TWI611147B - Exhaust gas combustion purification device - Google Patents

Abstract

The present invention provides a combustion-type purification device comprising a combustion chamber for burning harmful components contained in exhaust gas discharged from a semiconductor manufacturing process, and a cooling chamber having a spray nozzle on a downstream side of the combustion chamber, wherein The use of expensive special materials with excellent heat resistance and corrosion resistance can effectively prevent the flanges at the joints of the combustion chamber and the cooling chamber and the side walls of the cooling chamber near the boundary with the combustion chamber from becoming hot.

In the combustion-type purification device as described above, the flange connecting the combustion chamber and the cooling chamber is a water-cooled flange. Alternatively, a cooling water flow path is provided on the outer periphery of the cooling chamber.

Description

Combustion purification device of exhaust gas

The present invention relates to a combustion-type purification device for burning and removing harmful components contained in exhaust gas discharged from a semiconductor manufacturing process. More specifically, it relates to a combustion-type purification device that causes harmful components discharged from a semiconductor manufacturing process to contact and burn at high temperatures in the presence of flames and oxygen, thereby becoming harmless substances or substances that can be easily harmless.

With the development of the semiconductor industry in recent years, very many types of gases have tended to be used in semiconductor manufacturing processes. However, many of these gases are harmful to the human body and the environment, and must be purified before being discharged outside the factory. The combustion-type purification method by decomposing and treating these gases (harmful components) is a convenient method applicable regardless of the composition or physical properties of the exhaust gas, especially in the case of high concentration and large flow rate, and dry purification Compared with the method or wet purification method, it is more efficient.

In the combustion-type purification method, the following processes are performed: the exhaust gas containing harmful components is mixed with a fuel gas such as propane, LPG, LNG, air or oxygen, and if necessary, an inert gas, and combusted in a combustion chamber to burn the harmful components Converts to harmless oxides or can be easily Harmful substances. The conventional combustion-type purification device conventionally used is composed of a combustion chamber for burning harmful components, and a gas chamber for introducing oxygen-containing gases such as exhaust gas, fuel gas, and air containing harmful components to be processed into the combustion chamber. Individual pipes and nozzles; pipes and the like for exhausting the burned gas from the combustion chamber.

In addition, there is a combustion-type purification device that, when the high-temperature gas is ejected with cooling water, and the powdered material is contained in the gas after the combustion treatment, the cooling water is used to attach to the The purpose of flushing the powder on the side wall is to provide a cooling chamber having a spray nozzle on the downstream side of the combustion chamber. As such a combustion-type purification device, a device having a structure such as described in Patent Documents 1 to 3 is known.

[Prior technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Application Laid-Open No. 10-54534

[Patent Document 2] Japanese Patent Laid-Open No. 2006-194544

[Patent Document 3] Japanese Patent Laid-Open No. 2007-232308

In the above-mentioned combustion-type purification device, the combustion chamber becomes high temperature due to the combustion of the exhaust gas caused by the flame. As described in Patent Documents 1 and 2, the side walls of the combustion chamber are made of heat-resistant materials such as metal and ceramic. . In addition, as described in Patent Document 3, it is preferable to use an acidic substance such as hydrogen fluoride or an alkali generated in a side wall of a cooling chamber having a spray nozzle by reacting a component in a gas with water of cooling water. Material with excellent corrosion resistance. however In a case where a cooling chamber having a spray nozzle is provided immediately adjacent to the downstream side of the combustion chamber, in particular, the side wall portion of the cooling chamber adjacent to the combustion chamber becomes high temperature, so that people also This part is required to have corrosion resistance and heat resistance.

In addition, as disclosed in Patent Document 1 (Figs. 2 and 3), when a combustion chamber and a cooling chamber formed by cylindrical side walls are connected through flanges provided at such ends, it is usually Gaskets are inserted between the flanges for the purpose of preventing gas leakage, but the flanges of the joint portion also become high temperature due to heat conduction from the combustion section. Therefore, in addition to the gaskets, excellent sealing properties are required. Heat resistance is also required. Therefore, in the combustion-type purification device configured as described above, by setting the side wall of the combustion chamber to a certain length, cooling of the flange of the joint portion of the combustion chamber and the cooling chamber and the vicinity of the boundary with the combustion chamber are prevented. The side wall of the chamber becomes high temperature, or it is necessary to use an expensive special material having excellent heat resistance and corrosion resistance for the gasket and the side wall of the cooling chamber.

Therefore, the problem to be solved by the present invention is to provide a combustion-type purification device which is the aforementioned combustion-type purification device and can effectively prevent the flange of the joint portion of the combustion chamber and the cooling chamber and the vicinity of the boundary with the combustion chamber The side wall of the cooling chamber becomes high temperature, and it is not necessary to use expensive special materials with excellent heat resistance and corrosion resistance.

The present inventors have conducted intensive research in order to solve these problems, and as a result, have found that cooling the flange by cooling water flowing through the flange connecting the combustion chamber and the side wall of the cooling chamber can solve the aforementioned problem, Thus, the exhaust gas combustion type of the first embodiment of the present invention has been achieved. Purification device. It has also been found that by providing a cooling water flow path on the outer periphery of the cooling chamber and allowing the cooling water to flow through the flow path, the aforementioned problems can be solved, and an exhaust gas combustion method according to the second embodiment of the present invention has been achieved. Purification device.

That is, the present invention is a combustion-type purification device for exhaust gas, comprising: a combustion chamber for burning harmful components contained in the exhaust gas discharged from a semiconductor manufacturing process; a cooling chamber having a spray nozzle downstream of the combustion chamber, It is characterized in that the side wall of the combustion chamber and the side wall of the cooling chamber are provided with flanges at respective ends, and among these flanges, any one or both of the flanges connecting the combustion chamber and the cooling chamber are water-cooled. Flange.

In addition, the present invention is a combustion-type purification device for exhaust gas, comprising: a combustion chamber for burning harmful components contained in the exhaust gas discharged from a semiconductor manufacturing process; a cooling chamber having a spray nozzle downstream of the combustion chamber; It is characterized in that the side wall of the combustion chamber and the side wall of the cooling chamber are provided with flanges at respective ends, and a cooling water flow path is provided on the outer periphery of the cooling chamber.

The exhaust gas combustion purification device according to the first embodiment of the present invention has a structure in which a water-cooled flange is provided between a combustion chamber and a cooling chamber, and cooling water flows through the water-cooled flange. The exhaust gas according to the second embodiment of the present invention The combustion-type purification device has a structure in which a cooling water flow path is provided on the outer periphery of the cooling chamber, and the cooling water flows through the flow path. Therefore, both types of combustion-type purification devices can efficiently cool the insertion of the combustion chamber and the cooling chamber. Gasket in the flange of the joint. In addition, two types of combustion purification devices Both can suppress heat conduction from the sidewall of the combustion chamber to the sidewall of the cooling chamber. As a result, according to the present invention, it is not necessary to set the side wall of the combustion chamber for a long time, and it is not necessary to use an expensive special material as the material of the gasket and the material of the side wall of the cooling chamber.

1‧‧‧combustion chamber

2‧‧‧ cooling room

3‧‧‧ spray nozzle

4‧‧‧ side wall of the combustion chamber (inside)

4’‧‧‧ side wall (outside) of the combustion chamber

5‧‧‧ Side wall of cooling chamber (inside)

5’‧‧‧ side wall of cooling chamber (outside)

6‧‧‧ flange

6’‧‧‧Water-cooled flange

7‧‧‧ Nozzle for introducing flame into combustion chamber

8‧‧‧ Nozzle for introducing exhaust gas into the combustion chamber

9‧‧‧ Oxygen-containing gas flow path

10‧‧‧ oxygen gas inlet

11‧‧‧ Flow path of cooling water in water-cooled flange

Flow path of cooling water in the periphery of 11’‧‧‧ cooling chamber

12‧‧‧ Gasket

13‧‧‧ cooling water supply port

14‧‧‧ Drain of cooling water

15‧‧‧ lid

16‧‧‧ peripheral area of the side wall of the cooling chamber

17‧‧‧ cooling water piping

18‧‧‧ flowmeter

18’‧‧‧Flowmeter

19‧‧‧Pump

19’‧‧‧ pump

20‧‧‧ Piping between combustion purification device of exhaust gas and scrubber equipment

21‧‧‧Sink

22‧‧‧ Drain pipe

23‧‧‧ multi-well plate

24‧‧‧ spray nozzle

25‧‧‧Filling material

26‧‧‧ Defogger

27‧‧‧ Discharge port for discharging treated gas to outside

FIG. 1 is a structural diagram of a longitudinal section of an example of an exhaust gas combustion-type purification device according to a first embodiment of the present invention; FIG. 2 is a structural diagram showing a water-cooled flange in part a in FIG. 1 in detail; FIG. 3 FIG. 4 is a structural diagram of a horizontal plane of an example of a water-cooled flange in the present invention; FIG. 4 is a structural diagram of a longitudinal section of an example of an exhaust gas combustion purification device according to a second embodiment of the present invention; 4 is a cross-sectional view taken along c-c 'in FIG. 4; FIG. 6 is a cross-sectional view taken along b-b' in FIGS. 1 and 4; and FIG. A structural view of a longitudinal section of an example of a purification device obtained by a device of a filter.

The present invention is applicable to a combustion-type purification device including a combustion chamber for burning harmful components contained in exhaust gas discharged from a semiconductor manufacturing process, and a cooling chamber having a spray nozzle downstream of the combustion chamber.

Examples of harmful components that can be processed by the combustion-type purification device of the exhaust gas of the present invention include tritium, phosphine, silane, and disilanes. , Dichlorosilane, diborane, hydrogen selenide, germane and other hydride gases, boron trifluoride, boron trichloride, silicon tetrafluoride, silicon tetrachloride, titanium tetrachloride, aluminum chloride, Acid gases such as germanium fluoride and tungsten hexafluoride, basic gases such as ammonia, methylamine, dimethylamine, trimethylamine, and hydrazine; halogenated carbons such as perfluorocarbons and hydrofluorocarbons. As the fuel gas, propane gas, natural gas, or the like can be used. These gases can be used together with an inert gas such as nitrogen as needed.

Hereinafter, the exhaust gas combustion purification device of the present invention will be described in detail based on FIGS. 1 to 7, but the present invention is not limited thereto.

FIG. 1 is a configuration diagram showing a longitudinal section of an example of a combustion-type purification device for exhaust gas according to the first embodiment of the present invention. FIG. 2 is a configuration diagram illustrating a water-cooled flange in a part a in FIG. 1 in detail. FIG. 3 is a structural diagram showing a horizontal plane of an example of a water-cooled flange in the present invention. FIG. 4 is a configuration diagram showing a longitudinal section of an example of an exhaust gas combustion purification device according to a second embodiment of the present invention. Fig. 5 is a sectional view along c-c 'in Fig. 4. Fig. 6 is a sectional view along b-b 'in Figs. 1 and 4. FIG. 7 is a structural view showing a longitudinal section of an example of a purification device in which a water tank and a scrubber are combined in a combustion-type purification device for exhaust gas of the present invention.

The combustion-type purification device for exhaust gas according to the first embodiment of the present invention is a combustion-type purification device, as shown in FIG. 1, which includes a combustion chamber that burns harmful components contained in the exhaust gas discharged from a semiconductor manufacturing process. 1; a cooling chamber 2 having a spray nozzle 3 on the downstream side of the combustion chamber, wherein a side wall 4 of the combustion chamber and a side wall 5 of the cooling chamber are provided with flanges 6 at respective ends, among these flanges , The combustion chamber Either or both of the flanges 1 combined with the cooling chamber 2 are water-cooled flanges 6 '.

In addition, the combustion-type purification device for exhaust gas according to the second embodiment of the present invention is a combustion-type purification device including, as shown in FIG. 4, a method for burning harmful components contained in the exhaust gas discharged from a semiconductor manufacturing process. Combustion chamber 1; a cooling chamber 2 having a spray nozzle 3 on the downstream side of the combustion chamber, wherein a side wall 4 of the combustion chamber and a side wall 5 of the cooling chamber are provided with flanges 6 at respective ends, and the cooling chamber 2 A cooling water flow path 11 'is provided on the outer periphery.

Further, in addition to the nozzle 7 for introducing a flame into the combustion chamber, and the nozzle 8 for introducing the exhaust gas into the combustion chamber, etc. around the combustion chamber 1 of the combustion-type purification apparatus for exhaust gas of the present invention, it is also possible to appropriately provide For the mechanism for introducing oxygen gas into the combustion chamber, for example, an air-permeable material can be used as a constituent material of the side wall 4 of the combustion chamber. An oxygen-containing gas flow path 9 and an oxygen-containing gas can be appropriately provided on the outer periphery of the side wall 4 of the combustion chamber. The gas is introduced into the oxygen-containing gas introduction port 10 of the flow path. However, the present invention is not limited to such a structure.

Each of the devices shown in Figs. 1 and 4 is an example of the combustion-type purification device for exhaust gas of the present invention. In the combustion purification device of FIGS. 1 and 4, the combustion chamber 1 may be defined from the upper end to the lower end of the air-permeable side wall 4, and the cooling chamber 2 may be defined from the upper end to the lower end of the side wall 5, but the present invention does not Limited to such a structure. For example, an intermediate chamber having a side wall may be provided between the combustion chamber 1 and the cooling chamber 2, and the side wall of the intermediate chamber may be provided with flanges and a cooling chamber 2 at both ends, respectively, with the side wall 4 of the combustion chamber 1. The flange of the side wall 5 is combined with the flange. In such a case, the intermediate chamber may be set as the intermediate chamber included in the combustion chamber 1 or the cooling chamber 2, and the In the combustion-type purification apparatus for exhaust gas according to the first embodiment, either one of the flanges or both of the flanges may be a water-cooled flange.

In the exhaust gas combustion type purification device according to the first embodiment of the present invention, if the cooling water flow path of the water-cooled flange 6 'is provided with cooling water, the water-cooled flange 6' can be cooled from the inside or the outside. The structured flow path is not particularly limited, but generally, as shown in FIG. 2, a flow path 11 is provided to allow cooling water to flow inside the water-cooled flange 6 ′. In the present invention, the cooling water flow path 11 may be provided in any one of the combustion chamber-side flange 6 (1) and the cooling chamber-side flange 6 (2), or the combustion chamber-side flange 6 (1). ) And the cooling chamber-side flange 6 (2), but from the viewpoint of efficiently suppressing the temperature rise of the gasket 12 due to heat conduction from the combustion chamber, as shown in FIG. 2, it is preferable. It is a flange 6 (1) (shown as 6 '(1)) provided on the combustion chamber side.

The form of the flow path is not particularly limited, but as shown in FIG. 3, the cooling water supply port 13 and the cooling water discharge port 14 are generally set so that the cooling water is distributed throughout the entire flange. As for the cooling water flow path 11, as shown in FIG. 2, a method of providing a recessed portion on the surface of the flange and clogging the surface with the lid 15 and a method of providing a cooling water pipe in the recessed portion can be used. To make. The cooling water is not limited to water, and any liquid that can replace water can be used in the present invention. The cooling water flowing after the water-cooling flange 6 'may be sprayed from the spray nozzle 24 and reused, as shown in FIG. 7, or it may be sprayed from the spray nozzle 3 and reused. The flow rate of the cooling water (discharge amount from the spray nozzle) is usually 10 to 100 L / min, and can be controlled by the flow meter 18 and the pump 19.

In the combustion-type purification apparatus for exhaust gas according to the first embodiment of the present invention, it is preferable that the outer peripheral region 16 of the side wall of the cooling chamber is further configured to be filled with cooling water in the same manner as in the second embodiment. It is preferable to adopt a structure which uses this cooling water as the cooling water sprayed from the spray nozzle 3. By having such a structure, the effect of using a water-cooled flange can be added, and it becomes easier to maintain the side wall 5 of the cooling chamber at a low temperature. The flow rate of the cooling water (discharge amount from the spray nozzle) is usually 10 to 100 L / min, and can be controlled by the flow meter 18 'and the pump 19'.

In the combustion-type purification apparatus for exhaust gas according to the second embodiment of the present invention, as shown in FIG. 5, the cooling chamber 2 generally has a double-structured side surface (including a flange 6, an inner side wall 5, and an outer side wall 5 ′). ), A cooling water flow path 11 ′ is provided between the inner side wall 5 and the outer side wall 5 ′ of the cooling chamber. The cooling water flow path 11 ′ is not particularly limited as long as it has a structure capable of cooling the side wall 5 of the cooling chamber by allowing cooling water to flow through the flow path, for example, as shown in FIGS. 4 and 5. As shown, it is preferable to have a structure including a cooling water supply port 13 and a cooling water discharge port 14, and the cooling water supplied from the cooling water supply port 13 passes through the cooling water discharge port 14 from the spray nozzle 3. The ejection is also used to cool the high-temperature gas flowing through the cooling chamber 2 and wash the powder adhered to the side wall 5. The cooling water flow path 11 'is generally cylindrical.

In the combustion-type purification apparatus for exhaust gas according to the second embodiment of the present invention, the flow rate of cooling water (discharge amount from the spray nozzle) is usually 10 to 100 L / min. As shown in FIG. 7, a flow meter 18 'can be used. With pump 19 'to control. During operation of the combustion-type purification device, it is preferable that the cooling water is supplied to a flow rate of the upper part of the cooling water flow path 11 '(see FIG. 4). The cooling water is supplied from the spray nozzle 3 with a moderate water pressure. By bringing the cooling water to the upper part of the cooling water flow path 11 ', it is possible to efficiently prevent the flange of the joint portion of the combustion chamber and the cooling chamber and the side wall of the cooling chamber near the boundary with the combustion chamber from becoming high temperature.

Since the combustion-type purification device for exhaust gas of the present invention has the structure described above, the following gasket can be used as the gasket 12 inserted into a flange (water-cooled flange) that combines the combustion chamber and the cooling chamber. Gaskets are made of rubber sheets such as nitrile rubber, chloroprene rubber, silicone rubber, fluorine rubber, ethylene propylene rubber, and butyl rubber. Although these rubbers have low heat resistance, they can be pressed even at low fastening surface pressure. It is in close contact with the target surface and obtains high sealing performance. In the present invention, among these rubber sheets, from the viewpoint of excellent corrosion resistance, ethylene propylene rubber is preferably used, and EPDM is more preferably used (a diene monomer as a third component is added to ethylene). And propylene).

In addition, in the present invention, the following materials can be used as a constituent material of the side wall 5 of the cooling chamber (first embodiment), and can be further used as a material including a flange 6, an inner side wall 5, and an outer side wall 5 '. (Second Embodiment) A material constituting a side of a double structure of a cooling chamber. The material includes low heat resistance, but has excellent corrosion resistance and is inexpensive against acidic or alkaline substances generated by reacting components in a gas with water. And lightweight resin. As a material containing such a resin, a thermosetting resin or the like is generally used, and a fiber-reinforced resin (FRP) is preferably used. As the fiber-reinforced resin, for example, a matrix such as a thermosetting resin, and a reinforcing fiber such as glass fiber or carbon fiber can be used.

As an example of the present invention, the combustion equations of FIGS. 1 and 4 In the purification device, a cylindrical side wall 4 having air permeability and heat insulation is provided on the side of the combustion chamber 1. In the combustion chamber 1, the exhaust gas is brought into contact with a high-temperature flame, and the exhaust gas is supplied from the side wall 4. Oxygen-containing gas, such as air, comes into contact with each other to burn (thermally decompose) harmful components contained in the exhaust gas. At this time, although a powdery substance is generated depending on the type of the harmful component, the accumulation of powdery substance on the surface of the side wall 4 can be prevented by using the flow of an oxygen-containing gas (air, etc.) as indicated by the arrow in FIG.

The side wall 4 of the combustion chamber is made of ceramics such as alumina, silicon dioxide, and titanium oxide, or metals such as carbon steel, chromium steel, molybdenum steel, manganese steel, nickel steel, and stainless steel. A gap such as a pinhole is provided in the side wall 4, or a multilayer body obtained by laminating a fibrous ceramic or metal, a multilayer body obtained by laminating a plurality of granular ceramics or metal, and a porous body having fine pores. Ceramics, porous metals, etc. provide air permeability. In the aforementioned combustion-type purification device, as shown in FIG. 6, an oxygen-containing gas flow path 9 is provided on the entire outer periphery of the side wall 4. When the harmful components are processed, although the temperature of the combustion chamber 1 is a high temperature of 500 to 1200 ° C., the structure can prevent the heat of the combustion chamber 1 from diffusing to the outside.

In the combustion-type purification apparatus for exhaust gas according to the present invention, the fuel and the oxygen-containing gas are mixed and burned in the vicinity of the combustion chamber 1. As shown in FIG. 1, the combustion-treated gas is cooled by the cooling water sprayed from the spray nozzle 3, and then released into the atmosphere or sent to the next processing program. In the present invention, when the exhaust gas after the combustion treatment is sent to the next treatment program, a device for implementing such a treatment program may be provided together.

Regarding the equipment of the water tank 21 and the scrubber of FIG. 7, with regard to the exhaust gas treated by the combustion-type purification device of the exhaust gas of the present invention, the powder contained in the treated gas is removed, and newly generated harmful substances are removed. The components (components that can be easily detoxified) are removed. Although not necessary equipment in the present invention, it is preferable to have these equipment. That is, in the present invention, it is preferable that a combustion-type purification device for exhaust gas is provided in which a powder material removing section and / or an acid gas removing section are provided on the downstream side (discharge side) of the cooling chamber.

For example, when hydrides such as thorium, phosphine, silane, and diborane are treated by the combustion-type purification device of the exhaust gas of the present invention, arsenic, phosphorus, silicon, boron, and the like are generated by combustion. Solid particulate oxide. With regard to the purification devices of FIGS. 1 and 4, such powders can be removed mainly by spraying water from the spray nozzle 3 and trapping in the perforated plate 23. In addition, the piping 20 between the combustion-type purification device for exhaust gas of the present invention and the scrubber equipment is preferably inclined to the scrubber equipment side so that the powder can be easily washed into the water tank 21.

In addition, in the present invention, when a halide such as boron trifluoride, boron trichloride, silicon tetrafluoride, silicon tetrachloride, or C ₂ F _{6 is} treated, acidity such as hydrogen chloride or hydrogen fluoride may be newly generated. Gas (a component that can be easily harmless). Acidic gases such as hydrogen chloride and hydrogen fluoride can be mainly removed from the filler 25. In addition, moisture may be removed together by the demister 26. In FIG. 7, reference numeral 17 denotes a cooling water pipe, 22 denotes a drain pipe, and 27 denotes a discharge port for discharging the treated gas to the outside.

[Example]

Next, the present invention will be described more specifically through examples, but this The invention is not limited to them.

[Example 1]

(Manufacturing of the combustion-type purification device of the first embodiment)

A combustion-type purification device having a structure as shown in FIG. 1 was produced, which includes a cylindrical combustion chamber 1 (450 mm in height and 200 mm in diameter), a nozzle 7 for introducing a flame into the combustion chamber 1, and introducing exhaust gas into the combustion chamber. 1 nozzle 8, combustion chamber side wall 4 (ceramic wall with microporous air permeability), oxygen-containing gas flow path 9 (width 20 mm), oxygen-containing gas introduction port 10, and A side wall 5 made of a fiber-reinforced resin and a cooling chamber 2 (450 mm in height and 200 mm in diameter) of the spray nozzle 3.

In addition, flanges are provided at the ends of the side walls of the combustion chamber 1 and the cooling chamber 2, respectively. Regarding the combustion chamber and the cooling chamber, a water-cooled flange 6 '(1) having a structure as shown in Fig. 3 and a non-water-cooled flange 6 (2) are combined as shown in Fig. 2. A gasket 12 made of EPDM is inserted between these flanges for the purpose of preventing gas leakage, and a thermocouple for temperature measurement is inserted between these flanges. Furthermore, as a constituent material of the side wall 5 of the cooling chamber, a fiber-reinforced resin made of a thermosetting resin and glass fibers was used, and a thermocouple for temperature measurement was mounted on the upper portion (a position 10 mm from the uppermost portion).

A water tank 21 having a length of 300 mm, a width of 300 mm, and a height of 300 mm is provided at the lower right portion of the combustion-type purification device manufactured as described above. Further, a porous plate 23, a filling material 25 mainly composed of polypropylene resin, and Scrubber for demister 26. In addition, the lower part of the combustion-type purification device is connected to the water tank by the inclined pipe 20, and a spray nozzle 24 is provided on the upper part of the filling material 25, and the water is used in accordance with The cooling water in the tank 21 serves as the cooling water supplied to the outer periphery of the cooling chamber, and a flow meter, a pump, and the like are connected to complete the purification device as shown in FIG. 7.

(Combustion treatment test)

Water was poured into the water tank to a depth of 150 mm, and then a pump or the like was operated to spray water from the spray nozzle 3. Further, cooling water is caused to flow through the water-cooled flange 6 'via the flow meter 18, and water is sprayed from the spray nozzle 24. Next, propane (flow rate of 15 L / min) and air (flow rate of 440 L / min) were mixed and combusted, introduced into the combustion chamber 1 from the nozzle, and air was introduced from the four oxygen-containing gas introduction ports 10 at 37.5 L / min, A total flow rate of 150 L / min is introduced into the combustion chamber 1 through the side wall 4. Next, nitrogen gas (flow rate: 490 L / min) containing silane (flow rate: 10 L / min) as exhaust gas was introduced into the combustion chamber (1) from four nozzles (8) that introduced the exhaust gas into the combustion chamber at 125 L / min and 500 L / min in total. Combustion treatment was performed.

The combustion treatment of the silane was performed for 20 hours, but during this period, the temperature measured by a thermocouple inserted between the water-cooled flange 6 '(1) and the flange 6 (2) was 40 to 60 ° C. The temperature measured by a thermocouple attached to the side wall 5 of the cooling chamber is 30 to 40 ° C. After the combustion treatment test was completed, the gasket inserted between the flanges was removed and investigated, but abnormalities such as deterioration and deterioration could not be confirmed. In addition, the surface of the side wall 5 of the cooling chamber was also investigated, but abnormalities such as deterioration and deterioration could not be confirmed in the same manner.

[Example 2]

In the production of the combustion-type purification device of Example 1, the water-cooled flange 6 '(1) was set to a flange 6 (1) which was not water-cooled, and a flange 6 (2) which was not water-cooled. A water-cooled flange 6 '(2) (see Fig. 2) was used, and a combustion-type purification device was produced in the same manner as in Example 1. Using this combustion-type purification device, a combustion treatment test was performed in the same manner as in Example 1. As a result, the temperature measured by the thermocouple inserted between the flanges was 50 to 70 ° C, and the temperature measured by the thermocouple attached to the side wall 5 of the cooling chamber was 30 to 40 ° C. In addition, abnormalities such as deterioration and deterioration cannot be confirmed on the surfaces of the gasket and the side wall 5 of the cooling chamber.

[Example 3]

(Manufacturing of a combustion-type purification device according to the second embodiment)

A combustion-type purification device as shown in FIG. 4 was produced, in which a side wall of the combustion chamber 1 and a side wall of the cooling chamber 2 were provided with flanges at respective ends, and a cooling water flow path 11 ′ was provided on the outer periphery of the cooling chamber. .

The cylindrical combustion chamber 1 (height 450 mm, diameter 200 mm) is provided with a nozzle 7 for introducing a flame into the combustion chamber 1, a nozzle 8 for introducing exhaust gas into the combustion chamber 1, and a side wall 4 of the combustion chamber (having microporosity) Ceramic wall), oxygen-containing gas flow path 9 (width 20 mm), oxygen-containing gas introduction port 10, and the like. The cylindrical cooling chamber 2 (450 mm in height and 200 mm in diameter) is provided with a spray nozzle 3, a side wall 5 of the cooling chamber (fiber-reinforced resin made of a thermosetting resin and glass fiber), and a cooling water flow path 11 '. (Width 20 mm) and the like are set so that the cooling water in the flow path 11 ′ filled with the cooling water is sprayed from the spray nozzle 3.

A gasket formed of EPDM is inserted between the flanges of the combustion chamber 1 and the cooling chamber 2 to prevent gas leakage, and a thermocouple for temperature measurement is inserted between the flanges. Furthermore, an upper part of the side wall 5 of the cooling chamber (a position at a distance of 10 mm from the uppermost part) was installed. Thermocouple for temperature measurement.

A water tank 21 having a length of 300 mm, a width of 300 mm, and a height of 300 mm is provided at the lower right portion of the combustion-type purification device manufactured as described above. Further, a porous plate 23, a filling material 25 mainly composed of polypropylene resin, and Scrubber for demister 26. In addition, the lower part of the combustion-type purification device was connected to a water tank with an inclined pipe 20, and a spray nozzle 24 was provided on the upper part of the filling material 25 to connect a flow meter, a pump, and the like to circulate the cooling water of the water tank 21, thereby completing the figure. The purification device shown in FIG. 7.

(Combustion treatment test)

Water was poured into the water tank to a depth of 150 mm, and then a pump 19 'was operated to flow cooling water through the cooling water flow path 11', and water was sprayed from the spray nozzle 3. Water is also sprayed from the spray nozzle 24. Next, propane (flow rate of 15 L / min) and air (flow rate of 440 L / min) were mixed and combusted, introduced into the combustion chamber 1 from the nozzle, and air was introduced from the four oxygen-containing gas introduction ports 10 at 37.5 L / min, A total flow rate of 150 L / min is introduced into the combustion chamber 1 through the side wall. Next, nitrogen gas (flow rate: 490 L / min) containing silane (flow rate: 10 L / min) as exhaust gas was introduced into the combustion chamber (1) from four nozzles (8) that introduced the exhaust gas into the combustion chamber at 125 L / min and 500 L / min in total. Thus, a combustion treatment was performed.

The combustion process of the silane was performed for 20 hours, but the temperature measured by a thermocouple inserted between the flanges was 60 to 80 ° C. The temperature measured by a thermocouple attached to the side wall 5 of the cooling chamber is 30 to 40 ° C. After the combustion treatment test was completed, the gasket inserted between the flanges was removed and investigated, but abnormalities such as deterioration and deterioration could not be confirmed. . In addition, the surface of the side wall 5 of the cooling chamber was also investigated, but abnormalities such as deterioration and deterioration could not be confirmed in the same manner.

[Comparative Example 1]

In the production of the combustion-type purification device of the embodiment, the cooling water derived from the pump 19 is connected to the spray nozzle 24 without using a flange (a water-cooled flange is not used), and the cooling water derived from the pump 19 'is not connected to A cooling water flow path 11 ′ on the outer periphery of the cooling chamber 2 is directly connected to the spray nozzle 3, and a combustion-type purification device is manufactured in the same manner as in the embodiment. Using this combustion-type purification device, a combustion treatment test was performed in the same manner as in the example. As a result, it was predicted that the temperature measured by the thermocouple inserted between the flanges immediately exceeded 100 ° C immediately after the start of the test, and that the temperature measured by the thermocouple mounted on the side wall 5 of the cooling chamber also exceeded 100 ° C. The experiment was thus suspended.

As described above, as shown in the examples, the exhaust gas combustion purification device of the present invention has a structure in which a water-cooled flange is provided between the combustion chamber and the cooling chamber, and cooling water flows through the water-cooled flange. A cooling water flow path is provided on the outer periphery of the chamber, and the cooling water flows through the flow path. Therefore, it is possible to cool the gasket inserted into the flange that joins the combustion chamber and the side wall of the cooling chamber, and to suppress the passage from the combustion chamber The heat transfer from the side wall to the side wall of the cooling chamber.

1‧‧‧combustion chamber

2‧‧‧ cooling room

3‧‧‧ spray nozzle

4‧‧‧ side wall of the combustion chamber (inside)

5‧‧‧ Side wall of cooling chamber (inside)

6‧‧‧ flange

6’‧‧‧Water-cooled flange

7‧‧‧ Nozzle for introducing flame into combustion chamber

8‧‧‧ Nozzle for introducing exhaust gas into the combustion chamber

9‧‧‧ Oxygen-containing gas flow path

10‧‧‧ oxygen gas inlet

16‧‧‧ peripheral area of the side wall of the cooling chamber

Claims (12)

An combustion-type purification device for exhaust gas, comprising: a combustion chamber for burning harmful components contained in the exhaust gas discharged from a semiconductor manufacturing process; and a cooling chamber having a spray nozzle on a downstream side of the combustion chamber, characterized in that: The side wall of the combustion chamber and the side wall of the cooling chamber are provided with flanges at respective ends, and among these flanges, any one or both of the flanges connecting the combustion chamber and the cooling chamber are water-cooled flanges. The combustion-type purification device for exhaust gas according to claim 1, wherein the flange of the side wall of the combustion chamber is a water-cooled flange. The combustion-type purification device for exhaust gas according to claim 1, wherein the side wall of the cooling chamber is made of a resin-containing material. The combustion-type purification device for exhaust gas according to claim 3, wherein the material containing the resin is a fiber-reinforced resin. An combustion-type purification device for exhaust gas, comprising: a combustion chamber for burning harmful components contained in the exhaust gas discharged from a semiconductor manufacturing process; and a cooling chamber having a spray nozzle on a downstream side of the combustion chamber, characterized in that: The side wall of the combustion chamber and the side wall of the cooling chamber are provided with flanges at respective ends, and a cooling water flow path is provided on the outer periphery of the cooling chamber. The combustion-type purification device for exhaust gas according to claim 5, wherein the cooling chamber is constituted by a side surface of a double structure, and a cooling water flow path is provided between an inner periphery and an outer periphery thereof. The combustion-type purification device for exhaust gas according to claim 6, wherein the side of the double structure of the cooling chamber is made of a resin-containing material. The combustion-type purification device for exhaust gas according to claim 6, wherein the side of the double structure of the cooling chamber is made of fiber-reinforced resin. The combustion-type purification device for exhaust gas according to claim 1 or 5, wherein a gasket made of rubber is used as a gasket inserted between a flange connecting the combustion chamber and the cooling chamber. The combustion-type purification device for exhaust gas according to claim 1 or 5, wherein a gasket made of ethylene propylene rubber is used as a gasket inserted between the flanges connecting the combustion chamber and the cooling chamber. The combustion-type purification device for exhaust gas according to claim 1 or 5, wherein an oxygen-containing gas flow path for supplying an oxygen-containing gas to the combustion chamber is provided on an outer periphery of a side wall of the combustion chamber. The combustion-type purification device for exhaust gas according to claim 1 or 5, wherein a powder material removing section and / or an acid gas removing section are provided on the downstream side of the cooling chamber.