TWI648823B - Memory device - Google Patents
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Abstract
一種記憶體裝置。記憶體裝置包括記憶體陣列。記憶體陣列包括主要記憶體區塊與備份記憶體區塊。記憶體陣列包括主要位元線及備份位元線。備份記憶體區塊對主要記憶體區塊的區塊數目比值A是大於備份位元線對主要位元線的位元線數目比值B。A memory device. The memory device includes an array of memory. The memory array includes a main memory block and a backup memory block. The memory array includes a primary bit line and a backup bit line. The ratio A of the number of blocks of the backup memory block to the main memory block is greater than the ratio B of the number of bit lines of the backup bit line to the main bit line.
Description
本發明是有關於一種記憶體裝置,且特別是有關於具有NAND記憶體結構的記憶體裝置。The present invention relates to a memory device, and more particularly to a memory device having a NAND memory structure.
隨著積體電路中元件的關鍵尺寸逐漸縮小至製程技術所能感知的極限,設計者已經開始尋找可達到更大記憶體密度的技術,藉以達到較低的位元成本(costs per bit)。目前正被關注的技術包括反及閘記憶體(NAND memory)及其操作。As the critical dimensions of components in integrated circuits shrink to the limits that process technology can perceive, designers have begun to look for techniques that can achieve greater memory densities, thereby achieving lower cost per bit. Techniques currently being addressed include NAND memory and its operation.
本發明係有關於一種記憶體裝置。The present invention relates to a memory device.
根據本發明之一方面,提出一種記憶體裝置。記憶體裝置包括記憶體陣列。記憶體陣列包括主要記憶體區塊與備份記憶體區塊。記憶體陣列包括主要位元線及備份位元線。備份記憶體區塊對主要記憶體區塊的區塊數目比值A是大於備份位元線對主要位元線的位元線數目比值B。According to an aspect of the invention, a memory device is proposed. The memory device includes an array of memory. The memory array includes a main memory block and a backup memory block. The memory array includes a primary bit line and a backup bit line. The ratio A of the number of blocks of the backup memory block to the main memory block is greater than the ratio B of the number of bit lines of the backup bit line to the main bit line.
為了對本發明之上述及其他方面有更佳的瞭解,下文特舉實施例,並配合所附圖式詳細說明如下:In order to better understand the above and other aspects of the present invention, the following detailed description of the embodiments and the accompanying drawings
實施例提供一種記憶體裝置,其具有修補功能的備份位元線及備份記憶體區塊或次備份記憶體區塊,能有效使記憶體裝置維持預期的記憶體容量並提高產品良率與效能。The embodiment provides a memory device with a backup function bit line and a backup memory block or a secondary backup memory block, which can effectively maintain the expected memory capacity of the memory device and improve product yield and performance. .
以下係以一些實施例做說明。須注意的是,本揭露並非顯示出所有可能的實施例,未於本揭露提出的其他實施態樣也可能可以應用。再者,圖式上的尺寸比例並非按照實際產品等比例繪製。因此,說明書和圖示內容僅作敘述實施例之用,而非作為限縮本揭露保護範圍之用。另外,實施例中之敘述,例如細部結構、製程步驟和材料應用等等,僅為舉例說明之用,並非對本揭露欲保護之範圍做限縮。實施例之步驟和結構各之細節可在不脫離本揭露之精神和範圍內根據實際應用製程之需要而加以變化與修飾。以下是以相同/類似的符號表示相同/類似的元件做說明。The following is explained by some embodiments. It should be noted that the disclosure does not show all possible embodiments, and other embodiments not disclosed in the disclosure may also be applied. Furthermore, the dimensional ratios on the drawings are not drawn in proportion to the actual product. Therefore, the description and illustration are for illustrative purposes only and are not intended to be limiting. In addition, the description in the embodiments, such as the detailed structure, the process steps, the material application, and the like, are for illustrative purposes only and are not intended to limit the scope of the disclosure. The details of the steps and the details of the embodiments may be varied and modified in accordance with the needs of the actual application process without departing from the spirit and scope of the disclosure. The same/similar symbols are used to describe the same/similar elements.
首先可參照第1圖至第4圖了解根據本揭露之區塊比值與位元線比值的相關概念。First, the related concepts of the block ratio and the bit line ratio according to the present disclosure can be understood by referring to FIGS. 1 to 4.
第1圖為根據一實施例之記憶體裝置的示意圖。記憶體裝置的記憶體陣列包括記憶體陣列區域MMR與記憶體陣列區域EMR。一實施例中,記憶體陣列區域MMR與記憶體陣列區域EMR可沿NAND串列延伸方向上配置。記憶體陣列區域MMR與記憶體陣列區域EMR可各包括沿字元線WL延伸方向上配置的(主要)位元線區域MBLR與(備份)位元線區域EBLR。Figure 1 is a schematic illustration of a memory device in accordance with an embodiment. The memory array of the memory device includes a memory array region MMR and a memory array region EMR. In one embodiment, the memory array region MMR and the memory array region EMR may be arranged along the NAND string extending direction. The memory array area MMR and the memory array area EMR may each include a (primary) bit line area MBLR and a (backup) bit line area EBLR arranged along the direction in which the word line WL extends.
第2圖繪示根據一實施例之位元線區域MBLR與位元線區域EBLR的上視圖。一實施例中,位元線區域MBLR為主要位元線區域,其包括數個主要位元線MBL,例如包括第2圖所示之依序排列的主要位元線MBL1、MBL2至MBLN,其中N為正整數。一實施例中,位元線區域EBLR為備份位元線區域,其包括複數個備份位元線EBL,例如第2圖所示之依序排列的備份位元線EBL1、ELB2至EBLK,其中K為正整數。位元線區域MBLR的主要位元線MBL1、MBL2至MBLN與位元線區域EBLR的備份位元線EBL1、ELB2至EBLK係獨立分開控制。2 is a top view of a bit line region MBLR and a bit line region EBLR according to an embodiment. In one embodiment, the bit line area MBLR is a main bit line area, and includes a plurality of main bit lines MBL, for example, including the main bit lines MBL1, MBL2 to MBLN arranged in sequence in FIG. 2, wherein N is a positive integer. In one embodiment, the bit line area EBLR is a backup bit line area including a plurality of backup bit lines EBL, such as the sequentially arranged backup bit lines EBL1, ELB2 to EBLK shown in FIG. 2, where K Is a positive integer. The main bit lines MBL1, MBL2 to MBLN of the bit line area MBLR are independently and separately controlled from the backup bit lines EBL1, ELB2 to EBLK of the bit line area EBLR.
第3圖繪示根據一實施例之記憶體陣列區域MMR與記憶體陣列區域EMR的示意圖。一實施例中,記憶體陣列區域MMR可為主要記憶體陣列區域,其包括一或多個主要記憶體區塊MB,例如可包括第3圖所示之沿NAND串列延伸方向上排列的主要記憶體區塊MB1、MB2至MBP,其中P為正整數。一實施例中,記憶體陣列區域EMR可為備份記憶體陣列區域,其包括一或多個備份記憶體區塊EB,例如可包括如第3圖所示之沿NAND串列延伸方向上排列的備份記憶體區塊EB1至EBQ,其中Q為正整數。FIG. 3 is a schematic diagram of a memory array region MMR and a memory array region EMR according to an embodiment. In one embodiment, the memory array region MMR may be a main memory array region including one or more main memory blocks MB, which may include, for example, the main rows arranged along the NAND string extending direction shown in FIG. Memory blocks MB1, MB2 to MBP, where P is a positive integer. In one embodiment, the memory array area EMR may be a backup memory array area including one or more backup memory blocks EB, for example, may be arranged along the extending direction of the NAND string as shown in FIG. The memory blocks EB1 to EBQ are backed up, where Q is a positive integer.
第4圖繪示根據一實施例之例如2D NAND記憶體陣列其一記憶體區塊的等效電路示意圖。舉例來說,記憶體區塊包括位元線BL1、BL2、BL3、BL4及字元線WL1、字元線WL2、字元線WL3、字元線WL4,其交錯處定義出記憶胞陣列。記憶體區塊也可包括串列選擇線SSL、接地選擇線GSL與接地線GND。字元線WL1、字元線WL2、字元線WL3、字元線WL4在串列選擇線SSL與接地選擇線GSL之間。FIG. 4 is a schematic diagram showing an equivalent circuit of a memory block of a 2D NAND memory array according to an embodiment. For example, the memory block includes bit lines BL1, BL2, BL3, BL4 and word line WL1, word line WL2, word line WL3, and word line WL4, and the memory cell array is defined at the intersection. The memory block may also include a serial selection line SSL, a ground selection line GSL, and a ground line GND. The word line WL1, the word line WL2, the word line WL3, and the word line WL4 are between the string selection line SSL and the ground selection line GSL.
實施例中,記憶體區塊(例如主要記憶體區塊MB及/或備份記憶體區塊EB)可包括各自對應(即各自獨立控制的)的串列選擇線SSL、接地選擇線GSL及配置在串列選擇線SSL與接地選擇線GSL之間的字元線WL(例如字元線WL1、字元線WL2、字元線WL3、字元線WL4)。字元線WL1、字元線WL2、字元線WL3、字元線WL4耦接至字元線解碼器(WL decoder)。In an embodiment, the memory block (eg, the main memory block MB and/or the backup memory block EB) may include a serial selection line SSL, a ground selection line GSL, and a configuration corresponding to each (ie, independently controlled). A word line WL (for example, a word line WL1, a word line WL2, a word line WL3, and a word line WL4) between the string selection line SSL and the ground selection line GSL. The word line WL1, the word line WL2, the word line WL3, and the word line WL4 are coupled to a word line decoder (WL decoder).
一實施例中,主要記憶體區塊MB與備份記憶體區塊EB各可具有類似第4圖所示的電路,其中舉例來說,位元線BL1、位元線BL2、位元線BL3及位元線BL4中的一部分係用作主要位元線MBL,位元線BL1、位元線BL2、位元線BL3及位元線BL4中的另一部分係用作備份位元線EBL。位元線BL1、位元線BL2、位元線BL3、位元線BL4耦接至頁面緩衝器(page buffer)。In one embodiment, the main memory block MB and the backup memory block EB may each have a circuit similar to that shown in FIG. 4, wherein, for example, the bit line BL1, the bit line BL2, the bit line BL3, and A part of the bit line BL4 is used as the main bit line MBL, and another part of the bit line BL1, the bit line BL2, the bit line BL3, and the bit line BL4 is used as the backup bit line EBL. The bit line BL1, the bit line BL2, the bit line BL3, and the bit line BL4 are coupled to a page buffer.
此揭露中,主要位元線MBL亦可稱作非備份位元線或非額外位元線。一些情況中,在主要位元線MBL(或其所連接之記憶體通道)發生缺陷,造成對應主要位元線MBL的記憶胞(串列)無法執行功效時,可使用備份位元線EBL進行冗餘修復(redundancy repair)或錯誤核對與改正(Error Checking and Correcting,ECC),以維持記憶體裝置的預期有效記憶容量並增進效能。此揭露中,備份位元線EBL亦可稱作額外位元線(extra bit line)或冗餘位元線(redundant bit line)。本揭露中的主要位元線MBL與備份位元線EBL並非指虛置(dummy)位元線。一般虛置位元線並非用以執行記憶胞的功效,可能配置在周邊的非工作(non-practical)區域,或可能主要用以減緩製程的負載效應(loading effect)。In this disclosure, the primary bit line MBL may also be referred to as a non-backup bit line or a non-extra bit line. In some cases, when the main bit line MBL (or the memory channel to which it is connected) is defective, causing the memory cell (serial) corresponding to the main bit line MBL to fail to perform the function, the backup bit line EBL can be used. Redundancy repair or Error Checking and Correcting (ECC) to maintain the expected effective memory capacity of the memory device and improve performance. In this disclosure, the backup bit line EBL may also be referred to as an extra bit line or a redundant bit line. The main bit line MBL and the backup bit line EBL in the present disclosure do not refer to dummy bit lines. Generally, the dummy bit line is not used to perform the function of the memory cell, and may be disposed in a peripheral non-practical area, or may be mainly used to slow down the loading effect of the process.
此揭露中,主要記憶體區塊MB亦可稱作非備份記憶體區塊或非額外記憶體區塊。In this disclosure, the primary memory block MB may also be referred to as a non-backup memory block or a non-additional memory block.
一實施例中,當主要記憶體區塊MB中的主要位元線MBL發生缺陷造成對應的NAND串列無法執行功效時,可使用在同一主要記憶體區塊MB中的備份位元線EBL進行冗餘修復或錯誤核對與改正。In one embodiment, when the main bit line MBL in the main memory block MB is defective and the corresponding NAND string cannot perform the function, the backup bit line EBL in the same main memory block MB can be used. Redundancy repair or error checking and correction.
一實施例中,在主要記憶體區塊MB發生缺陷,例如其字元線WL1、字元線WL2、字元線WL3、字元線WL4其中至少之一發生缺陷造成主要記憶體區塊MB中所有記憶胞無發執行功效時,可使用備份記憶體區塊EB進行區塊修補(block repair)。此揭露中,備份記憶體區塊EB亦可稱作額外記憶體區塊(extra memory block)或冗餘記憶體區塊(redundant memory block)。In one embodiment, a defect occurs in the main memory block MB, for example, at least one of the word line WL1, the word line WL2, the word line WL3, and the word line WL4 is defective to cause the main memory block MB. When all memory cells are not performing, the backup memory block EB can be used for block repair. In this disclosure, the backup memory block EB may also be referred to as an extra memory block or a redundant memory block.
一實施例中,當所執行的備份記憶體區塊EB中的主要位元線MBL發生缺陷造成對應的NAND串列無法執行功效時,可使用在同一備份記憶體區塊EB中的備份位元線EBL進行冗餘修復或錯誤核對與改正。In an embodiment, when the main bit line MBL in the executed backup memory block EB is defective, and the corresponding NAND string cannot perform the function, the backup bit in the same backup memory block EB can be used. Line EBL performs redundancy repair or error checking and correction.
備份記憶體區塊EB對主要記憶體區塊MB的比值(亦即備份記憶體區塊EB的數目Q除以主要記憶體區塊MB的數目P)係定義為區塊數目比值A。備份位元線EBL對主要位元線MBL的比值(亦即備份位元線EBL的數目K除以主要位元線MBL的數目N)係定義為位元線數目比值B。實施例中,區塊數目比值A是大於位元線數目比值B。一實施例中,舉例來說,位元線數目比值B係0.5%至10%。一實施例中,舉例來說,區塊數目比值A大於10%。The ratio of the backup memory block EB to the main memory block MB (i.e., the number Q of backup memory blocks EB divided by the number P of main memory blocks MB) is defined as the block number ratio A. The ratio of the backup bit line EBL to the main bit line MBL (that is, the number K of backup bit lines EBL divided by the number N of main bit lines MBL) is defined as the bit line number ratio B. In an embodiment, the block number ratio A is greater than the bit line number ratio B. In one embodiment, for example, the bit line number ratio B is 0.5% to 10%. In one embodiment, for example, the block number ratio A is greater than 10%.
本揭露之概念並不限於2D NAND記憶體陣列,亦可延伸應用至3D NAND記憶體陣列。The concept of the present disclosure is not limited to 2D NAND memory arrays, but can also be extended to 3D NAND memory arrays.
例如請參照第5圖至第7圖。其中第5圖及第6圖分別繪示根據一實施例之三維垂直通道(3D VC) NAND記憶體裝置的一記憶體區塊其上視圖及立體圖。第7圖為記憶體區塊的等效電路圖。For example, please refer to Figures 5 to 7. 5 and 6 are respectively a top view and a perspective view of a memory block of a three-dimensional vertical channel (3D VC) NAND memory device according to an embodiment. Figure 7 is an equivalent circuit diagram of the memory block.
請參照第5圖及第6圖,垂直通道VC(未顯示在第6圖)與字元線WL(例如字元線WL1、字元線WL2、字元線WL3、字元線WL4)交錯定義出記憶胞陣列,並穿過串列選擇線SSL1、串列選擇線SSL2、串列選擇線SSL3連接至位元線BL1、位元線BL2、位元線BL3及位元線BL4。字元線WL1、字元線WL2、字元線WL3、字元線WL4經由階梯狀接觸CS電性連接至各自的接觸柱CP。請參照第7圖,記憶體區塊也可包括接地選擇線GSL與接地線GND。字元線WL1、字元線WL2、字元線WL3、字元線WL4在串列選擇線SSL1、SSL2、SSL3與接地選擇線GSL之間。位元線BL1、位元線BL2、位元線BL3及位元線BL4耦接至頁面緩衝器。Referring to FIG. 5 and FIG. 6, the vertical channel VC (not shown in FIG. 6) is interleaved with the word line WL (for example, the word line WL1, the word line WL2, the word line WL3, and the word line WL4). The memory cell array is connected to the bit line BL1, the bit line BL2, the bit line BL3, and the bit line BL4 through the string selection line SSL1, the string selection line SSL2, and the string selection line SSL3. The word line WL1, the word line WL2, the word line WL3, and the word line WL4 are electrically connected to the respective contact pillars CP via the step contact CS. Referring to FIG. 7, the memory block may also include a ground selection line GSL and a ground line GND. The word line WL1, the word line WL2, the word line WL3, and the word line WL4 are between the string selection lines SSL1, SSL2, SSL3 and the ground selection line GSL. The bit line BL1, the bit line BL2, the bit line BL3, and the bit line BL4 are coupled to the page buffer.
實施例中,記憶體區塊(例如主要記憶體區塊MB及/或備份記憶體區塊EB)可包括各自對應(即各自獨立控制的)的串列選擇線SSL(串列選擇線SSL1、串列選擇線SSL2、串列選擇線SSL3)、接地選擇線GSL及配置在串列選擇線SSL與接地選擇線GSL之間的字元線WL(字元線WL1、字元線WL2、字元線WL3、字元線WL4)。字元線WL耦接至字元線解碼器。In an embodiment, the memory block (eg, the main memory block MB and/or the backup memory block EB) may include a serial selection line SSL (serial selection line SSL1) corresponding to each (ie, independently controlled). The string selection line SSL2, the string selection line SSL3), the ground selection line GSL, and the word line WL (word line WL1, word line WL2, word element) arranged between the string selection line SSL and the ground selection line GSL Line WL3, word line WL4). The word line WL is coupled to the word line decoder.
一實施例中,當主要記憶體區塊MB中的主要位元線MBL(例如位元線BL1、位元線BL2、位元線BL3及位元線BL4其中一部分)發生缺陷造成對應的NAND串列無法執行功效時,可使用在同一主要記憶體區塊MB中的備份位元線EBL(例如位元線BL1、位元線BL2、位元線BL3及位元線BL4其中另一部分)進行冗餘修復或錯誤核對與改正,以維持記憶體裝置的預期有效記憶容量並增進效能。In one embodiment, when the main bit line MBL in the main memory block MB (for example, the bit line BL1, the bit line BL2, the bit line BL3, and a part of the bit line BL4) is defective, the corresponding NAND string is caused. When the column cannot perform the function, the backup bit line EBL (for example, the bit line BL1, the bit line BL2, the bit line BL3, and the other part of the bit line BL4) in the same main memory block MB can be used for redundancy. Repair or error checking and correction to maintain the expected effective memory capacity of the memory device and improve performance.
在主要記憶體區塊MB發生缺陷,例如其字元線WL1、字元線WL2、字元線WL3、字元線WL4其中至少之一發生缺陷造成主要記憶體區塊MB中所有記憶胞無發執行功效時,可使用備份記憶體區塊EB進行區塊修補(block repair)。一實施例中,當所執行的備份記憶體區塊EB中的主要位元線MBL(例如位元線BL1、位元線BL2、位元線BL3及位元線BL4其中一部分)發生缺陷造成對應的NAND串列無法執行功效時,可使用在同一備份記憶體區塊EB中的備份位元線EBL(例如位元線BL1、位元線BL2、位元線BL3及位元線BL4其中另一部分)進行冗餘修復或錯誤核對與改正,以維持記憶體裝置的預期有效記憶容量並增進效能。A defect occurs in the main memory block MB, for example, at least one of the word line WL1, the word line WL2, the word line WL3, and the word line WL4 is defective, so that all the memory cells in the main memory block MB are not emitted. When performing the function, the backup memory block EB can be used for block repair. In one embodiment, when the main bit line MBL (for example, the bit line BL1, the bit line BL2, the bit line BL3, and a part of the bit line BL4) in the backup memory block EB is executed, a defect occurs. When the NAND string cannot perform the function, the backup bit line EBL in the same backup memory block EB can be used (for example, the bit line BL1, the bit line BL2, the bit line BL3, and the bit line BL4) Perform redundancy repair or error checking and correction to maintain the expected effective memory capacity of the memory device and improve performance.
實施例中,備份記憶體區塊EB對主要記憶體區塊MB的區塊數目比值A是大於備份位元線EBL對主要位元線MBL的位元線數目比值B。特別是當3D NAND記憶體裝置發展趨勢造成記憶體區塊需要更多數目(更大值的Q)的備份記憶體區塊EB預備修補時,區塊數目比值A大於位元線數目比值B能使記憶體裝置更符合趨勢需求並提升產品良率及效能。一實施例中,舉例來說,位元線數目比值B係0.5%至10%。一實施例中,舉例來說,區塊數目比值A大於10%。In the embodiment, the ratio A of the number of blocks of the backup memory block EB to the main memory block MB is greater than the ratio B of the number of bit lines of the backup bit line EBL to the main bit line MBL. In particular, when the development trend of the 3D NAND memory device causes the memory block to require a larger number (larger value Q) of the backup memory block EB to be repaired, the block number ratio A is greater than the bit line number ratio B. Make memory devices more in line with trending needs and improve product yield and performance. In one embodiment, for example, the bit line number ratio B is 0.5% to 10%. In one embodiment, for example, the block number ratio A is greater than 10%.
本揭露之概念並不限於三維垂直通道NAND記憶體裝置,其他實施例中亦可例如延伸應用至三維垂直閘NAND記憶體陣列。The concept of the present disclosure is not limited to a three-dimensional vertical channel NAND memory device, and may be extended to a three-dimensional vertical gate NAND memory array, for example, in other embodiments.
在其他實施例中,記憶體陣列的記憶體區塊可進一步分割成各自獨立控制的數個次記憶體區塊,因此能以更小面積的修復單位提高修復效率。其概念可參照第8圖至第9圖了解。In other embodiments, the memory block of the memory array can be further divided into a plurality of sub-memory blocks that are independently controlled, thereby improving repair efficiency with a smaller area of repair unit. The concept can be understood by referring to Figures 8 to 9.
第8圖繪示根據另一實施例之3D NAND記憶體陣列的示意圖。在此例中,主要記憶體區塊MB1、主要記憶體區塊MB2至主要記憶體區塊MBP各可包括沿字元線WL延伸方向排列的次主要記憶體區塊SMB1、次主要記憶體區塊SMB2至次主要記憶體區塊SMBZ。備份記憶體區塊EB1至備份記憶體區塊EBQ也可各包括沿字元線WL延伸方向排列的次備份記憶體區塊SEB1、次備份記憶體區塊SEB2至次備份記憶體區塊SEBZ。其中Z為正整數。FIG. 8 is a schematic diagram of a 3D NAND memory array according to another embodiment. In this example, the main memory block MB1, the main memory block MB2 to the main memory block MBP may each include a sub-primary memory block SMB1 and a sub-primary memory region arranged along the direction in which the word line WL extends. Block SMB2 to sub-primary memory block SMBZ. The backup memory block EB1 to the backup memory block EBQ may each include a secondary backup memory block SEB1, a secondary backup memory block SEB2, and a secondary backup memory block SEBZ arranged along the direction in which the word line WL extends. Where Z is a positive integer.
請參照第9圖,其繪示根據一實施例之3D NAND記憶體陣列之記憶體區塊的等效電路示意圖。舉例來說,記憶體區塊之數個次記憶體區塊SB(如第9圖所示之次記憶體區塊SB1及次記憶體區塊SB2)可各自具有能獨立控制的接地線GND、接地選擇線GSL、串列選擇線SSL1、串列選擇線SSL2、串列選擇線SSL3及接地選擇線GSL與串列選擇線SSL1、串列選擇線SSL2、串列選擇線SSL3之間的字元線WL1、字元線WL2、字元線WL3、字元線WL4。其中次記憶體區塊SB1的字元線WL1、字元線WL2、字元線WL3、字元線WL4可統稱為一字元線組WLG1,次記憶體區塊SB2的字元線WL1、字元線WL2、字元線WL3、字元線WL4可統稱為另一字元線組WLG2。在記憶體陣列的上視圖(可參照第2圖之概念)中,位元線BL1、位元線BL2、位元線BL3及位元線BL4係沿一排列方向依序配置。此例中,次記憶體區塊SB1的字元線WL1、字元線WL2、字元線WL3、字元線WL4與包括位元線BL1與位元線BL2的一位元線組SLG1交錯定義出記憶胞陣列,且位元線組SLG1電性連接至一次頁面緩衝器(sub page buffer)。次記憶體區塊SB2的字元線WL1、字元線WL2、字元線WL3、字元線WL4與包括位元線BL3與位元線BL4的另一位元線組SLG2交錯定義出記憶胞陣列,且位元線組SLG2電性連接至另一次頁面緩衝器(sub page buffer)。Please refer to FIG. 9 , which illustrates an equivalent circuit diagram of a memory block of a 3D NAND memory array according to an embodiment. For example, the plurality of sub-memory blocks SB of the memory block (such as the sub-memory block SB1 and the sub-memory block SB2 shown in FIG. 9) may each have an independently controllable ground line GND, Characters between the ground selection line GSL, the serial selection line SSL1, the serial selection line SSL2, the serial selection line SSL3, and the ground selection line GSL and the serial selection line SSL1, the serial selection line SSL2, and the serial selection line SSL3 Line WL1, word line WL2, word line WL3, and word line WL4. The word line WL1, the word line WL2, the word line WL3, and the word line WL4 of the secondary memory block SB1 may be collectively referred to as a word line group WLG1, and the word line WL1 of the secondary memory block SB2. The element line WL2, the word line WL3, and the word line WL4 may be collectively referred to as another word line group WLG2. In the upper view of the memory array (see the concept of FIG. 2), the bit line BL1, the bit line BL2, the bit line BL3, and the bit line BL4 are sequentially arranged in an array direction. In this example, the word line WL1, the word line WL2, the word line WL3, and the word line WL4 of the secondary memory block SB1 are alternately defined with the one-bit line group SLG1 including the bit line BL1 and the bit line BL2. The memory cell array is output, and the bit line group SLG1 is electrically connected to a sub page buffer. The word line WL1, the word line WL2, the word line WL3, and the word line WL4 of the secondary memory block SB2 are interleaved with another bit line group SLG2 including the bit line BL3 and the bit line BL4 to define a memory cell. The array, and the bit line group SLG2 is electrically connected to another sub page buffer.
本揭露的次記憶體區塊並不限於兩個位元線構成的位元線組。其他實施例中,次記憶體區塊亦可使用其他位元線數目設計的位元線組。例如次記憶體區塊的位元線組各使用三個位元線。或次記憶體區塊的位元線組可具有不同數目的位元線。The sub-memory block of the present disclosure is not limited to a bit line group composed of two bit lines. In other embodiments, the secondary memory block may also use a bit line group designed with other bit line numbers. For example, a bit line group of a secondary memory block uses three bit lines each. The bit line group of the secondary memory block may have a different number of bit lines.
第9圖所示的記憶體區塊可為主要記憶體區塊MB,亦即次記憶體區塊SB1、SB2可為次主要記憶體區塊SMB。或者,記憶體區塊可為備份記憶體區塊EB,亦即次記憶體區塊SB1、SB2可為次備份記憶體區塊SEB。The memory block shown in FIG. 9 may be the main memory block MB, that is, the secondary memory blocks SB1, SB2 may be the secondary main memory block SMB. Alternatively, the memory block may be the backup memory block EB, that is, the secondary memory blocks SB1, SB2 may be the secondary backup memory block SEB.
請參照第9圖,舉例來說,當次記憶體區塊SB2的字元線WL1、字元線WL2、字元線WL3、字元線WL4至少其中之一發生缺陷(defect)造成次記憶體區塊SB2中所有記憶胞無發執行功效時,可使用次備份記憶體區塊SEB進行次區塊修補。再以第8圖舉例說明,次主要記憶體區塊SMB1、次主要記憶體區塊SMB2至次主要記憶體區塊SMBZ其中四個發生缺陷時,可對應利用次備份記憶體區塊SEB1、次備份記憶體區塊SEB2至次備份記憶體區塊SEBZ其中四個進行次區塊修補。Referring to FIG. 9, for example, when at least one of the word line WL1, the word line WL2, the word line WL3, and the word line WL4 of the secondary memory block SB2 is defective, the secondary memory is caused. When all the memory cells in block SB2 have no performance, the secondary backup memory block SEB can be used for sub-block repair. Taking Fig. 8 as an example, when the secondary memory block SMB1, the secondary memory block SMB2, and the secondary memory block SMBZ have four defects, the secondary backup memory block SEB1 can be used correspondingly. Four of the backup memory block SEB2 to the secondary backup memory block SEBZ are repaired by the secondary block.
一些實施例中,如第10圖及第11圖所示記憶體區塊並未分割成次記憶體區塊,當相同數目的缺陷發生在主要記憶體區塊MB時,可能發生備份記憶體區塊EB修補不足的問題。換句話說,相較於第10圖不具有次記憶體區塊的記憶體裝置,第8圖之具有次記憶體區塊的記憶體裝置能以更小的修復單位提高修復效率。In some embodiments, as shown in FIG. 10 and FIG. 11, the memory block is not divided into sub-memory blocks, and when the same number of defects occur in the main memory block MB, a backup memory area may occur. Block EB patching problem. In other words, the memory device having the sub-memory block of Fig. 8 can improve the repair efficiency with a smaller repair unit than the memory device having no sub-memory block in Fig. 10.
實施例中,次記憶體區塊的位元線BL可包括主要位元線MBL及備份位元線EBL。In an embodiment, the bit line BL of the secondary memory block may include a primary bit line MBL and a backup bit line EBL.
舉例來說,第12圖繪示根據又另一實施例之記憶體陣列的示意圖,其與第8圖所示的記憶體陣列差異在於,次記憶體區塊各包括(主要)位元線區域MBLR與(備份)位元線區域EBLR。For example, FIG. 12 is a schematic diagram of a memory array according to still another embodiment, which differs from the memory array shown in FIG. 8 in that the secondary memory blocks each include a (primary) bit line region. MBLR and (backup) bit line area EBLR.
一些實施例中,在(主要)位元線區域MBLR的主要位元線MBL(或其所連接之記憶體通道)發生缺陷,造成對應主要位元線MBL的記憶胞(串列)無法執行功效時,可使用(備份)位元線區域EBLR中的備份位元線EBL進行冗餘修復或錯誤核對與改正,以維持記憶體裝置的預期有效記憶容量並增進效能。In some embodiments, a defect occurs in the main bit line MBL of the (primary) bit line region MBLR (or the memory channel to which it is connected), causing the memory cell (serial) corresponding to the main bit line MBL to fail to perform. Redundancy repair or error checking and correction can be performed using the backup bit line EBL in the (backup) bit line area EBLR to maintain the expected effective memory capacity of the memory device and improve performance.
一實施例中,當次主要記憶體區塊SMB中的主要位元線MBL發生缺陷造成對應的NAND串列無法執行功效時,可使用在同一次主要記憶體區塊SMB中的備份位元線EBL進行冗餘修復或錯誤核對與改正。In one embodiment, when the main bit line MBL in the secondary memory block SMB is defective and the corresponding NAND string cannot perform the function, the backup bit line in the same primary memory block SMB can be used. EBL performs redundancy repair or error checking and correction.
在次主要記憶體區塊SMB發生缺陷,例如其字元線WL至少其中之一發生缺陷造成次主要記憶體區塊SMB中所有記憶胞無發執行功效時,可使用次備份記憶體區塊SEB進行次區塊修補(sub block repair)。When the SMB of the secondary memory block is defective, for example, at least one of the word lines WL is defective, and all the memory cells in the secondary memory block SMB have no effect, the secondary backup memory block SEB may be used. Perform sub block repair.
一實施例中,當所執行的次備份記憶體區塊SEB中的主要位元線MBL發生缺陷造成對應的NAND串列無法執行功效時,可使用在同一次備份記憶體區塊SEB中的備份位元線EBL進行冗餘修復或錯誤核對與改正。In an embodiment, when the main bit line MBL in the executed secondary backup memory block SEB is defective, and the corresponding NAND string cannot perform the function, the backup in the same backup memory block SEB can be used. The bit line EBL performs redundancy repair or error checking and correction.
實施例中,次備份記憶體區塊SEB對次主要記憶體區塊SMB的一區塊數目比值(亦即次備份記憶體區塊SEB的數目(即QxZ)除以次主要記憶體區塊SMB的數目(即PxZ))等於區塊數目比值A。實施例中,區塊數目比值A是大於位元線數目比值B。一實施例中,舉例來說,位元線數目比值B係0.5%至10%。一實施例中,舉例來說,區塊數目比值A大於10%。In the embodiment, the ratio of the number of blocks of the secondary backup memory block SEB to the secondary memory block SMB (that is, the number of secondary backup memory blocks SEB (ie, QxZ) is divided by the secondary memory block SMB. The number (i.e., PxZ) is equal to the block number ratio A. In an embodiment, the block number ratio A is greater than the bit line number ratio B. In one embodiment, for example, the bit line number ratio B is 0.5% to 10%. In one embodiment, for example, the block number ratio A is greater than 10%.
綜上所述,雖然本發明已以實施例揭露如上,然其並非用以限定本發明。本發明所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾。因此,本發明之保護範圍當視後附之申請專利範圍所界定者為準。In conclusion, the present invention has been disclosed in the above embodiments, but it is not intended to limit the present invention. A person skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.
MBLR‧‧‧位元線區域MBLR‧‧‧ bit line area
EBLR‧‧‧位元線區域EBLR‧‧‧ bit line area
MMR‧‧‧記憶體陣列區域MMR‧‧‧ memory array area
EMR‧‧‧記憶體陣列區域EMR‧‧‧Memory Array Area
MB1、MB2、MBP‧‧‧記憶體區塊MB1, MB2, MBP‧‧‧ memory blocks
EB1、EBQ‧‧‧備份記憶體區塊EB1, EBQ‧‧‧ backup memory block
MBL1、MBL2、MBLN‧‧‧主要位元線MBL1, MBL2, MBLN‧‧‧ main bit line
EBL1、EBL2、EBLK‧‧‧備份位元線EBL1, EBL2, EBLK‧‧‧ backup bit line
BL1、BL2、BL3、BL4‧‧‧位元線BL1, BL2, BL3, BL4‧‧‧ bit line
SSL、SSL1、SSL2、SSL3‧‧‧串列選擇線SSL, SSL1, SSL2, SSL3‧‧‧ tandem selection line
GSL‧‧‧接地選擇線GSL‧‧‧ Grounding selection line
GND‧‧‧接地線GND‧‧‧ Grounding wire
WL1、WL2、WL3、WL4‧‧‧字元線WL1, WL2, WL3, WL4‧‧‧ character lines
CS‧‧‧階梯狀接觸CS‧‧‧Step contact
CP‧‧‧接觸柱CP‧‧‧Contact column
SMB1、SMB2、SMBZ‧‧‧次主要記憶體區塊SMB1, SMB2, SMBZ‧‧‧ primary memory blocks
SEB1、SEB2、SEBZ‧‧‧次備份記憶體區塊SEB1, SEB2, SEBZ‧‧‧ backup memory blocks
SB1、SB2‧‧‧次記憶體區塊SB1, SB2‧‧‧ memory blocks
第1圖為根據一實施例之記憶體裝置的示意圖。 第2圖繪示根據一實施例之位元線區域與位元線區域的上視圖。 第3圖繪示根據一實施例之記憶體陣列區域與記憶體陣列區域的示意圖。 第4圖繪示根據一實施例之例如2D NAND記憶體陣列其記憶體區塊的電路示意圖。 第5圖繪示根據一實施例之三維垂直通道(3D VC) NAND記憶體裝置的記憶體區塊的上視圖。 第6圖繪示根據一實施例之三維垂直通道(3D VC) NAND記憶體裝置的記憶體區塊的立體圖。 第7圖繪示根據一實施例之記憶體區塊的等效電路圖。 第8圖繪示根據另一實施例之3D NAND記憶體陣列的示意圖。 第9圖繪示根據另一實施例之3D NAND記憶體陣列之記憶體區塊的等效電路示意圖。 第10圖繪示一實施例之記憶體陣列的示意圖。 第11圖繪示一實施例之記憶體區塊的等效電路示意圖。 第12圖繪示根據另一實施例之記憶體陣列的示意圖。Figure 1 is a schematic illustration of a memory device in accordance with an embodiment. 2 is a top view of a bit line region and a bit line region, according to an embodiment. FIG. 3 is a schematic diagram of a memory array region and a memory array region according to an embodiment. 4 is a circuit diagram of a memory block of, for example, a 2D NAND memory array, in accordance with an embodiment. 5 is a top view of a memory block of a three-dimensional vertical channel (3D VC) NAND memory device, in accordance with an embodiment. FIG. 6 is a perspective view of a memory block of a three-dimensional vertical channel (3D VC) NAND memory device according to an embodiment. FIG. 7 is an equivalent circuit diagram of a memory block according to an embodiment. FIG. 8 is a schematic diagram of a 3D NAND memory array according to another embodiment. FIG. 9 is a schematic diagram showing an equivalent circuit of a memory block of a 3D NAND memory array according to another embodiment. FIG. 10 is a schematic diagram of a memory array of an embodiment. 11 is a schematic diagram showing an equivalent circuit of a memory block of an embodiment. FIG. 12 is a schematic diagram of a memory array according to another embodiment.
Claims (10)
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| US20130117602A1 (en) * | 2011-11-07 | 2013-05-09 | Su-a Kim | Semiconductor memory device and system having redundancy cells |
| TW201403613A (en) * | 2012-03-29 | 2014-01-16 | Intel Corp | Chunk redundancy architecture for memory |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US20130117602A1 (en) * | 2011-11-07 | 2013-05-09 | Su-a Kim | Semiconductor memory device and system having redundancy cells |
| TW201403613A (en) * | 2012-03-29 | 2014-01-16 | Intel Corp | Chunk redundancy architecture for memory |
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