TWI664562B - Pressure sensing module having element protection structure inside - Google Patents

Abstract

The invention relates to a pressure-sensing module, which includes: a first substrate and a second substrate; and a structural wall formed between the first substrate and the second substrate, and two ends of the first and second substrates are respectively connected to the first substrate and the first substrate. The two substrates are in contact. The first substrate, the second substrate, and the structural wall include a first chamber. The first chamber includes a first medium and a second chamber. The second chamber includes a gaseous medium. A pressure sensor and a protection structure. The pressure sensor detects a change in air pressure in the second chamber.

Description

Pressure sensing module with component protection structure

The invention relates to a pressure-sensing module, in particular to a flat-type pressure-sensing module based on a barometric pressure detection technology and a structure provided with a protective internal component inside the module.

The conventional touch panel is a sensor used to detect the touch and the position where it occurs. The touch may come from: fingertip, stylus, conductive body, non-conductive body, etc. Types are usually made into flat plates. According to the working principle of detecting touch, they are roughly divided into capacitive, resistive, infrared, and sonic types, and each category is further subdivided, for example: capacitive touch panels. For mutual-capacitance, self-capacitance, etc., a common use of a touch panel is as an input device of a system, and the detected touch is regarded as an input signal or a control command.

Among the above types of touch panels, resistive and capacitive touch detection technologies are the most widely used. Resistive touch panels detect the on and open circuits of two large-area conductive layers. (off), and the linear resistance change in the x and y directions, and to sense the touch itself and calculate the coordinates of its occurrence position, the capacitive touch panel mainly detects the change in the capacitance between the two conductive glass and the contact In order to sense the touch itself and calculate the coordinates of its occurrence location, the touch detection technology has been used to evolve from single-touch detection to multi-touch detection.

As far as practical applications are concerned, the touch panel is usually integrated with the display screen into one. Touch screen, users can directly and intuitively perform various interactive operations with the system on the content displayed on the touch screen. The process is very user-friendly, simple and intuitive, so touch screens have been widely used in various On devices, for example: smartphones, tablets, point-of-sale systems (POS), interactive media kiosks, ATMs, cashiers, car driving systems, industrial Touchscreen applications can be seen on devices such as human-machine interfaces.

However, in conventional technology, whether it is the touch panel itself or the touch screen integrated with the display screen, its ability to detect touches is aimed at "touch itself and where it occurs" and belongs to the The touch technology implemented on a two-dimensional (2D) plane. These conventional touch detection technologies are completely lacking in changes such as the "size" and "time" of the pressing force, or force, of a touch. Detection capabilities.

Due to the shortcomings of the conventional technology, the applicant, after careful testing and research, and a spirit of perseverance, finally conceived the "pressure sensing module with component protection structure" in this case, which can overcome the above shortcomings. Brief description of the invention.

In view of the conventional touch detection technology or touch panel, the touch and its position are detected through the touch circuit arranged on the substrate. The touch technology is limited to a two-dimensional plane and can only sense the touch. Positions on the X and Y coordinates of the plane, but the downforce or force generated by the touch cannot be sensed.

Therefore, the present invention proposes a pressure sensing module, which is based on air pressure sensing technology and is dedicated to sensing the pressure or force of a touch. It can be used alone or easily with other panel modules, such as touch panels, displays Panel, or touch display panel, etc. The pressure sensing module of the present invention allows the downforce generated by touch to be transmitted to the system as one of the input parameters, making the system more intelligent.

In particular, the pressure sensing module of the present invention has a protective structure for protecting the first medium or pressure sensor in the contained air chamber. When the pressure sensing module receives a strong touch, or when When the impact position is closer to the internal pressure sensor of the module, and when the first medium is a relatively soft solid or liquid medium, it can prevent the first medium from deforming too much and blocking too much of the first medium from extruding into the air chamber. , Preventing the first medium from being squeezed onto the pressure sensor, preventing the first medium from flowing onto the pressure sensor, preventing the first medium from debonding at the edges due to overpressure, and the like.

The present invention provides a pressure sensing module, which includes: a first substrate and a second substrate; and a structural wall formed between the first substrate and the second substrate, with two ends respectively connected to the first substrate and the first substrate. The two substrates are in contact. The first substrate, the second substrate, and the structural wall include a first chamber. The first chamber includes a first medium and a second chamber. The second chamber includes a gaseous medium. A pressure sensor and a protection structure. The pressure sensor detects a change in air pressure in the second chamber.

Preferably, the first chamber further includes one of the following: an auxiliary structure included in the first chamber; and a plurality of the second chamber included in the first chamber and containing the gaseous medium. .

Preferably, the type of the protective structure includes a columnar structure, a surrounding structure, a straight structure, a U-shaped structure, an L-shaped structure, a right-angled structure, a ladder structure, a triangular structure, an acute-angled structure, an obtuse-angled structure, Cross structure, oblique structure, arc structure, horizontal structure, vertical structure, round structure, mouth structure, conical structure, W-shaped structure, Z-shaped structure and its group Combine one of them.

Preferably, the protection structure is disposed between the first substrate and the second substrate, and is disposed on one of the first substrate and the second substrate.

Preferably, the protective structure is disposed between the pressure sensor and the first medium, the protective structure is disposed between the structural wall and the first medium, and the protective structure is disposed between the first medium Outside, the protection structure is disposed on the same substrate as the pressure sensor, or the protection structure is disposed on a different substrate from the pressure sensor.

Preferably, the protection structure is arranged in the air chamber of the airtight cavity in a manner of uniform distribution, non-uniform distribution, continuous distribution, discontinuous distribution, symmetrical distribution or asymmetric distribution.

Preferably, the first substrate and the second substrate are one of a glass substrate, a conductive glass substrate, a conductive substrate, and an acrylic substrate. The first medium is a liquid medium, a solid medium, a low molecular weight silicone, an optical One of an elastic film and a soft elastic film.

Preferably, the material of the structural wall comprises one of high-molecular-weight silicone, polyurethane polymer, double-sided adhesive, epoxy resin, ultraviolet curing adhesive, and sealant. The material of the protective structure includes high-molecular-weight silicone, polyurethane Polymers, double-sided tapes, epoxy resins, UV curing adhesives and sealants.

Preferably, the gaseous medium includes one of gas, vapor, atmosphere, nitrogen, water vapor, air, and a combination thereof, and the liquid medium includes one of water, gel, alcohol, and a combination thereof.

101‧‧‧Pressure Sensing Module

120‧‧‧First substrate

121‧‧‧Operating surface

130‧‧‧second substrate

140‧‧‧ Structural Wall

140a‧‧‧UV curing adhesive

140b‧‧‧ polyurethane polymer

140c‧‧‧ double-sided tape

150‧‧‧airtight cavity

151, 152‧‧‧ air chamber

160‧‧‧Gaseous medium

170‧‧‧Pressure sensor

180‧‧‧ the first medium

181‧‧‧Media Edge

190‧‧‧Auxiliary Structure

600‧‧‧Protection structure

601‧‧‧Protection structure

602‧‧‧Protection structure

PP’‧‧‧ hatching

QQ’‧‧‧ section line

b‧‧‧ height of protective structure

H‧‧‧Gap height

FIG. 1 is a side cross-section of a pressure sensing module with a gas chamber structure of the present invention when it is not under pressure schematic diagram.

Fig. 2 is a schematic plan view illustrating the pressure sensing module of the present invention on the PP 'section line shown in Fig. 1.

FIG. 3 is a schematic diagram illustrating the structure of the pressure sensing module with multiple air chamber structures of the present invention on the X-plane when it is not compressed.

FIG. 4 is a schematic side cross-sectional view of a pressure sensing module with an air chamber structure according to the present invention under pressure.

Section 5A is a schematic side sectional view of a first embodiment of a pressure sensing module with a component protection structure according to the present invention.

Section 5B is a schematic side cross-sectional view of the element protection structure and its adjacent partial structures of the present invention.

FIG. 5C is a schematic plan view illustrating the pressure sensing module with a component protection structure of the present invention on the QQ 'section line shown in FIG. 5A.

FIG. 6 is a schematic side sectional view of a second embodiment of a pressure sensing module with a component protection structure according to the present invention.

FIG. 7 is a schematic diagram showing the structure of a pressure sensing module with a component protection structure on the X-plane of the present invention.

FIG. 8 is a schematic diagram illustrating the structure of a pressure sensing module with a component protection structure on the X-plane of the present invention.

FIG. 9 is a schematic diagram illustrating the structure of a pressure sensing module with a component protection structure and multiple air chambers on the X-plane of the present invention.

The present invention will be fully understood from the description of the following examples, so that familiarity Those skilled in the art can complete it, but the implementation of the present invention can not be limited by the following implementation cases; the drawings of the present invention do not include restrictions on size, size and scale. When the present invention is actually implemented, The size, size, and scale are not limited by the drawings of the present invention.

The term "preferred" in this article is non-exclusive and should be understood as an open-ended term "preferably but not limited to", which has no restrictive meaning and does not exclude other features or steps; described or recorded in any specification or claim Any of the steps can be performed in any order, not limited to the order described in the claims; the scope of the present invention should be determined only by the attached claims and their equivalent schemes, and should not be determined by the examples of implementation examples; The term "comprising" and its variations appearing in the description and the claims are open-ended terms, without restrictive meanings, and do not exclude other features or steps.

FIG. 1 is a schematic side sectional view of a pressure sensing module having an air chamber structure according to the present invention when it is not compressed; FIG. 2 is a schematic top view showing the pressure sensing module of the present invention on the PP ′ section line shown in FIG. 1; The pressure sensing module 101 of the present invention disclosed in FIGS. 1 and 2 includes a first substrate 120, a second substrate 130, a structural wall 140, an airtight cavity (first cavity) 150, and an air cavity (second cavity). Chamber) 151, gaseous medium 160, pressure sensor 170, first medium 180, auxiliary structure 190 and other structures. The auxiliary structure 190 included in the first medium 180 is an optional structure. The first medium 180 may be provided or not. An auxiliary structure 190 is provided, and the material is selected from a solid medium or a high molecular weight silicone; etc. It is assumed that a plane parallel to the first substrate 120 or the second substrate 130 is an X-plane, and a plane parallel to the first substrate 120 or the second substrate The 130 vertical plane is the Y plane.

The first substrate 120 and the second substrate 130 are preferably rectangular flat substrates, and have appropriate rigidity and slight flexibility or elasticity, and may be selected from glass substrates, conductive glass substrates, The conductive substrate or the acrylic substrate, an appropriate gap is maintained between the first substrate 120 and the second substrate 130, and the gap has a gap height H. Between the gap between the first substrate 120 and the second substrate 130, upper and lower ends are respectively constructed. The structural wall 140 having a sealing or air-tight effect is in contact with the first substrate 120 and the second substrate 130, and has the same wall height and gap height H. In this embodiment, the structural wall 140 is preferably disposed between the first substrate 120 and the first substrate 120. The four edges of the two substrates 130 surround the gap between the first substrate 120 and the second substrate 130 from the four edges, but the structural wall 140 may be disposed anywhere between the first substrate 120 and the second substrate 130, and It is not necessary to completely surround all the gaps, and it is possible to partially surround only a part of the gaps.

Therefore, structures such as the first substrate 120, the second substrate 130, and the structural wall 140 can form an airtight sandwich structure, that is, an airtight cavity, between the first substrate 120, the second substrate 130, and the structural wall 140. 150, the airtight cavity 150 contains a gaseous medium 160, a first medium 180, and an auxiliary structure 190, and the airtight cavity 150 can seal the internal gaseous medium 160, the first medium 180, and the auxiliary structure 190 so as not to leak to the outside The airtight cavity 150 is preferably a three-dimensional three-dimensional space and has a rectangular shape.

The outer surface of the first substrate 120 is used as the operating surface 121 and accepts touch input from a conductor, a non-conductor, a contact, or a finger. The composition of the gaseous medium 160 preferably includes gas, vapor, atmosphere, nitrogen, oxygen, water vapor, and air. And one of its mixtures, the structural wall 140 is made of polyurethane polymer, double-sided tape, epoxy resin, ultraviolet curing adhesive, sealant or a combination thereof, and the material of the first medium 180 is selected from solid Medium, liquid medium, low molecular weight silicone, optical elastic film or soft elastic film.

The first medium 180 is mainly used to transmit the degree of downward pressure generated by the touch to the air chamber 151. The soft or hard material of the first medium 180 will affect the user's touch on the module 101. In this embodiment, The first medium 180 is preferably a relatively soft, low-molecular-weight silicon gel. The first medium 180 is distributed in a large area in the gap between the first substrate 120 and the second substrate 130 and in the airtight cavity 150, and contacts the first The substrate 120 and the second substrate 130, when the first medium 180 is a soft-type material, although it can bring a soft touch to the user, it may also absorb the touch force and reduce the transmission of the touch force to the air chamber 151. effectiveness.

Therefore, the auxiliary structure 190 can be selectively arranged in the first medium 180 to adjust the overall softness and hardness of the first medium 180, and appropriately guide the contact force to the air chamber 151, and the configuration of the auxiliary structure 190 also It can enlarge the local volume change rate of the first medium 180 at the edges, adjust the transmission efficiency of the first medium 180 to the force, prevent the degumming phenomenon caused by the first medium 180 at the edges, and try to prevent the first medium 180 from squeezing. Into the gas chamber 151, etc., in this embodiment, the auxiliary structure 190 is preferably a harder, high-molecular-weight silicon rubber. The auxiliary structure 190 may be disposed on the first substrate 120 or the second substrate 130. In this embodiment, the auxiliary structure 190 The structure 190 is disposed on the second substrate 130.

The airtight cavity 150 also contains a relatively small amount of gaseous medium 160. An airtight air chamber 151 is also formed inside the airtight cavity 150. The air chamber 151 contains the gaseous medium 160 and is covered by the air chamber 151. The spatial extent of the gaseous medium 160 is the distribution range of the gaseous medium 160. When the volume of the gaseous medium 160 is affected by temperature or pressure, the volume of the gas chamber 151 changes accordingly, and the four corners of the gas chamber 151 change accordingly. Four pressure sensors 170 are configured on the upper side, which can detect the air pressure in the air chamber 151 and the change in the air pressure. There is no limit on the number of pressure sensors 170. The pressure sensor is preferably a MEMS pressure micro sensor. , Liquid pressure sensors, or gaseous pressure sensors.

Figure 3 reveals that the pressure sensing module with multiple air chamber structure of the present invention is not affected. Schematic diagram of the structure on the X plane during pressing; as shown in FIG. 3, the airtight cavity 150 includes a plurality of air chambers 151, and the pressure sensing module 101 of the present invention disclosed in FIG. 3 includes a second substrate 130 and a structure. Structures such as wall 140, airtight cavity (first chamber) 150, multiple air chambers (second chamber) 151, gaseous medium 160, pressure sensor 170, first medium 180, etc. The multiple air chambers 151 are formed in the airtight cavity 150 through the structural wall 140 and the first medium 180. In some embodiments, the multiple air chambers 151 are through the auxiliary structure 190, the structural wall 140, or the first medium 180. form.

FIG. 4 is a schematic side sectional view of a pressure sensing module with an air chamber structure according to the present invention when it is under pressure; when the pressure sensing module 101 of the present invention is in operation, for example, when a user touches the first When the outer surface of a substrate 120 is the operation surface 121, or when the touch of the operation surface 121 reduces the degree of force, as shown in FIG. 3, these touches of different degrees of force pass through the first substrate 120 and the first The medium 180 is transmitted to the air chamber 151 and the gaseous medium 160 therein, so that the volume of the air chamber 151 and the volume of the gaseous medium 160 in the air chamber 151 both start to generate corresponding scaling, and correspondingly increase or decrease in air pressure occurs, and pass through the air chamber. The pressure sensor 170 in 151 can detect the air pressure in the air chamber 151, which is changed when touched with different degrees of force. The pressure sensing module 101 converts the detected air pressure according to the change. Can sense the corresponding touch strength.

In the pressure sensing module 101 of the present invention, the height H of the gap between the first substrate 120 and the second substrate 130 is generally not too large, and its height is preferably less than 100um. Therefore, when the pressure sensing module 101 is received on the operation surface 121 When the touch is stronger, or when the touch position is closer to the pressure sensor 170, when the first medium 180 is a relatively soft solid or liquid medium, the first medium 180 may easily be squeezed. Due to the large deformation, and move towards the structural wall 140, the air chamber 151 or the pressure sensor 170, in some extreme cases, it may A large amount of the first medium 180 moves in the direction of the pressure sensor 170, which causes a part of the first medium 180 to be squeezed even to the pressure sensor 170, which may cause the pressure sensor 170 to fail.

5A is a schematic side sectional view of a first embodiment of a pressure sensing module with a component protection structure of the present invention; 5B is a schematic side sectional view of a component protection structure of the present invention and its adjacent partial structure; FIG. 6 is a schematic view of the present invention A schematic plan view of a pressure sensing module with a component protection structure on the QQ 'section line shown in FIG. 5A; the pressure sensing module 101 shown in FIG. 5A, FIG. 5B, and FIG. One or more protective structures 600 are provided between the pressure sensor 170 and the first medium 180, or between the structural wall 140 and the first medium 180, or at a position outside the first medium 180. The protective structure 600 may The protection structure 600 may be provided on the first substrate 120 or the second substrate 130 or the protection structure 600 and the pressure sensor 170 on the same substrate or on separate substrates. In this embodiment, the protection structure 600 is related to the pressure sensor. The detector 170 is provided on a different substrate. The protection structure 600 is provided on the first substrate 120 and the pressure sensor 170 is provided on the second substrate 130. Only one end of the upper and lower ends of the protection structure 600 is connected to the first substrate. Substrate 120, or in contact with the second substrate 130, the protective structure 600 which is a solid material selected from medium or high molecular weight silicone and the like.

In this embodiment, the protective structure 600 is preferably formed on the X plane as a continuous wall or a mouth-shaped structure in the form of a continuous structure, and is surrounded on the outside of the first medium 180 near the first medium 180 Concerning the first medium 180, the protective structure height b of the protective structure 600 on the Y plane is between 0 and less than the gap height H, but preferably greater than half or more of the gap height H. The protective structure 600 is a surrounding structure The configuration of 192 can prevent the first medium 180 from being deformed excessively and blocking too much of the first medium 180 when the touch position is closer to the pressure sensor 170 Squeeze into the air chamber 151, prevent the first medium 180 from being squeezed to the pressure sensor 170, prevent the first medium 180 from flowing onto the pressure sensor 170, and prevent the first medium 180 from debonding at the edges due to overpressure For example, the above-mentioned conditions may cause the first medium 180 to be de-glued or the pressure sensor 170 to fail, and may cause the pressure sensing module 101 to have reduced sensitivity, abnormal operation or failure.

As shown in FIG. 5B, when the pressure sensing module 101 receives a larger pressure, the medium edge 181 of the first medium 180 will move toward the structural wall 140, the air chamber 151, or the pressure sensor 170, but the protection Under the obstruction of the structure 600, the medium edge 181 of the first medium 180 will be confined within the range of the protection structure 600, so that a large amount of the first medium 180 cannot move toward the pressure sensor 170, resulting in a part of the first The medium 180 is even squeezed to the pressure sensor 170. When the first medium 180 is a relatively soft solid medium or a liquid medium, a part of the first medium 180 may flow onto the pressure sensor 170, and so on. FIG. 5B also includes an embodiment of the structural wall 140. In some embodiments, the structural wall 140 preferably includes a layer of ultraviolet curing adhesive 140a, a layer of polyurethane polymer 140b, and a layer of double-sided adhesive 140c.

The sixth series discloses a schematic side sectional view of the second embodiment of the pressure sensing module with a component protection structure of the present invention; in this embodiment, the pressure sensing module 101 shown in FIG. 6 is arranged inside the air chamber 151, One or more protection structures 600 provided between the pressure sensor 170 and the first medium 180, or between the structural wall 140 and the first medium 180, or at a position outside the first medium 180 are provided. On the second substrate 130, the pressure sensor 170 and the second medium 190 are disposed on the same substrate. Only one end of the upper and lower ends of the protective structure 600 will contact the first substrate 120 or the second substrate 130. The protective structure The protective structure height b of 600 on the Y plane is between 0 and less than the gap height H, but preferably greater than half or more of the gap height H.

FIG. 7 is a schematic diagram illustrating the structure of a pressure sensing module with a component protection structure on the X plane according to the present invention; in some embodiments, the protection structure 600 is only disposed at a position adjacent to the pressure sensor 170 in the air chamber 151 The protective structure 600 is preferably a columnar structure (not shown) projected into a columnar shape on the Y plane, and the projected shape on the X plane is preferably an obtuse-angled rectangle in this embodiment, but it may also be The protection structure 600 is rectangular, square, or other shapes. In this embodiment, the protection structure 600 is uniform and symmetrically distributed in the air chamber 151 adjacent to the pressure sensor 170. However, the protection structure 600 may also be non-uniform or non-uniform. Symmetrically distributed, the height of the columnar structure formed by the protective structure 600 in the Y-plane is between 0 and less than the gap height H, but preferably greater than half or more of the gap height H.

As shown in FIG. 7, when the pressure sensing module 101 receives a large pressure, the medium edge 181 of the first medium 180 moves toward the structural wall 140, the air chamber 151, or the pressure sensor 170. In the embodiment, the protection structure 600 is disposed near the pressure sensor 170 in the air chamber 151. Therefore, when the first medium 180 is a relatively soft solid medium or a liquid medium under the block of the protection structure 600, The medium edge 181 of the first medium 180 cannot be pressed to the pressure sensor 170.

FIG. 8 is a schematic diagram illustrating the structure of the pressure sensing module with a component protection structure on the X plane according to the present invention; in some embodiments, the protection structure 600 is only disposed at a position adjacent to the pressure sensor 170 in the air chamber 151 The protective structure 600 is preferably formed as a columnar structure (not shown) projected into a columnar shape on the Y plane, but its projection shape on the X plane is preferably a right-angled L shape in this embodiment. In this embodiment, the protection structure 600 is uniform and symmetrically distributed in the air chamber 151 adjacent to the pressure sensor 170, and has a right-angle L-shaped protection structure 600, because there are two L-shaped extension wing walls. Therefore, the protection structure 600 can provide more complete pressure sensor 170. Protect the first medium 180 from affecting the pressure sensor 170.

FIG. 9 is a schematic diagram illustrating the structure of a pressure sensing module with a component protection structure and multiple air chambers on the X plane according to the present invention; in some embodiments, the airtight cavity 150 of the pressure sensing module 101 includes a plurality of air Each of the air chambers 151 and 152 includes a protective structure 601 and 192. The L-shaped air chamber 151 is provided with an L-shaped structure with an arc angle on the X plane. The protective structure 601 is provided with a protective structure 602 showing a straight structure on the X plane in the I-shaped air chamber 152, or a plurality of straight structures may be provided in the I-shaped air chamber 152的 保护 结构 602。 The protective structure 602.

The above embodiments of the present invention can be arbitrarily combined or replaced with each other, thereby deriving more implementation aspects, but all without departing from the scope of the present invention, and further provide more examples of the present invention:

Embodiment 1: A pressure-sensing module includes: a first substrate and a second substrate; a structural wall formed between the first substrate and the second substrate, and two ends of the structural wall are respectively connected to the first substrate and the first substrate. A second substrate is in contact, the first substrate, the second substrate, and the structural wall include a first chamber, the first chamber includes a first medium and a second chamber; and the second chamber includes a gaseous medium , A pressure sensor and a protection structure, the pressure sensor detects a change in air pressure in the second chamber.

Embodiment 2: The pressure-sensing module according to embodiment 1, wherein the first chamber further includes an auxiliary structure included in the first chamber.

Embodiment 3: The pressure-sensing module according to embodiment 1, wherein the first chamber further comprises: a plurality of the second chambers, which are contained in the first chamber, and contain the gaseous medium.

Embodiment 4: The pressure sensing module according to embodiment 1, wherein the protection structure Types include columnar structure, enclosure structure, straight structure, U-shaped structure, L-shaped structure, right-angled structure, ladder structure, triangular structure, acute-angled structure, obtuse-angled structure, cross-shaped structure, and oblique structure. , Arc structure, horizontal structure, vertical structure, round structure, mouth structure, conical structure, W-shaped structure, Z-shaped structure and combinations thereof.

Embodiment 5: The pressure sensing module according to Embodiment 1, wherein the protection structure is disposed between the first substrate and the second substrate, and is disposed between one of the first substrate and the second substrate. on.

Embodiment 6: The pressure sensing module according to embodiment 1, wherein the protection structure is disposed between the pressure sensor and the first medium, and the protection structure is disposed between the structural wall and the first medium. In between, the protection structure is disposed outside the first medium, the protection structure is disposed on the same substrate as the pressure sensor, or the protection structure is disposed on a different substrate from the pressure sensor.

Embodiment 7: The pressure-sensing module according to embodiment 1, wherein the protection structure is arranged in the airtight cavity in a manner of uniform distribution, non-uniform distribution, continuous distribution, discontinuous distribution, symmetrical distribution, or asymmetric distribution. In the air chamber.

Embodiment 8: The pressure sensing module according to Embodiment 1, wherein the first substrate and the second substrate are one of a glass substrate, a conductive glass substrate, a conductive substrate, and an acrylic substrate, and the first medium It is one of liquid medium, solid medium, low molecular weight silicone, optical elastic film and soft elastic film.

Embodiment 9: The pressure-sensing module according to Embodiment 1, wherein the material of the structural wall comprises one of high-molecular-weight silicone, polyurethane polymer, double-sided adhesive, epoxy resin, ultraviolet curing adhesive, and sealing compound. The material of the protective structure includes high molecular weight silicone and polyurethane Polymers, double-sided tapes, epoxy resins, UV curing adhesives and sealants.

Embodiment 10: The pressure sensing module according to embodiment 1, wherein the gaseous medium includes one of gas, vapor, atmosphere, nitrogen, water vapor, air, and a combination thereof, and the liquid medium includes water, gel, Alcohol and one of its combinations.

The embodiments of the present invention can be arbitrarily combined or replaced with each other, thereby deriving more implementation aspects, but without departing from the scope of the present invention to be protected and the definition of the scope of protection of the present invention The recorder shall prevail.

Claims (10)

A pressure-sensing module includes an air-tight structure including a first chamber formed between a first substrate and a second substrate, and two ends of which are in contact with the first substrate and the second substrate, respectively. A structural wall, the first chamber includes a first medium and a second chamber; and the second chamber is formed in the first chamber due to the filling of the first medium, and includes a gaseous medium. A pressure sensor and a protection structure, the pressure sensor detects a change in air pressure in the second chamber, and the protection structure is configured adjacent to the pressure sensor to prevent the pressure sensor from the first Contact with the medium. The pressure sensing module according to claim 1, wherein the first chamber further comprises: an auxiliary structure included in the first chamber. The pressure sensing module according to claim 1, wherein the first chamber further comprises: a plurality of the second chambers, which are contained in the first chamber and contain the gaseous medium. The pressure sensing module according to item 1 of the claim, wherein the type of the protective structure includes a pillar structure, a surrounding structure, a straight structure, a U-shaped structure, an L-shaped structure, a right-angled structure, A ladder structure, a triangle structure, an acute angle structure, an obtuse angle structure, a cross structure, an oblique structure, an arc structure, a horizontal structure, a vertical structure, a round structure, a mouthful One of a type structure, a conical structure, a W-shaped structure, a Z-shaped structure, and a combination thereof. The pressure sensing module according to claim 1, wherein the protection structure is disposed between the first substrate and the second substrate, and is disposed on one of the first substrate and the second substrate. The pressure sensing module according to claim 1, wherein the protective structure is disposed between the pressure sensor and the first medium, and the protective structure is disposed between the structural wall and the first medium. The protection structure is disposed outside the first medium, the protection structure is disposed on the same substrate as the pressure sensor, or the protection structure is disposed on a different substrate from the pressure sensor. The pressure sensing module according to claim 1, wherein the protection structure is configured in a uniform distribution, a non-uniform distribution, a continuous distribution, a discontinuous distribution, a symmetrical distribution, or an asymmetric distribution. In the second chamber of the first chamber. The pressure sensing module according to claim 1, wherein the first substrate and the second substrate are one of a glass substrate, a conductive glass substrate, a conductive substrate, and an acrylic substrate. A medium is one of a liquid medium, a solid medium, a low molecular weight silicone, an optical elastic film, and a soft elastic film. The pressure-sensing module according to item 1, wherein the material of the structural wall comprises a high-molecular-weight silicone, a polyurethane polymer, a double-sided adhesive, an epoxy resin, an ultraviolet curing adhesive, and a One of the adhesives, the material of the protective structure includes one of a high molecular weight silicon adhesive, a polyurethane polymer, a double-sided adhesive, an epoxy resin, an ultraviolet curing adhesive, and a sealant. The pressure sensing module according to claim 1, wherein the gaseous medium includes one of a gas, a vapor, an atmosphere, a nitrogen gas, a water vapor, an air, and a combination thereof, and the liquid medium includes water, One of a gel, an alcohol, and a combination thereof.