TWI663060B - Peeling device and method of laminated body, and manufacturing method of electronic device - Google Patents

Abstract

The present invention relates to a peeling device for a laminated body, which includes a tilting device that tilts a laminated body formed by peelingly attaching a first substrate and a second substrate through an adsorption layer with respect to a horizontal direction; a liquid; A supply device that fills the side surface of at least the upper end portion side of the inclined laminated body with liquid; and a peeling device that performs the interface between the first substrate and the adsorption layer from the upper end portion of the inclined laminated body toward the lower end portion Peel off.

Description

Peeling device and method of laminated body, and manufacturing method of electronic device

The present invention relates to a peeling device and a peeling method of a laminated body, and a manufacturing method of an electronic device.

Along with the reduction in thickness and weight of electronic devices such as display panels, solar cells, and thin-film secondary batteries, thinner substrates (first substrates) such as glass plates, resin plates, and metal plates used in such electronic devices are required.

However, if the thickness of the substrate becomes thin, the substrate will be degraded. Therefore, it is difficult to form functional layers for electronic devices (TFT: Thin Film Transistor) and color filter layers (CF: Color) on the surface of the substrate. Filter)).

Therefore, a method for manufacturing an electronic device is proposed, in which a reinforcing plate (second substrate) made of glass is attached to the back surface of the substrate to form a laminated body in which the substrate is reinforced by the reinforcing plate, and the laminated body is placed on the substrate in the state of the laminated body. A functional layer is formed on the surface. In this manufacturing method, the substrate is rationally improved, and therefore, a functional layer can be formed on the surface of the substrate well. The reinforcing plate is peeled from the substrate after the functional layer is formed.

The method for peeling a reinforcing plate disclosed in Patent Document 1 is to make a reinforcing plate or a substrate, or to separate them from each other, from one of two corners located on a diagonal line of a rectangular laminated body toward the other. It bends and deforms in the direction. At this time, in order to perform the peeling smoothly, a peeling starting portion is formed in one corner portion of the laminated body. The peeling starting portion is made by piercing a peeling blade into a specific amount of the interface between the substrate and the reinforcing plate from the end surface of the laminated body.

On the other hand, Patent Document 2 discloses a method for spraying at the interface between a substrate and an element formation layer. A peeling method in which an ionized liquid is sprayed to peel a device from a substrate.

[Prior technical literature] [Patent Literature]

[Patent Document 1] International Publication No. 2011/024689

[Patent Document 2] Japanese Patent Laid-Open No. 2005-79553

In the peeling method of Patent Document 2, there is a problem that the blown-off liquid does not easily penetrate the front line of the peeling, and the peeling of the element formation layer cannot be performed smoothly.

The present invention has been made in view of such problems, and an object thereof is to provide a person who can peel off the interface while supplying liquid to the interface between the first substrate and the second substrate, and can use the liquid smoothly and in a short time. A peeling device and a peeling method of a peeled laminated body, and a manufacturing method of an electronic device.

In order to achieve the above-mentioned object, one aspect of the peeling device of the multilayer body of the present invention is characterized by including a tilting device that allows the first substrate and the second substrate to be releasably attached to each other through the adsorption layer with respect to the multilayer substrate. Tilt in a horizontal direction; a liquid supply device that fills the side of at least the upper end portion side of the tilted laminated body with liquid; and a peeling device that tilts the upper end portion of the laminated body toward the lower end portion on the first substrate and the first substrate The interface of the adsorption layer is peeled.

In another aspect of the peeling device of the laminated body of the present invention, in order to achieve the above-mentioned object, the first substrate and the second substrate are made of a laminated body which is releasably attached with an adsorption layer interposed between the first substrate and the second substrate. At least one of the second substrates is bent along a peeling travel direction from one end side to the other end side and peeled off at an interface between the first substrate and the adsorption layer, and includes a peeling assembly, A first holding member holding the first substrate, a second holding member holding the second substrate, and a surrounding layer The first housing of the body, and the space portion surrounded by the first holding member, the second holding member, and the first housing is configured as a liquid tank; a tilting device tilts the peeling assembly with respect to a horizontal direction A liquid supply device that supplies liquid to the liquid tank of the peel-off assembly to fill the side surface of the laminated body with liquid; and a peeling device that fills at least one of the first holding member and the second holding member It is bent along the above-mentioned peeling traveling direction from the upper end portion toward the lower end portion.

In order to achieve the above-mentioned object, one aspect of the method for peeling a laminated body of the present invention is characterized by including a step of tilting the laminated body formed by releasably attaching the first substrate and the second substrate with the adsorption layer interposed therebetween. Tilt in a horizontal direction; a liquid supply step that fills the side surface of at least the upper end portion side of the tilted laminated body with liquid; and a peeling step that moves the upper end portion of the tilted laminated body toward the lower end on the first substrate and the adsorption The interface of the layer is peeled off; and in the peeling step, the liquid is continuously supplied from the outside of the laminated body, and one side is moved downward by gravity on the peeling surface which appears sequentially through the peeling of the interface. Wet the peeling surface.

In another aspect of the method for peeling the laminated body of the present invention, in order to achieve the above-mentioned object, the first substrate and the above-mentioned substrate are made of a laminated body formed by releasably attaching a first substrate and a second substrate with an adsorption layer interposed therebetween. At least one of the second substrates is bent along a peeling traveling direction from one end side to the other end side and peeled off at an interface between the first substrate and the adsorption layer, wherein a peeling assembly is used, The peel-off assembly includes a first holding member that holds the first substrate, a second holding member that holds the second substrate, and a first case that surrounds the laminated body. The first holding member and the second holding member And the space portion surrounded by the first case is configured as a liquid tank, and the method for peeling the laminated body includes a tilting step for tilting the peeling assembly with respect to a horizontal direction, and a liquid supply step for the peeling assembly. The liquid tank supplies liquid to fill the side of the laminated body with liquid; and a peeling step that holds at least one of the first holding member and the second holding member. Along the member towards the upper portion from the lower end portion of the release travel The direction is bent; and in the above-mentioned peeling step, the liquid is continuously supplied from the outside of the laminated body, and the above-mentioned peeling is moved while one side is moved downward by gravity on the peeling surface which appears sequentially through the peeling of the interface Face wet.

In order to achieve the above-mentioned object, one aspect of the manufacturing method of the electronic device of the present invention includes a functional layer forming step of laminating a first substrate and a second substrate with an adsorption layer releasably attached to the above substrate. A functional layer is formed on the exposed surface of the first substrate; and a separation step of separating the second substrate from the first substrate on which the functional layer is formed; the separation step includes a tilting step that faces the multilayer body Tilt in the horizontal direction; a liquid supply step that fills the side of at least the upper end portion side of the tilted laminated body with liquid; and a peeling step that moves the first substrate and the The interface of the adsorption layer is peeled off; and in the above-mentioned peeling step, the liquid is continuously supplied from the outside of the laminated body, and one side is subjected to gravity by peeling on the interface between the first substrate and the adsorption layer by gravity. The peeling surfaces appearing in sequence move downward while wetting the peeling surfaces.

In order to achieve the above-mentioned object, another aspect of the manufacturing method of the electronic device of the present invention includes a functional layer forming step of laminating the first substrate and the second substrate with the adsorption layer peelably attached to the above-mentioned layer body. A functional layer is formed on the exposed surface of the first substrate; and a separation step of separating the second substrate from the first substrate on which the functional layer is formed; the separation step uses a peel-off assembly, and the peel-off assembly is provided with holding The first holding member of the first substrate, the second holding member holding the second substrate, and the first case surrounding the laminated body, and the first holding member, the second holding member, and the first The space portion surrounded by the casing is configured as a liquid tank, and the separation step includes a tilting step that tilts the peeling assembly with respect to a horizontal direction, and a liquid supply step that supplies liquid to the liquid tank of the peeling assembly so that A side surface of the laminated body is filled with a liquid; and a peeling step that moves at least one of the first holding member and the second holding member along the upper end Peeling direction of travel of the lower end portion is bent; and over In the peeling step, the liquid is continuously supplied from the outside of the laminated body, and while the peeling surface sequentially appearing by the peeling of the interface between the first substrate and the adsorption layer is moved downward by gravity under the peeling surface. Wet the peeling surface.

According to the aspect of the present invention, since the side surface of at least the upper end side of the slanted laminated body is filled with liquid, when the peeling is started from this state, the liquid directly flows into the peeling surfaces that appear sequentially by peeling on the interface. And wet the peeling surface directly while moving downward on the peeling surface by gravity.

That is, the aspect of the present invention includes a matter of inclining the laminated body and a matter of filling the side surface of the laminated body with liquid, whereby the liquid is caused to spread across the front line by relying on the gravity of the liquid.

In another aspect of the present invention, a peeling assembly configured as a liquid tank with a space portion surrounded by the first holding member, the second holding member, and the first case is performed at the interface between the first substrate and the adsorption layer. Peel off.

In this case, in the tilting step, the peel-off assembly is tilted with respect to the horizontal direction. Next, in the liquid supply step, liquid is supplied to the liquid tank of the peel-off assembly, so that the side surface of the laminated body is filled with liquid. Next, in the peeling step, at least one of the first holding member and the second holding member is bent along a peeling traveling direction from the upper end portion to the lower end portion, and peeled at the interface between the first substrate and the adsorption layer. In this peeling step, while the liquid is moved downward by gravity on the peeling surfaces that appear sequentially in the peeling through the interface, the peeling surface is directly wetted.

In another aspect of the present invention, when the stripping front line advances from the upper end to the lower end by the stripping action in the stripping step, the stripped slope is removed by the effect of gravity due to the tilt. Except for the liquid moving on the front of the peeling surface, the peeling surface that appears during peeling is lower than the liquid level of the liquid filled in the liquid tank. Therefore, the liquid is directly directed along the front of the peeling by the effect of gravity based on the height difference. Supply to the front.

The tilt direction of the peel-off assembly is preferably such that the corners of the upper end of the laminated body are arranged in the The direction of the highest position. That is, the corners of the upper end portion in the laminated body at which peeling starts are the highest, and the corners of the lower end portion on the diagonal line in the corner portion are the lowest. When the peeling travel direction is set from the corner of the upper end to the corner of the lower end, the peeling line gradually becomes longer from the peeling start position to the peeling middle position, but the liquid also faces from the side of the laminate. This peeling front line flows in. At this time, since the laminated body is inclined, the liquid on the peeling surface also flows toward the front of the peeling by gravity. As a result, in the vicinity of the peeling line, peeling was performed in a liquid state substantially, and peeling progressed smoothly.

In another aspect of the present invention, it is preferable that the liquid supply hole is provided inside the first case.

According to another aspect of the present invention, the liquid tank is supplied with liquid from the supply hole, the liquid tank is filled with liquid, and the side surface of the laminated body is filled with liquid. The supply hole is preferably provided in the first holding member or the second holding member, and is provided in a lower portion of the liquid tank when the peel-off assembly is inclined. The liquid is supplied to the liquid tank from the supply hole in the lower part of the liquid tank, and the liquid supply is stopped when the liquid overflows from the upper part of the liquid tank or immediately before the liquid overflows. This makes it easy to confirm that the liquid tank is full of liquid. Moreover, peeling may be performed while supplying liquid to a liquid tank.

In another aspect of the present invention, it is preferable that the peel-off assembly includes a second case surrounding the first case, and a drainage hole is provided between the first case and the second case.

According to the other aspect of the present invention, the liquid overflowing from the first case is blocked by the second case and is discharged from the drainage hole. Therefore, the liquid can be prevented from being discharged from the peeling assembly to the outside. Thereby, the use environment of the peeling device is improved, and if the liquid discharged from the drainage hole is recovered, the liquid can be reused.

In the present invention, the adsorption layer is preferably a polyimide resin layer, and the liquid is preferably water.

The first case of the aforementioned another aspect of the present invention is preferably a sponge with independent bubbles. The first housing is configured by a first holding member and a second holding member to form a liquid tank. The foamed sponge abuts on the first holding member and the second holding member with elasticity. Thereby, the watertightness of the liquid tank is improved.

According to the peeling device and the peeling method of the laminated body of the present invention, and the manufacturing method of the electronic device, the liquid is peeled at the interface while the liquid is supplied to the interface between the first substrate and the adsorption layer, and the liquid can be used smoothly and in a short time. Of stripping.

1‧‧‧ laminated body

1A‧‧‧The first laminated body

1B‧‧‧Second layered body

2‧‧‧ substrate

2a‧‧‧ surface of substrate

2b‧‧‧ Back of substrate

2A‧‧‧ substrate

2Aa‧‧‧ surface of substrate

2B‧‧‧ substrate

2Ba‧‧‧ surface of substrate

3‧‧‧ Reinforcing board

3a‧‧‧ Reinforcing board surface

3A‧‧‧ Reinforcing board

3B‧‧‧ Reinforcing board

Back of 3Bb‧‧‧ Reinforcing Board

4‧‧‧ resin layer

4A‧‧‧Resin layer

4B‧‧‧Resin layer

6‧‧‧ laminated body

6A, 6B‧‧‧ Corner

7‧‧‧ functional layer

10‧‧‧ peeling start part making device

12‧‧‧ platform

14‧‧‧ Supporter

16‧‧‧ height adjustment device

18‧‧‧feeding device

20‧‧‧ Liquid

22‧‧‧Liquid supply device

24‧‧‧ interface

26‧‧‧ stripping start

28‧‧‧ interface

30‧‧‧ stripping start

40‧‧‧ peeling device

42‧‧‧ strip assembly

44‧‧‧ movable body

46‧‧‧ flexible board

46A‧‧‧Corner

46B‧‧‧ Corner

48‧‧‧ flexible board

48A‧‧‧Corner

48B‧‧‧ Corner

50‧‧‧body board

52‧‧‧ porous sheet

54‧‧‧shell

56‧‧‧slot

58‧‧‧through hole

60‧‧‧Vacuum pump

62‧‧‧supply hole

64‧‧‧through hole

66‧‧‧ liquid delivery pump

68‧‧‧ liquid tank

70‧‧‧shell

71‧‧‧through hole

72‧‧‧ Drain hole

74‧‧‧body board

76‧‧‧ porous sheet

78‧‧‧slot

80‧‧‧through hole

82‧‧‧Vacuum pump

84‧‧‧through hole

86‧‧‧ Mobile device

88‧‧‧Drive

90‧‧‧ Controller

92‧‧‧ par

94‧‧‧ ball joint

96‧‧‧Frame

98‧‧‧ buffer member

100‧‧‧ liquid

102‧‧‧ Panel

104‧‧‧Adsorption pad

106‧‧‧ transport device

A‧‧‧arrow

N‧‧‧knife

θ‧‧‧ tilt angle

FIG. 1 is an enlarged side view of a main part showing an example of a laminated body supplied to a manufacturing step of an electronic device.

FIG. 2 is an enlarged side view showing a main part of an example of a laminated body produced in the middle of the manufacturing steps of an LCD.

FIGS. 3 (A) to 3 (E) are explanatory diagrams showing a method for forming a peeling start portion using a peeling start portion forming apparatus.

FIG. 4 is a plan view of a laminate in which a peeling starting portion is manufactured by a peeling starting portion manufacturing method.

Fig. 5 is a longitudinal sectional view showing the configuration of a peeling device according to the embodiment.

FIG. 6 is a plan view schematically showing a peel-off assembly in which a plurality of movable bodies are arranged relative to the peel-off assembly.

Fig. 7 (A) is a plan view of a flexible plate constituting a peel-off assembly, and Fig. 7 (B) is a side sectional view of the flexible plate taken along the line C-C of Fig. 7 (A).

Fig. 8 (A) is a bottom view of the flexible plate constituting the peel-off assembly, and Fig. 8 (B) is a side sectional view of the flexible plate taken along the line D-D of Fig. 8 (A).

FIG. 9 (A) is a side cross-sectional view showing the correspondence between the flexible plate and the laminated body, and FIG. 9 (B) is a side cross-sectional view of the laminated body held by the flexible plate.

FIG. 10 is a side cross-sectional view showing a state in which the peel-off assembly is tilted to a peel-starting posture.

FIGS. 11 (A) to (D) show the steps of holding the laminated body in a peel-off assembly to peel it off. The operation explanatory diagram of the step of assembling the assembly at an angle of θ and the step of filling the liquid tank with liquid.

12 (A) to (E) are operation explanatory diagrams showing a step of bending and deforming the flexible plate on the lower side and peeling off the reinforcing plate on the lower side.

13 (A) to (D) are operation explanatory diagrams showing a step of removing the reinforcing plate on the lower side.

14 (A) to (D) are operation explanatory diagrams showing the steps of bending and deforming the flexible plate on the upper side and peeling off the reinforcing plate on the upper side.

15 (A) to (D) are operation explanatory diagrams showing a step of removing the reinforcing plate on the upper side and a step of removing the panel.

Hereinafter, embodiments of the present invention will be described based on the accompanying drawings.

Hereinafter, the case where the peeling device and peeling method of the laminated body of this invention are used in the manufacturing process of an electronic device is demonstrated.

The electronic device refers to electronic components such as a display panel, a solar cell, and a thin film secondary battery. Examples of the display panel include a liquid crystal display (LCD: Liquid Crystal Display) panel, a plasma display panel (PDP: Plasma Display Panel), and an organic EL display (OELD: Organic Electro Luminescence Display) panel.

[Manufacturing steps of electronic devices]

The electronic device is manufactured by forming a functional layer for an electronic device (if it is an LCD, a thin film transistor (TFT), a color filter layer (CF)) formed on the surface of a substrate made of glass, resin, or metal.

Before forming the functional layer, the substrate is laminated with a back surface attached to a reinforcing plate. Thereafter, a functional layer is formed on the surface of the substrate in the state of a laminate. After the functional layer is formed, the reinforcing plate is peeled from the substrate.

That is, in the manufacturing steps of the electronic device, A functional layer forming step of forming a functional layer on the surface, and a separating step of separating the reinforcing plate from the substrate on which the functional layer is formed. In the separation step, the peeling device and peeling method of the laminated body of the present invention are applied.

[Laminated body 1]

FIG. 1 is an enlarged side view showing a main part of an example of the laminated body 1.

The laminated body 1 includes a substrate (first substrate) 2 that forms a functional layer, and a reinforcing plate (second substrate) 3 that reinforces the substrate 2. The reinforcing plate 3 is provided with a resin layer 4 as an adsorption layer on the surface 3 a, and the rear surface 2 b of the substrate 2 is attached to the resin layer 4. That is, the substrate 2 is releasably attached to the reinforcing plate 3 via the resin layer 4 through the Van der Waals force acting on the resin layer 4 or the adhesive force of the resin layer 4.

[Substrate 2]

The substrate 2 forms a functional layer on its surface 2a. Examples of the substrate 2 include a glass substrate, a ceramic substrate, a resin substrate, a metal substrate, and a semiconductor substrate. Among these substrates, the glass substrate is excellent in chemical resistance and moisture permeability resistance, and has a small linear expansion coefficient. Therefore, it is preferable as the substrate 2 for electronic devices. In addition, it also has the advantage that as the linear expansion coefficient becomes smaller, the pattern of the functional layer formed at high temperature is less likely to shift when cooled.

Examples of the glass of the glass substrate include alkali-free glass, borosilicate glass, soda lime glass, high silica glass, and other oxide-based glasses containing silicon oxide as a main component. The oxide-based glass is preferably a glass having a silicon oxide content of 40 to 90% by mass based on an acidic compound.

It is preferable to select and use glass suitable for the kind of electronic device to be manufactured, and glass suitable for the manufacturing steps thereof as the glass of the glass substrate. For example, it is preferable to use glass (alkali-free glass) that does not substantially contain an alkali metal component as the glass substrate for a liquid crystal panel.

The thickness of the substrate 2 is set according to the type of the substrate 2. For example, when a glass substrate is used for the substrate 2, in order to reduce the weight and thickness of the electronic device, the thickness is preferably set to 0.7 mm or less, more preferably set to 0.3 mm or less, and further preferably set to 0.1. mm or less. When the thickness is 0.3 mm or less, good flexibility can be imparted to the glass substrate. Furthermore, when the thickness is 0.1 mm or less, the glass substrate can be wound into a roll shape, but from the viewpoint of manufacturing the glass substrate and the viewpoint of handling the glass substrate, the thickness is preferably 0.03 mm or more. .

In addition, in FIG. 1, the substrate 2 includes one substrate, but the substrate 2 may include a plurality of substrates. That is, the substrate 2 may include a laminated body in which a plurality of substrates are laminated. In this case, the total thickness of all the substrates constituting the substrate 2 becomes the thickness of the substrate 2.

〔Boost plate 3〕

Examples of the reinforcing plate 3 include a glass substrate, a ceramic substrate, a resin substrate, a metal substrate, and a semiconductor substrate.

The thickness of the reinforcing plate 3 is set to 0.7 mm or less, and is set according to the type, thickness, and the like of the reinforcing substrate 2. Furthermore, the thickness of the reinforcing plate 3 may be thicker or thinner than the substrate 2, but it is preferably 0.4 mm or more for reinforcing the substrate 2.

Furthermore, in this example, the reinforcing plate 3 includes one substrate, but the reinforcing plate 3 may also include a laminated body in which a plurality of substrates are laminated. In this case, the total thickness of all the substrates constituting the reinforcing plate 3 becomes the thickness of the reinforcing plate 3.

[Resin layer 4]

As the resin layer 4, in order to prevent peeling between the resin layer 4 and the reinforcing plate 3, the bonding force with the reinforcing plate 3 is set higher than the bonding force with the substrate 2. Thereby, in the peeling step, the interface between the resin layer 4 and the substrate 2 is peeled.

The resin constituting the resin layer 4 is not particularly limited, and examples thereof include polyimide resin, acrylic resin, polyolefin resin, polyurethane resin, silicone resin, and polyimide silicone resin. Several types of resins can also be mixed and used. Among these, from the viewpoints of heat resistance and releasability, polyimide resin, polyimide silicone resin, and silicone resin are preferred. In the embodiment, as the resin layer 4, a polyimide resin layer is exemplified.

The thickness of the resin layer 4 is not particularly limited, but is preferably set to 1 to 50 μm, and more preferably It is set to 4 to 20 μm. By setting the thickness of the resin layer 4 to 1 μm or more, when bubbles or foreign matter are mixed between the resin layer 4 and the substrate 2, the thickness of the bubbles or foreign matter can be absorbed by the deformation of the resin layer 4. On the other hand, by setting the thickness of the resin layer 4 to 50 μm or less, the formation time of the resin layer 4 can be shortened, and since the resin of the resin layer 4 is not excessively used, it is economical.

In addition, the outer shape of the resin layer 4 is preferably the same as or smaller than the outer shape of the reinforcing plate 3 in such a manner that the reinforcing plate 3 can support the entirety of the resin layer 4. The outer shape of the resin layer 4 is preferably the same as or larger than the outer shape of the substrate 2 so that the resin layer 4 can closely contact the entire substrate 2.

In addition, in FIG. 1, the resin layer 4 includes one layer, but the resin layer 4 may include two or more layers. In this case, the total thickness of all the layers constituting the resin layer 4 becomes the thickness of the resin layer 4. In this case, the types of resin constituting each layer may be different.

Furthermore, in the embodiment, the resin layer 4 as an organic film is used as the adsorption layer, but an inorganic layer may be used instead of the resin layer 4. The inorganic film constituting the inorganic layer includes, for example, at least one selected from the group consisting of a metal silicide, a nitride, a carbide, and a carbonitride.

Furthermore, although the laminated body 1 of FIG. 1 includes the resin layer 4, the resin layer 4 may be removed and a structure including the substrate 2 and the reinforcing plate 3 may be used. In this case, the substrate 2 and the reinforcing plate 3 are releasably attached by a Van der Waals force or the like acting between the substrate 2 and the reinforcing plate 3. When the substrate 2 and the reinforcing plate 3 are glass substrates, it is preferable to form an inorganic thin film on the surface 3a of the reinforcing plate 3 so that the substrate 2 and the reinforcing plate 3 do not adhere to each other due to high temperature.

[Laminated body 6 with functional layers formed]

A functional layer is formed on the surface 2 a of the substrate 2 of the laminated body 1 by a functional layer forming step. As a method for forming the functional layer, a vapor deposition method such as a CVD (Chemical Vapor Deposition) method, a PVD (Physical Vapor Deposition) method, or a sputtering method is used. The functional layer is formed into a specific pattern by photolithography and etching. case.

FIG. 2 is an enlarged side view showing a main part of an example of a rectangular laminated body 6 manufactured in the middle of the manufacturing steps of the LCD.

The laminated body 6 is composed of a reinforcing plate 3A, a resin layer 4A, a substrate 2A, a functional layer 7, a substrate 2B, a resin layer 4B, and a reinforcing plate 3B in this order. That is, the laminated body 6 shown in FIG. 2 corresponds to the laminated body 1 shown in FIG. 1 which is symmetrically arranged via the functional layer 7. Hereinafter, the laminated body including the substrate 2A, the resin layer 4A, and the reinforcing plate 3A is referred to as a first laminated body 1A, and the laminated body including the substrate 2B, the resin layer 4B, and the reinforcing plate 3B is referred to as a second laminated body 1B.

A thin film transistor (TFT) as a functional layer 7 is formed on the surface 2Aa of the substrate 2A of the first laminated body 1A, and a color filter layer (CF) as the functional layer 7 is formed on the surface 2Ba of the substrate 2B of the second laminated body 1B. ).

The first laminated body 1A and the second laminated body 1B are integrated with each other by overlapping the surfaces 2Aa and 2Ba of the substrates 2A and 2B. Thereby, the laminated body 6 of the structure which the 1st laminated body 1A and the 2nd laminated body 1B were arrange | positioned symmetrically via the functional layer 7 was manufactured.

The laminated body 6 is formed by using a knife to form the peeling starting portion in the peeling starting portion preparing step of the separating step, and then the reinforcing plates 3A and 3B are sequentially peeled off in the peeling step of the separating step. Thereafter, a polarizing plate and a backlight device are installed. Etc. to manufacture LCD as a product.

[Peeling Initiation Device 10]

FIGS. 3 (A) to (E) are explanatory diagrams showing a method of forming a peeling start portion using the peeling starting portion forming device 10, and FIG. 3 (A) is an illustration showing a positional relationship between the laminated body 6 and the knife N. FIG. 3 (B) is an explanatory diagram of the peeling starting portion 26 formed on the interface 24 by the knife N, and FIG. 3 (C) is an explanatory diagram showing a state immediately before the peeling starting portion 30 is formed at the interface 28. FIG. 3 (D) is an explanatory diagram in which the peeling start portion 30 is formed at the interface 28 by the knife N, and FIG. 3 (E) is an explanatory diagram in which the laminate 6 of the peeling start portions 26 and 30 is produced. 4 is a plan view of the multilayer body 6 in which the peeling start portions 26 and 30 are formed.

When the peeling starting portions 26 and 30 are made, as shown in FIG. 3 (A), the laminate 6 is reinforced. The back surface 3Bb of the plate 3B is held on the platform 12 by suction, and is supported horizontally (in the X-axis direction in the figure).

The blade N is supported horizontally by the holder 14 in such a manner that the blade tip faces the end surface of the corner portion 6A of the laminated body 6. In addition, the knife N adjusts the position in the height direction (the Z-axis direction in the figure) by the height adjusting device 16. Further, the blade N and the laminated body 6 are relatively moved in a horizontal direction by a feeding device 18 such as a ball screw device. The feeding device 18 only needs to move at least one of the knife N and the platform 12 in the horizontal direction. In the embodiment, the knife N is moved. Furthermore, a liquid supply device 22 that supplies the liquid 20 to the upper surface of the knife N before or during the penetration is disposed above the knife N.

[Method for making peeling start portion]

In the peeling starting portion manufacturing method using the peeling starting portion manufacturing device 10, the penetration position of the knife N is set to a position where the corner portion 6A of the laminated body 6 overlaps in the thickness direction of the laminated body 6, and The penetration amount of the knife N is set differently for the interfaces 24 and 28, respectively.

The procedure for making them will be described.

In the initial state, the tip of the knife N exists at a position shifted in the height direction (Z-axis direction) with respect to the interface 24 between the substrate 2B and the resin layer 4B as the first penetration position. Therefore, first, as shown in FIG. 3 (A), the knife N is moved in the height direction, and the height of the tip of the knife N is set to the height of the interface 24.

Thereafter, as shown in FIG. 3 (B), the knife N is horizontally moved toward the corner portion 6A of the laminated body 6, and the knife N is penetrated to the interface 24 by a predetermined amount. The liquid 20 is supplied to the upper surface of the knife N from the liquid supply device 22 at the time of the penetration of the knife N or before the penetration. As a result, the substrate 2B of the corner portion 6A is peeled from the resin layer 4B. Therefore, the peeling starting portion 26 having a triangular shape in plan view as shown in FIG. 4 is formed on the interface 24. In addition, although it is not necessary to supply the liquid 20, if the liquid 20 is used, the liquid 20 can remain in the peeling starting portion 26 even after removing the knife N, so that it can be made a peeling starting portion that can no longer be attached. 26.

Next, remove the knife N from the corner portion 6A in the horizontal direction. As shown in FIG. 3 (C), set the tip of the knife N to the height of the interface 28 between the substrate 2A and the resin layer 4A as the second penetration position. degree.

Thereafter, as shown in FIG. 3 (D), the knife N is moved horizontally toward the laminated body 6, and the knife N is penetrated to the interface 28 by a predetermined amount. Similarly, the liquid 20 is supplied to the upper surface of the knife N from the liquid supply device 22. Thereby, as shown in FIG.3 (E), the peeling start part 30 is produced in the interface 28. As shown in FIG. Here, the penetration amount of the knife N with respect to the interface 28 is smaller than the penetration amount with respect to the interface 24. The above is the method of making the peeling start portion. Furthermore, the penetration amount of the knife N with respect to the interface 24 may be made smaller than the penetration amount with respect to the interface 28.

The laminated body 6 prepared with the peeling starting portions 26 and 30 is taken out from the peeling starting portion preparing device 10 and transported to the peeling device described below, and the reinforcing plates 3B and 3A are interfaced by the peeling device with interfaces 24 and 28 Sequential peeling.

Details of the peeling method will be described later, but as shown by the arrow A in FIG. 4, the laminated body 6 is bent from the corner portion 6A toward the corner portion 6B opposite to the corner portion 6A to start the peeling portion. The peeling start portion 26 of the interface 24 having a larger area is peeled first as a starting point. Thereby, the reinforcing plate 3B is peeled together with the resin layer 4B. Thereafter, the laminated body 6 is bent again from the corner portion 6A toward the corner portion 6B, and the peeling is started from the peeling start portion 30 of the interface 28 having a smaller area of the peeling start portion 30. Thereby, the reinforcing plate 3A and the resin layer 4A are peeled together.

In addition, the penetration amount of the knife N is preferably set to 7 mm or more according to the size of the laminated body 6, and more preferably set to about 15 to 20 mm.

[Peeling device 40]

FIG. 5 is a longitudinal sectional view showing the configuration of the peeling device 40 according to the embodiment, and FIG. 6 is a plan view schematically showing the peeling assembly 42 in which the plurality of movable bodies 44 are arranged relative to the peeling assembly 42 of the peeling device 40. In addition, FIG. 5 corresponds to a cross-sectional view taken along the line B-B in FIG. 6. In FIG. 6, the laminated body 6 is indicated by a solid line. Moreover, the movable body 44 is arrange | positioned in grid shape with respect to the peeling assembly 42.

[Peel Assembly 42]

FIG. 7 (A) is a plan view of a flexible plate (first holding member) 46 constituting the peel-off assembly 42, and FIG. 7 (B) is a side of the flexible plate 46 along the CC line of FIG. 7 (A) Sectional view. 8 (A) is a bottom view of the flexible plate (second holding member) 48 constituting the peel-off assembly 42, and FIG. 8 (B) is a flexible plate taken along line DD of FIG. 8 (A). 48 side sectional view. Further, FIG. 9 (A) is a side cross-sectional view showing the corresponding relationship between the flexible plates 46 and 48 and the laminated body 6 (may also be the laminated body 1). FIG. 9 (B) shows the flexible plates 46 and 48. Side sectional view of the holding laminated body 6.

[Flexible plate 46]

As shown in FIGS. 7 and 9, the flexible plate 46 includes a rectangular body plate 50 having a size larger than that of the laminated body 6, and a rectangular shape of a reinforcing plate 3B (see FIG. 2: first substrate) that holds and holds the laminated body 6. The porous sheet 52 made of rubber is adhered to the upper surface of the main body plate 50.

For the purpose of reducing the tensile stress generated in the reinforcing plate 3B at the time of peeling, the thickness of the porous sheet 52 is preferably 2 mm or less, and more preferably 1 mm or less.

On the upper surface of the main body plate 50, a case (first case) 54 surrounding the laminated body 6 adsorbed and held on the porous sheet 52 is further adhered. The casing 54 is, for example, a sponge with independent bubbles having a Shore E hardness of 20 to 50 degrees, and is set to a height that protrudes from the upper surface (reinforcing plate 3A) of the laminated body 6 that is adsorbed and held on the porous sheet 52. (Refer to FIG. 9 (B)).

The porous sheet 52 surrounded by the casing 54 includes a frame-shaped groove 56. The groove 56 is connected to the vacuum pump 60 shown in FIG. 5 through a plurality of through holes 58 provided in the body plate 50.

Therefore, when the vacuum pump 60 is driven, the air in the through holes 58 and the grooves 56 is sucked, and the reinforcing plate 3B of the laminated body 6 is vacuum-adsorbed and held on the porous sheet 52. Thereby, the reinforcing plate 3B of the laminated body 6 is supported by the main body plate 50.

As shown in FIG. 7, a liquid (for example, water or an organic solvent) is provided at a corner portion of the porous sheet 52 surrounded by the case 54, and water is preferably used when the resin layer 4 is made of polyimide. ) 的 给 孔 62。 Supply hole 62. The supply hole 62 communicates with a through hole 64 of the body plate 50, and the through hole 64 is connected to a liquid feed pump (liquid supply device) 66 in FIG. 5. Therefore, when the liquid feed pump 66 is driven, The liquid is supplied to the liquid tank 68 surrounded by the case 54 through the through hole 64 and the supply hole 62. When the supply assembly 62 is inclined at the peeling assembly 42 in the peeling step, the supply hole 62 is preferably arranged at the lowermost part in the liquid tank 68.

As shown in FIGS. 7 and 9, a casing (second casing) 70 surrounding the casing 54 and the flexible plate 48 is attached to the upper surface of the main body plate 50. The casing 70 is set to be higher than the casing 54 in order to block the liquid overflowing from the casing 54 during the peeling step. Also, the casing 70 includes a sponge of independent air bubbles, similarly to the casing 54.

The porous sheet 52 between the case 54 and the case 70 includes a plurality of through holes 71. The body plate 50 is provided with a plurality of drainage holes 72 communicating with the through holes 71. That is, the liquid blocked by the case 70 is discharged to the outside of the equipment of the peeling device 40 through the through hole 71 and the drainage hole 72.

The bending rigidity of the main body plate 50 is higher than that of the porous sheet 52 and the casings 54 and 70. The bending rigidity of the main body plate 50 controls the bending rigidity of the flexible plate 46. The bending rigidity per unit width (1 mm) of the flexible plate 46 is preferably 1,000 to 40,000 N · mm ² / mm. For example, in a portion where the width of the flexible plate 46 is 100 mm, the bending rigidity is 100,000 to 4000000 N · mm ² . By setting the bending rigidity of the flexible plate 46 to 1000 N · mm ² / mm or more, the bending of the reinforcing plate 3B held and held on the flexible plate 46 can be prevented. In addition, by setting the bending rigidity of the flexible plate 46 to 40,000 N · mm ² / mm or less, the reinforcing plate 3B that is adsorbed and held on the flexible plate 46 can be appropriately bent and deformed. Examples of the body plate 50 include resin members such as polycarbonate resin, polyvinyl chloride (PVC) resin, acrylic resin, and polyacetal (POM) resin, and metal members.

[Flexible plate 48]

As shown in FIGS. 8 and 9, the flexible plate 48 includes a rectangular body plate 74 having a size larger than the laminated body 6 and a size smaller than the body plate 50, and a reinforcing plate 3A that adsorbs and holds the laminated body 6 (see FIG. 2: 2 substrate) is a rectangular rubber porous sheet 76, and a porous sheet 76 is attached to the lower surface of the main body plate 74.

The thickness of the porous sheet 76 is also 2 mm, and preferably 1 mm or less, as the thickness of the porous sheet 52.

The porous sheet 76 is provided with a frame-shaped groove 78. The groove 78 is connected to the vacuum pump 82 shown in FIG. 5 through a plurality of through holes 80 provided in the body plate 74.

Therefore, when the vacuum pump 82 is driven, the air in the through holes 80 and the grooves 78 is sucked, and the reinforcing plate 3A of the laminated body 6 is vacuum-adsorbed and held on the porous sheet 76. Thereby, the reinforcing plate 3A of the laminated body 6 is supported on the main body plate 74.

That is, as shown in FIG. 9 (B), the laminated body 6 is supported by the peel-off assembly 42 by sucking and holding the reinforcing plate 3B on the flexible plate 46 and sucking and holding the reinforcing plate 3A on the flexible plate 48. The lower surface of the body plate 74 is pressed against the upper surface of the casing 54. Thereby, the liquid tank 68 shown in FIG. 7 (A) becomes a liquid tank closed by the upper and lower flexible plates 48 and 46 and the case 54. Therefore, the side surface of the laminated body 6 is filled with the liquid supplied from the supply hole 62 into the liquid tank 68.

As shown in FIG. 8, the body plate 74 is provided with a through hole 84 through which air in the liquid tank 68 is discharged. The through hole 84 is disposed at a position diagonally with respect to the supply hole 62 shown in FIG. 7 and is the uppermost part in the liquid tank 68 when the peel-off assembly 42 is inclined. Thereby, the liquid tank 68 can be filled with the liquid, and the liquid supply can be stopped when the liquid overflows from the through hole 84 when the liquid is filled, or just before the liquid overflows, so that the liquid tank 68 can be easily confirmed by the liquid. full.

Since the structure and function of the main body plate 74 are the same as those of the main body plate 50, description thereof is omitted.

Next, referring back to FIG. 5, the movable device (tilt device, peeling device) 86 of the peeling device 40 will be described.

[Movable device 86]

The movable device 86 is arranged up and down via the peel-off assembly 42. Since one of the upper and lower movable devices 86 and 86 has the same structure, the movable device 86 disposed on the lower side in FIG. 5 will be described here, and the movable device 86 disposed on the upper side will be omitted by describing the same symbols. .

The movable device 86 includes a plurality of movable bodies 44, a plurality of driving devices 88 that move the movable body 44 up and down for each movable body 44, and a controller 90 that controls the driving device 88 for each driving device 88.

The plurality of movable bodies 44 are fixed to the lower surface of the main body plate 50 in a grid shape as shown in FIG. 6. The movable bodies 44 are fixed to the body plate 50 by fastening members such as bolts, but may be subsequently fixed instead of the bolts. The movable bodies 44 are independently moved up and down by a driving device 88 driven and controlled by the controller 90.

That is, the controller 90 may control the driving device 88 to incline the peeling assembly 42 from the horizontal posture of FIG. 5 to the inclined posture of the peeling start position shown in FIG. 10. In addition, the controller 90 sequentially moves the movable body 44 located on the corner portion 6A side of the laminated body 6 in FIG. 6 to the movable body 44 located on the corner portion 6B side in the peeling traveling direction shown by the arrow A. With this operation, the interface 24 of the multilayer body 6 is peeled off from the peeling start portion 26 (see FIG. 4). In addition, the laminated body 6 shown in FIG. 5 and FIG. 10 is the laminated body 6 in which the peeling start part 26 and 30 was manufactured using the peeling start part manufacturing method demonstrated in FIG.

The driving device 88 includes, for example, a rotary servo motor and a ball screw mechanism. The rotary motion of the servo motor is converted into linear motion by the ball screw mechanism, and is transmitted to the rod 92 of the ball screw mechanism. A movable body 44 is provided at a front end portion of the rod 92 via a ball joint 94. Thereby, the movable body 44 inclines following the bending deformation of the flexible plate 46. This makes it possible to bend and deform the flexible plate 46 from the corner portion 6A toward the corner portion 6B without applying excessive force to the flexible plate 46. In addition, the driving device 88 is not limited to a rotary servo motor and a ball screw mechanism, and may also be a linear servo motor or a fluid pressure cylinder (for example, a pneumatic cylinder). The bending deformation direction of the flexible plate 46 may be a diagonal line from the corner portion 6A to the corner portion 6B, or may be a direction of 45 degrees with respect to the side adjacent to the corner portion 6A.

Preferably, the plurality of driving devices 88 are mounted on the elevating frame 96 via the buffer member 98. The buffer member 98 is elastically deformed so as to follow the bending deformation of the flexible plate 46. Thereby, the lever 92 is tilted with respect to the frame 96.

The controller 90 is configured as a computer including a recording medium such as a CPU (Central Processing Unit), a ROM (Read Only Memory), and a RAM (Random Access Memory). The controller 90 controls each driving device 88 of the plurality of driving devices 88 by causing the CPU to execute a program recorded on a recording medium, thereby controlling the ascending and descending movement of the plurality of movable bodies 44.

[Peeling method of the reinforcing plates 3A and 3B using the peeling device 40]

Figures 11 (A) ~ (D) ~ Figure 12 (A) ~ (E) ~ Figure 13 (A) ~ (D) ~ Figure 14 (A) ~ (D) ~ Figure 15 (A) ~ (D) The peeling method of the laminated body 6 of the peeling start portions 26 and 30 is made at the corner portion 6A by using the peeling start portion preparing method described in FIG. 3. In these figures, the peeling method of the reinforcing plates 3A and 3B of the laminated body 6 is shown in time series.

That is, the steps of holding the laminated body 6 on the peel-off assembly 42, the step of tilting the peel-off assembly 42 at a tilt angle θ with respect to the horizontal direction, and the liquid 100 are sequentially shown in FIGS. Step of filling to the liquid tank 68.

In addition, FIGS. 12 (A) to (E) show a step of peeling the reinforcing plate 3B by bending and deforming the flexible plate 46.

In addition, FIGS. 13 (A) to (D) show the steps of carrying out the peeled reinforcing plate 3B.

14 (A) to (D) sequentially show the steps of inclining the peeling assembly 42 at an angle θ with respect to the horizontal direction, filling the liquid tank 68 with the liquid 100, and bending and deforming the flexible plate 48. The step of peeling the reinforcing plate 3A.

15 (A) to (D) sequentially show the steps of carrying out the panel 102 and the steps of carrying out the peeled reinforcing plate 3A.

The carrying-in operation to the laminated body 6 of the peeling assembly 42 and the carrying-out operation of the peeling reinforcing plates 3A, 3B, and the panel 102 are performed by a transfer device 106 including an adsorption pad 104 as shown in FIG. 11 (A) and the like. In addition, in FIGS. 11 to 15, in order to avoid the complexity of the drawings, the illustration of the movable device 86 is omitted. In addition, the panel 102 is a product panel to which the substrate 2A and the substrate 2B from which the reinforcing plates 3A and 3B are removed are attached via the functional layer 7.

Hereinafter, the peeling method will be described in order.

As shown in FIG. 11 (A), the flexible plates 46 and 48 before the peeling start are positioned in the horizontal direction by the movable device 86, and the flexible plate 48 is retracted above the flexible plate 46. . In this initial state, the laminated body 6 is conveyed above the flexible plate 46 by the conveying device 106, and the reinforcing sheet 3B of the laminated body 6 is adsorbed and held by the porous sheet 52 of the flexible plate 46. As shown in FIG. 11 (B), the flexible plate 48 moves downward, and the porous sheet 76 of the flexible plate 48 adsorbs and holds the reinforcing plate 3A of the laminated body 6. Thereby, the laminated body 6 is arrange | positioned in the liquid tank 68.

Next, as shown in FIG. 11 (C), the peel-off assembly 42 is inclined at an angle θ with respect to the horizontal direction (tilt step). As described above, the tilting posture of the peel-off assembly 42 is set such that the supply hole 62 (FIG. 7 (A)) is located at the lowermost part of the liquid tank 68 and the through hole 84 (FIG. 8 (A)) is located at the liquid tank 68 The top. Thereby, in the liquid tank 68, the corner portion 6A of the laminated body 6 in FIG. 6 is located at the highest position, and the corner portion 6B is located at the lowest position.

In addition, the inclination angle θ of the peeling assembly 42 is such that the liquids 100 are moved toward the front of the peeling line when peeling by the action of gravity, and the flexible plates 46 and 48 are bent when the flexible plates 46 and 48 are bent. The curvature radius of 48 is determined. In the embodiment, the curvature radii of the flexible plates 46 and 48 are set to 1000 mm, and the inclination angle θ of the peel-off assembly 42 is set to 1 to 4 degrees (preferably 2 degrees).

Next, as shown in FIG. 11 (D), the liquid 100 is supplied from the supply hole 62 to the liquid tank 68 by the liquid feed pump 66 (see FIG. 5) as shown by the arrow. Thereby, all sides of the laminated body 6 are filled with the liquid 100 (liquid supply step).

Next, as shown in FIGS. 12 (A) to (D), the flexible plate 46 is bent and deformed downward to start peeling of the reinforcing plate 3B. The bending direction of the flexible plate 46 is the direction of the arrow A from the corner portion 46A of the flexible plate 46 toward the corner portion 46B in FIG. 6. Thereby, the reinforcing plate 3B is peeled off while being bent and deformed from the corner portion 6A toward the corner portion 6B.

At this time, the reinforcing plate 3B of the laminated body 6 uses the peeling start portion 26 (see FIG. 4) of the interface 24 as The starting point began to peel. That is, among the plurality of movable bodies 44 of the flexible plate 46 on the lower side shown in FIG. 10, the movable body 44 located on the corner portion 46A side of the flexible plate 46 to the movable body 44 located on the corner portion 46B side. Sequentially descend and move. As a result, the reinforcing plate 3B is bent downward and deformed, and therefore, it is peeled from the corner portion 6A toward the corner portion 6B at the interface 24 (peeling step). Then, as shown in FIG. 12 (E), the reinforcing plate 3B is completely peeled.

In the peeling of the reinforcing plate 3B, the liquid 100 overflowing from the case 54 is blocked by the case 70, and the self-drain hole 72 is discharged to the outside of the peeling assembly 42. Thereby, the use environment of the peeling device 40 is not polluted by the liquid 100, and if the liquid 100 discharged from the drainage hole 72 is recovered, the liquid 100 can also be reused.

In the peeling step shown in FIGS. 12 (A) to (D), the side of the inclined laminated body 6 is filled with the liquid 100. Therefore, when peeling is started from this state, the liquid 100 directly flows into the peeling through the interface 24. On the other hand, the peeling surface (the front line of peeling) that appears in sequence is wet on the peeling surface while moving downward by gravity on the peeling surface. At the same time as the liquid 100 flows in by gravity, a new space is formed along with the progress of peeling. This space is surrounded by the substrate and the liquid 100, and the liquid 100 is squeezed by the atmospheric pressure. Therefore, the peeling surface is directly wetted by the liquid 100. When peeling is started from this state, since the water surface of the liquid surrounding the laminated body 6 is higher than the peeling surface, the liquid 100 flows directly by gravity to the peeling surfaces that appear sequentially due to the peeling in the interface 24 (front line of peeling) ), And wet the peeling surface directly.

That is, the peeling device 40 tilts the laminated body 6 and fills the side surface of the laminated body 6 with liquid. Therefore, the liquid 100 can be continuously supplied from the side of the laminated body (outside of the laminated body) and depends on the gravity of the liquid 100. Throughout the front line.

As the state in which the liquid 100 is continuously supplied and spread across the front line of the peeling, there are the following methods: In the peeling step, the liquid feed pump 66 is also driven to fully fill the side of the laminated body with liquid; The liquid supply is set to the stage shown in FIG. 11 (D). In the peeling step, the driving of the liquid feed pump 66 is stopped, and the liquid continuously supplied to the front line of the peeling is set as the liquid 100 filling the side surface of the laminate.

The former method is suitable for the case where it is difficult to continue the liquid continuously from the outside of the laminated body with respect to the size (width) of the peeling surface and the amount of liquid that fills the side of the laminated body only at the stage shown in FIG. 11 (D). Supply to the front.

The latter case is suitable for the size (width) of the peeling surface, and the amount of liquid that fills the sides of the laminate at the stage shown in FIG. 11 (D) can be used to face the peeling front from the outside of the laminate. Sufficiently supply liquid continuously.

In the peeling state of the reinforcing plate 3B shown in FIG. 12 (E), the peeled reinforcing plate 3B is vacuum-adsorbed and held on the porous sheet 52 of the flexible plate 46, and the laminated body 6 (including the reinforcing plate 3B) is removed The laminated body of the reinforcing plate 3A and the face plate 102) is vacuum-adsorbed and held on the porous sheet 76 of the flexible plate 48. In addition, the bending deformation of the flexible plate 46 is released.

Next, as shown in FIG. 13 (A), after the postures of the flexible plates 46 and 48 are changed to the horizontal direction, the flexible plate 48 is retracted relative to the flexible plate 46 as shown in FIG. 13 (B). To the top.

Next, after the adsorption holding of the reinforcing plate 3B is released, the reinforcing plate 3B is adsorbed by the adsorption pad 104 of the conveying device 106, and the reinforcing plate 3B is taken out of the peeling assembly 42 by the conveying device 106 (FIG. 13 (C)).

Thereafter, peeling of the reinforcing plate 3A was started.

First, the flexible plate 48 is moved downward toward the flexible plate 46, and as shown in FIG. 13 (D), the substrate 2B is adsorbed and held on the porous sheet 52 of the flexible plate 46.

Next, as shown in FIG. 14 (A), the peeling assembly 42 is similarly tilted at an inclination angle θ, and then the liquid tank 68 is filled with the liquid 100.

Next, as shown in FIGS. 14 (B) to (C), the flexible plate 48 is bent and deformed upward, and peeling of the reinforcing plate 3A is started. The bending direction of the flexible plate 48 is the direction of the arrow A from the corner portion 48A of the flexible plate 48 toward the corner portion 48B in FIG. 6. With this, the reinforcing plate 3A is peeled off while bending and deforming from the corner portion 6A toward the corner portion 6B.

At this time, the reinforcing plate 3A of the laminated body 6 uses the peeling start portion 30 (see FIG. 4) of the interface 28 as The starting point began to peel. That is, among the plurality of movable bodies 44 of the flexible plate 48 shown in FIG. 10, the movable body 44 located on the corner portion 46A side of the flexible plate 46 is sequentially raised to the movable body 44 located on the corner portion 46B side. mobile. With this, the reinforcing plate 3A is bent and deformed upward, and therefore, the interface 28 starts to peel from the corner portion 6A toward the corner portion 6B (peeling step). As shown in FIG. 14 (D), the reinforcing plate 3A is completely peeled.

In the peeling step shown in FIGS. 14 (B) to (C), the side surface of the inclined laminated body 6 is filled with the liquid 100. Therefore, when peeling is started from this state, the water level of the liquid around the laminated body 6 is high. As for the peeling surface, the liquid 100 directly flows into the peeling surface (pre-stripping line) appearing sequentially due to the peeling in the interface 28, and while the gravity is moved downward on the peeling surface, the peeling surface is directly wetted. When peeling is started from this state, since the water surface of the liquid surrounding the laminated body 6 is higher than the peeling surface, the liquid 100 directly flows by gravity to the peeling surfaces that appear sequentially due to the peeling in the interface 28 (front line of peeling) , And directly wet the peeling surface. That is, the peeling device 40 inclines the laminated body 6 and fills the side surface of the laminated body 6 with liquid. Therefore, the liquid 100 can be continuously supplied from the side of the laminated body (outside of the laminated body) and dependent on the gravity of the liquid 100. Throughout the front line.

In the peeled state of the reinforcing plate 3A shown in FIG. 14 (D), the peeled reinforcing plate 3A is vacuum-adsorbed and held on the porous sheet 76 of the flexible plate 48, and the panel 102 is vacuum-adsorbed and held on the flexible plate. 46 的 cellular sheet 52. Further, the bending deformation of the flexible plate 48 is released.

Next, as shown in FIG. 15 (A), after the postures of the flexible plates 46 and 48 are changed to the horizontal direction, the flexible plate 48 is made upward with respect to the flexible plate 46 as shown in FIG. 15 (B). Fang retreated.

Next, after the suction holding of the panel 102 is released, the panel 102 is suctioned by the suction pad 104 of the transfer device 106, and the panel 102 is taken out of the peel-off assembly 42 by the transfer device 106.

Finally, as shown in FIG. 15 (C), the suction pad 104 of the transfer device 106 is used to suck and hold the reinforcing plate 3A, and thereafter, the suction pad 3A using the flexible plate 48 is released. The reinforcing plate 3A is taken out from the peel-off assembly 42 (FIG. 15 (D)).

The above-mentioned peeling method is a peeling method of the laminated body 6 shown in FIG. 2, but even if it is the laminated body 1 shown in FIG. 1, the reinforcing plate 3 can be peeled using the same peeling device 40. In this case, the reinforcing plate 3 is held on the flexible plate 46 and the substrate 2 is held on the flexible plate 48. Next, the peel-off assembly 42 is inclined at an angle θ with respect to the horizontal direction. Next, the liquid tank 68 is filled with the liquid 100 so that the side surface of the laminated body 1 is filled with the liquid 100. Then, the flexible plate 46 is bent and deformed as shown in FIGS. 12 (A) to (D). Thereby, the reinforcing plate 3 can be peeled.

In the above-mentioned peeling step, the side of the inclined laminated body 1 is also filled with liquid 100. Therefore, when peeling is started from this state, the liquid 100 directly flows into the peeling surfaces that appear sequentially due to peeling on the interface, and one side is peeled off. The surface is moved downward by gravity, and the peeling surface is directly wetted on one side. Thereby, the peeling operation by the liquid 100 can be performed smoothly and in a short time.

The present invention has been described in detail and with reference to specific embodiments, but it is apparent to those skilled in the art that various changes and modifications can be made without departing from the spirit and scope of the present invention.

This application is completed based on Japanese Patent Application No. 2014-114644 filed on June 3, 2014, the contents of which are incorporated herein by reference.

Claims (12)

A peeling device for a laminated body, which is a laminated body which is detachably attached to a first substrate and a second substrate through an adsorption layer, and at least one of the first substrate and the second substrate is arranged along the substrate. One end side is bent toward a peeling traveling direction of the other end side to peel at an interface between the first substrate and the adsorption layer, and is characterized by including a peeling assembly including a first holding member that holds the first substrate. A second holding member holding the second substrate, and a first case surrounding the laminated body, and a space portion surrounded by the first holding member, the second holding member, and the first case is configured as a liquid A tank; a tilting device that tilts the peeling assembly with respect to the horizontal direction; a liquid supply device that supplies liquid to the liquid tank of the peeling assembly to fill the side of the laminate with liquid; and a peeling device that makes the above At least one of the first holding member and the second holding member is bent in the peeling travel direction from the upper end portion toward the lower end portion. For example, the peeling device for a laminated body according to claim 1, wherein the supply hole for the liquid is provided inside the first case. For example, the peeling device for a laminated body according to claim 1 or 2, wherein the peeling assembly includes a second casing surrounding the first casing, and a drainage hole is provided between the first casing and the second casing. . The peeling device of the laminated body of claim 1 or 2, wherein the liquid is water. A method for peeling a laminated body, which is a laminated body formed by releasably attaching a first substrate and a second substrate with an adsorption layer interposed therebetween, so that at least one of the first substrate and the second substrate is along the same. One end side is bent toward the peeling direction of the other end side to peel at the interface between the first substrate and the adsorption layer, and is characterized in that a peeling assembly is used, and the peeling assembly is provided with a first holding the first substrate. A holding member, a second holding member that holds the second substrate, and a first case that surrounds the laminated body, and includes a space portion surrounded by the first holding member, the second holding member, and the first case. It is a liquid tank, and the method for peeling the laminated body includes the following steps: a tilting step that tilts the peeling assembly with respect to the horizontal direction; a liquid supply step that supplies liquid to the liquid tank of the peeling assembly to make the laminated layer The side surface of the body is filled with liquid; and a peeling step that moves at least one of the first holding member and the second holding member along the upper end toward the lower end The peeling traveling direction is curved; and in the peeling step, the liquid is continuously supplied from the outside of the laminated body, and one side is moved downward by gravity on the peeling surface that appears sequentially due to the peeling of the interface, and one side Wet the peeling surface. For example, the method for peeling a laminated body according to claim 5, wherein the liquid supply hole is provided inside the first case, and the liquid is supplied to the liquid tank from the supply hole. For example, the method for peeling a laminated body according to claim 5 or 6, wherein the peeling assembly includes a second casing surrounding the first casing, and a drainage hole is provided between the first casing and the second casing, The liquid overflowing from the first case is discharged from the drain hole. For example, the method for stripping a laminated body according to claim 5 or 6, wherein the adsorption layer is a polyimide resin layer, and the liquid is water. An electronic device manufacturing method includes a functional layer forming step of laminating a first substrate and a second substrate with an adsorption layer peelably attached thereto, and forming a function on an exposed surface of the first substrate. And a separation step of separating the second substrate from the first substrate on which the functional layer is formed; and in the separation step, a peel-off assembly is used, the peel-off assembly having a means for holding the first substrate. A first holding member, a second holding member holding the second substrate, and a first case surrounding the laminated body, and a space surrounded by the first holding member, the second holding member, and the first case The part is configured as a liquid tank, and the separation step includes the following steps: a tilting step that tilts the peeling assembly with respect to the horizontal direction; a liquid supply step that supplies liquid to the liquid tank of the peeling assembly to make the laminated body The side surface is filled with liquid; and a peeling step that moves at least one of the first holding member and the second holding member along the lower end toward the lower end The peeling travel direction is curved; and in the peeling step, the liquid is continuously supplied from the outside of the laminated body, and one side appears sequentially by gravity due to the peeling of the interface between the first substrate and the adsorption layer. The peeling surface is moved downward, and the peeling surface is wetted. The method for manufacturing an electronic device according to claim 9, wherein the liquid supply hole is provided inside the first case, and the liquid is supplied from the supply hole to the liquid tank. The method for manufacturing an electronic device according to claim 9 or 10, wherein the peel-off assembly includes a second case surrounding the first case, and a drainage hole is provided between the first case and the second case, The liquid overflowing from the first case is discharged from the drain hole. The method for manufacturing an electronic device according to claim 9 or 10, wherein the adsorption layer is a polyimide resin layer, and the liquid is water.