TWI681194B - Supplementary shaft sleeve, detection needle and supplementary detection device - Google Patents
Supplementary shaft sleeve, detection needle and supplementary detection device Download PDFInfo
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Abstract
本發明提供一種補充軸套、檢測針及補充型檢測裝置,補充軸套具有一封閉端、一開放端、一容置槽及至少一第一固接部,封閉端具有一第一接觸部,容置槽由開放端向封閉端凹設形成,第一固接部位於容置槽內表面。檢測針供以設置於補充型檢測裝置之一基座的容置孔內,且具有相對設置之一檢測端及一連接端,檢測端則具有一第二接觸部、一第二固接部及一擋止部。當任一檢測針之第二接觸部有所磨損時,將補充軸套套設於檢測針之檢測端後,即可以第一接觸部取代第二接觸部進行檢測作業,免除維修時須將檢測針整體拆卸更換之不便,加速維修作業之進行,同時亦可降低檢測針的更換成本。 The invention provides a supplementary bushing, a detection needle and a supplementary detection device. The supplementary bushing has a closed end, an open end, an accommodating groove, and at least a first fixed portion. The closed end has a first contact portion. The accommodating groove is concavely formed from the open end to the closed end, and the first fixing portion is located on the inner surface of the accommodating groove. The detection needle is provided in the accommodating hole of one base of the supplementary detection device, and has a detection end and a connection end oppositely arranged, and the detection end has a second contact portion, a second fixed portion and One stop. When the second contact part of any detection needle is worn, the supplementary bushing is set after the detection end of the detection needle, then the first contact part can replace the second contact part to perform the detection operation, and the detection needle must be removed during maintenance The inconvenience of overall disassembly and replacement accelerates the maintenance work, and at the same time reduces the replacement cost of the detection needle.
Description
本發明係與電性檢測裝置領域相關,尤其是一種可以補充方式使得檢測針高度具備相同水平高度,並易於維修之補充軸套、檢測針及補充型檢測裝置。 The invention relates to the field of electrical detection devices, in particular to a supplementary bushing, a detection pin and a supplementary type detection device that can make the height of the detection needle have the same level height and are easy to maintain.
於現今之半導體產業中,製作完成的產品如IC晶片等皆須會透過裝設有探針之電性檢測裝置來確認其電性是否可正常運作。在檢測過程中,探針會大量測量不同晶片的待測物,測試時,會藉由移動機構使探針位移,直至觸碰到晶片之接點,而後再返回原位置,而探針於接觸時產生的摩擦力會造成探針前端的磨耗,因此在多次檢測作業後,探針的長度會因磨損而減少,最終導致長度不足而無法觸碰到晶片接點,使得此一探針卡失去檢測效能。 In the current semiconductor industry, finished products, such as IC chips, are required to confirm whether their electrical performance is normal through electrical detection devices equipped with probes. During the inspection process, the probe will measure a large number of objects on different wafers. During the test, the probe will be displaced by the moving mechanism until it touches the contact of the wafer, and then returns to the original position, and the probe is in contact The friction generated at the time will cause the wear of the front end of the probe, so after multiple inspection operations, the length of the probe will be reduced due to wear, and eventually the length will be insufficient to touch the chip contacts, making this probe card Loss of detection efficiency.
當前述情況發生後,只能將長度不足的磨損探針整隻予以更換,惟探針尺寸相當微小且結構複雜,再者針與針的間距亦相當接近,因此執行將探針拆開換針再重組之作業,需要耗費極大量的時間,而有礙維修作業之進行,大幅降低了檢測速度。另外,探針因檢測摩擦產生的磨損,往往只有探針前端供與待測物接觸的部分,其餘部分仍可正常運作,但在更換上卻須將整隻探針移除並組裝全新的探針,是以,亦會造成檢測裝置之維修成本隨之增加。 When the aforementioned situation occurs, only worn probes of insufficient length can only be replaced, but the probe size is quite small and the structure is complicated, and the distance between the needle and the needle is also very close, so the probe is disassembled and the needle is replaced The reorganization operation requires a lot of time, which hinders the maintenance operation and greatly reduces the detection speed. In addition, the wear of the probe due to the detection of friction is often the only part of the probe that is in contact with the object to be measured, and the rest can still function normally. However, the entire probe must be removed and a new probe must be assembled for replacement. Therefore, the maintenance cost of the detection device will increase accordingly.
有鑑於此,本發明人係構思一種補充軸套、檢測針及補充型檢測裝置,以解決現今電性檢測作業上,所需之高維修成本及時間,提供更易於使用及具備高維修速度之檢測裝置。 In view of this, the present inventors conceived a supplementary bushing, a detection needle and a supplementary detection device to solve the high maintenance cost and time required for the current electrical testing operation, providing a more easy-to-use and high-maintenance speed Detection device.
本發明之一目的,旨在提供一種補充軸套、檢測針及補充型檢測裝置,其係可讓電性檢測裝置之維修作業更為簡易,並可避免浪費仍可使用之結構,有效提升維修效率與降低所需時間。 An object of the present invention is to provide a supplementary bushing, a detection needle and a supplementary detection device, which can make the maintenance operation of the electrical detection device easier, and can avoid wasteful structures that can still be used, effectively improving maintenance Efficiency and reduction of time required.
為達上述目的,本發明於一實施例中揭示一種補充軸套,供以套設於一檢測針,包含:一封閉端,具有一第一接觸部,供與一待測物接觸形成導通;一開放端,與該封閉端相對設置;一容置槽,由該開放端向該封閉端凹設形成;及至少一第一固接部,設於該容置槽內表面,其中,該補充軸套係自該開放端套設於該檢測針之一檢測端,且透過該第一固接部與該檢測端之至少一第二固接部相互組設,進而使該檢測端位於該容置槽內。藉此,即可以套設之取代方式,來確保該檢測針於電性檢測上的準確性。 In order to achieve the above object, the present invention discloses in one embodiment a supplementary shaft sleeve, which is sleeved on a detection needle and includes: a closed end with a first contact portion for contacting with an object to form a conduction; An open end opposite to the closed end; an accommodating groove formed by recessing the open end toward the closed end; and at least a first fixed portion provided on the inner surface of the accommodating groove, wherein the supplement The shaft sleeve is sleeved on one of the detection ends of the detection needle from the open end, and the first fixing part and the at least one second fixing part of the detection end are mutually arranged, so that the detection end is located in the container Place in the slot. In this way, a replacement method can be set to ensure the accuracy of the detection needle in electrical detection.
於另一實施例中,本發明係揭示一種檢測針,供以設置於一基座之一容置孔內,且可與如前所述之補充軸套相互組接,該檢測針具有一檢測端及一連接端,該連接端供與一檢測機台電性連接,該檢測端相對該連接端設置,其特徵在於:該檢測端更具有一第二接觸部、至少一第二固接部及一擋止部,該第二接觸部位於該檢測端之端末,該第二固接部位於該檢測端之外表面,該擋止部係位於該第二固接部之一端,且該第二固接部係對應該第一固接部設置,藉此該檢測端與該補充軸套係透過該第一固接部及該第二固接部相互組接,並藉由該擋止部而形成停止定位。透過該檢測端之結構設置,使該檢測針之該第二接觸部有磨損時,將該補充軸套組設於該檢測端,即可使該檢測針透過該第一接觸部續以進行檢測作業。 In another embodiment, the present invention discloses a detection needle, which is provided in a receiving hole of a base and can be mutually assembled with the supplementary bushing as described above, the detection needle has a detection And a connecting end, the connecting end is for electrical connection with a testing machine, the detecting end is disposed opposite to the connecting end, and is characterized in that the detecting end further has a second contact portion, at least a second fixed portion and A stop portion, the second contact portion is located at the end of the detection end, the second fixing portion is located at the outer surface of the detection end, the stop portion is located at one end of the second fixing portion, and the second The fixed portion is provided corresponding to the first fixed portion, whereby the detection end and the supplementary bushing are assembled with each other through the first fixed portion and the second fixed portion, and by the blocking portion Form stop positioning. Through the structural arrangement of the detection end, when the second contact portion of the detection needle is worn, the supplementary bushing is arranged on the detection end, so that the detection needle can continue through the first contact portion for detection operation.
於再一實施例中,本發明係揭露一種補充型檢測裝置,以供針對一待測物進行電性或訊號檢測,包含:一基座,具有複數容置孔;複數檢測針,供以設置於該等容置孔內,各該檢測針具有相對設置之一檢測端及一連接端,該連接端供與一檢測機台電性連接,該檢測端係突出於該容置孔外且具有一第二接觸部、至少一第二固接部及一擋止部,該第二接觸部位於該檢測端之端末,該第二固接部位於該檢測端之外表面,該擋止部係位於該第二固接部之一端,其中各該檢測針之該檢測端突出該容置孔外一預定長度,且該基座上之該等檢測針之該等擋止部,係位於同一水平高度;及至少一補充軸套,係具有相對設置之一封閉端及一開放端,且由該開放端向內凹設形成一容置槽,該容置槽內表面設有至少一第一固接部,該封閉端係具有一第一接觸部;其中,任一該檢測針之該第二接觸部具有磨損現象時,該補充軸套係透過該第一固接部與該第二固接部相互組接直至與該擋止部相抵而停止定位,藉此使該檢測針之該檢測端突出於該容置孔外之長度回復為該預定長度。在維修該檢測裝置時,若有該檢測針之該第二接觸部因檢測而受到磨損,僅需將該補充軸套組設於該檢測端,即可以該第一接觸部取代該第二接觸部續以進行檢測作業,除了可大幅提升維修速度外,亦可免除將該檢測針整體拆卸而造成零件浪費與作業不便等問題。 In yet another embodiment, the present invention discloses a supplementary detection device for electrical or signal detection of an object to be tested, including: a base with a plurality of receiving holes; a plurality of detection needles for setting In the accommodating holes, each of the detection pins has a detection end and a connection end disposed oppositely, the connection end is for electrical connection with a detection machine, the detection end protrudes outside the accommodation hole and has a A second contact portion, at least one second fixed portion and a stop portion, the second contact portion is located at the end of the detection end, the second fixed portion is located on the outer surface of the detection end, the stop portion is located One end of the second fixing portion, wherein the detection end of each detection needle protrudes a predetermined length outside the accommodating hole, and the stop portions of the detection needles on the base are at the same horizontal height ; And at least one supplementary bushing, which has a closed end and an open end oppositely provided, and a recess is formed inwardly from the open end, and an inner surface of the receptacle is provided with at least a first fixed connection The closed end is provided with a first contact portion; wherein, when the second contact portion of any of the detection pins is worn out, the supplementary bushing penetrates through the first fixed portion and the second fixed portion Assemble with each other until they stop against the stop portion to stop positioning, thereby the length of the detection end of the detection needle protruding outside the accommodating hole is restored to the predetermined length. When servicing the detection device, if the second contact portion of the detection needle is worn due to detection, it is only necessary to set the supplementary bushing at the detection end, that is, the first contact portion can replace the second contact The inspection work is continued, in addition to greatly improving the maintenance speed, it can also avoid the problems of wasting parts and inconvenience of operations caused by disassembling the detection needle as a whole.
基於前述各實施例,進一步地,可使該第一固接部係為沿該容置槽內表面繞設之內凹或外凸螺紋結構,該第二固接部對應該第一固接部為沿該檢測端外表面繞設之外凸或內凹螺紋結構,以讓該檢測針與該補充軸套以螺接方式組設。 Based on the foregoing embodiments, further, the first fixing portion may be a concave or convex thread structure wound along the inner surface of the accommodating groove, and the second fixing portion corresponds to the first fixing portion In order to wrap a convex or concave thread structure along the outer surface of the detection end, the detection needle and the supplementary shaft sleeve are screwed together.
此外,較佳者,該第一固接部之螺紋組數係大於該第二固接部之螺紋組數,藉此當該容置槽內表面除了對應該第一接觸部之區域外皆為該第一固接部,且該檢測端外表面除了對應該擋止部與該第二接觸部之區域外皆為該第二固接部時,確保該補充軸套可旋固至該擋止部位置。進一步地,為使針對待測物進行檢測時,得以刺穿待測物絕緣層以形成導通,該第一接觸部及該第二接觸部係具有至少一尖點結構,且該第一接觸部之該尖點結構高度係小於該第二接觸部之該尖點結構高度。此外,亦可使該第二固接部之延伸長度小於該檢測針達到最大行程時,該檢測端突出於該容置孔之長度,以避免檢測針產生無法復歸或卡住等情況。 In addition, preferably, the number of thread sets of the first fixed portion is greater than the number of thread sets of the second fixed portion, so that when the inner surface of the accommodating groove except the area corresponding to the first contact portion is When the first fixed portion and the outer surface of the detection end are the second fixed portion except for the area corresponding to the stop portion and the second contact portion, ensure that the supplementary bushing can be screwed to the stop部位置。 Department location. Further, in order to detect the object under test, the insulating layer of the object under test can be pierced to form a conduction, the first contact portion and the second contact portion have at least one point structure, and the first contact portion The height of the sharp point structure is smaller than the height of the sharp point structure of the second contact portion. In addition, the extension length of the second fixing portion may be less than the length of the detection needle reaching the maximum stroke, and the detection end protrudes beyond the length of the accommodating hole to avoid the situation that the detection needle cannot be returned or stuck.
較佳者,除了前述之螺接方式外,亦可使該第一固接部為一彈性片體且具有一V型彎折結構,該第二固接部之一端設有一擋止部,且該第二固接部為一滑槽,該擋止部突出於該檢測端表面且具有至少一卡掣槽,當該補充軸套套設於該檢測端時,該第一固接部係沿該第二固接部移動直至該第一固接部之彎折處卡掣於該卡掣槽內。 Preferably, in addition to the aforementioned screw connection method, the first fixing portion can also be an elastic sheet body with a V-shaped bending structure, and a stop portion is provided at one end of the second fixing portion, and The second fixing portion is a sliding groove, and the blocking portion protrudes from the surface of the detection end and has at least one catching groove. When the supplementary sleeve is sleeved on the detection end, the first fixing portion is along the The second fixing portion moves until the bent portion of the first fixing portion is locked in the locking groove.
或如此一實施例所述,該第一固接部具有一第一磁吸件,該第二固接部具有一第二磁吸件,當該第一固接部與該第二固接部相互組設而使該第一磁吸件接近或接觸至該第二磁吸件時,該第一磁吸件係具有一第一極性,該第二磁吸件係具有與該第一極性相反之該第二極性,而使該第一磁吸件與該第二磁吸件形成異極相吸狀態,其中該第一磁吸件與該第二磁吸件兩者磁性相吸之磁吸力係大於該補充軸套之重力,以達到使該補充軸套永久定位不鬆脫的效果。進一步地該第一固接部為一滑槽而具有該第一磁吸件,且該第二固接部之一端設有一擋止部,該擋止部為一凸肋,且該擋止部突出於該檢測端表面,該 第二固接部係為一凸塊,當該補充軸套套設於該檢測端時,該第二固接部係沿該第一固接部移動而透過該第一磁吸件與該第二磁吸件相互吸引固定。 Or as described in one embodiment, the first fixing part has a first magnetic part, the second fixing part has a second magnetic part, when the first fixing part and the second fixing part When the first magnetic element is close to or in contact with the second magnetic element, the first magnetic element has a first polarity, and the second magnetic element has the opposite polarity to the first polarity The second polarity, so that the first magnetic member and the second magnetic member form a different-pole attraction state, wherein the magnetic attraction force of the first magnetic member and the second magnetic member magnetically attracts It is greater than the gravity of the supplementary shaft sleeve, so as to achieve the effect of making the supplementary shaft sleeve permanently positioned and not loose. Further, the first fixing portion is a sliding groove and has the first magnetic member, and one end of the second fixing portion is provided with a stop portion, the stop portion is a convex rib, and the stop portion Protruding from the detection end surface, the The second fixing portion is a convex block. When the supplementary sleeve is sleeved on the detection end, the second fixing portion moves along the first fixing portion and passes through the first magnetic member and the second The magnetic members attract and fix each other.
綜上所述,本發明所揭露之補充軸套、檢測針及補充型檢測裝置,係跳脫過往針對檢測裝置之維修步驟,免除拆卸損壞針體之不便,以透過該補充軸套替換用以接觸待測物之部分的概念,使得維修作業中無須耗費大量時間,亦避免丟棄僅有該第二接觸部毀損之該檢測針所造成浪費情況。特別一提的是,用以進行電性檢測之該等檢測針,大多屬於微型結構,過往的換針作業,並非僅將整隻檢測針取下再替換上新的檢測針即可,而需要將整個檢測針拆解再將各元件逐一取出,接續將新的檢測針元件逐一置入該容置孔內,對於如此微小的結構,執行前述的更換作業實具備極大的不便性,且造成浪費。據此,本發明所提出之該補充軸套,即可有效地解決前述的諸多不便,採用簡單的組設步驟,即可讓遭受磨損的檢測針續以使用,對於該檢測針未損壞的部分亦可予以保留,當該補充軸套有所磨耗時,透過手動或機械輔助退出舊的該補充軸套並組設新的該補充軸套,即可讓該檢測針再繼續使用。 In summary, the supplementary shaft sleeve, the detection needle and the supplementary detection device disclosed in the present invention are skipped the previous maintenance steps for the detection device, so as to avoid the inconvenience of disassembling and damaging the needle body. The concept of the part touching the object to be tested eliminates the need to spend a lot of time in the maintenance operation, and also avoids the waste caused by discarding the detection needle with only the second contact part damaged. In particular, most of the test needles used for electrical testing are of a micro-structure. In the past, the needle replacement operation is not only to remove the entire test needle and replace it with a new test needle. Disassembling the entire test needle and then taking out the components one by one, and then placing the new test needle components one by one into the receiving hole . According to this, the supplementary bushing provided by the present invention can effectively solve the aforementioned many inconveniences, and a simple assembly step can be used to continue the use of the worn detection needle. For the part of the detection needle that is not damaged It can also be retained. When the supplementary bushing is worn out, the old supplementary bushing can be withdrawn manually and mechanically assisted and a new supplementary bushing can be assembled to allow the detection needle to continue to be used.
1‧‧‧補充軸套 1‧‧‧Supply shaft sleeve
10‧‧‧封閉端 10‧‧‧Closed end
101‧‧‧第一接觸部 101‧‧‧ First Contact Department
1011‧‧‧尖點結構 1011‧‧‧Pointed structure
11‧‧‧開放端 11‧‧‧Open
12‧‧‧容置槽 12‧‧‧Accommodation slot
13‧‧‧第一固接部 13‧‧‧First fixed part
131‧‧‧V型彎折結構 131‧‧‧V-shaped bending structure
132‧‧‧第一磁吸件 132‧‧‧First magnetic part
2‧‧‧檢測針 2‧‧‧Detection needle
20‧‧‧檢測端 20‧‧‧Detector
201‧‧‧第二接觸部 201‧‧‧Second Contact Department
2011‧‧‧尖點結構 2011‧‧‧Pointed structure
202‧‧‧第二固接部 202‧‧‧Second fixing part
2021‧‧‧第二磁吸件 2021‧‧‧Second magnetic part
203‧‧‧擋止部 203‧‧‧stop
2031‧‧‧卡掣槽 2031‧‧‧Card slot
21‧‧‧連接端 21‧‧‧Connector
3‧‧‧補充型檢測裝置 3‧‧‧ Supplementary detection device
30‧‧‧基座 30‧‧‧Dock
301‧‧‧容置孔 301‧‧‧accommodation hole
X‧‧‧預定長度 X‧‧‧ predetermined length
第1圖,為本發明較佳實施例之補充型檢測裝置示意圖(一)。 Figure 1 is a schematic diagram (1) of a supplementary detection device according to a preferred embodiment of the present invention.
第2圖,為本發明較佳實施例之補充型檢測裝置示意圖(二)。 Figure 2 is a schematic diagram (2) of a supplementary detection device according to a preferred embodiment of the present invention.
第3圖,為本發明較佳實施例補充軸套與檢測針之示意圖。 Figure 3 is a schematic diagram of the supplementary bushing and detection needle of the preferred embodiment of the present invention.
第4圖,為本發明較佳實施例另一實施態樣之補充軸套與檢測針示意圖。 Fig. 4 is a schematic diagram of a supplementary bushing and a detection pin according to another embodiment of the preferred embodiment of the present invention.
第5圖,為本發明較佳實施例再一實施態樣之補充軸套與檢測針示意圖。 FIG. 5 is a schematic diagram of a supplementary bushing and a detection pin according to another embodiment of the preferred embodiment of the present invention.
為使 貴審查委員能清楚了解本發明之內容,謹以下列說明搭配圖式,敬請參閱。 In order for your reviewing committee to clearly understand the content of the present invention, please refer to the following description and accompanying drawings.
請參閱第1~5圖,其係為本發明較佳實施例之補充型檢測裝置示意圖(一)、補充型檢測裝置示意圖(二)、補充軸套與檢測針之示意圖、另一實施態樣之補充軸套與檢測針示意圖及再一實施態樣之補充軸套與檢測針示意圖。為解決探針因電性檢測而造成之磨損問題,本發明人係以可快速替代損壞部分而無須在維修作業中進行過多不必要拆卸與更換動作之動機予以設計及構思,遂而提出一種用以套設於檢測針之補充軸套1、對應設計之檢測針2以及結合檢測針2與補充軸套1之補充型檢測裝置3,以解決習知技術所提之問題與缺失。以下即針對該補充軸套1、該檢測針2及該補充型檢測裝置3之技術特徵予以說明。
Please refer to Figures 1~5, which are schematic diagrams of a supplementary detection device (1), a schematic diagram of a supplementary detection device (2), a schematic diagram of a supplementary bushing and a detection needle, and another implementation form. The schematic diagram of the supplementary bushing and the detection needle and the schematic diagram of the supplementary bushing and the detection needle in another embodiment. In order to solve the problem of probe wear due to electrical detection, the present inventors designed and conceived a motive that can quickly replace damaged parts without too many unnecessary disassembly and replacement actions in maintenance operations. To solve the problems and deficiencies mentioned in the prior art, a
該補充軸套1係包含一封閉端10、一開放端11、一容置槽12及至少一第一固接部13。該封閉端10具有一第一接觸部101,供與一待測物(圖中未示)接觸形成導通。該開放端11與該封閉端10相對設置,該容置槽12由該開放端11向該封閉端10凹設形成,該第一固接部13係設於該容置槽12之內表面,其中,該補充軸套1係自該開放端11套設於該檢測針2之一檢測端20,且透過該第一固接部13與該檢測端20之至少一第二固接部202相互組設,進而使該檢測端20位於該容置槽12內。藉此,當該檢測針2有所損壞時,即可透過該補充軸套1達到替換效能,而無須將整隻檢測針2予以移除更換,大幅降低產品檢測與維修所需成本。甚或衍生之應用可為在該檢測針2尚未使用前,即先套設該補充軸套1,藉此延長該檢測針2之使用壽命。較佳者,該補充軸套1整體係為金屬之殼狀結構體,而可供套設於該檢測針2之該檢測端20,以達取代該檢測端20之功效。
The
而供與該補充軸套1相互組接之該檢測針2,係供以設置於一基座30之一容置孔301內,且具有一檢測端20及一連接端21,該連接端21供與一檢測機台(圖中未示)電性連接,該檢測端20相對該連接端21設置,其特徵在於該檢測端20更具有一第二接觸部201、至少一第二固接部202及一擋止部203,該第二接觸部201位於該檢測端20之端末,該第二固接部202位於該檢測端20之外表面,該擋止部203係位於該第二固接部202之一端,藉此該檢測端20與該補充軸套1係透過該第一固接部13及該第二固接部202相互組接,並藉由該擋止部203而形成停止定位。透過該第二固接部202,即可使該補充軸套1與該檢測端20相互組接,以在該檢測針2有所損壞時透過該補充軸套1進行維修替換,而無須捨棄整支檢測針2,且該補充軸套1之較佳長度係等於該第一接觸部201至該擋止部203之長度。較佳者,該檢測針2係可為垂直彈簧式測試針(Pogo Pin)、水平懸臂式測試針或微機電(MEMs)測試針等皆可,惟此已為該領域中之習知技藝,於此即不再贅述其詳細結構。此外,該擋止部203係可為突出於該檢測端20表面之點狀或面狀結構等,以使該補充軸套1套設於該檢測端時,得以與該擋止部相抵而停止定位。當然,亦可使該擋止部203為凹狀結構,而使得該第一固接部卡固於該擋止部203處形成停止定位。
The
進一步地,本發明之該補充型檢測裝置3係具有一基座30、複數之該檢測針2及至少一個該補充軸套1,以針對待測物進行電性或訊號檢測,該基座30具有複數容置孔301,而該等檢測針2供以設置於該容置孔301內,且各該檢測針2則如前述,具有相對設置之該檢測端20及該連接端21,並於該等檢測針2設於該等容置孔301內時,各該檢測針2之該檢測端20係突出於該容置孔301外且突出該容置孔301外一預定長度X,且該基座30上之該等檢測針2之該等擋止部
203,係位於同一水平高度,以使任一該檢測針2之該檢測端20與該補充軸套1組接後,皆可與其他該檢測針2之該檢測端20保持一樣的水平高度。其中,任一該檢測針2之該第二接觸部201具有磨損現象時,該補充軸套1係透過該第一固接部13與該第二固接部202相互組接,直至該補充軸套1與該擋止部203相抵,藉此使該檢測針2之該檢測端20突出於該容置孔301外之長度回復為該預定長度X,並可繼續進行檢測作業。即使後續該補充軸套1有所損壞,亦可快速拆卸,再替換上新的該補充軸套1即可繼續檢測作業,該等檢測針2之其他結構皆可重複再利用,進而降低每次維修成本。透過該補充軸套1,當該補充型檢測裝置3於使用後,其上任一該檢測針2之該第二接觸部201具有磨損現象,致使該檢測針2突出於該容置孔301外之長度小於該預定長度X時,將該補充軸套1套設於該檢測針2之該檢測端20即可取代磨損之該第二接觸部201,而利用該第二接觸部201作為新一次與待測物接觸之導通點,進而維持該補充型檢測裝置3之檢測精準度。
Further, the
於本實施例中,係以該第一固接部13係為沿該容置槽12內表面繞設之內凹或外凸螺紋結構,該第二固接部202對應該第一固接部13為沿該檢測端20外表面繞設之外凸或內凹螺紋結構,而使該補充軸套1可透過該第一固接部13以與該第二固接部202以旋入方式相互組固、旋出方式相互拆卸,具體而言可以手動或是透過機械輔助將該補充軸套1旋入該檢測端20或自該檢測端20旋出。亦即,當有任一該檢測針2之該檢測端20突出於該容置孔301之長度小於該預定長度X時,透過手動或是機械輔助的方式即可將該補充軸套1沿該檢測端20表面之該第二固接部202旋入固定,直至受到該擋止部203擋抵,而讓該補充軸套1旋入一固定長度,使得裝設有該補充軸套1之該檢測針2,與其他之該等檢測針2突出於該等容置孔301之長度皆為該預定長度X而呈現一致。於此係以該第一固接部
13為內凹螺紋結構,該第二固接部202為外凸螺紋結構,且該擋止部203係為該第二固接部202之螺紋終點為例說明,當然亦可使該第一固接部13與該第二固接部202之螺紋型態相互對調,且該擋止部203係可為突出於該檢測端20表面之環狀、弧狀等凸塊結構,以達停止定位功效。該第一固接部13及該第二固接部202之加工方式具體可採半導體製程、雷射加工或精密加工方式等,而該第二固接部202為外凸螺紋結構時,其外徑係大於該檢測端20之直徑,若為內凹螺紋結構時,其外徑係小於該檢測端20之直徑。此外,較佳者,為確保該補充軸套1套設至該檢測針2後皆可固定至該擋止部203位置,當該容置槽12內表面除了對應該第一接觸部101之區域外皆為該第一固接部13,且該檢測端20除該第二接觸部201及該擋止部203之區域外皆為該第二固接部202時,該第一固接部13之螺紋組數係大於該第二固接部202之螺紋組數,以確保該補充軸套1可組設至該擋止部203位置,限定該補充軸套1套設於該檢測針2之長度與位置。
In this embodiment, the first fixing
進一步地,為使該檢測針2及該檢測針2組設該補充軸套1後,在檢測時可刺穿待測物表面之絕緣層,因此可使該第一接觸部101及該第二接觸部201係具有至少一尖點結構1011、2011,且該第一接觸部101之該尖點結構1011高度係小於該第二接觸部201之該尖點結構2011高度。具體的實施態樣例如使該第一接觸部101與該第二接觸部201皆具有一個該尖點結構1011、2011,或是該第一接觸部101與該第二接觸部201皆具有多個該尖點結構1011、2011,而該等尖點結構1011、2011可為向外發散狀、向內聚集狀或是垂直向上排列狀等,皆可達到刺穿待測物表面之功效。另外,該第一接觸部101之該尖點結構1011高度,係小於該第二接觸部201之該尖點結構2011高度,係可防止該補充軸套1設
置於該檢測端20後,因該補充軸套1之厚度而導致組設該補充軸套1之該檢測針2,其突出於該容置孔301之長度無法與其他之該等檢測針2一致。
Further, after the
此外,該第二固接部202之延伸長度,係小於該檢測針2達到最大行程時,該檢測端20突出於該容置孔301之長度,以避免該檢測針2於檢測作動時受到該第二固接部202影響而導致無法復歸或是卡住等情況。
In addition, the extension length of the
特別一提的是,為了提升該檢測針2與該補充軸套1之組設定位強度,係可使該補充軸套1及該檢測針2之該檢測端20處具有磁性,而讓該檢測針2與該補充軸套1除了透過第一固接部13及該第二固接部202組固外,可進一步透過磁吸方式加強定位效果。一較佳的實施態樣為使該補充軸套1之相對兩側例如左右側分別具有相異磁極,而該檢測端20則對應該補充軸套1之極性設置而呈兩者組接後,磁極恰好為相反的設置狀態,藉此即可讓該補充軸套1與該檢測針2組接後透過異極相吸方式大幅提升定位與固定效果。而在該第一固接部13與該第二固接部202為相對應之外凸或內凹螺紋之結構下,則可使該補充軸套1及該檢測端20上的螺紋結構呈現一側為N或S極,另一側為相反的S或N極,當該補充軸套1與該檢測端20相互組設後,係形成異極相吸狀態,亦即該補充軸套1上的N極位置會對應該檢測端20上的S極位置,該補充軸套1上的S極位置會對應該檢測端20上的N極位置,使兩者相互吸附,消除該補充軸套1與該檢測針2組設後可能產生之脫離現象。
In particular, in order to increase the set position strength of the
請參閱第4圖,除了使該第一固接部13及該第二固接部202為螺紋結構外,於此實施態樣中,係揭示該第一固接部13為一彈性片體且具有一V型彎折結構131,且該第二固接部202為一滑槽,該擋止部203具有至少一卡掣槽2031,當該補充軸套1套設於該檢測端20時,該第一固接部13係沿該第二固接部
202移動直至該V型彎折結構131卡掣於該卡掣槽2031內。藉此,該補充軸套1係可透過該第一固接部13以與該第二固接部202相互,且該補充軸套1組設於該檢測端20時,係可讓該第一固接部13沿著該第二固接部202滑移,而後該V型彎折結構131即可卡掣於該卡掣槽2031內。於本實施態樣中,係以該補充軸套1具有二個該第一固接部13,及該檢測端20具有二個該第二固接部202為例。
Please refer to FIG. 4, in addition to making the first fixing
此外,除了前述實施態樣,於此更進一步地針對增設磁吸定位固定功能之結構態樣予以說明。本發明亦可使該第一固接部13具有一第一磁吸件132,以與具有一第二磁吸件2021之該第二固接部202相互組接,當該第一固接部13與該第二固接部202相互組固而使該第一磁吸件132接近或接觸至該第二磁吸件2021時,該第一磁吸件132係具有一第一極性,該第二磁吸件2021係具有與該第一極性相反之該第二極性,而使該第一磁吸件132與該第二磁吸件2021係形成異極相吸狀態,其中該第一磁吸件132與該第二磁吸件2021兩者磁性相吸之磁吸力係大於該補充軸套1之重力,以達到使該補充軸套1永久定位不鬆脫的效果,其中於此所述之重力係指該補充軸套1之重量所造成之力量。例如,使該第一磁吸件132為具磁性之物質例如鐵,而該第二磁吸件2021則為具N極、S極之磁鐵,當兩者接近或接觸時受到該第二磁吸件2021之作用,該第一磁吸件132視其較鄰近該第二磁吸件2021之N極或S極,而轉變為與該第二磁吸件2021相反之極性,達到異極相吸之功效。當然,使該第一磁吸件132為磁鐵,該第二磁吸件2021為具磁性之物質亦可達到相同功效。或是,使該第一磁吸件132與該第二磁吸件2021皆為具N極、S極之磁鐵,並使兩者以相異極性位置設置亦可達到異極相吸之功效。或如第5圖所示,於本實施態樣中,該第一固接部13為一滑槽且具有該第一磁吸件132,該擋止部203為一凸肋,該第二固接部202係為一凸塊,當該補
充軸套1套設於該檢測端20時,該第二固接部20係沿該第一固接部13移動而透過該第一磁吸件132與該第二磁吸件2021相互吸引固定。藉此,該補充軸套1與該檢測針2於組接時,係可透過該第一固接部13與該第二固接部202達到固定與防呆效果,且透過該第一磁吸件132及該第二磁吸件2021即可快速地吸固,而提升更換組裝上的速度。
In addition, in addition to the foregoing embodiment, the structural aspect of adding the magnetic positioning and fixing function is further described here. According to the present invention, the first fixing
應用時則如第1及2圖所示,該等檢測針2組設於該基座30之該等容置孔301後,各該檢測針2突出於各該容置孔301外之預定長度係為X,當針對待測物進行檢測,造成任一該檢測端20之該第二接觸部201有所磨損,致使該檢測針2突出於該容置孔301之長度小於該預定長度X時,即可將該補充軸套1套設於該檢測端20,以利用該第一接觸部101取代該第二接觸部201,使此一檢測針2突出於該容置孔301外之長度回復至該預定長度X,而與其他的該等檢測針2維持同一水平高度。且由於該等檢測針2設置於該等容置孔301後,各該擋止部203具有同一水平高度,因此即使該等第二接觸部201之磨損程度不一,但該補充軸套1於套設後仍可停止於同一位置,維持該等檢測針2之水平高度。當該補充軸套1之該第一接觸部101因為檢測而磨損時,只需將該補充軸套1拆下,再更換新的該補充軸套1至該檢測針2即可。藉此,係可大幅降低維修作業所需的時間與成本,使該第二接觸部201有損壞之該檢測針2,其他部分結構仍可繼續使用,無須將整隻該檢測針拆除汰換,進而於簡化維修流程之情況下,仍可達到「換針」之目的。
As shown in Figs. 1 and 2, in application, after the detection pins 2 are set in the
綜上所述,本發明所揭露之補充軸套1、檢測針2及補充型檢測裝置3,係跳脫過往檢測裝置之維修作業,免除拆卸損壞針體之不便,以透過該補充軸套1替換用以接觸待測物之部分的概念,使得維修作業中無須耗費大量時
間,亦避免丟棄僅有該第二接觸部201毀損之該檢測針2所造成浪費情況。特別一提的是,用以進行電性檢測之該等檢測針,大多屬於微型結構,過往的換針作業,並非僅將整隻檢測針取下再替換上新的檢測針即可,而需要將整個檢測針拆解再將各元件逐一取出,接續將新的檢測針元件逐一置入該容置孔內,對於如此微小的結構,執行前述的更換作業實具備極大的不便性,且造成浪費。因此,若為了降低維修作業之難度與不便,變更基座部分與檢測針之組裝結構,或是直接設變檢測針本身結構,皆於解決維修問題同時卻衍生了生產或組裝上的不變,尤其如前所述,檢測針本身屬於具備微型尺寸之結構,對於檢測針內部結構予以重新設計、製造與組裝之難度更是極高,對於廠商而言實作上會遭遇極大的問題。據此,本發明所提出之該補充軸套1、檢測針2與補充式檢測裝置3,即可有效地解決前述的諸多不便,採用簡單的組設步驟,即可讓遭受磨損的檢測針2續以使用,對於該檢測針2未損壞的部分亦可予以保留,當該補充軸套1有所磨耗時,透過手動或機械輔助退出舊的該補充軸套1並組設新的該補充軸套1,即可讓該檢測針2再繼續使用。
In summary, the
惟,以上所述者,僅為本發明之較佳實施例而已,並非用以限定本發明實施之範圍;故在不脫離本發明之範圍下所作之均等變化與修飾,皆應涵蓋於本發明之專利範圍內。 However, the above are only preferred embodiments of the present invention and are not intended to limit the scope of implementation of the present invention; therefore, all changes and modifications made without departing from the scope of the present invention should be covered in the present invention Within the scope of the patent.
1‧‧‧補充軸套 1‧‧‧Supply shaft sleeve
10‧‧‧封閉端 10‧‧‧Closed end
101‧‧‧第一接觸部 101‧‧‧ First Contact Department
1011‧‧‧尖點結構 1011‧‧‧Pointed structure
11‧‧‧開放端 11‧‧‧Open
12‧‧‧容置槽 12‧‧‧Accommodation slot
13‧‧‧第一固接部 13‧‧‧First fixed part
2‧‧‧檢測針 2‧‧‧Detection needle
20‧‧‧檢測端 20‧‧‧Detector
201‧‧‧第二接觸部 201‧‧‧Second Contact Department
202‧‧‧第二固接部 202‧‧‧Second fixing part
203‧‧‧擋止部 203‧‧‧stop
21‧‧‧連接端 21‧‧‧Connector
Claims (10)
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201140070A (en) * | 2010-01-11 | 2011-11-16 | Cambridge Silicon Radio Ltd | An improved test probe |
| TW201527763A (en) * | 2014-01-09 | 2015-07-16 | Isc Co Ltd | Probe apparatus |
| TW201531715A (en) * | 2014-01-09 | 2015-08-16 | Taiwan Semiconductor Mfg Co Ltd | Probe card and manufacturing method |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201140070A (en) * | 2010-01-11 | 2011-11-16 | Cambridge Silicon Radio Ltd | An improved test probe |
| TW201527763A (en) * | 2014-01-09 | 2015-07-16 | Isc Co Ltd | Probe apparatus |
| TW201531715A (en) * | 2014-01-09 | 2015-08-16 | Taiwan Semiconductor Mfg Co Ltd | Probe card and manufacturing method |
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