TWI612685B - Adaptable free-standing metallic article for semiconductors - Google Patents
Adaptable free-standing metallic article for semiconductors Download PDFInfo
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- TWI612685B TWI612685B TW103108718A TW103108718A TWI612685B TW I612685 B TWI612685 B TW I612685B TW 103108718 A TW103108718 A TW 103108718A TW 103108718 A TW103108718 A TW 103108718A TW I612685 B TWI612685 B TW I612685B
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- 239000004065 semiconductor Substances 0.000 title claims description 47
- 229910052751 metal Inorganic materials 0.000 claims abstract description 187
- 239000002184 metal Substances 0.000 claims abstract description 187
- 238000000034 method Methods 0.000 claims abstract description 60
- 230000008859 change Effects 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims description 23
- 238000005323 electroforming Methods 0.000 claims description 20
- 230000001965 increasing effect Effects 0.000 claims description 12
- 239000011148 porous material Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 23
- 210000004027 cell Anatomy 0.000 description 81
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 26
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 23
- 229910052802 copper Inorganic materials 0.000 description 23
- 239000010949 copper Substances 0.000 description 23
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 18
- 230000008569 process Effects 0.000 description 17
- 229910052709 silver Inorganic materials 0.000 description 17
- 239000004332 silver Substances 0.000 description 17
- 229910000679 solder Inorganic materials 0.000 description 17
- 229910052759 nickel Inorganic materials 0.000 description 13
- 238000009713 electroplating Methods 0.000 description 11
- 238000001465 metallisation Methods 0.000 description 11
- 238000013461 design Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 238000007747 plating Methods 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 238000005476 soldering Methods 0.000 description 7
- 230000035882 stress Effects 0.000 description 6
- 239000006117 anti-reflective coating Substances 0.000 description 5
- 239000005038 ethylene vinyl acetate Substances 0.000 description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- DQXBYHZEEUGOBF-UHFFFAOYSA-N but-3-enoic acid;ethene Chemical compound C=C.OC(=O)CC=C DQXBYHZEEUGOBF-UHFFFAOYSA-N 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 4
- 229910052718 tin Inorganic materials 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 210000002858 crystal cell Anatomy 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 229920002620 polyvinyl fluoride Polymers 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910000846 In alloy Inorganic materials 0.000 description 1
- 229910001374 Invar Inorganic materials 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910001257 Nb alloy Inorganic materials 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- SKYGTJFKXUWZMD-UHFFFAOYSA-N ac1l2n4h Chemical compound [Co].[Co] SKYGTJFKXUWZMD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- QLTKZXWDJGMCAR-UHFFFAOYSA-N dioxido(dioxo)tungsten;nickel(2+) Chemical compound [Ni+2].[O-][W]([O-])(=O)=O QLTKZXWDJGMCAR-UHFFFAOYSA-N 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 210000005069 ears Anatomy 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000010329 laser etching Methods 0.000 description 1
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000012266 salt solution Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Photovoltaic Devices (AREA)
Abstract
公開一種自站立金屬物件及製造方法,其中該金屬物件係於導電心軸上電鑄。該金屬物件具有經組態以用作一光伏打電池之一電導管之複數個電鑄元件。一第一電鑄元件具有以下至少一者:a)沿該第一元件之一第一長度之一不均一寬度,b)沿該第一元件之該第一長度之導管方向變化,c)沿該第一元件之該第一長度之一膨脹區段,d)與複數個電鑄元件中之一第二元件之一第二寬度不同之一第一寬度,e)與複數個電鑄元件中之該第二元件之一第二高度不同之一第一高度,及f)經紋理化之一頂表面。 A self-standing metal object and method of manufacture are disclosed, wherein the metal object is electroformed on a conductive mandrel. The metal article has a plurality of electroformed components configured to function as an electrical conduit for a photovoltaic cell. A first electroformed component has at least one of: a) a non-uniform width along one of the first lengths of the first component, b) a change in direction of the conduit along the first length of the first component, c) An expansion section of the first length of the first member, d) a first width different from a second width of one of the plurality of electroformed components, e) and a plurality of electroformed components One of the second elements has a second height that differs from the first height, and f) one of the textured top surfaces.
Description
本申請案主張2013年11月13日申請之以「Adaptable Free-Standing Metallic Article for Semiconductors」為標題之美國專利申請案第14/079,540號之優先權,該案係Babayan等人,以「Free-Standing Metallic Article for Semiconductors」為標題且於2013年3月13日申請之美國專利申請案第13/798,123號之部分接續,該兩案均由本申請案之受讓者擁有並以引用之方式併入本文。本申請案亦與以「Free-Standing Metallic Article With Expansion Segment」為標題且由Brainard等人於2013年11月13日申請之美國專利申請案第14/079,544號有關,該案由本申請案之受讓者擁有並以引用的方式併入本文。 The present application claims priority to U.S. Patent Application Serial No. 14/079,540, the entire disclosure of which is incorporated herein by reference in its entirety in its entirety in its entirety in </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; This article. The present application is also related to U.S. Patent Application Serial No. 14/079,544, the entire disclosure of which is incorporated herein by The possessor owns and incorporates this article by reference.
本發明係有關於一種用於半導體之可適應自站立金屬物件。 This invention relates to an adaptable self-standing metal article for a semiconductor.
太陽能電池係將光子轉化為電能之裝置。由電池產生之電能經由耦接至半導體材料之電接觸收集,並安排 路線通過與模組中之其他光伏打電池之互連。太陽能電池之「標準電池」模型具有半導體材料,用於吸收入射太陽能並將其轉化為電能,放置於抗反射塗料(ARC)層下方及金屬背板上方。一般利用燒穿糊製造至半導體表面之電接觸,該燒穿糊係經加熱以使糊擴散穿過ARC層並接觸電池之表面的金屬糊。該糊基本上經圖案化為一組指狀物及匯流條,隨後利用帶將其等鉛焊至其他電池以建立模組。另一類太陽能電池具有夾在透明導電氧化物層(TCO)之間之半導體材料,隨後以最終導電糊層塗覆,其亦依照指狀物/匯流條圖案予以組態。 A solar cell is a device that converts photons into electrical energy. The electrical energy generated by the battery is collected via electrical contacts coupled to the semiconductor material and arranged The route is interconnected with other photovoltaic cells in the module. The "standard battery" model of solar cells has a semiconductor material that absorbs incident solar energy and converts it into electrical energy, placed beneath the anti-reflective coating (ARC) layer and above the metal backplane. Electrical contact to the surface of the semiconductor is typically made by firing through the paste which is heated to diffuse the paste through the ARC layer and to contact the metal paste on the surface of the cell. The paste is substantially patterned into a set of fingers and bus bars, which are then lead welded to other cells using a tape to create a module. Another type of solar cell has a semiconductor material sandwiched between transparent conductive oxide layers (TCO), which is then coated with a final conductive paste layer, which is also configured in accordance with the finger/bus bar pattern.
於此兩類電池中,一般為銀之金屬糊用於支援電 流沿水平方向(平行於電池表面)流動,進而容許製造太陽能電池之間之連接以建立模組。太陽能電池金屬化最常見係透過將銀糊篩網印刷至電池上、固化該糊及隨後鉛焊跨過篩網印刷匯流條之帶實現。然而,銀相對於太陽能電池之其他組件要昂貴,且在總費用中占有高百分比。 Among the two types of batteries, silver metal paste is generally used to support electricity. The flow flows in a horizontal direction (parallel to the surface of the cell), which in turn allows the fabrication of connections between the solar cells to create a module. Solar cell metallization is most commonly achieved by printing a silver paste screen onto a cell, curing the paste, and subsequently lead welding across the screen printing bus bar. However, silver is expensive relative to other components of solar cells and accounts for a high percentage of the total cost.
為降低銀費用,本技藝已知用於金屬化太陽能電 池之替代方法。例如,已嘗試透過將銅直接電鍍至太陽能電池上以用銅代替銀。然而,銅電鍍之缺點係電池受銅污染,影響可靠性。當直接電鍍至電池表面時,電鍍生產量及產率亦會由於電鍍所需之步驟繁多而成為問題,如沈積晶種層、施塗遮罩及蝕刻或鐳射刻除電鍍區域以形成所需之圖案。用於在太陽能電池上形成電導管之其他方法包括採用平行線或聚合片包封導電線之排列並將其等鋪設至電 池上。 To reduce silver costs, the art is known for metallizing solar power An alternative to the pool. For example, attempts have been made to replace copper with copper by electroplating copper directly onto a solar cell. However, the disadvantage of copper plating is that the battery is contaminated with copper, which affects reliability. When directly electroplating to the surface of the cell, the amount of plating production and yield can also be problematic due to the numerous steps required for electroplating, such as depositing a seed layer, applying a mask, and etching or laser-etching the plated area to form the desired pattern. Other methods for forming an electrical conduit on a solar cell include encapsulating the conductive lines with parallel lines or polymeric sheets and laying them up to electricity On the pool.
公開一種自站立金屬物件及製造方法,其中金屬物件係於導電心軸上電鑄。該金屬物件具有經組態以用作光伏打電池之電導管之複數個電鑄元件。第一電鑄元件具有以下至少一者:a)沿第一元件之第一長度之不均一寬度,b)沿第一元件之第一長度之導管方向變化,c)沿第一元件之第一長度之膨脹區段,d)與複數個電鑄元件中之第二元件之第二寬度不同之第一寬度,e)與複數個電鑄元件中之第二元件之第二高度不同之第一高度,及f)經紋理化之頂表面。 A self-standing metal object and method of manufacture are disclosed, wherein the metal object is electroformed on a conductive mandrel. The metal article has a plurality of electroformed components configured to be used as an electrical conduit for a photovoltaic cell. The first electroformed component has at least one of: a) a non-uniform width along a first length of the first component, b) a change in direction of the conduit along a first length of the first component, and c) a first along the first component a lengthwise expansion section, d) a first width different from a second width of the second of the plurality of electroformed components, e) a first difference from a second height of the second of the plurality of electroformed components Height, and f) textured top surface.
100、102‧‧‧心軸 100, 102‧‧‧ mandrel
105‧‧‧外表面 105‧‧‧Outer surface
110、112、115‧‧‧圖案元件 110, 112, 115‧‧‧ pattern elements
150、152、154‧‧‧電鑄元件 150, 152, 154‧‧‧ electroforming components
160‧‧‧鎳層 160‧‧‧ Nickel layer
180、350、355、400、800、1100、1210、1260‧‧‧金屬物件 180, 350, 355, 400, 800, 1100, 1210, 1260‧‧‧ metal objects
190、830、840‧‧‧相交元件 190, 830, 840‧‧‧ intersecting components
300a、300b‧‧‧金屬層 300a, 300b‧‧‧ metal layer
310‧‧‧平行指狀物/豎直指狀物 310‧‧‧Parallel fingers/vertical fingers
310、320‧‧‧指狀物(元件) 310, 320‧‧‧ fingers (components)
312、322‧‧‧底表面 312, 322‧‧‧ bottom surface
320‧‧‧水平指狀物 320‧‧‧ horizontal fingers
330‧‧‧框架元件 330‧‧‧Frame components
360、430、440、600、610、1220‧‧‧互連元件 360, 430, 440, 600, 610, 1220‧‧‧ interconnection components
370‧‧‧第一(方格)區 370‧‧‧First (square) area
380‧‧‧第二區 380‧‧‧Second District
390‧‧‧導管/方格/第二區 390‧‧‧catheter/square/second area
402‧‧‧半導體基板 402‧‧‧Semiconductor substrate
410、420、810、820、900、1110、1120‧‧‧方格線 410, 420, 810, 820, 900, 1110, 1120‧‧‧ grid lines
412、422、432、442、602、622、812a、812b、908、912、1112、1122‧‧‧寬度 412, 422, 432, 442, 602, 622, 812a, 812b, 908, 912, 1112, 1122‧‧ Width
414‧‧‧高度 414‧‧‧ Height
450、455、1130‧‧‧邊緣構件 450, 455, 1130‧‧‧ edge members
605‧‧‧前邊緣 605‧‧‧ front edge
606、624‧‧‧長度 606, 624‧‧‧ length
620‧‧‧孔隙 620‧‧‧ pores
650a、650b‧‧‧基板 650a, 650b‧‧‧ substrate
651、652、1360‧‧‧間隙 651, 652, 1360‧‧ ‧ gap
710、720‧‧‧電鑄元件 710, 720‧‧‧ electroforming components
715、725‧‧‧頂表面 715, 725‧‧‧ top surface
720‧‧‧過鍍元件 720‧‧‧Overplating components
722‧‧‧塗層 722‧‧‧ coating
910‧‧‧標稱寬度 910‧‧‧ nominal width
940‧‧‧互連區域 940‧‧‧Interconnected area
1010a/b/c/d/e、1270‧‧‧匯流條 1010a/b/c/d/e, 1270‧‧ ‧ bus bars
1011c、1021c‧‧‧週期 1011c, 1021c‧‧ cycle
1011d‧‧‧弧形截面 1011d‧‧‧Arc section
1011e、1021e‧‧‧彎曲部分 1011e, 1021e‧‧‧ curved part
1012c、1022c‧‧‧振幅 1012c, 1022c‧‧‧ amplitude
1013d/e、1023e‧‧‧直線截面 1013d/e, 1023e‧‧‧ straight section
1020a/b/c/d/e‧‧‧交叉構件 1020a/b/c/d/e‧‧‧ cross-members
1030a/b/c/d/e‧‧‧交點 1030a/b/c/d/e‧‧‧ intersection
1040a/b/c/d/e、1150‧‧‧焊墊 1040a/b/c/d/e, 1150‧‧‧ solder pads
1050b‧‧‧黏結區域 1050b‧‧‧bonding area
1140‧‧‧轉角構件 1140‧‧‧ Corner members
1160‧‧‧徑向支柱 1160‧‧‧radial pillar
1200、1250、1310、1320、1330、1340‧‧‧電池 1200, 1250, 1310, 1320, 1330, 1340‧‧‧ batteries
1300‧‧‧模組 1300‧‧‧Module
1350‧‧‧正極終端 1350‧‧‧ positive terminal
1355‧‧‧負極終端 1355‧‧‧Negative terminal
1400‧‧‧流程圖 1400‧‧‧flow chart
1410-1450‧‧‧步驟 1410-1450‧‧‧Steps
本文描述之本發明之各態樣及實施例可單獨或彼此組合使用。現將參照附圖描述該等態樣及實施例。 The various aspects and embodiments of the invention described herein can be used alone or in combination with one another. The aspects and embodiments will now be described with reference to the drawings.
圖1顯示在一實施例中之示例性電鑄心軸之透視圖。 Figure 1 shows a perspective view of an exemplary electroformed mandrel in an embodiment.
圖2A至2C描繪在製造自站立電鑄金屬物件中之示例性階段之橫截面視圖。 2A through 2C depict cross-sectional views of an exemplary stage in the manufacture of a self-standing electroformed metal article.
圖3A至3B係金屬物件之兩實施例之俯視圖。 3A to 3B are top views of two embodiments of metal objects.
圖3C係圖3B之截面A-A之橫截面視圖。 Figure 3C is a cross-sectional view of section A-A of Figure 3B.
圖3D至3E係圖3B之橫截面之其他實施例之部分橫截面視圖。 3D through 3E are partial cross-sectional views of other embodiments of the cross section of Fig. 3B.
圖3F至3G係具有互連元件之金屬物件之實施例 之俯視圖。 3F to 3G are embodiments of metal objects having interconnecting elements Top view.
圖4提供在一實施例中之具有可適應特徵部之金屬物件之頂視圖。 Figure 4 provides a top view of a metal article having an adaptable feature in an embodiment.
圖5係圖4之截面C之示例性部分橫截面。 Figure 5 is an exemplary partial cross section of section C of Figure 4.
圖6係在一實施例中之互連區域之詳細俯視圖。 Figure 6 is a detailed top plan view of the interconnected regions in an embodiment.
圖7A至7B係在某些實施例中之圖4之截面D之豎直橫截面。 Figures 7A through 7B are vertical cross-sections of section D of Figure 4 in certain embodiments.
圖8顯示用於光伏打電池之前側之具有可適應特徵部實施例之金屬物件之俯視圖。 Figure 8 shows a top view of a metal article having an adaptable feature embodiment for the front side of a photovoltaic cell.
圖9係具有沿其長度之漸縮寬度之示例性方格線之詳細俯視圖。 Figure 9 is a detailed top view of an exemplary grid line having a tapered width along its length.
圖10A至10E係膨脹區段之各實施例之簡化示意圖。 10A through 10E are simplified schematic views of various embodiments of the expansion section.
圖11顯示用於光伏打電池之背側之具有可適應特徵部實施例之金屬物件之俯視圖。 Figure 11 shows a top view of a metal article having an adaptable feature embodiment for the back side of a photovoltaic cell.
圖12圖示示例性前網格與後網格之間之電池間互連。 Figure 12 illustrates an inter-cell interconnection between an exemplary front mesh and a rear mesh.
圖13顯示藉由金屬物件形成模組總成之示例性光伏打電池。 Figure 13 shows an exemplary photovoltaic cell that forms a module assembly from a metal object.
圖14係使用本發明之金屬物件形成光伏打模組之示例性方法之流程圖。 14 is a flow diagram of an exemplary method of forming a photovoltaic module using the metal article of the present invention.
太陽能電池之金屬化習慣上係利用篩網印刷於 電池表面上之銀糊,及利用焊料塗覆帶之電池間互連達成。就指定之金屬導管縱橫比而言,電阻與其足跡成反比。 因此,電池金屬化或電池間互連設計通常在陰影與電阻之間予以取捨,以達成最優化之太陽能電池模組功率輸出。 本發明之金屬物件,亦應稱為方格或網格,可用於代替習知銀糊及焊料塗覆帶且具有容許解耦習慣上需要在功能要求之間予以取捨之因素的可適應特徵部。 The metallization of solar cells is custom printed on screens. The silver paste on the surface of the battery and the inter-battery interconnection using the solder coated tape are achieved. In terms of the specified metal conduit aspect ratio, the resistance is inversely proportional to its footprint. Therefore, battery metallization or inter-cell interconnect design typically trades between shadow and resistance to achieve an optimized solar cell module power output. The metal articles of the present invention, also referred to as squares or grids, can be used in place of conventional silver pastes and solder coated tapes and have adaptable features that allow for decoupling factors that are customarily required to be traded between functional requirements.
於Babayan等人之美國專利申請案第13/798,123 號中,將半導體(如光伏打電池)之電導管製作成電鑄自站立金屬物件。金屬物件係自太陽能電池分離地製造且包括可作為單件工件穩定轉移及與半導體裝置輕易對齊之多個元件,如指狀物及匯流條。於電鑄製程中,金屬物件之元件彼此整合地形成。金屬物件係於電鑄心軸中製造,產生針對太陽能電池或其他半導體裝置予以定製之圖案化金屬層。例如,金屬物件可具有方格線,其等具有使太陽能電池之陰影最小化之高對寬縱橫比。金屬物件可代替用於電池金屬化、電池間互連及模組製造之習知匯流條金屬化及帶架線。將光伏打電池之金屬化層體製造成可在加工步驟之間穩定轉移之獨立組件之能力於材料費用及製造上提供各種優勢。 U.S. Patent Application Serial No. 13/798,123 to Babayan et al. In the number, an electric conduit of a semiconductor (such as a photovoltaic cell) is fabricated into an electroformed self-standing metal object. Metal objects are manufactured separately from solar cells and include a plurality of components, such as fingers and bus bars, that can be stably transferred as a single piece of workpiece and easily aligned with a semiconductor device. In the electroforming process, the components of the metal object are integrally formed with each other. Metal objects are fabricated in an electroformed mandrel that produces a patterned metal layer that is customized for solar cells or other semiconductor devices. For example, a metal object can have a checkered line that has a high to wide aspect ratio that minimizes the shadow of the solar cell. Metal objects can replace the conventional bus bar metallization and tape routing for battery metallization, inter-cell interconnection, and module fabrication. The ability to create a metallization layer of photovoltaic cells that creates a separate component that can be stably transferred between processing steps provides various advantages in material cost and manufacturing.
圖1描繪在美國專利申請案第13/798,123號之一 實施例中之示例性電鑄心軸100之一部分之透視圖。心軸100可由導電材料製成,如不鏽鋼、銅、陽極化鋁、鈦或鉬、鎳、鎳鐵合金(例如,不脹鋼(Invar))、銅或此等金屬之任何 組合,且可設計成具有充足面積以容許高電鍍電流及支援高生產量。心軸100具有外表面105,其具有包括圖案元件110及112且可針對計劃製造之電導管元件之所需形狀予以客製化之預成型圖案。在此實施例中,圖案元件110及112為具有矩形橫截面之凹槽或溝槽,然而在其他實施例中,圖案元件110及112可具有其他橫截面形狀。將圖案元件110及112描繪為形成方格型圖案之相交區段,其中在此實施例中,平行線組彼此垂直相交。 Figure 1 depicts one of the US patent applications No. 13/798,123 A perspective view of a portion of an exemplary electroformed mandrel 100 in an embodiment. The mandrel 100 can be made of a conductive material such as stainless steel, copper, anodized aluminum, titanium or molybdenum, nickel, nickel-iron alloy (eg, Invar), copper, or any of these metals. Combined, and designed to have sufficient area to allow for high plating currents and support high throughput. The mandrel 100 has an outer surface 105 having a preformed pattern that includes pattern elements 110 and 112 and that can be customized for the desired shape of the electrical conduit element that is intended to be fabricated. In this embodiment, pattern elements 110 and 112 are grooves or grooves having a rectangular cross-section, although in other embodiments pattern elements 110 and 112 may have other cross-sectional shapes. The pattern elements 110 and 112 are depicted as forming intersecting sections of a checkered pattern, wherein in this embodiment, the sets of parallel lines intersect each other perpendicularly.
圖案元件110具有高度「H」及寬度「W」,其中 高對寬比定義為縱橫比。透過將圖案元件110及112用於心軸100中以形成金屬物件,可針對光伏打應用定製電鑄金屬零件。例如,縱橫比可依需要介於約0.01與約10之間,以滿足太陽能電池之陰影限制。 The pattern element 110 has a height "H" and a width "W", wherein The high aspect ratio is defined as the aspect ratio. By using pattern elements 110 and 112 for mandrel 100 to form a metal object, custom electroformed metal parts can be applied for photovoltaic applications. For example, the aspect ratio can be between about 0.01 and about 10 as needed to meet the shadow limitations of solar cells.
圖案元件之縱橫比以及橫截面形狀及縱向佈局 可經設計以滿足所需規格,如電流容量、串聯電阻、陰影損失及電池佈局。可使用任何電鑄製程。例如,可藉由電鍍覆製程形成金屬物件。特定言之,因電鍍覆基本上為各向同性製程,故利用圖案心軸限制電鍍覆以客製化零件之形狀係使效率最大化之重要改良。此外,雖然當放置在半導體表面時某些橫截面形狀可能不穩定,但可透過心軸之使用而製得之客製化圖案容許諸如互連線之特徵部為此等導管提供穩定性。在一些實施例中(例如)預成型圖案可經組態為具有相交線之連續方格。此組態不僅將機械穩定性提供至形成方格之複數個電鑄元件,且亦因電流分佈於更多 導管而提供低串聯電阻。方格型結構亦可提高電池之穩健性。例如,若方格的一些部分損壞或不工作,則電流可由於存在方格圖案而在損壞區域周圍流動。 Aspect ratio of the pattern elements as well as cross-sectional shape and longitudinal layout Can be designed to meet required specifications such as current capacity, series resistance, shadow loss, and battery layout. Any electroforming process can be used. For example, a metal object can be formed by an electroplating process. In particular, since the electroplating is essentially an isotropic process, the use of a pattern mandrel limits the importance of electroplating to the shape of the customized part to maximize efficiency. Moreover, while certain cross-sectional shapes may be unstable when placed on a semiconductor surface, customized patterns that can be made through the use of a mandrel allow features such as interconnect lines to provide stability to such conduits. In some embodiments, for example, the preformed pattern can be configured to have a continuous grid of intersecting lines. This configuration not only provides mechanical stability to the plurality of electroformed components forming the grid, but also because the current is distributed more The conduit provides a low series resistance. The square structure also improves the robustness of the battery. For example, if some parts of the square are damaged or not working, the current may flow around the damaged area due to the presence of the checkered pattern.
圖2A至2C係如美國專利申請案第13/798,123號 所揭示在使用心軸製造金屬層工件中之示例性階段之簡化橫截面視圖。於圖2A中,提供具有圖案元件110及115之心軸102。圖案元件115具有漸縮之豎直橫截面,心軸102之外表面105變寬。漸縮豎直橫截面可提供某些功能益處,如增加金屬之量以改良導電性,或輔助電鑄工件自心軸102移除。心軸102應受電鑄製程,其中如圖2B所示,示例性電鑄元件150、152及154形成於圖案元件110及115內。電鑄元件150、152及154可為(例如)純銅或銅之合金。在其他實施例中,可首先將鎳層電鍍至心軸102上,接著電鍍銅,如此一來,鎳提供阻止最終半導體裝置受銅污染之障壁。可視情況將另一鎳層電鍍於電鑄元件之頂部上以囊封銅,如在圖2B中在電鑄元件150上之鎳層160所描繪。在其他實施例中,可依需要使用各種金屬將多個層電鍍於圖案元件110及115內,以達成計劃製造之金屬物件之所需性質。 Figures 2A through 2C are, for example, U.S. Patent Application Serial No. 13/798,123 A simplified cross-sectional view of an exemplary stage disclosed in the fabrication of a metal layer workpiece using a mandrel. In FIG. 2A, a mandrel 102 having pattern elements 110 and 115 is provided. The pattern element 115 has a tapered vertical cross section with the outer surface 105 of the mandrel 102 widened. The tapered vertical cross section may provide certain functional benefits, such as increasing the amount of metal to improve electrical conductivity, or assisting in the removal of the electroformed workpiece from the mandrel 102. The mandrel 102 should be subjected to an electroforming process in which exemplary electroformed components 150, 152, and 154 are formed in pattern elements 110 and 115, as shown in FIG. 2B. Electroformed components 150, 152, and 154 can be, for example, pure copper or copper alloys. In other embodiments, the nickel layer may first be electroplated onto the mandrel 102, followed by electroplating of copper, such that the nickel provides a barrier that prevents the final semiconductor device from being contaminated with copper. Another nickel layer may optionally be electroplated on top of the electroformed component to encapsulate the copper, as depicted by the nickel layer 160 on the electroformed component 150 in Figure 2B. In other embodiments, multiple layers may be used to plate multiple layers into pattern elements 110 and 115 as needed to achieve the desired properties of the metal article to be fabricated.
在圖2B中,將電鑄元件150及154顯示為形成與 心軸102之外表面105平齊。電鑄元件152圖示可過鍍元件之另一實施例。就電鑄元件152而言,電鍍覆持續直至金屬延伸至心軸102之表面105上方。一般將由於電鑄之各向同性屬性而形成圓化頂部之過鍍部分可用作把手以促進電鑄元件152自心軸102抽出。電鑄元件152之圓化頂部亦可在光伏 打電池中提供光學優點(例如)成為折射性表面以輔助光收集。在未顯示之其他實施例中,除形成於預成型圖案110及115內之彼等物外,金屬物件可具有形成於心軸表面105之頂部上之部分,如匯流條。 In Figure 2B, electroformed components 150 and 154 are shown as forming and The outer surface 105 of the mandrel 102 is flush. Electroformed component 152 illustrates another embodiment of an overplatable component. In the case of electroformed component 152, the electroplating continues until the metal extends over surface 105 of mandrel 102. The overplated portion that forms the rounded top due to the isotropic nature of the electroforming is typically used as a handle to facilitate extraction of the electroformed component 152 from the mandrel 102. The rounded top of electroformed component 152 can also be used in photovoltaics Optical advantages are provided in the battery, for example, as a refractive surface to aid in light collection. In other embodiments not shown, the metal article may have portions formed on top of the mandrel surface 105, such as bus bars, in addition to those formed in the preformed patterns 110 and 115.
在圖2C中,將電鑄元件150、152及154自心軸102 移除成為自站立金屬物件180。注意圖2A至2C展示三種不同類型的電鑄元件150、152及154。在各實施例中,在心軸102內之電鑄元件可全為同一類型,或可具有電鑄圖案之不同組合。金屬物件180可包括如可藉由圖1之交叉構件圖案112形成之相交元件190。相交元件190可協助將金屬物件180製成單件自站立工件,以使其可輕易轉移至其他加工步驟,同時保持個別元件150、152及154彼此對齊。其他加工步驟可包括自站立金屬物件180之塗覆步驟及將其合併至半導體裝置中之組裝步驟。透過將半導體之金屬層製成自站立工件,整個半導體總成之製造產率將不受金屬層之產率影響。此外,金屬層可與其他半導體層分離地應受溫度及製程。例如,金屬層可經歷將不影響半導體總成之其餘部分的高溫製程或化學浴。 In Figure 2C, electroformed components 150, 152, and 154 are self-mandrel 102. The self-standing metal object 180 is removed. Note that Figures 2A through 2C show three different types of electroformed components 150, 152, and 154. In various embodiments, the electroformed components within the mandrel 102 can all be of the same type, or can have different combinations of electroformed patterns. Metal object 180 can include intersecting elements 190 as may be formed by cross member pattern 112 of FIG. The intersecting elements 190 can assist in forming the metal article 180 into a single piece of self-standing workpiece so that it can be easily transferred to other processing steps while maintaining the individual elements 150, 152, and 154 aligned with each other. Other processing steps may include a coating step from the standing metal object 180 and an assembly step of incorporating it into the semiconductor device. By making the metal layer of the semiconductor self-standing workpiece, the manufacturing yield of the entire semiconductor assembly will not be affected by the yield of the metal layer. In addition, the metal layer can be separated from other semiconductor layers by temperature and process. For example, the metal layer can undergo a high temperature process or chemical bath that will not affect the remainder of the semiconductor assembly.
在將金屬物件180自圖2C中之心軸102移除後, 可將心軸102再用於製造其他零件。由於可再使用心軸102,故相較於在太陽能電池上直接實施電鍍覆之現有技術提供顯著費用下降。在直接電鍍覆方法中,遮罩或心軸形成於電池本身上,及因此必須建造在每一電池上並經常破壞。相較於要求圖案化且隨後電鍍半導體裝置的技術,可 再使用心軸減少加工步驟且節省費用。在其他習知方法中,將薄印刷晶種層施用至半導體表面以開始電鍍製程。 然而,晶種層導致低生產量。相對地,如本文所描述之可再使用心軸可利用容許高電流容量之厚金屬心軸,藉此導致高電鍍電流及因而獲得之高生產量。金屬心軸厚度可為(例如)介於0.2至5mm之間。 After the metal object 180 is removed from the mandrel 102 in Figure 2C, The mandrel 102 can be reused to make other parts. Since the mandrel 102 can be reused, it provides a significant cost reduction over the prior art that directly performs electroplating on solar cells. In the direct plating method, the mask or mandrel is formed on the battery itself, and thus must be built on each battery and often broken. Compared to the technology that requires patterning and subsequent plating of semiconductor devices, The mandrel is then used to reduce processing steps and save money. In other conventional methods, a thin printed seed layer is applied to the surface of the semiconductor to begin the electroplating process. However, the seed layer results in low throughput. In contrast, a reusable mandrel as described herein can utilize a thick metal mandrel that allows for high current capacity, thereby resulting in high plating currents and thus high throughput. The metal mandrel thickness can be, for example, between 0.2 and 5 mm.
圖3A及3B圖示可藉由本文所描述之電鑄心軸製 造之示例性金屬層300a及300b之俯視圖。金屬層300a及300b包括此處具體化為實質平行指狀物310之電鑄元件,該等指狀物已藉由在導電心軸中之實質平行凹槽形成。金屬層300b亦包括此處具體化為水平指狀物320之電鑄元件,其等與豎直指狀物310相交,其中指狀物310及320以大約直角相交。在其他實施例中,指狀物310及320可以其他角相交,同時仍形成連續方格或網格圖案。金屬層300a及300b亦包括可用作匯流條以自指狀物310及320彙集電流之框架元件330。整合形成為金屬物件之一部分之匯流條可提供製造改良。在本高容量太陽能模組製造方法中,電池連接經常係透過將金屬帶人工鉛焊至電池達成。由於人工操作及鉛焊帶施加於電池上之應力,此做法常常導致電池斷裂或受損。此外,人工鉛焊方法導致高勞動力相關生產費用。因此,正如使用本文所描述之電鑄金屬物件之可行方案,事先形成並連接至金屬化層之匯流條或帶支持低成本自動化製造方法。 3A and 3B illustrate an electroformed mandrel that can be fabricated by the methods described herein A top view of exemplary metal layers 300a and 300b is fabricated. Metal layers 300a and 300b include electroformed elements embodied herein as substantially parallel fingers 310 that have been formed by substantially parallel grooves in the conductive mandrel. Metal layer 300b also includes an electroformed component embodied herein as horizontal fingers 320 that intersects vertical fingers 310, wherein fingers 310 and 320 intersect at approximately right angles. In other embodiments, the fingers 310 and 320 may intersect at other angles while still forming a continuous grid or grid pattern. The metal layers 300a and 300b also include a frame member 330 that can be used as a bus bar to collect current from the fingers 310 and 320. Integrating the bus bars formed as part of a metal object provides a manufacturing improvement. In the high-capacity solar module manufacturing method, the battery connection is often achieved by artificially soldering the metal strip to the battery. This practice often results in battery breakage or damage due to manual handling and stress imposed on the battery by the lead strip. In addition, manual lead welding methods result in high labor-related production costs. Thus, as is possible with the electroformed metal articles described herein, bus bars or strips previously formed and attached to the metallization layer support low cost automated manufacturing methods.
框架元件330亦可提供機械穩定性,以使當自心 軸移除時,金屬層300a及300b係單件自站立工件。即,金屬層300a及300b之所以為單件,係因當自光伏打電池或其他半導體總成分開時,其等係單一組件,指狀物310及320保持連接。當計劃將指狀物元件附接至光伏打電池時,框架元件330另可協助維持指狀物元件310與320之間之間隔及對齊。框架元件330於圖3A至圖3B中顯示為延伸跨過金屬層300a及300b之一邊緣。然而,在其他實施例中,框架元件可僅部分延伸跨過一邊緣,或可以多於一邊緣為邊界,或可在邊緣上組態為一或多個耳片,或可駐留於方格本身內。此外,框架元件330可與指狀物310及320同時電鑄,或在其他實施例中可在已形成指狀物310及320後在分開步驟中電鑄。 Frame member 330 can also provide mechanical stability to enable self-centering When the shaft is removed, the metal layers 300a and 300b are self-standing workpieces in a single piece. That is, the metal layers 300a and 300b are single pieces because the fingers 310 and 320 remain connected when they are a single component from the photovoltaic cell or other semiconductor components. Frame element 330 may additionally assist in maintaining the spacing and alignment between finger elements 310 and 320 when it is contemplated to attach the finger elements to the photovoltaic cells. Frame member 330 is shown extending across one of the edges of metal layers 300a and 300b in Figures 3A-3B. However, in other embodiments, the frame member may extend only partially across one edge, or may be bordered by more than one edge, or may be configured as one or more ears on the edge, or may reside on the square itself Inside. Additionally, frame member 330 can be electroformed simultaneously with fingers 310 and 320, or in other embodiments can be electroformed in separate steps after fingers 310 and 320 have been formed.
圖3C顯示在圖3B之截面A-A處取得之金屬層 300b之橫截面。在此實施例中,將指狀物310顯示為具有大於1,如約1至約5,及在此圖中如大約2之縱橫比。較寬度大之橫截面高度減小金屬層300b對光伏打電池之陰影作用。在各實施例中,僅一部份指狀物310及320可具有大於1之縱橫比,或半數以上之指狀物310及320可具有大於1之縱橫比。在其他實施例中,一些或所有指狀物310及320可具有小於1之縱橫比。指狀物310之高度「H」可介於(例如)約5微米至約200微米,或約10微米至約300微米之範圍內。指狀物310之寬度「W」可介於(例如)約10微米至約5mm,如約10微米至約150微米之範圍內。平行指狀物310之間之距離具有在各指狀物之中線之間測得之間距「P」。在一些實 施例中,該間距可介於(例如)約1mm與約25mm之間。在圖3B及3C中,指狀物310及320具有不同寬度及間距,但高度大致相等。在其他實施例中,指狀物310及320可具有彼此不同之寬度、高度及間距,或可具有一些相同的特性,或可具有相同之所有特性。該等值依據眾因素予以選擇,如光伏打電池之大小、所需效率之陰影量或將金屬物件耦接至電池之前部或後部。在一些實施例中,指狀物310可具有介於約1.5mm與約6mm之間之間距,及指狀物320可具有介於約1.5mm與約25mm之間之間距。指狀物310及320形成於具有形狀及間隔實質上如同指狀物310及320之凹槽之心軸中。框架元件330可具有如指狀物310及320之相同高度,或可為如圖3C中之虛線指示之較薄工件。在其他實施例中,框架元件330可形成於指狀物元件310及320上方。 Figure 3C shows the metal layer taken at section A-A of Figure 3B. Cross section of 300b. In this embodiment, the fingers 310 are shown to have an aspect ratio greater than 1, such as from about 1 to about 5, and in this figure, such as about two. The wider cross-sectional height reduces the shadowing effect of the metal layer 300b on the photovoltaic cell. In various embodiments, only a portion of the fingers 310 and 320 can have an aspect ratio greater than one, or more than half of the fingers 310 and 320 can have an aspect ratio greater than one. In other embodiments, some or all of the fingers 310 and 320 can have an aspect ratio of less than one. The height "H" of the fingers 310 can range, for example, from about 5 microns to about 200 microns, or from about 10 microns to about 300 microns. The width "W" of the fingers 310 can range, for example, from about 10 microns to about 5 mm, such as from about 10 microns to about 150 microns. The distance between the parallel fingers 310 has a distance "P" measured between the lines of the fingers. In some real In an embodiment, the spacing can be between, for example, between about 1 mm and about 25 mm. In Figures 3B and 3C, the fingers 310 and 320 have different widths and spacings, but the heights are substantially equal. In other embodiments, the fingers 310 and 320 can have different widths, heights, and spacings from one another, or can have some of the same characteristics, or can have all of the same characteristics. The value is chosen based on a number of factors, such as the size of the photovoltaic cell, the amount of shadow required, or the coupling of metal objects to the front or rear of the cell. In some embodiments, the fingers 310 can have a spacing of between about 1.5 mm and about 6 mm, and the fingers 320 can have a spacing of between about 1.5 mm and about 25 mm. Fingers 310 and 320 are formed in a mandrel having a shape and spacing substantially the same as the grooves of fingers 310 and 320. The frame member 330 can have the same height as the fingers 310 and 320, or can be a thinner workpiece as indicated by the dashed lines in Figure 3C. In other embodiments, frame member 330 can be formed over finger members 310 and 320.
圖3C亦顯示指狀物310及320可彼此實質上共 面,係因指狀物310及320具有半數以上彼此重疊之其等橫截面區域。相較於彼此上下編織之習知網格,如圖3C中描繪之共面方格可提供較相同橫截面面積之重疊圓形線低的輪廓。金屬層300b之相交共面線亦在電鑄製程期間彼此整合形成,藉此將更大穩健性提供至金屬層300b之自站立物件。即,整合元件形成為一工件而非由分離組件接合在一起。圖3D及3E顯示共面相交元件之其他實施例。在圖3D中,指狀物310於高度上較指狀物320短但定位於指狀物320之橫截面高度內。指狀物310及320各別具有底表面312及322,其等在此實施例中對齊,如以提供供安裝至半導體表 面用之平整表面。在圖3E之實施例中,指狀物310具有較指狀物320大之高度且延伸超出指狀物320之頂表面。指狀物310之半數以上橫截面面積重疊指狀物320之整個橫截面,及因此指狀物310與320如本發明所定義般共面。 FIG. 3C also shows that the fingers 310 and 320 can be substantially shared with each other. The faces are due to the fact that the fingers 310 and 320 have more than half of their cross-sectional areas that overlap each other. Coplanar squares as depicted in Figure 3C can provide a lower profile with overlapping circular lines of the same cross-sectional area than conventional meshes that are woven up and down. The intersecting coplanar lines of the metal layer 300b are also integrated with each other during the electroforming process, thereby providing greater robustness to the self-standing articles of the metal layer 300b. That is, the integrating elements are formed as a workpiece rather than being joined together by separate components. Figures 3D and 3E show other embodiments of coplanar intersecting elements. In FIG. 3D, the fingers 310 are shorter in height than the fingers 320 but are positioned within the cross-sectional height of the fingers 320. Fingers 310 and 320 each have bottom surfaces 312 and 322 that are aligned in this embodiment, such as to provide for mounting to a semiconductor meter The flat surface used for the surface. In the embodiment of FIG. 3E, the fingers 310 have a greater height than the fingers 320 and extend beyond the top surface of the fingers 320. More than half of the cross-sectional area of the fingers 310 overlaps the entire cross-section of the fingers 320, and thus the fingers 310 and 320 are coplanar as defined herein.
圖3F及3G顯示其他實施例,其中電鑄金屬物件 支持模組中之光伏打電池之間之互連。常見模組具有串聯連接之許多電池,如介於36至60個之間。該等連接係透過使用焊料塗覆銅帶將一電池之前部附接到下一電池之後部製成。依此方式附接帶需要薄的帶,以使該帶可圍繞電池彎曲而不破壞電池邊緣。因帶已甚為狹窄,故使用薄帶會使電阻增至更大。互連一般亦需要各自分離鉛焊之三個分離帶。在圖3F之實施例中,金屬物件350具有已與第一方格區370整合電鑄之互連元件360。互連元件360具有耦接至方格370之第一末端,且經組態以延伸超出光伏打電池之表面以容許連接至相鄰電池。互連元件360取代在電池之間鉛焊分離帶之需求,藉此降低製造費用及支持可行自動化。在所顯示之實施例中,互連元件360為直線區段,但可採用其他組態。且,互連元件360之數目可依需要變化,如提供多個元件360以減小電阻。可在電鑄後使互連元件360彎曲或成折角,例如以支援電池之間之前至後連接,或可於心軸中經製作以相對方格370成折角。 Figures 3F and 3G show other embodiments in which an electroformed metal object Supports the interconnection between photovoltaic cells in the module. Common modules have many batteries connected in series, such as between 36 and 60. The connections are made by attaching the front of a battery to the back of the next cell using a solder coated copper strip. Attaching the strap in this manner requires a thin strap so that the strap can bend around the battery without damaging the battery edge. Since the belt is very narrow, the use of a thin strip increases the resistance. Interconnects typically also require three separate strips for separate lead soldering. In the embodiment of FIG. 3F, metal object 350 has interconnecting elements 360 that have been electroformed with first checker zone 370. Interconnect element 360 has a first end coupled to square 370 and is configured to extend beyond the surface of the photovoltaic cell to allow connection to an adjacent cell. Interconnect element 360 replaces the need to lead the separation tape between cells, thereby reducing manufacturing costs and supporting feasible automation. In the embodiment shown, interconnect element 360 is a straight section, although other configurations are possible. Moreover, the number of interconnect elements 360 can be varied as desired, such as providing multiple elements 360 to reduce electrical resistance. The interconnecting elements 360 can be bent or angled after electroforming, for example to support front to back connections between the cells, or can be made in the mandrel to be angled relative to the grid 370.
互連元件360之相對末端可耦接至第二區380,其 中第二區380亦可於導電心軸中作為金屬物件350之一部分電鑄。在圖3F中,第二區380經組態為耳片(例如)匯流條, 隨後可將其電連接至相鄰電池之電導管390。導管390在此處經組態為元件陣列,但可採用其他組態。方格370可(例如)用作第一電池之前表面上之電導管,而方格390可為第二電池之後表面上之電導管。在圖3G之實施例中,金屬物件355具有網格以代替匯流條型連接。金屬物件355包括第一區370、互連元件360及第二區390,其等均已電鑄為單一組件,如此一來電池間連接已藉由金屬物件355提供。因此,金屬物件350及355不僅提供在一光伏打電池之表面上之電導管,且亦提供電池之間之互連。 The opposite ends of the interconnecting member 360 can be coupled to the second region 380, The second intermediate zone 380 can also be electroformed as part of the metal object 350 in the conductive mandrel. In FIG. 3F, the second zone 380 is configured as a tab (eg, a bus bar), It can then be electrically connected to an electrical conduit 390 of an adjacent battery. The conduit 390 is here configured as an array of components, but other configurations are possible. The grid 370 can be used, for example, as an electrical conduit on the front surface of the first battery, and the square 390 can be an electrical conduit on the surface behind the second battery. In the embodiment of Figure 3G, the metal object 355 has a mesh instead of a bus bar type connection. The metal article 355 includes a first region 370, an interconnecting member 360, and a second region 390, all of which have been electroformed into a single component such that the inter-cell connection has been provided by the metal article 355. Thus, metal objects 350 and 355 not only provide electrical conduits on the surface of a photovoltaic cell, but also provide interconnection between the cells.
藉由電鑄心軸製作之金屬物件具有經甚至進一 步定製以滿足特定光伏打電池之所需功能及製造需求之特徵部。例如,在金屬物件內之元件之個別形狀可經客製化設計,或在金屬物件之一區域中之元件可經設計為具有幾何上與另一區域中之元件不同之特徵部。本文所描述之客製化特徵部可單獨或彼此組合使用。電鑄心軸之使用解耦整個電鑄工件之尺寸限制,以使可針對金屬物件內之特定區域對特徵部予以最優化。此外,藉由本方法製造之金屬物件支持針對特定類型之電池,如自低成本民用電池至高效電池予以定製。金屬物件之特徵部亦容許互連組件整合,以使將金屬物件用作電導管之太陽能電池呈模組備妥。藉由本文描述之金屬物件提供之金屬化提供與具有相同足跡之傳統電池金屬化相比之較高金屬化體積及較低電阻,同時相較於基於銀及基於帶之金屬化降低成本。該等金屬物件亦促進輕質及電壓暫降容忍之光伏打電池設計。 Metal objects made by electroforming mandrels have even advanced The steps are tailored to meet the required functions and manufacturing requirements of a particular photovoltaic cell. For example, the individual shapes of the components within the metal article can be customized, or the components in one of the regions of the metal article can be designed to have features that are geometrically different from the components in another region. The customized features described herein can be used alone or in combination with each other. The use of an electroformed mandrel decouples the size constraints of the entire electroformed workpiece so that the features can be optimized for specific areas within the metal object. In addition, metal objects manufactured by the method support customization for specific types of batteries, such as from low cost consumer batteries to high efficiency batteries. The features of the metal object also allow the interconnection components to be integrated so that the solar cells using the metal object as an electrical conduit are ready for use as a module. The metallization provided by the metal articles described herein provides a higher metallization volume and lower resistance than conventional battery metallization with the same footprint, while reducing cost compared to silver-based and ribbon-based metallization. These metal objects also promote the design of photovoltaic cells with light and voltage sag tolerance.
圖4顯示具有適應光伏打電池之各特徵部之實施 例之金屬物件400之俯視圖。以虛線顯示半導體基板402以展示金屬物件在光伏打電池上之放置,其中金屬物件400在此處經組態為用於電池之前側之方格。然而,本文所描述之特徵部可應用於光伏打電池背側之電導管。在本發明中,對形成半導體裝置或光伏打電池中之半導體材料之指涉可包括非經形矽、晶形矽或適合用於光伏打電池中之任何其他半導體材料。該等金屬物件亦可應用於除光伏打電池外之其他類型的半導體裝置。在圖4中將半導體基板402顯示為具有圓化轉角(亦稱為準方形)之單晶電池。在其他實施例中,半導體基板可為具有全方形形狀之多晶形。半導體基板402可具有在其表面上之承載基板402所產生之電流之電導管線(未顯示),如銀指狀物。可依照習知方法將銀指狀物篩網印刷至半導體基板402上。例如,銀指狀物可為與方格線410之方向垂直之線。金屬物件400之元件隨後用作電導管以承載來自銀指狀物之電流。在圖4之此實施例中,金屬物件400之方格線410(在圖4中水平者)及420(在圖4中豎直者)電耦接至半導體402,如透過鉛焊,以彙集電流並將其遞送至互連元件430及440。如圖3F至3G中所描述,互連元件提供太陽能模組之電池間連接。相較於將銀用於電導管之電池,以諸如銅之金屬製作金屬物件400降低成本,且亦可由於改良之導電性而改良電池效率。 Figure 4 shows the implementation of various features of a photovoltaic cell A top view of a metal object 400 of an example. The semiconductor substrate 402 is shown in dashed lines to show the placement of the metal object on the photovoltaic cell, where the metal object 400 is configured here as a square for the front side of the cell. However, the features described herein can be applied to an electrical conduit on the back side of a photovoltaic cell. In the present invention, references to the formation of semiconductor materials in semiconductor devices or photovoltaic cells may include non-transformed germanium, crystalline germanium or any other semiconductor material suitable for use in photovoltaic cells. The metal objects can also be applied to other types of semiconductor devices other than photovoltaic cells. The semiconductor substrate 402 is shown in FIG. 4 as a single crystal cell having a rounded corner (also referred to as a quasi-square). In other embodiments, the semiconductor substrate can be a polymorph having a full square shape. The semiconductor substrate 402 can have an electrical conduit wire (not shown), such as a silver finger, on its surface that carries the current generated by the substrate 402. The silver fingers can be screen printed onto the semiconductor substrate 402 in accordance with conventional methods. For example, the silver fingers can be perpendicular to the direction of the checkered line 410. The components of the metal article 400 are then used as electrical conduits to carry current from the silver fingers. In the embodiment of FIG. 4, the square lines 410 (in the horizontal of FIG. 4) and 420 (the vertical in FIG. 4) of the metal object 400 are electrically coupled to the semiconductor 402, such as through lead soldering, to collect Current is delivered to interconnect elements 430 and 440. As described in Figures 3F through 3G, the interconnecting elements provide an inter-cell connection of the solar modules. Compared to batteries that use silver for electrical conduits, the fabrication of metal articles 400 from metals such as copper reduces cost and can also improve battery efficiency due to improved electrical conductivity.
圖4之方格線410及420顯示為大致彼此垂直;然而,在其他實施例中,其等可彼此成不垂直之角。雖然方 格線410及相交之方格線420兩者均可承載電流,但方格線410將最小電阻路徑提供至互連元件430及440且可用作電流之主要載體。因此,方格線410亦應稱為匯流條,而相交之方格線420可稱為交叉構件。在強度及維持方格之尺寸規格上,交叉構件420提供用於自站立金屬物件400之機械支撐。然而,交叉構件420亦可用作電導管,如若匯流條410失效,則提供備用。在一些實施例中,方格線410及420可具有彼此不同之寬度412及422,如以使機械強度最優化或達成電池之所需填充因數。例如,方格線410之寬度412可較方格線420之寬度422小,以使方格線420提供金屬物件400充足之機械穩定性,同時方格線410經定製以達成儘可能高之填充因數。在其他實施例中,某些方格線410可具有與其他方格線410不同之寬度,如以解決特定區之機械強度或電容量。匯流條410之間距亦可相對交叉構件420變化,或可在金屬物件400內之不同區域中彼此不同以滿足所需之裝置傳導要求。在一些實施例中,可基於(例如)晶圓之銀指狀物設計、銀篩網印刷製程之精確度或所使用之電池之類型選擇較粗或較細網格間距。 The ruled lines 410 and 420 of Figure 4 are shown as being substantially perpendicular to each other; however, in other embodiments, they may be at an angle that is not perpendicular to each other. Although the party Both the grid line 410 and the intersecting grid line 420 can carry current, but the grid line 410 provides a minimum resistance path to the interconnecting elements 430 and 440 and can serve as the primary carrier for the current. Thus, the checkered line 410 should also be referred to as a bus bar, and the intersecting checkered line 420 can be referred to as a cross member. The cross member 420 provides mechanical support for the self-standing metal object 400 in terms of strength and maintaining the dimensions of the square. However, the cross member 420 can also function as an electrical conduit, such as if the bus bar 410 fails. In some embodiments, the checkered lines 410 and 420 can have different widths 412 and 422 from each other, such as to optimize mechanical strength or achieve a desired fill factor for the battery. For example, the width 412 of the checker line 410 may be smaller than the width 422 of the checker line 420 such that the checkered line 420 provides sufficient mechanical stability of the metal object 400 while the checker line 410 is customized to achieve the highest possible Fill factor. In other embodiments, some of the checkered lines 410 may have a different width than the other checkered lines 410, such as to address the mechanical strength or capacitance of a particular zone. The spacing between bus bars 410 may also vary relative to cross member 420, or may differ from one another in different regions within metal object 400 to meet the desired device conduction requirements. In some embodiments, a coarser or finer grid spacing may be selected based on, for example, the silver finger design of the wafer, the accuracy of the silver screen printing process, or the type of battery used.
方格線410及420亦包括邊緣構件450及455,其等 經組態以位於太陽能電池周界附近。例如,邊緣構件450及455可位於離晶圓402之邊緣1至3mm處。因邊緣構件450及455形成金屬物件400之周界,故邊緣構件450及455可較金屬物件400內部之其他方格線410及420寬,以提供額外結構支撐。在圖4之實施例中,邊緣構件455經組態為自主邊緣 構件450形成某一角之轉角匯流條。即,邊緣構件450具有沿長度之導管方向變化,如以容納在此實施例中之準方形形狀。此方向變化可藉由電鑄心軸整合形成,且可包括定製轉角匯流條455之寬度以改良機械強度及減小電阻性損耗。當將金屬物件400附接至半導體基板402時,在金屬物件400之周界處之較寬匯流條450及455亦可改良黏結強度。 The checkered lines 410 and 420 also include edge members 450 and 455, etc. It is configured to be located near the perimeter of the solar cell. For example, edge members 450 and 455 can be located 1 to 3 mm from the edge of wafer 402. Because the edge members 450 and 455 form the perimeter of the metal object 400, the edge members 450 and 455 can be wider than the other grid lines 410 and 420 inside the metal object 400 to provide additional structural support. In the embodiment of Figure 4, the edge member 455 is configured as an autonomous edge Member 450 forms a corner bus bar of a certain angle. That is, the edge member 450 has a change in the direction of the conduit of the length, such as to accommodate the quasi-square shape in this embodiment. This change in direction can be formed by integration of the electroformed mandrel and can include the width of the custom corner bus bar 455 to improve mechanical strength and reduce resistive losses. When the metal object 400 is attached to the semiconductor substrate 402, the wider bus bars 450 and 455 at the perimeter of the metal object 400 can also improve the bond strength.
互連元件430及440在金屬物件400之邊緣附近, 且亦可具有與金屬物件400之其他區域不同之寬度432及442。例如,互連元件430可具有較方格線410之寬度412大之寬度432。因此,寬度432與對電池之面之寬度限制解耦,且容許較低之電阻而不影響電池有效面積。因電鑄製程為各向同性,故增大之寬度432可導致互連元件430之高度較薄。圖5顯示圖4中之截面C之豎直橫截面,藉此顯示元件410與430之間之示例性高度差。在圖5中,方格線410具有較互連元件430之高度434大之高度414。即,晶圓邊緣處之方格線410相比於較寬且較薄之互連430較窄且較高。較薄互連430可改良對疲勞失效如在運輸期間之撓曲及曝露於環境力之抵抗力,同時透過提供供電流流動之大表面積以將電壓損失減至最小。例如,在一些實施例中,互連430之厚度或高度434可為40至120μm,如50至70μm,而方格線410可具有100至200μm,如100至150μm之厚度或高度414。 Interconnecting elements 430 and 440 are near the edge of metal object 400, It may also have a different width 432 and 442 than other areas of the metal object 400. For example, interconnect element 430 can have a width 432 that is greater than the width 412 of the checker line 410. Thus, the width 432 is decoupled from the width limit of the face of the battery and allows for lower resistance without affecting the effective area of the battery. Since the electroforming process is isotropic, the increased width 432 can result in a thinner interconnect element 430. Figure 5 shows a vertical cross section of section C of Figure 4, thereby showing an exemplary height difference between elements 410 and 430. In FIG. 5, the checkered line 410 has a height 414 that is greater than the height 434 of the interconnecting member 430. That is, the square line 410 at the edge of the wafer is narrower and taller than the wider and thinner interconnect 430. The thinner interconnect 430 can improve resistance to fatigue failure such as deflection during transport and exposure to environmental forces while minimizing voltage loss by providing a large surface area for current flow. For example, in some embodiments, the thickness or height 434 of the interconnect 430 can be 40 to 120 [mu]m, such as 50 to 70 [mu]m, and the checkered line 410 can have a thickness or height 414 of 100 to 200 [mu]m, such as 100 to 150 [mu]m.
圖6顯示類似於圖4之互連元件440之示例性互連 元件600之詳細俯視圖。互連元件600用作相鄰電池之背部之焊墊,同時互連元件610用作太陽能電池之間之電導管。 注意互連600之板型設計具有相較於習知焊料帶而言大的表面積,如為使用三個匯流帶之習知電池之5倍或10倍。因此,互連600之設計透過提供低串聯電阻及極小電壓降在模組級改良效率。例如,互連元件600之寬度602可為5至10mm,如6至8mm,相較於圖4之方格線410及420之50至100μm之寬度。互連元件600之長度606可接近光伏打電池之邊緣長度,如多晶電池之整個邊緣或單晶電池之轉角之間之長度。互連元件600亦可用作將金屬物件(例如,圖4之金屬物件400)自電鑄心軸移除之製造輔助。互連元件610可在電鑄後彎曲或成折角,如以支持電池之間之前至背連接。互連元件600及610可與方格線410及420整合形成,其可透過消除接合步驟降低製造成本。在其他實施例中,互連元件600及/或610可形成為分離工件及隨後接合至方格線410及420,如以容許具有不同方格設計之互連元件互換。 6 shows an exemplary interconnection similar to interconnect element 440 of FIG. A detailed top view of component 600. Interconnect element 600 acts as a pad for the back of an adjacent cell while interconnect element 610 acts as an electrical conduit between the solar cells. Note that the plate type design of the interconnect 600 has a large surface area compared to conventional solder tapes, such as 5 times or 10 times that of conventional batteries using three bus bars. Therefore, the design of interconnect 600 improves efficiency at the module level by providing low series resistance and minimal voltage drop. For example, the width 602 of the interconnecting member 600 can be 5 to 10 mm, such as 6 to 8 mm, as compared to the width of 50 to 100 μm of the checkered lines 410 and 420 of FIG. The length 606 of the interconnecting member 600 can be close to the edge length of the photovoltaic cell, such as the entire edge of the polycrystalline cell or the length between the corners of the single crystal cell. Interconnect element 600 can also be used as a manufacturing aid to remove metal objects (e.g., metal object 400 of Figure 4) from an electroformed mandrel. The interconnect element 610 can be bent or angled after electroforming, such as to support a front-to-back connection between the cells. Interconnect elements 600 and 610 can be formed integrally with grid lines 410 and 420, which can reduce manufacturing costs by eliminating bonding steps. In other embodiments, interconnecting elements 600 and/or 610 can be formed to separate the workpiece and subsequently bonded to the checkered lines 410 and 420, such as to allow interchangeable interconnecting elements having different square designs.
互連元件600及610可具有與金屬物件400之其餘 部分不同之高度,即厚度,類似於圖5中顯示之方格線410及互連元件430之高度差。在一些實施例中(例如)互連元件610可具有50至70μm之高度及互連元件60可具有40至100μm之高度。因互連元件610提供模組中之電池之間之機械連接及電連接,故元件610可經定製為具有具體厚度以滿足指定之撓曲測試要求。元件610之數目亦可相較於習知電池之單帶附件有所增大,以改良可靠性及撓曲測試耐力。增大之互連元件610數目亦提供較大電導管面積,及因而獲得之較小電阻。在一些實施例中,已發現具有15至30個具有 50至70μm之高度之互連元件610之金屬物件可相較於150μm厚之習知銅焊料帶忍耐多十至一百倍之撓曲失效循環。 Interconnect elements 600 and 610 can have the remainder with metal object 400 Partially different heights, i.e., thickness, are similar to the height difference between the ruled line 410 and the interconnecting element 430 shown in FIG. In some embodiments, for example, interconnect element 610 can have a height of 50 to 70 μm and interconnect element 60 can have a height of 40 to 100 μm. Because interconnect element 610 provides mechanical and electrical connections between the cells in the module, component 610 can be customized to have a specific thickness to meet specified flexural testing requirements. The number of components 610 can also be increased compared to conventional single-belt accessories for improved reliability and flexural test endurance. The increased number of interconnecting elements 610 also provides a larger electrical conduit area, and thus a smaller electrical resistance. In some embodiments, it has been found that there are 15 to 30 with The metal object of the interconnecting member 610 having a height of 50 to 70 μm can withstand a flexural failure cycle of ten to one hundred times more than a conventional copper solder tape having a thickness of 150 μm.
圖6顯示互連元件600之存在孔隙620之其他特徵 部。孔隙620係以圓形、橢圓形或其他形狀之孔或縫隙形式貫穿互連元件600之厚度之開口。此等孔隙620容許在光伏打電池總成之層壓期間截留之空氣釋放,藉此促進無空隙囊封。虛線650a及650b表示在一實施例中之半導體基板之放置,其中基板650a表示光伏打電池之前側之附件,而基板650b係相鄰電池之背側之附件。基板650a可經定位(例如)具有離互連元件600之前邊緣605為0.5至1.5mm之間隙651,而基板650b可經定位(例如)具有離邊緣605為1.5至2.5mm之間隙652。如圖6中可見,出於機械強度目的,至少一部份孔隙620保持在電池之間曝露,藉此容許諸如乙烯乙酸乙烯酯(EVA)之模組層壓材料滲透互連元件600。孔隙620亦提供供層壓材料內之任何氣泡逃離之途徑。孔隙620之數目及大小可經選擇以促進層壓製程同時平衡在互連元件600中滿足電阻與機械強度要求所需之材料量。在一些實施例中,孔隙620之數目可介於(例如)1至10個之範圍內,其中孔隙620具有0.5至5mm,如1至3mm之寬度622,及1至6mm,如3至5mm之長度624。孔隙620可具有經圓化以使耐久性最大化同時容許囊封劑流動之內角。 Figure 6 shows other features of the presence of aperture 620 of interconnect element 600. unit. The aperture 620 extends through the opening of the thickness of the interconnecting member 600 in the form of a circular, elliptical or other shaped aperture or slit. These apertures 620 allow for the release of trapped air during lamination of the photovoltaic cell assembly, thereby promoting void-free encapsulation. The dashed lines 650a and 650b represent the placement of the semiconductor substrate in an embodiment wherein the substrate 650a represents the attachment on the front side of the photovoltaic cell and the substrate 650b is the attachment on the back side of the adjacent cell. The substrate 650a can be positioned, for example, with a gap 651 of 0.5 to 1.5 mm from the front edge 605 of the interconnect element 600, while the substrate 650b can be positioned, for example, with a gap 652 of 1.5 to 2.5 mm from the edge 605. As can be seen in Figure 6, at least a portion of the apertures 620 remain exposed between the cells for mechanical strength purposes, thereby permitting the module laminate, such as ethylene vinyl acetate (EVA), to penetrate the interconnecting member 600. The apertures 620 also provide a means for any air bubbles within the laminate to escape. The number and size of the apertures 620 can be selected to promote the lamination process while balancing the amount of material required to meet the electrical resistance and mechanical strength requirements in the interconnect component 600. In some embodiments, the number of apertures 620 can range, for example, from 1 to 10, wherein aperture 620 has a width of 0.5 to 5 mm, such as a width 622 of 1 to 3 mm, and 1 to 6 mm, such as 3 to 5 mm. Length 624. The apertures 620 can have internal angles that are rounded to maximize durability while allowing the encapsulant to flow.
圖7A至7B顯示如跨過如圖4中之截面D所示之方 格線410的寬度取得之示例性電鑄元件710及720之豎直橫截面。橫截面710及720類似於圖2B之電鑄元件150及152, 且呈現於圖7A至7B中以展示可合併至本發明之金屬物件之頂表面中之進一步客製化特徵部。在圖7A中,元件710具有矩形橫截面,其具有頂表面715,其中「頂」係指當安裝於光伏打電池上時之光入射表面。頂表面715可經組態以貢獻方格線之光學性質,如增進光反射及藉此增強電池效率。在一些實施例中,紋理化可為有意粗糙度以增大用於捕捉光之表面積。該粗糙度可(例如)透過將紋理化圖案合併至電鑄心軸中賦予。即,圖1之預成型圖案110可具有形成於心軸100中之紋理圖案,其中頂表面715可為藉由預成型圖案110之底部製造之表面。在另一實施例中,紋理化可藉由電鑄製程本身製造。在一示例性製程中,可針對快電鑄速率,如1至3μm/分鐘之量級,使用高電鍍覆電流。此快速率可導致電鑄心軸100之外表面105處之曝露表面粗糙。 Figures 7A through 7B show the square as shown in section D in Figure 4 The width of the ruled line 410 yields a vertical cross-section of the exemplary electroformed components 710 and 720. Cross-sections 710 and 720 are similar to electroformed components 150 and 152 of Figure 2B. And presented in Figures 7A through 7B to illustrate further customized features that can be incorporated into the top surface of the metal article of the present invention. In Figure 7A, element 710 has a rectangular cross-section with a top surface 715, where "top" refers to the light incident surface when mounted on a photovoltaic cell. The top surface 715 can be configured to contribute to the optical properties of the grid lines, such as enhancing light reflection and thereby enhancing battery efficiency. In some embodiments, the texturing can be intentional roughness to increase the surface area used to capture light. This roughness can be imparted, for example, by incorporating a textured pattern into the electroformed mandrel. That is, the preformed pattern 110 of FIG. 1 can have a textured pattern formed in the mandrel 100, wherein the top surface 715 can be a surface fabricated by the bottom of the preformed pattern 110. In another embodiment, texturing can be made by the electroforming process itself. In an exemplary process, high plating current can be used for fast electroforming rates, such as on the order of 1 to 3 [mu]m/minute. This rate of rapidity can result in roughened exposed surfaces at the outer surface 105 of the electroformed mandrel 100.
在其他實施例中,客製組態之頂表面可為在電鑄 零件形成後建立之特定表面處理層。例如,圖7B顯示具有在其頂表面725上之塗層722之過鍍元件720。塗層722可包括一或多個金屬層,包括,但不限制於,鎳、銀、錫、鉛錫或焊料。塗層722可(例如)製造平滑表面以改良圓化頂表面725之反射性。將焊料作為塗層施用於頂表面725或715除提供光學益處外亦可協助支援針對黏結進行之焊料回填。 In other embodiments, the top surface of the custom configuration can be in electroforming The specific surface finish that is created after the part is formed. For example, Figure 7B shows an overplating element 720 having a coating 722 on its top surface 725. Coating 722 can include one or more metal layers including, but not limited to, nickel, silver, tin, lead tin, or solder. Coating 722 can, for example, produce a smooth surface to improve the reflectivity of rounded top surface 725. Application of the solder as a coating to the top surface 725 or 715 in addition to providing optical benefits may also assist in supporting solder backfilling for bonding.
雖然將元件710顯示為具有矩形橫截面及將元件 720顯示為具有矩形基部及圓化頂部,但可採用其他橫截面形狀,如半球形或具有圓化倒角之伸長矩形。此等橫截面形狀可貫穿金屬物件相同或在金屬物件之不同區之間變 化。可將頂表面之任何彎曲或圓化邊緣用於將入射光偏轉至電池或若在標準太陽能電池模組內,則反射光以支援總內反射。可以諸如銀或錫之高反射性金屬塗覆表面以增強偏轉及反射兩者,藉此將有效網格陰影面積減小至小於其足跡。 Although element 710 is shown as having a rectangular cross section and components 720 is shown as having a rectangular base and a rounded top, but other cross-sectional shapes such as hemispherical or elongated rectangles with rounded chamfers may be employed. These cross-sectional shapes may be the same throughout the metal object or may vary between different regions of the metal object Chemical. Any curved or rounded edge of the top surface can be used to deflect incident light to the battery or, if within a standard solar cell module, to reflect light to support total internal reflection. The surface can be coated with a highly reflective metal such as silver or tin to enhance both deflection and reflection, thereby reducing the effective grid shadow area to less than its footprint.
圖8顯示另一金屬物件800之實施例之俯視圖,其 顯示可經定製之其他特徵部。金屬物件800具有在半數以上之金屬物件800上形成網格組態之相交方格線810及820,相交元件830及840在網格之末端處。方格線810具有沿其長度不均一之寬度,該不均一寬度經設計至製作金屬物件800之電鑄心軸中。在圖8之實施例中,寬度812a較更接近作為電池之電流彙集末端之互連元件840之寬度812b小。當金屬物件跨過其表面聚集電流時,增大之寬度812b容納在此末端處之較高電流。因此,增大之寬度812b減小電阻性損耗。 在如上所述之增大之寬度之區域中,方格線810之高度亦可依需要予以調節。 Figure 8 shows a top view of an embodiment of another metal object 800, Show other features that can be customized. Metal object 800 has intersecting grid lines 810 and 820 that form a grid configuration on more than half of metal object 800, with intersecting elements 830 and 840 at the ends of the grid. The ruled line 810 has a width that is non-uniform along its length that is designed into the electroformed mandrel from which the metal article 800 is fabricated. In the embodiment of Figure 8, the width 812a is smaller than the width 812b of the interconnect element 840 that is the current sinking end of the battery. The increased width 812b accommodates the higher current at this end as the metal object concentrates current across its surface. Therefore, the increased width 812b reduces the resistive loss. In the region of the increased width as described above, the height of the checkered line 810 can also be adjusted as needed.
在方格線之長度上之不均勻性之量可經設計以 維持光伏打電池之所需填充因數。例如,圖9顯示具有標稱寬度910之示例性線性方格線900。標稱寬度910可為(例如)50至300μm。在此實施例中,在方格線900之一端附近,如遠離互連區域940之寬度908可相較於標稱寬度910減小10至30%。在互聯區域940附近之寬度912可相較於標稱寬度910增大10至30%。因此,方格線910對稱漸縮,使一端之寬度減小及另一端之寬度增大,導致與在整個長度上具 有標稱寬度之方格線相同之填充因數。 The amount of non-uniformity over the length of the checkered line can be designed to Maintain the required fill factor for photovoltaic cells. For example, FIG. 9 shows an exemplary linear grid line 900 having a nominal width 910. The nominal width 910 can be, for example, 50 to 300 [mu]m. In this embodiment, near the end of one of the checkered lines 900, the width 908, such as away from the interconnected region 940, can be reduced by 10 to 30% compared to the nominal width 910. The width 912 near the interconnected region 940 can be increased by 10 to 30% compared to the nominal width 910. Therefore, the checkered line 910 is tapered symmetrically, so that the width of one end is reduced and the width of the other end is increased, resulting in a whole length A fill factor with the same grid width of the nominal width.
在一些實施例中,圖8及9之不均一寬度可在方格 之長度上連續發生,或在其他實施例中可在一或多個部分上發生。在其他實施例中,方格線810之寬度可在不同部分上增大及減小,而非具有單一漸縮速率。此外,沿長度具有不均一寬度之特徵可存在一、一些或所有方格線中。 In some embodiments, the uneven width of Figures 8 and 9 can be in a square The length occurs continuously, or in other embodiments may occur on one or more portions. In other embodiments, the width of the checkered line 810 can be increased and decreased over different portions rather than having a single ramp rate. In addition, features having a non-uniform width along the length may be present in one, some, or all of the checkered lines.
轉至圖8,方格線810及820顯示另一設計之特徵 部,其中長度方向輪廓除寬度不斷變化外亦呈現形狀變換。在圖8中,方格線810及820經組態為具有容許方格線沿長度方向膨脹,藉此用作膨脹區段之非線性圖案。該等圖案係藉由建立金屬物件800之電鑄心軸形成。在圖8之實施例中,方格線810及820兩者具有平行於金屬物件800之平面取向之波浪形圖案,以使金屬物件呈遞供接合至光伏打電池用之平整表面。波浪圖案可經組態為(例如)單波浪或其他彎曲形狀或幾何形狀。波浪圖案提供焊點之間之額外長度以容許金屬物件800膨脹及接觸,如針對金屬物件與所接合之半導體基板之間之熱膨脹係數(CTE)差提供應變釋放。例如,銅具有為矽之約五倍之CTE。因此,在將子總成製造成最終太陽能電池所涉及之加熱及冷卻步驟期間,鉛焊至矽基板之銅金屬物件將經歷巨大應變。 Turning to Figure 8, grid lines 810 and 820 show the characteristics of another design. In the section, the lengthwise contour also exhibits a shape change in addition to the width. In FIG. 8, the checkered lines 810 and 820 are configured to have an allowable checker line that expands in the length direction, thereby serving as a non-linear pattern of the expanded section. The patterns are formed by creating an electroformed mandrel of metal object 800. In the embodiment of FIG. 8, both of the checkered lines 810 and 820 have a wavy pattern oriented parallel to the plane of the metal article 800 to present the metal object for bonding to the flat surface of the photovoltaic cell. The wave pattern can be configured, for example, as a single wave or other curved shape or geometry. The wave pattern provides an extra length between the solder joints to allow the metal object 800 to expand and contact, such as providing strain relief for the difference in coefficient of thermal expansion (CTE) between the metal object and the bonded semiconductor substrate. For example, copper has a CTE that is about five times that of bismuth. Thus, during the heating and cooling steps involved in manufacturing the subassembly into the final solar cell, the copper metal object that is lead welded to the tantalum substrate will experience significant strain.
波浪圖案經設計以容許金屬物件800充分膨脹及 收縮以減小或消除由於CTE差而發生之諸如下彎或斷裂之問題。膨脹區段之尺寸經選擇以容納所使用之具體材料之CTE差。在一些實施例中,波浪圖案可具有(例如)200至300 μm之振幅及1至10mm之波長以提供相較於完全線性區段之額外長度。膨脹區段亦可提供較低焊接點大小,藉此減小陰影,係因減小之應變要求較小之焊接點強度。較低接點大小亦可支持較大黏結製程窗,藉此改良可製造性及成本。注意雖然在圖8中所有方格線810及820經組態為膨脹區段,但在其他實施例中,僅某些方格線可組態為膨脹區段。 在又其他實施例中,單個方格線之僅某一部分可組態為膨脹區段,而餘下長度為線性。 The wave pattern is designed to allow the metal object 800 to fully expand and Shrinkage reduces or eliminates problems such as undercuts or breaks that occur due to CTE differences. The size of the expansion section is selected to accommodate the CTE difference of the particular material used. In some embodiments, the wave pattern can have, for example, 200 to 300 The amplitude of μm and the wavelength of 1 to 10 mm provide an extra length compared to a fully linear segment. The expansion section can also provide a lower weld spot size, thereby reducing shadowing due to the reduced strain requirements requiring less weld strength. The lower joint size also supports larger bond process windows, thereby improving manufacturability and cost. Note that although all of the grids 810 and 820 are configured as expansion sections in FIG. 8, in other embodiments, only certain grid lines may be configured as expansion sections. In still other embodiments, only a portion of a single grid line can be configured as an expansion section while the remaining length is linear.
圖10A至10E係在其他實施例中之膨脹區段之各 組態之俯視圖。在此等圖中,為簡明起見將金屬方格線顯示為單一線。此外,雖然顯示方格線之僅一部分,但整個方格線可具有相同圖案,或者,方格線之其餘部分可具有不同圖案,且寬度可變化。在圖10A中,匯流條1010a具有波浪圖案,而交叉構件1020a為線性。此設計沿匯流條1010a之方向提供一維CTE應力釋放。匯流條1010a與交叉構件1020a相交之點應稱為交點1030a。焊墊1040a表示在即將附接至匯流條1010a之半導體晶圓上之銀、錫或類似焊墊。在此等圖中將焊墊1040a顯示為離散面;然而,在其他實施例中,其等可為部分或連續延伸跨過半導體晶圓之線。在圖10A中,焊墊1040a位於交點1030a之間。在其他實施例中,焊墊1040a可經定位以與交點1030a對齊,或依其他方式定位於方格線1010a及1020a上。 10A to 10E are each of the expansion sections in other embodiments Top view of the configuration. In these figures, the metal grid lines are shown as a single line for simplicity. Further, although only a portion of the checkered lines are displayed, the entire checkered lines may have the same pattern, or the rest of the checkered lines may have different patterns and the width may vary. In FIG. 10A, the bus bar 1010a has a wave pattern, and the cross member 1020a is linear. This design provides one-dimensional CTE stress relief in the direction of bus bar 1010a. The point at which the bus bar 1010a intersects the cross member 1020a should be referred to as the intersection 1030a. Pad 1040a represents a silver, tin or similar pad on a semiconductor wafer to be attached to bus bar 1010a. The pads 1040a are shown as discrete faces in these figures; however, in other embodiments, they may be lines that extend partially or continuously across the semiconductor wafer. In FIG. 10A, pad 1040a is located between intersections 1030a. In other embodiments, the pad 1040a can be positioned to align with the intersection 1030a, or otherwise positioned over the checkered lines 1010a and 1020a.
圖10B與圖10A一致,但黏結區域1050b已形成於 匯流條1010b上。黏結區域1050b提供供接合至焊墊1040b之 增大之表面積,如以增大黏結強度及擴大製造公差。黏結區域1050b可組態為(例如)如圖所示之圓墊,或自匯流條1010b延伸之支柱或其他形狀。注意在圖10A及10B中,膨脹構件之方向可互換。即,交叉構件1020a/b可組態為具有波浪圖案,而匯流條1010a/b可為線性。 Figure 10B is consistent with Figure 10A, but the bonding region 1050b has been formed On the bus bar 1010b. Bonding region 1050b is provided for bonding to pad 1040b Increased surface area, such as to increase bond strength and increase manufacturing tolerances. The bond region 1050b can be configured, for example, as a circular pad as shown, or a post or other shape extending from the bus bar 1010b. Note that in Figures 10A and 10B, the directions of the expansion members are interchangeable. That is, the cross members 1020a/b can be configured to have a wave pattern, while the bus bars 1010a/b can be linear.
在圖10C中,匯流條1010c及交叉構件1020c兩者 經組態為膨脹區段,藉此容許二維應力釋放。將匯流條1010c接合至交點1030c之間之焊墊1040c。匯流條1010c及交叉構件1020c兩者具有波浪圖案,其中匯流條1010c之週期1011c與交叉構件1020c之週期1021c相同。然而,匯流條1010c之振幅1012c不同於-在此實施例中大於-交叉構件1020c之振幅1022c。因此可見匯流條1010c及交叉構件1020c可彼此獨立地予以定製。在其他實施例中,金屬物件內之某些匯流條1010c可具有與其他匯流條1010c不同之振幅及週期。類似地,交叉構件1020c可具有彼此不同之振幅及週期。 In FIG. 10C, both the bus bar 1010c and the cross member 1020c It is configured as an expansion section, thereby allowing two-dimensional stress relief. The bus bar 1010c is bonded to the pad 1040c between the intersections 1030c. Both the bus bar 1010c and the cross member 1020c have a wave pattern in which the period 1011c of the bus bar 1010c is the same as the period 1021c of the cross member 1020c. However, the amplitude 1012c of the bus bar 1010c is different - in this embodiment greater than - the amplitude 1022c of the cross member 1020c. It can thus be seen that the bus bar 1010c and the cross member 1020c can be customized independently of one another. In other embodiments, some of the bus bars 1010c within the metal object may have different amplitudes and periods than the other bus bars 1010c. Similarly, cross member 1020c can have different amplitudes and periods from each other.
圖10D顯示又一膨脹區段組態,其中匯流條 1010d具有弧形截面1011d,其具有在交點1030d之間之中介直線截面1013d。在此實施例中,交叉構件1020d為線性。 直線截面1011d與弧形截面1013d之間之過渡可經設計為彎曲,係因銳角之不存在可促進金屬物件自電鑄心軸移除及減少應力點。在此實施例中,直線截面1013d具有延伸跨過焊墊1040d之長度。因應力將沿僅一個方向施加於方格線1010d上,故直線截面1013d可減小焊墊1040d處之應變量。 直線截面1013d亦可減小將匯流條1010d與焊墊1040d對齊時所要求之製造公差。在其他實施例中,匯流條1010d亦可包括在交點1030d處之直線部分,以減小方格線1010d與1020d之間相交處之應力。 Figure 10D shows yet another expansion section configuration in which the bus bars 1010d has an arcuate section 1011d having an intervening linear section 1013d between intersections 1030d. In this embodiment, the cross member 1020d is linear. The transition between the straight section 1011d and the curved section 1013d can be designed to be curved, which promotes the removal of metal objects from the electroformed mandrel and reduces stress points due to the absence of sharp angles. In this embodiment, the straight section 1013d has a length that extends across the pad 1040d. Since the stress will be applied to the ruled line 1010d in only one direction, the straight section 1013d can reduce the amount of strain at the pad 1040d. The straight section 1013d can also reduce the manufacturing tolerances required to align the bus bar 1010d with the pad 1040d. In other embodiments, the bus bar 1010d may also include a straight portion at the intersection 1030d to reduce the stress at the intersection between the checkered lines 1010d and 1020d.
圖10E顯示另一實施例,其中匯流條1010e及交叉 構件1020e具有在彎曲部分1011e與1021e之間交替出現之直線截面1013e及1023e。圖10E之實施例支持金屬物件提供沿X及Y方向之CTE應變釋放,同時亦提供在交點1030e處之垂直接點。 Figure 10E shows another embodiment in which the bus bar 1010e and the crossover The member 1020e has straight sections 1013e and 1023e that alternate between the curved portions 1011e and 1021e. The embodiment of Figure 10E supports the metal article to provide CTE strain relief in the X and Y directions while also providing a vertical joint at intersection 1030e.
圖11係用於太陽能電池之背側之示例性金屬物 件1100之俯視圖。在此實施例中,金屬物件1100具有彼此大致垂直相交且均勻間隔之方格線1110及1120。在其他實施例中,方格線1110及1120可以不垂直之角相交,且可具有變化之間距。方格線1110及1120經組態為具有沿其等整個長度之膨脹區段,但在一些實施例中,方格線1110及1120可沿其等長度之一部分或全部為線性。金屬物件1100水平且豎直對稱,容許光伏打電池沿任何取向轉動以連接至相鄰電池。在圖11中,方格線1110及1120各別具有較電池之前側處寬之寬度1112及1122。例如,寬度1112及1122可為0.5至2mm,相較於前側方格線之50至300μm之寬度。因此,金屬物件1100可提供比前側網格多2至5倍之銅,及具有極低電阻及極小電壓降。亦可將金屬物件1100製成較薄,如為標準電池之厚度之一半。 Figure 11 is an exemplary metal object for the back side of a solar cell A top view of the piece 1100. In this embodiment, the metal object 1100 has checkered lines 1110 and 1120 that are substantially perpendicular to each other and evenly spaced apart. In other embodiments, the checkered lines 1110 and 1120 may intersect at perpendicular angles and may have varying distances. The checkered lines 1110 and 1120 are configured to have an expanded section along their entire length, but in some embodiments, the checkered lines 1110 and 1120 may be partially or fully linear along one of their equal lengths. The metal article 1100 is horizontal and vertically symmetrical, allowing the photovoltaic cell to rotate in any orientation to connect to adjacent cells. In Fig. 11, the checkered lines 1110 and 1120 each have a width 1112 and 1122 wider than the front side of the battery. For example, the widths 1112 and 1122 may be 0.5 to 2 mm, which is 50 to 300 μm wide compared to the front side ruled line. Therefore, the metal object 1100 can provide two to five times more copper than the front side mesh, and has extremely low resistance and a very small voltage drop. The metal object 1100 can also be made thinner, such as one half of the thickness of a standard battery.
金屬物件1100亦可具有用作鉛焊平台之較大邊 界。形成金屬物件1100之周界之邊緣構件1130及轉角構件1140可具有與方格線1110及1120相同或不同之寬度。在圖11之實施例中,焊墊1150經組態在交點處,方格線1110及1120在此處遇見金屬物件1100之周界(例如,邊緣構件1130及轉角構件1140)。焊墊1150提供較方格線1110及1120大表面積用於與太陽能電池之表面上之焊區對齊。在此實施例中,焊墊1150亦包括徑向支柱1160,如以提供交點處之應變釋放及供黏結用之額外表面積。 Metal object 1100 can also have a larger side for use as a lead soldering platform boundary. The edge members 1130 and the corner members 1140 forming the perimeter of the metal article 1100 can have the same or different widths as the checkered lines 1110 and 1120. In the embodiment of FIG. 11, pads 1150 are configured at intersections where checkered lines 1110 and 1120 meet the perimeter of metal object 1100 (eg, edge member 1130 and corner member 1140). Pad 1150 provides a larger surface area than grid lines 1110 and 1120 for alignment with the pads on the surface of the solar cell. In this embodiment, the pad 1150 also includes radial struts 1160, such as to provide strain relief at the intersection and additional surface area for bonding.
圖12顯示在兩光伏打電池之間使用本發明之金 屬物件之示例性前至背電池間互連。電池1200具有安裝於前側上之金屬物件1210,其中金屬物件1210包括在一邊緣處之互連元件1220。金屬物件1210可為(例如)圖4或圖8之金屬方格。將互連1220接合至電池1250之背側,其具有經組態為類似於圖11之背側網格之金屬物件1260。接合可透過(例如)鉛焊、熔接、超音波、導電黏性材料或其他電黏結方法達成。將互連1220黏結至金屬物件1260之匯流條1270以實現電池1200及1250之串聯連接。 Figure 12 shows the use of the gold of the invention between two photovoltaic cells An exemplary front-to-back battery interconnection of an object. Battery 1200 has a metal object 1210 mounted on the front side, wherein metal object 1210 includes interconnecting elements 1220 at an edge. Metal object 1210 can be, for example, the metal square of Figure 4 or Figure 8. Interconnect 1220 is bonded to the back side of battery 1250 with metal object 1260 configured to resemble the backside mesh of FIG. Bonding can be achieved, for example, by lead soldering, welding, ultrasonic, conductive adhesive or other electrical bonding methods. The interconnect 1220 is bonded to the bus bar 1270 of the metal object 1260 to achieve a series connection of the batteries 1200 and 1250.
圖13圖示在一實施例中,如可組裝為模組之光伏 打電池1310、1320、1330及1340之總成1300。圖13中顯示四個電池,但在模組中可依需要使用任何數目之電池,如36至60個。如圖12之有關描述,將各相鄰電池對接合在一起。然而,在圖13之實施例中,各相鄰電池自前一電池旋轉90°。例如,電池1320自電池1310順時針旋轉90°以連接至電池1330,及電池1330自電池1320順時針旋轉90°以連接 至電池1340。在圖13中之電池1310提供模組1300之正極終端1350,而電池1340提供負極終端1355。因此,本文已揭示之網格設計可經設計為具有容許在電池上採取各取向之對稱性,藉此支持模組內之電池依需要以任何順序連接。 將電池1310、1320、1330及1340組裝成彼此具有間隙1360,類似於圖6之間隙651及652。間隙1360容許整個模組撓曲,且當囊封最終模組時亦協助層壓材料流動。 Figure 13 illustrates, in an embodiment, a photovoltaic that can be assembled into a module The assembly of batteries 1310, 1320, 1330, and 1340 is 1300. Four batteries are shown in Figure 13, but any number of batteries, such as 36 to 60, can be used in the module as needed. As described in relation to Figure 12, adjacent battery pairs are joined together. However, in the embodiment of Figure 13, each adjacent battery is rotated 90 from the previous battery. For example, battery 1320 is rotated 90° clockwise from battery 1310 to connect to battery 1330, and battery 1330 is rotated 90° clockwise from battery 1320 to connect To battery 1340. The battery 1310 in FIG. 13 provides the positive terminal 1350 of the module 1300, while the battery 1340 provides the negative terminal 1355. Thus, the grid design disclosed herein can be designed to have symmetry that allows for various orientations on the battery, whereby the batteries within the support module are connected in any order as desired. The batteries 1310, 1320, 1330, and 1340 are assembled to have a gap 1360 with each other, similar to the gaps 651 and 652 of FIG. The gap 1360 allows the entire module to flex and also assists in the flow of the laminate when the final module is encapsulated.
圖14係使用如上所述之金屬物件製造太陽能電 池模組之方法之示例性流程圖1400。在步驟1410中,使用導電心軸電鑄金屬物件。心軸具有在其中形成金屬物件之一或多個預成型圖案。在一些實施例中,金屬物件經組態以用作光伏打電池內之電導管。在某些實施例中,金屬物件可包括整合特徵部以支持太陽能模組之光伏打電池之間之連接。在其他實施例中,互連特徵部可分離製作及接合至金屬物件。若分離形成,則互連特徵部可透過(例如)電鑄或沖壓片材形成。在預成型圖案內建立最終電鑄金屬物件之至少一部分。金屬物件具有複數個電鑄元件,其等具有可包括以下一或多者之客製化特徵部:a)沿第一元件之第一長度之不均一寬度,b)沿第一元件之第一長度之導管方向變化,c)沿第一元件之第一長度之膨脹區段,d)與複數個電鑄元件中之第二元件之第二寬度不同之第一寬度,e)與複數個電鑄元件中之第二元件之第二高度不同之第一高度,及f)經紋理化之頂表面。金屬物件可經組態以用作光伏打電池之電方格線、匯流條、電池間互連及焊墊。 Figure 14 is a solar electric appliance using the metal object as described above. An exemplary flow chart 1400 of a method of pool modules. In step 1410, the metal object is electroformed using a conductive mandrel. The mandrel has one or more preformed patterns in which the metal article is formed. In some embodiments, the metal object is configured to be used as an electrical conduit within a photovoltaic cell. In some embodiments, the metal object can include integrated features to support the connection between the photovoltaic cells of the solar module. In other embodiments, the interconnect features can be separately fabricated and bonded to the metal object. If separated, the interconnect features can be formed, for example, by electroforming or stamping the sheet. At least a portion of the final electroformed metal object is created within the preformed pattern. The metal article has a plurality of electroformed components, such as having a customized feature that can include one or more of: a) a non-uniform width along a first length of the first component, b) a first along the first component a change in the direction of the length of the conduit, c) an expanded section along a first length of the first component, d) a first width different from a second width of the second of the plurality of electroformed components, e) and a plurality of electrical a second height of the second element of the cast component that differs by a first height, and f) a textured top surface. Metal objects can be configured to be used as electrical grids, bus bars, inter-cell interconnects, and pads for photovoltaic cells.
步驟1410可包括使電鑄心軸之外表面與包含第 一金屬之鹽之溶液接觸,其中該第一金屬可為(例如)銅或鎳。第一金屬可形成整個金屬物件,或可形成其他金屬層之金屬前驅物。例如,可將包含第二金屬之鹽溶液電鍍於第一金屬上。在一些實施例中,第一金屬可為鎳及第二金屬可為銅,其中鎳提供針對銅擴散之障壁。可視情況將第三金屬電鍍於第二金屬上,如將為鎳之第三金屬電鍍於為銅之第二金屬上,該第二金屬已電鍍於為鎳之第一金屬上。在此三層結構中,以鎳囊封銅導管以提供阻止銅污染至半導體裝置中之障壁。在步驟1410中之電鑄製程參數可為(例如)介於1至3000安倍/平方英尺(ASF)之間之電流及介於(例如)1分鐘至200分鐘之間之電鍍時間。可施用其他導電金屬以增進黏附、增進潤濕性、用作擴散障壁或改良電接觸,如錫、錫合金、銦、銦合金、鉍合金、鎢酸鎳或鎢酸鈷鎳。 Step 1410 can include making the outer surface of the electroformed mandrel and including Contacting a solution of a metal salt, wherein the first metal can be, for example, copper or nickel. The first metal may form the entire metal object or may form a metal precursor of other metal layers. For example, a salt solution comprising a second metal can be electroplated onto the first metal. In some embodiments, the first metal can be nickel and the second metal can be copper, wherein the nickel provides a barrier to copper diffusion. The third metal may optionally be electroplated onto the second metal, such as a third metal that is nickel plated onto the second metal that is copper, which is plated onto the first metal that is nickel. In this three-layer structure, the copper conduit is encapsulated with nickel to provide a barrier to prevent copper contamination into the semiconductor device. The electroforming process parameters in step 1410 can be, for example, a current between 1 and 3000 A/m2 (ASF) and a plating time between, for example, 1 minute to 200 minutes. Other conductive metals may be applied to enhance adhesion, improve wettability, act as diffusion barriers or improve electrical contact such as tin, tin alloys, indium, indium alloys, niobium alloys, nickel tungstate or cobalt cobalt tungstate.
在形成金屬物件後,在步驟1420中將金屬物件自導電心軸分離成為自站立單件工件。該分離可涉及將物件自心軸提起或剝離,如人工或藉助諸如真空處理之工具。亦可透過將互連元件,如圖6之元件600,用作觸動並提起金屬物件之把手促進剝離。在其他實施例中,移除可包括熱或機械衝擊或超音波能以協助自心軸釋放製作之零件。隨後備妥自站立金屬物件以如下文所述透過附接及電耦接物件形成至光伏打電池或其他半導體裝置中。將金屬物件轉移至各製造步驟可在不需要支撐元件下實施。 After forming the metal object, the metal object is separated from the conductive mandrel into a self-standing single piece in step 1420. This separation may involve lifting or peeling the article from the mandrel, such as by hand or by means of a tool such as vacuum processing. Peeling can also be facilitated by using interconnecting components, such as component 600 of Figure 6, as a handle for touching and lifting the metal object. In other embodiments, the removal may include thermal or mechanical shock or ultrasonic energy to assist in releasing the fabricated part from the mandrel. The ready-to-stand metal object is then formed into the photovoltaic cell or other semiconductor device through the attached and electrically coupled articles as described below. Transferring the metal article to each manufacturing step can be performed without the need for a support element.
在步驟1430中,將金屬物件機械及電耦接至半導 體基板。步驟1430可包括將前方格耦接至半導體晶圓之前側,及將背方格耦接至晶圓之背側。該耦接可為鉛焊,如人工或自動化鉛焊。可將焊料施用於具體點,如已印刷至晶圓上之銀焊墊。在一些實施例中,已將焊料預先施用至所有或一些金屬物件,如透過電鍍或浸漬。預先施用之焊料隨後可在步驟1430之耦接製程期間回填。在其他實施例中,焊料可為活性焊料,及可支持在晶圓之未經金屬化之部分處黏結,如於2013年8月21日申請之以「使用活性焊料以將金屬物件耦接至光伏打電池「Using an Active Solder to Couple a Metallic Article to a Photovoltaic Cell」為標題之美國臨時專利申請案61/868,436所描述,該案由本申請案之受讓者擁有並以引用的方式併入本文。 In step 1430, the metal object is mechanically and electrically coupled to the semiconductor Body substrate. Step 1430 can include coupling the front grid to the front side of the semiconductor wafer and the back grid to the back side of the wafer. The coupling can be lead soldering, such as manual or automated lead soldering. Solder can be applied to specific points, such as silver pads that have been printed onto the wafer. In some embodiments, the solder has been pre-applied to all or some of the metal objects, such as by electroplating or dipping. The pre-applied solder can then be backfilled during the coupling process of step 1430. In other embodiments, the solder may be an active solder and may support bonding at the unmetallized portion of the wafer, as applied on August 21, 2013, "Using Active Solder to Couple Metal Objects to "Using an Active Solder to Couple a Metallic Article to a Photovoltaic Cell" is described in the U.S. Provisional Patent Application Serial No. 61/868,436, the disclosure of which is incorporated herein by reference. .
在步驟1430中可利用(例如)超音波、紅外線、熱 棒或快速熱處理技術將金屬物件接合至半導體。可一次在一接點上,或一次在晶圓之區域或整個晶圓上實施黏結。 金屬物件可包括膨脹區段以減小可由黏結製程期間引發之熱應力導致之下彎或斷裂。 In step 1430, for example, ultrasound, infrared, heat can be utilized Rod or rapid thermal processing techniques bond metal objects to the semiconductor. Bonding can be performed at one contact at a time, or once in the area of the wafer or on the entire wafer. The metal article can include an expansion section to reduce bending or fracture that can be caused by thermal stresses induced during the bonding process.
半導體晶圓可在步驟1430前或後經受其他處理 步驟,如施用抗反射塗層。具體塗層將視所製造之電池之類型而定,且可包括(例如)介電抗反射塗層,如氮化物,或透明導電氧化物,如氧化銦錫。 The semiconductor wafer can be subjected to other processing before or after step 1430 Steps such as applying an anti-reflective coating. The particular coating will depend on the type of battery being fabricated and may include, for example, a dielectric anti-reflective coating such as a nitride, or a transparent conductive oxide such as indium tin oxide.
隨後在步驟1440中將製備之光伏打電池連接在 一起。可依照圖12及13之有關描述實施互連以實現前至背串聯連接。在其他實施例中,可藉由前對前及背對背連接 將電池予以平行佈線。 The prepared photovoltaic cell is then connected in step 1440. together. The interconnections can be implemented in accordance with the related description of Figures 12 and 13 to achieve a front-to-back series connection. In other embodiments, the front-to-front and back-to-back connections are possible. Route the batteries in parallel.
在步驟1450中,將模組總成層壓在一起。在一些 實施例中,總成可包括襯底片,如聚氟乙烯(PVF)膜,具有放置至該襯底片上之層壓材料(例如,EVA)。將光伏打電池放置於EVA片上,及將另一EVA片放置於電池之頂部上。 最後,玻璃片在頂EVA片上。將整個層狀堆疊置於層壓機中,在其中施加熱及真空以層壓該總成。為使模組完整化,將電池之電連接佈線至接線盒。 In step 1450, the module assemblies are laminated together. In some In an embodiment, the assembly can include a substrate sheet, such as a polyvinyl fluoride (PVF) film, having a laminate (e.g., EVA) placed onto the substrate sheet. A photovoltaic cell was placed on the EVA sheet and another EVA sheet was placed on top of the cell. Finally, the glass piece is on the top EVA sheet. The entire layered stack was placed in a laminator where heat and vacuum were applied to laminate the assembly. To complete the module, route the battery's electrical connections to the junction box.
可見本文所描述之自站立電鑄金屬物件適用於 各種電池類型且可在太陽能電池之製造順序內之不同點插入。此外,可將電鑄電導管用於太陽能電池之前表面或後表面或兩者上。此外,雖然已主要針對光伏打應用描述本文之實施例,但該等方法及裝置亦可應用於其他半導體應用,如再佈線層(RDL)或撓性電路。此外,流程圖步驟可依不同順序實施,且可包括未顯示之其他步驟。雖然已針對全尺寸電池予以描述,但其等亦可適用於半尺寸或四分之一尺寸電池。例如,金屬物件設計可具有適應僅具有一或兩個倒角轉角而非如單晶形全準方形中四個轉角均經倒角化之電池之佈局。 It can be seen that the self-standing electroformed metal object described in this paper is suitable for Various battery types are available and can be inserted at different points within the manufacturing sequence of the solar cell. Additionally, electroformed electrical conduits can be used on the front or back surface of the solar cell or both. Moreover, while the embodiments herein have been described primarily for photovoltaic applications, such methods and apparatus are also applicable to other semiconductor applications, such as rewiring layers (RDL) or flexible circuits. Furthermore, the flowchart steps can be implemented in a different order and can include other steps not shown. Although described for full size batteries, they can also be applied to half or quarter size batteries. For example, a metal object design may have a layout that accommodates a battery that has only one or two chamfered corners instead of being chamfered in four corners of a single-crystal full-quasi-square.
雖然已針對本發明之具體實施例詳細描述說明 書,但將瞭解熟習本領域者在理解上述內容後可輕易構思此等實施例之替代方案、變化例及等效內容。本申請案之此等及其他修改方案及變化例可由本技藝一般熟習者實施而不脫離本發明之範圍,該範圍更特定描述於隨附申請專 利範圍中。此外,本技藝一般熟習者將瞭解以上描述僅採取實例之方式,且並非意欲限制本發明。 Although described in detail with respect to specific embodiments of the invention The book, but it will be appreciated that those skilled in the art can readily devise alternatives, variations and equivalents of the embodiments. These and other modifications and variations of the present application can be implemented by those skilled in the art without departing from the scope of the invention, which is more specifically described in the accompanying application. In the range of interest. In addition, those skilled in the art will understand that the above description is by way of example only and is not intended to limit the invention.
400‧‧‧金屬物件 400‧‧‧Metal objects
402‧‧‧半導體基板 402‧‧‧Semiconductor substrate
410、420‧‧‧方格線 410, 420‧‧‧ grid lines
412、422、432、442‧‧‧寬度 412, 422, 432, 442‧‧ ‧ width
430、440‧‧‧互連元件 430, 440‧‧‧ interconnection components
450、455‧‧‧邊緣構件 450, 455‧‧‧ edge members
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| US13/798,123 | 2013-03-13 | ||
| US13/798,123 US8916038B2 (en) | 2013-03-13 | 2013-03-13 | Free-standing metallic article for semiconductors |
| US14/079,540 | 2013-11-13 | ||
| US14/079,540 US8936709B2 (en) | 2013-03-13 | 2013-11-13 | Adaptable free-standing metallic article for semiconductors |
| US14/079,544 US20150129024A1 (en) | 2013-11-13 | 2013-11-13 | Free-Standing Metallic Article With Expansion Segment |
| US14/079,544 | 2013-11-13 |
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| US20040115536A1 (en) * | 2001-01-29 | 2004-06-17 | Blankenborg Stephanus Gerardus Johannes | Method for producing electrical conductors, a solar collector, an electrochemical cell and use of conductors produced in this way |
| US20070125415A1 (en) * | 2005-12-05 | 2007-06-07 | Massachusetts Institute Of Technology | Light capture with patterned solar cell bus wires |
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| US20070125415A1 (en) * | 2005-12-05 | 2007-06-07 | Massachusetts Institute Of Technology | Light capture with patterned solar cell bus wires |
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