TWI629547B - Liquid crystal display device and method of manufacturing same - Google Patents
Liquid crystal display device and method of manufacturing same Download PDFInfo
- Publication number
- TWI629547B TWI629547B TW101143149A TW101143149A TWI629547B TW I629547 B TWI629547 B TW I629547B TW 101143149 A TW101143149 A TW 101143149A TW 101143149 A TW101143149 A TW 101143149A TW I629547 B TWI629547 B TW I629547B
- Authority
- TW
- Taiwan
- Prior art keywords
- gate
- lines
- metal
- virtual
- discharge circuit
- Prior art date
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 45
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 229910052751 metal Inorganic materials 0.000 claims abstract description 174
- 239000002184 metal Substances 0.000 claims abstract description 174
- 150000002739 metals Chemical class 0.000 claims abstract description 26
- 239000010409 thin film Substances 0.000 claims description 27
- 239000000463 material Substances 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 9
- 230000007123 defense Effects 0.000 claims description 2
- 230000006378 damage Effects 0.000 abstract description 16
- 230000035939 shock Effects 0.000 abstract description 14
- 230000005611 electricity Effects 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 18
- 230000001681 protective effect Effects 0.000 description 10
- 239000003990 capacitor Substances 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 229910004205 SiNX Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium dioxide Chemical compound O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229940119177 germanium dioxide Drugs 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136204—Arrangements to prevent high voltage or static electricity failures
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13458—Terminal pads
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
一種減少由靜電放電衝擊導致的訊號線與切換裝置損壞的液晶顯示裝置及其製造方法。該液晶顯示裝置包括複數個像素,由複數條閘極線與複數條資料線之間的交叉點界定;複數個虛擬像素,沿著該等像素的四周設置;複數條共同線,與該等閘極線平行設置,該等共同線連接至該等像素及該等虛擬像素;第一閘極金屬,接收外部共同電壓;複數個第二閘極金屬,從該等共同線向一側延伸,該等第二閘極金屬具有墊狀物形狀;源極-汲極金屬,設置在與該等資料線平行的方向上,且位於該等第二閘極金屬的一側;第一連接圖案,電性連接該第一閘極金屬與該源極-汲極金屬;以及第二連接圖案,電性連接該源極-汲極金屬與該等第二閘極金屬。 A liquid crystal display device for reducing damage of a signal line and a switching device caused by an electrostatic discharge shock and a method of manufacturing the same. The liquid crystal display device includes a plurality of pixels defined by intersections between a plurality of gate lines and a plurality of data lines; a plurality of virtual pixels disposed along the circumference of the pixels; a plurality of common lines, and the gates The pole lines are arranged in parallel, the common lines are connected to the pixels and the dummy pixels; the first gate metal receives an external common voltage; and the plurality of second gate metals extend from the common lines to one side, the The second gate metal has a pad shape; the source-drain metal is disposed in a direction parallel to the data lines and is located on one side of the second gate metal; the first connection pattern, the electricity The first gate metal and the source-drain metal are connected to each other; and the second connection pattern is electrically connected to the source-drain metal and the second gate metal.
Description
本發明涉及一種液晶顯示裝置,尤其是,涉及一種得以減少由於靜電放電衝擊導致的訊號線與切換裝置損壞的液晶顯示裝置以及製造該裝置的方法。 The present invention relates to a liquid crystal display device, and more particularly to a liquid crystal display device capable of reducing damage of a signal line and a switching device due to an electrostatic discharge shock and a method of manufacturing the same.
通常,為了防止靜電放電(electrostatic discharge,ESD)引入到像素中,液晶顯示裝置包含設置在不顯示影像的非顯示區中的防靜電放電電路。該防靜電放電電路設置在閘極線的引入部分中,以將掃描訊號施加到像素,以及設置在資料線的引入部分中,以將資料電壓施加到像素。這種防靜電放電電路將引入到資料線與閘極線中的靜電放電傳導至共同線,並且引入到共同線中的靜電放電流向閘極線或資料線。 Generally, in order to prevent electrostatic discharge (ESD) from being introduced into a pixel, the liquid crystal display device includes an antistatic discharge circuit disposed in a non-display area where no image is displayed. The antistatic discharge circuit is disposed in the lead-in portion of the gate line to apply a scan signal to the pixel, and is disposed in the lead-in portion of the data line to apply a data voltage to the pixel. This antistatic discharge circuit conducts the electrostatic discharge introduced into the data line and the gate line to the common line, and the electrostatic discharge current introduced into the common line is directed to the gate line or the data line.
同時,近年來,依據向著高解析度與增大尺寸的趨勢,液晶顯示裝置被設計成具有更小寬度的閘極線與資料線以及更小尺寸的切換裝置。這些行為意味著閘極線與資料線以及切換裝置變得更加容易受到靜電放電衝擊的破壞。因此,需要能夠更加有效地保護像素中的閘極線與資料線以及切換裝置免受靜電放電衝擊的技術。 Meanwhile, in recent years, according to the trend toward high resolution and size increase, the liquid crystal display device is designed to have a gate electrode and a data line of a smaller width and a switching device of a smaller size. These behaviors mean that the gate line and the data line and the switching device become more susceptible to damage from electrostatic discharge shocks. Therefore, there is a need for a technique capable of more effectively protecting gate lines and data lines in a pixel and switching devices from electrostatic discharge.
據此,本發明是針對一種實質上消除了由於先前技術的限制與缺點而造成的一個或多個問題的液晶顯示裝置以及製造該裝置的方法。 Accordingly, the present invention is directed to a liquid crystal display device and a method of fabricating the same that substantially obviate one or more problems due to the limitations and disadvantages of the prior art.
本發明的一個目的是提供一種液晶顯示裝置以及製造該裝置的方法,以便減少由於靜電放電衝擊造成的訊號線與切換裝置的損壞。 SUMMARY OF THE INVENTION An object of the present invention is to provide a liquid crystal display device and a method of fabricating the same in order to reduce damage of a signal line and a switching device due to an electrostatic discharge shock.
本發明的其他優點、目的以及特徵將在下面的描述中部分地闡明,並且部分其他優點、目的以及特徵在以下考查的基礎上對本領域技術人員而言將變得顯而易見,或者可以從本發明的實踐中領會到。除了所 附圖式之外,還可以通過文字描述及本文的申請專利範圍中特別指出的結構意識到並獲得本發明的目的與其他優點。 Other advantages, objects, and features of the invention will be set forth in part in the description in the description which I understand it in practice. Except In addition, the objects and other advantages of the invention will be realized and attained by the <RTIgt;
為了達到上述目的與其他優點,依據如本文中體現並概括描述的本發明的目的,一種液晶顯示裝置包括:複數個像素,由複數條閘極線與複數條資料線之間的交叉點界定;複數個虛擬像素,沿著該等像素的四周設置;複數條共同線,與該等閘極線平行地設置,該等共同線連接至該等像素及該等虛擬像素;一第一閘極金屬,用來接收一外部共同電壓;複數個第二閘極金屬,從該等共同線向一側延伸,該等第二閘極金屬具有墊狀物形狀;一源極-汲極金屬,設置在與該等資料線平行的方向上,且位於該等第二閘極金屬的一側;一第一連接圖案,用來電性連接該第一閘極金屬與該源極-汲極金屬;以及一第二連接圖案,用來電性連接該源極-汲極金屬與該等第二閘極金屬。 In order to achieve the above objects and other advantages, in accordance with the purpose of the present invention as embodied and broadly described herein, a liquid crystal display device includes: a plurality of pixels defined by intersections between a plurality of gate lines and a plurality of data lines; a plurality of virtual pixels disposed along the circumference of the pixels; a plurality of common lines disposed in parallel with the gate lines, the common lines being connected to the pixels and the dummy pixels; a first gate metal And for receiving an external common voltage; a plurality of second gate metals extending from the common lines to one side, the second gate metals having a pad shape; and a source-drain metal disposed at a direction parallel to the data lines and located on one side of the second gate metal; a first connection pattern for electrically connecting the first gate metal and the source-drain metal; a second connection pattern is used to electrically connect the source-drain metal and the second gate metal.
該液晶顯示裝置可進一步包括:複數個第三閘極金屬,從該等共同線向另一側延伸,該等第三閘極金屬具有一墊狀物形狀;以及一第三連接圖案,用來電性連接該第一閘極金屬與該等第三閘極金屬。 The liquid crystal display device may further include: a plurality of third gate metals extending from the common lines to the other side, the third gate metals having a pad shape; and a third connection pattern for electrically The first gate metal and the third gate metal are connected.
該等第一至第三閘極金屬與該等共同線可由處於同一層中之與該等閘極線相同的材料形成。 The first to third gate metals and the common lines may be formed of the same material in the same layer as the gate lines.
該源極-汲極金屬可由處於同一層中之與該等資料線相同的材料形成。 The source-drain metal can be formed of the same material in the same layer as the data lines.
該等第一至第三連接圖案可由處於同一層中之與設置在該等像素中的像素電極相同的材料形成。 The first to third connection patterns may be formed of the same material in the same layer as the pixel electrodes disposed in the pixels.
該液晶顯示裝置可進一步包括:一虛擬資料線,平行於該等資料線而形成,以便相鄰於第一條以及最後一條資料線;一虛擬共同線,在與該等閘極線平行的方向上從所述第一閘極金屬中分支出來,該虛擬共同線橫貫該等資料線以及該虛擬資料線;一第一防靜電放電電路,介於該等資料線與該虛擬共同線之間,該第一防靜電放電電路連接至該等資料線以及該虛擬共同線;一第二防靜電放電電路,介於該虛擬共同線與該第一閘極金屬之間,該第二防靜電放電電路連接至該虛擬共同線以及該第一閘極金屬;以及一第三防靜電放電電路,介於該虛擬資料線與該虛擬共同線之間,該第三防靜電放電電路連接至該虛擬資料線以及該虛擬共同線,其 中該虛擬資料線設置在該第二防靜電放電電路與該第三防靜電放電電路之間。 The liquid crystal display device may further include: a virtual data line formed parallel to the data lines so as to be adjacent to the first and last data lines; and a virtual common line in a direction parallel to the gate lines Branching from the first gate metal, the virtual common line traversing the data lines and the virtual data line; a first anti-static discharge circuit between the data lines and the virtual common line The first antistatic discharge circuit is connected to the data lines and the virtual common line; a second antistatic discharge circuit is interposed between the virtual common line and the first gate metal, and the second antistatic discharge circuit Connecting to the virtual common line and the first gate metal; and a third antistatic discharge circuit between the virtual data line and the virtual common line, the third antistatic discharge circuit is connected to the virtual data line And the virtual common line, The virtual data line is disposed between the second antistatic discharge circuit and the third antistatic discharge circuit.
該液晶顯示裝置可進一步包括:一第四防靜電放電電路,介於該等閘極線與該源極-汲極金屬之間,該第四防靜電放電電路連接至該等閘極線以及該源極-汲極金屬。 The liquid crystal display device may further include: a fourth antistatic discharge circuit between the gate lines and the source-drain metal, the fourth antistatic discharge circuit being connected to the gate lines and the Source - bungee metal.
本發明另一方面,一種製造液晶顯示裝置的方法包括:在一基板上形成彼此相交的複數條閘極線與複數條資料線,以界定複數個像素區;在該等像素區中形成複數個像素,每個像素包括一薄膜電晶體與一像素電極;沿著該等像素的四周形成複數個虛擬像素;形成複數條與該等閘極線平行設置且與該等像素及該等虛擬像素連接的共同線,以及複數個從該等共同線向一側延伸且具有一墊狀物形狀的第二閘極金屬;形成一電性連接至一墊狀物單元的第一閘極金屬,以接收一外部共同電壓;形成一源極-汲極金屬,該源極-汲極金屬設置在與該等資料線平行的方向上,且位於該等第二閘極金屬的一側;以及形成一用於電性連接該第一閘極金屬與該源極-汲極金屬的第一連接圖案以及一用於電性連接該源極-汲極金屬與該等第二閘極金屬的第二連接圖案。 In another aspect of the invention, a method of fabricating a liquid crystal display device includes: forming a plurality of gate lines and a plurality of data lines intersecting each other on a substrate to define a plurality of pixel regions; forming a plurality of pixel regions in the pixel regions a pixel, each of which includes a thin film transistor and a pixel electrode; a plurality of dummy pixels are formed along the periphery of the pixels; a plurality of pixels are formed in parallel with the gate lines and connected to the pixels and the dummy pixels a common line, and a plurality of second gate metals extending from one side of the common line and having a pad shape; forming a first gate metal electrically connected to a pad unit for receiving An external common voltage; forming a source-drain metal, the source-drain metal being disposed in a direction parallel to the data lines and located on one side of the second gate metal; and forming a a first connection pattern electrically connecting the first gate metal and the source-drain metal and a second connection pattern for electrically connecting the source-drain metal and the second gate metal .
該方法可進一步包括:形成複數個從該等共同線向另一側延伸且具有墊狀物形狀的第三閘極金屬;以及形成一用於電性連接該第一閘極金屬與該等第三閘極金屬的第三連接圖案。 The method may further include: forming a plurality of third gate metals extending from the common lines to the other side and having a pad shape; and forming a first connection for electrically connecting the first gate metal and the first The third connection pattern of the three gate metal.
該等第一至第三閘極金屬與該等共同線可由處於同一層中之與該等閘極線相同的材料形成。 The first to third gate metals and the common lines may be formed of the same material in the same layer as the gate lines.
該源極-汲極金屬可由處於同一層中之與該等資料線相同的材料形成。 The source-drain metal can be formed of the same material in the same layer as the data lines.
該等第一至第三連接圖案可由處於同一層中之與該像素電極相同的材料形成。 The first to third connection patterns may be formed of the same material as the pixel electrode in the same layer.
該方法可進一步包括:形成一平行於該等資料線的虛擬資料線,使得該虛擬資料線相鄰於第一條以及最後一條資料線;形成一虛擬共同線,使得該虛擬共同線在與該等閘極線平行的方向上從所述第一閘極金屬中分支出來,並且該虛擬共同線橫貫該等資料線以及該虛擬資料線;形成一第一防靜電放電電路,使得該第一防靜電放電電路介於該等資料線與 該虛擬共同線之間,並且連接至該等資料線以及該虛擬共同線;形成一第二防靜電放電電路,使得該第二防靜電放電電路介於該虛擬共同線與該第一閘極金屬之間,並且連接至該虛擬共同線以及該第一閘極金屬;以及形成一第三防靜電放電電路,使得該第三防靜電放電電路介於該虛擬資料線與該虛擬共同線之間,並且連接至該虛擬資料線與該虛擬共同線,其中該虛擬資料線設置在該第二防靜電放電電路與該第三防靜電放電電路之間。 The method may further include: forming a virtual data line parallel to the data lines such that the virtual data lines are adjacent to the first and last data lines; forming a virtual common line such that the virtual common line is The first gate metal is branched from the first gate metal in a direction parallel to the gate line, and the virtual common line traverses the data lines and the dummy data line; forming a first antistatic discharge circuit, so that the first defense The electrostatic discharge circuit is between the data lines and Between the virtual common lines, and connected to the data lines and the virtual common line; forming a second anti-static discharge circuit, such that the second anti-static discharge circuit is interposed between the virtual common line and the first gate metal And connecting to the virtual common line and the first gate metal; and forming a third anti-static discharge circuit, such that the third anti-static discharge circuit is between the virtual data line and the virtual common line, And connecting to the virtual data line and the virtual common line, wherein the virtual data line is disposed between the second antistatic discharge circuit and the third antistatic discharge circuit.
該方法可進一步包括:形成一第四防靜電放電電路,使得該第四防靜電放電電路設置在該等閘極線與該源極-汲極金屬之間,並且連接至該等閘極線以及該源極-汲極金屬。 The method may further include: forming a fourth antistatic discharge circuit such that the fourth antistatic discharge circuit is disposed between the gate lines and the source-drain metal, and is connected to the gate lines and The source - bungee metal.
該等第一至第四防靜電放電電路可與設置在該像素區中的該薄膜電晶體同時形成。 The first to fourth anti-electrostatic discharge circuits may be formed simultaneously with the thin film transistor disposed in the pixel region.
將要理解的是,本發明前面的概括描述與下面的詳細描述均是示範性與說明性的,是意圖提供主張的發明的進一步解釋。 The foregoing description of the preferred embodiments of the invention,
2‧‧‧液晶面板 2‧‧‧LCD panel
4‧‧‧閘極驅動器 4‧‧‧ gate driver
6‧‧‧資料驅動器 6‧‧‧Data Drive
8‧‧‧共同電壓供應裝置 8‧‧‧Common voltage supply device
10‧‧‧第一閘極金屬 10‧‧‧First Gate Metal
12‧‧‧第二閘極金屬 12‧‧‧Second gate metal
14‧‧‧第三閘極金屬 14‧‧‧ Third Gate Metal
16‧‧‧源極-汲極金屬 16‧‧‧Source-bungee metal
18‧‧‧第一連接圖案 18‧‧‧First connection pattern
20‧‧‧第二連接圖案 20‧‧‧Second connection pattern
22‧‧‧第三連接圖案 22‧‧‧ Third connection pattern
24a‧‧‧第一防靜電放電電路 24a‧‧‧First anti-static discharge circuit
24b‧‧‧第二防靜電放電電路 24b‧‧‧Second anti-static discharge circuit
24c‧‧‧第三防靜電放電電路 24c‧‧‧ Third anti-static discharge circuit
24d‧‧‧第四防靜電放電電路 24d‧‧‧fourth anti-static discharge circuit
26‧‧‧閘極電極 26‧‧‧gate electrode
28‧‧‧半導體層 28‧‧‧Semiconductor layer
30‧‧‧源極電極 30‧‧‧Source electrode
32‧‧‧汲極電極 32‧‧‧汲electrode
34‧‧‧歐姆接觸層 34‧‧‧Ohm contact layer
36‧‧‧像素電極 36‧‧‧pixel electrode
50‧‧‧基板 50‧‧‧Substrate
60‧‧‧閘極絕緣膜 60‧‧‧gate insulating film
70‧‧‧保護膜 70‧‧‧Protective film
AA‧‧‧顯示區 AA‧‧‧ display area
Clc‧‧‧液晶電容器 Clc‧‧ liquid crystal capacitor
CL‧‧‧共同線 CL‧‧‧Common line
Cst‧‧‧儲存電容器 Cst‧‧‧ storage capacitor
DA‧‧‧虛擬區 DA‧‧‧Virtual Zone
DCL‧‧‧虛擬共同線 DCL‧‧‧Virtual Common Line
DDL‧‧‧虛擬資料線 DDL‧‧‧virtual data line
DL‧‧‧資料線 DL‧‧‧ data line
DP1‧‧‧虛擬像素 DP1‧‧‧ virtual pixels
DP2‧‧‧虛擬像素 DP2‧‧‧ virtual pixels
GL‧‧‧閘極線 GL‧‧‧ gate line
H1‧‧‧第一接觸孔 H1‧‧‧first contact hole
H2‧‧‧第二接觸孔 H2‧‧‧second contact hole
H3‧‧‧第三接觸孔 H3‧‧‧ third contact hole
H4‧‧‧第四接觸孔 H4‧‧‧4th contact hole
H5‧‧‧第五接觸孔 H5‧‧‧ fifth contact hole
H6‧‧‧第六接觸孔 H6‧‧‧ sixth contact hole
P‧‧‧像素 P‧‧ ‧ pixels
TFT‧‧‧薄膜電晶體 TFT‧‧‧thin film transistor
Vcom‧‧‧共同電壓 Vcom‧‧‧Common voltage
所附圖式被包括是為了提供本發明的進一步理解,納入到本文中並構成了本申請的一部分,舉例說明本發明的實施例,同時與說明書一同為解釋本發明的原理。在圖式中:第1圖為舉例說明依據本發明一實施例的液晶顯示裝置的配置圖;第2圖為舉例說明第1圖中所示之液晶面板2的區域A的放大圖;第3圖為舉例說明第1圖中所示之液晶面板的區域B的放大圖;第4圖為舉例說明本發明效果的比較示例;第5圖舉例說明靜電放電衝擊集中於具體共同線中導致資料線損壞的示例;以及第6圖為舉例說明包含在像素區中之薄膜電晶體TFT的示意性截面圖以及沿著第2圖中所示之TFT的X-Y線的截面圖。 The accompanying drawings are included to provide a further understanding of the embodiments of the invention. In the drawings: Fig. 1 is a configuration diagram illustrating a liquid crystal display device according to an embodiment of the present invention; and Fig. 2 is an enlarged view illustrating a region A of the liquid crystal panel 2 shown in Fig. 1; The figure is an enlarged view illustrating a region B of the liquid crystal panel shown in Fig. 1; Fig. 4 is a comparative example illustrating the effect of the present invention; and Fig. 5 illustrates that the electrostatic discharge shock is concentrated in a specific common line to cause a data line An example of damage; and FIG. 6 is a schematic cross-sectional view illustrating a thin film transistor TFT included in a pixel region and a cross-sectional view along the XY line of the TFT shown in FIG. 2.
現在將詳細參考本發明的較佳實施例,其示例由所附圖式舉例說明。只要可能,在圖示中同樣的參考號碼將始終用來表示相同或類似的部分。 Reference will now be made in detail to the preferred embodiments of the invention Wherever possible, the same reference numbers will be used in the drawings
下文中,將參考所附圖式詳細地描述依據本發明一實施例的液晶顯示裝置以及製造該裝置的方法。 Hereinafter, a liquid crystal display device and a method of fabricating the same according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.
第1圖為舉例說明依據本發明一實施例之液晶顯示裝置的配置圖。 Fig. 1 is a configuration diagram illustrating a liquid crystal display device according to an embodiment of the present invention.
第1圖中所示的液晶顯示裝置包括液晶面板2、閘極驅動器4、資料驅動器6以及共同電壓供應裝置8。 The liquid crystal display device shown in FIG. 1 includes a liquid crystal panel 2, a gate driver 4, a data driver 6, and a common voltage supply device 8.
液晶面板2界定顯示區AA以及虛擬區DA,在該顯示區AA中顯示影像,該虛擬區DA為顯示區AA的外部區域。 The liquid crystal panel 2 defines a display area AA and a virtual area DA in which an image is displayed, the virtual area DA being an outer area of the display area AA.
排列成矩陣形式的複數個像素P設置在顯示區AA中。該等像素P被設置在複數個像素區中。該等像素區由複數條閘極線GL與複數條資料線DL之間的交叉點界定。每個像素P包括薄膜電晶體TFT、液晶電容器Clc以及儲存電容器Cst。該液晶電容器Clc依據電場來驅動液晶,該電場是由通過薄膜電晶體TFT施加至像素電極的資料電壓與通過共同線CL施加至公共電極的共同電壓Vcom之間的電壓差產生的。該儲存電容器Cst維持施加至像素電極的資料電壓一段預定時間。 A plurality of pixels P arranged in a matrix form are disposed in the display area AA. The pixels P are disposed in a plurality of pixel regions. The pixel regions are defined by intersections between a plurality of gate lines GL and a plurality of data lines DL. Each of the pixels P includes a thin film transistor TFT, a liquid crystal capacitor Clc, and a storage capacitor Cst. The liquid crystal capacitor Clc drives the liquid crystal in accordance with an electric field which is generated by a voltage difference between a material voltage applied to the pixel electrode through the thin film transistor TFT and a common voltage Vcom applied to the common electrode through the common line CL. The storage capacitor Cst maintains the data voltage applied to the pixel electrode for a predetermined time.
不顯示影像的複數個虛擬像素DP1與DP2設置在虛擬區DA中。該等虛擬像素DP1與DP2沿著設置在顯示區AA中的該等像素P的四周設置。同時,在虛擬區DA中設置第一至第三閘極金屬10、12及14、源極-汲極金屬16以及複數個防靜電放電電路,所述第一至第三閘極金屬10、12及14將共同電壓Vcom從共同電壓供應裝置8施加至複數條共同線CL,該等防靜電放電電路保護該等訊號線與設置在該等像素P中的該等薄膜電晶體TFT免遭外部靜電放電的衝擊(參見第2圖與第3圖)。 A plurality of dummy pixels DP1 and DP2 that do not display an image are disposed in the virtual area DA. The dummy pixels DP1 and DP2 are disposed along the circumference of the pixels P disposed in the display area AA. At the same time, first to third gate metals 10, 12 and 14, source-drain metal 16 and a plurality of anti-static discharge circuits are provided in the dummy area DA, the first to third gate metals 10, 12 And applying a common voltage Vcom from the common voltage supply device 8 to a plurality of common lines CL, the antistatic discharge circuits protecting the signal lines and the thin film transistor TFTs disposed in the pixels P from external static electricity The impact of the discharge (see Figures 2 and 3).
閘極驅動器4相繼提供掃描訊號至閘極線GL。該掃描訊號為脈衝訊號,具有個導通包含在像素區中之薄膜電晶體TFT的導通閘極電壓與關閉薄膜電晶體TFT的關閉閘極電壓的值。 The gate driver 4 successively supplies a scan signal to the gate line GL. The scan signal is a pulse signal having a value that turns on the turn-on gate voltage of the thin film transistor TFT included in the pixel region and turns off the turn-off gate voltage of the thin film transistor TFT.
資料驅動器6利用標準伽瑪電壓將從外部提供的影像資料轉變成資料電壓,並將轉變後的資料電壓施加至資料線DL。 The data driver 6 converts the image data supplied from the outside into a material voltage using a standard gamma voltage, and applies the converted data voltage to the data line DL.
共同電壓供應裝置8將經過第一至第三閘極金屬10、12及14以及設置在虛擬區DA中的源極-汲極金屬16的共同電壓Vcom施加至共同線CL(參見第2圖與第3圖)。 The common voltage supply device 8 applies the common voltage Vcom through the first to third gate metals 10, 12 and 14 and the source-drain metal 16 disposed in the dummy region DA to the common line CL (see FIG. 2 and Figure 3).
特別地,在本實施例中,共同電壓Vcom施加至共同線CL所經過的路徑之間的電阻偏差減小,因此能夠阻止可能由高壓靜電放電的集中提供所引起的線路破壞或者薄膜電晶體TFT的損壞。 In particular, in the present embodiment, the resistance deviation between the paths through which the common voltage Vcom is applied to the common line CL is reduced, and thus it is possible to prevent line breakage or thin film transistor TFT which may be caused by concentrated supply of high-voltage electrostatic discharge. Damage.
下文中,將詳細描述共同電壓Vcom施加至複數條共同線CL所經過的路徑。 Hereinafter, the path through which the common voltage Vcom is applied to the plurality of common lines CL will be described in detail.
第2圖為舉例說明第1圖中所示之液晶面板2的區域A的放大圖。第3圖為舉例說明第1圖中所示之液晶面板的區域B的放大圖;參閱第2圖與第3圖,複數條閘極線GL排列在第一方向上(例如水平面),複數條資料線DL排列在垂直於第一方向的第二方向上(例如縱向)。另外,複數條共同線CL排列在第一方向上,使得共同線CL平行於閘極線GL。 Fig. 2 is an enlarged view illustrating a region A of the liquid crystal panel 2 shown in Fig. 1. 3 is an enlarged view illustrating a region B of the liquid crystal panel shown in FIG. 1; referring to FIGS. 2 and 3, a plurality of gate lines GL are arranged in a first direction (for example, a horizontal plane), and a plurality of The data lines DL are arranged in a second direction (for example, a longitudinal direction) perpendicular to the first direction. In addition, the plurality of common lines CL are arranged in the first direction such that the common line CL is parallel to the gate line GL.
複數個虛擬像素(DP)包括複數個排列在第一方向上的第一虛擬像素DP1以及複數個排列在第二方向上的第二虛擬像素DP2。 The plurality of dummy pixels (DP) includes a plurality of first dummy pixels DP1 arranged in the first direction and a plurality of second dummy pixels DP2 arranged in the second direction.
該等第一虛擬像素DP1設置在顯示區AA的上部與下部,使得其相鄰於排列在第一行與最後一行的像素P。該等第二虛擬像素DP2設置在顯示區AA的左側部與右側部,使得其相鄰於排列在第一列與最後一列的像素P。儘管在第2圖與第3圖中舉例說明該等第二虛擬像素DP2設置成三列的示例,但是該等第二虛擬像素DP2可設置成若干列。供參考,第一虛擬像素DP1連接至共同線CL,而不是連接至閘極線GL。 The first dummy pixels DP1 are disposed at upper and lower portions of the display area AA such that they are adjacent to the pixels P arranged in the first row and the last row. The second dummy pixels DP2 are disposed on the left side portion and the right side portion of the display area AA such that they are adjacent to the pixels P arranged in the first column and the last column. Although the examples in which the second dummy pixels DP2 are arranged in three columns are exemplified in FIGS. 2 and 3, the second dummy pixels DP2 may be arranged in a plurality of columns. For reference, the first dummy pixel DP1 is connected to the common line CL instead of being connected to the gate line GL.
同時,如上所述,第一至第三閘極金屬10、12及14以及源極-汲極金屬16設置在虛擬區DA中,將描述於下面。 Meanwhile, as described above, the first to third gate metals 10, 12, and 14 and the source-drain metal 16 are disposed in the dummy area DA, which will be described below.
第一閘極金屬10形成在虛擬區DA的周圍,並電性連接至墊狀物單元(圖中未顯示),該墊狀物單元電性連接至共同電壓供應裝置8。第二閘極金屬12從共同線CL向一側(例如左側)延伸,以形成墊狀物形狀。第三閘極金屬14從共同線CL向另一側(例如右側)延伸,以形 成墊狀物形狀。第一至第三閘極金屬10、12及14以及共同線CL可由處於同一層中之與閘極線GL相同的材料構成。 The first gate metal 10 is formed around the dummy area DA and electrically connected to the pad unit (not shown), and the pad unit is electrically connected to the common voltage supply device 8. The second gate metal 12 extends from the common line CL to one side (for example, the left side) to form a mat shape. The third gate metal 14 extends from the common line CL to the other side (eg, the right side) to form In the shape of a mat. The first to third gate metals 10, 12, and 14 and the common line CL may be composed of the same material as the gate line GL in the same layer.
參閱第2圖,源極-汲極金屬16設置在第二方向上,且位於第二閘極金屬12的一側。源極-汲極金屬16可例如設置在閘極墊狀物單元(圖中未顯示)與第二閘極金屬12之間。這種情況下,為了防止源極-汲極金屬16與閘極線GL之間短路,源極-汲極金屬16可由處於同一層中之與資料線DL相同的材料形成。 Referring to FIG. 2, the source-drain metal 16 is disposed in the second direction and is located on one side of the second gate metal 12. The source-drain metal 16 can be disposed, for example, between a gate pad unit (not shown) and the second gate metal 12. In this case, in order to prevent short-circuiting between the source-drain metal 16 and the gate line GL, the source-drain metal 16 may be formed of the same material as the data line DL in the same layer.
同時,第一閘極金屬10電性連接源極-汲極金屬16,源極-汲極金屬16電性連接第二閘極金屬12,第一閘極金屬10電性連接第三閘極金屬14。因此,從共同電壓供應裝置8施加到第一閘極金屬10的共同電壓Vcom被施加到共同線CL,因而可以被施加到第一與第二虛擬像素DP1與DP2以及像素P。 At the same time, the first gate metal 10 is electrically connected to the source-drain metal 16, the source-drain metal 16 is electrically connected to the second gate metal 12, and the first gate metal 10 is electrically connected to the third gate metal. 14. Therefore, the common voltage Vcom applied from the common voltage supply device 8 to the first gate metal 10 is applied to the common line CL, and thus can be applied to the first and second dummy pixels DP1 and DP2 and the pixel P.
具體地,第一閘極金屬10與源極-汲極金屬16彼此電性連接,藉以用於分別暴露出第一閘極金屬10與源極-汲極金屬16的第一與第二接觸孔H1與H2被第一連接圖案18覆蓋。這裏,第一接觸孔H1穿過保護膜以及閘極絕緣膜,並使第一閘極金屬10的一部分暴露出來,以及第二接觸孔H2穿過保護膜,並使源極-汲極金屬16的一部分暴露出來。第一連接圖案18可由處於同一層中之與像素電極相同的材料形成。 Specifically, the first gate metal 10 and the source-drain metal 16 are electrically connected to each other, thereby exposing the first and second contact holes of the first gate metal 10 and the source-drain metal 16 respectively. H1 and H2 are covered by the first connection pattern 18. Here, the first contact hole H1 passes through the protective film and the gate insulating film, and a portion of the first gate metal 10 is exposed, and the second contact hole H2 passes through the protective film, and the source-drain metal 16 Part of it is exposed. The first connection pattern 18 may be formed of the same material as the pixel electrode in the same layer.
另外,源極-汲極金屬16與第二閘極金屬12彼此電性連接,藉以用於分別暴露出源極-汲極金屬16與第二閘極金屬12的第三與第四接觸孔H3與H4被第二連接圖案覆蓋20。這裏,第三接觸孔H3穿過保護膜,並使源極-汲極金屬16的一部分暴露出來,以及第四接觸孔H4穿過保護膜以及閘極絕緣膜,並使第二閘極金屬12的一部分暴露出來。第二連接圖案20可由處於同一層中之與像素區的像素電極相同的材料形成。 In addition, the source-drain metal 16 and the second gate metal 12 are electrically connected to each other, thereby exposing the third and fourth contact holes H3 of the source-drain metal 16 and the second gate metal 12, respectively. And H4 is covered by 20 by the second connection pattern. Here, the third contact hole H3 passes through the protective film, and a portion of the source-drain metal 16 is exposed, and the fourth contact hole H4 passes through the protective film and the gate insulating film, and the second gate metal 12 is provided. Part of it is exposed. The second connection pattern 20 may be formed of the same material as the pixel electrode of the pixel region in the same layer.
如第3圖所示,第一閘極金屬10與第三閘極金屬14彼此電性連接,藉以用於分別暴露出第一閘極金屬10與第三閘極金屬14的第五與第六接觸孔H5與H6被第三連接圖案22覆蓋。這裏,第五接觸孔H5穿過保護膜以及閘極絕緣膜,並使第一閘極金屬10的一部分暴露出來,以及第六接觸孔H6穿過保護膜以及閘極絕緣膜,並使第三閘極金屬16的 一部分暴露出來。第三連接圖案22可由處於同一層中之與像素區的像素電極相同的材料形成。 As shown in FIG. 3, the first gate metal 10 and the third gate metal 14 are electrically connected to each other, thereby exposing the fifth and sixth portions of the first gate metal 10 and the third gate metal 14, respectively. The contact holes H5 and H6 are covered by the third connection pattern 22. Here, the fifth contact hole H5 passes through the protective film and the gate insulating film, and exposes a portion of the first gate metal 10, and the sixth contact hole H6 passes through the protective film and the gate insulating film, and makes the third Gate metal 16 Part of it is exposed. The third connection pattern 22 may be formed of the same material as the pixel electrode of the pixel region in the same layer.
於是,下面將概括共同電壓Vcom被引入到共同線CL中所經過的路徑。共同電壓Vcom通過按照第一閘極金屬10、第一連接圖案18、源極-汲極金屬16、第二連接圖案20以及第二閘極金屬12這樣的順序施加到每條共同線CL的一側。另外,共同電壓Vcom通過按照第一閘極金屬10、第三連接圖案22以及第三閘極金屬14這樣的順序施加到每條共同線CL的另一側。 Thus, the path through which the common voltage Vcom is introduced into the common line CL will be summarized below. The common voltage Vcom is applied to each of the common lines CL in the order of the first gate metal 10, the first connection pattern 18, the source-drain metal 16, the second connection pattern 20, and the second gate metal 12. side. In addition, the common voltage Vcom is applied to the other side of each common line CL in the order of the first gate metal 10, the third connection pattern 22, and the third gate metal 14.
正因如此,在本實施例中,共同電壓Vcom跳過第一至第三閘極金屬10、12與14以及源極-汲極金屬16,從而施加至共同線CL。因此,能夠減小引入到共同線CL中之共同電壓Vcom的路徑之間的電阻偏差,並能夠防止靜電放電被集中引入到共同線CL中的問題。 For this reason, in the present embodiment, the common voltage Vcom skips the first to third gate metals 10, 12 and 14 and the source-drain metal 16, thereby being applied to the common line CL. Therefore, the resistance deviation between the paths introduced to the common voltage Vcom in the common line CL can be reduced, and the problem that the electrostatic discharge is concentratedly introduced into the common line CL can be prevented.
供參考,靜電放電流向具有相對較低電阻的部分。由於第一閘極金屬10具有大的面積,所以靜電放電容易引入到第一閘極金屬10。被引入到第一閘極金屬10中的靜電放電可引入到電性連接於第一閘極金屬10的共同線CL中。當第一閘極金屬10與共同線CL之間的電連接路徑不同時,可能在第一閘極金屬10與共同線CL之間產生電阻偏差。結果,被引入到第一閘極金屬10中的靜電放電集中流向具有相對較低電阻的共同線CL。正因如此,當靜電放電衝擊集中於具體的共同線CL中時,相對應的共同線CL可能被損壞,或者與共同線CL相交的資料線DL可能被損壞。第5圖舉例說明靜電放電衝擊集中於具體共同線CL中導致資料線DL損壞的示例。依據本發明,第一閘極金屬10與共同線CL之間的電連接路徑相同,能夠阻止靜電放電衝擊集中於具體共同線CL中,結果,能夠防止線路的破壞或者薄膜電晶體TFT的損壞。 For reference, the electrostatic discharge current is directed to a portion having a relatively low resistance. Since the first gate metal 10 has a large area, electrostatic discharge is easily introduced to the first gate metal 10. The electrostatic discharge introduced into the first gate metal 10 may be introduced into a common line CL electrically connected to the first gate metal 10. When the electrical connection paths between the first gate metal 10 and the common line CL are different, a resistance deviation may occur between the first gate metal 10 and the common line CL. As a result, the electrostatic discharge introduced into the first gate metal 10 concentrates toward the common line CL having a relatively low resistance. For this reason, when the electrostatic discharge shock is concentrated in the specific common line CL, the corresponding common line CL may be damaged, or the data line DL intersecting the common line CL may be damaged. Fig. 5 exemplifies an example in which the electrostatic discharge shock concentrates on the specific common line CL causing damage to the data line DL. According to the present invention, the electrical connection paths between the first gate metal 10 and the common line CL are the same, and it is possible to prevent the electrostatic discharge shock from being concentrated in the specific common line CL, and as a result, the destruction of the wiring or the damage of the thin film transistor TFT can be prevented.
同時,在本實施例中,為了減小由於靜電放電導致的訊號線與薄膜電晶體的損壞,液晶顯示裝置包括複數個防靜電放電電路,下面詳細描述這種配置。 Meanwhile, in the present embodiment, in order to reduce damage of the signal line and the thin film transistor due to electrostatic discharge, the liquid crystal display device includes a plurality of antistatic discharge circuits, which are described in detail below.
參閱第2圖與第3圖,虛擬顯示區DA進一步包括虛擬資料線DDL、虛擬共同線DCL以及複數個防靜電放電電路。 Referring to FIGS. 2 and 3, the virtual display area DA further includes a virtual data line DDL, a virtual common line DCL, and a plurality of anti-static discharge circuits.
虛擬資料線DDL設置在第一方向上,使得其相鄰於第一條以及最後一條資料線DL。虛擬資料線DDL分支成三條虛擬資料線DDL支路,使得該等虛擬資料線對應於設置成三列的第二虛擬像素DP2,從而連接至該等第二虛擬像素DP2。 The virtual data line DDL is disposed in the first direction such that it is adjacent to the first and last data lines DL. The virtual data line DDL branches into three virtual data line DDL branches, such that the virtual data lines correspond to the second virtual pixels DP2 arranged in three columns, thereby being connected to the second virtual pixels DP2.
虛擬共同線DCL從第一閘極金屬10中沿著第二方向分支出來,並橫貫虛擬資料線DDL以及資料線DL。這樣的虛擬共同線DCL的數量可為至少一條。 The virtual common line DCL branches out from the first gate metal 10 in the second direction and traverses the virtual data line DDL and the data line DL. The number of such virtual common lines DCL may be at least one.
該等防靜電放電電路包括第一至第四防靜電放電電路24a至24d。 The antistatic discharge circuits include first to fourth anti-electrostatic discharge circuits 24a to 24d.
第一防靜電放電電路24a保護資料線DL避免受到靜電放電衝擊的破壞。為此目的,第一防靜電放電電路24a設置在資料線DL與虛擬共同線DCL之間,並且連接至資料線DL以及虛擬共同線DCL。 The first anti-static discharge circuit 24a protects the data line DL from damage by electrostatic discharge shock. For this purpose, the first anti-static discharge circuit 24a is disposed between the data line DL and the virtual common line DCL, and is connected to the data line DL and the virtual common line DCL.
第二防靜電放電電路24b防止虛擬共同線DCL受到靜電放電衝擊的破壞。為此目的,第二防靜電放電電路24b設置在虛擬共同線DCL與第一閘極金屬10之間,並且連接至虛擬共同線DCL以及第一閘極金屬10。 The second anti-static discharge circuit 24b prevents the virtual common line DCL from being damaged by the electrostatic discharge shock. For this purpose, the second anti-static discharge circuit 24b is disposed between the dummy common line DCL and the first gate metal 10, and is connected to the dummy common line DCL and the first gate metal 10.
第三防靜電放電電路24c防止虛擬資料線DDL受到靜電放電衝擊的破壞。為此目的,第三防靜電放電電路24c設置在虛擬資料線DDL與虛擬共同線DCL之間,並且連接至虛擬資料線DDL以及虛擬共同線DCL。 The third anti-electrostatic discharge circuit 24c prevents the virtual data line DDL from being damaged by the electrostatic discharge shock. For this purpose, the third anti-static discharge circuit 24c is disposed between the virtual data line DDL and the virtual common line DCL, and is connected to the virtual data line DDL and the virtual common line DCL.
第四防靜電放電電路24d防止閘極線GL受到靜電放電衝擊的破壞。為此目的,第四防靜電放電電路24d設置在閘極線GL與源極-汲極金屬16之間,並且連接至閘極線GL以及源極-汲極金屬16。 The fourth anti-static discharge circuit 24d prevents the gate line GL from being damaged by the electrostatic discharge shock. For this purpose, a fourth anti-electrostatic discharge circuit 24d is disposed between the gate line GL and the source-drain metal 16, and is connected to the gate line GL and the source-drain metal 16.
特別地,本實施例的特徵在於虛擬資料線DDL設置在第二與第三防靜電放電電路24b與24c之間。如第4圖所示,當虛擬資料線DDL設置在第一閘極金屬10與第二防靜電放電電路24b之間時,由於從第一閘極金屬10引入到虛擬共同線DCL中的靜電放電而導致虛擬資料線DDL可能容易損壞。依據本發明,藉由將虛擬資料線DDL設置在第二與第三防靜電放電電路24b與24c之間,能夠防止虛擬資料線DDL的損壞。 In particular, the present embodiment is characterized in that the virtual data line DDL is disposed between the second and third anti-static discharge circuits 24b and 24c. As shown in FIG. 4, when the dummy data line DDL is disposed between the first gate metal 10 and the second anti-electrostatic discharge circuit 24b, due to electrostatic discharge introduced from the first gate metal 10 into the virtual common line DCL As a result, the virtual data line DDL may be easily damaged. According to the present invention, by arranging the dummy data line DDL between the second and third anti-static discharge circuits 24b and 24c, damage of the dummy data line DDL can be prevented.
下文中,將詳細描述基於本發明一實施例之液晶顯示裝置的製造方法。 Hereinafter, a method of manufacturing a liquid crystal display device according to an embodiment of the present invention will be described in detail.
按照依據本實施例的液晶顯示面板2的薄膜電晶體陣列基板,複數條閘極線GL、複數條共同線CL以及第一至第三閘極金屬10、12及14由同樣的材料形成在同一層中,如上所述。並且,資料線DL與源極-汲極金屬16由同樣的材料形成在同一層中,像素電極與第一至第三連接圖案18、20及22由同樣的材料形成在同一層中。 According to the thin film transistor array substrate of the liquid crystal display panel 2 according to the present embodiment, the plurality of gate lines GL, the plurality of common lines CL, and the first to third gate metals 10, 12, and 14 are formed of the same material. In one layer, as described above. Further, the data line DL and the source-drain metal 16 are formed of the same material in the same layer, and the pixel electrode and the first to third connection patterns 18, 20, and 22 are formed of the same material in the same layer.
也就是說,依據本實施例的第一至第三閘極金屬10、12及14、源極-汲極金屬16以及第一至第三連接圖案18、20及22與設置在像素區中的薄膜電晶體同時形成,因此不需要不同的光罩製程來形成這些組件。下文中,為了描述方便,將提供一種製造包含在像素區中的薄膜電晶體TFT的製程。第6圖為舉例說明包含在像素區中之薄膜電晶體TFT的示意性截面圖以及沿著第2圖中所示TFT之X-Y線的截面圖。下面將參考第6圖描述液晶顯示裝置的製造方法。 That is, the first to third gate metals 10, 12, and 14, the source-drain metal 16, and the first to third connection patterns 18, 20, and 22 according to the present embodiment are disposed in the pixel region. Thin film transistors are formed simultaneously, so different mask processes are not required to form these components. Hereinafter, for convenience of description, a process of manufacturing a thin film transistor TFT included in a pixel region will be provided. Fig. 6 is a schematic cross-sectional view illustrating a thin film transistor TFT included in a pixel region and a cross-sectional view taken along line X-Y of the TFT shown in Fig. 2. A method of manufacturing a liquid crystal display device will be described below with reference to Fig. 6.
首先,利用金屬在基板50上形成閘極金屬層,然後將該閘極金屬層圖案化,以形成複數個閘極圖案。該等閘極圖案包括複數條閘極線GL以及閘極電極26,閘極電極26從對應於像素區的閘極線GL突出。 該等閘極圖案進一步包括第一至第三閘極金屬10、12及14、共同線CL以及虛擬共同線DCL。 First, a gate metal layer is formed on the substrate 50 by metal, and then the gate metal layer is patterned to form a plurality of gate patterns. The gate patterns include a plurality of gate lines GL and gate electrodes 26, and the gate electrodes 26 protrude from the gate lines GL corresponding to the pixel regions. The gate patterns further include first to third gate metals 10, 12, and 14, a common line CL, and a virtual common line DCL.
接下來,利用無機絕緣材料,例如氮化矽(SiNx)或二氧化矽(SiO2),在包括該等閘極圖案的基板50上形成閘極絕緣膜60。 Next, a gate insulating film 60 is formed on the substrate 50 including the gate patterns using an inorganic insulating material such as tantalum nitride (SiNx) or germanium dioxide (SiO 2 ).
另外,含有純非晶矽的半導體層28與含有不純非晶矽的歐姆接觸層34堆疊在閘極絕緣膜60上。這時,半導體層28與歐姆接觸層34在與閘極電極26重疊的區域中形成為島狀體。 Further, a semiconductor layer 28 containing pure amorphous germanium and an ohmic contact layer 34 containing impure amorphous germanium are stacked on the gate insulating film 60. At this time, the semiconductor layer 28 and the ohmic contact layer 34 are formed in an island shape in a region overlapping the gate electrode 26.
接下來,利用從導電金屬群組中選出的一種金屬,在包括半導體層28以及歐姆接觸層34的基板50上形成源極-汲極金屬層,然後將該源極-汲極金屬層圖案化,以形成複數個源極-汲極圖案。該等源極-汲極圖案包括複數條資料線DL、連接至對應於像素區的複數條資料線DL的源極電極30、以及汲極電極32,該汲極電極32與源極電極30隔開,使得 閘極電極26設置在汲極電極32與源極電極30之間。源極-汲極圖案進一步包括源極-汲極金屬16以及虛擬資料線DDL。 Next, a source-drain metal layer is formed on the substrate 50 including the semiconductor layer 28 and the ohmic contact layer 34 by using a metal selected from the group of conductive metals, and then the source-drain metal layer is patterned. To form a plurality of source-drain patterns. The source-drain patterns include a plurality of data lines DL, a source electrode 30 connected to a plurality of data lines DL corresponding to the pixel regions, and a drain electrode 32 separated from the source electrode 30. Open, making The gate electrode 26 is disposed between the drain electrode 32 and the source electrode 30. The source-drain pattern further includes a source-drain metal 16 and a dummy data line DDL.
接下來,暴露在源極電極30與汲極電極32之間的歐姆接觸層34被移除,使半導體層28暴露出來。 Next, the ohmic contact layer 34 exposed between the source electrode 30 and the drain electrode 32 is removed to expose the semiconductor layer 28.
接下來,利用從由氮化矽(SiNx)或二氧化矽(SiO2)組成的群組中選出的無機絕緣材料,或者從苯並環丁烯(BCB)與丙烯酸樹脂中選出的有機絕緣材料,在包括源極-汲極圖案的基板50上形成保護膜70。 Next, an inorganic insulating material selected from the group consisting of tantalum nitride (SiNx) or cerium oxide (SiO 2 ), or an organic insulating material selected from benzocyclobutene (BCB) and acrylic resin is used. A protective film 70 is formed on the substrate 50 including the source-drain pattern.
選擇性地移除保護膜70與閘極絕緣膜60,以形成像素接觸孔以及前面提及的第一至第六接觸孔H1至H6,該像素接觸孔使汲極電極32暴露出來。 The protective film 70 and the gate insulating film 60 are selectively removed to form pixel contact holes and the aforementioned first to sixth contact holes H1 to H6, which expose the gate electrodes 32.
接下來,在所產生的結構上設置從由銦錫氧化物(ITO)與銦鋅氧化物(IZO)組成的群組中選出的透明導電金屬,並將該透明導電金屬圖案化,以形成複數個透明圖案。該等透明圖案包括覆蓋像素接觸孔的像素電極36以及與像素電極36形成電場的公共電極(圖中未顯示)。該等透明圖案進一步包括前面提及的第一至第三連接圖案18、20及22。 Next, a transparent conductive metal selected from the group consisting of indium tin oxide (ITO) and indium zinc oxide (IZO) is disposed on the resultant structure, and the transparent conductive metal is patterned to form a plurality Transparent pattern. The transparent patterns include a pixel electrode 36 that covers the pixel contact hole and a common electrode (not shown) that forms an electric field with the pixel electrode 36. The transparent patterns further include the aforementioned first to third connection patterns 18, 20, and 22.
同時,前面提及的第一至第四防靜電放電電路24a至24d包括複數個薄膜電晶體。該等薄膜電晶體也與設置在像素區中的薄膜電晶體同時形成。 Meanwhile, the aforementioned first to fourth anti-electrostatic discharge circuits 24a to 24d include a plurality of thin film transistors. The thin film transistors are also formed simultaneously with the thin film transistor disposed in the pixel region.
正因如此,在本實施例中,第一至第三閘極金屬10、12及14、源極-汲極金屬16以及第一至第三連接圖案18、20及22與設置在像素區中的薄膜電晶體同時形成,因此不需要單獨的光罩製程來形成這些組件。 For this reason, in the present embodiment, the first to third gate metals 10, 12 and 14, the source-drain metal 16 and the first to third connection patterns 18, 20 and 22 are disposed in the pixel region. The thin film transistors are formed simultaneously, so a separate mask process is not required to form these components.
同時,基於第2圖與第3圖中所示的配置,本實施例能夠減少由於在製作薄膜電晶體陣列基板過程中產生的靜電放電所導致的產品缺陷,從而提高成品率。特別是,在製造薄膜電晶體的製程中,藉由化學氣相沉積法(CVD)進行無機絕緣材料與純非晶矽的沉積,並且利用乾式蝕刻來圖案化各種金屬層。在CVD或乾式蝕刻過程中,可產生大量的靜電放電。如上所述,靜電放電可能集中於共同線CL中的具體線路中。特別是,在選擇性地移除被沉積的保護膜50的蝕刻製程或形成透明圖案的製 程期間,由於所述製程是在形成該等閘極圖案之後進行,因此靜電放電衝擊容易集中於具體共同線CL中。依據本發明,基於第2圖與第3圖中所示的配置,能夠減少由於在像CVD或乾式蝕刻這樣的生產過程中所產生的靜電放電導致的產品缺陷。 Meanwhile, based on the configurations shown in FIGS. 2 and 3, the present embodiment can reduce product defects due to electrostatic discharge generated in the process of fabricating the thin film transistor array substrate, thereby improving the yield. In particular, in the process of fabricating a thin film transistor, deposition of an inorganic insulating material and pure amorphous germanium is performed by chemical vapor deposition (CVD), and various metal layers are patterned by dry etching. A large amount of electrostatic discharge can be generated during CVD or dry etching. As described above, the electrostatic discharge may be concentrated in a specific line in the common line CL. In particular, an etching process for selectively removing the deposited protective film 50 or a system for forming a transparent pattern During the process, since the process is performed after the gate patterns are formed, the electrostatic discharge shock is easily concentrated in the specific common line CL. According to the present invention, based on the configurations shown in Figs. 2 and 3, it is possible to reduce product defects due to electrostatic discharge generated in a production process such as CVD or dry etching.
從前面的敍述中顯而易見,本發明減小了共同電壓被施加至複數條共同線所經過的路徑之間的電阻偏差,從而防止可能由於高壓靜電放電集中提供至具體共同線所造成的線路破壞或薄膜電晶體的損壞。並且,本發明改變了虛擬資料線的設計,從而減小虛擬資料線的靜電放電衝擊,以及防止線路的破壞或薄膜電晶體的損壞。 As is apparent from the foregoing description, the present invention reduces the resistance deviation between the paths through which the common voltage is applied to the plurality of common lines, thereby preventing line damage that may be caused by the high voltage electrostatic discharge being concentratedly supplied to a specific common line or Damage to the thin film transistor. Moreover, the present invention changes the design of the virtual data lines, thereby reducing the electrostatic discharge shock of the virtual data lines, as well as preventing damage to the lines or damage to the thin film transistors.
本發明提高了在產品驅動過程中產品的可靠性,並且減少了由於在薄膜電晶體製造過程中產生的大量靜電放電所造成的產品缺陷,從而有利地提高了產品的成品率以及降低了生產成本。 The invention improves the reliability of the product in the product driving process, and reduces the product defects caused by the large amount of electrostatic discharge generated in the manufacturing process of the thin film transistor, thereby advantageously improving the yield of the product and reducing the production cost. .
顯然,對本領域技術人員而言,在不脫離本發明的精神與範圍的情況下,可以對本發明作出各種修飾與變化。因此,意圖是本發明覆蓋本發明提供的修飾與變化,這些修飾與變化落入所附的申請專利範圍及其等效的範圍內。 It is apparent to those skilled in the art that various modifications and changes can be made to the present invention without departing from the spirit and scope of the invention. Therefore, it is intended that the present invention cover the modifications and variations of the invention, which are within the scope of the appended claims and their equivalents.
本申請案主張2011年12月7日提出的韓國專利申請第10-2011-0130497號的利益,該申請案特此作為參考如同納入在本文中被完全闡明。 The present application claims the benefit of the Korean Patent Application No. 10-2011-0130497, filed on Dec. 7, 2011, which is hereby expressly incorporated by reference in its entirety herein.
Claims (13)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020110130497A KR101839334B1 (en) | 2011-12-07 | 2011-12-07 | Liquid crystal display device and method of fabricating the same |
| ??10-2011-0130497 | 2011-12-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201324011A TW201324011A (en) | 2013-06-16 |
| TWI629547B true TWI629547B (en) | 2018-07-11 |
Family
ID=48547925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101143149A TWI629547B (en) | 2011-12-07 | 2012-11-19 | Liquid crystal display device and method of manufacturing same |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9025099B2 (en) |
| KR (1) | KR101839334B1 (en) |
| CN (1) | CN103149757B (en) |
| TW (1) | TWI629547B (en) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103928453B (en) * | 2013-01-11 | 2016-09-28 | 北京京东方光电科技有限公司 | A kind of array base palte and manufacture method thereof |
| CN103439844B (en) * | 2013-08-30 | 2016-06-01 | 京东方科技集团股份有限公司 | The method of array substrate, display unit and making array substrate |
| KR20150086827A (en) * | 2014-01-20 | 2015-07-29 | 삼성디스플레이 주식회사 | Display device |
| JP2016057344A (en) * | 2014-09-05 | 2016-04-21 | 株式会社ジャパンディスプレイ | Display device |
| KR102246382B1 (en) * | 2014-12-29 | 2021-04-30 | 엘지디스플레이 주식회사 | Display device and display panel with static electricity preventing pattern |
| KR102291361B1 (en) * | 2014-12-29 | 2021-08-20 | 엘지디스플레이 주식회사 | Display device and display panel with static electricity preventing pattern |
| KR102296073B1 (en) | 2015-01-06 | 2021-08-31 | 삼성디스플레이 주식회사 | Liquid crystal dispaly |
| KR102332255B1 (en) * | 2015-04-29 | 2021-11-29 | 삼성디스플레이 주식회사 | Display device |
| KR102538750B1 (en) * | 2016-11-29 | 2023-06-02 | 엘지디스플레이 주식회사 | Liquid crystal display device |
| KR102594791B1 (en) * | 2016-12-28 | 2023-10-30 | 엘지디스플레이 주식회사 | Liquid Crystal Display Device |
| KR102728869B1 (en) * | 2016-12-30 | 2024-11-13 | 엘지디스플레이 주식회사 | Display panel |
| CN107068087B (en) | 2017-03-31 | 2019-11-26 | 深圳市华星光电技术有限公司 | A kind of GOA driving circuit |
| KR102454998B1 (en) * | 2017-07-31 | 2022-10-13 | 엘지디스플레이 주식회사 | Light emitting diode display apparatus and multi screen display apparatus using the same |
| CN107633807B (en) * | 2017-09-08 | 2019-10-15 | 上海天马有机发光显示技术有限公司 | A display panel and display device |
| CN107610663B (en) * | 2017-09-25 | 2019-12-03 | 武汉华星光电技术有限公司 | The virtual circuit and driving circuit of panel display apparatus |
| KR102509413B1 (en) * | 2017-12-12 | 2023-03-10 | 엘지디스플레이 주식회사 | Display device |
| KR102562837B1 (en) * | 2018-09-13 | 2023-08-03 | 삼성디스플레이 주식회사 | Organic light emitting diode display device |
| CN109786373A (en) * | 2018-12-26 | 2019-05-21 | 友达光电(昆山)有限公司 | Display panel |
| KR102797435B1 (en) * | 2020-02-03 | 2025-04-22 | 삼성디스플레이 주식회사 | Display device |
| CN112259593B (en) * | 2020-10-22 | 2023-05-30 | 武汉华星光电技术有限公司 | Array substrate, manufacturing method of array substrate and display device |
| CN118119885A (en) | 2022-09-30 | 2024-05-31 | 京东方科技集团股份有限公司 | Display substrate and display device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080106661A1 (en) * | 2006-11-07 | 2008-05-08 | Samsung Electronics Co., Ltd. | Display device and method of manufacturing the same |
| TW200838366A (en) * | 2007-03-14 | 2008-09-16 | Prime View Int Co Ltd | Active matrix device or flat panel display with electrostatic protection |
| TW201009467A (en) * | 2008-08-26 | 2010-03-01 | Chunghwa Picture Tubes Ltd | Pixel array substrate |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080024427A1 (en) | 2006-07-26 | 2008-01-31 | Prime View International Co., Ltd. | Electronic ink display panel |
| CN101441372B (en) | 2007-11-23 | 2011-12-07 | 上海中航光电子有限公司 | Electrostatic discharge protection device of LCD device and manufacturing method thereof |
| CN101556387B (en) | 2008-04-11 | 2011-08-31 | 群康科技(深圳)有限公司 | Liquid crystal display panel |
| KR101298547B1 (en) * | 2008-08-07 | 2013-08-22 | 엘지디스플레이 주식회사 | Array substrate for in-plane swithing mode LCD and method for fabricating the same |
| WO2010150435A1 (en) * | 2009-06-22 | 2010-12-29 | シャープ株式会社 | Active matrix substrate, liquid crystal display device provided therewith and fabrication method of active matrix substrate |
| CN201845768U (en) | 2010-03-30 | 2011-05-25 | 深圳华映显示科技有限公司 | Electrostatic discharge protection structure |
-
2011
- 2011-12-07 KR KR1020110130497A patent/KR101839334B1/en active Active
-
2012
- 2012-11-19 TW TW101143149A patent/TWI629547B/en active
- 2012-11-28 US US13/688,006 patent/US9025099B2/en active Active
- 2012-11-29 CN CN201210501140.8A patent/CN103149757B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080106661A1 (en) * | 2006-11-07 | 2008-05-08 | Samsung Electronics Co., Ltd. | Display device and method of manufacturing the same |
| TW200838366A (en) * | 2007-03-14 | 2008-09-16 | Prime View Int Co Ltd | Active matrix device or flat panel display with electrostatic protection |
| TW201009467A (en) * | 2008-08-26 | 2010-03-01 | Chunghwa Picture Tubes Ltd | Pixel array substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| US20130148050A1 (en) | 2013-06-13 |
| TW201324011A (en) | 2013-06-16 |
| KR20130063886A (en) | 2013-06-17 |
| CN103149757A (en) | 2013-06-12 |
| KR101839334B1 (en) | 2018-03-19 |
| US9025099B2 (en) | 2015-05-05 |
| CN103149757B (en) | 2015-11-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI629547B (en) | Liquid crystal display device and method of manufacturing same | |
| JP5690916B2 (en) | Array substrate for display device | |
| US10707278B2 (en) | Backplane substrate and flexible display using the same | |
| KR101346921B1 (en) | A flat display device and method of manufacturing the same | |
| US9263387B2 (en) | GOA circuit of array substrate and display apparatus | |
| US9632378B2 (en) | Display device | |
| KR101920761B1 (en) | Array substrate for flat display device and flat display device comprising the same | |
| KR102675918B1 (en) | Storage Capacitor, Display Device Using the Same and Method for Manufacturing the Same | |
| US20180097044A1 (en) | Backplane substrate and flexible display using the same | |
| JP2016057344A (en) | Display device | |
| US9299763B2 (en) | Thin film transistor array substrate and method of manufacturing the same | |
| KR102050384B1 (en) | Flat Display Panel Having Narrow Bezel | |
| KR20160001821A (en) | Oxide Semiconductor Thin Film Transistor Substrate Having Double Light Shield Layers | |
| US9431438B2 (en) | Display device and method for fabricating the same | |
| US8963160B2 (en) | Thin film transistor array substrate, manufacturing method thereof and display device | |
| US9372376B2 (en) | Liquid crystal display device and manufacturing method thereof | |
| US20200212158A1 (en) | Display Device | |
| KR20150078767A (en) | Method of manufacturing a Display devices | |
| KR101784445B1 (en) | Array substrate for Liquid crystal display device | |
| US11307697B2 (en) | Display device with two display panel | |
| KR20160053376A (en) | Thin Film Transistor Substrate For Flat Panel Display | |
| US20240290283A1 (en) | Display device | |
| KR102723501B1 (en) | Display device and method for manufactureing the same | |
| KR102245998B1 (en) | Thin Film Transistor Substrate and Display Device Using the Same | |
| KR20150071510A (en) | Method For Manufacturing Orgaic Light Emitting Diode Display And Organic Light Emitting Diode Display Thereby |