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TWI620019B - Alkali developing type thermosetting resin composition, printed wiring board - Google Patents

Alkali developing type thermosetting resin composition, printed wiring board Download PDF

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TWI620019B
TWI620019B TW102117522A TW102117522A TWI620019B TW I620019 B TWI620019 B TW I620019B TW 102117522 A TW102117522 A TW 102117522A TW 102117522 A TW102117522 A TW 102117522A TW I620019 B TWI620019 B TW I620019B
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alkali
resin composition
thermosetting resin
developable
resin
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TW102117522A
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TW201407285A (en
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Arata Endo
Shoji Minegishi
Masao Arima
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Taiyo Ink Mfg Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/32Epoxy compounds containing three or more epoxy groups
    • C08G59/38Epoxy compounds containing three or more epoxy groups together with di-epoxy compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/68Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the catalysts used
    • C08G59/681Metal alcoholates, phenolates or carboxylates
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/285Permanent coating compositions
    • H05K3/287Photosensitive compositions

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials For Photolithography (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)

Abstract

本發明提供即使高度填充無機填充劑時,亦能夠以顯影形成圖型層之鹼顯影型之熱硬化性樹脂組成物、印刷配線板。進一步地,本發明之目的,係提供可形成冷熱循環特性優良之圖型層的鹼顯影型之熱硬化性樹脂組成物、印刷配線板。 The present invention provides an alkali-developable thermosetting resin composition and printed wiring board capable of forming a patterned layer by development even when highly filled with an inorganic filler. Furthermore, an object of the present invention is to provide an alkali-developable thermosetting resin composition and a printed wiring board that can form a pattern layer having excellent cold-heat cycle characteristics.

一種鹼顯影型之熱硬化性樹脂組成物,其特徵為含有鹼顯影性樹脂、熱反應性化合物、無機填充劑、及光鹼產生劑,且藉由以選擇性的光照射使前述鹼顯影性樹脂與前述熱反應性化合物進行加成反應,能夠以鹼顯影形成負型圖型。 An alkali-developable thermosetting resin composition characterized by containing an alkali-developable resin, a heat-reactive compound, an inorganic filler, and a photo-alkali generator, and the alkali-developable alkali is developed by selective light irradiation The addition reaction of the resin with the aforementioned heat-reactive compound can form a negative pattern by alkali development.

Description

鹼顯影型之熱硬化性樹脂組成物、印刷配線板 Alkali developing type thermosetting resin composition, printed wiring board

本發明係關於鹼顯影型之熱硬化性樹脂組成物、印刷配線板。 The present invention relates to an alkali-developable thermosetting resin composition and a printed wiring board.

近年來,作為印刷配線板或可撓性印刷配線板用之抗焊阻劑的材料,由於對環境問題的考量,使用鹼水溶液作為顯影液的鹼顯影型之光硬化性樹脂組成物成為主流。作為如此之鹼顯影型之光硬化性樹脂組成物,如專利文獻1、2所示,一般係使用包含由環氧樹脂改質所衍生之丙烯酸環氧酯改質樹脂(以下,亦有略記為丙烯酸環氧酯者)之樹脂組成物。 In recent years, as materials for solder resists for printed wiring boards or flexible printed wiring boards, due to environmental concerns, alkali-developing photocurable resin compositions using an alkaline aqueous solution as a developing solution have become mainstream. As such an alkali-developable photocurable resin composition, as shown in Patent Documents 1 and 2, a modified resin containing epoxy acrylate derived from epoxy resin modification is generally used (hereinafter, it is also abbreviated as Resin composition of epoxy acrylate).

做為使用如此之光硬化性樹脂組成物的焊阻劑之形成方法,係有於基材將光硬化性樹脂組成物塗佈及乾燥而形成樹脂層,對該樹脂層光照射為圖型狀後,以鹼顯影液顯影,藉以形成指定圖型之方法。 As a method of forming a solder resist using such a photo-curable resin composition, a photo-curable resin composition is applied and dried on a substrate to form a resin layer, and the resin layer is irradiated with light in a pattern Afterwards, it is developed with an alkaline developer to form a designated pattern.

又,印刷配線板或可撓性印刷配線板,係安裝於各種機器而被使用。因此,要求亦對於溫度等環境的急遽變化具有耐性。因此,關於抗焊阻劑亦被要求高的溫 度變化耐性,但熱硬化性樹脂與基材或銅、底部填膠等之基材形成材料的線膨脹係數(CTE)之差為大時,於TCT(熱循環試驗)中會有於阻劑產生裂痕的問題。 In addition, printed wiring boards or flexible printed wiring boards are used by being mounted on various devices. Therefore, it is required to be resistant to rapid changes in the environment such as temperature. Therefore, the solder resist is also required to have a high temperature Resistance to temperature change, but when the difference between the linear expansion coefficient (CTE) of the thermosetting resin and the substrate or copper, underfill and other substrate forming materials is large, it may be included in the TCT (thermal cycle test). The problem of cracks.

對於此,近年來廣為進行將熱硬化性樹脂之CTE配合周邊構件材料之CTE。例如,一般而言藉由將無機填料高度填充於熱硬化性樹脂,使CTE降低,藉以抑制硬化收縮。 Regarding this, in recent years, it has been widely carried out to combine CTE of thermosetting resin with CTE of peripheral member materials. For example, in general, by highly filling an inorganic filler with a thermosetting resin, the CTE is reduced to suppress curing shrinkage.

[先前技術文獻] [Prior Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本特開昭61-243869號公報(申請專利範圍) [Patent Document 1] Japanese Unexamined Patent Publication No. 61-243869 (applicable patent scope)

[專利文獻2]日本特開平3-250012號公報(申請專利範圍) [Patent Document 2] Japanese Patent Laid-Open No. 3-250012 (Patent Application Range)

但是,於熱硬化性樹脂組成物高度填充無機填充劑時,會阻礙光穿透至深部。此時,會有得不到解像性,難以形成圖型層之問題。 However, when the thermosetting resin composition is highly filled with an inorganic filler, it prevents light from penetrating to the deep part. At this time, there is a problem that resolution is not obtained and it is difficult to form a pattern layer.

因而本發明之目的,為提供即使高度填充無機填充劑,亦可藉由顯影形成圖型層之鹼顯影型之熱硬化性樹脂組成物、印刷配線板。進一步,本發明之目的為提供可形成冷熱循環特性優良之圖型層的鹼顯影型之熱硬化 性樹脂組成物、印刷配線板。 Therefore, an object of the present invention is to provide an alkali-developable thermosetting resin composition and a printed wiring board that can form a pattern layer by development even if highly filled with an inorganic filler. Further, the object of the present invention is to provide an alkali-developing type thermal hardening capable of forming a pattern layer with excellent cold-heat cycle characteristics Resin composition, printed wiring board.

本發明者等為了解決上述課題而努力探討的結果,發現藉由採取以下構成,可解決上述課題,而完成了本發明。 The inventors of the present invention have worked hard to solve the above-mentioned problems and found that the above-mentioned problems can be solved by adopting the following configuration, and the present invention has been completed.

亦即,本發明之鹼顯影型之熱硬化性樹脂組成物,其特徵係含有鹼顯影性樹脂、熱反應性化合物、無機填充劑、及光鹼產生劑,且藉由以選擇性的光照射使前述鹼顯影性樹脂與前述熱反應性化合物進行加成反應,能夠以鹼顯影形成負型圖型。 That is, the alkali-developable thermosetting resin composition of the present invention is characterized by containing an alkali-developable resin, a heat-reactive compound, an inorganic filler, and a photobase generator, and by selective light irradiation The alkali-developable resin and the heat-reactive compound undergo an addition reaction to form a negative pattern by alkali development.

本發明之鹼顯影型之熱硬化性樹脂組成物,前述無機填充劑之平均粒徑較佳為1μm以下。 In the alkali-developable thermosetting resin composition of the present invention, the average particle diameter of the inorganic filler is preferably 1 μm or less.

又,本發明之鹼顯影型之熱硬化性樹脂組成物,前述無機填充劑與樹脂之折射率差較佳為0.3以下。 In addition, in the alkali-developable thermosetting resin composition of the present invention, the refractive index difference between the inorganic filler and the resin is preferably 0.3 or less.

又,本發明之鹼顯影型之熱硬化性樹脂組成物,前述無機填充劑之折射率較佳為1.45以上、1.65以下。 Furthermore, in the alkali-developable thermosetting resin composition of the present invention, the refractive index of the inorganic filler is preferably 1.45 or more and 1.65 or less.

又,本發明之鹼顯影型之熱硬化性樹脂組成物,較佳為藉由光照射而於DSC測定中會產生發熱峰值;或,光照射後鹼顯影型之熱硬化性樹脂組成物在DSC測定中之發熱開始溫度,比未照射之鹼顯影型之熱硬化性樹脂組成物在DSC測定中之發熱開始溫度更低;或者,光照射後之鹼顯影型之熱硬化性樹脂組成物在DSC測定 中之發熱峰值溫度,比未照射之鹼顯影型之熱硬化性樹脂組成物在DSC測定中之發熱峰值溫度更低。 In addition, the alkali-developable thermosetting resin composition of the present invention preferably generates a peak of heat generation in DSC measurement by light irradiation; or, the alkali-developing thermosetting resin composition after light irradiation in DSC The heating start temperature during the measurement is lower than the heating start temperature of the non-irradiated alkali-developing thermosetting resin composition in DSC measurement; or, the alkali-developing thermosetting resin composition after light irradiation is in DSC Determination The peak heat generation temperature in the range is lower than the peak heat generation temperature in the DSC measurement of the non-irradiated alkali-developing thermosetting resin composition.

藉由本發明,可提供能夠以顯影形成圖型層之鹼顯影型之熱硬化性樹脂組成物、印刷配線板。進一步地,藉由本發明,可提供能夠形成硬化性及冷熱循環特性優良的圖型層的鹼顯影型之熱硬化性樹脂組成物、印刷配線板。 According to the present invention, it is possible to provide an alkali-developable thermosetting resin composition capable of forming a pattern layer by development, and a printed wiring board. Further, according to the present invention, it is possible to provide an alkali-developable thermosetting resin composition and a printed wiring board capable of forming a pattern layer having excellent curability and cold-heat cycle characteristics.

[圖1]圖1係顯示使用了本發明之鹼顯影型之熱硬化性樹脂組成物的圖型形成方法之一例的示意圖。 [Fig. 1] Fig. 1 is a schematic diagram showing an example of a pattern forming method using the alkali-developing thermosetting resin composition of the present invention.

[圖2]圖2係由本發明之實施例1之鹼顯影型之熱硬化性樹脂組成物所構成的樹脂層之DSC線圖。 [FIG. 2] FIG. 2 is a DSC diagram of a resin layer composed of the alkali-developable thermosetting resin composition of Example 1 of the present invention.

[圖3]圖3係用以說明通孔上之凹陷評估的兩面印刷配線基材之截面圖。 [FIG. 3] FIG. 3 is a cross-sectional view of a double-sided printed wiring substrate for explaining the evaluation of depressions on a through hole.

本發明之鹼顯影型之熱硬化性樹脂組成物(以下,亦有略記為「熱硬化性樹脂組成物」的情況),其特徵係含有鹼顯影性樹脂、熱反應性化合物、無機填充劑、及光鹼產生劑,且藉由以選擇性的光照射使鹼顯影性樹脂 與熱反應性化合物進行加成反應,能夠以鹼顯影形成負型圖型。此處,圖型形成意指形成圖型狀之硬化物、亦即圖型層。 The alkali-developable thermosetting resin composition of the present invention (hereinafter sometimes also referred to as "thermosetting resin composition") is characterized by containing an alkali-developable resin, a heat-reactive compound, an inorganic filler, And photo-alkali generator, and alkali-developable resin by selective light irradiation Addition reaction with heat-reactive compounds can develop negative patterns with alkali development. Here, pattern formation means forming a pattern-shaped hardened object, that is, a pattern layer.

由熱硬化性樹脂組成物所構成之樹脂層中,藉由光照射而於表面會產生鹼。再者,藉由所產生之鹼,光鹼產生劑會不安定化,可認為鹼會進一步化學增殖至深部。此處,鹼係作為鹼顯影性樹脂與熱反應性化合物進行加成反應時的觸媒來作用,同時加成反應會進行至深部,因此於光照射部,樹脂層會硬化至深部。 In a resin layer composed of a thermosetting resin composition, alkali is generated on the surface by light irradiation. Furthermore, with the generated base, the photobase generator will become unstable, and it may be considered that the base will further chemically proliferate to the deep part. Here, the alkali system acts as a catalyst in the addition reaction between the alkali-developable resin and the heat-reactive compound, and at the same time, the addition reaction proceeds to the deep part. Therefore, in the light irradiation part, the resin layer is hardened to the deep part.

因此,即使高度填充無機填充劑的情況,將熱硬化性樹脂組成物光照射為圖型狀後,藉由鹼顯影,將未照射部去除,亦可容易地形成圖型層。 Therefore, even when the inorganic filler is highly filled, the pattern layer can be easily formed after the thermosetting resin composition is irradiated with light in a pattern shape and the non-irradiated portion is removed by alkali development.

又,本發明之熱硬化性樹脂組成物,藉由鹼顯影性樹脂與熱反應性化合物進行加成反應而硬化,因此相較於光硬化性樹脂組成物,可得到形變或硬化收縮更少的圖型層。 In addition, the thermosetting resin composition of the present invention is cured by the addition reaction of the alkali-developable resin and the thermoreactive compound. Therefore, compared with the photocurable resin composition, less deformation or curing shrinkage can be obtained. Graphic layer.

熱硬化性樹脂組成物,亦可為在未照射之狀態即使加熱亦不硬化,光照射後才成為可因熱硬化之組成物。 The thermosetting resin composition may not be cured even if heated in an unirradiated state, and becomes a composition that can be cured by heat only after light irradiation.

本發明之熱硬化性樹脂組成物,較佳為藉由光照射而於DSC測定中會產生發熱峰值;或,光照射後之熱硬化性樹脂組成物在DSC測定中之發熱開始溫度,比未照射之熱硬化性樹脂組成物在DSC測定中之發熱開始溫度更低;或,光照射後之熱硬化性樹脂組成物在DSC測定中之發熱峰值溫度,比未照射之熱硬化性樹脂組成物 在DSC測定中之發熱峰值溫度更低。 The thermosetting resin composition of the present invention preferably generates a heating peak in the DSC measurement by light irradiation; or, the heating start temperature of the thermosetting resin composition after the light irradiation in the DSC measurement is better than The irradiated thermosetting resin composition has a lower heating start temperature in the DSC measurement; or, the peak heat generation temperature in the DSC measurement of the irradiated thermosetting resin composition is lower than that of the unirradiated thermosetting resin composition The peak heat generation temperature in the DSC measurement is lower.

又,本發明之熱硬化性樹脂組成物,光照射後之熱硬化性樹脂組成物與未照射之熱硬化性樹脂組成物在DSC測定中之發熱開始溫度的溫度差(亦稱為△T start))或發熱峰值溫度之溫度差(亦稱為△T peak),較佳為10℃以上、更佳為20℃以上、又更佳為30℃以上。 In addition, the thermosetting resin composition of the present invention has a temperature difference between the thermosetting resin composition after light irradiation and the unirradiated thermosetting resin composition in the DSC measurement (also referred to as △ T start) )) Or the temperature difference (also referred to as ΔT peak) of the peak heat generation temperature, preferably 10 ° C or higher, more preferably 20 ° C or higher, and still more preferably 30 ° C or higher.

此處,△T start,意指準備同樣組成之熱硬化性樹脂組成物,一者進行光照射後,另一者不進行光照射,直接分別進行DSC(示差掃描熱量測定、Differential scanning calorimetry)測定後,光照射後樹脂組成物顯示硬化反應開始之發熱開始溫度與未照射之樹脂組成物之發熱開始溫度的溫度差。△T peak,係指同樣地進行DSC測定後,光照射、未照射之樹脂組成物之發熱峰值溫度的溫度差。 Here, △ T start means that a thermosetting resin composition of the same composition is prepared. After one is irradiated with light and the other is not irradiated with light, the DSC (differential scanning calorimetry) measurement is performed separately. After that, the resin composition after light irradiation showed a temperature difference between the heat generation start temperature at which the curing reaction started and the heat generation start temperature of the unirradiated resin composition. ΔT peak refers to the temperature difference between the peak temperature of the resin composition after light irradiation and the non-irradiation after the DSC measurement is performed in the same manner.

再者,光照射後之熱硬化性樹脂組成物在DSC測定中之光照射量,係為提高照射量,而不再引起光照射所致之熱硬化性樹脂組成物的發熱峰值溫度偏移(飽和)的光照射量。 In addition, the light irradiation amount of the thermosetting resin composition after light irradiation in the DSC measurement is to increase the irradiation amount without causing a shift in the heating peak temperature of the thermosetting resin composition due to light irradiation ( Saturation) light exposure.

藉由△T start或△T peak為10℃以上,可抑制未照射部因鹼顯影而殘存的所謂模糊、或光照射部因鹼顯影而被去除的所謂侵蝕的發生。又,藉由使△T start或△T peak為10℃以上,能夠使後述加熱步驟(B1)中可採取的加熱溫度範圍變廣。 When ΔT start or ΔT peak is 10 ° C. or higher, the occurrence of so-called blur remaining in the non-irradiated portion due to alkali development or the so-called erosion where the light-irradiated portion is removed due to alkali development can be suppressed. In addition, by setting ΔT start or ΔT peak to 10 ° C. or higher, the heating temperature range that can be taken in the heating step (B1) described later can be widened.

以下,詳述熱硬化性樹脂組成物之各成分。 Hereinafter, each component of the thermosetting resin composition will be described in detail.

[鹼顯影性樹脂] [Alkali developing resin]

鹼顯影性樹脂,係含有酚性羥基、硫醇基及羧基中1種以上之官能基,且能夠以鹼溶液顯影之樹脂,較佳可列舉具有2個以上酚性羥基之化合物、含有羧基之樹脂、具有酚性羥基及羧基之化合物、具有2個以上硫醇基之化合物。 The alkali-developable resin is a resin containing one or more functional groups among a phenolic hydroxyl group, a thiol group, and a carboxyl group, and can be developed with an alkaline solution, preferably a compound having two or more phenolic hydroxyl groups, a carboxyl group-containing compound Resins, compounds with phenolic hydroxyl and carboxyl groups, compounds with more than two thiol groups.

具有2個以上之酚性羥基的化合物,可列舉苯酚酚醛清漆樹脂、烷基苯酚酚醛清漆樹脂、雙酚A酚醛清漆樹脂、二環戊二烯型酚樹脂、Xylok型酚樹脂、萜烯改質酚樹脂、聚乙烯酚類、雙酚F、雙酚S型酚樹脂、聚-P-羥基苯乙烯、萘酚與醛類之縮合物、二羥基萘與醛類之縮合物等公知慣用之酚樹脂。 Compounds having two or more phenolic hydroxyl groups include phenol novolak resins, alkylphenol novolak resins, bisphenol A novolak resins, dicyclopentadiene type phenol resins, Xylok type phenol resins, terpene modification Phenol resins, polyvinyl phenols, bisphenol F, bisphenol S type phenol resins, poly-P-hydroxystyrene, condensates of naphthol and aldehydes, condensates of dihydroxynaphthalene and aldehydes, etc. Resin.

又,酚樹脂可使用使用了具有聯苯骨架、或伸苯基骨架、或其兩者骨架之化合物;與作為含有酚性羥基之化合物之酚、鄰甲酚、對甲酚、間甲酚、2,3-二甲酚、2,4-二甲酚、2,5-二甲酚、2,6-二甲酚、3,4-二甲酚、3,5-二甲酚、兒茶酚、間苯二酚、氫醌、甲基氫醌、2,6-二甲基氫醌、三甲基氫醌、五倍子酚、間苯三酚等來合成之具有各種骨架之酚樹脂。 In addition, as the phenol resin, compounds having a biphenyl skeleton, a phenylene skeleton, or both skeletons; and phenol, o-cresol, p-cresol, m-cresol, which are phenolic hydroxyl-containing compounds, can be used. 2,3-xylenol, 2,4-xylenol, 2,5-xylenol, 2,6-xylenol, 3,4-xylenol, 3,5-xylenol, catechin Phenol, resorcinol, hydroquinone, methylhydroquinone, 2,6-dimethylhydroquinone, trimethylhydroquinone, gallophenol, resorcinol, etc. are synthesized with various skeleton phenol resins.

該等可1種單獨使用、亦可組合2種以上使用。 These can be used alone or in combination of two or more.

含有羧基之樹脂,可使公知之含有羧基之樹脂。藉由羧基之存在,可使樹脂組成物成為鹼顯影性。又,於羧基之外,亦可使用於分子內具有乙烯性不飽和鍵之化合物,本發明中,作為含有羧基之樹脂,較佳為僅使 用例如下述(1)之不具有乙烯性不飽和雙鍵的含有羧基之樹脂。 The carboxyl group-containing resin can be a known carboxyl group-containing resin. The presence of the carboxyl group makes the resin composition alkali developable. Furthermore, in addition to the carboxyl group, a compound having an ethylenic unsaturated bond in the molecule can also be used. In the present invention, as the carboxyl group-containing resin, it is preferred to use only For example, the following carboxyl group-containing resin having no ethylenically unsaturated double bond (1) is used.

本發明中可使用之含有羧基之樹脂的具體例,可列舉如以下列舉之化合物(寡聚物及聚合物均可)。 Specific examples of the carboxyl group-containing resin usable in the present invention include the compounds listed below (both oligomers and polymers).

(1)(甲基)丙烯酸等之不飽和羧酸,與苯乙烯、α-甲基苯乙烯、低級烷基(甲基)丙烯酸酯、異丁烯等含有不飽和基之化合物共聚合所得之含有羧基之樹脂。再者,低級烷基意指碳原子數1~5之烷基。 (1) Unsaturated carboxylic acid such as (meth) acrylic acid, containing carboxyl group by copolymerization with unsaturated group-containing compounds such as styrene, α-methylstyrene, lower alkyl (meth) acrylate, isobutylene, etc. Of resin. Furthermore, lower alkyl means an alkyl group having 1 to 5 carbon atoms.

(2)脂肪族二異氰酸酯、分支脂肪族二異氰酸酯、脂環式二異氰酸酯、芳香族二異氰酸酯等之二異氰酸酯,與二羥甲基丙酸、二羥甲基丁烷酸等之含有羧基之二醇化合物及聚碳酸酯系多元醇、聚醚系多元醇、聚酯系多元醇、聚烯烴系多元醇、丙烯酸系多元醇、雙酚A系環氧烷加成物二醇、具有酚性羥基及醇性羥基之化合物等之二醇化合物之加成聚合反應而得之含有羧基之胺基甲酸酯樹脂。 (2) Diisocyanate such as aliphatic diisocyanate, branched aliphatic diisocyanate, alicyclic diisocyanate, aromatic diisocyanate, and carboxyl containing dimethylolpropionic acid, dimethylolbutanoic acid Alcohol compounds and polycarbonate-based polyols, polyether-based polyols, polyester-based polyols, polyolefin-based polyols, acrylic-based polyols, bisphenol A-based alkylene oxide adduct diol, having phenolic hydroxyl groups Carbamate resins containing carboxyl groups obtained by addition polymerization of glycol compounds such as alcoholic hydroxyl compounds.

(3)脂肪族二異氰酸酯、分支脂肪族二異氰酸酯、脂環式二異氰酸酯、芳香族二異氰酸酯等之二異氰酸酯化合物,與聚碳酸酯系多元醇、聚醚系多元醇、聚酯系多元醇、聚烯烴系多元醇、丙烯酸系多元醇、雙酚A系環氧烷加成物二醇、具有酚性羥基及醇性羥基之化合物等的二醇化合物之加成聚合反應而得之胺基甲酸酯樹脂之末端與酸酐反應而成之含有末端羧基之胺基甲酸酯樹脂。 (3) Diisocyanate compounds such as aliphatic diisocyanate, branched aliphatic diisocyanate, alicyclic diisocyanate, aromatic diisocyanate, and polycarbonate-based polyol, polyether-based polyol, polyester-based polyol, Aminomethyl obtained by the addition polymerization of diol compounds such as polyolefin polyols, acrylic polyols, bisphenol A alkylene oxide adduct diols, compounds having phenolic hydroxyl groups and alcoholic hydroxyl groups An urethane resin containing a terminal carboxyl group formed by reacting the end of the ester resin with an acid anhydride.

(4)二異氰酸酯,與雙酚A型環氧樹脂、氫化 雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、聯二甲酚型環氧樹脂、聯酚型環氧樹脂等之2官能環氧樹脂之(甲基)丙烯酸酯或其部分酸酐改質物、含有羧基之二醇化合物及二醇化合物之加成聚合反應而得之含有羧基之胺基甲酸酯樹脂。 (4) Diisocyanate, with bisphenol A epoxy resin, hydrogenation Bifunctional epoxy resin of bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bixylenol type epoxy resin, biphenol type epoxy resin, etc. (methyl ) Carboxyl group-containing urethane resin obtained by the addition polymerization reaction of acrylic acid ester or its partial anhydride modified product, carboxyl group-containing diol compound and diol compound.

(5)上述(2)或(4)之樹脂合成中,添加(甲基)丙烯酸羥基烷酯等分子中具有1個羥基與1個以上(甲基)丙烯醯基之化合物,而末端(甲基)丙烯醯化之含有羧基之胺基甲酸酯樹脂。 (5) In the resin synthesis of (2) or (4) above, a compound having one hydroxyl group and one or more (meth) acryloyl groups in the molecule such as hydroxyalkyl (meth) acrylate is added, and the terminal ( Group) Carbamate resin containing carboxyl group which is acrylamide.

(6)上述(2)或(4)之樹脂合成中,添加異佛酮二異氰酸酯與季戊四醇三丙烯酸酯之等莫耳反應物等之分子中具有1個異氰酸酯基與1個以上(甲基)丙烯醯基之化合物,而末端(甲基)丙烯醯化之含有羧基之胺基甲酸酯樹脂。 (6) In the synthesis of the resin of (2) or (4) above, the mole reaction product such as isophorone diisocyanate and pentaerythritol triacrylate has one isocyanate group and one or more (methyl) groups in the molecule Acrylic compound, and terminal (meth) acrylic compound containing carboxyl group carbamate resin.

(7)使(甲基)丙烯酸等之不飽和單羧酸與如前述之多官能(固體)環氧樹脂反應,而於存在於側鏈之羥基加成鄰苯二甲酸酐、四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐等之2元酸酐的含有羧基之樹脂。 (7) Reaction of unsaturated monocarboxylic acid such as (meth) acrylic acid with the above-mentioned multifunctional (solid) epoxy resin, and addition of phthalic anhydride and tetrahydrophthalic acid to the hydroxyl group present in the side chain Carboxylic acid-containing resins of dibasic acid anhydrides such as dicarboxylic anhydride and hexahydrophthalic anhydride.

(8)使飽和單羧酸與如前述之多官能(固體)環氧樹脂反應,於存在於側鏈之羥基加成鄰苯二甲酸酐、四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐等之2元酸酐的含有羧基之樹脂。 (8) The saturated monocarboxylic acid is reacted with the polyfunctional (solid) epoxy resin as described above, and phthalic anhydride, tetrahydrophthalic anhydride, and hexahydrophthalic acid are added to the hydroxyl group present in the side chain. A carboxyl group-containing resin of binary acid anhydride such as formic anhydride.

(9)使(甲基)丙烯酸與將2官能(固體)環氧樹脂之羥基進一步以表氯醇環氧化之多官能環氧樹脂反應,於 生成之羥基加成2元酸酐之含有羧基之樹脂。 (9) Reacting (meth) acrylic acid with a multifunctional epoxy resin that epoxidizes the hydroxy group of a bifunctional (solid) epoxy resin with epichlorohydrin, in The resulting hydroxyl group is added to the resin containing carboxyl group with a dibasic acid anhydride.

(10)使二羧酸與如後述之多官能氧雜環丁烷樹脂反應,於生成之1級羥基加成2元酸酐之含有羧基之聚酯樹脂。 (10) A carboxyl group-containing polyester resin in which a dicarboxylic acid is reacted with a polyfunctional oxetane resin as described later to add a dibasic acid anhydride to the generated first-stage hydroxyl group.

(11)使多元酸酐與使1分子中具有複數個酚性羥基之化合物與環氧乙烷、環氧丙烷等環氧烷反應而得之反應生成物反應,所得到之含有羧基之樹脂。 (11) A reaction product obtained by reacting a polybasic acid anhydride and a compound having a plurality of phenolic hydroxyl groups in one molecule with an alkylene oxide such as ethylene oxide and propylene oxide to obtain a carboxyl group-containing resin.

(12)使飽和單羧酸與使1分子中具有複數個酚性羥基之化合物與環氧乙烷、環氧丙烷等環氧烷反應而得之反應生成物反應,所得之反應生成物與多元酸酐反應而得之含有羧基之樹脂。 (12) The reaction product obtained by reacting a saturated monocarboxylic acid and a compound having a plurality of phenolic hydroxyl groups in one molecule with alkylene oxide such as ethylene oxide and propylene oxide is reacted. A resin containing carboxyl group obtained by the reaction of acid anhydride.

(13)使含有不飽和基之單羧酸與使1分子中具有複數個酚性羥基之化合物與環氧乙烷、環氧丙烷等環氧烷反應而得之反應生成物反應,所得之反應生成物與多元酸酐反應而得之含有羧基之樹脂。 (13) The reaction product obtained by reacting a monocarboxylic acid containing an unsaturated group and a compound having a plurality of phenolic hydroxyl groups in one molecule with alkylene oxide such as ethylene oxide and propylene oxide, and the resulting reaction A carboxyl group-containing resin obtained by reacting the product with a polybasic acid anhydride.

(14)使飽和單羧酸與使1分子中具有複數個酚性羥基之化合物與碳酸伸乙酯、碳酸伸丙酯等之環狀碳酸酯合物反應而得之反應生成物反應,所得之反應生成物與多元酸酐反應而得之含有羧基之樹脂。 (14) The reaction product obtained by reacting a saturated monocarboxylic acid with a compound having a plurality of phenolic hydroxyl groups in one molecule and a cyclic carbonate compound such as ethyl carbonate and propyl carbonate is obtained. A carboxyl group-containing resin obtained by reacting the reaction product with a polybasic acid anhydride.

(15)使多元酸酐與使1分子中具有複數個酚性羥基之化合物與碳酸伸乙酯、碳酸伸丙酯等之環狀碳酸酯合物反應而得之反應生成物反應而得之含有羧基之樹脂。 (15) A reaction product obtained by reacting a polybasic acid anhydride with a compound having a plurality of phenolic hydroxyl groups in one molecule and a cyclic carbonate compound such as ethyl carbonate and propyl carbonate, etc., containing a carboxyl group Of resin.

(16)使含有不飽和基之單羧酸與使1分子中具有複數個酚性羥基之化合物與碳酸伸乙酯、碳酸伸丙酯等 之環狀碳酸酯合物反應而得之反應生成物反應,所得之反應生成物與多元酸酐反應而得之含有羧基之樹脂。 (16) Use monocarboxylic acids containing unsaturated groups and compounds with a plurality of phenolic hydroxyl groups in one molecule and ethyl carbonate, propyl carbonate, etc. The reaction product obtained by the reaction of the cyclic carbonate compound reacts, and the resulting reaction product reacts with a polybasic acid anhydride to obtain a carboxyl group-containing resin.

(17)使p-羥基苯乙醇等之1分子中具有至少1個醇性羥基與1個酚性羥基之化合物與飽和單羧酸,與1分子中具有複數個環氧基之環氧化合物反應,再使馬來酸酐、四氫鄰苯二甲酸酐、偏苯三甲酸酐、苯均四酸酐、己二酸等之多元酸酐對所得之反應生成物之醇性羥基反應而得之含有羧基之樹脂。 (17) A compound having at least one alcoholic hydroxyl group and one phenolic hydroxyl group in one molecule of p-hydroxyphenylethanol and the like and a saturated monocarboxylic acid is reacted with an epoxy compound having a plurality of epoxy groups in one molecule , And then react with polyanhydrides such as maleic anhydride, tetrahydrophthalic anhydride, trimellitic anhydride, pyromellitic anhydride, adipic acid and the like to the alcoholic hydroxyl group of the resulting reaction product to obtain a carboxyl group-containing resin .

(18)使p-羥基苯乙醇等之1分子中具有至少1個醇性羥基與1個酚性羥基之化合物,與1分子中具有複數個環氧基之環氧化合物反應,再使馬來酸酐、四氫鄰苯二甲酸酐、偏苯三甲酸酐、苯均四酸酐、己二酸等之多元酸酐對所得之反應生成物之醇性羥基反應而得之含有羧基之樹脂。 (18) A compound having at least one alcoholic hydroxyl group and one phenolic hydroxyl group in one molecule of p-hydroxyphenylethanol and the like is reacted with an epoxy compound having a plurality of epoxy groups in one molecule, and then Malay An acid anhydride, tetrahydrophthalic anhydride, trimellitic anhydride, pyromellitic anhydride, adipic acid and other polyanhydrides react with the alcoholic hydroxyl group of the resulting reaction product to obtain a carboxyl group-containing resin.

(19)使p-羥基苯乙醇等之1分子中具有至少1個醇性羥基與1個酚性羥基之化合物與(甲基)丙烯酸等之含有不飽和基之單羧酸,與1分子中具有複數個環氧基之環氧化合物反應,再使馬來酸酐、四氫鄰苯二甲酸酐、偏苯三甲酸酐、苯均四酸酐、己二酸等多元酸酐對所得之反應生成物之醇性羥基反應而得之含有羧基之樹脂。 (19) A compound having at least one alcoholic hydroxyl group and one phenolic hydroxyl group in one molecule of p-hydroxyphenylethanol and the like, and an unsaturated group-containing monocarboxylic acid such as (meth) acrylic acid in one molecule An epoxy compound having a plurality of epoxy groups is reacted, and then the polyhydric anhydride such as maleic anhydride, tetrahydrophthalic anhydride, trimellitic anhydride, pyromellitic anhydride, and adipic acid is reacted with the alcohol of the resulting reaction product Resin containing carboxyl groups from the reaction of reactive hydroxyl groups.

(20)進一步使環氧丙基(甲基)丙烯酸酯、α-甲基環氧丙基(甲基)丙烯酸酯等之分子中具有1個環氧基與1個以上之(甲基)丙烯醯基的化合物對如上述(1)~(19)中任一項之樹脂加成而得之含有羧基之樹脂。 (20) Further, in the molecule of epoxypropyl (meth) acrylate, α-methylepoxypropyl (meth) acrylate, etc., it has one epoxy group and one or more (meth) propylene The carboxyl group-containing resin is obtained by adding the compound of the acetyl group to the resin as described in any one of (1) to (19) above.

如上所述之鹼顯影性樹脂,於主鏈.聚合物之側鏈具有多數的羧基或羥基等,因此能夠進行鹼水溶液之顯影。 The alkali-developable resin as described above is in the main chain. The side chain of the polymer has many carboxyl groups, hydroxyl groups, etc., so it can be developed with an alkaline aqueous solution.

又,上述含有羧基之樹脂之羥基當量或羧基當量,較佳為80~900g/eq.、更佳為100~700g/eq.。羥基當量或羧基當量超過900g/eq.時,可能無法得到圖型層之密合性、或難以鹼顯影。另一方面,羥基當量或羧基當量低於80g/eq.時,為了使顯影液所致之光照射部的溶解進行,線會過度地變細,隨情況不同可能會使光照射部與未照射部無區別地以顯影液溶解剝離,難以正常描繪阻劑圖型,故不佳。又,羧基當量或酚基當量大時,即使鹼顯影性樹脂之含量少時,亦能夠顯影,故較佳。 In addition, the hydroxyl equivalent or carboxyl equivalent of the carboxyl group-containing resin is preferably 80 to 900 g / eq., And more preferably 100 to 700 g / eq. When the hydroxyl equivalent or carboxyl equivalent exceeds 900 g / eq., The adhesion of the pattern layer may not be obtained, or alkali development may be difficult. On the other hand, when the hydroxyl equivalent or carboxyl equivalent is less than 80g / eq., In order to dissolve the light irradiated portion by the developing solution, the line will be excessively thinned, and the light irradiated portion and the unirradiated The parts are dissolved and peeled off with the developer without distinction, and it is difficult to draw the resist pattern normally, so it is not good. In addition, when the carboxyl group equivalent or the phenol group equivalent is large, it is possible to develop even when the content of the alkali-developable resin is small, which is preferable.

又,本發明中使用之鹼顯影性樹脂之重量平均分子量,雖隨樹脂骨架而不同,但較佳為2,000~150,000、更佳為5,000~100,000之範圍。重量平均分子量低於2,000時,可能使不黏著性能不佳,光照射後之樹脂層之耐濕性差,顯影時產生膜減少,解像度大為不佳。另一方面,重量平均分子量超過150,000時,可能使顯影性顯著惡化、儲藏安定性可能不佳。 In addition, although the weight average molecular weight of the alkali-developable resin used in the present invention varies with the resin skeleton, it is preferably in the range of 2,000 to 150,000, and more preferably in the range of 5,000 to 100,000. When the weight average molecular weight is less than 2,000, the non-adhesive performance may be poor, the moisture resistance of the resin layer after light irradiation may be poor, the film may be reduced during development, and the resolution may be poor. On the other hand, when the weight average molecular weight exceeds 150,000, the developability may be significantly deteriorated, and the storage stability may be poor.

本說明書中,(甲基)丙烯酸酯係指總稱丙烯酸酯、甲基丙烯酸酯及該等之混合物的用語,其他類似的表述亦相同。 In this specification, (meth) acrylate refers to the general term acrylate, methacrylate, and mixtures of these, and other similar expressions are also the same.

具有硫醇基之化合物,可列舉例如三羥甲基丙烷參硫代丙酸酯、季戊四醇肆硫代丙酸酯、乙二醇雙硫 代乙醇酸酯、1,4-丁二醇雙硫代乙醇酸酯、三羥甲基丙烷參硫代乙醇酸酯、季戊四醇肆硫代乙醇酸酯、二(2-巰基乙基)醚、1,4-丁烷二硫醇、1,3,5-三巰基甲基苯、1,3,5-三巰基甲基-2,4,6-三甲基苯、含有末端硫醇基之聚醚、含有末端硫醇基之聚硫醚、由環氧化合物與硫化氫之反應而得之硫醇化合物、由聚硫醇化合物與環氧化合物之反應而得之具有末端硫醇基之硫醇化合物等。 Examples of the compound having a thiol group include trimethylolpropane thiopropionate, pentaerythritol thiopropionate, and ethylene glycol disulfide Glycolate, 1,4-butanediol dithioglycolate, trimethylolpropane ginseng thioglycolate, pentaerythritol thioglycolate, bis (2-mercaptoethyl) ether, 1 , 4-butane dithiol, 1,3,5-trimercaptomethylbenzene, 1,3,5-trimercaptomethyl-2,4,6-trimethylbenzene, polymers containing terminal thiol groups Ether, polythioether containing terminal thiol group, thiol compound obtained by reaction of epoxy compound and hydrogen sulfide, thiol having terminal thiol group obtained by reaction of polythiol compound and epoxy compound Compounds etc.

鹼顯影性樹脂,較佳為含有羧基之樹脂或具有酚性羥基之化合物。又,鹼顯影性樹脂,較佳為丙烯酸環氧酯等不具有光硬化性結構之非感光性者。如此之非感光性鹼顯影性樹脂,因為不具有來自丙烯酸環氧酯之酯鍵,因此對除膠渣液之耐性高。因此可形成硬化特性優良的圖型層。又,因為不具有光硬化性結構,故可抑制硬化收縮。 The alkali-developable resin is preferably a resin containing a carboxyl group or a compound having a phenolic hydroxyl group. In addition, the alkali-developable resin is preferably a non-photosensitive one that does not have a photocurable structure, such as epoxy acrylate. Since such a non-photosensitive alkali-developable resin does not have an ester bond derived from epoxy acrylate, it has high resistance to the scum removal liquid. Therefore, it is possible to form a pattern layer having excellent hardening characteristics. In addition, since it does not have a photo-curable structure, curing shrinkage can be suppressed.

鹼顯影性樹脂為含有羧基之樹脂時,相較於酚性樹脂的情況時,能夠以弱鹼性水溶液顯影。弱鹼性水溶液可列舉溶解有碳酸鈉等者。藉由以弱鹼性水溶液顯影,可抑制光照射部被顯影。又,可使步驟(B)中之光照射時間或步驟(B1)中之加熱時間縮短。 When the alkali-developable resin is a resin containing a carboxyl group, it can be developed with a weakly alkaline aqueous solution compared to the case of a phenolic resin. Examples of the weakly alkaline aqueous solution are those in which sodium carbonate is dissolved. By developing with a weak alkaline aqueous solution, it is possible to suppress development of the light-irradiated portion. In addition, the light irradiation time in step (B) or the heating time in step (B1) can be shortened.

[熱反應性化合物] [Thermally reactive compound]

熱反應性化合物,係具有可藉由熱進行硬化反應之官能基的樹脂。可列舉環氧樹脂、多官能氧雜環丁烷化合物等。 The heat-reactive compound is a resin having a functional group capable of undergoing a hardening reaction by heat. Examples include epoxy resins and polyfunctional oxetane compounds.

上述環氧樹脂,係具有環氧基之樹脂,公知者均可使用。可列舉分子中具有2個環氧基之2官能性環氧樹脂、分子中具有多數環氧基之多官能環氧樹脂等。再者,亦可為氫化之2官能環氧化合物。 The above-mentioned epoxy resin is a resin having an epoxy group, and any known ones can be used. Examples include bifunctional epoxy resins having two epoxy groups in the molecule, and multifunctional epoxy resins having many epoxy groups in the molecule. Furthermore, it may be a hydrogenated bifunctional epoxy compound.

多官能環氧化合物,可列舉雙酚A型環氧樹脂、溴化環氧樹脂、酚醛清漆型環氧樹脂、雙酚F型環氧樹脂、氫化雙酚A型環氧樹脂、環氧丙基胺型環氧樹脂、乙內醯脲型環氧樹脂、脂環式環氧樹脂、三羥基苯基甲烷型環氧樹脂、聯二甲酚型或聯酚型環氧樹脂或該等之混合物、雙酚S型環氧樹脂、雙酚A酚醛清漆型環氧樹脂、四苯酚基乙烷型環氧樹脂、雜環式環氧樹脂、二環氧丙基鄰苯二甲酸酯樹脂、四環氧丙基二甲苯醯基乙烷樹脂、含有萘基之環氧樹脂、具有二環戊二烯骨架之環氧樹脂、甲基丙烯酸環氧丙酯共聚合系環氧樹脂、環己基馬來醯亞胺與甲基丙烯酸環氧丙酯之共聚合環氧樹脂、CTBN改質環氧樹脂等。 Multifunctional epoxy compounds include bisphenol A epoxy resin, brominated epoxy resin, novolac epoxy resin, bisphenol F epoxy resin, hydrogenated bisphenol A epoxy resin, epoxypropyl group Amine type epoxy resin, hydantoin type epoxy resin, alicyclic epoxy resin, trihydroxyphenylmethane type epoxy resin, bixylenol type or biphenol type epoxy resin or a mixture of these, Bisphenol S type epoxy resin, bisphenol A novolac type epoxy resin, tetraphenol ethane type epoxy resin, heterocyclic epoxy resin, diglycidyl phthalate resin, tetracyclic Oxypropyl xylenyl ethane resin, epoxy resin containing naphthyl group, epoxy resin having dicyclopentadiene skeleton, epoxy methacrylate copolymer epoxy resin, cyclohexyl maleic amide Copolymerized epoxy resin of imine and glycidyl methacrylate, CTBN modified epoxy resin, etc.

其他之液狀2官能性環氧樹脂,可列舉乙烯基環己烯二環氧化物、(3’,4’-環氧基環己基甲基)-3,4-環氧基環己烷羧酸酯、(3’,4’-環氧基-6’-甲基環己基甲基)-3,4-環氧基-6-甲基環己烷羧酸酯等之脂環族環氧樹脂。含有萘基之環氧樹脂,因為可抑制硬化物之熱膨脹,故較佳。 Other liquid bifunctional epoxy resins include vinylcyclohexene diepoxide, (3 ', 4'-epoxycyclohexylmethyl) -3,4-epoxycyclohexane carboxyl Alicyclic epoxy resins such as acid esters, (3 ', 4'-epoxy-6'-methylcyclohexylmethyl) -3,4-epoxy-6-methylcyclohexane carboxylate Resin. Epoxy resins containing naphthalene groups are preferred because they can inhibit the thermal expansion of the cured product.

上述環氧樹脂,可1種單獨使用、亦可合併使用2種以上。 The above epoxy resins may be used alone or in combination of two or more.

上述多官能氧雜環丁烷化合物,除了雙[(3-甲基-3-氧雜環丁烷基甲氧基)甲基]醚、雙[(3-乙基-3-氧雜環丁烷基甲氧基)甲基]醚、1,4-雙[(3-甲基-3-氧雜環丁烷基甲氧基)甲基]苯、1,4-雙[(3-乙基-3-氧雜環丁烷基甲氧基)甲基]苯、丙烯酸(3-甲基-3-氧雜環丁烷基)甲酯、丙烯酸(3-乙基-3-氧雜環丁烷基)甲酯、甲基丙烯酸(3-甲基-3-氧雜環丁烷基)甲酯、甲基丙烯酸(3-乙基-3-氧雜環丁烷基)甲酯或該等之寡聚物或共聚物等的多官能氧雜環丁烷類之外,亦可列舉氧雜環丁烷醇與酚醛清漆樹脂、聚(p-羥基苯乙烯)、卡魯多型(cardo type)雙酚類、杯芳烴(calixarene)類、間苯二酚杯芳烴(calixresorcinarene)類、或倍半矽氧烷等之具有羥基之樹脂的醚化物等。其他,亦可列舉具有氧雜環丁烷環之不飽和單體與烷基(甲基)丙烯酸酯之共聚物等。 The above polyfunctional oxetane compounds, except bis [(3-methyl-3-oxetanylmethoxy) methyl] ether, bis [(3-ethyl-3-oxetan Alkylmethoxy) methyl] ether, 1,4-bis [(3-methyl-3-oxetanylmethoxy) methyl] benzene, 1,4-bis [(3-ethyl 3-oxetanylmethoxy) methyl] benzene, acrylic acid (3-methyl-3-oxetanyl) methyl ester, acrylic acid (3-ethyl-3-oxetanyl Butyl) methyl ester, (3-methyl-3-oxetanyl) methyl methacrylate, (3-ethyl-3-oxetanyl) methyl methacrylate or the In addition to polyfunctional oxetanes such as oligomers or copolymers, etc., oxetane alcohol and novolak resin, poly (p-hydroxystyrene), carudo type (cardo type) Bisphenols, calixarenes, resorcinol calixresornes (calixresorcinarenes), or ethers of hydroxyl-containing resins such as silsesquioxane, etc. Other examples include copolymers of unsaturated monomers having an oxetane ring and alkyl (meth) acrylates.

此處,熱反應性化合物具有苯骨架時,耐熱性會提高,故較佳。又,熱硬化性樹脂組成物含有白色顏料時,熱反應性化合物較佳為脂環式骨架。藉此,可提高光反應性。 Here, when the heat-reactive compound has a benzene skeleton, heat resistance is improved, which is preferable. In addition, when the thermosetting resin composition contains a white pigment, the heat-reactive compound is preferably an alicyclic skeleton. With this, the photoreactivity can be improved.

作為上述熱反應性化合物之摻合量,與鹼顯影性樹脂之當量比(熱反應性基:鹼顯影性基)較佳為1:0.1~1:10、更佳為1:0.2~1:5。如此摻合比的範圍內時,顯影成為良好。 As the blending amount of the heat-reactive compound, the equivalent ratio with the alkali-developable resin (heat-reactive group: alkali-developable group) is preferably 1: 0.1 to 1:10, more preferably 1: 0.2 to 1: 5. When it is within the range of the blending ratio, the development becomes good.

[光鹼產生劑] [Photobase generator]

光鹼產生劑,係藉由紫外線或可見光等光照射而分子結構會變化,或藉由分子開裂,而會生成可作為上述熱反應性化合物之加成反應的觸媒而發揮功能的1種以上之鹼性物質的化合物。鹼性物質可列舉例如2級胺、3級胺。 Photobase generators are those in which the molecular structure changes by irradiation with ultraviolet light, visible light, or the like, or the molecules are cracked to generate one or more types of catalysts that can function as an addition reaction catalyst for the above heat-reactive compounds Of basic substances. Examples of the basic substance include secondary amines and tertiary amines.

光鹼產生劑可列舉例如α-胺基苯乙酮化合物、肟酯化合物、或具有醯基氧基亞胺基、N-甲醯基化芳香族胺基、N-醯基化芳香族胺基、硝基苄基胺基甲酸酯基、烷氧基苄基胺基甲酸酯基等取代基之化合物等。 Examples of the photobase generator include α-aminoacetophenone compounds, oxime ester compounds, or having an oxyimino group, N-methylated aromatic amine group, and N-acetylated aromatic amine group , Nitrobenzylcarbamate group, alkoxybenzylcarbamate group and other substituents, and other compounds.

α-胺基苯乙酮化合物係於分子中具有苯偶姻醚鍵,一接受光照射則分子內會引起開裂,生成具有硬化觸媒作用之鹼性物質(胺)。α-胺基苯乙酮化合物之具體例,可使用(4-嗎啉基苄醯基)-1-苄基-1-二甲基胺基丙烷(Irgacure 369、商品名、BASF JAPAN公司製)或4-(甲基硫代苄醯基)-1-甲基-1-嗎啉基乙烷(Irgacure 907、商品名、BASF JAPAN公司製)、2-(二甲基胺基)-2-[(4-甲基苯基)甲基]-1-[4-(4-嗎啉基)苯基]-1-丁酮(Irgacure 379、商品名、BASF JAPAN公司製)等市售化合物或其溶液。 The α-aminoacetophenone compound has a benzoin ether bond in the molecule. When exposed to light, it will cause cracking in the molecule and generate an alkaline substance (amine) with a hardening catalyst. As a specific example of the α-aminoacetophenone compound, (4-morpholinylbenzyl) -1-benzyl-1-dimethylaminopropane (Irgacure 369, trade name, manufactured by BASF JAPAN) can be used Or 4- (methylthiobenzyl) -1-methyl-1-morpholinylethane (Irgacure 907, trade name, manufactured by BASF JAPAN), 2- (dimethylamino) -2- Commercially available compounds such as [(4-methylphenyl) methyl] -1- [4- (4-morpholinyl) phenyl] -1-butanone (Irgacure 379, trade name, manufactured by BASF JAPAN) or Its solution.

肟酯化合物,只要是藉由光照射而會生成鹼性物質之化合物則均可使用。肟酯化合物,作為市售品可列舉BASF JAPAN公司製之CGI-325、Irgacure OXE01、Irgacure OXE02、ADEKA公司製N-1919、NCI-831等。又,亦可適合使用分子內具有2個肟酯基之化合物,具體而言可列舉以下述一般式表示之具有咔唑結構之肟酯化合物。 The oxime ester compound can be used as long as it generates a basic substance by light irradiation. The oxime ester compound includes CGI-325 manufactured by BASF JAPAN, Irgacure OXE01, Irgacure OXE02, N-1919 manufactured by ADEKA, and NCI-831 as commercial products. In addition, a compound having two oxime ester groups in the molecule can also be suitably used. Specifically, an oxime ester compound having a carbazole structure represented by the following general formula can be cited.

(式中,X表示氫原子、碳數1~17之烷基、碳數1~8之烷氧基、苯基、苯基(被具有碳數1~17之烷基、碳數1~8之烷氧基、胺基、碳數1~8之烷基的烷基胺基或二烷基胺基所取代)、萘基(被具有碳數1~17之烷基、碳數1~8之烷氧基、胺基、碳數1~8之烷基的烷基胺基或二烷基胺基所取代),Y、Z分別表示氫原子、碳數1~17之烷基、碳數1~8之烷氧基、鹵基、苯基、苯基(被具有碳數1~17之烷基、碳數1~8之烷氧基、胺基、碳數1~8之烷基的烷基胺基或二烷基胺基所取代)、萘基(被具有碳數1~17之烷基、碳數1~8之烷氧基、胺基、碳數1~8之烷基的烷基胺基或二烷基胺基所取代)、蒽基、吡啶基、苯并呋喃基、苯并噻吩基,Ar表示鍵結、或碳數1~10之伸烷基、伸乙烯基、伸苯基、伸聯苯基、伸吡啶基、伸萘基、噻吩、伸蒽基、伸噻吩基、伸呋喃基、2,5-吡咯-二基、4,4’-二苯乙烯-二基、4,2’-苯乙烯-二基,n為0或1之整數)。 (In the formula, X represents a hydrogen atom, an alkyl group having 1 to 17 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, a phenyl group, and a phenyl group (the alkyl group having 1 to 17 carbon atoms and 1 to 8 carbon atoms) Alkoxy group, amine group, alkyl amine group or dialkyl amine group of C 1-8 alkyl group), naphthyl group (with alkyl group having 1 to 17 carbon atoms, carbon number 1 to 8 Alkoxy group, amine group, alkyl group with 1 to 8 carbon atoms or dialkylamine group), Y and Z represent hydrogen atom, alkyl group with 1 to 17 carbon atoms 1-8 alkoxy groups, halo groups, phenyl groups, phenyl groups (including C1-C17 alkyl groups, C1-C8 alkoxy groups, amine groups, C1-C8 alkyl groups Alkylamine group or dialkylamine group substituted), naphthyl group (C1-C17 alkyl group, C1-C8 alkoxy group, amine group, C1-C8 alkyl group Substituted by alkylamine or dialkylamine), anthracenyl, pyridyl, benzofuranyl, benzothienyl, Ar represents a bond, or alkylene, vinylidene, carbon number 1-10 Phenylene, biphenylene, pyridyl, naphthyl, thiophene, anthracenyl, thienyl, furanyl, 2,5-pyrrole-diyl, 4,4'-stilbene-bis Radical, 4,2'-styrene-diyl, n is an integer of 0 or 1).

特別地,前述一般式中,較佳為X、Y分別為甲基或乙基,Z為甲基或苯基,n為0,Ar為鍵結、或伸苯基、伸萘基、噻吩或伸噻吩基。 In particular, in the aforementioned general formula, X and Y are preferably methyl or ethyl, Z is methyl or phenyl, n is 0, Ar is a bond, or phenylene, naphthyl, thiophene or Thienyl.

又,較佳之咔唑肟酯化合物,亦可列舉可以 下述一般式表示之化合物。 In addition, preferred carbazole oxime ester compounds can also be exemplified. The compound represented by the following general formula.

(式中,R1表示碳原子數1~4之烷基、或可經硝基、鹵素原子或碳原子數1~4之烷基取代之苯基。R2表示碳原子數1~4之烷基、碳原子數1~4之烷氧基、或可經碳原子數1~4之烷基或烷氧基取代之苯基。R3係可經氧原子或硫原子連結地,表示可經苯基取代之碳原子數1~20之烷基、可經碳原子數1~4之烷氧基取代之苄基。R4表示硝基、或以X-C(=O)-表示之醯基。X表示可經碳原子數1~4之烷基取代之芳基、噻吩基、嗎啉基、硫代苯基、或以下述式所示結構)。 (In the formula, R 1 represents an alkyl group having 1 to 4 carbon atoms, or a phenyl group which may be substituted with a nitro group, a halogen atom or an alkyl group having 1 to 4 carbon atoms. R 2 represents a group having 1 to 4 carbon atoms An alkyl group, an alkoxy group having 1 to 4 carbon atoms, or a phenyl group which may be substituted with an alkyl group or alkoxy group having 1 to 4 carbon atoms. R 3 is an oxygen atom or a sulfur atom, which means C1-C20 alkyl substituted with phenyl, benzyl substituted with C1-C4 alkoxy. R 4 represents nitro or acyl represented by XC (= O)- .X represents an aryl group, a thienyl group, a morpholinyl group, a thiophenyl group which may be substituted with an alkyl group having 1 to 4 carbon atoms, or a structure represented by the following formula).

其他,可列舉日本特開2004-359639號公報、日本特開2005-097141號公報、日本特開2005-220097號公報、日本特開2006-160634號公報、日本特開2008-094770號公報、日本特表2008-509967號公報、日 本特表2009-040762號公報、日本特開2011-80036號公報記載之咔唑肟酯化合物等。 Others include Japanese Patent Application Publication No. 2004-359639, Japanese Patent Application Publication No. 2005-097141, Japanese Patent Application Publication No. 2005-220097, Japanese Patent Application Publication No. 2006-160634, Japanese Patent Application Publication No. 2008-094770, Japan Special Table No. 2008-509967, Japan Carbazole oxime ester compounds described in Japanese Patent Publication No. 2009-040762 and Japanese Patent Laid-Open No. 2011-80036.

作為具有醯基氧基亞胺基之化合物的具體例,可列舉O,O’-琥珀酸二苯乙酮肟、O,O’-琥珀酸二萘苯酮肟、二苯甲酮肟丙烯酸酯-苯乙烯共聚物等。 Specific examples of the compound having an acyloxyimino group include O, O'-succinic acid acetophenone oxime, O, O'-succinic acid diphenone ketoxime, benzophenone oxime acrylate -Styrene copolymer, etc.

具有N-甲醯基化芳香族胺基、N-醯基化芳香族胺基之化合物的具體例,可列舉例如,二-N-(p-甲醯基胺基)二苯基甲烷、二-N(p-乙醯基胺基)二苯基甲烷、二-N-(p-苄醯胺)二苯基甲烷、4-甲醯基胺基二苯乙烯、4-乙醯基胺基二苯乙烯、2,4-二甲醯基胺基二苯乙烯、1-甲醯基胺基萘、1-乙醯基胺基萘、1,5-二甲醯基胺基萘、1-甲醯基胺基蒽、1,4-二甲醯基胺基蒽、1-乙醯基胺基蒽、1,4-二甲醯基胺基蒽醌、1,5-二甲醯基胺基蒽醌、3,3’-二甲基-4,4’-二甲醯基胺基聯苯、4,4’-二甲醯基胺基二苯甲酮等。 Specific examples of the compound having an N-formylated aromatic amine group and an N-formylated aromatic amine group include, for example, di-N- (p-formylamino) diphenylmethane, di -N (p-ethylamido) diphenylmethane, di-N- (p-benzylamide) diphenylmethane, 4-methylacetylamido stilbene, 4-ethylamido Stilbene, 2,4-Dimethylaminoaminodistyrene, 1-Methylaminoaminonaphthalene, 1-Ethylaminoaminonaphthalene, 1,5-Dimethylaminoaminonaphthalene, 1- Methylaminoanthracene, 1,4-dimethylacetoaminoanthracene, 1-ethenylaminoanthracene, 1,4-dimethylacetoaminoanthraquinone, 1,5-dimethylacetoamine Anthraquinone, 3,3'-dimethyl-4,4'-dimethylaminoaminobiphenyl, 4,4'-dimethylaminoaminobenzophenone, etc.

具有硝基苄基胺基甲酸酯基、烷氧基苄基胺基甲酸酯基之化合物的具體例,可列舉例如,雙{{(2-硝基苄基)氧基}羰基}二胺基二苯基甲烷、2,4-二{{(2-硝基苄基)氧基}二苯乙烯、雙{{(2-硝基苄基氧基)羰基}己烷-1,6-二胺、m-二甲苯胺{{(2-硝基-4-氯苄基)氧基}醯胺}等。 Specific examples of the compound having a nitrobenzylcarbamate group and an alkoxybenzylcarbamate group include, for example, bis {{(2-nitrobenzyl) oxy} carbonyl} di Aminodiphenylmethane, 2,4-bis {{(2-nitrobenzyl) oxy} stilbene, bis {{(2-nitrobenzyloxy) carbonyl} hexane-1,6 -Diamine, m-xylidine {{(2-nitro-4-chlorobenzyl) oxy} amide amide, etc.

光鹼產生劑較佳為肟酯化合物、α-胺基苯乙酮化合物。α-胺基苯乙酮化合物,特佳為具有2個以上之氮原子者。 The photobase generator is preferably an oxime ester compound or an α-aminoacetophenone compound. The α-aminoacetophenone compound is particularly preferably one having 2 or more nitrogen atoms.

作為其他之光鹼產生劑,亦可使用WPBG-018(商品名:9-anthrylmethyl N,N’-diethylcarbamate),WPBG-027(商品名:(E)-1-[3-(2-hydroxyphenyl)-2-propenoyl]piperidine),WPBG-082(商品名:guanidinium2-(3-benzoylphenyl)propionate),WPBG-140(商品名:1-(anthraquinon-2-yl)ethyl imidazolecarboxylate)等。 As other light base generators, WPBG-018 (trade name: 9-anthrylmethyl N, N'-diethylcarbamate), WPBG-027 (trade name: (E) -1- [3- (2-hydroxyphenyl) -2-propenoyl] piperidine), WPBG-082 (trade name: guanidinium2- (3-benzoylphenyl) propionate), WPBG-140 (trade name: 1- (anthraquinon-2-yl) ethyl imidazolecarboxylate), etc.

又,亦可使用日本特開平11-71450號公報、國際公開2002/051905號、國際公開2008/072651號、日本特開2003-20339號公報、日本特開2003-212856號公報、日本特開2003-344992號公報、日本特開2007-86763號公報、日本特開2007-231235號公報、日本特開2008-3581號公報、日本特開2008-3582號公報、日本特開2009-280785、日本特開2009-080452、日本特開2010-95686號公報、日本特開2010-126662號公報、日本特開2010-185010號公報、日本特開2010-185036號公報、日本特開2010-186054號公報、日本特開2010-186056號公報、日本特開2010-275388號公報、日本特開2010-222586、日本特開2010-084144、日本特開2011-107199號公報、日本特開2011-236416、日本特開2011-080032等文獻記載之光鹼產生劑。 Also, Japanese Patent Laid-Open No. 11-71450, International Publication No. 2002/051905, International Publication No. 2008/072651, Japanese Patent Laid-Open No. 2003-20339, Japanese Patent Laid-Open No. 2003-212856, Japanese Patent Laid-Open 2003 -344992, JP 2007-86763, JP 2007-231235, JP 2008-3581, JP 2008-3582, JP 2009-280785, JP JP 2009-080452, JP 2010-95686, JP 2010-126662, JP 2010-185010, JP 2010-185036, JP 2010-186054, Japanese Patent Application Publication No. 2010-186056, Japanese Patent Application Publication No. 2010-275388, Japanese Patent Application Publication No. 2010-222586, Japanese Patent Application Publication No. 2010-084144, Japanese Patent Application Publication No. 2011-107199, Japanese Patent Application Publication No. 2011-236416, Japanese Patent Application The photobase generator described in 2011-080032 and other documents.

上述光鹼產生劑,可1種單獨使用、亦可組合2種以上使用。熱硬化性樹脂組成物中光鹼產生劑之摻合量,較佳為相對於熱反應性化合物100質量份為1~50 質量份、更佳為1~40質量份。低於1質量份時,可能顯影困難,故不佳。 The above photobase generators may be used alone or in combination of two or more. The blending amount of the photobase generator in the thermosetting resin composition is preferably 1 to 50 with respect to 100 parts by mass of the heat-reactive compound. The part by mass, more preferably 1 to 40 parts by mass. When it is less than 1 part by mass, development may be difficult, which is not good.

[馬來醯亞胺化合物] [Maleimide compound]

本發明之熱硬化性樹脂組成物,亦可含有馬來醯亞胺化合物。 The thermosetting resin composition of the present invention may contain a maleimide compound.

馬來醯亞胺化合物,可列舉多官能脂肪族/脂環族馬來醯亞胺、多官能芳香族馬來醯亞胺。較佳為2官能以上之馬來醯亞胺化合物(多官能馬來醯亞胺化合物)。多官能脂肪族/脂環族馬來醯亞胺,係有例如N,N’-亞甲基雙馬來醯亞胺、N,N’-伸乙基雙馬來醯亞胺、將參(羥基乙基)三聚異氰酸酯與脂肪族/脂環族馬來醯亞胺羧酸予以脫水酯化而得之三聚異氰酸酯骨架之馬來醯亞胺酯化合物;將參(胺基甲酸酯己基)三聚異氰酸酯與脂肪族/脂環族馬來醯亞胺醇予以胺基甲酸酯化而得之三聚異氰酸酯骨架之馬來醯亞胺胺基甲酸酯化合物等之三聚異氰酸骨架聚馬來醯亞胺類;異佛酮雙胺基甲酸酯雙(N-乙基馬來醯亞胺)、三乙二醇雙(馬來醯亞胺乙基碳酸酯)、將脂肪族/脂環族馬來醯亞胺羧酸與各種脂肪族/脂環族多元醇予以脫水酯化、或將脂肪族/脂環族馬來醯亞胺羧酸酯與各種脂肪族/脂環族多元醇進行酯交換反應而得之脂肪族/脂環族聚馬來醯亞胺酯化合物類;將脂肪族/脂環族馬來醯亞胺羧酸與各種脂肪族/脂環族聚環氧化物進行醚開環反應而得之脂肪族/脂環族聚馬來醯亞胺酯化合物類;將脂肪族/脂環族馬來 醯亞胺醇與各種脂肪族/脂環族聚異氰酸酯進行胺基甲酸酯化反應而得之脂肪族/脂環族聚馬來醯亞胺胺基甲酸酯化合物類等。 Examples of the maleimide compound include polyfunctional aliphatic / alicyclic maleimide and polyfunctional aromatic maleimide. A maleimide compound having more than two functions (multifunctional maleimide compound) is preferred. Multifunctional aliphatic / alicyclic maleimide, such as N, N'-methylenebismaleimide, N, N'-ethylidenebismaleimide, and ginseng ( Hydroxyethyl) trimer isocyanate and aliphatic / alicyclic maleimide carboxylic acid are dehydrated and esterified to obtain the trimide isocyanate skeleton of the maleimide compound; the ginseng (carbamate hexyl ) Trimeric isocyanate and aliphatic / cycloaliphatic maleimide alcohol are carbamate-derived to obtain a trimer isocyanate skeleton of the maleimide carbamate compound and other tripolyisocyanate Skeleton polymaleimide; isophorone biscarbamate bis (N-ethyl maleimide), triethylene glycol bis (maleimide ethyl carbonate), fat Dehydration esterification of aliphatic / alicyclic maleimide carboxylic acid and various aliphatic / alicyclic polyols, or aliphatic / alicyclic maleimide carboxylic acid ester and various aliphatic / alicyclic Aliphatic / alicyclic polymaleimide ester compounds obtained by transesterification of aliphatic polyols; aliphatic / alicyclic maleimide carboxylic acid and various aliphatic / alicyclic polycyclic Aliphatic / alicyclic polymaleimide compounds obtained by oxide ring-opening reaction; the aliphatic / alicyclic maleic Aliphatic / alicyclic polymaleimidocarbamate compounds obtained by carbamate reaction of imidate with various aliphatic / alicyclic polyisocyanates.

多官能芳香族馬來醯亞胺,係有將馬來醯亞胺羧酸與各種芳香族多元醇予以脫水酯化、或將馬來醯亞胺羧酸酯與各種芳香族多元醇進行酯交換反應而得之芳香族聚馬來醯亞胺酯化合物類;將馬來醯亞胺羧酸與各種芳香族聚環氧化物進行醚開環反應而得之芳香族聚馬來醯亞胺酯化合物類;將馬來醯亞胺醇與各種芳香族聚異氰酸酯進行胺基甲酸酯化反應而得之芳香族聚馬來醯亞胺胺基甲酸酯化合物類等之芳香族多官能馬來醯亞胺類等。 Multifunctional aromatic maleimide, dehydration esterification of maleimide carboxylic acid with various aromatic polyols, or transesterification of maleimide carboxylic acid ester with various aromatic polyols Aromatic polymaleimide compounds obtained by reaction; aromatic polymaleimide compounds obtained by ether ring-opening reaction of maleimide carboxylic acid with various aromatic polyepoxides Aromatic polymaleimide aminocarbamate compounds such as aromatic polymaleimide obtained by subjecting maleimide alcohol and various aromatic polyisocyanates to carbamate reaction Imines, etc.

多官能芳香族馬來醯亞胺之具體例,可列舉例如N,N’-(4,4’-二苯基甲烷)雙馬來醯亞胺、N,N’-2,4-甲伸苯基雙馬來醯亞胺、N,N’-2,6-甲伸苯基雙馬來醯亞胺、1-甲基-2,4-雙馬來醯亞胺苯、N,N’-m-伸苯基雙馬來醯亞胺、N,N’-P-伸苯基雙馬來醯亞胺、N,N’-m-二苯乙烯雙馬來醯亞胺、N,N’-4,4’-伸聯苯基雙馬來醯亞胺、N,N’-4,4’-〔3,3’-二甲基-伸聯苯基〕雙馬來醯亞胺、N,N’-4,4’-〔3,3’-二甲基二苯基甲烷〕雙馬來醯亞胺、N,N’-4,4’-〔3,3’-二乙基二苯基甲烷〕雙馬來醯亞胺、N,N’-4,4’-二苯基甲烷雙馬來醯亞胺、N,N’-4,4’-二苯基丙烷雙馬來醯亞胺、N,N’-4,4’-二苯基醚雙馬來醯亞胺、N,N’-3,3’-二苯基碸雙馬來醯亞胺、N,N’-4,4’-二苯基碸雙馬來醯亞胺、2,2-雙〔4-(4-馬來醯亞胺苯氧基)苯基〕 丙烷、2,2-雙〔3-t-丁基-4-(4-馬來醯亞胺苯氧基)苯基〕丙烷、2,2-雙〔3-s-丁基-4-(4-馬來醯亞胺苯氧基)苯基〕丙烷、1,1-雙〔4-(4-馬來醯亞胺苯氧基)苯基〕癸烷、1,1-雙〔2-甲基-4-(4-馬來醯亞胺苯氧基)-5-t-丁基苯基〕-2-甲基丙烷、4,4’-環亞己基-雙〔1-(4-馬來醯亞胺苯氧基)-2-(1,1-二甲基乙基)苯〕、4,4’-亞甲基-雙〔1-(4-馬來醯亞胺苯氧基)-2,6-雙(1,1-二甲基乙基)苯〕、4,4’-亞甲基-雙〔1-(4-馬來醯亞胺苯氧基)-2,6-二-s-丁基苯〕、4,4’-環亞己基-雙〔1-(4-馬來醯亞胺苯氧基)-2-環己基苯、4,4’-亞甲基雙〔1-(馬來醯亞胺苯氧基)-2-壬基苯〕、4,4’-(1-甲基亞乙基)-雙〔1-(馬來醯亞胺苯氧基)-2,6-雙(1,1-二甲基乙基)苯〕、4,4’-(2-乙基亞己基)-雙〔1-(馬來醯亞胺苯氧基)-苯〕、4,4’-(1-甲基亞庚基)-雙〔1-(馬來醯亞胺苯氧基)-苯〕、4,4’-環亞己基-雙〔1-(馬來醯亞胺苯氧基)-3-甲基苯〕、2,2-雙〔4-(4-馬來醯亞胺苯氧基)苯基〕六氟丙烷、2,2-雙〔3-甲基-4-(4-馬來醯亞胺苯氧基)苯基〕丙烷、2,2-雙〔3-甲基-4-(4-馬來醯亞胺苯氧基)苯基〕六氟丙烷、2,2-雙〔3,5-二甲基-4-(4-馬來醯亞胺苯氧基)苯基〕丙烷、2,2-雙〔3,5-二甲基-4-(4-馬來醯亞胺苯氧基)苯基〕六氟丙烷、2,2-雙〔3-乙基-4-(4-馬來醯亞胺苯氧基)苯基〕丙烷、2,2-雙〔3-乙基-4-(4-馬來醯亞胺苯氧基)苯基〕六氟丙烷、雙〔3-甲基-(4-馬來醯亞胺苯氧基)苯基〕甲烷、雙〔3,5-二甲基-(4-馬來醯亞胺苯氧基)苯基〕甲烷、雙〔3-乙基-(4-馬來醯亞胺苯氧基)苯基〕甲烷、3,8- 雙〔4-(4-馬來醯亞胺苯氧基)苯基〕-三環〔5.2.1.02,6〕癸烷、4,8-雙〔4-(4-馬來醯亞胺苯氧基)苯基〕-三環〔5.2.1.02,6〕癸烷、3,9-雙〔4-(4-馬來醯亞胺苯氧基)苯基〕-三環〔5.2.1.02,6〕癸烷、4,9-雙〔4-(4-馬來醯亞胺苯氧基)苯基〕-三環〔5.2.1.02,6〕癸烷、1,8-雙〔4-(4-馬來醯亞胺苯氧基)苯基〕薄荷烷、1,8-雙〔3-甲基-4-(4-馬來醯亞胺苯氧基)苯基〕薄荷烷、1,8-雙〔3,5-二甲基-4-(4-馬來醯亞胺苯氧基)苯基〕薄荷烷等。 Specific examples of the polyfunctional aromatic maleimide include, for example, N, N '-(4,4'-diphenylmethane) bismaleimide, N, N'-2,4-methan Phenylbismaleimide, N, N'-2,6-tolylphenylbismaleimide, 1-methyl-2,4-bismaleimidebenzene, N, N ' -m-phenylenebismaleimide, N, N'-P-phenylenebismaleimide, N, N'-m-stilbenebismaleimide, N, N '-4,4'-biphenylenebismaleimide, N, N'-4,4'-[3,3'-dimethyl-biphenylene] bismaleimide, N, N'-4,4 '-[3,3'-dimethyldiphenylmethane] bismaleimide, N, N'-4,4'-[3,3'-diethyl Diphenylmethane] bismaleimide, N, N'-4,4'-diphenylmethane bismaleimide, N, N'-4,4'-diphenylpropane bismaleimide Acetylimide, N, N'-4,4'-diphenyl ether bismaleimide, N, N'-3,3'-diphenyl bismaleimide, N, N ' -4,4'-diphenyl bisbismaleimide, 2,2-bis [4- (4-maleimidephenoxy) phenyl] Propane, 2,2-bis [3-t-butyl-4- (4-maleimidephenoxy) phenyl] propane, 2,2-bis [3-s-butyl-4- ( 4-maleimidephenoxy) phenyl] propane, 1,1-bis [4- (4-maleimidephenoxy) phenyl] decane, 1,1-bis [2- Methyl-4- (4-maleimidephenoxy) -5-t-butylphenyl] -2-methylpropane, 4,4'-cyclohexylene-bis [1- (4- Maleimide phenoxy) -2- (1,1-dimethylethyl) benzene], 4,4'-methylene-bis [1- (4-maleimide phenoxy ) -2,6-bis (1,1-dimethylethyl) benzene], 4,4'-methylene-bis [1- (4-maleimidephenoxy) -2,6 -Di-s-butylbenzene], 4,4'-cyclohexylene-bis [1- (4-maleimidephenoxy) -2-cyclohexylbenzene, 4,4'-methylene Bis [1- (maleimidephenoxy) -2-nonylbenzene], 4,4 '-(1-methylethylene) -bis [1- (maleimidephenoxy) ) -2,6-bis (1,1-dimethylethyl) benzene], 4,4 '-(2-ethylhexylene) -bis [1- (maleimidephenoxy)- Benzene], 4,4 '-(1-methylheptylidene) -bis [1- (maleimidephenoxy) -benzene], 4,4'-cyclohexylene-bis [1- ( Maleimidephenoxy) -3-methylbenzene], 2,2-bis [4- (4-maleimidephenoxy) phenyl] hexafluoropropane, 2,2-bis [ 3-methyl-4- (4-maleimidephenoxy) phenyl] propane, 2,2-bis [3-methyl-4- (4-maleimidephenoxy) benzene Group] Hexafluoropropane, 2,2-bis [3,5-dimethyl-4- (4-maleimidephenoxy) phenyl] propane, 2,2-bis [3,5-di Methyl-4- (4-maleimidephenoxy) phenyl] hexafluoropropane, 2,2-bis [3-ethyl-4- (4-maleimidephenoxy) benzene Group] propane, 2,2-bis [3-ethyl-4- (4-maleimidephenoxy) phenyl] hexafluoropropane, bis [3-methyl- (4-maleimide Aminophenoxy) phenyl] methane, bis [3,5-dimethyl- (4-maleimidephenoxy) phenyl] methane, bis [3-ethyl- (4-maleimide Imine phenoxy) phenyl] methane, 3,8- Bis [4- (4-maleimidephenoxy) phenyl] -tricyclo [5.2.1.02,6] decane, 4,8-bis [4- (4-maleimidephenoxy) Yl) phenyl] -tricyclo [5.2.1.02,6] decane, 3,9-bis [4- (4-maleimidophenoxy) phenyl] -tricyclo [5.2.1.02,6 〕 Decane, 4,9-bis [4- (4-maleimidophenoxy) phenyl] -tricyclo [5.2.1.02,6] decane, 1,8-bis [4- (4 -Maleimide phenoxy) phenyl] menthane, 1,8-bis [3-methyl-4- (4-maleimide phenoxy) phenyl] menthane, 1,8 -Bis [3,5-dimethyl-4- (4-maleimidephenoxy) phenyl] menthane and the like.

馬來醯亞胺化合物之摻合量,較佳為與鹼顯影性樹脂之當量比(馬來醯亞胺基:鹼顯影性基)為1:0.1~1:10、更佳為1:0.2~1:5。藉由如此的摻合比,顯影變得容易。 The blending amount of the maleimide compound is preferably an equivalent ratio with the alkali-developable resin (maleimide group: alkali-developable group) of 1: 0.1 to 1:10, more preferably 1: 0.2 ~ 1: 5. With such a blending ratio, development becomes easy.

[高分子樹脂] [Polymer resin]

本發明之熱硬化性樹脂組成物中,能夠以提高所得硬化物之可撓性、指觸乾燥性為目的,而摻合慣用公知之高分子樹脂。 In the thermosetting resin composition of the present invention, a well-known polymer resin can be blended for the purpose of improving the flexibility and dryness of the obtained cured product.

高分子樹脂可列舉纖維素系、聚酯系、苯氧基樹脂系、聚乙烯縮醛系、聚乙烯丁縮醛系、聚醯胺系、聚醯胺醯亞胺系黏結劑聚合物、嵌段共聚物、彈性體、橡膠粒子等。黏結劑聚合物可單獨使用1種、亦可合併使用2種以上。 Examples of the polymer resin include cellulose-based, polyester-based, phenoxy resin-based, polyvinyl acetal-based, polyethylene butyral-based, polyamidoamine-based, polyamidoamide-imide-based binder polymers, Segment copolymers, elastomers, rubber particles, etc. The binder polymer may be used alone or in combination of two or more.

藉由摻合高分子樹脂,熱硬化性樹脂組成物之熔融黏度會上昇,曝光後加熱時,可抑制通孔部分之樹脂的流動 性。結果,可於通孔上製作見不到凹陷的平坦之基板。 By blending a polymer resin, the melt viscosity of the thermosetting resin composition will increase, and when heated after exposure, the flow of the resin in the through hole portion can be suppressed Sex. As a result, a flat substrate with no recesses can be formed on the through hole.

上述高分子樹脂之添加量,相對於上述熱反應性化合物100質量份,較佳為50質量份以下、更佳為1~30質量份、特佳為5~30質量份。高分子樹脂之摻合量超過50質量份時,擔心會造成熱硬化性樹脂組成物之除膠渣耐性惡化,故不佳。 The added amount of the polymer resin is preferably 50 parts by mass or less, more preferably 1 to 30 parts by mass, and particularly preferably 5 to 30 parts by mass with respect to 100 parts by mass of the heat-reactive compound. If the blending amount of the polymer resin exceeds 50 parts by mass, there is a fear that the resistance of the thermosetting resin composition to degumming slag will deteriorate, which is not good.

(嵌段共聚物) (Block copolymer)

嵌段共聚物,意指性質相異之二種以上的聚合物,以共價鍵連結成為長鏈之分子結構的共聚物。 Block copolymer refers to a copolymer in which two or more polymers with different properties are linked by a covalent bond to form a long-chain molecular structure.

本發明中所用之嵌段共聚物,較佳為A-B-A、或A-B-A’型嵌段共聚物。A-B-A或A-B-A’型嵌段共聚物當中,較佳為由中央之B為軟嵌段,玻璃轉移點Tg低,較佳為低於0℃,且其兩外側A或A’為硬嵌段,Tg高,較佳為0℃以上之聚合物單位所構成者。玻璃轉移點Tg係藉由示差掃描熱量測定(DSC)來測定。 The block copolymer used in the present invention is preferably an A-B-A or A-B-A 'type block copolymer. Among the ABA or AB-A 'type block copolymers, it is preferred that the B from the center is a soft block, the glass transition point Tg is low, preferably below 0 ° C, and both outer sides of A or A' are hard embedded In the segment, the Tg is high, and it is preferably composed of polymer units of 0 ° C or higher. The glass transition point Tg is measured by differential scanning calorimetry (DSC).

又,A-B-A或A-B-A’型嵌段共聚物當中,更佳為A或A’由Tg為50℃以上之聚合物單位所構成,且B為由Tg為-20℃以下之聚合物單位所構成之嵌段共聚物。 In addition, among ABA or AB-A 'type block copolymers, it is more preferable that A or A' is composed of polymer units having a Tg of 50 ° C or higher, and B is composed of polymer units having a Tg of -20 ° C or lower. Block copolymer.

又,A-B-A或A-B-A’型嵌段共聚物當中,較佳為A或A’為與上述熱反應性化合物之相溶性高者、較佳為B為與上述熱反應性化合物之相溶性低者。如此地,藉由成為兩端之嵌段與介質相溶、且中央之嵌段與介質不相溶之嵌段共聚物,可認為在介質中容易顯示特異的結構。 In addition, among the ABA or AB-A 'type block copolymers, it is preferable that A or A' is a high compatibility with the above heat-reactive compound, and it is preferable that B is a low compatibility with the above-mentioned heat-reactive compound By. In this way, by being a block copolymer in which the blocks at both ends are compatible with the medium and the blocks at the center are incompatible with the medium, it can be considered that the specific structure is easily displayed in the medium.

作為A或A’,較佳為含有聚(甲基)丙烯酸甲酯(PMMA)、聚苯乙烯(PS)等,且較佳為含有聚丙烯酸n-丁酯(PBA)、聚丁二烯(PB)等作為B。又,可於A或A’成分之一部分導入以苯乙烯單元、含有羥基之單元、含有羧基之單元、含有環氧基之單元、N取代丙烯醯胺單元等為代表之前述記載之與介質相溶性優良的親水性單元,進一步提高相溶性。 As A or A ', it is preferable to contain polymethyl (meth) acrylate (PMMA), polystyrene (PS), etc., and it is preferable to contain poly n-butyl acrylate (PBA), polybutadiene ( PB) etc. as B. In addition, a part of the component A or A 'can be introduced into the medium phase described above as represented by styrene units, hydroxyl-containing units, carboxyl-containing units, epoxy-containing units, N-substituted acrylamide units, etc. The hydrophilic unit with excellent solubility further improves the compatibility.

又,作為本發明中所用之嵌段共聚物,較佳為3元以上之嵌段共聚物,藉由活性聚合法所合成之分子結構被精密控制的嵌段共聚物,就得到本發明之效果上而言更佳。此可認為是藉由活性聚合法所合成之嵌段共聚物,分子量分布窄,各自之單元的特徵為明確之故。所使用之嵌段共聚物的分子量分布(Mw/Mn)較佳為3以下、更佳為2.5以下、更佳為2.0以下。 In addition, as the block copolymer used in the present invention, a block copolymer of 3 yuan or more is preferred, and the block copolymer synthesized by the living polymerization method whose molecular structure is precisely controlled can obtain the effects of the present invention In terms of better. This is considered to be because the block copolymer synthesized by the living polymerization method has a narrow molecular weight distribution, and the characteristics of the respective units are clear. The molecular weight distribution (Mw / Mn) of the block copolymer used is preferably 3 or less, more preferably 2.5 or less, and even more preferably 2.0 or less.

如上所述之包含(甲基)丙烯酸酯聚合物嵌段的嵌段共聚物,可藉由例如日本特開2007-516326號、日本特開2005-515281號說明書記載之方法,特別是以下述式(1)~(4)之任一者表示之烷氧基胺化合物作為開始劑,將Y單位聚合後,使X單位聚合而適合地得到。 The block copolymer containing the (meth) acrylate polymer block as described above can be obtained by the methods described in the specifications of Japanese Patent Laid-Open No. 2007-516326 and Japanese Patent Laid-Open No. 2005-515281. The alkoxyamine compound represented by any one of (1) to (4) can be suitably obtained by polymerizing Y units and then polymerizing X units after polymerizing Y units.

(式中,n表示2,Z表示2價有機基,較佳為由1,2-乙烷二氧基、1,3-丙烷二氧基、1,4-丁烷二氧基、1,6-己烷二氧基、1,3,5-參(2-乙氧基)三聚氰酸、聚胺基胺,例如聚伸乙胺、1,3,5-參(2-乙基胺基)三聚氰酸、聚硫氧基(polythioxy)、膦酸酯或聚膦酸酯中選擇者。Ar表示2價芳基)。 (In the formula, n represents 2, Z represents a divalent organic group, preferably 1,2-ethanedioxy, 1,3-propanedioxy, 1,4-butanedioxy, 1, 6-hexanedioxy, 1,3,5-ginseng (2-ethoxy) cyanuric acid, polyamine amines, such as polyethylamine, 1,3,5-ginseng (2-ethyl) (Amino group) cyanuric acid, polythioxy, phosphonate or polyphosphonate. Ar represents a divalent aromatic group).

嵌段共聚物之重量平均分子量較佳為20,000~400,000、更佳為50,000~300,000之範圍。重量平均分子量未達20,000時,作為目的之強韌性、柔軟性效果無法得到,將熱硬化性樹脂組成物乾膜化時或塗佈於基材且臨時乾燥時之黏著性亦不佳。另一方面,重量平均分子量超過400,000時,熱硬化性樹脂組成物之黏度變高,印刷性、加工性可能會顯著惡化。重量平均分子量為50,000以上時,對於由外部之衝撃的緩和性可得到優良的效果。 The weight average molecular weight of the block copolymer is preferably in the range of 20,000 to 400,000, and more preferably in the range of 50,000 to 300,000. When the weight average molecular weight is less than 20,000, the intended toughness and flexibility effects cannot be obtained, and the adhesiveness when the thermosetting resin composition is dry-filmed or applied to the substrate and temporarily dried is not good. On the other hand, when the weight average molecular weight exceeds 400,000, the viscosity of the thermosetting resin composition becomes high, and the printability and processability may be significantly deteriorated. When the weight average molecular weight is 50,000 or more, an excellent effect can be obtained for the relief from external shock.

作為高分子樹脂,嵌段共聚物在冷熱循環時之裂痕耐性優良,可抑制硬化後之翹曲,故較佳。嵌段共聚物因可抑制通孔上之凹陷,製成表面平坦之基材,故特佳。又,藉由與無機填充劑組合,進一步地使冷熱循環時之裂痕耐性優良。 As the polymer resin, the block copolymer is excellent in crack resistance during cold and heat cycles, and can suppress warpage after curing, which is preferable. The block copolymer is particularly preferable because it can suppress depressions in the through holes and make a substrate with a flat surface. In addition, by combining with an inorganic filler, crack resistance at the time of cooling and heating cycle is further improved.

(彈性體) (Elastomer)

本發明之熱硬化性樹脂組成物中,可添加具有官能基之彈性體。藉由添加具有官能基之彈性體,可期待塗覆性提高,塗膜強度亦提高。又,可使用聚酯系彈性體、聚胺基甲酸酯系彈性體、聚酯胺基甲酸酯系彈性體、聚醯胺系彈性體、聚酯醯胺系彈性體、丙烯酸系彈性體、烯烴系彈性體等。又,亦可使用將具有各種骨架之環氧樹脂的一部分或全部的環氧基以兩末端羧酸改質型丁二烯-丙烯腈橡膠改質之樹脂等。此外,亦可使用含有環氧基之聚丁二烯系彈性體、含有丙烯酸系樹脂之聚丁二烯系彈性體、含有羥基之聚丁二烯系彈性體、含有羥基之異戊二烯系彈性體等。又,該等之彈性體可1種單獨使用、亦可合併使用2種以上。 In the thermosetting resin composition of the present invention, an elastomer having a functional group may be added. By adding an elastomer having a functional group, it is expected that the coatability is improved and the strength of the coating film is also improved. In addition, polyester-based elastomers, polyurethane-based elastomers, polyester-urethane-based elastomers, polyamide-based elastomers, polyester-based elastomers, acrylic elastomers can be used , Olefin elastomer, etc. In addition, resins in which a part or all of epoxy groups of epoxy resins having various skeletons are modified with two-terminal carboxylic acid-modified butadiene-acrylonitrile rubber can also be used. In addition, epoxy-containing polybutadiene-based elastomers, acrylic resin-containing polybutadiene-based elastomers, hydroxyl-containing polybutadiene-based elastomers, hydroxyl-containing isoprene-based elastomers can also be used Elastomers, etc. In addition, these elastomers may be used alone or in combination of two or more.

(橡膠粒子) (Rubber particles)

橡膠粒子只要係由具有交聯結構之高分子等的有機物所形成之粒子狀者均可,可列舉例如作為丙烯腈丁二烯之共聚物,使丙烯腈與丁二烯共聚合之交聯NBR粒子;使丙烯腈、丁二烯與丙烯酸等之羧酸共聚合者;以交聯聚丁二烯、交聯矽橡膠、或NBR為核層,以交聯丙烯酸樹脂為殼層之所謂核殼結構的交聯橡膠粒子(亦稱為「核-殼橡膠粒子」)。 The rubber particles may be in the form of particles made of organic materials such as polymers having a cross-linked structure. For example, as a copolymer of acrylonitrile butadiene, crosslinked NBR copolymerizing acrylonitrile and butadiene Particles; copolymerized with carboxylic acids such as acrylonitrile, butadiene and acrylic acid; the so-called core-shell with cross-linked polybutadiene, cross-linked silicone rubber, or NBR as the core layer, and cross-linked acrylic resin as the shell layer Structured cross-linked rubber particles (also known as "core-shell rubber particles").

其中尤以分散性之控制、粒子尺寸安定性的觀點而 言,較佳為核殼結構之交聯橡膠粒子;更佳為以交聯丙烯酸樹脂為殼層、且以交聯聚丁二烯或交聯矽橡膠為核層之核殼結構的交聯橡膠粒子。 Among them, especially from the viewpoint of dispersion control and particle size stability It is preferably a cross-linked rubber particle with a core-shell structure; more preferably a cross-linked rubber with a core-shell structure using a cross-linked acrylic resin as the shell layer and a cross-linked polybutadiene or cross-linked silicone rubber as the core layer particle.

交聯NBR粒子,係指使丙烯腈、丁二烯共聚合,且於共聚合之階段,部分地交聯,而成為粒子狀者。又,藉由將丙烯酸、甲基丙烯酸等羧酸一併共聚合,亦可得到羧酸改質交聯NBR粒子。 Cross-linked NBR particles refer to those in which acrylonitrile and butadiene are copolymerized and partially cross-linked at the stage of copolymerization to become particles. In addition, by copolymerizing carboxylic acids such as acrylic acid and methacrylic acid together, carboxylic acid modified crosslinked NBR particles can also be obtained.

交聯丁二烯橡膠-交聯丙烯酸樹脂之核-殼橡膠粒子,能夠以由乳化聚合使丁二烯粒子聚合,接著添加丙烯酸酯、丙烯酸等之單體使聚合繼續的二階段的聚合方法得到。 The core-shell rubber particles of crosslinked butadiene rubber-crosslinked acrylic resin can be obtained by a two-stage polymerization method in which the butadiene particles are polymerized by emulsion polymerization, and then monomers such as acrylate and acrylic acid are added to continue the polymerization .

交聯矽橡膠-交聯丙烯酸樹脂之核-殼橡膠粒子,能夠以由乳化聚合使矽粒子聚合,接著添加丙烯酸酯、丙烯酸等之單體使聚合繼續的二階段的聚合方法得到。 The core-shell rubber particles of the crosslinked silicone rubber-crosslinked acrylic resin can be obtained by a two-stage polymerization method in which the silicon particles are polymerized by emulsion polymerization, and then monomers such as acrylate and acrylic acid are added to continue the polymerization.

橡膠粒子之大小,以一次平均粒子徑計為1μm以下,較佳為50nm~1μm。一次平均粒子徑超過1μm時,會有接著力降低、或損及於微細配線之絕緣信賴性。此處所言之「一次平均粒子徑」,並非指凝集之粒子徑、亦即二次粒子徑,而是指未經凝集之單質的粒子徑。 The size of the rubber particles is 1 μm or less in terms of primary average particle diameter, preferably 50 nm to 1 μm. When the primary average particle diameter exceeds 1 μm, the adhesive strength may be reduced, or the insulation reliability of fine wiring may be impaired. The "primary average particle diameter" mentioned here does not refer to the aggregated particle diameter, that is, the secondary particle diameter, but refers to the particle diameter of the single substance that has not been aggregated.

又,該一次平均粒子徑,可藉由例如雷射繞射式粒度分布計來測定而求得。 In addition, the primary average particle diameter can be obtained by measuring with a laser diffraction particle size distribution meter, for example.

如上述之橡膠粒子,可單獨、亦可組合2種以上使用。 The rubber particles as described above may be used alone or in combination of two or more.

橡膠粒子之含量,較佳為樹脂組成物中50質量%以 下、更佳為1~30質量%。 The content of the rubber particles is preferably 50% by mass or more in the resin composition Lower and better is 1 ~ 30% by mass.

例如,羧酸改質丙烯腈丁二烯橡膠粒子之市售品,可列舉日本合成橡膠股份有限公司製之XER-91。丁二烯橡膠-丙烯酸樹脂之核殼粒子可列舉Rohm and Haas股份有限公司製之PARALOID EXL2655或GANZ化成工業股份有限公司之AC-3832。交聯矽橡膠-丙烯酸樹脂之核-殼橡膠粒子,可列舉旭化成Wacker Silicone(股)製GENIOPERLP52。 For example, commercially available products of carboxylic acid-modified acrylonitrile butadiene rubber particles include XER-91 manufactured by Japan Synthetic Rubber Co., Ltd. Examples of the core-shell particles of butadiene rubber-acrylic resin include PALOLOID EXL 2655 manufactured by Rohm and Haas Co., Ltd. or AC-3832 manufactured by GANZ Chemical Industry Co., Ltd. The core-shell rubber particles of the crosslinked silicone rubber-acrylic resin may include GENIOPERLP52 manufactured by Asahi Kasei Wacker Silicone Co., Ltd.

藉由使用橡膠粒子,可提高冷熱循環時之裂痕耐性。 By using rubber particles, the crack resistance during cold and hot cycles can be improved.

[無機填充劑] [Inorganic filler]

上述熱硬化性樹脂組成物係含有無機填充劑。無機填充劑,係以抑制熱硬化性樹脂組成物之硬化物的硬化收縮,提高密合性、硬度等特性為目的使用。無機填充劑可列舉例如硫酸鋇、不定形二氧化矽、熔融二氧化矽、球狀二氧化矽、滑石、黏土、碳酸鎂、碳酸鈣、氧化鋁、氫氧化鋁、氮化矽、氮化鋁、氮化硼、諾易保矽土(Neuburg Siliceous Earth)等。 The thermosetting resin composition system contains an inorganic filler. The inorganic filler is used for the purpose of suppressing curing shrinkage of the cured product of the thermosetting resin composition and improving characteristics such as adhesion and hardness. Examples of inorganic fillers include barium sulfate, amorphous silica, fused silica, spherical silica, talc, clay, magnesium carbonate, calcium carbonate, alumina, aluminum hydroxide, silicon nitride, and aluminum nitride. , Boron nitride, Neuburg Siliceous Earth, etc.

無機填充劑之平均粒徑(D50)較佳為1μm以下、更佳為0.7μm以下、又更佳為0.5μm。平均粒徑超過1μm時,圖型層係有白濁之虞,故不佳。無機填充劑之平均粒徑(D50)之下限值,並無特殊限定,例如為0.01μm以上。此處,平均粒徑(D50)意指平均一次粒徑。 The average particle diameter (D50) of the inorganic filler is preferably 1 μm or less, more preferably 0.7 μm or less, and still more preferably 0.5 μm. When the average particle diameter exceeds 1 μm, the patterned layer system may be cloudy, which is not good. The lower limit of the average particle diameter (D50) of the inorganic filler is not particularly limited, and is, for example, 0.01 μm or more. Here, the average particle diameter (D50) means the average primary particle diameter.

平均粒徑(D50)可藉由雷射繞射/散射法測定。藉由使平均粒徑在上述範圍,折射率與樹脂成分成為接近、穿透性提高,光照射所致之由光鹼產生劑產生鹼的效率會上昇。 The average particle size (D50) can be determined by laser diffraction / scattering method. When the average particle diameter is within the above range, the refractive index becomes close to the resin component and the penetration is improved, and the efficiency of generating alkali from the photobase generator due to light irradiation increases.

無機填充劑與鹼顯影性樹脂之折射率差較佳為0.3以下。藉由使折射率差成為0.3以下,可抑制光散射,得到良好的深部硬化特性。此處,無機填充劑之折射率,較佳為1.4以上、1.8以下。再者,無機填充劑之折射率,可根據JIS K 7105測定。 The difference in refractive index between the inorganic filler and the alkali-developable resin is preferably 0.3 or less. By setting the refractive index difference to 0.3 or less, light scattering can be suppressed and good deep hardening characteristics can be obtained. Here, the refractive index of the inorganic filler is preferably 1.4 or more and 1.8 or less. Furthermore, the refractive index of the inorganic filler can be measured in accordance with JIS K 7105.

無機填充劑之摻合比例,以上述熱硬化性樹脂組成物之全固體成分為基準,較佳為20質量%以上、80質量%以下;更佳為30質量%以上、80質量%以下。無機填充劑之摻合比例超過80質量%時,組成物之黏度變高,可能塗佈性會降低、或熱硬化性樹脂組成物之硬化物變脆。 The blending ratio of the inorganic filler is preferably 20% by mass or more and 80% by mass or less based on the total solid content of the thermosetting resin composition; more preferably 30% by mass or more and 80% by mass or less. When the blending ratio of the inorganic filler exceeds 80% by mass, the viscosity of the composition becomes high, the coating property may be reduced, or the cured product of the thermosetting resin composition becomes brittle.

藉由自由基反應,進行硬化之組成物中,無機填充劑之含量增加的情況時,解像性會降低,本發明中,係為所產生之鹼所致的硬化反應,因此即使無機填充劑之含量增加的情況,亦可維持良好的解像性。 When the content of the inorganic filler in the hardened composition is increased by radical reaction, the resolution will be reduced. In the present invention, the hardening reaction is caused by the generated alkali. When the content is increased, good resolution can also be maintained.

又,無機填充劑之比重,較佳為3以下、更佳為2.8以下、又更佳為2.5以下。藉由使無機填充劑之比重為3以下,可抑制熱膨脹。3以下之無機填充劑,可列舉例如二氧化矽與氫氧化鋁,特佳為二氧化矽。 In addition, the specific gravity of the inorganic filler is preferably 3 or less, more preferably 2.8 or less, and still more preferably 2.5 or less. By setting the specific gravity of the inorganic filler to 3 or less, thermal expansion can be suppressed. Examples of inorganic fillers of 3 or less include silicon dioxide and aluminum hydroxide, and silicon dioxide is particularly preferred.

無機填充劑之形狀,可列舉不定形、針狀、圓盤狀、鱗片、球狀、中空狀等。此處,由可於組成物中以高的比 例摻合之觀點而言,較佳為球狀。,此外,無機填充劑係提高耐濕性,故更佳為經矽烷偶合劑等表面處理劑處理。 Examples of the shape of the inorganic filler include an indefinite shape, a needle shape, a disk shape, a scale, a spherical shape, and a hollow shape. Here, from the composition in a high ratio From the viewpoint of blending, it is preferably spherical. In addition, the inorganic filler system improves moisture resistance, so it is more preferably treated with a surface treatment agent such as a silane coupling agent.

又,藉由含有無機填充劑,可提高冷熱循環時之裂痕耐性。藉由大量含有無機填充劑,亦可抑制硬化後之翹曲。 In addition, by containing an inorganic filler, crack resistance during cold and hot cycles can be improved. By containing a large amount of inorganic fillers, warpage after curing can also be suppressed.

本發明中,硬化物之熱膨脹係數(CTE)較佳為40ppm以下、更佳為30ppm以下、又更佳為20ppm以下。 In the present invention, the thermal expansion coefficient (CTE) of the cured product is preferably 40 ppm or less, more preferably 30 ppm or less, and still more preferably 20 ppm or less.

[有機溶劑] [Organic solvents]

本發明之熱硬化性樹脂組成物中,為了調製樹脂組成物、或為了調整用於塗佈於基材或載體薄膜之黏度,可使用有機溶劑。 In the thermosetting resin composition of the present invention, an organic solvent can be used in order to prepare the resin composition or to adjust the viscosity for coating on the substrate or the carrier film.

如此之有機溶劑,可列舉酮類、芳香族烴類、二醇醚類、二醇醚乙酸酯類、酯類、醇類、脂肪族烴、石油系溶劑等。如此之有機溶劑,可1種單獨使用、亦可作為2種以上之混合物使用。 Examples of such organic solvents include ketones, aromatic hydrocarbons, glycol ethers, glycol ether acetates, esters, alcohols, aliphatic hydrocarbons, and petroleum-based solvents. Such an organic solvent may be used alone or as a mixture of two or more.

[光聚合性單體] [Photopolymerizable monomer]

本發明之熱硬化性樹脂組成物,在不阻礙本發明之效果的範圍內亦可含有光聚合性單體。 The thermosetting resin composition of the present invention may contain a photopolymerizable monomer within a range that does not hinder the effect of the present invention.

光聚合性單體,可列舉(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸環己酯等之烷基(甲基)丙烯酸酯類;(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯等之(甲基)丙烯酸羥基烷酯類;乙二醇、丙二醇、二乙二醇、二丙二 醇等之環氧烷衍生物之單或二(甲基)丙烯酸酯類;己烷二醇、三羥甲基丙烷、季戊四醇、二-三羥甲基丙烷、二季戊四醇、參羥基乙基三聚異氰酸酯等之多元醇或該等之環氧乙烷或環氧丙烷加成物的多價(甲基)丙烯酸酯類;(甲基)丙烯酸苯氧基乙酯、雙酚A之聚乙氧基二(甲基)丙烯酸酯等酚類之環氧乙烷或環氧丙烷加成物之(甲基)丙烯酸酯類;甘油二環氧丙基醚、三羥甲基丙烷三環氧丙基醚、三環氧丙基三聚異氰酸酯等縮水甘油醚之(甲基)丙烯酸酯類;及三聚氰胺(甲基)丙烯酸酯等。 Photopolymerizable monomers include alkyl (meth) acrylates such as 2-ethylhexyl (meth) acrylate and cyclohexyl (meth) acrylate; 2-hydroxyethyl (meth) acrylate , (Meth) acrylic acid 2-hydroxypropyl ester and other (meth) acrylic acid hydroxyalkyl esters; ethylene glycol, propylene glycol, diethylene glycol, dipropylene Mono- or di (meth) acrylates of alkylene oxide derivatives such as alcohols; hexanediol, trimethylolpropane, pentaerythritol, di-trimethylolpropane, dipentaerythritol, ginsylhydroxyethyl trimer Polyvalent (meth) acrylates of polyols such as isocyanate or such ethylene oxide or propylene oxide adducts; polyethoxy groups of phenoxyethyl (meth) acrylate and bisphenol A Ethylene oxide or propylene oxide adducts (meth) acrylates such as di (meth) acrylates; glycerin diglycidyl ether, trimethylolpropane triglycidyl ether , (Meth) acrylates of glycidyl ethers such as triglycidoxy isocyanate; and melamine (meth) acrylates.

光聚合性單體之摻合量,以熱硬化性樹脂組成物之溶劑以外的固體成分為基準,較佳為50質量%以下、更佳為30質量%以下、又更佳為15質量%以下。光聚合性單體之摻合量超過50質量%時,硬化收縮變大,故可能使翹曲增大。又,光聚合性單體若來自(甲基)丙烯酸酯,係包含酯鍵。此時,因除膠渣處理,會發生酯鍵之水解,因此電特性可能降低。 The blending amount of the photopolymerizable monomer is preferably 50% by mass or less, more preferably 30% by mass or less, and still more preferably 15% by mass based on the solid content other than the solvent of the thermosetting resin composition. . When the blending amount of the photopolymerizable monomer exceeds 50% by mass, the curing shrinkage becomes large, so warpage may be increased. In addition, if the photopolymerizable monomer is derived from (meth) acrylate, it contains an ester bond. At this time, due to the slag removal treatment, hydrolysis of the ester bond may occur, so the electrical characteristics may be reduced.

(其他之任意成分) (Any other ingredients)

本發明之熱硬化性樹脂組成物中,亦可依照需要,進一步摻合巰基化合物、密合促進劑、著色劑、抗氧化劑、紫外線吸收劑等成分。 The thermosetting resin composition of the present invention may further contain components such as mercapto compounds, adhesion promoters, colorants, antioxidants, and ultraviolet absorbers as needed.

特別地,本發明中,即使著色劑之含量增加的情況時,亦可抑制底切,形成良好的通路孔(viahole)與線。 In particular, in the present invention, even when the content of the coloring agent is increased, undercutting can be suppressed to form good viaholes and lines.

該等可使用電子材料領域中公知之物。又,上述熱硬 化性樹脂組成物中,可摻合微粉二氧化矽、水滑石、有機膨潤土、蒙脫土等公知慣用之增黏劑;聚矽氧系、氟系、高分子系等消泡劑及/或調平劑;矽烷偶合劑;防鏽劑等公知慣用之添加劑類。 These can use what is known in the field of electronic materials. Also, the above hot The chemical resin composition may be blended with well-known and commonly used thickeners such as fine powdered silica, hydrotalcite, organic bentonite, and montmorillonite; polysiloxane-based, fluorine-based, polymer-based defoamers and / or Leveling agent; silane coupling agent; antirust agent and other well-known and commonly used additives.

又,亦可摻合嵌段異氰酸酯化合物、胺基樹脂、苯並噁嗪樹脂、碳二醯亞胺樹脂、環碳酸酯合物、環硫化物樹脂等公知慣用之熱硬化性樹脂等,作為熱硬化性成分。 In addition, it is also possible to blend known and commonly used thermosetting resins such as block isocyanate compounds, amine resins, benzoxazine resins, carbodiimide resins, cyclic carbonate compounds, and episulfide resins as heat Hardening ingredients.

進一步地,藉由含有酚樹脂作為鹼顯影性樹脂、含有環氧樹脂作為熱反應性化合物,可提高Tg,在不依賴原料之軟化點下,成為可得到HAST耐性優良的硬化物之樹脂組成物。又,在不摻合光聚合性單體(於分子內含有乙烯性不飽和基,以含有羧基之樹脂為主成分之光硬化性樹脂組成物中,用以促進光硬化所摻合之低分子化合物)之組成的情況時,可成為黏著性優之樹脂組成物。 Furthermore, by containing a phenol resin as an alkali-developable resin and an epoxy resin as a heat-reactive compound, Tg can be increased, and a resin composition that can obtain a hardened product excellent in HAST resistance can be obtained without depending on the softening point of the raw material. . In addition, in a photocurable resin composition that does not incorporate a photopolymerizable monomer (containing an ethylenically unsaturated group in the molecule and which contains a carboxyl group-containing resin as a main component), it is a low-molecular compound blended to promote photocuring In the case of the composition of compound), it can become a resin composition excellent in adhesiveness.

在以往之光硬化性樹脂組成物中,為了在室溫下引起光硬化反應,在硬化時樹脂組成物之Tg上昇的結果,會有硬化反應停止的情況,必須設計樹脂組成物之Tg為低。相對於此,本發明之鹼顯影型之熱硬化性樹脂組成物,硬化反應前之Tg並無限制,可期待作為高Tg。又,本發明之鹼顯影型熱硬化性樹脂組成物,可期待不受氧阻礙地硬化。 In the conventional photo-curable resin composition, in order to cause a photo-curing reaction at room temperature, as a result of the increase in the Tg of the resin composition during curing, the curing reaction may stop, and the Tg of the resin composition must be designed to be low . On the other hand, the alkali-developable thermosetting resin composition of the present invention has no limitation on the Tg before the curing reaction, and can be expected to have a high Tg. In addition, the alkali-developable thermosetting resin composition of the present invention can be expected to be cured without being hindered by oxygen.

本發明之熱硬化性樹脂組成物,有用於印刷配線板之圖型層的形成,其中尤有用作為抗焊阻劑或層間絕緣層之材料。 The thermosetting resin composition of the present invention is useful for forming a pattern layer of a printed wiring board, and is particularly useful as a material for solder resists or interlayer insulating layers.

[圖型形成方法] [Pattern formation method]

可適合使用本發明之熱硬化性樹脂組成物之圖型形成方法,係包含於基材形成由熱硬化性樹脂組成物所構成之樹脂層的步驟(A)、以負型之圖型狀的光照射使熱硬化性樹脂組成物中所含之光鹼產生劑活性化而使光照射部硬化之步驟(B)、藉由鹼顯影將未照射部去除,以形成負型之圖型層的步驟(C)。 The pattern forming method suitable for using the thermosetting resin composition of the present invention includes the step (A) of forming a resin layer composed of the thermosetting resin composition on the base material, which is in the form of a negative pattern The step (B) of activating the photobase generator contained in the thermosetting resin composition by light irradiation to harden the light irradiated part, and removing the unirradiated part by alkali development to form a negative pattern layer Step (C).

藉由圖型狀之光照射,於熱硬化性樹脂組成物之光照射部內產生鹼,藉以可使光照射部硬化。之後,藉由以鹼水溶液顯影,可去除未照射部,形成負型之圖型層。 By pattern-shaped light irradiation, alkali is generated in the light-irradiated portion of the thermosetting resin composition, whereby the light-irradiated portion can be hardened. After that, by developing with an alkaline aqueous solution, the unirradiated portion can be removed to form a negative pattern layer.

此處,本發明中,較佳為於步驟(B)之後,具有加熱樹脂層之步驟(B1)。藉此,可充分硬化樹脂層,進一步地可得到硬化特性優良的圖型層。 Here, in the present invention, it is preferable to have a step (B1) of heating the resin layer after the step (B). Thereby, the resin layer can be sufficiently cured, and further a pattern layer with excellent curing characteristics can be obtained.

[步驟(A)] [Step (A)]

一邊參照圖1一邊說明圖型形成方法。步驟(A)係於基材形成由熱硬化性樹脂組成物所構成的樹脂層之步驟。形成樹脂層之方法,可採取將液狀之熱硬化性樹脂組成物在基材上塗佈、乾燥之方法,或採取將使熱硬化性樹脂組成物成為乾薄膜者疊合於基材上的方法。 The pattern forming method will be described with reference to FIG. 1. Step (A) is a step of forming a resin layer composed of a thermosetting resin composition on the base material. The method of forming the resin layer may be a method of coating and drying the liquid thermosetting resin composition on the substrate, or a method of stacking the thermosetting resin composition into a dry film on the substrate method.

熱硬化性樹脂組成物對基材之塗佈方法,可適當採用刮刀塗佈法、唇嘴塗佈、逗點塗佈法(comma coating)、薄膜塗佈法等公知方法。又,乾燥方法,可應 用熱風循環式乾燥爐、IR爐、加熱板、對流烘箱等,具備蒸氣加熱方式之熱源者,使乾燥機內之熱風逆流接觸的方法、及由噴嘴對支持體吹送的方法等公知方法。 The method of applying the thermosetting resin composition to the substrate may be a known method such as doctor blade coating method, lip coating method, comma coating method, and film coating method. Also, the drying method can be applied Known methods such as a hot air circulation type drying furnace, an IR furnace, a heating plate, a convection oven, etc., equipped with a heat source of a steam heating method, a method of contacting the hot air in the dryer in countercurrent, and a method of blowing the support body from a nozzle.

作為基材,除了預先形成有電路之印刷配線基材或可撓性印刷配線基材之外,可使用應用了紙-酚樹脂、紙-環氧樹脂、玻璃布-環氧樹脂、玻璃-聚醯亞胺、玻璃布/不織布-環氧樹脂、玻璃布/紙-環氧樹脂、合成纖維-環氧樹脂、氟樹脂.聚乙烯.PPO.氰酸酯等複合材之所有等級(FR-4等)的銅包覆層合板、聚醯亞胺薄膜、PET薄膜、玻璃基材、陶瓷基材、晶圓基材等。 As the substrate, in addition to printed wiring substrates or flexible printed wiring substrates in which circuits are formed in advance, paper-phenol resin, paper-epoxy resin, glass cloth-epoxy resin, glass-poly Acetylene imide, glass cloth / nonwoven fabric-epoxy resin, glass cloth / paper-epoxy resin, synthetic fiber-epoxy resin, fluororesin. Polyethylene. PPO. All grades (FR-4 etc.) of copper-clad laminates, polyimide films, PET films, glass substrates, ceramic substrates, wafer substrates, etc. of composite materials such as cyanate esters.

[步驟(B)] [Step (B)]

步驟(B)係光照射於負型之圖型狀,將熱硬化性樹脂組成物中所含之光鹼產生劑活性化,以將光照射部硬化的步驟。步驟(B)係藉由於光照射部產生的鹼,使光鹼產生劑不安定化,而進一步產生鹼。藉由鹼進行如此的化學增殖,可充分硬化至光照射部的深部。 The step (B) is a step of irradiating light with a negative pattern to activate the photobase generator contained in the thermosetting resin composition to harden the light irradiated portion. In the step (B), the alkali generated by the light irradiation section destabilizes the photobase generator and further generates alkali. By performing such chemical proliferation by alkali, it can be sufficiently hardened to the deep part of the light irradiation part.

作為光照射所用之光照射機,例如可使用可照射雷射光、燈光、LED光之直接描繪裝置。圖型狀之光照射用的遮罩可使用負型遮罩。 As the light irradiation machine used for light irradiation, for example, a direct drawing device capable of irradiating laser light, lamp light, or LED light can be used. A negative mask can be used for the pattern-shaped light irradiation mask.

活性能量線較佳為使用最大波長在350~410nm之範圍的雷射光或散射光。藉由使最大波長在此範圍,可效率良好地提高熱硬化性樹脂組成物之熱反應性。只要使用此範圍之雷射光,則氣體雷射、固體雷射均 可。又,其照射量雖隨膜厚等而相異,但一般可成為100~1500mJ/cm2、較佳為300~1500mJ/cm2的範圍內。 The active energy line is preferably laser light or scattered light with a maximum wavelength in the range of 350 to 410 nm. By setting the maximum wavelength in this range, the thermal reactivity of the thermosetting resin composition can be efficiently improved. As long as the laser light in this range is used, either gas laser or solid laser can be used. In addition, although the irradiation dose varies depending on the film thickness and the like, it can generally be in the range of 100 to 1500 mJ / cm 2 , preferably 300 to 1500 mJ / cm 2 .

直接描繪裝置,例如可使用日本Orbotech公司製、Pentax公司製等者,只要係發出最大波長為350~410nm之雷射光的裝置,則可使用任意裝置。 For the direct drawing device, for example, those made by Japan Orbotech Co., Ltd. and Pentax Co., Ltd. can be used. Any device can be used as long as it emits laser light with a maximum wavelength of 350 to 410 nm.

[步驟(B1)] [Step (B1)]

步驟(B1),係藉由加熱來硬化光照射部。步驟(B1)可藉由步驟(B)中產生之鹼而硬化至深部。 Step (B1) is to harden the light-irradiated portion by heating. Step (B1) can be hardened to the deep part by the alkali generated in step (B).

加熱溫度較佳為熱硬化性樹脂組成物中之光照射部會熱硬化,但未照射部不會熱硬化的溫度。 The heating temperature is preferably a temperature at which the light-irradiated portion in the thermosetting resin composition will be thermally cured, but the unirradiated portion will not be thermally cured.

例如,步驟(B1)較佳為以比未照射之熱硬化性樹脂組成物之發熱開始溫度或發熱峰值溫度更低、且比光照射後之熱硬化性樹脂組成物之發熱開始溫度或發熱峰值溫度更高的溫度加熱。藉由如此加熱,可選擇性地僅硬化光照射部。 For example, step (B1) is preferably lower than the heating start temperature or peak heating temperature of the unirradiated thermosetting resin composition, and lower than the heating start temperature or heating peak of the thermosetting resin composition after light irradiation Heat at a higher temperature. By heating in this way, only the light irradiation part can be selectively hardened.

此處,加熱溫度例如為80~140℃。藉由使加熱溫度為80℃以上,可充分地硬化光照射部。另一方面,藉由使加熱溫度成為140℃以下,可選擇性地僅硬化光照射部。加熱時間例如為10~100分鐘。加熱方法係與上述乾燥方法相同。 Here, the heating temperature is, for example, 80 to 140 ° C. By setting the heating temperature to 80 ° C. or higher, the light irradiation portion can be sufficiently cured. On the other hand, by setting the heating temperature to 140 ° C. or lower, only the light irradiation section can be selectively cured. The heating time is, for example, 10 to 100 minutes. The heating method is the same as the drying method described above.

再者,未照射部係不由光鹼產生劑產生鹼,故熱硬化被抑制。 In addition, the non-irradiated portion does not generate alkali from the photobase generator, so thermal curing is suppressed.

[步驟(C)] [Step (C)]

步驟(C)係藉由顯影去除未照射部,藉以形成負型圖型層之步驟。顯影方法可採用浸漬法、淋灑法、噴霧法、毛刷法等公知方法。又,顯影液可使用氫氧化鉀、氫氧化鈉、碳酸鈉、碳酸鉀、磷酸鈉、矽酸鈉、氨、乙醇胺等之胺類、氫氧化四甲基銨水溶液(TMAH)等之鹼水溶液或該等的混合液。 Step (C) is a step of removing unirradiated portions by development to form a negative pattern layer. As the development method, known methods such as a dipping method, a shower method, a spray method, and a brush method can be used. In addition, as the developing solution, amines such as potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, ethanolamine, and aqueous solutions of tetramethylammonium hydroxide (TMAH) or the like can be used. Such a mixture.

[步驟(D)] [Step (D)]

圖型形成方法,較佳為在步驟(C)之後進一步包含紫外線照射步驟(D)。藉由於步驟(C)之後進一步進行紫外線照射,可使光照射時未活性化而殘留的光鹼產生劑活性化。步驟(C)之後的紫外線照射步驟(D)中的紫外線之波長及照射量(照射量),可與步驟(B)相同、亦可相異。適合的照射量(照射量)為150~2000mJ/cm2The pattern forming method preferably further includes the step (D) of ultraviolet irradiation after the step (C). By further performing ultraviolet irradiation after the step (C), the photobase generator remaining unactivated during the light irradiation can be activated. The wavelength and irradiation amount (irradiation amount) of ultraviolet rays in the ultraviolet irradiation step (D) after the step (C) may be the same as or different from the step (B). The suitable irradiation dose (irradiation dose) is 150 ~ 2000mJ / cm 2 .

[步驟(E)] [Step (E)]

上述圖型形成方法,較佳為於步驟(C)之後,進一步包含熱硬化(後硬化)步驟(E)。 The above pattern forming method preferably further includes a step (E) of thermal curing (post-curing) after step (C).

步驟(C)之後一併進行步驟(D)與步驟(E)時,步驟(E)較佳為在步驟(D)之後進行。 When step (D) and step (E) are performed together after step (C), step (E) is preferably performed after step (D).

步驟(E),係藉由以步驟(B)、或步驟(B)及步驟(D)而由光鹼產生劑所產生之鹼,使圖型層充分地熱硬化。在步驟(E)之時間點,已去除未照射部,因此步驟(E)可在未照 射之熱硬化性樹脂組成物之硬化反應開始溫度以上的溫度進行。藉此,可充分地熱硬化圖型層。加熱溫度例如為160℃以上。 Step (E) is to fully thermally harden the pattern layer by the base generated by the photobase generator in step (B), or step (B) and step (D). At the time point of step (E), the unirradiated part has been removed, so step (E) can be The shot thermosetting resin composition proceeds at a temperature higher than the starting temperature of the curing reaction. By this, the pattern layer can be sufficiently thermally hardened. The heating temperature is, for example, 160 ° C or higher.

[步驟(F)] [Step (F)]

上述圖型形成方法亦可進一步含有雷射加工步驟(F)。藉由雷射加工可形成微細的開口部。雷射可使用YAG雷射、CO2雷射、準分子雷射等公知之雷射。 The above pattern forming method may further include a laser processing step (F). Laser processing can form fine openings. For the laser, known lasers such as YAG laser, CO 2 laser, and excimer laser can be used.

步驟(F)較佳在步驟(C)之後,或包含步驟(D)、(E)的情況時,較佳在步驟(D)、(E)之後進行。 Step (F) is preferably performed after step (C), or when steps (D) and (E) are included, it is preferably performed after steps (D) and (E).

[步驟(G)] [Step (G)]

本發明之圖型形成方法,亦可在步驟(F)後進一步包含除膠渣步驟(G)。 The pattern forming method of the present invention may further include a step (G) of removing glue residue after step (F).

步驟(G)係包含用以使膠渣膨潤而使其容易被去除的膠渣膨潤步驟、去除膠渣之去除步驟、及將由去除步驟中使用之除膠渣液產生之泥渣中和之中和步驟。 Step (G) includes a slag swelling step for swelling the slag and making it easy to remove, a removing step for removing the slag, and neutralizing the sludge generated by the slag removal liquid used in the removing step And steps.

膨潤步驟係使用氫氧化鈉等鹼藥液來進行,係使除膠渣藥液所致之膠渣去除變容易者。 The swelling step is performed using an alkaline chemical solution such as sodium hydroxide, which makes it easier to remove the plastic residue caused by the chemical solution for removing the plastic residue.

去除步驟,係使用含有重鉻酸或過錳酸等氧化劑之酸性藥液來去除膠渣。 In the removal step, an acidic chemical solution containing an oxidizing agent such as dichromic acid or permanganic acid is used to remove the glue residue.

中和步驟係使用氫氧化鈉等鹼藥液來將去除步驟中使用之氧化劑還原、去除。 In the neutralization step, an alkali chemical solution such as sodium hydroxide is used to reduce and remove the oxidant used in the removal step.

[實施例] [Example]

以下藉由實施例、比較例以進一步詳細地說明本發明,但本發明不受該等實施例、比較例所限制。 Hereinafter, the present invention will be described in further detail with examples and comparative examples, but the present invention is not limited by these examples and comparative examples.

(實施例1~19,比較例1~4) (Examples 1 to 19, Comparative Examples 1 to 4) <鹼顯影型之熱硬化性樹脂組成物之調製> <Preparation of alkali-developable thermosetting resin composition>

遵照下述表1~3記載之摻合,將實施例/比較例記載之材料各自摻合、以攪拌機預備混合後,以3輥研磨機混練,調製熱硬化性樹脂組成物。表中之值若無特別指明,係指質量份。 Following the blending described in Tables 1 to 3 below, the materials described in the Examples / Comparative Examples were blended and prepared by a mixer, and then kneaded with a 3-roll mill to prepare a thermosetting resin composition. Unless otherwise specified, the values in the table refer to parts by mass.

<乾薄膜之製作> <Production of dry film>

作為載體薄膜,在38μm厚度之PET薄膜上,使用塗抹器塗佈熱硬化性樹脂組成物,之後於90℃/30min乾燥以製作乾薄膜。熱硬化性樹脂組成物之厚度,係在乾燥後調整塗佈量為約20μm。之後,將所得之乾薄膜進行狹縫加工為指定尺寸。 As a carrier film, a thermosetting resin composition was applied on a PET film with a thickness of 38 μm using an applicator, and then dried at 90 ° C./30 min to produce a dry film. The thickness of the thermosetting resin composition is adjusted to about 20 μm after drying. After that, the resulting dry film is slit to a specified size.

<疊合> <Overlay>

準備以銅厚15μm形成有電路之兩面印刷配線基材,於使用MEC公司CZ-8100進行過前處理之基材,使用名機公司真空疊合器MVLP-500在印刷配線基材上疊合乾薄膜。疊合條件係在溫度80℃、壓力5kg/cm2/60sec進行。 Prepare a printed wiring substrate with a copper thickness of 15 μm on both sides of the circuit, and use a MEC CZ-8100 pre-treated substrate to use a vacuum machine MVLP-500 from Mingji to laminate the printed wiring substrate. film. Condition-based laminated at a temperature of 80 ℃, pressure of 5kg / cm 2 / 60sec performed.

<B階段狀態之評估(對基材之形成時的處理)> <Evaluation of B-stage state (treatment when the substrate is formed)>

關於實施例1~19,係進行乾薄膜之B階段狀態(半硬化狀態)之評估。進行狹縫加工成為形成有所得之熱硬化性樹脂組成物的乾薄膜之指定尺寸,由以下方法確認乾薄膜之狀態。 For Examples 1 to 19, the evaluation of the B-stage state (semi-hardened state) of the dry film was performed. Slit processing was performed to a specified size of the dry film on which the resulting thermosetting resin composition was formed, and the state of the dry film was confirmed by the following method.

(評估方法) (evaluation method)

○:狹縫加工後,確認到樹脂層之破裂與樹脂之落粉 ○: After slit processing, cracking of resin layer and falling of resin were confirmed

△:狹縫加工後,確認到樹脂層之破裂、或樹脂之落粉 △: After slit processing, cracking of resin layer or falling of resin was confirmed

<通孔上之凹陷評估> <Evaluation of Depression on Through Hole>

如圖3所示,準備以直徑300μm、間距1mm之間隔形成有鍍銅通孔之厚度0.3mm的兩面印刷配線基材,使用MEC公司CZ-8100進行前處理。之後,將以乾薄膜之製作段落所示之方法所製作之厚度50μm的乾薄膜,使用名機公司真空疊合器MVLP-500,於形成有通孔之印刷配線基材上兩面同時疊合乾薄膜。疊合條件係在溫度80℃、壓力5kg/cm2/60sec下進行。之後,對具備熱硬化性樹脂層之基材,以ORC公司HMW680GW(金屬鹵化物燈、散射光)表背面均以整面接觸曝光進行光照射。光照射量係以DSC之發熱峰值溫度作為參考,以如表1~3記載的方式設定。接著以表1~3記載之溫度條件將基板立起進行加熱處理60~80分鐘。進一步地用ORC公司紫外線照射裝置以1J/cm2之能量進行紫外線照射,接著於熱風 循環式乾燥爐中立起,170℃/60min硬化,以使其完全硬化。之後,使用表面粗度測定器SE-700(小坂研究所製),進行通孔上之凹陷量之確認。 As shown in FIG. 3, a two-sided printed wiring substrate with a thickness of 0.3 mm and copper plated through holes formed at intervals of 300 μm in diameter and 1 mm in pitch is prepared for pretreatment using MEC CZ-8100. After that, the dry film with a thickness of 50 μm produced by the method shown in the section for producing dry film was vacuum-laminated by MVLP-500 of Mingji Co., and the two sides of the printed wiring substrate formed with through holes were simultaneously laminated and dried. film. Condition-based laminated at a temperature of 80 ℃, carried out 2 / 60sec pressure of 5kg / cm. After that, the base material provided with the thermosetting resin layer was light-irradiated with full-surface contact exposure using ORC HMW680GW (metal halide lamp, scattered light), both front and back. The light irradiation amount is set in the manner described in Tables 1 to 3 with reference to the peak heat generation temperature of DSC. Next, the substrate was erected under the temperature conditions described in Tables 1 to 3 for 60 to 80 minutes. Further, the ultraviolet irradiation device of the ORC company ultraviolet ray was irradiated with an energy of 1 J / cm 2 , then stood up in a hot-air circulation drying furnace, and was hardened at 170 ° C./60 min to completely harden it. After that, the surface roughness measuring instrument SE-700 (manufactured by Kosaka Research Institute) was used to confirm the amount of depression in the through hole.

(評估方法) (evaluation method)

○:通孔上之最大凹陷部分為5μm以下 ○: The maximum recessed part on the through hole is below 5μm

△:通孔上之最大凹陷部分超過5μm △: The maximum concave part on the through hole exceeds 5μm

<開口圖型之形成之評估> <Evaluation of the formation of opening patterns>

對具備有上述所得之樹脂層的基板,以ORC公司HMW680GW(金屬鹵化物燈、散射光)光照射為開口設計尺寸100μm之負型圖型狀。光照射量,係以DSC之發熱峰值溫度作為參考,如下述表1~3記載的方式設定。接著以表1~3記載之溫度條件,進行加熱處理60~80分鐘。之後,於35℃之3wt% TMAH/5wt%乙醇胺混合水溶液中浸漬基板進行3分鐘顯影,遵照下述基準來進行顯影性及圖型化之評估。所得結果如表1~3所示。 The substrate provided with the resin layer obtained above was irradiated with light of ORC HMW680GW (metal halide lamp, scattered light) as a negative pattern with an opening design size of 100 μm. The amount of light irradiation is set with reference to the peak heat generation temperature of DSC as described in Tables 1 to 3 below. Next, under the temperature conditions described in Tables 1 to 3, heat treatment is performed for 60 to 80 minutes. After that, the substrate was immersed in a 3wt% TMAH / 5wt% ethanolamine mixed aqueous solution at 35 ° C for 3 minutes for development, and the evaluation of the developability and patterning was performed according to the following criteria. The results obtained are shown in Tables 1-3.

(評估方法) (evaluation method)

◎:以碳酸鈉水溶液來替代TMAH/5wt%乙醇胺混合水溶液,亦可顯影。光照射部表面並無顯影液所致之損傷,且於未照射部見不到顯影殘渣的狀態 ◎: Aqueous sodium carbonate is used instead of TMAH / 5wt% ethanolamine mixed aqueous solution, which can also be developed. There is no damage caused by the developer on the surface of the light-irradiated part, and no development residue can be seen in the non-irradiated part

○:光照射部表面並無顯影液所致之損傷,且於未照射部見不到顯影殘渣的狀態 ○: There is no damage to the surface of the light-irradiated part by the developing solution, and no development residue can be seen in the non-irradiated part

×:於未照射部確認到顯影殘渣。或無法進行未照射部之顯影的狀態。 ×: Development residue was confirmed in the non-irradiated part. Or, the undeveloped portion cannot be developed.

××:光照射部及未照射部均完全溶解的狀態。 ××: The state where the light-irradiated part and the non-irradiated part are completely dissolved.

×××:於開口部之深部可見到底切的狀態 ×××: The undercut is visible in the deep part of the opening

<線圖型形成> <Line pattern formation>

對具備前述所得之樹脂層的基板,以ORC公司HMW680GW(金屬鹵化物燈、散射光)光照射為線寬/線距=100/100μm之設計值的負型圖型狀。光照射量,係以DSC之發熱峰值溫度作為參考,如下述表1~3記載的方式設定。接著以表1~3記載之溫度條件進行60~80分鐘加熱處理。之後,於35℃之3wt% TMAH/5wt%乙醇胺混合水溶液中浸漬基板進行3分鐘顯影,遵照下述基準來進行所得之設計值100μm的線狀圖型之評估。所得結果如表1~3所示。 The substrate provided with the resin layer obtained above was irradiated with light of ORC HMW680GW (metal halide lamp, scattered light) into a negative pattern having a design value of line width / line distance = 100/100 μm. The amount of light irradiation is set with reference to the peak heat generation temperature of DSC as described in Tables 1 to 3 below. Next, heat treatment is performed for 60 to 80 minutes under the temperature conditions described in Tables 1 to 3. After that, the substrate was immersed in a 3wt% TMAH / 5wt% ethanolamine mixed aqueous solution at 35 ° C for 3 minutes for development, and the obtained linear pattern with a design value of 100 μm was evaluated according to the following criteria. The results obtained are shown in Tables 1-3.

(評估方法) (evaluation method)

○:成為線之頂端長度100μm、底端長度100μm,得到如設計值之圖型。 ○: The top length of the line is 100 μm and the bottom length is 100 μm, and a pattern as designed is obtained.

△:線之頂端長度100μm、底端長度60μm以上且未達100μm,可見到極少許的底切。 △: The length of the top of the thread is 100 μm, the length of the bottom is 60 μm or more and less than 100 μm, and very little undercut is seen.

×:線之頂端長度100μm、底端長度未達60μm,於底端見到大幅的底切。 ×: The length of the top of the thread is 100 μm, and the length of the bottom is less than 60 μm. A large undercut is seen at the bottom.

(除膠渣耐性) (Dress removal resistance)

對於以與評估開口圖型之形成的基材同樣的方法製作之基材,進一步以ORC公司紫外線照射裝置以1J/cm2之 能量進行紫外線照射,接著於熱風循環式乾燥爐以表1~3記載之後硬化溫度硬化60分鐘(後硬化)。之後,對光照射面進行雷射加工。光源係用CO2雷射(日立Via Mechanics公司、光源10.6μm)加工。遵照下述基準評估。為了評斷加工性的優劣,全部以同樣條件進行雷射加工。 For the substrate produced by the same method as the substrate for evaluating the opening pattern, the ultraviolet irradiation device of the ORC company ultraviolet irradiation device was used with an energy of 1 J / cm 2 , and then the hot air circulation type drying furnace was shown in Tables 1 to 3 After the description, the curing temperature is cured for 60 minutes (post-curing). After that, laser processing is performed on the light irradiation surface. The light source was processed with CO 2 laser (Hitachi Via Mechanics, light source 10.6 μm). Follow the benchmark evaluation below. In order to judge the pros and cons of workability, laser processing was performed under the same conditions.

加工徑目標為頂端徑65μm/底端50μm。 The machining diameter target is 65 μm at the top end and 50 μm at the bottom end.

條件:孔洞(遮罩直徑):3.1mm/脈衝寬度20μsec/輸出2W/頻率5kHz/擊發數:叢發3擊發(burst 3 shots) Condition: Hole (mask diameter): 3.1mm / Pulse width 20μsec / Output 2W / Frequency 5kHz / Number of firings: Burst 3 shots

對此進行過雷射加工之基材,進一步藉由過錳酸除膠渣水溶液(濕式法)進行除膠渣處理。作為除膠渣耐性之評估,遵照下述基準來進行基材表面之表面粗度確認及雷射開口部周邊狀態之評估。表面粗度之確認,係藉由雷射顯微鏡VK-8500(Keyence公司、測定倍率2000倍、Z軸方向測定間距10nm),測定各自的表面粗度Ra。雷射開口部之觀察係藉由光學顯微鏡進行。 For this substrate, which has been laser-processed, further degumming treatment is carried out by an aqueous solution of permanganic acid degumming residue (wet method). As an evaluation of the resistance to scum removal, the surface roughness of the substrate surface and the evaluation of the surrounding state of the laser opening were evaluated in accordance with the following criteria. The surface roughness was confirmed by measuring each surface roughness Ra with a laser microscope VK-8500 (Keyence Corporation, measurement magnification 2000 times, measurement pitch in the Z-axis direction 10 nm). The observation of the laser opening is performed by an optical microscope.

關於藥液(Rohm and Haas公司) About liquid medicine (Rohm and Haas)

膨潤 MLB-211 溫度80℃/時間10min Swelling MLB-211 temperature 80 ℃ / time 10min

過錳酸 MLB-213 溫度80℃/時間15min Permanganic acid MLB-213 temperature 80 ℃ / time 15min

還原 MLB-216 溫度50℃/時間5min Reduction MLB-216 temperature 50 ℃ / time 5min

關於評估方法 About the evaluation method

◎:過錳酸除膠渣後之表面粗度Ra未達0.1μm、且與雷射加工後之加工徑的差為2μm以下 ◎: The surface roughness Ra after permanganic acid slag removal is less than 0.1 μm, and the difference from the processed diameter after laser processing is 2 μm or less

○:過錳酸除膠渣後之表面粗度Ra為0.1~0.3μm以 下、且與雷射加工後之加工徑的差為2~5μm ○: The surface roughness Ra after permanganic acid slag removal is 0.1 ~ 0.3μm The difference between the lower and the processing diameter after laser processing is 2 ~ 5μm

×:過錳酸除膠渣後之表面粗度Ra超過0.3μm、且與雷射加工後之加工徑的差為5μm以上 ×: The surface roughness Ra after permanganic acid degumming slag exceeds 0.3 μm, and the difference from the processing diameter after laser processing is 5 μm or more

<硬化後翹曲評估> <Warpage evaluation after hardening>

將以乾薄膜之製作段落所示方法所製作之厚度20μm的乾薄膜,使用名機公司真空疊合器MVLP-500,疊合於切出為50mm×50mm尺寸之正方形的18μm銅箔的光澤面之單面。疊合條件係在溫度80℃、壓力5kg/cm2/60sec下進行。之後,對於具備熱硬化性樹脂層之銅箔,使用ORC公司HMW680GW(金屬鹵化物燈、散射光)以整面接觸曝光進行光照射。光照射量,係以DSC之發熱峰值溫度作為參考,如表1~3記載的方式設定。接著以表1~3記載之溫度條件將基板加熱處理60~80分鐘。進一步使用ORC公司紫外線照射裝置以1J/cm2之能量進行紫外線照射,接著以熱風循環式乾燥爐170℃/60min硬化,得到單面具備有熱硬化性樹脂組成物之銅箔。之後,以游標卡尺計測端部4處的翹曲量,作為所得硬化物之翹曲狀態之評估。 Using a vacuum laminator MVLP-500 from Mingji Co., Ltd., a dry film with a thickness of 20 μm produced by the method shown in the paragraph for making a dry film was laminated on the glossy surface of a 18 μm copper foil cut into a square of 50 mm × 50 mm. One-sided. Condition-based laminated at a temperature of 80 ℃, carried out 2 / 60sec pressure of 5kg / cm. Then, the copper foil provided with the thermosetting resin layer was light-irradiated using the whole surface contact exposure using ORC Corporation HMW680GW (metal halide lamp, scattered light). The amount of light exposure is set with reference to the peak heat generation temperature of DSC as described in Tables 1 to 3. Next, the substrate is heat-treated for 60 to 80 minutes under the temperature conditions described in Tables 1 to 3. Further, using an ultraviolet irradiation device of ORC Corporation, ultraviolet irradiation was performed with an energy of 1 J / cm 2 , followed by curing in a hot air circulating drying oven at 170 ° C./60 min to obtain a copper foil provided with a thermosetting resin composition on one side. After that, the amount of warpage at the end 4 was measured with a vernier caliper, and used as an evaluation of the warpage state of the resulting hardened product.

(評估方法) (evaluation method)

◎:大致上見不到翹曲。4處端部中最大翹曲部分之翹曲量未達5mm ◎: Warpage is hardly seen. The warpage of the largest warped part of 4 ends is less than 5mm

○:見到極少許的翹曲。4處端部中最大翹曲部分之翹曲量為5mm以上、未達20mm ○: Very little warpage was seen. The warpage of the largest warped part of the four ends is more than 5mm and less than 20mm

△:4處端部中最大翹曲部分之翹曲量為20mm以上 △: The warpage amount of the largest warped part in the four ends is 20 mm or more

×:硬化物呈筒狀收縮。無法以游標卡尺計測端部之翹曲量 ×: The hardened product shrinks in a cylindrical shape. Unable to measure the amount of warpage at the end with a vernier caliper

<CTE測定> <CTE measurement>

依乾薄膜之製作項目所記載的方法,製作各自之厚度40μm之乾薄膜。之後,於18μm之銅箔的光澤面側,使用名機公司真空疊合器MVLP-500來疊合乾薄膜。疊合條件係在溫度80℃、壓力5kg/cm2/60sec下進行。之後,以ORC公司HMW680GW(金屬鹵化物燈、散射光)進行整面接觸曝光。光照射量,係以DSC之發熱峰值溫度作為參考,如下述表1~3記載的方式設定。接著以表1~3記載之溫度條件進行60~80分鐘加熱處理。之後,用ORC公司紫外線照射裝置以1J/cm2之能量進行紫外線照射,接著於熱風循環式乾燥爐以170℃/60min完全硬化。之後,由銅箔剝離,得到實施例.比較例記載之樹脂組成物。之後,將所得之樹脂組成物切出3mm寬度、長度10mm之條狀,以JIS-C-6481記載之TMA法(拉伸法),進行CTE測定(熱膨脹係數)之評估。昇溫速度為5℃/min,進行Tg以下之熱膨脹係數之評估。熱膨脹係數係由溫度範圍25℃至100℃之平均熱膨脹係數、單位為ppm。 According to the method described in the dry film production project, dry films with a thickness of 40 μm each were produced. Then, on the shiny side of the 18 μm copper foil, the dry film was laminated using a vacuum laminator MVLP-500 from Mingji Corporation. Condition-based laminated at a temperature of 80 ℃, carried out 2 / 60sec pressure of 5kg / cm. After that, full-surface contact exposure was performed with HMW680GW (metal halide lamp, scattered light) of ORC Corporation. The amount of light irradiation is set with reference to the peak heat generation temperature of DSC as described in Tables 1 to 3 below. Next, heat treatment is performed for 60 to 80 minutes under the temperature conditions described in Tables 1 to 3. After that, ultraviolet irradiation was performed with an energy of 1 J / cm 2 using an ultraviolet irradiation device of ORC Corporation, followed by complete curing at 170 ° C./60 min in a hot-air circulation drying oven. After that, the copper foil was peeled off to obtain an example. The resin composition described in the comparative example. After that, the obtained resin composition was cut into strips with a width of 3 mm and a length of 10 mm, and evaluated by CTE measurement (coefficient of thermal expansion) according to the TMA method (tensile method) described in JIS-C-6481. The heating rate was 5 ° C / min, and the thermal expansion coefficient below Tg was evaluated. The coefficient of thermal expansion is the average coefficient of thermal expansion from a temperature range of 25 ° C to 100 ° C in ppm.

各自所得之CTE數值如表1~3中所示。 The CTE values obtained by each are shown in Tables 1-3.

<冷熱循環特性之評估> <Assessment of cold and heat cycle characteristics>

對於如上述進行過過錳酸除膠渣處理之印刷配線板, 進一步使用市售品之無電解鍍鎳浴及無電解鍍金浴,以鎳0.5μm、鍍金0.03μm之條件進行鍍敷,對圖型層施以鍍金處理。對所得之印刷配線板,進行冷熱循環特性評估。處理條件係以-65℃ 30min、150℃ 30min為1循環,施加熱歷程經過2000循環後,以光學顯微鏡觀察圖型層表面及周邊部之狀態,遵照下述基準進行裂痕之評估。觀察圖型數為100孔。所得結果如下述表1~3所示。 For printed wiring boards that have been treated with permanganic acid slag removal as described above, Further, using a commercially available electroless nickel plating bath and electroless gold plating bath, plating was performed under the conditions of nickel 0.5 μm and gold plating 0.03 μm, and the pattern layer was subjected to gold plating. The obtained printed wiring board was evaluated for the thermal cycle characteristics. The treatment conditions were -65 ℃ 30min, 150 ℃ 30min as one cycle, after 2000 cycles of heat application, the state of the surface and the peripheral part of the pattern layer was observed with an optical microscope, and the cracks were evaluated in accordance with the following criteria. The number of observation patterns is 100 holes. The results obtained are shown in Tables 1 to 3 below.

(評估方法) (evaluation method)

◎○:圖型層之表面及周邊部無裂痕發生 ◎ ○: No cracks occurred on the surface and peripheral parts of the pattern layer

◎:圖型層之周邊部的裂痕發生率未達10% ◎: The occurrence rate of cracks on the periphery of the pattern layer is less than 10%

○:圖型層之周邊部的裂痕發生率10%以上、未達30% ○: The occurrence rate of cracks on the periphery of the pattern layer is more than 10% and less than 30%

△:圖型層之周邊部的裂痕發生率30%以上 △: The occurrence rate of cracks in the peripheral part of the pattern layer is more than 30%

<熱反應性化合物、馬來醯亞胺化合物、及鹼顯影性樹脂之折射率的測定方法> <Measurement method of refractive index of heat-reactive compound, maleimide compound, and alkali-developable resin>

測定裝置:阿貝折射率計 Measuring device: Abbe refractometer

測定條件:波長589.3nm、溫度25℃ Measurement conditions: wavelength 589.3nm, temperature 25 ℃

(熱硬化性化合物+鹼顯影性樹脂+光鹼產生劑+填料) (Thermosetting compound + alkali-developable resin + photobase generator + filler)

(+高分子樹脂) (+ Polymer resin)

(比較例) (Comparative example)

表1~3中之各成分係如下所示。 The components in Tables 1 to 3 are as follows.

(熱反應性化合物) (Thermally reactive compound)

※ 828:Bis-A型液狀環氧樹脂(當量190g/eq)、三菱化學公司 ※ 828: Bis-A liquid epoxy resin (equivalent to 190g / eq), Mitsubishi Chemical Corporation

※ HP-4032:萘酚型環氧樹脂(當量150g/eq)、DIC公司 ※ HP-4032: naphthol epoxy resin (equivalent to 150g / eq), DIC Corporation

※ HP-7200 H60:將二環戊二烯型環氧樹脂(當量 265g/eq)、DIC公司以環己酮溶解。固體成分60% ※ HP-7200 H60: dicyclopentadiene epoxy resin (equivalent 265g / eq), DIC Corporation dissolved with cyclohexanone. Solid content 60%

(馬來醯亞胺化合物) (Maleimide compound)

※ UVT-302:於側鏈具有馬來醯亞胺基之丙烯酸聚合物(當量320g/eq)、東亞合成公司 ※ UVT-302: acrylic polymer with maleimide group on the side chain (equivalent to 320g / eq), East Asia Synthetic Corporation

(鹼顯影性樹脂) (Alkali developing resin)

※ HF-1M H60:將苯酚酚醛清漆(羥基當量105g/eq)、明和化成公司以環己酮溶解。固體成分60% ※ HF-1M H60: Dissolve phenol novolak (hydroxyl equivalent 105g / eq), Minghe Chemical Co., Ltd. with cyclohexanone. Solid content 60%

MEH-7851M H60:將聯苯/苯酚酚醛清漆(羥基當量210g/eq)、明和化成公司,以環己酮溶解。固體成分60%。 MEH-7851M H60: Biphenyl / phenol novolac (hydroxyl equivalent 210g / eq), Minghe Chemical Co., Ltd., dissolved in cyclohexanone. Solid content 60%.

※ Joncryl 586 H60:將苯乙烯丙烯酸共聚合樹脂、Mw=3100、固體成分酸價=108mgKOH/g、Johnson Polymer公司以環己酮溶解。固體成分60% ※ Joncryl 586 H60: dissolve styrene acrylic copolymer resin, Mw = 3100, solid component acid value = 108mgKOH / g, Johnson Polymer with cyclohexanone. Solid content 60%

※ Joncryl 68 H60:苯乙烯丙烯酸共聚合樹脂、Mw=10000、酸價195mgKOH/g、Johnson Polymer公司 ※ Joncryl 68 H60: styrene acrylic copolymer resin, Mw = 10000, acid value 195mgKOH / g, Johnson Polymer

(光鹼產生劑) (Photobase generator)

※ Irg369:2-苄基-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮-1、BASF JAPAN公司 ※ Irg369: 2-benzyl-2-dimethylamino-1- (4-morpholinylphenyl) -butanone-1, BASF JAPAN

※ WPBG-140:1-(蒽醌-2-基)乙基咪唑羧酸酯、和光純藥公司 ※ WPBG-140: 1- (anthraquinone-2-yl) ethylimidazole carboxylate, Wako Pure Chemical Industries

(高分子樹脂) (Polymer resin)

※ YX8100 BH30:苯氧基樹脂。三菱化學公司。固體成分30% ※ YX8100 BH30: phenoxy resin. Mitsubishi Chemical Corporation. Solid content 30%

(無機填充劑) (Inorganic filler)

※ SO-C2:球狀二氧化矽D50=0.5μm、折射率=1.4~1.5、Admatechs公司、比重:2.2g/cm3 ※ SO-C2: spherical silicon dioxide D50 = 0.5μm, refractive index = 1.4 ~ 1.5, Admatechs, specific gravity: 2.2g / cm 3

※ AO-502:球狀氧化鋁D50=0.7μm、折射率=1.76、Admatechs公司、比重:3.9g/cm3 ※ AO-502: spherical alumina D50 = 0.7μm, refractive index = 1.76, Admatechs, specific gravity: 3.9g / cm 3

※ Higilite H-42M:氫氧化鋁D50=1.0μm、折射率=1.65、昭和電工公司、比重:2.4g/cm3 ※ Higilite H-42M: aluminum hydroxide D50 = 1.0μm, refractive index = 1.65, Showa Denko Corporation, specific gravity: 2.4g / cm 3

※ B-30:硫酸鋇、D50=0.3μm、折射率=1.64、堺化學公司、比重:4.3g/cm3 ※ B-30: Barium sulfate, D50 = 0.3μm, refractive index = 1.64, Sakai Chemical Company, specific gravity: 4.3g / cm 3

(其他) (other)

※ R-2000:甲酚酚醛清漆、丙烯酸、THPA改質樹脂(固體成分61%、固體成分酸價87mgKOH/g、DIC公司) ※ R-2000: cresol novolac, acrylic acid, THPA modified resin (solid content 61%, solid component acid value 87mgKOH / g, DIC Corporation)

※ DPHA:二季戊四醇六丙烯酸酯_日本化藥公司 ※ DPHA: dipentaerythritol hexaacrylate_Japan Chemicals

※ IRG-184:1-羥基環己基-苯基酮_Ciba Japan公司 ※ IRG-184: 1-hydroxycyclohexyl-phenyl ketone_Ciba Japan

如表1~3所示,實施例1~19中,可確認能夠以鹼顯影形成圖型,且所得之圖型,硬化特性及冷熱循環特性優良。 As shown in Tables 1 to 3, in Examples 1 to 19, it can be confirmed that patterns can be formed by alkali development, and the obtained patterns have excellent hardening characteristics and cold-heat cycle characteristics.

又,實施例15、16等中,藉由摻合高分子樹脂,熱硬化性樹脂組成物之熔融黏度上昇,於曝光後之加熱時, 可抑制通孔部分之樹脂的流動性。結果,可製作於通孔上見不到凹陷之平坦的基板。 In addition, in Examples 15, 16, etc., by blending a polymer resin, the melt viscosity of the thermosetting resin composition increases, and upon heating after exposure, The fluidity of the resin in the through-hole portion can be suppressed. As a result, a flat substrate in which no depression is seen in the through hole can be produced.

再者,實施例18、19中,即使無機填充劑之含量相當多時,冷熱循環時亦可得到良好的硬化性。 In addition, in Examples 18 and 19, even when the content of the inorganic filler is relatively large, good hardenability can be obtained during cooling and heating cycles.

另一方面,比較例4之光自由基性組成物,難以藉由鹼顯影形成圖型。又,線形狀亦不良。進一步地,硬化後之翹曲亦大、冷熱循環時之硬化性亦不佳。 On the other hand, in the photo-radical composition of Comparative Example 4, it is difficult to form a pattern by alkali development. In addition, the line shape is also bad. Furthermore, the warpage after hardening is also large, and the hardenability during cold and hot cycles is also poor.

<剛進行光照射後之DSC測定> <DSC measurement immediately after light irradiation>

對具備實施例1中得到之樹脂層的基板,以ORC公司HMW680GW(金屬鹵化物燈、散射光)光照射為負型圖型狀。針對各自的基板,以照射量1000mJ/cm2進行圖型之光照射。光照射後,由基板上削出樹脂層,立即以Seiko Instruments公司DSC-6200,以昇溫速度5℃/min由30~300℃昇溫,分別對光照射部與未照射部進行DSC測定。又,對於由剛照射紫外線後、後硬化前之熱硬化性樹脂組成物所構成的硬化層,亦同樣進行DSC測定。 The substrate provided with the resin layer obtained in Example 1 was irradiated with light of a negative pattern by HMW680GW (metal halide lamp, scattered light) of ORC Corporation. Each substrate was irradiated with pattern light at an irradiation amount of 1000 mJ / cm 2 . After light irradiation, the resin layer was cut from the substrate, and immediately heated with Seiko Instruments DSC-6200 at a heating rate of 5 ° C / min from 30 to 300 ° C. DSC measurement was performed on the light-irradiated portion and the non-irradiated portion, respectively. In addition, the hardened layer composed of the thermosetting resin composition immediately after ultraviolet irradiation and before post-curing was also subjected to DSC measurement.

圖2係為未照射部、照射量1000mJ/cm2之光照射部、照射量1000mJ/cm2光照射後進一步以1000mJ/cm2進行UV照射後之光照射部之DSC線圖。實施例1之光照射部中,藉由光照射,波峰朝向低溫側偏移。 FIG 2 is a system non-irradiated portion, the irradiation amount of 1000mJ / cm light irradiating unit 2 irradiation amount of 1000 mJ / cm 2 irradiated with the light irradiation portion is further light DSC rear of 1000mJ / cm 2 UV irradiation line in FIG. In the light irradiation part of Example 1, the peak was shifted toward the low temperature side by light irradiation.

(比較例5) (Comparative example 5)

準備以銅厚15μm形成有電路之板厚0.4mm之兩面印 刷配線基材,使用MEC公司CZ-8100進行前處理。之後,將商品名PSR-4000G23K(太陽油墨製造(股)公司、含有具有丙烯酸環氧酯結構之鹼顯影性樹脂的光硬化性樹脂組成物),以網版印刷,以乾燥後成為20μm的方式進行塗佈。接著,於熱風循環式乾燥爐80℃/30min乾燥後,以ORC公司HMW680GW(金屬鹵化物燈、散射光),以照射量300mJ/cm2光照射為負型圖型狀。之後,以1wt%碳酸鈉水溶液顯影60秒,接著使用熱風循環式乾燥爐進行150℃/60min熱處理,得到圖型狀之硬化塗膜。 Prepare a printed wiring substrate with a thickness of 0.4 mm and a circuit board thickness of 0.4 mm on a copper thickness of 15 μm, and perform pre-treatment using MEC CZ-8100. After that, the trade name PSR-4000G23K (Sun Ink Manufacturing Co., Ltd., a photo-curable resin composition containing an alkali-developable resin having an acrylic epoxy ester structure) was screen-printed to become 20 μm after drying Carry out coating. Next, after drying in a hot-air circulation drying oven at 80 ° C./30 min, ORC HMW680GW (metal halide lamp, scattered light) was irradiated with a light of 300 mJ / cm 2 into a negative pattern. After that, it was developed with a 1 wt% sodium carbonate aqueous solution for 60 seconds, and then subjected to a heat treatment at 150 ° C / 60 min using a hot air circulation drying furnace to obtain a pattern-shaped cured coating film.

之後,以與上述實施例2同樣方式進行除膠渣耐性之評估。其結果,除膠渣耐性為「×」。 Thereafter, the evaluation of the resistance to dross removal was conducted in the same manner as in Example 2 above. As a result, the slag removal resistance was "×".

Claims (5)

一種圖型形成方法,其係包含形成由熱硬化性樹脂組成物所構成之樹脂層的步驟(A)、對前述樹脂層光照射為負型之圖型狀的步驟(B)、步驟(B)之後,將前述樹脂層加熱的步驟(B1)、及步驟(B1)之後,藉由鹼顯影將未照射部去除,以形成負型之圖型層的步驟(C)的圖型形成方法,其特徵為前述熱硬化性樹脂組成物,含有鹼顯影性樹脂、熱反應性化合物、無機填充劑、及光鹼產生劑,且該方法係使用於未照射之狀態,即使加熱至80~140℃亦不硬化,而藉由選擇性的光照射及光照射後之加熱,使前述鹼顯影性樹脂與前述熱反應性化合物進行加成反應,藉此而能夠以鹼顯影形成負型之圖型的鹼顯影型之熱硬化性樹脂組成物。A pattern forming method, which includes a step (A) of forming a resin layer composed of a thermosetting resin composition, a step (B) and a step (B) of a pattern in which the light irradiation of the resin layer is negative ), After the step (B1) of heating the resin layer and the step (B1), the non-irradiated portion is removed by alkali development to form a pattern forming method of the step (C) of forming a negative pattern layer, It is characterized in that the aforementioned thermosetting resin composition contains an alkali-developable resin, a heat-reactive compound, an inorganic filler, and a photobase generator, and this method is used in an unirradiated state, even if heated to 80 to 140 ° C It does not harden, but by selective light irradiation and heating after light irradiation, the alkali-developable resin and the heat-reactive compound undergo an addition reaction, whereby alkali development can be used to form a negative pattern Alkali-developable thermosetting resin composition. 一種鹼顯影型之熱硬化性樹脂組成物,其係使用於如申請專利範圍第1項之圖型形成方法。An alkali-developable thermosetting resin composition is used in the pattern forming method as described in item 1 of the patent application. 如申請專利範圍第2項之鹼顯影型之熱硬化性樹脂組成物,其中前述無機填充劑之平均粒徑為1μm以下。For example, the alkali-developable thermosetting resin composition according to item 2 of the patent application, wherein the average particle diameter of the inorganic filler is 1 μm or less. 如申請專利範圍第2或3項之鹼顯影型之熱硬化性樹脂組成物,其係藉由光照射而於DSC測定中會產生發熱峰值;或,光照射後之鹼顯影型之熱硬化性樹脂組成物在DSC測定中之發熱開始溫度,比未照射之鹼顯影型之熱硬化性樹脂組成物在DSC測定中之發熱開始溫度更低;或者,光照射後之鹼顯影型之熱硬化性樹脂組成物在DSC測定中之發熱峰值溫度,比未照射之鹼顯影型之熱硬化性樹脂組成物在DSC測定中之發熱峰值溫度更低者。For example, the alkali-developable thermosetting resin composition according to item 2 or 3 of the patent application scope will generate a heat peak in the DSC measurement by light irradiation; or, the alkali-developing thermosetting property after light irradiation The heat-onset temperature of the resin composition in the DSC measurement is lower than the heat-onset temperature of the non-irradiated alkali-developing thermosetting resin composition in the DSC measurement; or, the alkali-developing thermosetting property after light irradiation The peak heat generation temperature of the resin composition in the DSC measurement is lower than the peak heat generation temperature of the non-irradiated alkali-developing thermosetting resin composition in the DSC measurement. 一種印刷配線板,其特徵為具有由如申請專利範圍第2~4項中任一項之鹼顯影型之熱硬化性樹脂組成物所構成的圖型層。A printed wiring board is characterized by having a patterned layer composed of an alkali-developable thermosetting resin composition according to any one of claims 2 to 4.
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TW201407285A (en) 2014-02-16

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