TWI742070B - Container support rack - Google Patents

Abstract

The container support frame has three supported parts recessed upward at the bottom of the container. Two of the three supported parts are front supported parts that are positioned forward than the center of gravity of the container, and the remaining one of the three supported parts is a rear supported part that is positioned rearward than the center of gravity of the container. The support body has two front support parts, a rear support part, a notch part, and an extension part. The two front support parts are engaged with the two front supported parts from below to support the bottom of the container from below. The rear support part is a part that supports the container from below and is located more rearward than the center of gravity in the bottom part. The notch part allows the second support body to pass in the vertical direction, and the extension part extends forward than the front end of the container.

Description

Container support frame

FIELD OF THE INVENTION The present invention relates to a container support rack provided with a support body that supports the bottom of a container containing a semiconductor substrate from below.

BACKGROUND OF THE INVENTION An example of the container holder as described above has been described in Japanese Patent Laid-Open No. 2015-012041 (Patent Document 1). The container support rack of Patent Document 1 is provided with a support body (mounting support portion 10a) that supports the bottom surface of a container accommodating a semiconductor substrate from below. The support body is configured to have three support parts arranged radially with respect to the reference position of the bottom. In the state where the three support parts are engaged with the supported part of the container from below, the three supports The part comes to support the bottom of the container from below.

SUMMARY OF THE INVENTION The problem and the means to solve the problem. The container for storing semiconductor substrates is formed near the front and so on. When viewed from the vertical direction, the center of gravity of the container is higher than the reference position in the bottom. The situation is more forward. In this way, when the center of gravity of the container is positioned forward with respect to the reference positions of the three support parts, when the container support frame is shaken due to an earthquake, the container supported by the support body may easily tip over forward.

Therefore, what is required is a container support rack that makes it difficult for the container supported by the support body to tip over to the front.

In view of the above-mentioned content, the characteristic structure of the container support frame is that it is provided with a first support body that supports the bottom of the container containing the semiconductor substrate from below, and in the container support frame, the container is transported to The conveying device of the first support includes a second support, which is a supported portion for conveyance in the bottom of the container that supports the container from below, and the bottom of the container is provided with three supports that are recessed upward The three supported portions are arranged radially with respect to the reference position of the bottom. When viewed from the vertical direction, the direction between the reference position where the containers are arranged and the center of gravity of the containers is set as the front-rear direction, and In the aforementioned front-to-rear direction, the direction of the center of gravity of the container relative to the aforementioned reference position is set to the front, and the opposite direction is set to the rear. Two of the aforementioned three supported parts are located more than the center of gravity of the aforementioned container. The aforementioned front front supported portion, the remaining one of the aforementioned three supported portions is the rear supported portion located on the rear side of the center of gravity of the container, and the first support is provided with two front supporting portions, The rear support part, the notch part and the extension part. The two front support parts support the bottom of the container from below in a state of being engaged with the two front supported parts from below, and the rear support part is from below The part supporting the container that is located more rearward than the center of gravity in the bottom part, and the notch is formed in the container supported by the first support and overlaps the supported part for conveying in the vertical direction Part and allow the second support body to pass through in the up-down direction, and the extension portion extends further toward the front than the front end of the container supported by the first support body.

With this feature configuration, the first support body supports the container in a state where the two front support parts are engaged with at least two of the three supported parts in the container from below. Since the two front supported parts are formed radially with respect to the reference position of the bottom of the container, by engaging at least two front supporting parts with the two front supporting parts from below, it is possible to use two The front support part and the rear support part support the container in a state where the container is positioned at a predetermined position. In addition, since the extension portion of the first support exists below the front end of the container, the extension portion can receive the container to be tipped forward from below by the extension portion, thereby restricting the situation of the container tipping forward. In addition, although the first support portion is relatively large due to the extension portion provided on the first support body, since the first support body is provided with a notch, the conveying device is formed to allow the second support body to move in the vertical direction through the notch. , And the container can be transferred between and the first support.

Mode for Carrying Out the Invention Hereinafter, an embodiment in which a container storage rack as a container support rack is used in a container storage facility will be described based on the drawings. As shown in FIG. 1, the container storage facility includes: a container storage rack 1 with a storage portion 1A provided with a plurality of storage containers W; and a stacker crane 2 as a conveying device formed in front of the container storage rack 1 The container W travels in the moving space S in the direction X1 and conveys the container W. In addition, the container storage facility is provided with a wall K and a conveying belt 4 that covers the side of the area where the container storage rack 1 and the stacker crane 2 are installed, and the conveying belt 4 penetrates the wall. The state of K is set and the container W is transported. In addition, in the present embodiment, a FOUP (Front Opening Unified Pod) is used as the container W, and the container W is used to house a semiconductor substrate (wafer) as a container.

As shown in FIG. 1, the conveyance belt 4 is comprised so that the container W may be conveyed between the outer side position 4A located in the outer side of the wall body K, and the inner side position 4B located in the inner side of the wall body K. As shown in FIG. The conveyor belt 4 is installed at a position higher than the center in the vertical direction in the container storage rack 1 and lower than the center in the vertical direction in the container storage rack 1. Relative to the outer position 4A of the conveying belt 4 set at a high position, the ceiling transport vehicle 6 is used to load and unload the container W, and is relative to the conveying belt 4 (not shown) set at a low position The outer position 4A allows the operator to load and unload the container W.

In the container storage facility, the container W is loaded on the outer position 4A of the conveying conveyor 4. After the container W is transported from the outer position 4A to the inner position 4B by the conveying conveyor 4, it is conveyed from the inner position 4B of the conveying conveyor 4 to the storage section 1A of the container storage rack 1 by the stacker crane 2. In addition, in the container storage facility, the container W is transported from the storage section 1A of the container storage rack 1 to the inner position 4B of the transport conveyor 4 by the stacker crane 2. This container W is conveyed from the inner position 4B to the outer position 4A by the conveying conveyor 4, and is unloaded from the outer position 4A by the ceiling conveyer 6 or an operator.

Hereinafter, each configuration of the container storage facility will be described. Set the direction in which the container storage rack 1 and the moving space S are arranged as the rack front and rear direction X, and the direction in which the moving space S exists with respect to the container storage rack 1 is set as the rack front direction X1, and the opposite direction is set as the rack back Direction X2. Also, when viewed from the vertical direction Z, the direction orthogonal to the front and rear direction X of the frame is set to the width direction Y, one direction of the width direction Y is set to the first width direction Y1, and the other direction of the width direction Y is (The opposite direction to the first width direction Y1) is referred to as the second width direction Y2. In addition, with respect to the container W, the rack front-rear direction X and the width direction Y are defined based on the state in which the container W has been stored in the storage portion 1A.

[Container] As shown in Fig. 2, the container W is provided with: a housing portion 12 having a housing space 11 for housing semiconductor substrates; a flange portion 13 provided at the upper end of the container W; and a detachable lid 15 formed to be closed An opening 14 in the front of the receiving portion 12. In this manner, the container W is provided with a storage space 11 for storing semiconductor substrates, and an opening 14 for allowing the semiconductor substrate to enter and exit from the storage space 11. The opening 14 is provided in the rack front direction X1 with respect to the storage space 11.

As shown in Figures 2 and 3, the bottom 16 of the container W is provided with three groove-shaped supported portions 17 recessed upward. The three supported portions 17 are formed in a long strip shape, and three are supported The portion 17 is arranged radially with respect to the reference position P1. The accommodating space 11 accommodates the semiconductor substrate so that the center of the semiconductor substrate accommodated in the accommodating space 11 is located in the rack front direction X1 than the center of the container W in the rack front and rear direction X. Therefore, as the number of semiconductor substrates accommodated in the accommodating space 11 increases, the center of gravity P2 of the container W is moved toward the rack front direction X1. The reference position P1 is set in the rearward direction X2 of the container W when viewed from the vertical direction Z rather than the center of gravity P2 of the container W. The center of gravity P2 shown in FIG. 3 is the center of gravity P2 of the container W in a state where the maximum number of semiconductor substrates that can be accommodated in the container W of the container W is accommodated. In this embodiment, the center of gravity P2 in the state where the semiconductor substrate is not contained at all in the storage space 11 of the container W is also located in the rack front direction X1 than the reference position P1.

Viewed from the vertical direction Z, the direction in which the reference position P1 of the container W and the center of gravity P2 of the container W are aligned is the front-rear direction of the container W. In addition, the direction in which the center of gravity P2 of the container W exists with respect to the reference position P1 in the front-rear direction of the container W is the front of the container W, and the opposite direction thereof is the rear of the container W. In the state where the container W is housed in the storage portion 1A, the front-rear direction of the container W is the same as the rack front-rear direction X, and the front of the container W is the same direction as the rack front direction X1, and the rear of the container W and the rack rear direction X2 are The same direction.

Two of the three supported portions 17 provided in the bottom 16 are located in the rack front direction X1 than the center of gravity P2 of the container W. These two supported parts 17 are front supported parts 17A. The remaining one of the three supported portions 17 provided in the bottom portion 16 is located in the rearward direction X2 of the container W from the center of gravity P2. This one supported part 17 is a rear supported part 17B. As shown in FIG. 3, one of the two front supported portions 17A is in the width direction Y, and is arranged in the first width direction Y1 with respect to the center of gravity P2 of the container W in the bottom 16. The other of the two front supported portions 17A is provided in the width direction Y in the second width direction Y2 with respect to the center of gravity P2 of the container W in the bottom 16. The two front supported portions 17A are provided at the same position in the front-rear direction X of the frame. The rear supported portion 17B is arranged at the same position as the center of gravity P2 of the container W in the bottom 16 in the width direction Y.

In a state where the container W is supported by the first support 21 of the storage portion 1A, when viewed from the vertical direction Z, the portion of the bottom 16 of the container W that overlaps the first support 21 is referred to as the storage overlap portion 18. Also, in a state where the container W is supported by the second support 36 of the stacker crane 2, when viewed from the vertical direction Z, the portion of the bottom 16 of the container W that overlaps the second support 36 is referred to as a transfer repeating portion 19. Each of the two front supported portions 17A is formed to straddle the storage overlapping portion 18 and the conveying overlapping portion 19. One rear supported portion 17B is formed at least on the conveying repeating portion 19, and in this embodiment, it is formed across the storage repeating portion 18 and the conveying repeating portion 19. In addition, the conveyance repeating part 19 corresponds to the "supported part for conveyance".

[Container Storage Rack] As shown in FIGS. 1 and 4, the container storage rack 1 has a plurality of storage portions 1A capable of storing containers W arranged in a state in which they are arranged in the vertical direction Z and the width direction Y. Each of the plurality of storage parts 1A is provided with a first support 21 that supports the bottom 16 of the container W from below. In this way, a first support 21 is provided on the container storage rack 1. As shown in FIG. 4, the container storage rack 1 is provided with: a plurality of vertical frame bodies 22B arranged in a posture along the vertical direction Z; and a horizontal frame body 22A arranged in a posture along the width direction Y, combining these The frame 22 is formed by the vertical frame body 22B and the horizontal frame body 22A. The frame 22 is provided at the end of the container storage rack 1 in the rack rear direction X2 side, and the first support body 21 is supported on the horizontal frame body 22A in a posture extending from the horizontal frame body 22A in the rack front direction X1. That is, the first support body 21 is supported by the frame 22 in a state where the end on the X2 side of the frame rearward direction is connected to the horizontal frame body 22A. Furthermore, the wall body K is fixed to the frame 22 of the container storage rack 1.

As shown in FIGS. 5 and 6, the first support 21 includes one plate-shaped portion 23, two reinforcement portions 24, and two front support portions 25. The plate-shaped portion 23 is formed in a plate shape, and the two reinforcing portions 24 are connected to the downward facing surface thereof by the fastening portion 26. In this embodiment, a rivet is used as the fastening portion 26 that connects the plate-shaped portion 23 and the reinforcing portion 24. Specifically, each of the plate-shaped portion 23 and the reinforcing portion 24 is formed with a hole for inserting rivets. In addition, in a state where the plate-shaped portion 23 and the reinforcing portion 24 are overlapped in the vertical direction, the rivet is inserted into the holes for inserting these rivets from above, and the tip (lower end) of the rivet is broken and the tip of the rivet faces the frame. The front-rear direction X and the width direction Y are crushed, and the plate-shaped portion 23 and the reinforcing portion 24 are clamped in the vertical direction by the head and the tip of the rivet to connect the plate-shaped portion 23 and the reinforcing portion 24. Using rivets to connect the plate-shaped portion 23 and the reinforcing portion 24 in this manner has the following advantages. That is, it is possible to avoid deformation of the plate-shaped portion 23 or the reinforcing portion 24 due to heat, such as when the plate-shaped portion 23 and the reinforcing portion 24 are joined by welding, and it is possible to prevent the plate-shaped portion 23 and the reinforcing portion from being deformed. The cost required for the connection of the part 24.

In addition, as shown in FIG. 2, the rear end portion of the reinforcing portion 24 may be connected to the horizontal frame 22A. As shown in FIG. 5, the plate-shaped portion 23 is formed with a notch 27, and the shape viewed from the vertical direction Z is formed in an angular U-shape. The front support portion 25 is provided at two positions on the periphery of the notch 27 in the plate portion 23 in a state protruding upward from the upper surface of the plate portion 23. Furthermore, the details of the first support 21 will be described later.

[Stacker Crane] As shown in Fig. 1, the stacker crane 2 is provided with: a traveling trolley 31 that travels along the width direction Y; a mast 32 that is erected on the traveling trolley 31; and a lifting body 33 that runs along the mast 32 And the lifting; and the transfer device 34, is supported by the lifting body 33. The transfer device 34 is configured to be able to transfer the container W between the transfer target position (the accommodating portion 1A and the inner position 4B of the conveying conveyor 4) and itself.

The transfer device 34 is provided with a second support 36 (see FIG. 3) that supports the bottom 16 of the container W from below, and an advance and retreat operation device (see FIG. Not shown). The retracted position is a position where the second support body 36 is located directly above the lifting body 33. As shown in FIG. 3, the protruding position is a position where the second support body 36 protrudes from the retreat position to the rear direction X2. In addition, the transfer device 34 is configured to be able to move the direction in which the second support 36 protrudes from the retracted position in the direction in which one of the pair of container storage racks 1 exists by rotating the forward and backward operation device around the longitudinal axis. , Choose freely with the other existing direction of the pair of container storage racks 1. Therefore, the transfer device 34 is configured to be able to transfer the container W between the respective storage portions 1A with respect to any one of the storage portions 1A of the pair of container storage racks 1.

As shown in FIG. 3, the second support body 36 is formed in a shape that can pass through the notch 27 of the first support body 21 in the vertical direction Z when the lifting body 33 is raised and lowered in a state where it has protruded to the protruding position. The second supporting body 36 is provided with three conveying support parts 37 that can be engaged with the container W from below and two supported parts 17 to support the bottom part 16 of the container W. The second support 36 is configured to support the container W in a state where the three conveyance support portions 37 are engaged with the supported portion 17 of the container W, so that the container W can be positioned on the second support 36 The state of the pre-set support location to support. By the way, the three conveyance support parts 37 support the part of the supported part 17 located in the conveyance repeating part 19 from below, and the second support 36 supports the conveyance repeating part 19 in the bottom 16 of the container W from below. .

[Details of the first support] Next, the first support 21 will be described in detail. As shown in FIG. 2, the first support body 21 is provided with two front support parts 25 that support the bottom 16 of the container W from below in a state of being engaged with the two front supported parts 17A from below, and support from below The plate-shaped portion 23 of the portion of the container W located in the rear direction X2 of the bottom portion 16 is more than the center of gravity P2 in the bottom portion 16. The plate portion 23 supports the rear end portion 16A of the bottom portion 16 in the container W. This plate-shaped portion 23 is equivalent to a rear support portion that supports a portion of the container W located in the rearward direction X2 than the center of gravity P2 in the bottom portion 16 from below.

In addition, the first support body 21 supports the container W with the two front support portions 25 and the plate-shaped portion 23 in an inclined posture in which the two front supported portions 17A are located above the rear supported portion 17B. Here, the “tilt posture” means that the posture of the container W is a posture that is inclined backward with respect to the container W in the reference posture. To further explain, the reference posture is the state where the supported portion 17 of the container W is supported by three kinematic pins, and the portion where the power pin in the front supported portion 17A contacts from below is supported by the rear The portion in the portion 17B that the power pin contacts from below is in a posture at the same height. In addition, the inclined posture assumes that the supported portion 17 of the container W is supported by the three power pins including the two front support portions 25 (power pins) as described above, so that the front of the front supported portion 17A is The portion of the supporting portion 25 that is in contact from below is in an upward posture than the portion that is in contact with the power pin of the rear supported portion 17B from below.

Viewed from the vertical direction Z, the upper surface of the plate-shaped portion 23 overlapping with the container W is formed flat and horizontal. In addition, the two front support portions 25 are formed so that the distance L between the first target portion 41 and the second target portion 42 in the vertical direction Z becomes a height exceeding 0 mm and 1 mm or less. The first target portion 41 is a portion that is positioned at the same position as the two front supported portions 17A of the container W in the rack front and rear direction X in the state where the container W is supported by the first support 21 The bottom part of the container W. In addition, the second target portion 42 is a portion that is located directly below the first target portion 41 in the upper surface of the plate-shaped portion 23 in a state where the container W is supported by the first support 21. In short, in a state where the container W is supported by the first support 21, although the first object portion 41 and the second object portion 42 are separated in the vertical direction Z, the separation distance (interval L) is restrained Below 1mm. In this embodiment, the two front support portions 25 are formed so that the gap L becomes 1 mm in height.

The first support 21 is formed by forming the length of the container W in the front-rear direction X of the rack to be longer than the length of the container W in the front-rear direction X of the rack. In addition, the first support 21 supports the container W so that the front end of the container W is located in the rear direction X2 than the front end of the first support 21 in the front direction X1 of the first support, and the front end of the container W is higher than the front end of the first support 21. The rear end of the rack in the rear direction X2 is further in the rack front direction X1. That is, the first support body 21 includes a front extension portion 43 as an extension portion that extends in the rack front direction X1 than the front end of the container W supported by the first support body 21. The previous extension 43 has a front restricting portion 44 as a restricting portion that overlaps with the container W supported by the first support 21 when viewed from the front and rear direction X of the rack. The front restricting portion 44 is formed by forming its upper end at a height higher than the front supported portion 17A of the container W supported by the first support 21 and not exceeding 1/5 of the height of the container W. Incidentally, the height of the front restricting portion 44 may also be such that when the second support 36 supporting the container W moves from the retracted position to the protruding position or from the protruding position to the retreat position, the front restricting portion 44 does not interfere. To the height of the container W supported by the second support 36.

The first support 21 is formed so that the length in the width direction Y thereof is longer than the length in the width direction Y of the container W. In addition, the first support 21 supports the container W so that the end of the container W in the first width direction Y1 is located in the second width direction Y2 than the end of the first support 21 in the first width direction Y1, and The end in the second width direction Y2 of the container W is located in the first width direction Y1 than the end in the second width direction Y2 of the first support 21. That is, the first support 21 is provided with a first width extension 45 which is further toward the first width direction Y1 than an end in the first width direction Y1 of the container W supported by the first support 21 A width direction Y1 extends. The first width extension portion 45 has a first width restriction portion 46 that overlaps with the container W when viewed from the width direction Y. In addition, the first support 21 includes a second width extension 47 that is further toward the second width than the end of the container W supported by the first support 21 in the second width direction Y2. The direction Y2 extends. The second width extension portion 47 has a second width restriction portion 48 that overlaps with the container W when viewed from the width direction Y. The first width restriction portion 46 and the second width restriction portion 48 are formed to have the same height as the front restriction portion 44.

The first width restricting portion 46 and the second width restricting portion 48 in the first support body 21 are provided only in the frame front direction X1 than the vertical frame body 22. From the perspective of the width direction Y, compared with the portion of the first support 21 having the first width restriction portion 46 and the second width restriction portion 48, the portion of the first support 21 that overlaps the vertical frame 22A It is formed to be narrower in the width direction Y.

In this way, by supporting the bottom 16 of the container W with the first support 21 in a state where the two front support parts 25 are engaged with the two supported parts 17 of the container W from below, it is possible to support the bottom 16 of the container W by the first support 21 The support 21 supports the container W in a state where the container W is positioned at a predetermined position. In addition, since the first support 21 is provided with the notch 27 and the front extension 43, the stacker crane 2 can transfer the container W between the first support 21 and the first support 21. The container W supported by the support body 21 is difficult to tip over in the rack front direction X1.

[Other embodiments] (1) In the above-mentioned embodiment, although the rear support part supports the container from below, the part that is located forward of the center of gravity in the bottom part is formed, and the rear support part is made of a plate. The shape part supports the structure of the rear end of the container from below, but the structure of the support container by the rear support part is not limited to this. That is, for example, the rear support portion is formed to protrude upward from the plate-shaped portion, and the amount of protrusion from the plate-shaped portion is smaller than that of the front support portion, and is engaged with the rear supported portion from below. It is also possible to support the bottom of the container from below. In addition, it is also possible to provide a structure in which a plurality of protrusions are formed on the plate-shaped portion, and the rear end portion of the container is supported from below by the plurality of protrusions.

(2) In the above-mentioned embodiment, although the posture of the container supported by the first support portion is set as the posture of the container facing the front direction of the shelf, the posture of the container supported by the first support portion may be The posture of the container is a posture in which the front of the container is in the first direction in the rack width direction, or the front of the container is in a posture in the second direction in the rack width direction, or the front of the container is in the posture in the rear direction.

(3) In the above embodiment, although the first support body is provided with the first width extension portion and the second width extension portion, the first support body may be provided with only the first width extension portion and the second width extension portion. One of the width extension portions may also be configured to not include both the first width extension portion and the second width extension portion on the first support. In addition, although the first support is provided with the front restricting portion, the first width restricting portion, and the second width restricting portion, the first support may be provided with only the front restricting portion, the first width restricting portion, and the second width restricting portion. A part of the two width restricting portions (for example, only the front restricting portion) may be configured to not include all of the front restricting portion, the first width restricting portion, and the second width restricting portion on the first support.

(4) In the above-mentioned embodiment, although the first supports are arranged in the vertical direction and the width direction and the container supports are arranged in plural, it is also possible to arrange the first supports only in the container support frame. A plurality of the first supports may be arranged in the container support frame in a state of being arranged in the vertical direction, or a plurality of first supports may be arranged in the container support frame in a state of being arranged only in the width direction. Although the transfer device is a stacker crane, when the first support is arranged only in the vertical direction and a plurality of containers are installed in the container support frame, it is also possible to remove the first support in the width direction. The moving lifting device constitutes the conveying device, and when the first support is arranged only in the width direction and a plurality of containers are installed in the container support frame, it can also be an automatic transport vehicle running on the ground. To constitute a conveying device.

(5) In the above embodiment, although the container is a FOUP transported in a factory, the container may be a container for other semiconductor substrates such as FOSB transported between factories.

(6) In the above embodiment, although the first support is provided with one plate-shaped portion and two reinforcements, and the two reinforcements are connected to the frame, the first support is connected to the frame The composition is not limited to this. That is, for example, instead of one plate-shaped part and two reinforcing parts, one plate-shaped part and one reinforcing member may be provided on the first support, and the one reinforcing member may be connected to the frame. Also, instead of one plate-shaped part and two reinforcing parts, one plate-shaped member may be provided on the first support, and the one plate-shaped member may be connected to the frame.

[Outline of the above-mentioned embodiment] Hereinafter, an outline of the semiconductor container storage facility described above will be described.

The characteristic structure of the container support frame is that it is provided with a first support body that supports the bottom of the container containing the semiconductor substrate from below, and in the container support frame, the container is transported to the first support body The conveying device is provided with a second support, the second support is a supported portion for transport in the bottom of the container that supports the container from below, and the bottom of the container is provided with three supported portions recessed upward, the aforementioned three The supported portion is arranged radially with respect to the reference position of the bottom. Viewed from the vertical direction, the direction between the reference position where the container is arranged and the center of gravity of the container is set as the front-rear direction, and the front-rear direction is The direction in which the center of gravity of the container exists with respect to the aforementioned reference position is set to the front, and the opposite direction is set to the rear. Two of the three supported parts are the front quilt located in front of the center of gravity of the container. The support part, the remaining one of the aforementioned three supported parts is the rear supported part located at the rear of the aforementioned container's center of gravity, and the aforementioned first support has two front support parts, a rear support part, and a notch. The two front supporting parts support the bottom of the container from below in a state of engaging with the two front supported parts from below, and the rear supporting part supports the container from below. The center of gravity of the bottom part is further located at the rear part, and the notch part is formed in the part of the container supported by the first support body that overlaps the conveying supported part in the vertical direction, and allows The second support body passes through in the up-down direction, and the extension portion extends further toward the front than the front end of the container supported by the first support body.

With this feature configuration, the first support body supports the container in a state where the two front support parts are engaged with at least two of the three supported parts in the container from below. Since the two front supported parts are formed radially with respect to the reference position of the bottom of the container, by engaging at least two front supporting parts with the two front supporting parts from below, it is possible to use two The front support part and the rear support part support the container in a state where the container is positioned at a predetermined position. In addition, since the extension portion of the first support exists below the front end of the container, the extension portion can receive the container to be tipped forward from below by the extension portion, thereby restricting the situation of the container tipping forward. In addition, although the first support portion is relatively large due to the extension portion provided on the first support body, since the first support body is provided with a notch, the conveying device is formed to allow the second support body to move in the vertical direction through the notch. , And can transfer the container with the first support.

Here, it is preferable that the extension portion has a restriction portion that overlaps with the container supported by the first support when viewed from the front-rear direction.

According to this structure, when the container moves forward with respect to the first support, the container can be restricted from moving forward by the restricting body contacting the moving container. Therefore, when the container moves forward with respect to the first support, the situation in which the container falls from the support and the situation in which the container is tipped forward can be restricted.

Furthermore, it is preferable that, viewed from the vertical direction, the direction orthogonal to the front-rear direction is the width direction, and one of the width directions is the first width direction, and the other of the width direction is The direction is set as the second width direction, the first support is provided with a first width extension and a second width extension, and the first width extension is larger than the first width extension in the container supported by the first support. An end in the width direction further extends toward the first width direction and has a portion that overlaps with the container when viewed from the width direction. The second width extension is larger than that of the container supported by the first support. The end portion in the second width direction of is further extended toward the second width direction, and has a portion that overlaps with the container when viewed from the width direction.

According to this configuration, when the container moves in the width direction with respect to the first support, the first width restricting body and the second width restricting body contact the moving container to restrict the movement of the container in the width direction. Therefore, when the container moves in the width direction relative to the first support, it is possible to restrict the situation in which the container falls over in the width direction. In addition, since the first width extension part and the second width extension part in the first support exist below the end part in the width direction of the container, the first width extension part and the second width extension part can be used from below To withstand the container that wants to tip over in the width direction, while restricting the container to tip over in the width direction.

Furthermore, it is more desirable that the first support body supports the container in a posture that faces the moving space in front of the container supported by the first support body.

According to this structure, by making it difficult for the container supported by the first support body to tip over forward, it is possible to prevent the container from falling into the moving space of the conveying device. Therefore, when the container storage rack is shaken due to an earthquake or the like, for example, the number of containers falling into the moving space of the conveying device can be suppressed, and therefore, it becomes easy to perform restoration work after the earthquake.

1‧‧‧Container storage rack (container support rack) 1A‧‧‧Storage section 2.‧‧‧Stacker crane (transporting device) ‧‧‧Ceiling transport vehicle 11‧‧‧Containment space 12‧‧‧Containment part 13‧‧‧Flange part 14‧‧‧Opening 15‧‧‧Cover body 16‧‧‧Bottom 16A‧‧‧Back end 17‧ ‧‧Supported part 17A‧‧‧Front supported part 17B‧‧‧Back supported part 18‧‧‧Receiving repeating part 19‧‧‧Transporting repeating part (supported part for conveying) 21‧‧‧First support 22‧‧‧Frame 22A‧‧‧Horizontal frame 22B‧‧‧Vertical frame 23‧‧‧Plate (rear support) 24‧‧‧Reinforcement 25‧‧‧Front support 26‧‧‧Fixed Section 27‧‧‧Gap 31‧‧‧Walking trolley 32‧‧‧Mast 33‧‧‧Elevating body 34‧‧‧Transfer device 36‧‧‧Second support body 37‧‧‧Transportation support part 41‧‧‧第One object part 42‧‧‧Second object part 43‧‧‧Front extension part 44‧‧‧Front restriction part 45‧‧‧First width extension part 46‧‧‧First width restriction part 47‧‧‧Second width Extension 48‧‧‧Second width restriction K‧‧‧Wall L‧‧‧Interval P1‧‧‧reference position P2‧‧‧center of gravity S‧‧‧moving space W‧‧‧container X‧‧‧Front and rear Direction (front and rear direction) X1‧‧‧Front direction (front) X2‧‧‧Back direction (rear) Y‧‧‧Width direction Y1‧‧‧First width direction Y2‧‧‧Second width direction Z‧‧ ‧Up and down direction

Fig. 1 is a side view of the container storage facility. Fig. 2 is a side view of the storage section. Fig. 3 is a plan view of the storage section. Fig. 4 is a plan view of the container storage rack. Fig. 5 is a perspective view of the first support. Fig. 6 is an exploded perspective view of the first support.

2‧‧‧Stacking crane (transporting device)

12‧‧‧Containment Department

16‧‧‧Bottom

16A‧‧‧Back end

17‧‧‧Supported Department

17A‧‧‧Former Supported Department

17B‧‧‧After being supported by the Ministry

18‧‧‧Repetitive storage

19‧‧‧Repetitive transport section (supported section for transport)

21‧‧‧The first support (support)

25‧‧‧Former Support Department

27‧‧‧Gap

36‧‧‧Second Support

37‧‧‧Transportation Support Department

43‧‧‧Front extension (extension)

44‧‧‧Front Restriction Section (Restriction Section)

45‧‧‧First width extension

46‧‧‧The first width restriction part

47‧‧‧Second width extension

48‧‧‧Second width restriction part

W‧‧‧Container

X‧‧‧Frame front and rear direction (front and rear direction)

X1‧‧‧Front direction (front)

X2‧‧‧Rear direction (rear)

Y‧‧‧Width direction

Y1‧‧‧First width direction

Y2‧‧‧Second width direction

P1‧‧‧reference position

P2‧‧‧Center of gravity

Claims (5)

A container support frame is provided with a first support body for supporting the bottom of a container containing a semiconductor substrate from below; the container support frame is characterized in that: a conveying device for conveying the container to the first support body includes a second support body, The second support is a supported portion for conveyance that supports the bottom portion of the container from below. The bottom portion of the container is provided with three supported portions recessed upward, and the three supported portions are relative to the bottom portion. The reference positions are arranged radially. Viewed from the vertical direction, the direction between the reference position where the containers are arranged and the center of gravity of the containers is the front-rear direction, and the front-rear direction is relative to the reference position. The direction of the center of gravity of the container is set to the front, and the opposite direction is set to the rear. Two of the three supported parts are the front supported parts that are located in front of the center of gravity of the container. The three supported parts are The remaining one is the rear supported portion located behind the center of gravity of the container, and the first support is provided with a plate-shaped portion composed of a plate-shaped member formed in a plate shape, and is provided with The two front support parts, the aforementioned plate-shaped part, the notch part and the extension part, the two front support parts are engaged with the aforementioned two front supported parts from below to support the bottom of the container from below The plate-shaped portion is a part that supports the container from below and is located behind the center of gravity in the bottom portion, and the notch is formed in the container supported by the first support and is used for transport The portion where the supported portion overlaps in the vertical direction and allows the second support body to pass in the vertical direction, and the extension portion extends further forward than the front end of the container supported by the first support body, The extension portion has a restricting portion that overlaps with the container supported by the first support when viewed from the front-rear direction. Viewed from the vertical direction, the direction orthogonal to the front-rear direction is set as the width Direction, and one of the width directions is set as the first width direction, and the other direction of the width direction is set as the second width direction, the first support is provided with a first width extension and a second width extension Portion, the first width extension portion extends further toward the first width direction than the end portion in the first width direction of the container supported by the first support, and has the same width as that of the foregoing The container repeats the first width restriction portion, the second width extension portion extends in the second width direction than the end portion in the second width direction of the container supported by the first support, and has a The second width restricting portion that overlaps the container in the width direction, the restricting portion, the first width restricting portion, and the second width restricting portion are formed integrally with the plate-shaped portion, and each of the plates The end of the shaped member is bent upward to be formed. Such as the container support frame of claim 1, wherein the first width restriction portion and the second width restriction portion are formed It is the same height as the aforementioned restricting part. Such as the container support frame of claim 1, wherein the first support body is formed by the two front support parts and the plate-shaped part, so that the two front supported parts are located above the rear supported parts Tilt posture to support the aforementioned container. Such as the container support frame of claim 3, wherein, in a state where the first support body supports the container, when viewed from the front-rear direction, the front end portion of the bottom surface of the container overlaps the restricting portion. The container support frame according to any one of claims 1 to 4, wherein the first support body is a posture in which the front of the container supported by the first support body faces the movement space where the conveying device walks. Support the aforementioned container.

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