TWI743529B - Pick and place alignment apparatus and method thereof - Google Patents

Abstract

A pick and place alignment apparatus comprises: a visual image capture module; a pick and place module disposed below the visual image capture module; a carrier disposed below the pick and place module; and a light source module disposed below the carrier; wherein, the light source module illuminates the carrier from bottom to top, the visual image capturing module sees through the pick and place unit to capture image information of the carrier to achieve the effect of accurate alignment and facilitate the subsequent process.

Description

Pick-and-place alignment device and method

A pick-and-place alignment device and method, especially a vehicle that can irradiate bright light from bottom to top, so that an image capture module can clearly capture the image information of the vehicle, thereby achieving accuracy Ground counterpoint effect.

The existing implementation of die absorption is that a light source module is arranged at an adjacent visual image capturing module or under the visual image capturing module; the light source module irradiates a bright light onto a die carrier Disk, so that the die located on the die carrier plate generates reflected light, the visual image capture module captures the reflected light or the image information of the die; the image information is sent to a pick-and-place device so that the pick-and-place device is A die is taken out from the die-carrying tray, and then the die is placed in another position for the next process.

Although the above-mentioned die pick-and-place method is used by various manufacturers, there are still several problems. First, if the pick-and-place module moves over the die to be sucked, the pick-and-place module will block the view of the visual image capturing module, making the visual image capturing module unable to effectively capture the image of the die Information, it may cause the pick-and-place module to be unable to accurately align the position of the die, thereby causing process defects due to lack of alignment in the subsequent manufacturing process. Second, the existing light source modules all project bright light from the top to the die located below, so the image information captured by the visual image capture module may be blurred, making the pick-and-place module unable to effectively align. The location of the crystal grains.

In addition to the above-mentioned dies, it also includes flip-chip substrates, IC substrates, LED heat sink substrates, LED sapphire substrates, glass substrates, ceramic substrates, copper foil substrates or wafers (Wafer). At present, the industry generally refers to the aforementioned components as Substrate. Therefore, all existing substrates may be picked and placed by the above-mentioned modules.

As mentioned above, due to the location of the pick-and-place module and the way the light source module provides bright light, it may affect the alignment of the substrate and cause inaccuracies in the subsequent process. Therefore, how to improve the accuracy of the substrate alignment is Become the subject of research by various manufacturers.

In view of the above-mentioned problems, the object of the present invention is to provide a pick-and-place alignment device and method thereof, which can make a bright light illuminate the carrier from bottom to top. The visual image capturing module can pass through the viewing and placing unit, so when the visual image capturing module captures the image information of the vehicle illuminated by bright light from bottom to top, the visual image capturing module can not be affected by the picking and placing unit Obstacles, and can clearly capture the image information of the vehicle.

In order to achieve the above objective, the technical means of the present invention is to provide a pick-and-place alignment device, which has: A visual image capturing module; A pick-and-place unit, which is arranged under the visual image capturing module; A carrier, which is arranged under the pick-and-place unit; and A light source module, which is arranged under the carrier; Wherein, the light source module illuminates the carrier from bottom to top, and the visual image capturing module traverses the pick-and-place unit to capture image information of the carrier.

In one embodiment, a transparent system is provided on the top of the pick-and-place unit. The visual image capturing module is a charge-coupled device; the transparent system is a glass or a lens. The pick-and-place unit is further coupled to a positive and negative pressure module. The positive and negative pressure module is a suction motor and an air supply motor. A carrier displacement unit is arranged below the pick-and-place unit, and the light source unit is arranged below the carrier displacement unit.

In one embodiment, the carrier displacement unit is a roller device, a mechanical clamp base, a linear slide, a crawler structure, or a track structure. A displacement module is coupled to the visual image capturing module. The displacement module is a crawler structure, a linear slide rail or a track structure. The light source module is arranged at the bottom end of the inside of the carrier. The carrier is a tray or a continuous membrane body; or the carrier is a transparent body, and the top of the carrier has a mark; or the carrier has a plurality of accommodating parts and a plurality of through holes, each of the through holes The system communicates with the accommodating part.

In one embodiment, a first visual image capturing unit is located above the vehicle displacement unit, and the first visual image capturing unit captures image information of a mark located on the vehicle.

The present invention further provides a pick-and-place alignment method, the steps of which include: Provide a bright light to a vehicle, and the bright light illuminates the vehicle from bottom to top; A visual image capturing module is attached to the traversing-fetching unit to capture the image information of the vehicle; and A pick-and-place unit moves to a preset position based on the image information, and places a substrate on the carrier; or the pick-and-place unit moves to the preset position based on the image information, and picks up The substrate is placed on the carrier.

In one embodiment, the carrier moves on the top of a carrier displacement unit, and a light source unit is arranged under the carrier displacement unit, and the light source unit irradiates the bright light to the carrier from bottom to top.

In one embodiment, a light source unit is provided at the bottom of the inside of the carrier, and the light source unit irradiates the bright light to the carrier from bottom to top.

In one embodiment, a transparent body is provided on the top of the pick-and-place unit, and the visual image capturing module penetrates the transparent body to penetrate the pick-and-place unit to capture the image information of the substrate.

The present invention further provides a pick-and-place alignment method, the steps of which include: Provide a bright light to a vehicle, and the bright light illuminates the mark located on the vehicle from bottom to top; and A first visual image capturing module is located above the carrier to capture the image information of the mark.

In one embodiment, the carrier moves on the top of a carrier displacement unit, and a light source unit is arranged under the carrier displacement unit, and the light source unit irradiates the bright light to the mark from bottom to top.

In one embodiment, the carrier moves on the top of a carrier displacement unit, and a light source unit is arranged under the carrier displacement unit, and the light source unit irradiates the bright light to the mark from bottom to top.

Combining the above-mentioned pick-and-place alignment device and method of the present invention, the light source unit irradiates a bright light to the carrier from bottom to top, so that the carrier or mark can be seen through the pick-and-place unit by the visual image capturing module , In order to clearly capture the image information of the vehicle or the mark, so as to achieve the effect of precise alignment to facilitate the subsequent process.

The following is a description of the implementation of the present invention through specific specific examples. Those skilled in the art can easily understand the other advantages and effects of the present invention from the contents disclosed in this specification.

Please refer to FIG. 1 and FIG. 2. The present invention is a first embodiment of a pick-and-place alignment device, which has a visual image capturing module 10, a transparent body 11, a pick-and-place unit 12, A positive and negative pressure module 13, a light source module 2, a carrier 3, a carrier displacement unit 4 and a displacement module 5.

The visual image capturing module 10 is a charge-coupled device (CCD).

The pick-and-place unit 12 is located below the visual capture module 10. The pick-and-place unit 12 can be presented. The pick-and-place unit 12 is coupled to the positive and negative pressure module 13, and the positive and negative pressure module 13 is an air extraction motor and an air supply motor. The positive and negative pressure module 13 provides a positive pressure gas or a negative pressure gas to the pick-and-place unit 12.

The transparent body 11 is arranged above the suction unit 120. The transparent body 11 is a glass or a lens.

Please refer to FIG. 1 again, as shown in FIG. 1, the carrier displacement unit 4 is arranged under the pick-and-place unit 12. The carrier displacement unit 4 is a roller device, a mechanical clamp base, a linear slide rail, a crawler structure or a track structure.

The displacement module 5 is disposed above the carrier displacement unit 4 and is coupled to the visual image capturing module 10 so that the visual image capturing module 10 can move up and down and laterally shift relative to the carrier displacement unit 4. The displacement module 5 is a crawler structure, a linear slide rail or a track structure.

In this embodiment, the light source module 2 is disposed under the carrier displacement unit 4. The light source module 2 is a visible light source, an invisible light source, an infrared light source, an ultraviolet light source, a special light source, a halogen light source, a light emitting diode light source or a general lighting source.

The carrier 3 can move above the carrier displacement unit 4. The carrier 3 is a transparent body, and the top of the carrier 3 has at least one substrate 30. The carrier 3 is a tray or a continuous film body.

Please refer to FIG. 5 for the second embodiment of the pick-and-place alignment device of the present invention. In this embodiment, the light source module 2A is disposed at the bottom end of the inside of the carrier 3A.

The present invention is a pick-and-place alignment method, and its steps include:

The top of a carrier 3 has at least one substrate 30, and the carrier 3 moves above the carrier displacement unit 4.

The carrier displacement unit 4 and the carrier 3 are as described above. If the carrier 3 is a continuous film body, the carrier displacement unit 4 is a feeding roller and a film collecting roller. The aforementioned carrier 3 is set on the supply roller, and the film-receiving roller receives the film body from which the substrate 30 has been removed.

If the carrier 3 is a pallet, the carrier displacement unit 4 is a roller device, a mechanical clamp, a linear slide, a crawler structure or a track structure, so that the carrier 3 can be above the carrier displacement unit 4 move.

Please refer to Figure 1, Figure 3, and Figure 4. If it is shown in the above first embodiment, when the carrier 3 moves above the light source module 2, the carrier 3 will stop moving, and the light source module Group 2 provides a bright light to the carrier 3, and the bright light illuminates the carrier 3 from bottom to top.

The carrier 3 has a plurality of accommodating portions 31 and a plurality of through holes 32, and the through holes 32 communicate with the accommodating portion 31. The above-mentioned bright light illuminates the carrier 3 through the through hole 32 and the accommodating portion 31. Or the carrier 3 is a transparent body, so the bright light mentioned above will shine through the substrate 30.

The pick-and-place unit 12 moves below the visual image capture module 10. The visual image capture module 10 passes through the transparent body 11 to pass through the pick-and-place unit 12 to capture the content of the substrate 30 to be placed. Because the visual image capturing module 10 is located above the pick-and-place unit 12 and the above-mentioned bright light is irradiated from bottom to top, the image information of the placement portion 31 can clearly capture the containing portion. 31 image information.

The pick-and-place unit 10 is lowered toward the position of the accommodating portion 31 where the substrate 30 is to be placed. The positive and negative pressure module 13 provides a positive pressure to the pick-and-place unit 12 so that the pick-and-place unit 12 generates a release force, thereby placing the substrate 30 in the receiving portion 31 to be placed. If the substrate 30 is placed, the pick-and-place unit 13 starts to rise, and the next procedure for placing the substrate 30 is performed.

In the second embodiment described above, as shown in Figure 5, since the light source module 2A is installed in the carrier 3A, when the carrier 3A is moved to a predetermined position by the carrier displacement unit, the light source module 2A will provide a bright light to the substrate 30A. The bright light illuminates the carrier 3A from bottom to top. The carrier 3A is a transparent body, so the bright light can penetrate the carrier 3A. The placement action.

In summary, as shown in FIG. 2, in this case, the visual image capturing module 10, the picking and placing unit 12 and the transparent body 11 are combined, so that the visual image capturing module 10 can see through the picking and placing unit 12.

For the same reason, please refer to Figure 1. When the pick-and-place unit 12 is about to pick up the substrate 30 placed on the carrier 3, when the carrier 3 moves to the top of the light source module 2, the carrier 3 will stop moving and the light source The module 2 provides a bright light to the carrier 3, and the bright light illuminates the carrier 3 from bottom to top.

The displacement module 5 moves the visual image capturing module 10 above the substrate 30 to be sucked. The above-mentioned bright light will illuminate the substrate 30 through the through hole 32, and the bright light will be irradiated upward from the periphery of the substrate 30.

The pick-and-place unit 12 moves below the visual image capture module 10. The visual image capture module 10 passes through the transparent body 11 to pass through the pick-and-place unit 12, and then captures the image of the substrate 30 to be absorbed. Information, because the visual image capturing module 10 is located above the pick-and-place unit 12, and the above-mentioned bright light is irradiated from bottom to top, the visual image capturing module 10 can clearly capture the image information of the substrate 30.

The pick-and-place unit 10 is lowered toward the position of the substrate 30 to be sucked. The positive and negative pressure module 13 provides a negative pressure to the pick-and-place unit 12 so that the pick-and-place unit 12 generates a vacuum suction force, thereby adsorbing the substrate 30. If the substrate 30 has been adsorbed, the pick-and-place unit 13 starts to rise and moves to another position where the substrate 30 is placed. After the pick-and-place unit 12 reaches the position, the positive and negative pressure module 13 provides a positive pressure to the pick-and-place unit 12 so that the pick-and-place unit 12 generates a blowing force, thereby placing the substrate 30 at the position.

When the visual image capturing module 10 wants to capture the image information of the carrier 3 or the substrate 30, the field of view of the visual image capturing module 10 can penetrate the transparent body 11 and the picking and placing unit 12, so the image capturing module 10 When capturing the image information of the carrier 3 or the substrate 30, the visual image capturing module 10 will not be blocked by the suction head 12.

Please refer to FIG. 6 for the second embodiment of the pick-and-place alignment device of the present invention. In this embodiment, the carrier 3B has a mark 33B. The carrier 3B is a transparent body.

There is a light source module 2B under the carrier displacement unit 4. Or as in the second embodiment of the above-mentioned carrier, the bottom end of the carrier 3B has a light source module.

The displacement module 5A is arranged above the carrier displacement unit 4. A visual image capturing module 10A is coupled to the bottom end of the displacement module 5A. There is a pick-and-place unit 12A below the visual image capturing module 10A. The pick-and-place unit 12A is coupled with a positive and negative pressure module. A first visual image capturing module 14A is located above the carrier displacement unit 4.

The present invention is another embodiment of the pick-and-place alignment method, and its steps include:

As shown in Fig. 6, a bright light is provided to a carrier 3B, and the bright light illuminates the location mark 33B from bottom to top. The bright light can be provided by the light source module 2B located under the carrier displacement unit 4, or the bright light can be provided by the light source module located at the bottom of the carrier.

The first visual image capturing module 14A is located above the carrier 3B to capture the image information of the mark 33B.

The displacement module 5A moves the pick-and-place unit 12A to the top of the carrier 3B according to the image information. After the pick-and-place unit 12A moves above the carrier 3B, the pick-and-place unit 12A moves longitudinally relative to the carrier 3B to place the adsorbed substrate on the top of the carrier 3B, or to suck the substrate on the carrier 3B. If the aforementioned sucking or placing action has been completed, the picking and placing unit 12A returns to the original position again. As in the first embodiment described above, the visual image capturing module 10A passes through the access unit 12A to capture image information of the substrate.

In addition, the light source unit of the present invention is located at the bottom of the carrier or under the carrier displacement unit, so the bright light generated by the light source unit is irradiated from bottom to top, so that the visual image capturing module can clearly Capture the image information of the substrate or mark to achieve the purpose of precise positioning to facilitate the subsequent process.

The specific embodiments described above are only used to illustrate the features and effects of the present invention, rather than to limit the scope of implementation of the present invention. Without departing from the spirit and technical scope of the present invention, any application of the present invention The equivalent changes and modifications of the disclosed content of the invention shall still be covered by the following patent application scope.

10.10A: Visual image capture module 11: Transparent body 12.12A: Pick and place unit 13: Positive and negative pressure module 14A: The first visual image capture module 2, 2A, 2B: light source module 3, 3A, 3B: vehicles 30, 30A: substrate 31: Containment Department 32: Through hole 4. 4A: Vehicle displacement unit 5. 5A: Displacement module 33B: Mark

Figure 1 is a schematic diagram of a first embodiment of a pick-and-place alignment device. Figure 2 is a schematic cross-sectional view of a visual image capturing module and a pick-and-place unit. Figure 3 is a schematic diagram of the actions of a carrier and a carrier displacement unit. Figure 4 is a schematic diagram of another action of the carrier and the carrier displacement unit. Figure 5 is a schematic diagram of the second embodiment of the carrier. Figure 6 is a schematic diagram of the second embodiment of the created pick-and-place alignment device.

10: Visual image capture module

12: Pick and place unit

2: Light source module

3: Vehicle

30: substrate

31: Containment Department

32: Through hole

4: Vehicle displacement unit

5: Displacement module

Claims (17)

A pick-and-place alignment device, which has: a visual image capture module; a pick-and-place unit arranged under the visual image capture module; and a carrier, which is arranged on the pick-and-place unit Below; a light source module, which is arranged below the carrier; and a carrier displacement unit, the carrier displacement unit is arranged below the pick-and-place unit, the light source unit is arranged on the carrier displacement unit Wherein, the light source module illuminates the carrier from bottom to top, and the visual image capturing module traverses the pick-and-place unit to capture the image information of the carrier. For example, the pick-and-place alignment device described in item 1 of the scope of patent application has a transparent body, and the transparent system is arranged on the top of the pick-and-place unit. In the pick-and-place alignment device described in item 2 of the scope of patent application, the visual image capturing module is a charge-coupled device; the transparent system is a glass or a lens. The pick-and-place alignment device described in item 2 of the scope of patent application, wherein the pick-and-place unit is further coupled to a positive and negative pressure module. For the pick-and-place alignment device described in item 4 of the scope of patent application, the positive and negative pressure module is an air extraction motor and an air supply motor. The pick-and-place alignment device described in item 1 of the scope of patent application, wherein the carrier displacement unit is a roller device, a mechanical clamp, a linear slide, a crawler structure or a track structure. For the pick-and-place alignment device described in item 1 of the scope of patent application, it further has a displacement module, and the displacement module is coupled to the visual image capturing module. For the pick-and-place alignment device described in item 7 of the scope of patent application, the displacement module is a crawler structure, a linear slide rail or a track structure. As described in item 1 of the scope of patent application, the light source module is a visible light source, an invisible light source, an infrared light source, an ultraviolet light source, a special light source, a halogen light source, and a light source. Diode light source or general lighting source. The pick-and-place alignment device described in item 1 of the scope of patent application, wherein the light source module is arranged at the bottom end of the inside of the carrier. The pick-and-place alignment device described in item 1 of the scope of patent application, wherein the carrier is a tray or a continuous film body; or the carrier is a transparent body, and the top of the carrier has a mark; or the carrier The utility model has a plurality of accommodating parts and a plurality of through holes, and each of the through holes communicates with the accommodating part. For the pick-and-place alignment device described in item 1 of the scope of patent application, it further has a first visual image capturing unit, the first visual image capturing unit is located above the carrier displacement unit, and the first visual The image capturing unit captures image information of a mark located on the vehicle. A pick-and-place alignment method, the steps include: providing a bright light to a carrier, the bright light illuminates the carrier from bottom to top; a visual image capturing module is attached to a pick-and-place unit to capture Obtain the image information of the vehicle; and A pick-and-place unit moves to a preset position based on the image information, and places a substrate on the carrier; or the pick-and-place unit moves to the preset position based on the image information, and picks up The substrate is placed on the carrier; wherein a light source unit is provided at the bottom of the inside of the carrier, and the light source unit irradiates the bright light to the carrier from bottom to top. The pick-and-place alignment method described in item 13 of the scope of patent application, wherein the carrier is moved on the top of a carrier displacement unit, and a light source unit is arranged under the carrier displacement unit, and the light source unit is used for the bright light Illuminate to the vehicle from bottom to top. The pick-and-place alignment method described in item 13 of the scope of patent application, wherein a transparent body is provided on the top of the pick-and-place unit, and the visual image capturing module penetrates the transparent body to see through the pick-and-place unit and enter Capture the image information of the substrate. A pick-and-place alignment method, the steps include: providing a bright light to a carrier, the bright light irradiates a mark located on the carrier from bottom to top; and a first visual image capturing module is attached to the carrier Above the carrier to capture the image information of the mark; the carrier moves on the top of a carrier displacement unit, and a light source unit is arranged under the carrier displacement unit, and the light source unit moves the bright light from bottom to bottom Up to the mark. For the pick-and-place alignment method described in item 16 of the scope of patent application, a light source unit is provided at the bottom of the inside of the carrier, and the light source unit irradiates the bright light to the mark from bottom to top.

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