TWI746151B - Tunable frequency ionizer controller - Google Patents

Abstract

A tunable frequency ionizer controller includes a transformer, an Royer- oscillator, and a control module. The transformer includes a first winding and a fourth winding on the primary side, and a second winding and a third winding on the secondary side. The equivalent inductance of the first winding is equal to a magnetizing inductance. The Royer-oscillator is electrically connected to a DC input power supply, the first winding, and the fourth winding, and has a resonance frequency. The control module is electrically connected to the third winding of the transformer, and determines the magnitude of a DC current flowing through the third winding based on a set voltage value, so as to change the magnitude of the magnetizing inductance, thereby changing the magnitude of the resonance frequency , making the second winding output a sine wave output signal capable of generating positive and negative ions to an electrode probe.

Description

Adjustable frequency ion machine control device

The present invention relates to an ion machine control device, in particular to an adjustable frequency ion machine control device.

Ionizers (also known as static eliminators, ionizers) are widely used in precision electronic products, pharmaceutical manufacturing, plastics, optical glass, electronics, liquid crystal panels, optoelectronics, semiconductors, and other industries to prevent dust, eliminate static electricity, and prevent electronic parts from interacting with The circuit board is damaged, and the quality can be maintained during the processing before the plastic product coating. At present, various types of ionizer devices and technologies are mainly corona discharge type ionizers that are most widely used. According to the technology and method of applying voltage to the electrode needles, the ionizer can be divided into various types, including direct current (DC) method, alternating current (AC) method, pulsed direct current method, and alternating current square wave method, a total of four methods.

The ion machine system adopting the direct current (DC) method is a technology that continuously applies a positive or negative direct current voltage to an electrode needle. Although this method can eliminate the static electricity in the production environment of the product, it can only eliminate the static electricity of a single polarity, and the effect of eliminating static electricity is quite limited, and because it can only eliminate the static electricity of a single polarity, the ion balance is poor.

The ion machine system adopting the alternating current (AC) method is mainly a technology of continuously applying an alternating sine wave voltage to an electrode needle. Because it can alternately generate extremely high-voltage sine waveforms, it can produce positive and negative ions, and has a fairly good ion balance when eliminating static electricity in the production environment. However, the ions produced by this type of ion machine will recombine quickly, so it is not suitable for performing long-distance static elimination.

The ionizer system using pulsed direct current is a technology that continuously loads DC voltage alternately to the positive and negative electrodes (ie, two-electrode probe), so that the positive and negative electrodes on the ionizer can generate evenly distributed ions. This type of ion machine produces a large number of ions, so the speed of static elimination is faster, but when applied to a rod ion machine, the longitudinal ion balance is poor, and because a set of output has two electrode needles, if the electrode needles Dirty or wear will obviously affect the speed of static elimination and ion balance.

The structure of the ion machine system adopting the AC square wave method and the output waveform generated are shown in Figure 1. This kind of ion machine mainly continuously alternately applies positive and negative DC voltage to the electrode needles, resulting in a large number of ions and eliminating static electricity. The speed is faster, and only a single electrode is used for a single output group, which is less likely to cause the problem of electrode needle contamination or wear.

However, the architecture of the traditional ion machine system using AC square wave mode is composed of two voltage sources and many voltage doubler circuits. The volume and weight are extremely large, and the frequency of the output high voltage waveform cannot be adjusted. Static elimination function monotonous. Furthermore, the traditional ion machine can only generate a single waveform, that is, only pure DC, only AC sine wave, or only AC square wave, and has no waveform selectivity, so the applicable occasions are extremely limited. Traditional ionizers can generate positive and negative high voltage waveforms due to the two sets of voltage sources passing through their own multi-stage voltage doubler circuits, which can easily cause the unbalance of the positive and negative high voltages of the waveforms, resulting in uneven ionization in the production environment and poor static elimination. . Therefore, the static elimination function, scope, and use occasions of the traditional ion machine are all limited, and become a problem to be improved.

Therefore, the purpose of the present invention is to provide an adjustable frequency ion machine control device with adjustable output frequency.

Therefore, one aspect of the present invention provides a control device for a tunable frequency ion machine, which is suitable for a DC input power supply and an electrode probe, and includes a transformer, a push-pull parallel resonant circuit, and a control module.

The transformer includes a first winding and a fourth winding on the primary side, and a second winding and a third winding on the secondary side. The equivalent inductance of the first winding is equal to a magnetizing inductance. The two windings are electrically connected to the electrode probe to output a sine wave output signal capable of generating positive and negative ions.

The push-pull parallel resonant circuit is electrically connected to the DC input power supply and the first winding and the fourth winding of the voltage transformer, and includes a first inductor, a first resistor, a first power switch, and a second The power switch and a resonant capacitor have a resonant frequency f _o , the first power switch and the second power switch are controlled by the fourth winding to be conductive or non-conductive, L _p is the magnetizing inductance, C _o Is the capacitance value of the resonant capacitor, and the frequency of the sine wave output signal is equal to the resonant frequency.

The control module is electrically connected to the third winding of the transformer, and determines the magnitude of the DC current flowing through the third winding according to a set voltage value, so as to change the magnitude of the magnetizing inductance, thereby changing the magnitude of the resonance frequency .

In some embodiments, the control module includes a buck converter electrically connected to the third winding of the transformer, and a current sensor electrically connected to the buck converter and the third winding. And a control unit electrically connected to the buck converter and the current sensor, the current sensor detects the magnitude of the direct current, and the control unit according to the direct current detected by the current sensor The magnitude of the current controls the buck converter to convert an input reference voltage to stably output the DC current, and the magnitude of the DC current is determined according to the set voltage value.

In some embodiments, the current sensor includes a first terminal, a second terminal, and an output terminal, and the output terminal outputs an indication of the direct current flowing through the first terminal and the second terminal The size of the signal. The buck converter includes a third power switch, a fourth power switch, and a second inductor.

The third power switch includes a first terminal receiving the input reference voltage, a second terminal, and a control terminal. The fourth power switch includes a first terminal, a second terminal, and a control terminal electrically connected to the second terminal of the third power switch. The second inductor includes a first end electrically connected to the second end of the third power switch, and a second end electrically connected to the first end of the current sensor.

The third winding of the transformer is electrically connected between the second end of the current sensor and the second end of the fourth power switch. The control unit is electrically connected to the output end of the current sensor to obtain the magnitude of the direct current, and is also electrically connected to the third power switch and the fourth power switch to control the first power switch according to the magnitude of the direct current The three-power switch and the fourth power switch are turned on or off to stably output the direct current.

In other embodiments, the control device of the tunable frequency ion machine further includes a voltage doubling module and a first switch. The transformer also includes a fifth winding and a sixth winding on the secondary side.

The voltage multiplier module includes a first voltage multiplier circuit (Voltage multiplier) and a second voltage multiplier circuit. The first voltage multiplier circuit is electrically connected to the fifth winding to output a voltage output from the fifth winding. The part of the sine wave signal greater than zero is amplified into a first square wave signal greater than zero, and the second voltage doubling circuit is electrically connected to the sixth winding so that the second sine wave signal output by the sixth winding is The part smaller than zero is amplified into a second square wave signal smaller than zero. The voltage doubler module also combines the first square wave signal and the second square wave signal into a square wave output signal and outputs it to the first switch switch.

The first switch includes a first input terminal electrically connected to the second winding to receive the sine wave output signal, a second input terminal electrically connected to the voltage doubler module to receive the square wave output signal, and a selection terminal , And an output terminal of the electrode probe is electrically connected, and according to the signal of the selection terminal, it is determined to output the sine wave output signal or the square wave output signal to the output terminal. The control module is also electrically connected to the selection terminal of the first switch, and controls the selection terminal according to a selection setting value.

In some embodiments, the voltage doubler module further includes a second switch, and the second switch includes a first input electrically connected to the first voltage doubler circuit to receive the first square wave signal Terminal, a second input terminal electrically connected to the second voltage doubler circuit to receive the second square wave signal, a selection terminal, and the second input terminal electrically connected to the first switch to output the square wave output An output terminal of the signal, and according to the signal of the selection terminal, it is determined to output the first square wave signal or the second square wave signal to the output terminal.

The control module is also electrically connected to the selection terminal of the second switch and the output terminal of the first switch. When the control module controls the selection terminal of the first switch to output the square wave When a signal is output to the output terminal of the first switch, the control module detects the square wave output signal at the output terminal, and according to the square wave output signal, the voltage and time length are greater than zero and less than zero, respectively, The selection terminal of the second switch is controlled to adjust the time size of the square wave output signal at a voltage greater than zero and less than zero, respectively, so that the positive and negative ions generated by the electrode probe maintain a balance.

In other embodiments, the first voltage doubler circuit includes a first capacitor, a first diode, a second capacitor, and a second diode. The first capacitor includes a first end electrically connected to the fifth winding, and a second end. The first diode includes an anode terminal and a cathode terminal electrically connected to the second terminal of the first capacitor. The second capacitor includes a first end electrically connected to the cathode end of the first diode, and a second end. The second diode includes an anode terminal electrically connected to the second terminal of the second capacitor, and a cathode terminal electrically connected to the second terminal of the first capacitor and outputting the first square wave signal.

The second voltage doubler circuit includes a third capacitor, a third diode, a fourth capacitor, and a fourth diode. The third capacitor includes a first end and a second end electrically connected to the sixth winding. The third diode includes an anode terminal and a cathode terminal electrically connected to the second terminal of the third capacitor. The fourth capacitor includes a first end electrically connected to the cathode end of the third diode, and a second end. The fourth diode includes an anode terminal electrically connected to the second terminal of the fourth capacitor, and a cathode terminal electrically connected to the second terminal of the third capacitor and outputting the second square wave signal.

In other embodiments, the first winding of the transformer includes a first end, a second end, and a center tap end, and the fourth winding includes a first end and a second end. The first resistor of the push-pull parallel resonant circuit includes a first end and a second end electrically connected to the DC input power source.

The first inductor includes a first end electrically connected to the first end of the first resistor, and a second end electrically connected to the center tap end of the first winding. The first power switch includes a first end that is electrically connected to the first end of the first winding, a second end that is grounded, and the second end that is electrically connected to the first resistor and the first end of the fourth winding. One control end of the two ends. The second power switch includes a first terminal electrically connected to the second terminal of the first winding, a second terminal grounded, and a control terminal electrically connected to the first terminal of the fourth winding. The resonant capacitor includes a first end electrically connected to the first end of the first winding, and a second end electrically connected to the second end of the first winding.

Therefore, another aspect of the present invention provides a control device for a tunable frequency ion machine, which is suitable for a DC input power supply and an electrode probe, and includes a transformer, a push-pull parallel resonant circuit, a voltage doubling module, and One control module.

The transformer includes a first winding and a fourth winding on the primary side, and a third winding, a fifth winding, and a sixth winding on the secondary side. The equivalent inductance of the first winding is equal to one Excitation inductance.

The push-pull parallel resonant circuit is electrically connected to the DC input power supply and the first winding and the fourth winding of the voltage transformer, and includes a first inductor, a first resistor, a first power switch, and a second power Switch, and a resonant capacitor, and have a resonant frequency f _o , the first power switch and the second power switch are controlled by the fourth winding to be conductive or non-conductive, L _p is the magnetizing inductance, C _o is The capacitance value of the resonant capacitor and the frequency of the sine wave output signal are equal to the resonant frequency.

The voltage multiplier module is electrically connected to the transformer and the electrode probe, and includes a first voltage multiplier circuit (Voltage multiplier) and a second voltage multiplier circuit, the first voltage multiplier circuit is electrically connected to the fifth winding , To amplify the part of a sine wave signal output by the fifth winding that is greater than zero into a first square wave signal greater than zero, and the second voltage doubler circuit is electrically connected to the sixth winding to The part of the other sine wave signal output by the six windings that is smaller than zero is amplified into a second square wave signal smaller than zero. The voltage doubler module also combines the first square wave signal and the second square wave signal into one The wave output signal is output to the electrode probe, and then the square wave output signal capable of generating positive and negative ions is output.

The control module is electrically connected to the third winding of the transformer, and determines the magnitude of the DC current flowing through the third winding according to a set voltage value, so as to change the magnitude of the magnetizing inductance, thereby changing the magnitude of the resonance frequency .

In some embodiments, the voltage doubler module further includes a second switch, and the second switch includes a first input electrically connected to the first voltage doubler circuit to receive the first square wave signal Terminal, a second input terminal electrically connected to the second voltage doubler circuit to receive the second square wave signal, a selection terminal, and an output terminal electrically connected to the electrode probe to output the square wave output signal, and According to the signal of the selection terminal, it is determined to output the first square wave signal or the second square wave signal to the output terminal.

The control module is also electrically connected to the selection terminal of the second switch and the output terminal of the first switch. When the control module detects the square wave output signal of the output terminal, and outputs it according to the square wave When the signal is at a voltage greater than zero and less than zero, and the length of time, the selection terminal of the second switch is controlled to adjust the time of the square wave output signal at a voltage greater than zero and less than zero, so that the electrode probes The positive and negative ions produced by the needle maintain a balance.

The effect of the present invention is to amplify and convert the DC input voltage from the DC input power source into the sine wave output signal to the electrode probe by the push-pull parallel resonant circuit and the transformer to generate positive and negative ions. And by controlling the magnitude of the direct current flowing through the third winding by the control module to change the magnitude of the magnetizing inductance, and then the magnitude of the resonance frequency, a frequency-adjustable ion machine control device can be realized .

Before the present invention is described in detail, it should be noted that in the following description, similar elements are denoted by the same numbers.

Referring to FIG. 2, an embodiment of the control device of the adjustable frequency ion machine of the present invention is suitable for a DC input power supply 91 and an electrode probe 92, and includes a transformer 1, a push-pull parallel resonant circuit 2, and a double voltage mode Group 3, a control module 4, and a first switch 5.

The transformer 1 includes a first winding N1 and a fourth winding N4 on the primary side, and a second winding N2, a third winding N3, a fifth winding N5, and a sixth winding N6 on the secondary side. . The equivalent inductance value of the first winding N1 is equal to a magnetizing inductance L _p . The first winding N1 includes a first end 111, a second end 112, and a center tap end 113. The third winding N3 includes a first end 131 and a second end 132. The fourth winding N4 includes a first end 141 and a second end 142. The fifth winding N5 includes a first end 151 and a second end 152. The sixth winding N6 includes a first end 161 and a second end 162.

The push-pull parallel resonant circuit (also called self-excited Royer resonant circuit) 2 is electrically connected to the DC input power source 91 to receive a DC input voltage, and is electrically connected to the first winding N1 and the fourth winding of the voltage transformer. The winding N4 includes a first inductor 21, a first resistor 22, an input capacitor 26, a first power switch 23, a second power switch 24, and a resonant capacitor 25, and has a resonant frequency f _o . The DC input voltage is, for example, 24 volts. The formula of the resonant frequency f _o is as follows: where C _o is the capacitance value of the resonant capacitor 25.

The first resistor 22 includes a first terminal electrically connected to the DC input power source 91 to receive the DC input voltage, and a second terminal. The first inductor 21 includes a first end electrically connected to the first end of the first resistor 22 and a second end electrically connected to the center tap end 113 of the first winding N1. The first power switch 23 includes a first end that is electrically connected to the first end 111 of the first winding N1, a second end that is grounded, and the second end that is electrically connected to the first resistor 22 and the fourth end. A control end of the second end 142 of the winding N4. The second power switch 24 includes a first end that is electrically connected to the second end 112 of the first winding N1, a second end that is grounded, and a control that is electrically connected to the first end 141 of the fourth winding N4. end. The resonant capacitor 25 includes a first end electrically connected to the first end 111 of the first winding N1 and a second end electrically connected to the second end 112 of the first winding N1. The input capacitor 26 includes a first terminal electrically connected to the DC input power supply 91 to receive the DC input voltage, and a second terminal grounded.

Since the fourth winding N4 of the transformer 1 and the first winding N1 are wound on the same iron core, the fourth winding N4 will couple the sine wave generated by the resonant tank to drive the first power switch 23 and the The second power switch 24, and the first power switch 23 and the second power switch 24 are alternately switched at a 50% duty cycle. This driving method is the so-called self-excited architecture, that is, the driving control signals of the first power switch 23 and the second power switch 24 are provided by the fourth winding N4 of the transformer 1 of the circuit itself. With additional drive and control circuits, it has the advantage of simplifying the circuit. And another advantage of the push-pull parallel resonant circuit 2 is the push-pull structure. The first power switch 23 and the second power switch 24 share the same ground, so there is no need to isolate the first power switch 23 and the second power switch. The drive control signal of the switch 24.

Referring to FIGS. 2 and 3, the voltage doubler module 3 includes a first voltage multiplier circuit (Voltage multiplier) 31, a second voltage multiplier circuit 32, and a second switch 33. The first voltage doubling circuit 31 is electrically connected to the fifth winding N5, so as to amplify a part of a sinusoidal signal output from the fifth winding N5 that is greater than zero into a first square wave signal greater than zero. The second voltage doubling circuit 32 is electrically connected to the sixth winding N6, so as to amplify the less than zero part of the other sine wave signal output by the sixth winding N6 into a second square wave signal less than zero. The second switch 33 includes a first input terminal electrically connected to the first voltage doubler circuit 31 to receive the first square wave signal, and electrically connected to the second voltage doubler circuit 32 to receive the second square wave signal A second input terminal of a second input terminal, a selection terminal receiving a second selection signal S2, and an output terminal electrically connected to the first switch 5 to output a square wave output signal VO2, and determine according to the second selection signal S2 The first square wave signal or the second square wave signal is output to the output terminal.

For example, the first voltage doubler circuit 31 includes a first capacitor 311, a first diode 312, a second capacitor 313, and a second diode 314. The first capacitor 311 includes a first end electrically connected to the first end 151 of the fifth winding N5, and a second end. The second end 152 of the fifth winding N5 is grounded. The first diode 312 includes an anode terminal electrically connected to the second terminal of the first capacitor 311 and a cathode terminal. The second capacitor 313 includes a first terminal electrically connected to the cathode terminal of the first diode 312 and a second terminal. The second diode 314 includes an anode terminal electrically connected to the second terminal of the second capacitor 313, and a cathode terminal electrically connected to the second terminal of the first capacitor 311 and outputting the first square wave signal.

The second voltage doubler circuit 32 is substantially the same as the first voltage doubler circuit 31. The second voltage doubler circuit 32 includes a third capacitor 321, a first triode 322, a fourth capacitor 323, and a fourth diode 324. The third capacitor 321 includes a first terminal electrically connected to the second terminal 162 of the sixth winding N6, and a second terminal. The first end 161 of the sixth winding N6 is grounded. The third diode 322 includes an anode terminal electrically connected to the second terminal of the third capacitor 321 and a cathode terminal. The fourth capacitor 323 includes a first terminal electrically connected to the cathode terminal 322 of the third diode, and a second terminal. The fourth diode 324 includes an anode terminal electrically connected to the second terminal of the fourth capacitor 323, and a cathode terminal electrically connected to the second terminal of the third capacitor 321 and outputting the second square wave signal.

2 and 4, the control module 4 is electrically connected to the third winding N3 of the transformer 1, and determines the magnitude of the DC current flowing through the third winding N3 according to a set voltage value to change the magnetizing inductance The size of the quantity L _p , in turn, changes the size of the resonant frequency. In more detail, the control module 4 includes a Buck converter 41 electrically connected to the third winding N3 of the transformer 1, and a Buck converter 41 electrically connected to the third winding N3. The current sensor 42 and a control unit 43 electrically connected to the buck converter 41 and the current sensor 42. The current sensor 42 detects the magnitude of the direct current. The control unit 43 controls the buck converter 41 to convert an input reference voltage V1 to stably output the DC current according to the magnitude of the DC current detected by the current sensor 42, and determines the DC current according to the set voltage value. The magnitude of the direct current.

Since the magnetizing inductance L _{p of} the transformer 1 is proportional to the magnetic permeability μ, the square of the winding turns N, and the equivalent magnetic circuit cross-sectional area A _e , it is inversely proportional to the equivalent magnetic circuit length l _e. The formula is as follows. Furthermore, since the magnetic permeability μ decreases as the magnetic field intensity increases, or increases as the magnetization intensity decreases, the control module 4 determines the magnitude of the DC current according to the set voltage value. The intensity of the magnetic field can be changed, thereby changing the magnetizing inductance L _p .

In this embodiment, the current sensor 42 includes a first terminal, a second terminal electrically connected to the first terminal 131 of the third winding N3, and an output terminal, the output terminal outputs an indication of flow through the A signal of the magnitude of the direct current between the first terminal and the second terminal. The buck converter 41 includes a third power switch 411, a fourth power switch 412, and a second inductor 413. The third power switch 411 includes a first terminal, a second terminal, and a control terminal receiving a first switch signal S3. The fourth power switch 412 includes a first terminal electrically connected to the second terminal of the third power switch 411, a second terminal electrically connected to the second terminal 132 of the third winding N3, and receiving a second switch A control terminal of signal S4. The second inductor 413 includes a first terminal electrically connected to the second terminal of the third power switch 411 and a second terminal electrically connected to the first terminal of the current sensor 42. The first terminal of the third power switch 411 and the second terminal of the fourth power switch 412 receive the input reference voltage V1.

Since the ion machine corresponding to the adjustable frequency ion machine control device of the present invention is and the high voltage causes the production environment to ionize and eliminate static electricity, the ion machine has no-load output, so that the power level required by the step-down converter 41 does not match Not high, the highest is only about several tens of watts, and its design is extremely simple, so I won't repeat it here. In addition, it should be noted that in this embodiment, the buck converter 41 is a synchronous buck converter, and in other embodiments, it may also be an asynchronous buck converter.

The control unit 43 includes a sampling circuit 431, a microcontroller (MCU) 432, and a driving circuit 433. The sampling circuit 431 is electrically connected to the output terminal of the current sensor 42 to scale down the signal output from the output terminal in an equal proportion, so as to meet the signal size range that the microcontroller 432 can receive. The microcontroller 432 is electrically connected to the sampling circuit 431 to obtain the magnitude of the direct current, and is also electrically connected to the driving circuit 433 to generate the first switch signal S3 and the second switch signal S4, and according to the magnitude of the direct current , Respectively controlling the third power switch 411 and the fourth power switch 412 to be conductive or non-conductive, so as to stably output the direct current. Because the output capability of the microcontroller 432 is insufficient (for example, the current and/or voltage is too small) to directly control the third power switch 411 and the fourth power switch 412 to switch (that is, on and off), so by The setting of the driving circuit 433 enables the third power switch 411 and the fourth power switch 412 to operate normally.

Referring to FIGS. 2, 3, and 4, the first switch 5 includes a first input terminal electrically connected to the second winding N2 to receive a sine wave output signal VO1 capable of generating positive and negative ions, and electrically connected to the voltage doubler The module 3 has a second input terminal for receiving the square wave output signal VO2, a selection terminal for receiving a first selection signal S1, and an output terminal electrically connected to the electrode probe 92, and according to the first selection signal S1: It is determined to output the sine wave output signal VO1 or the square wave output signal VO2 to the output terminal. The frequencies of the sine wave output signal VO1 and the square wave output signal VO2 are both equal to the resonance frequency. In addition, the first switch 5 and the second switch 33 are composed of, for example, at least one relay or power switch transistor, so as to be able to switch the signal to be output from which of the two input signals.

The control unit 43 of the control module 4 is also electrically connected to the selection terminal of the first switch 5, and determines the first selection signal S1 to control the selection terminal according to a selection setting value. That is, the sine wave output signal VO1 or the square wave output signal VO2 can be output to the electrode probe 92 to generate positive and negative ions by the selection setting value.

In addition, the microcontroller 432 of the control unit 43 of the control module 4 is also electrically connected to the selection terminal of the second switch 33, and the sampling circuit 431 is also electrically connected to the output terminal of the first switch 5. When the microcontroller 432 controls the selection terminal of the first switch 5 to output the square wave output signal VO2 to the output terminal of the first switch 5, the microcontroller 432 passes through the sampling circuit 431 Detect the square wave output signal VO2 at the output terminal, and control the selection terminal of the second switch 33 to adjust the square wave output signal VO2 at voltages greater than zero and less than zero and the length of time. The wave output signal VO2 is at a voltage greater than zero and a voltage less than zero, respectively, so that the positive and negative ions generated by the electrode probe 92 maintain a balance. The sampling circuit 431 also scales down the square wave output signal VO2 in equal proportions, so that it can meet the signal size range that the microcontroller 432 can receive.

For example, when the amplitude of the positive voltage part of the square wave output signal VO2 is high, the control unit 43 regulates the selection terminal of the second switch 33 by the duty ratio of the second selection signal S2, In order to shorten the output time of the positive voltage part, or extend the output time of the negative voltage part, and vice versa, the effect of positive and negative ion balance can be achieved.

In addition, it should be noted that: in this embodiment, the input reference voltage V1 is equal to the square wave output signal VO2 (that is, plus or minus 7000 volts). The voltage input to the step-down converter 41 is much lower than 7000 volts. In other embodiments, other DC voltage values may also be used, so that the buck converter 41 generates a DC output voltage corresponding to the DC current. Furthermore, in other embodiments, when the tunable frequency ion machine control device only needs to output the sine wave output signal VO1 or the square wave output signal VO2, the corresponding voltage doubler module 3 or the second winding N2 is also Can be omitted. In addition, the second switch 33 in this embodiment can also be omitted, for example, when the first square wave signal and the second square wave signal are output in parallel to obtain the square wave output signal VO2. The set voltage value and the selected set value are, for example, set and changed by the user through other input units (not shown) or a communication interface.

In summary, with the push-pull parallel resonant circuit 2 and the transformer 1, the DC input voltage (such as 7V) from the DC input power supply 91 is amplified and converted into the sine wave output signal (such as plus or minus 7000V). ) VO1 to the electrode probe 92 to generate positive and negative ions, or the voltage doubler module 3 converts it into the square wave output signal (eg, plus or minus 7000V) VO2 to the electrode probe 92. And by the control module 4 controls the magnitude of the DC current flowing through the tertiary winding N3 of, to change the size of the magnetizing inductance L _p, thereby changing the size of the resonance frequency, and thus possible to realize an adjustable frequency and The ion machine control device with square wave or sine wave output and the corresponding ion machine can be selected. In addition, the control module 4 can also adjust the on-time of the square wave output signal VO2 to achieve the effect of ionization balance, so it can indeed achieve the purpose of the invention.

However, the above are only examples of the present invention. When the scope of implementation of the present invention cannot be limited by this, all simple equivalent changes and modifications made in accordance with the scope of the patent application of the present invention and the content of the patent specification still belong to Within the scope covered by the patent of the present invention.

1: Transformer 2: Push-pull parallel resonant circuit 21: First inductor 22: First resistor 23: First power switch 24: Second power switch 25: Resonant capacitor 26: Input capacitor 3: Voltage doubler module 31: No. Double voltage circuit 311: first capacitor 312: first diode 313: second capacitor 314: second diode 32: second voltage doubler circuit 321: third capacitor 322: third diode 323 : Fourth capacitor 324: Fourth diode 33: Second switch 4: Control module 41: Buck converter 411: Third power switch 412: Fourth power switch 413: Second inductor 42: Current sensing Device 43: control unit 431: sampling circuit 432: microcontroller 433: drive circuit 5: first switch 91: DC input power supply 92: electrode probe N1: first winding 111: first end 112: second end 113 : Center tapped end N2: Second winding N3: Third winding 131: First end 132: Second end N4: Fourth winding 141: First end 142: Second end N5: Fifth winding 151: First end 152 : Second end N6: sixth winding 161: first end 162: second end L _p : magnetizing inductance V1: input reference voltage VO1: sine wave output signal VO2: square wave output signal S1: first selection signal S2: The second selection signal S3: the first switch signal S4: the second switch signal

Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, in which: Figure 1 is a schematic diagram illustrating the architecture and output waveforms of a conventional AC square wave ion machine system; Fig. 2 is a circuit diagram illustrating an embodiment of the control device of the adjustable frequency ion machine of the present invention; Figure 3 is a circuit diagram illustrating the double voltage module of this embodiment; and Fig. 4 is a circuit diagram illustrating a control module of this embodiment.

1: Transformer

2: Push-pull parallel resonant circuit

21: The first inductance

22: The first resistance

23: The first power switch

24: The second power switch

25: Resonant capacitor

26: Input capacitance

3: Double pressure module

4: Control module

5: The first switch

91: DC input power

92: Electrode probe

N1: first winding

111: first end

112: second end

113: Center tapped end

N2: second winding

N3: third winding

131: first end

132: second end

N4: Fourth winding

141: first end

142: second end

N5: fifth winding

151: first end

152: second end

N6: sixth winding

161: first end

162: second end

L _p : magnetizing inductance

Claims (9)

A control device for a tunable frequency ion machine, suitable for a DC input power supply and an electrode probe, and includes: a transformer, including a first winding and a fourth winding on the primary side, and a second winding on the secondary side A winding and a third winding, the equivalent inductance of the first winding is equal to a magnetizing inductance, and the second winding is electrically connected to the electrode probe to output a sine wave output signal capable of generating positive and negative ions; a push-pull parallel connection The resonant circuit is electrically connected to the DC input power supply and the first winding and the fourth winding of the voltage transformer, and includes a first inductor, a first resistor, a first power switch, a second power switch, and a The resonant capacitor has a resonant frequency f _o , the first power switch and the second power switch are controlled by the fourth winding to be conductive or non-conductive, L _p is the magnetizing inductance, and C _o is the resonant capacitor The capacitance value, the frequency of the sine wave output signal is equal to the resonant frequency,

; And a control module, electrically connected to the third winding of the transformer, and according to a set voltage value to determine the magnitude of the DC current flowing through the third winding to change the size of the magnetizing inductance, thereby changing the resonance The size of the frequency. The control device of the adjustable frequency ion machine according to claim 1, wherein the control module includes a buck converter electrically connected to the third winding of the transformer, and electrically connected to the buck converter and the A current sensor of the third winding, and an electrical connection between the buck converter and the current sensor A control unit, the current sensor detects the magnitude of the DC current, and the control unit controls the step-down converter to convert an input reference voltage to output according to the magnitude of the DC current detected by the current sensor The direct current, and the magnitude of the direct current is determined according to the set voltage value. The control device of the adjustable frequency ion machine according to claim 2, wherein the current sensor includes a first terminal, a second terminal, and an output terminal, and the output terminal outputs an indication flowing through the first terminal and the A signal of the magnitude of the direct current at the second end, the buck converter includes: a third power switch, including a first end, a second end, and a control end for receiving the input reference voltage, a fourth The power switch includes a first end, a second end, and a control end that are electrically connected to the second end of the third power switch, and a second inductor, including a second end that is electrically connected to the second end of the third power switch A first end, and a second end electrically connected to the first end of the current sensor, wherein the third winding of the transformer is electrically connected to the second end and the fourth end of the current sensor Between the second end of the power switch, the control unit is electrically connected to the output end of the current sensor to obtain the magnitude of the direct current, and is also electrically connected to the third power switch and the fourth power switch to According to the magnitude of the direct current, the third power switch and the fourth power switch are controlled to be conductive or non-conductive to output the direct current. The control device of the adjustable frequency ion machine according to claim 1, further comprising a voltage doubling module and a first switch, wherein: The transformer also includes a fifth winding and a sixth winding on the secondary side. The voltage doubler module includes a first voltage multiplier circuit (Voltage multiplier) and a second voltage multiplier circuit. The circuit is electrically connected to the fifth winding to amplify the part of a sine wave signal output by the fifth winding that is greater than zero into a first square wave signal greater than zero, and the second voltage doubling circuit is electrically connected to the The sixth winding is used to amplify the less than zero part of the other sine wave signal output by the sixth winding into a second square wave signal less than zero. The voltage doubler module also combines the first square wave signal and The second square wave signal is a square wave output signal and is output to the first switch. The first switch includes a first input terminal electrically connected to the second winding to receive the sine wave output signal, and electrically connected to the The voltage doubling module receives a second input terminal of the square wave output signal, a selection terminal, and an output terminal electrically connected to the electrode probe, and determines the sine wave output signal or the output terminal according to the signal of the selection terminal. The square wave output signal is output to the output terminal, and the control module is also electrically connected to the selection terminal of the first switch, and controls the selection terminal according to a selection setting value. The control device of the adjustable frequency ion machine according to claim 4, wherein the voltage doubler module further includes a second switch, and the second switch includes electrically connected to the first voltage doubler circuit to receive the first party. A first input terminal of the wave signal, a second input terminal electrically connected to the second voltage multiplier circuit to receive the second square wave signal, a selection terminal, and the second input electrically connected to the first switch Terminal is an output terminal for outputting the square wave output signal, and according to the signal of the selection terminal, it is determined whether the first square wave signal or the second square wave The signal is output to the output terminal, and the control module is also electrically connected to the selection terminal of the second switch and the output terminal of the first switch. When the control module controls the selection terminal of the first switch , To output the square wave output signal to the output terminal of the first switch, the control module detects the square wave output signal at the output terminal, and the square wave output signal is greater than zero and less than zero according to the square wave output signal. The voltage and time length of the second switch is controlled to adjust the time when the square wave output signal is at a voltage greater than zero and less than zero, so that the positive and negative ions generated by the electrode probe remain equal . The control device for a tunable frequency ion machine according to claim 4, wherein the first voltage doubling circuit includes a first capacitor, including a first end electrically connected to the fifth winding, and a second end, and a A diode includes an anode terminal electrically connected to the second terminal of the first capacitor, and a cathode terminal, a second capacitor includes a first terminal electrically connected to the cathode terminal of the first diode, and a The second terminal, a second diode, includes an anode terminal electrically connected to the second terminal of the second capacitor, and a cathode terminal electrically connected to the second terminal of the first capacitor and outputting the first square wave signal , The second voltage doubling circuit includes a third capacitor, including a first end electrically connected to the sixth winding, and a second end, A third diode including an anode terminal electrically connected to the second terminal of the third capacitor, and a cathode terminal, a fourth capacitor including a first terminal electrically connected to the cathode terminal of the third diode, And a second terminal, a fourth diode, including an anode terminal electrically connected to the second terminal of the fourth capacitor, and an anode terminal electrically connected to the second terminal of the third capacitor and outputting the second square wave signal The cathode end. The control device of the adjustable frequency ion machine according to claim 1, wherein the first winding of the transformer includes a first end, a second end, and a center tap end, and the fourth winding includes a first end and A second terminal. The first resistor of the push-pull parallel resonant circuit includes a first terminal electrically connected to the DC input power source and a second terminal. The first inductor includes the first resistor electrically connected to the first resistor. A first end of one end, and a second end electrically connected to the center tap end of the first winding, the first power switch includes a first end electrically connected to the first end of the first winding, and a grounded A second terminal, and a control terminal electrically connected to the second terminal of the first resistor and the second terminal of the fourth winding, and the second power switch includes a first terminal electrically connected to the second terminal of the first winding One end, a second end that is grounded, and a control end that is electrically connected to the first end of the fourth winding, the resonant capacitor includes a first end that is electrically connected to the first end of the first winding, and A second end connected to the second end of the first winding. A control device for a tunable frequency ion machine, suitable for a DC input power supply and an electrode probe, and includes: a transformer, including a first winding and a fourth winding on the primary side, and a third winding on the secondary side Windings, a fifth winding, and a sixth winding, the equivalent inductance of the first winding is equal to a magnetizing inductance; a push-pull parallel resonant circuit electrically connected to the DC input power supply and the first of the voltage transformer The winding and the fourth winding include a first inductor, a first resistor, a first power switch, a second power switch, and a resonant capacitor, and have a resonant frequency f _o , the first power switch and The second power switch is turned on or off under the control of the fourth winding, L _p is the magnetizing inductance, C _o is the capacitance value of the resonant capacitor, and the frequency of the sine wave output signal is equal to the resonant frequency,

; And a voltage doubling module, electrically connected to the transformer and the electrode probe, and including a first voltage doubling circuit (Voltage multiplier) and a second voltage doubling circuit, the first voltage doubling circuit is electrically connected to the The fifth winding is used to amplify the part of a sine wave signal output by the fifth winding that is greater than zero into a first square wave signal greater than zero. The second voltage doubling circuit is electrically connected to the sixth winding to Amplify the part less than zero of the other sine wave signal output by the sixth winding into a second square wave signal less than zero, and the voltage doubler module also combines the first square wave signal and the second square wave The signal is a square wave output signal and is output to the electrode probe, and then outputs the square wave output signal capable of generating positive and negative ions; and a control module, which is electrically connected to the third winding of the transformer, and is based on a set voltage value The magnitude of the DC current flowing through the third winding is determined to change the magnitude of the magnetizing inductance, thereby changing the magnitude of the resonance frequency. The control device for a tunable frequency ion machine according to claim 8, wherein the voltage doubler module further includes a second switch, and the second switch includes electrically connected to the first voltage doubler circuit to receive the first party A first input terminal of the wave signal, a second input terminal electrically connected to the second voltage doubler circuit to receive the second square wave signal, a selection terminal, and electrically connected to the electrode probe to output the square wave output The output terminal of the signal, and according to the signal of the selection terminal, decides to output the first square wave signal or the second square wave signal to the output terminal, and the control module is also electrically connected to the selection terminal of the second switch , And the output terminal of the first switch, when the control module detects the square wave output signal at the output terminal, and according to the square wave output signal, it controls The selection end of the second switch is used to adjust the time size of the square wave output signal at a voltage greater than zero and less than zero, respectively, so that the positive and negative ions generated by the electrode probe remain equal.

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