TWI639013B - Circuit board detection method - Google Patents
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Abstract
本發明關於一種「電路板檢測之對位方法」,一檢測裝置先取得一電路板之標準圖像樣本定義量測參數,經送入待測物,利用一影像擷取裝置取得一待測物之比對影像後,接著就該標準圖像樣本與該比對影像進行影像比對處理,即可找出對應於該標準圖像樣本之中心量測點的比對影像量測位置導入量測參數,藉以能進行電路板線寬或線距之正確量測,以解決習知二維方向運動定位偏差及待測物漲縮誤差等影像偏移問題。更且,本案之實施係在不須改變現有設備的前提下進行,可行性高且無成本增加。 The invention relates to a “parameter method for circuit board detection”. A detecting device first obtains a standard image sample defining measurement parameter of a circuit board, and sends the object to be tested, and obtains a sample to be tested by using an image capturing device. After comparing the images, the image comparison between the standard image sample and the comparison image is performed to find the comparison image measurement position introduction measurement corresponding to the central measurement point of the standard image sample. The parameters can be used to accurately measure the line width or line spacing of the board to solve the image shift problem such as the conventional two-dimensional motion positioning deviation and the object to be measured. Moreover, the implementation of this case is carried out without changing the existing equipment, and the feasibility is high and there is no cost increase.
Description
本發明「電路板檢測之對位方法」,關於一種利用影像擷取與比對處理方式,達到取得電路板正確量測位置之技術領域。 The "parallel method for circuit board detection" of the present invention relates to a technical field for obtaining a correct measurement position of a circuit board by using an image capture and comparison processing method.
基於電子業對於生產線品質的要求日漸嚴苛,品質檢測的正確性就顯得相當重要。印刷電路板是電子、通信、電腦及汽車電子等產品之主要零組件,為能符合市場上輕、薄、短、小之產品特性,現今印刷電路板之製造,多藉由盲埋孔將內部多層之佈線板與表面之佈線連接。印刷電路板製程在蝕刻、底片、雷射盲孔、電鍍……等工序中,皆須檢驗所完成之線、圓槽、圓或弧等成品之結果,以判斷製程的良莠,其判斷標準為檢視該完成圖形之梯型線寬的上底和下底寬度,及平均中值中心座標線寬與間距,因此對印刷電路板而言,無論是成品或半成品之線寬品質檢測工作就變的非常重要,特別是線寬、孔徑、間距等都需要進行量測及是否符合規格判讀。印刷電路板所謂線寬,指的是經蝕刻、電鍍等加工後的線、圓或弧之線寬,印刷電路板線寬其通常呈現一下寬上窄的梯型狀,然一般皆稱為梯型線寬。其線寬之要求係依客戶設計之規 定訂定之,如成品線寬超出設計規格時,往往會導致電子產品不穩定態致生當機停機。 Based on the increasingly stringent requirements of the electronics industry for the quality of the production line, the correctness of quality inspection is very important. Printed circuit boards are the main components of electronic, communication, computer and automotive electronics. In order to meet the market's light, thin, short and small product characteristics, today's printed circuit boards are manufactured with blind buried holes. The multilayer wiring board is connected to the wiring of the surface. In the process of etching, film, laser blind hole, electroplating, etc., the printed circuit board process must test the finished product, the result of the finished product such as the line, the circular groove, the circle or the arc, in order to judge the goodness of the process, and the judgment standard In order to check the width of the upper and lower bottoms of the ladder line width of the finished pattern, and the average median center coordinate line width and spacing, for the printed circuit board, the line width quality inspection work of the finished product or the semi-finished product becomes It is very important, especially the line width, aperture, spacing, etc. need to be measured and conform to the specifications. The so-called line width of a printed circuit board refers to the line width of a line, a circle or an arc after being processed by etching, electroplating, etc., and the line width of the printed circuit board is generally a ladder shape of a wide width and a narrow shape, and is generally called a ladder. Line width. The requirements for line width are based on customer design rules. If the finished product line width exceeds the design specifications, it will often cause the electronic product to be unstable and cause downtime.
習知執行量測電路板之線寬線距時,利用設置一量測裝置承載於一真空固定平臺,其於量測時固定不動,配合一視覺取像模組在待測物件上方移動,藉以擷取待測物件的整個線寬影像。然此種光學量測裝置經人力上料後,受測物件之對位方式係使用靠邊或固定銷方式先進行定位,再藉由量測系統中的攝像裝置擷取電路板上的對位靶標,進行計算重新求出零點位置與座標補償值完成後,再由一控制運算機構控制一運動機構,進行至少二維方向之運動位移,移動該固定於該運動機構上之視覺影像擷取裝置到達經對位靶標影像計算補償值之二維座標量測位置,使該影像擷取裝置能取得該被測物影像,最後經一影像處理裝置,根據所擷取之影像計算該被測物之線寬線距。但因由於現今隨著電子產品需求之快速進步,印刷電路板已趨輕薄短小,但功能則要求性能更穩定,故其製程技術的發展則越來越困難,如目前極受重視的覆晶(flip chip)、球形柵陣列(BGA)基板及手機等攜帶式產品之電路基板,皆已大量進入高密度(High Density Integration;HDI)基板製程,線寬要求已達20(micro),如此高之密度,使用上述傳統對位靶標的影像對位方式,因受測物電路板本身的線路會因影像轉移製程有所偏移,及電路板材料本身之尺寸變異,再加上二維座標運動機構之定位精度偏差,經常產生量測位置偏移導致使量測錯誤發生已無法達到上述需求需能準確量測需求。在線寬量測講究準確快速的趨勢下,如何擺脫傳統技藝之瓶頸,而能自動正確量測 位置,實乃業者苦思改善的課題。 When the line width and the line spacing of the measuring circuit board are performed, the measuring device is mounted on a vacuum fixed platform, which is fixed during the measurement, and is moved with the visual image capturing module over the object to be tested. Draw the entire line width image of the object to be tested. However, after the optical measuring device is manually loaded, the alignment method of the object to be tested is firstly positioned by using a side or fixed pin method, and then the alignment target on the circuit board is captured by the camera device in the measuring system. After the calculation is performed to obtain the zero point position and the coordinate compensation value is completed, a control mechanism is used to control a motion mechanism to perform at least two-dimensional motion displacement, and the visual image capturing device fixed to the motion mechanism is moved to arrive. Calculating the two-dimensional coordinate measurement position of the compensation value by the alignment target image, so that the image capturing device can obtain the image of the measured object, and finally calculating the line of the measured object according to the captured image by an image processing device Wide line spacing. However, due to the rapid advancement of electronic products, the printed circuit boards have become thinner and shorter, but the functions require more stable performance. Therefore, the development of process technology is becoming more and more difficult, such as the currently highly regarded flip chip ( Flip chip), ball grid array (BGA) substrates, and circuit boards for portable products such as mobile phones have all entered the high-density (HDI) substrate process, and the line width requirement has reached 20 (micro). Density, using the image alignment method of the above-mentioned conventional alignment target, because the circuit of the circuit board itself is offset by the image transfer process, and the size variation of the circuit board material itself, plus the two-dimensional coordinate motion mechanism The deviation of the positioning accuracy, often resulting in the measurement position shift, causes the measurement error to occur, and the above requirements cannot be accurately measured. Online wide-ranging measurement pays attention to the accurate and rapid trend, how to get rid of the bottleneck of traditional skills, and can automatically measure correctly The position is the subject of hard work and improvement.
發明人有鑑於此,遂特以研創成本案,期能藉本案之提出,俾改進現有量測技術之限制缺點,期使量測技術能臻致完善、理想與實用。 In view of this, the inventor has made it possible to improve the limitations and limitations of the existing measurement technology by making the cost of research and development, and to make the measurement technology perfect, ideal and practical.
為解決上述習知方式存有二維方向運動定位偏差及待測物漲縮誤差等影像偏移問題,本發明「電路板檢測之對位方法」,其主要目的在於:提供一種創新的量測方法,該檢測裝置係先取得一電路板之標準圖像樣本定義量測參數,該標準圖像樣本可包含多條線寬或其他足供影像比對找出位置之圖像,然後在標準圖像樣本中定義要量測之線寬、線距位置的參數如線寬、線距、線長及角度等,經送入待測物,利用一影像擷取裝置取得一待測物之比對影像後,接著就該標準圖像樣本與該比對影像進行影像比對處理,即可找出對應於該標準圖像樣本之中心量測點的比對影像量測位置導入量測參數,藉以能進行電路板線寬或線距之正確量測的;藉此,能有效改善習知二維方向運動定位偏差及待測物漲縮誤差等影像偏移問題。 In order to solve the above-mentioned conventional methods, there are image shift problems such as two-dimensional motion positioning deviation and object torsion error, and the main purpose of the present invention is to provide an innovative measurement method. In the method, the detecting device first obtains a standard image sample definition measurement parameter of a circuit board, and the standard image sample may include multiple line widths or other images for the image alignment to find the position, and then in the standard image. For example, the parameters such as line width, line spacing, line length and angle defined in the sample, such as line width, line spacing, line length and angle, are sent to the object to be tested, and an image capturing device is used to obtain a comparison of the objects to be tested. After the image is imaged, the standard image sample and the comparison image are subjected to image comparison processing, so that the comparison image measurement position introduction measurement parameter corresponding to the central measurement point of the standard image sample can be found, thereby It can accurately measure the line width or line spacing of the board; thereby, it can effectively improve the image shift problem such as the conventional two-dimensional motion positioning deviation and the object to be measured.
本發明「電路板檢測之對位方法」,其次要目的在於:提供一種新方法,能在不須改變現有設備的前提下進行,可行性高,不需修改或重新設計與製造新設備,無成本增加問題,以獲致能快速導入實施之目的。 The second object of the present invention is to provide a new method which can be carried out without changing the existing equipment, and has high feasibility, no need to modify or redesign and manufacture new equipment, no The problem of cost increase is to achieve the purpose of rapid introduction and implementation.
為達上述目的,本發明具體之內容包括下述步驟:步驟一:取得一電路板之標準圖像樣本定義量測參數,該 標準圖像樣本可包含多條線寬或其他足供影像比對找出位置之圖像,然後在標準圖像樣本中定義要量測之線寬、線距位置的參數如線寬、線距、線長及角度等;步驟二:利用一影像擷取裝置取得一待測物之比對影像;步驟三:就該標準圖像樣本與該比對影像進行影像比對處理;步驟四:找出對應於該標準圖像樣本之中心量測點的比對影像量測位置導入量測參數;步驟五:進行量測。 To achieve the above objective, the specific content of the present invention includes the following steps: Step 1: Obtain a standard image sample definition measurement parameter of a circuit board, The standard image sample can include multiple line widths or other images for the image to find the position, and then define the parameters of the line width and line position to be measured in the standard image sample, such as line width and line spacing. , line length and angle, etc.; Step 2: using an image capturing device to obtain a comparison image of the object to be tested; Step 3: performing image comparison processing on the standard image sample and the comparison image; Step 4: Looking for A comparison measurement parameter is input to the comparison image measurement position corresponding to the central measurement point of the standard image sample; and step 5: performing measurement.
所述該步驟一之取得一電路板之標準圖像樣本,該標準圖像樣本係由影像擷取裝置預先擷取一標準電路板之影像,或直接先由電腦資料(GERBER)製成;該標準圖像樣本並以量測位置為標準圖像樣本之中心量測點。 The step 1 is to obtain a standard image sample of a circuit board, wherein the standard image sample is pre-captured by an image capturing device or directly by computer data (GERBER); The standard image sample is measured at the center of the standard image sample.
所述該步驟二之影像擷取裝置,係能用以擷取一位於運動機構上之待測物影像;該運動機構,能用以進行至少二維方向之運動,運動該固定於該運動機構上的影像擷取裝置到設定的二維座標量測位置,使該影像擷取裝置取得該位置之被測物影像。 The image capturing device of the second step can be used to capture an image of the object to be tested on the moving mechanism; the moving mechanism can be used to perform at least two-dimensional motion, and the motion is fixed to the motion mechanism. The upper image capturing device reaches the set two-dimensional coordinate measuring position, so that the image capturing device obtains the image of the object to be tested at the position.
更具體來說,本案方法之細部流程,更依序包括:上料、定位、CCD標準對位靶標定位、靠邊、定位PIN、進行二維運動、進行影像比對、取得量測位置最後進行量測。 More specifically, the detailed process of the method of the present method includes, in order, loading, positioning, CCD standard alignment target positioning, edge-to-edge, positioning PIN, performing two-dimensional motion, performing image comparison, and obtaining the final position of the measurement position. Measurement.
本發明具體的功效在於:能在完全不需修改既有設備的前提下實施,且能完全解決習知二維方向運動定位偏差及待測物漲縮誤差等影像偏移問題。 The specific effect of the invention is that it can be implemented without modifying the existing equipment at all, and can completely solve the image shift problem such as the conventional two-dimensional motion positioning deviation and the object to be measured.
11‧‧‧取得一電路板之標準圖像樣本定義量測參數 11‧‧‧Get a standard image sample definition measurement parameter for a board
12‧‧‧利用一影像擷取裝置取得一待測物之比對影像 12‧‧‧Using an image capture device to obtain a comparison image of a test object
13‧‧‧就該標準圖像樣本與該比對影像進行影像比對處理 13‧‧‧Image comparison between the standard image sample and the comparison image
14‧‧‧找出對應於該標準圖像樣本之中心量測點的比對影像量測位置導入量測參數 14‧‧‧ Find the comparison image measurement position introduction measurement parameter corresponding to the central measurement point of the standard image sample
15‧‧‧進行量測 15‧‧‧Measurement
21‧‧‧上料 21‧‧‧Feeding
22‧‧‧定位 22‧‧‧ Positioning
23‧‧‧CCD標準對位靶標定位 23‧‧‧CCD standard alignment target positioning
24‧‧‧靠邊 24‧‧‧
25‧‧‧定位PIN 25‧‧‧Target PIN
26‧‧‧二維運動 26‧‧‧Two-dimensional movement
27‧‧‧影像比對 27‧‧‧Image comparison
28‧‧‧取得量測位置 28‧‧‧Get the measurement position
29‧‧‧進行量測 29‧‧‧Measurement
3‧‧‧電路板 3‧‧‧Circuit board
31‧‧‧線路 31‧‧‧ lines
32‧‧‧線距 32‧‧‧ line spacing
4‧‧‧比對影像 4‧‧‧Comparative images
第一圖:係為本發明特徵之流程方塊圖。 The first figure is a block diagram of the process of the present invention.
第二圖:係為本發明實施之流程方塊圖。 The second figure is a block diagram of the process of the present invention.
第三圖:係為本發明實施時電路板之比對影像範圍示意圖。 The third figure is a schematic diagram of the ratio of the image area of the circuit board when the invention is implemented.
第四圖:係為本發明實施時電路板之比對影像範圍另一示意圖。 The fourth figure is another schematic diagram of the comparison image range of the circuit board when the invention is implemented.
第五圖:係為本發明實施時電路板之比對影像範圍又一示意圖。 The fifth figure is another schematic diagram of the ratio of the image of the circuit board when the invention is implemented.
茲謹就本發明「電路板檢測之對位方法」之結構組成,及其所產生之功效,配合圖式,舉一本案之較佳實施例詳細說明如下:首請參閱第一圖所示,本案「電路板檢測之對位方法」,具體內容包括下述步驟:步驟一:取得一電路板之標準圖像樣本定義量測參數11,係在定義要量測之線寬、線距位置的參數如線寬、線距、線長及角度等;步驟二:利用一影像擷取裝置取得一待測物之比對影像12;步驟三:就該標準圖像樣本與該比對影像進行影像比對處理13;步驟四:找出對應於該標準圖像樣本之中心量測點的比對影像量測位置導入量測參數14,係在導入要量測之線寬、線距位置的參數如線寬、線距、線長及角度等; 步驟五:進行量測15。 The structure of the "parameter method for circuit board detection" of the present invention, and the effect thereof, together with the drawings, a preferred embodiment of the present invention is described in detail as follows: First, please refer to the first figure, In the present case, the "parameter method for circuit board detection" includes the following steps: Step 1: Obtain a standard image sample definition measurement parameter 11 of a circuit board, which defines the line width and line spacing position to be measured. Parameters such as line width, line spacing, line length and angle; step 2: using an image capture device to obtain a comparison image of the object to be tested 12; step 3: image the standard image sample and the comparison image Alignment processing 13; Step 4: Finding the comparison image measurement position introduction measurement parameter 14 corresponding to the central measurement point of the standard image sample, and introducing the parameter of the line width and the line distance position to be measured Such as line width, line spacing, line length and angle; Step 5: Perform measurement 15.
前述該步驟一之取得一電路板之標準圖像樣本,該標準圖像樣本係由影像擷取裝置預先擷取一標準電路板之影像,或直接先由電腦資料(GERBER)製成;該標準圖像樣本並以量測位置為標準圖像樣本之中心量測點。 The first step of the first step is to obtain a standard image sample of the circuit board, wherein the standard image sample is pre-captured by the image capturing device to obtain a standard circuit board image, or directly by computer data (GERBER); The image sample is measured at the center of the standard image sample.
前述該步驟二之影像擷取裝置,係能用以擷取一位於運動機構上之待測物影像;該運動機構,能用以進行至少二維方向之運動,運動該固定於該運動機構上的影像擷取裝置到設定的二維座標量測位置,使該影像擷取裝置取得該位置之被測物影像。 The image capturing device of the second step can be used to capture an image of the object to be tested on the moving mechanism; the moving mechanism can be used to perform at least two-dimensional movement, and the movement is fixed on the moving mechanism. The image capturing device reaches the set two-dimensional coordinate measuring position, so that the image capturing device obtains the image of the object to be tested at the position.
如第二圖,係本案方法之細部流程,更依序包括:上料21、定位22、CCD標準對位靶標定位23、靠邊24、定位PIN25、進行二維運動26、進行影像比對27、取得量測位置28最後進行量測29。 As shown in the second figure, the detailed process of the method of the present method includes: feeding 21, positioning 22, CCD standard alignment target positioning 23, edge 24, positioning PIN 25, performing two-dimensional motion 26, performing image comparison 27 The measurement position 28 is taken and finally measured 29 .
由於本案進行量測時主要僅是利用影像比對方式獲得中心量測點,並非像傳統方式以移動運動機構達到令中心量測點到達預設所要的中心處,因此不會有運動定位偏差的缺點,也與待測物漲縮誤差無涉,極為理想。 Since the measurement in this case is mainly to obtain the center measurement point by means of image comparison, it is not the traditional way to move the motion mechanism to reach the center of the preset measurement point, so there is no motion deviation. The shortcomings are also irrelevant to the error of the test object, which is extremely ideal.
第三圖到第五圖,係在揭示該電路板3上包括有複數線路31,各線路31間存有線距32,本案利用擷取得到該比對影像4,再與標準圖像樣本進行比對,經找出對應於該標準圖像樣本之中心量測點的比對影像量測位置,即能進行量測,不用再就電路板進行二維運動至特定歸零位置,可有效提高效率與精確度。 The third to fifth figures show that the circuit board 3 includes a plurality of lines 31, and each line 31 has a line spacing of 32. In this case, the comparison image 4 is obtained by using the 撷, and then compared with the standard image sample. For example, by finding the comparison image measurement position corresponding to the central measurement point of the standard image sample, the measurement can be performed, and the two-dimensional movement of the circuit board to the specific zero position can be performed, thereby effectively improving the efficiency. With precision.
綜上所述,本發明「電路板檢測之對位方法」,依現行專利法規定,未有不能取得專利之情事;本案在產 業上確實得以利用,於申請前未曾見於刊物或公開使用,且非為公眾所知悉之技術。再者,本案有效解決先前技術中長期存在的問題並達成相關使用者與消費者長期的需求,得佐證本發明並非能輕易完成。本案完全符合專利法規定之「產業利用性」、「新穎性」與「進步性」等要件,爰依法提請專利,懇請 鈞局詳查,並儘早為准予專利之審定,以保護申請人之智慧財產權,俾勵創新。 In summary, the "parallel method for circuit board detection" of the present invention, according to the provisions of the current patent law, has not been able to obtain a patent; the case is in production It has indeed been used in the industry, and has not been seen in publications or publicly used before the application, and is not a technology known to the public. Furthermore, the present invention effectively solves the long-standing problems in the prior art and achieves long-term needs of related users and consumers, and it is corroborated that the present invention is not easily accomplished. The case is in full compliance with the requirements of "industry useability", "novelty" and "progressiveness" as stipulated in the Patent Law. The patents are submitted in accordance with the law, and the Bureau is invited to conduct a detailed investigation and to approve the patent as soon as possible to protect the wisdom of the applicant. Property rights, encourage innovation.
本發明雖藉由前述實施例來描述,但仍可變化其形態與細節,於不脫離本發明之精神而達成,並由熟悉此項技藝之人士可了解。前述本案之較佳實施例,僅係藉本案原理可以具體實施的方式之一,但並不以此為限制,應依後附之申請專利範圍所界定為準。 The present invention has been described by way of example only, and it is to be understood by those skilled in the art. The preferred embodiment of the present invention is only one of the ways in which the present invention can be implemented in a specific manner, but is not limited thereto, and should be defined in the scope of the appended patent application.
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| CN110906867A (en) * | 2019-11-29 | 2020-03-24 | 苏州精濑光电有限公司 | Line width measuring method and line width measuring machine |
| CN111106054A (en) * | 2019-12-05 | 2020-05-05 | 福建省福联集成电路有限公司 | Method for prejudging wafer calibration value and storage medium |
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| CN113507831B (en) * | 2021-07-14 | 2022-09-16 | 昆山联滔电子有限公司 | Circuit board mounting system and circuit board mounting control method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110906867A (en) * | 2019-11-29 | 2020-03-24 | 苏州精濑光电有限公司 | Line width measuring method and line width measuring machine |
| CN111106054A (en) * | 2019-12-05 | 2020-05-05 | 福建省福联集成电路有限公司 | Method for prejudging wafer calibration value and storage medium |
| CN111106054B (en) * | 2019-12-05 | 2022-08-12 | 福建省福联集成电路有限公司 | A method and storage medium for predicting wafer calibration value |
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