TWI747479B - Composition for chemical mechanical polishing and chemical mechanical polishing method - Google Patents

Abstract

The present invention provides a chemical mechanical polishing composition and a chemical mechanical polishing method, which can polish a semiconductor substrate containing tungsten, cobalt and other conductive metals at high speed and flatly, and can reduce surface defects after polishing. The chemical mechanical polishing composition of the present invention contains: (A) silica particles containing a functional group represented by the following general formula (1); and (B) a compound containing a hydroxyl group and an ether group. -COO ^－ M ⁺・・・・・(1) (M ⁺ represents a monovalent cation.)

Description

Composition for chemical mechanical polishing and chemical mechanical polishing method

The invention relates to a chemical mechanical polishing composition and a chemical polishing method.

The miniaturization of wiring layers including wirings, plugs, and the like formed in semiconductor devices is progressing day by day. Along with this, a method of planarizing the wiring layer by chemical mechanical polishing (hereinafter also referred to as “CMP (Chemical Mechanical Polishing)”) is used. The ultimate goal of this type of CMP is to flatten the polished surface after polishing to obtain a defect-free and corrosion-free surface. Therefore, the chemical mechanical polishing composition used in CMP is evaluated based on characteristics such as the material removal rate, the surface defect rate after polishing, and the prevention of metal corrosion after polishing.

In recent years, with the further miniaturization of wiring layers, tungsten (W) or cobalt (Co) has begun to be used as conductor metals. Therefore, it is required to be able to efficiently remove tungsten or cobalt in the remaining build-up layer by CMP, and to suppress the corrosion of tungsten or cobalt, and to form a good surface condition. Regarding such chemical mechanical polishing of tungsten or cobalt, a chemical mechanical polishing composition containing various additives has been proposed (for example, refer to Patent Document 1 and Patent Document 2). [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Publication No. 2017-514295 [Patent Document 2] Japanese Patent Laid-Open No. 2016-030831

[The problem to be solved by the invention] With the spread of semiconductor wafers containing conductive metals such as tungsten or cobalt, a composition for chemical mechanical polishing is required that can polish semiconductor substrates containing conductive metals such as tungsten or cobalt at high speed and flat, and reduce surface defects after polishing. Materials and chemical mechanical polishing methods. [Means to solve the problem]

Form a chemical mechanical polishing composition of the present invention comprises: (A) comprises the following general formula (1) represents a silicon dioxide particle having a functional group; and a compound (B) containing a hydroxyl group and an ether group, -COO ^- M ⁺・・・・・(1) (M ⁺ represents a monovalent cation).

In one form of the chemical mechanical polishing composition, it may be: When the total mass of the chemical mechanical polishing composition is 100% by mass, The content of the component (A) is 0.1% by mass or more and 10% by mass or less, The content of the component (B) is 0.0001% by mass or more and 0.05% by mass or less.

In any form of the chemical mechanical polishing composition, May contain organic acids.

In any form of the chemical mechanical polishing composition, May contain oxidizing agent.

In any form of the chemical mechanical polishing composition, it may be: The pH is 2 or more and 5 or less.

One aspect of the chemical mechanical polishing method of the present invention includes: The step of polishing a semiconductor substrate using the chemical mechanical polishing composition of any one of the above-mentioned forms.

In one form of the chemical mechanical polishing method, it may be: The semiconductor substrate includes a portion containing at least one selected from the group consisting of silicon oxide and tungsten. [Effects of the invention]

According to the composition for chemical mechanical polishing of the present invention, a semiconductor substrate containing a conductive metal such as tungsten or cobalt can be polished at high speed and flat, and surface defects after polishing can be reduced.

Hereinafter, suitable embodiments of the present invention will be described in detail. In addition, the present invention is not limited to the following embodiments, and includes various modified examples implemented within a scope that does not change the gist of the present invention.

In this manual, the numerical range described in "～" is used to include the numerical values described before and after "～" as the meaning of the lower limit and the upper limit.

1. Composition for chemical mechanical polishing The composition for chemical mechanical polishing according to an embodiment of the present invention includes: (A) silica particles containing a functional group represented by the following general formula (1) (in this specification, also referred to as It is "(A) component") and (B) a compound containing a hydroxyl group and an ether group (in this specification, it is also simply referred to as "(B) component"). -COO ^- M ⁺ ... (1) (M ⁺ represents a monovalent cation.) Hereinafter, each component contained in the chemical mechanical polishing composition of the present embodiment will be described in detail.

1.1. (A) Component The chemical mechanical polishing composition of the present embodiment contains (A) silicon dioxide particles containing a functional group represented by the following general formula (1) as an abrasive component. -COO ^- M ⁺・・・・・(1) (M ⁺ represents a monovalent cation.) The monovalent cation represented by M ⁺ is not limited to these, and examples include H ⁺ , Li ⁺ , Na ⁺ , and K ⁺ , NH ₄ ⁺ . That is, the component (A) may be renamed as "(A) silica particles containing at least one functional group selected from the group consisting of carboxyl groups and their salts". Here, "the salt of a carboxyl group" refers to ^{a functional group obtained by substituting a monovalent cation such as Li +} , Na ⁺ , K ⁺ , and NH ₄ ⁺ for the hydrogen ion contained in the carboxyl group (-COOH). The component (A) is a silicon dioxide particle having a functional group represented by the general formula (1) fixed on its surface via a covalent bond, and does not include the physical or ionic adsorption on the surface of the silicon dioxide particle having the general formula (1) The compound of the functional group represented.

The (A) component used in this embodiment can be manufactured as follows, for example. First, prepare silica particles. Examples of the silica particles include fumed silica, colloidal silica, etc. However, from the viewpoint of reducing polishing defects such as scratches, colloidal silica is preferred. The colloidal silica can be manufactured by, for example, a method described in Japanese Patent Laid-Open No. 2003-109921 or the like. By modifying the surface of such silica particles, the component (A) that can be used in this embodiment can be produced. The method of modifying the surface of silica particles is exemplified below, but the present invention is not limited to this specific example at all.

As the surface modification of the silica particles, the method described in Japanese Patent Laid-Open No. 2005-162533 or Japanese Patent Laid-Open No. 2010-269985 can be applied. For example, by mixing silicon dioxide particles and a carboxyl-containing silane coupling agent (for example, (3-triethoxysilyl)propyl succinic anhydride)) and thoroughly stirring, the carboxyl-containing silane coupling The mixture is covalently bonded to the surface of the silicon dioxide particles. By further heating and hydrolyzing, silicon dioxide particles in which the carboxyl group is fixed via a covalent bond can be obtained.

(A) The lower limit of the average particle diameter of the component is preferably 15 nm, more preferably 30 nm. (A) The upper limit of the average particle diameter of the component is preferably 100 nm, more preferably 70 nm. If the average particle size of the component (A) is within the above range, it may be possible to polish a semiconductor substrate containing a conductive metal such as tungsten or cobalt at a practical polishing rate while suppressing the occurrence of polishing defects. (A) The average particle size of the component can be obtained by measuring the manufactured chemical mechanical polishing composition with a particle size measuring device using a dynamic light scattering method. As a particle size measuring device based on the dynamic light scattering method, the nanoparticle analyzer "Delsa Nano S" manufactured by Beckman Coulter and the manufactured by Malvern Co. "Zetasizer nano (Zetasizer nano) zs" and so on. In addition, the average particle diameter measured using the dynamic light scattering method represents the average particle diameter of the secondary particles formed by agglomeration of a plurality of primary particles.

When the pH of the chemical mechanical polishing composition is 1 or more and 6 or less, the zeta potential of component (A) is a negative potential in the chemical mechanical polishing composition, and the negative potential is preferably -10 mV or less . If it is a negative potential of -10 mV or less, the electrostatic repulsive force between the particles can effectively prevent the particles from agglomerating, and at the same time, the positively charged substrate can be selectively polished during chemical mechanical polishing. Furthermore, as the zeta potential measuring device, "ELSZ-1" manufactured by Otsuka Electronics Co., Ltd., "Zetasizer nano zs" manufactured by Malvern Corporation, and the like can be cited. The zeta potential of the component (A) can be appropriately adjusted by increasing or decreasing the addition amount of the carboxyl group-containing silane coupling agent.

When the total mass of the chemical mechanical polishing composition is 100% by mass, the lower limit of the content of the component (A) is preferably 0.1% by mass, more preferably 0.5% by mass, and particularly preferably 1% by mass. When the total mass of the chemical mechanical polishing composition is 100% by mass, the upper limit of the content of the component (A) is preferably 10% by mass, more preferably 8% by mass, and particularly preferably 5% by mass. If the content of the component (A) is within the above range, it may be possible to polish a semiconductor substrate containing a conductive metal such as tungsten or cobalt at a practical polishing rate while suppressing the occurrence of polishing defects.

1.2. (B) component The chemical mechanical polishing composition of this embodiment contains (B) a compound containing a hydroxyl group and an ether group. By containing the component (B), the change in the characteristics of the chemical mechanical polishing composition caused by evaporation in the polishing step can be suppressed, and stable polishing characteristics can be exhibited. Thereby, the generation of polishing defects can be suppressed, and the semiconductor substrate containing conductive metals such as tungsten or cobalt can be polished at a practical polishing speed.

The component (B) is not particularly limited as long as it is a compound having one or more hydroxyl groups and one or more ether groups in the molecule, but it preferably has a normal boiling point higher than the temperature of the surface to be polished raised in the polishing step. (B) The standard boiling point of the component is preferably 80°C or higher, more preferably 100°C or higher. (B) When the standard boiling point of the component is in the above range, it is possible to easily suppress the change in the characteristics of the chemical mechanical polishing composition due to evaporation in the polishing step. In addition, the standard boiling point refers to the boiling point at 1 atmosphere.

As such (B) component, glycol ether is preferable. Specific examples of glycol ethers include, for example, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, ethylene glycol monoallyl ether, and propylene glycol monomethyl ether. Ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether, 3-methoxy-3-methyl-1-butanol, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene two Alcohol monopropyl ether, diethylene glycol monobutyl ether, diethylene glycol monobenzyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol monopropyl ether, dipropylene glycol monobutyl ether, triethylene glycol mono Methyl ether, triethylene glycol monoethyl ether, triethylene glycol monopropyl ether, triethylene glycol monobutyl ether, tripropylene glycol monobutyl ether, etc.

When the total mass of the chemical mechanical polishing composition is 100% by mass, the lower limit of the content of the component (B) is preferably 0.0001% by mass, more preferably 0.0005% by mass, and particularly preferably 0.001% by mass. When the total mass of the chemical mechanical polishing composition is 100% by mass, the upper limit of the content of the component (B) is preferably 0.05% by mass, more preferably 0.04% by mass, and particularly preferably 0.02% by mass. If the content of the component (B) is within the above range, it is easy to suppress the change in the characteristics of the chemical mechanical polishing composition due to evaporation in the polishing step, and it is easy to express stable polishing characteristics.

1.3. Liquid medium The chemical mechanical polishing composition of this embodiment contains a liquid medium. As the liquid medium, a mixed medium of water, water, and alcohol, a mixed medium containing water and an organic solvent having compatibility with water, and the like can be cited. Among these, it is preferable to use water, a mixed medium of water and alcohol, and it is more preferable to use water. The water is not particularly limited, but pure water is preferred. Water may be prepared as the remainder of the constituent materials of the chemical mechanical polishing composition, and the content of water is not particularly limited.

1.4. Other additives The chemical mechanical polishing composition of the present embodiment may further contain additives such as an oxidizing agent, an organic acid, a surfactant, a water-soluble polymer, an anticorrosive agent, and a pH adjuster, as necessary. Hereinafter, each additive will be described.

＜Oxidant＞ The chemical mechanical polishing composition of this embodiment may contain an oxidizing agent. By containing an oxidizing agent, metals such as tungsten or cobalt are oxidized to promote the complex reaction with the components of the polishing liquid, so that a fragile modified layer can be formed on the surface to be polished, so the polishing speed may increase.

Examples of the oxidizing agent include ammonium persulfate, potassium persulfate, hydrogen peroxide, ferric nitrate, cerium ammonium nitrate, potassium hypochlorite, ozone, potassium periodate, peracetic acid, and the like. Among these oxidants, in consideration of oxidizing power and ease of handling, ammonium persulfate, potassium persulfate, and hydrogen peroxide are preferred, and hydrogen peroxide is more preferred. These oxidants may be used alone or in combination of two or more.

In the case where the chemical mechanical polishing composition of the present embodiment contains an oxidizing agent, when the total mass of the chemical mechanical polishing composition is 100% by mass, the content of the oxidizing agent is preferably 0.1% to 5% by mass, more preferably 0.3% by mass to 4% by mass, particularly preferably 0.5% by mass to 3% by mass. Furthermore, the oxidizing agent is easily decomposed in the chemical mechanical polishing composition, so it is desirable to add it immediately before the CMP polishing step.

＜Organic acid＞ The composition for chemical mechanical polishing of this embodiment may contain an organic acid. By containing the organic acid, the organic acid may be coordinated on the surface to be polished, and the polishing speed may be increased, and at the same time, the precipitation of the metal salt during polishing may be suppressed. In addition, by coordinating the organic acid on the surface to be polished, it may be possible to reduce damage to the surface to be polished due to etching and corrosion.

The organic acid is not particularly limited, and examples include saturated carboxylic acids such as malonic acid, citric acid, malic acid, tartaric acid, oxalic acid, lactic acid, and iminodiacetic acid; acrylic acid, methacrylic acid, crotonic acid, Unsaturated monocarboxylic acids such as 2-butenoic acid, 2-methyl-3 butenoic acid, 2-vinyl acid, 3-methyl-2-vinyl acid; maleic acid, fumaric acid, citraconic acid, medium Unsaturated dicarboxylic acids such as aconic acid, 2-pentanedioic acid, itaconic acid, allylmalonic acid, isopropylidene succinic acid, 2,4-hexadienedioic acid, and acetylene dicarboxylic acid; 1 , 2,4-Benzenetritic acid (trimellitic acid) and other aromatic carboxylic acids; glycine, alanine, aspartic acid, glutamine, lysine, arginine, tryptophan, histidine , Amino acids such as aromatic amino acids and heterocyclic amino acids, and their salts. These organic acids may be used singly or in combination of two or more.

In the case where the chemical mechanical polishing composition of the present embodiment contains an organic acid, when the total mass of the chemical mechanical polishing composition is 100% by mass, the content of the organic acid is preferably 0.01% by mass to 5% by mass, and more It is preferably 0.03% by mass to 1% by mass, particularly preferably 0.1% by mass to 0.5% by mass.

＜Surface active agent＞ The composition for chemical mechanical polishing of this embodiment may contain a surfactant. By containing a surfactant, it may be possible to impart appropriate viscosity to the chemical mechanical polishing composition. The viscosity of the chemical mechanical polishing composition is preferably adjusted to be 0.5 mPa·s or more and less than 10 mPa·s at 25°C.

The surfactant is not particularly limited, and examples include anionic surfactants, cationic surfactants, and nonionic surfactants.

Examples of anionic surfactants include carboxylates such as fatty acid soaps and alkyl ether carboxylates; sulfonates such as alkylbenzene sulfonates, alkylnaphthalene sulfonates, and α-olefin sulfonates; Sulfates such as higher alcohol sulfates, alkyl ether sulfates, polyoxyethylene alkylphenyl ether sulfates; fluorine-containing surfactants such as perfluoroalkyl compounds, etc. As a cationic surfactant, aliphatic amine salt, aliphatic ammonium salt, etc. are mentioned, for example. Examples of nonionic surfactants include nonionic surfactants having triple bonds such as acetylene glycol, acetylene glycol ethylene oxide adduct, and acetylene alcohol; polyethylene glycol type surfactants. These surfactants may be used singly, or two or more of them may be used in combination.

In the case where the chemical mechanical polishing composition of the present embodiment contains a surfactant, when the total mass of the chemical mechanical polishing composition is 100% by mass, the content of the surfactant is preferably 0.001% by mass to 5% by mass , More preferably 0.001% by mass to 3% by mass, particularly preferably 0.01% by mass to 1% by mass.

＜Water-soluble polymer＞ The chemical mechanical polishing composition of this embodiment may contain a water-soluble polymer. The water-soluble polymer has the effect of being adsorbed on the surface of the surface to be polished to reduce the abrasive friction. With this effect, there are cases in which the occurrence of polishing defects on the surface to be polished can be reduced.

Examples of water-soluble polymers include poly(meth)acrylamide, poly(meth)acrylic acid, polyvinyl alcohol, polyvinylpyrrolidone, hydroxyethyl cellulose, carboxymethyl cellulose, (methyl) Copolymers of acrylic acid and maleic acid, etc.

The weight average molecular weight (Mw) of the water-soluble polymer is preferably 1,000 to 1,000,000, more preferably 3,000 to 800,000. If the weight average molecular weight of the water-soluble polymer is within the above-mentioned range, it may be easily adsorbed on the surface to be polished such as a wiring material, and polishing friction may be further reduced. As a result, it is possible to more effectively reduce the occurrence of polishing defects on the surface to be polished. In addition, the "weight average molecular weight (Mw)" in this specification refers to the weight average molecular weight in terms of polyethylene glycol measured by Gel Permeation Chromatography (GPC).

When the chemical mechanical polishing composition of the present embodiment contains a water-soluble polymer, when the total mass of the chemical mechanical polishing composition is 100% by mass, the content of the water-soluble polymer is preferably 0.01% by mass to 1 % By mass, more preferably 0.03% by mass to 0.5% by mass.

Furthermore, the content of the water-soluble polymer also depends on the weight-average molecular weight (Mw) of the water-soluble polymer, but it is preferably adjusted so that the viscosity of the chemical mechanical polishing composition at 25°C is 0.5 mPa·s or more and less than 10 mPa·s. When the chemical mechanical polishing composition has a viscosity of 0.5 mPa·s or more and less than 10 mPa·s at 25°C, it is easy to polish wiring materials, etc. at a high speed, and the viscosity is appropriate, so the chemical can be stably supplied to the polishing cloth Composition for mechanical polishing.

＜Corrosion inhibitor＞ The chemical mechanical polishing composition of this embodiment may contain an anticorrosive agent. As the corrosion inhibitor, for example, benzotriazole and its derivatives can be cited. Here, the benzotriazole derivative refers to a substance obtained by substituting one or two or more hydrogen atoms of the benzotriazole with, for example, a carboxyl group, a methyl group, an amino group, a hydroxyl group, or the like. Specific examples of benzotriazole derivatives include 4-carboxybenzotriazole, 7-carboxybenzotriazole, butyl benzotriazole, 1-hydroxymethyl benzotriazole, 1-hydroxybenzene And triazoles and their salts.

In the case where the chemical mechanical polishing composition of the present embodiment contains an anticorrosive, when the total mass of the chemical mechanical polishing composition is 100% by mass, the content of the anticorrosive is preferably 1% by mass or less, more preferably 0.001 Mass%～0.1% by mass.

＜pH adjuster＞ The composition for chemical mechanical polishing of this embodiment may further contain a pH adjuster as needed. Examples of pH adjusters include alkalis such as potassium hydroxide, ethylenediamine, monoethanolamine, tetramethyl ammonium hydroxide (TMAH), tetraethyl ammonium hydroxide (TEAH), ammonia, etc.; Inorganic acids such as phosphoric acid, sulfuric acid, hydrochloric acid, and nitric acid, and salts of these, one or more of these can be used.

1.5.pH The pH of the chemical mechanical polishing composition of the present embodiment is not particularly limited, but is preferably 2 or more and 5 or less, and more preferably 2 or more and 4 or less. If the pH is within the above range, the dispersibility of the component (A) in the chemical mechanical polishing composition improves, and the storage stability of the chemical mechanical polishing composition becomes good, which is preferable.

In addition, the pH of the chemical mechanical polishing composition of the present embodiment can be adjusted by appropriately increasing or decreasing the content of an organic acid, a pH adjuster, etc., for example.

In the present invention, pH refers to the hydrogen ion index, and its value can be measured using a commercially available pH meter (for example, a desktop pH meter manufactured by Horiba Manufacturing Co., Ltd.) under the conditions of 25° C. and 1 atmosphere.

1.6. Purpose The chemical mechanical polishing composition of the present embodiment is suitable as a polishing material for chemical mechanical polishing of a semiconductor substrate having a plurality of materials constituting a semiconductor device. For example, in addition to conductive metals such as tungsten or cobalt, the semiconductor substrate may also include insulating film materials such as silicon oxide film, silicon nitride film, and amorphous silicon, and barrier metal materials such as titanium, titanium nitride, and tantalum nitride.

A particularly suitable polishing target of the chemical mechanical polishing composition of the present embodiment is a processed object such as a semiconductor substrate provided with a wiring layer containing tungsten. Specifically, the object to be processed includes a silicon oxide film having a through hole and a tungsten film provided on the silicon oxide film via a barrier metal film. By using the chemical mechanical polishing composition of this embodiment, not only the tungsten film can be polished at high speed and flat, but also the polished surface where the tungsten film and the insulating film such as silicon oxide film coexist can be suppressed while suppressing the occurrence of polishing defects. Perform high-speed and flat polishing.

1.7. Preparation method of chemical mechanical polishing composition The chemical mechanical polishing composition of the present embodiment can be prepared by dissolving or dispersing the respective components in a liquid medium such as water. The method of dissolution or dispersion is not particularly limited, and any method can be applied as long as it can be uniformly dissolved or dispersed. In addition, the mixing order and mixing method of the components are not particularly limited.

In addition, the chemical mechanical polishing composition of the present embodiment may be prepared as a concentrated stock solution, and diluted with a liquid medium such as water during use.

2. Chemical mechanical polishing method A polishing method according to an embodiment of the present invention includes a step of polishing a semiconductor substrate using the chemical mechanical polishing composition. Hereinafter, a specific example of the chemical mechanical polishing method of the present embodiment will be described in detail using drawings.

2.1. Processed body FIG. 1 is a cross-sectional view schematically showing a to-be-processed object suitable for using the chemical mechanical polishing method of this embodiment. The processed body 100 is formed by going through the following steps (1) to (4).

(1) First, as shown in Fig. 1, a base 10 is prepared. The base 10 may also be composed of, for example, a silicon substrate and a silicon oxide film formed thereon. Furthermore, functional elements such as a transistor (not shown) can be formed on the base 10. Then, on the base 10, a silicon oxide film 12 as an insulating film is formed using a thermal oxidation method.

(2) Next, the silicon oxide film 12 is patterned. The obtained pattern is a mask, and a through hole 14 is formed on the silicon oxide film 12 by photolithography.

(3) Next, the barrier metal film 16 is formed on the surface of the silicon oxide film 12 and the inner wall surface of the through hole 14 by sputtering or the like. The electrical contact between tungsten and silicon is not very good, so a good electrical contact is achieved by the presence of a barrier metal film. As the barrier metal film 16, titanium and/or titanium nitride can be cited.

(4) Then, the tungsten film 18 is deposited using a chemical vapor deposition (CVD) method.

Through the above steps, the processed body 100 is formed.

2.2. Chemical mechanical polishing method 2.2.1. The first grinding step Fig. 2 is a cross-sectional view schematically showing the object to be processed at the end of the first polishing step. In the first polishing step, as shown in FIG. 2, the tungsten film 18 is polished using the composition for chemical mechanical polishing until the barrier metal film 16 is exposed.

2.2.2. The second grinding step Fig. 3 is a cross-sectional view schematically showing the object to be processed at the end of the second polishing step. In the second polishing step, as shown in FIG. 3, the silicon oxide film 12, the barrier metal film 16, and the tungsten film 18 are polished using the composition for chemical mechanical polishing. By passing through the second polishing step, a next-generation semiconductor device 200 with excellent flatness of the polished surface can be manufactured.

Furthermore, as described above, the composition for chemical mechanical polishing is suitable as a polishing material for chemical mechanical polishing of a semiconductor substrate having a plurality of materials constituting a semiconductor device. Therefore, in the first polishing step and the second polishing step of the chemical mechanical polishing method of the present embodiment, the chemical mechanical polishing composition having the same composition can be used, and therefore the throughput of the production line is improved.

2.3. Chemical mechanical polishing device In the first polishing step and the second polishing step, for example, the polishing device 300 shown in FIG. 4 can be used. FIG. 4 is a perspective view schematically showing the polishing device 300. The first polishing step and the second polishing step are performed by supplying the slurry (composition for chemical mechanical polishing) 44 from the slurry supply nozzle 42 and turning the turntable to which the polishing cloth 46 is attached. While the turntable 48 rotates, the carrier head 52 holding the semiconductor substrate 50 is brought into contact with each other. Furthermore, in FIG. 4, the water supply nozzle 54 and the dresser 56 are also shown together.

The grinding load of the carrier head 52 can be selected in the range of 10 hPa to 980 hPa, preferably 30 hPa to 490 hPa. In addition, the rotation speed of the turntable 48 and the carrier head 52 can be appropriately selected in the range of 10 rpm to 400 rpm, preferably 30 rpm to 150 rpm. The flow rate of the slurry (chemical mechanical polishing composition) 44 supplied from the slurry supply nozzle 42 can be selected in the range of 10 mL/minute to 1,000 mL/minute, and is preferably 50 mL/minute to 400 mL/minute.

Commercially available polishing devices include, for example, the models "EPO-112" and "EPO-222" manufactured by Ebara Manufacturing Co., Ltd.; and the models "LGP-510" and "LGP-552" manufactured by Lapmaster SFT. ; Models "Mirra" and "Reflexion" manufactured by Applied Material; Models "POLI-400L" manufactured by G&P TECHNOLOGY; Models "POLI-400L" manufactured by AMAT "Reflexion LK" and so on.

3. Example Hereinafter, the present invention will be described through examples, but the present invention is not limited by these examples. In addition, the "parts" and "%" in this embodiment are quality standards unless otherwise specified.

3.1. Preparation of water dispersion of silica particles 3.1.1. Preparation of water dispersion A Add 2000 g of PL-3 (manufactured by Fuso Chemical Industry Co., Ltd., 19.5% colloidal silica) into a 2000 ^{cm 3 flask} ), heated to 60°C. Then, 6.0 g of (3-triethoxysilyl)propyl succinic anhydride (manufactured by Tokyo Chemical Industry Co., Ltd.) was added, heated at 60°C, and the reaction was continued for 4 hours. After cooling, an aqueous dispersion A of carboxylic acid-modified silica particles was obtained.

3.1.2. Preparation of Water Dispersion B A mixture of 1522.2 g of tetramethoxysilane (manufactured by Tokyo Chemical Industry Co., Ltd.) and 413.0 g of methanol was added dropwise to 787.9 g of pure water and 25% ammonia (Fuji Film and A hydrolyzed silica sol dispersion was obtained in a mixture of 786.0 g of methanol (manufactured by Fujifilm Wako Pure Chemical Co., Ltd.) and 12,924 g of methanol (manufactured by Fujifilm Wako Pure Chemical Co., Ltd.). The sol was heated and concentrated to 2900 ml under normal pressure. The concentrated solution was further heated and distilled under normal pressure, and pure water was added dropwise while keeping the volume constant. When it was confirmed that the temperature at the top of the tower reached 100°C and the pH became less than 8, the dropwise addition of pure water was terminated to obtain silica sol. . A mixture of 19.0 g of methanol and 1.0 g of 3-aminopropyltrimethoxysilane was added dropwise to 540 g of the prepared silica sol while maintaining the temperature of the liquid, and then proceeded under normal pressure for 2 Reflux for hours. Then, while keeping the volume constant, pure water was added dropwise, and the dropwise addition of pure water was terminated when the temperature at the top of the tower reached 100°C to obtain an aqueous dispersion of amine-modified silica particles. The obtained aqueous dispersion was vacuum dried at 150° C. for 24 hours to obtain amine-modified silica particles.

The obtained amine-modified silica particles were dried at 70°C for 12 hours. In a three-necked flask purged with nitrogen beforehand, 1.4 g of malonic acid (manufactured by Tokyo Chemical Industry Co., Ltd.) was measured, and 20.0 ml of N-methyl-2-pyrrolidone (NMP, Fujifilm Wako Pure Chemical Industries, Ltd.) was added. Co., Ltd.), stir until the malonic acid is completely dissolved. Add 2.0 g of amine-modified silica particles to the reaction solution, stir for 1 hour, and then add (2,3-dihydro-2-thioketo-3-benzoxazolyl)phosphonic acid diphenyl Esters (manufactured by Tokyo Chemical Industry Co., Ltd.) 6.2 g, triethylamine (manufactured by Fujifilm Wako Pure Chemical Industries, Ltd.) 1.4 ml, and stirred at room temperature for 24 hours. The reaction solution was allowed to stand overnight to precipitate the particles. After discarding the supernatant, the particles were washed with NMP several times to obtain carboxylic acid-modified silica particles. The recovered particles were vacuum dried at 100°C for 12 hours to remove the solvent. Add an appropriate amount of pure water to obtain 20% carboxylic acid modified silica particle water dispersion B.

3.1.3. Preparation of Water Dispersion C The amine-modified silica particles were obtained by the same method as described in "3.1.2. Preparation of Water Dispersion B". The obtained amine-modified silica particles were vacuum dried at 70°C for 12 hours. Measure 1.4 g of citric acid (manufactured by Tokyo Chemical Industry Co., Ltd.) in a three-necked flask purged with nitrogen in advance, add 20.0 ml of N-methyl-2-pyrrolidone (NMP), and stir until the citric acid is completely dissolved . Add 2.0 g of amine-modified silica particles to the reaction solution, stir for 1 hour, and then add 5.7 g (2,3-dihydro-2-thioketo-3-benzoxazolyl)phosphonic acid Diphenyl ester and 1.3 ml triethylamine were stirred at room temperature for 24 hours. The reaction solution was allowed to stand overnight to precipitate the particles. After discarding the supernatant, the particles were washed with NMP several times to obtain carboxylic acid-modified silica particles. The recovered particles were vacuum dried at 100°C for 12 hours to remove the solvent. Add an appropriate amount of pure water to obtain a 20% carboxylic acid modified silica particle water dispersion C.

3.1.4. Preparation of water dispersion D. Add 2000 g PL-3 (made by Fuso Chemical Industry Co., Ltd., 19.5% colloidal silica) into a flask with a ^{capacity of 2000 cm 3 and heat to 60°C.} Then 12.0 g (3-triethoxysilyl)propyl succinic anhydride was added as a silane coupling agent, heated at 60° C., and the reaction was continued for 4 hours. After cooling, an aqueous dispersion D of carboxylic acid-modified silica particles was obtained.

3.1.5. Preparation of water dispersion E Add 2000 g PL-3 (made by Fuso Chemical Industry Co., Ltd., 19.5% colloidal silica) into a flask with a ^{capacity of 2000 cm 3 and heat to 60°C.} Then 18.0 g (3-triethoxysilyl)propyl succinic anhydride was added as a silane coupling agent, heated at 60°C, and the reaction was continued for 4 hours. After cooling, an aqueous dispersion E of carboxylic acid-modified silica particles was obtained.

3.1.6. Preparation of water dispersion F. Put 70 g of 25% by mass ammonia water, 40 g of ion exchange water, 175 g of ethanol, and 21 g of tetraethoxysilane into a flask with a ^{capacity of 2000 cm 3 at 180 rpm.} The temperature was raised to 60°C while stirring. Maintained at 60°C and stirred for 1 hour and then cooled to obtain a colloidal silica/alcohol dispersion. Then, with an evaporator, the operation of removing the alcohol component was repeated several times while adding ion-exchanged water to the dispersion at 80°C, thereby removing the alcohol in the dispersion, and preparing a silica dispersion with a solid content of 15%. liquid.

Put 5 g of acetic acid into 50 g of ion exchange water, and gradually add 5 g of sulfhydryl-containing silane coupling agent (manufactured by Shin-Etsu Chemical Co., Ltd., trade name "KBE 803") while stirring. After 30 minutes, 1000 g of the silica dispersion liquid prepared in advance was added, and the stirring was continued for 1 hour. Then, 200 g of 31% hydrogen peroxide water was put in and left at room temperature for 48 hours, thereby obtaining an aqueous dispersion F containing silicon dioxide particles having sulfo groups.

3.1.7. Preparation of water dispersion G A mixture of 1522.2 g of tetramethoxysilane and 413.0 g of methanol was added dropwise to a mixture of 787.9 g of pure water, 786.0 g of 26% ammonia, and 12924 g of methanol while maintaining the liquid temperature at 35°C. Then, it is heated and concentrated to 2900 ml under normal pressure. The concentrated solution was further heated and distilled under normal pressure. Pure water was added dropwise while keeping the volume constant. When it was confirmed that the temperature at the top of the tower reached 100°C and the pH was below 8, the dropwise addition of pure water was completed to prepare silica dispersion. liquid.

A mixture of 19.0 g of methanol and 1.0 g of 3-aminopropyltriethoxysilane was added dropwise to 540 g of the prepared silica dispersion while maintaining the liquid temperature, and then proceeded under normal pressure. Reflux for 2 hours. Then, pure water was added dropwise while keeping the volume constant, and the dropwise addition of the pure water was terminated when the tower top temperature reached 100°C to obtain an aqueous dispersion G containing silica particles having an amine group.

3.2. Preparation of chemical mechanical polishing composition Using hydrogen peroxide (manufactured by Fujifilm Wako Pure Chemical Industries, Ltd., 30% aqueous solution) as an oxidizing agent, each component was added in a polyethylene container so as to have the composition shown in Tables 1 to 3, and hydrogen was added as needed Potassium oxide was adjusted so as to have the pH shown in Tables 1 to 3, and adjusted with pure water so that the total amount of all components became 100 parts by mass, thereby preparing the chemistry of each example and each comparative example Composition for mechanical polishing.

3.3. Evaluation method 3.3.1. Grinding speed test Using the obtained chemical mechanical polishing composition, a 12-inch diameter wafer with a 300 nm CVD-W film or a 12-inch diameter wafer with a 300 nm p-TEOS film (silicon oxide film) As the object to be polished, the circle was subjected to a chemical mechanical polishing test for 60 seconds under the following polishing conditions.

＜Grinding conditions＞ • Grinding device: made by AMAT, model "Reflexion LK" • Polishing pad: manufactured by Fujibo Holdings Co., Ltd., "Multi-hard polyurethane pad; H800-type1 (3-1S) 775" • Feed rate of chemical mechanical polishing composition: 300 mL/min •Pressure plate speed: 100 rpm • Head speed: 90 rpm • Head pressing pressure: 2.5 psi • Polishing speed (Å/min) = (the thickness of the film before polishing-the thickness of the film after polishing) / polishing time

Furthermore, the thickness of the tungsten film is measured using a resistivity measuring machine (made by KLA-Tencor, model "OmniMap RS100") and measuring the resistance by the DC four-point probe method. The sheet resistance value and the volume resistivity of tungsten are calculated by the following formula. • Film thickness (Å)=[Volume resistivity of tungsten film (Ω·m)÷Surface resistance value (Ω)]×10 ¹⁰

The evaluation criteria of the polishing speed test are as follows. The results of the polishing rate of the tungsten film, the results of the polishing rate of the silicon oxide film, and the evaluation results are shown in Tables 1 to 3. (Evaluation criteria) • "A"... When the tungsten polishing speed is 100 Å/min or more and the p-TEOS polishing speed is 200 Å/min or more, the polishing speeds of both are sufficiently high, so it can be used in actual polishing of semiconductor substrates. It is easy to ensure a balance with the polishing speed of other material films and is practical, so it is judged as good "A". • "B"... When the tungsten polishing speed is less than 100 Å/min or the p-TEOS polishing speed is less than 200 Å/min, the polishing speed of either or both of them is low, so it is difficult to be practical and judged as bad " B".

3.3.2. Defect evaluation A 12-inch diameter wafer with a p-TEOS film as the object to be polished was polished for 2 minutes under the following conditions. ＜Grinding conditions＞ • Grinding device: made by AMAT, model "Reflexion LK" • Polishing pad: manufactured by Fujibo Holdings Co., Ltd., "Multi-hard polyurethane pad; H800-type1 (3-1S) 775" • Feed rate of chemical mechanical polishing composition: 300 mL/min •Pressure plate speed: 100 rpm • Head speed: 90 rpm • Head pressing pressure: 2.5 psi

For the wafer with p-TEOS film polished as described above, using a defect inspection device (made by KLA-Tencor, model "Surfscan SP1"), it counted over 90 nm The total number of defects of size. The evaluation criteria are as follows. The total number of defects and their evaluation results for each wafer are shown in Tables 1 to 3. (Evaluation criteria) • "A"... If the total number of defects per wafer is less than 500, it is judged as good "A". • "B"... If the total number of defects per wafer is 500 or more, it is judged as defective "B".

3.4. Evaluation results The composition of the chemical mechanical polishing composition of each Example and each comparative example and each evaluation result are shown in the following Table 1-Table 3 below.

[Table 1] Example 1 Example 2 Example 3 Example 4 Example 5 Example 6 Example 7 Example 8 Example 9 Example 10 Composition for chemical mechanical polishing Abrasive particles type Water dispersion A Water dispersion B Water dispersion C Water dispersion D Water dispersion E Water dispersion A Water dispersion A Water dispersion A Water dispersion A Water dispersion A Content (mass%) 2 2 2 2 2 2 2 2 2 2 Compounds containing hydroxyl and ether groups type Butyl Carbitol Butyl Carbitol Butyl Carbitol Butyl Carbitol Butyl Carbitol Methyl carbitol Ethyl carbitol Dipropylene glycol monomethyl ether Butyl Carbitol Butyl Carbitol Content (mass%) 0.003 0.003 0.003 0.003 0.003 0.003 0.003 0.003 0.003 0.003 additive type Citric acid Citric acid Citric acid Citric acid Citric acid Citric acid Citric acid Citric acid Citric acid Citric acid Content (mass%) 0.20 0.20 0.20 0.20 0.20 0.20 0.20 0.20 0.20 0.20 type Polyacrylic acid Histidine Content (mass%) 0.01 0.02 Oxidant Content (mass%) 2 2 2 2 2 2 2 2 2 2 pH 3.0 3.0 3.0 3.0 3.0 3.0 3.0 3.0 3.0 3.0 Evaluation item Grinding speed Tungsten film polishing speed (Å/min) 132 121 123 134 131 119 120 122 123 131 Silicon oxide film polishing speed (Å/min) 216 209 229 218 217 215 216 229 201 217 Evaluation results A A A A A A A A A A Defect evaluation Number 177 218 265 266 274 232 246 293 176 421 Evaluation results A A A A A A A A A A

[Table 2] Example 11 Example 12 Example 13 Example 14 Example 15 Example 16 Example 17 Example 18 Example 19 Example 20 Composition for chemical mechanical polishing Abrasive particles type Water dispersion A Water dispersion A Water dispersion A Water dispersion A Water dispersion A Water dispersion A Water dispersion A Water dispersion A Water dispersion A Water dispersion A Content (mass%) 2 2 2 2 3 4 2 2 2 2 Compounds containing hydroxyl and ether groups type Butyl Carbitol Butyl Carbitol Butyl Carbitol Butyl Carbitol Butyl Carbitol Butyl Carbitol Butyl Carbitol Butyl Carbitol Butyl Carbitol Butyl Carbitol Content (mass%) 0.003 0.003 0.003 0.04 0.003 0.003 0.003 0.003 0.003 0.003 additive type Citric acid Citric acid Citric acid Citric acid Citric acid Citric acid Citric acid Maleic acid Malonate Malic acid Content (mass%) 0.20 0.20 0.20 0.20 0.20 0.20 0.05 0.20 0.20 0.25 type Arginine Monoethanolamine TEAH Content (mass%) 0.02 0.02 0.02 Oxidant Content (mass%) 2 2 2 2 2 2 2 2 2 2 pH 3.0 3.0 3.0 3.0 3.0 3.0 3.0 3.0 3.0 3.0 Evaluation item Grinding speed Tungsten film polishing speed (Å/min) 134 133 133 102 150 162 112 105 126 146 Silicon oxide film polishing speed (Å/min) 230 216 233 242 330 345 203 240 222 234 Evaluation results A A A A A A A A A A Defect evaluation Number 218 326 342 478 433 421 248 212 198 365 Evaluation results A A A A A A A A A A

[table 3] Example 21 Example 22 Example 23 Example 24 Example 25 Example 26 Comparative example 1 Comparative example 2 Comparative example 3 Comparative example 4 Composition for chemical mechanical polishing Abrasive particles type Water dispersion A Water dispersion A Water dispersion A Water dispersion A Water dispersion A Water dispersion A PL-3 Water dispersion F Water dispersion G Water dispersion A Content (mass%) 2 2 2 2 2 2 2 2 2 2 Compounds containing hydroxyl and ether groups type Butyl Carbitol Butyl Carbitol Butyl Carbitol Butyl Carbitol Butyl Carbitol Butyl Carbitol Butyl Carbitol Butyl Carbitol Butyl Carbitol - Content (mass%) 0.003 0.003 0.003 0.003 0.001 0.02 0.003 0.003 0.003 0 additive type Maleic acid Maleic acid Maleic acid Maleic acid Citric acid Citric acid Citric acid Maleic acid Maleic acid Citric acid Content (mass%) 0.20 0.20 0.20 0.03 0.20 0.20 0.20 0.20 0.20 0.20 Oxidant Content (mass%) 1 3 2 2 2 2 2 2 2 2 pH 3.0 3.0 2.2 3.5 3.0 3.0 3.0 3.0 3.0 3.0 Evaluation item Grinding speed Tungsten film polishing speed (Å/min) 104 148 102 118 123 143 160 94 177 121 Silicon oxide film polishing speed (Å/min) 229 238 333 207 219 237 564 32 653 263 Evaluation results A A A A A A A B A A Defect evaluation Number 199 256 437 235 232 456 983 297 4895 570 Evaluation results A A A A A A B A B B

The following products or reagents were used for each component in Table 1 to Table 3 above. In addition, the content of the abrasive grains in the upper table 1-the upper table 3 shows the solid content concentration of each water dispersion. ＜Abrasive grains＞ • Water dispersion A～Water dispersion G: The water dispersion A～Water dispersion G of silica particles with carboxyl groups prepared as described above •PL-3: manufactured by Fuso Chemical Industry Co., Ltd., trade name "PL-3", colloidal silica, with an average particle size of 70 nm <Compounds containing hydroxyl and ether groups> • Butyl Carbitol: "Diethylene Glycol Monobutyl Ether (Diethylene Glycol Monobutyl Ether)" manufactured by Tokyo Chemical Industry Co., Ltd. •Methyl carbitol: manufactured by Tokyo Chemical Industry Co., Ltd., trade name "Diethylene Glycol Monomethyl Ether (stabilized with BHT)" •Ethyl carbitol: manufactured by Tokyo Chemical Industry Co., Ltd., trade name "Diethylene Glycol Monoethyl Ether (Diethylene Glycol Monoethyl Ether)" • Dipropylene Glycol Monomethyl Ether (Dipropylene Glycol Monomethyl Ether (mixture of isomers), manufactured by Tokyo Chemical Industry Co., Ltd., trade name "Dipropylene Glycol Monomethyl Ether (mixture of isomers)" ＜Organic acid＞ • Citric acid: manufactured by Tokyo Chemical Industry Co., Ltd., trade name "Citric Acid" • Maleic acid: manufactured by Tokyo Chemical Industry Co., Ltd., trade name "Maleic Acid" • Malonic acid: manufactured by Tokyo Chemical Industry Co., Ltd., trade name "Malonic Acid (Malonic Acid)" • Malic acid: manufactured by Tokyo Chemical Industry Co., Ltd., trade name "DL-malic acid (Apple Acid)" •Histidine: manufactured by Tokyo Chemical Industry Co., Ltd., trade name "L-histidine" • Arginine: manufactured by Tokyo Chemical Industry Co., Ltd., trade name "L-(+)-Arginine" ＜Water-soluble polymer＞ • Polyacrylic acid: manufactured by Dong-A Synthetic Co., Ltd., trade name "Jurymer AC-10L", MW=20,000～30,000 ＜pH adjuster＞ • Monoethanolamine: manufactured by Tokyo Chemical Industry Co., Ltd., trade name "2-Aminoethanol (2-Aminoethanol)" • TEAH: manufactured by Tokyo Chemical Industry Co., Ltd., trade name "Tetraethylammonium Hydroxide (10% in Water)", tetraethylammonium hydroxide

When the chemical mechanical polishing composition of Examples 1 to 26 is used, the tungsten film and the p-TEOS film can be polished at a practical polishing rate, and the occurrence of surface defects of the p-TEOS film after polishing can be reduced.

The present invention is not limited to the above-mentioned embodiment, and various modifications can be made. For example, the present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations with the same functions, methods, and results, or configurations with the same purposes and effects). In addition, the present invention includes configurations in which non-essential parts of the configurations described in the embodiments are replaced. In addition, the present invention includes a configuration that exerts the same function and effect as the configuration described in the embodiment or a configuration that can achieve the same purpose. In addition, the present invention includes a configuration obtained by adding a known technique to the configuration described in the embodiment.

10: Matrix 12: Silicon oxide film 14: Through hole 16: barrier metal film 18: Tungsten film 42: Slurry supply nozzle 44: Composition for chemical mechanical polishing (slurry) 46: Abrasive cloth 48: turntable 50: Semiconductor substrate 52: carrier head 54: Water supply nozzle 56: Dresser 100: processed body 200: Semiconductor device 300: Chemical mechanical polishing device

FIG. 1 is a cross-sectional view schematically showing a to-be-processed object used in the chemical mechanical polishing of this embodiment. Fig. 2 is a cross-sectional view schematically showing the object to be processed after the first polishing step. Fig. 3 is a cross-sectional view schematically showing the object to be processed after the second polishing step. Fig. 4 is a perspective view schematically showing a chemical mechanical polishing apparatus.

Claims (10)

A composition for chemical mechanical polishing, comprising: (A) silica particles containing a functional group represented by the following general formula (1); and (B) a compound containing hydroxyl and ether groups, -COO ^- M ⁺ ‧‧ ‧‧‧(1)M ⁺ represents a monovalent cation. The chemical mechanical polishing composition according to claim 1, wherein when the total mass of the chemical mechanical polishing composition is 100% by mass, the content of the component (A) is 0.1% by mass or more and 10% by mass or less The content of the component (B) is 0.0001% by mass or more and 0.05% by mass or less. The composition for chemical mechanical polishing according to claim 1 or claim 2, wherein the component (A) is a dioxide having a functional group represented by the general formula (1) fixed on its surface via a covalent bond Silicon particles. The chemical mechanical polishing composition according to claim 1 or 2, wherein the component (B) is a glycol ether having a normal boiling point of 80°C or higher. The chemical mechanical polishing composition according to claim 1 or claim 2, wherein the component (B) is selected from the group consisting of ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol Monobutyl ether, ethylene glycol monoallyl ether, propylene glycol monomethyl ether, propylene Glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether, 3-methoxy-3-methyl-1-butanol, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol Monopropyl ether, diethylene glycol monobutyl ether, diethylene glycol monobenzyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol monopropyl ether, dipropylene glycol monobutyl ether, triethylene glycol monomethyl ether One or more of ether, triethylene glycol monoethyl ether, triethylene glycol monopropyl ether, triethylene glycol monobutyl ether, and tripropylene glycol monobutyl ether. The chemical mechanical polishing composition according to claim 1 or 2, which further contains an organic acid. The chemical mechanical polishing composition according to claim 1 or claim 2, which further contains an oxidizing agent. The chemical mechanical polishing composition according to claim 1 or 2, wherein the pH is 2 or more and 5 or less. A chemical mechanical polishing method includes the step of polishing a semiconductor substrate using the chemical mechanical polishing composition according to any one of claims 1 to 8. The chemical mechanical polishing method according to claim 9, wherein the semiconductor substrate includes a portion containing at least one selected from the group consisting of silicon oxide and tungsten.

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