TWI658323B - Alkali-developed photocurable thermosetting resin composition and printed wiring board using the same - Google Patents
Alkali-developed photocurable thermosetting resin composition and printed wiring board using the same Download PDFInfo
- Publication number
- TWI658323B TWI658323B TW103127473A TW103127473A TWI658323B TW I658323 B TWI658323 B TW I658323B TW 103127473 A TW103127473 A TW 103127473A TW 103127473 A TW103127473 A TW 103127473A TW I658323 B TWI658323 B TW I658323B
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- Taiwan
- Prior art keywords
- resin
- alkali
- group
- carboxyl group
- resin composition
- Prior art date
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- 239000011342 resin composition Substances 0.000 title claims abstract description 109
- 229920001187 thermosetting polymer Polymers 0.000 title claims abstract description 65
- 229920005989 resin Polymers 0.000 claims abstract description 126
- 239000011347 resin Substances 0.000 claims abstract description 126
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims abstract description 92
- 229920002803 thermoplastic polyurethane Polymers 0.000 claims abstract description 70
- 238000000034 method Methods 0.000 claims abstract description 17
- 239000000178 monomer Substances 0.000 claims abstract description 13
- -1 oxime ester Chemical class 0.000 claims description 82
- 239000003513 alkali Substances 0.000 claims description 49
- 125000000217 alkyl group Chemical group 0.000 claims description 37
- 238000010438 heat treatment Methods 0.000 claims description 36
- 238000011161 development Methods 0.000 claims description 34
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 31
- 239000000758 substrate Substances 0.000 claims description 16
- 238000007259 addition reaction Methods 0.000 claims description 15
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 239000002585 base Substances 0.000 claims description 9
- 239000003054 catalyst Substances 0.000 claims description 9
- 238000013329 compounding Methods 0.000 claims description 8
- 125000005843 halogen group Chemical group 0.000 claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
- 239000002253 acid Substances 0.000 claims description 7
- 229910052799 carbon Inorganic materials 0.000 claims description 7
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 7
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 6
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 5
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 claims description 4
- 150000002148 esters Chemical class 0.000 claims description 4
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims description 3
- 125000004169 (C1-C6) alkyl group Chemical group 0.000 claims 3
- 125000003837 (C1-C20) alkyl group Chemical group 0.000 claims 1
- 150000001413 amino acids Chemical class 0.000 claims 1
- 125000004494 ethyl ester group Chemical group 0.000 claims 1
- 239000000203 mixture Substances 0.000 abstract description 15
- 230000008569 process Effects 0.000 abstract description 7
- 239000010410 layer Substances 0.000 description 69
- 150000001875 compounds Chemical class 0.000 description 35
- 230000018109 developmental process Effects 0.000 description 31
- 125000004432 carbon atom Chemical group C* 0.000 description 30
- 239000003822 epoxy resin Substances 0.000 description 29
- 229920000647 polyepoxide Polymers 0.000 description 29
- 239000000463 material Substances 0.000 description 25
- 239000003999 initiator Substances 0.000 description 13
- 238000002156 mixing Methods 0.000 description 13
- 239000000047 product Substances 0.000 description 13
- 238000000576 coating method Methods 0.000 description 12
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 11
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 10
- 238000013007 heat curing Methods 0.000 description 10
- 229910000679 solder Inorganic materials 0.000 description 10
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 9
- 238000011156 evaluation Methods 0.000 description 9
- 125000003545 alkoxy group Chemical group 0.000 description 8
- 150000001412 amines Chemical class 0.000 description 8
- 238000001035 drying Methods 0.000 description 8
- 239000007870 radical polymerization initiator Substances 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 239000007864 aqueous solution Substances 0.000 description 7
- 229920005862 polyol Polymers 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- IISBACLAFKSPIT-UHFFFAOYSA-N Bisphenol A Natural products C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 6
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical compound C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 6
- 150000008065 acid anhydrides Chemical class 0.000 description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 6
- 230000001588 bifunctional effect Effects 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 125000004663 dialkyl amino group Chemical group 0.000 description 6
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 6
- 239000003960 organic solvent Substances 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 5
- 239000012965 benzophenone Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 238000001723 curing Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 125000003700 epoxy group Chemical group 0.000 description 5
- 239000011256 inorganic filler Substances 0.000 description 5
- 229910003475 inorganic filler Inorganic materials 0.000 description 5
- 125000001624 naphthyl group Chemical group 0.000 description 5
- 229920001721 polyimide Polymers 0.000 description 5
- 150000003077 polyols Chemical class 0.000 description 5
- 239000011241 protective layer Substances 0.000 description 5
- 229910000029 sodium carbonate Inorganic materials 0.000 description 5
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 4
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 4
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 4
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical class C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 4
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 4
- 239000004841 bisphenol A epoxy resin Substances 0.000 description 4
- 239000003086 colorant Substances 0.000 description 4
- 125000005442 diisocyanate group Chemical group 0.000 description 4
- 230000031700 light absorption Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 229910001507 metal halide Inorganic materials 0.000 description 4
- 150000005309 metal halides Chemical class 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 239000000049 pigment Substances 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 239000002952 polymeric resin Substances 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 238000012552 review Methods 0.000 description 4
- 125000000547 substituted alkyl group Chemical group 0.000 description 4
- 229920003002 synthetic resin Polymers 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical class C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 4
- VZDDUFFXSBGRMP-UHFFFAOYSA-N 9h-fluoren-1-ylphosphane Chemical compound C12=CC=CC=C2CC2=C1C=CC=C2P VZDDUFFXSBGRMP-UHFFFAOYSA-N 0.000 description 3
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Natural products CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
- 239000004721 Polyphenylene oxide Substances 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 3
- 125000002947 alkylene group Chemical group 0.000 description 3
- 238000005336 cracking Methods 0.000 description 3
- KOMDZQSPRDYARS-UHFFFAOYSA-N cyclopenta-1,3-diene titanium Chemical compound [Ti].C1C=CC=C1.C1C=CC=C1 KOMDZQSPRDYARS-UHFFFAOYSA-N 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 150000002334 glycols Chemical class 0.000 description 3
- 238000003475 lamination Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 3
- 239000004843 novolac epoxy resin Substances 0.000 description 3
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 3
- 229920000570 polyether Polymers 0.000 description 3
- 238000006116 polymerization reaction Methods 0.000 description 3
- 238000010526 radical polymerization reaction Methods 0.000 description 3
- 150000003254 radicals Chemical class 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 125000001544 thienyl group Chemical group 0.000 description 3
- 229930192474 thiophene Natural products 0.000 description 3
- KWVGIHKZDCUPEU-UHFFFAOYSA-N 2,2-dimethoxy-2-phenylacetophenone Chemical compound C=1C=CC=CC=1C(OC)(OC)C(=O)C1=CC=CC=C1 KWVGIHKZDCUPEU-UHFFFAOYSA-N 0.000 description 2
- BRKORVYTKKLNKX-UHFFFAOYSA-N 2,4-di(propan-2-yl)thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(C(C)C)=CC(C(C)C)=C3SC2=C1 BRKORVYTKKLNKX-UHFFFAOYSA-N 0.000 description 2
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 2
- LCHAFMWSFCONOO-UHFFFAOYSA-N 2,4-dimethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC(C)=C3SC2=C1 LCHAFMWSFCONOO-UHFFFAOYSA-N 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- HEQOJEGTZCTHCF-UHFFFAOYSA-N 2-amino-1-phenylethanone Chemical class NCC(=O)C1=CC=CC=C1 HEQOJEGTZCTHCF-UHFFFAOYSA-N 0.000 description 2
- ZCDADJXRUCOCJE-UHFFFAOYSA-N 2-chlorothioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3SC2=C1 ZCDADJXRUCOCJE-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- KMTRUDSVKNLOMY-UHFFFAOYSA-N Ethylene carbonate Chemical compound O=C1OCCO1 KMTRUDSVKNLOMY-UHFFFAOYSA-N 0.000 description 2
- NQRYJNQNLNOLGT-UHFFFAOYSA-N Piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 125000002723 alicyclic group Chemical group 0.000 description 2
- 125000003282 alkyl amino group Chemical group 0.000 description 2
- 125000003277 amino group Chemical group 0.000 description 2
- 125000002178 anthracenyl group Chemical group C1(=CC=CC2=CC3=CC=CC=C3C=C12)* 0.000 description 2
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 2
- 150000004982 aromatic amines Chemical group 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- PXXJHWLDUBFPOL-UHFFFAOYSA-N benzamidine Chemical compound NC(=N)C1=CC=CC=C1 PXXJHWLDUBFPOL-UHFFFAOYSA-N 0.000 description 2
- 229960002130 benzoin Drugs 0.000 description 2
- 230000001851 biosynthetic effect Effects 0.000 description 2
- QDVNNDYBCWZVTI-UHFFFAOYSA-N bis[4-(ethylamino)phenyl]methanone Chemical compound C1=CC(NCC)=CC=C1C(=O)C1=CC=C(NCC)C=C1 QDVNNDYBCWZVTI-UHFFFAOYSA-N 0.000 description 2
- 239000004842 bisphenol F epoxy resin Substances 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000007334 copolymerization reaction Methods 0.000 description 2
- AFYCEAFSNDLKSX-UHFFFAOYSA-N coumarin 460 Chemical compound CC1=CC(=O)OC2=CC(N(CC)CC)=CC=C21 AFYCEAFSNDLKSX-UHFFFAOYSA-N 0.000 description 2
- 150000004775 coumarins Chemical class 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 2
- 235000019382 gum benzoic Nutrition 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229920000058 polyacrylate Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920005906 polyester polyol Polymers 0.000 description 2
- 150000007519 polyprotic acids Polymers 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 2
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 2
- 125000004076 pyridyl group Chemical group 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 150000003335 secondary amines Chemical class 0.000 description 2
- 230000001235 sensitizing effect Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 150000003512 tertiary amines Chemical class 0.000 description 2
- VWDQHYQEQATEJN-UHFFFAOYSA-N 1,1'-biphenyl;ethene Chemical group C=C.C1=CC=CC=C1C1=CC=CC=C1 VWDQHYQEQATEJN-UHFFFAOYSA-N 0.000 description 1
- XKSUVRWJZCEYQQ-UHFFFAOYSA-N 1,1-dimethoxyethylbenzene Chemical compound COC(C)(OC)C1=CC=CC=C1 XKSUVRWJZCEYQQ-UHFFFAOYSA-N 0.000 description 1
- QWQFVUQPHUKAMY-UHFFFAOYSA-N 1,2-diphenyl-2-propoxyethanone Chemical compound C=1C=CC=CC=1C(OCCC)C(=O)C1=CC=CC=C1 QWQFVUQPHUKAMY-UHFFFAOYSA-N 0.000 description 1
- OUPZKGBUJRBPGC-UHFFFAOYSA-N 1,3,5-tris(oxiran-2-ylmethyl)-1,3,5-triazinane-2,4,6-trione Chemical compound O=C1N(CC2OC2)C(=O)N(CC2OC2)C(=O)N1CC1CO1 OUPZKGBUJRBPGC-UHFFFAOYSA-N 0.000 description 1
- BOCJQSFSGAZAPQ-UHFFFAOYSA-N 1-chloroanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2Cl BOCJQSFSGAZAPQ-UHFFFAOYSA-N 0.000 description 1
- UALAKBZSBJIXBP-UHFFFAOYSA-N 1-phenylethane-1,1,2,2-tetrol Chemical compound OC(O)C(O)(O)C1=CC=CC=C1 UALAKBZSBJIXBP-UHFFFAOYSA-N 0.000 description 1
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical group C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 1
- PTBDIHRZYDMNKB-UHFFFAOYSA-N 2,2-Bis(hydroxymethyl)propionic acid Chemical compound OCC(C)(CO)C(O)=O PTBDIHRZYDMNKB-UHFFFAOYSA-N 0.000 description 1
- CERJZAHSUZVMCH-UHFFFAOYSA-N 2,2-dichloro-1-phenylethanone Chemical compound ClC(Cl)C(=O)C1=CC=CC=C1 CERJZAHSUZVMCH-UHFFFAOYSA-N 0.000 description 1
- GIMQKKFOOYOQGB-UHFFFAOYSA-N 2,2-diethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)(OCC)C(=O)C1=CC=CC=C1 GIMQKKFOOYOQGB-UHFFFAOYSA-N 0.000 description 1
- IVIDDMGBRCPGLJ-UHFFFAOYSA-N 2,3-bis(oxiran-2-ylmethoxy)propan-1-ol Chemical compound C1OC1COC(CO)COCC1CO1 IVIDDMGBRCPGLJ-UHFFFAOYSA-N 0.000 description 1
- HIXDQWDOVZUNNA-UHFFFAOYSA-N 2-(3,4-dimethoxyphenyl)-5-hydroxy-7-methoxychromen-4-one Chemical compound C=1C(OC)=CC(O)=C(C(C=2)=O)C=1OC=2C1=CC=C(OC)C(OC)=C1 HIXDQWDOVZUNNA-UHFFFAOYSA-N 0.000 description 1
- KJSGODDTWRXQRH-UHFFFAOYSA-N 2-(dimethylamino)ethyl benzoate Chemical compound CN(C)CCOC(=O)C1=CC=CC=C1 KJSGODDTWRXQRH-UHFFFAOYSA-N 0.000 description 1
- SHJIJMBTDZCOFE-UHFFFAOYSA-N 2-[2-[2-(2-hydroxyethoxy)ethoxy]ethoxy]-1-methoxyethanol Chemical compound COC(O)COCCOCCOCCO SHJIJMBTDZCOFE-UHFFFAOYSA-N 0.000 description 1
- CCJAYIGMMRQRAO-UHFFFAOYSA-N 2-[4-[(2-hydroxyphenyl)methylideneamino]butyliminomethyl]phenol Chemical compound OC1=CC=CC=C1C=NCCCCN=CC1=CC=CC=C1O CCJAYIGMMRQRAO-UHFFFAOYSA-N 0.000 description 1
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- SJEBAWHUJDUKQK-UHFFFAOYSA-N 2-ethylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3C(=O)C2=C1 SJEBAWHUJDUKQK-UHFFFAOYSA-N 0.000 description 1
- PCKZAVNWRLEHIP-UHFFFAOYSA-N 2-hydroxy-1-[4-[[4-(2-hydroxy-2-methylpropanoyl)phenyl]methyl]phenyl]-2-methylpropan-1-one Chemical compound C1=CC(C(=O)C(C)(O)C)=CC=C1CC1=CC=C(C(=O)C(C)(C)O)C=C1 PCKZAVNWRLEHIP-UHFFFAOYSA-N 0.000 description 1
- XMLYCEVDHLAQEL-UHFFFAOYSA-N 2-hydroxy-2-methyl-1-phenylpropan-1-one Chemical compound CC(C)(O)C(=O)C1=CC=CC=C1 XMLYCEVDHLAQEL-UHFFFAOYSA-N 0.000 description 1
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 1
- GWZMWHWAWHPNHN-UHFFFAOYSA-N 2-hydroxypropyl prop-2-enoate Chemical compound CC(O)COC(=O)C=C GWZMWHWAWHPNHN-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/285—Permanent coating compositions
- H05K3/287—Photosensitive compositions
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
- H05K1/032—Organic insulating material consisting of one material
- H05K1/0346—Organic insulating material consisting of one material containing N
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0779—Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
- H05K2203/0786—Using an aqueous solution, e.g. for cleaning or during drilling of holes
- H05K2203/0793—Aqueous alkaline solution, e.g. for cleaning or etching
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Materials For Photolithography (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Abstract
本發明提供彎曲性、作業性優異之撓性印刷配線板之絕緣膜,尤其是適於折彎部(彎曲部)與安裝部(非彎曲部)之一次形成製程之鹼顯影型光硬化性熱硬化性樹脂組成物。 The present invention provides an insulating film for a flexible printed wiring board having excellent flexibility and workability, and particularly an alkali-developed photocurable heat suitable for a one-time forming process of a bent portion (bent portion) and a mounting portion (non-bent portion). A curable resin composition.
本發明係一種鹼顯影型光硬化性熱硬化性樹脂組成物,其特徵為含有具有羧基之胺基甲酸乙酯樹脂、胺基甲酸乙酯樹脂以外的具有羧基之樹脂、光鹼產生劑、及熱硬化成分。且,前述具有羧基之胺基甲酸乙酯樹脂較佳為具有乙烯性不飽和基者。另外,較佳含有具有乙烯性不飽和基之單體。 The present invention is an alkali-developing photocurable thermosetting resin composition, which comprises a urethane resin having a carboxyl group, a resin having a carboxyl group other than the urethane resin, a photobase generator, and Heat hardening composition. The urethane resin having a carboxyl group is preferably one having an ethylenically unsaturated group. Moreover, it is preferable to contain the monomer which has an ethylenically unsaturated group.
Description
本發明係關於鹼顯影型光硬化性熱硬化性樹脂組成物及撓性印刷配線板,詳言之,係關於可藉鹼顯影,彎曲性優異且抑制顯影後之加熱處理時之塌邊產生,尤其是深部硬化性良好且圖型形成性優異之鹼顯影型光硬化性熱硬化性樹脂組成物及具備該鹼顯影型光硬化性熱硬化性樹脂組成物之硬化物的撓性印刷配線板。 The present invention relates to an alkali-developing photocurable thermosetting resin composition and a flexible printed wiring board. Specifically, the present invention relates to an alkali-developing photocurable thermosetting resin composition and a flexible printed wiring board. Specifically, the present invention relates to alkali-developing, has excellent flexibility, and suppresses occurrence of sags during heat treatment after development. In particular, an alkali-developing photocurable thermosetting resin composition having good deep-curing properties and excellent pattern formation properties, and a flexible printed wiring board provided with the cured product of the alkali-developing photocurable thermosetting resin composition.
近年來,智慧型手機或平板終端之普及與性能之提升急速進行。消費者對該等所代表之資訊設備終端之小型化、薄型化之要求提高,為對應該要求,使製品內部之電路基板之高密度化、省空間化成為必要。因此,擴大可折彎收納因而可提高電路配置之自由度之撓性印刷配線板之用途,對於撓性印刷配線板之信賴性亦要求高至迄今以上者。 In recent years, the popularity and performance improvement of smart phones or tablet terminals has been rapidly developed. Consumers have increased their requirements for the miniaturization and thinness of the information equipment terminals represented by them. In order to respond to these requirements, it is necessary to increase the density and space-saving of circuit boards inside products. Therefore, the use of a flexible printed wiring board that can be folded and stored and can increase the degree of freedom of circuit configuration has been expanded, and the reliability of the flexible printed wiring board is also required to be higher than that so far.
目前,為了作為用以確保撓性印刷配線板之絕緣信賴性之絕緣膜,已廣泛採用於折彎部(彎曲部)使 用將聚醯亞胺作為基底之覆蓋材,於安裝部(非彎曲部)使用感光性樹脂組成物之混搭製程(參照專利文獻1、2)。聚醯亞胺具有優異之耐熱性及彎曲性等機械特性,另一方面,安裝部所用之感光性樹脂組成物具有電絕緣性或焊料耐熱性等優異而可微細加工之特性。 At present, in order to ensure the insulation reliability of a flexible printed wiring board, it has been widely used in bending portions (curved portions). A mixing process using a polyimide as a base material and a photosensitive resin composition in a mounting portion (non-curved portion) (see Patent Documents 1 and 2). Polyimide has excellent mechanical properties such as heat resistance and bendability. On the other hand, the photosensitive resin composition used in the mounting portion has characteristics such as excellent electrical insulation and solder heat resistance and can be finely processed.
過去之將聚醯亞胺作為基底之覆蓋材需要藉模具沖壓進行加工,故不適於微細配線。因此,需要微細配線之晶粒安裝部,可部分地併用藉由微影的加工之鹼顯影型感光性樹脂組成物(阻焊劑)而進行。撓性印刷配線板之製造中部份區別使用此樹脂組成物時,由於成為經貼合覆蓋材之步驟與形成阻焊劑之步驟的2步驟,而有成本與作業性差之問題。 In the past, a covering material using polyimide as a substrate had to be processed by die stamping, so it was not suitable for fine wiring. For this reason, the die-attachment portion of the fine wiring is required, and it can be partially used in combination with an alkali-developing photosensitive resin composition (solder resist) processed by lithography. When this resin composition is used differently in the manufacture of flexible printed wiring boards, there are problems of poor cost and workability due to the two steps of a step of laminating a cover material and a step of forming a solder resist.
專利文獻1:日本特開昭62-263692號公報 Patent Document 1: Japanese Patent Application Laid-Open No. 62-263692
專利文獻2:日本特開昭63-110224號公報 Patent Document 2: Japanese Patent Application Laid-Open No. 63-110224
迄今為止,已進行不藉由混搭製程之覆蓋材的檢討。例如,已檢討適用阻焊劑用之感光性樹脂組成物作為撓性印刷配線板之覆蓋材的檢討,但阻焊劑用之樹脂組成物,其作為覆蓋材之耐衝擊性或彎曲性等信賴性不 足。阻焊劑用之樹脂組成物亦由於隨著丙烯酸系之光聚合而硬化收縮,故亦有撓性配線板之翹曲等尺寸安定性之課題。 So far, a review of covering materials without a mix and match process has been conducted. For example, the application of a photosensitive resin composition for a solder resist as a cover material for a flexible printed wiring board has been reviewed. However, the reliability of the resin composition for a solder resist as a cover material is not as high as the impact resistance or bendability. foot. The resin composition for a solder resist is also hardened and shrunk with the photopolymerization of acrylic, so there is also a problem of dimensional stability such as warpage of a flexible wiring board.
於是本發明之目的在於提供彎曲性、作業性優異之撓性印刷配線板之絕緣膜,尤其是適於折彎部(彎曲部)與安裝部(非彎曲部)之一次形成製程之鹼顯影型光硬化性熱硬化性樹脂組成物。 Therefore, an object of the present invention is to provide an insulating film for a flexible printed wiring board having excellent bendability and workability, particularly an alkali-developed type suitable for one-time forming process of a bent portion (bent portion) and a mounting portion (non-bent portion). Photocurable thermosetting resin composition.
本發明者等為解決上述課題而積極檢討之結果,發現含有具有羧基之胺基甲酸乙酯樹脂、光鹼產生劑及熱硬化成分之樹脂組成物能解決上述課題。 As a result of an intensive review by the present inventors in order to solve the above problems, it was found that a resin composition containing a urethane resin having a carboxyl group, a photobase generator, and a thermosetting component can solve the above problems.
亦即,發現藉由光照射使光鹼產生劑活化,以產生之鹼作為觸媒藉加熱使具有羧基之胺基甲酸乙酯樹脂與熱硬化成分進行加成反應,藉此可藉鹼溶液僅去除未曝光部份。因此,可藉由鹼顯影進行微細加工,另一方面由於含有胺基甲酸乙酯樹脂故可期待獲得彎曲性優異之硬化物。 That is, it was found that the photo-alkali generator is activated by light irradiation, and the generated alkali is used as a catalyst to cause an addition reaction of the urethane resin having a carboxyl group with a thermosetting component by heating, whereby the alkali solution can be used only Remove unexposed parts. Therefore, it is possible to perform fine processing by alkali development, and since a urethane resin is contained, a cured product having excellent flexibility can be expected.
不過,使含有具有羧基之胺基甲酸乙酯樹脂、熱硬化成分及光鹼產生劑之組成物於光照射後之顯影後繼而加熱硬化時,確認會有因加熱使樹脂溶出,而產生所謂的塌邊因而引起圖型崩塌之情況。 However, when a composition containing a urethane resin having a carboxyl group, a thermosetting component, and a photobase generator is developed after light irradiation, and then heat-cured, it is confirmed that the resin will elute due to heating, resulting in the so-called Collapse causes the pattern to collapse.
於是,本發明者等重複進行進一步檢討,發現除上述成分以外,藉由含有胺基甲酸酯樹脂以外之具有羧基之樹脂可解決上述問題,因而至於完成本發明。且,同時發現 於上述組成物中調配具有乙烯性不飽和基之單體,或使用具有乙烯性不飽和基者作為前述具有羧基之胺基甲酸乙酯樹脂,可進一步期待防止塌邊產生,故較適宜。 Then, the present inventors repeated further review and found that in addition to the above components, the above problems can be solved by containing a resin having a carboxyl group other than the urethane resin, and thus the present invention has been completed. And, at the same time, Blending a monomer having an ethylenically unsaturated group into the above composition, or using a monomer having an ethylenically unsaturated group as the aforementioned urethane resin having a carboxyl group is more desirable because it can further prevent the occurrence of sag.
另一方面,如上述變明瞭,利用藉由光照射產生之鹼作為觸媒之加成反應而進行藉由鹼顯影之微細加工時,對於深部硬化性仍有改良餘地。尤其,將鹼顯影型樹脂組成物使用於多層構造之覆蓋材中接近基板的層時,藉由上層所含之樹脂或感光劑會吸收光,而有光無法充分到達樹脂層深部之情況。 On the other hand, as is clear from the above, there is still room for improvement of deep hardenability when performing microfabrication by alkali development using an addition reaction of a base generated by light irradiation as a catalyst. In particular, when an alkali-developing resin composition is used in a layer close to a substrate in a cover material of a multilayer structure, the resin or photosensitizer contained in the upper layer may absorb light, and the light may not sufficiently reach the deep part of the resin layer.
因此,本發明人等重複進一步檢討,發現作為光鹼產生劑採用具有特定構造之肟酯系光鹼產生劑可解決上述問題。且,同時發現鹼顯影型光硬化性熱硬化性樹脂組成物之光照射後的加熱硬化反應中,可使加熱溫度或加熱時間之選擇幅度變寬廣,而成為作業性更優異之樹脂組成物。 Therefore, the present inventors repeated further review and found that the use of an oxime ester-based photobase generator having a specific structure as the photobase generator can solve the above problems. In addition, it was found that, in the heat-curing reaction after light irradiation of the alkali-developing photocurable thermosetting resin composition, the selection range of the heating temperature or heating time can be widened, and the resin composition having better workability can be obtained.
本發明係以下之〔1〕~〔9〕。 The present invention is the following [1] to [9].
〔1〕一種鹼顯影型光硬化性熱硬化性樹脂組成物,其特徵為含有具有羧基之胺基甲酸乙酯樹脂、胺基甲酸乙酯樹脂以外的具有羧基之樹脂、光鹼產生劑、及熱硬化成分。 [1] An alkali-developing photocurable thermosetting resin composition, comprising a urethane resin having a carboxyl group, a resin having a carboxyl group other than the urethane resin, a photobase generator, and Heat hardening composition.
〔2〕如〔1〕之鹼顯影型光硬化性熱硬化性樹脂組成物,其中前述光鹼產生劑係含有具有以下述通式(1)所示基之肟酯系光鹼產生劑,
(式中,R1表示氫原子、無取代或以碳數1~6的烷基、苯基或鹵原子取代的苯基、無取代或以1個以上之羥基取代之碳數1~20的烷基、以1個以上的氧原子中斷的該烷基、無取代或以碳數1~6的烷基或苯基取代之碳數5~8之環烷基、無取代或以碳數1~6的烷基或苯基取代之碳數2~20之烷醯基或苄醯基,R2表示無取代或以碳數1~6的烷基、苯基或鹵素原子取代的苯基、無取代或以1個以上的羥基取代之碳數1~20的烷基、以1個以上的氧原子中斷的該烷基、無取代或以碳數1~6的烷基或苯基取代之碳數5~8的環烷基、無取代或以碳數1~6的烷基或苯基取代之碳數2~20之烷醯基或苄醯基)。 (Wherein R 1 represents a hydrogen atom, an unsubstituted or substituted alkyl group having 1 to 6 carbon atoms, a phenyl group or a halogen atom substituted phenyl group, an unsubstituted or substituted 1 or more hydroxyl group having 1 to 20 carbon atoms Alkyl, this alkyl interrupted by one or more oxygen atoms, unsubstituted or cycloalkyl having 5 to 8 carbons substituted with alkyl or phenyl with 1 to 6 carbon atoms, unsubstituted or substituted with 1 carbon ~ 6 alkyl or phenyl substituted alkanoyl or benzamidine having 2 to 20 carbons, R 2 represents unsubstituted or phenyl substituted with alkyl having 1 to 6 carbons, phenyl or halogen atom, An unsubstituted or substituted alkyl group having 1 to 20 carbon atoms with one or more hydroxyl groups, an alkyl group interrupted with one or more oxygen atoms, an unsubstituted or substituted alkyl group with 1 to 6 carbon atoms or a phenyl group (Cycloalkyl with 5 to 8 carbon atoms, unsubstituted or substituted with alkyl or phenyl with 1 to 6 carbon or 2 to 20 carbon or alkyl benzyl).
〔3〕如〔1〕之鹼顯影型光硬化性熱硬化性樹脂組成物,其中前述具有羧基之胺基甲酸乙酯樹脂為具有乙烯性不飽和基。 [3] The alkali-developing photocurable thermosetting resin composition according to [1], wherein the urethane resin having a carboxyl group is an ethylenically unsaturated group.
〔4〕如〔1〕之鹼顯影型光硬化性熱硬化性樹脂組成物,其中進而包含具有乙烯性不飽和基的單體。 [4] The alkali-developing photocurable thermosetting resin composition according to [1], further comprising a monomer having an ethylenically unsaturated group.
〔5〕如〔1〕之鹼顯影型光硬化性熱硬化性樹脂組成物,其中前述熱硬化成分為環狀醚化合物。 [5] The alkali-developing photocurable thermosetting resin composition according to [1], wherein the thermosetting component is a cyclic ether compound.
〔6〕如〔1〕之鹼顯影型光硬化性熱硬化性樹脂組成物,其係為覆蓋材接著層使用者。 [6] The alkali-developing photocurable thermosetting resin composition according to [1], which is a cover material and a user of the adhesive layer.
〔7〕一種乾膜,其特徵為具有將如〔1〕之鹼顯影型 光硬化性熱硬化性樹脂組成物塗佈後,使乾燥而成的樹脂層。 [7] A dry film characterized by having an alkali developing type such as [1] A resin layer obtained by applying a photocurable thermosetting resin composition and drying it.
〔8〕一種硬化物,其特徵為硬化如〔1〕之鹼顯影型光硬化性熱硬化性樹脂組成物,或硬化如〔7〕之乾膜而成。 [8] A hardened material characterized by hardening an alkali-developing photocurable thermosetting resin composition such as [1], or hardening a dry film such as [7].
〔9〕一種撓性印刷配線板,其特徵為具備如〔8〕之硬化物。 [9] A flexible printed wiring board characterized by being provided with a hardened body as in [8].
依據本發明,可提供抑制顯影後的加熱硬化時之塌邊產生的鹼顯影型光硬化性熱硬化性樹脂組成物。且,可提供彎曲性優異之撓性印刷配線板之絕緣膜,尤其是適於折彎部(彎曲部)與安裝部(非彎曲部)之一次形成製程之鹼顯影型光硬化性熱硬化性樹脂組成物,及具備其硬化物之印刷配線板。且,本發明之鹼顯影型光硬化性熱硬化性樹脂組成物之光照射後加熱硬化時之溫度及時間管理容易,作業性優異。 According to the present invention, there can be provided an alkali-developing photocurable thermosetting resin composition that suppresses occurrence of sags during heat curing after development. In addition, it can provide an insulating film for a flexible printed wiring board with excellent flexibility, especially an alkali-developed photocuring thermosetting property suitable for a one-time forming process of a bent portion (bent portion) and a mounting portion (non-bent portion). A resin composition and a printed wiring board provided with the cured product. In addition, the alkali-developing photocurable thermosetting resin composition of the present invention is easy to manage the temperature and time during heat curing after light irradiation, and has excellent workability.
本發明之鹼顯影型光硬化性熱硬化性樹脂組成物適於撓性印刷配線板之覆蓋材。本發明之鹼顯影型光硬化性熱硬化性樹脂組成物亦適於作為多層構造之覆蓋材的接著層用樹脂組成物。此處,所謂接著層係指具有2層以上之層合構造的覆蓋材之與撓性印刷基板鄰接之樹脂層。 The alkali-developing photocurable thermosetting resin composition of the present invention is suitable for a cover material for a flexible printed wiring board. The alkali-developing photocurable thermosetting resin composition of the present invention is also suitable as a resin composition for an adhesive layer of a cover material of a multilayer structure. Here, the adhesive layer refers to a resin layer adjacent to a flexible printed circuit board of a cover material having a laminated structure of two or more layers.
又,藉由使用具有以上述通式(I)表示之基之肟酯系光鹼產生劑作為光鹼產生劑,可提供深部硬化性 優異之鹼顯影型光硬化性熱硬化性樹脂組成物。此外,成為光照射後加熱硬化時之溫度及時間之選擇幅度較廣,且作業性優異者。 Further, by using an oxime ester-based photobase generator having a group represented by the general formula (I) as the photobase generator, deep hardening can be provided. Excellent alkali-developing photocurable thermosetting resin composition. In addition, it has a wide selection of temperature and time during heat curing after light irradiation, and is excellent in workability.
1‧‧‧撓性印刷配線基材 1‧‧‧flexible printed wiring substrate
2‧‧‧銅電路 2‧‧‧ Copper Circuit
3‧‧‧樹脂層 3‧‧‧ resin layer
4‧‧‧樹脂層 4‧‧‧ resin layer
5‧‧‧遮罩 5‧‧‧Mask
圖1係示意性顯示本發明之撓性印刷配線板的製造方法之一例的步驟圖。 FIG. 1 is a step diagram schematically showing an example of a method for manufacturing a flexible printed wiring board according to the present invention.
本發明之鹼顯影型光硬化性熱硬化性樹脂組成物(以下亦簡稱為「本發明之樹脂組成物」)係特徵為含具有羧基之胺基甲酸乙酯樹脂、胺基甲酸乙酯樹脂以外的具有羧基之樹脂、光鹼產生劑、及熱硬化成分者。 The alkali-developing photocurable thermosetting resin composition of the present invention (hereinafter also referred to simply as the "resin composition of the present invention") is characterized in that it contains urethane resins having a carboxyl group, and other than urethane resins. A resin having a carboxyl group, a photobase generator, and a thermosetting component.
本發明之樹脂組成物將自光鹼產生劑產生之鹼作為觸媒,藉由曝光後之加熱使具有羧基之胺基甲酸乙酯樹脂與熱硬化成分進行加成反應,且藉鹼溶液去除未曝光部分,而變成可鹼顯影之樹脂組成物。 The resin composition of the present invention uses an alkali generated from a photo-alkali generator as a catalyst, and an urethane resin having a carboxyl group is subjected to an addition reaction with a thermosetting component by heating after exposure, and the alkali The exposed portion becomes an alkali developable resin composition.
藉由於含有具有羧基之胺基甲酸乙酯樹脂、熱硬化成分及光鹼產生劑之樹脂組成物中,進而調配上述胺基甲酸乙酯樹脂以外之樹脂之具有羧基者,可抑制顯影後加熱硬化時產生塌邊。詳細機制並不確定,但認為之理由之一列舉為具有羧基之胺基甲酸乙酯樹脂中之羧基與熱硬化成分之反應性低,藉由調配胺基甲酸乙酯樹脂以外之樹脂之具 有羧基者,而使顯影後加熱硬化時之加成反應進一步進行,形成堅固之基質。 Since a resin composition containing a urethane resin having a carboxyl group, a thermosetting component, and a photobase generator is further blended with a carboxyl group other than the above-mentioned urethane resin, heat hardening after development can be suppressed. Occurrence of slump. The detailed mechanism is not certain, but one of the reasons is considered to be that the carboxyl group in the urethane resin having a carboxyl group has low reactivity with the thermosetting component, and by formulating a resin other than the urethane resin, If there is a carboxyl group, the addition reaction during heating and hardening after development further proceeds to form a solid matrix.
另外,基於抑制塌邊產生之效果之觀點,本發明之樹脂組成物較佳於系統內含有乙烯性不飽和基。乙烯性不飽和基亦可存在於上述具有羧基之胺基甲酸乙酯樹脂中,對於本發明之樹脂組成物,進而亦可調配後述之具有乙烯性不飽和基之單體,且亦可為其二者。藉由乙烯性不飽和基的存在,認為可藉光引起自由基聚合反應,形成堅固之基質,而可抑制顯影後加熱硬化時之塌邊產生。 In addition, from the viewpoint of suppressing the effect of sag, the resin composition of the present invention preferably contains an ethylenically unsaturated group in the system. The ethylenically unsaturated group may also be present in the above-mentioned urethane resin having a carboxyl group. For the resin composition of the present invention, a monomer having an ethylenically unsaturated group described later may also be blended, and may also be both. With the presence of ethylenically unsaturated groups, it is believed that free radical polymerization can be induced by light to form a solid matrix, and the occurrence of sags during heating and hardening after development can be suppressed.
本發明之樹脂組成物適用於撓性印刷配線板之樹脂絕緣層,例如覆蓋材或阻焊劑。 The resin composition of the present invention is suitable for a resin insulating layer of a flexible printed wiring board, such as a covering material or a solder resist.
使用本發明之樹脂組成物形成撓性印刷配線板之樹脂絕緣層時,較適宜之製造方法如下。亦即,包含下述步驟之製造方法:於撓性印刷配線板上形成由本發明之樹脂組成物所成之樹脂層之步驟、對樹脂層照射圖型狀之光的步驟、加熱樹脂層之步驟(曝光後烘烤(Post Exposure Bake):亦稱為PEB)、及使樹脂層進行鹼顯影而形成具有圖型之樹脂絕緣層的步驟。視需要於鹼顯影後,進而進行光照射或加熱硬化(後硬化),使樹脂組成物完全固化獲得信賴性高之樹脂絕緣層。 When the resin composition of the present invention is used to form a resin insulating layer of a flexible printed wiring board, a suitable manufacturing method is as follows. That is, the manufacturing method includes the steps of forming a resin layer made of the resin composition of the present invention on a flexible printed wiring board, irradiating the resin layer with light having a pattern shape, and heating the resin layer. (Post Exposure Bake: also known as PEB), and a step of subjecting the resin layer to alkali development to form a resin insulating layer having a pattern. If necessary, after alkali development, light irradiation or heat curing (post-curing) is performed to completely cure the resin composition to obtain a highly reliable resin insulating layer.
如此,本發明之樹脂組成物較適宜地係藉由選擇性之光照射後的加熱處理,使羧基與熱硬化成分進行加成反應,藉此成為可形成利用鹼顯影之負型圖型者。 As described above, the resin composition of the present invention is more preferably a one that can form a negative pattern by alkali development by subjecting a carboxyl group to a thermosetting component to undergo an addition reaction by a heat treatment after selective light irradiation.
由於所得硬化物係耐熱性及彎曲性優異,且可藉由鹼 顯影進行微細加工,故無必要部份地併用鹼顯影型之感光性樹脂組成物,即可使用於撓性印刷電路板之折彎部(彎曲部)與安裝部(非彎曲部)之任一者,適用於折彎部(彎曲部)與安裝部(非彎曲部)之一次形成製程。 Since the obtained hardened material is excellent in heat resistance and bendability, The development is finely processed. Therefore, it is not necessary to use a photosensitive resin composition of the alkali development type in part, and it can be used in any of the bent portion (curved portion) and the mounting portion (non-curved portion) of a flexible printed circuit board It is suitable for one-time forming process of the bent portion (curved portion) and the mounting portion (non-curved portion).
如上述,胺基甲酸乙酯樹脂中之羧基反應性低,相較於其他僅含羧基之樹脂時,可使曝光後之加熱硬化反應時(PEB步驟時)在相同之加熱溫度下之藉由加成反應至成為耐鹼性之時間拉長。且,可使加熱硬化反應時(PEB步驟時)之加熱溫度的選擇幅度變廣。基於此,提高樹脂組成物之作業性或操作性。亦可使未曝光部成為耐鹼性,可抑制所謂的感光過度發生。 As described above, the carboxyl group in the urethane resin is low in reactivity. Compared with other resins containing only carboxyl group, the heat curing reaction after exposure (in the PEB step) can be performed at the same heating temperature. The time taken for the addition reaction to become alkali-resistant is extended. In addition, it is possible to widen the selection range of the heating temperature during the heat-hardening reaction (during the PEB step). This improves the workability and operability of the resin composition. It is also possible to make the unexposed portion resistant to alkali, and to suppress the occurrence of so-called overexposure.
以下,針對各成分加以詳述。 Hereinafter, each component will be described in detail.
作為本發明之樹脂組成物中所含之具有羧基的胺基甲酸乙酯樹脂,可使用分子中含有羧基之習知慣用的胺基甲酸乙酯樹脂化合物。且,如上述,就提高防止加熱時之塌邊產生效果的觀點而言,較佳為分子中具有乙烯性不飽和雙鍵之含羧基的胺基甲酸乙酯樹脂。此處,所謂塌邊係指光照射樹脂組成物後繼而顯影使加熱硬化時,因藉由加熱使樹脂溶出而圖型崩塌之現象。至於乙烯性不飽和雙鍵較佳為源自(甲基)丙烯酸或(甲基)丙烯酸衍生物者。作為具有羧基之胺基甲酸乙酯樹脂的具體例,可列舉為如以下之(1)~(4)列舉之化合物(可為寡聚物及聚合物之 任一種)。 As the urethane resin having a carboxyl group contained in the resin composition of the present invention, a conventional and commonly used urethane resin compound containing a carboxyl group in a molecule can be used. In addition, as described above, from the viewpoint of improving the effect of preventing sag during heating, a carboxyl group-containing urethane resin having an ethylenically unsaturated double bond in the molecule is preferred. Here, the so-called sag refers to a phenomenon in which, when the resin composition is irradiated with light and then developed and hardened by heating, the resin dissolves out by heating and the pattern collapses. As for the ethylenically unsaturated double bond, one derived from (meth) acrylic acid or a (meth) acrylic acid derivative is preferred. Specific examples of the urethane resin having a carboxyl group include the compounds listed in the following (1) to (4) (which may be oligomers and polymers) Either).
(1)藉由脂肪族二異氰酸酯、分枝脂肪族二異氰酸酯、脂環式二異氰酸酯、芳香族二異氰酸酯等二異氰酸酯,與二羥甲基丙酸、二羥甲基丁酸等含有羧基之二醇化合物及聚碳酸酯系多元醇、聚醚系多元醇、聚酯系多元醇、聚烯烴系多元醇、丙烯酸系多元醇、雙酚A系環氧烷加成物二元醇、具有酚性羥基及醇性羥基之化合物等之二元醇化合物之聚加成反應所得之含有羧基的胺基甲酸乙酯樹脂。 (1) Diisocyanates such as aliphatic diisocyanates, branched aliphatic diisocyanates, alicyclic diisocyanates, and aromatic diisocyanates, and carboxyl-containing diisocyanates such as dimethylolpropionic acid and dimethylolbutanoic acid Alcohol compounds and polycarbonate polyols, polyether polyols, polyester polyols, polyolefin polyols, acrylic polyols, bisphenol A alkylene oxide adduct glycols, and phenolic properties A carboxyl group-containing urethane resin obtained by a polyaddition reaction of a diol compound such as a hydroxyl group and an alcoholic hydroxyl compound.
(2)藉由二異氰酸酯,與雙酚A型環氧樹脂、氫化雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、聯二甲酚型環氧樹脂、聯酚型環氧樹脂等2官能環氧樹脂之(甲基)丙烯酸酯或其部分酸酐改質物、含有羧基之二醇化合物及二元醇化合物之聚加成反應所得之感光性含有羧基的胺基甲酸乙酯樹脂。 (2) Diisocyanate with bisphenol A epoxy resin, hydrogenated bisphenol A epoxy resin, bisphenol F epoxy resin, bisphenol S epoxy resin, bixylenol epoxy resin Photosensitive carboxyl-containing compounds obtained by polyaddition reaction of (meth) acrylic acid esters of bifunctional epoxy resins such as biphenol epoxy resins or partial acid anhydride modifiers thereof, diol compounds containing carboxyl groups, and glycol compounds Urethane resin.
(3)於上述(1)或(2)之樹脂合成中添加(甲基)丙烯酸羥基烷酯等分子內具有1個羥基與1個以上(甲基)丙烯酸基之化合物,使末端經(甲基)丙烯酸化之感光性含有羧基的胺基甲酸乙酯樹脂。 (3) Adding a compound having one hydroxyl group and one or more (meth) acrylic acid groups in the molecule, such as hydroxyalkyl (meth) acrylate, to the resin synthesis of the above (1) or (2), and the terminal is Acrylated photosensitive urethane resin containing a carboxyl group.
(4)於上述(1)或(2)之樹脂合成中添加異佛爾酮二異氰酸酯與季戊四醇三丙烯酸酯之等莫耳反應物等之分子內具有1個異氰酸酯基與1個以上之(甲基)丙烯酸基的化合物之末端經(甲基)丙烯酸化之感光性含有羧基的胺基甲酸乙酯樹脂。 (4) In the resin synthesis of the above (1) or (2), a mole reactant such as isophorone diisocyanate and pentaerythritol triacrylate is added, and the molecule has one isocyanate group and one or more (a A (meth) acrylic-based compound having a (meth) acrylic acid-terminated photosensitive carboxyl group-containing urethane resin.
具有羧基之胺基甲酸乙酯樹脂,係其酸價較佳為20~200mgKOH/g,更佳為40~150mgKOH/g。酸價在上述範圍內時,鹼溶解性良好,藉由鹼顯影之圖型化變容易。 The urethane resin having a carboxyl group preferably has an acid value of 20 to 200 mgKOH / g, and more preferably 40 to 150 mgKOH / g. When the acid value is within the above range, alkali solubility is good, and patterning by alkali development becomes easy.
此外,具有羧基之胺基甲酸乙酯樹脂之質量平均分子量較佳為1,000~100,000,更佳為3,000~50,000。藉由使質量平均分子量為1,000以上可獲得充分之硬化物柔軟性。且質量平均分子量為100,000以下時可使鹼顯影性變良好。 The mass average molecular weight of the urethane resin having a carboxyl group is preferably 1,000 to 100,000, and more preferably 3,000 to 50,000. When the mass average molecular weight is 1,000 or more, sufficient flexibility of the cured product can be obtained. When the mass average molecular weight is 100,000 or less, alkali developability is improved.
具有羧基之胺基甲酸乙酯樹脂之調配量在具有羧基之胺基甲酸乙酯樹脂與胺基甲酸乙酯樹脂以外之具有羧基的樹脂之合計100質量份中較佳為10質量份以上,更佳為30質量份以上。藉由調配10質量份以上使柔軟性變良好。 The blending amount of the urethane resin having a carboxyl group is preferably 10 parts by mass or more in a total of 100 parts by mass of the urethane resin having a carboxyl group and a resin having a carboxyl group other than the urethane resin. It is preferably at least 30 parts by mass. By blending 10 parts by mass or more, the flexibility is improved.
本發明之樹脂組成物中所含胺基甲酸乙酯樹脂以外之具有羧基的樹脂,係上述具有羧基之胺基甲酸酯樹脂以外的樹脂,在分子內具有羧基之樹脂。作為該樹脂可使用分子中含有羧基之習知慣用的樹脂化合物。此外,亦可為分子中具有乙烯性不飽和雙鍵之樹脂。至於乙烯性不飽和雙鍵較佳為源自(甲基)丙烯酸或(甲基)丙烯酸衍生物者。 The resin having a carboxyl group other than the urethane resin contained in the resin composition of the present invention is a resin other than the above-mentioned urethane resin having a carboxyl group, and a resin having a carboxyl group in a molecule. As this resin, a conventional resin compound containing a carboxyl group in a molecule can be used. It may also be a resin having an ethylenically unsaturated double bond in the molecule. As for the ethylenically unsaturated double bond, one derived from (meth) acrylic acid or a (meth) acrylic acid derivative is preferred.
作為具有羧基之胺基甲酸乙酯以外之樹脂具體例列舉為如以下(5)~(11)列舉之化合物(可為寡聚物及聚合 物之任一種)。 Specific examples of the resin other than the urethane having a carboxyl group are the compounds listed in the following (5) to (11) (may be oligomers and polymers) Any of the things).
(5)藉由(甲基)丙烯酸等不飽和羧酸與苯乙烯、α-甲基苯乙烯、(甲基)丙烯酸低級烷酯、異丁烯等之含不飽和基之化合物的共聚合所得之含有羧基之樹脂。 (5) Contained by copolymerization of unsaturated carboxylic acids such as (meth) acrylic acid and unsaturated group-containing compounds such as styrene, α-methylstyrene, lower alkyl (meth) acrylate, isobutylene, etc. Carboxyl resin.
(6)使2官能或其以上之多官能(固態)環氧樹脂與(甲基)丙烯酸反應,使2元酸酐加成於存在側鏈上之羥基的感光性含羧基之樹脂。 (6) A photosensitive carboxyl group-containing resin in which a difunctional or higher polyfunctional (solid) epoxy resin is reacted with (meth) acrylic acid to add a dibasic acid anhydride to a hydroxyl group present on a side chain.
(7)使進一步以表氯醇使2官能(固態)環氧樹脂之羥基環氧化的多官能環氧樹脂與(甲基)丙烯酸反應,且使2元酸酐加成於生成之羥基的感光性含羧基之樹脂。 (7) Photosensitivity of a polyfunctional epoxy resin that further epoxidizes the hydroxyl group of a bifunctional (solid) epoxy resin with (meth) acrylic acid with epichlorohydrin and the addition of a dibasic acid anhydride to the generated hydroxyl Carboxyl-containing resin.
(8)使2官能氧雜環丁烷樹脂與二羧酸反應,且使2元酸酐加成於生成之1羥基的含有羧基之聚酯樹脂。 (8) A bifunctional oxetane resin is reacted with a dicarboxylic acid, and a dibasic acid anhydride is added to a 1-hydroxyl-containing carboxyl-containing polyester resin.
(9)1分子中具有複數個酚性羥基之化合物,與環氧乙烷、環氧丙烷等環氧烷及/或碳酸伸乙酯、碳酸伸丙酯等環狀碳酸酯化合物反應所得之反應產物以含不飽和基之單羧酸部分酯化,使所得反應產物與多元酸酐反應而所得之含有羧基的感光性樹脂。 (9) A reaction obtained by reacting a compound having a plurality of phenolic hydroxyl groups in one molecule with an alkylene oxide such as ethylene oxide and propylene oxide and / or a cyclic carbonate compound such as ethylene carbonate and propylene carbonate The product is partially esterified with an unsaturated monocarboxylic acid containing a carboxyl group, and the obtained reaction product is reacted with a polybasic acid anhydride to obtain a carboxyl group-containing photosensitive resin.
(10)使1分子中具有複數個酚性羥基之化合物,與環氧乙烷、環氧丙烷等環氧烷及/或碳酸伸乙酯、碳酸伸丙酯等環狀碳酸酯化合物反應所得之反應產物與多元酸酐反應獲得之含有羧基之樹脂。 (10) Obtained by reacting a compound having a plurality of phenolic hydroxyl groups in one molecule with an alkylene oxide such as ethylene oxide and propylene oxide and / or a cyclic carbonate compound such as ethylene carbonate and propylene carbonate. A carboxyl group-containing resin obtained by reacting a reaction product with a polybasic acid anhydride.
(11)對上述(5)~(10)之樹脂進一步加成1分子內具有1個環氧基與1個以上之(甲基)丙烯酸基的化合 物而成之感光性含有羧基的樹脂。 (11) Addition of the above resins (5) to (10) to a compound having one epoxy group and one or more (meth) acrylic groups in one molecule Resin containing photosensitive carboxyl group.
胺基甲酸乙酯樹脂以外之具有羧基的樹脂,係其酸價較佳為20~200mgKOH/g,更適宜為40~150mgKOH/g為佳。酸價在上述範圍內時,鹼溶解性良好,且藉由鹼顯影之圖型化變容易。 The resin having a carboxyl group other than the urethane resin has an acid value of preferably 20 to 200 mgKOH / g, and more preferably 40 to 150 mgKOH / g. When the acid value is within the above range, alkali solubility is good, and patterning by alkali development becomes easy.
此外,胺基甲酸乙酯樹脂以外之具有羧基的樹脂之質量平均分子量較佳為1,000~100,000,更佳為3,000~50,000。分子量在上述範圍內時,鹼溶解性良好,且藉由鹼顯影之圖型化變容易。 The mass average molecular weight of the resin having a carboxyl group other than the urethane resin is preferably 1,000 to 100,000, and more preferably 3,000 to 50,000. When the molecular weight is within the above range, alkali solubility is good, and patterning by alkali development becomes easy.
胺基甲酸乙酯樹脂以外之具有羧基的樹脂之調配量在具有羧基之胺基甲酸乙酯樹脂與胺基甲酸乙酯樹脂以外之具有羧基的樹脂之合計100質量份中較佳為5質量份以上,更佳為20質量份以上。藉由調配5質量份以上在光照射後加熱時(PEB步驟),可在低溫或短時間獲得曝光部之耐顯影性。 The blending amount of the resin having a carboxyl group other than the urethane resin is preferably 5 parts by mass out of a total of 100 parts by mass of the total of the urethane resin having a carboxyl group and the resin having a carboxyl group other than the urethane resin. The above is more preferably 20 parts by mass or more. By blending 5 parts by mass or more when heating after light irradiation (PEB step), the development resistance of the exposed portion can be obtained at a low temperature or in a short time.
本發明中使用之光鹼產生劑係藉由紫外線或可見光等之光照射而分子構造會產生變化,或者藉由分子開裂,而生成作為羧基與後述之熱硬化成分的加成反應之觸媒可發揮功能之1種以上的鹼性物質之化合物。作為鹼性物質列舉為例如2級胺、3級胺。 The photobase generator used in the present invention changes the molecular structure when irradiated with light such as ultraviolet rays or visible light, or generates a catalyst that acts as an addition reaction between a carboxyl group and a heat-curing component described later by molecular cracking. A compound of more than one basic substance that functions. Examples of the basic substance include a secondary amine and a tertiary amine.
本發明之樹脂組成物在系統內具有乙烯性不飽和基時,由於可藉光照射而起始乙烯性不飽和基之聚合反應, 故在光鹼產生劑中,較佳亦於藉由光照射而活性化之過程中作為生成自由基之光自由基聚合起始劑發揮功能者。 When the resin composition of the present invention has an ethylenically unsaturated group in the system, the polymerization reaction of the ethylenically unsaturated group can be initiated by light irradiation. Therefore, among photo-alkali generators, those that function as photo-radical polymerization initiators that generate radicals in the process of activation by light irradiation are preferred.
作為光鹼產生劑列舉為例如α-胺基苯乙酮化合物、肟酯化合物、或具有醯氧基亞胺基、N-甲醯基化芳香族胺基、N-醯化芳香族胺基、硝基苄基胺基甲酸酯基、烷氧基苄基胺基甲酸酯基等取代基之化合物等。其中,以肟酯化合物、α-胺基苯乙酮化合物較佳。至於α-胺基苯乙酮化合物最好為具有2個以上氮原子者。 Examples of the photobase generator include an α-aminoacetophenone compound, an oxime ester compound, or an alkoxyimine group, an N-formamated aromatic amine group, an N-fluorinated aromatic amine group, Compounds having substituents such as a nitrobenzylcarbamate group and an alkoxybenzylcarbamate group. Among them, oxime ester compounds and α-aminoacetophenone compounds are preferred. As for the α-aminoacetophenone compound, those having two or more nitrogen atoms are preferred.
作為其他光鹼產生劑可使用WPBG-018(商品名:9-蒽基甲基N,N’-二乙基胺基甲酸酯)、WPBG-027(商品名:(E)-1-[3-(2-羥基苯基)-2-丙烯醯基]哌啶)、WPBG-082(商品名:胍鎓2-(3-苄醯基苯基)丙酸鹽)、WPBG-140(商品名:1-(蒽醌-2-基)乙基咪唑羧酸酯)等。 As other photobase generators, WPBG-018 (trade name: 9-anthrylmethyl N, N'-diethylcarbamate), WPBG-027 (trade name: (E) -1- [ 3- (2-hydroxyphenyl) -2-propenyl) piperidine), WPBG-082 (brand name: guanidinium 2- (3-benzylphenyl) propionate), WPBG-140 (commercial product Name: 1- (anthraquinone-2-yl) ethylimidazole carboxylate) and the like.
α-胺基苯乙酮化合物為分子中具有苯偶因醚鍵,且受到光照射在分子內引起開裂,而生成發揮硬化觸媒作用之鹼性物質(胺)。α-胺基苯乙酮化合物之具體例可使用(4-嗎啉基苄醯基)-1-苄基-1-二甲胺基丙烷(Irgacure 369,商品名,日本BASF公司製)或4-(甲硫基苄醯基)-1-甲基-1-嗎啉基乙烷(Irgacure 907,商品名,日本BASF公司製)、2-(二甲胺基)-2-[(4-甲基苯基)甲基]-1-[4-(4-嗎啉基)苯基]-1-丁酮(Irgacure 379,商品名,日本BASF公司製)等市售化合物或其溶液。 The α-aminoacetophenone compound has a benzoin ether bond in the molecule and is irradiated with light to cause cracking in the molecule, thereby generating an alkaline substance (amine) that functions as a hardening catalyst. As a specific example of the α-aminoacetophenone compound, (4-morpholinylbenzylfluorenyl) -1-benzyl-1-dimethylaminopropane (Irgacure 369, trade name, manufactured by BASF, Japan) or 4 can be used. -(Methylthiobenzylfluorenyl) -1-methyl-1-morpholinylethane (Irgacure 907, trade name, manufactured by BASF, Japan), 2- (dimethylamino) -2-[(4- A commercially available compound such as methylphenyl) methyl] -1- [4- (4-morpholinyl) phenyl] -1-butanone (Irgacure 379, trade name, manufactured by BASF, Japan) or a solution thereof.
作為肟酯化合物只要是藉光照射而生成鹼性物質之化合物則可使用任一種。該肟酯化合物,作為市售品列舉為日本BASF公司製之CGI-325、Irgacure-OXE01、Irgacure-OXE02、ADEKA公司製之N-1919、NCI-831等。此外,亦可使用日本專利第4,344,400號公報中記載之分子內具有2個肟酯基之化合物。 Any oxime ester compound can be used as long as it is a compound that generates a basic substance by irradiation with light. Examples of the oxime ester compound include CGI-325, Irgacure-OXE01, Irgacure-OXE02, N-1919, NCI-831, manufactured by ADEKA, and the like as commercially available products. In addition, a compound having two oxime ester groups in the molecule described in Japanese Patent No. 4,344,400 can also be used.
另外,可列舉為日本特開2004-359639號公報、日本特開2005-097141號公報、日本特開2005-220097號公報、日本特開2006-160634號公報、日本特開2008-094770號公報、日本特表2008-509967號公報、日本特表2009-040762號公報、日本特開2011-80036號公報記載之咔唑肟酯化合物等。 In addition, Japanese Patent Application Laid-Open No. 2004-359639, Japanese Patent Application Laid-Open No. 2005-097141, Japanese Patent Application Laid-Open No. 2005-220097, Japanese Patent Application Laid-Open No. 2006-160634, Japanese Patent Application Laid-Open No. 2008-094770, The carbazoxime ester compounds described in Japanese Patent Application Publication No. 2008-509967, Japanese Patent Application Publication No. 2009-040762, and Japanese Patent Application Publication No. 2011-80036.
該光鹼產生劑可單獨使用1種,亦可組合2種以上使用。本發明之樹脂組成物中之光鹼產生劑之調配量相對於熱硬化成分100質量份較佳為0.1~40質量份,更佳為0.1~30質量份。0.1質量份以上時,可良好地獲得光照射部/未照射部之耐顯影性之對比性。且,40質量份以下時,硬化物特性提高。 This photobase generator may be used individually by 1 type, and may be used in combination of 2 or more type. The blending amount of the photobase generator in the resin composition of the present invention is preferably 0.1 to 40 parts by mass, and more preferably 0.1 to 30 parts by mass relative to 100 parts by mass of the thermosetting component. When it is 0.1 parts by mass or more, the contrast of the development resistance of the light-irradiated portion / non-irradiated portion can be obtained satisfactorily. Moreover, when it is 40 mass parts or less, hardened | cured material characteristics will improve.
本發明中亦如上述,較佳使用具有以下述通式(I)表示之構造之肟酯系光鹼產生劑。該肟酯系光鹼產生劑係藉由以紫外線或可見光等之光照射而使分子開裂,而生成作為羧基與後述之熱硬化成分之加成反應之觸媒的功能之1種以上之鹼性物質之化合物。鹼性物質列舉為例如1級胺、2級胺、3級胺。 In the present invention, as described above, an oxime ester-based photobase generator having a structure represented by the following general formula (I) is preferably used. The oxime ester-based photobase generator is one or more types of basic which function as a catalyst for the addition reaction of a carboxyl group with a heat-curing component described later by irradiating light with ultraviolet or visible light or the like. Compounds of matter. Examples of the basic substance include primary amine, secondary amine, and tertiary amine.
使用具有以通式(I)表示之構造之肟酯系光鹼產生劑作為光鹼產生劑時,相較於使用其他光鹼產生劑之情況,樹脂組成物之深部硬化性良好。且,肟酯系光鹼產生劑由於藉光照射而產生自由基與鹼二者,故即使樹脂組成物系統內含乙烯性不飽和基等之自由基聚合者時,除光鹼產生劑以外並無需要含光自由基聚合起始劑。其結果,可避免產生因含光自由基聚合起使劑與光鹼產生劑二者而無法使充分之光到達深部之問題。基於上述,藉由使用肟酯系光鹼產生劑,可充分硬化至深部,可形成剖面形狀良好之圖型。 When an oxime ester-based photobase generator having a structure represented by the general formula (I) is used as the photobase generator, the resin composition has better deep hardening properties than when other photobase generators are used. In addition, since the oxime ester-based photobase generator generates both radicals and bases by irradiation with light, even when radical polymerization such as ethylenically unsaturated groups is contained in the resin composition system, other than the photobase generator, There is no need for a photo-containing radical polymerization initiator. As a result, it is possible to avoid the problem that a sufficient amount of light cannot reach the deep part due to both the photo-containing radical polymerization initiator and the photobase generator. Based on the above, by using an oxime ester-based photobase generator, it can be sufficiently hardened to a deep portion, and a pattern having a good cross-sectional shape can be formed.
且,使用具有以通式(I)表示之構造之肟酯系光鹼產生劑時,可使曝光後加熱硬化反應時(PEB步驟時)在相同之加熱溫度下之加熱時間的選擇幅度變廣。基於此,提高樹脂組成物之作業性、操作性。 In addition, when an oxime ester-based photobase generator having a structure represented by the general formula (I) is used, it is possible to widen the selection range of the heating time at the same heating temperature during the heat curing reaction after exposure (in the PEB step) . This improves the workability and operability of the resin composition.
藉由使用具有以通式(I)表示之構造之肟酯系光鹼產生劑作為光鹼產生劑,可使深部硬化性良好且可增大PEB之時間管理幅度。且,藉由使用肟酯系光鹼產生劑,而可抑制不期望部分亦因加成反應引起硬化,而無法顯影之所謂熱感光過度之發生。詳細理由並不確定,作為認為之理由係具有以通式(I)表示之構造之肟酯系光鹼產生劑在無光照射之狀態下不產生鹼,藉光照射而經歷分子開裂並開始產生鹼。據此,舉例為未曝光部未進行以鹼作為觸媒之加成反應。相對於此,認為即使是光鹼產生劑,於具備藉光照射改變立體構造而使鹼性變強之性質之 化合物中原本分子內即具有胺等之鹼,其在未曝光部中亦會引起加成反應。該情況下,曝光部與未曝光部因加成反應造成之樹脂組成物之硬化程度之差較小,無法藉由鹼顯影獲得明確的對比,會產生熱感光過度。 By using an oxime ester-based photobase generator having a structure represented by the general formula (I) as the photobase generator, it is possible to improve deep hardening properties and increase the time management range of PEB. In addition, by using an oxime ester-based photobase generator, it is possible to suppress the occurrence of so-called thermal overexposure, which is caused by an addition reaction that is undesired and cannot be developed. The detailed reason is not certain. The reason for this is that the oxime ester photobase generator having a structure represented by the general formula (I) does not generate a base in the state of no light irradiation, and undergoes molecular cracking by light irradiation and starts to generate. Alkali. Based on this, for example, an unexposed portion does not undergo an addition reaction using a base as a catalyst. On the other hand, it is considered that even a photo-alkali generator has the property of making the alkalinity stronger by changing the three-dimensional structure by light irradiation. The compound originally has a base such as an amine in the molecule, and it also causes an addition reaction in the unexposed portion. In this case, the difference between the hardening degree of the resin composition due to the addition reaction between the exposed portion and the unexposed portion is small, and a clear contrast cannot be obtained by alkali development, and thermal overexposure may occur.
(式中,R1表示氫原子、無取代或以碳數1~6的烷基、苯基或以鹵原子取代的苯基、無取代或以1個以上之羥基取代之碳數1~20的烷基、以1個以上的氧原子中斷的該烷基、無取代或碳數1~6的烷基或以苯基取代之碳數5~8之環烷基、無取代或碳數1~6的烷基或以苯基取代之碳數2~20之烷醯基或苄醯基,R2表示無取代或以碳數1~6的烷基、苯基或以鹵素原子取代的苯基、無取代或以1個以上的羥基取代之碳數1~20的烷基、以1個以上的氧原子中斷的該烷基、無取代或碳數1~6的烷基或以苯基取代之碳數5~8的環烷基、無取代或碳數1~6的烷基或以苯基取代之碳數2~20之烷醯基或苄醯基)。 (In the formula, R 1 represents a hydrogen atom, an unsubstituted or alkyl group having 1 to 6 carbon atoms, a phenyl group or a phenyl group substituted with a halogen atom, an unsubstituted group or a carbon group having 1 to 20 carbon atoms. Alkyl group interrupted by one or more oxygen atoms, unsubstituted or alkyl group having 1 to 6 carbon atoms or cycloalkyl group having 5 to 8 carbon atoms substituted with phenyl group, unsubstituted or carbon number 1 ~ 6 alkyl or alkynyl or benzamidine having 2 to 20 carbon atoms substituted with phenyl, R 2 represents unsubstituted or benzene having 1 to 6 carbons, phenyl, or benzene substituted with halogen atom An unsubstituted or unsubstituted or substituted alkyl group having 1 to 20 carbon atoms, an alkyl group interrupted with one or more oxygen atoms, an unsubstituted or unsubstituted alkyl group having 1 to 6 carbon atoms, or a phenyl group (Cycloalkyl substituted with 5 to 8 carbons, unsubstituted or alkyl with 1 to 6 carbons, or alkylalkyl or benzylfluorenyl with 2 to 20 carbons substituted with phenyl).
作為肟酯系光鹼產生劑之市售品有如前述者。且,亦可適宜地使用分子內具有2個肟酯基之光聚合起始劑,具體而言,列舉為以下述通式表示之具有咔唑構造之肟酯化合物。 The commercially available product as an oxime ester-based photobase generator is as described above. In addition, a photopolymerization initiator having two oxime ester groups in the molecule can also be suitably used, and specifically, an oxime ester compound having a carbazole structure represented by the following general formula can be used.
(式中,X表示氫原子、碳數1~17的烷基、碳數1~8的烷氧基、苯基、苯基(以碳數1~17的烷基、碳數1~8的烷氧基、胺基、具有碳數1~8的烷基之烷基胺基或二烷基胺基取代)、萘基(以碳數1~17的烷基、碳數1~8的烷氧基、胺基、具有碳數1~8的烷基之烷基胺基或二烷基胺基取代),Y、Z各表示氫原子、碳數1~17的烷基、碳數1~8的烷氧基、鹵基、苯基、苯基(以碳數1~17的烷基、碳數1~8的烷氧基、胺基、具有碳數1~8的烷基之烷基胺基或二烷基胺基取代)、萘基(以碳數1~17的烷基、碳數1~8的烷氧基、胺基、具有碳數1~8的烷基之烷基胺基或二烷基胺基取代)、蒽基、吡啶基、苯并呋喃基、苯并噻吩基,Ar表示鍵、或碳數1~10之伸烷基、伸乙烯基、伸苯基、伸聯苯基、伸吡啶基、伸萘基、噻吩、伸蒽基、伸噻吩基、伸呋喃基、2,5-吡咯二基、4,4’-二苯乙烯-二基、4,2’-苯乙烯-二基,n為0或1之整數)。 (In the formula, X represents a hydrogen atom, an alkyl group having 1 to 17 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, a phenyl group, and a phenyl group (an alkyl group having 1 to 17 carbon atoms and 1 to 8 carbon atoms) Alkoxy, amine, alkylamino or dialkylamino substituted with alkyl having 1 to 8 carbon atoms), naphthyl (alkyl having 1 to 17 carbon atoms, alkyl having 1 to 8 carbon atoms (Oxy group, amine group, alkylamino group or dialkylamino group having an alkyl group having 1 to 8 carbon atoms), Y and Z each represent a hydrogen atom, an alkyl group having 1 to 17 carbon atoms, and 1 to 1 carbon atoms 8 alkoxy, halo, phenyl, phenyl (alkyl with 1 to 17 carbons, alkoxy with 1 to 8 carbons, amine, alkyl with 1 to 8 carbons Substituted by amine or dialkylamino), naphthyl (alkyl with 1 to 17 carbons, alkoxy with 1 to 8 carbons, amine, alkyl amine with alkyl with 1 to 8 carbons Or dialkylamino), anthracenyl, pyridyl, benzofuranyl, benzothienyl, Ar represents a bond, or an alkylene, vinylene, phenylene, or ethylene Biphenyl, pyridyl, naphthyl, thiophene, anthracenyl, thienyl, furfuryl, 2,5-pyrrolediyl, 4,4'-stilbyl-diyl, 4,2 ' -Styrene-diyl, n is 0 Or an integer of 1).
尤其,前述通式中,X、Y分別為甲基或乙基,Z為甲基或苯基,n為0,Ar較佳為鍵結、或伸苯基、伸萘基、噻吩或伸噻吩基。 In particular, in the aforementioned general formula, X and Y are methyl or ethyl, Z is methyl or phenyl, n is 0, and Ar is preferably bonded, or phenyl, naphthyl, thiophene, or thiophene. base.
且,亦可列舉以下述通式表示之化合物作為 較佳之咔唑肟酯化合物。 In addition, a compound represented by the following general formula may be mentioned Preferred carbazoxime ester compounds.
(式中,R11表示碳原子數1~4的烷基、或可經硝基、鹵原子或碳原子數1~4的烷基取代之苯基,R12表示碳原子數1~4的烷基、碳原子數1~4的烷氧基、或可經碳原子數1~4的烷基或烷氧基取代之苯基,R13表示可藉氧原子或硫原子連結,可經苯基取代之碳原子數1~20的烷基、可經碳原子數1~4的烷氧基取代之苄基,R14表示硝基、或以X1-C(=O)-表示之醯基,X1表示可經碳原子數1~4的烷基取代之芳基、噻吩基、嗎啉基、硫苯基、或以下述式表示之構造)。 (In the formula, R 11 represents an alkyl group having 1 to 4 carbon atoms, or a phenyl group which can be substituted with a nitro group, a halogen atom, or an alkyl group having 1 to 4 carbon atoms, and R 12 represents an alkyl group having 1 to 4 carbon atoms Alkyl group, alkoxy group having 1 to 4 carbon atoms, or phenyl group which can be substituted by alkyl group or alkoxy group having 1 to 4 carbon atoms, R 13 represents that it can be connected by oxygen atom or sulfur atom, and can be connected by benzene Alkyl substituted with 1 to 20 carbon atoms, benzyl substituted with alkoxy having 1 to 4 carbon atoms, R 14 represents nitro, or X 1 -C (= O)- X 1 represents an aryl group, a thienyl group, a morpholinyl group, a thiophenyl group, or a structure represented by the following formula that may be substituted with an alkyl group having 1 to 4 carbon atoms.
此外,亦可使用前述公報所記載之咔唑肟酯化合物等。 Moreover, the carbazoxime ester compound etc. which were described in the said gazette can also be used.
該肟酯系光鹼產生劑可單獨使用1種,亦可組合2種以上使用。鹼顯影型光硬化性熱硬化性樹脂組成物中之光鹼產生劑之調配量相對於熱硬化成分100質量 份,較佳為0.1~40質量份,更佳為0.1~30質量份。0.1質量份以上時,可良好地獲得光照射部/未照設部之耐顯影性之對比。且,40質量份以下時,硬化物特性獲得提高。 The oxime ester-based photobase generator may be used singly or in combination of two or more kinds. The amount of the photo-alkali generator contained in the alkali-developing photo-curable thermosetting resin composition is 100 masses relative to the thermosetting component. It is preferably 0.1 to 40 parts by mass, and more preferably 0.1 to 30 parts by mass. When the content is 0.1 parts by mass or more, the contrast of the development resistance between the light-irradiated portion and the unilluminated portion can be obtained satisfactorily. Moreover, when it is 40 mass parts or less, hardened | cured material characteristics will improve.
本發明之樹脂組成物除上述光鹼產生劑以外,在不損及本發明效果之範圍內,亦可含有光自由基聚合起始劑。光自由基聚合起始劑可使用藉由光照射生成自由基之習知光自由基聚合起始劑。例如上述作為光鹼產生劑發揮功能之α-胺基苯乙酮系光聚合起始劑以外之苯烷酮系光聚合起始劑、醯基氧化膦系光聚合起始劑、二茂鈦系光聚合起始劑等。 In addition to the photobase generator described above, the resin composition of the present invention may contain a photoradical polymerization initiator as long as the effect of the present invention is not impaired. As the photo-radical polymerization initiator, a conventional photo-radical polymerization initiator that generates radicals by light irradiation can be used. For example, the benzophenone-based photopolymerization initiator other than the α-aminoacetophenone-based photopolymerization initiator that functions as the photobase generator described above, fluorenyl phosphine oxide-based photopolymerization initiator, and titanocene-based Photopolymerization initiators and the like.
作為苯烷酮系光聚合起始劑列舉為例如2,2-二甲氧基-1,2-二苯基乙烷-1-酮、1-羥基-環己基-苯基-酮、2-羥基-2-甲基-1-苯基-丙烷-1-酮、1-[4-(2-羥基乙氧基)-苯基]-2-羥基-2-甲基-1-丙烷-1-酮、2-羥基-1-{4-[4-(2-羥基-2-甲基-丙醯基)-苄基]苯基}-2-甲基-丙烷-1-酮等。 Examples of the benzophenone-based photopolymerization initiator include 2,2-dimethoxy-1,2-diphenylethane-1-one, 1-hydroxy-cyclohexyl-phenyl-one, 2- Hydroxy-2-methyl-1-phenyl-propane-1-one, 1- [4- (2-hydroxyethoxy) -phenyl] -2-hydroxy-2-methyl-1-propane-1 -Ketone, 2-hydroxy-1- {4- [4- (2-hydroxy-2-methyl-propanyl) -benzyl] phenyl} -2-methyl-propane-1-one, and the like.
作為醯基氧化膦系光聚合起始劑具體列舉為2,4,6-三甲基苄醯基二苯基氧化膦、雙(2,4,6-三甲基苄醯基)-苯基氧化膦、雙(2,6-二甲氧基苄醯基)-2,4,4-三甲基-戊基氧化膦等。市售品列舉為日本BASF公司製之LUCIRIN TPO、日本BASF公司製之Irgacure 819等。 Specific examples of the fluorenylphosphine oxide-based photopolymerization initiator include 2,4,6-trimethylbenzylfluorenyldiphenylphosphine oxide and bis (2,4,6-trimethylbenzylfluorenyl) -phenyl group. Phosphine oxide, bis (2,6-dimethoxybenzylfluorenyl) -2,4,4-trimethyl-pentylphosphine oxide, etc. Commercially available products are LUCIRIN TPO manufactured by BASF Japan, Irgacure 819 manufactured by BASF Japan, and the like.
該等苯烷酮系光聚合起始劑、醯基氧化膦系光聚合起始劑之調配量相對於具有羧基之胺基甲酸乙酯樹脂與胺基甲酸乙酯樹脂以外之具有羧基之樹脂之合計量100質量份,較佳為0.01~15質量份。未達0.01質量份時,光硬化性不足,會有耐藥品性等塗膜特性降低之情況。另一方面,超過15質量份時,無法獲得脫氣之減低效果,進而於塗膜表面之光吸收變為劇烈,會有深部硬化性降低之傾向。更佳為0.5~10質量份。 The blending amounts of these benzophenone-based photopolymerization initiators and fluorenylphosphine oxide-based photopolymerization initiators are relative to those of urethane resins having a carboxyl group and resins having a carboxyl group other than the urethane resin. The total amount is 100 parts by mass, preferably 0.01 to 15 parts by mass. If it is less than 0.01 parts by mass, the photocurability is insufficient, and the coating film properties such as chemical resistance may be reduced. On the other hand, if it exceeds 15 parts by mass, the effect of reducing outgassing cannot be obtained, and further, the light absorption on the surface of the coating film becomes drastic, and there is a tendency that the deep hardenability decreases. More preferably, it is 0.5 to 10 parts by mass.
作為二茂鈦系光聚合起始劑列舉為例如雙(環戊二烯基)-二苯基-鈦、雙(環戊二烯基)-二氯-鈦、雙(環戊二烯基)-雙(2,3,4,5,6-五氟苯基)鈦、雙(環戊二烯基)-雙(2,6-二氟-3-(吡咯-1-基)苯基)鈦等。市售品列舉為日本BASF公司製之Irgacure 784等。 Examples of the titanocene-based photopolymerization initiator include bis (cyclopentadienyl) -diphenyl-titanium, bis (cyclopentadienyl) -dichloro-titanium, and bis (cyclopentadienyl). -Bis (2,3,4,5,6-pentafluorophenyl) titanium, bis (cyclopentadienyl) -bis (2,6-difluoro-3- (pyrrole-1-yl) phenyl) Titanium, etc. Commercially available products include Irgacure 784 manufactured by BASF Japan.
二茂鈦系光聚合起始劑之調配量相對於具有羧基之胺基甲酸乙酯樹脂與胺基甲酸乙酯樹脂以外之具有羧基之樹脂之合計量100質量份,較佳為0.01~15質量份。未達0.01質量份時,在銅上之光硬化不足,會有塗膜剝離,同時耐藥品性等塗膜特性降低之情況。另一方面,超過15質量份時,光吸收量變為過高而有深部硬化性變差之情況。更佳為0.5~10質量份。 The blending amount of the titanocene-based photopolymerization initiator is 100 parts by mass with respect to the total amount of the urethane resin having a carboxyl group and the resin having a carboxyl group other than the urethane resin, preferably 0.01 to 15 mass Serving. If it is less than 0.01 parts by mass, the light hardening on copper is insufficient, and the coating film may be peeled off, and coating film characteristics such as chemical resistance may be reduced. On the other hand, when it exceeds 15 parts by mass, the amount of light absorption becomes too high, and the deep hardenability may be deteriorated. More preferably, it is 0.5 to 10 parts by mass.
除上述光聚合起始劑以外,亦可使用光起始助劑、增感劑。可使用於感光性樹脂組成物中之光聚合起始劑、光起始助劑及增感劑可列舉為苯偶因化合物、苯乙酮化合物、蒽醌化合物、噻噸酮化合物、縮酮化合物、二 苯甲酮化合物、3級胺化合物、及呫噸酮化合物等。 In addition to the above-mentioned photopolymerization initiator, a photoinitiator and a sensitizer may be used. Examples of the photopolymerization initiator, photoinitiator, and sensitizer that can be used in the photosensitive resin composition include benzoin compounds, acetophenone compounds, anthraquinone compounds, thioxanthone compounds, and ketal compounds. ,two Benzophenone compounds, tertiary amine compounds, and xanthone compounds.
作為苯偶因化合物具體列舉為例如苯偶因、苯偶因甲基醚、苯偶因乙基醚、苯偶因丙基醚等。 Specific examples of the benzoin compound include benzoin, benzoin methyl ether, benzoin ethyl ether, and benzoin propyl ether.
作為苯乙酮化合物具體列舉為例如苯乙酮、2,2-二甲氧基-2-苯基苯乙酮、2,2-二乙氧基-2-苯基苯乙酮、1,1-二氯苯乙酮等。 Specific examples of the acetophenone compound include acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, and 1,1 -Dichloroacetophenone and the like.
作為蒽醌化合物具體列舉為例如2-甲基蒽醌、2-乙基蒽醌、2-第三丁基蒽醌、1-氯蒽醌等。 Specific examples of the anthraquinone compound include 2-methylanthraquinone, 2-ethylanthraquinone, 2-tert-butylanthraquinone, and 1-chloroanthraquinone.
作為噻噸酮化合物具體列舉為例如2,4-二甲基噻噸酮、2,4-二乙基噻噸酮、2-氯噻噸酮、2,4-二異丙基噻噸酮等。 Specific examples of the thioxanthone compound include 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4-diisopropylthioxanthone, and the like .
作為縮酮化合物具體列舉為例如苯乙酮二甲基縮酮、苄基二甲基縮酮等。 Specific examples of the ketal compound include acetophenone dimethyl ketal and benzyl dimethyl ketal.
作為二苯甲酮化合具體列舉為例如二苯甲酮、4-苄醯基二苯基硫醚、4-苄醯基-4’-甲基二苯基硫醚、4-苄醯基-4’-乙基二苯基硫醚、4-苄醯基-4’-丙基二苯基硫醚等。 Specific examples of the benzophenone compound include benzophenone, 4-benzylfluorenyldiphenylsulfide, 4-benzylfluorenyl-4'-methyldiphenylsulfide, and 4-benzylfluorenyl-4. '-Ethyldiphenylsulfide, 4-benzylfluorenyl-4'-propyldiphenylsulfide, and the like.
作為3級胺化合物具體列舉為例如乙醇胺化合物、具有二烷基胺基苯構造之化合物,例如,市售品為4,4’-二甲基胺基二苯甲酮(日本曹達公司製之NISSOCURE-MABP)、4,4’-二乙基胺基二苯甲酮(保土谷化學公司製之EAB)等二烷基胺基二苯甲酮、7-(二乙胺基)-4-甲基-2H-1-苯并吡喃-2-酮(7-(二乙胺基)-4-甲基香豆素)等之含二烷基胺基之香豆素化合物、4-二甲 胺基苯甲酸乙酯(日本化藥公司製之KYACURE-EPA)、2-二甲胺基苯甲酸乙酯(International Bio Synthetic公司製之Quantacure DMB)、4-二甲胺基苯甲酸(正丁氧基)乙酯(International Bio Synthetic公司製之Quantacure BEA)、對-二甲胺基苯甲酸異戊基乙酯(日本化藥公司製之KYACURE-DMBI)、4-二甲胺基苯甲酸2-乙基己酯(Van Dyk公司製之Esolol 507)等。 Examples of the tertiary amine compound include, for example, an ethanolamine compound and a compound having a dialkylaminobenzene structure. For example, a commercially available product is 4,4'-dimethylaminobenzophenone (NISSOCURE manufactured by Soda Corporation, Japan). -MABP), 4,4'-diethylaminobenzophenone (EAB manufactured by Hodogaya Chemical Co., Ltd.), and other dialkylaminobenzophenones, 7- (diethylamino) -4-methyl Dialkylamino group-containing coumarin compounds such as 2-H-2-benzopyran-2-one (7- (diethylamino) -4-methylcoumarin), 4-dimethyl Ethyl aminobenzoate (KYACURE-EPA manufactured by Nippon Kayaku Co., Ltd.), 2-dimethylaminobenzoic acid ethyl ester (Quantacure DMB manufactured by International Bio Synthetic), 4-dimethylaminobenzoic acid (n-butyl (Oxy) ethyl ester (Quantacure BEA, manufactured by International Bio Synthetic), isoamyl ethyl p-dimethylaminobenzoate (KYACURE-DMBI, manufactured by Nippon Kayaku Co., Ltd.), 4-dimethylaminobenzoic acid 2 -Ethylhexyl ester (Esolol 507 manufactured by Van Dyk) and the like.
該等中,以噻噸酮化合物及3級胺化合物較佳、尤其,含噻噸酮化合物時,基於深部硬化性方面係較佳。其中,較佳為含2,4-二甲基噻噸酮、2,4-二乙基噻噸酮、2-氯噻噸酮、2,4-二異丙基噻噸酮等噻噸酮化合物。 Among these, a thioxanthone compound and a tertiary amine compound are preferred. In particular, when a thioxanthone-containing compound is used, it is preferred from the viewpoint of deep hardenability. Among them, preferred are thioxanthone containing 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4-diisopropylthioxanthone, etc. Compound.
作為該等噻噸酮化合物之調配量相對於上述具有羧基之胺基甲酸乙酯樹脂與胺基甲酸乙酯樹脂以外之具有羧基之樹脂之含量100質量份,較佳為20質量份以下。噻噸酮化合物之調配量超過20質量份時,膜厚硬化性下降,同時使製品成本提高。更佳為10質量份以下。 The blending amount of these thioxanthone compounds is 100 parts by mass with respect to the content of the urethane resin having a carboxyl group and a resin having a carboxyl group other than the urethane resin, and preferably 20 parts by mass or less. When the compounding amount of the thioxanthone compound exceeds 20 parts by mass, the film thickness hardenability decreases, and at the same time, the product cost increases. It is more preferably 10 parts by mass or less.
此外,作為3級胺化合物較佳為具有二烷胺基苯構造之化合物,其中特佳為二烷胺基二苯甲酮化合物、最大吸收波長為350~450nm範圍內之含有二烷胺基之香豆素化合物及酮香豆素類。 In addition, as the tertiary amine compound, a compound having a dialkylaminobenzene structure is preferred. Among them, a dialkylaminobenzophenone compound is particularly preferred, and the dialkylamine group containing a maximum absorption wavelength is in a range of 350 to 450 nm. Coumarin compounds and ketocoumarins.
至於二烷胺基二苯甲酮化合物,4,4’-二乙基胺基二苯甲酮之毒性亦低故較佳。含二烷胺基之香豆素化合物由於最大吸收波長在350~410nm之紫外線區域,故著色少,成為無色透明之硬化被膜,故可使用著色顏料, 而提供反映著色顏料本身之顏色之著色硬化被膜。尤其,7-(二乙胺基)-4-甲基-2H-1-苯并吡喃-2-酮對於波長400~410nm之雷射光顯示優異之增感效果故較佳。 As for the dialkylaminobenzophenone compound, 4,4'-diethylaminobenzophenone is also preferred because of its low toxicity. Since the coumarin compound containing a dialkylamino group has a maximum absorption wavelength in the ultraviolet region of 350 to 410 nm, it has less coloring and becomes a colorless and transparent hardened film. Therefore, a colored pigment can be used. A colored hardened film that reflects the color of the colored pigment itself is provided. In particular, 7- (diethylamino) -4-methyl-2H-1-benzopyran-2-one is preferred because it exhibits an excellent sensitizing effect on laser light having a wavelength of 400 to 410 nm.
作為該3級胺化合物之調配量相對於具有羧基之胺基甲酸乙酯樹脂與胺基甲酸乙酯樹脂以外之具有羧基之樹脂之合計量100質量份,較佳為0.1~20質量份。3級胺化合物之調配量未達0.1質量份時,有無法獲得充分增感效果之傾向。另一方面,超過20質量份時,因3級胺化合物而於塗膜表面之光吸收變為劇烈,有深部硬化性降低之傾向。更佳為0.1~10質量份。 The compounding amount of the tertiary amine compound is preferably 0.1 to 20 parts by mass based on 100 parts by mass of the total amount of the urethane resin having a carboxyl group and the resin having a carboxyl group other than the urethane resin. When the compounding amount of the tertiary amine compound is less than 0.1 part by mass, there is a tendency that a sufficient sensitizing effect cannot be obtained. On the other hand, when it exceeds 20 parts by mass, the light absorption on the surface of the coating film due to the tertiary amine compound becomes intense, and the deep hardenability tends to decrease. More preferably, it is 0.1 to 10 parts by mass.
該光自由基聚合起始劑、光起始助劑及增感劑可單獨使用1種,亦可以2種以上之混合物使用。 The photo-radical polymerization initiator, the photo-starting aid, and the sensitizer may be used alone or as a mixture of two or more.
該光自由基聚合起始劑、光起始助劑、及增感劑之總量相對於具有羧基之胺基甲酸乙酯樹脂與胺基甲酸乙酯樹脂以外之具有羧基之樹脂之合計量100質量份較佳為35質量份以下。超過35質量份時,有因該等之光吸收而使深部硬化性降低之傾向。 The total amount of the photo-radical polymerization initiator, photo-starting aid, and sensitizer is 100 with respect to the total amount of the urethane resin having a carboxyl group and the resin having a carboxyl group other than the urethane resin. The mass part is preferably 35 mass parts or less. When it exceeds 35 parts by mass, there is a tendency that the deep hardenability is reduced due to such light absorption.
熱硬化成分係具有可藉由熱進行與羧基之加成反應之官能基者。熱硬化成分較佳為例如具有環狀(硫)醚基之化合物,列舉為環氧樹脂、多官能氧雜環丁烷化合物等。 The thermosetting component has a functional group capable of performing an addition reaction with a carboxyl group by heat. The thermosetting component is preferably, for example, a compound having a cyclic (thio) ether group, and examples thereof include epoxy resins and polyfunctional oxetane compounds.
上述環氧樹脂係具有環氧基之樹脂,可使用習知者之任一種。列舉為分子中具有2個環氧基之2官能 性環氧樹脂、分子中具有多數個環氧基之多官能環氧樹脂等。又,亦可為經氫化之2官能環氧化合物。 The epoxy resin is a resin having an epoxy group, and any of known ones can be used. Listed as bifunctional with 2 epoxy groups in the molecule Epoxy resin, multifunctional epoxy resin with many epoxy groups in the molecule, etc. It may also be a hydrogenated bifunctional epoxy compound.
作為上述環氧化合物列舉為雙酚A型環氧樹脂、溴化環氧樹脂、酚醛清漆型環氧樹脂、雙酚F型環氧樹脂、氫化雙酚A型環氧樹脂、縮水甘油胺型環氧樹脂、乙內醯脲(hydantoin)型環氧樹脂、脂環式環氧樹脂、三羥基苯基甲烷型環氧樹脂、聯二甲酚型或聯酚型環氧樹脂或該等之混合物;雙酚S型環氧樹脂、雙酚A酚醛清漆型環氧樹脂、四羥苯基乙烷型環氧樹脂、雜環式環氧樹脂、二縮水甘油基苯二甲酸酯樹脂、四縮水甘油基二甲苯醯基乙烷樹脂、含萘基之環氧樹脂、具有二環戊二烯骨架之環氧樹脂、甲基丙烯酸縮水甘油酯共聚合系環氧樹脂、環己基馬來醯亞胺與甲基丙烯酸縮水甘油酯之共聚合環氧樹脂、CTBN改質之環氧樹脂等。 Examples of the epoxy compound include bisphenol A epoxy resin, brominated epoxy resin, novolac epoxy resin, bisphenol F epoxy resin, hydrogenated bisphenol A epoxy resin, and glycidylamine ring. Oxygen resin, hydantoin type epoxy resin, alicyclic epoxy resin, trihydroxyphenylmethane type epoxy resin, bixylenol type or biphenol type epoxy resin or a mixture thereof; Bisphenol S epoxy resin, bisphenol A novolac epoxy resin, tetrahydroxyphenylethane epoxy resin, heterocyclic epoxy resin, diglycidyl phthalate resin, tetraglycidyl Xylylene fluorenyl ethane resin, naphthyl-containing epoxy resin, epoxy resin having a dicyclopentadiene skeleton, glycidyl methacrylate copolymerization epoxy resin, cyclohexylmaleimide and Copolymerized epoxy resin of glycidyl methacrylate, CTBN modified epoxy resin, etc.
作為其他液狀2官能性環氧樹脂可列舉為乙烯基環己烯二環氧化物、(3’,4’-環氧基環己基甲基)-3,4-環氧基環己烷羧酸酯、(3’,4’-環氧基-6’-甲基環己基甲基)-3,4-環氧基-6-甲基環己烷羧酸酯等脂環族環氧樹脂。該等環氧樹脂可單獨使用1種,亦可併用2種以上。 Examples of other liquid bifunctional epoxy resins include vinylcyclohexene diepoxide and (3 ', 4'-epoxycyclohexylmethyl) -3,4-epoxycyclohexanecarboxyl. Alicyclic epoxy resins such as esters, (3 ', 4'-epoxy-6'-methylcyclohexylmethyl) -3,4-epoxy-6-methylcyclohexanecarboxylate . These epoxy resins may be used individually by 1 type, and may use 2 or more types together.
又,亦可調配馬來醯亞胺化合物、封端異氰酸酯化合物、胺基樹脂、苯并噁嗪樹脂、碳二醯亞胺樹脂、環碳酸酯化合物、表硫醇樹脂等習知慣用之化合物作為熱硬化成分。 In addition, conventional compounds such as a maleimide compound, a blocked isocyanate compound, an amine resin, a benzoxazine resin, a carbodiimide resin, a cyclic carbonate compound, and an epithiol resin can be blended as the conventional compound. Heat hardening composition.
熱硬化成分之調配量與上述具有羧基之胺基 甲酸乙酯樹脂及上述胺基甲酸乙酯樹脂以外之具有羧基之樹脂之當量比(羧基:環氧基等之熱反應性基)較佳為1:0.1~1:10。藉由設為該調配比之範圍,可使顯影性變良好,可容易地形成微細圖型。上述當量比更佳為1:0.2~1:5。 The blending amount of the thermosetting component and the above-mentioned amine group having a carboxyl group The equivalent ratio of the resin having a carboxyl group other than the ethyl formate resin and the above-mentioned urethane resin (carboxyl group: a thermally reactive group such as an epoxy group) is preferably 1: 0.1 to 1:10. By setting it as the range of this compounding ratio, developability becomes favorable, and a fine pattern can be formed easily. The above equivalent ratio is more preferably 1: 0.2 to 1: 5.
本發明之樹脂組成物可含有具有乙烯性不飽和基之單體(稱為感光性單體)。感光性單體為分子中具有1個以上之乙烯性不飽和基之化合物。感光性單體為藉由活性能量線照射而協助乙烯性不飽和基之聚合反應者。藉由存在乙烯性不飽和基,引起藉由光之自由基聚合反應,形成堅固的基質,可抑制顯影後加熱硬化時之塌邊產生。作為乙烯性不飽和基,較佳為源自(甲基)丙烯酸酯者。 The resin composition of the present invention may contain a monomer (referred to as a photosensitive monomer) having an ethylenically unsaturated group. The photosensitive monomer is a compound having one or more ethylenically unsaturated groups in the molecule. The photosensitive monomer is a person who assists the polymerization reaction of the ethylenically unsaturated group by irradiation with active energy rays. The presence of ethylenically unsaturated groups causes radical polymerization by light to form a strong matrix, which can suppress the occurrence of sags during heating and hardening after development. The ethylenically unsaturated group is preferably one derived from a (meth) acrylate.
作為感光性單體使用之化合物列舉為例如慣用習知之聚酯(甲基)丙烯酸酯、聚醚(甲基)丙烯酸酯、胺基甲酸乙酯(甲基)丙烯酸酯、碳酸酯(甲基)丙烯酸酯、環氧(甲基)丙烯酸酯等。具體列舉為丙烯酸2-羥基乙酯、丙烯酸2-羥基丙酯等丙烯酸羥基烷酯類;乙二醇、甲氧基四乙二醇、聚乙二醇、丙二醇等二醇之二丙烯酸酯類;N,N-二甲基丙烯醯胺、N-羥甲基丙烯醯胺、N,N-二甲基胺基丙基丙烯醯胺等丙烯醯胺類;丙烯酸N,N-二甲基胺基乙酯、丙烯酸N,N-二甲基胺基丙酯等丙烯酸胺基烷酯類;己二醇、三羥甲基丙烷、季戊四醇、二季戊四 醇、參-羥基乙基異氰尿酸酯等多元醇或該等之環氧乙烷加成物、環氧丙烷加成物、或ε-己內酯加成物等多元丙烯酸酯類;苯氧基丙烯酸酯、雙酚A二丙烯酸酯、及該等酚類之環氧乙烷加成物或環氧丙烷加成物等之多元丙烯酸酯類;丙三醇二縮水甘油醚、丙三醇三縮水甘油醚、三羥甲基丙烷三縮水甘油醚、三縮水甘油基異氰尿酸酯等縮水甘油醚之多元丙烯酸酯類;不限於前述,列舉為使聚醚多元醇、聚碳酸酯二醇、羥基末端聚丁二烯、聚酯多元醇等多元醇直接丙烯酸酯化,或者透過二異氰酸酯經胺基甲酸乙酯丙烯酸酯化之丙烯酸酯類及三聚氰胺丙烯酸酯、及對應於前述丙烯酸酯之各甲基丙烯酸酯至少任一種等。 Examples of the compound used as the photosensitive monomer include conventionally known polyester (meth) acrylates, polyether (meth) acrylates, urethane (meth) acrylates, and carbonates (meth). Acrylate, epoxy (meth) acrylate, and the like. Specific examples include hydroxyalkyl acrylates such as 2-hydroxyethyl acrylate and 2-hydroxypropyl acrylate; diacrylates of glycols such as ethylene glycol, methoxytetraethylene glycol, polyethylene glycol, and propylene glycol; Acrylamines such as N, N-dimethylacrylamide, N-hydroxymethylacrylamide, N, N-dimethylaminopropylacrylamide; N, N-dimethylamine acrylic acid Ethyl acrylate, N, N-dimethylaminopropyl acrylate and other amine alkyl acrylates; hexanediol, trimethylolpropane, pentaerythritol, dipentaerythritol Polyols such as alcohols, ginsyl-hydroxyethyl isocyanurates, or polyacrylates such as ethylene oxide adducts, propylene oxide adducts, or ε-caprolactone adducts; benzene Polyoxy acrylates, bisphenol A diacrylates, and polyacrylates of ethylene oxide adducts or propylene oxide adducts of these phenols; glycerol diglycidyl ether, glycerol Polyacrylic acid esters of glycidyl ethers such as triglycidyl ether, trimethylolpropane triglycidyl ether, and triglycidyl isocyanurate; not limited to the foregoing, polyether polyols and polycarbonates are listed. Polyols such as alcohols, hydroxyl-terminated polybutadiene, polyester polyols, etc. are directly acrylated, or acrylates and melamine acrylates are acrylated with urethane through diisocyanate, and the corresponding acrylates Each methacrylate is at least one or the like.
另外,亦可使用甲酚酚醛清漆型環氧樹脂等多官能環氧樹脂與丙烯酸反應之環氧丙烯酸酯樹脂等作為感光性單體。該環氧丙烯酸酯系樹脂可不使指觸乾燥性降低,而可提高光硬化性。 Alternatively, a polyfunctional epoxy resin such as a cresol novolac epoxy resin and an epoxy acrylate resin in which acrylic acid reacts with acrylic acid can be used as the photosensitive monomer. This epoxy acrylate-based resin can improve the photo-curability without reducing the touch drying property.
作為前述之感光性乾體使用之分子中具有乙烯性不飽和基之化合物之調配量相對於具有羧基之胺基甲酸乙酯樹脂與胺基甲酸乙酯樹脂以外之具有羧基之樹脂之合計量100質量份,較佳為1~50質量份,更佳為3~30質量份之比例。前述調配量未達1質量份時,無法獲得充分之塌邊防止效果。另一方面,超過50質量份時,有硬化膜變脆之情況。 The compounding amount of the compound having an ethylenically unsaturated group in the molecule used as the aforementioned photosensitive dry body is 100 with respect to the total amount of the urethane resin having a carboxyl group and the resin having a carboxyl group other than the urethane resin. The proportion by mass is preferably 1 to 50 parts by mass, and more preferably 3 to 30 parts by mass. When the blending amount is less than 1 part by mass, a sufficient effect of preventing sag cannot be obtained. On the other hand, when it exceeds 50 parts by mass, the cured film may become brittle.
本發明之樹脂組成物中,為了提高所得硬化物之可撓性、指觸乾燥性的目的,可調配慣用習知之高分子樹脂。作為高分子樹脂列舉為纖維素系、聚酯系、苯氧樹脂系聚合物、聚乙烯乙縮醛系、聚乙烯丁縮醛系、聚醯胺系、聚醯胺醯亞胺系黏結劑聚合物、嵌段共聚物、彈性體等。上述高分子樹脂可單獨使用1種,亦可併用2種以上。 In the resin composition of the present invention, conventionally known polymer resins may be blended for the purpose of improving the flexibility and touch-dryness of the obtained hardened material. Examples of the polymer resin include polymerization of cellulose-based, polyester-based, phenoxy resin-based polymers, polyethylene acetal-based, polyvinyl butyral-based, polyamine-based, and polyamine-imide-based adhesives. Materials, block copolymers, elastomers, etc. These polymer resins may be used singly or in combination of two or more kinds.
本發明之樹脂組成物中可調配無機填充劑。無機填充劑係為了抑制樹脂組成物之硬化物之硬化收縮,且提高密著性、硬度等特性而使用。作為無機填充劑列舉為例如硫酸鋇、無定形二氧化矽、熔融二氧化矽、球狀二氧化矽、滑石、黏土、碳酸鎂、碳酸鈣、氧化鋁、氫氧化鋁、氮化矽、氮化鋁、氮化硼、諾易堡矽土(Neuburg Siliceous Earth)等。上述無機填充劑可單獨使用1種,亦可併用2種以上。 An inorganic filler can be blended in the resin composition of the present invention. The inorganic filler is used in order to suppress the hardening shrinkage of the hardened material of the resin composition, and to improve properties such as adhesion and hardness. Examples of the inorganic filler include barium sulfate, amorphous silica, fused silica, spherical silica, talc, clay, magnesium carbonate, calcium carbonate, aluminum oxide, aluminum hydroxide, silicon nitride, and nitride. Aluminum, boron nitride, Neuburg Siliceous Earth, etc. The said inorganic filler may be used individually by 1 type, and may use 2 or more types together.
再者,本發明之樹脂組成物中可調配著色劑。著色劑可使用紅、藍、綠、黃、白、黑等慣用習知之著色劑,亦可為顏料、染料、色素之任一種。 Furthermore, a colorant may be blended in the resin composition of the present invention. As the colorant, conventionally used coloring agents such as red, blue, green, yellow, white, and black may be used, and any of pigments, dyes, and pigments may be used.
本發明之樹脂組成物中為了樹脂組成物的調製,或為 了塗佈於基材或載體薄膜上之黏度調整而可使用有機溶劑。 In the resin composition of the present invention, for the preparation of the resin composition, or Organic solvents can be used to adjust the viscosity of coating on the substrate or carrier film.
作為該有機溶劑可列舉為酮類、芳香族烴類、二醇醚類、二醇醚乙酸酯類、酯類、醇類、脂肪族烴、石油系溶劑等。該有機溶劑可單獨使用1種,亦可以2種以上之混合物使用。 Examples of the organic solvent include ketones, aromatic hydrocarbons, glycol ethers, glycol ether acetates, esters, alcohols, aliphatic hydrocarbons, and petroleum-based solvents. This organic solvent may be used individually by 1 type, and may be used in mixture of 2 or more type.
本發明之樹脂組成物中,視需要可進而調配硫醇化合物、密著促進劑、抗氧化劑、紫外線吸收劑等成分。該等可使用電子材料領域中習知者。且,上述樹脂組成物中可調配微粉二氧化矽、水滑石、有機膨潤土、蒙脫土等習知慣用之增黏劑、聚矽氧系、氟系、高分子系等消泡劑及/或調平劑、矽烷偶合劑、防銹劑等習知慣用之添加劑類。 In the resin composition of the present invention, components such as a thiol compound, an adhesion promoter, an antioxidant, and an ultraviolet absorber can be further blended as necessary. These are known in the art of electronic materials. In addition, conventionally used conventional thickeners such as silica, hydrotalcite, organic bentonite, montmorillonite, etc., and defoamers such as silicone, fluorine, and polymer can be blended into the resin composition. Leveling agents, silane coupling agents, rust inhibitors and other commonly used additives.
本發明之乾膜的特徵係具有由本發明之樹脂組成物所成之樹脂層。亦可為具有由本發明之樹脂組成物以外之樹脂組成物所成之層之多層構造之乾膜。 The dry film of the present invention is characterized by having a resin layer formed of the resin composition of the present invention. It may be a dry film having a multilayer structure having a layer made of a resin composition other than the resin composition of the present invention.
乾膜化時,係例如以有機溶劑稀釋本發明之樹脂組成物調整成適當黏度,以缺角輪塗佈器等習知手法,於載體膜上塗佈成均勻厚度。隨後,通常在50~130℃之溫度乾燥1~30分鐘,於載體膜上形成樹脂層。 In the case of dry film formation, the resin composition of the present invention is diluted with an organic solvent to adjust the viscosity to a suitable thickness, and the carrier film is coated to a uniform thickness by a known method such as a corner wheel coater. Subsequently, it is usually dried at a temperature of 50 to 130 ° C for 1 to 30 minutes to form a resin layer on the carrier film.
至於載體膜可使用塑膠膜。載體膜之厚度並 無特別限制,但一般在10~150μm之範圍適當選擇。於載體膜上形成樹脂層後,進而亦可於樹脂層表面層合可剝離之保護膜。 As the carrier film, a plastic film can be used. Carrier film thickness and There is no particular limitation, but it is generally appropriately selected in the range of 10 to 150 μm. After the resin layer is formed on the carrier film, a peelable protective film may be further laminated on the surface of the resin layer.
本發明之可撓性印刷配線板係特徵為具有由感光性熱硬化性樹脂組成物、或乾膜之樹脂層所成之硬化物者。 The flexible printed wiring board of the present invention is characterized by having a cured product made of a photosensitive thermosetting resin composition or a resin layer of a dry film.
本發明之可撓性印刷配線板之製造方法包含下列步驟:於可撓性印刷配線板上形成由感光性熱硬化性樹脂組成物所成之樹脂層之步驟、於樹脂層上照射圖型狀之光之步驟、加熱樹脂層之步驟、及使樹脂層進行鹼顯影,形成覆蓋材及阻焊劑中之至少任一者之步驟。 The method for manufacturing a flexible printed wiring board of the present invention includes the following steps: a step of forming a resin layer made of a photosensitive thermosetting resin composition on a flexible printed wiring board, and irradiating a pattern on the resin layer A step of light, a step of heating the resin layer, and a step of subjecting the resin layer to alkali development to form at least one of a cover material and a solder resist.
此步驟係於可撓性印刷電路板上形成至少一層由鹼顯影型光硬化性熱硬化性樹脂組成物所成之樹脂層。 This step is to form at least one resin layer made of an alkali-developed photocurable thermosetting resin composition on a flexible printed circuit board.
作為樹脂層之形成方法可列舉為塗佈法、層合法。 Examples of the method for forming the resin layer include a coating method and a lamination method.
塗佈法時,係藉由網版印刷等方法,將鹼顯影型光硬化性熱硬化性樹脂組成物塗佈於可撓性印刷配線板上,經乾燥而形成樹脂層。 In the coating method, an alkali-developing photocurable thermosetting resin composition is applied to a flexible printed wiring board by a method such as screen printing, and dried to form a resin layer.
層合法之情況,首先係以有機溶劑稀釋鹼顯影型光硬化性熱硬化性樹脂組成物調整成適當黏度,並塗佈於載體膜上、經乾燥,製作具有樹脂層之乾膜。接著,以層合機等以使樹脂層與可撓性印刷配線板接觸之方式貼合後,剝 離載體膜。 In the case of lamination, first, an alkali-developed photocurable thermosetting resin composition is diluted with an organic solvent to adjust the viscosity to a suitable viscosity, and the resultant is coated on a carrier film and dried to produce a dry film having a resin layer. Next, after laminating, such as a laminator, the resin layer is brought into contact with the flexible printed wiring board, and then peeled off. Off the carrier film.
此外,樹脂層可層合其他層。其他層較佳由鹼顯影型感光性樹脂組成物所成。鹼顯影型感光性樹脂組成物可使用習知之組成物,例如可使用覆蓋材用或阻焊劑用之習知組成物。藉由成為該含其他層之層合構造,可獲得耐衝擊性與撓曲性更優異之硬化物。 In addition, the resin layer may be laminated with other layers. The other layer is preferably made of an alkali-developing photosensitive resin composition. As the alkali developing type photosensitive resin composition, a conventional composition can be used, and for example, a conventional composition for a covering material or a solder resist can be used. By forming the laminated structure including the other layers, a hardened material having more excellent impact resistance and flexibility can be obtained.
此步驟係藉光照射至負型之圖型狀使樹脂層中所含之光鹼產生劑活性化,使光照射部硬化。該步驟係藉由於光照射部中產生之鹼,使光鹼產生劑不安定化,藉由使鹼化學性增殖,而充分硬化至樹脂層深部。 In this step, light is irradiated to the negative pattern shape to activate the photo-alkali generator contained in the resin layer, and the light-irradiated portion is hardened. In this step, the alkali generated in the light-irradiated portion makes the photo-alkali generator unstable, and the alkali is chemically multiplied to sufficiently harden it to the deep part of the resin layer.
作為光照射機可使用直接繪圖裝置、搭載金屬鹵素燈之光照射機等。圖型狀之光照射用遮罩為負型遮罩。 As the light irradiator, a direct drawing device, a light irradiator equipped with a metal halide lamp, or the like can be used. The pattern-shaped light irradiation mask is a negative mask.
作為光照射所用之活性能量線較佳使用最大波長在350~450nm範圍之雷射光或散射光。藉由將最大波長設為該範圍,可使光鹼產生劑更有效活性化。若使用該範圍之雷射光,則氣體雷射、固態雷射之任一種均可。此外,其光照射量雖隨著膜厚等而異,但一般可為100~1500mJ/cm2。 As the active energy ray used for light irradiation, laser light or scattered light having a maximum wavelength in a range of 350 to 450 nm is preferably used. By setting the maximum wavelength to this range, the photo-alkali generator can be more effectively activated. If laser light in this range is used, either a gas laser or a solid-state laser may be used. In addition, although the amount of light irradiation varies depending on the film thickness and the like, it can generally be 100 to 1500 mJ / cm 2 .
於此步驟中,藉由光照射後加熱樹脂層而使光照射部 硬化。藉由該步驟,藉由光照射步驟中產生之鹼可硬化至深部。加熱溫度為例如80~140℃。加熱時間為例如10~100分鐘。 In this step, the light irradiation portion is heated by heating the resin layer after light irradiation. hardening. With this step, the alkali generated in the light irradiation step can be hardened to a deep portion. The heating temperature is, for example, 80 to 140 ° C. The heating time is, for example, 10 to 100 minutes.
本發明中之鹼顯影型光硬化性熱硬化性樹脂組成物之硬化,由於係例如藉由熱反應之環氧樹脂之開環反應,故與藉光自由基反應進行硬化時相比,可抑制變形或硬化收縮。 Since the curing of the alkali-developing photocurable thermosetting resin composition in the present invention is, for example, a ring-opening reaction of an epoxy resin by a thermal reaction, it can be suppressed compared to a case of curing by a photoradical reaction. Deformation or hardening shrinkage.
顯影步驟係藉由鹼顯影去除未照射部,形成負型之圖型狀絕緣膜,尤其是覆蓋材及阻焊劑。 The developing step is to remove the non-irradiated parts by alkali development to form a negative patterned insulating film, especially a covering material and a solder resist.
顯影方法可為浸漬等習知之方法。且,顯影液可使用碳酸鈉、碳酸鉀、氫氧化鉀、胺類、2-甲基咪唑等咪唑類、氫氧化四甲基銨水溶液(TMAH)等鹼性水溶液或該等之混合液。 The developing method may be a conventional method such as dipping. In addition, as the developing solution, sodium carbonate, potassium carbonate, potassium hydroxide, amines, imidazoles such as 2-methylimidazole, alkaline aqueous solutions such as tetramethylammonium hydroxide aqueous solution (TMAH), or a mixed solution thereof can be used.
又,顯影步驟後,亦可進一步對絕緣膜進行光照射。且,例如亦可在150℃以上加熱。 After the development step, the insulating film may be further irradiated with light. Moreover, you may heat at 150 degreeC or more, for example.
接著,基於圖1之步驟圖說明由本發明之樹脂組成物製造本發明之可撓性印刷配線板之方法之一例。又,圖1係顯示樹脂層為層合構造之情況,但亦可為僅由一層所成之情況。 Next, an example of a method for producing the flexible printed wiring board of the present invention from the resin composition of the present invention will be described based on the step diagram of FIG. 1. Although FIG. 1 shows a case where the resin layer has a laminated structure, it may be a case where only one layer is formed.
圖1之層合步驟係在形成有銅電路2之可撓性印刷電路基材1上形成由樹脂層3與樹脂層4所成之層合構造體。 The lamination step in FIG. 1 is to form a laminated structure made of a resin layer 3 and a resin layer 4 on a flexible printed circuit substrate 1 on which a copper circuit 2 is formed.
樹脂層3係由含具有羧基之胺基甲酸乙酯樹脂、胺基甲酸乙酯樹脂以外之具有羧基之樹脂及含光鹼產生劑之本發明之鹼顯影型光硬化性熱硬化性樹脂組成物所成。 The resin layer 3 is composed of a urethane resin having a carboxyl group, a resin having a carboxyl group other than the urethane resin, and a photobase generator containing the alkali-developing photocurable thermosetting resin composition of the present invention. Made.
樹脂層4形成於樹脂層3上,且係由1分子中具有1個以上之醯亞胺環與1個以上之羧基之聚醯亞胺樹脂、光鹼產生劑及熱硬化成分之感光性熱硬化性樹脂組成物所成。 The resin layer 4 is formed on the resin layer 3, and is made of a polyimide resin having one or more fluorene imine rings and one or more carboxyl groups in one molecule, a photobase generator, and a photosensitive heat of a thermosetting component. Made of a curable resin composition.
圖1之光照射步驟係藉由將遮罩5配置於樹脂層4上,以負型圖型狀進行光照射,使各樹脂層中所含之光鹼產生劑活性化而使光照射部硬化之步驟。圖1之加熱步驟係於光照射步驟後,藉由加熱樹脂層,使光照射部硬化之步驟(PEB步驟)。圖1之顯影步驟係以鹼性水溶液顯影,藉此去除未照射部,形成負型圖型層之步驟。 The light irradiation step in FIG. 1 is to arrange the mask 5 on the resin layer 4 and perform light irradiation in a negative pattern to activate the photobase generator contained in each resin layer and harden the light irradiation portion. The steps. The heating step in FIG. 1 is a step (PEB step) of curing the light irradiation portion by heating the resin layer after the light irradiation step. The developing step in FIG. 1 is a step of developing with an alkaline aqueous solution, thereby removing unirradiated portions and forming a negative pattern layer.
又,圖1之第2照光步驟係視需要用以使殘留之光鹼產生劑活性化而產生鹼之步驟,熱硬化步驟係視需要用以使圖型層充分熱硬化之步驟。 In addition, the second light irradiation step in FIG. 1 is a step for activating the remaining photo-alkali generating agent to generate an alkali if necessary, and the heat curing step is a step for sufficiently thermally curing the pattern layer as necessary.
以下,以實施例、比較例更詳細說明本發明,但本發明並不因該等實施例、比較例而受到限制。 Hereinafter, the present invention will be described in more detail with examples and comparative examples, but the present invention is not limited by these examples and comparative examples.
根據下述表1所記載之配方,分別調配實施例、比較 例所記載之材料,以攪拌機預混合後,以3軸輥研磨機混練,調製鹼顯影型光硬化性熱硬化性樹脂組成物。表中之值若未特別指明則為固體成分(質量份)。 Examples and comparisons were prepared according to the formulations described in Table 1 below. The materials described in the examples were pre-mixed with a blender and kneaded with a 3-axis roll mill to prepare an alkali-developed photocurable thermosetting resin composition. The values in the table are solid contents (parts by mass) unless otherwise specified.
準備以銅厚18μm形成電路之可撓性印刷配線基材,使用Merck公司之CZ-8100進行前處理。隨後,將實施例1~6、比較例1~4之樹脂組成物以液狀塗佈方法,以使乾燥後之膜厚成為20μm之方式,於已進行前述前處理之可撓性印刷電路板上進行塗佈。隨後,以熱風循環式乾燥爐在80℃乾燥30分鐘,形成樹脂層。隨後,以ORC公司之HMW680GW(金屬鹵素燈,散射光),以500mJ/cm2之曝光量以負型圖型狀進行光照射。 A flexible printed wiring substrate for forming a circuit with a copper thickness of 18 μm was prepared, and pretreatment was performed using Merck's CZ-8100. Subsequently, the resin compositions of Examples 1 to 6 and Comparative Examples 1 to 4 were applied in a liquid state so that the film thickness after drying was 20 μm, and the flexible printed circuit board subjected to the aforementioned pretreatment was applied. Coating. Subsequently, it was dried in a hot-air circulation-type drying oven at 80 ° C. for 30 minutes to form a resin layer. Subsequently, light irradiation was performed with a negative pattern of HMW680GW (metal halide lamp, scattered light) of the ORC company at an exposure amount of 500 mJ / cm 2 .
將上述之以樹脂層形成步驟獲得之曝光後之具有樹脂層之基板進行80℃下60分鐘、90℃下30分鐘、100℃下15分鐘之加熱處理。隨後將基材浸漬於30℃之1質量%碳酸鈉水溶液中進行顯影3分鐘,評價可否有顯影性,且評價可顯影之加熱時間之幅度(分鐘)。評價基準如下。 The substrate having the resin layer after the exposure obtained in the resin layer forming step described above was subjected to heat treatment at 80 ° C for 60 minutes, 90 ° C for 30 minutes, and 100 ° C for 15 minutes. Subsequently, the substrate was immersed in a 1% by mass sodium carbonate aqueous solution at 30 ° C. and developed for 3 minutes to evaluate whether there is developability, and the width (minutes) of the heating time for development. The evaluation criteria are as follows.
○:可顯影,塗膜狀態亦良好。 ○: Development is possible, and the state of the coating film is also good.
×※1:由於曝光部溶解於顯影液中故無法形成圖型。 × * 1: The pattern cannot be formed because the exposed part is dissolved in the developer.
×※2:由於未曝光部未溶解於顯影液中故無法形成 圖型。 × * 2: Unexposed parts cannot be formed because they are not dissolved in the developer Pattern.
將具有以上述之樹脂層形成步驟獲得之曝光後之樹脂層之基板進行90℃下30分鐘之加熱處理(PEB)。隨後使基材浸漬於30℃之1質量%之碳酸鈉水溶液中進行顯影3分鐘。隨後在150℃加熱60分鐘,評價硬化後之圖型形狀有無塌邊。評價基準如下。所得結果示於下述表1。 The substrate having the exposed resin layer obtained in the above-mentioned resin layer forming step was subjected to a heat treatment (PEB) at 90 ° C for 30 minutes. Subsequently, the substrate was immersed in a 1% by mass sodium carbonate aqueous solution at 30 ° C. for development for 3 minutes. Subsequently, it was heated at 150 ° C. for 60 minutes to evaluate whether the pattern shape after the hardening had sags. The evaluation criteria are as follows. The results obtained are shown in Table 1 below.
◎:圖型形狀無塌邊,且為鮮明形狀。 :: The pattern shape has no sags and is sharp.
○:圖型形狀無塌邊。 ○: The shape of the pattern is free of sags.
×:圖型形狀有塌邊。 ×: The pattern shape has sags.
由表1所示之評價結果可清楚,即使實施例1~6之感光性熱硬化性樹脂組成物在80℃、90℃、100℃之任一溫度下之曝光後加熱處理,顯影性均良好。且,硬化後之圖型形狀無塌邊,獲得鮮明之形狀。 From the evaluation results shown in Table 1, it is clear that even if the photosensitive thermosetting resin composition of Examples 1 to 6 is subjected to heat treatment after exposure at any temperature of 80 ° C, 90 ° C, or 100 ° C, the developability is good. . In addition, the shape of the pattern after hardening has no sag, and a sharp shape is obtained.
根據下述表2所記載之配方,分別調配實施例、比較例所記載之材料,以攪拌機預混合後,以3軸輥研磨機混練,調製鹼顯影型光硬化性熱硬化性樹脂組成物。表中之值若未特別指明則為固體成分(質量份)。 According to the formulations described in Table 2 below, the materials described in Examples and Comparative Examples were prepared, pre-mixed with a blender, and kneaded with a 3-axis roller mill to prepare an alkali-developing photocurable thermosetting resin composition. The values in the table are solid contents (parts by mass) unless otherwise specified.
準備以銅厚18μm形成電路之可撓性印刷配線基材,使用Merck公司之CZ-8100進行前處理。隨後,將實施例7~14之樹脂組成物以液狀塗佈方法,以使乾燥後之膜厚成為20μm之方式,於已進行前述前處理之可撓性印刷電路板上進行塗佈。隨後,以熱風循環式乾燥爐在80℃乾燥30分鐘,形成樹脂層。 A flexible printed wiring substrate for forming a circuit with a copper thickness of 18 μm was prepared, and pretreatment was performed using Merck's CZ-8100. Subsequently, the resin compositions of Examples 7 to 14 were applied by a liquid coating method so that the film thickness after drying became 20 μm on a flexible printed circuit board that had been subjected to the aforementioned pretreatment. Subsequently, it was dried in a hot-air circulation-type drying oven at 80 ° C. for 30 minutes to form a resin layer.
於藉由上述藉樹脂層之形成步驟所得之樹脂層上,以ORC公司之HMW680GW(金屬鹵素燈,散射光),以500mJ/cm2之曝光量以負型圖型狀進行光照射。 On the resin layer obtained through the above-mentioned step of forming the resin layer, light irradiation was performed with a negative pattern of HMW680GW (metal halide lamp, diffused light) from ORC Corporation at an exposure amount of 500 mJ / cm 2 .
曝光後之具有樹脂層之基板分別進行90℃下30分鐘、60分鐘、70分鐘、80分鐘之加熱處理。隨後將基材浸漬於30℃之1質量%碳酸鈉水溶液中,進行顯影3分鐘,評價是否有顯影性,且評價可顯影之加熱時間幅度(分鐘)。評價基準如下。 The substrate with the resin layer after the exposure was subjected to heat treatment at 90 ° C for 30 minutes, 60 minutes, 70 minutes, and 80 minutes, respectively. Subsequently, the substrate was immersed in a 1% by mass sodium carbonate aqueous solution at 30 ° C., and development was performed for 3 minutes to evaluate whether there is developability, and the heating time width (minutes) that can be developed was evaluated. The evaluation criteria are as follows.
○:可顯影,塗膜狀態亦良好。 ○: Development is possible, and the state of the coating film is also good.
×:由於未曝光部亦引起硬化反應故無法藉顯影形成圖型。 ×: Since the unexposed part also causes a hardening reaction, the pattern cannot be formed by development.
如下述般調製下述圖型性評價中所用之保護層用樹脂組成物。以酸價86mgKOH/g Mw:10000之具有羧基之聚醯亞胺100質量份、jER828 63.5質量份、IRGACURE OXE02 10質量份之調配量分別調配,以攪拌機預混合後,以3軸輥混練,調製保護層用樹脂組成物。 The resin composition for a protective layer used in the following pattern evaluation was prepared as follows. 100 parts by mass of polyimide having a carboxyl group with an acid value of 86 mgKOH / g Mw: 10,000, 63.5 parts by mass of jER828, and 10 parts by mass of IRGACURE OXE02 are respectively prepared. After pre-mixing with a blender, knead with a 3-axis roller to prepare Resin composition for protective layer.
使用實施例、比較例之各樹脂組成物,將保護層用組成物之調製所得之樹脂組成物以液狀塗佈方法,以使乾燥後成為10μm之方式,於上述之藉樹脂層之形成步驟所得之乾燥後之樹脂層之上進行塗佈,以熱風循環式乾燥爐在80℃乾燥30分鐘,形成2層之樹脂層。隨後,以ORC公司之HMW680GW(金屬鹵素燈,散射光),以500mJ/cm2之曝光量以負型圖型狀進行光照射,且在90℃進行加熱處理30分鐘。隨後將基材浸漬於30℃之1質量%碳酸鈉水溶液中,進行顯影3分鐘並圖型化。圖型化後,以光學顯微鏡確認剖面之形狀且評價其形狀。 Using each resin composition of the examples and comparative examples, the resin composition obtained by preparing the composition for the protective layer is applied in a liquid state so that it becomes 10 μm after drying, in the above-mentioned step of forming a resin layer The obtained dried resin layer was applied on top, and dried in a hot-air circulation type drying oven at 80 ° C. for 30 minutes to form two resin layers. Subsequently, light irradiation was performed with an HMW680GW (metal halide lamp, scattered light) of the ORC company in a negative pattern at an exposure amount of 500 mJ / cm 2 , and heat treatment was performed at 90 ° C. for 30 minutes. Subsequently, the substrate was immersed in a 1% by mass sodium carbonate aqueous solution at 30 ° C., developed for 3 minutes, and patterned. After patterning, the shape of the cross section was confirmed with an optical microscope, and the shape was evaluated.
○:下層未出現底切。 ○: Undercutting does not occur in the lower layer.
×:下層產生大的底切。 ×: A large undercut occurs in the lower layer.
結果示於下述表2。 The results are shown in Table 2 below.
由上述表2可清楚,含具有以本發明之通式(I)表示之構造之肟酯系光鹼產生劑之實施例7~11之樹脂組成物係PEB步驟中之加熱時間選擇幅度廣,操作性優異者。 From Table 2 above, it is clear that the resin composition-based PEB steps of Examples 7 to 11 containing the oxime ester-based photobase generator having a structure represented by the general formula (I) of the present invention have a wide selection of heating time. Excellent operability.
相對於此,不含有具有以通式(I)表示之構造之肟酯系光鹼產生劑之實施例12~14之樹脂組成物在90℃下加熱70分鐘以上時,即使未曝光部亦無法以鹼顯影,無法形成圖型。 In contrast, when the resin compositions of Examples 12 to 14 that did not contain the oxime ester-based photobase generator having a structure represented by the general formula (I) were heated at 90 ° C for 70 minutes or more, the unexposed portions were not able to be used. Pattern development is impossible with alkali development.
且,實施例7~11之樹脂組成物即使位於具有由吸收光之樹脂組成物所成之保護層作為上層之2層構造之下層,亦顯示充分之深部硬化性。 In addition, the resin compositions of Examples 7 to 11 exhibited sufficient deep hardenability even when they were located under the two-layer structure having a protective layer made of a resin composition that absorbs light as an upper layer.
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| WO2018030694A1 (en) * | 2016-08-09 | 2018-02-15 | 주식회사 엘지화학 | Insulating layer manufacturing method and multilayered printed circuit board manufacturing method |
| KR102040224B1 (en) * | 2016-08-09 | 2019-11-06 | 주식회사 엘지화학 | Method for manufacturing insulating film and multilayered printed circuit board |
| KR101947150B1 (en) * | 2016-08-09 | 2019-02-12 | 주식회사 엘지화학 | Method for manufacturing insulating film and multilayered printed circuit board |
| KR102038106B1 (en) * | 2016-10-24 | 2019-10-29 | 주식회사 엘지화학 | Method for manufacturing insulating film and multilayered printed circuit board |
| WO2018080125A1 (en) * | 2016-10-24 | 2018-05-03 | 주식회사 엘지화학 | Insulation layer manufacturing method and multilayer printed circuit board manufacturing method |
| KR102040225B1 (en) * | 2016-11-11 | 2019-11-06 | 주식회사 엘지화학 | Method for manufacturing insulating film and multilayered printed circuit board |
| CN113363164A (en) * | 2021-06-29 | 2021-09-07 | 广东佛智芯微电子技术研究有限公司 | Square chip packaging method and packaging structure thereof |
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