TWI748535B - Test device - Google Patents

Abstract

Disclosed is a test device for testing electric characteristics of an object-to-be-tested. The test device includes: a test socket including a probe configured to transmit a test signal to the object-to-be-tested; and a pusher unit configured to press the object-to-be-tested to move close to and away from the probe, the pusher unit including: a pressing projection configured to press the object-to-be-tested; a pusher base including the pressing projection on a first side thereof, and a plurality of heat-dissipation column insertion portions on a second side thereof; and a heat-dissipation column shaped like a bar and including one end portion to be inserted in the heat-dissipation column insertion portion, and a plurality of heat dissipation wings on an outer circumferential surface thereof.

Description

Test component

The present disclosure relates to a test element for testing semiconductors or similar electronic components, and more specifically to a test element including a heat dissipation member and a pusher for pressing the electronic component for testing.

In the process of manufacturing semiconductors and similar electronic products, test components are required to test whether the final manufactured electronic products are defective. This kind of test element needs to dissipate the heat generated when testing electronic products. This kind of generated heat is a factor that increases the test resistance, which will reduce the reliability of the test and cause a short circuit, thereby leading to product failure. Therefore, the heat generated by divergence is very important for testing power semiconductors, vehicle semiconductors, and system semiconductors.

The test components include: a test socket with an insert for accommodating the electronic product to be tested and a probe for transmitting test signals; a cover coupled to the test socket and open and close the insert; a pusher, which is arranged in In the cover body, the electronic product contained in the insert is pressed; and the heat dissipation component is used to dissipate heat. Here, the heat dissipation member may include a heat sink block for conducting heat transferred to the pusher to the outside.

However, because the size of the test socket is very small (for example, 6 cm * 6 cm), Therefore, there is a limit to the expansion of the surface area of the heat sink block. In other words, the heat sink block needs to be shaped as a very thin and precise plate to enlarge the surface area, which leads to the problem of not only increasing the production cost but also reducing the durability.

The aspect of the present disclosure aims to solve the aforementioned problems and provide a test element with a heat dissipation structure, which can be easily manufactured and achieves improvements in durability and heat sink effect in a small volume.

According to an embodiment, a test element for testing the electrical characteristics of an object to be tested is provided. The test element includes: a test socket including a probe configured to transmit a test signal to the object to be tested; and a pusher unit configured to press the object to be tested to move closer to and away from the probe , The pusher unit includes: a pressing protrusion configured to press the object to be tested; a pusher base including the pressing protrusion on a first side thereof and a plurality of heat dissipation pillars on a second side thereof The insertion part; and the heat dissipation column, which is shaped like a rod, and includes an end portion to be inserted into the insertion part of the heat dissipation column and a plurality of heat dissipation wings located on the outer circumferential surface of the heat dissipation column.

The test element may further include a heat dissipation fan, wherein the pusher unit includes at least one fan support column disposed on the second side of the pusher base and supporting the heat dissipation fan.

The fan support column may be integrally formed on the second side of the pusher base.

The pusher base may include a position where the plurality of heat dissipation posts are inserted A plurality of heat dissipation walls are integrally formed in between.

The second side of the pusher base may be inclined downward from the center toward the outer edge.

The heat dissipation pillar may be welded to the heat dissipation pillar insertion part using a welding material.

The heat dissipation column insertion portion may include: a column insertion hole into which the one end portion of the heat dissipation column is inserted; and a soldering material container that communicates with the column insertion hole, and when the When the one end portion of the heat dissipation column is inserted into the column insertion hole, the welding material is contained without overflowing.

The post insertion hole may include a welding material accommodating groove that accommodates the welding material.

1: Test component

10: Test socket

12: Probe support body

13: Insert

20: Lid

22: Lid body

24: Latch

26: handle

30: Pusher unit

32: Pusher

34: Pusher frame

36: Lower cover of the pusher

40: cooling fan

221: Lid Skirt

222: Pusher Holder

223: Through Hole

224: handle guide

242: Locked part

244: push part

246, 266: hinge pin

262: Presser

321: column area/square column area

322: Pusher base

323: first spring groove

324: Press protrusion

325: first spring

326: cooling column

327: Radiating Wall

328: Fan Support Column

329: Insert part of heat sink

342: Pusher skirt

344, 3282: Bolt hole

362: Press the protrusion receiver

364: Bolt

3262: Cooling Wing

3264: Coupling end part

3266: Filling part of welding material

3267: flat part

3284: screw

3286: Fastening part of fan support column

3292: Column insertion hole

3294: Welding material container

3296: Welding material receiving groove

3422: second spring groove

3424: placement part

3426: second spring

The above and/or other aspects will become obvious and easier to understand by reading the following description of the exemplary embodiment in conjunction with the accompanying drawings. In the accompanying drawings: FIG. 1 is a perspective view of a test element according to the first embodiment of the present disclosure. .

2 and 3 are exploded perspective views of the test element in FIG. 1.

Fig. 4 is a perspective view of the pusher in Fig. 1.

Fig. 5 is a disassembled view of the pusher in Fig. 1.

FIG. 6 is a perspective view showing the structure of the heat dissipation column in FIG. 5.

7 and 8 show the state before and after the heat dissipation pillar and the heat dissipation pillar insertion part are welded according to the second embodiment of the present disclosure.

9 and 10 show the state before and after the heat dissipation pillar and the heat dissipation pillar insertion part are welded according to the third embodiment of the present disclosure.

Fig. 11 is a perspective view of a column area of a pusher base according to a fourth embodiment of the present disclosure.

Fig. 12 is a side view showing the air flow in the pusher unit according to the fourth embodiment of the present disclosure.

Fig. 13 is an exploded perspective view of a pusher unit according to a fifth embodiment of the present disclosure.

Hereinafter, the embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. For the convenience of description, only relevant components will be described to facilitate understanding of the present disclosure, and the drawings and descriptions do not include components that are not directly related to the present disclosure, and the same numbers always refer to the same or similar components.

In addition, details that are obvious to those with ordinary knowledge in the art may not be disclosed. In this disclosure, "first", "second" and similar relational terms can only be used to distinguish one component from another, but there is no actual relationship or order between them. significance.

FIG. 1 is a perspective view of a test element according to the first embodiment of the present disclosure, and FIG. 2 and FIG. 3 are exploded perspective views of the test element in FIG. 1.

1 to 3, the test element 1 may include a test socket 10, a cover 20 coupled to the test socket 10, a pusher unit 30 provided in the cover 20, and a heat dissipation fan 40 installed to the pusher unit 30.

The test socket 10 includes a probe support body 12 and an insert 13, the probe support body 12 is used to support a plurality of elastically retractable probes, and the insert 13 is arranged on the probe support body 12 and has a housing for semiconductors or similar electronics. The object container for the product (hereinafter referred to as the "object to be tested"). Such a test socket 10 is only an example given for illustration, and is not limited to only the foregoing structure.

The object to be tested includes multiple contact points (such as bumps) to be tested, and may include stacked semiconductors such as package-on-package (POP) semiconductors.

The object to be tested is accommodated in the object container of the insert 13 and at the same time corresponds to the probe supported on the probe support body 12. The contained object to be tested is pressed by the pusher unit 30 to be described later, and moves toward the corresponding probe. Therefore, the contact point of the object to be tested comes into contact with the probe, and thus the test is performed.

The cover 20 may include a cover body 22 coupled to the test socket 10 and a pair of latches 24 and a handle 26 provided in the cover body 22 to open and close the top of the test socket 10 during testing.

The cover body 22 can be detachably coupled to the test socket 10 by the pair of latches 24. The cover body 22 may include a pusher receiver 222 to accommodate the pusher unit 30 at the center of the pusher receiver 222. The top of the cover body 22 is formed with a cover skirt (see "221" in FIG. 3), the cover skirt is formed with an opening, the heat dissipation column 326 and the fan support column 328 of the pusher unit 30 to be described later Through the opening. The cover body 22 may include a pair of handle guides that are recessed along the pivoting direction of the handle 26 and guide the pivoted handle 26 (see "224" in FIG. 2). In every A through hole (see "223" in FIG. 3) is provided in the middle of the handle guide 224 to penetrate the cover skirt 221. In the through hole 223, a presser coupled to the end portion of the handle 26 (see "262" in FIG. 3) may be provided.

The pair of latches 24 are disposed in the cover body 22 and face each other, and the pusher receiver 222 is located between the pair of latches 24. Each latch 24 may include a locking part 242 and a pushing part 244. Each latch 24 is supported on the cover body 22 and is elastically pivoted by a hinge pin 246.

The handle 26 extends like a “∩” shape to bypass the pusher receiver 222 at a predetermined height above the pusher receiver 222. Both end portions of the handle 26 are pivotally supported in the middle of the handle guide 224 by hinge pins 266, respectively. The handle 26 may include a cam (not shown) at its end portion, the cam being shaped to have three different diameters. The cam may be connected with the pusher 262 for pressing the pusher unit 30. Therefore, each time when the handle 26 is arranged in the middle, on the left when pivoted to the left, and on the right when pivoted to the right, the height of the presser 262 is adjusted in a different manner by the cam. Therefore, the pusher unit 30 is pressed in different ways according to the pivoting position of the handle 26, and therefore even if the object to be tested is different in thickness, the test element 1 of the present disclosure can also be used in testing. Of course, the pusher 262 can be omitted, and the cam can directly press the pusher unit 30.

The pusher unit 30 may include a pusher 32, a pusher frame 34 supporting the pusher 32, and a pusher lower cover 36 covering the bottom of the pusher frame 34.

The pusher 32 may include a pusher base 322, a pressing protrusion 324, a plurality of heat dissipation pillars 326 and a fan support pillar 328, and the pusher base 322 is shaped like Plate, the pressing protrusion 324 protrudes from the bottom of the pusher base 322 and presses the top of the object to be tested placed on the test socket 10, the plurality of heat dissipation pillars 326 and the fan support pillars 328 are supported on the top of the pusher base 322 superior. On the outer circumference of the pusher base 322, a plurality of first spring grooves 323 may be provided. The first spring groove (see "323" in FIG. 2) can accommodate the lower end portion of the first spring (see "325" in FIG. 2). The first spring 325 enables the pusher 32 to be elastically maintained at a certain distance from the pusher frame 34 while being accommodated in the pusher frame 34. The details of the pusher 32 will be described later.

The pusher frame 34 is shaped like a box and opens upward and downward. The pusher frame 34 is provided with a pusher skirt 342 at an upper portion to prevent the pusher 32 accommodated in the pusher frame 34 from being separated upward. A plurality of second spring grooves 3422 corresponding to the first spring grooves 323 of the pusher base 322 are provided on the bottom of the pusher skirt 342. The plurality of second spring grooves 3422 can receive the upper end portion of the first spring 325. On the top of the pusher skirt 342 is provided a seating portion 3424 and second springs (see "3426" in Figure 2) provided at the four corners, and the seating portion 3424 is recessed to be placed on the cover. The pusher 262 at the end portion of the handle 26 of 20. The second spring 3426 is placed between the bottom of the cover skirt 221 of the cover body 22 and the top of the pusher unit 30 so that the pusher unit 30 can be elastically suspended on the cover 20.

A plurality of bolt holes 344 may be provided at the lower end of the pusher frame 34 for coupling with the pusher lower cover 36 while accommodating the pusher 32 in the pusher frame 34.

The pusher lower cover 36 may include a pressing protrusion receiver 362 recessed downward. The pressing protrusion receiver 362 may receive the pressing protrusion 324 of the pusher 32 accommodated in the pusher frame 34. The pusher lower cover 36 can be coupled to the plurality of bolt holes 344 of the pusher frame 34 by a plurality of bolts 364.

The heat dissipation fan 40 may be installed to the fan support column 328 of the pusher unit 30 to dissipate the heat transferred from the object to be tested that generates heat to the pusher unit 30. The heat dissipation fan 40 forcibly sucks and discharges air from the lateral side of the heat dissipation column 326 to the upper side or discharges the air from the upper side to the lateral side.

4 is a perspective view of the pusher 32 in FIG. 1, FIG. 5 is a disassembled view of the pusher 32 in FIG. 1, and FIG. 6 is a perspective view showing the structure of the heat dissipation column 326 in FIG. 6.

4 and 5, the pusher 32 may include a pusher base 322, a pressing protrusion (see “324” in FIG. 3), a heat dissipation column 326, and a fan support column 328.

The pusher base 322 is shaped like a plate and includes a pressing protrusion 324, a plurality of heat dissipation walls 327, a heat dissipation column insertion portion 329, and a fan support column 328. The pressing protrusion 324 protrudes from the bottom of the pusher base 322. A plurality of heat dissipation walls 327 are arranged to leave a space in the square pillar area 321 on the top of the pusher base 322, the heat dissipation pillar insertion portion 329 is arranged between the heat dissipation walls 327, and the fan support pillar 328 is integrally formed At the corner of column area 321.

The heat dissipation wall 327 may integrally extend from the top of the pusher base 322 and be spaced apart from each other in the width direction and the length direction.

The fan support columns 328 may be integrally formed at the four corners of the column area 321, respectively. A bolt hole 3282 is formed on the top end surface of the fan support column 328, The cooling fan 40 is fastened to the bolt hole 3282.

The heat dissipation column insertion part 329 may be formed like a cylindrical hole, for example, by drilling the column area 321 of the pusher base 322. The heat dissipation pillar insertion part 329 may be formed between the heat dissipation walls 327.

The pressing protrusion 324 may be integrally formed on the bottom of the pusher base 322. Of course, the pressing protrusion 324 may be separately manufactured, and then coupled or glued to the bottom of the pusher base 322.

6, the heat dissipation column 326 may be shaped like a rod, and includes a plurality of heat dissipation wings 3262 for improving the heat dissipation effect and a coupling end portion 3264 provided at one side. The heat dissipation pillar 326 may be forcibly fitted, joined (welded) or screw-coupled to the heat dissipation pillar insertion portion 329.

The heat dissipation wing 3262 can be formed, for example, by machining a cylindrical rod-shaped material through a lathe. To facilitate machining, the heat dissipation wing 3262 may be formed transverse to the length direction. Of course, the heat dissipation wing 3262 may be formed to extend along the length direction.

The coupling end portion 3264 may be formed with at least one welding material filling portion 3266 on the outer circumferential surface thereof. The solder material filling part 3266 may be filled with a molten solder material, for example, molten silver (Ag) used when the heat dissipation pillar 326 is welded to the heat dissipation pillar insertion part 329. Melted silver is easy to process due to its low melting point, and it has good heat dissipation due to its high thermal conductivity. Since the heat dissipation pillar 326 is coupled to the pusher base 322 in a state where the welding material filling portion 3266 is filled with the welding material, the heat dissipation pillar 326 is more firmly supported.

7 and 8 show the heat dissipation pillar 326 according to the second embodiment of the present disclosure and The state before and after the heat sink insertion portion 329 is welded.

Referring to FIG. 7, the heat dissipation column 326 may include the plurality of heat dissipation wings 3262 and the coupling end portion 3264.

The coupling end portion 3264 may have a cylindrical shape and include at least one welding material filling portion 3266 disposed transversely to the length direction and a flat portion 3267 formed by cutting the outer circumferential surface in the length direction.

The heat dissipation column insertion portion 329 may include a column insertion hole 3292 into which the coupling end portion 3264 is inserted, and a welding material receiver 3294 communicating with the column insertion hole 3292. When the coupling end portion 3264 is inserted into the post insertion hole 3292, the soldering material (for example, molten silver (Ag)) filled in the post insertion hole 3292 and used for soldering may overflow. The welding material container 3294 contains such overflowing welding material, thereby not only tightening the heat dissipation column 326 more firmly, but also finishing the appearance neatly.

8, when the heat dissipation column 326 is inserted into the column insertion hole 3292 filled with solder material and then cooled, since the solder material is filled in the solder material filling portion 3266, between the flat portion 3267 and the inner surface of the column insertion hole 3292 And the welding material container 3294, so the welding material can be hardened. Therefore, the column insertion hole 3292 into which the coupling end portion 3264 is inserted is completely filled without any gap, thereby improving the heat dissipation effect and achieving a firm coupling.

9 and 10 show the state before and after the heat dissipation pillar 326 and the heat dissipation pillar insertion portion 329 are welded according to the third embodiment of the present disclosure.

9, the heat dissipation column 326 may include the plurality of heat dissipation wings 3262 and the coupling end portion 3264.

The coupling end portion 3264 may have a cylindrical shape and include at least one welding material filling portion 3266 disposed transversely to the length direction. Unlike the coupling end portion 3264 of FIG. 7, the coupling end portion 3264 of FIG. 9 does not include a flat portion 3267 formed by cutting the outer circumferential surface in the length direction.

The heat dissipation column insertion portion 329 may include a column insertion hole 3292 into which the coupling end portion 3264 is inserted, and a welding material receiver 3294 communicating with the column insertion hole 3292. The post insertion hole 3292 may include a plurality of welding material receiving grooves 3296 extending in the length direction on the inner circumferential surface thereof.

When the coupling end portion 3264 is inserted into the post insertion hole 3292, the soldering material (for example, molten silver (Ag)) filled in the post insertion hole 3292 and used for soldering may overflow. The welding material receiver 3294 and the welding material receiving groove 3296 provide a large enough space to accommodate the molten welding material, so as not only to tighten the heat dissipation column 326 more firmly, but also to prevent the welding material from overflowing and damaging the appearance.

10, when the heat dissipation column 326 is inserted into the column insertion hole 3292 filled with welding material and then cooled, since the welding material is filled in the welding material filling portion 3266, the welding material receiving groove 3296, and the welding material receiving container 3294, The welding material can be hardened. Therefore, the column insertion hole 3292 into which the coupling end portion 3264 is inserted is completely filled without any gap, thereby improving the heat dissipation effect and achieving a firm coupling.

FIG. 11 is a perspective view of the column area 321 of the pusher base 322 according to the fourth embodiment of the present disclosure, and FIG. 12 is a side view showing the air flow in the pusher 32 according to the fourth embodiment of the present disclosure.

Referring to FIG. 11, the column area 321 of the pusher base 322 may be shaped like a quadrangular pyramid having four slopes inclined upward toward the center. Of course, the column area 321 is not limited to a quadrangular pyramid, but can be shaped like a cone, a triangular pyramid, a pentagonal pyramid, or a similar polygonal pyramid.

Referring to FIG. 12, the heat dissipation fan 40 placed above the pusher 32 operates to supply air to the column area 321. In this case, as shown in FIG. 11, the air is discharged more smoothly without resistance along a slope that slopes downward from the center of the column area 321 of the pusher base 322 toward the outer edge.

FIG. 11 shows that the heat dissipation wall and the heat dissipation pillar are omitted on the top of the pusher base 322.

FIG. 12 shows that the heat dissipation wall is omitted on the top of the pusher base 322.

FIG. 13 is an exploded perspective view of the pusher 32 according to the fifth embodiment of the present disclosure.

Referring to FIG. 13, the fan support column 328 may not be integrally manufactured, but is manufactured separately, and is coupled to the top of the pusher base 322.

The pusher 32 can be shaped like a plate and includes a pusher base 322, the plurality of heat dissipation walls 327, and a fan support column fastening portion 3286. The pusher base 322 has a square column area 321 on the top. The plurality of heat dissipation walls 327 are arranged to leave a space in the column area 321, and the fan support column fastening parts 3286 are arranged at the four corners of the pusher 32.

The lower end portion of the fan support column 328 can be fastened to the fan support column fastening part 3286 by screws 3284 and supported by the fan support column fastening part 3286 superior.

In the test element according to the present disclosure, the pressing protrusion 324 is provided on the first side of the pusher 32, and a plurality of heat dissipation pillars shaped like a rod and having multiple wings are assembled on the second side of the pusher 32 , So as to facilitate work and assembly, fully expand the surface area, enhance the heat dissipation effect and improve durability. In addition, heat is easily radiated outward through the spaces between the plurality of heat dissipation pillars, thereby enhancing the heat dissipation effect.

In the foregoing content, the advantages of the present disclosure have been described with reference to specific embodiments. However, those with ordinary knowledge in this technology will understand that various modifications and changes can be made without departing from the scope of the disclosure defined in the scope of the attached patent application. Therefore, the description and the drawings need to be interpreted as examples of the disclosure, rather than limitations on the disclosure. All such possible modifications should be made within the scope of this disclosure.

10: Test socket

12: Probe support body

13: Insert

20: Lid

22: Lid body

24: Latch

26: handle

30: Pusher unit

32: Pusher

34: Pusher frame

36: Lower cover of the pusher

40: cooling fan

222: Pusher Holder

224: handle guide

242: Locked part

244: push part

246, 266: hinge pin

322: Pusher base

323: first spring groove

325: first spring

326: cooling column

328: Fan Support Column

342: Pusher skirt

362: Press the protrusion receiver

364: Bolt

3424: placement part

3426: second spring

Claims (7)

A test element for testing the electrical characteristics of an object to be tested, the test element comprising: a test socket including a probe configured to transmit a test signal to the object to be tested; and a pusher unit configured to press The object to be tested moves closer to and away from the probe, and the pusher unit includes: a pressing protrusion configured to press the object to be tested; and a pusher base including the pressing on a first side thereof A protrusion, and includes a plurality of heat dissipation pillar insertion portions on the second side thereof; and a heat dissipation pillar having a rod shape and including an end portion to be inserted into the heat dissipation pillar insertion portion and an outer portion of the heat dissipation pillar A plurality of heat dissipation wings on the circumferential surface, wherein the heat dissipation pillar is welded to the heat dissipation pillar insertion part by using a welding material. The test element according to claim 1, further comprising a heat dissipation fan, wherein the pusher unit includes at least one fan support column provided on the second side of the pusher base and supporting the heat dissipation fan. The test element according to claim 2, wherein the fan support column is integrally formed on the second side of the pusher base. The test element according to claim 1, wherein the pusher base includes a multi-piece integrally formed with the plurality of heat-dissipating column insertion portions therebetween. A cooling wall. The test element according to claim 1, wherein the second side of the pusher base is inclined downward from the center toward the outer edge. The test element according to claim 1, wherein the heat-dissipating column insertion part includes: a column insertion hole into which the one end portion of the heat-dissipating column is inserted; and a soldering material receiver, The column insertion hole is in communication, and when the one end portion of the heat dissipation column is inserted into the column insertion hole, the welding material is accommodated without overflowing. The test element according to claim 6, wherein the column insertion hole includes a welding material accommodating groove for accommodating the welding material.

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