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TWI677389B - Multi-point diamond cutter - Google Patents

Multi-point diamond cutter Download PDF

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Publication number
TWI677389B
TWI677389B TW104142471A TW104142471A TWI677389B TW I677389 B TWI677389 B TW I677389B TW 104142471 A TW104142471 A TW 104142471A TW 104142471 A TW104142471 A TW 104142471A TW I677389 B TWI677389 B TW I677389B
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TW
Taiwan
Prior art keywords
diamond cutter
base
inclined surface
sharp
point
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TW104142471A
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Chinese (zh)
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TW201634153A (en
Inventor
曾山浩
Hiroshi Soyama
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日商三星鑽石工業股份有限公司
Mitsuboshi Diamond Industrial Co., Ltd.
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Application filed by 日商三星鑽石工業股份有限公司, Mitsuboshi Diamond Industrial Co., Ltd. filed Critical 日商三星鑽石工業股份有限公司
Publication of TW201634153A publication Critical patent/TW201634153A/en
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Publication of TWI677389B publication Critical patent/TWI677389B/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0011Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/22Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
    • B28D1/225Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising for scoring or breaking, e.g. tiles
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Mining & Mineral Resources (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Dicing (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

本發明之多點鑽石刀具,即使因進行刻劃而使尖點磨耗亦能夠減少刀具之更換次數。 The multi-point diamond cutter of the present invention can reduce the number of tool replacements even if the sharp point is worn due to the scribe.

對鑽石刀具10之基座11之角從基座之兩側形成傾斜面,並以稜線之兩端作為尖點。以使該鑽石刀具10之任某一尖點接觸基板且不轉動之方式進行刻劃。在尖點因刻劃而磨耗時,藉由使鑽石刀具10旋轉而使用其他的尖點進行刻劃。藉此能夠在一個鑽石刀具中使用多個尖點,能夠減少鑽石刀具之更換頻率。 The corner of the base 11 of the diamond cutter 10 forms an inclined surface from both sides of the base, and the two ends of the ridge line are used as sharp points. Scribing is performed so that any sharp point of the diamond cutter 10 contacts the substrate and does not rotate. When the sharp point is worn by the scoring, the diamond cutter 10 is rotated to perform the scoring using another sharp point. In this way, multiple sharp points can be used in one diamond cutter, and the frequency of diamond cutter replacement can be reduced.

Description

多點鑽石刀具 Multi-point diamond cutter

本發明係關於一種用於藉由鑽石尖點刻劃玻璃基板或矽晶圓等脆性材料基板之多點鑽石刀具。 The present invention relates to a multi-point diamond cutter for scoring a brittle material substrate such as a glass substrate or a silicon wafer with diamond sharp points.

以往,為了刻劃玻璃基板或矽晶圓,係使用一種使用有刻劃輪或由單結晶鑽石構成之鑽石尖點的工具。針對玻璃基板,主要係使用相對於基板轉動之刻劃工具,但從提高刻劃後之基板強度等優點觀之,亦探討使用固定刃之鑽石尖點。在專利文獻1、2中,提出用於刻劃藍寶石晶圓或氧化鋁晶圓(alumina wafer)等硬度較高之基板的尖點切刀。在該等專利文獻中,使用於角錐之稜線上設有切點之工具、或前端形成圓錐之工具。此外,在專利文獻3中,提出為了刻劃玻璃板而使用具有圓錐形前端之玻璃劃線器的刻劃裝置。 In the past, in order to scribe a glass substrate or a silicon wafer, a tool using a diamond wheel with a scribe wheel or a single crystal diamond was used. For glass substrates, a scoring tool that rotates relative to the substrate is mainly used. However, from the perspective of improving the strength of the substrate after scoring, the sharp points of diamonds with fixed blades are also discussed. Patent Documents 1 and 2 propose sharp point cutters for scoring a substrate having a high hardness, such as a sapphire wafer or an alumina wafer. In these patent documents, a tool provided with a tangent point on a ridgeline of a pyramid or a tool having a cone at the front end is used. In addition, Patent Document 3 proposes a scoring device using a glass scriber having a conical tip for scoring a glass plate.

專利文獻1:日本特開2003-183040號公報 Patent Document 1: Japanese Patent Application Laid-Open No. 2003-183040

專利文獻2:日本特開2005-079529號公報 Patent Document 2: Japanese Patent Laid-Open No. 2005-079529

專利文獻3:日本特開2013-043787號公報 Patent Document 3: Japanese Patent Application Publication No. 2013-043787

在利用習知的固定刃之工具進行刻劃時,由於尖點磨耗,因此必須變更尖點。角錐形或圓錐形之工具中作為可使用之頂點的尖點為2 處或者最大4處。因此,在變更2處或4處之尖點時必須更換工具,而會有更換頻率高的問題。此外,在由工具所進行之刻劃中,必須使尖點以適當的角度接觸基板。然而,在習知的工具中,在變更尖點時必須使工具往軸方向旋轉,而不容易精度佳地調整該接觸角度。 When scoring is performed using a conventional fixed-blade tool, the sharp point must be changed due to abrasion of the sharp point. The apex of a vertex or cone tool that can be used is 2 Or up to four. Therefore, the tool must be changed when the sharp points at two or four points are changed, and there is a problem that the replacement frequency is high. In addition, in the scoring performed by the tool, the sharp point must be brought into contact with the substrate at an appropriate angle. However, in the conventional tool, it is necessary to rotate the tool in the axial direction when changing the sharp point, and it is not easy to adjust the contact angle with high accuracy.

本發明係有鑑於此種習知的問題而完成,其目的在於提供一種即便使用於刻劃之尖點產生磨耗,亦能夠容易地變更尖點位置而減少更換頻率之鑽石刀具。 The present invention has been made in view of such conventional problems, and an object thereof is to provide a diamond cutter that can easily change the position of the sharp point and reduce the frequency of replacement even if the sharp point used for scoring is worn.

為了解決該課題,本發明之多點鑽石刀具,具備:多角形之基座;以及該基座之至少一個角,具有從該基座之兩側面朝向另一側面形成的第1與第2傾斜面、及該第1與第2傾斜面相交之稜線;至少包含該稜線之部分係以鑽石(金剛石)形成,並以該稜線之兩端作為尖點。 In order to solve this problem, the multi-point diamond cutter of the present invention includes: a polygonal base; and at least one corner of the base having first and second inclination formed from both sides of the base toward the other side. A surface and a ridgeline where the first and second inclined surfaces intersect; at least a portion including the ridgeline is formed of diamond (diamond), and both ends of the ridgeline are used as sharp points.

此處,亦可為:具有從該基座之外周面朝向該稜線之兩端研磨而成之頂面。 Here, it may have a top surface which is ground from the outer peripheral surface of the base toward both ends of the ridgeline.

為了解決該課題,本發明之多點鑽石刀具,具備:多角形之基座;以及該基座之至少一個角,具有從該基座之一方之側面形成的第1傾斜面與第2傾斜面、從該基座之另一方之面形成的第3傾斜面與第4傾斜面、該第1傾斜面與第3傾斜面相交並與基座之面平行的第1稜線、及該第2傾斜面與第4傾斜面相交並與基座之面平行的第2稜線;至少包含該第1、第2稜線之部分係以鑽石(金剛石)形成,並以該第1、第2稜線之外側之兩端作為尖點。 In order to solve this problem, a multipoint diamond cutter according to the present invention includes a polygonal base, and at least one corner of the base having a first inclined surface and a second inclined surface formed from one side surface of the base. A third inclined surface and a fourth inclined surface formed from the other surface of the base, a first edge line that intersects the first inclined surface and the third inclined surface and is parallel to the surface of the base, and the second inclined surface The second ridgeline whose surface intersects with the fourth inclined surface and is parallel to the surface of the base; at least the part including the first and second ridgelines is formed of diamond (diamond), and is formed by the outer side of the first and second ridgelines. Both ends serve as sharp points.

此處,亦可為:具有從該基座之外周面朝向該第1、第2稜 線之兩端研磨而成之頂面。 Here, the first and second edges may be provided from the outer peripheral surface of the base. The top surface of both ends of the wire is ground.

此處,亦可為:該各傾斜面,係藉由雷射加工形成。 Here, the inclined surfaces may be formed by laser processing.

亦可為:該各頂面係藉由機械加工形成。 Alternatively, the top surfaces may be formed by machining.

根據具有這種特徵之本發明,能夠在鑽石刀具之周圍設置多個尖點。因此能夠獲得以下效果:即使一個尖點磨耗,亦能夠藉由改變鑽石刀具之固定角度而使用新的尖點,能夠減少鑽石刀具之更換頻率。進一步地,由於能夠在刀具相對於基板之安裝角度維持一定之狀態下變更尖點,因此能夠容易調整尖點之接觸角度。 According to the present invention having such a feature, a plurality of sharp points can be provided around the diamond cutter. Therefore, the following effect can be obtained: even if a sharp point is worn, a new sharp point can be used by changing the fixed angle of the diamond cutter, and the frequency of replacing the diamond cutter can be reduced. Furthermore, since the sharp point can be changed while the mounting angle of the tool with respect to the substrate is maintained constant, the contact angle of the sharp point can be easily adjusted.

10、30、50、60‧‧‧多點鑽石刀具 10, 30, 50, 60‧‧‧ multi-point diamond cutters

11、31、51、61‧‧‧基座 11, 31, 51, 61‧‧‧ base

11a、11b、61a、61b‧‧‧側面 11a, 11b, 61a, 61b ‧‧‧ side

12、32、52、62‧‧‧貫通孔 12, 32, 52, 62‧‧‧through holes

13、33、43‧‧‧研磨面 13, 33, 43‧‧‧ polished surface

13a~13d、14a~14d、33a~33f、34a~34f、62a、62b、63a、63b、65a、65b、66a、66b、68a、68b、69a、69b、71a、71b、72a、72b‧‧‧傾斜面 13a ~ 13d, 14a ~ 14d, 33a ~ 33f, 34a ~ 34f, 62a, 62b, 63a, 63b, 65a, 65b, 66a, 66b, 68a, 68b, 69a, 69b, 71a, 71b, 72a, 72b Inclined surface

15a~15d、35a~35f、64a、64b、67a、67b、70a、70b、73a、73b‧‧‧稜線 15a ~ 15d, 35a ~ 35f, 64a, 64b, 67a, 67b, 70a, 70b, 73a, 73b

16~19、21a、21b、22a、22b、23a、23b、24a、24b、36~41、51a~56b、74a~77b‧‧‧頂面 16 ~ 19, 21a, 21b, 22a, 22b, 23a, 23b, 24a, 24b, 36 ~ 41, 51a ~ 56b, 74a ~ 77b‧‧‧ Top surface

P1~P12‧‧‧尖點 P1 ~ P12‧‧‧ sharp points

圖1,係本發明之第1實施形態之多點鑽石刀具之側視圖及前視圖。 FIG. 1 is a side view and a front view of a multi-point diamond cutter according to a first embodiment of the present invention.

圖2,係第1實施形態之變形例之多點鑽石刀具之側視圖及前視圖。 Fig. 2 is a side view and a front view of a multi-point diamond cutter according to a modification of the first embodiment.

圖3,係顯示使用本發明之第1實施形態之鑽石刀具的刻劃之側視圖及其放大圖。 Fig. 3 is a side view showing an engraving using a diamond cutter according to the first embodiment of the present invention and an enlarged view thereof.

圖4,係顯示使用本發明之第1實施形態之鑽石刀具的刻劃之前視圖。 Fig. 4 is a front view showing a scribe using a diamond cutter according to the first embodiment of the present invention.

圖5,係顯示使用本發明之第1實施形態之鑽石刀具的刻劃之側視圖及其放大圖。 Fig. 5 is a side view showing an engraving using a diamond cutter according to the first embodiment of the present invention and an enlarged view thereof.

圖6,係本發明之第2實施形態之鑽石刀具之側視圖及前視圖。 6 is a side view and a front view of a diamond cutter according to a second embodiment of the present invention.

圖7,係本發明之第2實施形態之變形例之鑽石刀具之側視圖及前視圖。 Fig. 7 is a side view and a front view of a diamond cutter according to a modification of the second embodiment of the present invention.

圖8,係本發明之第3實施形態之鑽石刀具之側視圖及前視圖。 8 is a side view and a front view of a diamond cutter according to a third embodiment of the present invention.

圖9,係本發明之第3實施形態之鑽石刀具之主要部位放大後之側視圖及前視圖。 FIG. 9 is an enlarged side view and a front view of a main part of a diamond cutter according to a third embodiment of the present invention.

接下來,針對本發明之第1實施形態進行說明。圖1係顯示本實施形態之多點鑽石刀具(以下,簡稱鑽石刀具)10之一例的側視圖及前視圖。該鑽石刀具10係以由一定厚度並旋轉對稱之任意數量之邊形成之多角形的板材作為基座。本實施形態中,係藉由單結晶鑽石構成一定厚度之板材且為正方形之基座11,在其中心具有貫通孔12。如圖1所示,對該基座11從四方之角部分之兩側研磨呈V字形。亦即,從一方之側面11a朝向基座之外周面切削至基座11之厚度之1/2以上,形成第1傾斜面13a。此時,較佳為,以第1傾斜面13a與基座11之2個相鄰之外周面16、19分別之夾角彼此相等之方式切削。同樣地,亦從相同側面11a針對其他角形成第1傾斜面13b~13d。接著,從基座11之另一方之側面11b以同樣之方式朝向基座11之2個相鄰之外周面16、19切削至基座11之厚度之1/2左右,形成梯形之第2傾斜面14a~14d。上述之傾斜面能夠藉由雷射加工輕易形成。此外,亦可在雷射加工之後進一步進行機械研磨,使形成稜線之部分成為更精密之研磨面。據此,於同一角之一對第1、第2傾斜面13a與14a相交而於基座11之厚度方向之中間、較佳為如圖1(b)所示般於中央位置形成平行於基座之側面11a、11b且與側視觀察下之基座之對角線垂直之稜線15a。以同樣之方式於第1、第2傾斜面13b與14b、13c與14c、13d與14d相交而分別於基座11之厚度方向之中間、較佳為中央位置構成平行於基座之側面11a、11b之稜線15b、15c、15d,且與基座之對角線垂直之4個稜線形成於基座11之角的部分。此處,基座11之四方之外周面成為頂面16、17、18、19。此處,所謂的頂面,係與形成稜線之第1、第2傾斜面相接且共有 稜線之一端的面。將一稜線15a之與頂面16、19相接之稜線之兩端、亦即第1傾斜面13a、第2傾斜面14a與頂面16、19之交點設為尖點P1、P2。頂面與稜線在該尖點P1、P2中之夾角α約135°。針對其他6處之傾斜面亦同樣地,將稜線15b~15d之兩端之與頂面相接之點、亦即第1傾斜面13b~13d、第2傾斜面14b~14d與頂面16~19之交點分別設為尖點P3~P8。如上述將稜線15a~15d之兩端設為尖點P1~P8,藉此能夠對如圖1(a)所示般在側視觀察下呈八角形之鑽石刀具10於周圍形成8處之尖點。 Next, a first embodiment of the present invention will be described. FIG. 1 is a side view and a front view showing an example of a multi-point diamond cutter (hereinafter, simply referred to as a diamond cutter) 10 according to this embodiment. The diamond cutter 10 is based on a polygonal plate formed of any number of sides with a certain thickness and rotational symmetry. In this embodiment, a single-crystal diamond is used to form a plate of a certain thickness and has a square base 11 having a through-hole 12 in the center. As shown in FIG. 1, the base 11 is ground in a V shape from both sides of the four corner portions. That is, the first inclined surface 13 a is formed by cutting from one side surface 11 a toward the outer peripheral surface of the base to a thickness of 1/2 or more of the base 11. At this time, it is preferable to cut so that the included angle between the first inclined surface 13a and the two adjacent outer peripheral surfaces 16, 19 of the base 11 are equal to each other. Similarly, the first inclined surfaces 13b to 13d are also formed for the other corners from the same side surface 11a. Next, from the other side surface 11b of the base 11, the two adjacent outer peripheral surfaces 16, 19 of the base 11 are cut in the same manner to about 1/2 of the thickness of the base 11 to form a second inclination of a trapezoid. Surfaces 14a ~ 14d. The above-mentioned inclined surface can be easily formed by laser processing. In addition, mechanical polishing may be performed after laser processing, so that the portion forming the ridge line becomes a more precise polishing surface. According to this, a pair of the first and second inclined surfaces 13a and 14a intersect at one of the same corners and is formed in the middle of the thickness direction of the base 11, preferably in a central position as shown in FIG. 1 (b), parallel to the base. Edges 15a of the sides 11a, 11b of the seat and perpendicular to the diagonal of the base in side view. In the same way, the first and second inclined surfaces 13b and 14b, 13c and 14c, 13d and 14d intersect each other in the thickness direction of the base 11 and preferably at a central position, and are parallel to the side surfaces 11a of the base, The ridgelines 15b, 15c, and 15d of 11b, and four ridgelines perpendicular to the diagonal of the base are formed at the corners of the base 11. Here, the outer peripheral surface of the four sides of the base 11 becomes the top surfaces 16, 17, 18, and 19. Here, the so-called top surface is in contact with and shared by the first and second inclined surfaces forming the ridgeline. A face at one end of the ridge. The two ends of a ridgeline 15a that is in contact with the top surfaces 16, 19, that is, the intersections of the first inclined surface 13a, the second inclined surface 14a, and the top surfaces 16, 19 are set as sharp points P1, P2. The angle α between the top surface and the ridge line in the sharp points P1 and P2 is about 135 °. The same is true for the other 6 inclined surfaces, the points at which both ends of the ridge lines 15b to 15d meet the top surface, that is, the first inclined surface 13b to 13d, the second inclined surface 14b to 14d, and the top surface 16 to The intersections of 19 are set as sharp points P3 ~ P8. As described above, the two ends of the ridge lines 15a to 15d are set as the sharp points P1 to P8, so that the diamond cutter 10 having an octagonal shape when viewed from the side as shown in FIG. point.

接下來,針對第1實施形態之變形例的鑽石刀具20進行說明。圖2係該變形例之側視圖及前視圖,與第1實施形態相同的部分則標記相同符號。在該變形例中,在形成第1傾斜面13a~13d、第2傾斜面14a~14d之後,如圖2所示,對各稜線15a~15d從各自的兩端部分進一步朝向外周面進行研磨,形成與基座11之四方之外周面不同之面,以作為頂面。亦即,圖2(b)所示之三角形之較小的研磨面成為頂面21a、21b、22a、22b、23a、23b、24a、24b,頂面與稜線之夾角α較第1實施形態之135°大。因此,在該情形中,能夠利用機械加工對頂面高精度地進行加工,且能夠精密地加工尖點的位置。此外,頂面與稜線之最小角度可配合刻劃對象之脆性材料基板之種類或厚度調整成大於135°之值。 Next, a diamond cutter 20 according to a modification of the first embodiment will be described. FIG. 2 is a side view and a front view of the modification, and the same parts as those in the first embodiment are denoted by the same reference numerals. In this modification, after forming the first inclined surfaces 13 a to 13 d and the second inclined surfaces 14 a to 14 d, as shown in FIG. 2, the ridgelines 15 a to 15 d are further polished from the respective end portions toward the outer peripheral surface. A surface different from the outer peripheral surface of the four sides of the base 11 is formed as a top surface. That is, the smaller polished surface of the triangle shown in FIG. 2 (b) becomes the top surface 21a, 21b, 22a, 22b, 23a, 23b, 24a, 24b. The angle α between the top surface and the ridge line is larger than that of the first embodiment. 135 ° large. Therefore, in this case, the top surface can be processed with high accuracy by machining, and the position of the sharp point can be precisely processed. In addition, the minimum angle between the top surface and the ridge line can be adjusted to a value greater than 135 ° according to the type or thickness of the brittle material substrate of the object to be scored.

針對使用該實施形態之鑽石刀具10或20進行刻劃之情形,利用圖3~圖5進行說明。在進行刻劃時,如圖3(a)所示,使鑽石刀具10(或20)之一個尖點P1接觸基板25,並使鑽石刀具10往尖點P1中的稜線方向即圖示之箭頭A方向移動,以進行刻劃。由於不使鑽石刀具10轉動,因此能夠以同一尖點進行刻劃。此時,如圖3(b)中顯示尖點P1周邊之放大圖所示, 稜線與脆性材料基板之夾角θ較佳為2~10°、更佳為3~7°之方式,使鑽石刀具10接觸。圖4係顯示從箭頭A方向觀察時進行刻劃之狀態的圖。如該圖所示,由於刻劃輪係加工薄板狀之基座而成者,因此即使在基板25之上面存在零件26等之情形,亦能夠使鑽石刀具移動於零件之間的狹窄間隙進行刻劃。 The case where the diamond cutter 10 or 20 of this embodiment is used for scoring will be described with reference to FIGS. 3 to 5. When scoring, as shown in FIG. 3 (a), a sharp point P1 of the diamond cutter 10 (or 20) is brought into contact with the substrate 25, and the diamond cutter 10 is directed toward the ridge line in the sharp point P1, which is the arrow shown in the figure. Move in direction A to score. Since the diamond cutter 10 is not rotated, the scribe can be performed at the same sharp point. At this time, as shown in the enlarged view around the sharp point P1 in FIG. 3 (b), The angle θ between the ridgeline and the brittle material substrate is preferably 2 to 10 °, and more preferably 3 to 7 °, so that the diamond cutter 10 contacts. FIG. 4 is a diagram showing a state of scoring when viewed from the direction of arrow A. FIG. As shown in the figure, since the wheel train is processed by processing a thin plate-shaped base, even if there are parts 26 and the like on the substrate 25, the diamond cutter can be moved to the narrow gap between the parts for engraving. Draw.

又,在接觸基板25之尖點P1因磨耗而劣化之情形時,如圖5所示,以貫通孔12為中心使鑽石刀具10旋轉,使相鄰之尖點P2接觸於基板25並同樣地往尖點P2中的稜線方向即箭頭B方向進行刻劃。圖5(b)係顯示尖點P2之周邊的放大圖。此時,旋轉角度係根據稜線與脆性材料基板之夾角決定。亦即,使稜線與脆性材料基板之夾角θ,在使用尖點P2進行刻劃之情形與使用尖點P1之情形相等。若反覆此動作,則即使尖點因磨耗而劣化,亦能夠以形成於圓板周圍之尖點數量之新尖點進行刻劃。此外,即使旋轉鑽石刀具10,由於在鑽石刀具10之側視觀察下刃前端之稜線接觸於基板之角度不改變,因此容易調整尖點相對於基板之接觸角度。 When the sharp point P1 of the contact substrate 25 is deteriorated due to abrasion, as shown in FIG. 5, the diamond cutter 10 is rotated around the through hole 12 as a center, and the adjacent sharp point P2 is brought into contact with the substrate 25 and the same applies. Scribing is performed in the direction of the ridgeline at the sharp point P2, that is, in the direction of arrow B. FIG. 5 (b) is an enlarged view showing the periphery of the sharp point P2. At this time, the rotation angle is determined according to the angle between the ridgeline and the brittle material substrate. That is, the angle θ between the ridge line and the brittle material substrate is made equal to the case where the sharp point P2 is used for scoring and the case where the sharp point P1 is used. If this action is repeated, even if the sharp point is deteriorated due to abrasion, it can be scored with a new sharp point number of sharp points formed around the circular plate. In addition, even if the diamond cutter 10 is rotated, since the angle at which the ridge line at the tip of the lower blade contacts the substrate does not change when viewed from the side of the diamond cutter 10, it is easy to adjust the contact angle of the sharp point with respect to the substrate.

此外,在同一方向使用鑽石刀具10之情形時,當尖點P1磨耗時,使鑽石刀具10逐次旋轉90°而依序使用尖點P3、P5、P7,當4處之尖點均磨耗時,使鑽石刀具10反轉。然後以稜線與脆性材料基板之角夾度θ一定之方式依序使尖點P2、P4、P6、P8接觸,在反轉後亦共計4次改變尖點位置進行刻劃。若以此方式進行,則可合計8次改變尖點位置進行刻劃。在使用鑽石刀具20的情形時,亦能夠以同樣之方式8次改變尖點進行刻劃。 In addition, when the diamond cutter 10 is used in the same direction, when the sharp point P1 is worn, the diamond cutter 10 is sequentially rotated by 90 ° and the sharp points P3, P5, and P7 are sequentially used. When all four sharp points are worn, The diamond cutter 10 is reversed. Then, the cusps P2, P4, P6, and P8 are sequentially contacted in such a manner that the angle θ between the ridge line and the brittle material substrate is constant, and the position of the cusp is changed for a total of 4 times after the reversal. If performed in this manner, the cusp can be changed by changing the position of the sharp point 8 times in total. In the case of using the diamond cutter 20, it is also possible to change the sharp point 8 times in the same manner for scoring.

接下來,針對本發明之第2實施形態使用圖6進行說明。第 2實施形態之鑽石刀具30,在單結晶鑽石構成之六角形之基座31之中心設置貫通孔32,從基座31之角的兩側以與第1實施形態同樣之方式研磨呈V字形而形成第1傾斜面33a~33f、第2傾斜面34a~34f。據此,在傾斜面33a與34a、33b與34b、…之間形成稜線35a~35f。各稜線35a~35f之兩端成為尖點P1~P12。上述之傾斜面可藉由雷射加工而容易形成。此外,亦可在雷射加工之後進一步進行機械研磨,藉由形成稜線之部分形成精密的傾斜面。此處,基座31之側面成為頂面36~41。而且,可以稜線35a~35f之兩端作為尖點形成12處之尖點。在該情形,頂面與稜線之角度為150°。 Next, a second embodiment of the present invention will be described using FIG. 6. First In the diamond cutter 30 of the second embodiment, a through-hole 32 is provided in the center of the hexagonal base 31 made of a single crystal diamond, and it is polished in a V shape from both sides of the corner of the base 31 in the same manner as in the first embodiment. The first inclined surfaces 33a to 33f and the second inclined surfaces 34a to 34f are formed. Accordingly, edge lines 35a to 35f are formed between the inclined surfaces 33a and 34a, 33b and 34b,.... Both ends of each ridge line 35a to 35f become sharp points P1 to P12. The above-mentioned inclined surface can be easily formed by laser processing. In addition, it is also possible to perform mechanical polishing after laser processing to form a precise inclined surface at the portion where the ridges are formed. Here, the side surfaces of the base 31 become the top surfaces 36 to 41. Further, the two ends of the ridge lines 35a to 35f can be used as sharp points to form sharp points at 12 points. In this case, the angle between the top surface and the ridgeline is 150 °.

接下來,針對第2實施形態之變形例之鑽石刀具50進行說明。圖7係該變形例之前視圖及側視圖,與第2實施形態相同的部分則標記相同符號。在該實施形態中,亦與上述之第1實施形態之變形例同樣地,如圖7所示般從稜線35a~35f之兩端部分之側方進一步進行研磨,形成與基座11之四方之外周面不同之面,以作為頂面。在該情形,從稜線35a~35f之兩端部分之側方朝向尖點P1~P12之三角形較小的研磨面成為頂面51a、51b、52a、52b…56a、56b,頂面與稜線之夾角α較第2實施形態之150°大。因此,尖點P1~P12之位置改變,稜線稍微變短。在該情形,能夠藉由研磨高精度地加工較小的頂面,且能夠精密地加工尖點的位置。此外,能夠使頂面與稜線之角度大於150°,且能夠調整成適合基板之適當的角度。 Next, a diamond cutter 50 according to a modification of the second embodiment will be described. FIG. 7 is a front view and a side view of the modification, and the same portions as those in the second embodiment are denoted by the same reference numerals. In this embodiment, as in the modified example of the first embodiment described above, as shown in FIG. 7, further polishing is performed from the sides of both end portions of the ridge lines 35 a to 35 f to form a four-way connection with the base 11. A different surface on the outer peripheral surface is used as the top surface. In this case, the grinding surface with a small triangle from the sides of both ends of the ridge lines 35a to 35f toward the cusps P1 to P12 becomes the top surfaces 51a, 51b, 52a, 52b ... 56a, 56b, and the angle between the top surface and the ridge line α is larger than 150 ° in the second embodiment. Therefore, the positions of the sharp points P1 to P12 are changed, and the ridgeline is slightly shortened. In this case, a small top surface can be processed with high accuracy by grinding, and the position of the sharp point can be processed precisely. In addition, the angle between the top surface and the ridgeline can be made larger than 150 °, and can be adjusted to an appropriate angle suitable for the substrate.

在該鑽石刀具30或50,亦在進行刻劃時以使1個尖點P1接觸基板25之方式進行刻劃。而且,在該尖點磨耗之情形時,與第1實施形態同樣地,使其沿著插通於鑽石刀具30或50之貫通孔之未圖示之軸旋轉,使相鄰之尖點接觸以進行刻劃。在該情形,亦使稜線與脆性材料基板 之夾角θ為一定。藉由反覆此動作,則能夠以合計12處之尖點進行刻劃。 This diamond cutter 30 or 50 is also scribed so that one sharp point P1 contacts the substrate 25 during the scribe. When the sharp point is abraded, as in the first embodiment, it is rotated along an axis (not shown) inserted in the through hole of the diamond cutter 30 or 50, and the adjacent sharp points are brought into contact with each other. Scratching. In this case, too, ridges and brittle material substrates The included angle θ is constant. By repeating this operation, it is possible to perform scoring with a total of 12 sharp points.

接下來,針對本發明之第3實施形態利用圖8及圖9進行說明。該實施形態之鑽石刀具60亦與第1實施形態同樣地,在由單結晶鑽石構成之正方形且一定厚度之板狀之基座61之中心具有貫通孔62。在該實施形態中,從形成基座61之角之一方之側面61a朝向外周面形成第1、第2傾斜面62a、62b。此時,第1、第2傾斜面分別被以相對於基座61之多角形之對角線從垂直傾斜例如5°之方式研磨,而相互交叉。同樣地,從另一方之側面61b形成第3、第4傾斜面63a、63b。而且,以第1、第3傾斜面之交線作為第1稜線64a,以第2、第4傾斜面62b、63b之交線作為第2稜線64b。該等2個稜線64a、64b較佳為設成與基座61之側面61a、61b平行。第1稜線64a、第2稜線64b,相對於第1、第2實施形態中的稜線35a係以分別例如傾斜約5°之方式形成。因此,第1稜線與第2稜線之夾角例如約為170°。 Next, a third embodiment of the present invention will be described with reference to FIGS. 8 and 9. Similarly to the first embodiment, the diamond cutter 60 of this embodiment has a through-hole 62 at the center of a square-shaped plate-shaped base 61 made of single crystal diamond and having a constant thickness. In this embodiment, the first and second inclined surfaces 62a, 62b are formed from the side surface 61a, which forms one of the corners of the base 61, toward the outer peripheral surface. At this time, the first and second inclined surfaces are each polished so that the diagonal lines of the polygon with respect to the base 61 are inclined from the vertical, for example, 5 °, and cross each other. Similarly, third and fourth inclined surfaces 63a and 63b are formed from the other side surface 61b. Further, the intersection line of the first and third inclined surfaces is set as the first ridgeline 64a, and the intersection line of the second and fourth inclined surfaces 62b and 63b is set as the second ridgeline 64b. The two edge lines 64 a and 64 b are preferably provided in parallel with the side surfaces 61 a and 61 b of the base 61. The first ridge line 64a and the second ridge line 64b are formed so as to be inclined, for example, about 5 ° with respect to the ridge line 35a in the first and second embodiments. Therefore, the angle between the first ridgeline and the second ridgeline is, for example, about 170 °.

此外,針對與該角相鄰之一角,以同樣之方式從基座61之一方之側面形成第1、第2傾斜面65a、65b,從另一方之側面形成第3、第4傾斜面66a、66b,以傾斜面65a、66a之交線作為第1稜線67a,以傾斜面65b、66b之交線作為第2稜線67b。針對另一角,亦以同樣之方式分別形成第1~第4傾斜面68a、68b、69a、69b,以傾斜面之交線作為第1稜線70a、第2稜線70b。針對剩餘的一角,亦形成第1~第4傾斜面71a、71b、72a、72b,以傾斜面之交線作為第1稜線73a、第2稜線73b。 In addition, the first and second inclined surfaces 65a, 65b are formed from one side surface of the base 61, and the third and fourth inclined surfaces 66a, 66a, and In 66b, the intersection of the inclined surfaces 65a and 66a is used as the first edge line 67a, and the intersection of the inclined surfaces 65b and 66b is used as the second edge line 67b. For the other corners, the first to fourth inclined surfaces 68a, 68b, 69a, and 69b are respectively formed in the same manner, and the intersection of the inclined surfaces is used as the first edge line 70a and the second edge line 70b. For the remaining corners, first to fourth inclined surfaces 71a, 71b, 72a, and 72b are also formed, and the intersection of the inclined surfaces is used as the first edge line 73a and the second edge line 73b.

接著,如圖8(b)、圖9(b)所示,從基座61之外周面朝向第1稜線64a、第2稜線64b研磨以形成頂面74a、74b。據此,能夠以第1、第 3傾斜面62a、63a與頂面74a形成一個頂點,並將其作為尖點P1。同樣地,能夠以第2、第4傾斜面62b、63b與從側方研磨而成之頂面74b形成頂點,並將其作為尖點P2。據此,能夠對基座61之一個角形成2個尖點。 Next, as shown in FIGS. 8 (b) and 9 (b), the first ridgeline 64 a and the second ridgeline 64 b are polished from the outer peripheral surface of the base 61 to form the top surfaces 74 a and 74 b. Accordingly, the first and the first 3 The inclined surfaces 62a, 63a and the top surface 74a form an apex, and this is taken as a sharp point P1. Similarly, a vertex can be formed by the 2nd, 4th inclined surfaces 62b, 63b, and the top surface 74b polished from the side, and this can be set as the cusp P2. Accordingly, two sharp points can be formed on one corner of the base 61.

針對與該角相鄰之一角,亦從基座61之外周面朝向第1稜線67a、第2稜線67b研磨以形成頂面75a、75b。據此,能夠以第1、第3傾斜面65a、66a與頂面75a形成一個頂點,並將其作為尖點P3。同樣地,能夠以第2、第4傾斜面65b、66b與從側方研磨而成之頂面75b形成頂點,並將其作為尖點P4。 A corner adjacent to the corner is also polished from the outer peripheral surface of the base 61 toward the first edge line 67a and the second edge line 67b to form the top surfaces 75a and 75b. This makes it possible to form a vertex between the first and third inclined surfaces 65a, 66a and the top surface 75a, and use this as the sharp point P3. Similarly, the apex can be formed by the second and fourth inclined surfaces 65b, 66b and the top surface 75b polished from the side, and the apex P4 can be used.

此外,從基座61之外周面朝向稜線70a、70b研磨以形成頂面76a、76b。據此,能夠以第1、第3傾斜面68a、69a與頂面76a形成一個頂點,並將其作為尖點P5。同樣地,能夠以第2、第4傾斜面68b、69b與從側方研磨而成之頂面76b形成頂點,並將其作為尖點P6。 Further, the outer peripheral surface of the base 61 is polished toward the ridge lines 70a, 70b to form the top surfaces 76a, 76b. This makes it possible to form a vertex between the first and third inclined surfaces 68a, 69a and the top surface 76a, and use this as the sharp point P5. Similarly, a vertex can be formed by the 2nd, 4th inclined surfaces 68b, 69b, and the top surface 76b polished from the side, and it can be set as the cusp P6.

進一步地,從基座61之外周面朝向稜線73a、73b研磨以形成頂面77a、77b。據此,能夠以第1、第3傾斜面62a、63a與頂面77a形成一個頂點,並將其作為尖點P7。同樣地,能夠以第2、第4傾斜面62b、63b與從側方研磨而成之頂面77b形成頂點,並將其作為尖點P8。此實施形態,由於構成各尖點之頂面與二個傾斜面均非構成其他尖點者而是獨立的,因此能夠在不影響其他尖點之情形下,進行精密的研磨。如此,能夠在基座之周圍形成8個尖點P1~P8。 Further, it is polished from the outer peripheral surface of the base 61 toward the ridge lines 73a, 73b to form the top surfaces 77a, 77b. This makes it possible to form a vertex between the first and third inclined surfaces 62a, 63a and the top surface 77a, and use this as the sharp point P7. Similarly, a vertex can be formed by the 2nd, 4th inclined surfaces 62b, 63b, and the top surface 77b polished from the side, and it can be set as the cusp P8. In this embodiment, since the top surface and the two inclined surfaces constituting each of the sharp points are independent of each other and do not constitute other sharp points, precise grinding can be performed without affecting the other sharp points. In this way, eight sharp points P1 to P8 can be formed around the base.

此外,在第3實施形態中,雖對由第1、第3與第2、第4傾斜面所形成之2個稜線之端從側面進一步研磨以形成三角形之頂面,但亦可將基座61之外周面維持作為頂面,將藉由傾斜面62a、63a與側面、傾 斜面62b、63b與外周面形成之頂點分別作為尖點。針對其他角之尖點亦相同。 In addition, in the third embodiment, although the ends of the two ridgelines formed by the first, third, second, and fourth inclined surfaces are further polished from the side to form a triangular top surface, the base may also be formed. The outer peripheral surface of 61 remains as the top surface, and the inclined surfaces 62a and 63a The vertices formed by the inclined surfaces 62b and 63b and the outer peripheral surface serve as sharp points, respectively. The same applies to the sharp points of other corners.

在使用該鑽石刀具60進行刻劃時,亦使一個尖點P1接觸基板進行刻劃。在該位置磨耗時,使鑽石刀具60旋轉以使用相鄰之尖點。此時,使稜線與脆性材料基板之夾角θ在刻劃時為一定。據此,能夠8次改變尖點位置進行刻劃。此外,亦可在尖點P1磨耗時,使鑽石刀具逐次旋轉90°以使用尖點P3、P5、P7,當4處之尖點均磨耗時,使鑽石刀具反轉,且以使稜線與脆性材料基板之夾角θ為一定之方式進行調整,而使用4處之尖點P2、P4、P6、P8,合計使用8次的尖點。 When the diamond cutter 60 is used for scribing, a sharp point P1 is also brought into contact with the substrate for scribing. When worn in this position, the diamond cutter 60 is rotated to use adjacent sharp points. At this time, the angle θ between the ridgeline and the brittle material substrate is made constant during the scoring. According to this, it is possible to change the position of the sharp point eight times to perform scoring. In addition, when the sharp point P1 is worn, the diamond cutter can be rotated 90 ° successively to use the sharp points P3, P5, and P7. When all four sharp points are worn, the diamond cutter is reversed, and the ridge and brittleness are The included angle θ of the material substrate is adjusted in a certain manner, and four sharp points P2, P4, P6, and P8 are used, and a total of eight sharp points are used.

在上述之各實施形態中,雖在周圍設置8或12處之尖點,但只要至少在一個角設置尖點即可,並不一定要在所有的角都設置傾斜面與尖點。但是較佳為在相鄰之尖點不互相干擾之範圍內,於外周部盡可能設置多個尖點。藉此在各尖點磨耗時,僅使鑽石刀具旋轉即能替換尖點,能夠使鑽石刀具之更換頻率減少。此外,基座之形狀不限於四角形及六角形,可為任意之多角形。 In each of the above-mentioned embodiments, although there are 8 or 12 sharp points around the periphery, it is only necessary to set sharp points at at least one corner, and it is not necessary to provide inclined surfaces and sharp points at all corners. However, it is preferable to provide as many sharp points as possible on the outer peripheral portion within a range where adjacent sharp points do not interfere with each other. Therefore, when the sharp points are worn, the sharp points can be replaced only by rotating the diamond cutter, and the frequency of replacing the diamond cutter can be reduced. In addition, the shape of the base is not limited to a quadrangle and a hexagon, and may be any polygon.

此外,在上述之實施形態中,雖以單結晶鑽石構成基座整體,但由於與脆性材料基板接觸之表面部分只要是鑽石即可,因此亦可在使用超硬合金或燒結鑽石形成之基座之外周面及稜線之表面形成多結晶鑽石層,對其進一步進行精密研磨以形成尖點。此外,亦可使用摻雜硼等之雜質、具有導電性之單結晶或多結晶鑽石。藉由使用具有導電性之鑽石,能夠利用放電加工容易地形成傾斜面或貫通孔。 In addition, in the above-mentioned embodiment, although the entire pedestal is composed of a single crystal diamond, since the surface portion in contact with the substrate of the brittle material only needs to be a diamond, the pedestal formed by using a cemented carbide or sintered diamond can be used A polycrystalline diamond layer is formed on the outer peripheral surface and the surface of the ridgeline, which is further precisely ground to form sharp points. In addition, it is also possible to use a single crystal or polycrystalline diamond doped with impurities such as boron and having conductivity. By using a diamond having conductivity, it is possible to easily form an inclined surface or a through hole by electric discharge machining.

此外,上述實施形態中,雖以使鑽石刀具往各尖點之稜線方 向移動之方式進行刻劃,但亦可以使其往各尖點之頂面方向移動以進行刻劃。 In addition, in the above-mentioned embodiment, although the diamond cutter is directed toward the ridgeline of each sharp point Scribing is performed in a moving manner, but it can also be moved toward the top surface of each sharp point to perform the scribing.

本發明之多點鑽石刀具可使用於刻劃脆性材料基板之刻劃裝置,尤其對於鑽石刀具之磨耗較多之高硬度的刻劃對象亦能夠有效地使用。 The multi-point diamond cutter of the present invention can be used for a scoring device for scoring a substrate of a brittle material, and can be effectively used especially for high-hardness scoring objects that have more wear on the diamond cutter.

Claims (6)

一種多點鑽石刀具,具備:具有相對向之二個側面、與複數個外周面之多角形之板狀之基座;對該基座之至少一個角,從該基座之一側面朝向相鄰之二個該外周面形成的第1傾斜面、與從該基座之另一側面朝向相鄰之二個該外周面形成的第2傾斜面;以及該第1傾斜面與該第2傾斜面之交線即稜線;至少包含該稜線之部分係以鑽石形成;以該稜線之兩端作為尖點。A multi-point diamond cutter comprising: a polygonal plate-shaped base having two opposite side surfaces and a plurality of outer peripheral surfaces; and at least one corner of the base facing from one side of the base toward an adjacent side Two of the first inclined surface formed by the outer peripheral surface and a second inclined surface formed from the other side surface of the base toward two adjacent outer peripheral surfaces; and the first inclined surface and the second inclined surface The intersection line is the ridge line; at least the part containing the ridge line is formed by diamonds; the two ends of the ridge line are used as sharp points. 如申請專利範圍第1項之多點鑽石刀具,其具有從該外周面朝向該稜線之兩端研磨而成之研磨面。For example, the multi-point diamond cutter of item 1 of the patent application scope has a grinding surface which is ground from the outer peripheral surface toward both ends of the ridgeline. 一種多點鑽石刀具,具備:具有相對向之二個側面、與複數個外周面之多角形之板狀之基座;對該基座之至少一個角,從該基座之一側面形成且彼此交叉的第1傾斜面與第2傾斜面、與從該基座之另一側面形成且彼此交叉的第3傾斜面與第4傾斜面;以及該第1傾斜面與第3傾斜面相交的第1稜線、及該第2傾斜面與第4傾斜面相交的第2稜線;至少包含該第1、第2稜線之部分係以鑽石形成;以該第1、第2稜線之外側之兩端作為尖點。A multi-point diamond cutter, comprising: a polygonal plate-shaped base having two opposite sides and a plurality of outer peripheral surfaces; at least one corner of the base formed from one side of the base and facing each other An intersecting first inclined surface and a second inclined surface, and a third inclined surface and a fourth inclined surface formed from the other side surface of the base and crossing each other; and a first intersecting surface between the first inclined surface and the third inclined surface 1 edge line, and the second edge line where the second inclined surface and the fourth inclined surface intersect; at least the part including the first and second edge lines is formed by diamonds; and the two ends outside the first and second edge lines are taken as Sharp point. 如申請專利範圍第3項之多點鑽石刀具,其具有從該基座之外周面朝向該第1、第2稜線之兩端研磨而成之研磨面。For example, the multi-point diamond cutter of item 3 of the patent application scope has a grinding surface ground from the outer peripheral surface of the base toward both ends of the first and second edge lines. 如申請專利範圍第1至4項中任一項之多點鑽石刀具,其中,該各傾斜面,係藉由雷射加工形成。For example, the multi-point diamond cutter according to any one of claims 1 to 4, wherein the inclined surfaces are formed by laser processing. 如申請專利範圍第2或4項之多點鑽石刀具,其中,該各研磨面係藉由機械加工形成。For example, the multi-point diamond tool of item 2 or 4 of the patent application scope, wherein each grinding surface is formed by machining.
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