TWI670381B - Copper heat releasing material, printed wiring board, manufacturing method thereof, and product using the copper heat releasing material - Google Patents
Copper heat releasing material, printed wiring board, manufacturing method thereof, and product using the copper heat releasing material Download PDFInfo
- Publication number
- TWI670381B TWI670381B TW104134612A TW104134612A TWI670381B TW I670381 B TWI670381 B TW I670381B TW 104134612 A TW104134612 A TW 104134612A TW 104134612 A TW104134612 A TW 104134612A TW I670381 B TWI670381 B TW I670381B
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- Taiwan
- Prior art keywords
- copper
- layer
- carrier
- heat
- scope
- Prior art date
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0201—Thermal arrangements, e.g. for cooling, heating or preventing overheating
- H05K1/0203—Cooling of mounted components
- H05K1/0207—Cooling of mounted components using internal conductor planes parallel to the surface for thermal conduction, e.g. power planes
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
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- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
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- B32B27/304—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers comprising vinyl halide (co)polymers, e.g. PVC, PVDC, PVF, PVDF
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
- C04B37/021—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles in a direct manner, e.g. direct copper bonding [DCB]
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- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/06—Wires; Strips; Foils
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- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/64—Carriers or collectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
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- H01R13/02—Contact members
- H01R13/03—Contact members characterised by the material, e.g. plating, or coating materials
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/022—Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
- H05K3/025—Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates by transfer of thin metal foil formed on a temporary carrier, e.g. peel-apart copper
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/108—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20954—Modifications to facilitate cooling, ventilating, or heating for display panels
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- H10W40/255—
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
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Abstract
本發明提供一種具有良好放熱性之銅放熱材。本發明之銅放熱材係於一個或兩個面上形成含有選自Cu、Co、Ni、W、P、Zn、Cr、Fe、Sn及Mo中之一種以上之金屬的合金層,且利用雷射光波長為405nm之雷射顯微鏡測得之一個或兩個表面之面粗糙度Sz為5μm以上。 The invention provides a copper heat-radiating material with good heat-releasing properties. The copper heat-generating material of the present invention forms an alloy layer containing one or more metals selected from Cu, Co, Ni, W, P, Zn, Cr, Fe, Sn, and Mo on one or both sides, and uses a lightning The surface roughness Sz of one or both surfaces measured by a laser microscope with an emission wavelength of 405 nm is 5 μm or more.
Description
本發明係關於一種銅放熱材、附載體銅箔、端子、積層體、屏蔽材、印刷配線板、金屬加工構件、電子機器、及印刷配線板之製造方法。 The present invention relates to a method for manufacturing a copper heat-radiating material, a copper foil with a carrier, a terminal, a laminated body, a shielding material, a printed wiring board, a metal processing member, an electronic device, and a printed wiring board.
近年來,伴隨電子機器之小型化、高精細化,所使用之電子零件之發熱所導致的故障成為問題。尤其,在顯著成長之電動汽車或油電混合汽車中使用之電子零件中,具有電池部之連接器等流動顯著高電流的零件,而於通電時之電子零件之發熱成為問題。又,智慧手機之輸入板或平板電腦之液晶中使用有被稱作液晶框之散熱板。藉由該散熱板,將來自配置於周圍之液晶零件、IC晶片等之熱逸散至外部,抑制電子零件之故障。 In recent years, with the miniaturization and high definition of electronic equipment, failures caused by heat generation of electronic components used have become problems. In particular, among the electronic parts used in electric cars or hybrid electric cars that have grown significantly, parts having a significantly high current, such as a connector having a battery section, generate heat when the electric parts are energized. In addition, a heat sink plate called a liquid crystal frame is used as an input plate of a smartphone or a liquid crystal of a tablet computer. The heat sink dissipates heat from the surrounding liquid crystal parts, IC chips, and the like to the outside, and suppresses malfunctions of the electronic parts.
專利文獻1:日本特開平07-094644號公報 Patent Document 1: Japanese Patent Application Publication No. 07-094644
專利文獻2:日本特開平08-078461號公報 Patent Document 2: Japanese Patent Application Laid-Open No. 08-078461
然而如上所述,因近年之電子機器之變化,以往之液晶框變 的無法滿足以不留住來自液晶零件、IC晶片等之因導熱所致之熱、輻射熱、對流熱等而良好地逸散到外部的功能。 However, as mentioned above, due to the changes in electronic equipment in recent years, It cannot satisfy the function of not dissipating the heat from the liquid crystal parts, IC chips, etc. due to thermal conduction, radiant heat, convection heat, etc., to the outside and dissipating well.
因此,本發明之課題在於提供一種具有良好放熱性之銅放熱材。 Therefore, an object of the present invention is to provide a copper heat-radiating material having good heat-releasing properties.
本發明人反覆潛心研究,結果發現:藉由於表面形成含有特定金屬之合金層,且將表面控制在特定之面粗糙度Sz,而可提供一種具有良好放熱性之銅放熱材。 The inventor has repeatedly studied intensively, and as a result, it has been found that, by forming an alloy layer containing a specific metal on the surface and controlling the surface to a specific surface roughness Sz, a copper heat radiating material having good heat release properties can be provided.
以上述見解為基礎而完成之本發明於一態樣中,係一種銅放熱材,於一個或兩個面上形成含有選自Cu、Co、Ni、W、P、Zn、Cr、Fe、Sn及Mo中之一種以上之金屬的合金層,且利用雷射光波長為405nm之雷射顯微鏡測得之上述一個或兩個表面之面粗糙度Sz為5μm以上。 The present invention, which is based on the above findings, is, in one aspect, a copper heat radiating material formed on one or both sides containing a material selected from the group consisting of Cu, Co, Ni, W, P, Zn, Cr, Fe, and Sn. And Mo, an alloy layer of one or more metals, and the surface roughness Sz of one or both of the surfaces measured by a laser microscope with a laser light wavelength of 405 nm is 5 μm or more.
本發明之銅放熱材於一實施形態中,利用雷射光波長為405nm之雷射顯微鏡測得之上述一個或兩個表面之面粗糙度Sz為7μm以上。 In one embodiment of the copper heat-emitting material of the present invention, the surface roughness Sz of one or both of the surfaces measured by a laser microscope with a laser light wavelength of 405 nm is 7 μm or more.
本發明之銅放熱材於其他實施形態中,利用雷射光波長為405nm之雷射顯微鏡測得之上述一個或兩個表面之面粗糙度Sz為10μm以上。 In another embodiment, the copper heat-generating material of the present invention has a surface roughness Sz of one or both surfaces measured by a laser microscope with a laser light wavelength of 405 nm, which is 10 μm or more.
本發明之銅放熱材進而於其他實施形態中,利用雷射光波長為405nm之雷射顯微鏡測得之上述一個或兩個表面之面粗糙度Sz為14μm以上。 In another embodiment, the copper heat radiating material of the present invention has a surface roughness Sz of one or both surfaces measured by a laser microscope with a laser light wavelength of 405 nm and is 14 μm or more.
本發明之銅放熱材進而於其他實施形態中,利用雷射光波長為405nm之雷射顯微鏡測得之上述一個或兩個表面之面粗糙度Sz為90μm以下。 In another embodiment, the copper heat radiating material of the present invention has a surface roughness Sz of one or both surfaces measured by a laser microscope with a laser light wavelength of 405 nm, which is 90 μm or less.
本發明之銅放熱材進而於其他實施形態中,利用雷射光波長 為405nm之雷射顯微鏡測得之上述一個或兩個表面之面粗糙度Sa為0.13μm以上。 In another embodiment, the copper heat radiation material of the present invention uses the wavelength of laser light. The surface roughness Sa of one or both of the surfaces measured by a laser microscope of 405 nm is 0.13 μm or more.
本發明之銅放熱材進而於其他實施形態中,利用雷射光波長為405nm之雷射顯微鏡測得之上述一個或兩個表面之面粗糙度Sku為6以上。 In another embodiment, the copper heat radiating material of the present invention has a surface roughness Sku of one or both surfaces measured by a laser microscope with a laser light wavelength of 405 nm, which is 6 or more.
本發明之銅放熱材進而於其他實施形態中,於將利用雷射光波長為405nm之雷射顯微鏡測得之上述一個或兩個表面之表面積設為A,將俯視時之面積設為B時,表面積比A/B為1.35以上。 In another embodiment, the copper heat-generating material of the present invention sets the surface area of one or both surfaces measured by a laser microscope with a laser light wavelength of 405 nm to A, and sets the area in plan view to B. The surface area ratio A / B is 1.35 or more.
本發明之銅放熱材進而於其他實施形態中,上述一個或兩個表面之基於JISZ8730之色差△L滿足△L≦-35。 In other embodiments, the copper heat-radiating material of the present invention has a color difference ΔL based on JISZ8730 on one or both surfaces satisfying ΔL ≦ −35.
本發明之銅放熱材進而於其他實施形態中,上述一個或兩個表面之基於JISZ8730之色差△a滿足△a≦15。 In another embodiment, the copper heat radiation material of the present invention has a color difference Δa based on JISZ8730 on one or both surfaces satisfying Δa ≦ 15.
本發明之銅放熱材進而於其他實施形態中,上述一個或兩個表面之基於JISZ8730之色差△b滿足△b≦17。 In another embodiment, the copper heat radiating material of the present invention has a color difference Δb based on JISZ8730 on one or both surfaces satisfying Δb ≦ 17.
本發明之銅放熱材進而於其他實施形態中,上述一個或兩個表面之輻射率為0.092以上。 In other embodiments, the copper heat radiating material of the present invention has an emissivity of 0.092 or more on one or both surfaces.
本發明之銅放熱材進而於其他實施形態中,於上述一個或兩個表面具備樹脂層。 In another embodiment, the copper heat radiation material of the present invention includes a resin layer on one or both surfaces.
本發明之銅放熱材進而於其他實施形態中,上述樹脂層含有介電體。 In another embodiment, the copper heat radiating material of the present invention is such that the resin layer contains a dielectric.
本發明於其他態樣中,係一種附載體銅箔,其於載體之一面或兩面依序具有中間層、極薄銅層,且上述極薄銅層為本發明之銅放熱材。 In other aspects, the present invention is a copper foil with a carrier, which has an intermediate layer and an ultra-thin copper layer sequentially on one or both sides of the carrier, and the ultra-thin copper layer is the copper heat-emitting material of the present invention.
本發明之附載體銅箔於一實施形態中,於載體之一面依序具有上述中間層、上述極薄銅層,並於上述載體之另一面具有粗化處理層。 In one embodiment, the copper foil with a carrier of the present invention has the intermediate layer, the ultra-thin copper layer in this order on one side of the carrier, and a roughened layer on the other side of the carrier.
本發明進而於其他態樣中,係一種連接器,其使用有本發明之銅放熱材。 The invention is, in other aspects, a connector that uses the copper heat sink of the invention.
本發明進而於其他態樣中,係一種端子,其使用有本發明之銅放熱材。 The present invention is, in other aspects, a terminal that uses the copper heat sink of the present invention.
本發明進而於其他態樣中,係一種積層體,其以如下方式製造:依序積層本發明之銅放熱材或本發明之附載體銅箔、任意之黏著劑層或接著劑層、與樹脂基板或基板或殼體或金屬加工構件或電子零件或電子機器或液晶面板或顯示器或分隔件。 The present invention is, in other aspects, a laminated body manufactured in the following manner: The copper heat-generating material of the present invention or the copper foil with a carrier of the present invention, any adhesive layer or adhesive layer, and a resin are sequentially laminated. A substrate or a substrate or a case or a metal working member or an electronic part or an electronic machine or a liquid crystal panel or a display or a partition.
本發明進而於其他態樣中,係一種屏蔽材,其具備本發明之積層體。 In another aspect, the present invention is a shielding material provided with the laminated body of the present invention.
本發明進而於其他態樣中,係一種印刷配線板,其具備本發明之積層體。 In another aspect, the present invention is a printed wiring board including the laminated body of the present invention.
本發明進而於其他態樣中,係一種金屬加工構件,其使用有本發明之銅放熱材或本發明之附載體銅箔。 In another aspect, the present invention is a metal-processed member using the copper heat-radiating material of the present invention or the copper foil with a carrier of the present invention.
本發明進而於其他態樣中,係一種電子機器,其使用有本發明之銅放熱材或本發明之附載體銅箔。 The present invention is, in other aspects, an electronic device using the copper heat radiating material of the present invention or the copper foil with a carrier of the present invention.
本發明進而於其他態樣中,係一種印刷配線板之製造方法,其含有如下步驟:準備本發明之附載體銅箔與絕緣基板;將上述附載體銅箔與絕緣基板積層;於將上述附載體銅箔與絕緣基板積層後,經過剝離上述附載體銅箔之 載體之步驟而形成覆金屬積層板,然後,藉由半加成法、減成法、部分加成法或改良半加成法中之任一方法而形成電路。 The present invention is, in other aspects, a method for manufacturing a printed wiring board, which includes the following steps: preparing the copper foil with a carrier and an insulating substrate of the present invention; laminating the copper foil with a carrier and the insulating substrate; After the carrier copper foil and the insulating substrate are laminated, the copper foil with the carrier is peeled off. The step of the carrier forms a metal-clad laminate, and then a circuit is formed by any one of a semi-additive method, a subtractive method, a partial additive method, or an improved semi-additive method.
本發明進而於其他態樣中,係一種印刷配線板之製造方法,其含有如下步驟:於本發明之附載體銅箔之上述極薄銅層側表面或上述載體側表面形成電路;以埋沒上述電路之方式於上述附載體銅箔之上述極薄銅層側表面或上述載體側表面形成樹脂層;於上述樹脂層上形成電路;於上述樹脂層上形成電路後,剝離上述載體或上述極薄銅層;及藉由於剝離上述載體或上述極薄銅層後去除上述極薄銅層或上述載體,而使形成於上述極薄銅層側表面或上述載體側表面之埋沒於上述樹脂層的電路露出。 The present invention is, in other aspects, a method for manufacturing a printed wiring board, which includes the following steps: forming a circuit on the surface of the ultra-thin copper layer or the surface of the carrier side of the copper foil with a carrier of the present invention; Method of forming a resin layer on the ultra-thin copper layer side surface of the copper foil with a carrier or the carrier side surface; forming a circuit on the resin layer; after forming a circuit on the resin layer, peeling off the carrier or the ultra-thin layer A copper layer; and a circuit formed on the surface of the ultra-thin copper layer or the surface of the carrier by burying the resin layer by removing the ultra-thin copper layer or the carrier after peeling off the carrier or the ultra-thin copper layer Exposed.
根據本發明,可提供一種具有良好放熱性之銅放熱材。 According to the present invention, it is possible to provide a copper heat radiation material having good heat radiation properties.
d1‧‧‧縱向 d1‧‧‧vertical
d2‧‧‧縱向 d2‧‧‧vertical
w1‧‧‧橫向 w1‧‧‧horizontal
w2‧‧‧橫向 w2‧‧‧horizontal
圖1係實施例之試樣之上表面示意圖。 Figure 1 is a schematic diagram of the upper surface of the sample of the embodiment.
圖2係實施例之試樣之剖面示意圖。 Fig. 2 is a schematic sectional view of a sample of the embodiment.
〔銅放熱材之形態及製造方法〕 [Form and manufacturing method of copper exothermic material]
作為本發明中使用之銅放熱材,可使用銅或銅合金。 As the copper heat radiation material used in the present invention, copper or a copper alloy can be used.
作為銅,典型而言可列舉:JIS H0500、JIS H3100所規定之磷脫氧銅(JIS H 3100合金編號C1201、C1220、C1221)、無氧銅(JIS H3100合金編號C1020)、及精銅(JIS H3100合金編號C1100)、電解銅箔等之純度95質量%以上、更佳為99.90質量%以上之銅。亦可設為含有合計為0.001~4.0質量%之Sn、Ag、Au、Co、Cr、Fe、In、Ni、P、Si、Te、Ti、Zn、B、Mn及Zr中一種以上的銅或銅合金。 Typical examples of copper include phosphorus deoxidized copper (JIS H 3100 alloy numbers C1201, C1220, and C1221), oxygen-free copper (JIS H3100 alloy number C1020), and refined copper (JIS H3100) as specified in JIS H0500 and JIS H3100. Alloy No. C1100), electrolytic copper foil and the like having a purity of 95% by mass or more, and more preferably 99.90% by mass or more of copper. It can also be set to contain copper or copper containing one or more of Sn, Ag, Au, Co, Cr, Fe, In, Ni, P, Si, Te, Ti, Zn, B, Mn, and Zr in a total amount of 0.001 to 4.0% by mass. Copper alloy.
作為銅合金,可進而列舉:磷青銅、卡遜合金、紅黃銅、黃銅、白銅、其他銅合金等。又,於本發明中作為銅或銅合金,亦可使用JIS H 3100~JIS H3510、JIS H 5120、JIS H 5121、JIS C 2520~JIS C 2801、JIS E 2101~JIS E 2102所規定者。再者,本說明書中只要無特別否定,則為了表示金屬規格而列舉之JIS規格意指2001年版之JIS規格。 Examples of the copper alloy include phosphor bronze, Carson alloy, red brass, brass, white copper, and other copper alloys. In addition, as copper or a copper alloy in the present invention, those specified in JIS H 3100 to JIS H3510, JIS H 5120, JIS H 5121, JIS C 2520 to JIS C 2801, and JIS E 2101 to JIS E 2102 can also be used. In addition, as long as there is no special negation in this specification, the JIS standard listed for metal specification means the JIS standard of 2001 edition.
關於磷青銅,典型而言,磷青銅係指以銅為主成分並含有Sn及質量少於Sn之P的銅合金。作為一例,磷青銅具有如下組成:含有3.5~11質量%之Sn、0.03~0.35質量%之P,剩餘部分由銅及不可避免之雜質構成。磷青銅亦可含有合計1.0質量%以下之Ni、Zn等元素。 Regarding phosphor bronze, typically, phosphor bronze refers to a copper alloy containing copper as a main component and containing Sn and P having a mass less than Sn. As an example, phosphor bronze has a composition including 3.5 to 11% by mass of Sn and 0.03 to 0.35% by mass of P, and the remainder is composed of copper and unavoidable impurities. Phosphor bronze may also contain elements such as Ni and Zn in a total amount of 1.0% by mass or less.
卡遜合金典型而言係指添加會與Si形成化合物之元素(例如Ni、Co及Cr之任一種以上),而於母相中作為第二相粒子而析出之銅合金。作為一例,卡遜合金具有如下組成:含有合計0.5~4.0質量%之Ni、Co及Cr之任一種以上、0.1~1.3質量%之Si,剩餘部分由銅及不可避免之雜質構成。作為其他例,卡遜合金具有如下組成:含有合計0.5~4.0質量%之Ni及Co之任一種以上、0.1~1.3質量%之Si、0.03~0.5質量%之Cr, 剩餘部分由銅及不可避免之雜質構成。進而作為其他例,卡遜合金具有如下組成:含有0.5~4.0質量%之Ni、0.1~1.3質量%之Si、0.5~2.5質量%之Co,剩餘部分由銅及不可避免之雜質構成。進而作為其他例,卡遜合金具有如下組成:含有0.5~4.0質量%之Ni、0.1~1.3質量%之Si、0.5~2.5質量%之Co、0.03~0.5質量%之Cr,剩餘部分由銅及不可避免之雜質構成。進而作為其他例,卡遜合金具有如下組成:含有0.2~1.3質量%之Si、0.5~2.5質量%之Co,剩餘部分由銅及不可避免之雜質構成。卡遜合金中亦可任意添加其他元素(例如Mg、Sn、B、Ti、Mn、Ag、P、Zn、As、Sb、Be、Zr、Al及Fe)。一般而言,此等其他元素添加至總計5.0質量%左右。例如,進而作為其他例,卡遜合金具有如下組成:含有合計0.5~4.0質量%之Ni、Co及Cr之任一種以上、0.1~1.3質量%之Si、0.01~2.0質量%之Sn、0.01~2.0質量%之Zn,剩餘部分由銅及不可避免之雜質構成。 The Carson alloy typically refers to a copper alloy that is added with an element that forms a compound with Si (for example, any one or more of Ni, Co, and Cr) and precipitates as second-phase particles in the mother phase. As an example, the Carson alloy has a composition containing any one or more of Ni, Co, and Cr in an amount of 0.5 to 4.0% by mass, and Si in an amount of 0.1 to 1.3% by mass, and the remainder is composed of copper and unavoidable impurities. As another example, the Carson alloy has a composition containing at least one of Ni and Co in a total of 0.5 to 4.0% by mass, Si in a range of 0.1 to 1.3% by mass, and Cr in a range of 0.03 to 0.5% by mass. The remainder consists of copper and unavoidable impurities. Furthermore, as another example, the Carson alloy has the following composition: containing 0.5 to 4.0% by mass of Ni, 0.1 to 1.3% by mass of Si, and 0.5 to 2.5% by mass of Co, and the remaining portion is composed of copper and unavoidable impurities. As another example, Carson alloy has the following composition: containing 0.5 to 4.0% by mass of Ni, 0.1 to 1.3% by mass of Si, 0.5 to 2.5% by mass of Co, and 0.03 to 0.5% by mass of Cr, and the remainder is made of copper and Inevitable impurity formation. Furthermore, as another example, the Carson alloy has a composition containing 0.2 to 1.3% by mass of Si and 0.5 to 2.5% by mass of Co, and the remainder is composed of copper and unavoidable impurities. Other elements (such as Mg, Sn, B, Ti, Mn, Ag, P, Zn, As, Sb, Be, Zr, Al, and Fe) can be arbitrarily added to the Carson alloy. Generally, these other elements are added to a total of about 5.0% by mass. For example, as another example, the Carson alloy has a composition including any one or more of Ni, Co, and Cr in a total amount of 0.5 to 4.0% by mass, Si in a range of 0.1 to 1.3% by mass, Sn in a range of 0.01 to 2.0% by mass, and 0.01 to 2.0% by mass. 2.0% by mass of Zn, and the remainder is made of copper and unavoidable impurities.
於本發明中,紅黃銅係指銅與鋅之合金,且含有1~20質量%之鋅、更佳為1~10質量%之鋅的銅合金。又,紅黃銅亦可含有0.1~1.0質量%之錫。 In the present invention, red brass refers to an alloy of copper and zinc, and a copper alloy containing 1 to 20% by mass of zinc, and more preferably 1 to 10% by mass of zinc. The red brass may contain tin in an amount of 0.1 to 1.0% by mass.
於本發明中,黃銅係指銅與鋅之合金,且尤其含有20質量%以上之鋅的銅合金。鋅之上限並無特別限定,為60質量%以下,較佳為45質量%以下,或40質量%以下。 In the present invention, brass refers to an alloy of copper and zinc, and especially a copper alloy containing 20% by mass or more of zinc. The upper limit of zinc is not particularly limited, but is 60% by mass or less, preferably 45% by mass or less, or 40% by mass or less.
於本發明中,白銅係指以銅為主成分,而含有60質量%至75質量%之銅、8.5質量%至19.5質量%之鎳、10質量%至30質量%之鋅的銅合金。 In the present invention, white copper refers to a copper alloy containing copper as a main component and containing 60 to 75% by mass of copper, 8.5% to 19.5% by mass nickel, and 10 to 30% by mass zinc.
於本發明中,其他銅合金係指含有合計為8.0質量%以下之 Zn、Sn、Ni、Mg、Fe、Si、P、Co、Mn、Zr、Ag、B、Cr及Ti中一種或兩種以上、剩餘部分由不可避免之雜質與銅構成的銅合金。 In the present invention, other copper alloys are those containing a total of 8.0% by mass or less. One or two or more of Zn, Sn, Ni, Mg, Fe, Si, P, Co, Mn, Zr, Ag, B, Cr, and Ti. The remaining portion is a copper alloy composed of unavoidable impurities and copper.
再者,亦可使用鋁或鋁合金、鎳、鎳合金、鎂、鎂合金、銀、銀合金、金、金合金、貴金屬、含有貴金屬之合金等之導熱率良好的金屬來代替本發明中用於銅放熱材之銅或銅合金而製作放熱材。再者,用於銅放熱材及放熱材之金屬之導熱率較佳為32W/(m‧K)以上。 Furthermore, metals with good thermal conductivity such as aluminum or aluminum alloys, nickel, nickel alloys, magnesium, magnesium alloys, silver, silver alloys, gold, gold alloys, precious metals, alloys containing precious metals, etc. may be used in place of the present invention. It is made of copper or copper alloy of copper heat radiating material. In addition, the thermal conductivity of the metal used for the copper heat radiation material and the heat radiation material is preferably 32 W / (m · K) or more.
作為本發明中使用之銅放熱材之形狀,並無特別限制,可加工成最終之電子零件之形狀,亦可為經部分地壓製加工之狀態。亦可不進行形狀加工,而為片、板、條、箔、棒、線、箱、或立體形狀(長方體、立方體、多面體、三角錐、圓柱、圓筒、圓錐、球、具有凹凸之立體、具有平面及/或曲面之立體)之形態。又,銅放熱材較佳為壓延銅箔或電解銅箔,更佳為壓延銅箔。再者,「銅箔」包含銅合金箔。 The shape of the copper heat-radiating material used in the present invention is not particularly limited, and it can be processed into the final shape of the electronic component, or it can be partially pressed. It is not necessary to perform shape processing, but it can be a sheet, plate, strip, foil, rod, line, box, or three-dimensional shape (cuboid, cube, polyhedron, triangular cone, cylinder, cylinder, cone, ball, three-dimensional with unevenness, Plane and / or curved solid). The copper heat-emitting material is preferably a rolled copper foil or an electrolytic copper foil, and more preferably a rolled copper foil. The "copper foil" includes a copper alloy foil.
銅放熱材之厚度並無特別限制,例如可根據用途適當調整成適宜厚度而使用。例如可設為1~5000μm左右或2~1000μm左右,就尤其是在形成電路而使用之情況時設為35μm以下,使用屏蔽帶當作屏蔽材之情況設為薄至18μm以下之觀點出發,於用作電子機器內部之連接器、屏蔽帶以外之屏蔽材、端子、外殼等的情況亦可應用在厚至70~1000μm之材料,而上限厚度並無特別規定。再者,屏蔽材可將其單獨地供至屏蔽用途,亦可為以與其他零件一併構成而供至屏蔽用途的屏蔽零件。 The thickness of the copper heat-radiating material is not particularly limited. For example, the thickness can be adjusted to a suitable thickness according to the application and used. For example, it can be set to about 1 to 5000 μm or about 2 to 1000 μm. Especially when it is used for forming a circuit, it can be set to 35 μm or less. When a shield tape is used as a shield material, it can be set to be thinner than 18 μm. In the case of being used as a shield material, a terminal, a shell, etc. other than a connector, a shielding tape inside an electronic device, it can also be applied to a material having a thickness of 70 to 1000 μm, and the upper limit thickness is not particularly specified. In addition, the shielding material may be used solely for shielding purposes, or it may be a shielding part that is configured to be used together with other parts for shielding purposes.
本發明之銅放熱材之利用雷射光波長為405nm之雷射顯微鏡測得之上述一個或兩個表面之面粗糙度Sz(表面之最大高度)為5μm以上。若銅放熱材之一個或兩個表面之表面粗糙度Sz未達5μm,則來自發 熱體之熱之放熱性變得不良。銅放熱材之一個或兩個表面之面粗糙度Sz較佳為7μm以上,更佳為10μm以上,進而更佳為14μm以上,進而更佳為15μm以上,進而更佳為25μm以上。上限並無特別限定,例如可為90μm以下,可為80μm以下,亦可為70μm以下。於面粗糙度Sz超過90μm之情況時,會有生產性會變低的情形。 The surface roughness Sz (the maximum height of the surface) of one or both of the surfaces measured by the laser microscope with a laser light wavelength of 405 nm of the copper exothermic material of the present invention is 5 μm or more. If the surface roughness Sz of one or both surfaces of the copper exothermic material is less than 5 μm, The heat exothermicity of the hot body becomes poor. The surface roughness Sz of one or both surfaces of the copper heat-radiating material is preferably 7 μm or more, more preferably 10 μm or more, even more preferably 14 μm or more, still more preferably 15 μm or more, and even more preferably 25 μm or more. The upper limit is not particularly limited, and may be, for example, 90 μm or less, 80 μm or less, or 70 μm or less. When surface roughness Sz exceeds 90 micrometers, productivity may fall.
此處,所謂銅放熱材之「表面」,基本上意指銅放熱材之合金層的表面,於進一步在銅放熱材之表面設置有耐熱層、防銹層、鉻酸鹽處理層及矽烷偶合處理層等表面處理層的情況,意指設置該表面處理層後之最表面。 Here, the "surface" of the copper heat-radiating material basically means the surface of the alloy layer of the copper heat-radiating material. On the surface of the copper heat-radiating material, a heat-resistant layer, a rust-proof layer, a chromate-treated layer, and a silane coupling The case of a surface treatment layer such as a treatment layer means the outermost surface after the surface treatment layer is provided.
本發明之銅放熱材之一個或兩個表面之表面粗糙度Sa(表面之算術平均粗糙度)較佳為0.13μm以上。若銅放熱材之一個或兩個表面之表面粗糙度Sa未達0.13μm,則有來自發熱體之熱之放熱性降低的疑慮。銅放熱材之一個或兩個表面之表面粗糙度Sa更佳為0.20μm以上,進而更佳為0.25μm以上,進而更佳為0.30μm以上,典型而言為0.1~1.0μm,更典型而言為0.1~0.9μm。 The surface roughness Sa (arithmetic average surface roughness) of one or both surfaces of the copper heat radiation material of the present invention is preferably 0.13 μm or more. If the surface roughness Sa of one or both surfaces of the copper heat radiating material is less than 0.13 μm, there is a concern that the heat radiating property of the heat from the heating element is reduced. The surface roughness Sa of one or both surfaces of the copper heat-radiating material is more preferably 0.20 μm or more, even more preferably 0.25 μm or more, and even more preferably 0.30 μm or more, typically 0.1 to 1.0 μm, and more typically It is 0.1 to 0.9 μm.
本發明銅放熱材之一個或兩個表面之Sku(表面高度分佈之尖度、峰度(Kurtosis))較佳為6以上。若銅放熱材之一個或兩個表面之Sku未達6,則有來自發熱體之熱之放熱性降低的疑慮。銅放熱材之一個或兩個表面之Sku更佳為9以上,進而更佳為10以上,進而更佳為40以上,進而更佳為60以上,典型而言為3~200,更典型而言為4~180。 The Sku (the sharpness and kurtosis of the surface height distribution) of one or both surfaces of the copper heat radiating material of the present invention is preferably 6 or more. If the Sku of one or both surfaces of the copper exothermic material is less than 6, there is a concern that the exothermic property of the heat from the heating element is reduced. The Sku of one or both surfaces of the copper heat-radiating material is more preferably 9 or more, further preferably 10 or more, further preferably 40 or more, and even more preferably 60 or more, typically 3 to 200, and more typically It is 4 ~ 180.
關於本發明之銅放熱材,利用雷射光波長為405nm之雷射顯微鏡測得之上述一個或兩個表面之表面積設為A,俯視時之面積設為B時的表面積比A/B較佳為1.35以上。若一個或兩個表面之表面積比A/B 未達1.35,則有來自發熱體之熱之放熱性降低的疑慮。表面之表面積比A/B更佳為1.36以上,進而更佳為1.38以上,進而更佳為1.40以上,進而更佳為1.45以上,典型而言為1.00~8.00,更典型而言為1.10~7.50。 Regarding the copper heat-emitting material of the present invention, the surface area of one or both of the surfaces measured by a laser microscope with a laser light wavelength of 405 nm is set to A, and the surface area ratio A / B when the area in plan view is set to B is Above 1.35. If the surface area ratio of one or two surfaces is A / B If it is less than 1.35, there is a concern that the heat release property of the heat from the heating element is reduced. The surface area ratio is more than 1.36, more preferably 1.38 or more, even more preferably 1.40 or more, even more preferably 1.45 or more, typically 1.00 to 8.00, and more typically 1.10 to 7.50. .
本發明之銅放熱材之一個或兩個表面之輻射率較佳為0.092以上。若銅放熱材之一個或兩個表面之輻射率為0.092以上,則可良好地對來自發熱體之熱進行放熱。銅放熱材之一個或兩個表面之輻射率更佳為0.10以上,進而更佳為0.123以上,進而更佳為0.154以上,進而更佳為0.185以上,進而更佳為0.246以上。 The emissivity of one or both surfaces of the copper heat radiating material of the present invention is preferably 0.092 or more. If the emissivity of one or both surfaces of the copper heat radiating material is 0.092 or more, the heat from the heating element can be radiated well. The emissivity of one or both surfaces of the copper heat-radiating material is more preferably 0.10 or more, even more preferably 0.123 or more, even more preferably 0.154 or more, even more preferably 0.185 or more, and even more preferably 0.246 or more.
本發明之銅放熱材之一個或兩個表面之輻射率並不需要特別規定上限,典型而言為1以下,更典型而言為0.99以下,更典型而言為0.95以下,更典型而言為0.90以下,更典型而言為0.85以下,更典型而言為0.80以下。再者,若銅放熱材之一個或兩個表面之輻射率為0.90以下,則製造性提高。 The emissivity of one or both surfaces of the copper heat-radiating material of the present invention does not need to specify an upper limit, typically 1 or less, more typically 0.99 or less, more typically 0.95 or less, and more typically 0.90 or less, more typically 0.85 or less, and more typically 0.80 or less. In addition, if the emissivity of one or both surfaces of the copper heat radiating material is 0.90 or less, the manufacturability is improved.
關於本發明之銅放熱材,較佳為將一個或兩個表面之白色板(光源設為D65、設為10度視野時,該白色板之X10Y10Z10表色系統(JIS Z8701 1999)之三刺激值為X10=80.7、Y10=85.6、Z10=91.5,且於L*a*b*表色系統之該白色板之物體色為L*=94.14、a*=-0.90、b*=0.24)之物體色設為基準色時之色差且基於JISZ8730之色差△L(JIS Z8729(2004)規定之L*a*b*表色系統中之兩個物體色之CIE亮度L*的差)滿足△L≦-35。如此,若銅放熱材表面之色差△L滿足△L≦-35,則可良好地對自發熱體吸收之導熱所致之熱、輻射熱、對流熱等進行吸收以及放熱。表面之色差△L更佳為△L≦-40,進而更佳為△L≦-45,進而更佳為△L≦-50,進而更佳 為△L≦-60,進而更佳為△L≦-70,典型而言為-90≦△L≦-5、-90≦△L≦-10、-88≦△L≦-35,或-85≦△L≦-35。 Regarding the copper heat-generating material of the present invention, it is preferable to use a white plate with one or two surfaces (when the light source is set to D65 and the field of view is 10 degrees, the X 10 Y 10 Z 10 color system of the white plate (JIS Z8701 1999 The three stimulus values are X 10 = 80.7, Y 10 = 85.6, Z 10 = 91.5, and the object color of the white board in the L * a * b * color system is L * = 94.14, a * = -0.90 , b * = 0.24) when the color of the object color and the reference color is set based on the CIE lightness two L * a * b * color system stipulated JISZ8730 the color difference △ L (JIS Z8729 (2004) in the color of the object L * Difference) satisfies ΔL ≦ -35. In this way, if the color difference ΔL on the surface of the copper exothermic material satisfies ΔL ≦ -35, the heat, radiant heat, and convective heat caused by the thermal conduction absorbed from the heating element can be well absorbed and exothermic. The surface color difference △ L is more preferably △ L ≦ -40, further more preferably △ L ≦ -45, even more preferably △ L ≦ -50, even more preferably △ L ≦ -60, and even more preferably △ L ≦ -70, typically -90 ≦ △ L ≦ -5, -90 ≦ △ L ≦ -10, -88 ≦ △ L ≦ -35, or -85 ≦ △ L ≦ -35.
關於本發明之銅放熱材,較佳為將一個或兩個表面之白色板(光源設為D65、設為10度視野時,該白色板之X10Y10Z10表色系統(JIS Z8701 1999)之三刺激值為X10=80.7、Y10=85.6、Z10=91.5,且於L*a*b*表色系統之該白色板之物體色為L*=94.14、a*=-0.90、b*=0.24)之物體色設為基準色時之色差且基於JISZ8730之色差△a(JIS Z8729(2004)規定之L*a*b*表色系統中之兩個物體色之色坐標a*的差)滿足△a≦15。如此,若銅放熱材表面之色差△a滿足△a≦15,則可良好地對自發熱體吸收之導熱所致之熱、輻射熱、對流熱等進行吸收。表面之色差△a更佳為△a≦10,進而更佳為△a≦5,進而更佳為△a≦4,典型而言為-10≦△a≦15,更典型而言為-8≦△a≦15。 Regarding the copper heat-generating material of the present invention, it is preferable to use a white plate with one or two surfaces (when the light source is set to D65 and the field of view is 10 degrees, the X 10 Y 10 Z 10 color system of the white plate (JIS Z8701 1999 The three stimulus values are X 10 = 80.7, Y 10 = 85.6, and Z 10 = 91.5, and the object color of the white plate in the L * a * b * color system is L * = 94.14, a * =-0.90 , b * = 0.24) when the color of the object color as a reference color based on JISZ8730 and the color difference △ a (JIS Z8729 (2004) of a predetermined two L * a * b * color system, the color of the object color coordinates a * Difference) satisfies Δa ≦ 15. In this way, if the color difference Δa on the surface of the copper heat-emitting material satisfies Δa ≦ 15, the heat, radiant heat, convection heat, and the like caused by the heat conduction absorbed from the heating element can be well absorbed. The surface color difference Δa is more preferably △ a ≦ 10, further more preferably △ a ≦ 5, even more preferably △ a ≦ 4, typically -10 ≦ △ a ≦ 15, and more typically -8 ≦ △ a ≦ 15.
關於本發明之銅放熱材,較佳為將一個或兩個表面之白色板(光源設為D65、設為10度視野時,該白色板之X10Y10Z10表色系統(JIS Z8701 1999)之三刺激值為X10=80.7、Y10=85.6、Z10=91.5,且於L*a*b*表色系統之該白色板之物體色為L*=94.14、a*=-0.90、b*=0.24)之物體色設為基準色時之色差且基於JISZ8730之色差△b(JIS Z8729(2004)規定之L*a*b*表色系統中之兩個物體色之色坐標b*的差)滿足△b≦17。如此,若銅放熱材表面之色差△b滿足△b≦17,則可良好地對自發熱體吸收之導熱所致之熱、輻射熱、對流熱等進行吸收。表面之色差△b更佳為△b≦15,進而更佳為△b≦5,進而更佳為△b≦3,典型而言為-15≦△b≦17,更典型而言為-10≦△b≦17。 Regarding the copper heat-generating material of the present invention, it is preferable to use a white plate with one or two surfaces (when the light source is set to D65 and the field of view is 10 degrees, the X 10 Y 10 Z 10 color system of the white plate (JIS Z8701 1999 The three stimulus values are X 10 = 80.7, Y 10 = 85.6, Z 10 = 91.5, and the object color of the white board in the L * a * b * color system is L * = 94.14, a * = -0.90 , b * = 0.24) is set to the color of the object color and the reference color based upon the color of JISZ8730 △ b (JIS Z8729 (2004) prescribed the L * a * b * color system of table two object colors of the color coordinate b * Difference) satisfies Δb ≦ 17. In this way, if the color difference Δb on the surface of the copper heat-emitting material satisfies Δb ≦ 17, the heat, radiant heat, convection heat, and the like caused by the thermal conduction absorbed from the heating element can be well absorbed. The surface color difference △ b is more preferably △ b ≦ 15, further more preferably △ b ≦ 5, even more preferably △ b ≦ 3, typically -15 ≦ △ b ≦ 17, and more typically -10 ≦ Δb ≦ 17.
關於本發明之銅放熱材,較佳為將一個或兩個表面之白色板(光源設為D65、設為10度視野時,該白色板之X10Y10Z10表色系統(JIS Z8701 1999)之三刺激值為X10=80.7、Y10=85.6、Z10=91.5,且於L*a*b*表色系統之該白色板之物體色為L*=94.14、a*=-0.90、b*=0.24)之物體色設為基準色時之色差且基於JISZ8730之色差△E*ab滿足47≦△E*ab。如此,若銅放熱材表面之色差△E*ab滿足47≦△E*ab,則可良好地對自發熱體吸收之導熱所致之熱、輻射熱、對流熱等進行吸收。表面之色差△E*ab更佳為50≦△E*ab,進而更佳為55≦△E*ab,進而更佳為60≦△E*ab,進而更佳為71≦△E*ab,典型而言為47≦△E*ab≦90,更典型而言為47≦△E*ab≦88,更典型而言為47≦△E*ab≦85。 Regarding the copper heat-generating material of the present invention, it is preferable to use a white plate with one or two surfaces (when the light source is set to D65 and the field of view is 10 degrees, the X 10 Y 10 Z 10 color system of the white plate (JIS Z8701 1999 The three stimulus values are X 10 = 80.7, Y 10 = 85.6, and Z 10 = 91.5, and the object color of the white plate in the L * a * b * color system is L * = 94.14, a * =-0.90 (, B * = 0.24) The color difference when the object color is set as the reference color and the color difference ΔE * ab based on JISZ8730 satisfies 47 ≦ ΔE * ab. In this way, if the color difference ΔE * ab on the surface of the copper heat-emitting material satisfies 47 ≦ ΔE * ab, the heat, radiant heat, and convection heat caused by the thermal conduction absorbed from the heating element can be well absorbed. The surface color difference ΔE * ab is more preferably 50 ≦ △ E * ab, further more preferably 55 ≦ △ E * ab, even more preferably 60 ≦ △ E * ab, and even more preferably 71 ≦ △ E * ab, Typically, 47 ≦ △ E * ab ≦ 90, more typically 47 ≦ △ E * ab ≦ 88, and more typically 47 ≦ △ E * ab ≦ 85.
此處,上述色差△L、△a、△b係分別利用色差計進行測定,採取黑/白/紅/綠/黃/藍,使用基於JIS Z8730(2009)之L*a*b*表色系統而表示之綜合指標,且表示為△L:白黑、△a:紅綠、△b:黃藍。又,△E*ab係使用該等之色差而以下述式表示。該色差(△L、△a、△b)可使用HunterLab公司製造之色差計MiniScan XE Plus而進行測定。 Here, the above-mentioned color differences ΔL, Δa, and Δb are measured using a color difference meter, respectively, taking black / white / red / green / yellow / blue, and using L * a * b * based on JIS Z8730 (2009). A comprehensive index expressed systematically, and expressed as △ L: white and black, △ a: red and green, and △ b: yellow and blue. In addition, ΔE * ab is expressed by the following formula using these color differences. This color difference (ΔL, Δa, Δb) can be measured using a color difference meter MiniScan XE Plus manufactured by HunterLab.
本發明之銅放熱材於一個或兩個面形成含有選自Cu、Co、Ni、W、P、Zn、Cr、Fe、Sn及Mo中之一種以上之金屬的合金層。藉由此種構成,可調整上述色差以及表面粗糙度,並可藉由色差之調整而良好地對自發熱體吸收之導熱所致之熱、輻射熱、對流熱等進行吸收。再者,該合金層可藉由如電鍍、無電解鍍敷及浸鍍般之濕式鍍敷、或如濺鍍、CVD、 PDV般之乾式鍍敷而形成。自成本之觀點而言,較佳為電鍍。 The copper heat radiating material of the present invention forms an alloy layer containing one or more metals selected from Cu, Co, Ni, W, P, Zn, Cr, Fe, Sn, and Mo on one or both sides. With this configuration, the above-mentioned chromatic aberration and surface roughness can be adjusted, and the heat, radiant heat, and convective heat caused by thermal conduction absorbed from the heating element can be well absorbed by adjusting the chromatic aberration. Furthermore, the alloy layer may be formed by wet plating such as electroplating, electroless plating, and dip plating, or by sputtering, CVD, It is formed by PDV-like dry plating. From the viewpoint of cost, electroplating is preferred.
本發明之銅放熱材之合金層例如可藉單獨使用或組合以下之鍍敷條件,並進一步控制其處理次數而形成。再者,本發明所使用之除膠渣處理、電解、表面處理或鍍敷等使用的處理液之剩餘部分只要未特別明確記載,則為水。 The alloy layer of the copper heat-generating material of the present invention can be formed, for example, by using the following plating conditions alone or in combination, and further controlling the number of treatments. It should be noted that the remainder of the treatment liquid used in the present invention, such as slag removal treatment, electrolysis, surface treatment, or plating, is water unless specifically stated otherwise.
(合金層形成鍍敷條件1:Cu層) (Alloy layer formation plating conditions 1: Cu layer)
‧鍍敷液組成:Cu濃度5~20g/L ‧Plating solution composition: Cu concentration 5 ~ 20g / L
‧pH值:1.0~5.0 ‧PH value: 1.0 ~ 5.0
‧溫度:25~55℃ ‧Temperature: 25 ~ 55 ℃
‧電流密度:2~70A/dm2 ‧Current density: 2 ~ 70A / dm 2
‧鍍敷時間:0.2~20秒 ‧Plating time: 0.2 ~ 20 seconds
(合金層形成鍍敷條件2:Cu-Co-Ni層) (Plating conditions for alloy layer formation 2: Cu-Co-Ni layer)
‧鍍敷液組成:Cu濃度10~20g/L、Co濃度5~10g/L、Ni濃度5~10g/L ‧Plating solution composition: Cu concentration 10 ~ 20g / L, Co concentration 5 ~ 10g / L, Ni concentration 5 ~ 10g / L
‧pH值:2.0~6.0 ‧PH value: 2.0 ~ 6.0
‧溫度:25~55℃ ‧Temperature: 25 ~ 55 ℃
‧電流密度:10~60A/dm2 ‧Current density: 10 ~ 60A / dm 2
‧鍍敷時間:0.3~10秒 ‧Plating time: 0.3 ~ 10 seconds
(合金層形成鍍敷條件3:Cu-Co-Ni-P層) (Plating conditions for alloy layer formation 3: Cu-Co-Ni-P layer)
‧鍍敷液組成:Cu濃度10~20g/L、Co濃度5~10g/L、Ni濃度5~10g/L、P濃度10~800mg/L ‧Plating composition: Cu concentration 10 ~ 20g / L, Co concentration 5 ~ 10g / L, Ni concentration 5 ~ 10g / L, P concentration 10 ~ 800mg / L
‧pH值:2.0~6.0 ‧PH value: 2.0 ~ 6.0
‧溫度:25~55℃ ‧Temperature: 25 ~ 55 ℃
‧電流密度:10~60A/dm2 ‧Current density: 10 ~ 60A / dm 2
‧鍍敷時間:0.3~10秒 ‧Plating time: 0.3 ~ 10 seconds
(合金層形成鍍敷條件4:Ni-Zn層) (Plating conditions for alloy layer formation 4: Ni-Zn layer)
‧鍍敷液組成:Ni濃度10~60g/L、Zn濃度5~30g/L ‧Plating composition: Ni concentration 10 ~ 60g / L, Zn concentration 5 ~ 30g / L
‧pH值:3.5~6.0 ‧PH value: 3.5 ~ 6.0
‧溫度:25~55℃ ‧Temperature: 25 ~ 55 ℃
‧電流密度:0.2~3.0A/dm2 ‧Current density: 0.2 ~ 3.0A / dm 2
‧鍍敷時間:4~181秒 ‧Plating time: 4 ~ 181 seconds
(合金層形成鍍敷條件5:Cu-Ni-P層) (Plating conditions for alloy layer formation 5: Cu-Ni-P layer)
‧鍍敷液組成:Cu濃度5~15g/L、Ni濃度10~30g/L、P濃度10~800mg/L ‧Plating composition: Cu concentration 5 ~ 15g / L, Ni concentration 10 ~ 30g / L, P concentration 10 ~ 800mg / L
‧pH值:2.0~5.0 ‧PH value: 2.0 ~ 5.0
‧溫度:25~55℃ ‧Temperature: 25 ~ 55 ℃
‧電流密度:10~60A/dm2 ‧Current density: 10 ~ 60A / dm 2
‧鍍敷時間:0.2~10秒 ‧Plating time: 0.2 ~ 10 seconds
於藉由上述合金層形成鍍敷條件1~3、5而形成合金層之情況,需要將表面處理分成多次進行。 In the case where the alloy layer is formed by the above-mentioned alloy layer forming plating conditions 1 to 3 and 5, it is necessary to divide the surface treatment into multiple times.
(合金層形成鍍敷條件6:Cr-Zn層) (Plating conditions for alloy layer formation 6: Cr-Zn layer)
‧鍍敷液組成:Cr濃度2~8g/L、Zn濃度0.1~1.0g/L ‧Plating composition: Cr concentration 2 ~ 8g / L, Zn concentration 0.1 ~ 1.0g / L
‧pH值:2.0~4.0 ‧PH value: 2.0 ~ 4.0
‧溫度:40~60℃ ‧Temperature: 40 ~ 60 ℃
‧電流密度:0.5~3.0A/dm2 ‧Current density: 0.5 ~ 3.0A / dm 2
‧鍍敷時間:0.2~10秒 ‧Plating time: 0.2 ~ 10 seconds
(合金層形成鍍敷條件7:Cu-Ni-W層) (Alloy layer formation plating conditions 7: Cu-Ni-W layer)
‧鍍敷液組成:Cu濃度5~15g/L、Ni濃度10~40g/L、W濃度10~1000mg/L ‧Plating composition: Cu concentration 5 ~ 15g / L, Ni concentration 10 ~ 40g / L, W concentration 10 ~ 1000mg / L
‧pH值:2.0~4.0 ‧PH value: 2.0 ~ 4.0
‧溫度:40~60℃ ‧Temperature: 40 ~ 60 ℃
‧電流密度:10~60A/dm2 ‧Current density: 10 ~ 60A / dm 2
‧鍍敷時間:0.2~10秒 ‧Plating time: 0.2 ~ 10 seconds
(合金層形成鍍敷條件8:Ni-W-Sn層) (Alloy layer formation plating conditions 8: Ni-W-Sn layer)
‧鍍敷液組成:Ni濃度10~50g/L、W濃度300~3000mg/L、Sn濃度100~1000mg/L ‧Plating composition: Ni concentration 10 ~ 50g / L, W concentration 300 ~ 3000mg / L, Sn concentration 100 ~ 1000mg / L
‧pH值:3.0~6.5 ‧PH value: 3.0 ~ 6.5
‧溫度:40~60℃ ‧Temperature: 40 ~ 60 ℃
‧電流密度:0.1~4.0A/dm2 ‧Current density: 0.1 ~ 4.0A / dm 2
‧鍍敷時間:10~60秒 ‧Plating time: 10 ~ 60 seconds
(合金層形成鍍敷條件7:Cu-Ni-Mo-Fe層) (Alloy layer forming plating conditions 7: Cu-Ni-Mo-Fe layer)
‧鍍敷液組成:Cu濃度5~15g/L、Ni濃度10~40g/L、Mo濃度50~5000mg/L、Fe濃度0.5~5.0g/L ‧Plating composition: Cu concentration 5 ~ 15g / L, Ni concentration 10 ~ 40g / L, Mo concentration 50 ~ 5000mg / L, Fe concentration 0.5 ~ 5.0g / L
‧pH值:2.0~5.0 ‧PH value: 2.0 ~ 5.0
‧溫度:40~60℃ ‧Temperature: 40 ~ 60 ℃
‧電流密度:10~60A/dm2 ‧Current density: 10 ~ 60A / dm 2
‧鍍敷時間:5~30秒 ‧Plating time: 5 ~ 30 seconds
再者,形成合金層之鍍敷液中亦可使用公知之添加劑。作為添加劑,例如亦可使用促進金屬離子析出之添加劑、使金屬離子於鍍敷劑中穩定存在之添加劑、使金屬離子均勻析出之添加劑、調平劑、光澤劑。 Moreover, a well-known additive can also be used for the plating liquid which forms an alloy layer. As the additive, for example, an additive that promotes precipitation of metal ions, an additive that stabilizes the presence of metal ions in the plating agent, an additive that uniformly precipitates metal ions, a leveling agent, and a glossing agent can also be used.
例如亦可使用氯、雙(3-磺丙基)二硫化物、胺化合物、明膠、纖維素、乙二醇、硫脲、硫化物類、有機硫化合物類等作為添加劑。添加劑之濃度設為通常使用之濃度即可。藉由添加該添加劑,可控制表面之色調、凹凸之狀態。 For example, chlorine, bis (3-sulfopropyl) disulfide, amine compounds, gelatin, cellulose, ethylene glycol, thiourea, sulfides, organic sulfur compounds, and the like may be used as additives. The concentration of the additives may be a concentration that is generally used. By adding this additive, the hue and unevenness of the surface can be controlled.
於使用上述合金層之情況,合金層所含之選自Co、Ni、W、P、Zn、Cr、Fe、Sn及Mo中之一種以上之金屬之合計附著量較佳為0.1~100000μg/dm2,較佳為5~80000μg/dm2,較佳為10~85000μg/dm2,較佳為100~80000μg/dm2。於低於0.1μg/dm2之情況,有時會有設置合金層所致之效果變小的情形。又,於超過100000μg/dm2之情況,有時會有生產性降低的情形。又,於用在將電路形成於銅放熱材,並使用該電路傳輸高頻訊號等之情況時,合金層所含之Ni之附著量之上限較佳為4000μg/dm2以下,更佳為3000μg/dm2以下,更佳為1400μg/dm2以下,可更佳地設為1000μg/dm2以下。Ni之附著量之下限典型而言為50μg/dm2以上,更佳為100μg/dm2,可更佳地設為300μg/dm2以上。即,合金層所含之Ni之附著量典型而言為50μg/dm2以上且4000μg/dm2以下。 When the above alloy layer is used, the total adhesion amount of one or more metals selected from the group consisting of Co, Ni, W, P, Zn, Cr, Fe, Sn, and Mo is preferably 0.1 to 100,000 μg / dm. 2 , preferably 5 to 80,000 μg / dm 2 , preferably 10 to 85,000 μg / dm 2 , and preferably 100 to 80,000 μg / dm 2 . When it is less than 0.1 μg / dm 2 , the effect of providing the alloy layer may be reduced in some cases. Moreover, when it exceeds 100,000 microgram / dm <2> , productivity may fall. In addition, when the circuit is formed on a copper heat-dissipating material, and the circuit is used to transmit high-frequency signals, the upper limit of the adhesion amount of Ni contained in the alloy layer is preferably 4000 μg / dm 2 or less, and more preferably 3000 μg / dm 2 or less, more preferably 1400 μg / dm 2 or less, and more preferably 1000 μg / dm 2 or less. The lower limit of the adhesion amount of Ni is typically 50 μg / dm 2 or more, more preferably 100 μg / dm 2 , and more preferably 300 μg / dm 2 or more. That is, the Ni deposition amount is typically contained in the alloy layer in terms of 50μg / dm 2 or more and 4000μg / dm 2 or less.
又,於用在將電路形成於銅放熱材,並使用該電路傳輸高頻訊號等之情況時,上述合金層所含之Co、Fe及Mo之附著量之上限分別較佳為6000μg/dm2以下,更佳為5000μg/dm2以下,更佳為3000μg/dm2以下,更佳為 2400μg/dm2以下,可更佳地設為2000μg/dm2以下。Co之附著量之下限典型而言為50μg/dm2以上,更佳為100μg/dm2,可更佳地設為300μg/dm2以上。即,合金層所含之Co之附著量典型而言為50μg/dm2以上且6000μg/dm2以下。又,上述合金層除了具有Cu-Co-Ni合金鍍層以外,而具有含有Co及/或Ni之層的情況時,可將合金層整體中之Ni之合計附著量及Co之附著量設為上述範圍。 In addition, when the circuit is formed on a copper heat-radiating material and the circuit is used to transmit high-frequency signals, the upper limits of the adhesion amounts of Co, Fe, and Mo contained in the alloy layer are preferably 6000 μg / dm 2 respectively. or less, more preferably 5000μg / dm 2 or less, more preferably 3000μg / dm 2 or less, more preferably 2400μg / dm 2 or less, more preferably set to 2000μg / dm 2 or less. The lower limit of the adhesion amount of Co is typically 50 μg / dm 2 or more, more preferably 100 μg / dm 2 , and more preferably 300 μg / dm 2 or more. That is, a typical deposition amount of Co included in the alloy layer in terms of 50μg / dm 2 or more and 6000μg / dm 2 or less. In addition, when the alloy layer includes a layer containing Co and / or Ni in addition to the Cu-Co-Ni alloy plating layer, the total adhesion amount of Ni and the deposition amount of Co in the entire alloy layer may be set as described above. range.
於上述合金層含有Cu之情況,並無需要特地設置其上限,典型而言為100mg/dm2以下,更典型而言為90mg/dm2以下,更典型而言為80mg/dm2以下。又,於上述合金層含有Cu之情況,並無需要特地設置其下限,典型而言為0.01μg/dm2以上,更典型而言為0.1μg/dm2以上,更典型而言為1μg/dm2以上,典型而言0.01μg/dm2以上且100mg/dm2以下。 When the above alloy layer contains Cu, there is no need to specifically set an upper limit thereof, typically 100 mg / dm 2 or less, more typically 90 mg / dm 2 or less, and more typically 80 mg / dm 2 or less. When the above-mentioned alloy layer contains Cu, there is no need to specifically set the lower limit, which is typically 0.01 μg / dm 2 or more, more typically 0.1 μg / dm 2 or more, and more typically 1 μg / dm. 2 or more, typically 0.01 μg / dm 2 or more and 100 mg / dm 2 or less.
又,亦可於銅放熱材所使用之銅或銅合金之表面或合金層之表面設置表面處理層。表面處理層可為粗化處理層、耐熱層、防銹層、鉻酸鹽處理層、矽烷偶合處理層、鍍層。表面處理層可藉由於銅放熱材之表面形成黑色樹脂而構成。黑色樹脂例如可藉由使黑色塗料滲入環氧樹脂而僅塗佈特定厚度並進行乾燥而形成。 In addition, a surface treatment layer may be provided on the surface of copper or copper alloy or the surface of the alloy layer used for the copper heat-emitting material. The surface treatment layer may be a roughening treatment layer, a heat-resistant layer, a rust prevention layer, a chromate treatment layer, a silane coupling treatment layer, and a plating layer. The surface treatment layer can be formed by forming a black resin on the surface of the copper heat-emitting material. The black resin can be formed by, for example, impregnating a black paint with an epoxy resin, applying only a specific thickness, and drying.
<表面處理層> <Surface treatment layer>
於銅放熱材中所使用之銅或銅合金之表面或者合金層之表面,例如為了使與接著劑層之密合性變得良好等,亦可藉由實施粗化處理而設置粗化處理層。粗化處理例如可藉由以銅或銅合金形成粗化粒子而進行。粗化處理亦可為微細者。粗化處理層亦可為選自由銅、鎳、鈷、磷、鎢、砷、鉬、鉻及鋅所組成之群中之任一單質或含有任1種以上單質之合金所構成之層 等。又,於以銅或銅合金形成粗化粒子後,進而亦可進行以鎳、鈷、銅、鋅之單質或合金等設置二次粒子或三次粒子之粗化處理。其後,亦可以鎳、鈷、銅、鋅之單質或合金等形成耐熱層或防銹層,進而亦可對其表面實施鉻酸鹽處理、矽烷偶合處理等處理。或者亦可不進行粗化處理,而以鎳、鈷、銅、鋅之單質或合金等形成耐熱層或防銹層,進而對其表面實施鉻酸鹽處理、矽烷偶合處理等處理。即,亦可於粗化處理層或合金層之表面形成選自由耐熱層、防銹層、鉻酸鹽處理層及矽烷偶合處理層所組成之群中之1種以上之層,亦可於銅放熱材中所使用之銅或銅合金之表面或者合金層形成選自由耐熱層、防銹層、鉻酸鹽處理層及矽烷偶合處理層所組成之群中之1種以上之層。再者,上述耐熱層、防銹層、鉻酸鹽處理層、矽烷偶合處理層亦可分別形成為複數層(例如2層以上、3層以上等)。 The surface of the copper or copper alloy or the surface of the alloy layer used for the copper heat-generating material may be provided with a roughening treatment layer by performing a roughening treatment, for example, to improve the adhesion with the adhesive layer. . The roughening treatment can be performed, for example, by forming roughened particles with copper or a copper alloy. The roughening process may be fine. The roughened layer may be a layer composed of any elementary substance selected from the group consisting of copper, nickel, cobalt, phosphorus, tungsten, arsenic, molybdenum, chromium, and zinc, or an alloy containing any one or more elementary substances. Wait. Further, after forming roughened particles with copper or a copper alloy, a roughening treatment in which secondary particles or tertiary particles are provided with a simple substance or alloy of nickel, cobalt, copper, zinc, or the like may be further performed. Thereafter, a single element or alloy of nickel, cobalt, copper, zinc, or the like may be used to form a heat-resistant layer or a rust-proof layer, and the surface may be further subjected to a chromate treatment or a silane coupling treatment. Alternatively, without performing roughening treatment, a heat-resistant layer or a rust-preventive layer may be formed of a simple substance or alloy of nickel, cobalt, copper, zinc, or the like, and then the surface may be subjected to a treatment such as chromate treatment or silane coupling treatment. That is, one or more layers selected from the group consisting of a heat-resistant layer, a rust-proof layer, a chromate-treated layer, and a silane coupling-treated layer may be formed on the surface of the roughened layer or the alloy layer. The surface or alloy layer of the copper or copper alloy used in the exothermic material forms one or more layers selected from the group consisting of a heat-resistant layer, a rust-proof layer, a chromate-treated layer, and a silane coupling-treated layer. Further, the heat-resistant layer, the rust-proof layer, the chromate-treated layer, and the silane coupling-treated layer may be formed in a plurality of layers (for example, two or more layers, three or more layers, etc.).
此處所謂鉻酸鹽處理層,意指經利用含有鉻酸酐、鉻酸、重鉻酸、鉻酸鹽或重鉻酸鹽之液體處理之層。鉻酸鹽處理層亦可含有鈷、鐵、鎳、鉬、鋅、鉭、銅、鋁、磷、鎢、錫、砷及鈦等元素(可為金屬、合金、氧化物、氮化物、硫化物等任何形態)。作為鉻酸鹽處理層之具體例,可列舉經鉻酸酐或重鉻酸鉀水溶液處理之鉻酸鹽處理層,或是經含有鉻酸酐或重鉻酸鉀及鋅之處理液處理之鉻酸鹽處理層等。 The chromate treatment layer herein means a layer treated with a liquid containing chromic anhydride, chromic acid, dichromic acid, chromate, or dichromate. The chromate treatment layer may also contain elements such as cobalt, iron, nickel, molybdenum, zinc, tantalum, copper, aluminum, phosphorus, tungsten, tin, arsenic, and titanium (may be metals, alloys, oxides, nitrides, sulfides And so on). Specific examples of the chromate treatment layer include a chromate treatment layer treated with an aqueous solution of chromic anhydride or potassium dichromate, or a chromate treated with a treatment solution containing chromic anhydride, potassium dichromate, and zinc. Processing layer, etc.
作為耐熱層、防銹層,可使用周知之耐熱層、防銹層。例如,耐熱層及/或防銹層亦可為含有選自鎳、鋅、錫、鈷、鉬、銅、鎢、磷、砷、鉻、釩、鈦、鋁、金、銀、鉑族元素、鐵、鉭之群中之一種以上之元素的層,亦可為由選自鎳、鋅、錫、鈷、鉬、銅、鎢、磷、砷、鉻、釩、鈦、鋁、金、銀、鉑族元素、鐵、鉭之群中之一種以上之元素構成之金屬 層或合金層。又,耐熱層及/或防銹層亦可含有包含選自鎳、鋅、錫、鈷、鉬、銅、鎢、磷、砷、鉻、釩、鈦、鋁、金、銀、鉑族元素、鐵、鉭之群中之一種以上之元素的氧化物、氮化物、矽化物。又,耐熱層及/或防銹層亦可為含有鎳-鋅合金之層。又,耐熱層及/或防銹層亦可為鎳-鋅合金層。上述鎳-鋅合金層可為除不可避免之雜質以外,含有鎳50wt%~99wt%、鋅50wt%~1wt%者。上述鎳-鋅合金層之鋅及鎳之合計附著量為5~1000mg/m2,較佳為10~500mg/m2,較佳亦可為20~100mg/m2。又,上述含有鎳-鋅合金之層或上述鎳-鋅合金層之鎳附著量與鋅附著量之比(=鎳之附著量/鋅之附著量)較佳為1.5~10。又,上述含有鎳-鋅合金之層或上述鎳-鋅合金層之鎳附著量較佳為0.5mg/m2~500mg/m2,更佳為1mg/m2~50mg/m2。於耐熱層及/或防銹層為含有鎳-鋅合金之層之情形時,通孔(through hole)或通路孔(via hole)等之內壁部與除膠渣(desmear)液接觸時,銅或銅合金或合金層與樹脂基板之界面難以被除膠渣液腐蝕,銅或銅合金或合金層與樹脂基板之密合性會提昇。 As the heat-resistant layer and rust-proof layer, a well-known heat-resistant layer and rust-proof layer can be used. For example, the heat-resistant layer and / or the rust-proof layer may also contain elements selected from the group consisting of nickel, zinc, tin, cobalt, molybdenum, copper, tungsten, phosphorus, arsenic, chromium, vanadium, titanium, aluminum, gold, silver, platinum group elements, The layer of one or more elements in the group of iron and tantalum may also be selected from the group consisting of nickel, zinc, tin, cobalt, molybdenum, copper, tungsten, phosphorus, arsenic, chromium, vanadium, titanium, aluminum, gold, silver, A metal layer or an alloy layer composed of one or more elements of the platinum group element, iron, and tantalum. In addition, the heat-resistant layer and / or the rust-preventive layer may contain elements selected from the group consisting of nickel, zinc, tin, cobalt, molybdenum, copper, tungsten, phosphorus, arsenic, chromium, vanadium, titanium, aluminum, gold, silver, platinum group elements, Oxides, nitrides, and silicides of one or more elements in the iron and tantalum group. The heat-resistant layer and / or the rust preventive layer may be a layer containing a nickel-zinc alloy. The heat-resistant layer and / or the rust preventive layer may be a nickel-zinc alloy layer. The above-mentioned nickel-zinc alloy layer may be one containing 50 wt% to 99 wt% of nickel and 50 wt% to 1 wt% of zinc in addition to unavoidable impurities. The total adhesion amount of zinc and nickel in the nickel-zinc alloy layer is 5 to 1000 mg / m 2 , preferably 10 to 500 mg / m 2 , and preferably 20 to 100 mg / m 2 . In addition, the ratio of the nickel adhesion amount to the zinc adhesion amount (= nickel adhesion amount / zinc adhesion amount) of the nickel-zinc alloy-containing layer or the nickel-zinc alloy layer is preferably 1.5 to 10. The nickel adhesion amount of the nickel-zinc alloy-containing layer or the nickel-zinc alloy layer is preferably 0.5 mg / m 2 to 500 mg / m 2 , and more preferably 1 mg / m 2 to 50 mg / m 2 . When the heat-resistant layer and / or rust-proof layer is a layer containing a nickel-zinc alloy, when the inner wall portion of a through hole or via hole is in contact with a desmear liquid, The interface between the copper or copper alloy or alloy layer and the resin substrate is difficult to be corroded by the deslagging solution, and the adhesion between the copper or copper alloy or alloy layer and the resin substrate will be improved.
例如耐熱層及/或防銹層可為將附著量為1mg/m2~100mg/m2、較佳為5mg/m2~50mg/m2之鎳或鎳合金層、與附著量為1mg/m2~80mg/m2、較佳為5mg/m2~40mg/m2之錫層依序積層而成者,上述鎳合金層亦可由鎳-鉬、鎳-鋅、鎳-鉬-鈷中之任一種構成。又,耐熱層及/或防銹層之鎳或鎳合金與錫之合計附著量較佳為2mg/m2~150mg/m2,更佳為10mg/m2~70mg/m2。又,耐熱層及/或防銹層較佳為[鎳或鎳合金中之鎳附著量]/[錫附著量]=0.25~10,更佳為0.33~3。若使用該耐熱層及/或防銹層,則將附載體銅箔加工成印刷配線板以後的電路之剝離強 度、該剝離強度之耐化學品性劣化率等會變得良好。 For example, the heat-resistant layer and / or rust-proof layer may be a nickel or nickel alloy layer with an adhesion amount of 1 mg / m 2 to 100 mg / m 2 , preferably 5 mg / m 2 to 50 mg / m 2 , and an adhesion amount of 1 mg / m 2 . m 2 to 80 mg / m 2 , preferably 5 mg / m 2 to 40 mg / m 2, the tin layers are sequentially laminated. The above nickel alloy layer may also be made of nickel-molybdenum, nickel-zinc, nickel-molybdenum-cobalt. Any kind of composition. The total adhesion amount of nickel or nickel alloy and tin in the heat-resistant layer and / or rust-preventive layer is preferably 2 mg / m 2 to 150 mg / m 2 , and more preferably 10 mg / m 2 to 70 mg / m 2 . In addition, the heat-resistant layer and / or the rust-preventive layer is preferably [the nickel adhesion amount in nickel or a nickel alloy] / [tin adhesion amount] = 0.25 to 10, and more preferably 0.33 to 3. When this heat-resistant layer and / or rust-proof layer is used, the peeling strength of a circuit after the copper foil with a carrier is processed into a printed wiring board, and the chemical-resistance deterioration rate of this peeling strength become favorable.
再者,矽烷偶合處理所使用之矽烷偶合劑可使用周知之矽烷偶合劑,例如可使用胺系矽烷偶合劑或環氧系矽烷偶合劑、巰基系矽烷偶合劑。又,矽烷偶合劑亦可使用乙烯基三甲氧基矽烷、乙烯基苯基三甲氧基矽烷、γ-甲基丙烯氧基丙基三甲氧基矽烷(γ-methacryloxypropyltrimethoxysilane)、γ-環氧丙氧基丙基三甲氧基矽烷(γ-glycidoxypropyltrimethoxysilane)、4-環氧丙基丁基三甲氧基矽烷、γ-胺基丙基三乙氧基矽烷、N-β(胺基乙基)γ-胺基丙基三甲氧基矽烷、N-3-(4-(3-胺基丙氧基)丁氧基)丙基-3-胺基丙基三甲氧基矽烷、咪唑矽烷、三矽烷、γ-巰基丙基三甲氧基矽烷等。 Further, as the silane coupling agent used in the silane coupling treatment, a known silane coupling agent can be used, and for example, an amine-based silane coupling agent, an epoxy-based silane coupling agent, or a mercapto-based silane coupling agent can be used. Also, as the silane coupling agent, vinyltrimethoxysilane, vinylphenyltrimethoxysilane, γ-methacryloxypropyltrimethoxysilane, and γ-glycidoxy Γ-glycidoxypropyltrimethoxysilane, 4-glycidoxypropyltrimethoxysilane, γ-aminopropyltriethoxysilane, N-β (aminoethyl) γ-amino group Propyltrimethoxysilane, N-3- (4- (3-aminopropyloxy) butoxy) propyl-3-aminopropyltrimethoxysilane, imidazolane, tris Silane, γ-mercaptopropyltrimethoxysilane and the like.
上述矽烷偶合處理層亦可使用環氧系矽烷、胺系矽烷、甲基丙烯氧基系矽烷、巰基系矽烷等矽烷偶合劑等而形成。再者,此種矽烷偶合劑亦可將兩種以上混合使用。其中,較佳為使用胺系矽烷偶合劑或環氧系矽烷偶合劑所形成者。 The silane coupling treatment layer may be formed using a silane coupling agent such as epoxy-based silane, amine-based silane, methacryl-based silane, or mercapto-based silane. In addition, such a silane coupling agent may be used in combination of two or more. Among them, those formed using an amine-based silane coupling agent or an epoxy-based silane coupling agent are preferred.
此處所謂的胺系矽烷偶合劑亦可為選自由如下物質所組成之群者:N-(2-胺基乙基)-3-胺基丙基三甲氧基矽烷、3-(N-苯乙烯基甲基-2-胺基乙基胺基)丙基三甲氧基矽烷、3-胺基丙基三乙氧基矽烷、雙(2-羥基乙基)-3-胺基丙基三乙氧基矽烷、胺基丙基三甲氧基矽烷、N-甲基胺基丙基三甲氧基矽烷、N-苯基胺基丙基三甲氧基矽烷、N-(3-丙烯氧基-2-羥基丙基)-3-胺基丙基三乙氧基矽烷、4-胺基丁基三乙氧基矽烷、(胺基乙基胺基甲基)苯乙基三甲氧基矽烷、N-(2-胺基乙基-3-胺基丙基)三甲氧基矽烷、N-(2-胺基乙基-3-胺基 丙基)三(2-乙基己氧基)矽烷、6-(胺基己基胺基丙基)三甲氧基矽烷、胺基苯基三甲氧基矽烷、3-(1-胺基丙氧基)-3,3-二甲基-1-丙烯基三甲氧基矽烷、3-胺基丙基三(甲氧基乙氧基乙氧基)矽烷、3-胺基丙基三乙氧基矽烷、3-胺基丙基三甲氧基矽烷、ω-胺基十一烷基三甲氧基矽烷、3-(2-N-苄基胺基乙基胺基丙基)三甲氧基矽烷、雙(2-羥基乙基)-3-胺基丙基三乙氧基矽烷、(N,N-二乙基-3-胺基丙基)三甲氧基矽烷、(N,N-二甲基-3-胺基丙基)三甲氧基矽烷、N-甲基胺基丙基三甲氧基矽烷、N-苯基胺基丙基三甲氧基矽烷、3-(N-苯乙烯基甲基-2-胺基乙基胺基)丙基三甲氧基矽烷、γ-胺基丙基三乙氧基矽烷、N-β(胺基乙基)γ-胺基丙基三甲氧基矽烷、N-3-(4-(3-胺基丙氧基)丁氧基)丙基-3-胺基丙基三甲氧基矽烷。 The so-called amine-based silane coupling agent may also be selected from the group consisting of N- (2-aminoethyl) -3-aminopropyltrimethoxysilane, 3- (N-benzene Vinylmethyl-2-aminoethylamino) propyltrimethoxysilane, 3-aminopropyltriethoxysilane, bis (2-hydroxyethyl) -3-aminopropyltriethyl Oxysilane, aminopropyltrimethoxysilane, N-methylaminopropyltrimethoxysilane, N-phenylaminopropyltrimethoxysilane, N- (3-propenyloxy-2- (Hydroxypropyl) -3-aminopropyltriethoxysilane, 4-aminobutyltriethoxysilane, (aminoethylaminomethyl) phenethyltrimethoxysilane, N- ( 2-aminoethyl-3-aminopropyl) trimethoxysilane, N- (2-aminoethyl-3-amine Propyl) tris (2-ethylhexyloxy) silane, 6- (aminohexylaminopropyl) trimethoxysilane, aminophenyltrimethoxysilane, 3- (1-aminopropyloxy) ) -3,3-dimethyl-1-propenyltrimethoxysilane, 3-aminopropyltri (methoxyethoxyethoxy) silane, 3-aminopropyltriethoxysilane , 3-aminopropyltrimethoxysilane, ω-aminoundecyltrimethoxysilane, 3- (2-N-benzylaminoethylethylaminopropyl) trimethoxysilane, bis ( 2-hydroxyethyl) -3-aminopropyltriethoxysilane, (N, N-diethyl-3-aminopropyl) trimethoxysilane, (N, N-dimethyl-3 -Aminopropyl) trimethoxysilane, N-methylaminopropyltrimethoxysilane, N-phenylaminopropyltrimethoxysilane, 3- (N-styrylmethyl-2- Aminoethylamino) propyltrimethoxysilane, γ-aminopropyltriethoxysilane, N-β (aminoethyl) γ-aminopropyltrimethoxysilane, N-3- (4- (3-Aminopropoxy) butoxy) propyl-3-aminopropyltrimethoxysilane.
矽烷偶合處理層較理想為以矽原子換算設為0.05mg/m2~200mg/m2、較佳為0.15mg/m2~20mg/m2、較佳為0.3mg/m2~2.0mg/m2之範圍。於上述範圍之情形時,可使銅放熱材中所使用之銅或銅合金或合金層與接著劑層之密合性更加提昇。 The silane coupling treatment layer is preferably set to 0.05 mg / m 2 to 200 mg / m 2 in terms of silicon atom conversion, preferably 0.15 mg / m 2 to 20 mg / m 2 , and preferably 0.3 mg / m 2 to 2.0 mg / m 2 range. In the case of the above range, the adhesion between the copper or copper alloy or alloy layer and the adhesive layer used in the copper heat radiating material can be further improved.
又,可對銅放熱材中所使用之銅或銅合金、合金層、粗化處理層、耐熱層、防銹層、矽烷偶合處理層或鉻酸鹽處理層之表面進行下述文獻所記載之表面處理:國際公開編號WO2008/053878、日本特開2008-111169號、日本專利第5024930號、國際公開編號WO2006/028207、日本專利第4828427號、國際公開編號WO2006/134868、日本專利第5046927號、國際公開編號WO2007/105635、日本專利第5180815號、日本特開2013-19056號。 In addition, the surfaces of copper or copper alloys, alloy layers, roughened layers, heat-resistant layers, rust-proof layers, silane coupling-treated layers, or chromate-treated layers used in copper heat-emitting materials can be described in the following documents. Surface treatment: International Publication No. WO2008 / 053878, Japanese Patent Laid-Open No. 2008-111169, Japanese Patent No. 5024930, International Publication No. WO2006 / 028207, Japanese Patent No. 4828427, International Publication No. WO2006 / 134868, Japanese Patent No. 5046927, International Publication No. WO2007 / 105635, Japanese Patent No. 5180815, Japanese Patent Laid-Open No. 2013-19056.
本發明之銅放熱材,可以下述方式來調整設置上述合金層前之銅基材的表面。其係為了將銅放熱材之表面控制在特定的Sz、Sa、Sku、△E*ab、△L、△a、△b、表面積比之狀態。 In the copper heat radiation material of the present invention, the surface of the copper base material before the alloy layer is provided can be adjusted in the following manner. This is to control the surface of the copper exothermic material to a specific state of Sz, Sa, Sku, △ E * ab, △ L, △ a, △ b, and surface area ratio.
於使用壓延材來作為銅基材之情形時,該壓延材係使用控制以下式子所表示之油膜當量並進行壓延而得者。 When a rolled material is used as the copper base material, the rolled material is obtained by controlling the oil film equivalent expressed by the following formula and rolling it.
油膜當量={(壓延油黏度[cSt])×(通板速度[mpm]+輥周邊速度[mpm])}/{(輥之咬入角[rad])×(材料之降伏應力[kg/mm2])} Oil film equivalent = {(rolling oil viscosity [cSt]) × (through plate speed [mpm] + roller peripheral speed [mpm])} / {(roller bite angle [rad]) × (material falling stress [kg / mm 2 ])}
壓延油黏度[cSt]為於40℃之動黏度。 The rolling oil viscosity [cSt] is the dynamic viscosity at 40 ° C.
具體而言,將下述壓延材使用作為本發明之銅基材,該壓延材係將最終冷壓延時之油膜當量設為16000~30000進行壓延而得者。其原因在於,在未達16000之情形或超過30000之情形時,設置了上述合金層後之表面不會成為特定範圍。於未達16000之情形時,有Sz值變得過小之情形。於超過30000之情形時,有Sz值變得過大之情形。 Specifically, the following rolled material was used as the copper base material of the present invention, and the rolled material was obtained by rolling with an oil film equivalent of the final cold pressing delay of 16,000 to 30,000. The reason is that in the case where it does not reach 16,000 or when it exceeds 30,000, the surface after the above-mentioned alloy layer is provided does not become a specific range. When it is less than 16000, the Sz value may become too small. When it exceeds 30,000, the Sz value may become too large.
為了將油膜當量設為16000~30000,只要使用低黏度之壓延油、或使用減緩通板速度等周知之方法即可。 In order to set the oil film equivalent to 16000 to 30,000, it is only necessary to use a known method such as rolling oil with a low viscosity or slowing down the plate speed.
又,於以下表示可用於本案發明之電解銅箔之製造條件。 In addition, the manufacturing conditions of the electrolytic copper foil which can be used for this invention are shown below.
<電解液組成> <Electrolyte composition>
銅:90~110g/L Copper: 90 ~ 110g / L
硫酸:90~110g/L Sulfuric acid: 90 ~ 110g / L
氯:50~100mg/L Chlorine: 50 ~ 100mg / L
調平劑1(雙(3-磺丙基)二硫醚):10~30ppm Leveling agent 1 (bis (3-sulfopropyl) disulfide): 10 ~ 30ppm
調平劑2(胺化合物):10~30ppm Leveling agent 2 (amine compound): 10 ~ 30ppm
上述胺化合物可使用以下化學式之胺化合物。 As the amine compound, an amine compound of the following chemical formula can be used.
(上述化學式中,R1及R2為選自由羥烷基、醚基、芳基、經芳香族取代之烷基、不飽和烴基、烷基組成之群中者。) (In the above chemical formula, R 1 and R 2 are selected from the group consisting of a hydroxyalkyl group, an ether group, an aryl group, an aromatic-substituted alkyl group, an unsaturated hydrocarbon group, and an alkyl group.)
<製造條件> <Manufacturing conditions>
電流密度:70~100A/dm2 Current density: 70 ~ 100A / dm 2
電解液溫度:50~60℃ Electrolyte temperature: 50 ~ 60 ℃
電解液線速:3~5m/sec Linear speed of electrolyte: 3 ~ 5m / sec
電解時間:0.5~10分鐘 Electrolysis time: 0.5 ~ 10 minutes
再者,銅放熱材中所使用之銅或銅合金之表面亦可藉由以下之處理來控制表面狀態。作為表面處理,亦可施加為了於銅或銅合金表面形成凹凸的表面處理。作為為了於銅或銅合金表面形成凹凸的表面處理,亦可進行利用化學研磨或電解研磨之表面處理。作為化學研磨中所使用之處理液,亦可使用含有硫酸、過氧化氫之蝕刻液、或含有氟化銨之蝕刻液、含有過硫酸鈉之蝕刻液、含有三氯化鐵或三氯化銅之蝕刻液等用於一般蝕刻之液體,亦可使用周知之蝕刻液。又,例如可藉由於由硫酸銅與硫酸水 溶液所構成之溶液中對銅或銅合金之表面進行電解研磨,而於表面形成凹凸。雖然通常而言,電解研磨係以平滑化為目的,但本發明之銅放熱材中所使用之銅或銅合金之表面的表面處理,係利用電解研磨來形成凹凸,因此係與一般想法相反之想法。利用電解研磨來形成凹凸的方法亦可利用周知之技術來進行。作為為了形成上述凹凸之電解研磨的周知的技術之例子,可列舉日本特開2005-240132號、日本特開2010-059547號、日本特開2010-047842中所記載之方法。利用電解研磨來形成凹凸之處理的具體條件,例如可列舉 Moreover, the surface of copper or copper alloy used in the copper heat-emitting material can be controlled by the following treatment. As the surface treatment, a surface treatment for forming unevenness on the surface of copper or a copper alloy may be applied. As a surface treatment for forming unevenness on the surface of copper or a copper alloy, a surface treatment using chemical polishing or electrolytic polishing may be performed. As a treatment liquid used in chemical polishing, an etching solution containing sulfuric acid and hydrogen peroxide, an etching solution containing ammonium fluoride, an etching solution containing sodium persulfate, and iron trichloride or copper trichloride can be used. As a liquid for general etching, such as an etchant, a well-known etchant may be used. In addition, for example, by using copper sulfate and sulfuric acid water In a solution composed of a solution, the surface of copper or a copper alloy is electrolytically polished to form irregularities on the surface. Generally speaking, electrolytic polishing is for the purpose of smoothing, but the surface treatment of the surface of copper or copper alloy used in the copper heat-generating material of the present invention uses electrolytic polishing to form irregularities, so it is contrary to the general idea idea. The method of forming unevenness by electrolytic polishing can also be performed by a well-known technique. Examples of well-known techniques for electrolytic polishing for forming the unevenness include the methods described in Japanese Patent Application Laid-Open No. 2005-240132, Japanese Patent Application No. 2010-059547, and Japanese Patent Application No. 2010-047842. Specific conditions for the process of forming unevenness by electrolytic polishing include, for example,
‧處理溶液:Cu:10~40g/L、H2SO4:50~150g/L、溫度:30~70℃ ‧Processing solution: Cu: 10 ~ 40g / L, H 2 SO 4 : 50 ~ 150g / L, temperature: 30 ~ 70 ℃
‧電解研磨電流:5~40A/dm2 ‧Electrolytic grinding current: 5 ~ 40A / dm 2
‧電解研磨時間:5~50秒 ‧Electrolytic grinding time: 5 ~ 50 seconds
等。 Wait.
作為為了於銅或銅合金表面形成凹凸的表面處理,例如亦可藉由對銅或銅合金表面進行機械研磨來形成凹凸。機械研磨亦可以周知之技術來進行。 As a surface treatment for forming unevenness on the surface of copper or a copper alloy, for example, the unevenness may be formed by mechanically polishing the surface of copper or a copper alloy. Mechanical grinding can also be performed by well-known techniques.
再者,於本發明之銅放熱材中所使用的銅或銅合金之表面之表面處理後,亦可設置耐熱層或防銹層或耐候性層。耐熱層或防銹層及耐候性層可為上述記載或實驗例記載之方法,亦可為周知之技術方法。 Furthermore, after the surface treatment of the surface of the copper or copper alloy used in the copper heat-generating material of the present invention, a heat-resistant layer, a rust-proof layer, or a weather-resistant layer may be provided. The heat-resistant layer, the rust-proof layer, and the weather-resistant layer may be the methods described in the above-mentioned or experimental examples, or may be a well-known technical method.
本發明之銅放熱材亦可為於銅放熱材之合金層表面進一步形成有粗化處理層、耐熱處理層、防銹處理層、氧化物層(於銅放熱材之表面藉由加熱等而形成氧化物層)等表面處理層者。又,在不阻礙構成合金層之鍍敷之限度下,亦可於銅放熱材與合金層之間設置基底層。 The copper heat radiating material of the present invention may be further formed on the surface of the alloy layer of the copper heat radiating material with a roughening treatment layer, a heat-resistant treatment layer, a rust-proof treatment layer, and an oxide layer. Oxide layer). Further, a base layer may be provided between the copper heat-radiating material and the alloy layer so long as it does not hinder the plating constituting the alloy layer.
可將本發明之銅放熱材貼合於樹脂基板,而製造以屏蔽帶為首之屏蔽材、屏蔽構件等積層體。又,若有需要,則可藉由進一步對該銅放熱材進行加工而形成電路,來製造印刷配線板等。作為樹脂基板,例如作為剛性PWB用,可使用紙基材酚樹脂、紙基材環氧樹脂、合成纖維布基材環氧樹脂、玻璃布/紙複合基材環氧樹脂、玻璃布/玻璃不織布複合基材環氧樹脂及玻璃布基材環氧樹脂等,作為FPC用或膠帶用,則可使用聚酯膜或聚醯亞胺膜、液晶聚合物(LCP)、PET膜等等。再者,於本發明中,「印刷配線板」設為亦包含安裝有構件之印刷配線板及印刷電路板及印刷基板。又,可將兩個以上之本發明之印刷配線板連接而製造連接有兩個以上印刷配線板之印刷配線板,又,可將至少一個本發明之印刷配線板與另一個本發明之印刷配線板或並不相當於本發明之印刷配線板的印刷配線板連接,亦可使用此種印刷配線板而製造電子機器。再者,於本發明中,「銅電路」設為亦包含銅配線。 The copper heat-radiating material of the present invention can be bonded to a resin substrate to produce a laminated body such as a shielding material, a shielding member such as a shielding tape. In addition, if necessary, the copper heat-radiating material is further processed to form a circuit, thereby producing a printed wiring board or the like. As the resin substrate, for example, for rigid PWB, paper substrate phenol resin, paper substrate epoxy resin, synthetic fiber cloth substrate epoxy resin, glass cloth / paper composite substrate epoxy resin, glass cloth / glass nonwoven fabric can be used. For composite substrate epoxy resin and glass cloth substrate epoxy resin, etc., for FPC or tape, polyester film or polyimide film, liquid crystal polymer (LCP), PET film, etc. can be used. In addition, in the present invention, the "printed wiring board" is set to include a printed wiring board, a printed circuit board, and a printed circuit board on which members are mounted. Furthermore, two or more printed wiring boards of the present invention can be connected to produce a printed wiring board connected to two or more printed wiring boards, and at least one printed wiring board of the present invention can be connected to another printed wiring board of the present invention. A board or a printed wiring board connection that does not correspond to the printed wiring board of the present invention can be used to manufacture an electronic device. In addition, in this invention, a "copper circuit" is set also including copper wiring.
又,亦可將本發明之銅放熱材使用於放熱板、構造板、屏蔽材、屏蔽板、屏蔽構件、補強材、遮罩、殼體、殼(case)、箱等而製作金屬加工構件。本發明之銅放熱材由於自發熱體發出之熱的吸收性及所吸收之熱的放熱性良好,因此作為放熱用銅放熱材非常優異,故用作為放熱板為特佳。金屬加工部材設為包含放熱板、構造板、屏蔽材、屏蔽板、屏蔽構件、補強材、遮罩、殼體、殼及箱者。 In addition, the copper heat-radiating material of the present invention can be used for heat-radiating plates, structural plates, shielding materials, shielding plates, shielding members, reinforcing materials, masks, cases, cases, boxes, and the like to produce metal-processed members. The copper heat-radiating material of the present invention is excellent as a copper heat-radiating material for heat-radiation because it has good absorbability of heat emitted from the heat-generating body and the heat-releasing property of the absorbed heat. The metal-processed part is assumed to include a heat radiation plate, a structural plate, a shielding material, a shielding plate, a shielding member, a reinforcing material, a shield, a case, a case, and a box.
又,可將把本發明之銅放熱材使用於該放熱板、構造板、屏蔽材、屏蔽板、屏蔽構件、補強材、遮罩、殼體、殼、箱等而製得之金屬加工構件使用於電子機器。 In addition, the copper heat-radiating material of the present invention can be used for a metal-worked member produced by using the heat-radiating plate, a structural plate, a shielding material, a shielding plate, a shielding member, a reinforcing material, a mask, a housing, a shell, a box, and the like. For electronic machines.
〔附載體銅箔〕 [Copper foil with carrier]
本發明之另一實施形態的附載體銅箔,於載體之一面或兩面依序具有中間層、極薄銅層。而且,上述極薄銅層為上述本發明之一個實施形態的銅放熱材。該附載體銅箔之「銅箔」亦包含銅合金箔。 The copper foil with a carrier according to another embodiment of the present invention has an intermediate layer and an ultra-thin copper layer sequentially on one or both sides of the carrier. The ultra-thin copper layer is the copper heat-radiating material according to the embodiment of the present invention. The "copper foil" of the copper foil with a carrier also includes a copper alloy foil.
<載體> <Carrier>
可使用於本發明之載體,典型為金屬箔或樹脂膜,例如以銅箔、銅合金箔、鎳箔、鎳合金箔、鐵箔、鐵合金箔、不銹鋼箔、鋁箔、鋁合金箔、絕緣樹脂膜(例如聚醯亞胺膜、液晶聚合物(LCP)膜、聚對苯二甲酸乙二酯(PET)膜、聚醯胺膜、聚酯膜、氟樹脂膜等)之形態提供。 The carrier that can be used in the present invention is typically a metal foil or a resin film, such as copper foil, copper alloy foil, nickel foil, nickel alloy foil, iron foil, iron alloy foil, stainless steel foil, aluminum foil, aluminum alloy foil, and insulating resin film. (For example, a polyimide film, a liquid crystal polymer (LCP) film, a polyethylene terephthalate (PET) film, a polyimide film, a polyester film, a fluororesin film, etc.) are provided.
作為可使用於本發明之載體,較佳為使用銅箔。其係因為銅箔之導電度較高,因此之後的中間層、極薄銅層之形成變得容易。載體典型上係以壓延銅箔或電解銅箔之形態提供。一般而言,電解銅箔係利用硫酸銅鍍浴將銅電解析出在鈦或不銹鋼之滾筒上來加以製造,壓延銅箔則是重複進行利用壓延輥之塑性加工與熱處理來製造。銅箔之材料,除了精銅或無氧銅等之高純度銅外,例如亦可使用摻Sn銅、摻Ag銅、添加有Cr、Zr或Mg等之銅合金、添加有Ni及Si等之卡遜(corson)系銅合金此類的銅合金。 As a carrier usable in the present invention, copper foil is preferably used. This is because the copper foil has a high electrical conductivity, so that it is easy to form an intermediate layer and an ultra-thin copper layer later. The carrier is typically provided in the form of a rolled copper foil or an electrolytic copper foil. Generally speaking, electrolytic copper foil is produced by electrolyzing copper on a titanium or stainless steel drum using a copper sulfate plating bath, and rolled copper foil is produced by repeating plastic processing and heat treatment using a rolling roll. In addition to high-purity copper such as refined copper or oxygen-free copper, copper foil can also be made of copper alloys doped with Sn, Ag-doped copper, Cr, Zr, or Mg, and Ni and Si. Corson is a copper alloy such as a copper alloy.
可使用於本發明之載體的厚度,並無特別限制,只要適當調節成可發揮作為載體之作用的適合厚度即可,例如可設為5μm以上。但是,若過厚則由於生產成本會提高,故通常較佳設為35μm以下。因此,載體之厚度典型上為12~70μm,更典型地為18~35μm。 The thickness of the carrier that can be used in the present invention is not particularly limited, as long as it is appropriately adjusted to a suitable thickness that can function as a carrier, for example, it can be 5 μm or more. However, if it is too thick, the production cost will increase, so it is usually preferably 35 μm or less. Therefore, the thickness of the carrier is typically 12 to 70 μm, and more typically 18 to 35 μm.
經表面處理後之極薄銅層表面的Sz、Sa、Sku、表面積比A/B之控制,可藉由與上述銅放熱材相同的表面處理來進行。 After the surface treatment, the Sz, Sa, Sku, and surface area ratio A / B of the ultra-thin copper layer can be controlled by the same surface treatment as the copper heat-emitting material.
又,可將可利用以下方法製作的電解銅箔用作為載體。 In addition, an electrolytic copper foil that can be produced by the following method can be used as a carrier.
<電解液組成> <Electrolyte composition>
銅:90~110g/L Copper: 90 ~ 110g / L
硫酸:90~110g/L Sulfuric acid: 90 ~ 110g / L
氯:50~100mg/L Chlorine: 50 ~ 100mg / L
調平劑1(雙(3-磺丙基)二硫醚):10~30ppm Leveling agent 1 (bis (3-sulfopropyl) disulfide): 10 ~ 30ppm
調平劑2(胺化合物):10~30ppm Leveling agent 2 (amine compound): 10 ~ 30ppm
上述胺化合物可使用以下化學式之胺化合物。 As the amine compound, an amine compound of the following chemical formula can be used.
(上述化學式中,R1及R2為選自由羥烷基、醚基、芳基、經芳香族取代之烷基、不飽和烴基、烷基組成之群中者。) (In the above chemical formula, R 1 and R 2 are selected from the group consisting of a hydroxyalkyl group, an ether group, an aryl group, an aromatic-substituted alkyl group, an unsaturated hydrocarbon group, and an alkyl group.)
<製造條件> <Manufacturing conditions>
電流密度:70~100A/dm2 Current density: 70 ~ 100A / dm 2
電解液溫度:50~60℃ Electrolyte temperature: 50 ~ 60 ℃
電解液線速:3~5m/sec Linear speed of electrolyte: 3 ~ 5m / sec
電解時間:0.5~10分鐘(視析出之銅厚、電流密度來調整) Electrolysis time: 0.5 ~ 10 minutes (adjusted according to the thickness of the precipitated copper and current density)
再者,亦可於載體之與設置極薄銅層側的表面相反側之表面設置粗化處理層。可使用周知的方法來設置該粗化處理層,亦可藉由上述粗化處理來設置該粗化處理層。於載體之與設置極薄銅層側的表面相反側之表面設置粗化處理層,具有下述優點:於將載體自具有該粗化處理層之表面側積層於樹脂基板等支持體時,載體與樹脂基板變得不易剝離。 Furthermore, a roughening treatment layer may be provided on the surface of the carrier opposite to the surface on the side where the ultra-thin copper layer is provided. The roughening treatment layer can be provided using a known method, and the roughening treatment layer can also be provided by the above-mentioned roughening treatment. Providing a roughening treatment layer on the surface of the carrier opposite to the surface on which the ultra-thin copper layer is provided has the advantage that when the carrier is laminated on a support such as a resin substrate from the surface side having the roughening treatment layer, the carrier It becomes difficult to peel off from the resin substrate.
<中間層> <Middle layer>
於載體上設置中間層。亦可於載體與中間層之間設置其他層。本發明中使用之中間層只要為如下構成則並無特別限定:於附載體銅箔向絕緣基板積層之步驟前極薄銅層不易自載體剝離,另一方面,於向絕緣基板積層之步驟後極薄銅層可自載體剝離。例如,本發明之附載體銅箔之中間層亦可含有選自由Cr、Ni、Co、Fe、Mo、Ti、W、P、Cu、Al、Zn、該等之合金、該等之水合物、該等之氧化物、有機物所組成之群中之一種或兩種以上。又,中間層亦可為複數層。 An intermediate layer is provided on the carrier. Other layers may be provided between the carrier and the intermediate layer. The intermediate layer used in the present invention is not particularly limited as long as it has the following structure: before the step of laminating the copper foil with a carrier to the insulating substrate, the extremely thin copper layer is not easy to peel off from the carrier; on the other hand, after the step of laminating the insulating substrate The very thin copper layer can be peeled from the carrier. For example, the intermediate layer of the copper foil with a carrier of the present invention may also contain a material selected from the group consisting of Cr, Ni, Co, Fe, Mo, Ti, W, P, Cu, Al, Zn, these alloys, these hydrates, One or two or more of these groups of oxides and organic substances. The intermediate layer may be a plurality of layers.
又,例如,中間層可藉由如下方式構成:自載體側形成由選自由Cr、Ni、Co、Fe、Mo、Ti、W、P、Cu、Al、Zn所組成之元素群中之一種元素構成的單一金屬層,或者由選自由Cr、Ni、Co、Fe、Mo、Ti、W、P、Cu、Al、Zn所組成之元素群中之一種或兩種以上之元素構成的合金層,於其上形成由選自由Cr、Ni、Co、Fe、Mo、Ti、W、P、Cu、Al、Zn所組成之元素群中之一種或兩種以上之元素之水合物或氧化物或有機物構成的層。 In addition, for example, the intermediate layer may be formed by forming one element selected from the group consisting of Cr, Ni, Co, Fe, Mo, Ti, W, P, Cu, Al, and Zn from the carrier side. A single metal layer or an alloy layer composed of one or more elements selected from the group consisting of Cr, Ni, Co, Fe, Mo, Ti, W, P, Cu, Al, Zn, A hydrate or an oxide or an organic substance of one or more elements selected from the group consisting of Cr, Ni, Co, Fe, Mo, Ti, W, P, Cu, Al, and Zn is formed thereon Composition of layers.
又,例如,中間層可藉由如下方式構成:自載體側形成由選自由Cr、Ni、Co、Fe、Mo、Ti、W、P、Cu、Al、Zn所組成之元素群中之 一種元素構成的單一金屬層,或者由選自由Cr、Ni、Co、Fe、Mo、Ti、W、P、Cu、Al、Zn所組成之元素群中之一種或兩種以上之元素構成的合金層,於其上形成由選自由Cr、Ni、Co、Fe、Mo、Ti、W、P、Cu、Al、Zn所組成之元素群中之一種元素構成的單一金屬層,或者由選自由Cr、Ni、Co、Fe、Mo、Ti、W、P、Cu、Al、Zn所組成之元素群中之一種或兩種以上之元素構成的合金層。 In addition, for example, the intermediate layer may be formed by forming from the carrier side an element group selected from the group consisting of Cr, Ni, Co, Fe, Mo, Ti, W, P, Cu, Al, and Zn. A single metal layer composed of one element, or an alloy composed of one or more elements selected from the group consisting of Cr, Ni, Co, Fe, Mo, Ti, W, P, Cu, Al, and Zn A layer on which a single metal layer composed of one element selected from the group consisting of Cr, Ni, Co, Fe, Mo, Ti, W, P, Cu, Al, Zn is formed, or is selected from the group consisting of Cr , Ni, Co, Fe, Mo, Ti, W, P, Cu, Al, Zn, or an alloy layer composed of one or more elements.
又,作為中間層之上述有機物,可使用周知的有機物,又,較佳為使用含氮之有機化合物、含硫之有機化合物及羧酸中之任一種以上。例如,作為具體之含氮之有機化合物,較佳為使用具有取代基之三唑化合物即1,2,3-苯并三唑、羧基苯并三唑、N',N'-雙(苯并三唑基甲基)脲、1H-1,2,4-三唑及3-胺基-1H-1,2,4-三唑等。 Moreover, as said organic substance of an intermediate | middle layer, a well-known organic substance can be used, and it is preferable to use any one or more of a nitrogen-containing organic compound, a sulfur-containing organic compound, and a carboxylic acid. For example, as the specific nitrogen-containing organic compound, it is preferable to use a triazole compound having a substituent, namely, 1,2,3-benzotriazole, carboxybenzotriazole, N ', N'-bis (benzo Triazolylmethyl) urea, 1H-1,2,4-triazole and 3-amino-1H-1,2,4-triazole.
含硫之有機化合物較佳為使用巰基苯并噻唑、2-巰基苯并噻唑鈉、三聚硫氰酸及2-苯并咪唑硫醇等。 As the sulfur-containing organic compound, mercaptobenzothiazole, sodium 2-mercaptobenzothiazole, trimeric thiocyanate, 2-benzimidazole thiol, and the like are preferably used.
作為羧酸,尤其較佳為使用單羧酸,其中較佳為使用油酸、亞麻油酸及次亞麻油酸等。 As the carboxylic acid, a monocarboxylic acid is particularly preferably used, and among them, oleic acid, linoleic acid, hypolinolenic acid, and the like are preferably used.
又,例如,中間層可由下述方式構成:於載體上依序積層鎳層、鎳-磷合金層或鎳-鈷合金層、與含鉻之層。由於鎳與銅之接著力比鉻與銅之接著力高,因此於剝離極薄銅層時,成為於極薄銅層與含鉻之層的界面剝離。又,期待中間層之鎳具有防止銅成分自載體擴散至極薄銅層之障蔽效果。中間層中之鎳的附著量較佳為100μg/dm2以上且40000μg/dm2以下,更佳為100μg/dm2以上且4000μg/dm2以下,更佳為100μg/dm2以上且2500μg/dm2以下,更佳為100μg/dm2以上且未達1000μg /dm2,中間層中之鉻的附著量較佳為5μg/dm2以上且100μg/dm2以下。於僅於單面設置中間層之情形時,較佳為在載體之相反面設置鍍鎳層等防銹層。上述中間層之鉻層可藉由鍍鉻或鉻酸鹽處理來設置。 In addition, for example, the intermediate layer may be formed by sequentially stacking a nickel layer, a nickel-phosphorus alloy layer or a nickel-cobalt alloy layer, and a chromium-containing layer on the carrier in this order. Since the adhesion force between nickel and copper is higher than the adhesion force between chromium and copper, peeling occurs at the interface between the ultra-thin copper layer and the chromium-containing layer when the ultra-thin copper layer is peeled. In addition, nickel in the intermediate layer is expected to have a barrier effect of preventing the copper component from diffusing from the carrier to the extremely thin copper layer. The amount of deposition of nickel intermediate layer is preferably from 100μg / dm 2 or more and 40000μg / 2 or less dm, more preferably 100μg / dm 2 or more and 4000μg / dm 2 or less, more preferably 100μg / dm 2 or more and 2500μg / dm 2 or less, more preferably 100 μg / dm 2 or more and less than 1000 μg / dm 2 , and the chromium adhesion amount in the intermediate layer is preferably 5 μg / dm 2 or more and 100 μg / dm 2 or less. When the intermediate layer is provided only on one side, it is preferable to provide a rust-proof layer such as a nickel plating layer on the opposite side of the carrier. The chromium layer of the intermediate layer can be provided by chromium plating or chromate treatment.
若中間層之厚度變得過大,則會有中間層的厚度去影響到表面處理後之極薄銅層表面之Sz、Sa、Sku、表面積比A/B的情形,因此極薄銅層之表面處理層表面之中間層的厚度較佳為1~1000nm,較佳為1~500nm,較佳為2~200nm,較佳為2~100nm,更佳為3~60nm。再者,中間層亦可設置於載體之兩面。 If the thickness of the intermediate layer becomes too large, the thickness of the intermediate layer will affect the Sz, Sa, Sku, surface area ratio A / B of the surface of the ultra-thin copper layer after surface treatment, so the surface of the ultra-thin copper layer The thickness of the intermediate layer on the surface of the treatment layer is preferably 1 to 1000 nm, preferably 1 to 500 nm, preferably 2 to 200 nm, preferably 2 to 100 nm, and more preferably 3 to 60 nm. Furthermore, the intermediate layer may be provided on both sides of the carrier.
<極薄銅層> <Ultra-thin copper layer>
於中間層上設置極薄銅層。亦可於中間層與極薄銅層之間設置其他層。具有該載體之極薄銅層為本發明之一個實施形態的銅放熱材。極薄銅層之厚度並無特別限制,通常比載體薄,例如為12μm以下。典型為0.5~12μm,更典型為1.5~5μm。又,可在於中間層上設置極薄銅層前,為了減少極薄銅層之針孔而進行銅-磷合金等之打底鍍敷。打底鍍敷可列舉焦磷酸銅鍍敷液等。再者,極薄銅層亦可設置於載體之兩面。 An extremely thin copper layer is provided on the intermediate layer. Other layers may be provided between the intermediate layer and the ultra-thin copper layer. The ultra-thin copper layer having the carrier is a copper heat-radiating material according to an embodiment of the present invention. The thickness of the ultra-thin copper layer is not particularly limited, and is generally thinner than the carrier, for example, 12 μm or less. It is typically 0.5 to 12 μm, and more typically 1.5 to 5 μm. In addition, before the ultra-thin copper layer is provided on the intermediate layer, a copper-phosphorus alloy or the like may be subjected to primer plating in order to reduce pinholes in the ultra-thin copper layer. Examples of the primer plating include copper pyrophosphate plating solution. Furthermore, an ultra-thin copper layer can also be provided on both sides of the carrier.
又,本發明之極薄銅層亦可為利用下述條件形成之極薄銅層。於在極薄銅層之與和中間層接觸側為相反側之面設置上述合金層之情形時,為了使該合金層表面之Sz、Sa、Sku、表面積比A/B成為本發明之範圍,控制極薄銅層表面之Sz、Sa、Sku、表面積比A/B。 The ultra-thin copper layer of the present invention may be an ultra-thin copper layer formed under the following conditions. When the above-mentioned alloy layer is provided on the surface of the ultra-thin copper layer on the side opposite to the side in contact with the intermediate layer, in order to make the surface of the alloy layer Sz, Sa, Sku, and surface area ratio A / B within the scope of the present invention, Control Sz, Sa, Sku, surface area ratio A / B of very thin copper layer surface.
‧電解液組成 ‧Electrolyte composition
銅:80~120g/L Copper: 80 ~ 120g / L
硫酸:80~120g/L Sulfuric acid: 80 ~ 120g / L
氯:30~100mg/L Chlorine: 30 ~ 100mg / L
調平劑1(雙(3-磺丙基)二硫醚):10~30ppm Leveling agent 1 (bis (3-sulfopropyl) disulfide): 10 ~ 30ppm
調平劑2(胺化合物):10~30ppm Leveling agent 2 (amine compound): 10 ~ 30ppm
上述胺化合物可使用以下化學式之胺化合物。 As the amine compound, an amine compound of the following chemical formula can be used.
(上述化學式中,R1及R2為選自由羥烷基、醚基、芳基、經芳香族取代之烷基、不飽和烴基、烷基組成之群中者。) (In the above chemical formula, R 1 and R 2 are selected from the group consisting of a hydroxyalkyl group, an ether group, an aryl group, an aromatic-substituted alkyl group, an unsaturated hydrocarbon group, and an alkyl group.)
‧製造條件 ‧Manufacturing conditions
電流密度:70~100A/dm2 Current density: 70 ~ 100A / dm 2
電解液溫度:50~65℃ Electrolyte temperature: 50 ~ 65 ℃
電解液線速:1.5~5m/sec Linear speed of electrolyte: 1.5 ~ 5m / sec
電解時間:0.5~10分鐘(視析出之銅厚、電流密度來調整) Electrolysis time: 0.5 ~ 10 minutes (adjusted according to the thickness of the precipitated copper and current density)
〔樹脂層〕 [Resin layer]
本發明之銅放熱材亦可於一個表面或兩表面具備樹脂層。設置該樹脂層之銅放熱材表面亦可為表面處理表面。上述樹脂層亦可為絕緣樹脂層。再者,於本發明之銅放熱材中,「表面處理表面」係指:於粗化處理後進行 了為了設置耐熱層、防銹層、耐候性層等之表面處理的情形時,進行了該表面處理後之銅放熱材的表面。又,於銅放熱材為附載體銅箔之極薄銅層之情形時,「表面處理表面」係指:於粗化處理後進行了為了設置耐熱層、防銹層、耐候性層等之表面處理的情形時,進行了該表面處理後之極薄銅層的表面。 The copper heat radiation material of the present invention may be provided with a resin layer on one surface or both surfaces. The surface of the copper heat-radiating material on which the resin layer is provided may also be a surface-treated surface. The resin layer may be an insulating resin layer. Furthermore, in the copper heat-generating material of the present invention, the "surface treatment surface" means: after the roughening treatment, In the case of providing a surface treatment for a heat-resistant layer, an anti-rust layer, a weather-resistant layer, etc., the surface of the copper heat-radiating material after the surface treatment was performed. When the copper heat-radiating material is an ultra-thin copper layer with a copper foil with a carrier, the "surface-treated surface" refers to a surface provided with a heat-resistant layer, a rust-proof layer, and a weather-resistant layer after the roughening treatment. In the case of treatment, the surface of the ultra-thin copper layer after the surface treatment was performed.
上述樹脂層可為接著劑,亦可為接著用半硬化狀態(B階段狀態)之絕緣樹脂層。半硬化狀態(B階段狀態)包括如下狀態:即便用手指觸摸其表面亦無黏著感,可將該絕緣樹脂層重疊而保管,若進一步進行加熱處理,則會引起硬化反應。 The resin layer may be an adhesive or an insulating resin layer in a semi-hardened state (B-stage state). The semi-hardened state (B-stage state) includes a state in which there is no stickiness even when the surface is touched with a finger, and the insulating resin layer can be stacked and stored, and further heat treatment will cause a hardening reaction.
上述樹脂層可為接著用樹脂即接著劑,亦可為接著用半硬化狀態(B階段狀態)之絕緣樹脂層。半硬化狀態(B階段狀態)包括如下狀態:即便用手指觸摸其表面亦無黏著感,可將該絕緣樹脂層重疊而保管,若進一步進行加熱處理,則會引起硬化反應。 The resin layer may be a resin, that is, an adhesive, or an insulating resin layer in a semi-hardened state (B-stage state). The semi-hardened state (B-stage state) includes a state in which there is no stickiness even when the surface is touched with a finger, and the insulating resin layer can be stacked and stored, and further heat treatment will cause a hardening reaction.
又,上述樹脂層可含有熱硬化性樹脂,亦可為熱塑性樹脂。又,上述樹脂層亦可含有熱塑性樹脂。上述樹脂層亦可含有周知之樹脂、樹脂硬化劑、化合物、硬化促進劑、介電體、反應觸媒、交聯劑、聚合物、預浸體、骨架材料等。又,上述樹脂層例如可使用如下文獻中所記載之物質(樹脂、樹脂硬化劑、化合物、硬化促進劑、介電體、反應觸媒、交聯劑、聚合物、預浸體、骨架材料等)及/或樹脂層之形成方法、形成裝置而形成,該文獻係國際公開編號WO2008/004399號、國際公開編號WO2008/053878、國際公開編號WO2009/084533、日本特開平11-5828號、日本特開平11-140281號、日本專利第3184485號、國際公開編號WO97/ 02728、日本專利第3676375號、日本特開2000-43188號、日本專利第3612594號、日本特開2002-179772號、日本特開2002-359444號、日本特開2003-304068號、日本專利第3992225號、日本特開2003-249739號、日本專利第4136509號、日本特開2004-82687號、日本專利第4025177號、日本特開2004-349654號、日本專利第4286060號、日本特開2005-262506號、日本專利第4570070號、日本特開2005-53218號、日本專利第3949676號、日本專利第4178415號、國際公開編號WO2004/005588、日本特開2006-257153號、日本特開2007-326923號、日本特開2008-111169號、日本專利第5024930號、國際公開編號WO2006/028207、日本專利第4828427號、日本特開2009-67029號、國際公開編號WO2006/134868、日本專利第5046927號、日本特開2009-173017號、國際公開編號WO2007/105635、日本專利第5180815號、國際公開編號WO2008/114858、國際公開編號WO2009/008471、日本特開2011-14727號、國際公開編號WO2009/001850、國際公開編號WO2009/145179、國際公開編號WO2011/068157、日本專利特開2013-19056號。 The resin layer may contain a thermosetting resin or a thermoplastic resin. The resin layer may contain a thermoplastic resin. The resin layer may contain a well-known resin, a resin hardener, a compound, a hardening accelerator, a dielectric, a reaction catalyst, a crosslinking agent, a polymer, a prepreg, a skeleton material, and the like. The resin layer may be, for example, those described in the following documents (resin, resin hardener, compound, hardening accelerator, dielectric, reaction catalyst, crosslinker, polymer, prepreg, skeleton material, etc.) ) And / or a method for forming a resin layer and a forming apparatus, the document is International Publication No. WO2008 / 004399, International Publication No. WO2008 / 053878, International Publication No. WO2009 / 084533, Japanese Patent Application Laid-Open No. 11-5828, Japanese Patent Kaiping No. 11-140281, Japanese Patent No. 3184485, International Publication No. WO97 / 02728, Japanese Patent No. 3676375, Japanese Patent Laid-Open No. 2000-43188, Japanese Patent No. 3612594, Japanese Patent Laid-Open No. 2002-179772, Japanese Patent Laid-Open No. 2002-359444, Japanese Patent Laid-Open No. 2003-304068, Japanese Patent No. 3992225 No. 2003-249739, Japanese Patent No. 4136509, Japanese Patent Laid-Open No. 2004-82687, Japanese Patent No. 4025177, Japanese Patent Laid-Open No. 2004-349654, Japanese Patent No. 4286060, Japanese Patent Laid-Open No. 2005-262506 No., Japanese Patent No. 4570070, Japanese Patent Laid-Open No. 2005-53218, Japanese Patent No. 3949676, Japanese Patent No. 4178415, International Publication No. WO2004 / 005588, Japanese Patent Laid-Open No. 2006-257153, Japanese Patent Laid-Open No. 2007-326923 , Japanese Patent Laid-Open No. 2008-111169, Japanese Patent No. 5024930, International Publication No. WO2006 / 028207, Japanese Patent No. 4828427, Japanese Patent Laid-Open No. 2009-67029, International Publication No. WO2006 / 134868, Japanese Patent No. 5046927, Japan Japanese Patent Application Laid-Open No. 2009-173017, International Publication No. WO2007 / 105635, Japanese Patent No. 5180815, International Publication No. WO2008 / 114858, International Publication No. WO2009 / 008471, Japanese Patent Laid-Open No. 2011-14727 No., International Publication No. WO2009 / 001850, International Publication No. WO2009 / 145179, International Publication No. WO2011 / 068157, Japanese Patent Laid-Open No. 2013-19056.
又,上述樹脂層之種類並無特別限定,作為較佳為,例如可列舉含有選自如下成分之群中之一種以上之樹脂:環氧樹脂、聚醯亞胺樹脂、多官能性氰酸酯化合物、順丁烯二醯亞胺化合物、聚順丁烯二醯亞胺化合物、順丁烯二醯亞胺系樹脂、芳香族順丁烯二醯亞胺樹脂、聚乙烯醇縮乙醛樹脂、胺酯(urethane)樹脂、聚醚碸(亦稱為polyethersulphone、polyethersulfone)、聚醚碸(亦稱為polyethersulphone、polyethersulfone)樹脂、芳香族聚醯胺樹脂、芳香族聚醯胺樹脂聚合物、橡膠性樹脂、聚胺、芳香 族聚胺、聚醯胺醯亞胺樹脂、橡膠變性環氧樹脂、苯氧基樹脂、羧基改質丙烯腈-丁二烯樹脂、聚苯醚、雙順丁烯二醯亞胺三樹脂、熱硬化性聚苯醚樹脂、氰酸酯酯系樹脂、羧酸之酸酐、多元羧酸之酸酐、具有可交聯之官能基之線狀聚合物、聚苯醚樹脂、2,2-雙(4-氰酸酯基苯基)丙烷、含磷之酚化合物、環烷酸錳、2,2-雙(4-環氧丙基苯基)丙烷、聚苯醚-氰酸酯系樹脂、矽氧烷改質聚醯胺醯亞胺樹脂、氰酯樹脂、膦腈系樹脂、橡膠變性聚醯胺醯亞胺樹脂、異戊二烯、氫化型聚丁二烯、聚乙烯丁醛、苯氧基、高分子環氧樹脂、芳香族聚醯胺、氟樹脂、雙酚、嵌段共聚聚醯亞胺樹脂及氰酯樹脂。 In addition, the kind of the resin layer is not particularly limited, and preferably includes, for example, a resin containing one or more members selected from the group consisting of epoxy resin, polyimide resin, and polyfunctional cyanate. Compounds, maleimide compounds, polymaleimide compounds, maleimide resins, aromatic maleimide resins, polyvinyl acetal resins, Urethane resin, polyether fluorene (also known as polyethersulphone, polyethersulfone), polyether fluorene (also known as polyethersulphone, polyethersulfone) resin, aromatic polyamine resin, aromatic polyamine resin polymer, rubbery Resin, Polyamine, Aromatic Polyamine, Polyamidamine / Imine Resin, Rubber Modified Epoxy Resin, Phenoxy Resin, Carboxy Modified Acrylonitrile-Butadiene Resin, Polyphenylene Ether, Dicis butadiene Difluorene Imine three Resin, thermosetting polyphenylene ether resin, cyanate ester resin, anhydride of carboxylic acid, anhydride of polycarboxylic acid, linear polymer with crosslinkable functional group, polyphenylene ether resin, 2,2- Bis (4-cyanatephenyl) propane, phosphorus-containing phenolic compounds, manganese naphthenate, 2,2-bis (4-epoxypropylphenyl) propane, polyphenylene ether-cyanate resin , Siloxane modified polyamidoimide resin, cyanate resin, phosphazene resin, rubber modified polyamidoimide resin, isoprene, hydrogenated polybutadiene, polyvinyl butyraldehyde, Phenoxy, polymer epoxy resin, aromatic polyamidoamine, fluororesin, bisphenol, block copolymer polyamidoimide resin and cyanate resin.
又,上述環氧樹脂係分子內具有2個以上環氧基者,並且只要為可用於電性、電子材料用途者,則可尤其無問題地使用。又,上述環氧樹脂較佳為使用分子內具有2個以上環氧丙基之化合物進行環氧化而成的環氧樹脂。又,可將選自由如下成分所組成之群中之1種或2種以上混合而使用:雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、雙酚AD型環氧樹脂、酚醛清漆型環氧樹脂、甲酚酚醛清漆型環氧樹脂、脂環式環氧樹脂、溴化(brominated)環氧樹脂、酚系酚醛清漆型環氧樹脂、萘型環氧樹脂、溴化雙酚A型環氧樹脂、鄰甲酚酚醛清漆型環氧樹脂、橡膠改質雙酚A型環氧樹脂、環氧丙胺型環氧樹脂、異氰尿酸三環氧丙酯、N,N-二環氧丙基苯胺等環氧丙胺化合物、四氫鄰苯二甲酸二環氧丙酯等環氧丙酯化合物、含磷之環氧樹脂、聯苯型環氧樹脂、聯苯酚醛清漆型環氧樹脂、三羥基苯基甲烷型環氧樹脂、四苯基乙烷型環氧樹脂,或者可使用上述環氧樹脂之氫化體或鹵化體。 Moreover, the said epoxy resin type has a 2 or more epoxy group in a molecule | numerator, and can be used especially without a problem as long as it can be used for an electrical and electronic material use. The epoxy resin is preferably an epoxy resin obtained by epoxidizing a compound having two or more epoxypropyl groups in the molecule. In addition, one or two or more kinds selected from the group consisting of bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, and bisphenol can be used in combination. AD epoxy resin, novolac epoxy resin, cresol novolac epoxy resin, alicyclic epoxy resin, brominated epoxy resin, phenol novolac epoxy resin, naphthalene ring Oxygen resin, brominated bisphenol A epoxy resin, o-cresol novolac epoxy resin, rubber modified bisphenol A epoxy resin, epoxy amine epoxy resin, triglycidyl isocyanurate , N, N-glycidylamine compounds such as diglycidyl aniline, propylene oxide compounds such as diglycidyl tetrahydrophthalate, epoxy resin containing phosphorus, biphenyl epoxy resin, Novolac-type epoxy resin, trihydroxyphenylmethane-type epoxy resin, tetraphenylethane-type epoxy resin, or a hydrogenated or halogenated body of the above-mentioned epoxy resin can be used.
可使用周知之含有磷之環氧樹脂作為上述含磷之環氧樹脂。又,上述含磷之環氧樹脂較佳為例如分子內具備2個以上環氧基之以自9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物之衍生物之形式獲得的環氧樹脂。 As the phosphorus-containing epoxy resin, a well-known phosphorus-containing epoxy resin can be used. The above-mentioned phosphorus-containing epoxy resin is preferably, for example, a derivative derived from 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide having two or more epoxy groups in the molecule. Obtained in the form of epoxy resin.
(樹脂層含有介電體(介電體填料)之情況) (When the resin layer contains a dielectric (dielectric filler))
上述樹脂層亦可含有介電體(介電體填料)。 The resin layer may contain a dielectric body (dielectric body filler).
於在上述任一種樹脂層或樹脂組成物中含有介電體(介電體填料)之情形時,可用於形成電容器層之用途,而增大電容器電路之電容。該介電體(介電體填料)係使用BaTiO3、SrTiO3、Pb(Zr-Ti)O3(通稱PZT)、PbLaTiO3.PbLaZrO(通稱PLZT)、SrBi2Ta2O9(通稱SBT)等具有鈣鈦礦(Perovskite)結構之複合氧化物之介電體粉。 When a dielectric body (dielectric body filler) is contained in any of the above-mentioned resin layers or resin compositions, it can be used to form a capacitor layer and increase the capacitance of a capacitor circuit. The dielectric body (dielectric body filler) uses BaTiO 3 , SrTiO 3 , Pb (Zr-Ti) O 3 (commonly referred to as PZT), and PbLaTiO 3 . PbLaZrO (commonly referred to as PLZT), SrBi 2 Ta 2 O 9 (commonly referred to as SBT), and dielectric powders of composite oxides having a perovskite structure.
介電體(介電體填料)亦可為粉狀。於介電體(介電體填料)為粉狀之情形時,該介電體(介電體填料)之粉體特性較佳為粒徑為0.01μm~3.0μm、較佳為0.02μm~2.0μm之範圍。再者,利用掃描型電子顯微鏡(SEM)對介電體拍攝照片,於在該照片上之介電體之粒子上引直線之情形時,將橫切介電體之粒子之直線長度為最長的部分之介電體之粒子長度設為該介電體之粒子直徑。並且,將測定視野內之介電體之粒子直徑之平均值設為介電體之粒徑。 The dielectric body (dielectric body filler) may be powdered. In the case where the dielectric body (dielectric filler) is powdery, the powder characteristics of the dielectric body (dielectric filler) are preferably 0.01 μm to 3.0 μm, and more preferably 0.02 μm to 2.0. μm range. Furthermore, a scanning electron microscope (SEM) is used to take a picture of the dielectric body. When a straight line is drawn on the particles of the dielectric body in the picture, the straight line length of the particles that cross the dielectric body is the longest. The particle length of a part of the dielectric is set to the particle diameter of the dielectric. In addition, the average value of the particle diameter of the dielectric body in the measurement field is defined as the particle diameter of the dielectric body.
使上述樹脂層中所含之樹脂及/或樹脂組成物及/或化合物溶解於例如甲基乙基酮(MEK)、環戊酮、二甲基甲醯胺、二甲基乙醯胺、N-甲基吡咯啶酮、甲苯、甲醇、乙醇、丙二醇單甲醚、二甲基甲醯胺、二甲基乙醯胺、環己酮、乙基溶纖素、N-甲基-2-吡咯啶酮、N,N-二甲基乙醯胺、N,N-二甲基甲醯胺等溶劑中而製成樹脂液(樹脂清漆),藉由例 如輥式塗佈法等將其塗佈於上述銅放熱材之粗化處理表面上,繼而視需要進行加熱乾燥,去除溶劑而成為B階段狀態。乾燥例如只要使用熱風乾燥爐即可,乾燥溫度只要為100~250℃、較佳為130~200℃即可。可使用溶劑溶解上述樹脂層之組成物,而製成樹脂固形物成分3wt%~70wt%、較佳為3wt%~60wt%、較佳為10wt%~40wt%、更佳為25wt%~40wt%之樹脂液。再者,就環境之觀點而言,現階段最佳為使用甲基乙基酮與環戊酮之混合溶劑進行溶解。再者,溶劑較佳為使用沸點為50℃~200℃之範圍之溶劑。 The resin and / or resin composition and / or compound contained in the resin layer is dissolved in, for example, methyl ethyl ketone (MEK), cyclopentanone, dimethylformamide, dimethylacetamide, N -Methylpyrrolidone, toluene, methanol, ethanol, propylene glycol monomethyl ether, dimethylformamide, dimethylacetamide, cyclohexanone, ethyl fibrinolysin, N-methyl-2-pyrrole A resin solution (resin varnish) is prepared in a solvent such as pyridone, N, N-dimethylacetamide, N, N-dimethylformamide, and the like. It is coated on the roughened surface of the above-mentioned copper heat radiating material, such as a roll coating method, and then is heated and dried as necessary to remove the solvent and become a B-stage state. For drying, for example, a hot-air drying furnace may be used, and the drying temperature may be 100 to 250 ° C, preferably 130 to 200 ° C. A solvent can be used to dissolve the composition of the resin layer, and the resin solid content is 3wt% to 70wt%, preferably 3wt% to 60wt%, preferably 10wt% to 40wt%, and more preferably 25wt% to 40wt%. Of resin liquid. Furthermore, from the viewpoint of the environment, it is best to dissolve it using a mixed solvent of methyl ethyl ketone and cyclopentanone at this stage. The solvent is preferably a solvent having a boiling point in the range of 50 ° C to 200 ° C.
又,上述樹脂層較佳為依據MIL標準中之MIL-P-13949G進行測定時之樹脂流動量為5%~35%之範圍的半硬化樹脂膜。 The resin layer is preferably a semi-hardened resin film having a resin flow rate in the range of 5% to 35% when measured in accordance with MIL-P-13949G in the MIL standard.
於本案說明書中,所謂樹脂流動量,係指依據MIL標準中之MIL-P-13949G,自使樹脂厚度為55μm之附樹脂之銅放熱材採取4片10cm見方試樣,於使該4片試樣重疊之狀態(積層體)下,於壓製溫度171℃、壓製壓力14kgf/cm2、壓製時間10分鐘之條件下進行貼合,根據測定此時之樹脂流出重量所得之結果,基於數2而算出之值。 In the description of this case, the so-called resin flow rate refers to MIL-P-13949G in the MIL standard. Four copper 10 cm square samples were taken from a copper heat-emitting material with a resin thickness of 55 μm. In the state where the samples are stacked (laminated body), the bonding is performed under the conditions of a pressing temperature of 171 ° C, a pressing pressure of 14 kgf / cm 2 and a pressing time of 10 minutes. Based on the result obtained by measuring the resin outflow weight at this time, based on the number 2 Calculated value.
具備上述樹脂層之銅放熱材(附樹脂之銅放熱材)係以如下態樣來使用:將該樹脂層與基材重疊後將整體熱壓接而使該樹脂層熱硬化,繼而於銅放熱材為附載體銅箔之極薄銅層之情形時,剝離載體而露出極薄銅層(當然露出的是該極薄銅層之中間層側表面),自銅放熱材之與經 粗化處理側相反之側的表面形成特定配線圖案。 The copper heat radiating material (copper heat radiating material with resin) provided with the resin layer is used in a state in which the resin layer is overlapped with the base material, and then the whole is thermally pressure-bonded to thermally harden the resin layer, followed by copper heat radiation When the material is an ultra-thin copper layer with a copper foil with a carrier, the carrier is peeled off to expose the ultra-thin copper layer (of course, the surface of the middle layer side of the ultra-thin copper layer is exposed). A specific wiring pattern is formed on the surface on the opposite side of the roughening treatment side.
若使用該附樹脂之銅放熱材,則可減少製造多層印刷配線基板時之預浸體材之使用片數。而且,即便將樹脂層之厚度設為可確保層間絕緣之厚度,或完全不使用預浸體材料,亦可製造覆金屬積層板。又,此時,亦可將絕緣樹脂底漆塗佈於基材之表面而進一步改善表面之平滑性。 If the copper heat-emitting material with resin is used, the number of prepreg materials used in manufacturing a multilayer printed wiring board can be reduced. In addition, even if the thickness of the resin layer is set to a thickness capable of ensuring interlayer insulation, or a prepreg material is not used at all, a metal-clad laminated board can be manufactured. At this time, an insulating resin primer may be applied to the surface of the substrate to further improve the surface smoothness.
再者,於不使用預浸體材料之情形時,可節約預浸體材料之材料成本,又,積層步驟亦變得簡略,因此於經濟上較為有利,而且有如下優點:僅製造預浸體材料之厚度程度的多層印刷配線基板之厚度變薄,而可製造1層之厚度為100μm以下之極薄之多層印刷配線基板。 Furthermore, when the prepreg material is not used, the material cost of the prepreg material can be saved, and the lamination step becomes simple, so it is economically advantageous, and has the following advantages: only the prepreg body is manufactured The thickness of the multilayer printed wiring board having a thickness of material is reduced, and an extremely thin multilayer printed wiring board having a thickness of 100 μm or less can be manufactured.
該樹脂層之厚度較佳為0.1~120μm。 The thickness of the resin layer is preferably 0.1 to 120 μm.
若樹脂層之厚度薄於0.1μm,則有如下情況:接著力降低,於不介存預浸體材而將該附樹脂之銅放熱材積層於具備內層材料之基材時,難以確保內層材料與電路之間之層間絕緣。另一方面,若樹脂層之厚度厚於120μm,則有如下情況:難以於1次塗佈步驟中形成目標厚度之樹脂層,而需要多餘之材料費及步驟數,故而於經濟上變得不利。 If the thickness of the resin layer is less than 0.1 μm, there is a case where the adhesive force is reduced, and when the copper heat-radiating material with resin is laminated on a substrate provided with an inner layer material without interposing a prepreg, it is difficult to secure the inner layer. Interlayer insulation between the layer material and the circuit. On the other hand, if the thickness of the resin layer is greater than 120 μm, it may be difficult to form a resin layer having a target thickness in one coating step, and an excessive material cost and number of steps are required, which is economically disadvantageous. .
再者,於將具有樹脂層之銅放熱材用於製造極薄之多層印刷配線板之情形時,將上述樹脂層之厚度設為0.1μm~5μm、更佳為0.5μm~5μm、更佳為1μm~5μm時,可縮小多層印刷配線板之厚度,故而較佳。 When a copper heat-emitting material having a resin layer is used to manufacture an extremely thin multilayer printed wiring board, the thickness of the resin layer is set to 0.1 μm to 5 μm, more preferably 0.5 μm to 5 μm, and more preferably When the thickness is 1 μm to 5 μm, the thickness of the multilayer printed wiring board can be reduced, so it is preferable.
以下,表示若干使用本發明之附載體銅箔的印刷配線板之製造步驟之例子。 Hereinafter, some examples of the manufacturing steps of the printed wiring board using the copper foil with a carrier of this invention are shown.
本發明之印刷配線板之製造方法之一實施形態含有如下步驟:準備本發明之附載體銅箔與絕緣基板;將上述附載體銅箔與絕緣基板積層;及以 使極薄銅層側與絕緣基板對向之方式將上述附載體銅箔與絕緣基板積層後,經過將上述附載體銅箔之載體剝離之步驟而形成覆金屬積層板,其後,藉由半加成法、改良半加成法、部分加成法及減成法中之任一種方法形成電路。絕緣基板亦可設為內層電路入口。 An embodiment of a method for manufacturing a printed wiring board of the present invention includes the following steps: preparing the copper foil with a carrier and an insulating substrate of the present invention; laminating the copper foil with a carrier and the insulating substrate; and After laminating the copper foil with a carrier and the insulating substrate such that the side of the ultra-thin copper layer and the insulating substrate face each other, a step of peeling the carrier of the copper foil with a carrier is formed to form a metal-clad laminated board. Any of the addition method, the modified semi-addition method, the partial addition method, and the subtraction method forms a circuit. The insulating substrate can also be used as an inner circuit entrance.
於本發明中,所謂半加成法,係指於絕緣基板或金屬箔晶種層上進行較薄之無電解鍍敷,形成圖案後,利用電鍍及蝕刻形成導體圖案的方法。 In the present invention, the so-called semi-additive method refers to a method of performing a thin electroless plating on an insulating substrate or a metal foil seed layer to form a pattern, and then forming a conductor pattern by electroplating and etching.
因此,使用半加成法之本發明之印刷配線板之製造方法之一實施形態含有如下步驟:準備本發明之附載體銅箔與絕緣基板;將上述附載體銅箔與絕緣基板積層;於將上述附載體銅箔與絕緣基板積層後,將上述附載體銅箔之載體剝離;藉由使用酸等腐蝕溶液之蝕刻或電漿等方法將剝離上述載體而露出之極薄銅層完全去除;於藉由利用蝕刻去除上述極薄銅層而露出之上述樹脂上設置通孔或/及盲孔;對含有上述通孔或/及盲孔之區域進行除膠渣處理;於含有上述樹脂及上述通孔或/及盲孔之區域設置無電解鍍敷層;於上述無電解鍍敷層上設置鍍敷阻劑;對上述鍍敷阻劑進行曝光,其後,去除形成有電路之區域之鍍敷阻劑;於去除了上述鍍敷阻劑之上述形成有電路之區域設置電解鍍敷層;去除上述鍍敷阻劑;及藉由快速蝕刻等去除位於除了上述形成有電路之區域以外之區域的無電解鍍敷層。 Therefore, one embodiment of the method for manufacturing a printed wiring board of the present invention using the semi-additive method includes the following steps: preparing the copper foil with a carrier and an insulating substrate of the present invention; laminating the copper foil with a carrier and the insulating substrate; After the above-mentioned copper foil with a carrier and an insulating substrate are laminated, the carrier of the above-mentioned copper foil with a carrier is peeled off; the ultra-thin copper layer exposed by peeling off the carrier is completely removed by etching or etching using an etching solution such as an acid; or A through hole or / and a blind hole is provided on the resin exposed by removing the ultra-thin copper layer by etching; a slag removal treatment is performed on the area containing the through hole or / and the blind hole; An electroless plating layer is provided in the area of the hole or / and the blind hole; a plating resist is provided on the electroless plating layer; the plating resist is exposed, and thereafter, the plating in the area where the circuit is formed is removed A resist; providing an electrolytic plating layer in an area where the above-mentioned circuit is formed from which the above-mentioned plating resist has been removed; removing the above-mentioned plating resist; and removing the presence of the circuit except for the above-mentioned circuit by rapid etching or the like Electroless plating cladding layer region outside the domain.
使用半加成法之本發明之印刷配線板之製造方法之另一實施形態含有如下步驟:準備本發明之附載體銅箔與絕緣基板;將上述附載體銅箔與絕緣基板積層;於將上述附載體銅箔與絕緣基板積層後,將上述 附載體銅箔之載體剝離;藉由使用酸等腐蝕溶液之蝕刻或電漿等方法將剝離上述載體而露出之極薄銅層完全去除;於藉由利用蝕刻去除上述極薄銅層而露出之上述樹脂之表面設置無電解鍍敷層;於上述無電解鍍敷層上設置鍍敷阻劑;對上述鍍敷阻劑進行曝光,其後,去除形成有電路之區域之鍍敷阻劑;於去除了上述鍍敷阻劑之上述形成有電路之區域設置電解鍍敷層;去除上述鍍敷阻劑;及藉由快速蝕刻等去除位於除了上述形成有電路之區域以外之區域的無電解鍍敷層及極薄銅層。 Another embodiment of the method for manufacturing a printed wiring board of the present invention using the semi-additive method includes the following steps: preparing the copper foil with a carrier and an insulating substrate of the present invention; laminating the copper foil with a carrier and the insulating substrate; After laminating the copper foil with a carrier and an insulating substrate, Carrier copper foil with carrier is peeled off; the ultra-thin copper layer exposed by peeling the carrier is completely removed by etching using an etching solution such as an acid or a plasma; and the ultra-thin copper layer exposed by removing the above-mentioned carrier by etching An electroless plating layer is provided on the surface of the resin; a plating resist is provided on the electroless plating layer; the plating resist is exposed, and thereafter, the plating resist in the area where the circuit is formed is removed; An electrolytic plating layer is provided in the above-mentioned circuit-formed area where the above-mentioned plating resist is removed; the above-mentioned plating resist is removed; and electroless plating located in a region other than the above-mentioned area where the circuit is formed is removed by rapid etching or the like Layer and very thin copper layer.
於本發明中,所謂改良半加成法,係指於絕緣層上積層金屬箔,藉由鍍敷阻劑保護非電路形成部,藉由電解鍍敷增厚電路形成部之銅厚後,去除抗蝕劑,利用(快速)蝕刻去除上述電路形成部以外之金屬箔,藉此於絕緣層上形成電路的方法。 In the present invention, the so-called modified semi-additive method refers to laminating a metal foil on an insulating layer, protecting a non-circuit forming portion by a plating resist, and thickening a copper of the circuit forming portion by electrolytic plating, and then removing A method for forming a circuit on an insulating layer by removing a metal foil other than the above-mentioned circuit forming portion by (fast) etching using a resist.
因此,使用改良半加成法之本發明之印刷配線板之製造方法之一實施形態含有如下步驟:準備本發明之附載體銅箔與絕緣基板;將上述附載體銅箔與絕緣基板積層;於將上述附載體銅箔與絕緣基板積層後,將上述附載體銅箔之載體剝離;於剝離上述載體而露出之極薄銅層與絕緣基板上設置通孔或/及盲孔;對含有上述通孔或/及盲孔之區域進行除膠渣處理;於上述含有通孔或/及盲孔之區域設置無電解鍍敷層;於剝離上述載體而露出之極薄銅層表面設置鍍敷阻劑;於設置上述鍍敷阻劑後,藉由電解鍍敷形成電路;去除上述鍍敷阻劑;及利用快速蝕刻去除藉由去除上述鍍敷阻劑而露出之極薄銅層。 Therefore, one embodiment of a method for manufacturing a printed wiring board of the present invention using an improved semi-additive method includes the following steps: preparing the copper foil with a carrier and an insulating substrate of the present invention; laminating the copper foil with a carrier and the insulating substrate; After laminating the copper foil with a carrier and an insulating substrate, the carrier of the copper foil with a carrier is peeled off; through holes or / and blind holes are provided on the ultra-thin copper layer and the insulating substrate that are exposed by peeling the carrier; Holes and / or blind holes are subjected to slag removal treatment; an electroless plating layer is provided in the above-mentioned areas containing through holes or / and blind holes; a plating resist is provided on the surface of the ultra-thin copper layer exposed by peeling the carrier After the plating resist is provided, a circuit is formed by electrolytic plating; the plating resist is removed; and the ultra-thin copper layer exposed by removing the plating resist is removed by rapid etching.
又,上述於樹脂層上形成電路之步驟,亦可為下述步驟:將另一附載體銅箔自極薄銅層側貼合於上述樹脂層上,使用貼合於上述樹脂 層之附載體銅箔形成上述電路。又,貼合於上述樹脂層上之另一附載體銅箔亦可為本發明之附載體銅箔。又,於上述樹脂層上形成電路之步驟,亦可利用半加成法、改良半加成法、部分加成法或減成法中之任一種方法來進行。又,於上述表面形成電路之附載體銅箔,亦可於該附載體銅箔之載體表面具有基板或樹脂層。 In addition, the step of forming a circuit on the resin layer may be the following step: bonding another copper foil with a carrier to the resin layer from the side of the ultra-thin copper layer, and bonding to the resin The layer of copper foil with a carrier forms the above circuit. In addition, another copper foil with a carrier bonded to the resin layer may be the copper foil with a carrier of the present invention. The step of forming a circuit on the resin layer may be performed by any one of a semi-additive method, a modified semi-additive method, a partial addition method, or a subtractive method. Moreover, the copper foil with a carrier which forms a circuit on the said surface may have a board | substrate or a resin layer on the surface of the copper foil with a carrier.
使用改良半加成法之本發明之印刷配線板之製造方法之另一實施形態含有如下步驟:準備本發明之附載體銅箔與絕緣基板;將上述附載體銅箔與絕緣基板積層;於將上述附載體銅箔與絕緣基板積層後,將上述附載體銅箔之載體剝離;於剝離上述載體而露出之極薄銅層上設置鍍敷阻劑;對上述鍍敷阻劑進行曝光,其後,去除形成有電路之區域之鍍敷阻劑;於去除了上述鍍敷阻劑之上述形成有電路之區域設置電解鍍敷層;去除上述鍍敷阻劑;及藉由快速蝕刻等去除位於除了上述形成有電路之區域以外之區域的無電解鍍敷層及極薄銅層。 Another embodiment of the method for manufacturing a printed wiring board of the present invention using an improved semi-additive method includes the following steps: preparing the copper foil with a carrier and an insulating substrate of the present invention; laminating the copper foil with a carrier and the insulating substrate; After the copper foil with a carrier and the insulating substrate are laminated, the carrier with the copper foil with a carrier is peeled off; a plating resist is provided on the very thin copper layer exposed by peeling the carrier; the plating resist is exposed, and thereafter Remove the plating resist in the area where the circuit is formed; set an electrolytic plating layer in the above-mentioned area where the circuit is formed with the plating resist removed; remove the plating resist; and remove The electroless plating layer and the ultra-thin copper layer in a region other than the region where the circuit is formed.
於本發明中,所謂部分加成法,係指於設置導體層而成之基板、視需要穿過通孔或輔助孔用孔而成之基板上賦予觸媒核,進行蝕刻而形成導體電路,視需要設置阻焊劑或鍍敷阻劑後,於上述導體電路上藉由無電解鍍敷處理對通孔或輔助孔等進行增厚,藉此製造印刷配線板的方法。 In the present invention, the so-called partial addition method refers to adding a catalyst core to a substrate formed by providing a conductive layer and, if necessary, passing through a through hole or an auxiliary hole, and forming a conductive circuit by etching, A method of manufacturing a printed wiring board by providing a solder resist or a plating resist as required, and then thickening a through hole or an auxiliary hole by an electroless plating process on the conductor circuit.
因此,使用部分加成法之本發明之印刷配線板之製造方法之一實施形態含有如下步驟:準備本發明之附載體銅箔與絕緣基板;將上述附載體銅箔與絕緣基板積層;於將上述附載體銅箔與絕緣基板積層後,將上述附載體銅箔之載體剝離;於剝離上述載體而露出之極薄銅層與絕緣基板上設置通孔或/及盲孔;對含有上述通孔或/及盲孔之區域進行除膠渣 處理;於上述含有通孔或/及盲孔之區域賦予觸媒核;於剝離上述載體而露出之極薄銅層表面設置蝕刻阻劑;對上述蝕刻阻劑進行曝光而形成電路圖案;利用使用酸等腐蝕溶液之蝕刻或電漿等方法去除上述極薄銅層及上述觸媒核,而形成電路;去除上述蝕刻阻劑;於利用使用酸等腐蝕溶液之蝕刻或電漿等方法去除上述極薄銅層及上述觸媒核而露出的上述絕緣基板表面,設置阻焊劑或鍍敷阻劑;及於未設置上述阻焊劑或鍍敷阻劑之區域設置無電解鍍敷層。 Therefore, one embodiment of a method for manufacturing a printed wiring board of the present invention using a partial addition method includes the following steps: preparing the copper foil with a carrier and an insulating substrate of the present invention; laminating the copper foil with a carrier and the insulating substrate; After the copper foil with a carrier and the insulating substrate are laminated, the carrier with the copper foil with a carrier is peeled off; through holes or / and blind holes are provided on the ultra-thin copper layer and the insulating substrate that are exposed by peeling the carrier; And / or blind hole removal Treatment; providing a catalyst core in the above-mentioned area containing through holes and / or blind holes; setting an etching resist on the surface of the ultra-thin copper layer exposed by peeling the carrier; exposing the etching resist to form a circuit pattern; using The etching of the etching solution such as acid or the plasma etc. method removes the ultra-thin copper layer and the catalyst core to form a circuit; the removal of the above-mentioned etching resist; A thin copper layer and the surface of the insulating substrate exposed by the catalyst core are provided with a solder resist or a plating resist; and an electroless plating layer is provided in an area where the solder resist or the plating resist is not provided.
於本發明中,所謂減成法,係指藉由蝕刻等將覆金屬積層板上之銅箔之不需要的部分選擇性地去除,而形成導體圖案的方法。 In the present invention, the subtractive method refers to a method of selectively removing unnecessary portions of a copper foil on a metal-clad laminate by etching or the like to form a conductor pattern.
因此,使用減成法之本發明之印刷配線板之製造方法之一實施形態含有如下步驟:準備本發明之附載體銅箔與絕緣基板;將上述附載體銅箔與絕緣基板積層;於將上述附載體銅箔與絕緣基板積層後,將上述附載體銅箔之載體剝離;於剝離上述載體而露出之極薄銅層與絕緣基板上設置通孔或/及盲孔;對含有上述通孔或/及盲孔之區域進行除膠渣處理;於上述含有通孔或/及盲孔之區域設置無電解鍍敷層;於上述無電解鍍敷層之表面設置電解鍍敷層;於上述電解鍍敷層或/及上述極薄銅層之表面設置蝕刻阻劑;對上述蝕刻阻劑進行曝光而形成電路圖案;利用使用酸等腐蝕溶液之蝕刻或電漿等方法去除上述極薄銅層及上述無電解鍍敷層及上述電解鍍敷層,而形成電路;及去除上述蝕刻阻劑。 Therefore, one embodiment of the method for manufacturing a printed wiring board of the present invention using the subtractive method includes the following steps: preparing the copper foil with a carrier and an insulating substrate of the present invention; laminating the copper foil with a carrier and the insulating substrate; After laminating the copper foil with a carrier and an insulating substrate, peel off the carrier of the copper foil with a carrier; set a through hole or / and a blind hole on the ultra-thin copper layer and the insulating substrate exposed by peeling the carrier; / And the blind hole area to remove the slag treatment; the above area containing the through hole or / and blind hole is provided with an electroless plating layer; the above electroless plating layer is provided with an electrolytic plating layer on the above surface; An etching resist is provided on the surface of the cladding layer or / and the above-mentioned ultra-thin copper layer; the above-mentioned etching resist is exposed to form a circuit pattern; the above-mentioned ultra-thin copper layer and the above-mentioned are removed by etching or plasma using an etching solution such as an acid or the like Forming an electric circuit by using an electroless plating layer and the electrolytic plating layer; and removing the etching resist.
使用減成法之本發明之印刷配線板之製造方法之另一實施形態含有如下步驟:準備本發明之附載體銅箔與絕緣基板;將上述附載體銅箔與絕緣基板積層;於將上述附載體銅箔與絕緣基板積層後,將上述附 載體銅箔之載體剝離;於剝離上述載體而露出之極薄銅層與絕緣基板上設置通孔或/及盲孔;對含有上述通孔或/及盲孔之區域進行除膠渣處理;於上述含有通孔或/及盲孔之區域設置無電解鍍敷層;於上述無電解鍍敷層之表面形成遮罩;於未形成遮罩之上述無電解鍍敷層之表面設置電解鍍敷層;於上述電解鍍敷層或/及上述極薄銅層之表面設置蝕刻阻劑;對上述蝕刻阻劑進行曝光而形成電路圖案;利用使用酸等腐蝕溶液之蝕刻或電漿等方法去除上述極薄銅層及上述無電解鍍敷層,而形成電路;及去除上述蝕刻阻劑。 Another embodiment of the manufacturing method of the printed wiring board of the present invention using the subtractive method includes the following steps: preparing the copper foil with a carrier and an insulating substrate of the present invention; laminating the copper foil with a carrier and the insulating substrate; After the carrier copper foil and the insulating substrate are laminated, Carrier copper foil carrier peeling; through holes or / and blind holes are provided on the ultra-thin copper layer and the insulating substrate exposed by peeling the above carrier; the area containing the above through holes or / and blind holes is subjected to degreasing treatment; An electroless plating layer is provided in the above-mentioned area containing a through hole or / and a blind hole; a mask is formed on the surface of the aforementioned electroless plating layer; an electrolytic plating layer is provided on the surface of the aforementioned electroless plating layer where no mask is formed ; Setting an etching resist on the surface of the electrolytic plating layer or / and the ultra-thin copper layer; exposing the etching resist to form a circuit pattern; using etching or plasma using an etching solution such as acid to remove the electrode Forming a circuit with the thin copper layer and the electroless plating layer; and removing the etching resist.
亦可不進行設置通孔或/及盲孔之步驟、及其後之除膠渣步驟。 The step of setting through holes and / or blind holes, and the subsequent step of removing glue residue may not be performed.
此處,詳細地說明使用有本發明之附載體銅箔之印刷配線板之製造方法的具體例。再者,此處,以具有形成有粗化處理層之極薄銅層之附載體銅箔為例進行說明,但並不限於此,使用具有未形成粗化處理層之極薄銅層之附載體銅箔,亦可同樣地進行下述印刷配線板之製造方法。 Here, the specific example of the manufacturing method of the printed wiring board using the copper foil with a carrier which concerns on this invention is demonstrated in detail. Here, a copper foil with a carrier having an ultra-thin copper layer formed with a roughened layer will be described as an example, but it is not limited to this. The carrier copper foil can be similarly subjected to the following method for producing a printed wiring board.
首先,準備具有表面形成有粗化處理層之極薄銅層的附載體銅箔(第1層)。 First, a copper foil with a carrier (first layer) having an ultra-thin copper layer having a roughened layer formed on the surface is prepared.
其次,於極薄銅層之粗化處理層上塗佈抗蝕劑,進行曝光、顯影而將抗蝕劑蝕刻為特定形狀。 Next, a resist is applied to the roughened layer of the ultra-thin copper layer, and the resist is exposed to a specific shape by exposure and development.
其次,藉由於形成電路用鍍層後去除抗蝕劑,而形成特定形狀之電路鍍層。 Secondly, a circuit plating layer having a specific shape is formed by removing the resist after the circuit plating layer is formed.
其次,以被覆電路鍍層之方式(以埋沒電路鍍層之方式)於極薄銅層上設置埋入樹脂而積層樹脂層,繼而自極薄銅層側接著另一附載體銅箔(第 2層)。 Secondly, the resin layer is laminated on the ultra-thin copper layer by covering the circuit plating layer (by burying the circuit plating layer), and then another copper foil with a carrier (the 2 layer).
其次,自第2層之附載體銅箔剝離載體。 Next, the carrier was peeled from the copper foil with a carrier of the second layer.
其次,於樹脂層之特定位置進行雷射開孔,使電路鍍層露出而形成盲孔。 Secondly, laser drilling is performed at a specific position of the resin layer to expose the circuit plating layer and form blind holes.
其次,於盲孔中埋入銅,形成通孔填充物。 Secondly, copper is buried in the blind holes to form a via filling.
其次,於通孔填充物上,以上述方式形成電路鍍層。 Next, a circuit plating layer is formed on the via hole filling material in the manner described above.
其次,自第1層之附載體銅箔剝離載體。 Next, the carrier was peeled from the copper foil with a carrier in the first layer.
其次,藉由快速蝕刻去除兩表面之極薄銅層,使樹脂層內之電路鍍層之表面露出。 Secondly, the ultra-thin copper layers on both surfaces are removed by rapid etching to expose the surface of the circuit plating layer in the resin layer.
其次,於樹脂層內之電路鍍層上形成凸塊,於該焊料上形成銅柱。如此製作使用有本發明之附載體銅箔之印刷配線板。 Second, a bump is formed on the circuit plating layer in the resin layer, and a copper pillar is formed on the solder. In this way, a printed wiring board using the copper foil with a carrier of the present invention was produced.
上述另一附載體銅箔(第2層)可使用本發明之附載體銅箔,亦可使用先前之附載體銅箔,進而亦可使用通常之銅箔。又,可於上述第2層電路上進一步形成1層或複數層電路,可藉由半加成法、減成法、部分加成法或改良半加成法中之任一種方法來形成該等電路。 The other copper foil with a carrier (the second layer) described above may use the copper foil with a carrier of the present invention, or may use the previous copper foil with a carrier, and may further use a common copper foil. Furthermore, one layer or a plurality of layers of circuits can be further formed on the above-mentioned second layer circuit, and these can be formed by any one of a semi-additive method, a subtractive method, a partial additive method, or an improved semi-additive method. Circuit.
再者,埋入樹脂(resin)可使用周知之樹脂、預浸體。可使用例如BT(雙順丁烯二醯亞胺三)樹脂或含浸BT樹脂之玻璃布即預浸體、Ajinomoto Fine-Techno股份有限公司製造之ABF膜或ABF。又,上述埋入樹脂(resin)亦可使用本說明書中所記載之樹脂層及/或樹脂及/或預浸體。 Further, as the resin, a known resin or prepreg can be used. It is possible to use, for example, BT (biscis ) Resin or glass cloth impregnated with BT resin is prepreg, ABF film or ABF manufactured by Ajinomoto Fine-Techno Co., Ltd. In addition, as the embedded resin (resin), a resin layer and / or a resin and / or a prepreg described in this specification may be used.
又,上述第一層中使用之附載體銅箔亦可於該附載體銅箔之表面具有基板或樹脂層。藉由具有該基板或樹脂層,第一層中使用之附載 體銅箔受到支持,變得不易產生皺褶,因此有生產性提高之優點。再者,只要上述基板或樹脂層為發揮支持上述第一層中使用之附載體銅箔的效果者,則可使用全部基板或樹脂層。例如,可使用本案說明書中記載之載體、預浸體、樹脂層或周知之載體、預浸體、樹脂層、金屬板、金屬箔、無機化合物之板、無機化合物之箔、有機化合物之板、有機化合物之箔作為上述基板或樹脂層。 The copper foil with a carrier used in the first layer may have a substrate or a resin layer on a surface of the copper foil with a carrier. By having the substrate or the resin layer, the carrier used in the first layer The bulk copper foil is supported, and wrinkles are less likely to occur. Therefore, there is an advantage that productivity is improved. In addition, as long as the said substrate or resin layer has the effect which supports the copper foil with a carrier used for the said 1st layer, all the substrate or resin layers can be used. For example, a carrier, a prepreg, a resin layer, or a known carrier, a prepreg, a resin layer, a metal plate, a metal foil, a plate of an inorganic compound, a plate of an inorganic compound, a plate of an organic compound, or a well-known carrier described in the specification of the present case can be used. An organic compound foil is used as the substrate or resin layer.
可將本發明之銅放熱材自表面處理層側或與表面處理層側相反之側貼合於樹脂基板而製造積層體。樹脂基板只要具有可應用於印刷配線板等之特性,則不受特別限制,例如,於剛性PWB用可使用紙基材酚樹脂、紙基材環氧樹脂、合成纖維布基材環氧樹脂、氟樹脂含浸編織物、玻璃布-紙複合基材環氧樹脂、玻璃布-玻璃不織布複合基材環氧樹脂及玻璃布基材環氧樹脂等,於可撓性印刷基板(FPC)用可使用聚酯膜或聚醯亞胺膜、液晶聚合物(LCP)膜、氟樹脂及氟樹脂-聚醯亞胺複合材料等。再者,因為液晶聚合物(LCP)其介電損失小,故而可將液晶聚合物(LCP)膜較佳地用於高頻電路用途之印刷配線板。 The copper heat radiation material of the present invention can be laminated to a resin substrate from the surface treatment layer side or the side opposite to the surface treatment layer side to produce a laminated body. The resin substrate is not particularly limited as long as it has characteristics applicable to printed wiring boards. For example, for rigid PWB, paper substrate phenol resin, paper substrate epoxy resin, synthetic fiber cloth substrate epoxy resin, Fluorine resin impregnated knitted fabric, glass cloth-paper composite substrate epoxy resin, glass cloth-glass non-woven fabric composite substrate epoxy resin, glass cloth substrate epoxy resin, etc. can be used for flexible printed circuit boards (FPC) Polyester film or polyimide film, liquid crystal polymer (LCP) film, fluororesin and fluororesin-polyimide composite material, etc. Furthermore, since the liquid crystal polymer (LCP) has a small dielectric loss, the liquid crystal polymer (LCP) film can be preferably used for a printed wiring board for high-frequency circuit applications.
關於貼合之方法,於剛性PWB用之情形時,準備將樹脂含浸於玻璃布等基材中,而使樹脂硬化至半硬化狀態的預浸體。可藉由將銅箔與預浸體重疊並使其加熱加壓而進行。於FPC之情形時,可藉由經由接著劑、或不使用接著劑,而於高溫高壓下將液晶聚合物或聚醯亞胺膜等基材積層接著於銅箔,或者對聚醯亞胺前驅物進行塗佈、乾燥、硬化等而製造積層體。 Regarding the bonding method, in the case of a rigid PWB, a prepreg in which a resin is impregnated into a substrate such as glass cloth and the resin is cured to a semi-hardened state is prepared. It can be performed by superimposing a copper foil and a prepreg, and heating and pressing. In the case of FPC, a substrate such as a liquid crystal polymer or a polyimide film can be laminated to a copper foil at a high temperature and pressure by using an adhesive, or without using an adhesive, or a polyimide precursor The laminated body is produced by coating, drying, curing, and the like.
本發明之積層體可用於各種印刷配線板(PWB),並無特別 限制,例如,就導體圖案之層數之觀點而言,可應用於單面PWB、雙面PWB、多層PWB(3層以上),就絕緣基板材料之種類之觀點而言,可應用於剛性PWB、可撓性PWB(FPC)、軟硬複合PWB。 The laminated body of the present invention can be used for various printed wiring boards (PWB), and there is no special For example, from the viewpoint of the number of layers of the conductor pattern, it can be applied to single-sided PWB, double-sided PWB, and multilayer PWB (3 or more layers). From the viewpoint of the type of insulating substrate material, it can be applied to rigid PWB. , Flexible PWB (FPC), soft and hard composite PWB.
又,可將本發明之銅放熱材或本發明之附載體銅箔,自表面處理層側或與表面處理層側相反之側積層樹脂基板或基板(亦可為金屬材料、無機材料、有機材料、陶瓷)或殼體或金屬加工構件或電子零件或電子機器或液晶面板或顯示器,從而製造積層體。 In addition, the copper heat-generating material of the present invention or the copper foil with a carrier of the present invention may be laminated with a resin substrate or a substrate from a surface-treated layer side or a side opposite to the surface-treated layer side (also metal materials, inorganic materials, organic materials) , Ceramics) or housings or metal-machined components or electronic parts or electronic machines or liquid crystal panels or displays to produce a laminated body.
該積層體亦可於本發明之銅放熱材或本發明之附載體銅箔與上述樹脂基板或上述基板之間具有黏著劑層或接著劑層。黏著劑層可為使用有導電性黏著劑之層,亦可為使用導電性丙烯酸系黏著劑之層。樹脂基板或基板可為分隔件。分隔件係指可使黏著劑層或接著劑層與本發明之銅放熱材或本發明之附載體銅箔自上述積層體剝離的樹脂基板或基板。本發明之銅放熱材或本發明之附載體銅箔與上述樹脂基板或上述基板亦可為可剝離。 The laminated body may have an adhesive layer or an adhesive layer between the copper heat-generating material of the present invention or the copper foil with a carrier of the present invention and the resin substrate or the substrate. The adhesive layer may be a layer using a conductive adhesive or a layer using a conductive acrylic adhesive. The resin substrate or the substrate may be a separator. The separator refers to a resin substrate or a substrate capable of peeling an adhesive layer or an adhesive layer from the copper heat-generating material of the present invention or the copper foil with a carrier of the present invention from the laminated body. The copper heat radiating material of the present invention or the copper foil with a carrier of the present invention may be peelable from the resin substrate or the substrate.
於該積層體係在本發明之銅放熱材或本發明之附載體銅箔與上述樹脂基板或上述基板之間具有黏著劑層或接著劑層之積層體的情形時,本發明之銅放熱材或本發明之附載體銅箔與上述樹脂基板或上述基板亦可為可剝離。 When the laminated system has a laminated body having an adhesive layer or an adhesive layer between the copper heat-generating material of the present invention or the copper foil with a carrier of the present invention and the resin substrate or the substrate, the copper heat-generating material of the present invention or The copper foil with a carrier of the present invention may be peelable from the resin substrate or the substrate.
上述情形時,若將本發明之銅放熱材或本發明之附載體銅箔與上述樹脂基板或上述基板剝離,則黏著劑層或接著劑層於本發明之銅放熱材或本發明之附載體銅箔之表面露出,故而剝離上述樹脂基板或上述基板後之本發明之銅放熱材或本發明之附載體銅箔亦可與其他物體積層。該積層體亦可於上述樹脂基板或上述基板之兩側具有本發明之銅放熱材或本發明之附 載體銅箔。 In the above case, if the copper heat-generating material of the present invention or the copper foil with a carrier of the present invention is peeled from the resin substrate or the substrate, an adhesive layer or an adhesive layer is applied to the copper heat-emitting material of the present invention or the carrier with the present invention. The surface of the copper foil is exposed. Therefore, the copper heat-generating material of the present invention or the copper foil with a carrier of the present invention can also be layered with other materials after the resin substrate or the substrate is peeled off. The laminated body may also have the copper heat-generating material of the present invention or the accessory of the present invention on both sides of the resin substrate or the substrate. Carrier copper foil.
再者,於上述黏著劑層及接著劑層,可使用公知之黏著劑、接著劑、本說明書所記載之樹脂層、以及可用於本說明書所記載之樹脂層之樹脂等。 In addition, as the adhesive layer and the adhesive layer, a known adhesive, an adhesive, a resin layer described in this specification, and a resin usable in the resin layer described in this specification can be used.
進而,可使用本發明之銅放熱材製造印刷配線板、覆銅積層板。又,使用本發明之銅材而製造之印刷配線板可用於電子機器。又,本發明之銅材亦可用於製造二次電池用負極集電體、二次電池、無芯多層印刷配線板時所使用的支持基材等。 Furthermore, a printed wiring board and a copper-clad laminated board can be manufactured using the copper heat radiation material of this invention. Moreover, the printed wiring board manufactured using the copper material of this invention can be used for an electronic device. In addition, the copper material of the present invention can also be used for the production of a negative electrode current collector for a secondary battery, a secondary battery, a support substrate used in a coreless multilayer printed wiring board, and the like.
‧實施例1~11、13~18、比較例1~8。 ‧Examples 1 to 11, 13 to 18, and Comparative Examples 1 to 8.
作為實施例1~11、13~18、比較例1~8,準備具有表1~4所記載之厚度的各種銅基材。接著,於該銅基材上形成合金層。此時,按照表1~4所示,以合金層形成(1)~(3)的順序形成。 As Examples 1 to 11, 13 to 18, and Comparative Examples 1 to 8, various copper substrates having thicknesses described in Tables 1 to 4 were prepared. Next, an alloy layer is formed on the copper substrate. At this time, as shown in Tables 1 to 4, the layers were formed in the order of (1) to (3).
‧實施例12 ‧Example 12
準備如下記載之附載體銅箔作為實施例12之基材。首先,準備厚度18μm之JX日鑛日石金屬股份有限公司製造之JTC箔的電解銅箔作為載體。接著以下述條件,於載體之光澤面側的表面形成中間層、於中間層之表面形成極薄銅層。 As the base material of Example 12, a copper foil with a carrier as described below was prepared. First, an electrolytic copper foil of JTC foil manufactured by JX Nippon Nissei Metal Co., Ltd. with a thickness of 18 μm was prepared as a carrier. Next, an intermediate layer is formed on the surface on the glossy surface side of the carrier, and an extremely thin copper layer is formed on the surface of the intermediate layer under the following conditions.
<中間層> <Middle layer>
(1)Ni層(Ni鍍敷) (1) Ni layer (Ni plating)
藉由輥對輥型之連續鍍敷線,利用以下條件對載體進行電鍍而形成附著量1000μg/dm2之Ni層。具體之鍍敷條件如下所記:硫酸鎳:270~280g/L The carrier was electroplated by a roll-to-roll continuous plating line under the following conditions to form a Ni layer with an adhesion amount of 1000 μg / dm 2 . The specific plating conditions are as follows: Nickel sulfate: 270 ~ 280g / L
氯化鎳:35~45g/L Nickel chloride: 35 ~ 45g / L
乙酸鎳:10~20g/L Nickel acetate: 10 ~ 20g / L
硼酸:30~40g/L Boric acid: 30 ~ 40g / L
光澤劑:糖精、丁炔二醇 Gloss agent: saccharin, butynediol
十二烷硫酸鈉:55~75ppm Sodium Lauryl Sulfate: 55 ~ 75ppm
pH:4~6 pH: 4 ~ 6
浴溫:55~65℃ Bath temperature: 55 ~ 65 ℃
電流密度:10A/dm2 Current density: 10A / dm 2
(2)Cr層(電解鉻酸鹽處理) (2) Cr layer (electrolytic chromate treatment)
接著,對在(1)形成之Ni層表面進行水洗及酸洗後,接著於輥對輥型之連續鍍敷線上,利用以下條件進行電解鉻酸鹽處理,藉此使附著量為11μg/dm2之Cr層附著於Ni層上。 Next, the surface of the Ni layer formed in (1) was washed with water and pickled, and then subjected to electrolytic chromate treatment on a roll-to-roll continuous plating line under the following conditions, so that the adhesion amount was 11 μg / dm. The Cr layer of 2 is attached to the Ni layer.
重鉻酸鉀:1~10g/L Potassium dichromate: 1 ~ 10g / L
pH值:7~10 pH value: 7 ~ 10
液溫:40~60℃ Liquid temperature: 40 ~ 60 ℃
電流密度:2A/dm2 Current density: 2A / dm 2
<極薄銅層> <Ultra-thin copper layer>
接著,對在(2)形成之Cr層表面進行水洗及酸洗後,接著於輥對輥型之連續鍍敷線上,利用以下條件進行電鍍處理,藉此於Cr層上形成厚度為5μm之極薄銅層而製作附載體極薄銅箔。 Next, the surface of the Cr layer formed in (2) was washed with water and pickled, and then plated on a roll-to-roll continuous plating line under the following conditions to form a 5 μm-thick electrode on the Cr layer. A thin copper layer was used to produce a very thin copper foil with a carrier.
銅濃度:90~110g/L Copper concentration: 90 ~ 110g / L
硫酸濃度:90~110g/L Sulfuric acid concentration: 90 ~ 110g / L
氯化物離子濃度:50~90ppm Chloride ion concentration: 50 ~ 90ppm
調平劑1(雙(3-磺丙基)二硫化物):10~30ppm Leveling agent 1 (bis (3-sulfopropyl) disulfide): 10 ~ 30ppm
調平劑2(胺化合物):10~30ppm Leveling agent 2 (amine compound): 10 ~ 30ppm
再者,使用下述胺化合物作為調平劑2。 The following amine compound was used as the leveling agent 2.
(上述化學式中,R1及R2為選自由羥烷基、醚基、芳基、經芳香族取代之烷基、不飽和烴基、烷基組成之群中者。) (In the above chemical formula, R 1 and R 2 are selected from the group consisting of a hydroxyalkyl group, an ether group, an aryl group, an aromatic-substituted alkyl group, an unsaturated hydrocarbon group, and an alkyl group.)
電解液溫度:50~80℃ Electrolyte temperature: 50 ~ 80 ℃
電流密度:100A/dm2 Current density: 100A / dm 2
電解液線速度:1.5~5m/sec Linear speed of electrolyte: 1.5 ~ 5m / sec
‧表面之Sz、Sa、Sku;利用Olympus公司製作之雷射顯微鏡OLS4000(LEXT OLS 4000),依據ISO25178測得銅放熱材表面之Sz、Sa、Sku。使用雷射顯微鏡之50倍物鏡來進行面積約200μm×200μm(具體而言為40106μm2)之測定,而算出Sz、Sa、Sku。再者,在雷射顯微鏡測定中,測定結果之測定面並非平面、而是為曲面的情形時,於進行平面校正後算出Sz、Sa、Sku。再者,利用雷射顯微鏡測得Sz、Sa、Sku之測定環境溫度為23~25℃。 ‧Sz, Sa, Sku on the surface; Using a laser microscope OLS4000 (LEXT OLS 4000) made by Olympus, the Sz, Sa, and Sku on the surface of the copper heat sink was measured according to ISO25178. Using a 50x objective lens of a laser microscope, an area of about 200 μm × 200 μm (specifically, 40 106 μm 2 ) was measured to calculate Sz, Sa, and Sku. In addition, in the case of laser microscope measurement, when the measurement surface of the measurement result is not a flat surface but a curved surface, Sz, Sa, and Sku are calculated after plane correction. Furthermore, the measurement ambient temperature of Sz, Sa, and Sku measured with a laser microscope was 23 to 25 ° C.
‧表面積比A/B; 利用Olympus公司製作之雷射顯微鏡OLS4000(LEXT OLS 4000),依據ISO25178測得銅放熱材表面之表面積,用其算出表面積比A/B。使用雷射顯微鏡之50倍物鏡來進行面積約200μm×200μm(具體而言為40106μm2)之測定。再者,利用雷射顯微鏡測得三維表面積A之測定環境溫度為23~25℃。 ‧Surface area ratio A / B; Using a laser microscope OLS4000 (LEXT OLS 4000) made by Olympus, the surface area of the copper heat-radiating material surface was measured according to ISO25178, and the surface area ratio A / B was calculated using it. The measurement was performed using a 50-fold objective lens of a laser microscope with an area of about 200 μm × 200 μm (specifically, 40 106 μm 2 ). In addition, the measured ambient temperature of the three-dimensional surface area A measured by a laser microscope was 23 to 25 ° C.
‧色差;使用HunterLab公司製造之色差計MiniScan XE Plus,依據JISZ8730測得下述情形之色差:將銅放熱材表面之白色板(將光源設為D65,於設為10度視野時,該白色板之X10Y10Z10表色系統(JIS Z8701 1999)之三刺激值為X10=80.7、Y10=85.6、Z10=91.5,且於L*a*b*表色系統中之該白色板之物體色為L*=94.14、a*=-0.90、b*=0.24)之物體色設為基準色的情形。再者,於上述色差計中,將白色板之色差的測定值設為△E*ab=0、將以黑色袋(light trap)覆蓋測定孔而進行測定時之色差的測定值設為△E*ab=94.14,來校正色差。此處色差△E*ab定義為上述白色板為零、黑色為94.14。再者,銅電路表面等微小區域之基於JIS Z8730測得之色差△E*ab,可使用例如日本電色工業股份有限公司製造之微小面分光色差計(型號:VSS400等)或Suga Test Instruments股份有限公司製造之微小面分光測色計(型號:SC-50μ等)等公知之測定裝置來進行測定。 ‧Color aberration: The color aberration measured by HunterLab Co., Ltd. MiniScan XE Plus according to JISZ8730 is as follows: the white plate on the surface of the copper exothermic material (the light source is set to D65, and when the field of view is set to 10 degrees, the white plate The three stimulus values of the X 10 Y 10 Z 10 color system (JIS Z8701 1999) are X 10 = 80.7, Y 10 = 85.6, Z 10 = 91.5, and the white color in the L * a * b * color system The case where the object color of the board is L * = 94.14, a * =-0.90, b * = 0.24) is set as the reference color. Furthermore, in the above-mentioned color difference meter, the measurement value of the color difference of the white plate is set to ΔE * ab = 0, and the measurement value of the color difference when the measurement hole is covered with a black trap (light trap) for measurement is set to ΔE. * ab = 94.14 to correct chromatic aberration. Here, the color difference ΔE * ab is defined as zero for the white plate and 94.14 for black. In addition, the color difference ΔE * ab measured in accordance with JIS Z8730 for minute areas such as copper circuit surfaces can be a micro-surface spectrophotometer (model: VSS400, etc.) manufactured by Nippon Denshoku Industries Co., Ltd. or Suga Test Instruments Co., Ltd., a micro-surface spectrophotometer (model: SC-50μ, etc.) and other known measuring devices.
‧落粉;關於落粉,係於表面上貼附透明之修補膠帶(mending tape),將該膠帶剝離時,因附著在膠帶黏著面之脫落粒子而膠帶變色,藉此從變色之情形評價落粉。 ‧Falling powder: As for the falling powder, a transparent mending tape is affixed to the surface. When the tape is peeled off, the tape changes color due to the falling particles attached to the adhesive surface of the tape. powder.
膠帶沒有變色的情形為◎、膠帶變為灰色的情形為○、膠帶變為黑色的情形為×。 A case where the tape did not change color was ◎, a case where the tape changed to gray was ○, and a case where the tape changed to black was ×.
‧輻射率;利用傅立葉轉換紅外線分光法(FT-IR:Fourier Transform Infrared Spectroscopy),以下述條件測得銅放熱材表面之反射率光譜,算出輻射率。 ‧ Emissivity; FT-IR: Fourier Transform Infrared Spectroscopy (FT-IR) was used to measure the reflectance spectrum on the surface of the copper exothermic material under the following conditions to calculate the emissivity.
(1)放熱性的評價 (1) Evaluation of heat release
如圖1所示,於長d2×寬w2×厚h2=50mm×100mm×0.2mm之基板(Mg合金壓鑄)表面之中央設置長d1×寬w1×厚h1=5mm×5mm×1mm之發熱體(以樹脂固定有電熱線之發熱體,相當於IC晶片)。繼而,於與基板之發熱體相反之側的表面設置接著劑層(長d3×寬w3×厚h3=50mm×100mm×0.03mm),進而從與形成有合金層之面相反之側的面,積層本實施例、比較例之銅放熱材(長d4×寬w4×厚h4=50mm×100mm×表中所記載之銅基材之厚度)。然後,於「發熱體之中央部」和「銅放熱材之與接著劑層積層之面之相反側之面的與發熱體之中央部相對應之位置」,設置熱電偶。於圖1表示該試樣之上表面示意圖。於圖2表示該試樣之剖面示意圖。 As shown in Figure 1, a heating element with a length of d1 × w1 × thickness h1 = 5mm × 5mm × 1mm is set in the center of the surface of the substrate (Mg alloy die casting) with a length of d2 × width w2 × thickness h2 = 50mm × 100mm × 0.2mm (The heating element with the heating wire fixed by resin is equivalent to an IC chip). Then, an adhesive layer (length d3 × width w3 × thickness h3 = 50mm × 100mm × 0.03mm) is provided on the surface opposite to the heating element of the substrate, and from the surface on the opposite side to the surface on which the alloy layer is formed, The copper heat-radiating material of this example and comparative example (length d4 × width w4 × thickness h4 = 50mm × 100mm × thickness of the copper base material described in the table) was laminated. Then, a thermocouple was installed on the "central portion of the heating element" and "the position corresponding to the central portion of the heating element on the surface of the copper heat-radiating material opposite to the surface of the adhesive layer". A schematic diagram of the upper surface of the sample is shown in FIG. 1. A schematic cross-sectional view of the sample is shown in FIG. 2.
繼而,將電流以發熱量成為0.5W之方式流入發熱體。然後,以發熱體之上表面之中央部之溫度成為一定值的方式流入電流。此處,發熱體之上表面之中央部之溫度在10分鐘內沒有變化時,判斷為上表面之中央部之溫度為一定值。再者,將外部環境溫度設為20℃。然後,自發熱體之上表面之中央部之溫度成為一定值而維持30分鐘後,測得設置於上述銅放熱材之熱電偶之顯示溫度。接下來,熱電偶之顯示溫度較低者判定為良好。再者,銅放熱材與接著劑層積層之面之相反側之面的與發熱體之中央部相對應之 位置,係銅放熱板中溫度最高的位置。 Then, an electric current was caused to flow into the heating element so that the heat generation amount became 0.5 W. Then, an electric current flows so that the temperature of the center part of the upper surface of the heating element becomes a constant value. Here, when the temperature of the central portion of the upper surface of the heating element does not change within 10 minutes, it is determined that the temperature of the central portion of the upper surface is a constant value. The external ambient temperature was set to 20 ° C. Then, after the temperature at the central portion of the upper surface of the heating element became constant and maintained for 30 minutes, the display temperature of the thermocouple provided on the copper heat-emitting material was measured. Next, the lower display temperature of the thermocouple was judged to be good. Furthermore, the surface of the copper heat-radiating material opposite to the surface of the adhesive layer is corresponding to the central portion of the heating element. The position is the highest temperature position in the copper heat sink.
(2)反射率測定 (2) Measurement of reflectance
以下述條件測定各個上述試樣之光之波長。測定係於試樣之測定面內將測定方向轉90度而進行2次。 The wavelength of light of each of the above samples was measured under the following conditions. The measurement was performed twice by rotating the measurement direction in the measurement plane of the sample by 90 degrees.
測定裝置:IFS-66v(Bruker公司製造之FT-IR、真空光學系統) Measuring device: IFS-66v (FT-IR manufactured by Bruker, vacuum optical system)
光源:熾棒(SiC) Light source: Incandescent rod (SiC)
檢測器:MCT(HgCdTe) Detector: MCT (HgCdTe)
分光鏡(beamsplitter):Ge/KBr Beamsplitter: Ge / KBr
測定條件:解像力=4cm-1 Measurement conditions: resolution = 4cm -1
累積次數:512次 Cumulative times: 512 times
零填充(zero filling)=2倍 Zero filling = 2 times
變跡法=三角形 Apodization method = triangle
測定區域=5000~715cm-1(光之波長:2~14μm) Measurement area = 5000 ~ 715cm -1 (wavelength of light: 2 ~ 14μm)
測定溫度=25℃ Measurement temperature = 25 ℃
附加裝置:穿透率、反射率測定用積分球 Additional device: Integrating sphere for measuring transmittance and reflectance
口(port)直徑= 10mm Port diameter = 10mm
重複精度=約±1% Repeat accuracy = about ± 1%
反射率測定 Reflectance measurement
入射角:10度 Angle of incidence: 10 degrees
參考試樣:diffuse gold(Infragold-LF Assembly) Reference sample: diffuse gold (Infragold-LF Assembly)
不安裝鏡像杯(Specular cup)(去除正反射成分裝置) No specular cup (removal of specular reflection device)
(3)關於輻射率 (3) About emissivity
入射至試樣面之光除了反射、穿過的光以外,於內部被吸收。關於吸收率(α)(=輻射率(ε))、反射率(r)、穿透率(t),下述式成立。 The light incident on the sample surface is absorbed internally, in addition to the reflected and transmitted light. Regarding the absorptivity (α) (= emissivity (ε)), reflectance (r), and transmittance (t), the following formulas are established.
ε+r+t=1(A) ε + r + t = 1 (A)
輻射率(ε)可如下式一般,由反射率、穿透率來求得。 The emissivity (ε) can be calculated from the reflectance and transmittance by the following general formula.
ε=1-r-t(B) ε = 1-r-t (B)
試樣為不透明、且較厚可無視穿透等之情形時,t=0而輻射率僅由反射率求出。 When the sample is opaque and thick enough to ignore penetration, etc., t = 0 and the emissivity can only be determined from the reflectance.
ε=1-r(C) ε = 1-r (C)
本試樣中由於紅外線未穿透,因此適用(C)式,算出各個光之波長的輻射率。 Since infrared rays are not transmitted in this sample, the formula (C) is applied to calculate the emissivity of each light wavelength.
(4)FT-IR光譜 (4) FT-IR spectrum
將進行2次測定之結果的平均值設為反射率光譜。再者,反射率光譜係利用diffuse gold之反射率進行補正。(顯示波長區域:2~14μm) The average of the results of the two measurements was taken as the reflectance spectrum. The reflectance spectrum is corrected by the reflectance of diffuse gold. (Display wavelength range: 2 ~ 14μm)
此處,若根據利用卜朗克之式求得之溫度中黑色物體之放射能量分布,將各波長λ中能量強度設為Eb λ、於各波長λ之試樣之輻射率設為ε λ,則試樣放射能量強度Es λ表示為Es λ=ε λ‧Eb λ。本實施例中,利用該式:Es λ=ε λ‧Eb λ求出所得到之25℃中之各試樣的放射能量強度Es λ。 Here, if the radiation energy distribution of a black object at a temperature obtained by using the formula of Blank is set, the energy intensity at each wavelength λ is set to E b λ , and the emissivity of the sample at each wavelength λ is set to ε λ, Then the sample radiation energy intensity E s λ is expressed as E s λ = ε λ‧E b λ . In this embodiment, the formula: E s λ = ε λ · E b λ is used to obtain the radiation energy intensity E s λ of each sample at 25 ° C.
又,某些波長區域中黑色物體及試樣之總能量,係利用該波長範圍中之Es λ,Eb λ之積分值來求出,且總輻射率ε係以該比來表示(下述式A)。本實施例中使用該式算出25℃中之波長區域2~14μm下之各試樣的總輻射率ε。然後將所得到之總輻射率ε設為各試樣之輻射率。 In addition, the total energy of black objects and samples in certain wavelength regions is obtained by using the integral value of E s λ and E b λ in the wavelength range, and the total emissivity ε is expressed by the ratio (below Said formula A). In this embodiment, this formula is used to calculate the total emissivity ε of each sample in a wavelength region of 2 to 14 μm at 25 ° C. The total emissivity ε obtained is then set as the emissivity of each sample.
上述各試驗之條件及試驗結果示於表1~4。 The conditions and test results of the above tests are shown in Tables 1 to 4.
(評價結果) (Evaluation results)
實施例1~18放熱性均良好。 Examples 1 to 18 had good exothermic properties.
比較例1~3、5~8均未形成合金層,而表面之面粗糙度Sz落在5μm以上之範圍外,與實施例相比放熱性不良。 In Comparative Examples 1 to 3 and 5 to 8, none of the alloy layers were formed, and the surface roughness Sz of the surface was outside the range of 5 μm or more, and the exothermic properties were poor compared with the examples.
比較例4使用不銹鋼基材,且與實施例相比放熱性不良。 Comparative Example 4 uses a stainless steel substrate, and has a lower exothermic property than the examples.
又,對上述實施例,於銅基材之兩面進行相同之合金層形成處理,則分別可以得到相同之特性。 In addition, in the above-mentioned embodiment, the same characteristics can be obtained by performing the same alloy layer forming treatment on both surfaces of the copper substrate.
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- 2015-10-22 CN CN201510691464.6A patent/CN105555012B/en active Active
- 2015-10-22 TW TW104134612A patent/TWI670381B/en active
- 2015-10-22 KR KR1020150147236A patent/KR102475944B1/en active Active
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Also Published As
| Publication number | Publication date |
|---|---|
| TW201631165A (en) | 2016-09-01 |
| US20170291397A1 (en) | 2017-10-12 |
| JP2016084528A (en) | 2016-05-19 |
| CN105555012B (en) | 2020-03-03 |
| US10464291B2 (en) | 2019-11-05 |
| MY169155A (en) | 2019-02-18 |
| CN105555012A (en) | 2016-05-04 |
| JP6867102B2 (en) | 2021-04-28 |
| US20160120017A1 (en) | 2016-04-28 |
| KR20160047412A (en) | 2016-05-02 |
| US9724896B2 (en) | 2017-08-08 |
| KR102475944B1 (en) | 2022-12-08 |
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