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TWI664049B - Preparation method of Cu (copper)-cored solder balls for high-end electronic packaging - Google Patents

Preparation method of Cu (copper)-cored solder balls for high-end electronic packaging Download PDF

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TWI664049B
TWI664049B TW107114751A TW107114751A TWI664049B TW I664049 B TWI664049 B TW I664049B TW 107114751 A TW107114751 A TW 107114751A TW 107114751 A TW107114751 A TW 107114751A TW I664049 B TWI664049 B TW I664049B
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copper
balls
solder balls
electronic packaging
core solder
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TW107114751A
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TW201945114A (en
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林文良
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大陸商重慶群崴電子材料有限公司
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Abstract

一種高階電子封裝用銅芯焊球製備方法,係依續透過銅球製備、表面處理、抗氧化處理、篩選處理、電鍍處理、二次抗氧化處理、成品篩選等步驟所製成;在製備的過程中係先將銅粒或銅絲加工製成銅球,接著對銅球表面進行研磨以及微酸腐蝕後再進行抗氧化的處理,接續篩選出真圓度以及尺寸符合規定的銅球後,再進行電鍍處理並製成銅芯焊球,之後再對銅芯焊球進行第二次的抗氧化處理,最後再篩選出真圓度以及尺寸適用於電子封裝的銅芯焊球。A method for preparing copper core solder balls for high-level electronic packaging, which is prepared through successive steps of copper ball preparation, surface treatment, anti-oxidation treatment, screening treatment, plating treatment, secondary anti-oxidation treatment, and screening of finished products. In the process, copper pellets or copper wires are first processed into copper balls, and then the surface of the copper balls is ground and slightly acid-etched before being subjected to anti-oxidation treatment. After that, the copper balls with roundness and dimensions that meet the requirements are screened. Then electroplating treatment is performed to make copper-core solder balls, and then the copper-core solder balls are subjected to a second anti-oxidation treatment, and finally copper-core solder balls with true roundness and dimensions suitable for electronic packaging are selected.

Description

高階電子封裝用銅芯焊球製備方法Preparation method of copper core solder ball for high-level electronic packaging

本發明係有關於一種銅芯焊球製備方法;更詳而言之,特別係關於一種高階電子封裝用銅芯焊球製備方法。The invention relates to a method for preparing a copper core solder ball; more specifically, it relates to a method for preparing a copper core solder ball for high-end electronic packaging.

近年來伴隨著移動電子產品的輕量化、纖薄化和多功能化的發展,傳統電子的封裝技術已無法滿足小型化、窄間距化和多針化的要求,而為了滿足這些市場要求,一種以堆疊封裝(POP)為代表的三維空間(3D)封裝技術便應運而生,而三維空間(3D)封裝技術起源於快閃記憶體和同步動態隨機存取記憶體(SDRAM)的疊層封裝,這是一種在不改變封裝體尺寸的前提下,在同一個封裝體內於垂直方向疊放兩層以上芯片的封裝技術,其主要特點包括:多功能、高效能、大容量、高密度和低成本。In recent years, with the development of lighter weight, thinner and more versatile mobile electronic products, traditional electronic packaging technology has been unable to meet the requirements of miniaturization, narrow pitch and multi-pin. In order to meet these market requirements, a The three-dimensional space (3D) packaging technology represented by stacked package (POP) came into being, and the three-dimensional space (3D) packaging technology originated from the stacked packaging of flash memory and synchronous dynamic random access memory (SDRAM). This is a packaging technology in which two or more layers of chips are stacked vertically in the same package without changing the size of the package. Its main features include: multifunction, high performance, large capacity, high density and low cost.

一般在進行三維空間(3D)封裝的製程時需要經過多次回焊,而傳統的球柵陣列封裝(BGA)錫球使用上在經過250℃多次回焊的情況下其焊接凸點會產生熔融狀態,當球柵陣列封裝(BGA)錫球焊接凸點產生熔融後再加上多層電子零件重量的壓迫下會使焊接凸點發生不可預測之變形,進而導致封裝空間變窄,且焊點與焊點之間或焊點與零件之間會產生粘黏短路等問題。Generally, three-dimensional space (3D) packaging process requires multiple re-soldering. However, the traditional ball grid array package (BGA) solder balls will be melted when the solder bumps are subjected to multiple reflows at 250 ° C. When the ball grid array package (BGA) solder ball solder bumps are melted and the pressure of the multilayer electronic parts is pressed, the solder bumps will deform unpredictably, which will lead to a narrower packaging space and solder joints and soldering. Problems such as sticky shorts can occur between points or between solder joints and parts.

為了解決傳統球柵陣列封裝(BGA)錫球經多次回焊後會產生熔融的問題,在產業界中多使用銅球來取代傳統球柵陣列封裝(BGA)錫球,這是因為銅的熔點(1083℃)遠高於封裝時的回焊溫度(250℃),因此即便經過多次的回焊製程,銅球也不會在回焊中產生變形並能維持封裝空間不變,而這個穩定的空間即可容納和封裝其他電子零件,故銅球的運用能夠確保回焊後封裝空間穩定的這一特性,有利於實現高密度的三維空間(3D)封裝。In order to solve the problem that traditional ball grid array package (BGA) solder balls can be melted after repeated re-soldering, copper balls are used in the industry to replace traditional ball grid array package (BGA) solder balls. This is because of the melting point of copper. (1083 ° C) is much higher than the reflow temperature (250 ° C) at the time of packaging, so even after multiple reflow processes, copper balls will not deform during reflow and can maintain the packaging space unchanged, and this is stable The space can accommodate and package other electronic parts, so the use of copper balls can ensure the stability of the packaging space after reflow, which is conducive to achieving high-density three-dimensional (3D) packaging.

此外,隨著電子產品的多功能化、微型化、高性能化的發展,也大幅的促進了高密度封裝的發展,進而使封裝芯片上的輸入/輸出(Input/Output、I/O)引腳數量增多、焊點面積減少,從而導致電流密度變高,然而電流密度的增大會加速焊點的電遷移失效,相較於傳統球柵陣列封裝(BGA)錫球焊點,銅球具有更好的抗電遷移和熱遷移特性,這是因為銅球的導電性能是錫球的5~10倍,且其導熱性能也優於傳統球柵陣列封裝(BGA)錫球。In addition, with the development of multifunctionalization, miniaturization and high performance of electronic products, the development of high-density packaging has also been greatly promoted, and the input / output (I / O) on the packaged chip has been greatly promoted. Increasing the number of pins and reducing the solder joint area lead to higher current density. However, the increase of current density will accelerate the electromigration failure of solder joints. Compared with traditional ball grid array package (BGA) solder ball solder joints, copper balls have more Good resistance to electromigration and thermal migration. This is because copper balls are 5-10 times more conductive than solder balls, and their thermal conductivity is better than traditional ball grid array package (BGA) solder balls.

因此在三維空間(3D)封裝中有必要利用銅球的這一優勢,開發出以銅球為核心且可焊性更好的銅芯焊球,藉此來滿足先進工藝的需求。Therefore, it is necessary to take advantage of copper balls in three-dimensional space (3D) packaging to develop copper core balls with copper balls as the core and better solderability to meet the needs of advanced processes.

有鑑於此,本案申請人遂依其多年從事相關領域之研發經驗,針對前述之缺失進行深入探討,並依前述需求積極尋求解決之道,歷經長時間的努力研究與多次測試,終於完成本發明。In view of this, the applicant of this case based on his many years of R & D experience in related fields, conducted in-depth discussions on the aforementioned shortcomings, and actively sought solutions based on the aforementioned needs. After a long period of hard research and multiple tests, he completed this invention.

本發明之主要目的在於提供一種可焊性優異的銅芯焊球製備方法。The main object of the present invention is to provide a method for preparing a copper core solder ball with excellent solderability.

為達上述之目的,本發明高階電子封裝用銅芯焊球製備方法,係透過下列步驟所製成: A. 銅球製備:採用壓電震動工藝、切絲重熔工藝或冷鐓研磨工藝將銅粒或銅絲製成銅球。 B. 表面處理:將銅球進行研磨及微酸腐蝕處理,藉此來改善銅球表面的粗糙度。 C. 抗氧化處理:將經表面處理後的銅球進行抗氧化處理,藉此來保持銅球表面的光澤。 D. 篩選處理:將經抗氧化處理後的銅球進行真圓度以及尺寸的篩選。 E. 電鍍處理:將經過篩選後的銅球先進行表面的酸蝕處理,待完成酸蝕處理後便將銅球表面鍍上電鍍層,而在電鍍的過程中還會加入陪鍍球體與銅球一同電鍍,當電鍍完成後即可取得銅芯焊球。 F. 二次抗氧化處理:將完成電鍍處理的銅芯焊球再進行第二次的抗氧化處理,並讓電鍍層保持焊接性。 G. 成品篩選:將經二次抗氧化處理過的銅芯焊球進行最後的真圓度和尺寸篩選,當篩選完成後就可取得適用於電子封裝的銅芯焊球。In order to achieve the above-mentioned purpose, the method for preparing copper core solder balls for high-end electronic packaging according to the present invention is prepared through the following steps: A. Copper ball preparation: The piezoelectric vibration process, the wire remelting process or the cold heading grinding process are used. Copper pellets or copper wires are made into copper balls. B. Surface treatment: The copper balls are ground and slightly acid-etched to improve the surface roughness of the copper balls. C. Anti-oxidation treatment: The surface of the copper balls is subjected to anti-oxidation treatment to maintain the luster of the surface of the copper balls. D. Screening treatment: The roundness and size of copper balls after oxidation treatment are screened. E. Electroplating treatment: The surface of the copper balls after being screened is subjected to acid etching treatment. After the acid etching treatment is completed, the surface of the copper balls is plated with an electroplating layer. During the electroplating process, the accompanying balls and copper are also added. Balls are plated together, and copper-cored solder balls can be obtained after the plating is completed. F. Secondary anti-oxidation treatment: The copper-cored solder ball that has been electroplated is subjected to a second anti-oxidation treatment, and the electroplated layer is maintained in solderability. G. Finished product screening: The final roundness and size screening of the copper cored solder balls that have been treated with secondary oxidation resistance, and the copper cored solder balls suitable for electronic packaging can be obtained after the screening is completed.

本發明高階電子封裝用銅芯焊球製備方法優點在於抗氧化的處理能確保銅芯焊球電鍍層的焊接性。The method for preparing a copper core solder ball for high-level electronic packaging according to the present invention has the advantage that the anti-oxidation treatment can ensure the solderability of the copper core solder ball plating layer.

期許本發明之目的、功效、特徵及結構能夠有更為詳盡之瞭解,茲舉較佳實施例並配合圖式說明如後。It is expected that the purpose, effects, features, and structure of the present invention can be understood in more detail. The preferred embodiments are described below with reference to the drawings.

首先請參閱圖1,圖1為本發明高階電子封裝用銅芯焊球製備方法流程示意圖。Please refer to FIG. 1 first. FIG. 1 is a schematic flowchart of a method for preparing a copper core solder ball for high-end electronic packaging according to the present invention.

本發明高階電子封裝用銅芯焊球製備方法1,係透過下列步驟所製成: A. 銅球製備11:採用壓電震動工藝、切絲重熔工藝或冷鐓研磨工藝將銅粒或銅絲製成銅球,而該銅球的純度為99.9%以上。 B. 表面處理12:將銅球進行研磨及微酸腐蝕處理,藉此來改善銅球表面粗糙度。 C. 抗氧化處理13:將經表面處理12後的銅球進行抗氧化處理,藉此來保持銅球表面的光澤,同時避免銅球經長時間存放而氧化使其表面出現明顯色差。 D. 篩選處理14:將經抗氧化處理13後的銅球進行真圓度的篩選,而每顆銅球的真圓度需小於0.03,接著再對銅球進行尺寸的篩選,每顆銅球的尺寸需介於1~900 之間。 E. 電鍍處理15:將經過篩選處理14後的銅球先進行表面的酸蝕處理,待完成酸蝕處理後便將銅球表面鍍上電鍍層,而在電鍍的過程中還會加入陪鍍球體與銅球一同電鍍,當電鍍完成後即可取得銅芯焊球。 F. 二次抗氧化處理16:將完成電鍍處理15的銅芯焊球再進行第二次的抗氧化處理,目的是讓電鍍層保持焊接性,並防止電鍍層氧化導致在電子封裝回焊時出現焊接不良的問題。 G. 成品篩選17:將經二次抗氧化處理16過的銅芯焊球進行最後的篩選,其中該銅芯焊球真圓度需小於0.03,且尺寸需介於10~1000 之間,當篩選完成後就可取得適用於電子封裝的銅芯焊球。 The method 1 for preparing copper core solder balls for high-level electronic packaging according to the present invention is prepared through the following steps: A. Copper ball preparation 11: using a piezoelectric vibration process, a cutting and remelting process, or a cold heading grinding process to remove copper particles or copper The silk is made of copper balls, and the purity of the copper balls is more than 99.9%. B. Surface treatment 12: The copper balls are ground and slightly acid-etched to improve the surface roughness of the copper balls. C. Anti-oxidation treatment 13: The copper balls after the surface treatment 12 are subjected to anti-oxidation treatment, so as to maintain the luster of the copper ball surface, and at the same time prevent the copper balls from oxidizing after a long period of storage to cause obvious color differences on the surface. D. Screening 14: The roundness of copper balls after anti-oxidation treatment 13 is screened, and the roundness of each copper ball needs to be less than 0.03, and then the size of the copper balls is screened. The size needs to be between 1 ~ 900 between. E. Plating treatment 15: The surface of the copper balls after the screening treatment 14 is subjected to acid etching treatment. After the acid etching treatment is completed, the surface of the copper balls is plated with an electroplating layer, and an accompanying plating is added during the plating process. The ball is electroplated together with the copper ball, and the copper-core solder ball can be obtained after the electroplating is completed. F. Secondary anti-oxidation treatment 16: The copper-cored solder balls that have completed the electroplating treatment 15 are subjected to the second anti-oxidation treatment. The purpose is to keep the electroplated layer solderable and prevent the electroplated layer from being oxidized, which may cause re-soldering of electronic packages. Problems with poor welding occurred. G. Finished product screening 17: Final screening of copper-cored solder balls that have undergone secondary oxidation treatment 16. The copper-cored solder balls must have a true roundness of less than 0.03, and the size must be between 10 and 1000. In between, when the screening is completed, copper-core solder balls suitable for electronic packaging can be obtained.

上述步驟中需特別注意的是,在銅球製備11中所使用的壓電震動工藝、切絲重熔工藝或冷鐓研磨工藝的差異在於所製造出的銅球尺寸不同。In the above steps, special attention should be paid to the difference in the size of the copper balls produced by the piezoelectric vibration process, the shredding remelting process, or the cold heading grinding process used in the copper ball preparation 11.

篩選處理14是為了控制銅球的真圓度及尺寸符合加工的要求,並使後續的電鍍處理15能更好控制電鍍層的厚度,且有助於降低後續加工的不良率。The screening process 14 is to control the roundness and size of the copper balls to meet the processing requirements, and to enable the subsequent plating process 15 to better control the thickness of the plating layer and help reduce the defect rate of subsequent processing.

電鍍處理15中所採用的電鍍方式有化學電鍍、震動電鍍、滾動電鍍…等,而採用不同的電鍍方式是為了配合不同尺寸的銅球,而電鍍的過程中所使用的陪鍍球體尺寸需與銅球以及電鍍完成後的銅芯焊球有明顯差別,以便於完成電鍍後能快速的篩選與分離銅芯焊球和陪鍍球體,其中,最適合做為陪鍍球體的材料為錫球。The electroplating methods used in the electroplating process 15 include chemical plating, vibration plating, rolling plating, etc., and different plating methods are used to match copper balls of different sizes. The size of the accompanying ball used in the electroplating process must be the same as There are obvious differences between copper balls and copper-cored solder balls after electroplating, in order to quickly screen and separate copper-cored solder balls and co-plated balls after electroplating. Among them, the most suitable material for the co-plated balls is tin balls.

另外,電鍍處理15中鍍在銅球上的電鍍層可以為純金屬(例如:純錫、純金、純鎳…等)、合金(例如:錫鉛合金、普通合金、低α放射合金…等)以及複合鍍層(例如:鍍鎳層和純錫複合鍍層)其中任意一種,此外需特別注意的是,若該電鍍層為複合鍍層,則在電鍍的過程中會先鍍上一層厚度約1~10 的鎳,之後再鍍上一層厚度約5~100 的錫。 In addition, the plating layer plated on the copper balls in the electroplating treatment 15 may be pure metal (for example: pure tin, pure gold, pure nickel, etc.), alloy (for example: tin-lead alloy, ordinary alloy, low alpha radiation alloy, etc.) And composite plating (for example, nickel plating and pure tin composite plating). In addition, it should be noted that if the plating layer is a composite plating layer, a thickness of about 1 to 10 will be plated during the plating process. Nickel, and then coated with a thickness of about 5 to 100 Tin.

綜合上述,本發明高階電子封裝用銅芯焊球製備方法具有下列優點: 1. 電鍍層能依照不同種類的電子封裝來選用最適當的金屬來做為電鍍層。 2. 抗氧化的處理能保持電鍍層的焊接性,能避免經長時間存放後電鍍層氧化而使其在電子封裝回焊時出現焊接不良的問題To sum up, the method for preparing copper core solder balls for high-end electronic packaging of the present invention has the following advantages: 1. The plating layer can select the most appropriate metal as the plating layer according to different types of electronic packages. 2. The anti-oxidation treatment can maintain the solderability of the electroplated layer, and avoid the oxidation of the electroplated layer after long-term storage, which will cause the problem of poor soldering during the reflow of the electronic package.

故,本發明在同類產品中具有極佳之進步性以及實用性,同時查遍國內外關於此類結構之技術資料文獻後,確實未發現有相同或近似之構造存在於本案申請之前,因此本案應已符合『創作性』、『合於產業利用性』以及『進步性』的專利要件,爰依法提出申請之。Therefore, the present invention has excellent progress and practicability in similar products. At the same time, after reviewing domestic and foreign technical information on such structures, it was found that no identical or similar structure exists before the application in this case. Patent applications that have met the "creative", "suitable for industrial use", and "progressive" requirements should be filed in accordance with the law.

唯,以上所述者,僅係本發明之較佳實施例而已,舉凡應用本發明說明書及申請專利範圍所為之其它等效結構變化者,理應包含在本發明之申請專利範圍內。However, the above are only preferred embodiments of the present invention. For example, any other equivalent structural changes applied to the description of the present invention and the scope of patent application should be included in the scope of patent application of the present invention.

1‧‧‧本發明高階電子封裝用銅芯焊球製備方法1‧‧‧ Method for preparing copper core solder ball for high-level electronic packaging of the present invention

11‧‧‧銅球製備 11‧‧‧ Copper Ball Preparation

12‧‧‧表面處理 12‧‧‧ surface treatment

13‧‧‧抗氧化處理 13‧‧‧Anti-oxidation treatment

14‧‧‧篩選處理 14‧‧‧ Screening

15‧‧‧電鍍處理 15‧‧‧Plating treatment

16‧‧‧二次抗氧化處理 16‧‧‧ secondary oxidation treatment

17‧‧‧成品篩選 17‧‧‧ Finished product screening

圖1:本發明高階電子封裝用銅芯焊球製備方法流程示意圖。FIG. 1 is a schematic flowchart of a method for preparing a copper core solder ball for high-level electronic packaging according to the present invention.

無。no.

Claims (9)

一種高階電子封裝用銅芯焊球製備方法,係透過下列步驟所製成:A.銅球製備:採用壓電震動工藝、切絲重熔工藝或冷鐵研磨工藝將銅粒或銅絲製成銅球;B.表面處理:將銅球進行研磨及微酸腐蝕處理;C.抗氧化處理:將經表面處理後的銅球進行抗氧化處理,藉此來保持銅球表面的光澤;D.篩選處理:將經抗氧化處理後的銅球進行真圓度以及尺寸的篩選,其中,該篩選處理中所選出的銅球真圓度小於0.03;E.電鍍處理:將經過篩選後的銅球先進行表面的酸蝕處理,待完成酸蝕處理後便將銅球表面鍍上電鍍層,而在電鍍的過程中會加入陪鍍球體與銅球一同電鍍,當電鍍完成後即可取得銅芯焊球;F.二次抗氧化處理:將完成電鍍處理的銅芯焊球再進行第二次的抗氧化處理;G.成品篩選:將經二次抗氧化處理過的銅芯焊球進行真圓度和尺寸篩選,並取得適用於電子封裝的銅芯焊球。A method for preparing copper core solder balls for high-level electronic packaging, which is prepared through the following steps: A. Copper ball preparation: using piezoelectric vibration process, cutting and remelting process or cold iron grinding process to make copper particles or copper wire Copper balls; B. Surface treatment: copper balls are ground and slightly acid-etched; C. Anti-oxidation treatment: The copper balls after the surface treatment are subjected to oxidation treatment to maintain the luster of the copper ball surface; D. Screening treatment: The copper balls after oxidation treatment are screened for roundness and size. Among them, the roundness of the copper balls selected in the screening process is less than 0.03; E. Plating treatment: the screened copper balls The surface is acid-etched first. After the acid-etching treatment is completed, the surface of the copper ball is plated with an electroplating layer. During the electroplating process, the accompanying ball and copper ball are added together to plate, and the copper core can be obtained after the plating is completed. Solder balls; F. Secondary anti-oxidation treatment: The copper-cored solder balls that have been plated are subjected to a second anti-oxidation treatment; G. Finished product screening: Copper-cored solder balls that have been subjected to secondary anti-oxidation treatment Roundness and size filtering and get applied to Cu core solder balls sub-package. 如請求項第1項所述之高階電子封裝用銅芯焊球製備方法,其中,該銅球製備中銅球的純度在99.9%以上。The method for preparing copper core solder balls for high-end electronic packaging according to item 1 of the claim, wherein the purity of the copper balls in the preparation of the copper balls is above 99.9%. 如請求項第1項所述之高階電子封裝用銅芯焊球製備方法,其中,該篩選處理中所選出的銅球尺寸介於1~900μm之間。The method for preparing copper core solder balls for high-end electronic packaging according to item 1 of the claim, wherein the size of the copper balls selected in the screening process is between 1 and 900 μm. 如請求項第1項所述之高階電子封裝用銅芯焊球製備方法,其中,該電鍍處理中的鍍層可以為純金屬、合金、複合金屬其中任意一種。The method for preparing copper core solder balls for high-end electronic packaging according to item 1 of the claim, wherein the plating layer in the electroplating process may be any one of pure metal, alloy and composite metal. 如請求項第5項所述之高階電子封裝用銅芯焊球製備方法,其中,該純金屬為純錫、純金、純鎳其中任意一種。The method for preparing copper core solder balls for high-end electronic packaging according to item 5 of the claim, wherein the pure metal is any one of pure tin, pure gold, and pure nickel. 如請求項第5項所述之高階電子封裝用銅芯焊球製備方法,其中,該合金為錫鉛合金、普通合金、低α放射合金其中任意一種。The method for preparing a copper core solder ball for high-end electronic packaging according to item 5 of the claim, wherein the alloy is any one of tin-lead alloy, ordinary alloy, and low-alpha radiation alloy. 如請求項第5項所述之高階電子封裝用銅芯焊球製備方法,其中,該複合金屬為鎳和錫的複合金屬。The method for preparing a copper core solder ball for high-end electronic packaging according to claim 5, wherein the composite metal is a composite metal of nickel and tin. 如請求項第1項所述之高階電子封裝用銅芯焊球製備方法,其中,該成品篩選所選出的銅芯焊球真圓度小於0.03。The method for preparing copper core solder balls for high-end electronic packaging according to item 1 of the claim, wherein the roundness of the copper core solder balls selected for the finished product screening is less than 0.03. 如請求項第1項所述之高階電子封裝用銅芯焊球製備方法,其中,該成品篩選選出的銅芯焊球尺寸介於10~1000μm之間。The method for preparing copper core solder balls for high-end electronic packaging according to item 1 of the claim, wherein the size of the copper core solder balls selected by the finished product screening is between 10 and 1000 μm.
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