TWI659615B - High-voltage modulation without lag errors - Google Patents

Abstract

The invention relates to a high-voltage power supply (10a). The high-voltage power supply (10a) has a voltage transformer component (18a) and a discharge circuit component (20a). The voltage transformer assembly (18a) and the discharge circuit assembly (20a) are connected to each other. The voltage transformer assembly (18a) is configured to provide a required high voltage without any delay at the voltage output (High / Low) of the high-voltage power supply (10a). The discharge circuit component (20a) is configured to reduce the high voltage (10a) provided at the voltage output (High / Low) without any delay error to a required reduced high voltage. This makes it possible to control the voltage output (High / Low) of the high voltage power supply (10a) via a Pockels cell driver in a very precise manner.

Description

High voltage modulation without delay errors

The present invention relates to a high-voltage power supply for a bubble box.

A Pockels cell is typically used to switch and modulate a laser beam. Use a Pockels driver to operate the Pockels. For this purpose, the Pockels driver is supplied with a high voltage close to ± 1.5 kV. In order to be able to direct and stop the laser beam in a precise manner, it is necessary to be able to modulate the high voltage applied to the Pockels cell driver without delay and error. For example, when drilling a blind hole, it is necessary to be able to control the laser beam in a precise way to precisely control the depth and shape of the hole. However, during operation in the high-voltage range in known high-voltage power supplies, the delay time (ie, the delay error) between the specification of the desired output voltage and the output voltage actually reached is greater than 250 μs. In very short processing operations, this delay time is already a significant proportion of the processing time.

Therefore, it is an object of the present invention to provide a high voltage power supply to a Pockels cell driver in which a voltage modulation in one of the high voltage ranges occurs with the smallest possible delay error.

This object is achieved by a high-voltage power supply for a Pockels box driver having one of the features of the technical solution 1.

This makes it possible to control the voltage output of a high-voltage power supply via a Pockels driver in a very precise manner.

The discharge circuit may be part of a discharge circuit assembly. The discharge circuit assembly may have a plurality of discharge circuits. The discharge circuit assembly may further have a controlled voltage source. The discharge circuit can be started using this controlled voltage source.

Voltage transformers connected in parallel allow for precise and rapid voltage increase almost immediately following one of the desired values. It is ensured by the discharge circuit that the voltage actually increases almost immediately following a desired value. Therefore, a delay error can actually be prevented by the high-voltage power supply according to the present invention.

The first output switching circuit is preferably connected to a first discharge circuit and the second output switching circuit is preferably connected to a second discharge circuit. Due to the individual association of a discharge circuit with an output switching circuit, the voltage can be guided in a particularly instantaneous manner relative to one of the desired values during the voltage increase.

The high-voltage power supply may have at least one additional voltage transformer whose voltage input is connected in parallel with the voltage input of the first voltage transformer and the second voltage transformer. One of the additional voltage transformers has an additional output switching circuit connected in series to the voltage output of the high-voltage power supply And an additional output switching circuit connected to an additional discharge circuit. The voltage during the voltage increase and decrease can be controlled even more precisely by the additional voltage transformer and additional discharge circuit.

In a particularly preferred embodiment of the present invention, the high-voltage power supply has four voltage transformers whose voltage inputs are connected in parallel, each of the voltage transformers has an output switching circuit, each of the output switching circuits is connected to a discharge circuit and the output switching circuit Connect in series between the voltage outputs of the high-voltage power supply.

A control unit is preferably provided to control all voltage transformers and discharge circuits. This central control unit allows precise and simultaneous control of all voltage transformers and discharge circuits. The control unit preferably includes a PI controller, that is, a controller having a proportional amplifier and an integrator connected in parallel.

The high-voltage power supply may further be characterized by providing a voltage detection unit connected to a control unit at a voltage output of the high-voltage power supply. This makes it possible to control the output voltage.

If the voltage detection unit includes one of a plurality of resistors connected in series, the voltage distribution Device, the voltage detection can be simplified in structure and provide accurate measurement values.

An intermediate input circuit having at least one input capacitor, especially one of a plurality of input capacitors connected in parallel, may be connected upstream of a first pole of a voltage input of a voltage transformer.

Preferably, at least one input capacitor (especially all input capacitors) is constructed as a ceramic capacitor. Ceramic capacitors can withstand high-efficiency current loads due to their low loss resistance. The aging of ceramic capacitors further depends only on their operating temperature and is substantially less noticeable than conventional electrolytic capacitors.

At least one input capacitor (especially all input capacitors) may be configured for an operating temperature greater than 100 ° C. In this case, consider constructing one of the series X7R, X7S or X8R input capacitors in particular. X7R capacitors are specified for operating temperatures up to 125 ° C.

At least one Schottky diode can be connected upstream of the intermediate input circuit. This prevents the polarity of the voltage input from being reversed. Schottky diodes can further prevent oscillation between two high-voltage power supplies operating at the same power supply.

A driver may be further connected upstream of the voltage transformer. The driver is preferably constructed in two steps. The driver may have a gate driver module and / or a bipolar push / pull stage. This allows the voltage transformer to be controlled in a precise manner.

In a particularly preferred embodiment of the invention, at least one voltage transformer (especially all voltage transformers) has an insulation transformer. First-class galvanically isolated voltage transmission can be performed through an insulated transformer. In addition, due to the use of insulated transformers, a very high output voltage with a medium transmission ratio is possible.

At least one insulated transformer (especially all insulated transformers) may have a storage transformer in the form of a printed circuit board transformer. Thereby, the transmitted energy in the magnetic field of the magnetically connected coils of the storage transformer can be stored in an intermediate manner. A storage transformer in the form of a printed circuit board transformer further protects the windings of the coil from contamination and contact in an optimal way.

The output switching circuit of at least one voltage transformer preferably has an output at its output Capacitors, voltage transformers are configured in such a way that at least 20% of the energy supplied to the voltage transformer at its voltage input during a basic cycle is directed into the output capacitor within the basic cycle.

In a particularly preferred manner, all output switching circuits of the voltage transformer have an output capacitor at their output, and the voltage transformer is configured in such a way that at least one of the energy supplied to the voltage transformer at its voltage input in a basic cycle 20% is directed into the output capacitor during this basic cycle. In this way, a voltage transformer can be constructed in one step. The transformer topology obtained in this way allows an energy transfer in a single cycle. For individual cycles, the control unit can therefore directly influence the energy to be transmitted. This makes it possible to keep delay errors particularly small during voltage increases.

At least one output capacitor (especially all output capacitors) may be in the form of a ceramic capacitor. At least one output capacitor (especially all output capacitors) may have a plurality of capacitors connected in parallel.

At least one output switching circuit (especially all output switching circuits) preferably has a boost diode. The boost diode according to the present invention is intended to be understood as a silicon carbide (SiC) diode. The boost diode is especially configured for voltages greater than 1000V. It prevents the output switching circuit of the voltage transformer from discharging. This increases the maximum possible voltage at the voltage output. If each output switching circuit has a boost diode, all output switching circuits of the voltage transformer are prevented from becoming discharged.

The boost diode can be directly connected to the output of its output switching circuit. Each boosted diode is preferably connected directly to the output of its output switching circuit.

A preferred high voltage power supply is characterized in that at least one output switching circuit of a voltage transformer (especially all output switching circuits of the voltage transformer) has at least one output capacitor and at least one discharge resistor connected in parallel with the output capacitor. This allows the output switching circuits (especially all output switching circuits) to be discharged very quickly to a non-hazardous low voltage after the high-voltage power supply is disconnected. It is better to provide at least two discharge resistors connected in parallel to ensure that A short discharge time can be ensured even if one of the discharge resistors is defective.

The high-voltage power supply preferably has a demagnetization monitoring unit. For this purpose, at least one voltage transformer (especially all voltage transformers) may have a measurement winding connected to the demagnetization identification unit. The demagnetization identification unit may have a comparator whose output is connected to a voltage transformer whose winding system is connected in series.

In order to allow a very controlled and very rapid voltage drop at one of the voltage outputs of the high-voltage power supply, at least one discharge circuit (especially all discharge circuits) has an actively controlled current sink.

The current sink preferably includes a current sink transistor connected to an output switching circuit of an associated voltage transformer.

The current sink transistor can be in the form of a MOSFET. The current sink transistor can be connected to the output switching circuit of the associated voltage transformer through a source and a drain. In the case of a bipolar transistor as a current sink transistor, the source corresponds to the collector, the drain corresponds to the emitter, and the gate corresponds to the base.

A source resistor, a drain resistor, and / or a gate resistor can be connected to the current sink transistor (especially all current sink transistors). The source resistance and / or the base resistance may have a resistance value between 2 ohms and 100 ohms. The gate resistance may have a resistance value between 10 ohms and 200 ohms. The ratio between the gate voltage and the discharge voltage can be adjusted by the source resistance. The gate resistor decouples the voltage transformer from the current slot and thereby prevents oscillations in the current slot caused by a change in one of the load of one of the output capacitors of the voltage capacitor. The sink resistance prevents individual current sinks from affecting each other with regard to their series connection.

The gate voltage of the at least one current sink transistor is controllable via a transformer, and the gate is connected to a second winding of the transformer. In this way, a control signal can be transmitted to the current-slot transistor in a potential-free manner.

A gate capacitor can be provided at the gate of the current sink transistor in parallel with a capacitor resistor. Capacitor resistance continuously discharges the gate capacitor and thereby ensures that it is sufficient Sufficient to change the voltage at the gate of the current sink transistor.

The gate voltages of all current-slot transistors should be controlled by the first main winding of a transformer and a transformer connected in parallel, respectively. This allows a control signal to be transmitted to all current-slot transistors simultaneously and in a potential-free manner.

At least one transformer may have a second main winding. The second main winding allows demagnetization of the transformer.

In particular, all transformers may have a second main winding, and the second main windings are connected in parallel with each other. This makes it possible to demagnetize all transformers at the same time.

The control of the first main winding of a transformer should be performed by a voltage-controlled voltage source, especially the control of the first main winding of each transformer. This makes it possible to perform control of the current sinks in a non-loaded manner, especially for all current sinks.

The voltage-controlled voltage source may include an operational amplifier and a bipolar push / pull stage. The output of the operational amplifier is connected to the input of the push / pull stage and the output of the push / pull stage is connected to the first main winding of a transformer. The maximum possible output current of the operational amplifier is increased by a direct connection of the output of the operational amplifier to the input of the push / pull stage.

The output of the push / pull stage can be further fed back to an input of an operational amplifier, especially an inverting input of an operational amplifier. Due to the feedback, the output voltage of the push / pull stage can be directly controlled by the operational amplifier.

A voltage-controlled voltage source can be controlled using a voltage reduction or voltage increase signal. Voltage reduction or voltage increase refers to the voltage required to activate the discharge circuit. As the voltage decreases or the voltage increases, the actuation time of a discharge circuit controlled by a voltage-controlled voltage source can be strongly reduced.

The circuit of the high-voltage power supply is preferably configured on a water-cooled printed circuit board. The printed circuit board has a temperature sensor, especially an LM35 temperature sensor. This makes it possible to measure the cooling water temperature by controlling the temperature of the printed circuit board and control the cooling water flow accordingly. The temperature sensor generates a current proportional to the temperature of the printed circuit board. in In the case of the LM35 temperature sensor, the current generated by the temperature sensor is 50 μA / ° C.

The high-voltage power supply can be configured on a printed circuit board that can be adapted to a connection board module. The connection board module may provide a short-circuit bridge on the printed circuit board that can be connected to the connection board module. This makes it possible to ensure that the high-voltage power supply is operated only when the short-circuit bridge is closed (that is, the printed circuit board is correctly inserted into the connection board module). The connection board module may have a printed circuit board on which a control and / or adjustment unit is arranged or constructed. The connection board module can be arranged in a casing or a part of a casing.

Other features and advantages of the present invention will be understood from the following detailed description of two embodiments of the present invention with reference to the drawings, which describe the obvious details of the invention and the scope of patent applications.

The features illustrated in the drawings are not necessarily intended to be understood to scale and are illustrated so that the characteristics according to the invention can be easily understood. Various features may be performed individually or in combination with any combination of variations of the invention.

FIG. 1 is a circuit diagram of a first high-voltage power supply 10 according to the present invention. The first high-voltage power supply 10 includes a printed circuit board 12 adapted to one of the connection board modules 14. In order to ensure the correct connection of the printed circuit board 12 to the connection board module 14, a short-circuit bridge 16 is provided on the printed circuit board 12.

The first high-voltage power supply 10 includes a voltage transformer component 18 and a discharge circuit component 20. The voltage transformer assembly 18, the discharge circuit assembly 20, and the connection board module 14 are connected to each other by the illustrated wires. The voltage transformer component 18 draws a 24V supply voltage (24V) and a ground (GND) voltage from the corresponding connection of the connection board module 14. The entire printed circuit board 12 draws the ground (GND) and the supply voltages + 15V and -15V through a plurality of contacts and supplies both to the voltage transformer component 18 and the discharge circuit component 20. The corresponding connection power from the connection board module 14 is further supplied to the voltage transformer assembly 18, of which a 3.3V voltage (3.3V) is used for a demagnetization identification unit having a demagnetization comparator 36 (refer to FIG. 2b). 34, and a 15V voltage (+ 15V driver) is used for a driver 54 (refer to FIG. 2c). The driver 54 of the voltage transformer assembly 18 is further connected to the corresponding connection of the connection board module 14 through a connection "Driver_Enable" for closing and opening the driver 54 and a connection "Gate_Driver" for controlling the driver 54. An output (Komp) of the demagnetization comparator 34 is further connected to a corresponding connection of the connection board module 14.

A voltage output 22 of one of the first high-voltage power supplies 10 is provided on the voltage transformer assembly 18. Outputs 22 poles with "High" and "Low" specified voltages. The voltage at "High" is between 0V and 2000V. The voltage at "Low" is between 0V and -2000V. The voltage output 22 can be connected to a Pockels box driver (not shown). The voltage transformer assembly 18 operates at a discharge power of 100W to 500W (especially 200W). Voltage output 22 of The poles ("High" and "Low") can be arranged on the printed circuit board 12. These can also be connected to corresponding connections (not shown) of the connection board module 14.

A voltage detection unit 24 is further provided on the voltage transformer assembly 18. Specify the poles of the voltage detection unit 24 with "High_Mess" and "Low_Mess". Perform a voltage measurement using a positive output voltage at "High_Mess" and a negative output voltage at "Low_Mess". The voltages at "Low_Mess" and "High_Mess" are up to 4V, where 4V corresponds to the maximum or minimum output voltage.

The discharge circuit component 20 draws a control loop from one control unit (not shown) of the first high-voltage power supply 10 by connecting “Curr_Sink_Pos_Reg” and by connecting “Discharge_Clock”.

The output switching circuits 70, 70 ', 70 ", 70' '' of the voltage transformer assembly 18 (refer to Figure 2) are connected by connecting" High "," Trafol_Sink "," Trafo2_Sink "," Trafo3_Sink "and" Low " To the discharge circuit assembly 20. A temperature sensor circuit 120 (refer to FIG. 3) of one of the voltage transformer components 18 is further connected to a corresponding connection of the connection board module 14 by connecting “Temp”.

FIG. 2 illustrates the voltage transformer assembly 18 in detail. The voltage transformer assembly 18 includes a first voltage transformer 26, a second voltage transformer 26 ', a third voltage transformer 26 ", and a fourth voltage transformer 26'". The voltage transformer 26 is constructed identically in the form of an insulating transformer. , 26 ', 26 ", 26' ''. Insulation transformers are storage transformers in the form of printed circuit board transformers each having eighteen layers. The windings of the printed circuit board transformer are located inside the printed circuit board of the printed circuit board transformer and are thereby protected in an optimal manner from contamination and contact.

For reasons of simplicity, only the first voltage transformer 26 is described in more detail below in FIG. 2a. In the two outer layers of the printed circuit board transformer of the first voltage transformer 26, there is a first main winding 28 and a first measurement winding 30. The first measurement winding 30 is used to identify the demagnetization of the printed circuit board transformer. A first shielded winding 33 is located between the first main winding 28 and the first primary winding 32 of the first voltage transformer 26 to interfere with the capacitance of the printed circuit board transformer. Reduce current shift.

As can be seen in Fig. 2 and Fig. 2b, the measurement windings (especially the first measurement winding 30) of the voltage transformers 26, 26 ', 26 ", 26'" are connected to a demagnetization identification unit 34. According to Fig. 2b The demagnetization identification unit 34 includes a comparator 36 whose output is connected to a series-connected measurement winding (eg, the first measurement winding 30) of the voltage transformers 26, 26 ', 26 ", 26'". The comparator 36 monitors the polarity of the voltage at the winding. The polarity depends on the direction of current flow in the voltage transformers 26, 26 ', 26 ", 26"' (refer to Figure 2). The anti-parallel series connection of the pole bodies 38, 40 relative to the two Schottky diodes 42, 44 protects the input of the comparator 36 from excessively high differential voltages. The series connection of the Schottky diodes 42, 44 ensures A sufficient upper limit frequency. The hysteresis of the comparator 36 can be adjusted by a feedback resistor 46.

The voltage transformers 26, 26 ', 26 ", 26'" (see Fig. 2) are connected by a first pole (node) 48 to one of the intermediate input circuits 49 illustrated in Fig. 2b. The intermediate input circuit 49 has a ceramic capacitor (Especially the construction type X7R) of the same input capacitor, for reasons of clarity, only a component symbol is used to indicate a first input capacitor 50 and a second input capacitor 50 '. The input capacitors 50, 50' are connected in parallel between GND and the first Between one pole (node) 48 or the second pole (node) 48 '. The input capacitors 50, 50' have values in the range from 50 μF to 5000 μF (especially in the range from 100 μF to 1000 μF). It is preferably used Thirty capacitors of 10 μF each connected in parallel.

To prevent the polarity of the input voltage (24V / GND) from being reversed, two Schottky diodes 52, 52 'are connected upstream of the intermediate input circuit 49. If the first high-voltage power supply 10 (refer to FIG. 1) and an additional power supply (not shown) are connected to the same voltage source, the Schottky diodes 52, 52 'further prevent oscillation between them.

The voltage transformers 26, 26 ', 26 ", 26'" (see Fig. 2) are further connected to a driver 54 (see Fig. 2c). The driver 54 includes a first main transistor 56 and a second main transistor 56 ' The two main transistors 56 and 56 'are controlled in two steps, one of which is used to increase the level. The first step includes a gate driver module 58. The gate driver module 58 controls the unit (Not shown) The signal "Gate_Driver" increases from 3.3V to 15V. In a second step, the output current of the gate driver module 58 is amplified by a bipolar push / pull stage 60.

A first voltage divider 62 is associated with the first main transistor 56 and a second voltage divider 62 'is associated with the second main transistor 56'. The voltage dividers 62, 62 'have the same construction. Therefore, for clarity reasons, only the first voltage divider 62 is explained in more detail below. The first voltage divider 62 includes a first resistor 64 in one of the gate lines. The gate line is a line between the bipolar push / pull stage 60 and the gate of the first main transistor 56. The first resistance 64 in the gate line has a value in a range from 1 ohm to 100 ohms, and it is preferable to use a value of 10 ohms. The first voltage divider 62 further includes a second resistor 66 and a third resistor 68 between a gate and a source of the first main transistor 56. The resistors 66 and 68 connected in parallel can also be produced by a single resistor. The range of resistance values due to resistors 66 and 68 is between 10 ohms and 1000 ohms, especially between 80 ohms and 220 ohms. The first voltage divider 62 prevents the first main transistor 56 from being controlled by a 3.3V level control unit in the event of a defect in the gate driver module 58. A first switching peak protection circuit 57 is disposed at the two output connections of the first main transistor 56, especially at the source and the drain of the transistor. As shown in FIG. 2c, this should include a capacitor and a resistor. During the switching of this circuit, the main transistor 56 is protected from voltage spikes.

A second switching peak protection circuit 57 'is disposed at the two output connections of the second main transistor 56', especially at the source and the drain of the transistor. The circuit should also include a capacitor and a resistor. During the switching of this circuit, the second main transistor 56 'is protected from voltage spikes.

The voltage inputs of the voltage transformers 26, 26 ', 26 ", 26'" are connected in parallel (see Fig. 2). Thereby, the voltage transformers 26, 26 ', 26 ", 26' '' can be controlled at the same time. This allows a rapid and precise voltage increase almost immediately following one of the output voltages of the first high-voltage power supply 10 (see FIG. 1) determined by the control unit (not shown) to a desired value.

The voltage transformers 26, 26 ', 26 ", 26'" each have an output switching circuit 70, 70 ', 70 ", 70'". The output switching circuits 70, 70 ', 70 ", 70' '' are connected in series between the voltage outputs 22 of the first high-voltage power supply 10 (see Fig. 1).

A voltage detection unit 24 is provided between the voltage outputs 22. The voltage detection unit 24 includes a voltage divider having more than 8 resistors (preferably from 12 to 14 resistors). The resistance should be the same. The value of the obtained resistance may be in a range from 100 kiloohms to 10 megaohms, and particularly preferably in a range from 1 megaohm to 2 megaohms. It is produced by, for example, 12 0.5 megaohm resistors connected in series. For reasons of clarity, only a component symbol is used to indicate a first resistor 72 and a second resistor 72 '. The resistance value of the resistor has a tolerance of 0.1%. A high number of resistors increases reliability in the event of a resistor failure, and reduces the voltage load of individual resistors to the extent that standard resistors can be used.

The first resistance 72 and the second resistance 72 'are measuring resistances. In the case of a negative voltage at the voltage output 22, the measured voltage at the first resistor 72 is detected and the second resistor 72 'is bridged. In the case of a positive voltage at the voltage output 22, the measured voltage at the second resistor 72 'is detected and the first resistor 72 is bridged. The scale factor of the voltage divider is 0.002. This corresponds to a measurement voltage of 4V at an output voltage of 2000V.

The output switching circuits 70, 70 ', 70 ", 70' '' have the same form. Therefore, for the sake of clarity, only a first output switching circuit 70 is explained in more detail below.

According to FIG. 2 a, the first output switching circuit 70 has a first step-up diode 74. The first boost diode 74 is a 1200V silicon carbide diode (SiC diode). When the first step-up diode 74 is blocked by the diode reverse current, the first step-up diode 74 prevents the first output switching circuit 70 from being discharged. This increases the maximum possible output voltage. The loss in the first boost diode 74 can be minimized by a high switching frequency.

The first output switching circuit 70 has output capacitors 76, 76 ', 76 ". Three of these output capacitors are connected in parallel. They can all have the same value. The output capacitors 76, 76', 76" are in the range from 10nF to 10μF High voltage ceramic transistor. It is preferred to use three 100nF capacitors connected in parallel. The discharge resistors 78, 78 ', 78 "are supplied to the output circuit. Containers 76, 76 ', 76 ". Three discharge resistors are connected in parallel. Each discharge resistor 78, 78', 78" has two resistors connected in series using a component symbol for clarity. Each of the discharge resistors 78, 78 ', 78 "discharges the output voltage of the first output switching circuit 70 to less than 40V (that is, connects" High "and the voltage between" Trafol_Sink "). Due to the parallel connection of the discharge resistors 78, 78 ', 78 ", it is ensured that this discharge time of less than 1 second can always be achieved even in the case of one or both of the discharge resistors 78, 78', 78" being defective. Thereby, the first output switching circuit 70 is constructed in a particularly reliable manner. The resulting resistance values of the discharge resistors 78, 78 ', 78 "may be in a range from 10 kohms to 2 megaohms, and particularly preferably in a range from 0.1 megaohms to 1 megaohm. For example, two 0.4 megaohm resistors are connected in parallel.

The first voltage transformer 26 is constructed in such a way that at least 20% of the energy supplied to the voltage transformer 26 at its voltage input is directed to one of the output capacitors 76, 76 ', 76 "in a basic cycle. During the voltage increase, a particularly small delay error is possible.

The output switching circuits 70, 70 ', 70 ", 70' '' (see Fig. 2) are each connected to one of the discharge circuits of the discharge circuit assembly 20 (see Fig. 1). This allows to actually follow the control unit (not shown) ), One of the output voltages of the first high-voltage power supply 10 (please refer to FIG. 1) increases the precise voltage.

Figure 3 illustrates a first discharge circuit 80, a second discharge circuit 80 ', a third discharge circuit 80 ", and a fourth discharge circuit 80'". The discharge circuits 80, 80 ', 80 ", 80' '' Has the same form. To simplify the description, therefore, only the first discharge circuit 80 is explained in more detail below.

According to FIG. 3a, the first discharge circuit 80 has a first actively controlled current slot 82 including one of the first current slot transistors 84. The discharge current of the first current slot 82 is adjusted by the gate voltage of the first current slot transistor 84. The first current slot 82 further includes a first gate resistor. 86. A first source resistor 88 and a first drain resistor 90. The first gate resistor 86 decouples the first voltage transformer 26 (refer to FIG. 2) from the first current slot 82 and prevents the current slot 82 from oscillating, which oscillates in the output capacitors 76, 76 ', 76 ”(refer to FIG. 2). 2a) can change the load in other ways. The first gate transistor 86 has a value in the range from 10 ohms to 1000 ohms, and preferably a value from 50 ohms to 200 ohms. By the first The source resistance 88 adjusts the ratio between the gate voltage and the discharge current of the current sink transistor 84. The first source resistance 88 has a value in a range from 5 ohms to 100 ohms, and preferably from 10 ohms to 50 ohms The first drain resistor 90 prevents the current sinks (especially the first current sink 82) of the discharge circuits 80, 80 ', 80 ", 80'" (see Fig. 3) from affecting each other in their series connection. The first drain resistance 90 has a value in a range of 1 ohm to 100 ohms and preferably a value of 5 ohms to 20 ohms. A Zener diode 99, which connects one of the "Trafol_Sink" and the gate of the current sink transistor 84, limits the voltage at the gate to an allowable value. A diode 89 between the second winding 98 and the gate of the current sink transistor 84 is used as a rectifier diode.

A first gate capacitor 92 connected in parallel to one of the first capacitor resistors 94 is provided at the gate of the first current sink transistor 84. The first capacitor resistor 94 continuously discharges the first gate capacitor 92 and thereby ensures that the voltage at the gate of the first current-slot transistor 84 can be changed at a sufficient speed. The first gate capacitor 92 has a value in a range of 1 nF to 100 nF and preferably uses a value of 10 nF. The first capacitor resistance 94 has a value in the range of 1 kiloohm to 20 kiloohms and preferably uses a value of 4.7 kiloohms.

The gate voltage of the first current sink transistor 84 can be controlled by a first transformer 96, and the gate is connected to a second winding 98 of the first transformer 96. In this way, a control signal can be transmitted to the first current-slot transistor 84 in a potential-free manner. The first transformer 96 is in the form of a flat transformer. The first transformer 96 is in the form of a flux transformer with peak rectification.

The first transformer 96 has a first main winding 100 and a second main winding 102. The second main winding 102 has a reversed polarity relative to the first main winding 100. Second master The winding 102 is used together with a recovery diode 104 (see FIG. 3) to ensure demagnetization of the first transformer 96.

When the control unit (not shown) of the first high-voltage power supply 10 (see FIG. 1) outputs a negative control voltage (that is, when the current output voltage of a desired value of the output voltage of the first high-voltage power supply 10) is executed, Control of discharge circuits 80, 80 ', 80 ", 80' '' connected in parallel. The control unit includes a PI controller. To not load it, a controlled voltage source 106 is used to generate the discharge circuits 80, 80 ', 80 ", 80 '' 'control. This may be (in the present case) a voltage-controlled voltage source.

According to FIG. 3b, the voltage-controlled voltage source 106 has an operational amplifier 108 and a bipolar push / pull stage 110. The bipolar push / pull stage 110 is directly connected to the output of the operational amplifier 108 and increases its maximum possible output current. The operational amplifier 108 is connected as an inverting amplifier. The output 112 of the bipolar push / pull stage 110 is directed back to one of the inputs 114 of the operational amplifier 108. Therefore, the operational amplifier 108 directly controls the output voltage of the push / pull stage 110. A diode 116 limits the output voltage of the operational amplifier 108 to a positive voltage range. A negative output voltage of the operational amplifier 108 is further prevented by a bipolar supply voltage of the push / pull stage 110.

A supply voltage from a decoupling circuit 118 (refer to FIG. 2) is used in particular to operate the amplifier 108 (+ 15V / -15V) or a comparator 36. The decoupling circuit 118 may have one supporting capacitor in the range from 1 nF to 500 nF (particularly 100 nF) for one or each supply voltage connection. The supporting capacitor can be connected between the supply voltage connection and the ground connection or between the supply voltage connection. The decoupling circuit 118 may further have a longitudinal resistance in the range from 1 ohm to 200 ohms (especially in the range from 10 ohms to 100 ohms), especially for one or each supply voltage connection. The longitudinal resistor can be connected between the supply voltage (+ 15V / -15V) and the supply voltage connection. Due to the decoupling circuit 118, it is possible to reduce the oscillation of the alternating current and voltage source after the transformation, especially a 50 Hz oscillation.

The first high-voltage power supply 10 reduces the signal output by the control unit (not shown) to control the first high-voltage power supply 10 (see FIG. 1). In this case, the actual The control voltage required for the actuation voltage (threshold voltage) of the first current-slot transistor 84 (see Fig. 3a) is reduced from 2V to 5V, especially 2.7V. This can further reduce the time until the first current-slot transistor 84 is activated.

According to FIG. 3, the discharge circuit assembly 20 finally has a temperature sensor circuit 120 for monitoring the temperature and optionally controlling the temperature of the printed circuit board 12 (see FIG. 1). The temperature sensor circuit 120 includes an LM35 temperature sensor 122.

FIG. 4 is a highly schematic view of a second high-voltage power supply 10a according to the present invention. Referring to Figure 4, it is intended to highlight several basic principles of the present invention.

The second high-voltage power supply 10a includes a voltage transformer component 18a and a discharge circuit component 20a. The voltage transformer assembly 18a and the discharge circuit assembly 20a are connected to each other. The voltage transformer assembly 18a is configured to erroneously provide one of the high voltages required by a control unit 124a at the voltage output (ie, between the connection "High" and the connection "Low").

To this end, the voltage transformer assembly 18a includes a first voltage transformer 26a and a second voltage transformer 26a '. The voltage inputs of the voltage transformers 26a, 26a 'are connected in parallel. The first voltage transformer 26a includes a first output switching circuit 70a and the second voltage transformer 26a 'includes a second output switching circuit 70a'. The output switching circuits 70a, 70a 'are connected to a discharge circuit 80a, which is one of the discharge circuit components 20a. The first output switching circuit 70a is further connected in series to a second output switching circuit 70a 'between the voltage outputs of the second high-voltage power supply 10a.

Due to the described circuit, a Pockels cell (not shown) connected to the voltage output of the second high-voltage power supply 10a via a Pockels cell driver (not shown) can be controlled in a very precise manner.

10‧‧‧The first high-voltage power supply

10a‧‧‧Second high voltage power supply

12‧‧‧printed circuit board

14‧‧‧Connecting Board Module

16‧‧‧Short bridge

18‧‧‧Voltage transformer assembly

18a‧‧‧Voltage transformer assembly

20‧‧‧Discharge circuit components

20a‧‧‧discharge circuit assembly

22‧‧‧Voltage output

24‧‧‧Voltage detection unit

26‧‧‧First voltage transformer

26’‧‧‧Second voltage transformer

26 ”‧‧‧Third voltage transformer

26 '' '‧‧‧Fourth voltage transformer

26a‧‧‧First voltage transformer

26a’‧‧‧Second voltage transformer

28‧‧‧ the first main winding

30‧‧‧ the first measurement winding

32‧‧‧ First winding

33‧‧‧First shield winding

34‧‧‧ Demagnetization identification unit

36‧‧‧ Demagnetization Comparator

38, 40‧‧‧Z Diodes

42, 44‧‧‧ Schottky diodes

46‧‧‧Feedback resistor

48‧‧‧ first pole (node)

48’‧‧‧ second pole (node)

49‧‧‧ intermediate input circuit

50‧‧‧first input capacitor

50’‧‧‧second input capacitor

52, 52 ’‧‧‧ Schottky diode

54‧‧‧Driver

56‧‧‧The first main transistor

56’‧‧‧ the second main transistor

57‧‧‧The first switching peak protection circuit

57’‧‧‧Second switching peak protection circuit

58‧‧‧Gate driver module

60‧‧‧bipolar push / pull

62‧‧‧The first voltage distributor

62’‧‧‧Second voltage distributor

64‧‧‧first resistor

66‧‧‧Second resistor

68‧‧‧Third resistor

70, 70, 70 ”, 70 '' '‧‧‧ output switching circuit

70a‧‧‧First output switching circuit

70a’‧‧‧Second output switching circuit

72‧‧‧first resistor

72’‧‧‧Second resistor

74‧‧‧First Boost Diode

76, 76 ’, 76” ‧‧‧ output capacitors

78, 78 ’, 78” ‧‧‧ discharge resistors

80‧‧‧First discharge circuit

80a‧‧‧discharge circuit

80’‧‧‧second discharge circuit

80 ”‧‧‧third discharge circuit

80 '' '‧‧‧Fourth discharge circuit

82‧‧‧The first actively controlled current slot

84‧‧‧First Current Slot Transistor

86‧‧‧The first gate resistance

88‧‧‧first source resistance

89‧‧‧diode

90‧‧‧ First Drain Resistance

92‧‧‧First Gate Capacitor

94‧‧‧first capacitor resistance

96‧‧‧First Transformer

98‧‧‧Second Winding

99‧‧‧Zina Diode

100‧‧‧ the first major winding

102‧‧‧ the second main winding

104‧‧‧ Recovery Diode

106‧‧‧Controlled voltage source

108‧‧‧ Operation Amplifier

110‧‧‧bipolar push / pull

112‧‧‧output

114‧‧‧Enter

116‧‧‧diode

118‧‧‧ Decoupling Circuit

120‧‧‧Temperature sensor circuit

122‧‧‧LM35 temperature sensor

124a‧‧‧Control unit

Two embodiments of the invention are illustrated in the schematic drawings and explained in more detail in the description below. In the drawings: FIG. 1 is a circuit diagram of a first high voltage power supply with a voltage transformer component and a discharge circuit component; FIG. 2 is a circuit diagram of a voltage transformer component of a first high voltage power supply; Figure 2 illustrates a first enlarged section of a first voltage transformer and a first output switching circuit from Figure 2; Figure 2b illustrates a second enlarged section of an input switching circuit and a demagnetization identification unit from Figure 2 Figure 2c illustrates a third enlarged section of a driver from Figure 2; Figure 3 is a circuit diagram of one of the discharge circuit components of the first high-voltage power supply; Figure 3a illustrates a first enlarged section of a first discharge circuit from Figure 3; Figure 3b illustrates a second enlarged section of a voltage-controlled voltage source from Figure 3; and Figure 4 illustrates a first One of the two high-voltage power supplies has a highly simplified circuit diagram.

Claims (8)

A high-voltage power supply (10, 10a) for a Pockels box driver having a first voltage transformer (26, 26a) and a second voltage transformer (26 ', 26a'). The voltage input of the voltage transformer (26, 26a) is connected in parallel with the voltage input of the second voltage transformer (26 ', 26a'), and the first voltage transformer (26, 26a) has a first output switching circuit (70 70a) and the second voltage transformer (26 ', 26a') has a second output switching circuit (70 ', 70a'), and the first output switching circuit (70, 70a) and the second output switching circuit (70 ', 70a') are connected in series between a plurality of poles of a voltage output (22) of the high-voltage power supply (10, 10a), and the output switching circuits (70, 70a, 70 ', 70a ') is connected to at least one discharge circuit (80, 80a, 80'), whereby at least one discharge circuit (80, 80 ', 80 ", 80'"), especially all such discharge circuits (80, 80 ', 80 ", 80'") has an actively controlled current slot (82), in which: a control unit (124a) is provided to control all such voltage transformers (26, 26a, 26 ', 26a', 26 ", 26 '' ') and discharge circuits (80, 80a, 80', 80 '', 80 '' '). The high-voltage power supply of claim 1, wherein the first output switching circuit (70) is connected to a first discharge circuit (80), and the second output switching circuit (70 ') is connected to a second Discharge circuit (80 '). The high-voltage power supply of claim 1 or 2, wherein: the high-voltage power supply (10) has at least one additional voltage transformer (26 ", 26 '"), the voltage input of which is connected to the first voltage transformer (26) And the voltage input of the second voltage transformer (26 ') are connected in parallel, and an additional output switching circuit (70 ", 70' '') of one of the additional voltage transformers (26", 26 '") is connected in series to Between the voltage output (22) of the high-voltage power supply (10) and the additional output switching circuit (70 ", 70 '' ') connected to an additional discharge circuit (80", 80' "). The high voltage power supply of claim 1 or 2, wherein a driver (54) is connected upstream of the voltage transformer (26, 26 ', 26 ", 26'"). The high-voltage power supply of claim 1 or 2, wherein: at least one voltage transformer (26, 26 ', 26 ", 26'"), especially all such voltage transformers (26, 26 ', 26 ", 26 '' '), With an insulated transformer. The high-voltage power supply of claim 5, wherein: at least one insulation transformer, and in particular all such insulation transformers, have a storage transformer in the form of a printed circuit board transformer. If the high voltage power supply of claim 1 or 2, wherein: the voltage transformers (26, 26 ', 26 ", 26'") each have an output capacitor (76, 76 ', 76 ") at its output The voltage transformers (26, 26 ', 26 ", 26'") are configured in such a way that in a basic cycle, they are supplied to the voltage transformers (26, 26) at their voltage inputs. At least 20% of the energy of ', 26', 26 '' ') is guided into the output capacitors (76, 76', 76 '') during this basic cycle. The high voltage power supply of claim 1 or 2, wherein: at least one voltage transformer (26, 26 ', 26 ", 26'"), especially all such voltage transformers (26, 26 ', 26 ", 26' ''), Having a measurement winding (30) connected to one of the demagnetization identification units (34).