TWI690611B - Vacuum deposition chamber - Google Patents

Abstract

A vacuum deposition chamber is described. The vacuum deposition chamber includes a material deposition apparatus having distribution pipes; and a substrate support for supporting a substrate during deposition, wherein a distance between at least one of the distribution pipes of the material deposition apparatus and the substrate support is less than 250mm.

Description

Vacuum deposition chamber

Several embodiments relate to a material deposition configuration, a distribution tube for a material deposition configuration, a deposition apparatus having a material deposition configuration, and a method for depositing a material on a substrate. Several embodiments particularly relate to a material deposition configuration for a vacuum deposition chamber, a vacuum deposition apparatus having a material deposition configuration, and a material for depositing a material on a substrate in a vacuum deposition chamber Method.

Organic evaporators are devices used to produce organic light-emitting diodes (OLEDs). OLEDs are a special form of light-emitting diodes. In OLEDs, the light-emitting layer includes a thin film of a specific organic compound. OLEDs are used to manufacture TV screens, computer screens, mobile phones, other handheld devices used to display information, etc. OLEDs can also be used for general space lighting. The range of possible colors, brightness, and viewing angles of an OLED display is larger than that of a conventional liquid crystal display (LCD), because OLED pixels emit light directly without using a backlight. Therefore, the energy loss of OLED displays is much less than that of conventional liquid crystal displays. Furthermore, OLEDs can be manufactured on flexible substrates to produce more applications. A typical example of an OLED display may include between two electrodes Several organic material layers, all of which are deposited on a substrate to form a matrix display panel with individually enabled pixels. The OLED is generally placed between two glass panels, and the edge of the glass panel is sealed to encapsulate the OLED.

There are many challenges in manufacturing such display devices. OLED displays or OLED lighting applications include stacks formed of several organic materials, such as organic materials that evaporate in a vacuum. Organic materials are deposited in a continuous manner via shadow masks. In order to manufacture OLED stacks with high efficiency, it is necessary to co-deposition or co-evaporate two or more materials into a mixed/doped layer system. Two or more materials are exemplified as the main body ( host) and dopant. Furthermore, many processing conditions for evaporating very sensitive organic materials must be considered.

To deposit material on the substrate, the material system is heated until the material evaporates. Furthermore, for example, in order to maintain the evaporated material at a controlled temperature or to avoid condensation of the evaporated material in the tube, the tube guiding the material to the substrate may be heated. When the material evaporates, the material is guided to the substrate, for example, by a distribution tube with an outlet or nozzle for the evaporated material. Over the past few years, the accuracy of the deposition process has increased, for example to provide smaller and smaller pixel sizes. However, the shadowing effects of masks, the spread of evaporated materials, and the like make it difficult to further increase the accuracy and predictability of the evaporation process.

In view of the foregoing, an object of the embodiments described herein is to provide a material deposition configuration, a vacuum deposition chamber, a distribution tube, and a method for depositing material on a substrate to overcome at least some problems in this field .

In view of the above, a vacuum deposition chamber is provided. Other aspects, advantages, and features of several embodiments are made clearer by the appended patent application scope, description, and accompanying drawings.

According to an embodiment, a vacuum deposition chamber is proposed. The vacuum deposition chamber includes a material deposition configuration with a plurality of distribution tubes; and a substrate support for supporting a substrate during deposition, wherein at least one of the distribution tubes of the material deposition configuration is between the substrate support The distance is less than 250mm.

Several embodiments are directed to an apparatus for performing the disclosed method, and the apparatus includes apparatus components for performing the features of each described method. These method features can be performed by hardware components, by a computer suitable for software programming, by any combination of the two, or by any other means. Furthermore, several embodiments are also directed to methods of operating the described devices. It includes method features for performing each function of the device. In order to have a better understanding of the above and other aspects of the present invention, the preferred embodiments are described below in conjunction with the attached drawings, which are described in detail as follows:

100: Material deposition configuration

100a: the first material source

100b: Second material source

100c: third material source

100d: material source

101, 200: distance

102: Support

102a: First material evaporator

102b: Second material evaporator

102c: third material evaporator

104: Evaporating crucible

106: Distribution tube

106a: the first distribution tube

106b: Second distribution tube

106c: Third distribution tube

107, 713: opening

108: Extension wall

109: Wall

110: vacuum chamber

111: Maintain the vacuum chamber

112: Alignment unit

116: Distribution tube housing

121: substrate

126: base plate support

131: mask frame

132: Mask

136: First direction

201, 202, 203: longitudinal axis

205, 207: Valve

206: First nozzle material

208: Second nozzle material

210: first distribution direction

211: Second distribution direction

212: Third distribution direction

300: deposition equipment

320: linear guide

322, 324, 326: Wall

352, 354, 355: arrows

380: Heating element

400: flow chart

410, 420, 430, 440: blocks

700: nozzle

702: evaporator control housing

703: Flange unit

710: Internal hollow space

712: Nozzle

714: opening length

715: Heating unit

716: Hole size

717: Heating shield

722: Tie

725: external heating unit

726: Central heating element

727: Mask

732: Steam duct

800, 801: curve

802, 803: evaporated material

804: first wiring

805: Second wiring

806: Third wiring

879: Heat insulation

A: area

B, C: partial map

In order to understand the above-mentioned features of several embodiments in detail, the more specific description briefly excerpted above can refer to the embodiments. The attached drawings have several embodiments and are described below: FIGS. 1a to 1f show a schematic diagram of a material deposition configuration according to the embodiments described herein and a partial, more detailed schematic diagram of the material deposition configuration; FIGS. 2a to 2c illustrate a material deposition configuration according to the embodiments described herein Schematic diagram of the distribution tube; Figure 3a shows a schematic diagram of the material distribution of the distribution tube and the nozzle according to the embodiments described here; Figure 3b shows a schematic diagram of the material distribution of the distribution tube of the known system; Figure 3c A comparison diagram of the material distribution of the distribution tube according to the embodiment described here and the known system; FIG. 4a shows a schematic diagram of the material deposition configuration according to the embodiment described here; FIG. 4b shows the known deposition system Schematic diagrams; Figures 5a and 5b show side and top views of the material deposition configuration according to the embodiments described herein; Figures 6a and 6b side views of the material deposition configuration according to the embodiments described herein and according to this A more detailed schematic view of the distribution tube and nozzle of the material deposition configuration of the embodiments described above; Figures 7a to 7d show schematic views of the nozzle used in the distribution tube and material deposition configuration according to the embodiments described herein; Figures 8 to 8c show schematic diagrams of the material deposition configuration and distribution tubes according to the embodiments described here; Figures 9a and 9b show schematic diagrams of the distribution tubes according to the embodiments described here; Figure 10 shows the schematic diagrams according to here A schematic diagram of the vacuum deposition chamber of the embodiment; and FIG. 11 shows a flowchart of a method for depositing material on a substrate according to the embodiments described herein.

Detailed reference will be made with various embodiments, one or more examples of the embodiments are shown in the drawings. In the description of the drawings below, the same reference number means the same element. Generally speaking, only the differences between individual embodiments are described. Each example is provided by way of illustration and is not meant as a limitation. Furthermore, the features described or described as part of an embodiment can be used in or combined with other embodiments to obtain yet other embodiments. This means that this description includes such adjustments and changes.

As used herein, the name "fluid communication" can be understood as two fluid communication elements can exchange fluid through a connecting member to allow fluid flow between the two elements. In one example, such elements in fluid communication may include a hollow structure through which fluid can flow. According to some embodiments, at least one of these elements in fluid communication may be a tube-like element.

Furthermore, in the following description, a material source can be understood as providing a source to be deposited on a substrate. In particular, the material source may be equipped for providing materials to be deposited on a substrate in a vacuum chamber, such as a vacuum deposition chamber or equipment. According to some embodiments, the material source may provide the material to be deposited on the substrate by assembling to evaporate the material to be deposited. For example, the material source may include an evaporator or crucible that evaporates the material that will be deposited on the substrate, and in particular The evaporated material is released in a direction that is directed towards the substrate or into the distribution tube of the material source. In some embodiments, the evaporator may be in fluid communication with the distribution tube, for example to distribute the evaporated material.

According to some embodiments described herein, a distribution tube may be understood as a tube for guiding and distributing evaporated material. In particular, the distribution tube can guide the evaporated material from the evaporator to the outlet or opening in the distribution tube. A linearly distributed tube can be understood as a tube extending in the first, especially in the longitudinal direction. In some embodiments, the linear distribution tube includes a tube having a cylindrical shape, and wherein the cylinder may have a round bottom shape or any other suitable bottom shape.

The nozzle referred to herein may be understood as a device for guiding a fluid, especially for controlling the direction or characteristics of a fluid (for example, the flow rate, velocity, shape, and/or pressure of the fluid emerging from the nozzle). According to some embodiments described herein, the nozzle may be a device for guiding or directing steam, such as steam of the evaporated material to be deposited on the substrate. The nozzle may have an inlet to receive a fluid, an opening (such as a bore or channel) to guide the fluid through the nozzle, and an outlet to release the fluid. In general, the openings or channels of the nozzle may include defined geometric shapes for the fluid flowing through the nozzle to achieve the desired direction or characteristic. According to some implementations, the nozzle may be part of the distribution tube or may be connected to a distribution tube providing evaporated material and may receive evaporated material from the distribution tube.

According to the embodiments described herein, a material deposition configuration for depositing evaporated material on the substrate in the vacuum chamber is provided. In some embodiments, the material deposition configuration can be assembled for depositing two or more evaporated materials in a vacuum chamber On the substrate. The material deposition configuration includes a first material source including a first material evaporator that is equipped to evaporate the first material to be deposited on the substrate. According to some embodiments, the first material may be the first material from the two or more materials to be deposited on the substrate. The first material source further includes a first distribution tube, and the first distribution tube includes a first distribution tube housing, wherein the first distribution tube is in fluid communication with the first material evaporator, wherein the first material source further includes the first distribution tube Several first nozzles in the tube housing. Generally speaking, one or more of the first nozzles includes an opening length and an opening size, wherein the length to size ratio of the one or more nozzles of the first nozzles is equal to or greater than 2:1 . The material deposition configuration includes a second material source including a second material evaporator that is equipped to evaporate the second material to be deposited on the substrate. According to some embodiments, the second material may be the second material from the two or more materials to be deposited on the substrate. The second material source further includes a second distribution tube. The second distribution tube includes a second distribution tube housing, wherein the second distribution tube is in fluid communication with the second material evaporator. The second material source further includes a plurality of second nozzles located in the second distribution tube housing. According to the embodiments described herein, the distance between one of the first nozzles and the second nozzle of the second nozzles is equal to or less than 30 mm. According to some embodiments, the first material and the second material may be the same material, or may be different materials selectively.

Figure 1a shows a side view of a material deposition arrangement 100 according to embodiments described herein. An embodiment of the material deposition configuration shown in Figure 1a may include a first material source with a first material evaporator 102a, a second material source with a second material evaporator 102b, and a third material evaporator 102c The third material source. In an embodiment, each of the first material evaporator 102a, the second material evaporator 102b, and the third material evaporator 102c can provide different materials. In another embodiment, each material evaporator may provide the same material, or a part of the material evaporator may provide the same material, and another part of the material evaporator may provide a different material. According to some embodiments, the first material evaporator 102a, the second material evaporator 102b, and the third material evaporator 102c may be crucibles equipped to evaporate materials to be deposited on the substrate. The first material evaporator 102a, the second material evaporator 102b, and the third material evaporator 102c are in fluid communication with the first distribution tube 106a, the second distribution tube 106b, and the third distribution tube 106c, respectively. The material evaporated by one of these material evaporators can be released from the material evaporator and flow into the respective distribution pipes.

As can be seen in FIG. 1, each of the first distribution tube 106 a, the second distribution tube 106 b, and the third distribution tube 106 c includes a distribution tube housing, and the distribution tube housing includes a plurality of nozzles 712. With these nozzles, the evaporated material is released and directed to the substrate to be coated (not shown). According to some embodiments, the nozzle 712 may be a combined part of the distribution tube, such as an opening formed in the distribution tube housing, or may be provided by a nozzle connected to the distribution tube housing to perform the defined The process, for example, guides the evaporated material towards the substrate to be coated. In one example, the nozzle can be connected to the distribution pipe through a locking, plugging, or shrinking process. In one embodiment, the nozzle may be a distribution tube exchangeably connected to the material deposition configuration.

FIG. 1b shows an enlarged view of the area A of the third distribution tube 106c shown in FIG. 1a. The partial view shown in FIG. 1b shows the third distribution pipe 106c and one nozzle 712 of these nozzles of the third distribution pipe 106c. Nozzle 712 The opening 713 or channel is provided, and the evaporated material can pass through the opening 713 or channel. The opening 713 of the nozzle 712 provides an opening length 714, as shown in Figure 1b. According to some embodiments, the opening length 714 may be measured along the longitudinal or length axis of the nozzle, especially in a direction corresponding to the average fluid direction leaving the nozzle. In one embodiment, the opening length 714 of the nozzle may be substantially perpendicular to the longitudinal (or linear) direction of the distribution tube.

The name "substantially perpendicular" can be understood to include a deviation from a strict vertical configuration of up to 15°. According to some embodiments, other names denoted "substantially" in the following description may include a configuration deviation of up to 15° from the angle indicated, or a deviation of about 15% from a dimension.

Figure 1c shows a front view of the material deposition configuration 100. The front view may correspond to the material deposition configuration as shown in Figure 1a, but rotated about 90°. The first material evaporator 102a, the second material evaporator 102b, and the third material evaporator 102c are in fluid communication with the first distribution tube 106a, the second distribution tube 106b, and the third distribution tube and 106c, respectively. The opening of the nozzle 712 is visible in the front view. The nozzles 712 of different first distribution tubes 106a, second distribution tubes 106b, and third distribution tubes 106c are separated by a distance of 200 from each other. According to the embodiments described herein, the distance between such nozzles may be representatively less than 50 mm, more representatively less than 30 mm, and even more representatively less than 25 mm.

According to some embodiments, the distances between the nozzles 712 of the first distribution tube 106a, the second distribution tube 106b, and the third distribution tube 106c are different from The center point of the opening of the nozzle is measured. In an example, the center point of the opening of the nozzle can be defined as the geometric center point of the opening. In the case where the opening is circular, the center point of the circle is a point equidistant from the point on the edge. For example, if the opening of the nozzle has a symmetrical shape, the center point of the opening can be described as a point that is constant during symmetrical movement. For example, the center point of a square, rectangle, diamond, or parallelogram is located at the intersection of diagonal lines, and the center point is a fixed point of rotational symmetry. Similarly, the center point of the ellipse is located at the intersection of the axes. According to some embodiments, the center point may be understood as the center of gravity of the shape.

In some embodiments, the distance 200 between such nozzles of the distribution tube may be a substantially horizontal distance. For example, the first distribution tube 106a, the second distribution tube 106b, and the third distribution tube 106c may extend in a substantially vertical direction. Such nozzles may have a direction of evaporation, that is, a direction in which the substantially horizontal nozzle releases evaporated material. According to some embodiments, the substantially horizontal distance between such nozzles of different distribution pipes may be understood to include a deviation of about 15° from the absolute horizontal configuration.

According to some embodiments, the distance between these nozzles can be described as the distance between different distribution tubes, for example, measured from the longitudinal axis of the distribution tubes. In one embodiment, the distribution pipes are separated from each other by a distance of 200.

FIGS. 1d to 1f are schematic diagrams of embodiments of the partial view B in the view before FIG. 1c. In figures 1d to 1f, the opening size 716 of the nozzle 712 is indicated. The opening size of the nozzle can be determined by the shape of the nozzle. In one embodiment, the size of the opening can be understood as a dimension of the opening, and this dimension of the opening is not the length of the opening. According to some embodiments, the size of the opening may be the smallest dimension of the section of the opening, in particular The smallest dimension in the profile of the nozzle outlet (the nozzle outlet is where the evaporated material leaves the nozzle).

FIG. 1d is a schematic diagram showing an example of the nozzle opening and the opening size 716, wherein the opening size corresponds to the cross section, especially the opening diameter. Figure 1e shows an example in which the nozzle opening has an oval-like shape and the size of the opening is defined by the smallest dimension of the cross section of the opening. Figure 1f shows an example in which the nozzle opening has an elongated circular shape, and the size of the opening is defined by the smallest dimension of the cross section of the opening. Those with ordinary knowledge will understand that the embodiments shown in Figures 1a to 1f are only examples, and are not limited to the examples shown in the size, shape, and length of the nozzle opening, or to the distribution tube and material source. The illustrated example of the configuration is described in detail below.

According to the embodiments described herein, each nozzle of the first distribution tube may have a 2:1 or greater opening length to size ratio, or only a portion of the nozzle of the first distribution tube may have the length to size ratio. According to some embodiments, the second and/or third distribution tubes of the material deposition configuration as described above may also include one or more nozzles with an opening length to size ratio of 2:1 or greater.

According to some embodiments that may be combined with other embodiments described herein, the distribution tube may have a substantially triangular cross-section. FIG. 2a is a schematic diagram showing an example of the cross section of the distribution tube 106. FIG. The distribution pipe 106 has walls 322, 326, and 324, and the walls 322, 326, and 324 surround the internal hollow space 710. The wall 322 is provided on the outlet side of the material source provided by the nozzle 712. The profile of the distribution pipe can indicate that the cost is triangular, that is, the main area of the distribution pipe corresponds to a part of the triangle and/or The profile of the distribution tube may be a triangle with rounded corners and/or cut-off corners. As shown in Figure 2a, the corner of the triangle on the exit side is exemplified as a chamfer.

The width of the outlet side of the distribution pipe is exemplified by the dimension of the wall 322 in the section shown in FIG. 2a by the arrow 352. Furthermore, the other dimensions of the profile of the distribution pipe 106 are marked by arrows 354 and 355. According to the embodiment described herein, the width of the outlet side of the distribution pipe is 30% or less of the maximum dimension of the cross section, for example, 30% or less of the larger dimension marked by arrows 354 and 355. In view of the dimensions and shape of the distribution tubes, the nozzles 712 of adjacent distribution tubes 106 can be provided at a small distance. This smaller distance improves the mixing of organic materials that evaporate next to each other.

FIG. 2b is a schematic diagram of an embodiment in which two distribution pipes are adjacent to each other. Therefore, the material deposition configuration with two distribution tubes as shown in Figure 2b can evaporate two organic materials adjacent to each other. Such a material deposition configuration may also mean a material deposition array. As shown in FIG. 2b, the shape of the cross section of the distribution tube 106 is such that the nozzles of adjacent distribution tubes are placed close to each other. According to some embodiments that can be combined with other embodiments described herein, the first nozzle of the first distribution tube and the second nozzle of the second distribution tube may have a distance of 30 mm or less, for example, from 5 mm to 25 mm. More particularly, the distance from the first outlet or nozzle to the second outlet or nozzle may be 10 mm or less.

According to some embodiments described herein, the distance between the first nozzle of the first distribution pipe and the second nozzle of the second distribution pipe can be measured as the longitudinal length of the respective nozzle The minimum distance between the axes. In one example, the minimum distance between the longitudinal axes of the respective nozzles is at the outlet of the nozzle (that is, where the evaporated material leaves the nozzle). FIG. 2c is a schematic diagram of a partial view C of the configuration shown in FIG. 2b. The enlarged partial view C in FIG. 2c shows an example of two first distribution tubes 106a and a second distribution tube 106b, wherein the distance 200 between these nozzles is the first of the first distribution tubes 106a The outlet of each nozzle is measured between the longitudinal axis 201 of the nozzle and the longitudinal axis 202 of the second nozzle of the second distribution pipe 106b. According to some embodiments, the longitudinal axis of the nozzle referred to herein extends along the length of the nozzle.

According to the embodiments described herein, the material deposition configuration as described herein can be used in high-accuracy processes, such as organic light-emitting diode (OLED) production processes. Figures 3a and 4a are schematic diagrams illustrating the effectiveness of the material deposition configuration according to the embodiments described herein. Figures 3b and 4b are schematic diagrams showing the efficacy of a comparative example of known material deposition configurations. In Fig. 3a, the test data of the distribution of the evaporated material released from the material deposition configuration according to the embodiments described herein is shown. Curve 800 shows the experimental results of the evaporated material being released from a nozzle with a length to size ratio of 2:1 or higher. The example in Figure 3a illustrates that the distribution of evaporated material is approximately cos ^6- shaped. The comparison with the known material deposition configuration as shown in Figure 3b shows that the distribution of the conventional material deposition configuration corresponds to the shape of cos ¹ shown by curve 801. The difference between the curve 800 and the curve 801 of the known system is essentially the width of the plume of the evaporated material and the concentrated distribution of the evaporated material in the plume. The material deposition configuration of the embodiment described is generated. For example, if the mask is used to deposit material on a substrate, for example in an OLED production system, the mask may be a pixel mask with pixel openings, the pixel openings having a thickness of about 50 μm x 50 μm or even below The size is, for example, a dimension in which the pixel opening has a cross section of about 30 μm or less, or about 20 μm (for example, the minimum size of the cross section). In one example, the pixel mask may have a thickness of about 40 μm. Considering the thickness of the mask and the size of the pixel opening, the shadowing effect may occur. The wall of the pixel opening in the mask is to mask the pixel opening. Material deposition configurations and/or distribution tubes and/or nozzles according to embodiments described herein can help reduce shadowing effects.

The high directionality that can be achieved by using the evaporation of the material deposition configuration according to the embodiments described herein improves the usability of the evaporated material because more evaporated material actually reaches the substrate (and for example is Not the area above and below the substrate).

Figure 3c shows a schematic diagram of the distribution of evaporated material in one pixel of a mask and three different lines. All three lines represent the distribution of evaporated material in the defined distance between the nozzle and the substrate. In one example, the distance between the nozzle outlet (where evaporated material leaves the nozzle) and the substrate or substrate support may be 250 mm or less, for example, about 200 mm, or about 150 mm. The first line 804 represents the distribution of evaporated material in a pixel opening of a mask provided by a known material deposition configuration. The distribution of the first wiring 804 corresponds to a similar cos ¹ distribution. With the material deposition configuration or distribution tube according to the embodiments described herein, the distribution of the evaporated material may correspond to a similar cos ⁶ distribution, as shown by the second wiring 805. In particular, the slope of the second wiring 805 is steeper than the slope of the first wiring 804. Those with ordinary knowledge can see from Figure 3c that the distribution of cos ⁶ is better than cos ¹ at the edge of the pixel opening of the mask. The third wiring 806 represents the experimental test results using the material deposition distribution or distribution tube according to the embodiments described herein. The third wire 806 is essentially a second wire 805 with a cos ⁶ distribution similar to the evaporated material. When using a material deposition configuration or distribution tube according to the embodiments described herein, the shadowing effect can be reduced.

FIG. 4a is a schematic diagram illustrating an exemplary material deposition configuration including a first material source 100a, a second material source 100b, and a third material source 100c according to the embodiments described herein. The material deposition configuration may be the material deposition configuration as described in the embodiments herein. The deposition system in FIG. 4a further illustrates the substrate 121 to be coated with evaporated material and the mask 132 for shielding the substrate 121. FIG. 4a shows how the evaporated material 802 exits and leaves the first material source 100a, the second material source 100b, and the third material source 100c of the material deposition configuration, especially the first material deposition configuration The nozzles of the material source 100a, the second material source 100b, and the third material source 100c. According to the embodiments described herein, the evaporated material 802 is dispersed as it leaves the first material source 100a, the second material source 100b, and the third material source 100c of the material deposition configuration and enters the vacuum space of the deposition chamber. Nozzles with a length to size ratio of 2:1 or greater allow a limited spread of evaporated material. Examples of limited spread include angles of about 30° or less. The comparison with the known deposition system shown in Figure 4b is that the evaporated material 803 contains an angle of about 60°.

As can be seen in the examples shown in Figures 3a, 3b, 4a, and 4b, the material deposition configuration according to the embodiments described herein can provide a smaller distribution of evaporated material and provide more accurate guidance of evaporated The material reaches the substrate, and in particular High accuracy to reach the mask opening for coating substrate more accurately.

Nozzles that arrange the distribution tubes at a distance of less than 30 mm also provide an option to mix different materials of different first material sources 100a, second material sources 100b, and third material sources 100c. By using a specially shaped distribution tube, such as a triangle-like shape as exemplarily shown in Figure 4a, reducing the distance between these nozzles in the material deposition configuration can be more improved.

Evaporated materials with a similar cos ⁶ distribution can provide the use of smaller mask openings and improve the accuracy of smaller structures to be coated on substrates, such as pixels for OLED products.

According to some embodiments, a material deposition configuration for depositing evaporated material on the substrate in the vacuum chamber is provided. According to some embodiments, the material deposition configuration may be assembled for depositing two or more evaporated materials on the substrate in the vacuum chamber. The material deposition configuration includes a first material source that includes a first material evaporator that is configured to evaporate the first material to be deposited on the substrate. According to some embodiments, the first material may be the first material of two or more materials to be deposited on the substrate. The first material source further includes a first distribution tube. The first distribution tube includes a first distribution tube housing, wherein the first distribution tube is in fluid communication with the first material evaporator. Furthermore, the first material source includes a plurality of first nozzles located in the housing of the first distribution tube, wherein one or more of the first nozzles include an opening length and an opening size, and are assembled to provide a first One distribution direction. The length-to-size ratio of the one or more nozzles of the first nozzles is equal to or greater than 2:1. The material deposition configuration further includes a second material source, the second material source includes a second material evaporator, which is equipped to evaporate the material to be deposited on the substrate Second material. According to some embodiments, the second material may be a second material of two or more materials to be deposited on the substrate. The second material source further includes a second distribution tube. The second distribution pipe includes a second distribution pipe housing, wherein the second distribution pipe is in fluid communication with the second material evaporator. The second material source further includes a plurality of second nozzles located in the second distribution tube housing, wherein one or more second nozzles are assembled to provide a second distribution direction. According to several embodiments described herein that can be combined with other embodiments described herein, the first distribution direction of the one or more nozzles of the first nozzles and the one or more of the second nozzles The second distribution directions of the nozzles are arranged parallel to each other, or the deviation from the parallel arrangement is at most 5°. According to some embodiments, the first material and the second material may be the same material, or may be different materials selectively.

FIG. 5a is a schematic diagram of a material deposition configuration having a first distribution direction of nozzles arranged in a substantially parallel arrangement in a first distribution tube housing and a first distribution direction of nozzles in a second distribution tube housing Two distribution directions. The exemplary material deposition configuration shown in FIG. 5a shows the first material source 100a and the second material source 100b. Each of the first material source 100a and the second material source 100b includes a first material evaporator 102a and a second material evaporator 102b, respectively. In one example, each material evaporator can provide different materials. In another embodiment, each material evaporator can provide the same material, or part of the material evaporator can provide the same material, and another part of the material evaporator can provide different materials. According to the embodiments described herein, the first material source 100a includes a first distribution tube 106a, and the second material source 100b includes a second distribution tube 106b. The first and second distribution pipes each have a distribution pipe casing, and the nozzle 712 is arranged in the distribution pipe casing. In particular, the first distribution pipe includes several first nozzles and the first The two distribution tubes include several second nozzles for releasing the evaporated material from the respective distribution tube shells toward the substrate to be coated.

According to the embodiments described herein, one or more nozzles of the first distribution tube and/or the second distribution tube may have a length to size ratio of nozzles of 2:1 or greater, for example 2.5:1, 3: 1, 5:1 or even greater than 5:1. The size and length of the nozzle opening can be understood as described above with reference to Figures 1a to 1f. In some embodiments, one or more nozzles of the first distribution tube provide a first distribution direction and one or more nozzles of the second distribution tube provide a second distribution direction.

According to the embodiments described herein, the distribution direction of the nozzles can be understood as the average distribution direction of the nozzles. In some embodiments, the average distribution direction may substantially correspond to one of the plumes of evaporated material, the plume of evaporated material is released from the nozzle toward the substrate to be coated, especially the average distribution direction may be Substantially corresponds to the wiring along the concentration of evaporated material to one of the largest of the plumes of evaporated material. According to some embodiments, the average distribution direction of the nozzle may be understood to correspond to the geometric centerline of the plume of evaporated material, the plume of evaporated material is released from the nozzle toward the substrate to be deposited. In some embodiments, the centerline of the steam plume can be illustrated as corresponding to the line including the geometric center of gravity of the evaporated material, and the point on the length or longitudinal axis of the nozzle, such as the outlet point of the nozzle. According to still other embodiments, the average distribution direction of the nozzles can be described as extending along the line with the shortest distance between the nozzle outlet and the substrate to be coated, in particular, along the line with the nozzle outlet and the substrate to be coated The shortest distance between the wires extends, and the point of the nozzle outlet is located on the length axis or longitudinal axis of the nozzle.

Figure 5b illustrates a top view of a material deposition configuration including a first material source 100a and a second material source 100b according to some embodiments. As can be seen in the examples in FIGS. 5a and 5b, the nozzle 712 of the first distribution tube 106a provides the first distribution direction 210 and the nozzle 712 of the second distribution tube 106b provides the second distribution direction 211. Generally speaking, the nozzles in the first distribution tube and the second distribution tube are arranged so that the first distribution direction and the second distribution direction are parallel to each other. According to some embodiments, the first distribution direction and the second distribution direction may deviate from the absolute parallel arrangement by at most 5°, for example, by about 3° or about 2° from the absolute parallel arrangement. According to some embodiments, the first distribution direction 210 and the second distribution direction 211 as marked in FIGS. 5a and 5b may have a distance of about 30 mm or less between each other.

As described above, the first distribution tube and the second distribution tube of the material deposition configuration shown in FIGS. 5a and 5b may have a triangle-like shape. FIGS. 6a and 6b are schematic diagrams showing a substantially triangular material deposition configuration. In the material deposition configuration, the distribution directions of the nozzles of the first distribution tube and the second distribution tube are substantially parallel to each other.

FIG. 6a shows a cross-sectional view of an embodiment. In this embodiment, a first material source having a first distribution tube 106a, a second material source having a second distribution tube 106b, and a third distribution tube 106c are provided Third material source. According to some embodiments, such distribution pipes may be equipped with heating elements 380 and heat insulators 879 to improve heating efficiency and avoid condensation of evaporated material in the distribution pipes. The evaporator control housing 702 is provided adjacent to the distribution pipes and connected to the distribution pipes via a heat insulator 879. In the first distribution pipe 106a, the second distribution pipe 106b, and the third distribution pipe 106c The arrow above (when seen in the projected plane) shows the evaporated organic material leaving the first distribution tube 106a, the second distribution tube 106b, and the third distribution tube 106c. The average distribution directions of the nozzles of these distribution pipes are marked with reference symbols 210, 211, and 212. As can be seen in Figure 6a, the distribution directions of the different distribution tubes are substantially parallel.

The partial diagrams and schematic diagrams of the nozzles 712 of the three first distribution pipes 106a, the second distribution pipes 106b, and the third distribution pipes 106c are shown in FIG. 6b. The three nozzles 712 shown by way of example have longitudinal or longitudinal axes 201, 202 and 203. The nozzle 712 can be directed from the first distribution tube 106a, the second distribution tube 106b, and the third distribution tube 106c in the first distribution direction 210, the second distribution direction 211, and the third distribution direction 212 to the substrate to be coated (not shown) (Show) guide the evaporated material. As in the embodiment shown in Fig. 6b, the three distribution directions are parallel to each other, or may deviate from the absolute parallel arrangement by up to 5°.

According to the embodiments described here, for example, the different distribution pipes of the first, second and third distribution pipes referred to here can be fluidly connected to different evaporators, for example in the case of three distribution pipes three different evaporations Device. In some embodiments, different distribution tubes may be in fluid communication with the same form of evaporator, but evaporate different materials. For example, three different components can be provided by three distribution tubes in fluid communication with three evaporators. In one example, a material deposition configuration as described herein can be used to produce OLEDs. The evaporated material can include three components used to produce OLEDs.

The distribution directions of different nozzles according to the embodiments described herein are arranged in parallel, and the use of nozzles with a length to size ratio of 2:1 or greater may be helpful To improve the uniformity and predictability of the characteristics of the evaporated material when it is released from the nozzle. For example, the direction of the evaporated material that is substantially parallel to another, or adjacent, evaporated material can allow the evaporated material to have a normal and consistent effect on the mask and/or substrate. In one example, different components of different distribution tubes may have substantially the same impact angle on the mask and/or substrate, especially the impact angle on the mask and/or substrate that is substantially perpendicular. The manufacturing of coating one or more components can be performed in a more precise manner using the material deposition configuration according to the embodiments described herein. Furthermore, when different material sources have a defined angle between the distribution directions, the material sources with parallelly arranged distribution directions can reduce the fixed and computational effort exemplified in known systems. Furthermore, if different components are used in different material sources, according to the embodiments described herein, the material deposition configuration including the above-mentioned parallel arrangement of the distribution direction can uniformly mix the different components.

According to some embodiments, a distribution tube for depositing evaporated material on the substrate in the vacuum chamber is provided. The distribution pipe includes a distribution pipe casing and a nozzle, and the nozzle is located in the distribution pipe casing. The nozzle includes the length of the opening and the size of the opening, wherein the length to size ratio of the nozzle is equal to or greater than 2:1. According to some embodiments that can be combined with other embodiments described herein, the nozzle includes a material that is chemically inert to the evaporated organic material. In one example, the evaporated organic material may typically have a temperature between about 150°C and about 650°C, more typically a temperature between about 100°C and 500°C.

7a to 7d are schematic diagrams showing examples of nozzles of distribution pipes according to the embodiments described herein. The nozzle 700 shown in FIGS. 7a to 7d includes A hole 713 (or channel or bore 713) is used to guide the evaporated material through the nozzle. According to the embodiments described herein, the nozzle 700 has an opening length 714 and an opening size 716. The length-to-dimension ratio of the nozzle in the embodiment described here may be 2:1 or greater, as exemplified above. The names "opening length" and "opening size" can be understood as described above in relation to the drawings 1a to 1f.

FIG. 7a is a schematic diagram of a nozzle including a first nozzle material 206 and a second nozzle material 208. FIG. For example, the first nozzle material 206 may be a material with a thermal conductivity value greater than 21 W/mK, such as copper. In some embodiments, the second nozzle material 208 may be provided inside the opening or channel 713 and may be chemically inert to the evaporated organic material. For example, the second nozzle material may be selected from tantalum (Ta), niobium (Nb), titanium (Ti), diamond-like coating (DLC), stainless steel, quartz glass, and graphite. As can be seen in the embodiment in Figure 7a, the second nozzle material 208 may be provided as a thin coating inside the channel 713.

FIG. 7b shows a schematic diagram of an embodiment having a first nozzle material 206 and a second nozzle material 208. FIG. The example of a nozzle as shown in figure 7b is composed of a first part and a second part, the first part is made of a first nozzle material 206 (having a heat conduction value of, for example, greater than 21 W/mk), and the second part is Made from a second nozzle material 208, which may be chemically inert to the evaporated organic material. In an example, the first and second nozzle materials can be selected from the descriptions regarding FIG. 7a. As can be seen in Figure 7b, the second nozzle material 208 is part of the nozzle, and in particular is not just a coating on the side of the internal channel.

According to some embodiments, the thickness of the second nozzle material may be representative of Some nanometers are in the range of a few microns. In one example, the thickness of the second nozzle material at the nozzle opening may be representatively between about 10 nm and about 50 μm, more representatively between about 100 nm and about 50 μm, and even more representatively between about 500 nm and about 50 μm between. In one example, the thickness of the second nozzle material may be about 10 μm.

FIG. 7c shows a schematic diagram of an embodiment of a nozzle 712, wherein the nozzle 712 is made of a first nozzle material, the first nozzle material has a heat transfer rate greater than that of the distribution tube or a heat transfer rate higher than 21 W/mk The nozzle can be connected to the distribution pipe. In the embodiment described herein, the first nozzle material 206 is inert to the evaporated organic material. In one example, the first nozzle material may be selected from Ta, Nb, Ti, DLC, or graphite.

FIG. 7d shows a schematic view of the nozzle shown in FIG. 7a according to the embodiment described herein. The second nozzle material 208 can be seen in the opening 713, and the first nozzle material 206 is shown on the outside of the nozzle 712.

According to some embodiments described herein, the opening or channel of the nozzle may have a size of about 1 mm to about 10 mm, more typically about 1 mm to about 6 mm, and even more typically 2 mm to about 5 mm, The evaporated material passes through the openings or channels of the nozzle during the evaporation process to reach the substrate to be coated. According to some embodiments, the size of the channel or opening may mean the smallest dimension of the cross section, such as the diameter of the channel or opening. In one embodiment, the size of the opening or channel is measured at the outlet of the nozzle. According to some of the embodiments described herein that can be combined with other embodiments described herein, the openings or channels can be manufactured in the tolerance region H7, for example with a tolerance of about 10 μm to 18 μm.

According to some embodiments described herein, the nozzle used for the material deposition configuration or the distribution tube according to the embodiment described herein may include threads to repeatedly connect the nozzle to the distribution tube and release the nozzle from the distribution tube. The deposition configuration is used to deposit material on the substrate in the vacuum deposition chamber. In some embodiments, the nozzle having a thread for connecting to the distribution tube may have an internal thread and/or an external thread to enable the nozzle to be repeatedly connected to the distribution tube, in particular, without damaging the distribution tube or the nozzle. For example, a first nozzle with defined characteristics can be connected to a distribution tube for the first process. After the first process is completed, the first nozzle can be disconnected and the second nozzle can be connected to the distribution tube for the second process. If the first process is to be executed again, the second nozzle can be disconnected from the distribution pipe and the first nozzle can be connected to the distribution pipe again to perform the first process. According to some embodiments, the distribution tube may also include threads for the interchangeable connection of the nozzle to the distribution tube, for example, by fitting to the threads of the nozzle.

According to some embodiments described herein, the material deposition configuration in the embodiments described herein and the distribution tubes in the embodiments described herein can be seen in FIGS. 8a to 8c. The distribution tube 106 may be in fluid communication with the crucible for distributing the evaporated material provided by the crucible. The distribution tube may be exemplified as an elongated cube with a heating unit 715. The evaporation crucible may be a reservoir for using the external heating unit 725 to evaporate the organic material. According to typical embodiments that can be combined with other embodiments described herein, the distribution tube 106 provides a wiring source. According to some embodiments described herein, the material deposition configuration 100 further includes several openings and/or outlets for releasing evaporated material toward the substrate, such as nozzles arranged along at least one wiring.

According to some embodiments that can be combined with other embodiments described herein. The nozzle of the distribution tube can be adapted to release the evaporated material in a direction that is different from the longitudinal direction of the distribution tube and is, for example, a direction substantially perpendicular to the longitudinal direction of the distribution tube. According to some embodiments, the outlets (for example, nozzles) are arranged so as to have a main evaporation direction of +-20° to the horizontal. According to some specific embodiments, the evaporation direction may be slightly upwardly oriented, for example in the range of 15° upward from horizontal, for example 3° to 7° upward. Therefore, the substrate may be slightly inclined to be substantially perpendicular to the evaporation direction. In the case of an inclined substrate, the generation of unnecessary particles can be reduced. However, the nozzle and material deposition configurations according to the embodiments described herein can also be used in deposition equipment that is equipped for depositing materials on a horizontally oriented substrate.

In one example, the length of the distribution tube 106 corresponds at least to the height of the substrate to be deposited in the deposition equipment. In many cases, the length of the distribution tube 106 will be at least 10% or even 20% longer than the height of the substrate to be deposited. A distribution tube having a height that is longer than the substrate can provide uniform deposition at the upper end of the substrate and/or the lower end of the substrate.

According to some embodiments that can be combined with other embodiments described herein, the length of the distribution tube may be 1.3 m or more, for example 2.5 m or more. According to a configuration, as shown in Fig. 8a, the evaporation crucible 104 is provided at the lower end of the distribution tube 106. The organic material is evaporated in the evaporation crucible 104. The vapor of the organic material enters the distribution pipe 106 at the bottom of the distribution pipe, and is essentially guided sideways through the nozzles in the distribution pipe toward an essentially vertical substrate.

Figure 8b shows an enlarged view of a part of the material source, where the distribution tube 106 Series is connected to the evaporation crucible 104. The flange unit 703 is provided, and the flange unit 703 is assembled to provide the connection between the evaporation crucible 104 and the distribution tube 106. For example, the evaporation crucible and the distribution tube are provided as a separation unit, which can be separated and connected or assembled to the flange unit, for example, for the operation of the material source.

The distribution pipe 106 has an internal hollow space 710. The heating unit 715 may be provided to heat the distribution pipe. Therefore, the distribution tube 106 can be heated to a temperature so that the vapor of the organic material does not condense inside the wall of the distribution tube 106, and the vapor of the organic material is provided by the evaporation crucible 104.

For example, the distribution tube may be maintained at a temperature that is representatively about 1°C to about 20°C, more representatively about 5°C to about 20°C, and even more representatively about 10°C to about 15°C above The evaporation temperature of the material deposited on the substrate. Two or more heating shields 717 are provided around the pipe of the distribution pipe 106.

During operation, the distribution tube 106 may be connected to the evaporation crucible 104 at the flange unit 703. The evaporation crucible 104 is equipped to receive the organic material to be evaporated and to evaporate the organic material. According to some embodiments, the material to be evaporated may include at least one of indium tin oxide (ITO), NPD, Alq ₃ , Quinacridone, Mg/AG, starburst material, and the like. FIG. 8b shows a cross-sectional view through the casing of the evaporation crucible 104. The refill opening is provided above the evaporation crucible as an example. The refill opening can be closed with a plug 722, lid, cover or the like to close the internal space of the evaporation crucible 104 ( enclosure).

The external heating unit 725 is provided in the internal space of the evaporation crucible 104. The external heating unit may extend along at least a portion of the wall of the evaporation crucible 104 stretch. According to some embodiments, which may be combined with other embodiments described herein, one or more central heating elements 726 may be additionally or selectively provided. Figure 8b shows two central heating elements 726. According to some applications, the evaporation crucible 104 may further include a shield 727.

According to some embodiments, as exemplarily shown in FIGS. 8a to 8b, the evaporation crucible 104 is provided below the distribution tube 106. According to still other embodiments that can be combined with other embodiments described herein, the steam duct 732 may be provided at the central portion of the distribution pipe at the distribution pipe 106, or may be another between the lower end of the distribution pipe and the upper end of the distribution pipe Location is provided on distribution tube 106. FIG. 8c is a schematic diagram showing an example of a material source having a distribution pipe 106 and a steam duct 732 provided at the center of the distribution pipe. The steam of the organic material is generated in the evaporation crucible 104 and is guided through the steam duct 732 to the central portion of the distribution pipe 106. The steam leaves the distribution pipe 106 through several nozzles 712, which may be the nozzles described in relation to FIGS. 7a to 7d. According to still other embodiments that can be combined with other embodiments described herein, two or more steam conduits 732 can be provided at different locations along the length of the distribution tube 106. In some embodiments, the steam conduit 732 may be connected to one evaporation crucible 104 or several evaporation crucibles 104. For example, each steam duct 732 may have a corresponding evaporation crucible 104. Alternatively, the evaporation crucible 104 may be in fluid communication with two or more steam conduits 732, which are connected to the distribution pipe 106.

As described herein, the distribution tube may be a hollow cylinder. The name cylinder can be understood as generally accepted as having a round bottom shape and a round top shape, and a curved area or shell connecting the top circle and the bottom circle. According to other additional or alternative embodiments that can be combined with other embodiments described herein, the name cylinder can be (mathematical sense) is more understood as having any bottom shape and a consistent top shape, and a curved area or shell connecting the top shape and the bottom shape. Therefore, the cylinder does not necessarily have to have a circular cross-section. Instead, the bottom surface and the top surface may have shapes other than circular.

Figures 9a and 9b show cross-sectional views of an embodiment of a distribution tube 106 for a material deposition configuration according to embodiments described herein. According to some embodiments, the distribution tube 106 includes a distribution tube housing 116 that includes or is made of a first housing material. As can be seen in the embodiments in Figures 9a and 9b, the distribution tube is a linear distribution tube extending along the first direction 136.

FIG. 9a is a schematic diagram of a distribution tube having a plurality of openings 107. The openings 107 are extended along a first direction in the distribution tube housing. In some embodiments, the perforated wall 109 in the distribution pipe can be understood as a nozzle according to the embodiments described herein. In an example, the wall 109 of the opening 107 may include a first nozzle material (for example, coated with the first nozzle material), wherein the thermal conductivity value of the first nozzle material may be greater than the thermal conductivity of the first distribution tube material in some examples Rate or greater than 21W/mK. In one example, the wall 109 of the opening 107 may be covered with copper. In one embodiment, the wall may be covered with copper and a second nozzle material, such as a material that is chemically inert to the evaporated organic material system.

FIG. 9b is a schematic diagram of an embodiment of a distribution tube according to the embodiments described herein. The distribution tube 106 shown in Fig. 9b includes an opening 107 provided with an extension wall 108. Generally speaking, the extension wall 108 of the opening 107 extends along a direction substantially perpendicular to the first direction 136 of the distribution tube housing 116 stretch. According to some embodiments, the extension wall 108 of the opening 107 may extend from the distribution pipe at any suitable angle. In some embodiments, the extension wall 108 of the opening 107 of the distribution tube housing 116 may provide the nozzle of the distribution tube 106 according to the embodiments described herein. For example, the extension wall 108 may include the first nozzle material, or may be made of the first nozzle material. According to some embodiments, the extension wall 108 may be coated with the first and/or second nozzle material on the inside, for example, a material that is chemically inert to the evaporated organic material.

In some embodiments, the extension wall 108 provides a fixing aid for fixing the nozzle to the distribution tube housing 116. The nozzle is exemplarily illustrated in FIGS. 8a to 8d. According to some embodiments, the extension wall 108 may provide threads for locking the nozzle to the distribution tube housing 116.

According to some embodiments that can be combined with other embodiments described herein, the nozzle of the material deposition configuration or distribution tube referred to herein can be designed to form a plume having a cos ^n- shaped profile, where n is particularly Greater than 4. In one example, the nozzle is designed to form feathers with a cos ^6- like profile. If a narrow-shaped plume is needed, a nozzle that achieves the evaporated material of the cos ^n- shaped plume can be useful. For example, a deposition process that includes a mask for a substrate with small openings (eg, openings with a size of about 20 μm) can benefit from narrow cos ^n- shaped plumes, and since the plumes of evaporated material The object is not spread on the mask but through the opening of the mask, the material utilization can be increased. According to some embodiments, the nozzle may be designed such that the relationship between the length of the nozzle and the diameter of the channel of the nozzle is a defined relationship, such as 2:1 or higher. According to additional or alternative embodiments, the channels of the nozzle may include steps, slopes, collimator structures and/or pressure stages to achieve the desired plume shape.

According to some embodiments described herein, the vacuum deposition chamber is illustrated. The vacuum deposition chamber includes a material deposition configuration according to any of the embodiments described above. The vacuum deposition chamber further includes a substrate support for supporting the substrate during deposition. Generally, the distance between at least one of the distribution tubes in the material deposition configuration and the substrate support is less than 250 mm. According to some embodiments, the distance between the distribution tube and the substrate support can be measured from a position of the nozzle outlet of the distribution tube and the substrate support, which is located on a plane (e.g. contact point) with the substrate , Clips or similar).

In some embodiments, the vacuum deposition chamber may include a material deposition configuration with a nozzle having an opening size to opening length ratio of 2:1 or greater. According to some embodiments that can be combined with other embodiments described herein, the vacuum deposition chamber may include a material deposition configuration having a first material source and a second material source, such as the first and Two material sources (the first and second material sources are exemplified by having a first distribution tube and a second distribution tube, the first distribution tube has a plurality of first nozzles, and the second distribution tube has a plurality of second nozzles). Generally, the distance between one of the first nozzles and the second of the second nozzles is equal to or less than 30 mm.

According to some embodiments, which may be combined with other embodiments described herein, the vacuum deposition chamber may include a material deposition configuration having a nozzle having an opening size to opening length ratio of 2:1 or greater. According to some embodiments, which may be combined with other embodiments described herein, the vacuum deposition chamber may include a material deposition configuration having a first material source and a second material source, the first material source and the second material source For example, as described above, the first and second material sources (the first and second material sources are exemplified as having a first distribution tube and a second distribution tube, the first distribution tube has a plurality of first nozzles, and the second distribution tube has Several second nozzles). Generally, at least one of the first nozzles of the first distribution tube provides a first distribution direction, and at least one of the second nozzles provides a second distribution direction. In some embodiments, the first distribution direction of the one or more nozzles of the first nozzles and the second distribution direction of the one or more nozzles of the second nozzles are arranged parallel to each other or deviate from the parallel arrangement Up to 5° arrangement.

According to some embodiments, the vacuum deposition chamber may include a material deposition configuration with a distribution tube having a distribution tube housing and a nozzle, the nozzle being located in the distribution tube housing. The length to size ratio of the nozzle opening is 2:1 or greater and the nozzle includes a material that is chemically inert to the evaporated organic material, such as the organic material referred to above.

FIG. 10 shows a schematic diagram of the deposition apparatus 300. The material deposition configuration, the distribution tube, or the nozzle according to the embodiments described herein may be used in the deposition apparatus 300. The elements referred to below, such as nozzles or distribution pipes, may be the elements as described above in relation to FIGS. 1a to 9b. For example, as long as the combination of the embodiments does not contradict each other, the distribution pipes referred to below may be the distribution pipes exemplarily described with reference to FIGS. 1a to 9b.

The deposition apparatus 300 of FIG. 10 includes a material source 100d located at a position of the vacuum chamber 110. According to some embodiments, which can be combined with other embodiments described herein, the material source is assembled for translational movement or rotation about an axis. The material source 100d has one or more evaporation crucibles 104 and one or more distribution tubes 106. Two steamed The crucible and two distribution pipes are shown in Figure 10. The distribution pipe 106 is supported by the support 102. Furthermore, according to some embodiments, the evaporation crucible 104 may also be supported by the support 102. Two substrates 121 are provided in the vacuum chamber 110. In general, a mask 132 for depositing a masking layer on the substrate may be provided between the substrate and the material source 100d. In some embodiments, the mask may be a pixel mask, for example, a pixel mask with an opening, the opening has a size (for example, the diameter or the smallest dimension of the cross section), and is typically between about 10 μm and about 50 μm, More representative is between about 15 μm and about 40 μm, and even more representative is between about 15 μm and about 30 μm. In one example, the size of the mask opening is about 20 μm. In another example, the mask opening has an extension of about 50 μm x 50 μm. The organic material evaporates from the distribution tube 106.

According to the embodiments described herein, the substrate is coated with organic material in a substantially vertical position. The angle of view shown in FIG. 10 is a top view of the device including the material source 100d. Generally speaking, the distribution pipe system is a linear steam distribution nozzle. According to some embodiments, the distribution piping system provides a substantially vertically extending wiring source. According to several embodiments that can be combined with other embodiments described herein, essentially vertical when meaning the direction of the substrate is particularly understood to allow a deviation of 20° or less from the vertical direction, for example 10° or less. For example, this deviation may be provided because the substrate support has some deviation from the vertical direction, which may result in a more stable substrate position. However, the direction of the substrate during the deposition of the organic material is considered to be substantially vertical, and is different from the horizontal substrate direction. In some embodiments, the surface of the substrate is coated by a wire source that extends in a direction corresponding to a substrate dimension and a translational movement, and the translational movement is along other directions corresponding to other substrate dimensions. According to other embodiments, the deposition apparatus may It is a deposition device for depositing material on a substrate in a substantially horizontal direction. For example, coating the substrate in the deposition apparatus may be performed in the up or down direction.

FIG. 10 is a schematic diagram of an embodiment of a deposition apparatus 300 for depositing organic materials in the vacuum chamber 110. The material source 100d is provided on a track in the vacuum chamber 110, such as an annular track or a linear guide 320, for example. The rail or linear guide 320 is assembled for the translational movement of the material source 100d. According to different embodiments that can be combined with other embodiments described herein, a driver for translational movement can be provided in the material source 100d, in the rail or linear guide 320, in the vacuum chamber 110, or a combination thereof. Figure 10 shows a valve 205, which is an example of a gate valve. The valve 205 provides a vacuum seal to an adjacent vacuum chamber (not shown in Figure 10). The valve may be opened to transfer the substrate 121 or the mask 132 into or out of the vacuum chamber 110.

According to some embodiments that can be combined with other embodiments described herein, other vacuum chambers such as the maintenance vacuum chamber 111 are provided adjacent to the vacuum chamber 110. In some embodiments, the vacuum chamber 110 and the maintenance vacuum chamber 111 are connected by a valve 207. The valve 207 is assembled to open and close the vacuum seal between the vacuum chamber 110 and the maintenance vacuum chamber 111. When the valve 207 is in the open state, the material source 100d can be transferred to the maintenance vacuum chamber 111. Thereafter, the valve may be closed to provide a vacuum seal between the vacuum chamber 110 and the maintenance vacuum chamber 111. If the valve 207 is closed, the maintenance vacuum chamber 111 can be exhausted and opened to maintain the material source 100d without breaking the vacuum in the vacuum chamber 110.

In the embodiment shown in FIG. 10, two substrates 121 are supported on On the respective conveyor tracks in the vacuum chamber 110. According to some embodiments, the distance between at least one distribution tube and the substrate support is less than 250 mm. In FIG. 10, this distance is represented by the distance 101 between the substrate support 126 and the outlet of the nozzle of the distribution tube 106 of the material source 100d. Furthermore, two rails are provided for placing the mask 132 on it. The coating of the substrate 121 can be masked by the respective mask 132. According to a typical embodiment, the masks 132 are provided in the mask frame 131 to support the mask 132 in a predetermined position, and these masks 132 are the first masks corresponding to the (right-handed) first substrate 121 The cover 132 corresponds to the second cover 132 of the second substrate 121 (on the left hand side).

According to some embodiments that can be combined with other embodiments described herein, the substrate 121 can be supported by a substrate support 126 that is connected to the alignment unit 112. The alignment unit 112 can adjust the position of the substrate 121 relative to the mask 132. FIG. 10 is a schematic diagram of an embodiment in which the substrate support 126 is connected to the alignment unit 112. Therefore, the substrate is moved relative to the mask 132 to provide proper alignment between the substrate and the mask during the deposition of organic material. According to further embodiments that can be combined with other embodiments described herein, the mask 132 and/or the mask frame 131 supporting the mask 132 can be selectively or additionally connected to the alignment unit 112. According to some embodiments, the mask may be positioned relative to the substrate 121 or both the mask 132 and the substrate 121 may be positioned relative to each other. The alignment unit 112, which is equipped to adjust the position of the substrate 121 and the mask 132 relative to each other, provides a properly aligned shield during deposition, which is beneficial to the manufacture of high-quality, light-emitting diode (LED) displays , Or OLED display manufacturing.

As shown in FIG. 10, the linear guide 320 provides the direction of the translational movement of the material source 100d. A mask 132 is provided on both sides of the material source 100d. The mask 132 may extend substantially parallel to the direction of translational motion. Furthermore, the substrate 121 on the opposite side of the material source 100d may also extend substantially parallel to the direction of translational motion. According to typical embodiments, the substrate 121 may move into the vacuum chamber 110 via the valve 205 and leave the vacuum chamber 110. The deposition apparatus 300 may include respective transfer tracks for transferring the substrates 121. For example, the transfer track may extend parallel to the position of the substrate as shown in FIG. 10 and enter or leave the vacuum chamber 110.

Generally, other rails are provided to support the mask frame 131 and the mask 132. Therefore, some embodiments that may be combined with other embodiments described herein may include four tracks in the vacuum chamber 110. In order to move one of these masks 132 out of the chamber, for example, to clean the mask, the mask frame 131 and the mask can be moved onto the transfer path of the substrate 121. The respective mask frames can then leave or enter the vacuum chamber 110 on the transfer track for the substrate. Although it is possible to provide separate conveying tracks for the mask frame 131 to enter and leave the vacuum chamber 110, if only two tracks extend into and leave the vacuum chamber 110 and in addition the mask frame 131 can A suitable actuator or robot moves to each of the transfer tracks for the substrate, and the cost of ownership of the deposition apparatus 300 can be reduced. These two tracks are also the transfer tracks of the substrate.

FIG. 10 shows a schematic diagram of an exemplary embodiment of the material source 100d. The material source 100d includes a support 102. The support 102 is assembled to move in translation along the linear guide 320. The support 102 supports two evaporation crucibles 104 and two distribution tubes 106. The distribution tube 106 is provided above the evaporation crucible 104. The steam generated in the evaporation crucible can move upward and leave one or more nozzles or outlets of the distribution tube.

According to the embodiments described herein, the material source includes one or more evaporation crucibles and one or more distribution tubes, wherein each of the one or more distribution tubes can be in fluid communication with the one or more evaporation crucibles Each of them. Several applications for OLED device manufacturing include processing features, where one, two or more organic materials are evaporated simultaneously. Therefore, as shown in, for example, FIG. 10, two distribution tubes and corresponding evaporation crucibles may be provided adjacent to each other. Therefore, the material source 100d may also mean an array of material sources, for example, in which more than one organic material system evaporates simultaneously. As described herein, the material source array itself may mean a material source for two or more organic materials. For example, the material source array may provide three materials for evaporation and deposition on a substrate. According to some embodiments, an array of material sources may be assembled for providing the same material simultaneously from different material sources.

The one or more nozzles of the distribution tube may include, for example, one or more nozzles that may be provided in a spray head or another steam distribution system. The nozzle provided in the distribution pipe described herein may be the nozzle described in the embodiments described herein, for example, the nozzle described in relation to FIGS. 8a to 8d. The distribution pipe can be understood as including an internal space with a plurality of openings, so that the pressure in the distribution pipe is higher than the pressure on the outside of the distribution pipe, for example, at least one order of magnitude. In one example, the pressure in the distribution tube may be between about ^10-2 to about 10 ^-3 mbar.

According to several embodiments that can be combined with other embodiments described herein, the rotation of the distribution tube can be provided by the rotation of the evaporator control housing, at least the distribution tube system It is fixed on the evaporator control housing. By moving the material source along the curved portion of the circular track, the distribution tube rotation can be additionally or selectively provided. Generally speaking, the evaporation crucible is also fixed on the evaporator control housing. Therefore, the material source includes a distribution tube and an evaporation crucible. For example, the distribution tube and the evaporation crucible are rotatably fixed together.

According to some embodiments that can be combined with other embodiments described herein, the distribution tube or the evaporation tube can be designed in a triangular shape so that the openings or nozzles of the distribution tube can be as close as possible to each other. Bringing the openings or nozzles of the distribution tube as close as possible to each other provides, for example, improved mixing of different organic materials, for example for the case of co-evaporating two, three or even multiple different organic materials.

According to several embodiments described herein, the width of the outlet side of the distribution tube (including the side of the distribution tube with openings) is 30% or less of the maximum dimension of the profile. In view of this, the opening of the distribution pipe or the nozzle of the adjacent distribution pipe can be provided at a small distance. This smaller distance improves the mixing of several organic materials that evaporate next to each other. Furthermore, independently of improving the mixing of organic materials, the width of the wall facing the substrate in a substantially parallel manner can be additionally or selectively reduced. Therefore, the surface area of the wall facing the substrate in a substantially parallel manner can be reduced. This configuration reduces the heat load provided to the mask or substrate, which is supported in the deposition area, or slightly before the deposition area.

In view of the triangular shape of the material source, the area radiated towards the mask is additionally or selectively reduced. In addition, a stack of metal plates can be provided to reduce the heat transfer from the material source to the shield. The stack of metal plates is exemplified by up to 10 metal plates. According to some embodiments that can be combined with other embodiments described herein, the heating mask The piece or metal plate may be provided with orifices for the nozzle, and may be attached to at least the front side of the source, that is, the side facing the substrate.

Although the embodiment shown in FIG. 10 provides a deposition apparatus with a movable source, a person with ordinary knowledge can understand that the above-mentioned embodiment can also be provided in several deposition apparatuses, where the substrates are deposited during processing China Mobile. For example, the substrate to be coated can be guided and driven along a source of static material.

The embodiments described herein are particularly related to the deposition of organic materials, such as the manufacture of OLED displays on large-area substrates. According to some embodiments, a large area substrate or a carrier supporting one or more substrates, that is, a large area carrier, may have a size of at least 0.174 m ² . For example, the deposition equipment may be suitable for processing large area substrates, such as the 5th generation, 7.5th generation, 8.5th generation, or even the 10th generation, the 5th generation corresponds to a substrate of about 1.4m ² (1.1mx 1.3 m), 7.5G corresponding to the substrate ² of about 4.29m (1.95mx 2.2m), corresponding to about 8.5 Generation of 5.7m ² substrate (2.2mx 2.5m), the first passage 10 ² corresponding to the substrate of about 8.7m (2.85m×3.05m). Even higher generations such as the 11th and 12th generations and corresponding substrate areas can be applied in a similar manner. According to typical embodiments that can be combined with other embodiments described herein, the substrate thickness can be from 0.1 to 1.8 mm and the support configuration for the substrate can be adapted to such substrate thickness. However, in particular, the thickness of the substrate may be about 0.9 mm or less, for example 0.5 mm or 0.3 mm, and the supporting arrangement is suitable for such substrate thickness. In general, the substrate can be made of any material suitable for material deposition. For example, the substrate may be selected from the group consisting of glass (for example, soda lime glass, borosilicate glass, etc.), metal, polymer, ceramic, composite material, carbon fiber material, or any other material or a combination of materials that can be deposited by a deposition process Made of materials.

According to some embodiments, a method for depositing evaporated material on a substrate in a vacuum deposition chamber is provided, the vacuum deposition chamber having a chamber space. The chamber space can be understood as the space contained in the chamber wall, and especially the space provided at the same pressure specification. A flowchart 400 illustrating the method described herein is shown in FIG. 11. The method at block 410 includes using a first material evaporator to evaporate the first material, the first material evaporator being arranged in the chamber space. For example, the first material evaporator may be a source for evaporating organic materials. In one example, the evaporator may be suitable for evaporating materials having an evaporation temperature of about 150° to about 500°. In some embodiments, the source of material may be a crucible.

In block 420, the method includes providing the evaporated first material to the first distribution tube, the first distribution tube including a first distribution tube housing. According to the embodiments described herein, the first distribution pipe system is in fluid communication with the first material evaporator. According to some embodiments, the distribution tube may be a distribution tube as described above, for example, a linear distribution tube, or a distribution tube as shown in FIGS. 1a to 9b. Providing the evaporated first material to the first distribution tube further includes providing a pressure of about 10 ^-2 -10 ^-1 mbar in the first distribution tube. At block 430, the evaporated material is directed through one or more of the first nozzles in the first distribution tube housing. Generally speaking, the one or more nozzles of the first nozzles have an opening length and an opening size, wherein guiding the evaporated material through the one or more nozzles further includes guiding the evaporated material to have a length to size One or more nozzles with a ratio equal to or greater than 2:1. According to some embodiments, the nozzle that guides the evaporated material may be the nozzle as described in the above embodiment. In one example, the nozzle may be lockable on the distribution tube housing. In an embodiment that can be combined with other embodiments described herein, the nozzle may include a material that is chemically inert to the evaporated organic material, such as the nozzle shown in Figures 7a to 7d. According to some embodiments, the nozzle may be part of the distribution tube, as exemplarily shown and described in relation to Figures 9a and 9b.

In block 440, the evaporated material is released into the chamber space toward the substrate in the chamber space. Generally, the chamber space provides a pressure of 10 ^-5 to 10 ^-7 mbar, more typically about 10 ^-6 to about 10 ^-7 mbar. For example, the vacuum chamber may include pumps, seals, and the like to enable the chamber to be evacuated to a pressure of about 10 ^-5 to 10 ^-7 mbar and to maintain the pressure in the vacuum chamber . In some embodiments, the steam plumes released from the nozzle may have a similar cos ⁶ distribution. According to some embodiments described herein, a steam plume with a similar cos ⁶ distribution may provide a smaller shadowing effect than a steam plume with a similar cos ¹ distribution. This effect is illustrated in Figures 3a to 3c, for example. In the case of evaporated material with a similar cos ⁶ distribution, the uniformity of material deposition on the substrate and the accuracy of deposition can be increased.

According to some embodiments, the method further includes evaporating the second material using a second material evaporator in the chamber space, providing the evaporated second material to the second distribution tube, the second distribution tube including a second distribution tube housing. According to some embodiments, the second material may be the same material as the first material. In other embodiments, the second material is different from the first material. In some embodiments, the second distribution tube may be a distribution tube as described above. Generally speaking, the second distribution pipe system is in fluid communication with the second material evaporator, and providing evaporated second material to the second distribution pipe system includes providing a pressure of about 10 ^-2 -10 ^-1 mbar in the second distribution pipe . Vacuum chambers and/or material deposition configurations can be provided with pumps, seals, valves, and the like to provide and maintain the pressure in the distribution tube. The method may further include guiding the evaporated material through one or more of the second nozzles in the second distribution tube housing. In some embodiments, the evaporated first material and the evaporated second material are respectively guided through the one or more first nozzles of the first distribution tube and the second distribution tube at a distance of less than 30 mm Or multiple second nozzles. A distance of less than 30mm allows accurate deposition of different evaporated materials on the substrate, for example for the manufacture of OLED displays or the like.

According to several embodiments that can be combined with other embodiments described herein, the evaporated first material is released from the one or more first nozzles of the first distribution tube in the first distribution direction, the first distribution direction It is parallel to the second distribution direction of the one or more second nozzles of the second distribution tube, or deviates from the parallel arrangement by at most 5°. The parallel arrangement of the distribution directions can provide the defined deposition and mixing characteristics of different evaporated materials from different material sources.

In still other embodiments that can be combined with other embodiments described herein, the one or more nozzles of at least one of the first distribution tube and the second distribution tube include a material that is a system of evaporated organic materials It is chemically inert. The nozzle includes an inert material (for example, an inert material coated as a nozzle opening), and the evaporated material passing through the nozzle is not affected by the nozzle material and is maintained in a desired state. For example, the composition of the evaporated material remains the same before and after the nozzle. In one example, the direction, flow rate, and pressure may still be affected by the nozzle.

In some embodiments, this method includes heating the distribution tube to The evaporation temperature of the material accumulated on the substrate or above. The heating of the distribution tube can be performed by a heating device. In one example, the effectiveness of the heating device can be supported by the heating shield, as exemplified in the description above regarding Figures 8a to 8c.

According to some embodiments, the use of a material deposition configuration as described herein, and/or the use of a distribution tube as described herein are provided.

In view of the description of several embodiments above, these embodiments include:

Embodiment 1. An apparatus for depositing evaporated material on a substrate in a vacuum chamber, including a first material source, the first material source includes a first material evaporator, and is configured to evaporate a first material A first distribution pipe, including a first distribution pipe casing, wherein the first distribution pipe fluid flows through the first material evaporator; and several first nozzles, located in the first distribution pipe casing, of which One or more nozzles of the first nozzle include an opening length and an opening size, wherein the ratio of the opening length to the opening size of the one or more nozzles of the first nozzles is greater than or equal to 2:1 ; And a second material source, including a second material evaporator, the second material evaporator is equipped to evaporate a second material; a second distribution tube, including a second distribution tube housing, wherein the second distribution tube system The fluid flows through the second material evaporator; and several second nozzles located in the second distribution tube housing; wherein at least one of the first nozzles and at least one second nozzle of the second nozzles The distance between them is less than or equal to 50mm.

Embodiment 2. The apparatus according to embodiment 1, wherein the distance between the at least one first nozzle of the first nozzles and the at least one second nozzle of the second nozzles is a horizontal distance.

Embodiment 3. The apparatus according to any one of the preceding embodiments, wherein a distance between the first distribution tube and the second distribution tube is less than or equal to 30 mm.

Embodiment 4. The apparatus according to any of the preceding embodiments, wherein the distance between the at least one first nozzle of the first nozzles and the at least one second nozzle of the second nozzles is at least one A distance between the first center point of the first nozzle and the second center point of the at least one second nozzle.

Embodiment 5. The apparatus according to any one of the preceding embodiments, wherein the first nozzle provides a first distribution direction, and the second nozzle provides a second distribution direction, and wherein the first distribution direction and the second distribution direction They are arranged in such a way that they deviate from each other by up to 5° (up to 5°).

Embodiment 6. An apparatus for depositing evaporated material on a substrate in a vacuum chamber, including a first material source, including a first material evaporator, the first material evaporator is equipped to evaporate a first Material; a first distribution tube, including a first distribution tube housing, wherein the first distribution tube is in fluid communication with the first material evaporator; and a number of first nozzles are located in the first distribution tube housing, where this One or more first nozzles of the first nozzles include an opening length and an opening size and provide a first distribution direction, wherein the opening length of the one or more nozzles of the first nozzles corresponds to the opening size The ratio is greater than or equal to 2:1; and a second material source, including a second material evaporator, which is equipped to evaporate a second material; A second distribution pipe, including a second distribution pipe casing, wherein the second distribution pipe is in fluid communication with the second material evaporator; and a plurality of second nozzles are located in the second distribution pipe casing, of which One or more of the two nozzles provide a second distribution direction; wherein the first distribution direction of the one or more nozzles of the first nozzles and the second of the one or more nozzles of the second nozzles The distribution direction is arranged from the parallel deviation up to 5°.

Embodiment 7. The apparatus according to embodiment 6, wherein the first distribution direction corresponds to an average evaporation direction of plumes of evaporated material released from the one or more nozzles of the first nozzles, and wherein The second distribution direction corresponds to an average evaporation direction of the plumes of evaporated material released from the one or more nozzles of the second nozzles.

Embodiment 8. The apparatus according to any one of embodiments 6 to 7, wherein a distance between at least one of the first nozzles and at least a second nozzle of the second nozzles is less than or Equivalent to 50mm.

Embodiment 9. The apparatus according to any one of the preceding embodiments, wherein the one or more nozzles of the nozzles of at least one of the first distribution tube and the second distribution tube include a material that has evaporated The organic material system is chemically inert.

Embodiment 10. A distribution tube for depositing evaporated material on a substrate in a vacuum chamber, the distribution tube includes a distribution tube housing; and a nozzle located in the distribution tube housing, wherein the nozzle includes a Opening, the opening has an opening length and an opening size; wherein the opening length of the nozzle is larger than the opening size Is equivalent to 2:1; and where the nozzle includes a material that is chemically inert to an evaporated organic material system.

Embodiment 11. The distribution tube according to embodiment 10, wherein the nozzle material is chemically inert to the evaporated organic material at a temperature of at most 650°C.

Embodiment 12. The distribution tube according to any one of embodiments 10 to 11, wherein the inside of the opening of the nozzle is coated with a material that is chemically inert to an evaporated organic material.

Embodiment 13. The distribution tube according to any one of embodiments 10 to 12, wherein the material that is chemically inert to an evaporated organic material is selected from stainless steel, quartz glass, titanium, tantalum, niobium, and diamond-like coatings ( DLC).

Embodiment 14. An apparatus for depositing evaporated material on a substrate in a vacuum chamber, including a first material source, the first material source includes a first material evaporator, and is configured to evaporate a first material ; A distribution tube according to any one of embodiments 11 to 14, which is a first distribution tube of the device, wherein the first distribution tube is in fluid communication with the first material evaporator; several first nozzles are located in the first distribution tube In a distribution tube housing; and a second material source, including a second material evaporator, which is assembled to evaporate a second material; and a second distribution tube, including a second distribution tube housing , Wherein the second distribution pipe is in fluid communication with the second material evaporator; and several second nozzles are located in the second distribution pipe housing; wherein at least one of the first nozzles and at least one of the second nozzles A distance between one is less than or equal to 50 mm; or at least one of the first nozzles is assembled to provide a first distribution direction and at least one of the second nozzles is assembled to provide a first two The distribution direction, in which the first distribution direction and the second distribution direction are arranged in such a manner that the deviation from the parallel is at most 5°.

Embodiment 15. An apparatus or distribution tube for depositing evaporated material according to any of the preceding embodiments, wherein a nozzle having a ratio of opening length to opening size of at least 2:1 forms cos of evaporated organic material ⁶ -shaped steam plume.

Embodiment 16. A vacuum deposition chamber, including the apparatus for depositing evaporated material according to any one of Embodiments 1 to 9; and a substrate support for supporting the substrate during deposition; wherein these of the apparatus The distance between at least one of the distribution tubes and the substrate support is less than 250mm.

Embodiment 17. The vacuum deposition chamber according to Embodiment 16 further includes a mask between the substrate support and the device.

Embodiment 18. The vacuum deposition chamber according to any one of Embodiments 16 to 17, wherein the apparatus is movable in the vacuum deposition chamber.

Embodiment 19. A method for depositing an evaporated material on a substrate in a vacuum deposition chamber, the vacuum deposition chamber has a chamber space, the method includes using a first disposed in the chamber space The material evaporator evaporates a first material; providing the evaporated first material to a first distribution tube, the first distribution tube includes a first distribution tube housing, wherein the first distribution tube is about One pressure of 10 ^-2 -10 ^-1 mbar is in fluid communication with the first material evaporator; guiding the evaporated first material through one or more nozzles of the first nozzles in the first distribution tube housing; Wherein the one or more nozzles of the first nozzles include an opening length and an opening size and have a ratio of opening length to opening size greater than or equal to 2:1; and oriented in the chamber space One of the substrates releases the evaporated first material into the chamber space, wherein the chamber space provides a pressure of about 10 ^-5 to 10 ^-7 mbar.

Embodiment 20. The method according to embodiment 19, comprising using a second material evaporator in the chamber space to evaporate a second material; providing the evaporated second material to a second distribution tube, the second distribution tube including A second distribution pipe housing, wherein the second distribution pipe is in the second distribution pipe at a pressure of about 10 ^-2 -10 ^-1 mbar in fluid communication with the second material evaporator; and guiding the evaporated second The material passes through one or more nozzles of several second nozzles in the second distribution tube housing; wherein the evaporated first material and the evaporated second material are respectively guided through the first at a distance of less than 50 mm The one or more first nozzles of the distribution tube and the one or more second nozzles of the second distribution tube, the distance is located between the one or more first nozzles of the first distribution tube and the second distribution tube Between the one or more second nozzles; and/or where the evaporated first material is released from the one or more first nozzles of the first distribution tube in a first distribution direction, the first distribution direction It is parallel to the second distribution direction of the one or more second nozzles of the second distribution tube, or deviates from the parallel arrangement by at most 5°; and/or where at least one of the first distribution tube and the second distribution tube The one or more nozzles include a material that is chemically inert to the evaporated organic material.

Embodiment 21. The apparatus of embodiment 1, 6, or 14, wherein the first distribution tube and the second distribution tube extend in a substantially vertical direction.

In summary, although the present invention has been disclosed as above with examples, it is not intended to limit the present invention. Those with ordinary knowledge in the technical field to which the present invention belongs can make various modifications and retouching without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be deemed as defined by the scope of the attached patent application.

100: Material deposition configuration

102a: First material evaporator

102b: Second material evaporator

102c: third material evaporator

106a: the first distribution tube

106b: Second distribution tube

106c: Third distribution tube

712: Nozzle

A: area

Claims (13)

A vacuum deposition chamber includes: a material deposition configuration having a plurality of distribution tubes and a plurality of nozzles provided in the distribution tubes; and a substrate support for supporting a substrate during deposition, wherein the material is deposited A distance between at least one of the distribution tubes and the substrate support is less than 250 mm; and wherein a cross section of the distribution tubes includes a main area, which corresponds to a part of a triangle A width of a wall of the distribution tubes of the substrate is smaller than the largest dimension of the cross-section of the distribution tubes; wherein a ratio of the length to the size of the nozzles is equal to or greater than 2:1. The vacuum deposition chamber as described in item 1 of the scope of the patent application, wherein the cross section of the distribution tubes has a plurality of rounded corners. The vacuum deposition chamber as described in item 2 of the scope of the patent application, wherein the width of the wall is 30% or less of the largest dimension of the profile of the distribution pipes. The vacuum deposition chamber as described in item 1 or 2 of the patent application scope, wherein the distribution pipes have one of the evaporated materials dispersed, including an angle of about 30° or less. The vacuum deposition chamber of claim 1 or 2, wherein the nozzles of the adjacent distribution tubes have a distance of less than 50 mm from each other. The vacuum deposition chamber as described in item 5 of the patent application range, wherein the distance between the nozzles of the adjacent distribution tubes is a first center point of a first nozzle of a first distribution tube And a distance between a second center point of a second nozzle of a second distribution tube. The vacuum deposition chamber as described in item 1 or 2 of the patent application, wherein a first evaporated material is separated from one or more of the first distribution tubes in a first distribution direction from one of the distribution tubes The nozzles are released, and the first distribution direction deviates from the parallel by a maximum of 5° from the second distribution direction of one of the second distribution tubes of the distribution tubes or one of the plurality of second nozzles. The vacuum deposition chamber as described in item 1 of the scope of the patent application, wherein the ratio forms a cos ⁶ -shaped vapor plume of evaporated organic material. The vacuum deposition chamber as described in item 1 or 2 of the patent application scope, wherein at least one of the distribution tubes is used for evaporated organic materials. The vacuum deposition chamber as described in item 1 or 2 of the patent application scope further includes: a mask frame located between the substrate support (126) and the material deposition arrangement (100). The vacuum deposition chamber as described in item 10 of the patent application scope further includes: a pixel mask, located on the mask frame, wherein the pixel mask (132) includes a plurality of pixel openings, having 50 μm x 50 μm or more One less size. The vacuum deposition chamber as described in item 1 or 2 of the patent application scope, wherein the material deposition arrangement (100) is movable in the vacuum deposition chamber (110). The vacuum deposition chamber of claim 1 or 2, wherein the distribution tubes extend in a substantially vertical direction.

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