through the above arrangement, the first optical detection device 132 located on the upper side of the sliding table 120 can directly photograph and detect the plurality of first through holes 212 of the first guide plate 210 , and the second optical detection device located on the lower side of the sliding table 120 134 can photograph and detect the plurality of second through holes 222 of the second guide plate 220 through the hollow area 122 .

It should be noted that, the number of the first guide plates 210 disposed on the upper side of the mold set 110 and the number of the second guide plates 220 disposed on the lower side of the mold set 110 can be adjusted according to actual assembly requirements. For example, the number of the first guide plate 210 and the second guide plate 220 can be correspondingly increased when the number of probes and the anti-interference requirements are different.

The die set 110 of the perforation alignment assembly 100 of the present invention further includes an adjusting device 112 . As shown in FIG. 1 , in this embodiment, the adjusting device 112 is disposed on the periphery of the first guide plate 210 . In this way, when the second guide plate 220 is fixed, the adjusting device 112 can be adjusted according to Based on the detection results of the first optical detection device 132 and the second optical detection device 134, the first guide plate 210 is finely moved on the XY plane, and the relative positions of the first guide plate 210 and the second guide plate 220 are adjusted for complex The alignment of the first through holes 212 and the plurality of second through holes 222 also ensures that the alignment degrees of the plurality of first through holes 212 and the plurality of second through holes 222 are within an error range.

In practice, after the first guide plate 210 and the second guide plate 220 have been disposed on the upper side and the lower side of the mold set 110, respectively, the second guide plate can be photographed through the second optical detection device 134 on the lower side of the mold set 110. 220 has a plurality of second through holes 222, and according to the detection results obtained by photographing, the sliding table 120 is moved on the XY plane to perform preliminary positioning of the second guide plate 220. Next, the first optical detection device 132 on the upper side of the slide table 120 is used to photograph and detect the plurality of first through holes 212 of the first guide plate 210 , and the detection results of the first optical detection device 132 and the second optical detection device 134 are compared through comparison. The alignment degree between the plurality of first through holes 212 and the plurality of second through holes 222 is calculated by stacking the graphs. At this time, if the plurality of first through holes 212 and the alignment degree between the plurality of second through holes 222 is greater than the error range, and the second guide plate 220 can be fixed, and the first guide can be performed along the XY plane on the upper side of the die set 110 through the operation of the adjusting device 112 Fine adjustment of the position of the plate 210 , thereby changing the relative positions of the first guide plate 210 and the second guide plate 220 to perform the alignment of the first through holes 212 and the second through holes 222 to ensure the first through holes 212 and the second through holes 222 The alignment of the perforations 222 is within an error range.

Since the above-mentioned photographing and overlay calculation of the first optical detection device 132 and the second optical detection device 134 , the movement of the slide table 120 , and the operation of the adjustment device 112 can all be performed in an automated manner, compared with the existing personnel detection method , the perforation alignment assembly of the present invention can greatly improve the detection result and alignment efficiency of the perforation.

However, in other embodiments, the first guide plate 210 can also be fixed first, and then the second guide plate 220 can be adjusted by finely moving the adjusting device 112 on the XY plane to adjust the first guide plate 210 and the second guide plate 220 relative position between. Alternatively, neither the first guide plate 210 nor the second guide plate 220 can be fixed, but can be adjusted by the adjustment device 112 on the XY plane by fine-tuning the first guide plate 210 and the second guide plate 220 relative position between.

The present invention further discloses a perforation alignment method, as shown in FIG. 2 , which includes the following steps: S10 : providing a mold set 110 to install a plurality of guide plates 200 ; S20 : providing a slide table 120 to support the mold set 110 ; and S30 : An optical image module 130 is provided to photograph the plurality of guide plates 200 on the die set 110 , and to detect the plurality of through holes 202 of the plurality of guide plates 200 to complete the alignment of the plurality of through holes 202 .

The slide table 120 has a hollow area 122 , and the mold set 110 is disposed on the upper side of the hollow area 122 .

In the perforation alignment method of the present invention, the optical image module 130 includes a first optical detection device 132 and a second optical detection device 134, and the first optical detection device 132 and the second optical detection device 134 are respectively disposed on the slides. An upper side and a lower side of the table 120 .

In this embodiment, the plurality of guide plates 200 include a first guide plate 210 and a second guide plate 220 . The first guide plate 210 is disposed on an upper side of the mold set 110 , and the second guide plate 220 is disposed on the mold set 110 . one underside.

Similar to the above, the number of the first guide plates 210 disposed on the upper side of the mold set 110 and the number of the second guide plates 220 disposed on the lower side of the mold set 110 can be adjusted according to actual assembly requirements. For example, the number of the first guide plate 210 and the second guide plate 220 can be increased accordingly when the number of probes and the anti-interference requirements are different. Therefore, the number of the first guide plate 210 and the second guide plate 220 is This is not limited.

In the perforation alignment method of the present invention, the first optical detection device 132 located on the upper side of the slide table 120 is used for directly photographing and detecting the plurality of first perforations 212 of the first guide plate 210 . The two optical detection devices 134 photograph and detect the plurality of second through holes 222 of the second guide plate 220 through the hollow area 122 .

The perforation alignment method of the present invention further comprises the following steps:

S40: Provide an adjustment device 112, so that the adjustment device 112 adjusts the relative positions of the first guide plate 210 and the second guide plate 220 according to the detection results of the first optical detection device 132 and the second optical detection device 134 to perform a plurality of first Alignment of the through holes 212 and the plurality of second through holes 222 .

In the actual perforation alignment method, after the first guide plate 210 and the second guide plate 220 are respectively disposed on the upper side and the lower side of the mold set 110 , the second optical detection device 134 on the lower side of the mold set 110 can be passed through first. The plurality of second through holes 222 of the second guide plate 220 are photographed, and the slide table 120 is moved on the XY plane according to the detection results obtained by photographing to perform preliminary positioning of the second guide plate 220 . Next, the first optical detection device 132 on the upper side of the slide table 120 is used to photograph and detect the plurality of first through holes 212 of the first guide plate 210, By comparing the detection results of the first optical detection device 132 and the second optical detection device 134 , the alignment degree between the plurality of first through holes 212 and the plurality of second through holes 222 is calculated by overlaying the images. At this time, if the alignment degree between the plurality of first through holes 212 and the plurality of second through holes 222 is greater than the error range, the second guide plate 220 can be fixed through the operation of the adjusting device 112 to adjust the position of the mold set 110 The upper side of the first guide plate 210 is fine-tuned along the XY plane, thereby changing the relative positions of the first guide plate 210 and the second guide plate 220 to perform the alignment of the plurality of first through holes 212 and the plurality of second through holes 222 to ensure The alignment degrees of the plurality of first through holes 212 and the plurality of second through holes 222 are within an error range.

In other perforation alignment methods, the first guide plate 210 can also be fixed first, and then the second guide plate 220 can be adjusted on the XY plane by finely moving the adjusting device 112 to adjust the first guide plate 210 and the second guide plate 220 . relative position between. Alternatively, neither the first guide plate 210 nor the second guide plate 220 can be fixed, but can be adjusted by the adjustment device 112 on the XY plane by fine-tuning the first guide plate 210 and the second guide plate 220 relative position between.

To sum up, the perforation alignment assembly and the perforation alignment method of the present invention can automatically operate the first optical detection device 132, the second optical detection device 134, the sliding table 120, and the adjustment device 112 to align the plurality of The plurality of perforations on the guide plate are detected and aligned, thereby improving the work efficiency of perforation detection and the assembly yield of the probe card.

The above-mentioned embodiments are only used to illustrate the embodiments of the present invention and to illustrate the technical characteristics of the present invention, and are not used to limit the protection scope of the present invention. Any changes or equality arrangements that can be easily accomplished by those skilled in the art fall within the claimed scope of the present invention, and the scope of protection of the present invention should be subject to the scope of the patent application.

100: perforated alignment assembly

110: Die set

112: Adjustment device

120: Slider

122: hollow area

130: Optical imaging module

132: The first optical detection device

134: Second optical detection device

200: guide plate

202: Perforation

210: First guide plate

212: First Piercing

220: Second guide plate

222: Second Piercing

Claims (8)

A perforation alignment assembly, comprising: a die set for installing a plurality of guide plates; a slide table with a hollow area, the die set is arranged on the upper side of the hollow area; and an optical image module, relative to the hollow area The sliding table is arranged, the plurality of guide plates on the mold set are photographed, and the plurality of perforations possessed by the plurality of guide plates are detected, wherein the optical image module includes a first optical detection device and a second optical detection device, and the The first optical detection device and the second optical detection device are respectively disposed on the upper side and the lower side of the sliding table. The perforation alignment assembly of claim 2, wherein the plurality of guide plates comprises at least one first guide plate and at least one second guide plate, the at least one first guide plate is disposed on the upper side of the mold set, and the At least one second guide plate is disposed on the lower side of the die set. The perforation alignment assembly as claimed in claim 3, wherein the first optical detection device is used to detect a plurality of first perforations of the at least one first guide plate, and the second optical detection device is used to detect the at least one first perforation. A second guide plate has a plurality of second through holes. The perforation alignment assembly as claimed in claim 4, wherein the die set further comprises an adjustment device, and the adjustment device adjusts the at least one first optical detection device according to the detection results of the first optical detection device and the second optical detection device The relative positions of the guide plate and the at least one second guide plate are used to perform the alignment of the plurality of first through holes and the plurality of second through holes. A perforation alignment method, comprising the following steps: providing a die set to install a plurality of guide plates; A slide table is provided to carry the die set; and an optical image module is provided to photograph the plurality of guide plates on the die set, and detect the plurality of perforations possessed by the plurality of guide plates to complete the alignment of the plurality of perforations, wherein The optical image module includes a first optical detection device and a second optical detection device, and the first optical detection device and the second optical detection device are respectively disposed on an upper side and a lower side of the sliding table; wherein, the The slide table has a hollow area, and the die set is arranged on the upper side of the hollow area. The perforation alignment method as claimed in claim 5, wherein the plurality of guide plates comprises at least one first guide plate and at least one second guide plate, the at least one first guide plate is disposed on an upper side of the mold set, and the At least one second guide plate is disposed on a lower side of the die set. According to the perforation alignment method of claim 6, the first optical detection device is used for detecting a plurality of first perforations of the at least one first guide plate, and the second optical detection device is used for detecting the at least one first perforation. The second guide plate has a plurality of second through holes. The perforation alignment method according to claim 7, further comprising the following steps: providing an adjustment device, so that the adjustment device adjusts the at least one first optical detection device according to the detection results of the first optical detection device and the second optical detection device The relative positions of the guide plate and the at least one second guide plate are used to perform the alignment of the plurality of first through holes and the plurality of second through holes.

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