TWI613449B - Absorption testing device - Google Patents

Abstract

An adsorption test apparatus includes a carrier, at least one seal, and an exhaust line. The carrier has a bearing surface. The sealing member is disposed on the bearing surface, and the sealing member comprises a first sealing portion and two second sealing portions integrally formed. The first sealing portion surrounds an adsorption zone on the bearing surface, and the second sealing portion is located in the adsorption zone. The first sealing portion and the second sealing portion jointly divide the adsorption region into two first adsorption ranges and a second adsorption range. The air suction pipeline is disposed on the carrying platform, and the air suction pipeline has a negative pressure source connection port, two first air suction ports and a second air suction port. The first first suction ports are respectively connected to the two first adsorption ranges. The second suction port is connected to the second adsorption range, and the negative pressure source connection port is connected to the two first suction ports and the second suction port.

Description

Adsorption test device

The present invention relates to a test device, and more particularly to an adsorption test device.

With the advancement of technology, the functions of semiconductor components are also changing with each passing day, and the functions to be carried are more and more diverse. Traditionally, semiconductor components are often tested by a test program to determine that the functions of the semiconductor components are normal.

In general, a semiconductor element having an integrated circuit is placed on a stage for testing. In detail, the test bench is provided with a plurality of test boards and a plurality of telescopic electrical connection terminals (pogo pins). In addition, a carrier is also disposed on the carrier, and the carrier is provided with electrical contacts for electrically connecting to the semiconductor component. Before testing the semiconductor circuit, the carrier board needs to be assembled on the carrier to electrically connect the test board and the semiconductor component via the carrier. In order to ensure good electrical contact between the carrier and the electrical connection terminals, vacuum adsorption has been developed to secure different sizes of carrier plates to the carrier.

In the conventional test device using vacuum adsorption, the distribution of the adsorption holes formed on the stage is not uniform, resulting in deformation of the large-sized carrier plate due to uneven adsorption force, thereby making the electrical contacts of the carrier plate and The electrical connection between the electrical connection terminals is less effective. In addition, in the conventional test apparatus using vacuum adsorption, in order to adsorb different sizes of the carrier, a part of the sealing member provided on the carrying table is made detachable; however, the detachable design is easy to be sealed in two A gap is formed at the joint of the piece, which makes it impossible to effectively provide a good negative pressure state during pumping, so that there is a risk that the adsorption force is insufficient and the carrier plate is detached. Removable seals are also easily lost, making the user feel inconvenient.

In view of the above problems, the present invention discloses an adsorption type testing device, which helps to solve the problem that a large-sized carrier plate in a conventional testing device may be deformed due to uneven adsorption force, and a detachable sealing member may generate a gap and be easily lost. .

The adsorption test apparatus disclosed in the present invention comprises a carrying platform, at least one sealing member and a suction line. The carrier has a bearing surface. The sealing member is disposed on the bearing surface, and the sealing member comprises a first sealing portion and two second sealing portions integrally formed. The first sealing portion surrounds an adsorption zone on the bearing surface, and the second sealing portion is located in the adsorption zone. The first sealing portion and the second sealing portion jointly divide the adsorption region into two first adsorption ranges and a second adsorption range. The air suction pipeline is disposed on the carrying platform, and the air suction pipeline has a negative pressure source connection port, two first air suction ports and a second air suction port. The first first suction ports are respectively connected to the two first adsorption ranges. The second suction port is connected to the second adsorption range, and the negative pressure source connection port is connected to the two first suction ports and the second suction port.

The adsorption test apparatus according to another aspect of the present invention comprises a carrier, at least one sealing member and a suction line. The carrier has a bearing surface. The sealing member is disposed on the bearing surface, and the sealing member includes a first sealing portion and a second sealing portion integrally formed. The first sealing portion surrounds an adsorption zone on the bearing surface, and the second sealing portion is located in the adsorption zone. The first sealing portion and the second sealing portion collectively divide the adsorption region into a first adsorption range and a second adsorption range. The air suction line is disposed on the carrying platform, and the air suction line has a negative pressure source connection port, a first air inlet port and a second air inlet port. The first suction port is connected to the first adsorption range, and the second suction port is connected to the second adsorption range. The negative pressure source connection port is connected to the first suction port and the second suction port.

According to the adsorption test apparatus disclosed in the present invention, the first adsorption hole and the second adsorption hole of the loading platform are respectively located in the first adsorption range and the second adsorption range of the adsorption zone; thereby, when the large-sized carrier plate is disposed on the bearing When the bearing surface of the table is used, the suction pipe can uniformly apply the adsorption force to the central position and the peripheral position of the carrier through the first adsorption hole and the second adsorption hole, thereby helping to prevent the carrier from being deformed due to uneven force. . In addition, the second sealing portion is integrally connected to the first sealing portion without a gap generation; thereby, when the small-sized carrier plate is disposed on the bearing surface, the second adsorption range can be avoided from being connected to the first adsorption range. The problem of causing a decrease in the negative pressure effect helps to provide sufficient adsorption force to fix the carrier. Further, since the second seal portion is integrally formed to be connected to the first seal portion, the problem that the second seal portion is lost does not occur.

The above description of the disclosure and the following description of the embodiments of the present invention are intended to illustrate and explain the spirit and principles of the invention, and to provide further explanation of the scope of the invention.

The detailed features and advantages of the present invention are set forth in the Detailed Description of the Detailed Description of the <RTIgt; </ RTI> <RTIgt; </ RTI> </ RTI> </ RTI> <RTIgt; The objects and advantages associated with the present invention can be readily understood by those skilled in the art. The following examples are intended to describe the present invention in further detail, but are not intended to limit the scope of the invention.

Please refer to FIG. 1 to FIG. 3. 1 is a schematic perspective view of an adsorption type test apparatus according to a first embodiment of the present invention. 2 is another perspective view of the adsorption test apparatus of FIG. 1. 3 is a top plan view of the adsorption test apparatus of FIG. 1. In the present embodiment, the adsorption test apparatus 1 includes a loading platform 10, two sealing members 20A and 20B, an air suction line 30, and an interlocking switch 40, but the number of the sealing members 20A, 20B is not limited thereto. In other embodiments, the number of seals can be one.

The loading platform 10 has a bearing surface 110 and a plurality of first adsorption holes 120 and a plurality of second adsorption holes 130 on the bearing surface 110. In the present embodiment, the test device 1 is suctioned and adsorbed through the first adsorption hole 120 and the second adsorption hole 130 to fix a carrier plate 2 (refer to FIG. 4 first) to the bearing surface 110. Above.

The two seals 20A, 20B are disposed on the bearing surface 110 of the carrier 10, and the two seals 20A, 20B are symmetrically disposed with respect to the center M of the bearing surface 110. The seals 20A, 20B are, for example but not limited to, rubber materials, which respectively include a first sealing portion 210 and two second sealing portions 220 that are integrally formed. In this embodiment, the first sealing portion 210 is an annular rubber ring, and the second sealing portion 220 is a columnar rubber strip. The opposite ends of the second sealing portion 220 are respectively connected to different sides of the first sealing portion 210. The first sealing portion 210 surrounds the adsorption region 140 on the bearing surface 110 , and the second sealing portions 220 are located in the adsorption region 140 . The first sealing portion 210 and the second sealing portion 220 together divide the adsorption region 140 into two first adsorption ranges 141 and a second adsorption range 142. In detail, the second adsorption range 142 is between the two first adsorption ranges 141. One of the second sealing portions 220 and the first sealing portion 210 together surround one of the second adsorption ranges 142 , and the other second sealing portion 220 and the first sealing portion 210 together surround the other second adsorption range 142 . The first adsorption hole 120 of the loading platform 10 is located in the first adsorption range 141, and the second adsorption hole 130 is located in the second adsorption range 142. In addition, the bearing surface 110 is further provided with a plurality of electrical connection terminals 111 in the adsorption zone 140, the function of which will be described later.

The air suction pipe 30 is disposed on the carrying platform 10, and the air suction pipe 30 has a negative pressure source connection port 310, four first air intake ports 320A-320D, and two second air intake ports 330A, 330B. The first first suction ports 320A, 320B are respectively connected to the two first adsorption ranges 141 of the adsorption zone 140 surrounded by the sealing member 20A, and the two first suction ports 320C, 320D are respectively connected to the adsorption zone surrounded by the sealing member 20B. The first adsorption range 141 of 140 is 140. The second second suction ports 330A, 330B are respectively connected to the second adsorption range 142 of the sealing member 20A and the second adsorption range 142 of the sealing member 20B. The negative pressure source connection port 310 is connected to the four first intake ports 320A to 320D and the second and second intake ports 330A and 330B. The negative pressure source connection port 310 is connected, for example, to an evacuation pump to provide a state of negative pressure. When the suction pump connected to the negative pressure source connection port 310 is operated to provide the negative pressure source connection port 310 in a negative pressure state, the second suction ports 330A, 330B normally provide the second adsorption range 142 in a negative pressure state. Can adsorb the carrier. On the other hand, the ventilation state between the negative pressure source connection port 310 and the first intake ports 320A to 320D can be switched by actuating the switch 40.

The actuation switch 40 is, for example but not limited to, a button that is disposed on the carrier 10 . The actuation switch 40 can be used to switch the venting state between the negative pressure source connection port 310 and the first intake ports 320A-320D. In detail, when the actuation switch 40 is not turned on, the actuation switch 40 normally turns off the ventilation state of the negative pressure source connection port 310 and the first air intake ports 320A-320D, and the negative pressure source connection port 310 does not. The air is sucked from the first intake ports 320A to 320D, so that the first adsorption range 141 does not exhibit a negative pressure state. When the actuation switch 40 is turned on, the actuation switch 40 opens the ventilation state of the negative pressure source connection port 310 and the first air intake ports 320A-320D, and the first adsorption range where the first air intake ports 320A-320D are located. 141 can adsorb the carrier. The adsorption test apparatus 1 of the present embodiment is provided with an actuation switch 40 for controlling the ventilation state of the negative pressure source connection port 310 and the first air intake ports 320A to 320D, but the invention is not limited thereto. In other embodiments, the adsorption test device may not be provided with an actuation switch, and the ventilation state of the negative pressure source connection port 310 and the first intake ports 320A-320D and the second intake ports 330A, 330B normally open.

The manner in which the adsorption test apparatus 1 adsorbs carrier plates of different sizes will be described below. Please refer to FIG. 3 to FIG. 5. 4 is a top plan view of the adsorption test apparatus of FIG. 3 with a large-sized carrier plate. Figure 5 is a cross-sectional view taken along line 5-5 of the large-size carrier of Figure 4 and the adsorption test apparatus. When the carrier plate 2 having a large size is disposed on the bearing surface 110 of the carrier 10, the actuation switch 40 is turned on to switch the ventilation state of the negative pressure source connection port 310 and the first air intake ports 320A-320D to open. The first adsorption range 141 and the second adsorption range 142 of the two adsorption zones 140 can collectively adsorb the carrier 2 above the bearing surface 110.

Figure 6 is a top plan view of the adsorption test apparatus of Figure 3 with a small size carrier. Figure 7 is a cross-sectional view taken along line 7-7 of the small-sized carrier of Figure 6 and the adsorption test apparatus. When the large-sized carrier is removed and replaced with a small-sized carrier 2", the actuation switch 40 is turned off to switch the ventilation state of the negative pressure source connection port 310 and the first suction ports 320A-320D to off. In this state, the second adsorption range 142 of the two adsorption zones 140 can collectively adsorb the carrier 2" above the bearing surface 110.

In the present embodiment, the first adsorption hole 120 and the second adsorption hole 130 of the loading platform 10 are respectively located in the first adsorption range 141 and the second adsorption range 142 of the adsorption zone 140. Thereby, when the large-sized carrier 2 is disposed on the bearing surface 110 of the carrier 10, the suction line 30 can uniformly apply the adsorption force to the center of the carrier 2 via the first adsorption hole 120 and the second adsorption hole 130. The position and the peripheral position help to prevent the carrier 2 from being deformed due to uneven force. In addition, when the small-sized carrier 2" is disposed on the carrying surface 110, the actuation switch 40 can be used to close the ventilation state of the negative pressure source connection port 310 and the first air inlets 320A-320D to make the first adsorption range The 141 stops pumping, so that the first adsorption range 141 and the second adsorption range 142 can be prevented from being simultaneously pumped to cause the first adsorption range 141 to be evacuated.

Further, in the present embodiment, the second seal portion 220 is integrally coupled to the first seal portion 210. The first sealing portion 210 and the second sealing portion 220 of the present embodiment are not integrally formed because of the negative pressure effect provided by the pumping pump due to the gap between the sealing portions of the conventional sealing member. The gap is created. Thereby, when the small-sized carrier 2" is disposed on the bearing surface 110, the problem that the negative pressure effect is lowered due to the second adsorption range 142 communicating with the first adsorption range 141 can be avoided, which helps to provide sufficient adsorption force. To fix the carrier 2".

When the large-sized carrier 2 is disposed on the carrying surface 110, the deformation of the carrier 2 can be further prevented as needed to improve the accuracy of the electrical test. Referring back to FIG. 3, the second second sealing portions 220 of the sealing members 20A, 20B of the present embodiment are symmetrically arranged with respect to the center O of the adsorption region 140. Further, the extending directions of the second and second sealing portions 220 are substantially parallel to each other. Thereby, the distribution of the adsorption force applied to the carrier 2 can be made more uniform.

In addition, when the small-sized carrier 2" is disposed on the carrying surface 110, in order to improve the sealing ability of the second sealing portion 220, the thickness of the first sealing portion 210 of the present embodiment is equal to the thickness of the second sealing portion 220. However, In other embodiments, the thickness of the first sealing portion 210 may be greater than the thickness of the second sealing portion 220.

Another aspect of the adsorption test apparatus is disclosed below. Please refer to FIG. 8 and FIG. 9 at the same time. Figure 8 is a perspective view of an adsorption test apparatus according to a second embodiment of the present invention. Figure 9 is a top plan view of the adsorption test apparatus of Figure 8. Since the second embodiment is similar to the first embodiment, the following description will be made only on the difference.

In the present embodiment, the adsorption test apparatus 1" includes a carrier 10, a seal 20" and a suction line 30. The seal 20" includes a first sealing portion 210 and a second sealing portion 220" integrally formed. The first sealing portion 210 surrounds the adsorption region 140, and the first sealing portion 210 and the second sealing portion 220" collectively divide the adsorption region 140 into a first adsorption range 141" and a second adsorption range 142".

When the carrier plate having a large size is disposed on the bearing surface 110, the first adsorption range 141" and the second adsorption range 142" of the adsorption zone 140 collectively adsorb the carrier plate above the bearing surface 110. When the small-sized carrier plate is disposed on the bearing surface 110, the second adsorption range 142" of the adsorption region 140 adsorbs the carrier plate above the bearing surface 110.

In summary, in the adsorption test apparatus disclosed in the present invention, the first adsorption hole and the second adsorption hole of the loading platform are respectively located in the first adsorption range and the second adsorption range of the adsorption zone; thereby, when the large size is When the carrier plate is disposed on the bearing surface of the carrier, the air suction pipeline can uniformly apply the adsorption force to the central position and the peripheral position of the carrier through the first adsorption hole and the second adsorption hole, thereby helping to prevent the carrier from being stressed. Uneven changes occur. In addition, the second sealing portion is integrally connected to the first sealing portion without a gap generation; thereby, when the small-sized carrier plate is disposed on the bearing surface, the second adsorption range can be avoided from being connected to the first adsorption range. The problem of causing a decrease in the negative pressure effect helps to provide sufficient adsorption force to fix the carrier. Further, since the second seal portion is integrally formed to be connected to the first seal portion, the problem that the second seal portion is lost does not occur.

Although the present invention has been disclosed above in the foregoing embodiments, it is not intended to limit the invention. It is within the scope of the invention to be modified and modified without departing from the spirit and scope of the invention. Please refer to the attached patent application for the scope of protection defined by the present invention.

1,1"‧‧‧Adsorption test device
2, 2" ‧‧‧ carrier board
10‧‧‧Loading station
110‧‧‧ bearing surface
111‧‧‧Electrical connection terminal
120‧‧‧First adsorption hole
130‧‧‧Second adsorption hole
140‧‧‧Adsorption zone
141, 141" ‧ ‧ first adsorption range
142, 142" ‧ ‧ second adsorption range
20A, 20B, 20" ‧ ‧ seals
210‧‧‧First seal
220, 220" ‧ ‧ second seal
30‧‧‧Exhaust line
310‧‧‧Negative source connection
320A, 320B, 320C, 320D‧‧‧ first suction port
330A, 330B‧‧‧ second suction port
40‧‧‧Acoustic switch
M, O‧‧ Center

1 is a schematic perspective view of an adsorption type test apparatus according to a first embodiment of the present invention. 2 is another perspective view of the adsorption test apparatus of FIG. 1. 3 is a top plan view of the adsorption test apparatus of FIG. 1. 4 is a top plan view of the adsorption test apparatus of FIG. 3 with a large-sized carrier plate. Figure 5 is a cross-sectional view taken along line 5-5 of the large-size carrier of Figure 4 and the adsorption test apparatus. Figure 6 is a top plan view of the adsorption test apparatus of Figure 3 with a small size carrier. Figure 7 is a cross-sectional view taken along line 7-7 of the small-sized carrier of Figure 6 and the adsorption test apparatus. Figure 8 is a perspective view of an adsorption test apparatus according to a second embodiment of the present invention. Figure 9 is a top plan view of the adsorption test apparatus of Figure 8.

1‧‧‧Adsorption test device

10‧‧‧Loading station

110‧‧‧ bearing surface

111‧‧‧Electrical connection terminal

140‧‧‧Adsorption zone

141‧‧‧First adsorption range

142‧‧‧Second adsorption range

20A, 20B‧‧‧ Seals

210‧‧‧First seal

220‧‧‧Second seal

40‧‧‧Acoustic switch

Claims (10)

An adsorption test apparatus comprising: a carrier having a bearing surface; at least one sealing member disposed on the bearing surface, the at least one sealing member comprising a first sealing portion and two second sealing portions integrally formed The first sealing portion surrounds an adsorption zone on the bearing surface, and the two second sealing portions are located in the adsorption zone, and the first sealing portion and the second sealing portion jointly divide the adsorption zone into two first adsorption ranges and one a second adsorption range; and an air suction line disposed on the carrying platform, the air suction line has a negative pressure source connection port, two first air inlets, and a second air inlet, the two first air inlets Connected to the two first adsorption ranges, the second suction port is connected to the second adsorption range, and the negative pressure source connection port is connected to the two first suction ports and the second suction port. The adsorption test apparatus of claim 1, wherein the second adsorption range is between the two first adsorption ranges. The adsorption test apparatus of claim 1, wherein the opposite ends of the second sealing portion are respectively connected to different sides of the first sealing portion. The adsorption test apparatus of claim 1, wherein the at least one seal is two in number, and the two seals are symmetrically disposed with respect to a center of the bearing surface. The adsorption test apparatus of claim 1, wherein the two second sealing portions are symmetrically arranged with respect to a center of the adsorption zone. The adsorption test apparatus of claim 1, wherein the extending directions of the two second sealing portions are substantially parallel to each other. The adsorption test device according to claim 1, further comprising an actuating switch disposed on the carrying platform, the actuating switch closing or opening the negative pressure source connection port and the at least one suction port status. The adsorption test apparatus of claim 1, wherein the thickness of the first sealing portion is equal to the thickness of the second and second sealing portions. The adsorption test apparatus of claim 1, wherein the bearing surface is provided with at least one electrical connection terminal in the adsorption zone. An adsorption test apparatus comprising: a carrier having a bearing surface; at least one sealing member disposed on the bearing surface, the at least one sealing member comprising a first sealing portion integrally formed and a second sealing portion, The first sealing portion surrounds an adsorption zone on the bearing surface, and the second sealing portion is located in the adsorption zone, and the first sealing portion and the second sealing portion jointly divide the adsorption zone into a first adsorption range and a second a suction range; and an air suction line disposed on the carrying platform, the air suction line has a negative pressure source connection port, a first air inlet port and a second air inlet port, wherein the first air inlet port is connected to the The first suction range is connected to the second suction range, and the negative pressure source connection port is connected to the first suction port and the second suction port.