TWI666235B - Ink repellent, negative photosensitive resin composition, partition wall and optical element - Google Patents
Ink repellent, negative photosensitive resin composition, partition wall and optical element Download PDFInfo
- Publication number
- TWI666235B TWI666235B TW104118343A TW104118343A TWI666235B TW I666235 B TWI666235 B TW I666235B TW 104118343 A TW104118343 A TW 104118343A TW 104118343 A TW104118343 A TW 104118343A TW I666235 B TWI666235 B TW I666235B
- Authority
- TW
- Taiwan
- Prior art keywords
- group
- ink
- partition wall
- polymer
- photosensitive resin
- Prior art date
Links
- 238000005192 partition Methods 0.000 title claims abstract description 162
- 239000011342 resin composition Substances 0.000 title claims abstract description 116
- 239000005871 repellent Substances 0.000 title claims abstract description 112
- 230000002940 repellent Effects 0.000 title claims abstract description 94
- 230000003287 optical effect Effects 0.000 title claims abstract description 41
- 229920000642 polymer Polymers 0.000 claims abstract description 170
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 claims abstract description 80
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 67
- 125000001153 fluoro group Chemical group F* 0.000 claims abstract description 59
- 239000000758 substrate Substances 0.000 claims abstract description 47
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 26
- 238000010438 heat treatment Methods 0.000 claims abstract description 24
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000011737 fluorine Substances 0.000 claims abstract description 11
- 239000012948 isocyanate Substances 0.000 claims abstract description 6
- 150000002513 isocyanates Chemical group 0.000 claims abstract description 5
- -1 alkyl malonate Chemical compound 0.000 claims description 110
- 239000000203 mixture Substances 0.000 claims description 75
- 238000000034 method Methods 0.000 claims description 59
- 239000000178 monomer Substances 0.000 claims description 48
- 229910000077 silane Inorganic materials 0.000 claims description 47
- 229920005989 resin Polymers 0.000 claims description 44
- 239000011347 resin Substances 0.000 claims description 44
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 31
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 28
- 125000003709 fluoroalkyl group Chemical group 0.000 claims description 26
- 239000003086 colorant Substances 0.000 claims description 24
- 230000002378 acidificating effect Effects 0.000 claims description 22
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 17
- 125000000524 functional group Chemical group 0.000 claims description 14
- 239000003999 initiator Substances 0.000 claims description 13
- 150000002923 oximes Chemical class 0.000 claims description 12
- 150000004756 silanes Chemical class 0.000 claims description 12
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims description 10
- 239000001257 hydrogen Substances 0.000 claims description 10
- 229910052739 hydrogen Inorganic materials 0.000 claims description 10
- 150000003217 pyrazoles Chemical class 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- 125000003396 thiol group Chemical group [H]S* 0.000 claims description 9
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052801 chlorine Inorganic materials 0.000 claims description 6
- 125000001309 chloro group Chemical group Cl* 0.000 claims description 6
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 claims description 6
- WTKZEGDFNFYCGP-UHFFFAOYSA-N Pyrazole Chemical compound C=1C=NNC=1 WTKZEGDFNFYCGP-UHFFFAOYSA-N 0.000 claims description 4
- 150000003951 lactams Chemical class 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 238000006460 hydrolysis reaction Methods 0.000 claims description 3
- 125000002560 nitrile group Chemical group 0.000 claims description 3
- 125000004433 nitrogen atom Chemical group N* 0.000 claims description 3
- XKJCHHZQLQNZHY-UHFFFAOYSA-N phthalimide Chemical compound C1=CC=C2C(=O)NC(=O)C2=C1 XKJCHHZQLQNZHY-UHFFFAOYSA-N 0.000 claims description 3
- 230000007062 hydrolysis Effects 0.000 claims description 2
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 2
- ZOZNCAMOIPYYIK-UHFFFAOYSA-N 1-aminoethylideneazanium;acetate Chemical compound CC(N)=N.CC(O)=O ZOZNCAMOIPYYIK-UHFFFAOYSA-N 0.000 claims 1
- 150000002148 esters Chemical class 0.000 claims 1
- WBHQBSYUUJJSRZ-UHFFFAOYSA-M sodium bisulfate Chemical compound [Na+].OS([O-])(=O)=O WBHQBSYUUJJSRZ-UHFFFAOYSA-M 0.000 claims 1
- 229910000342 sodium bisulfate Inorganic materials 0.000 claims 1
- 238000003860 storage Methods 0.000 abstract description 22
- 239000000976 ink Substances 0.000 description 186
- 150000001875 compounds Chemical class 0.000 description 145
- 239000010408 film Substances 0.000 description 69
- 125000004432 carbon atom Chemical group C* 0.000 description 53
- 239000010410 layer Substances 0.000 description 43
- 239000000243 solution Substances 0.000 description 28
- 239000002904 solvent Substances 0.000 description 25
- 238000004519 manufacturing process Methods 0.000 description 22
- 239000011248 coating agent Substances 0.000 description 21
- 238000000576 coating method Methods 0.000 description 21
- 238000006243 chemical reaction Methods 0.000 description 20
- 239000002585 base Substances 0.000 description 19
- 150000002430 hydrocarbons Chemical group 0.000 description 18
- 125000000217 alkyl group Chemical group 0.000 description 15
- 238000011161 development Methods 0.000 description 14
- 239000002994 raw material Substances 0.000 description 13
- 239000002253 acid Substances 0.000 description 12
- 229910052799 carbon Inorganic materials 0.000 description 12
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 11
- 238000001035 drying Methods 0.000 description 11
- 239000011521 glass Substances 0.000 description 11
- 125000005010 perfluoroalkyl group Chemical group 0.000 description 11
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 10
- 238000005401 electroluminescence Methods 0.000 description 10
- 239000003513 alkali Substances 0.000 description 9
- 239000003431 cross linking reagent Substances 0.000 description 9
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 9
- 125000006551 perfluoro alkylene group Chemical group 0.000 description 9
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 8
- 239000002270 dispersing agent Substances 0.000 description 8
- 239000004973 liquid crystal related substance Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 125000000962 organic group Chemical group 0.000 description 8
- 239000012860 organic pigment Substances 0.000 description 8
- 238000006116 polymerization reaction Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 239000007787 solid Substances 0.000 description 8
- 238000003786 synthesis reaction Methods 0.000 description 8
- 125000002947 alkylene group Chemical group 0.000 description 7
- 150000001721 carbon Chemical group 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 238000002156 mixing Methods 0.000 description 7
- 239000000049 pigment Substances 0.000 description 7
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 6
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- 238000011156 evaluation Methods 0.000 description 6
- 238000002347 injection Methods 0.000 description 6
- 239000007924 injection Substances 0.000 description 6
- 238000013508 migration Methods 0.000 description 6
- 230000005012 migration Effects 0.000 description 6
- 150000003254 radicals Chemical class 0.000 description 6
- 230000009257 reactivity Effects 0.000 description 6
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 5
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 5
- 150000001298 alcohols Chemical class 0.000 description 5
- 125000004429 atom Chemical group 0.000 description 5
- 125000005843 halogen group Chemical group 0.000 description 5
- 150000002460 imidazoles Chemical class 0.000 description 5
- 239000004615 ingredient Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 5
- 239000012044 organic layer Substances 0.000 description 5
- 125000005372 silanol group Chemical group 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 229920002554 vinyl polymer Polymers 0.000 description 5
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 4
- 239000005977 Ethylene Substances 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 4
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 4
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 4
- 238000005227 gel permeation chromatography Methods 0.000 description 4
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 4
- 150000002466 imines Chemical class 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- FDPIMTJIUBPUKL-UHFFFAOYSA-N pentan-3-one Chemical compound CCC(=O)CC FDPIMTJIUBPUKL-UHFFFAOYSA-N 0.000 description 4
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- 230000000379 polymerizing effect Effects 0.000 description 4
- 239000002096 quantum dot Substances 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- 125000000542 sulfonic acid group Chemical group 0.000 description 4
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 4
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- WYGWHHGCAGTUCH-ISLYRVAYSA-N V-65 Substances CC(C)CC(C)(C#N)\N=N\C(C)(C#N)CC(C)C WYGWHHGCAGTUCH-ISLYRVAYSA-N 0.000 description 3
- UKLDJPRMSDWDSL-UHFFFAOYSA-L [dibutyl(dodecanoyloxy)stannyl] dodecanoate Chemical compound CCCCCCCCCCCC(=O)O[Sn](CCCC)(CCCC)OC(=O)CCCCCCCCCCC UKLDJPRMSDWDSL-UHFFFAOYSA-L 0.000 description 3
- 150000008065 acid anhydrides Chemical class 0.000 description 3
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 3
- 150000001412 amines Chemical class 0.000 description 3
- 125000003277 amino group Chemical group 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 125000003118 aryl group Chemical group 0.000 description 3
- 150000008366 benzophenones Chemical class 0.000 description 3
- 239000006229 carbon black Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 229910003437 indium oxide Inorganic materials 0.000 description 3
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 238000002715 modification method Methods 0.000 description 3
- 125000005702 oxyalkylene group Chemical group 0.000 description 3
- 239000003505 polymerization initiator Substances 0.000 description 3
- TXHZNLCKXHJYNX-UHFFFAOYSA-N 2-[2-[2-[2-[2-[2-[2-[2-(2-methoxyethoxy)ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethyl 2-methylprop-2-enoate Chemical compound COCCOCCOCCOCCOCCOCCOCCOCCOCCOC(=O)C(C)=C TXHZNLCKXHJYNX-UHFFFAOYSA-N 0.000 description 2
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 2
- WFDIJRYMOXRFFG-UHFFFAOYSA-N Acetic anhydride Chemical compound CC(=O)OC(C)=O WFDIJRYMOXRFFG-UHFFFAOYSA-N 0.000 description 2
- WDJHALXBUFZDSR-UHFFFAOYSA-N Acetoacetic acid Natural products CC(=O)CC(O)=O WDJHALXBUFZDSR-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- DWAQJAXMDSEUJJ-UHFFFAOYSA-M Sodium bisulfite Chemical compound [Na+].OS([O-])=O DWAQJAXMDSEUJJ-UHFFFAOYSA-M 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 125000003545 alkoxy group Chemical group 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 150000005415 aminobenzoic acids Chemical class 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000002981 blocking agent Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 239000001055 blue pigment Substances 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000006482 condensation reaction Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229930003836 cresol Natural products 0.000 description 2
- 125000001664 diethylamino group Chemical group [H]C([H])([H])C([H])([H])N(*)C([H])([H])C([H])([H])[H] 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 230000005525 hole transport Effects 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 150000002576 ketones Chemical class 0.000 description 2
- 125000002816 methylsulfanyl group Chemical group [H]C([H])([H])S[*] 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 150000002989 phenols Chemical class 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- 125000005543 phthalimide group Chemical class 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 239000011164 primary particle Substances 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 125000003226 pyrazolyl group Chemical group 0.000 description 2
- 238000001226 reprecipitation Methods 0.000 description 2
- 229930182490 saponin Natural products 0.000 description 2
- 150000007949 saponins Chemical class 0.000 description 2
- 235000017709 saponins Nutrition 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 235000010267 sodium hydrogen sulphite Nutrition 0.000 description 2
- 230000007480 spreading Effects 0.000 description 2
- 238000003892 spreading Methods 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- FZENGILVLUJGJX-NSCUHMNNSA-N (E)-acetaldehyde oxime Chemical compound C\C=N\O FZENGILVLUJGJX-NSCUHMNNSA-N 0.000 description 1
- QYGBYAQGBVHMDD-XQRVVYSFSA-N (z)-2-cyano-3-thiophen-2-ylprop-2-enoic acid Chemical compound OC(=O)C(\C#N)=C/C1=CC=CS1 QYGBYAQGBVHMDD-XQRVVYSFSA-N 0.000 description 1
- KMOUUZVZFBCRAM-UHFFFAOYSA-N 1,2,3,6-tetrahydrophthalic anhydride Chemical compound C1C=CCC2C(=O)OC(=O)C21 KMOUUZVZFBCRAM-UHFFFAOYSA-N 0.000 description 1
- PDCBZHHORLHNCZ-UHFFFAOYSA-N 1,4-bis(trifluoromethyl)benzene Chemical compound FC(F)(F)C1=CC=C(C(F)(F)F)C=C1 PDCBZHHORLHNCZ-UHFFFAOYSA-N 0.000 description 1
- HNSSKFWZYMGHDO-UHFFFAOYSA-N 1-(2-isocyanatoethoxy)prop-1-ene Chemical compound C(=CC)OCCN=C=O HNSSKFWZYMGHDO-UHFFFAOYSA-N 0.000 description 1
- DAOINPOJJNUZIT-UHFFFAOYSA-N 1-phenylethanone;1-phenylpropan-1-one Chemical compound CC(=O)C1=CC=CC=C1.CCC(=O)C1=CC=CC=C1 DAOINPOJJNUZIT-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- FWLHAQYOFMQTHQ-UHFFFAOYSA-N 2-N-[8-[[8-(4-aminoanilino)-10-phenylphenazin-10-ium-2-yl]amino]-10-phenylphenazin-10-ium-2-yl]-8-N,10-diphenylphenazin-10-ium-2,8-diamine hydroxy-oxido-dioxochromium Chemical compound O[Cr]([O-])(=O)=O.O[Cr]([O-])(=O)=O.O[Cr]([O-])(=O)=O.Nc1ccc(Nc2ccc3nc4ccc(Nc5ccc6nc7ccc(Nc8ccc9nc%10ccc(Nc%11ccccc%11)cc%10[n+](-c%10ccccc%10)c9c8)cc7[n+](-c7ccccc7)c6c5)cc4[n+](-c4ccccc4)c3c2)cc1 FWLHAQYOFMQTHQ-UHFFFAOYSA-N 0.000 description 1
- WYGWHHGCAGTUCH-UHFFFAOYSA-N 2-[(2-cyano-4-methylpentan-2-yl)diazenyl]-2,4-dimethylpentanenitrile Chemical compound CC(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)C WYGWHHGCAGTUCH-UHFFFAOYSA-N 0.000 description 1
- WMYINDVYGQKYMI-UHFFFAOYSA-N 2-[2,2-bis(hydroxymethyl)butoxymethyl]-2-ethylpropane-1,3-diol Chemical compound CCC(CO)(CO)COCC(CC)(CO)CO WMYINDVYGQKYMI-UHFFFAOYSA-N 0.000 description 1
- AMQCWFKKFGSNNA-UHFFFAOYSA-N 2-butylcyclohexa-2,5-diene-1,4-dione Chemical group CCCCC1=CC(=O)C=CC1=O AMQCWFKKFGSNNA-UHFFFAOYSA-N 0.000 description 1
- LWRBVKNFOYUCNP-UHFFFAOYSA-N 2-methyl-1-(4-methylsulfanylphenyl)-2-morpholin-4-ylpropan-1-one Chemical compound C1=CC(SC)=CC=C1C(=O)C(C)(C)N1CCOCC1 LWRBVKNFOYUCNP-UHFFFAOYSA-N 0.000 description 1
- MWDGNKGKLOBESZ-UHFFFAOYSA-N 2-oxooctanal Chemical compound CCCCCCC(=O)C=O MWDGNKGKLOBESZ-UHFFFAOYSA-N 0.000 description 1
- SDXAWLJRERMRKF-UHFFFAOYSA-N 3,5-dimethyl-1h-pyrazole Chemical compound CC=1C=C(C)NN=1 SDXAWLJRERMRKF-UHFFFAOYSA-N 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical group [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 238000004438 BET method Methods 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- RMIBZFBFFWUNLP-UHFFFAOYSA-N CC=COCC(CC1=C(C(=CC=C1)C(=O)O)C(=O)O)(COC=CC)COC=CC Chemical compound CC=COCC(CC1=C(C(=CC=C1)C(=O)O)C(=O)O)(COC=CC)COC=CC RMIBZFBFFWUNLP-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 1
- AVXURJPOCDRRFD-UHFFFAOYSA-N Hydroxylamine Chemical compound ON AVXURJPOCDRRFD-UHFFFAOYSA-N 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 238000005481 NMR spectroscopy Methods 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910004283 SiO 4 Inorganic materials 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910002808 Si–O–Si Inorganic materials 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- TUVYSBJZBYRDHP-UHFFFAOYSA-N acetic acid;methoxymethane Chemical compound COC.CC(O)=O TUVYSBJZBYRDHP-UHFFFAOYSA-N 0.000 description 1
- 150000008062 acetophenones Chemical class 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 150000008064 anhydrides Chemical class 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 description 1
- 125000002029 aromatic hydrocarbon group Chemical group 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 125000002843 carboxylic acid group Chemical group 0.000 description 1
- HGAZMNJKRQFZKS-UHFFFAOYSA-N chloroethene;ethenyl acetate Chemical compound ClC=C.CC(=O)OC=C HGAZMNJKRQFZKS-UHFFFAOYSA-N 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- 125000000753 cycloalkyl group Chemical group 0.000 description 1
- 239000013530 defoamer Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000012975 dibutyltin dilaurate Substances 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 239000003480 eluent Substances 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 239000001056 green pigment Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 230000003301 hydrolyzing effect Effects 0.000 description 1
- 125000002883 imidazolyl group Chemical group 0.000 description 1
- 239000001023 inorganic pigment Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229940079865 intestinal antiinfectives imidazole derivative Drugs 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000004843 novolac epoxy resin Substances 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 1
- 125000002467 phosphate group Chemical group [H]OP(=O)(O[H])O[*] 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000001057 purple pigment Substances 0.000 description 1
- 150000004053 quinones Chemical class 0.000 description 1
- 239000001054 red pigment Substances 0.000 description 1
- 239000012925 reference material Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 125000000467 secondary amino group Chemical class [H]N([*:1])[*:2] 0.000 description 1
- 239000011163 secondary particle Substances 0.000 description 1
- 230000001235 sensitizing effect Effects 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 125000003808 silyl group Chemical group [H][Si]([H])([H])[*] 0.000 description 1
- 229940079827 sodium hydrogen sulfite Drugs 0.000 description 1
- 239000010421 standard material Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 150000003512 tertiary amines Chemical group 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- YUYCVXFAYWRXLS-UHFFFAOYSA-N trimethoxysilane Chemical compound CO[SiH](OC)OC YUYCVXFAYWRXLS-UHFFFAOYSA-N 0.000 description 1
- 229920006305 unsaturated polyester Polymers 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 239000001052 yellow pigment Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/22—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of auxiliary dielectric or reflective layers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Materials For Photolithography (AREA)
- Electroluminescent Light Sources (AREA)
- Silicon Polymers (AREA)
- Optical Filters (AREA)
Abstract
提供一種撥墨劑,含有該撥墨劑之感光性樹脂組成物的貯藏穩定性相當充分,同時該撥墨劑能製作可形成上表面具有良好撥墨性之隔壁及親墨性良好之開口部的感光性樹脂組成物;並且,提供一種含有該撥墨劑之負型感光性樹脂組成物、一種上表面具有良好撥墨性之隔壁;以及提供一種光學元件,其具有點,該點係於該隔壁所劃分之開口部均勻塗佈印墨而精確形成者。 Provided is an ink repellent, and the photosensitive resin composition containing the ink repellent has sufficient storage stability. At the same time, the ink repellent can form a partition wall with good ink repellency on the upper surface and openings with good ink affinity. And a negative photosensitive resin composition containing the ink repellent, a partition wall having a good ink repellency on the upper surface, and an optical element having a point, the point being The openings divided by the partition wall are uniformly coated with printing ink and accurately formed.
一種撥墨劑,係將撥墨性賦予隔壁之上表面者,該隔壁係形成為將基板表面劃分成多數個點形成用分區之形狀;前述撥墨劑係由具有含氟原子單元及含封端異氰酸酯基單元且氟原子含有率為1~40質量%之聚合物所構成,該含封端異氰酸酯基單元可藉由加熱去封端而生成異氰酸酯基。 An ink-repellent agent is one that imparts ink-repellency to the upper surface of a partition wall, and the partition wall is formed into a shape that divides the substrate surface into a plurality of dot-forming partitions; the ink-repellent agent comprises a fluorine-containing atomic unit and A polymer composed of an isocyanate group-terminated unit and a fluorine atom content of 1 to 40% by mass. The blocked isocyanate group-containing unit can be blocked by heating to generate an isocyanate group.
Description
本發明係有關於撥墨劑、負型感光性樹脂組成物、隔壁及光學元件。 The present invention relates to an ink repellent, a negative photosensitive resin composition, a partition wall, and an optical element.
在有機EL(Electro-Luminescence)元件等光學元件之製造中,有時使用以將發光層等有機層作成點之方式藉由噴墨(IJ)法進行圖案印刷的方法。此方法係沿著欲形成之點輪廓設置隔壁,並於該隔壁圍起之分區(以下亦稱「開口部」)內注入含有有機層材料之印墨,再藉由使其乾燥或進行加熱等而形成期望圖案之點。 In the production of optical elements such as organic EL (Electro-Luminescence) elements, a method of pattern printing by an inkjet (IJ) method in which an organic layer such as a light-emitting layer is formed as a dot is sometimes used. In this method, a partition wall is set along the outline of the point to be formed, and a printing ink containing an organic layer material is injected into a partition surrounded by the partition wall (hereinafter also referred to as an "opening part"), and then dried or heated, etc. The point where the desired pattern is formed.
在上述方法中,為了防止相鄰之點之間的印墨混合及均勻塗佈點形成印墨,隔壁上表面需具有撥墨性,同時包含隔壁側面在內之隔壁圍起的點形成用開口部需具有親墨性。 In the above method, in order to prevent mixing of ink between adjacent dots and uniformly apply dots to form ink, the upper surface of the partition wall must have ink repellency, and at the same time, the opening for dot formation surrounded by the partition wall including the side surface of the partition wall. Department must be ink-friendly.
爰此,為了獲得上表面具有撥墨性之隔壁,周知有一種方法係使用含有撥墨劑之感光性樹脂組成物,藉由光刻法形成與點圖案相對應之隔壁。例如,在專利文獻1或專利文獻2中揭示了一種含有聚矽氧系撥墨劑之負型感光 性樹脂組成物,該聚矽氧系撥墨劑係由含氟水解性矽烷化合物之水解縮合物構成。 Therefore, in order to obtain a partition wall having ink repellency on the upper surface, a method is known in which a partition wall corresponding to a dot pattern is formed by a photolithography method using a photosensitive resin composition containing an ink repellent agent. For example, Patent Document 1 or Patent Document 2 discloses a negative-type photosensitive resin containing a polysiloxane ink repellent. A silicone resin ink repellent is composed of a hydrolyzed condensate of a fluorine-containing hydrolyzable silane compound.
使用含有此種撥墨劑之負型感光性樹脂組成物來形成隔壁時,係使該組成物之塗膜中相當於隔壁的部分曝光後,利用顯影去除相當於開口部之組成物。此時,很難從開口部完全去除負型感光性樹脂組成物,通常會有些許的殘渣殘留於開口部。問題就在於因為該負型感光性樹脂組成物的殘渣殘留造成開口部之親墨性降低而阻礙印墨的均勻塗佈。 When a partition wall is formed using a negative photosensitive resin composition containing such an ink repellent, the portion corresponding to the partition wall in the coating film of the composition is exposed, and then the composition corresponding to the opening portion is removed by development. At this time, it is difficult to completely remove the negative photosensitive resin composition from the opening portion, and a slight amount of residue usually remains in the opening portion. The problem is that the residue of the negative photosensitive resin composition causes the ink affinity of the openings to decrease, which hinders uniform coating of the printing ink.
專利文獻1:國際公開第2010/013816號 Patent Document 1: International Publication No. 2010/013816
專利文獻2:國際公開第2014/046209號 Patent Document 2: International Publication No. 2014/046209
關於上述開口部之負型感光性樹脂組成物的殘渣,經本發明人等驗證後得知,相較於殘渣量的問題,所使用之負型感光性樹脂組成物的種類、更詳而言之為負型感光性樹脂組成物所含之撥墨劑種類,比較會造成開口部之親墨性程度有所不同。 Regarding the residue of the negative photosensitive resin composition in the openings, after verification by the present inventors, it is known that compared to the problem of the amount of residue, the type of negative photosensitive resin composition used, and more specifically The type of the ink repellent contained in the negative photosensitive resin composition may cause a difference in the degree of ink affinity of the opening.
爰此,若從使上述開口部之親墨性良好的觀點來選擇摻混至負型感光性樹脂組成物之撥墨劑,問題就變成含有該撥墨劑之負型感光性樹脂組成物的貯藏穩定性不夠 充分。又,正型感光性樹脂組成物亦存有同樣的問題。 Therefore, if an ink repellent blended into a negative photosensitive resin composition is selected from the viewpoint of improving the ink affinity of the openings, the problem becomes that of the negative photosensitive resin composition containing the ink repellent. Insufficient storage stability full. Moreover, the same problem exists in a positive photosensitive resin composition.
本發明目的在於提供一種撥墨劑,含有撥墨劑之感光性樹脂組成物的貯藏穩定性夠充分,同時該撥墨劑能製作可形成上表面具有良好撥墨性之隔壁及親墨性良好之開口部的感光性樹脂組成物。 The purpose of the present invention is to provide an ink repellent which has sufficient storage stability of the photosensitive resin composition containing the ink repellent, and at the same time, the ink repellent can form a partition wall with good ink repellency on the upper surface and good ink affinity. The photosensitive resin composition of the opening.
本發明目的在於提供一種貯藏穩定性良好、並可形成上表面之撥墨性良好之隔壁及親墨性良好之開口部的負型感光性樹脂組成物。 An object of the present invention is to provide a negative photosensitive resin composition having good storage stability and capable of forming partition walls with good ink repellency on the upper surface and openings with good ink affinity.
本發明目的在於提供一種上表面具有良好撥墨性之隔壁。 An object of the present invention is to provide a partition wall having a good ink repellency on the upper surface.
又,本發明目的在於提供一種光學元件,其具有點,該點係於該隔壁所劃分之開口部均勻塗佈印墨而精確形成者。 Another object of the present invention is to provide an optical element having dots, which are formed by accurately coating ink uniformly on the opening portion divided by the partition wall.
本發明提供一種具有以下構成之撥墨劑、負型感光性樹脂組成物、隔壁及光學元件。 The present invention provides an ink repellent having the following constitution, a negative photosensitive resin composition, a partition wall, and an optical element.
[1]一種撥墨劑,係將撥墨性賦予隔壁之上表面者,該隔壁係形成為將基板表面劃分成多數個點形成用分區之形狀;前述撥墨劑係由具有含氟原子單元及含封端異氰酸酯基單元且氟原子含有率為1~40質量%之聚合物所構成,該含封端異氰酸酯基單元可藉由加熱去封端而生成異氰酸酯基。 [1] An ink-repellent agent, which imparts ink-repellency to the upper surface of a partition wall, and the partition wall is formed into a shape that divides the substrate surface into a plurality of dot-forming partitions; the ink-repellent agent includes a fluorine-containing atomic unit And a polymer containing a blocked isocyanate group unit and a fluorine atom content of 1 to 40% by mass. The blocked isocyanate group-containing unit can be deblocked by heating to generate an isocyanate group.
[2]如[1]之撥墨劑,其中前述封端異氰酸酯基去封端而 成為異氰酸酯基之10小時半衰期溫度為60~180℃。 [2] The ink repellent according to [1], in which the aforementioned blocked isocyanate group is unblocked and The 10-hour half-life temperature to become an isocyanate group is 60 to 180 ° C.
[3]如[1]或[2]之撥墨劑,其中前述封端異氰酸酯基係以下述式(1)表示:-NHC(=O)-B…(1) [3] The ink repellent according to [1] or [2], wherein the blocked isocyanate group is represented by the following formula (1): -NHC (= O) -B ... (1)
(式(1)中,B係下述者:將1元醇類、酚類、內醯胺類、肟類、乙醯乙酸烷基酯類、丙二酸烷基酯類、鄰苯二甲醯亞胺類、咪唑類或吡唑類所具活性氫予以去除1個後所得之基;氯原子或腈基;或者,將亞硫酸氫鈉去氫後所得之基)。 (In formula (1), B is the following: a monohydric alcohol, a phenol, a lactam, an oxime, an acetoacetic acid alkyl ester, a malonic acid alkyl ester, or phthalic acid基 A radical obtained by removing one of the active hydrogens of imines, imidazoles, or pyrazoles; a chlorine atom or a nitrile group; or a radical obtained by dehydrogenating sodium bisulfite).
[4]如[3]之撥墨劑,其中B係下述者:將肟類去除羥基中之氫原子後所得之基;或者,將鍵結於構成吡唑類之環之氮原子的活性氫予以去除後所得之基。 [4] The ink repellent according to [3], wherein B is the following: a group obtained by removing an oxime from a hydrogen atom in a hydroxyl group; or an activity of bonding to a nitrogen atom constituting a ring of pyrazoles The radical obtained after the removal of hydrogen.
[5]如[1]~[4]中任一項之撥墨劑,其中前述聚合物係一以烴鏈為主鏈且質量平均分子量在5×103~1×105範圍內之聚合物,且前述含氟原子單元為一具有下述基之單元:可含有醚性氧原子之氟伸烷基及/或可含有醚性氧原子之氟烷基。 [5] The ink repellent according to any one of [1] to [4], wherein the aforementioned polymer is a polymerization having a hydrocarbon chain as a main chain and a mass average molecular weight within a range of 5 × 10 3 to 1 × 10 5 The fluorine atom-containing unit is a unit having the following group: a fluoroalkyl group which may contain an etheric oxygen atom and / or a fluoroalkyl group which may contain an etheric oxygen atom.
[6]如[5]之撥墨劑,其中前述聚合物更具有選自於由下述單元所構成群組中之至少1種單元:具有酸性基之單元、具有乙烯性雙鍵之單元、具有羥基之單元及具有聚氧伸烷基鏈之單元。 [6] The ink repellent according to [5], wherein the polymer further has at least one unit selected from the group consisting of a unit having an acidic group, a unit having an ethylenic double bond, A unit having a hydroxyl group and a unit having a polyoxyalkylene chain.
[7]如[1]~[4]中任一項之撥墨劑,其中前述聚合物為水解性矽烷化合物之部分水解縮合物,前述含氟原子單元為下述基與矽原子鍵結而成之矽氧烷單元:具有可含有醚性氧原子之氟伸烷基及/或可含有醚性氧原子之氟烷基之基。 [7] The ink repellent according to any one of [1] to [4], wherein the polymer is a partially hydrolyzed condensate of a hydrolyzable silane compound, and the fluorine-containing atomic unit is a bond between the following group and a silicon atom, and The resulting siloxane unit: a group having a fluoroalkylene group which may contain an etheric oxygen atom and / or a fluoroalkyl group which may contain an etheric oxygen atom.
[8]如[7]之撥墨劑,其中前述部分水解縮合物為水解性矽烷化合物混合物之部分水解縮合物,該水解性矽烷化合物混合物包含具有含氟原子基團之水解性矽烷化合物及具有封端異氰酸酯基之水解性矽烷化合物,並且,該水解性矽烷化合物混合物任意含有選自於由下述水解性矽烷化合物所構成群組中之至少1種水解性矽烷化合物:矽原子鍵結有4個水解性基的水解性矽烷化合物、具有具乙烯性雙鍵之基且不含氟原子的水解性矽烷化合物、僅具有與矽原子鍵結之烴基的水解性矽烷化合物及具有巰基且不含氟原子的水解性矽烷化合物。 [8] The ink repellent according to [7], wherein the partially hydrolyzed condensate is a partially hydrolyzed condensate of a hydrolyzable silane compound mixture, and the hydrolyzable silane compound mixture includes a hydrolyzable silane compound having a fluorine atom-containing group and An isocyanate-blocked hydrolyzable silane compound, and the hydrolyzable silane compound mixture optionally contains at least one kind of hydrolyzable silane compound selected from the group consisting of the following hydrolyzable silane compounds: a silicon atom bond has 4 Hydrolyzable silane compound having a hydrolyzable group, a hydrolyzable silane compound having a vinyl double bond group and not containing a fluorine atom, a hydrolyzable silane compound having only a hydrocarbon group bonded to a silicon atom, and a mercapto group and containing no fluorine Atomically hydrolyzable silane compound.
[9]如[1]~[8]中任一項之撥墨劑,其中前述基板至少在可形成前述隔壁的表面具有與異氰酸酯基具反應性之官能基。 [9] The ink repellent according to any one of [1] to [8], wherein the substrate has a functional group reactive with an isocyanate group on at least a surface on which the partition wall can be formed.
[10]一種負型感光性樹脂組成物,其特徵在於含有:具有光硬化性之鹼可溶性樹脂或具有光硬化性之鹼可溶性單體;光聚合引發劑;及如[1]~[8]中任一項之撥墨劑。 [10] A negative photosensitive resin composition, comprising: a photo-curable alkali-soluble resin or a photo-curable alkali-soluble monomer; a photopolymerization initiator; and [1] to [8] Ink repellent agent of any one.
[11]如[10]之負型感光性樹脂組成物,其更含有黑色著色劑。 [11] The negative photosensitive resin composition according to [10], which further contains a black colorant.
[12]一種隔壁,係形成為將基板表面劃分成多數個點形成用分區之形狀者,且該隔壁係由如[10]或[11]之負型感光性樹脂組成物之硬化物所構成。 [12] A partition wall formed into a shape that divides the surface of a substrate into a plurality of dot-forming partitions, and the partition wall is formed of a hardened body of a negative photosensitive resin composition such as [10] or [11] .
[13]如[12]之隔壁,其中前述隔壁係形成在基板上,且該基板具有與異氰酸酯基具反應性之官能基。 [13] The partition wall according to [12], wherein the partition wall is formed on a substrate, and the substrate has a functional group reactive with an isocyanate group.
[14]一種光學元件,係在基板表面上具有多數個點及位 在相鄰之點之間的隔壁,其特徵在於:前述隔壁係以如[12]或[13]之隔壁來形成。 [14] An optical element having a plurality of points and positions on a substrate surface The partition wall between adjacent points is characterized in that the aforementioned partition wall is formed by a partition wall such as [12] or [13].
[15]如[14]之光學元件,其中前述點係以噴墨法形成。 [15] The optical element according to [14], wherein the aforementioned dots are formed by an inkjet method.
依據本發明可提供一種撥墨劑,含有該撥墨劑之感光性樹脂組成物的貯藏穩定性充分,同時該撥墨劑能製作可形成上表面具有良好撥墨性之隔壁及親墨性良好之開口部的感光性樹脂組成物。 According to the present invention, an ink repellent can be provided. The photosensitive resin composition containing the ink repellent has sufficient storage stability. At the same time, the ink repellent can form a partition wall with good ink repellency on the upper surface and good ink affinity. The photosensitive resin composition of the opening.
本發明之負型感光性樹脂組成物的貯藏穩定性良好,用其可形成上表面之撥墨性良好之隔壁及親墨性良好之開口部。 The negative photosensitive resin composition of the present invention has good storage stability, and can be used to form a partition wall with good ink repellency on the upper surface and an opening portion with good ink affinity.
本發明之隔壁於上表面具有良好的撥墨性。 The partition wall of the present invention has good ink repellency on the upper surface.
本發明之光學元件係具有點之光學元件,該點係於隔壁所劃分之開口部均勻塗佈印墨而精確形成者。 The optical element of the present invention is an optical element having dots, and the dots are precisely formed by uniformly coating printing ink on the opening portion divided by the partition wall.
1‧‧‧基板 1‧‧‧ substrate
4‧‧‧隔壁 4‧‧‧ next door
4A‧‧‧撥墨層 4A‧‧‧Ink layer
4B‧‧‧層 4B‧‧‧Floor
5‧‧‧開口部 5‧‧‧ opening
9‧‧‧噴墨頭 9‧‧‧ inkjet head
10‧‧‧印墨 10‧‧‧Ink
11‧‧‧點 11 o'clock
12‧‧‧光學元件 12‧‧‧ Optical Elements
21‧‧‧塗膜 21‧‧‧coating film
22‧‧‧乾燥膜 22‧‧‧ dry film
23‧‧‧曝光膜 23‧‧‧ exposure film
23A‧‧‧曝光部 23A‧‧‧Exposure Department
23B‧‧‧非曝光部 23B‧‧‧Unexposed
30‧‧‧光罩 30‧‧‧Mask
31‧‧‧遮罩部 31‧‧‧Mask
圖1A係示意顯示本發明實施形態之隔壁之製造方法的步驟圖。 FIG. 1A is a step diagram schematically showing a method for manufacturing a partition wall according to an embodiment of the present invention.
圖1B係示意顯示本發明實施形態之隔壁之製造方法的步驟圖。 FIG. 1B is a step diagram schematically showing a method for manufacturing a partition wall according to an embodiment of the present invention.
圖1C係示意顯示本發明實施形態之隔壁之製造方法的步驟圖。 FIG. 1C is a step diagram schematically showing a method for manufacturing a partition wall according to an embodiment of the present invention.
圖1D係示意顯示本發明實施形態之隔壁之製造方法的步驟圖。 FIG. 1D is a step diagram schematically showing a method for manufacturing a partition wall according to an embodiment of the present invention.
圖2A係示意顯示本發明實施形態之光學元件之製造方 法的步驟圖。 FIG. 2A is a schematic diagram showing a manufacturing method of an optical element according to an embodiment of the present invention; Process steps diagram.
圖2B係示意顯示本發明實施形態之光學元件之製造方法的步驟圖。 FIG. 2B is a step diagram schematically showing a method for manufacturing an optical element according to an embodiment of the present invention.
在本說明書中,「(甲基)丙烯醯基」為「甲基丙烯醯基」與「丙烯醯基」之總稱。(甲基)丙烯醯氧基、(甲基)丙烯酸、(甲基)丙烯酸酯、(甲基)丙烯醯胺及(甲基)丙烯酸樹脂皆據此解釋。 In this specification, "(meth) acrylfluorenyl" is a general term for "methacrylfluorenyl" and "acrylfluorenyl". (Meth) acrylic acid, (meth) acrylic acid, (meth) acrylic acid ester, (meth) acrylamide, and (meth) acrylic resin are all explained based on this.
在本說明書中,式(x)所示之基會僅記載為基(x)。 In this specification, the base represented by the formula (x) will be described only as the base (x).
在本說明書中,式(y)所示之化合物會僅記載為化合物(y)。 In the present specification, the compound represented by the formula (y) will be described only as the compound (y).
在此,式(x)、式(y)係表示任意式。 Here, the expressions (x) and (y) represent arbitrary expressions.
本說明書中之「側鏈」係表示在由碳原子所構成之重複單元構成主鏈的聚合物中,與構成主鏈之碳原子鍵結的氫原子及鹵素原子以外之基。含氟原子單元等之「單元」表示聚合單元。 The "side chain" in this specification means a group other than a hydrogen atom and a halogen atom bonded to a carbon atom constituting a main chain in a polymer constituting a main chain composed of repeating units composed of carbon atoms. "Unit" such as a fluorine atom-containing unit means a polymerization unit.
在本說明書中,在未特別說明之前提下,數量平均分子量(Mn)及質量平均分子量(Mw)係藉由凝膠滲透層析法以聚苯乙烯作為標準物質所測得。 In this specification, unless otherwise specified, the number average molecular weight (Mn) and the mass average molecular weight (Mw) are measured by gel permeation chromatography using polystyrene as a standard substance.
本說明書中之「感光性樹脂組成物之總固體成分」係表示感光性樹脂組成物所含成分中形成後述硬化膜的成分,可從在140℃下將感光性樹脂組成物加熱24小時 再去除溶劑後之殘留物來求算。而,總固體成分量亦可從饋入量計算。 The "total solid content of the photosensitive resin composition" in this specification refers to a component that forms a later-described cured film among the components contained in the photosensitive resin composition, and the photosensitive resin composition can be heated at 140 ° C for 24 hours. The residue after removal of the solvent was calculated. The total solid content can also be calculated from the feed amount.
在本說明書中,以樹脂為主成分之組成物的硬化物所構成之膜稱為「樹脂硬化膜」。 In the present specification, a film made of a cured product of a composition containing a resin as a main component is referred to as a "resin cured film".
在本說明書中,塗佈感光性樹脂組成物而成之膜稱為「塗膜」,使其乾燥而成之膜稱為「乾燥膜」。使該「乾燥膜」硬化而製得之膜為「樹脂硬化膜」。又,在本說明書中,「樹脂硬化膜」亦僅稱為「硬化膜」。 In this specification, a film obtained by applying a photosensitive resin composition is referred to as a "coating film", and a film obtained by drying is referred to as a "dry film". A film obtained by curing the "dry film" is a "resin cured film". In this specification, the "resin cured film" is also simply referred to as a "cured film".
「隔壁」係形成為將預定區域劃分成多數個分區之形狀的樹脂硬化膜之一形態。於隔壁所劃分之分區、即隔壁圍起之開口部例如可注入下述「印墨」而形成「點」。 The "partition wall" is a form of a resin hardened film having a predetermined area divided into a plurality of partitions. The partitions divided by the next wall, that is, the openings surrounded by the next wall, can be filled with, for example, the following “printing ink” to form “dot”.
本說明書中之「印墨」係總稱在進行乾燥、硬化等後具有光學及/或電性功能之液體的用語。 The term "printing ink" in this specification is a generic term for a liquid that has optical and / or electrical functions after drying, hardening, and the like.
在有機EL元件、液晶元件之彩色濾光片及TFT(Thin Film Transistor)陣列等光學元件中,會就各種構成要素之點使用該點形成用印墨藉由噴墨(IJ)法進行圖案印刷。本說明書中之「印墨」包含可使用於該用途之印墨。 In optical elements such as an organic EL element, a color filter for a liquid crystal element, and a TFT (Thin Film Transistor) array, dots for various constituent elements are pattern-printed by an inkjet (IJ) method using the dot-forming ink. "Ink" in this manual includes inks that can be used for this purpose.
本說明書中之「撥墨性」為防上述印墨沾染之性質,具有撥水性及撥油性兩者。撥墨性例如可藉由滴下印墨時的接觸角來評估。「親墨性」係與撥墨性相反之性質,與撥墨性同樣可藉由滴下印墨時的接觸角來評估。或者,可藉由以預定基準評估滴下印墨時印墨之濕潤擴散程度(印墨之濕潤擴散性)來評估親墨性。 The "ink repellency" in this manual is the property of preventing the above-mentioned ink contamination, and has both water repellency and oil repellency. The ink repellency can be evaluated, for example, by the contact angle when the ink is dropped. "Ink affinity" is the opposite of the ink repellency, and can be evaluated by the contact angle when the ink is dripped as well as the ink repellency. Alternatively, the ink affinity can be evaluated by evaluating the wet spreading degree (moist spreading property of the printing ink) of the printing ink when the printing ink is dropped on a predetermined basis.
本說明書中之「點」係表示光學元件之可光調變 的最小區域。在有機EL元件、液晶元件之彩色濾光片及TFT陣列等光學元件中,若是黑白顯示,1點=1像素,若是彩色顯示,則例如為3點(R(紅)、G(綠)、B(藍)等)=1像素。 "Dots" in this manual refer to the optical modulation of optical components The smallest area. In optical elements such as organic EL elements, liquid crystal elements, color filters, and TFT arrays, if the display is black and white, 1 point = 1 pixel, and if the color display, for example, 3 points (R (red), G (green), B (blue), etc.) = 1 pixel.
以下將說明本發明實施形態。另外,在本說明書中未特別說明之前提下,符號%表示質量%。 Embodiments of the present invention will be described below. In addition, unless otherwise specified in this specification, the symbol% means mass%.
[撥墨劑] [Ink Repellent]
本發明之撥墨劑係將撥墨性賦予隔壁之上表面的撥墨劑,且該隔壁係形成為將基板表面劃分成多數個點形成用分區之形狀;該撥墨劑係由具有含氟原子單元及含封端異氰酸酯基單元且氟原子含有率為1~40質量%之聚合物所構成,該含封端異氰酸酯基單元藉由可加熱去封端而生成異氰酸酯基。 The ink-repellent agent of the present invention is an ink-repellent agent that imparts ink-repellency to the upper surface of the partition wall, and the partition wall is formed into a shape that divides the surface of the substrate into a plurality of dot-forming partitions; It is composed of an atomic unit and a polymer containing a blocked isocyanate group unit and a fluorine atom content rate of 1 to 40% by mass. The blocked isocyanate group-containing unit can be deblocked by heating to generate an isocyanate group.
而,在本說明書中,本發明之撥墨劑亦稱為撥墨劑(C)。又,可作為撥墨劑(C)使用且具有上述特性之聚合物稱為聚合物(C)。 In this specification, the ink repellent of the present invention is also referred to as an ink repellent (C). A polymer which can be used as the ink repellent (C) and has the above characteristics is referred to as a polymer (C).
可適用撥墨劑(C)之隔壁並無特別限定。撥墨劑(C)理想是以下述形態作使用:使含於感光性樹脂組成物中並將該組成物塗佈於基板後,撥墨劑(C)會於以後述方式形成隔壁的過程中移行到組成物層之上表面,然後於包含所得隔壁之上表面的上層部形成一撥墨劑(C)緻密分布之層(以下亦會稱「撥墨層」),藉此將撥墨性賦予隔壁之上表面。上述感光性樹脂組成物可為正型亦可為負型。 The partition wall to which the ink repellent agent (C) can be applied is not particularly limited. The ink-repellent agent (C) is preferably used in the following form: After the ink-repellent agent (C) is contained in a photosensitive resin composition and the composition is coated on a substrate, the ink-repellent agent (C) forms a partition wall in a manner described later. Transfer to the upper surface of the composition layer, and then form a densely distributed layer of ink repellent (C) (hereinafter also referred to as the "ink repellent layer") on the upper layer portion containing the upper surface of the obtained partition wall, thereby changing the ink repellency Give to the upper surface of the next wall. The photosensitive resin composition may be a positive type or a negative type.
聚合物(C)因含有比例為1~40質量%的氟原子 而具有會移行到組成物層之上表面的性質(上表面移行性)及撥墨性,於是可賦予所得隔壁之上表面良好的撥墨性。聚合物(C)中之氟原子含有率以5~35質量%為佳,10~30質量%尤佳。聚合物(C)之氟原子含有率若在上述範圍之下限值以上,便可賦予隔壁之上表面良好的撥墨性;若在上限值以下,與感光性樹脂組成物中之其他成分的相溶性即佳。 Polymer (C) contains 1 to 40% by mass of fluorine atoms In addition, it has the property of migrating to the upper surface of the composition layer (upper surface migration) and ink repellency, so it can impart good ink repellency to the upper surface of the obtained partition wall. The fluorine atom content rate in the polymer (C) is preferably 5 to 35% by mass, and particularly preferably 10 to 30% by mass. If the fluorine atom content rate of the polymer (C) is above the lower limit of the above range, good ink repellency can be imparted to the upper surface of the partition wall; if it is below the upper limit, it can interact with other components in the photosensitive resin composition. The compatibility is better.
又,聚合物(C)具有可利用加熱去封端而生成異氰酸酯基的封端異氰酸酯基(以下亦僅稱「封端異氰酸酯基」),而可在低於發生上述去封端之溫度下抑制反應性,由此來看,在作為撥墨劑或含於感光性樹脂組成物中作貯藏時可提升貯藏穩定性。此外,使用時藉由加熱使其去封端而成為異氰酸酯基,可提升聚合物(C)之反應性,並可提升與其他成分或其他材料之結合性及密著性。藉此,可在隔壁圍起之開口部抑制感光性樹脂組成物之殘渣阻礙印墨的濕潤擴散性,提高親墨性。 In addition, the polymer (C) has a blocked isocyanate group (hereinafter also simply referred to as a "blocked isocyanate group") capable of generating an isocyanate group by being deblocked by heating, and can be suppressed below the temperature at which the above-mentioned deblocking occurs. From the viewpoint of reactivity, storage stability can be improved when it is stored as an ink repellent or contained in a photosensitive resin composition. In addition, it can be deblocked by heating to become an isocyanate group during use, which can improve the reactivity of the polymer (C), and can improve the binding and adhesion with other ingredients or other materials. Thereby, the openings surrounding the partition wall can suppress the residue of the photosensitive resin composition from hindering the wet diffusion of the printing ink and improving the ink affinity.
由此觀點來看,以使用含有撥墨劑(C)之感光性樹脂組成物於基板表面形成隔壁時的基板來說,在至少形成隔壁之表面宜具有與異氰酸酯基具反應性之官能基,例如羥基、胺基、羧基、巰基等。即,例如當撥墨劑(C)係含於感光性樹脂組成物中作使用時,在用於至少形成隔壁之表面具有與異氰酸酯基具反應性之官能基的基板時尤其可發揮效果。這是因為,吾等認為藉由形成隔壁之基板表面具有與異氰酸酯基具反應性之官能基,可在開口部提升 基板表面與撥墨劑(C)之密著性,即使開口部具有感光性樹脂組成物之殘渣,還是可以確保開口部之親墨性。 From this point of view, in the case of forming a partition wall on a substrate surface using a photosensitive resin composition containing an ink repellent (C), it is preferable that at least the surface on which the partition wall is formed have a functional group reactive with an isocyanate group. Examples include hydroxy, amine, carboxy, and mercapto. That is, for example, when the ink repellent (C) is contained in the photosensitive resin composition and used, it is particularly effective when used for a substrate having at least a partition wall surface having a functional group reactive with an isocyanate group. This is because we believe that the surface of the substrate forming the partition wall has a functional group that is reactive with the isocyanate group and can be lifted at the opening. The adhesion between the substrate surface and the ink repellent (C) can ensure the ink affinity of the openings even if the openings have residues of a photosensitive resin composition.
具體而言,可藉由加熱去封端而生成異氰酸酯基的封端異氰酸酯基係已使異氰酸酯基與含活性氫之化合物(封端劑)發生反應而在常溫下呈惰化的官能基,具有一旦加熱封端劑即解離而再生成異氰酸酯基的性質。 Specifically, the blocked isocyanate group which can generate an isocyanate group by heating and deblocking is a functional group which has reacted the isocyanate group with an active hydrogen-containing compound (blocking agent) and became inert at normal temperature. Once heated, the blocking agent dissociates and regenerates into isocyanate groups.
另外,該封端異氰酸酯基去封端而成為異氰酸酯基之10小時半衰期溫度以60~180℃為佳,80~150℃較佳。該封端異氰酸酯基之10小時半衰期溫度只要在上述範圍,親墨性即佳。 In addition, the 10-hour half-life temperature of the blocked isocyanate group to be blocked to become an isocyanate group is preferably 60 to 180 ° C, and more preferably 80 to 150 ° C. As long as the 10-hour half-life temperature of the blocked isocyanate group is within the above range, the ink affinity is good.
就此種封端異氰酸酯基來說,具體上可舉如下述式(1)所示之基。 Specific examples of such a blocked isocyanate group include a group represented by the following formula (1).
-NHC(=O)-B…(1) -NHC (= O) -B ... (1)
(式(1)中,B係下述者:將1元醇類、酚類、內醯胺類、肟類、乙醯乙酸烷基酯類、丙二酸烷基酯類、鄰苯二甲醯亞胺類、咪唑類或是吡唑類所具活性氫予以去除1個後所得之基;氯原子或腈基;或者,將亞硫酸氫鈉去氫後所得之基)。 (In formula (1), B is the following: a monohydric alcohol, a phenol, a lactam, an oxime, an acetoacetic acid alkyl ester, a malonic acid alkyl ester, or phthalic acid A group obtained by removing one of active hydrogens of imines, imidazoles or pyrazoles; a chlorine atom or a nitrile group; or a group obtained by dehydrogenating sodium hydrogen sulfite).
上述中,1元醇類、酚類、肟類其等所具羥基之氫為活性氫。乙醯乙酸烷基酯類、丙二酸烷基酯類為具有亞甲基活性氫之化合物。內醯胺類、鄰苯二甲醯亞胺類、咪唑類、吡唑類則為具有胺基活性氫之化合物。 Among the above, monohydric alcohols, phenols, oximes, and the like have hydrogen having a hydroxyl group as active hydrogen. Acetyl acetate and alkyl malonate are compounds having methylene active hydrogen. Lactams, phthalimines, imidazoles, and pyrazoles are compounds with amine active hydrogen.
就1元醇類而言,可舉如碳數1~10之直鏈狀或支鏈狀1元醇,以甲醇、乙醇等為佳。就酚類而言,可舉 如鍵結於芳香環之氫有1個被取代成羥基之碳數6~15之苯酚化合物,以苯酚、甲酚等為佳。 As for the monohydric alcohols, linear or branched monohydric alcohols having a carbon number of 1 to 10 may be mentioned, and methanol and ethanol are preferred. As far as phenols are concerned, For example, a hydrogen bonded to an aromatic ring has a phenol compound having 6 to 15 carbon atoms which is substituted with a hydroxyl group. Phenol, cresol and the like are preferred.
就內醯胺類而言,可舉如員數3~6之內醯胺。就肟類而言,可舉如具有>C=N-OH基之碳數1~6之醛肟或碳數3~9之酮圬,以Rk1Rk2C=N-OH(Rk1及Rk2分別獨立表示碳數1~4之烷基)所示碳數3~7之酮圬為佳。 As for the lactamamine, for example, the number of members of 3 to 6 can be listed. As for the oxime, for example, an aldoxime having a carbon number of 1 to 6 or a ketone having a carbon number of 3 to 9 having> C = N-OH group, R k1 R k2 C = N-OH (R k1 and R k2 each independently represents an alkyl group having 1 to 4 carbon atoms) A ketone fluorene having 3 to 7 carbon atoms is preferred.
乙醯乙酸烷基酯類及丙二酸烷基酯類的烷基部分宜分別為碳數1~4之直鏈狀或支鏈狀之烷基。 The alkyl portions of the alkyl acetoacetates and the alkyl malonates are preferably linear or branched alkyl groups having 1 to 4 carbon atoms, respectively.
就鄰苯二甲醯亞胺類而言,可舉如鄰苯二甲醯亞胺及與鄰苯二甲醯亞胺環之碳原子鍵結之氫原子已被碳數1~6之直鏈狀或支鏈狀烷基取代的鄰苯二甲醯亞胺衍生物等。就咪唑類而言,可舉如咪唑及與咪唑環之碳原子鍵結之氫原子已被碳數1~6之直鏈狀或支鏈狀烷基取代的咪唑衍生物等。就吡唑類而言,可舉如吡唑及與吡唑環之碳原子鍵結之氫原子已被碳數1~6之直鏈狀或支鏈狀烷基取代的吡唑衍生物等。 As far as phthalimides are concerned, for example, phthalimide and a hydrogen atom bonded to a carbon atom of the phthalimide ring have been linear with a carbon number of 1 to 6. Or branched alkyl substituted phthalimide derivatives and the like. Examples of imidazoles include imidazole and imidazole derivatives in which a hydrogen atom bonded to a carbon atom of an imidazole ring has been substituted with a linear or branched alkyl group having 1 to 6 carbon atoms. Examples of the pyrazoles include pyrazole and pyrazole derivatives in which a hydrogen atom bonded to a carbon atom of a pyrazole ring has been substituted with a linear or branched alkyl group having 1 to 6 carbon atoms.
該等中又以肟類、吡唑類為佳,且以吡唑類尤佳。肟類的話,-B為將肟類去除羥基中之氫原子後所得之基;吡唑類的話,-B為將鍵結於構成吡唑類之環之氮原子的氫原子予以去除後所得之基。尤其理想的-B則可舉如下述式(b1)所示基及下述式(b2)所示基等。 Among these, oximes and pyrazoles are preferred, and pyrazoles are particularly preferred. In the case of oximes, -B is a group obtained by removing the hydrogen atom in the hydroxyl group of the oxime; in the case of pyrazoles, -B is obtained by removing the hydrogen atom bonded to the nitrogen atom constituting the ring of the pyrazole group. base. Particularly preferable examples of -B include a group represented by the following formula (b1) and a group represented by the following formula (b2).
[化1]
在此,例如在基(1)中,有關-B為基(b1)之-NHC(=O)-(b1)及-B為基(b2)之-NHC(=O)-(b2)的10小時半衰期溫度各自為110℃及140℃。 Here, in the group (1), for example, -B is -NHC (= O)-(b1) of the group (b1) and -B is -NHC (= O)-(b2) of the group (b2). The 10-hour half-life temperatures were 110 ° C and 140 ° C, respectively.
聚合物(C)分別含有上述氟原子作為含氟原子單元及含有封端異氰酸酯基作為含封端異氰酸酯基單元。在聚合物(C)中,含氟原子單元及含封端異氰酸酯基單元可為相同單元,即可於相同單元中具有氟原子及封端異氰酸酯基,不過,通常含氟原子單元及含封端異氰酸酯基單元為不同單元。 The polymer (C) contains the above-mentioned fluorine atom as a fluorine atom-containing unit and a blocked isocyanate group as a blocked isocyanate group-containing unit, respectively. In the polymer (C), the fluorine atom-containing unit and the blocked isocyanate group-containing unit may be the same unit, that is, the fluorine unit and the blocked isocyanate group may be contained in the same unit. However, the fluorine atom-containing unit and the blocked Isocyanate-based units are different units.
所述聚合物(C)例如可列舉:由水解性矽烷化合物混合物之部分水解縮合物所構成的聚合物(以下稱為聚合物(C1)),該水解性矽烷化合物混合物包含具有含氟原子基團之水解性矽烷化合物及含封端異氰酸酯基之水解性矽烷化合物;及主鏈為烴鏈且具有下述單元之聚合物(以下稱為聚合物(C2))等:具有含氟原子之側鏈之單元及具有封端異氰酸酯基之單元。 Examples of the polymer (C) include a polymer (hereinafter referred to as a polymer (C1)) composed of a partially hydrolyzed condensate of a hydrolyzable silane compound mixture containing a fluorine atom-containing group Hydrolyzable silane compounds and hydrolyzable silane compounds containing blocked isocyanate groups; and polymers having a hydrocarbon chain in the main chain and having the following units (hereinafter referred to as polymer (C2)), etc .: a side having a fluorine atom A unit of a chain and a unit having a blocked isocyanate group.
此外,聚合物(C)中之封端異氰酸酯基含量不論聚合物(C1)及聚合物(C2)均以0.2mmol/g~4mmol/g為佳,且0.3mmolol/g~4mmol/g較佳。 In addition, the content of the blocked isocyanate group in the polymer (C) is preferably 0.2 mmol / g to 4 mmol / g regardless of the polymer (C1) and the polymer (C2), and 0.3 mmolol / g to 4 mmol / g is more preferable. .
<聚合物(C1)> <Polymer (C1)>
聚合物(C1)為水解性矽烷化合物混合物(以下亦稱「混合物(M)」)之部分水解縮合物。該混合物(M)含有具含氟原子基團之水解性矽烷化合物(以下亦稱「化合物(s1)」)及具封端異氰酸酯基之水解性矽烷化合物(以下亦稱「化合物(s2)」)作為必須成分,並且任意含有化合物(s1)、(s2)以外的水解性矽烷化合物,前述化合物s1係例如具有可含有醚性氧原子之氟伸烷基及/或可含有醚性氧原子之氟烷基與水解性基的水解性矽烷化合物。就混合物(M)任意含有之水解性矽烷化合物而言,可列舉下述水解性矽烷化合物(s3)~(s6)(以下亦各自稱作「化合物(s3)」、「化合物(s4)」、「化合物(s5)」、「化合物(s6)」)。混合物(M)任意含有之水解性矽烷化合物以化合物(s3)尤佳。 The polymer (C1) is a partially hydrolyzed condensate of a mixture of hydrolyzable silane compounds (hereinafter also referred to as "mixture (M)"). This mixture (M) contains a hydrolyzable silane compound having a fluorine atom-containing group (hereinafter also referred to as "compound (s1)") and a hydrolyzable silane compound having a blocked isocyanate group (hereinafter also referred to as "compound (s2)") As an essential component and optionally containing a hydrolyzable silane compound other than compounds (s1) and (s2), the compound s1 is, for example, a fluoroalkylene group which may contain an etheric oxygen atom and / or a fluorine which may contain an etheric oxygen atom. A hydrolyzable silane compound having an alkyl group and a hydrolyzable group. Examples of the hydrolyzable silane compound contained in the mixture (M) include the following hydrolyzable silane compounds (s3) to (s6) (hereinafter also referred to as "compound (s3)", "compound (s4)", "Compound (s5)", "Compound (s6)"). The hydrolyzable silane compound optionally contained in the mixture (M) is particularly preferably the compound (s3).
水解性矽烷化合物(s3);矽原子鍵結有4個水解性基的水解性矽烷化合物。 Hydrolyzable silane compound (s3); a hydrolyzable silane compound in which a silicon atom is bonded to 4 hydrolyzable groups.
水解性矽烷化合物(s4);具有具乙烯性雙鍵之基及水解性基且不含氟原子的水解性矽烷化合物。 Hydrolyzable silane compound (s4): Hydrolyzable silane compound having a vinylic double bond and a hydrolyzable group and containing no fluorine atom.
水解性矽烷化合物(s5);作為鍵結於矽原子之基僅具有烴基及水解性基的水解性矽烷化合物(惟,隸屬水解性矽烷化合物(s4)者除外)。 Hydrolyzable silane compound (s5); a hydrolyzable silane compound having only a hydrocarbon group and a hydrolyzable group as a group bonded to a silicon atom (except those belonging to a hydrolyzable silane compound (s4)).
水解性矽烷化合物(s6);具有巰基及水解性基且不含氟原子的水解性矽烷化合物。 Hydrolyzable silane compound (s6); Hydrolyzable silane compound having a mercapto group and a hydrolyzable group and containing no fluorine atom.
以下將針對化合物(s1)~(s6)加以說明。 Compounds (s1) to (s6) will be described below.
<1>化合物(s1) <1> Compound (s1)
藉由使用化合物(s1),聚合物(C1)會以下述形態具有 氟原子而具有優異的上表面移行性及撥墨性:可含有醚性氧原子之氟伸烷基及/或可含有醚性氧原子之氟烷基。 By using the compound (s1), the polymer (C1) has the following form Fluorine atom with excellent upper surface migration and ink repellency: fluoroalkylene group which may contain etheric oxygen atom and / or fluoroalkyl group which may contain etheric oxygen atom.
為了使化合物(s1)所具該等性質進階到較高水準,化合物(s1)具有選自於由氟烷基、全氟伸烷基及全氟烷基所構成群組中之至少1種較佳,具有全氟烷基尤佳。而,該等含氟烴基亦可含有醚性氧原子,且含有醚性氧原子之全氟烷基亦佳。即,就化合物(s1)而言最為理想的化合物係具有全氟烷基及/或含醚性氧原子之全氟烷基的化合物。 In order to advance these properties of the compound (s1) to a higher level, the compound (s1) has at least one selected from the group consisting of a fluoroalkyl group, a perfluoroalkylene group, and a perfluoroalkyl group. Preferably, a perfluoroalkyl group is preferred. Moreover, these fluorine-containing hydrocarbon groups may also contain etheric oxygen atoms, and perfluoroalkyl groups containing etheric oxygen atoms are also preferred. That is, the most preferable compound in the compound (s1) is a compound having a perfluoroalkyl group and / or an etheric oxygen atom-containing perfluoroalkyl group.
就水解性基而言,可舉如烷氧基、鹵素原子、醯基、異氰酸酯基、胺基、胺基之至少1個氫經烷基取代之基等。從藉由水解反應成為羥基(矽醇基)再於分子間產生縮合反應而形成Si-O-Si鍵的反應容易順利進行此觀點來看,則以碳原子數1~4之烷氧基或鹵素原子為佳,甲氧基、乙氧基或氯原子較佳,甲氧基或乙氧基尤佳。 Examples of the hydrolyzable group include an alkoxy group, a halogen atom, a fluorenyl group, an isocyanate group, an amine group, and a group in which at least one hydrogen of the amine group is substituted with an alkyl group. From the viewpoint that the reaction to form a Si-O-Si bond is facilitated by a hydrolysis reaction to form a hydroxyl group (silanol group) and a condensation reaction between molecules, the alkoxy group having 1 to 4 carbon atoms or A halogen atom is preferred, a methoxy, ethoxy or chlorine atom is preferred, and a methoxy or ethoxy group is particularly preferred.
化合物(s1)可單獨使用1種亦可將2種以上併用。 The compound (s1) may be used alone or in combination of two or more.
就化合物(s1)而言,以下式(cx-1)所示化合物為佳。 The compound (s1) is preferably a compound represented by the following formula (cx-1).
(A-RF11)a-Si(RH11)bX11 (4-a-b)…(cx-1) (AR F11 ) a -Si (R H11 ) b X 11 (4-ab) … (cx-1)
式(cx-1)中,各記號意義如下。 In the formula (cx-1), each symbol has the following meaning.
RF11係含有至少1個氟伸烷基且可含有醚性氧原子之碳原子數1~16之2價有機基。惟,RF11之與A鍵結的末端原子及與Si鍵結的末端原子均為碳原子。 R F11 is a divalent organic group having 1 to 16 carbon atoms containing at least one fluoroalkylene group and may contain etheric oxygen atoms. However, the terminal atom bonded to A and the terminal atom bonded to Si of R F11 are all carbon atoms.
RH11為碳原子數1~6之烴基。 R H11 is a hydrocarbon group having 1 to 6 carbon atoms.
a為1或2,b為0或1,a+b為1或2。 a is 1 or 2, b is 0 or 1, and a + b is 1 or 2.
A為氟原子或下式(Ia)所示基。 A is a fluorine atom or a group represented by the following formula (Ia).
-Si(RH12)cX12 (3-c)…(Ia) -Si (R H12 ) c X 12 (3-c) … (Ia)
RH12為碳原子數1~6之烴基。 R H12 is a hydrocarbon group having 1 to 6 carbon atoms.
c為0或1。 c is 0 or 1.
X11及X12為水解性基。 X 11 and X 12 are hydrolyzable groups.
X11存有多數個時,該等可互異或可相同。 When there is a plurality of X 11 , these may be different from each other or may be the same.
X12存有多數個時,該等可互異或可相同。 When there are a plurality of X 12 , these may be different from each other or may be the same.
A-RF11存有多數個時,該等可互異或可相同。 When there are a plurality of AR F11 , these may be different from each other or may be the same.
化合物(cx-1)係具有1個或2個雙或三官能性之水解性矽基的含氟水解性矽烷化合物。 The compound (cx-1) is a fluorine-containing hydrolyzable silane compound having one or two di- or tri-functional hydrolyzable silyl groups.
RH11及RH12以碳原子數1~3之烴基為佳,甲基尤佳。 R H11 and R H12 are preferably a hydrocarbon group having 1 to 3 carbon atoms, and particularly preferably a methyl group.
式(cx-1)中,a為1且b為0或1尤佳。 In formula (cx-1), it is particularly preferred that a is 1 and b is 0 or 1.
X11及X12之具體例及理想樣態如同上述。 Specific examples and ideal aspects of X 11 and X 12 are as described above.
化合物(s1)以下式(cx-1a)所示化合物尤佳。 The compound (s1) is particularly preferably a compound represented by the following formula (cx-1a).
T-RF12-Q11-SiX11 3…(cx-1a) TR F12 -Q 11 -SiX 11 3 … (cx-1a)
式(cx-1a)中,各記號意義如下。 In the formula (cx-1a), each symbol has the following meaning.
RF12為可含有碳原子數2~15之醚性氧原子的全氟伸烷基。 R F12 is a perfluoroalkylene group which may contain etheric oxygen atoms having 2 to 15 carbon atoms.
T為氟原子或下式(Ib)所示之基。 T is a fluorine atom or a group represented by the following formula (Ib).
-Q12-SiX12 3…(Ib) -Q 12 -SiX 12 3 … (Ib)
X11及X12為水解性基。 X 11 and X 12 are hydrolyzable groups.
3個X11可互異或可相同。 The three X 11 may be different from each other or may be the same.
3個X12可互異或可相同。 The three X 12 may be different from each other or may be the same.
Q11及Q12係表示碳原子數1~10且不含氟原子的2價有機基。 Q 11 and Q 12 represent a divalent organic group having 1 to 10 carbon atoms and not containing a fluorine atom.
在式(cx-1a)中,T為氟原子時,RF12以碳原子數4~8之全氟伸烷基或碳原子數4~10且含有醚性氧原子之全氟伸烷基為佳,碳原子數4~8之全氟伸烷基較佳,且以碳原子數6之全氟伸烷基尤佳。 In formula (cx-1a), when T is a fluorine atom, R F12 is a perfluoroalkylene group having 4 to 8 carbon atoms or a perfluoroalkylene group having 4 to 10 carbon atoms and containing an etheric oxygen atom as Preferably, a perfluoroalkylene group having 4 to 8 carbon atoms is preferred, and a perfluoroalkylene group having 6 carbon atoms is particularly preferred.
又,在式(cx-1a)中,T為基(Ib)時,RF12以碳原子數3~15之全氟伸烷基或碳原子數3~15且含有醚性氧原子之全氟伸烷基為佳,碳原子數4~6之全氟伸烷基尤佳。 In formula (cx-1a), when T is a group (Ib), R F12 is a perfluoroalkylene group having 3 to 15 carbon atoms or a perfluoro group having 3 to 15 carbon atoms and containing an etheric oxygen atom. The alkylene group is preferable, and the perfluoroalkylene group having 4 to 6 carbon atoms is particularly preferable.
RF12若為上述所例示之基,聚合物(C1)便具有良好的撥墨性且化合物(cx-1a)於溶劑中之溶解性優異。 When R F12 is the base exemplified above, the polymer (C1) has good ink repellency and the compound (cx-1a) has excellent solubility in a solvent.
就RF12之結構來說,可列舉直鏈結構、分枝結構、環結構及部分具有環之結構等,並以直鏈結構為佳。 As for the structure of R F12 , straight chain structure, branched structure, ring structure, and some structures having a ring can be listed, and a straight chain structure is preferred.
RF12之具體例可舉國際公開第2014/046209號(以下稱為WO2014/046209)中例如段落[0043]所記載者等。 Specific examples of R F12 include those described in paragraph [0043] in International Publication No. 2014/046209 (hereinafter referred to as WO2014 / 046209).
Q11及Q12係以分別於右側鍵結位置鍵結Si且於左側鍵結位置鍵結RF12來表示時,具體上以下列所示之基為佳:-(CH2)i1-(i1為1~5之整數)、-CH2O(CH2)i2-(i2為1~4之整數)、-SO2NR1-(CH2)i3-(R1為氫原子、甲基或乙基,i3為1~4之整數,且R1與(CH2)i3之碳原子數合計為4以下之整數)、或-(C=O)-NR1-(CH2)i4-(R1與上述相同,i4為1~4之整數,且R1與(CH2)i4之碳原子數合計為4以下之整數)。就Q11及Q12來說,以i1為2~4之整數之-(CH2)i1-較佳,且以-(CH2)2-尤佳。 When Q 11 and Q 12 are respectively represented by bonding Si at the right bonding position and R F12 at the left bonding position, specifically, the following bases are preferred:-(CH 2 ) i1- (i1 Is an integer from 1 to 5), -CH 2 O (CH 2 ) i2- (i2 is an integer from 1 to 4), -SO 2 NR 1- (CH 2 ) i3- (R 1 is a hydrogen atom, methyl or Ethyl, i3 is an integer of 1 to 4, and the total number of carbon atoms of R 1 and (CH 2 ) i3 is an integer of 4 or less) or- (C = O) -NR 1- (CH 2 ) i4- ( R 1 is defined above, I4 is the integer of 1 to 4, and R 1 and carbon atoms (CH 2) i4 of integers of 4 or less in total). As for Q 11 and Q 12 ,-(CH 2 ) i1 with i1 being an integer of 2 to 4 is preferred, and- (CH 2 ) 2 -is particularly preferred.
另外,RF12為不含醚性氧原子之全氟伸烷基時,Q11及Q12以-(CH2)i1-所示基為佳。i1為2~4之整數較佳,i1為2尤佳。 When R F12 is a perfluoroalkylene group having no etheric oxygen atom, Q 11 and Q 12 are preferably represented by- (CH 2 ) i1- . i1 is preferably an integer of 2 to 4, and i1 is more preferably 2.
RF12為含有醚性氧原子之全氟烷基時,Q11及Q12以-(CH2)i1-、-CH2O(CH2)i2-、-SO2NR1-(CH2)i3-或-(C=O)-NR1-(CH2)i4-所示之基為佳。在此情況下仍以-(CH2)i1-較佳,i1為2~4之整數更佳,i1為2尤佳。 When R F12 is a perfluoroalkyl group containing an etheric oxygen atom, Q 11 and Q 12 are represented by- (CH 2 ) i1- , -CH 2 O (CH 2 ) i2- , -SO 2 NR 1- (CH 2 ) A base represented by i3 -or- (C = O) -NR 1- (CH 2 ) i4 -is preferred. In this case,-(CH 2 ) i1 -is still preferred, i1 is more preferably an integer of 2 to 4, and i1 is more preferably 2.
T為氟原子時,化合物(cx-1a)之具體例可舉WO2014/046209中例如段落[0046]所記載者等。 When T is a fluorine atom, specific examples of the compound (cx-1a) include those described in, for example, paragraph [0046] in WO2014 / 046209.
T為基(Ib)時,化合物(cx-1a)之具體例可舉WO2014/046209中例如段落[0047]所記載者等。 When T is a group (Ib), specific examples of the compound (cx-1a) include those described in, for example, paragraph [0047] in WO2014 / 046209.
在本發明中,作為化合物(cx-1a),其中又以F(CF2)6CH2CH2Si(OCH3)3及F(CF2)3OCF(CF3)CF2O(CF2)2CH2CH2Si(OCH3)3尤佳。 In the present invention, as the compound (cx-1a), F (CF 2 ) 6 CH 2 CH 2 Si (OCH 3 ) 3 and F (CF 2 ) 3 OCF (CF 3 ) CF 2 O (CF 2 ) 2 CH 2 CH 2 Si (OCH 3 ) 3 is particularly preferred.
混合物(M)中之化合物(s1)之含有比例宜是從該混合物獲得之部分水解縮合物的氟原子含有率為1~40質量%,較佳為5~35質量%,且10~30質量%尤佳。化合物(s1)之含有比例若在上述範圍之下限值以上,便可賦予硬化膜之上表面良好的撥墨性;若在上限值以下,與該混合物中之其他水解性矽烷化合物的相溶性即佳。 The content ratio of the compound (s1) in the mixture (M) is preferably a fluorine atom content of the partially hydrolyzed condensate obtained from the mixture of 1 to 40% by mass, preferably 5 to 35% by mass, and 10 to 30% by mass. % Is better. If the content ratio of the compound (s1) is above the lower limit of the above range, good ink repellency can be imparted to the upper surface of the cured film; if it is below the upper limit, it is compatible with other hydrolyzable silane compounds in the mixture Solubility is better.
<2>化合物(s2) <2> Compound (s2)
藉由使本發明之混合物(M)含有化合物(s2),在作為撥墨劑或含於感光性樹脂組成物中作貯藏時都可提升貯藏穩定性。此外,使用時藉由加熱去封端而成異氰酸酯基,將 提升聚合物(C)之反應性,並提升與其他成分或其他材料之結合性及密著性。藉此,可在隔壁圍起之開口部抑制感光性樹脂組成物之殘渣阻礙印墨的濕潤擴散性,使親墨性良好。化合物(s2)可單獨使用1種亦可將2種以上併用。 By containing the compound (s2) in the mixture (M) of the present invention, it is possible to improve storage stability when used as an ink repellent or in a photosensitive resin composition for storage. In addition, the isocyanate group is formed by deblocking by heating during use. Improve the reactivity of polymer (C), and improve the binding and adhesion with other ingredients or other materials. Thereby, the residue of the photosensitive resin composition can be suppressed in the opening part enclosed by the partition wall from interfering with the wet diffusion property of the printing ink, and the ink affinity is good. The compound (s2) may be used alone or in combination of two or more.
水解性基可使用與化合物(s1)之水解性基相同之物。 As the hydrolyzable group, the same thing as the hydrolyzable group of the compound (s1) can be used.
化合物(s2)可以下式(cx-2)表示。 The compound (s2) can be represented by the following formula (cx-2).
(BI-Q2)d-Si(RH2)eX2 (4-d-e)…(cx-2) (BI-Q 2 ) d -Si (R H2 ) e X 2 (4-de) … (cx-2)
式(cx-2)中之記號意義如下。 The meaning of the symbols in the formula (cx-2) is as follows.
BI為封端異氰酸酯基。 BI is a blocked isocyanate group.
Q2為碳原子數1~6之不含氟原子的2價有機基。惟,Q2之與Si鍵結的末端原子為碳原子。 Q 2 is a divalent organic group containing 1 to 6 carbon atoms and not containing a fluorine atom. However, the terminal atom of Q 2 bonded to Si is a carbon atom.
RH2為碳原子數1~6之烴基。 R H2 is a hydrocarbon group having 1 to 6 carbon atoms.
X2為水解性基。 X 2 is a hydrolyzable group.
d為1或2,e為0或1,且d+e為1或2。 d is 1 or 2, e is 0 or 1, and d + e is 1 or 2.
BI-Q2存有多數個時,該等可互異或可相同。 When there are a large number of BI-Q 2 , these may be different or the same.
X2存有多數個時,該等可互異或可相同。 When there are a plurality of X 2 , these may be different from each other or may be the same.
RH2可使用與前述RH11及RH12相同之基。 R H2 may use the same base as the aforementioned R H11 and R H12 .
X2可使用與前述X11及X12相同之基。 X 2 may use the same base as X 11 and X 12 described above.
就BI而言,可舉如上述基(1),關於理想態樣亦與基(1)相同。 As far as BI is concerned, it can be exemplified by the above-mentioned base (1), and the ideal aspect is also the same as the base (1).
d為1且e為0或1為佳。 It is preferable that d is 1 and e is 0 or 1.
化合物(cx-2)可單獨使用1種亦可將2種以上併用。 The compound (cx-2) may be used alone or in combination of two or more.
就化合物(cx-2)之具體例,可舉如以下的化合 物。 Specific examples of the compound (cx-2) include the following compounds Thing.
相對於1莫耳的化合物(s1),混合物(M)中之化合物(s2)含有比例宜為0.5~6莫耳,0.5~5莫耳尤佳。此外,混合物(M)中之化合物(s2)含有比例宜是可讓得自該混合物之部分水解縮合物、即聚合物(C1)中之封端異氰酸酯基含量成為上述範圍的比例。含有比例若在上述範圍之下限值以上,貯藏穩定性與開口部之親墨性即佳。若在上限值以下,則聚合物(C1)中之氟原子含有率高,可賦予良好的撥墨性。 Relative to 1 mole of the compound (s1), the compound (s2) in the mixture (M) should preferably contain 0.5 to 6 moles, and more preferably 0.5 to 5 moles. In addition, the content of the compound (s2) in the mixture (M) is preferably a ratio such that the content of the blocked isocyanate group in the polymer (C1), which is a partially hydrolyzed condensate obtained from the mixture, becomes the above range. If the content ratio is above the lower limit of the above range, the storage stability and the ink affinity of the openings are excellent. When it is below the upper limit, the fluorine atom content rate in the polymer (C1) is high, and good ink repellency can be imparted.
<3>化合物(s3) <3> Compound (s3)
藉由使本發明之混合物(M)含有化合物(s3),則例如在使用含有聚合物(C1)之感光性樹脂組成物製得的隔壁中, 可提高聚合物(C1)往上表面移行後的造膜性。即,從化合物(s3)中之水解性基數量多的觀點來看,吾等認為往上表面移行後聚合物(C1)彼此可良好地縮合,於上表面整體形成一薄膜而成為撥墨層。 When the compound (s3) is contained in the mixture (M) of the present invention, for example, in a partition wall prepared using a photosensitive resin composition containing a polymer (C1), It can improve the film forming property of the polymer (C1) after moving to the upper surface. That is, from the viewpoint that the number of hydrolyzable groups in the compound (s3) is large, we believe that the polymers (C1) can condense well with each other after moving to the upper surface, and form a film on the entire upper surface to become an ink repellent layer .
又,藉由使混合物(M)含有化合物(s3),聚合物(C1)可輕易地溶解於烴系溶劑。 Moreover, when the mixture (M) contains the compound (s3), the polymer (C1) can be easily dissolved in a hydrocarbon-based solvent.
化合物(s3)可單獨使用1種亦可將2種以上併用。 The compound (s3) may be used alone or in combination of two or more.
水解性基可使用與化合物(s1)之水解性基相同之物。 As the hydrolyzable group, the same thing as the hydrolyzable group of the compound (s1) can be used.
化合物(s3)可以下式(cx-3)表示。 The compound (s3) can be represented by the following formula (cx-3).
SiX3 4…(cx-3) SiX 3 4 … (cx-3)
式(cx-3)中,X3表示水解性基,4個X3可互異或可相同。X3可使用與前述X11及X12相同之基。 In the formula (cx-3), X 3 represents a hydrolyzable group, and four X 3 may be mutually different or may be the same. X 3 may use the same base as X 11 and X 12 described above.
化合物(cx-3)之具體例可舉如以下的化合物。又,亦可因應需求使用預先將其多數個進行部分水解縮合而製得之部分水解縮合物作為化合物(cx-3)。 Specific examples of the compound (cx-3) include the following compounds. In addition, a partially hydrolyzed condensate obtained by partially hydrolyzing and condensing a plurality of them in advance may be used as the compound (cx-3) as required.
Si(OCH3)4、Si(OC2H5)4、Si(OCH3)4之部分水解縮合物、Si(OC2H5)4之部分水解縮合物。 Partially hydrolyzed condensates of Si (OCH 3 ) 4 , Si (OC 2 H 5 ) 4 , Si (OCH 3 ) 4 , and partially hydrolyzed condensates of Si (OC 2 H 5 ) 4 .
混合物(M)含有化合物(s3)時,相對於1莫耳的化合物(s1),混合物(M)中之化合物(s3)含有比例宜為0.01~5莫耳,0.05~3莫耳尤佳。含有比例若在上述範圍之下限值以上,聚合物(C1)之造膜性即佳;若在上限值以下,聚合物(C1)之撥墨性即佳。 When the mixture (M) contains the compound (s3), the content ratio of the compound (s3) in the mixture (M) is preferably 0.01 to 5 moles, particularly preferably 0.05 to 3 moles, relative to 1 mole of the compound (s1). If the content ratio is above the lower limit of the above range, the film forming property of the polymer (C1) is good; if it is below the upper limit value, the ink repellency of the polymer (C1) is good.
<4>化合物(s4) <4> Compound (s4)
藉由使本發明之混合物(M)含有化合物(s4),透過具有乙烯性雙鍵之基便可讓聚合物(C1)彼此(共)聚合,或讓聚合物(C1)與例如感光性樹脂組成物所含具乙烯性雙鍵的其他成分(共)聚合,故為理想。藉此,如上述說明,可獲得提高聚合物(C1)在撥墨層之固著性的效果。 By containing the compound (s4) in the mixture (M) of the present invention, the polymer (C1) can be (co) polymerized with each other through a group having an ethylenic double bond, or the polymer (C1) and, for example, a photosensitive resin The other component having an ethylenic double bond (co) polymerized in the composition is preferable. Thereby, as described above, it is possible to obtain the effect of improving the adhesion of the polymer (C1) to the ink repellent layer.
化合物(s4)可單獨使用1種亦可將2種以上併用。 The compound (s4) may be used alone or in combination of two or more.
水解性基可使用與化合物(s1)之水解性基相同之物。 As the hydrolyzable group, the same thing as the hydrolyzable group of the compound (s1) can be used.
就具有乙烯性雙鍵之基而言,以(甲基)丙烯醯氧基、乙烯基苯基、烯丙基、乙烯基、降基為佳,且(甲基)丙烯醯氧基尤佳。 For the group having an ethylenic double bond, (meth) acryloxy, vinylphenyl, allyl, vinyl, Is preferred, and (meth) propenyloxy is particularly preferred.
作為化合物(s4),以下式(cx-4)所示化合物為佳。 The compound (s4) is preferably a compound represented by the following formula (cx-4).
(Y-Q4)g-Si(RH4)hX4 (4-g-h)…(cx-4) (YQ 4 ) g -Si (R H4 ) h X 4 (4-gh) … (cx-4)
式(cx-4)中之記號意義如下。 The meaning of the symbols in the formula (cx-4) is as follows.
Y為具有乙烯性雙鍵之基。 Y is a group having an ethylenic double bond.
Q4為碳原子數1~6之不含氟原子的2價有機基。惟,Q4之與Si鍵結的末端原子為碳原子。 Q 4 is a divalent organic group containing 1 to 6 carbon atoms and not containing a fluorine atom. However, the terminal atom of Q 4 bonded to Si is a carbon atom.
RH4為碳原子數1~6之烴基。 R H4 is a hydrocarbon group having 1 to 6 carbon atoms.
X4為水解性基。 X 4 is a hydrolyzable group.
g為1或2,h為0或1,且g+h為1或2。 g is 1 or 2, h is 0 or 1, and g + h is 1 or 2.
Y-Q4存有多數個時,該等可互異或可相同。 When there are a plurality of YQ 4 , these may be different or the same.
X4存有多數個時,該等可互異或可相同。 When there is a plurality of X 4 , these may be different from each other or may be the same.
RH4可使用與前述RH11及RH12相同之基。 R H4 may use the same base as R H11 and R H12 described above.
X4可使用與前述X11及X12相同之基。 X 4 may use the same base as X 11 and X 12 described above.
Y以(甲基)丙烯醯氧基或乙烯基苯基為佳,且 (甲基)丙烯醯氧基尤佳。 Y is preferably (meth) acryloxy or vinylphenyl, and (Meth) acrylic acid is particularly preferred.
Q4之具體例可舉如碳原子數2~6之伸烷基、伸苯基等。其中又以-(CH2)3-為佳。 Specific examples of Q 4 include an alkylene group having 2 to 6 carbon atoms, a phenylene group, and the like. Among these,-(CH 2 ) 3 -is preferred.
g為1且h為0或1為佳。 Preferably g is 1 and h is 0 or 1.
化合物(cx-4)可單獨使用1種亦可將2種以上併用。 The compound (cx-4) may be used alone or in combination of two or more.
化合物(cx-4)之具體例可舉WO2014/046209中例如段落[0057]所記載者等。 Specific examples of the compound (cx-4) include those described in, for example, paragraph [0057] in WO2014 / 046209.
混合物(M)含有化合物(s4)時,相對於1莫耳的化合物(s1),混合物(M)中之化合物(s4)含有比例宜為0.1~5莫耳,0.5~4莫耳尤佳。含有比例若在上述範圍之下限值以上,聚合物(C1)之上表面移行性即佳,又往上表面移行後在包含上表面之撥墨層中聚合物(C1)之固著性良好,而且撥墨劑(C1)之貯藏穩定性良好。若在上限值以下,聚合物(C1)之撥墨性即佳。 When the mixture (M) contains the compound (s4), the content of the compound (s4) in the mixture (M) is preferably 0.1 to 5 moles, and more preferably 0.5 to 4 moles, relative to 1 mole of the compound (s1). If the content ratio is above the lower limit of the above range, the migration of the upper surface of the polymer (C1) is good, and after the migration to the upper surface, the polymer (C1) has good adhesion in the ink repellent layer including the upper surface. Moreover, the storage stability of the ink repellent (C1) is good. If it is below the upper limit, the ink repellency of the polymer (C1) is good.
<5>化合物(s5) <5> Compound (s5)
在本發明之混合物(M)中使用化合物(s3)時,例如在使感光性樹脂組成物硬化而成之隔壁中,可能會於其上表面之端部形成突起。該突起係以掃描型電子顯微鏡(SEM)等方可觀察之程度的微小物。本發明人確認了該突起中F及/或Si之含量較其他部分更多。 When the compound (s3) is used in the mixture (M) of the present invention, for example, in a partition wall obtained by curing the photosensitive resin composition, a protrusion may be formed on an end portion of the upper surface. These protrusions are minute objects that can be observed with a scanning electron microscope (SEM) or the like. The present inventors confirmed that the content of F and / or Si in the protrusion is larger than that in the other portions.
上述突起並不會作為隔壁等而特別造成障礙,但本發明人還是發現藉由將化合物(s3)之一部分取代成水解性基數量少的化合物(s5),可抑制上述突起發生。 The above-mentioned protrusions do not cause a particular obstacle as a partition wall or the like, but the present inventors have found that by replacing a part of the compound (s3) with a compound (s5) having a small number of hydrolyzable groups, the occurrence of the protrusions can be suppressed.
藉由以水解性基數量多的化合物(s3)生成之矽醇基彼 此的反應,增進聚合物(C1)之造膜性。然而,吾等認為正是因為其高反應性而引發上述突起。爰此,吾等認為藉由將化合物(s3)之一部分取代成水解性基數量少的化合物(s5),可抑制矽醇基彼此的反應,從而抑制上述突起發生。 Silanol groups generated from compounds (s3) with a large number of hydrolyzable groups This reaction improves the film forming property of the polymer (C1). However, we believe that it is precisely because of its high reactivity that the above protrusions are triggered. Therefore, we believe that by substituting a part of the compound (s3) with the compound (s5) having a small number of hydrolyzable groups, it is possible to suppress the reaction of the silanol groups, thereby suppressing the occurrence of the protrusions.
化合物(s5)可單獨使用1種亦可將2種以上併用。 The compound (s5) may be used alone or in combination of two or more.
水解性基可使用與化合物(s1)之水解性基相同之物。 As the hydrolyzable group, the same thing as the hydrolyzable group of the compound (s1) can be used.
化合物(s5)以下式(cx-5)所示化合物為佳。 The compound (s5) is preferably a compound represented by the following formula (cx-5).
(RH5)j-SiX5 (4-j)…(cx-5) (R H5 ) j -SiX 5 (4-j) … (cx-5)
式(cx-5)中,各記號意義如下。 In the formula (cx-5), each symbol has the following meaning.
RH5為碳原子數1~20之烴基。 R H5 is a hydrocarbon group having 1 to 20 carbon atoms.
X5為水解性基。 X 5 is a hydrolyzable group.
j為1~3之整數,理想為2或3。 j is an integer from 1 to 3, ideally 2 or 3.
RH5存有多數個時,該等可互異或可相同。 When there are a plurality of R H5 , these may be different from each other or may be the same.
X5存有多數個時,該等可互異或可相同。 When there are a plurality of X 5 , these may be different from each other or may be the same.
就RH5來說,當j為1時,可舉如碳原子數1~20之脂肪族烴基或碳原子數6~10之芳香族烴基,並以碳原子數1~10之烷基、苯基等為佳。當j為2或3時,RH5以碳原子數1~6之烴基為佳,碳原子數1~3之烴基較佳。 In the case of R H5 , when j is 1, an aliphatic hydrocarbon group having 1 to 20 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms can be cited, and an alkyl group having 1 to 10 carbon atoms and benzene can be cited. Basic is better. When j is 2 or 3, R H5 is preferably a hydrocarbon group having 1 to 6 carbon atoms, and a hydrocarbon group having 1 to 3 carbon atoms is more preferred.
X5可使用與前述X11及X12相同之基。 X 5 may use the same base as X 11 and X 12 described above.
化合物(cx-5)之具體例可舉WO2014/046209中例如段落[0063]所記載者等。 Specific examples of the compound (cx-5) include those described in, for example, paragraph [0063] in WO2014 / 046209.
混合物(M)含有化合物(s5)時,相對於1莫耳的化合物(s1),混合物(M)中之化合物(s5)含有比例宜為0.05 ~5莫耳,0.3~3莫耳尤佳。含有比例若在上述範圍之下限值以上,便可抑制隔壁上表面的端部突起。若在上限值以下,聚合物(C1)之撥墨性即佳。 When the mixture (M) contains the compound (s5), the content ratio of the compound (s5) in the mixture (M) is preferably 0.05 relative to 1 mole of the compound (s1). ~ 5 moles, especially 0.3 ~ 3 moles. If the content ratio is at least the lower limit of the above range, it is possible to suppress the protrusion of the end portion of the upper surface of the partition wall. If it is below the upper limit, the ink repellency of the polymer (C1) is good.
<6>化合物(s6) <6> Compound (s6)
藉由使用化合物(s6),例如以感光性樹脂組成物來說即可在較低的曝光量下硬化。吾等認為是因為化合物(s6)中之巰基具有鏈轉移性,在上述鹼可溶性樹脂或鹼可溶性單體及聚合物(C1)具有乙烯性雙鍵時,容易與聚合物(C1)本身具有的乙烯性雙鍵等鍵結而促進光硬化所致。 By using the compound (s6), for example, the photosensitive resin composition can be cured at a lower exposure amount. We believe that because the thiol group in the compound (s6) has chain transferability, when the above-mentioned alkali-soluble resin or alkali-soluble monomer and the polymer (C1) have an ethylenic double bond, it is easily related to the polymer (C1) itself. Ethylene double bonds and other bonds promote light hardening.
又,含有巰基之化合物(s6)的pKa為10左右,容易在鹼溶液中去質子,亦即容易解離。在此係以pKa=-log10Ka表示,式中,Ka表示酸解離常數。所以,吾等認為巰基可提高感光性樹脂組成物於顯影時的鹼可溶性。 Moreover, the pKa of the compound (s6) containing a mercapto group is about 10, and it is easy to deprotonate in an alkaline solution, that is, it is easy to dissociate. Here, it is expressed as pKa = -log 10 Ka, where Ka represents an acid dissociation constant. Therefore, we think that the mercapto group can improve the alkali solubility of the photosensitive resin composition during development.
化合物(s6)可單獨使用1種亦可將2種以上併用。 The compound (s6) may be used alone or in combination of two or more.
水解性基可使用與化合物(s1)之水解性基相同之物。 As the hydrolyzable group, the same thing as the hydrolyzable group of the compound (s1) can be used.
化合物(s6)以下式(cx-6)所示化合物為佳。 The compound (s6) is preferably a compound represented by the following formula (cx-6).
(HS-Q6)p-Si(RH6)qX6 (4-p-q)…(cx-6) (HS-Q 6 ) p -Si (R H6 ) q X 6 (4-pq) … (cx-6)
式(cx-6)中,各記號意義如下。 In the formula (cx-6), each symbol has the following meaning.
Q6為碳原子數1~10之不含氟原子的2價有機基。惟,Q6之與Si鍵結的末端原子為碳原子。 Q 6 is a divalent organic group containing 1 to 10 carbon atoms and not containing a fluorine atom. However, the terminal atom bonded to Si of Q 6 is a carbon atom.
RH6為碳原子數1~6之烴基。 R H6 is a hydrocarbon group having 1 to 6 carbon atoms.
X6為水解性基。 X 6 is a hydrolyzable group.
p為1或2,q為0或1,且p+q為1或2。 p is 1 or 2, q is 0 or 1, and p + q is 1 or 2.
HS-Q6存有多數個時,該等可互異或可相同。 HS-Q 6 there a plurality of time, these may be the same or may be mutually exclusive.
X6存有多數個時,該等可互異或可相同。 When there is a plurality of X 6 , these may be different from each other or may be the same.
X6可使用與前述X11及X12相同之基。 X 6 may use the same base as X 11 and X 12 described above.
就Q6而言,以碳原子數1~10之伸烷基為佳,碳原子數1~5之伸烷基較佳,且以碳原子數1~3之伸烷基尤佳。 As far as Q 6 is concerned, alkylene groups having 1 to 10 carbon atoms are preferred, alkylene groups having 1 to 5 carbon atoms are preferred, and alkylene groups having 1 to 3 carbon atoms are particularly preferred.
RH6可使用與前述RH11及RH12相同之基。 R H6 may use the same base as R H11 and R H12 described above.
化合物(cx-6)之具體例可舉如HS-(CH2)3-Si(OCH 3)3、HS-(CH2)3-Si(CH3)(OCH3)2等。 Specific examples of the compound (cx-6) include HS- (CH 2 ) 3 -Si (OCH 3 ) 3 and HS- (CH 2 ) 3 -Si (CH 3 ) (OCH 3 ) 2 .
混合物(M)含有化合物(s6)時,相對於1莫耳的化合物(s1),混合物(M)中之化合物(s6)含有比例宜為0.125~18莫耳,0.125~8莫耳尤佳。含有比例若在上述範圍之下限值以上,例如以感光性樹脂組成物來說,就可在較低曝光量下硬化。又,可提高鹼可溶性,且顯影性良好。若在上限值以下,聚合物(C1)之撥墨性即佳。 When the mixture (M) contains the compound (s6), the content of the compound (s6) in the mixture (M) is preferably 0.125 to 18 moles, particularly preferably 0.125 to 8 moles, relative to 1 mole of the compound (s1). If the content ratio is above the lower limit of the above range, for example, the photosensitive resin composition can be cured at a lower exposure amount. Moreover, alkali solubility can be improved and developability is favorable. If it is below the upper limit, the ink repellency of the polymer (C1) is good.
<7>其他水解性矽烷化合物 <7> Other hydrolyzable silane compounds
混合物(M)可任意含有1種或2種以上化合物(s1)~(s6)以外之水解性矽烷化合物。 The mixture (M) may optionally contain one or more types of hydrolyzable silane compounds other than the compounds (s1) to (s6).
其他水解性矽烷化合物可舉如具有氧伸烷基與水解性基且不含氟原子的水解性矽烷化合物。具體而言,可舉例如CH3O(C2H4O)kC3H6Si(OCH3)3(含聚氧伸乙基之三甲氧矽烷)(在此,k例如約為10)等。 Examples of the other hydrolyzable silane compound include a hydrolyzable silane compound having an oxyalkylene group and a hydrolyzable group and not containing a fluorine atom. Specifically, for example, CH 3 O (C 2 H 4 O) k C 3 H 6 Si (OCH 3 ) 3 (polyoxyethylene-containing trimethoxysilane) (here, k is, for example, about 10) Wait.
<8>聚合物(C1) <8> Polymer (C1)
聚合物(C1)為混合物(M)之部分水解縮合物。 The polymer (C1) is a partially hydrolyzed condensate of the mixture (M).
聚合物(C1)之一例係混合物(M)之部分水解縮合物, 該混合物(M)含有化合物(cx-1a)及化合物(cx-2)作為必須成分,並任意含有化合物(cx-3)~(cx-6)且化合物(cx-1a)中之基T為氟原子,聚合物(C11)之平均組成式顯示於下式(II)。 An example of the polymer (C1) is a partially hydrolyzed condensate of the mixture (M), This mixture (M) contains compound (cx-1a) and compound (cx-2) as essential components, and optionally contains compounds (cx-3) to (cx-6), and the group T in compound (cx-1a) is The average composition formula of the fluorine atom and the polymer (C11) is shown in the following formula (II).
[T-RF12-Q11-SiO3/2]n1‧[(BI-Q2)d-Si(RH2)eSiO(4-d-e)/2]n2‧[SiO4/2]n3‧[(Y-Q4)g-Si(RH4)hSiO(4-g-h)/2]n4‧[(RH5)j-SiO(4-j)/2]n5‧[(HS-Q6)p-Si(RH6)qO(4-p-q)/2]n6…(II) [TR F12 -Q 11 -SiO 3/2 ] n1 ‧ [(BI-Q 2 ) d -Si (R H2 ) e SiO (4-de) / 2 ] n2 ‧ [SiO 4/2 ] n3 ‧ [( YQ 4 ) g -Si (R H4 ) h SiO (4-gh) / 2 ] n4 ‧ [(R H5 ) j -SiO ( 4-j) / 2 ] n5 ‧ [(HS-Q 6 ) p -Si (R H6 ) q O (4-pq) / 2 ] n6 … (II)
式(II)中,n1~n6係表示相對於構成單元之合計莫耳量的各構成單元之莫耳分率。n1>0、n2>0、n3≧0、n4≧0、n5≧0、n6≧0且n1+n2+n3+n4+n5+n6=1。其他各符號則如同上述。惟,T為氟原子。 In the formula (II), n1 to n6 represent the mole fractions of each constituent unit with respect to the total mole amount of the constituent units. n1> 0, n2> 0, n3 ≧ 0, n4 ≧ 0, n5 ≧ 0, n6 ≧ 0, and n1 + n2 + n3 + n4 + n5 + n6 = 1. The other symbols are as described above. However, T is a fluorine atom.
另外,聚合物(C11)實際為殘留水解性基或矽醇基的生成物(部分水解縮合物),因此很難以化學式表示該生成物。 In addition, since the polymer (C11) is actually a product (partially hydrolyzed condensate) of a residual hydrolyzable group or a silanol group, it is difficult to express the product by a chemical formula.
式(II)所示之平均組成式係假設聚合物(C11)中水解性基或矽醇基全部成為矽氧烷鍵時的化學式。 The average composition formula represented by the formula (II) is a chemical formula when all the hydrolyzable groups or silanol groups in the polymer (C11) become siloxane bonds.
又,推測式(II)中分別源自化合物(cx-1a)、(cx-2)~(cx-6)的單元呈無規配列。 In addition, it is speculated that units derived from compounds (cx-1a) and (cx-2) to (cx-6) in formula (II) are randomly arranged.
式(II)所示之平均組成式中的n1:n2:n3:n4:n5:n6,與混合物(M)中之化合物(cx-1a)、及(cx-2)~(cx-6)的饋入組成一致。 N1: n2: n3: n4: n5: n6 in the average composition formula shown by formula (II), and compound (cx-1a), and (cx-2) to (cx-6) in the mixture (M) The feed composition is consistent.
各成分之莫耳比可從各成分的效果平衡來設計。 The mole ratio of each component can be designed from the balance of the effects of each component.
就可使聚合物(C11)之氟原子含有率成為上述理想範圍之量來說,n1以0.02~0.4為佳,0.02~0.3尤佳。 As far as the fluorine atom content of the polymer (C11) can be made into the above-mentioned ideal range, n1 is preferably 0.02 to 0.4, and particularly preferably 0.02 to 0.3.
n2以0.05~0.6為佳,0.1~0.5尤佳。 n2 is preferably from 0.05 to 0.6, particularly from 0.1 to 0.5.
n3以0~0.98為佳,0.05~0.6尤佳。 n3 is preferably 0 ~ 0.98, especially 0.05 ~ 0.6.
n4以0~0.8為佳,0~0.5尤佳。 n4 is preferably 0 ~ 0.8, especially 0 ~ 0.5.
n5以0~0.5為佳,0.05~0.3尤佳。 n5 is preferably 0 ~ 0.5, especially 0.05 ~ 0.3.
n6以0~0.9為佳,0~0.8較佳,0~0.4尤佳。 n6 is preferably from 0 to 0.9, preferably from 0 to 0.8, and particularly preferably from 0 to 0.4.
另外,上述各成分的理想莫耳比與化合物(cx-1a)中之T為基(Ib)時相同。 In addition, the ideal molar ratio of each of the above components is the same as when T is the base (Ib) in the compound (cx-1a).
又,上述各成分的理想莫耳比亦同樣可適用於混合物(M)含有化合物(s1)及化合物(s2)且任意含有化合物(s3)~(s6)之情況。即,用以獲得聚合物(C1)之混合物(M)中的化合物(s1)~(s6)之理想饋入量分別相當於上述n1~n6的理想範圍。 The ideal molar ratio of each of the components described above is also applicable to the case where the mixture (M) contains the compound (s1) and the compound (s2) and optionally contains the compounds (s3) to (s6). That is, the ideal feeding amounts of the compounds (s1) to (s6) in the mixture (M) to obtain the polymer (C1) correspond to the above-mentioned ideal ranges of n1 to n6, respectively.
聚合物(C1)之質量平均分子量(Mw)以5×102以上為佳,且以小於1×106為佳,小於1×104尤佳。 The mass average molecular weight (Mw) of the polymer (C1) is preferably 5 × 10 2 or more, more preferably less than 1 × 10 6 , and particularly preferably less than 1 × 10 4 .
質量平均分子量(Mw)若在下限值以上,使用感光性樹脂組成物來形成隔壁時,撥墨劑(C1)便容易進行上表面移行。若小於上限值,聚合物(C1)於溶劑中之溶解性即佳。 When the mass average molecular weight (Mw) is at least the lower limit value, when the photosensitive resin composition is used to form the partition wall, the ink repellent (C1) can easily move on the upper surface. If it is less than the upper limit, the solubility of the polymer (C1) in a solvent is better.
聚合物(C1)之質量平均分子量(Mw)可依製造條件調節。 The mass average molecular weight (Mw) of the polymer (C1) can be adjusted according to manufacturing conditions.
聚合物(C1)可藉由公知方法使上述混合物(M)進行水解及縮合反應來製造。 The polymer (C1) can be produced by subjecting the mixture (M) to a hydrolysis and condensation reaction by a known method.
於該反應,宜使用通常使用的鹽酸、硫酸、硝酸、磷酸等無機酸或者是乙酸、草酸、馬來酸等有機酸作為觸媒。又,因應需求,亦可使用氫氧化鈉、四甲基氫氧化銨 (TMAH)等鹼觸媒。 In this reaction, it is preferable to use a commonly used inorganic acid such as hydrochloric acid, sulfuric acid, nitric acid, or phosphoric acid or an organic acid such as acetic acid, oxalic acid, or maleic acid as a catalyst. In addition, according to requirements, sodium hydroxide and tetramethylammonium hydroxide can also be used. (TMAH) and other alkali catalysts.
於上述反應,可使用公知溶劑。 For the above reaction, a known solvent can be used.
上述反應所得之聚合物(C1)亦可連同溶劑一起以溶液性狀摻混於感光性樹脂組成物中。 The polymer (C1) obtained by the above reaction may be blended into the photosensitive resin composition in the form of a solution together with a solvent.
<聚合物(C2)> <Polymer (C2)>
聚合物(C2)之主鏈為烴鏈且具有下述單元:具有含氟原子之側鏈之單元及具有封端異氰酸酯基之單元。聚合物(C2)之質量平均分子量(Mw)宜為1×102~1×106,5×103~1×105尤佳。質量平均分子量(Mw)若在下限值以上,使用感光性樹脂組成物形成隔壁時,聚合物(C2)便容易進行上表面移行。若低於上限值,聚合物(C2)於溶劑中之溶解性即佳。 The main chain of the polymer (C2) is a hydrocarbon chain and has the following units: a unit having a fluorine atom-containing side chain and a unit having a blocked isocyanate group. The mass average molecular weight (Mw) of the polymer (C2) is preferably 1 × 10 2 to 1 × 10 6 , and particularly preferably 5 × 10 3 to 1 × 10 5 . When the mass average molecular weight (Mw) is at least the lower limit value, when the photosensitive resin composition is used to form the partition wall, the polymer (C2) can easily undergo upper surface migration. If it is lower than the upper limit, the solubility of the polymer (C2) in the solvent is better.
就上述具有含氟原子之側鏈的單元來說,聚合物(C2)宜具有下述單元:該單元具有可含醚性氧原子之氟伸烷基及/或可含醚性氧原子之氟烷基。 As for the above-mentioned unit having a fluorine atom-containing side chain, the polymer (C2) preferably has a unit having a fluoroalkylene group which may contain etheric oxygen atoms and / or a fluorine group which may contain etheric oxygen atoms. alkyl.
氟烷基可為直鏈狀亦可為支鏈狀。 The fluoroalkyl group may be linear or branched.
不含醚性氧原子之氟烷基之具體例,可舉WO2014/046209中例如段落[0082]所記載者等。 Specific examples of the fluoroalkyl group having no etheric oxygen atom include those described in, for example, paragraph [0082] in WO2014 / 046209.
含醚性氧原子之氟烷基之具體例,可舉WO2014/046209中例如段落[0083]所記載者等。 Specific examples of the fluoroalkyl group containing an etheric oxygen atom include those described in, for example, paragraph [0083] in WO2014 / 046209.
在撥墨性良好的觀點下,氟烷基以全氟烷基為佳。 From the viewpoint of good ink repellency, a perfluoroalkyl group is preferred.
氟烷基之碳原子數以4~15為佳,且以4~12較佳。氟烷基之碳原子數若為4~15,撥墨性即佳;又,在製造聚 合物(C2)時,具有氟烷基之單體與後述之該單體以外之單體的相溶性良好。 The number of carbon atoms of the fluoroalkyl group is preferably from 4 to 15, and more preferably from 4 to 12. If the number of carbon atoms of the fluoroalkyl group is 4 to 15, the ink repellency is better; In the compound (C2), the compatibility between the monomer having a fluoroalkyl group and a monomer other than the monomer described later is good.
聚合物(C2)以含有具氟烷基之單元作為上述具有含氟原子之側鏈之單元的聚合物為佳。具氟烷基之單元宜藉由使具有氟烷基之聚合性單體進行聚合來導入聚合物。又,亦可藉由使合適化合物對具有反應部位之聚合物進行反應的各種改質方法將氟烷基導入聚合物。 The polymer (C2) is preferably a polymer containing a unit having a fluoroalkyl group as the above-mentioned unit having a side chain containing a fluorine atom. The unit having a fluoroalkyl group is preferably introduced into the polymer by polymerizing a polymerizable monomer having a fluoroalkyl group. In addition, the fluoroalkyl group may be introduced into the polymer by various modification methods in which a polymer having a reaction site is reacted with an appropriate compound.
就構成聚合物(C2)之主鏈的烴鏈來說,具體上可舉例如:藉由具有乙烯性雙鍵之單體的聚合而得之主鏈、及由-Ph-CH2-(惟,「Ph」表示苯骨架)之重複單元所構成的酚醛型主鏈等。 As for the hydrocarbon chain constituting the main chain of the polymer (C2), specifically, for example, a main chain obtained by polymerization of a monomer having an ethylenic double bond, and -Ph-CH 2- (but "Ph" represents a phenolic backbone composed of repeating units of a benzene skeleton).
欲藉由具有乙烯性雙鍵之單體的聚合來製得聚合物(C2)時,只要使具有乙烯性雙鍵且同時具有氟烷基之單體與具有乙烯性雙鍵且同時具有封端異氰酸酯基之單體聚合即可,又或可因應需求與具有其他乙烯性雙鍵之單體聚合。 When a polymer (C2) is to be produced by polymerizing a monomer having an ethylenic double bond, the monomer having an ethylenic double bond and having a fluoroalkyl group and the monomer having an ethylenic double bond and having an end cap at the same time Isocyanate-based monomers may be polymerized, or may be polymerized with other monomers having ethylenic double bonds as required.
以下,將針對聚合物(C2)之主鏈係藉由具有乙烯性雙鍵之單體的聚合而製得之主鏈的情況加以說明。 Hereinafter, a case where the main chain of the polymer (C2) is a main chain obtained by polymerization of a monomer having an ethylenic double bond will be described.
具有乙烯性雙鍵且同時具有氟烷基之單體可舉如CH2=CR4COOR5Rf、CH2=CR4COOR6NR4SO2Rf、CH2=CR4COOR6NR4CORf、CH2=CR4COOCH2CH(OH)R5Rf、CH2=CR4CR4=CFRf等。 Examples of monomers having an ethylenic double bond and a fluoroalkyl group are CH 2 = CR 4 COOR 5 R f , CH 2 = CR 4 COOR 6 NR 4 SO 2 R f , CH 2 = CR 4 COOR 6 NR 4 COR f , CH 2 = CR 4 COOCH 2 CH (OH) R 5 R f , CH 2 = CR 4 CR 4 = CFR f, etc.
上述式中分別是以Rf表示氟烷基,R4表示氫原子、氟原子以外之鹵素原子或甲基,R5表示單鍵或碳數1~6之2 價有機基,R6表示碳數1~6之2價有機基。 In the above formula, R f represents a fluoroalkyl group, R 4 represents a hydrogen atom, a halogen atom or a methyl group other than a fluorine atom, R 5 represents a single bond or a divalent organic group having 1 to 6 carbon atoms, and R 6 represents carbon. Divalent 1 to 6 divalent organic groups.
就Rf而言,以碳原子數4~8之全氟烷基或碳原子數4~10之含有醚性氧原子的全氟烷基為佳,碳原子數4~8之全氟烷基較佳,且以碳原子數6之全氟烷基尤佳。 As for R f , a perfluoroalkyl group having 4 to 8 carbon atoms or a perfluoroalkyl group having 4 to 10 carbon atoms containing an etheric oxygen atom is preferred, and a perfluoroalkyl group having 4 to 8 carbon atoms It is more preferred, and a perfluoroalkyl group having 6 carbon atoms is particularly preferred.
R4所示之鹵素原子以氯原子為佳。 The halogen atom represented by R 4 is preferably a chlorine atom.
就R5及R6而言,均以伸烷基為佳。R5、R6之具體例可舉如-CH2-、-CH2CH2-、-CH(CH3)-、-CH2CH2CH2-、-C(CH3)2-、-CH(CH2CH3)-、-CH2CH2CH2CH2-、-CH(CH2CH2CH3)-、-CH2(CH2)3CH2-、CH(CH2CH(CH3)2)-等。 As for R 5 and R 6 , an alkylene group is preferred. Specific examples of R 5 and R 6 include -CH 2- , -CH 2 CH 2- , -CH (CH 3 )-, -CH 2 CH 2 CH 2- , -C (CH 3 ) 2 -,- CH (CH 2 CH 3 )-, -CH 2 CH 2 CH 2 CH 2- , -CH (CH 2 CH 2 CH 3 )-, -CH 2 (CH 2 ) 3 CH 2- , CH (CH 2 CH ( CH 3 ) 2 )-and so on.
上述聚合性單體可單獨使用1種亦可將2種以上併用。 The said polymerizable monomer may be used individually by 1 type, and may use 2 or more types together.
聚合物(C2)含有上述具有含氟原子之側鏈之單元並同時含有具封端異氰酸酯基之單元。聚合物(C2)具有封端異氰酸酯基,因此在作為撥墨劑或含於感光性樹脂組成物中作貯藏時都可提升貯藏穩定性。此外,使用時藉由加熱去封端而成異氰酸酯基可提升聚合物(C2)之反應性,並可提升與其他成分或其他材料的結合性及密著性。藉此可在隔壁圍起之開口部抑制感光性樹脂組成物之殘渣阻礙印墨的濕潤擴散性,使親墨性良好。 The polymer (C2) contains the above-mentioned unit having a fluorine atom-containing side chain and also a unit having a blocked isocyanate group. Since the polymer (C2) has a blocked isocyanate group, it can improve storage stability when used as an ink repellent or contained in a photosensitive resin composition for storage. In addition, the isocyanate group formed by heating and deblocking during use can improve the reactivity of the polymer (C2), and can improve the binding and adhesion with other ingredients or other materials. Thereby, the openings around the partition wall can suppress the residue of the photosensitive resin composition from hindering the wet diffusibility of the printing ink, and the ink affinity is good.
就封端異氰酸酯基而言,可舉如上述式(1)所示之基(1)。如上述,其中又以使異氰酸酯基與吡唑類或與肟類反應而得之封端異氰酸酯基為佳,且以使異氰酸酯基與吡唑類反應而得之封端異氰酸酯基尤佳。 As a blocked isocyanate group, the group (1) represented by the said Formula (1) is mentioned. As described above, among them, a blocked isocyanate group obtained by reacting an isocyanate group with a pyrazole or an oxime is preferable, and a blocked isocyanate group obtained by reacting an isocyanate group with a pyrazole is particularly preferable.
具有乙烯性雙鍵且同時具有封端異氰酸酯基的單體可舉如CH2=CR4COOR5-NHC(=O)-B等。該式中,R4 及R5為具有氟烷基之單體的情況下,R4及R5為同義,B則與式(1)中之B同義。 Examples of the monomer having an ethylenic double bond and having a blocked isocyanate group include CH 2 = CR 4 COOR 5 -NHC (= O) -B and the like. In the formula, when R 4 and R 5 are monomers having a fluoroalkyl group, R 4 and R 5 are synonymous, and B is synonymous with B in formula (1).
就CH2=CR4COOR5-NHC(=O)-B來說,具體上可舉如下述式(m1)所示單體及下述式(m2)所示單體。 For CH 2 = CR 4 COOR 5 -NHC (= O) -B, specifically, a monomer represented by the following formula (m1) and a monomer represented by the following formula (m2) may be mentioned.
聚合物(C2)除具有含氟原子單元及含封端異氰酸酯基單元外,更可具有選自於由具有酸性基之單元、具有乙烯性雙鍵之單元、具有羥基之單元及具有聚氧伸烷基鏈之單元所構成群組中之至少1種單元。 The polymer (C2) may have, in addition to a fluorine atom-containing unit and a blocked isocyanate group-containing unit, a polymer selected from the group consisting of a unit having an acidic group, a unit having an ethylenic double bond, a unit having a hydroxyl group, and a unit having polyoxygen. At least one type of unit in the group consisting of units of an alkyl chain.
在鹼可溶性良好的觀點下,聚合物(C2)以具有酸性基之聚合物為佳。 From the viewpoint of good alkali solubility, the polymer (C2) is preferably a polymer having an acidic group.
就酸性基而言,以選自於由羧基、酚性羥基及磺酸基所構成群組中之至少1個酸性基或其鹽為佳。 The acidic group is preferably at least one acidic group or a salt thereof selected from the group consisting of a carboxyl group, a phenolic hydroxyl group, and a sulfonic acid group.
聚合物(C2)具有光交聯性,在使感光性樹脂組成物硬化而成之硬化膜的製造過程中,會於硬化膜之上層部彼此鍵結或是與感光性樹脂組成物所含有之具有乙烯性雙鍵的其他成分鍵結,可提升聚合物(C2)之固著性,在此觀點下聚合物(C2)以具有乙烯性雙鍵之聚合物為佳。 The polymer (C2) has photo-crosslinking properties. In the production process of the cured film obtained by curing the photosensitive resin composition, the upper layer of the cured film is bonded to each other or contained in the photosensitive resin composition. Bonding of other components having an ethylenic double bond can improve the fixation of the polymer (C2). In this viewpoint, the polymer (C2) is preferably a polymer having an ethylenic double bond.
具有乙烯性雙鍵之基以(甲基)丙烯醯氧基、乙烯基苯基、烯丙基、乙烯基、降基為佳,(甲基)丙烯醯氧基尤佳。 The group having an ethylenic double bond is (meth) acryloxy, vinylphenyl, allyl, vinyl, or Is preferred, and (meth) propenyloxy is particularly preferred.
乙烯性雙鍵宜於聚合物形成後導入而成聚合物(C2)。雖說乙烯性雙鍵會在單體聚合時進行反應,但通常無法僅以單體之聚合來製造具有乙烯性雙鍵之聚合物。此時,先以單體聚合製造具有羥基等反應部位的聚合物,接著使具有乙烯性雙鍵且可與聚合物之反應部位鍵結的化合物反應,便可製造具有乙烯性雙鍵之聚合物。具體而言,例如先製造包含具有含氟原子之側鏈的單元、具有封端異氰酸酯基之單元及具有羥基之單元的聚合物,接著使異氰酸酯烷基(甲基)丙烯酸酯反應,即可製造具有乙烯性雙鍵之聚合物(C2)。 The ethylenic double bond is suitable for polymer (C2) to be introduced after the polymer is formed. Although the ethylenic double bond undergoes a reaction during the polymerization of the monomer, a polymer having an ethylenic double bond cannot usually be produced only by the polymerization of the monomer. In this case, a polymer having a reaction site such as a hydroxyl group is first polymerized, and then a compound having an ethylenic double bond that can be bonded to the reaction site of the polymer is reacted to produce a polymer having an ethylenic double bond. . Specifically, for example, a polymer containing a unit having a fluorine atom-containing side chain, a unit having a blocked isocyanate group, and a unit having a hydroxyl group is produced first, and then an isocyanate alkyl (meth) acrylate is reacted to produce the polymer. Polymer (C2) having an ethylenic double bond.
聚合物(C2)亦可具有羥基或聚氧伸烷基。 The polymer (C2) may have a hydroxyl group or a polyoxyalkylene group.
聚氧伸烷基及羥基雖不具有光交聯性,但具有聚氧伸烷基或羥基之聚合物(C2)和具有乙烯性雙鍵時同樣會於硬化膜之上層部彼此鍵結或者是與感光性樹脂組成物所含有之其他成分鍵結,可提升聚合物(C2)之固著性。又,羥基如上述亦可作用為聚合物之反應部位。聚氧伸烷基中,聚氧伸乙基具有親水性,因此亦有提高對顯影液的濕潤性的效果。 Although the polyoxyalkylene group and hydroxyl group do not have photo-crosslinkability, the polymer (C2) having a polyoxyalkylene group or hydroxyl group and the ethylenic double bond are also bonded to each other on the upper part of the cured film or are Bonding with other components contained in the photosensitive resin composition can improve the fixing property of the polymer (C2). Moreover, a hydroxyl group can also act as a reaction site of a polymer as mentioned above. Among polyoxyalkylene groups, polyoxyethylene groups are hydrophilic, and therefore have the effect of improving the wettability of the developer.
聚合物(C2)可含有酸性基、乙烯性雙鍵、羥基及聚氧伸烷基中之1種以上。亦可於聚合物之1側鏈含有該等基中之2種以上。例如,羥基可鍵結於聚氧伸烷基之末 端。 The polymer (C2) may contain one or more of an acidic group, an ethylenic double bond, a hydroxyl group, and a polyoxyalkylene group. Two or more of these groups may be contained in one side chain of the polymer. For example, hydroxyl groups can be bonded to polyoxyalkylenes end.
就上述基之導入方法來說,以可使具有氟烷基之單體、具有封端異氰酸酯基之單體及具有上述基之單體進行共聚合之方法為佳。又,亦可藉由使合適化合物對具有反應部位之聚合物進行反應的各種改質方法,將上述基導入聚合物中。 As the method for introducing the above group, a method in which a monomer having a fluoroalkyl group, a monomer having a blocked isocyanate group, and a monomer having the above group can be copolymerized is preferable. The above-mentioned groups can also be introduced into the polymer by various modification methods in which a polymer having a reaction site is reacted with an appropriate compound.
具有羧基之單體、具有酚性羥基之單體及具有磺酸基之單體的具體例,可舉WO2014/046209中例如段落[0092]、[0093]及[0094]所記載者等。 Specific examples of the monomer having a carboxyl group, the monomer having a phenolic hydroxyl group, and the monomer having a sulfonic acid group include those described in paragraphs [0092], [0093], and [0094] of WO2014 / 046209.
將羧基導入具有反應部位之聚合物中的方法,可舉下述方法等為例:方法(1),使酸酐對具有羥基之聚合物進行反應;及方法(2),使具有羥基之化合物對具有具乙烯性雙鍵之酸酐單元的聚合物進行反應。 The method for introducing a carboxyl group into a polymer having a reaction site may be exemplified by the following method: method (1), which reacts an acid anhydride with a polymer having a hydroxyl group; and method (2), which causes a compound with a hydroxyl group to react The polymer having an acid anhydride unit having an ethylenic double bond reacts.
具有羥基之單體的具體例可舉WO2014/046209中例如段落[0096]所記載者等。 Specific examples of the monomer having a hydroxyl group include those described in, for example, paragraph [0096] in WO2014 / 046209.
具有羥基之單體亦可為具有末端為羥基之聚氧伸烷基鏈的單體。 The monomer having a hydroxyl group may also be a monomer having a polyoxyalkylene chain having a hydroxyl group at its terminal.
譬如,可舉WO2014/046209中例如段落[0097]所記載者等。 For example, WO2014 / 046209 may be the one described in paragraph [0097].
就酸酐而言,可舉WO2014/046209中例如段落[0098]所記載者等。 Examples of the acid anhydride include those described in, for example, paragraph [0098] in WO2014 / 046209.
就具有羥基之化合物來說,只要是具有1個以上羥基之化合物即可,譬如可舉WO2014/046209中例如段落[0099]所記載者等。 The compound having a hydroxyl group may be a compound having one or more hydroxyl groups, and examples thereof include those described in paragraph [0099] of WO2014 / 046209.
不含羥基及酸性基且具有聚氧伸烷基之單體例如亦可使用下式(POA-1)或(POA-2)所示單體。 As the monomer having no hydroxyl group and acidic group and having a polyoxyalkylene group, for example, a monomer represented by the following formula (POA-1) or (POA-2) can also be used.
CH2=CR71-COO-W-(R72-O)K4-R73…(POA-1) CH 2 = CR 71 -COO-W- (R 72 -O) K4 -R 73 … (POA-1)
CH2=CR71-O-W-(R72-O)K4-R73…(POA-2) CH 2 = CR 71 -OW- (R 72 -O) K4 -R 73 … (POA-2)
(R71為氫原子、氯原子、溴原子、碘原子、氰基、碳數1~20之烷基、碳數7~20之業經芳基取代的烷基、碳數6~20之芳基或碳數3~20之環烷基。 (R 71 is a hydrogen atom, a chlorine atom, a bromine atom, an iodine atom, a cyano group, an alkyl group having 1 to 20 carbon atoms, an alkyl group substituted with an aryl group, or an aryl group having 6 to 20 carbon atoms Or a cycloalkyl group having 3 to 20 carbon atoms.
R72為碳原子數1~5之伸烷基。R73為碳原子數1~4之烷基。W為單鍵或碳數為1~10之不具氟原子的2價有機基。k4為6~30之整數)。 R 72 is an alkylene group having 1 to 5 carbon atoms. R 73 is an alkyl group having 1 to 4 carbon atoms. W is a single bond or a divalent organic group having 1 to 10 carbon atoms without a fluorine atom. k4 is an integer from 6 to 30).
其他,可因應期望之組成,適當選擇公知的單體及反應,藉以獲得具有氟原子之側鏈及封端異氰酸酯基且因應需求具有酸性基、乙烯性雙鍵、羥基及聚氧伸烷基的聚合物(C2)。 In addition, according to the desired composition, well-known monomers and reactions can be appropriately selected to obtain fluorine-containing side chains and blocked isocyanate groups, and acidic groups, ethylenic double bonds, hydroxyl groups, and polyoxyalkylene groups as required. Polymer (C2).
另外,此時,宜以可使聚合物(C2)中之氟原子及封端異氰酸酯基之含量成為上述理想範圍的方式,來適當調整所用單體的摻混比例。 In addition, in this case, it is preferable to appropriately adjust the blending ratio of the monomers used in such a manner that the content of the fluorine atom and the blocked isocyanate group in the polymer (C2) becomes the above-mentioned desirable range.
聚合物(C2)之主鏈係由-Ph-CH2-之重複單元構成的酚醛型主鏈時,通常是以在構成主鏈之苯骨架(Ph)上具有具氟原子之側鏈及具封端異氰酸酯基之側鏈並任意鍵結有具有酸性基之基、具有乙烯性雙鍵之基及氧伸烷基等的聚合物作為聚合物(C2)使用。上述具有氟原子之側鏈理想為具有可含有醚性氧原子之氟烷基及/或可含有醚性氧原子之氟烷基的側鏈。有關酸性基、具有乙烯性雙鍵之 基、氧伸烷基等,可舉與上述說明具有藉由具乙烯性雙鍵單體聚合而製得之主鏈的聚合物(C2)之情況相同之物。 When the main chain of the polymer (C2) is a phenolic main chain composed of repeating units of -Ph-CH 2- , it is usually a side chain having a fluorine atom on a benzene skeleton (Ph) constituting the main chain and a A polymer having a side chain of an isocyanate group blocked and optionally bonded with a group having an acidic group, a group having an ethylenic double bond, and an oxyalkylene group is used as the polymer (C2). The side chain having a fluorine atom is preferably a side chain having a fluoroalkyl group which may contain an etheric oxygen atom and / or a fluoroalkyl group which may contain an etheric oxygen atom. Examples of the acidic group, the group having an ethylenic double bond, and the oxyalkylene group are the same as those described above for the polymer (C2) having a main chain prepared by polymerizing an ethylenic double bond monomer Thing.
另外,在此情況下,同樣宜以可使聚合物(C2)中之氟原子及封端異氰酸酯基之含量成為上述理想範圍的方式,將聚合物(C2)作分子設計。 In addition, in this case, it is also preferable to design the polymer (C2) as a molecule so that the content of the fluorine atom and the blocked isocyanate group in the polymer (C2) becomes the above-mentioned desirable range.
此種聚合物(C2)可藉由讓已於苯骨架預先導入上述各基之單體進行聚合來製造,或可藉由於製得具有反應部位、具體為羥基、胺基、巰基、磺酸基、羧酸基、羰基、乙烯性雙鍵等之聚合物後使合適化合物對該反應部位進行反應的改質方法,將上述各基導入聚合物。 Such a polymer (C2) can be produced by polymerizing a monomer having the above-mentioned groups introduced into the benzene skeleton in advance, or can be produced by preparing a reaction site, specifically a hydroxyl group, an amine group, a thiol group, and a sulfonic acid group. A modification method in which a polymer such as a carboxylic acid group, a carbonyl group, an ethylenic double bond, and the like is used to react the reaction site with an appropriate compound, and the aforementioned groups are introduced into the polymer.
[負型感光性樹脂組成物] [Negative photosensitive resin composition]
本發明之負型感光性樹脂組成物含有具光硬化性之鹼可溶性樹脂(以下亦稱樹脂(AP))或具光硬化性之鹼可溶性單體(以下亦稱單體(AM))、光聚合引發劑及上述撥墨劑(C)。本發明之負型感光性樹脂組成物藉由含有撥墨劑(C)作為撥墨劑,可使貯藏穩定性良好,且使用其製成隔壁時,隔壁上表面具有優異的撥墨性,且開口部具有良好的親墨性。 The negative photosensitive resin composition of the present invention contains a photo-curable alkali-soluble resin (hereinafter also referred to as resin (AP)) or a photo-curable alkali-soluble monomer (hereinafter also referred to as monomer (AM)), Polymerization initiator and the ink repellent (C). By containing the ink repellent (C) as the ink repellent, the negative photosensitive resin composition of the present invention can have good storage stability, and when it is made into a partition wall, the upper surface of the partition wall has excellent ink repellency, and The opening has good ink affinity.
本發明之負型感光性樹脂組成物更可因應需求含有黑色著色劑、交聯劑、溶劑及其他任意成分。 The negative-type photosensitive resin composition of the present invention may further contain a black colorant, a cross-linking agent, a solvent, and other optional components as required.
以下,將針對本發明之負型感光性樹脂組成物含有的各成分加以說明。 Hereinafter, each component contained in the negative photosensitive resin composition of this invention is demonstrated.
就樹脂(AP)而言,以1分子中具有酸性基及乙烯性雙鍵之感光性樹脂為佳。由於樹脂(AP)於分子中具有乙 烯性雙鍵,所以負型感光性樹脂組成物的曝光部會藉由自光聚合引發劑產生之自由基進行聚合而硬化。 The resin (AP) is preferably a photosensitive resin having an acidic group and an ethylenic double bond in one molecule. Since the resin (AP) has B in the molecule Since the ethylenic double bond is used, the exposed portion of the negative photosensitive resin composition is polymerized and cured by radicals generated from the photopolymerization initiator.
以此方式硬化而成的曝光部無法被鹼顯影液去除。又,因樹脂(AP)於分子中具有酸性基,故可以鹼顯影液選擇性地去除未硬化之負型感光性樹脂組成物的非曝光部。於是,便可將硬化膜製成為將預定區域劃分成多數個分區之形狀的隔壁形態。 The exposed portion hardened in this way cannot be removed by the alkali developer. In addition, since the resin (AP) has an acidic group in the molecule, the non-exposed portion of the non-cured negative photosensitive resin composition can be selectively removed by an alkali developer. Thus, the cured film can be made into a partition shape having a predetermined area divided into a plurality of partitions.
酸性基可舉如羧基、酚性羥基、磺酸基及磷酸基等,該等可單獨使用1種亦可將2種以上併用。 Examples of the acidic group include a carboxyl group, a phenolic hydroxyl group, a sulfonic acid group, and a phosphate group. These may be used alone or in combination of two or more.
乙烯性雙鍵可舉如(甲基)丙烯醯基、烯丙基、乙烯基、乙烯氧基及乙烯氧基烷基等具有加成聚合性之雙鍵。該等可單獨使用1種亦可將2種以上併用。另外,乙烯性雙鍵具有之氫原子的一部分或全部亦可被甲基等烷基取代。 Examples of ethylenic double bonds include addition-polymerizable double bonds such as (meth) acrylfluorenyl, allyl, vinyl, vinyloxy, and vinyloxyalkyl. These may be used individually by 1 type, and may use 2 or more types together. Moreover, a part or all of the hydrogen atoms which an ethylenic double bond has may be substituted by the alkyl group, such as a methyl group.
就樹脂(AP)而言,可舉如具有具酸性基之側鏈與具乙烯性雙鍵之側鏈的樹脂(AP-1)、及於環氧樹脂中已導入酸性基及乙烯性雙鍵的樹脂(AP-2)等。該等可單獨使用1種亦可將2種以上併用。 Examples of the resin (AP) include a resin (AP-1) having a side chain having an acidic group and a side chain having an ethylene-based double bond, and an acidic group and an ethylene-based double bond introduced into an epoxy resin. Resin (AP-2) and so on. These may be used individually by 1 type, and may use 2 or more types together.
就樹脂(AP-1)而言,可舉如具有具酸性基之側鏈與具乙烯性雙鍵之側鏈的乙烯基樹脂等。 Examples of the resin (AP-1) include a vinyl resin having a side chain having an acidic group and a side chain having an ethylene-based double bond.
就樹脂(AP-2)而言,可舉如使環氧樹脂與具有羧基及乙烯性雙鍵之化合物進行反應後,再使其與多元羧酸或其酐反應所得之樹脂等。使用之環氧樹脂並無特別限定,可使用作為負型感光性樹脂之主鏈使用之習知的公知環氧樹脂例如國際公開第2010/013816號等所記載之環氧 樹脂。 The resin (AP-2) includes a resin obtained by reacting an epoxy resin with a compound having a carboxyl group and an ethylenic double bond, and then reacting it with a polycarboxylic acid or an anhydride thereof. The epoxy resin to be used is not particularly limited, and a conventionally known epoxy resin used as the main chain of a negative photosensitive resin can be used, such as the epoxy described in International Publication No. 2010/013816 and the like. Resin.
又,就樹脂(AP)而言,以酸價為10~300mgKOH/g者為佳,且以30~150mgKOH/g者尤佳。又,數量平均分子量(Mn)以5×102~2×104為佳,2×103~1.5×104尤佳。又,質量平均分子量(Mw)以1×103~4×104為佳,3×103~2×104尤佳。 As for the resin (AP), the acid value is preferably from 10 to 300 mgKOH / g, and particularly from 30 to 150 mgKOH / g. The number average molecular weight (Mn) is preferably 5 × 10 2 to 2 × 10 4, and particularly preferably 2 × 10 3 to 1.5 × 10 4 . The mass average molecular weight (Mw) is preferably 1 × 10 3 to 4 × 10 4, and particularly preferably 3 × 10 3 to 2 × 10 4 .
在顯影時可抑制硬化膜剝離而獲得高解析度之點圖案方面、點為直線狀時的圖案直線性良好方面、及容易獲得平滑的硬化膜表面方面,樹脂(AP)宜使用樹脂(AP-2)。 Resin (AP) should preferably be used for the resin (AP-) in that it can suppress the peeling of the cured film to obtain a high-resolution dot pattern during development, that the pattern is straight when the dots are straight, and that the smooth cured film surface is easy to obtain 2).
就單體(AM)來說,例如適合使用具有酸性基及乙烯性雙鍵之單體(AM-1)。酸性基及乙烯性雙鍵與樹脂(AP)相同。有關單體(AM)之酸價亦以與樹脂(AP)同樣的範圍為佳。 As the monomer (AM), for example, a monomer (AM-1) having an acidic group and an ethylenic double bond is suitably used. The acidic group and the ethylenic double bond are the same as those of the resin (AP). The acid value of the monomer (AM) is preferably in the same range as the resin (AP).
單體(AM-1)可舉如2,2,2-三丙烯醯氧基甲基乙基鄰苯二甲酸等。 Examples of the monomer (AM-1) include 2,2,2-tripropenyloxymethylethyl phthalic acid and the like.
負型感光性樹脂組成物中所含樹脂(AP)及單體(AM)分別可單獨使用1種亦可將2種以上併用。 The resin (AP) and the monomer (AM) contained in the negative photosensitive resin composition may be used singly or in combination of two or more kinds.
負型感光性樹脂組成物之總固體成分中樹脂(AP)之含有比例及單體(AM)之含有比例分別以5~80質量%為佳。負型感光性樹脂組成物不含後述之黑色著色劑時,其含量以30~70質量%尤佳。負型感光性樹脂組成物具有後述之黑色著色劑時,其含量則以10~60質量%尤佳。含有比例若在上述範圍,負型感光性樹脂組成物之光硬化性及顯影性即佳。 The content ratio of the resin (AP) and the monomer (AM) in the total solid content of the negative photosensitive resin composition are preferably 5 to 80% by mass, respectively. When the negative photosensitive resin composition does not contain a black colorant described later, its content is preferably 30 to 70% by mass. When the negative photosensitive resin composition has a black colorant described later, the content thereof is particularly preferably 10 to 60% by mass. If the content ratio is within the above range, the photo-curability and developability of the negative photosensitive resin composition are better.
(光聚合引發劑) (Photopolymerization initiator)
本發明之光聚合引發劑只要是具有作為光聚合引發劑之機能的化合物即無特別限制,以可藉由光產生自由基之化合物為佳。 The photopolymerization initiator of the present invention is not particularly limited as long as it is a compound having a function as a photopolymerization initiator, and a compound capable of generating a radical by light is preferred.
就光聚合引發劑可舉如歸類為α-二酮類、醯偶姻類、醯偶姻醚類、9-氧硫類、二苯基酮類、苯乙酮類、醌類、胺基苯甲酸類、過氧化物、肟酯類、脂肪族胺類等的各種化合物。 As for the photopolymerization initiator, it can be classified into α-diketones, saponins, saponins, 9-oxosulfur, etc. Compounds, such as diphenyl ketones, acetophenones, quinones, aminobenzoic acids, peroxides, oxime esters, and aliphatic amines.
光聚合引發劑中,又以二苯基酮類、胺基苯甲酸類及脂肪族胺類在與其他自由基引發劑共同使用時可顯現增感效果,較為理想。 Among the photopolymerization initiators, diphenyl ketones, aminobenzoic acids, and aliphatic amines can exhibit a sensitizing effect when used together with other free radical initiators, which is ideal.
光聚合引發劑以下述為佳:歸類為苯乙酮類之2-甲基-1-[4-(甲硫基)苯基]-2-N-啉基丙-1-酮、2-苯甲基-2-二甲基胺基-1-(4-N-啉基苯基)-丁-1-酮;歸類為肟酯類之1,2-辛二酮,1-[4-(苯硫基)-,2-(O-苯甲醯基肟)、乙酮1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯肟);及歸類為9-氧硫類之2,4-二乙基9-氧硫。此外又以該等與二苯基酮類例如4,4’-雙(二乙胺基)二苯基酮之組合尤佳。 The photopolymerization initiator is preferably the following: 2-methyl-1- [4- (methylthio) phenyl] -2-N- classified as acetophenone Phenylpropan-1-one, 2-benzyl-2-dimethylamino-1- (4-N- (Phenylphenyl) -butan-1-one; 1,2-octanedione classified as oxime esters, 1- [4- (phenylthio)-, 2- (O-benzylidene oxime) , Ethyl ketone 1- [9-ethyl-6- (2-methylbenzylidene) -9H-carbazol-3-yl] -1- (O-acetamoxime); and classified as 9- Oxygen sulfur 2,4-diethyl 9-oxosulfur . In addition, combinations of these with diphenyl ketones such as 4,4'-bis (diethylamino) diphenyl ketone are particularly preferred.
光聚合引發劑可單獨使用1種亦可將2種以上併用。 The photopolymerization initiator may be used alone or in combination of two or more.
負型感光性樹脂組成物之總固體成分中的光聚合引發劑含有比例以0.1~50質量%為佳,0.5~30質量%較佳。負型感光性樹脂組成物不含後述黑色著色劑時,其含量以5~15質量%尤佳。負型感光性樹脂組成物含有後述 之黑色著色劑時,其含量則以2~12質量%尤佳。含有比例若在上述範圍,負型感光性樹脂組成物之光硬化性及顯影性即佳。 The content ratio of the photopolymerization initiator in the total solid content of the negative photosensitive resin composition is preferably 0.1 to 50% by mass, and more preferably 0.5 to 30% by mass. When the negative photosensitive resin composition does not contain the black colorant mentioned later, its content is particularly preferably 5 to 15% by mass. Negative photosensitive resin composition contains to be described later In the case of black colorants, the content is preferably 2 to 12% by mass. If the content ratio is within the above range, the photo-curability and developability of the negative photosensitive resin composition are better.
(撥墨劑(C)) (Ink Repellent (C))
本發明之撥墨劑(C)具有可在使用感光性樹脂組成物形成隔壁之過程中充分移行至上表面並對所得隔壁上表面賦予良好之撥墨性的機能。另一方面,在使撥墨劑(C)含於感光性樹脂組成物中作貯藏時,可提升貯藏穩定性。此外,藉由在使用時以加熱去封端而成異氰酸酯基,可提升撥墨劑(C)之反應性,進而可提升與其他成分或其他材料的結合性及密著性。藉此,可在隔壁圍起之開口部抑制感光性樹脂組成物之殘渣阻礙印墨的濕潤擴散性,使親墨性良好。 The ink-repellent agent (C) of the present invention has a function of sufficiently migrating to the upper surface during formation of the partition wall using the photosensitive resin composition and imparting good ink-repellency to the obtained upper surface of the partition wall. On the other hand, when the ink repellent (C) is contained in the photosensitive resin composition for storage, storage stability can be improved. In addition, the isocyanate group is formed by deblocking by heating during use, which can improve the reactivity of the ink repellent (C), and further improve the binding and adhesion with other ingredients or other materials. Thereby, the residue of the photosensitive resin composition can be suppressed in the opening part enclosed by the partition wall from interfering with the wet diffusion property of the printing ink, and the ink affinity is good.
負型感光性樹脂組成物之總固體成分中的撥墨劑(C)含有比例以0.01~15質量%為佳,0.01~5質量%較佳,0.03~1.5質量%尤佳。含有比例若在上述範圍之下限值以上,由負型感光性樹脂組成物形成之硬化膜的上表面便具有優異的撥墨性。若在上述範圍之上限值以下,硬化膜與基板之密著性即佳。 The content of the ink repellent (C) in the total solid content of the negative photosensitive resin composition is preferably 0.01 to 15% by mass, more preferably 0.01 to 5% by mass, and even more preferably 0.03 to 1.5% by mass. If the content ratio is above the lower limit of the above range, the upper surface of the cured film formed of the negative photosensitive resin composition will have excellent ink repellency. When it is below the upper limit of the above range, the adhesion between the cured film and the substrate is good.
(黑色著色劑) (Black colorant)
本發明之負型用感光性組成物在因應用途而欲賦予隔壁遮光性時,會含有黑色著色劑。之前,於含有習知撥墨劑之負型用感光性組成物中摻混著色劑時,隔壁上表面的撥墨性即變得不夠充分,或讓開口部之親墨性變不足。藉 由使用本發明之撥墨劑(C),即使摻混有著色劑,也不會產生上述問題,可兼顧隔壁上表面的良好撥墨性及開口部的親墨性。 The negative-type photosensitive composition of the present invention contains a black colorant when it is desired to impart light-shielding properties to the partition wall depending on the application. Previously, when a coloring agent was blended in a negative photosensitive composition containing a conventional ink repellent, the ink repellency of the upper surface of the partition wall became insufficient, or the ink affinity of the openings became insufficient. borrow By using the ink repellent agent (C) of the present invention, even if a colorant is blended, the above-mentioned problem does not occur, and the good ink repellency of the upper surface of the partition wall and the ink affinity of the opening can be taken into consideration.
尤其,以前將主鏈為烴鏈且具有含氟原子之側鏈的聚合物作為撥墨劑時,一旦使用含有著色劑之負型用感光性組成物來製作隔壁,開口部之親墨性多半稱不上充分。若使用聚合物(C2)作為本發明之撥墨劑(C)來調製負型用感光性組成物,便可解決該開口部的親墨性問題,可製得具有充分親墨性之開口部及上表面具有充分撥墨性之隔壁。 In particular, when a polymer having a hydrocarbon chain as a main chain and a fluorine atom-containing side chain was used as an ink repellent, once a negative-type photosensitive composition containing a colorant is used to make a partition, the ink affinity of the opening portion is mostly Not enough. If the polymer (C2) is used as the ink repellent (C) of the present invention to prepare a negative-type photosensitive composition, the problem of ink affinity of the opening portion can be solved, and an opening portion having sufficient ink affinity can be obtained. And the upper surface has a sufficient ink repellent partition.
就黑色著色劑而言,可舉如碳黑、苯胺黑、蒽醌系黑色顏料、苝系黑色顏料,具體上如C.I.顏料黑1、6、7、12、20、31等。就黑色著色劑來說,亦可使用紅色顏料、藍色顏料、綠色顏料、黃色顏料等有機顏料或無機顏料之混合物。有機顏料之具體例可舉如C.I.顏料藍15:6、顏料紅254、顏料綠36、顏料黃150、甲亞胺系顏料等。作為黑色著色劑,從電性特性的觀點來看以有機顏料為佳,從價格及遮光性的觀點來看則以碳黑為佳。碳黑以業經樹脂等進行表面處理為佳,又,為了調整色調,可併用藍色顏料或紫色顏料。 Examples of the black colorant include carbon black, aniline black, anthraquinone-based black pigment, and fluorene-based black pigment, and specifically, C.I. Pigment Black 1, 6, 7, 12, 20, 31, and the like. As for the black colorant, a mixture of organic pigments such as red pigments, blue pigments, green pigments, and yellow pigments or inorganic pigments can also be used. Specific examples of the organic pigments include C.I. Pigment Blue 15: 6, Pigment Red 254, Pigment Green 36, Pigment Yellow 150, and imine-based pigments. As the black colorant, an organic pigment is preferred from the viewpoint of electrical properties, and carbon black is preferred from the viewpoint of price and light-shielding properties. Carbon black is preferably subjected to a surface treatment through a resin or the like, and in order to adjust the color tone, a blue pigment or a purple pigment may be used in combination.
作為有機顏料,從黑矩陣形狀之觀點來看以利用BET法之比表面積為50~200m2/g者為佳。比表面積若在50m2/g以上,黑矩陣形狀就不易劣化。若在200m2/g以下,於有機顏料就不會過度吸附分散助劑,也無須為了顯現諸物性而摻混多量的分散助劑。 As the organic pigment, from the viewpoint of the shape of the black matrix, it is preferable that the specific surface area by the BET method is 50 to 200 m 2 / g. When the specific surface area is 50 m 2 / g or more, the shape of the black matrix is not easily deteriorated. If it is 200 m 2 / g or less, the organic pigment will not be excessively adsorbed on the dispersing aid, and it is not necessary to mix a large amount of the dispersing aid in order to develop various physical properties.
又,有機顏料在穿透型電子顯微鏡觀察下的平均1次粒徑宜為20~150nm。平均1次粒徑若在20nm以上,便可高濃度分散在負型用感光性組成物中,進而容易獲得經時穩定性良好的負型用感光性組成物。若在150nm以下,隔壁形狀便難以劣化。又,在穿透型電子顯微鏡觀察下的平均2次粒徑則以80~200nm為佳。 The average primary particle diameter of the organic pigment under observation with a transmission electron microscope is preferably 20 to 150 nm. If the average primary particle diameter is 20 nm or more, it can be dispersed in the photosensitive composition for negative type at a high concentration, and further, it is easy to obtain a photosensitive composition for negative type with good stability over time. If it is 150 nm or less, the shape of the partition wall is difficult to deteriorate. In addition, the average secondary particle diameter under observation by a transmission electron microscope is preferably 80 to 200 nm.
負型用感光性組成物之總固體成分中的黑色著色劑含有比例以20~65質量%為佳,25~60質量%較佳,30~60質量%尤佳。含有比例若在上述範圍之下限值以上,光學濃度即充分,該光學濃度係表示所得隔壁的光遮光性之值。若在上述範圍之上限值以下,負型用感光性組成物之硬化性即佳,可製得良好外觀的硬化膜,撥墨性亦佳。 The content of the black colorant in the total solid content of the negative-type photosensitive composition is preferably 20 to 65% by mass, more preferably 25 to 60% by mass, and even more preferably 30 to 60% by mass. If the content ratio is above the lower limit of the above range, the optical density is sufficient, and the optical density is a value representing the light-shielding property of the obtained partition wall. If it is below the upper limit of the above range, the curability of the negative photosensitive composition is good, a cured film with a good appearance can be obtained, and the ink repellency is also good.
為了提升黑色著色劑在負型用感光性組成物中的分散性,宜使其含有鹼性高分子分散劑或酸性高分子分散劑。該鹼性高分子分散劑之胺價宜為10~100mgKOH/g,且以30~70mgKOH/g尤佳。該酸性高分子分散劑之酸價宜為30~150mgKOH/g,且以50~100mgKOH/g尤佳。從對於黑色著色劑之親和性的觀點來看,該高分子分散劑以具有鹼性官能基之化合物為佳。就該鹼性官能基而言,若具有1級、2級或是3級胺基,分散性尤佳。 In order to improve the dispersibility of the black colorant in the negative-type photosensitive composition, it is preferable to include a basic polymer dispersant or an acidic polymer dispersant. The amine value of the basic polymer dispersant is preferably 10 to 100 mgKOH / g, and more preferably 30 to 70 mgKOH / g. The acid value of the acidic polymer dispersant is preferably 30 to 150 mgKOH / g, and more preferably 50 to 100 mgKOH / g. From the standpoint of affinity for a black colorant, the polymer dispersant is preferably a compound having a basic functional group. As for this basic functional group, if it has a primary, secondary, or tertiary amine group, dispersibility is particularly good.
高分子分散劑可舉如胺甲酸乙酯系、聚醯亞胺系、醇酸系、環氧系、不飽和聚酯系、三聚氰胺系、苯酚系、丙 烯酸系、氯乙烯系、氯乙烯乙酸乙烯系共聚物系、聚醯胺系、聚碳酸酯系等化合物。其中尤以胺甲酸乙酯系、聚酯系的化合物為佳。 Examples of the polymer dispersant include urethane-based, polyimide-based, alkyd-based, epoxy-based, unsaturated polyester-based, melamine-based, phenol-based, and acrylic Compounds such as enoic acid-based, vinyl chloride-based, vinyl chloride-vinyl acetate-based copolymer, polyamide-based, and polycarbonate-based. Among them, urethane-based and polyester-based compounds are particularly preferred.
高分子分散劑之使用量宜相對於黑色著色劑為5~30重量%,且以10~25重量%尤佳。使用量若在上述範圍之下限值以上,黑色著色劑之分散即佳;若在上述範圍之上限值以下,顯影性即佳。 The amount of the polymer dispersant is preferably 5 to 30% by weight, and more preferably 10 to 25% by weight relative to the black colorant. If the amount used is above the lower limit of the above range, the dispersion of the black colorant is better; if it is below the upper limit of the above range, the developability is better.
(交聯劑) (Crosslinking agent)
本發明之負型感光性樹脂組成物任意含有之交聯劑係1分子中具有2個以上乙烯性雙鍵且不具酸性基的化合物。藉由使負型感光性樹脂組成物含有交聯劑,可提升曝光時負型感光性樹脂組成物之硬化性,在低曝光量下也可以形成硬化膜。 The crosslinking agent arbitrarily contained in the negative photosensitive resin composition of the present invention is a compound having two or more ethylenic double bonds in one molecule and having no acidic group. When the negative photosensitive resin composition contains a cross-linking agent, the curability of the negative photosensitive resin composition during exposure can be improved, and a cured film can be formed even at a low exposure.
就交聯劑而言,可舉WO2014/046209中例如段落[0137]所記載者等。 Examples of the cross-linking agent include those described in paragraph [0137] of WO2014 / 046209.
從光反應性的觀點來看,宜具有多數個乙烯性雙鍵。例如,以新戊四醇四(甲基)丙烯酸酯、二三羥甲基丙烷四(甲基)丙烯酸酯、二新戊四醇六(甲基)丙烯酸酯、二新戊四醇五(甲基)丙烯酸酯、乙氧化異三聚氰酸三(甲基)丙烯酸酯及胺甲酸乙酯丙烯酸酯等為佳。 From the viewpoint of photoreactivity, it is preferable to have a plurality of vinylic double bonds. For example, neopentaerythritol tetra (meth) acrylate, ditrimethylolpropane tetra (meth) acrylate, dinepentaerythritol hexa (meth) acrylate, dinepentaerythritol penta (methyl) Base) acrylate, ethoxylated isotricyanate tri (meth) acrylate, and urethane acrylate are preferred.
交聯劑可單獨使用1種亦可將2種以上併用。 The crosslinking agent may be used singly or in combination of two or more kinds.
負型感光性樹脂組成物之總固體成分中的交聯劑含有比例宜為10~60質量%。負型感光性樹脂組成物不含黑色著色劑時,其含量以20~55質量%尤佳。負型感光 性樹脂組成物含有黑色著色劑時,其含量則以5~50質量%尤佳。 The content of the crosslinking agent in the total solid content of the negative photosensitive resin composition is preferably 10 to 60% by mass. When the negative photosensitive resin composition does not contain a black colorant, its content is preferably 20 to 55 mass%. Negative When the resin composition contains a black colorant, its content is particularly preferably 5 to 50% by mass.
(溶劑) (Solvent)
本發明之負型感光性樹脂組成物因含有溶劑所以黏度減低,從而可輕易地將負型感光性樹脂組成物塗佈到基板表面。於是,可形成均勻膜厚的負型感光性樹脂組成物之塗膜。 Since the negative photosensitive resin composition of the present invention contains a solvent, the viscosity is reduced, so that the negative photosensitive resin composition can be easily applied to the substrate surface. Accordingly, a coating film of a negative photosensitive resin composition having a uniform film thickness can be formed.
溶劑(F)可使用公知溶劑。溶劑可單獨使用1種亦可將2種以上併用。 As the solvent (F), a known solvent can be used. The solvents may be used singly or in combination of two or more kinds.
就溶劑來說,可舉如伸烷基二醇烷基醚類、伸烷基二醇烷基醚乙酸酯類、醇類、溶劑油類等。其中又以選自於由伸烷基二醇烷基醚類、伸烷基二醇烷基醚乙酸酯類及醇類所構成群組中之至少1種溶劑為佳,且以選自於由丙二醇單甲基醚乙酸酯、丙二醇單甲基醚、二乙二醇乙基甲基醚及2-丙醇所構成群組中之至少1種溶劑更佳。 Examples of the solvent include alkylene glycol alkyl ethers, alkylene glycol alkyl ether acetates, alcohols, and solvent oils. Among them, at least one solvent selected from the group consisting of alkylene glycol alkyl ethers, alkylene glycol alkyl ether acetates, and alcohols is preferred, and at least one solvent selected from the group consisting of propylene glycol At least one solvent in the group consisting of monomethyl ether acetate, propylene glycol monomethyl ether, diethylene glycol ethyl methyl ether, and 2-propanol is more preferable.
相對於組成物總量,負型感光性樹脂組成物中的溶劑含有比例宜為50~99質量%,60~95質量%較佳,65~90質量%尤佳。 The solvent content in the negative photosensitive resin composition is preferably 50 to 99% by mass, more preferably 60 to 95% by mass, and most preferably 65 to 90% by mass relative to the total amount of the composition.
(其他成分) (Other ingredients)
本發明之負型感光性樹脂組成物更可因應需求含有1種或2種以上其他添加劑如熱交聯劑、分散助劑、矽烷耦合劑、微粒子(填料)、磷酸化合物、硬化促進劑、增稠劑、可塑劑、消泡劑、調平劑、抗收縮劑及紫外線吸收劑等。 The negative photosensitive resin composition of the present invention may further contain one or two or more other additives such as a thermal crosslinking agent, a dispersing aid, a silane coupling agent, fine particles (fillers), a phosphoric acid compound, a hardening accelerator, Thickener, plasticizer, defoamer, leveling agent, anti-shrinking agent and UV absorber.
本發明之負型感光性樹脂組成物係將上述各成分之預定量混合而製得。 The negative-type photosensitive resin composition of the present invention is prepared by mixing predetermined amounts of the aforementioned components.
本發明之負型感光性樹脂組成物因為含有已改善貯藏穩定性的撥墨劑(C),所以具有良好的貯藏穩定性。只要使用本發明之負型感光性樹脂組成物,所得隔壁於上表面便具有良好的撥墨性,同時隔壁圍起之開口部亦具有良好的親墨性。 Since the negative photosensitive resin composition of the present invention contains the ink repellent (C) having improved storage stability, it has good storage stability. As long as the negative photosensitive resin composition of the present invention is used, the obtained partition wall has good ink repellency on the upper surface, and the opening portion surrounded by the partition wall also has good ink affinity.
[隔壁] [next door]
本發明之隔壁係形成為將基板表面劃分成多數個點形成用分區之形狀、並且由上述本發明之負型感光性樹脂組成物之硬化物所構成的隔壁。隔壁例如可於基板等基板表面塗佈本發明之負型感光性樹脂組成物,因應需求使其乾燥將溶劑等去除後,對成為點形成用分區的部分施予遮罩,予以曝光後顯影再加熱而製得。 The partition wall of the present invention is formed as a partition that divides the surface of the substrate into a plurality of dot-forming partitions, and is formed of the cured product of the negative photosensitive resin composition of the present invention. The partition wall can be coated on the surface of a substrate such as a substrate with the negative photosensitive resin composition of the present invention, dried if necessary to remove the solvent, etc., and then a mask is applied to the portion forming the dot-forming partition, which is developed after exposure. Prepared by heating.
藉由顯影,可去除因遮罩而未曝光之部分並連同隔壁一起形成與點形成用分區相對應之開口部。在隔壁形成之際,負型感光性樹脂組成物所含之撥墨劑(C)會移行至上表面而以高濃度存於隔壁上層的撥墨層中。進而,藉由加熱讓撥墨劑(C)之封端異氰酸酯基去封端成為異氰酸酯基,便可牢固地固定於撥墨層。另外,即使無法藉由顯影徹底去除非曝光部分而有部分殘留於開口部,撥墨劑(C)還是會固定化在基板表面,可確保開口部的親墨性。 By developing, the unexposed portion due to the mask can be removed, and an opening portion corresponding to the dot formation section can be formed together with the partition wall. When the partition wall is formed, the ink repellent (C) contained in the negative photosensitive resin composition migrates to the upper surface and is stored in the ink repellent layer on the upper layer of the partition at a high concentration. Furthermore, the blocked isocyanate group of the ink repellent (C) can be unblocked to become an isocyanate group by heating, and it can be firmly fixed to the ink repellent layer. In addition, even if the non-exposed portion cannot be completely removed by development and remains in the opening portion, the ink repellent (C) is still fixed on the surface of the substrate, and the ink affinity of the opening portion can be ensured.
因此,就形成本發明之隔壁的基板來說,至少形成隔壁之表面宜具有與異氰酸酯基具反應性之官能基如 羥基、胺基、羧基、巰基等。因為讓形成隔壁之基板表面具有與異氰酸酯基具反應性之官能基,則在開口部可提升基板表面與撥墨劑(C)之密著性,即使於開口部具有感光性樹脂組成物之殘渣,還是可確保開口部之親墨性。 Therefore, for the substrate forming the partition wall of the present invention, at least the surface on which the partition wall is formed should have a functional group reactive with the isocyanate group such as Hydroxyl, amine, carboxyl, mercapto and the like. Because the surface of the substrate forming the partition wall has a functional group reactive with the isocyanate group, the adhesion between the substrate surface and the ink repellent (C) can be improved in the opening portion, and even if there is a residue of the photosensitive resin composition in the opening portion , Can still ensure the ink affinity of the opening.
構成上述具有與異氰酸酯基具反應性之官能基之表面的材料,具體上可舉如玻璃、金屬氧化物、有機膜等。金屬氧化物可舉如摻錫氧化銦(ITO)、摻銻氧化錫(ATO)、摻氟氧化錫(FTO)、摻鋁氧化鋅(AZO)、摻鎵氧化鋅(GZO)等。又,例如金屬電極之表面等具有形成有金屬氧化物之表面的情況,亦可包含在上述具有與異氰酸酯基具反應性之官能基的表面。 Specific examples of the material constituting the surface having the functional group reactive with the isocyanate group include glass, metal oxides, and organic films. Examples of the metal oxide include tin-doped indium oxide (ITO), antimony-doped tin oxide (ATO), fluorine-doped tin oxide (FTO), aluminum-doped zinc oxide (AZO), gallium-doped zinc oxide (GZO), and the like. In addition, for example, when a surface having a metal oxide is formed on the surface of a metal electrode, the surface may have a surface having a functional group reactive with an isocyanate group.
以下,使用圖1A~1D來說明本發明實施形態之隔壁製造方法之一例,惟隔壁之製造方法不受以下限定。而,以下之製造方法係以負型感光性樹脂組成物含有溶劑(F)者進行說明。 Hereinafter, an example of a method for manufacturing a partition wall according to an embodiment of the present invention will be described with reference to FIGS. 1A to 1D. However, the method for manufacturing a partition wall is not limited to the following. In addition, the following manufacturing method is demonstrated using the negative photosensitive resin composition containing a solvent (F).
如圖1A所示,於基板1之其中一主面整體塗佈負型感光性樹脂組成物,形成塗膜21。此時,撥墨劑(C)已於塗膜21中整體溶解且均勻分散。另外,圖1A中,撥墨劑(C)是呈示意性顯示,實際上並非以此種粒子形狀分布。 As shown in FIG. 1A, a negative photosensitive resin composition is entirely applied to one of the main surfaces of the substrate 1 to form a coating film 21. At this time, the ink repellent (C) has been completely dissolved and uniformly dispersed in the coating film 21. In addition, in FIG. 1A, the ink repellent (C) is shown schematically, but is not actually distributed in such a particle shape.
接下來,如圖1B所示,使塗膜21乾燥而製成乾燥膜22。就乾燥方法而言,可舉如加熱乾燥、減壓乾燥及減壓加熱乾燥等。雖依溶劑種類有所不同,但在加熱乾燥的情況下,加熱溫度以50~120℃為佳。加溫時間則以30 秒~5分鐘左右為佳。 Next, as shown in FIG. 1B, the coating film 21 is dried to form a dry film 22. Examples of the drying method include heating drying, drying under reduced pressure, and drying under reduced pressure. Although it varies according to the type of solvent, in the case of heating and drying, the heating temperature is preferably 50 to 120 ° C. Heating time is 30 seconds. About 5 to 5 minutes is preferred.
在此乾燥過程中,撥墨劑(C)會移行到乾燥膜之上層部。另外,即使負型感光性樹脂組成物不含溶劑,在塗膜內撥墨劑(C)同樣可達成上表面移行。 During this drying process, the ink repellent (C) will migrate to the upper part of the drying film. In addition, even if the negative photosensitive resin composition does not contain a solvent, the ink repellent (C) in the coating film can also achieve upper surface migration.
接下來,如圖1C所示,隔著光罩30對乾燥膜22照射光進行曝光,且該光罩30具有形狀與隔壁圍起之開口部相當的遮罩部31。使乾燥膜22曝光後之膜稱為曝光膜23。在曝光膜23中,曝光部23A是業已光硬化,非曝光部23B則與乾燥膜22為同樣狀態。 Next, as shown in FIG. 1C, the dry film 22 is exposed to light through a photomask 30, and the photomask 30 has a mask portion 31 having a shape corresponding to an opening portion surrounded by the partition wall. The film after exposing the dry film 22 is referred to as an exposure film 23. In the exposure film 23, the exposed portion 23A is already light-cured, and the non-exposed portion 23B is in the same state as the dry film 22.
就照射光來說,可舉如可見光;紫外線;遠紫外線;KrF準分子雷射光、ArF準分子雷射光、F2準分子雷射光、Kr2準分子雷射光、KrAr準分子雷射光及Ar2準分子雷射光等準分子雷射光;X射線;電子射線等。 In terms of irradiation light, there can be mentioned visible light; ultraviolet light; far ultraviolet light; KrF excimer laser light, ArF excimer laser light, F 2 excimer laser light, Kr 2 excimer laser light, KrAr excimer laser light, and Ar 2 Excimer laser light and other excimer laser light; X-rays; electron rays and so on.
照射光以波長100~600nm之光為佳,300~500nm之光較佳,且以含有i線(365nm)、h線(405nm)或g線(436nm)之光尤佳。又,亦可因應需求切掉330nm以下之光。 The irradiation light is preferably light having a wavelength of 100 to 600 nm, light of 300 to 500 nm is more preferable, and light containing i-line (365 nm), h-line (405 nm) or g-line (436 nm) is particularly preferable. It is also possible to cut off light below 330 nm as required.
就曝光方式來說,可舉如整面一齊曝光、掃描曝光等。針對同一處可分數次進行曝光。此時,數次之曝光條件可相同亦可不同。無論上述任一曝光方式,曝光量均以例如5~1,000mJ/cm2為佳,5~500mJ/cm2較佳,5~300mJ/cm2更佳。另外,曝光量可依據照射光的波長、負型感光性樹脂組成物之組成及塗膜厚度等適當最佳化。 As for the exposure method, the whole surface can be exposed simultaneously, scanning exposure, and the like. Expose multiple times for the same place. At this time, the exposure conditions for several times may be the same or different. Regardless of any of the above exposure methods, the exposure amount is preferably, for example, 5 to 1,000 mJ / cm 2 , 5 to 500 mJ / cm 2 is more preferable, and 5 to 300 mJ / cm 2 is more preferable. The exposure amount can be appropriately optimized depending on the wavelength of the irradiation light, the composition of the negative photosensitive resin composition, the thickness of the coating film, and the like.
每單位面積之曝光時間並無特別限制,可從使用之曝光裝置的曝光功率及所需曝光量等來設計。另外, 在掃描曝光的情況下,可從光的掃描速度求算曝光時間。每單位面積的曝光時間通常為1~60秒左右。 There is no particular limitation on the exposure time per unit area, and it can be designed from the exposure power and required exposure amount of the exposure device used. In addition, In the case of scanning exposure, the exposure time can be calculated from the scanning speed of light. The exposure time per unit area is usually about 1 to 60 seconds.
接下來,如圖1D所示,使用鹼顯影液進行顯影而形成隔壁4,該隔壁4係僅由與曝光膜23之曝光部23A相對應之部位所構成。被隔壁4圍起之開口部5是曝光膜23中曾經存有非曝光部23B的部位,圖1D係顯示經顯影去除非曝光部23B後的狀態。如同以上說明,非曝光部23B係在撥墨劑(C)已移行到上層部且其以下之層中幾乎不存有撥墨劑(C)的狀態下,藉由鹼顯影液而被溶解、去除,所以製得之隔壁的上表面具有良好的撥墨性。 Next, as shown in FIG. 1D, the partition wall 4 is formed by developing using an alkali developing solution, and the partition wall 4 is composed of only a portion corresponding to the exposure portion 23A of the exposure film 23. The opening 5 surrounded by the partition wall 4 is a part of the exposure film 23 where the non-exposed portion 23B was once stored. FIG. 1D shows a state where the non-exposed portion 23B is removed by development. As described above, the non-exposed portion 23B is dissolved with an alkali developer in a state where the ink repellent (C) has moved to the upper layer portion and the ink repellent (C) is hardly stored in the layer below it. It is removed, so the upper surface of the prepared partition wall has good ink repellency.
另外,在圖1D所示之隔壁4,其包含上表面之最上層為撥墨層4A。撥墨劑(C)不具有具乙烯性雙鍵之側鏈時,曝光之際撥墨劑(C)會直接以高濃度存於最上層而成為撥墨層。較詳細來說,曝光之際,存於撥墨劑(C)周邊的樹脂(AP)或單體(AM)甚至任意含有之該等以外的光硬化成分會牢固地光硬化,讓撥墨劑(C)固著於撥墨層。 In addition, in the partition wall 4 shown in FIG. 1D, the uppermost layer including the upper surface is an ink repellent layer 4A. When the ink-repellent agent (C) does not have a side chain having a vinylic double bond, the ink-repellent agent (C) is directly stored in the uppermost layer at a high concentration during exposure to become an ink-repellent layer. More specifically, at the time of exposure, the resin (AP) or monomer (AM) stored around the ink repellent (C) or even any light-hardening component other than these will be firmly light-cured, allowing the ink repellent (C) Fixed to the ink repellent layer.
撥墨劑(C)具有乙烯性雙鍵時,則是撥墨劑(C)彼此及/或與樹脂(AP)或單體(AM)以及其他光硬化成分一起光硬化而形成由撥墨劑(C)牢固地鍵結而成的撥墨層4A。 When the ink-repellent agent (C) has an ethylenic double bond, the ink-repellent agent (C) is photocured with each other and / or with the resin (AP) or monomer (AM) and other light-hardening components to form an ink-repellent agent. (C) The ink repellent layer 4A which is firmly bonded.
不論是上述任何情況,於撥墨層4A之下側均會形成一層4B,該層4B主要由樹脂(AP)或單體(AM)甚至任意含有之該等以外的光硬化成分光硬化而成且幾乎不含撥墨劑(C)。 In any of the above cases, a layer 4B will be formed below the ink repellent layer 4A. This layer 4B is mainly formed by light curing of resin (AP) or monomer (AM) or even light curing components other than these And almost no ink repellent (C).
顯影後,將隔壁4進一步加熱。加熱溫度係設為會讓撥墨劑(C)之封端異氰酸酯基去封端而生成異氰酸酯基之溫度以上。雖然依撥墨劑(C)具有之封端異氰酸酯基的種類會有所不同,不過加熱溫度大概可設為150~250℃,並以200~250℃為佳。加溫時間以20~70分鐘左右為佳。 After the development, the partition wall 4 is further heated. The heating temperature is set to be higher than the temperature at which the blocked isocyanate group of the ink repellent (C) is deblocked to generate an isocyanate group. Although the type of the blocked isocyanate group that the ink repellent (C) has is different, the heating temperature can be set to approximately 150 to 250 ° C, and preferably 200 to 250 ° C. The heating time is preferably about 20 to 70 minutes.
藉由加熱將撥墨劑(C)之封端異氰酸酯基去封端而成為異氰酸酯基,讓撥墨劑(C)更牢固地固著於撥墨層4A內。又,藉由加熱可讓隔壁4之硬化更為牢固。 The blocked isocyanate group of the ink repellent agent (C) is deblocked by heating to become an isocyanate group, so that the ink repellent agent (C) is more firmly fixed in the ink repellent layer 4A. Moreover, the hardening of the partition wall 4 can be made stronger by heating.
此外,有時無法藉由上述顯影徹底去除非曝光部分,會有少許且部分的非曝光部23B作為殘渣殘留於開口部。在此情況下還是可藉由業經去封端之異氰酸酯基的作用讓撥墨劑(C)固定化在基板表面,確保開口部的親墨性。 In addition, the non-exposed portion may not be completely removed by the above-mentioned development, and a small and partial portion of the non-exposed portion 23B may remain as a residue in the opening portion. In this case, the ink repellent (C) can be immobilized on the surface of the substrate by the action of the deblocked isocyanate group to ensure the ink affinity of the opening.
以上述方法製得之本發明之隔壁4即使在低曝光量下進行曝光,上表面還是具有良好的撥墨性。又,在隔壁4中於顯影、加熱後,開口部5之親水性良好,可充分確保印墨於開口部5的均勻塗敷性。 Even if the partition wall 4 of the present invention obtained by the above method is exposed at a low exposure amount, the upper surface has good ink repellency. In addition, after development and heating in the partition wall 4, the hydrophilic property of the opening portion 5 is good, and the uniform coating property of the ink on the opening portion 5 can be sufficiently ensured.
另外,為更確實獲得開口部5之親墨性,在上述加熱後亦可對附隔壁4之基板1施行紫外線/臭氧處理以去除可能存在於開口部5之負型感光性樹脂組成物的顯影殘渣等。 In addition, in order to obtain the ink affinity of the opening 5 more reliably, the substrate 1 with the partition wall 4 may be subjected to ultraviolet / ozone treatment after the above-mentioned heating to remove the development of the negative photosensitive resin composition that may be present in the opening 5. Residues, etc.
由本發明之負型感光性樹脂組成物形成的隔壁,宜例如寬在100μm以下,在20μm以下尤佳。又,相鄰隔壁間的距離(圖案寬度)在300μm以下為佳,在100μm 以下尤佳。隔壁之高度以0.05~50μm為佳,0.2~10μm尤佳。 The partition wall made of the negative photosensitive resin composition of the present invention is preferably, for example, 100 μm or less in width, and more preferably 20 μm or less. The distance (pattern width) between adjacent partition walls is preferably 300 μm or less, and is preferably 100 μm. The following is particularly preferred. The height of the partition wall is preferably 0.05 to 50 μm, and more preferably 0.2 to 10 μm.
本發明之隔壁在藉由IJ法進行圖案印刷時,可作為將其開口部當作印墨注入區域之隔壁來利用。利用IJ法進行圖案印刷時,只要將本發明之隔壁形成為其開口部與期望之印墨注入區域一致的狀態來使用,由於隔壁上表面具有良好的撥墨性,所以可抑制使印墨超過隔壁注入至非期望所在之開口部亦即印墨注入區域。又,隔壁圍起之開口部的印墨濕潤擴散性良好,因此可將印墨均勻地印刷在期望的區域而不會產生空缺等。 When the partition wall of the present invention is subjected to pattern printing by the IJ method, the opening portion can be used as a partition wall in which the ink is injected. When pattern printing is performed by the IJ method, as long as the partition wall of the present invention is used in a state in which the opening is consistent with the desired ink injection area, the upper surface of the partition wall has good ink repellency, so that the ink can be suppressed from exceeding The partition wall is injected into an undesired opening, which is an ink injection region. In addition, since the printing ink in the opening portion surrounded by the partition wall has good moist diffusivity, the printing ink can be uniformly printed on a desired area without generating voids or the like.
使用本發明之隔壁,便可如同上述巧妙地進行利用IJ法之圖案印刷。因此,本發明之隔壁便可有效地作為利用IJ法形成點之光學元件的隔壁使用,且該光學元件於基板表面具有多數個點及位於相鄰之點之間的隔壁。 With the partition wall of the present invention, pattern printing using the IJ method can be performed cleverly as described above. Therefore, the partition wall of the present invention can be effectively used as a partition wall of an optical element using the IJ method to form dots, and the optical element has a plurality of points on the substrate surface and partition walls between adjacent points.
[光學元件] [Optical element]
本發明之光學元件係於基板表面具有多數個點及位於相鄰之點間之上述本發明隔壁的光學元件。在本發明之光學元件中,點宜以IJ法來形成。 The optical element of the present invention is an optical element having a plurality of points on the substrate surface and the partition wall of the present invention located between adjacent points. In the optical element of the present invention, the dots are preferably formed by the IJ method.
以下,以利用IJ法來製造本發明實施形態之光學元件之情況為例加以說明。另外,本發明之光學元件之製造方法不受以下限定。 Hereinafter, a case where an optical element according to an embodiment of the present invention is manufactured by the IJ method will be described as an example. In addition, the manufacturing method of the optical element of this invention is not limited to the following.
圖2A~2B係示意顯示使用上述圖1D所示之已形成於基板1上之隔壁4來製造光學元件的方法。在此,基板1上之隔壁4係形成為使開口部5與欲製造之光學元件之點圖案 一致。 FIGS. 2A to 2B are schematic views showing a method for manufacturing an optical element using the partition wall 4 shown in FIG. 1D that has been formed on the substrate 1. Here, the partition wall 4 on the substrate 1 is formed as a dot pattern between the opening 5 and the optical element to be manufactured. Consistent.
如圖2A所示,從噴墨頭9將印墨10滴於隔壁4圍起之開口部5,對開口部5注入預定量的印墨10。印墨可配合點之功能適宜地選擇以光學元件用來說為公知的印墨來使用。 As shown in FIG. 2A, the ink 10 is dropped from the inkjet head 9 onto the opening 5 surrounded by the partition wall 4, and a predetermined amount of the ink 10 is injected into the opening 5. The printing ink can be appropriately selected and used in accordance with the function of dots, which is well-known as an optical element.
接下來,可依照所用印墨10的種類施行乾燥及/或加熱等處理,以進行例如溶劑之去除及硬化,然後如圖2B所示獲得以與隔壁4相鄰之形態形成有期望之點11的光學元件12。 Next, according to the type of the printing ink 10 used, drying and / or heating may be performed to remove and harden the solvent, for example, and then, as shown in FIG. 2B, a desired point 11 is formed in a form adjacent to the partition 4. The optical element 12.
本發明之光學元件係具有點之光學元件,且該點係藉由使用本發明之隔壁而可在製造過程中讓印墨無缺漏且均勻地在以隔壁劃分的開口部濕潤擴散,藉以精確形成者。 The optical element of the present invention is an optical element having dots, and by using the partition wall of the present invention, the printing ink can be uniformly wetted and diffused in the opening portion divided by the partition during the manufacturing process, so as to be accurately formed. By.
就光學元件而言,可舉如有機EL元件、液晶元件之彩色濾光片及TFT陣列元件、量子點顯示器、薄膜太陽電池等。 In terms of optical elements, examples include organic EL elements, color filters for liquid crystal elements, TFT array elements, quantum dot displays, and thin-film solar cells.
TFT陣列元件係多數個點被配置成俯視矩陣狀、並於各點設有TFT以作為像素電極及使其驅動之開關元件的元件。 A TFT array element is an element in which a plurality of dots are arranged in a matrix shape in plan view, and TFTs are provided at each point as a pixel electrode and a switching element for driving the pixel electrode.
TFT陣列元件可以TFT陣列基板的態樣設置於有機EL元件或是液晶元件等。 The TFT array element may be provided as an TFT array substrate on an organic EL element or a liquid crystal element.
TFT陣列例如可以下述方法製造,惟不受此限。 The TFT array can be manufactured, for example, by the following method, but is not limited thereto.
藉由濺鍍法等將鋁或其合金等之閘極電極成膜於玻璃等透光性基板上。該閘極電極可因應需求進行圖案化。 A gate electrode such as aluminum or an alloy thereof is formed on a light-transmitting substrate such as glass by a sputtering method or the like. The gate electrode can be patterned as required.
接下來藉由電漿CVD法等形成氮化矽等之閘極絕緣 膜。亦可於閘極絕緣膜上形成源極電極、汲極電極。源極電極及汲極電極例如可藉由真空蒸鍍或濺鍍形成鋁、金、銀、銅及該等之合金等的金屬薄膜而作成。將源極電極及汲極電極圖案化之方法有下述手法:形成金屬薄膜後,塗裝抗蝕劑並進行曝光、顯影讓抗蝕劑殘留於欲形成電極之部分,然後以磷酸或王水等去除露出的金屬,最後再去除抗蝕劑。又,在形成有金等的金屬薄膜之情況下,還有一預先塗裝抗蝕劑,進行曝光、顯影後讓抗蝕劑殘留於不欲形成電極之部分,然後於形成金屬薄膜後將光阻劑連同金屬薄膜一起去除的手法。又,亦可使用銀或銅等的金屬奈米膠體等,藉由噴墨等手法來形成源極電極及汲極電極。 Next, gate insulation such as silicon nitride is formed by a plasma CVD method. membrane. A source electrode and a drain electrode can also be formed on the gate insulating film. The source electrode and the drain electrode can be formed by, for example, forming a metal thin film of aluminum, gold, silver, copper, or an alloy thereof by vacuum evaporation or sputtering. The method of patterning the source electrode and the drain electrode includes the following methods: after forming a metal thin film, applying a resist, exposing, and developing the resist to remain on the portion where the electrode is to be formed, and then using phosphoric acid or aqua regia Wait until the exposed metal is removed, and finally remove the resist. In the case where a metal thin film such as gold is formed, a resist is pre-coated, and after the exposure and development, the resist is left on the portion where the electrode is not to be formed, and then the photoresist is formed after the metal thin film is formed. Remove the agent together with the metal film. Further, a metal nano colloid such as silver or copper may be used to form a source electrode and a drain electrode by a method such as inkjet.
接下來使用本發明之組成物,藉由包含塗佈、曝光及顯影之光刻法,沿著各點輪廓將隔壁形成為俯視格狀。 Next, using the composition of the present invention, the partition wall is formed into a plan lattice shape along the outline of each dot by a photolithography method including coating, exposure, and development.
接著,於點內藉由IJ法塗佈半導體溶液並使溶液乾燥而形成半導體層。就該半導體溶液來說,亦可使用有機半導體溶液、無機之塗佈型氧化物半導體溶液。源極電極、汲極電極亦可於該半導體層形成後使用噴墨等手法來形成。 Next, a semiconductor solution is applied in the spot by the IJ method and the solution is dried to form a semiconductor layer. The semiconductor solution may be an organic semiconductor solution or an inorganic coating oxide semiconductor solution. The source electrode and the drain electrode may be formed by a method such as inkjet after the semiconductor layer is formed.
最後,藉由濺鍍法等將ITO等之透光性電極成膜並將氮化矽等之保護膜成膜而形成。 Finally, a light-transmitting electrode such as ITO is formed by a sputtering method or the like, and a protective film such as silicon nitride is formed.
有機EL元件例如可以下述方法製造。 An organic EL element can be manufactured by the following method, for example.
藉由濺鍍法等將摻錫氧化銦(ITO)等透光性電極成膜於玻璃等透光性基板上。該透光性電極可因應需求進行圖案化。 A light-transmitting electrode such as tin-doped indium oxide (ITO) is formed on a light-transmitting substrate such as glass by a sputtering method or the like. The translucent electrode can be patterned as required.
接著,使用本發明之負型感光性樹脂組成物,藉由包含塗佈、曝光及顯影之光刻法,沿著各點輪廓將隔壁形成為俯視格狀。 Next, using the negative-type photosensitive resin composition of the present invention, the partition wall is formed into a plan lattice shape along the outline of each dot by a photolithography method including coating, exposure, and development.
接下來於點內藉由IJ法分別塗佈電洞注入層、電洞輸送層、發光層、電洞阻止層及電子注入層之材料及加以乾燥,來將該等層依序積層。形成於點內之有機層的種類及數量可適當設計。 Next, the materials of the hole injection layer, the hole transport layer, the light emitting layer, the hole blocking layer, and the electron injection layer are respectively coated and dried by IJ method in the points to sequentially laminate the layers. The type and number of organic layers formed in the dots can be appropriately designed.
最後藉由蒸鍍法等形成鋁等之反射電極。 Finally, a reflective electrode such as aluminum is formed by a vapor deposition method or the like.
又,量子點顯示器例如可以下述方法製造,惟不受此限。 The quantum dot display can be manufactured by, for example, the following method, but is not limited thereto.
藉由濺鍍法等將摻錫氧化銦(ITO)等透光性電極成膜於玻璃等透光性基板上。該透光性電極可因應需求進行圖案化。 A light-transmitting electrode such as tin-doped indium oxide (ITO) is formed on a light-transmitting substrate such as glass by a sputtering method or the like. The translucent electrode can be patterned as required.
接著,使用本發明之負型感光性樹脂組成物,藉由包含塗佈、曝光及顯影之光刻法,沿著各點輪廓將隔壁形成為俯視格狀。 Next, using the negative-type photosensitive resin composition of the present invention, the partition wall is formed into a plan lattice shape along the outline of each dot by a photolithography method including coating, exposure, and development.
接下來於點內藉由IJ法分別塗佈電洞注入層、電洞輸送層、量子點層、電洞阻止層及電子注入層之材料及予以乾燥,來將該等層依序積層。形成於點內之有機層的種類及數量可適當設計。 Next, the materials of the hole injection layer, the hole transport layer, the quantum dot layer, the hole blocking layer, and the electron injection layer are respectively coated and dried by IJ method in the points to sequentially laminate the layers. The type and number of organic layers formed in the dots can be appropriately designed.
最後,藉由蒸鍍法等形成鋁等之反射電極。 Finally, a reflective electrode such as aluminum is formed by a vapor deposition method or the like.
此外,本發明實施形態之光學元件亦可應用於例如按下述方法製造之藍光轉換型量子點顯示器。 The optical element according to the embodiment of the present invention can also be applied to, for example, a blue light conversion type quantum dot display manufactured by the following method.
於玻璃等透光性基板上,使用本發明之組成物沿著各 點輪廓將隔壁形成為俯視格狀。 On a light-transmitting substrate such as glass, the composition of the present invention is used along each The dot outline forms a partition in a plan view.
接著,於點內藉由IJ法塗佈可將藍光轉換成綠光之奈米粒子溶液、可將藍光轉換成紅光之奈米粒子溶液及因應需求之藍色的彩色印墨,並使該等乾燥以製作模組。使用發出藍色之光源作為背光並將前述模組代替彩色濾光片使用,藉此可製得顏色重現性優異的液晶顯示器。 Next, a nano-particle solution that can convert blue light to green light, a nano-particle solution that can convert blue light to red light, and a blue color printing ink according to demand are applied by dots by IJ method. Wait for drying to make the module. A blue light source is used as a backlight and the aforementioned module is used instead of a color filter, whereby a liquid crystal display having excellent color reproducibility can be obtained.
以下依據實施例說明本發明,惟本發明不受該等限定。例1、2、5~8、例10~16為實施例,例3、4、9、例17~19為比較例。 The present invention will be described below based on examples, but the present invention is not limited thereto. Examples 1, 2, 5-8, Examples 10-16 are examples, and Examples 3, 4, 9, and 17-19 are comparative examples.
各測定係以下述方法進行。 Each measurement was performed by the following method.
[數量平均分子量(Mn)、質量平均分子量(Mw)] [Number average molecular weight (Mn), mass average molecular weight (Mw)]
利用凝膠滲透層析法,以聚苯乙烯作為標準物質來測定數量平均分子量(Mn)及質量平均分子量(Mw)。凝膠滲透層析係使用HPLC-8220GPC(東曹公司製)。管柱則使用連接有3支shodex LF-604者。檢測器係使用RI檢測器。標準物質則使用EasiCal PS1(Polymer Laboratories公司製)。此外,在測定數量平均分子量及質量平均分子量時,將管柱保持在37℃,使用四氫呋喃作為溶析液,將流速設為0.2mL/分而注入測定試樣之0.5%四氫呋喃溶液40μL。 Gel permeation chromatography was used to measure number average molecular weight (Mn) and mass average molecular weight (Mw) using polystyrene as a standard material. As the gel permeation chromatography system, HPLC-8220 GPC (manufactured by Tosoh Corporation) was used. For the column, three shodex LF-604 were connected. The detector uses an RI detector. As the standard substance, EasiCal PS1 (manufactured by Polymer Laboratories) was used. In addition, when measuring the number average molecular weight and the mass average molecular weight, the column was maintained at 37 ° C, and tetrahydrofuran was used as an eluent, and a flow rate of 0.2 mL / min was injected into 40 μL of a 0.5% tetrahydrofuran solution of the measurement sample.
[氟原子含有率] [Fluorine atom content rate]
氟原子含有率(質量%)係以1,4-雙(三氟甲基)苯作為標準物質,利用19F NMR測定算出。 The fluorine atom content rate (% by mass) was calculated by 19 F NMR measurement using 1,4-bis (trifluoromethyl) benzene as a reference material.
[封端異氰酸酯基之含量] [Content of blocked isocyanate group]
封端異氰酸酯基之含量係從原料之摻混比例算出。 The content of the blocked isocyanate group is calculated from the blending ratio of the raw materials.
[乙烯性雙鍵(C=C)之含量] [Content of ethylenic double bond (C = C)]
乙烯性雙鍵之含量係從原料之摻混比例算出。 The content of ethylenic double bonds is calculated from the blending ratio of the raw materials.
[酸價] [Acid value]
酸價係從原料之摻混比例理論性算出。 The acid value is calculated theoretically from the blending ratio of the raw materials.
以下各例中所使用的化合物之簡稱顯示如下。 The abbreviations of the compounds used in the following examples are shown below.
(鹼可溶性樹脂(AP)) (Alkali soluble resin (AP))
鹼可溶性樹脂(AP1)組成物:係使甲酚酚醛型環氧樹脂與丙烯酸反應,接著與1,2,3,6-四氫鄰苯二甲酸酐反應後,以己烷將導入有丙烯醯基及羧基之樹脂純化而製成的樹脂(鹼可溶性樹脂(A1)、酸價60mgKOH/g)之組成物(固體成分70質量%、PGMEA30質量%)。 Alkali-soluble resin (AP1) composition: It is made by reacting cresol novolac epoxy resin with acrylic acid, and then reacting with 1,2,3,6-tetrahydrophthalic anhydride, and then introducing propylene with hexane A composition (resin 70% by mass, 30% by mass of PGMEA) of a resin (alkali-soluble resin (A1), acid value 60 mgKOH / g) prepared by purifying a resin having a base and a carboxyl group.
(光聚合引發劑) (Photopolymerization initiator)
IR907:IRGACURE907、商品名、BASF公司製、2-甲基-1-[4-(甲硫基)苯基]-2-N-啉基丙-1-酮。 IR907: IRGACURE907, trade name, manufactured by BASF, 2-methyl-1- [4- (methylthio) phenyl] -2-N- Phenylpropan-1-one.
OXE02:商品名;IRGACURE OXE 02、乙酮1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)(BASF公司製)。 OXE02: trade name; IRGACURE OXE 02, ethyl ketone 1- [9-ethyl-6- (2-methylbenzylidene) -9H-carbazol-3-yl] -1- (O-ethylfluorenyl Oxime) (manufactured by BASF).
EAB:4,4'-雙(二乙胺基)二苯基酮。 EAB: 4,4'-bis (diethylamino) diphenyl ketone.
(聚合物(C1)之原料) (Raw material of polymer (C1))
相當於化合物(cx-1)之化合物(cx-11):F(CF2)6CH2CH2Si(OCH3)3。 Compound (cx-11) equivalent to compound (cx-1): F (CF 2 ) 6 CH 2 CH 2 Si (OCH 3 ) 3 .
相當於化合物(cx-2)之化合物(cx-21):將3-異氰酸酯丙基三乙氧基矽烷以3,5-二甲基吡唑封端而成的化合物之 甲苯50質量%溶液(以公知方法製造)。 Compound (cx-21) equivalent to compound (cx-2): A compound obtained by capping 3-isocyanatepropyltriethoxysilane with 3,5-dimethylpyrazole A 50% by mass solution of toluene (manufactured by a known method).
相當於化合物(cx-3)之化合物(cx-31):Si(OC2H5)4。 Compound (cx-31) equivalent to compound (cx-3): Si (OC 2 H 5 ) 4 .
相當於化合物(cx-4)之化合物(cx-41):CH2=CHCOO(CH2)3Si(OCH3)3。 Compound (cx-41) equivalent to compound (cx-4): CH 2 = CHCOO (CH 2 ) 3 Si (OCH 3 ) 3 .
相當於化合物(cx-5)之化合物(cx-51):(CH3)3-Si-OCH3。 Compound (cx-51) equivalent to compound (cx-5): (CH 3 ) 3 -Si-OCH 3 .
相當於化合物(cx-6)之化合物(cx-61):HS-(CH2)3-Si(OCH3)3。 Compound (cx-61) equivalent to compound (cx-6): HS- (CH 2 ) 3 -Si (OCH 3 ) 3 .
(聚合物(C2)之原料) (Raw material of polymer (C2))
C6FMA:CH2=C(CH3)COOCH2CH2(CF2)6F C6FMA: CH 2 = C (CH 3 ) COOCH 2 CH 2 (CF 2 ) 6 F
MAA:甲基丙烯酸 MAA: methacrylic acid
2-HEMA:甲基丙烯酸2-羥乙酯 2-HEMA: 2-hydroxyethyl methacrylate
PME400:CH2=C(CH3)COO(C2H4O)9CH3 PME400: CH 2 = C (CH 3 ) COO (C 2 H 4 O) 9 CH 3
MOI-BP:KARENZ MOI-BP(商品名、昭和電工公司製,上述式(m1)所示之化合物) MOI-BP: KARENZ MOI-BP (trade name, manufactured by Showa Denko Corporation, a compound represented by the above formula (m1))
MOI-BM:KARENZ MOI-BM(商品名、昭和電工公司製,上述式(m2)所示之化合物) MOI-BM: KARENZ MOI-BM (trade name, manufactured by Showa Denko Corporation, compound represented by the above formula (m2))
V-65:(2,2’-偶氮雙(2,4-二甲基戊腈)) V-65: (2,2'-azobis (2,4-dimethylvaleronitrile))
AOI:KARENZ AOI(商品名、昭和電工公司製、2-丙烯醯氧基乙基異氰酸酯) AOI: KARENZ AOI (trade name, manufactured by Showa Denko Corporation, 2-propenyloxyethyl isocyanate)
DBTDL:二月桂酸二丁錫 DBTDL: Dibutyltin dilaurate
TBQ:三級丁基-對苯醌 TBQ: tertiary butyl-p-benzoquinone
MEK:2-丁酮 MEK: 2-butanone
(黑色著色劑) (Black colorant)
黑色著色劑(D-1):黑色有機顏料之PGMEA分散液(甲 亞胺系黑色有機顏料:12質量%、高分子分散劑:7.2質量%、PGMEA:80.8質量%、固體成分酸價:7.2mgKOH/g)。 Black colorant (D-1): PGMEA dispersion of black organic pigment Imine-based black organic pigment: 12% by mass, polymer dispersant: 7.2% by mass, PGMEA: 80.8% by mass, and solid component acid value: 7.2 mgKOH / g).
(交聯劑) (Crosslinking agent)
DPHA:二新戊四醇六丙烯酸酯 DPHA: Dinepentaerythritol hexaacrylate
(溶劑) (Solvent)
PGMEA:丙二醇單甲基醚乙酸酯 PGMEA: propylene glycol monomethyl ether acetate
PGME:丙二醇單甲基醚 PGME: propylene glycol monomethyl ether
[聚合物(C)之合成] [Synthesis of Polymer (C)]
以下述方式將聚合物(C1)及聚合物(C2)合成。又,合成出比較例之聚合物(Cf)。 The polymer (C1) and the polymer (C2) were synthesized in the following manner. A polymer (Cf) of a comparative example was synthesized.
(例1;聚合物(C1-1)之合成) (Example 1; Synthesis of polymer (C1-1))
於具備攪拌機之300cm3之三口燒瓶加入化合物(cx-11)3.87g、化合物(cx-21)13.30g、化合物(cx-31)4.16g、化合物(cx-51)1.28g而獲得水解性矽烷化合物混合物。接下來於該混合物放入PGME 71.1g,製成原料溶液。 In a 300 cm 3 three-neck flask equipped with a stirrer, 3.87 g of compound (cx-11), 13.30 g of compound (cx-21), 4.16 g of compound (cx-31), and 1.28 g of compound (cx-51) were added to obtain a hydrolyzable silane Compound mixture. Next, 71.1 g of PGME was put into this mixture to prepare a raw material solution.
於製得之原料溶液中滴下1%硝酸水溶液6.30g。滴下結束後在40℃下攪拌12小時而獲得聚合物(C1-1)之PGME溶液(聚合物(C1-1)濃度:10質量%;以下亦稱「聚合物(C1-1)溶液」)。 To the prepared raw material solution, 6.30 g of a 1% nitric acid aqueous solution was dropped. After completion of the dropping, the solution was stirred at 40 ° C. for 12 hours to obtain a PGME solution of the polymer (C1-1) (concentration of the polymer (C1-1): 10% by mass; hereinafter also referred to as “polymer (C1-1) solution”). .
另外,反應結束後使用氣相層析術測定反應液之成分,確認作為原料之各化合物均在檢測極限以下。 In addition, after the reaction was completed, the components of the reaction solution were measured using gas chromatography, and it was confirmed that each compound as a raw material was below the detection limit.
所得聚合物(C1-1)在製造時使用的原料水解性矽烷化合物之饋入量等顯示於表1。表1中,矽烷化合物表 示水解性矽烷化合物。又,測定所得聚合物(C1-1)的數量平均分子量(Mn)、質量平均分子量(Mw)、氟原子含有率、C=C含量所得的結果合併顯示於表1。 Table 1 shows the feed amount and the like of the raw material hydrolyzable silane compound used in the production of the obtained polymer (C1-1). In Table 1, the silane compound table Shows hydrolyzable silane compounds. The results of measuring the number average molecular weight (Mn), mass average molecular weight (Mw), fluorine atom content, and C = C content of the obtained polymer (C1-1) are shown in Table 1.
(例2~4:聚合物(C1-2)及(Cf-1)、(Cf-2)之合成) (Examples 2 to 4: Synthesis of polymers (C1-2), (Cf-1), (Cf-2))
除了將原料組成設定為表1中所示以外,以與例1同樣的方式,即於表1所示之各矽烷化合物之混合物中加入PGME製作原料溶液,再於其中滴下表1所示之酸水溶液後,以與例1同樣的方式進行攪拌而獲得聚合物(C1-2)及(Cf-1)、(Cf-2)之溶液(均為化合物濃度:10質量%;以下,各溶液亦稱為「聚合物(C1-2)、(Cf-1)、(Cf-2)溶液」)。 Except that the raw material composition was set as shown in Table 1, in the same manner as in Example 1, PGME was added to the mixture of each silane compound shown in Table 1 to prepare a raw material solution, and the acid shown in Table 1 below was dropped thereinto. After the aqueous solution was stirred in the same manner as in Example 1, a solution of the polymers (C1-2), (Cf-1), and (Cf-2) was obtained (all compound concentrations: 10% by mass; below, each solution was also (Referred to as "polymer (C1-2), (Cf-1), (Cf-2) solution").
上述所得聚合物(C1-2)及(Cf-1)、(Cf-2)於製造時使用的原料水解性矽烷化合物之饋入量、莫耳比顯示在表1。表1中,矽烷化合物表示水解性矽烷化合物。又,測定所得聚合物的數量平均分子量(Mn)、質量平均分子量(Mw)、氟原子含有率、C=C含量得到的結果合併顯示於表1。 Table 1 shows the feed amounts and molar ratios of the hydrolyzable silane compounds as raw materials used in the production of the polymers (C1-2), (Cf-1), and (Cf-2) obtained at the time of production. In Table 1, the silane compound represents a hydrolyzable silane compound. The results obtained by measuring the number average molecular weight (Mn), mass average molecular weight (Mw), fluorine atom content, and C = C content of the obtained polymer are shown in Table 1 together.
[表1]
(例5;聚合物(C2-1)之合成) (Example 5; Synthesis of polymer (C2-1))
於具備攪拌機之內容積1L之高壓釜饋入MEK(466.7g)、C6FMA(94.0g)、MOI-BP(66.0g)、PME-400(40.0g)及聚合引發劑V-65(0.91g),在氮氣環境下一邊攪拌一邊在50℃下聚合24小時而獲得聚合物(C2-1)溶液。於己烷中加入所得聚合物(C2-1)溶液進行再沉澱純化後,進行真空乾燥而獲得聚合物(C2-1)(169.2g)。聚合物(C2-1)之數量平均分子量為35,900,質量平均分子量為71,600。 In a 1L autoclave equipped with a mixer, feed MEK (466.7g), C6FMA (94.0g), MOI-BP (66.0g), PME-400 (40.0g), and polymerization initiator V-65 (0.91g) Polymerization was performed at 50 ° C for 24 hours while stirring under a nitrogen environment to obtain a polymer (C2-1) solution. The obtained polymer (C2-1) solution was added to hexane for reprecipitation and purification, and then vacuum-dried to obtain a polymer (C2-1) (169.2 g). The number average molecular weight of the polymer (C2-1) was 35,900, and the mass average molecular weight was 71,600.
(例6:聚合物(C2-2)之合成) (Example 6: Synthesis of polymer (C2-2))
除了將MOI-BP變更成MOI-BP以外,以與合成例5同樣的方式製得聚合物(C2-2)。聚合物(C2-2)之數量平均分子量為34,500,質量平均分子量為72,300。 A polymer (C2-2) was obtained in the same manner as in Synthesis Example 5 except that MOI-BP was changed to MOI-BP. The number average molecular weight of the polymer (C2-2) was 34,500, and the mass average molecular weight was 72,300.
(例7:聚合物(C2-3)之合成) (Example 7: Synthesis of polymer (C2-3))
於具備攪拌機之內容積1L之高壓釜饋入MEK(466.7 g)、C6FMA(94.0g)、2-HEMA(46.0)、MOI-BP(20.0g)、PME-400(40.0g)及聚合引發劑V-65(1.2g),在氮氣環境下一邊攪拌一邊在50℃下聚合24小時而獲得聚合物(C2-3)前驅物之溶液。 Feed MEK (466.7) into an autoclave with an internal volume of 1L equipped with a mixer g), C6FMA (94.0g), 2-HEMA (46.0), MOI-BP (20.0g), PME-400 (40.0g) and polymerization initiator V-65 (1.2g), while stirring under a nitrogen atmosphere Polymerization was performed at 50 ° C for 24 hours to obtain a solution of a polymer (C2-3) precursor.
於具備攪拌機之內容積1L之高壓釜饋入上述聚合物(C2-3)前驅物之溶液(500.0g)、AOI(37.5g)、DBTDL(0.15g)、TBQ(1.87g),一邊攪拌一邊在40℃下使其反應24小時而獲得聚合物(C2-3)之溶液。於己烷中加入所得聚合物(C2-3)溶液進行再沉澱純化後,進行真空乾燥而獲得聚合物(C2-3)(143.1g)。聚合物(C2-3)之數量平均分子量為41,200,質量平均分子量為85,700。 Feed the solution (500.0g) of the polymer (C2-3) precursor, AOI (37.5g), DBTDL (0.15g), and TBQ (1.87g) into an autoclave with an internal volume of 1L equipped with a stirrer, while stirring It was made to react at 40 degreeC for 24 hours, and the solution of the polymer (C2-3) was obtained. The obtained polymer (C2-3) solution was added to hexane for reprecipitation and purification, and then dried under vacuum to obtain a polymer (C2-3) (143.1 g). The number average molecular weight of the polymer (C2-3) was 41,200, and the mass average molecular weight was 85,700.
(例8及例9:聚合物(C2-4)及(Cf-3)之合成) (Examples 8 and 9: Synthesis of polymers (C2-4) and (Cf-3))
在聚合物(C2-3)中,除了將原料之摻混變更成如表2以外,藉由同樣的反應合成出聚合物(C2-4)及(Cf-3)。 In the polymer (C2-3), polymers (C2-4) and (Cf-3) were synthesized by the same reaction except that the blending of the raw materials was changed as shown in Table 2.
例1~4中所製得之聚合物的數量平均分子量(Mn)、質量平均分子量(Mw)、氟原子含有率、封端異氰酸酯基含量、乙烯性雙鍵含量、酸價顯示於表2。 Table 2 shows the number average molecular weight (Mn), mass average molecular weight (Mw), fluorine atom content, blocked isocyanate group content, ethylenic double bond content, and acid value of the polymers prepared in Examples 1 to 4.
[表2]
[負型感光性樹脂組成物之製造及隔壁之製造] [Manufacture of negative photosensitive resin composition and manufacture of partition wall]
(例10;負型感光性樹脂組成物之製造) (Example 10; Production of negative photosensitive resin composition)
將鹼可溶性樹脂(AP1)組成物12.66g、IR907 1.12g、EAB 1.00g、聚合物(C1-1)溶液1.61g、A9530 8.96g、PGMEA 74.7g放入200cm3之攪拌用容器中攪拌3小時而製造出負型感光性樹脂組成物1。 Put 12.66 g of alkali-soluble resin (AP1) composition, 1.907 g of IR907, 1.00 g of EAB, 1.61 g of polymer (C1-1) solution, 8.96 g of A9530, and 74.7 g of PGMEA in a stirring container of 200 cm 3 for 3 hours Then, a negative-type photosensitive resin composition 1 was produced.
(隔壁之製造) (Made next door)
將10cm正方形的玻璃基板以乙醇作超音波洗淨30秒鐘,接著進行5分鐘的UV/O3處理。於UV/O3處理時係使用PL2001N-58(SENENGINEERING CO.,LTD製)作為UV/O3產生裝置。254nm換算的光功率(光輸出)為10mW/cm2。 A 10 cm square glass substrate was washed with ethanol as an ultrasonic wave for 30 seconds, and then subjected to UV / O 3 treatment for 5 minutes. For UV / O 3 treatment, PL2001N-58 (manufactured by Senengineering Co., Ltd.) was used as a UV / O 3 generating device. The optical power (light output) converted at 254 nm was 10 mW / cm 2 .
於上述洗淨後之玻璃基板表面上使用旋轉器塗佈上述所得負型感光性樹脂組成物1後,在100℃下於熱板上使其乾燥2分鐘而形成膜厚2.4μm之乾燥膜。對所得乾燥膜,隔著遮罩部(非曝光部)為2.5cm×5cm之光罩,整面 一齊照射365nm換算之曝光功率(曝光輸出)為25mW/cm2的超高壓水銀燈之UV光(曝光量為250mJ/cm2)。曝光時已將330nm以下之光切掉。又,乾燥膜與光罩之間隔距離係設為50μm。 The obtained negative photosensitive resin composition 1 was coated on the surface of the cleaned glass substrate using a spinner, and then dried on a hot plate at 100 ° C for 2 minutes to form a dry film having a thickness of 2.4 µm. The obtained dry film was irradiated with UV light of an ultra-high pressure mercury lamp with an exposure power (exposure output) of 25 mW / cm 2 converted at 365 nm through a mask having a mask portion (non-exposed portion) of 2.5 cm × 5 cm ( The exposure amount was 250 mJ / cm 2 ). The light below 330nm has been cut off during exposure. The distance between the dry film and the photomask is set to 50 μm.
接著將上述曝光處理後之玻璃基板浸漬於2.38%四甲基氫氧化銨水溶液中40秒鐘進行顯影後,以水沖洗非曝光部,再使其乾燥。接下來使其在熱板上在230℃下加熱60分鐘,藉此作成具有與光罩之遮罩部相對應之開口部的硬化膜而製得隔壁。 Next, the glass substrate after the exposure treatment was immersed in a 2.38% tetramethylammonium hydroxide aqueous solution for 40 seconds for development, and then the non-exposed portion was rinsed with water and then dried. Next, it was heated on a hot plate at 230 ° C. for 60 minutes, thereby forming a cured film having an opening portion corresponding to the mask portion of the photomask, thereby forming a partition wall.
針對所得負型感光性樹脂組成物1及隔壁實施以下評估。評估結果顯示於表3。 The obtained negative photosensitive resin composition 1 and the partition walls were evaluated as follows. The evaluation results are shown in Table 3.
(評估) (Evaluation)
<隔壁的膜厚> <Film thickness of the partition>
使用雷射顯微鏡(基恩斯公司製、裝置名:VK-8500)進行測定。 The measurement was performed using a laser microscope (manufactured by Keynes Corporation, device name: VK-8500).
<隔壁之撥墨性> <Next to the ink repellency>
以下述方法測定上述所得隔壁上表面的PGMEA接觸角作為撥墨性之評估。 The PGMEA contact angle on the upper surface of the partition wall obtained above was measured by the following method as an evaluation of ink repellency.
藉由不濡液滴法,依照JIS R3257「基板玻璃表面之濕潤性試驗方法」,於硬化膜上表面三處滴載PGMEA滴並針對各PGMEA滴進行測定。液滴係設為2μL/滴,測定則在20℃下進行。接觸角係從3測定值之平均值求算。 According to JIS R3257 "Test method for wettability of substrate glass surface", PGMEA droplets were dropped on the upper surface of the cured film in accordance with JIS R3257, and measurement was performed for each PGMEA droplet. The droplet system was set to 2 μL / drop, and the measurement was performed at 20 ° C. The contact angle was calculated from the average of 3 measured values.
<開口部之親墨性> <Ink affinity of openings>
以與上述撥墨性之評估方法同樣的方法測定上述所得 隔壁圍起的開口部之PGMEA接觸角,作為親墨性之評估。 The above method was measured by the same method as the above evaluation of ink repellency. The PGMEA contact angle of the opening surrounded by the next wall was used as the evaluation of ink affinity.
另外,PGMEA接觸角若在40度以上,便可稱撥墨性佳。又,PGMEA接觸角若在5度以下,便可稱親墨性佳。 In addition, if the PGMEA contact angle is above 40 degrees, it can be said that the ink repellency is good. In addition, if the PGMEA contact angle is less than 5 degrees, it can be said that the ink affinity is good.
<負型感光性樹脂組成物之貯藏穩定性> <Storage stability of negative photosensitive resin composition>
將負型感光性樹脂組成物1在室溫(20~25℃)下保管20日。然後以目測觀察負型感光性樹脂組成物1之狀態(透明或白濁)後,以與上述同樣的方式製造隔壁及硬化膜(惟,玻璃基板之大小係設為7.5cm正方形)。另外,製造途中在塗膜之狀態下以目測及雷射顯微鏡觀察膜表面有無異物。 The negative photosensitive resin composition 1 was stored at room temperature (20 to 25 ° C) for 20 days. Then, the state (transparent or cloudy) of the negative photosensitive resin composition 1 was visually observed, and then a partition wall and a cured film were produced in the same manner as described above (however, the size of the glass substrate was set to 7.5 cm square). In addition, during the manufacturing process, the presence or absence of foreign matter on the film surface was observed with a visual inspection and a laser microscope in the state of the coating film.
以目測及雷射顯微鏡觀察所得之隔壁及硬化膜的外觀及膜表面有無異物,和從保管前之負型感光性樹脂組成物1以與上述同樣方式形成的隔壁及硬化膜(惟,將玻璃基板之大小變更成7.5cm正方形)作比較,以下述基準進行評估。 The external appearance of the partition wall and the cured film and the presence of foreign matter on the film surface were observed with a visual inspection and a laser microscope, and the partition wall and the cured film formed from the negative photosensitive resin composition 1 before storage in the same manner as described above (however, the glass The size of the substrate was changed to a 7.5 cm square) for comparison, and evaluation was performed based on the following criteria.
◎:以雷射顯微鏡及目測觀察塗膜均未能確認有異物,與從保管前之負型感光性樹脂組成物形成的隔壁及硬化膜為相同外觀。 :: Neither the laser microscope nor the visual observation of the coating film confirmed the presence of foreign matter, and the appearance was the same as that of the partition wall and the cured film formed from the negative photosensitive resin composition before storage.
○:以雷射顯微鏡觀察塗膜時可確認有粒狀的異物。 ○: When the coating film was observed with a laser microscope, granular foreign matter was confirmed.
△:以目測觀察塗膜時可確認有粒狀的異物。 △: When the coating film was visually observed, granular foreign matter was confirmed.
×:保管後之負型感光性樹脂組成物呈白濁。 X: The negative-type photosensitive resin composition after storage was cloudy.
(例11~19) (Examples 11 to 19)
藉由表3所示之組成以與例10同樣的方式製造例11~例19之負型感光性樹脂組成物。使用所得負型感光性樹脂 組成物以與例10同樣的方式製造隔壁。針對所得之負型感光性樹脂組成物、隔壁、開口部以與例10同樣的方式進行評估。結果顯示於表3。 With the compositions shown in Table 3, the negative photosensitive resin compositions of Examples 11 to 19 were produced in the same manner as in Example 10. Using the obtained negative photosensitive resin The composition produced a partition wall in the same manner as in Example 10. The obtained negative photosensitive resin composition, the partition walls, and the openings were evaluated in the same manner as in Example 10. The results are shown in Table 3.
本發明之撥墨劑例如係含於感光性樹脂組成物等中作使用,在有機EL元件、液晶元件之彩色濾光片及TFT陣列等光學元件中適合用來形成利用IJ法進行圖案印刷時的隔壁。 The ink repellent of the present invention is contained in, for example, a photosensitive resin composition, and is suitable for use in forming an optical element such as an organic EL element, a color filter of a liquid crystal element, and a TFT array. Next door.
本發明之負型感光性樹脂組成物在有機EL元件、液晶元件之彩色濾光片及TFT陣列等光學元件中適合用來作為用以形成利用IJ法進行圖案印刷時之隔壁等的組成物。 The negative photosensitive resin composition of the present invention is suitable for use as a composition for forming a partition wall or the like in pattern printing by the IJ method in optical elements such as organic EL elements, color filters for liquid crystal elements, and TFT arrays.
本發明之隔壁可在有機EL元件中作為用以藉IJ法圖案印刷形成發光層等有機層的隔壁(凸堤)利用,或者是可在液晶元件中作為用以藉IJ法圖案印刷形成彩色濾光片的隔 壁(該隔壁可兼作黑矩陣(BM))等利用。 The partition wall of the present invention can be used in organic EL elements as a partition wall (convex bank) for forming organic layers such as a light-emitting layer by IJ method pattern printing, or in a liquid crystal element as a color filter by IJ method pattern printing. Light barrier A wall (the partition wall can also serve as a black matrix (BM)) and the like are used.
本發明之隔壁還可在TFT陣列中作為用以藉IJ法圖案印刷形成導體圖案或半導體圖案的隔壁等利用。 The partition wall of the present invention can also be used in a TFT array as a partition wall for forming a conductor pattern or a semiconductor pattern by IJ pattern printing.
本發明之隔壁可作為用以藉IJ法圖案印刷形成例如構成TFT之通道層的有機半導體層、閘極電極、源極電極、汲極電極、閘極配線及源極配線等的隔壁等利用。 The partition wall of the present invention can be used as a partition wall for forming an organic semiconductor layer, a gate electrode, a source electrode, a drain electrode, a gate wiring, a source wiring, and the like, such as a channel layer constituting a TFT, by IJ pattern printing.
另外,在此係引用已於2014年6月9日提出申請之日本專利申請案2014-118475號之說明書、申請專利範圍、摘要及圖式之全部內容,並納入作為本發明說明書之揭示。 In addition, the entire contents of the specification, patent application scope, abstract, and drawings of Japanese Patent Application No. 2014-118475, which has been filed on June 9, 2014, are incorporated herein as a disclosure of the specification of the present invention.
Claims (14)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-118475 | 2014-06-09 | ||
| JP2014118475 | 2014-06-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201602171A TW201602171A (en) | 2016-01-16 |
| TWI666235B true TWI666235B (en) | 2019-07-21 |
Family
ID=54833396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW104118343A TWI666235B (en) | 2014-06-09 | 2015-06-05 | Ink repellent, negative photosensitive resin composition, partition wall and optical element |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6593331B2 (en) |
| KR (1) | KR102372955B1 (en) |
| CN (1) | CN106465508B (en) |
| TW (1) | TWI666235B (en) |
| WO (1) | WO2015190294A1 (en) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102735982B1 (en) * | 2016-06-30 | 2024-11-28 | 엘지디스플레이 주식회사 | Organic light emitting display device |
| JP6838876B2 (en) * | 2016-07-08 | 2021-03-03 | 旭化成株式会社 | Photosensitive resin composition, photosensitive resin laminate, resin pattern manufacturing method, cured film and display device |
| JP2018205605A (en) * | 2017-06-07 | 2018-12-27 | 三菱ケミカル株式会社 | Colored photosensitive resin composition, cured product, organic electroluminescent device, image display device, and illumination |
| KR102467651B1 (en) * | 2017-07-27 | 2022-11-16 | 삼성디스플레이 주식회사 | Display device and manufacturing method of the same |
| KR20190094731A (en) * | 2018-02-05 | 2019-08-14 | 동우 화인켐 주식회사 | Colored photosensitive resin composition, color pixel and display device produced using the same |
| JP7351220B2 (en) * | 2018-03-23 | 2023-09-27 | 東レ株式会社 | Method for manufacturing cured film and method for manufacturing organic EL display |
| JP7043620B2 (en) * | 2018-09-20 | 2022-03-29 | 富士フイルム株式会社 | A method for manufacturing a photosensitive resin composition, a cured film, a laminate, a transfer film, and a touch panel. |
| US11493847B2 (en) * | 2019-05-24 | 2022-11-08 | Rohm And Haas Electronic Materials Korea Ltd. | Structure for a quantum dot barrier rib and process for preparing the same |
| KR20210023720A (en) * | 2019-08-21 | 2021-03-04 | 시앤양 차이훙 옵토일렉트로닉스 테크놀로지 컴퍼니 리미티드 | Manufacturing method of display panel, and display panel and display apparatus |
| JP7665318B2 (en) * | 2019-11-20 | 2025-04-21 | 東友ファインケム株式会社 | Photosensitive resin composition, partition structure for color-converting pixels produced using the same, and display device including the same |
| KR102773877B1 (en) * | 2019-11-20 | 2025-03-04 | 동우 화인켐 주식회사 | A photo sensitive resin composition, a wall structure for a color conversion pixel prepared using the composition, and a display device comprising the same |
| KR102696631B1 (en) * | 2020-03-16 | 2024-08-21 | 동우 화인켐 주식회사 | A photosensitive resin composition for forming partition wall, a partition wall structure prepared using the composition, and a display device comprising the partition wall structure |
| JPWO2022138173A1 (en) * | 2020-12-24 | 2022-06-30 | ||
| CN116802221A (en) * | 2021-02-24 | 2023-09-22 | 东丽株式会社 | Photosensitive resin composition, cured product, laminated body, display device, and method for manufacturing display device |
| KR102890387B1 (en) * | 2021-02-26 | 2025-11-24 | 동우 화인켐 주식회사 | Colored photosensitive resin composition, color filter and display device using the same |
| KR102868465B1 (en) | 2022-12-28 | 2025-10-13 | 동우 화인켐 주식회사 | A black photosensitive resin composition, a partition wall structure prepared using the composition, and a display device comprising the partition wall structure |
| WO2024262451A1 (en) * | 2023-06-21 | 2024-12-26 | Agc株式会社 | Photosensitive resin composition, partition wall, and optical element |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103765314A (en) * | 2011-08-30 | 2014-04-30 | 旭硝子株式会社 | Negative photosensitive resin composition, partition wall and optical element |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09230129A (en) * | 1996-02-26 | 1997-09-05 | Asahi Glass Co Ltd | Method for manufacturing color filter and liquid crystal display device using the same |
| EP1961775A4 (en) * | 2005-12-15 | 2010-09-01 | Asahi Glass Co Ltd | FLUORINATED POLYMER, NEGATIVE PHOTOSENSITIVE COMPOSITION AND SEPARATION PARTITION |
| EP1806385B1 (en) * | 2006-01-05 | 2009-04-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Easy-to-clean, mechanically stable coating composition for metallic surfaces with increased chemical resistance and process for coating a substrate using said composition |
| ATE541242T1 (en) * | 2007-01-22 | 2012-01-15 | Nissan Chemical Ind Ltd | POSITIVE LIGHT SENSITIVE RESIN COMPOSITION |
| JP2008189836A (en) * | 2007-02-06 | 2008-08-21 | Asahi Glass Co Ltd | Treatment substrate having pattern of water repellent region, method for producing the same, and method for producing a member on which a pattern made of a film of functional material is formed |
| JP5040565B2 (en) * | 2007-09-28 | 2012-10-03 | 凸版印刷株式会社 | Ink jet ink composition for color filter, color filter and method for producing the same |
| JP2009132782A (en) * | 2007-11-29 | 2009-06-18 | Fujifilm Corp | Polymer compound and method for producing the same, resin composition, photosensitive transfer material, separation wall and method for producing the same, color filter and method for producing the same, and display device |
| KR101269299B1 (en) | 2008-08-01 | 2013-05-29 | 아사히 가라스 가부시키가이샤 | Negative working photosensitive composition, partition wall for optical element using the nagative working photosensitive composition, and optical element comprising the partition wall |
| JP5479817B2 (en) * | 2008-08-28 | 2014-04-23 | 住友化学株式会社 | Resin composition for organic thin film transistor gate insulating layer, gate insulating layer, and organic thin film transistor |
| JP2010170830A (en) * | 2009-01-22 | 2010-08-05 | Sumitomo Chemical Co Ltd | Composition for bank insulating layer |
| JP2010201821A (en) * | 2009-03-04 | 2010-09-16 | Asahi Kasei E-Materials Corp | Photopolymerizable resin laminate, and method of manufacturing surface liquid repelling pattern substrate, color filter, organic electroluminescence element and electronic paper using the same |
| JP2011059583A (en) * | 2009-09-14 | 2011-03-24 | Jsr Corp | Resin composition for forming fine pattern, method for forming fine pattern and polymer |
| JP2011207140A (en) * | 2010-03-30 | 2011-10-20 | Asahi Kasei E-Materials Corp | Laminated film of fluoropolymer compound-containing layer and method for manufacturing substrate with surface liquid repellent pattern |
| WO2011125691A1 (en) * | 2010-04-01 | 2011-10-13 | 住友化学株式会社 | Resin composition for use in an organic thin-film transistor insulation layer, overcoat insulation layer, and organic thin-film transistor |
| JP2012168364A (en) * | 2011-02-15 | 2012-09-06 | Seiko Epson Corp | Ink for color filter, color filter, image display device, and electronic apparatus |
| JP6036699B2 (en) * | 2011-10-21 | 2016-11-30 | 旭硝子株式会社 | Method for producing ink repellent agent, negative photosensitive resin composition, partition wall and optical element |
| KR102092659B1 (en) * | 2012-06-12 | 2020-03-24 | 가부시키가이샤 아데카 | Photosensitive composition |
| JP6065915B2 (en) | 2012-09-24 | 2017-01-25 | 旭硝子株式会社 | Negative photosensitive resin composition, cured film, partition, and optical element |
| JP6017301B2 (en) * | 2012-12-20 | 2016-10-26 | 富士フイルム株式会社 | Photosensitive resin composition, method for producing cured film, cured film, liquid crystal display device, and organic EL display device |
| KR20150008759A (en) * | 2013-07-15 | 2015-01-23 | 제일모직주식회사 | Black photosensitive resin composition and black matrix using the same |
-
2015
- 2015-05-27 WO PCT/JP2015/065239 patent/WO2015190294A1/en not_active Ceased
- 2015-05-27 JP JP2016527733A patent/JP6593331B2/en active Active
- 2015-05-27 CN CN201580031150.1A patent/CN106465508B/en active Active
- 2015-05-27 KR KR1020167029756A patent/KR102372955B1/en not_active Expired - Fee Related
- 2015-06-05 TW TW104118343A patent/TWI666235B/en active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103765314A (en) * | 2011-08-30 | 2014-04-30 | 旭硝子株式会社 | Negative photosensitive resin composition, partition wall and optical element |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20170016819A (en) | 2017-02-14 |
| WO2015190294A1 (en) | 2015-12-17 |
| CN106465508A (en) | 2017-02-22 |
| JP6593331B2 (en) | 2019-10-23 |
| TW201602171A (en) | 2016-01-16 |
| CN106465508B (en) | 2018-05-25 |
| JPWO2015190294A1 (en) | 2017-05-25 |
| KR102372955B1 (en) | 2022-03-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI666235B (en) | Ink repellent, negative photosensitive resin composition, partition wall and optical element | |
| JP6115471B2 (en) | Negative photosensitive resin composition, partition, black matrix, and optical element | |
| TWI628513B (en) | Negative photosensitive resin composition, resin cured film, partition wall, and optical element | |
| JP5910629B2 (en) | Negative photosensitive resin composition, cured film, partition and black matrix and method for producing the same, color filter and organic EL device | |
| TWI427410B (en) | Photosensitive composition, separator, black matrix | |
| TWI652547B (en) | Negative photosensitive resin composition, resin cured film, partition wall, and optical element | |
| KR101627381B1 (en) | Photosensitive composition, partition wall, color filter, and organic el device | |
| CN104781074B (en) | Negative photosensitive resin composition, resin cured film, partition wall and optical element | |
| CN102112923A (en) | Negative working photosensitive composition, partition wall for optical element using nagative working photosensitive composition, and optical element comprising partition wall | |
| TWI649621B (en) | Ink-repellent composition, negative photosensitive resin composition, cured film, partition, optical component | |
| JP2008298859A (en) | Photosensitive composition, partition using the same, method for manufacturing partition, method for manufacturing color filter, method for manufacturing organic EL display element, and method for manufacturing organic TFT array | |
| TW201348883A (en) | Partial hydrolysis condensation product, ink-repellent agent, negative-type photosensitive resin composition, cured film, partition wall, and optical element | |
| TW201308007A (en) | Negative photosensitive resin composition, partition wall, black matrix, color filter, and liquid crystal display element | |
| TWI753982B (en) | Negative photosensitive resin composition | |
| TW201421163A (en) | Partial hydrolysis-condensation product and ink repellent agent using same | |
| WO2017033835A1 (en) | Negative-type photosensitive resin composition, cured resin film, partition, optical element, and production method therefor | |
| WO2017033834A1 (en) | Negative-type photosensitive resin composition, cured resin film, partition, optical element, and production method therefor |