TWI625523B - Detection system - Google Patents

Abstract

A detection system includes a reaction device for loading a reaction liquid to react with a reaction gas, a liquid supply device for loading the reaction liquid, and a liquid supply device for controlling the liquid supply device to supply the reaction liquid to the reaction The control equipment of the equipment, through which the control equipment controls the liquid supply equipment to supply the working liquid to the reaction equipment according to the liquid level data from the reaction equipment, so as to achieve the purpose of automatically replenishing the working liquid.

Description

Detection system

The present invention relates to a semiconductor process equipment, and more particularly to a detection system for a semiconductor reflow process.

With the evolution of semiconductor packaging technology, semiconductor devices have developed different packaging types. The conventional flip-chip packaging process is to first set a semiconductor wafer on a substrate with a plurality of solder bumps, then reflow the solder bumps, and then cover the solder bumps with a primer to avoid this. These solder bumps were subject to fouling and damage.

The purpose of reflow is to use high temperature melting solder bumps to facilitate the solder bumps to fix the semiconductor wafer and the substrate. In the current reflow operation, the oxygen content in the reflow furnace is detected (in line with the requirements). Specifications are less than 50ppm) to ensure reflow quality.

As shown in FIG. 1A, the conventional detection system 1 for detecting the oxygen content in a reflow furnace uses a pipe 120 to introduce the active gas A in the reflow furnace into an analyzer 12, and then The electrolytic solution F in the reaction tank 10 separates the hydrogen ions and oxygen ions of the reactive gas A. At this time, the metal sensing probe 11 located in the reaction tank 10 will chemically react with the oxygen ions. The analyzer 12 then calculates the concentration of oxygen Value (ie, oxygen content), and the concentration value is displayed on the analyzer 12.

However, the conventional detection system 1 needs to continuously analyze during the reflow operation, so that the electrolyte F will be reduced due to the continuous chemical reaction (part of the reduction is due to evaporation), which will cause the level of the electrolyte F 'to decrease. As shown in FIG. 1B, at this time, most of the structure of the metal sensing probe 11 will be exposed and contact the air, which will cause the exposed section 11a of the metal sensing probe 11 to rust and be damaged. During the process, the metal sensing probe 11 will greatly reduce the accuracy of the oxygen concentration measurement, thus causing abnormal operation of the machine related to subsequent processes.

Therefore, how to overcome the problems in the above-mentioned conventional technologies has become an urgent problem to be solved.

In view of the lack of the above-mentioned conventional technology, the present invention provides a detection system including: a reaction device for loading a working liquid and a reaction gas; a liquid supply device for loading the working liquid; and The control device is based on the liquid level data of the reaction liquid of the reaction device to control the liquid supply device to supply the reaction liquid to the reaction device.

In the aforementioned detection system, the reaction device is a box, which has a storage space for loading the working liquid, and a monitor set in the storage space, and the monitor is used to detect the function. The height of the liquid in the storage space. For example, the height position of the acting liquid in the storage space is defined as a high water level, a low water level, or a warning water level.

In the aforementioned detection system, the reaction device has a monitor for detecting the liquid level of the acting liquid and transmitting a message to the control device.

The foregoing detection system further includes an analysis device, which includes an electronic instrument and a detector, the detector is used to detect one of the characteristics of the response, and the electronic instrument is used to analyze and process the characteristic. For example, the detector is a probe type, and it is lying flat or reclining in the reaction device. Further, the detector is placed at the bottom of the reaction device. Preferably, the detector is lower than the alert water level set by the reaction device.

In the aforementioned detection system, the liquid supply device includes a detector for measuring and checking a liquid level of a working liquid in the liquid supply device.

In the aforementioned detection system, the liquid supply equipment includes a pipeline communicating with the reaction equipment, and the pipeline is provided with a switch for opening or preventing the action liquid from entering the reaction equipment.

In the aforementioned detection system, the control device includes a control device for receiving and processing liquid level data of the reaction liquid of the reaction device to control the liquid supply device to supply the reaction liquid to the reaction device. For example, the control device includes an electronic device for receiving a signal from the control device and issuing a warning signal.

It can be known from the above that the detection system of the present invention mainly controls the liquid supply device to supply the reaction liquid to the reaction device by the control device according to the liquid level data of the reaction liquid of the reaction device to automatically supplement the reaction liquid to In the reaction equipment, compared with the conventional technology, the detection system of the present invention is capable of reducing the amount of the liquid in the reaction equipment during the reflow operation even if the amount of the electrolyte is reduced due to the continuous chemical reaction. Keep it normal so that the structure of the detector (such as a metal electrode rod) is barely exposed to the air, so it can effectively prevent the detector from rusting and damaging.

1,2‧‧‧detection system

10‧‧‧ reaction tank

11‧‧‧ Metal Sensing Probe

11a‧‧‧exposed section

12‧‧‧ Analyzer

120‧‧‧ Catheter

21‧‧‧analysis equipment

20‧‧‧Reaction equipment

200‧‧‧Monitor

201‧‧‧ route

211‧‧‧ Detector

212‧‧‧Electronic instruments

220‧‧‧Collection Department

23‧‧‧Liquid supply equipment

23a‧‧‧Box

23b‧‧‧detector

23c‧‧‧Pipe

230‧‧‧Switch

24‧‧‧Control Equipment

24a‧‧‧Control device

24b‧‧‧communication device

24c‧‧‧Electronic device

240‧‧‧ Display

241,242,243‧‧‧Host

A‧‧‧acting gas

C‧‧‧accommodation space

F, F’‧‧‧electrolyte

F1, F2 ‧‧‧ acting liquid

H‧‧‧high water level

h‧‧‧ height

L, d‧‧‧Low water level

S‧‧‧Storage

W‧‧‧ alert water level

Figure 1A is a schematic cross-sectional view of a conventional detection system; Figure 1B is a schematic cross-sectional view of a problem in a conventional detection system; Figure 2 is a schematic view of a detection system of the present invention; and Figure 3 is a corresponding second FIG. Is a schematic partial configuration diagram of another embodiment.

The following describes the implementation of the present invention through specific embodiments. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc. shown in the drawings in this specification are only used to match the content disclosed in the specification for the understanding and reading of those skilled in the art, and are not intended to limit the implementation of the present invention. The limited conditions are not technically significant. Any modification of the structure, change of the proportional relationship, or adjustment of the size shall still fall within the scope of this invention without affecting the effects and goals that the invention can produce. The technical content disclosed by the invention can be covered. At the same time, the terms such as "upper", "lower", "bottom", and "one" cited in this specification are only for the convenience of description, and are not intended to limit the scope of the present invention. The change or adjustment of the relationship shall be regarded as the scope in which the present invention can be implemented without substantially changing the technical content.

FIG. 2 is a schematic diagram of the detection system 2 of the present invention. As shown in FIG. 2, the detection system 2 includes: a reaction device 20 and a detector 211 (the figure only shows the layout position and is not shown) Its detailed components) and an electronic device 212 (the figure only shows its layout position, and its detailed components are not shown), an analysis device 21, a liquid supply device 23 (the figure only shows its layout position, and its detailed components are not shown) ) And a control device 24 (only the layout position is shown in the figure, and its detailed components are not shown).

In this embodiment, the detection system 2 is used to detect the active gas (oxygen) content in the reflow furnace (not shown).

The reaction device 20 is used to load an action liquid F1 to react with the action gas A of the reflow furnace.

In this embodiment, the reaction device 20 may be a closed or open tank, which has a storage space S for loading the working liquid F1 and a storage space S provided in the storage space S. Monitor 200, which is used to detect the height position of the working liquid F1 in the storage space S, such as high water level H, low water level L or The warning stage (warning stage) W and so on.

Furthermore, the working liquid F1 is an electrolytic solution, and the working gas A contains hydrogen ions and oxygen ions, so that the electrolyte separates the hydrogen ions and oxygen ions of the working gas A, that is, the The reaction system is to separate the hydrogen ion and the oxygen ion.

The analysis device 21 is an analyzer. There are many types of analyzers, and there is no particular limitation.

The detector 211 is used to detect one of the characteristics of the reaction, such as the oxygen content.

In this embodiment, the detector 211 is a probe type, such as a metal electrode bar, and the detector 211 is lying on the bottom of the storage space S of the reaction device 20. For example, the detector 211 is lying flat or reclining in the storage space S. Preferably, the height h of the detector 211 after being placed does not exceed the warning water level W, so when the acting liquid F1 When the liquid level is higher than the warning water level W, the action liquid F1 can flood the detector 211 to prevent the detector 211 (metal electrode rod) from contacting the environment (such as gas) and being damaged (such as rust). Therefore, the detector 211 can ensure that it is completely immersed in the action liquid F1 during the analysis process of the reflow operation when lying down. It should be understood that the detector 211 can also stand upright on the bottom side of the reaction device 20 and be immersed in the working liquid F1, as shown in FIG. 1A for the arrangement of the metal sensing probe 11.

The electronic device 212 receives the feature (oxygen content) detected by the detector 211 and analyzes and processes the feature (oxygen content).

In this embodiment, the electronic device 212 is adjacent to the bottom of the reaction device 20 and is electrically connected to the detector 211.

Furthermore, the electronic instrument 212 has an intake 220, such as a port structure, which is used to collect (or introduce) the action gas A of the reflow furnace.

Therefore, the action gas A enters the electronic device 212 from the collection unit 220 and flows to the reaction device 20, so that the action gas A, the detector 211, and the action liquid F1 react with each other, for example, the action liquid F1 is decomposed. The hydrogen ions and oxygen ions of the acting gas A, at this time, the oxygen ions will trigger the detector 211. After that, the electronic instrument 212 analyzes the chemical change of the acting gas A, the change of the acting liquid F1 and / or the detector 211. Induced changes to sort out data (such as oxygen content) on the gas concentration of the reactive gas A.

In addition, the configuration components of the analysis device 21 can be designed according to requirements, and are not limited to the two components described above (ie, the detector 211 and the electronic instrument 212), which are hereby described.

The liquid supply device 23 includes a tank body 23a having a receiving space C, a liquid level gage 23b, and at least one pipe 23c.

In this embodiment, the box body 23a may be a closed type or an open type, and the containing space C is used for loading the working liquid F2.

In addition, the detector 23b is, for example, a float switch, which is used to measure and check the liquid level (for example, whether it is higher than the low water level d) of the working liquid F2 in the accommodation space C.

In addition, the pipeline 23c is used to communicate the accommodation space C of the box 23a and the storage space S of the reaction device 20 to supply (or supplement) the working liquid F2 to the storage space S. For example, the pipeline 23c is provided with a switch 230 to open or prevent the action liquid F2 from flowing into the storage space S.

The control device 24 includes at least one control device 24a, at least one communication device 24b, and at least one electronic device 24c.

In this embodiment, the control device 24a includes electronic components such as a central processing unit (CPU), a programmable logic controller (PLC), or other circuit modules. , Which is used to receive and process the liquid level data sent by the monitor 200 to control the box 23a (such as the opening (230) to supply (or supplement) the reaction liquid F2 to the reaction device 20. Specifically, the control device 24a can receive the liquid level data sent by the monitor 200 through the line 201 or wirelessly. It should be understood that the control device 24a can also receive and process the liquid level data sent by the detector 23b by wired or wireless means.

Furthermore, the communication device 24b is, for example, an antenna or a line, and is used to transmit signals or data. Specifically, the communication device 24b can be applied to, for example, touch (such as transparent conductive film), radio frequency (RF), Wi-Fi, Asymmetric Digital Subscriber Line (ADSL), and ultra-high-speed digital users. Very-high-bit-rate digital subscriber line (VDSL for short), Wireless local area network (WLAN), Bluetooth, Fiber, etc.

In addition, the electronic device 24c is a computer configuration such as an industrial computer (IPC) or other electromechanical devices, which includes a display 240, a host 241, and other related equipment, so that the control device 24a can use the communication device 24b ( (Such as an antenna or a line) to transmit a signal to the electronic device 24c, so that the electronic device 24c can analyze / process / store data from the control device 24a, and the electronic device 24c can also issue a warning signal (not shown) to remind The liquid level of the liquids F1 and F2 is too low for the operator. The warning signals are, for example, lights, sounds, odors, messages of mobile phone, and the like.

In addition, as shown in FIG. 3, the electronic device 24c includes, for example, a plurality of hosts 241, 242, 243 to analyze / process / store related data.

Therefore, during the use of the detection system 2, when the monitor 200 detects that the level of the working liquid F1 in the storage space S of the reaction device 20 is equal to or lower than the low water level L, the monitor 200 A signal is transmitted to the control device 24a. At this time, the control device 24a turns on the switch 230, so that the working liquid F2 flows into the storage space S of the reaction device 20. Then, when the monitor 200 detects that the liquid level of the working liquids F1, F2 in the storage space S reaches a high water level H, the monitor 200 transmits a signal to the control device 24a. At this time, the control device 24a The switch 230 is closed, so that the working liquid F2 cannot flow into the storage space S. Thereby, the purpose of automatically replenishing the working liquid (electrolyte) is achieved.

On the other hand, when the detector 23b measures that the liquid level of the working liquid F2 in the accommodation space C of the box 23a is equal to or lower than the low water level d, the detector 23b transmits a signal to the control device 24a, at this time, the control device 24a will transmit a signal to the electronic device 24c, so that the electronic device 24c reminds the operator that the liquid level of the working liquid F2 is too low, so that the operator can immediately replenish the working liquid F2 to the箱体 23a。 23a.

It should be understood that when the monitor 200 detects that the liquid level of the working liquid F1 of the reaction device 20 is lower than the warning water level W, the monitor 200 transmits a signal to the control device 24a. At this time, the control device 24a will transmit a signal to the electronic device 24c, so that the electronic device reminds the operator that the liquid level of the working liquid F1 is too low, so that the worker can immediately replenish the working liquid F1 to the reaction device 20.

On the other hand, the control device 24a, the electronic device 212, the monitor 200, and the detector 23b can also record / analyze various working liquids (electrolyte) Physical or chemical changes such as temperature, pH, salt, time, flow speed / consumption, etc., and send it to the electronic device 24c for big data (Big Data) statistics.

In summary, the detection system 2 of the present invention is designed by the liquid supply device 23 and the control device 24 to automatically replenish the working liquid F2 into the reaction device 20, so compared with the conventional technology, the detection system 2 During the reflow operation of the detection system 2 of the invention, even if the amount of the electrolytic solution F is reduced due to continuous chemical reactions, the level of the working liquids F1 and F2 in the reaction device 20 will still be higher than the low water level L. Therefore, the structure of the detector 211 is barely exposed to the air (especially, when the detector 211 is lying down, its height h after being placed does not exceed the warning water level W, causing the detector 211 to The detection system 2 will not be exposed to air at all during normal operation), thereby effectively preventing the detector 211 from being rusted and damaged.

Therefore, during the detection process of the reflow operation, the detector 211 of the analysis device 21 can maintain the accuracy of the oxygen concentration measurement, which can improve the reliability of the reflow operation and make the machines related to subsequent processes operate normally.

The above embodiments are used to exemplify the principle of the present invention and its effects, but not to limit the present invention. Anyone skilled in the art can modify the above embodiments without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the rights of the present invention should be listed in the scope of patent application described later.

Claims (15)

A detection system includes: a reaction device for loading a reaction liquid and a reaction gas; a liquid supply device for loading the reaction liquid; a control device for a liquid based on the reaction liquid of the reaction device Position data to control the liquid supply equipment to supply the reaction liquid to the reaction equipment; and analysis equipment, which includes a detector for detecting the oxygen content of the reaction. The detection system according to item 1 of the scope of patent application, wherein the reaction equipment is a box body having a storage space for loading the working liquid, and a monitor provided in the storage space, and the The monitor is used to detect the height position of the working liquid in the storage space. The detection system according to item 2 of the scope of patent application, wherein the height position of the working liquid in the storage space is defined as a high water level, a low water level, or a warning water level. The detection system according to item 1 of the patent application scope, wherein the reaction device has a monitor for detecting the liquid level of the working liquid and transmitting a message to the control device. The detection system according to item 1 of the scope of the patent application, wherein the analysis device further includes an electronic device for analyzing and processing the oxygen content. The detection system according to item 1 of the scope of patent application, wherein the detector is a probe type. The detection system according to item 6 of the scope of patent application, wherein the detector is placed flat in the reaction equipment. The detection system according to item 6 of the scope of patent application, wherein the detector is reclining in the reaction device. The detection system according to item 1 of the scope of patent application, wherein the detector is placed on the bottom of the reaction device. The detection system according to item 1 of the scope of patent application, wherein the detector is lower than the warning water level set by the reaction equipment. The detection system according to item 1 of the scope of patent application, wherein the liquid supply device includes a detector for measuring and checking the liquid level of the working liquid in the liquid supply device. The detection system according to item 1 of the patent application scope, wherein the liquid supply device includes a pipeline communicating with the reaction device. The detection system according to item 12 of the scope of patent application, wherein the pipeline is provided with a switch for opening or preventing the reactive liquid from entering the reaction equipment. The detection system according to item 1 of the scope of patent application, wherein the control device includes a control device for receiving and processing liquid level data of the reaction liquid of the reaction device to control the liquid supply device to supply the effect. Liquid to the reaction equipment. The detection system according to item 14 of the scope of patent application, wherein the control device further includes an electronic device for receiving a signal from the control device and issuing a warning signal.