TWI752729B - Surface treatment device - Google Patents
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- TWI752729B TWI752729B TW109140348A TW109140348A TWI752729B TW I752729 B TWI752729 B TW I752729B TW 109140348 A TW109140348 A TW 109140348A TW 109140348 A TW109140348 A TW 109140348A TW I752729 B TWI752729 B TW I752729B
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- 238000004381 surface treatment Methods 0.000 title claims abstract description 92
- 230000007246 mechanism Effects 0.000 claims abstract description 101
- 239000012530 fluid Substances 0.000 claims abstract description 57
- 239000011859 microparticle Substances 0.000 claims abstract description 36
- 229920000642 polymer Polymers 0.000 claims abstract description 21
- 238000006073 displacement reaction Methods 0.000 claims description 16
- 230000002093 peripheral effect Effects 0.000 claims description 16
- 239000002245 particle Substances 0.000 claims description 7
- 239000004814 polyurethane Substances 0.000 claims description 7
- -1 polyethylene Polymers 0.000 claims description 6
- 239000004698 Polyethylene Substances 0.000 claims description 4
- 229920000915 polyvinyl chloride Polymers 0.000 claims description 4
- 239000004800 polyvinyl chloride Substances 0.000 claims description 4
- 229920000573 polyethylene Polymers 0.000 claims description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 3
- 229920002635 polyurethane Polymers 0.000 claims description 3
- 239000012798 spherical particle Substances 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 3
- 238000000605 extraction Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229920006037 cross link polymer Polymers 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- 239000004677 Nylon Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229920002521 macromolecule Polymers 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 230000006837 decompression Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Bearings For Parts Moving Linearly (AREA)
Abstract
一種表面處理裝置,包括物件承載機構、表面處理機構與作業位置調整機構,物件承載機構之承載台能承載待表面處理之物件,表面處理機構位於承載台上方,作業位置調整機構能使物件承載機構與表面處理機構產生相對運動,表面處理機構之以其驅動模組帶動之引流工作部件對物件表面執行磨擦作用,其中,引流工作部件藉由相互交聯之多個高分子微型顆粒形成立體網絡狀開放性微多孔結構,使導入引流工件部件內的流體通過開放性微多孔結構達到較佳的飽水率,且流體能分散減壓而均勻地自引流工作部件的作用面的多數微小孔洞流出,另作用面藉由多個高分子微型顆粒形成粗糙表面,提供良好的磨擦表面以及流體較多的附著面積,而具備優異的物件表面處理性能。A surface treatment device, comprising an object carrying mechanism, a surface treatment mechanism and a working position adjustment mechanism, the carrying platform of the object carrying mechanism can carry the object to be surface treated, the surface treatment mechanism is located above the carrying platform, and the working position adjustment mechanism can make the object carrying mechanism A relative movement occurs with the surface treatment mechanism, and the drainage working part of the surface treatment mechanism driven by its driving module performs friction on the surface of the object, wherein the drainage working part is formed by a plurality of polymer micro-particles that are cross-linked to form a three-dimensional network. The open microporous structure enables the fluid introduced into the drainage workpiece to achieve a better water saturation rate through the open microporous structure, and the fluid can be dispersed and decompressed and evenly flow out from most of the tiny holes on the working surface of the drainage workpiece. On the other hand, the rough surface is formed by a plurality of polymer micro-particles on the active surface, which provides a good friction surface and a large area for fluid to adhere, and has excellent surface treatment performance of objects.
Description
本發明係關於一種用於對物件表面執行研磨或清潔等表面處理作業之表面處理裝置。 The present invention relates to a surface treatment device for performing surface treatment operations such as grinding or cleaning on the surface of an object.
目前應用於物件表面研磨或清潔等作業之表面處理裝置,其主要包括有載台以及位於載台上方能被驅動運動之表面處理組件。一般而言,該表面處理組件依據物件的材質及其表面處理的型態等選用合適的工作部件,例如金剛刷、尼龍刷或具有多數PU材質研磨顆粒之研磨盤等,前述研磨盤之PU材質研磨顆粒可依使用需求而調整其軟硬度。 Currently, surface treatment devices used in operations such as surface grinding or cleaning of objects mainly include a carrier and a surface treatment component located above the carrier that can be driven to move. Generally speaking, the surface treatment component selects suitable working parts according to the material of the object and the type of surface treatment, such as diamond brushes, nylon brushes or grinding discs with many PU material abrasive particles, etc. The aforementioned grinding discs are made of PU material The hardness of the abrasive particles can be adjusted according to the needs of use.
前述已知的表面處理裝置中,其工作部件無論是金剛刷、尼龍刷或具有多數PU材質研磨顆粒之研磨盤皆係在基材的表面附加預定長度之刷毛或預定厚度的研磨顆粒,一旦所述工作部件使用一段時間後,刷毛或研磨顆粒磨損或脫落時,所述工作部件難維持其原有對物件之磨擦性能,無法再使用而需更換,致其使用壽命偏短。 In the aforementioned known surface treatment device, the working parts, whether it is a diamond brush, a nylon brush or a grinding disc with many PU material abrasive particles, are attached to the surface of the substrate with bristles of a predetermined length or abrasive particles of a predetermined thickness. After the working part is used for a period of time, when the bristles or abrasive particles wear out or fall off, it is difficult for the working part to maintain its original friction performance against the object, and it cannot be used anymore and needs to be replaced, resulting in a short service life.
再者,當物件於表面處理裝置中執行表面研磨或清潔作業時,須同時導入流體於物件表面與工作部件,惟流體在物件表面與運動中之工作部件之間難以達到良好均勻性,故表面處理裝置難以對物件表面提供較佳之表面處理性能。 Furthermore, when the object is subjected to surface grinding or cleaning operations in the surface treatment device, fluid must be introduced into the surface of the object and the working parts at the same time. However, it is difficult for the fluid to achieve good uniformity between the surface of the object and the moving working parts. It is difficult for the processing device to provide better surface treatment performance on the surface of the object.
本發明之目的在於提供一種表面處理裝置,改善現有物件表面裝置之工作部件難以長時間維持對物件表面之磨擦性能,以及導向物件表面與運動中之工作部件之間的流體難以達到均勻分布等問題。 The purpose of the present invention is to provide a surface treatment device, which can improve the problems that the working part of the existing object surface device is difficult to maintain the friction performance on the object surface for a long time, and the fluid between the guide object surface and the moving working part is difficult to achieve uniform distribution and so on. .
為了達成前述目的,本發明提出表面處理裝置包括:一物件承載機構,其包括一承載台以及一物件定位構造,該承載台用於承載待表面處理之一物件,該物件定位構造設於該承載台中,用以將所述物件定位於承載台上;一表面處理機構,係設置於該物件承載機構之承載台上方,該表面處理機構包括至少一引流工作部件以及一驅動模組,所述引流工作部件具有一作用面,該驅動模組連接所述引流工作部件,且該驅動模組能驅動所述引流工作部件,使所述引流工作部件之作用面對該承載台上的物件表面產生磨擦動作,其中:所述引流工作部件包含相互交聯之多數個高分子微型顆粒,每一所述高分子微型顆粒與其鄰接之所述高分子微型顆粒之間皆具有細微間隙,且相互交聯的多數所述高分子微型顆粒之間的細微間隙相互連通而形成一立體網絡狀開放性微多孔結構,所述立體網絡狀開放性微多孔結構係分散延伸至所述引流工作部件包括作用面之各周面形成多個開放性孔洞,且所述作用面藉由相互交聯的多個所述高分子微型顆粒形成粗糙表面,所述立體網絡狀開放性微多孔結構能導入流體並導引至所述作用面的多個所述孔洞流出;以及一作業位置調整機構,其能驅動該物件承載機構與該表面處理機構中之任一或二於三維空間中產生相對運動,使所述引流工作部件之作用面能對該承載台上的物件的表面執行表面處理作業。 In order to achieve the aforementioned object, the present invention proposes that the surface treatment device comprises: an object carrying mechanism, which includes a carrying table and an object positioning structure, the carrying table is used for carrying an object to be surface-treated, and the object positioning structure is arranged on the carrying table The platform is used for positioning the object on the bearing platform; a surface treatment mechanism is arranged above the bearing platform of the object bearing mechanism, and the surface treatment mechanism includes at least a drainage working part and a driving module, the drainage The working part has a working surface, the driving module is connected to the drainage working part, and the driving module can drive the drainage working part, so that the working part of the drainage working part faces the surface of the object on the bearing platform to generate friction Action, wherein: the drainage working part includes a plurality of polymer micro-particles that are cross-linked with each other, each of the macro-molecule micro-particles and the adjacent macro-molecule micro-particles have fine gaps, and the mutually cross-linked micro-particles The fine gaps between most of the macromolecular microparticles are interconnected to form a three-dimensional network-like open microporous structure, and the three-dimensional network-like open microporous structure is dispersed and extended to each of the drainage working parts including the action surface. A plurality of open pores are formed on the peripheral surface, and the working surface is formed by a plurality of the polymer micro-particles cross-linked with each other to form a rough surface, and the three-dimensional network-like open micro-porous structure can introduce fluid and guide it to all A plurality of the holes on the working surface flow out; and a working position adjustment mechanism, which can drive any one or both of the object carrying mechanism and the surface treatment mechanism to produce relative movement in three-dimensional space, so that the drainage working part The function surface can perform surface treatment on the surface of the object on the carrying platform.
藉由前述表面處理裝置之整體組成構造發明,於使用時,其利用物件承載機構之承載台承載待表面處理之物件,作業位置調整機構能驅動物件承載機構與位於承載台上方之表面處理機構相對運動,其中,表面處理機構以其驅動模組帶動引流工作部件,並以被驅動的引流工作部件對物件表面執行磨擦作用,引流工作部件藉由多個相互交聯之高分子微型顆粒形成立體網絡狀 開放性微多孔結構,使導入引流工件部件內之加壓流體於立體網絡狀開放性微多孔結構中能使內壓增大,引流工作部件具有較佳的飽水率,且流體能均勻自作用面的多數微小孔洞分散減壓流出而形成一流體膜層,提供物件表面磨擦作用所需求之介質,引流工作部件之作用面藉由多個高分子微型顆粒形成粗糙表面,提供良好的磨擦表面以及流體較多的附著面積,而具備優異的物件表面處理性能。 Through the invention of the overall composition and structure of the aforementioned surface treatment device, when in use, the object to be surface-treated is carried by the carrying platform of the object-carrying mechanism, and the working position adjustment mechanism can drive the object-carrying mechanism to face the surface treatment mechanism located above the carrying platform. Movement, in which the surface treatment mechanism drives the drainage working part with its driving module, and performs friction on the surface of the object with the driven drainage working part. shape The open microporous structure enables the pressurized fluid introduced into the drainage workpiece to increase the internal pressure in the three-dimensional network-like open microporous structure, the drainage workpiece has a better water saturation rate, and the fluid can be uniform and self-acting Most of the tiny holes on the surface are dispersed and decompressed and flow out to form a fluid film layer, which provides the medium required for the friction effect on the surface of the object. It has more adhesion area for fluid, and has excellent surface treatment performance of objects.
再者,本發明表面處理裝置之引流工作部件藉由多個相互交聯之高分子微型顆粒之構造,使其作用面形成細緻的粗糙面,以位於作用面之多數高分子微型顆粒作為物件表面磨擦,於物件表面磨擦過程中,作用面原外表層的高分子微型顆粒一旦磨耗後,即換內層的高分子微型顆粒顯露在外,使引流工作部件之作用面仍能維持其良好的粗糙面,而持續提供物件表面處理作業原有的性能,故能延長其使用壽命。 Furthermore, the drainage working part of the surface treatment device of the present invention is constructed of a plurality of mutually cross-linked polymer micro-particles, so that the working surface forms a fine rough surface, and the majority of the polymer micro-particles located on the working surface are used as the surface of the object. Friction, in the process of friction on the surface of the object, once the polymer micro-particles of the original outer layer of the working surface are worn away, the polymer micro-particles of the inner layer will be exposed, so that the working surface of the drainage working part can still maintain its good rough surface , and continue to provide the original performance of the surface treatment operation of the object, so it can prolong its service life.
本發明表面處理裝置之引流工作部件還可進一步於作用面形成一個或多個幾何形狀的導流槽,藉以在物件表面處理作業中利用導流槽提供流體的引流與表面處理產生的殘屑排放之用。 The drainage working part of the surface treatment device of the present invention can further form one or more drainage channels with geometric shapes on the working surface, so that the drainage channels can be used to provide the drainage of the fluid and the discharge of the debris generated by the surface treatment during the surface treatment of the object. use.
10:物件承載機構 10: Object carrying mechanism
11:承載台 11: Bearing platform
20A:表面處理機構 20A: Surface treatment mechanism
21A:引流工作部件 21A: Drainage working parts
210A:作用面 210A: Action surface
20B:表面處理機構 20B: Surface treatment mechanism
21B:引流工作部件 21B: Drainage working parts
210B:作用面 210B: Action Surface
211:高分子微型顆粒 211: Polymer Microparticles
212:立體網絡狀開放性微多孔結構 212: Three-dimensional network-like open microporous structure
213:開放性孔洞 213: Open Holes
214A:轉軸 214A: Spindle
214B:轉軸 214B: Spindle
22A:驅動模組 22A: drive module
22B:驅動模組 22B: Drive Module
30A:作業位置調整機構 30A: Working position adjustment mechanism
31A:基架 31A: Base frame
32A:滑軌 32A: Slide rail
33A:位移驅動組件 33A: Displacement Drive Assembly
34A:平移驅動組件 34A: Translation Drive Assembly
30B:作業位置調整機構 30B: Working position adjustment mechanism
31B:基架 31B: Pedestal
32B:旋轉驅動組件 32B: Rotary drive assembly
30C:作業位置調整機構 30C: Working position adjustment mechanism
31C:基架 31C: Pedestal
32C:位移驅動組件 32C: Displacement Drive Assembly
30D:作業位置調整機構 30D: Working position adjustment mechanism
31D:基架 31D: Pedestal
32D:旋轉驅動組件 32D: Rotary Drive Assembly
40:物件 40: Object
圖1係本發明表面處理裝置之第一較佳實施例的平面示意圖。 FIG. 1 is a schematic plan view of a first preferred embodiment of the surface treatment apparatus of the present invention.
圖2係圖1所示表面處理裝置第一較佳實施例的側視平面示意圖。 FIG. 2 is a schematic side plan view of the first preferred embodiment of the surface treatment apparatus shown in FIG. 1 .
圖3係本發明表面處理裝置之第二較佳實施例的平面示意圖。 3 is a schematic plan view of a second preferred embodiment of the surface treatment apparatus of the present invention.
圖4係本發明表面處理裝置之第三較佳實施例的平面示意圖。 4 is a schematic plan view of a third preferred embodiment of the surface treatment apparatus of the present invention.
圖5係本發明表面處理裝置之第四較佳實施例的平面示意圖。 5 is a schematic plan view of a fourth preferred embodiment of the surface treatment apparatus of the present invention.
圖6係本發明表面處理裝置中之引流工作部件放大示意圖(一)。 6 is an enlarged schematic view (1) of the drainage working part in the surface treatment device of the present invention.
圖7係本發明表面處理裝置中之引流工作部件放大示意圖(二)。 Fig. 7 is an enlarged schematic view (2) of the drainage working part in the surface treatment device of the present invention.
如圖1至圖5所示,其揭示本發明表面處理裝置之數種較佳實施例,由圖式中可以見及,所述表面處理裝置包括一物件承載機構10、一表面處理機構20A、20B以及一作業位置調整機構30A、30B、30C、30D。
As shown in FIG. 1 to FIG. 5, several preferred embodiments of the surface treatment device of the present invention are disclosed. As can be seen from the drawings, the surface treatment device includes an
如圖1至圖5所示,該物件承載機構10包括一承載台11以及一物件定位構造,該承載台11用於承載待表面處理之物件40,該物件定位構造設於該承載台11中,用以將待表理處理之物件40定位於承載台11上。該物件定件構造可為連接外部抽氣設備之真空吸附構造,例如設於承載台11中之抽氣通道,抽氣通氣延伸至承載台11之頂面並具有至少一個抽氣孔,抽氣通道能連接外部抽氣設備,藉由外部抽氣設備之抽氣作用而通過抽氣通道以真空吸附方式將物件40定位於該承載台11上;或者,該物件定位構造也可以夾持式構造,藉以利用夾持方式將物件40定位於承載台11上。所述夾持式物件定位構造可以選用現有的夾持組件,於此不再贅述。
As shown in FIG. 1 to FIG. 5 , the
如圖1至圖5所示,該表面處理機構20A、20B係設置於該物件承載機構10之承載台11上方,並能對承載台11上的物件40執行表面處理,該表面處理機構20A、20B包括至少一引流工作部件21A、21B以及一驅動模組22A、22B,所述引流工作部件21A、21B之外周面具有一作用面210A、210B,該驅動模組22A、22B連接所述引流工作部件21A、21B,且該驅動模組22A、22B能驅動所述引流工作部件21A、21B升降位移以及旋轉或預定距離之反復平移運動,使所述引流工作部件21A、21B之作用面對承載台11上的物件表面產生旋轉磨擦或平移磨擦動作。所述驅動模組22A、22B可為包含馬達之旋轉驅動組件,或是具備線性運動性能之驅動組件,此些驅動模組可以選用現有驅動組件,於此不再贅述。
As shown in FIG. 1 to FIG. 5 , the
如圖6及圖7所示,所述引流工作部件21A、21B包含相互交聯之多數個高分子微型顆粒211,所述高分子微型顆粒211與所述高分子微型顆粒211之間相互交聯結合,每一所述高分子微型顆粒211與其鄰接之所述高分子微型顆粒211之間皆具有細微間隙,且相互交聯的多數所述高分子微型顆粒211之間的細微間隙相互連通而形成一立體網絡狀開放性微多孔結構212,所述立體網絡狀開放性微多孔結構212係分散延伸至該引流工作部件21A、21B中包括作用面210A、210B之各周面形成多個開放性孔洞,藉由所述立體網絡狀開放性微多孔結構212,使所述引流工作部件21A、21B能導引流體至包括作用面210A、210B之外周面的多個所述開放性孔洞,而能夠適度地使流體減壓,能有效控制位於引流工作部件21A、21B之作用面的流體量,避免流體過度集中之現象,再者,引流工作部件21A、21B之作用面藉由多個高分子微型顆粒211而形成非光滑的粗糙表面,提供流體較多的附著面積,搭配前述減壓的性能,使被導引至該引流工作部件21A、21B的作用面的流體維持良好的均勻性。
As shown in FIG. 6 and FIG. 7 , the
所述引流工作部件21A、21B中,所述高分子微型顆粒的材料可以選用聚胺酯(Polyurethane,PU)、聚氯乙烯(Polyvinyl Chloride,PVC)、聚乙烯(Polyethylene,PE)或聚四氟乙烯(Polytetrafluoroethylene,商標名Teflon,譯稱鐵氟龍)等泛用塑料,所述高分子微型顆粒211為圓珠狀之顆粒,其粒徑為0.1μm~180μm。所述引流工作部件21A、21B依據表面處理作業之使用需求與搭配使用之流體特性(如親水性、親油性)等選擇硬質或軟質等材質。
In the
所述引流工作部件21A、21B之作用面210A、210B還可進一步形成一個或多個幾何形狀的導流槽,所述導流槽的形狀、尺寸及其分布設置於作用面210A、210B的位置,係依所述引流工作部件21A、21B之作用面210A、210B對物件表面處理的條件而設定,藉以在物件表面處理作業中利用導流槽提供流體的引流與表面處理產生的殘屑排放之用。
The working surfaces 210A, 210B of the
如圖1及圖2所示的較佳實施例,所述引流工作部件21A係形成一中空管狀的滾柱,並於該中空的引流工作部件21A中穿設一轉軸214A,該轉軸214A橫向設置於該承載台11上方,該驅動模組22A連接該轉軸214A,使所述引流工作部件21A能被驅動以橫向的轉軸214A為旋轉中心旋轉,且能於高度方向升降移動。或者,如圖3所示的較佳實施例,所述引流工作部件21B係形成圓盤狀型體,並於該引流工作部件21B頂部接設一轉軸214B,該轉軸係縱向立設於該承載台11上方,該驅動模組22B連接該轉軸214B,使所述引流工作部件21B能被驅動以縱向的轉軸214B為旋轉中心旋轉,且能於高度方向升降移動。
In the preferred embodiment shown in FIG. 1 and FIG. 2 , the
前述轉軸214A、214B中還設有流體引導路徑,該轉軸214A、214B之流體引導路徑外接流體供給源,且連通所述引流工作部件21A、21B之立體網絡狀開放性微多孔結構212,使流體供給源輸出之加壓流體能經由該轉軸214A、214B之流體引導路徑進入所述引流工作部件之立體網絡狀開放性微多孔結構212,使流體適度地減壓後再由所述引流工作部件21A、21B包括作用面210A、210B之外周面的多個所述開放性孔洞釋出,流體在所述引流工作部件外周面形成一流體膜層。
The aforementioned
此外,流體供給源也可以自所述引流工作部件21A、21B外周面朝內注入流體,使流體通過所述引流工作部件21A、21B之外周面的多個開放性孔洞滲入所述立體網絡狀開放性微多孔結構212內,當所述引流工作部件21A、21B運動時,流體能自所述引流工作部件21A、21B包括作用面210A、210B之外周面的多個所述開放性孔洞釋出,流體並能在所述引流工作部件外周面形成流體膜層。
In addition, the fluid supply source may inject fluid inward from the outer peripheral surfaces of the
如圖1至圖5所示的各較佳實施例,該作業位置調整機構30A、30B、30C、30D係能驅動該物件承載機構與該表面處理機構20A、20B中之任一或二於三維空間中產生相對運動,並使該引流工作部件21A、21B相對於該承
載台11能產生相對位置改變,使該引流工作部件21A、21B之作用面210A、210B能對承載台11上的物件40的全表面執行表面處理作業。
1 to 5 , the working
如圖1及圖2所示的較佳實施例,當該作業位置調整機構30A能驅動該物件承載機構10平移運動之實施型態時,該作業位置調整機構30A包括一基架31A、設於該基架31A上之至少一滑軌32A以及設於基架31A上之一位移驅動組件33A,該物件承載機構10設於所述滑軌32A上,並連接該位移驅動組件33A,該位移驅動組件33A能受控驅動該物件承載機構10沿著滑軌32A直線位移運動。或者,該作業位置調整機構30A還包括一平移驅動組件34A,該平移驅動組件34A連接該基架31A或是該表面處理機構20A,用以驅動該物件承載機構10或表面處理機構20A於一水平參考平面之垂直於滑軌32A長度方向平移。
In the preferred embodiment shown in FIGS. 1 and 2 , when the working
如圖3所示的較佳實施例,當該作業位置調整機構30B能驅動該物件承載機構10旋轉運動之實施型態時,該作業位置調整機構30B包括一基架31B、以及設於基架31B中之一旋轉驅動組件32B,該物件承載機構10裝設於該31B上,並連接該旋轉驅動組件32B,該旋轉驅動組件32B能受控驅動該物件承載機構10旋轉運動。
In the preferred embodiment shown in FIG. 3 , when the working
如圖4所示的較佳實施例,當該作業位置調整機構30C能驅動該表面處理機構20A平移運動之實施型態時,該作業位置調整機構30C包括一基架31C以及設於基架31C上之一位移驅動組件32C,該物件承載機構10裝設於所述基架31C上,該表面處理機構20A位於該物件承載機構10之承載台11上方,且該位移驅動組件32C連接該表面處理機構20A,該位移驅動組件32C能受控驅動該表面處理機構20A位於水平參考平面之二維空間位移運動。
In the preferred embodiment shown in FIG. 4 , when the working
如圖5所示的較佳實施例,當該作業位置調整機構30D能驅動該物件承載機構10旋轉運動之實施型態時,該作業位置調整機構30D包括一基架31D以及設於基架31D上之一旋轉驅動組件32D,該物件承載機構10裝設於該基
架31D上,該表面處理機構20B位於該物件承載機構10之承載台11上方,且該旋轉驅動組件32D連接該表面處理機構20B,該旋轉驅動組件32D能受控驅動該表面處理機構20B旋轉位移。
As shown in the preferred embodiment shown in FIG. 5 , when the working
關於本發明表面處理裝置的使用情形,其能用於對物件表面執行研磨或清潔等表面處理作業。於執行物件表面處理作業時,如圖1至圖5所示,其係將待表面處理之物件40放置於承載台11上,表面處理機構20A、20B能以其驅動模組22A、22B帶動引流工作部件21A、21B,並以被驅動的引流工作部件21A、21B對物件40表面執行磨擦作用,如圖6及圖7所示,另由流體供給源輸出加壓流體經由該轉軸之流體引導路徑進入所述引流工作部件21A、21B之立體網絡狀開放性微多孔結構而導向作用面210A、210B與物件40之間,並搭配作業位置調整機構30A、30B、30C、30D能驅動物件承載機構10與位於承載台11上方之表面處理機構20A、20B相對運動,而能對物件40全表面執行表面處理作業。
Regarding the use of the surface treatment device of the present invention, it can be used to perform surface treatment operations such as grinding or cleaning on the surface of an object. When the object surface treatment operation is performed, as shown in FIG. 1 to FIG. 5 , the
前述中,如圖6及圖7所示,引流工作部件21A、21B藉由多個相互交聯之高分子微型顆粒形成立體網絡狀開放性微多孔結構212,使通過該轉軸214A、214B之流體引導路徑導入引流工作部件21A、21B內之加壓流體於立體網絡狀開放性微多孔結構212中能增大其內壓,使引流工作部件21A、21B具有較佳的飽水率,同時,讓流體能夠均勻由內而外分散並自作用面210A、210B的多數微小孔洞減壓流出,使流體在所述引流工作部件21A、21B外周面形成一流體膜層,提供物件表面磨擦作用所需求之介質,且引流工作部件21A、21B之作用面210A、210B藉由多個高分子微型顆粒形成粗糙表面,提供良好的磨擦表面以及流體較多的附著面積,而具備優異的物件表面處理性能。另一方面,引流工作部件21A、21B藉由多個相互交聯之高分子微型顆粒211之構造,使作用
面210A、210B形成細緻的粗糙面,並以位於作用面210A、210B外表層之多數高分子微型顆粒211與物件40表面進行磨擦。
In the above, as shown in FIG. 6 and FIG. 7 , the
於此物件40表面磨擦過程中,引流工作部件21A、21B之作用面210A、210B與物件40因磨擦生成的殘屑能藉由流體以及作用面210A、210B之導引槽的導引作用,而排出於外,且作用面210A、210B原外表層的高分子微型顆粒211一旦磨耗後,即換內層的高分子微型顆粒顯露在外,使引流工作部件21A、21B之作用面210A、210B仍能維持其良好的粗糙面,提供物件表面處理作業原有的性能。
During the friction process on the surface of the
關於本發明表面處理裝置的使用情形,除了前述將加壓的流體通過該轉軸214A、214B之流體引導路徑導入引流工作部件21A、21B內,再使流體自引流工作部件21A、21B內部由由內而外均勻分散至作用面210A、210B的多數微小孔洞減壓流出的方式外,亦可將流體供給源供給的流體直接導向引流工作部件21A、21B外部周面或其作用面210A、210B,通過所述引流工作部件21A、21B之外周面或作用面210A、210B的多個開放性孔洞滲入所述立體網絡狀開放性微多孔結構212內,當所述引流工作部件21A、21B運動時,流體能自所述引流工作部件21A、21B包括作用面210A、210B之外周面的多個所述開放性孔洞釋出,流體並在所述引流工作部件21A、21B之作用面210A、210B外周面形成流體膜層,提供物件表面磨擦作用所需求之介質。
Regarding the use of the surface treatment device of the present invention, in addition to the aforementioned introduction of the pressurized fluid into the
10:物件承載機構 10: Object carrying mechanism
11:承載台 11: Bearing platform
20A:表面處理機構 20A: Surface treatment mechanism
21A:引流工作部件 21A: Drainage working parts
210A:作用面 210A: Action surface
214A:轉軸 214A: Spindle
22A:驅動模組 22A: drive module
30A:作業位置調整機構 30A: Working position adjustment mechanism
31A:基架 31A: Base frame
32A:滑軌 32A: Slide rail
33A:位移驅動組件 33A: Displacement Drive Assembly
40:物件 40: Object
Claims (11)
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| TW109140348A TWI752729B (en) | 2020-11-18 | 2020-11-18 | Surface treatment device |
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| TW200636905A (en) * | 2005-03-28 | 2006-10-16 | Nikon Corp | Suction device, polishing device, semiconductor device and manufacturing method of semiconductor device |
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