TWI647453B - Probe card device and signal transmission module thereof - Google Patents

Abstract

The invention discloses a probe card device, comprising an adapter plate, a positioning base body on one side of the adapter plate, and a plurality of rectangular probes disposed on the positioning base body. The adapter plate includes a plurality of electrical contacts, each of the rectangular probes includes a first contact segment and a second contact segment that pass through the positioning body, and the first contact segments of the plurality of rectangular probes respectively abut An electrical contact. The connection of each of the first contact segments and the corresponding electrical contacts is a concave-convex fit and can maintain contact within a relative displacement amount (below 10 micrometers) such that each first contact segment is opposite to the corresponding electrical contact The position can be adjusted within a relative amount of displacement such that the end edges of the second contact segments of the plurality of rectangular probes are substantially aligned with one another. The invention further discloses a signal transmission module of a probe card device.

Description

Probe card device and signal transmission module thereof

The invention relates to a detecting device, in particular to a probe card device and a signal transmission module thereof.

As shown in FIG. 1, the conventional probe card device 100a is a plurality of protruding electrical contacts 11a connected to the adapter plate 1a at one end of a plurality of probes 2a, but the plurality of probes 2a are There is a tolerance in length and a tolerance of the height of the plurality of electrical contacts 11a on the adapter plate 1a, so that the coplanarity of the other end of the plurality of probes 2s is poor, thereby affecting the existing probes. The card device 100a measures the accuracy of the object to be tested.

Accordingly, the inventors believe that the above-mentioned defects can be improved, and that the invention has been studied with great interest and with the use of scientific principles, and finally proposes a present invention which is rational in design and effective in improving the above-mentioned defects.

Embodiments of the present invention provide a probe card device and a signal transmission module thereof, which can effectively improve defects that may be generated by an existing probe card device.

The embodiment of the invention discloses a probe card device, comprising: an adapter plate, comprising a board surface and a plurality of electrical contacts located on the board surface; a positioning body corresponding to the plurality of the electrical components a side of the contact; and a plurality of rectangular probes disposed on the positioning body, and each of the rectangular probes includes a first contact segment on the opposite side and extending out of the positioning body a second contact segment, and the first contact segments of the plurality of rectangular probes respectively abut the plurality of the electrical contacts; wherein each The connection between the first contact segments and the corresponding electrical contacts is a concave-convex fit and can be kept in contact with each other within a relative displacement amount, so that each of the first contact segments and the corresponding one The relative positions of the electrical contacts can be adjusted within the relative displacement amount, and the end edges of the second contact segments of the plurality of rectangular probes are substantially aligned with each other; wherein the relative displacement is 10 Below the micron.

The embodiment of the invention also discloses a signal transmission module of a probe card device, comprising: an adapter plate comprising a board surface and a plurality of electrical contacts on the board surface; and a plurality of rectangular probes, each a first contact segment and a second contact segment on opposite sides are included, and the first contact segments of the plurality of rectangular probes respectively abut the plurality of the electrical contacts; wherein each The connection between the first contact segments and the corresponding electrical contacts is a concave-convex fit and can be kept in contact with each other within a relative displacement amount, so that each of the first contact segments and the corresponding one The relative positions of the electrical contacts can be adjusted within the relative displacement amount, and the end edges of the second contact segments of the plurality of rectangular probes are substantially aligned with each other; wherein the relative displacement is 10 Below the micron.

In summary, the probe card device and the signal transmission module thereof disclosed in the embodiments of the present invention are capable of adjusting each of the first contact segments and the corresponding ones that can be in contact with each other and maintain contact with each other within a relative displacement amount. The structural design of the contact is to absorb the length tolerance between the plurality of rectangular probes and the tolerance of the plurality of electrical contacts in height, so that the end edges of the second contact segments of the plurality of rectangular probes are substantially aligned with each other, And effectively improve the measurement accuracy of the probe card device.

For a better understanding of the features and technical aspects of the present invention, reference should be made to the accompanying claims limit.

[Prior technology]

100a‧‧‧Probe card device

1a‧‧‧Adapter plate

11a‧‧‧Electrical contacts

2a‧‧‧Probe

[This embodiment]

100‧‧‧ probe card device

1‧‧‧Adapter plate

11‧‧‧ board

12‧‧‧Electrical contacts

121‧‧‧ Groove

122‧‧‧Bumps

13‧‧‧Substrate

14‧‧‧Metal pad

15‧‧‧Insulation

151‧‧‧through hole

16‧‧‧Metal plating

2‧‧‧ Positioning body

21‧‧‧First guide

211‧‧‧ first through hole

22‧‧‧Second guide

221‧‧‧second through hole

23‧‧‧ Spacer

3‧‧‧Rectangular probe

31‧‧‧First contact segment

311‧‧‧Free end

3111‧‧‧Contact arm

3112‧‧‧ Groove

312‧‧‧ barbed

32‧‧‧Second contact

4‧‧‧ buffer

M‧‧‧Signal transmission module

1 is a schematic diagram of a prior art probe card device in the prior art.

2 is a schematic view (1) of a probe card device according to Embodiment 1 of the present invention.

3 is a schematic view showing one of the specific configurations of the adapter plate of FIG. 2.

4 is a schematic view (2) of a probe card device according to Embodiment 1 of the present invention.

FIG. 5 is a schematic diagram (3) of a probe card device according to Embodiment 1 of the present invention.

FIG. 6 is a schematic diagram (1) of a probe card device according to a second embodiment of the present invention.

FIG. 7 is a schematic diagram (2) of a probe card device according to a second embodiment of the present invention.

FIG. 8 is a schematic diagram of a probe card device according to a third embodiment of the present invention.

FIG. 9 is a schematic diagram of a probe card device according to Embodiment 4 of the present invention.

Please refer to FIG. 2 to FIG. 9 , which are embodiments of the present invention. It should be noted that the related embodiments of the present invention are only used to specifically describe the implementation of the present invention. The manner in which the present invention is to be understood is not to be construed as limiting the scope of the invention. It is to be noted that the technical features disclosed in the following various embodiments can be referred to each other and used interchangeably to constitute other embodiments not illustrated in the present invention.

[Example 1]

As shown in FIG. 2 to FIG. 5, it is the first embodiment of the present invention. This embodiment discloses a probe card device 100 including an adapter plate 1 , a positioning base 2 on the side of the adapter plate 1 , and a plurality of rectangular probes 3 disposed on the positioning body 2 . Wherein, one end of each of the rectangular probes 3 abuts against the interposer 1 , and the other end of each of the rectangular probes 3 is used to abut and test a test object (eg, a semiconductor wafer) .

Furthermore, the adapter plate 1 and the plurality of rectangular probes 3 can be collectively referred to as a signal transmission module M in this embodiment, and the signal transmission module M is not limited to the positioning base 2 . That is to say, in other embodiments not shown in the present invention, the signal transmission module M can also be sold separately or applied to other components. It should be noted that the diagram of this embodiment is a schematic diagram of the needle implantation process of the rectangular probe 3 described above. However, the invention is not limited thereto. In addition, in order to facilitate the understanding of the present embodiment, the drawings only present a partial configuration of the probe card device 100 in order to clearly present the respective component configurations and connection relationships of the probe card device 100. The respective component configurations of the probe card device 100 and their connection relationships will be separately described below.

The adapter plate 1 includes a board surface 11 and a plurality of electrical contacts 12 on the board surface 11 . Each of the electrical contacts 12 in the embodiment includes a recess 121 recessed in the plate surface 11 , and the inner sidewall of the recess 121 is made of a conductive material. It should be noted that the embodiment does not limit the specific configuration of the adapter plate 1, so the adapter plate 1 of the drawing is presented in a schematic manner.

For example, the configuration of the adapter plate 1 of this embodiment may be as shown in FIG. 3, but is not limited thereto. The interposer 1 includes a substrate 13 , a plurality of metal pads 14 on the substrate 13 , an insulating layer 15 covering the substrate 13 , and a plurality of metal plating layers 16 respectively connected to the plurality of metal pads 14 . . Further, an outer surface of the insulating layer 15 is defined as a plate surface 11 of the interposer 1 , and the insulating layer 15 is formed with a plurality of through holes 151 each exposing a plurality of metal pads 14 , and a plurality of metal plating layers 16 is plated on the inner side walls of the plurality of through holes 151. Each metal pad 14 and the connected metal plating layer 16 are collectively defined as one of the electrical contacts 12 and collectively surround the groove 121.

The positioning body 2 is disposed on the side of the plurality of electrical contacts 12 of the adapter plate 1 , and the positioning body 2 includes a first die 21 (parallel die) in the embodiment. A second guide 22 of the first guide 21 and a spacer 23 (not shown) sandwiched between the first guide 21 and the second guide 22 are provided. The first guide plate 21 is formed with a plurality of first through holes 211, the second guide plate 22 is formed with a plurality of second through holes 221, and the positions of the plurality of second through holes 221 respectively correspond to The positions of the plurality of first through holes 211, and the diameter of each of the second through holes 221 are not larger than the diameter of the first through holes 211.

The plurality of rectangular probes 3 are arranged in a matrix and are disposed in the positioning base 2, and one end of the plurality of rectangular probes 3 respectively pass through the plurality of first through holes 211 of the first guide plate 21, and the plurality of rectangles The other end of the probe 3 passes through the plurality of second through holes 221 of the second guide 22, respectively. In other words, each of the rectangular probes 3 is sequentially disposed on the corresponding first through hole 211 of the first guiding plate 21, the partitioning plate 23, and the corresponding second through hole of the second guiding plate 22. 221, and opposite sides of each rectangular probe 3 that passes through the positioning base 2 are defined as a first contact segment 31 and a second contact segment 32, respectively, and the first contact of the plurality of rectangular probes 3 The segments 31 respectively abut the plurality of electrical contacts 12 of the adapter plate 1 .

Further, the connection between each of the first contact segments 31 and the corresponding electrical contacts 12 is a concave-convex fit (eg, a concave-convex fit configuration with a tight fit effect) and can maintain each other within a relative displacement amount. Contacting so that the relative position of each of the first contact segments 31 and the corresponding electrical contacts 12 can be adjusted within the relative displacement amount, and the second contact segments 32 of the plurality of rectangular probes 3 are terminated The edges are substantially aligned with each other. In the present embodiment, the relative displacement amount is 10 micrometers (μm) or less, preferably 5 micrometers or less. Furthermore, "substantially aligned with each other" in the present embodiment means that the height difference between the end edges of any two second contact segments 32 is 10 micrometers or less, which is much smaller than the length tolerance between the plurality of rectangular probes 3 ( Approximately 50 microns), or a tolerance of a plurality of electrical contacts 12 in height (about 50 microns).

In other words, the relative displacement amount can be used in the present embodiment to absorb the length tolerance between the plurality of rectangular probes 3 and the tolerance of the plurality of electrical contacts 12 in height. For example, as shown in FIG. 2, two rectangular probes 3 located on the left and right outside but having different lengths, when the first contact segments 31 are inserted into the grooves 121 of the two electrical contacts 12, The two first contact segments 31 are movable a different distance within the relative displacement so that the end edges of the second contact segments 32 of the two outer rectangular probes 3 are substantially coplanar. Furthermore, as shown in FIG. 2, two rectangular probes 3 located on the left side and the center and having the same length, the first contact segments 31 of which are inserted with two different depths The two first contact segments 31 can be moved by the same distance within the relative displacement amount so that the end edges of the second contact segments 32 of the two left rectangular probes 3 are substantially coplanar.

In more detail, each of the first contact segments 31 has a free end portion 311, and the width of the free end portion 311 is preferably smaller than the width of the corresponding electrical contact 12; 3 and the corresponding electrical contact 12, the free end portion 311 is movably inserted into the recess 121 of the electrical contact 12 within the relative displacement amount, and the free end portion 311 abuts The inner side wall of the groove 121 is spaced apart from the groove bottom of the groove 121 by a distance.

Further, since the partitioning plate 23 and the portion of each of the rectangular probes 3 between the first contact portion 31 and the second contact portion 32 are less correlated with the improvement of the present invention, the following is not detailed. Description. Furthermore, the probe card device 100 of the present embodiment is limited to use a rectangular probe 3, which may be manufactured by microelectromechanical system (MEMS) technology, so this embodiment is a circular probe that excludes the manufacturing process from being completely different. In other words, the rectangular probe 3 of the present embodiment is different from the circular probe in that the manufacturing processes of the two are completely different, so that there is no motivation to refer to each other.

In addition, although the plurality of rectangular probes 3 of the present embodiment and the plurality of electrical contacts 12 respectively configured therein are substantially identical in configuration, in the embodiment not shown in the present invention, the probe card device 100 is The plurality of electrical contacts 12 of the plurality of rectangular probes 3, which are respectively matched, may also be configured to be different from each other. Furthermore, the specific structure of the probe card device 100 of the present embodiment can be adjusted and changed according to the needs of the designer, and is not limited to that shown in FIG. 2.

For example, as shown in FIG. 4, in each of the rectangular probes 3 and the corresponding electrical contacts 12, the groove 121 of the electrical contact 12 has a substantially trapezoidal cross section, and the rectangular probe 3 is free. The cross-sectional shape of the end portion 311 is a shape corresponding to the cross section of the above-described groove 121. That is, when the free end portion 311 moves within the groove 121, the above self The side edge of the end portion 311 can be kept in contact with the inner side wall of the groove 121, and as the free end portion 311 is inserted deeper into the groove 121, the greater the force between the free end portion 311 and the groove 121 (eg: tight fit).

Furthermore, as shown in FIG. 5, in each of the rectangular probes 3 and the corresponding electrical contacts 12, the free end portion 311 includes two contact arms 3111, and between the two contact arms 3111 The distance gradually increases from the direction in which the second contact section 32 faces the first contact section 31. Specifically, the two contact arms 3111 are substantially parallel to each other when the recess 121 is not inserted; and after the two contact arms 3111 are inserted into the recess 121, the end edges of the two contact arms 3111 are abutted against the groove of the recess 121. The bottom is bent outward from each other, and as the two contact arms 3111 are inserted deeper into the groove 121, the distance between the end edges of the above two contact arms 3111 is larger.

[Embodiment 2]

As shown in FIG. 6 and FIG. 7 , which is the second embodiment of the present invention, the present embodiment is similar to the first embodiment, and the same technical features are not described in detail. The main embodiment is the same as the first embodiment. The differences are as follows.

Specifically, as shown in FIG. 6, in each rectangular probe 3 and the corresponding electrical contact 12, the electrical contact 12 protrudes from the board surface 11 of the adapter board 1. And the groove 121 is formed by being recessed from the end surface of the electrical contact 12. The groove 121 is located outside the plate surface 11 of the adapter plate 1 in this embodiment, but the invention is not limited thereto.

Furthermore, as shown in FIG. 7, each of the rectangular probes 3 can be formed with a plurality of barbs 312 extending at the side edges of the free ends 311 thereof, and the plurality of barbs 312 can penetrate into the grooves 121. The sidewalls are used to enhance the electrical connection between the rectangular probe 3 and the corresponding electrical contact 12. The distance between any of the barbs 312 and the side edges of the free end portions 311 is preferably gradually reduced by the direction in which the second contact segments 32 face the first contact segments 31, but the invention is not limited thereto.

[Embodiment 3]

As shown in FIG. 8 , it is the third embodiment of the present invention. The present embodiment is similar to the first embodiment. The same technical features are not described herein. The main differences between the present embodiment and the first embodiment are as follows. Loaded.

Specifically, in the rectangular probe 3 and the corresponding electrical contact 12, the electrical contact 12 is not formed with the recess 121, but includes the protruding plate 1 a bump 122 of the face 11, a free end 311 of the rectangular probe 3 is formed with a groove 3112, and the groove 3112 is movably sleeved on the electrical contact 12 within the relative displacement. The bump 122 is spaced apart from the groove bottom of the recess 3112 by a distance.

[Embodiment 4]

As shown in FIG. 9 , which is the fourth embodiment of the present invention, the present embodiment is similar to the first embodiment, and the same technical features are not described herein. The main differences between the embodiment and the first embodiment are as follows. Loaded.

Specifically, the probe card device 100 of the embodiment further includes a plurality of buffer bodies 4 disposed in the recesses 121 of the plurality of electrical contacts 12. In each of the rectangular probes 3, the corresponding electrical contacts 12, and the corresponding buffer body 4, the buffer body 4 is pressed against the free end portion 311 of the rectangular probe 3 and electrical. The groove 121 of the joint 12 is grooved. Here, the relative displacement amount is smaller than the elastic compression amount of the buffer body 4, and the elastic compression amount of the buffer body 4 is, for example, 50 μm or less. Furthermore, the elastic modulus of the buffer body 4 is greater than the elastic modulus of the rectangular probe 3, and the elastic modulus of the buffer body 4 is preferably 65 GPa, and the elastic modulus of the rectangular probe 3 is preferably It is 60 GPa, but the present invention is not limited thereto.

Furthermore, each of the buffer bodies 4 may be made of a conductive material (such as gold, silver, copper) or a non-conductive material (such as a polymer material) in this embodiment, and the present invention does not limit.

[Technical Effects of Embodiments of the Invention]

In summary, the probe card device 100 and the signal transmission module M thereof disclosed in the embodiments of the present invention are capable of adjusting each of the first contact segments 31 that are in contact with each other and in contact with each other within a relative displacement amount. Corresponding to the structural design of the electrical contact 12, thereby absorbing the length tolerance between the plurality of rectangular probes 3 and the tolerance of the plurality of electrical contacts 12 in height, thereby making the second of the plurality of rectangular probes 3 The end edges of the contact segments 32 are generally aligned with one another and effectively enhance the measurement accuracy of the probe card device 100.

Furthermore, the probe card device 100 can further be provided with a buffer body 4 in the recess 121 of each electrical contact 12, and the buffer body 4 can be pressed against the free end of the rectangular probe 3 by pressure. The portion 311 and the bottom of the groove 121 of the electrical contact 12 are used to provide rebound and shock absorption through the buffer body 4 during the insertion of the rectangular probe 3 into the groove 121, thereby further enhancing the plurality of rectangular probes. The coplanarity of the end edge of the second contact segment 32 of 3.

The above are only the preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. The equivalents and modifications made by the scope of the present invention should fall within the scope of the claims of the present invention. .

Claims (7)

A probe card device includes: an adapter plate including a board surface and a plurality of electrical contacts on the board surface; and a positioning base body corresponding to one side of the plurality of the electrical contacts And a plurality of rectangular probes disposed on the positioning body, and each of the rectangular probes includes a first contact segment and a second contact segment on opposite sides and extending out of the positioning body And the first contact segments of the plurality of rectangular probes respectively abut the plurality of the electrical contacts; wherein each of the first contact segments and the corresponding electrical contacts The inter-connections are concave-convex and can be kept in contact with each other within a relative displacement amount such that the relative position of each of the first contact segments and the corresponding electrical contacts can be adjusted within the relative displacement And aligning the end edges of the second contact segments of the plurality of rectangular probes with each other; wherein the relative displacement is less than 10 micrometers (μm); wherein each of the rectangular probes and the corresponding In the electrical contact, the electrical contact includes a recess, and the first contact segment a free end portion is movably inserted into the groove within the relative displacement amount, and the free end portion abuts against an inner side wall of the groove, and the free end portion and the groove The bottom of the groove is separated by a distance; wherein the probe card device further comprises a plurality of buffer bodies disposed in the grooves of the plurality of electrical contacts; wherein each of the rectangular probes Corresponding to the electrical contact, and corresponding to the buffer body, the buffer body is pressed against the free end portion and the groove bottom of the groove. The probe card device of claim 1, wherein the adapter plate comprises a substrate, a plurality of metal pads on the substrate, an insulating layer covering the substrate, and are respectively connected to the plurality of a plurality of metal plating layers of the metal pad; wherein an outer surface of the insulating layer is defined as the board surface, and the insulating layer is formed separately a plurality of through holes of the plurality of metal pads, a plurality of the metal plating layers are plated on inner sidewalls of the plurality of through holes, and each of the metal pads and the metal plating layers connected are defined as One of the electrical contacts and collectively surrounding is formed with the recess. The probe card device of claim 1, wherein in each of the rectangular probes and the corresponding electrical contacts, a width of the free end portion is smaller than a width of the electrical contact. A probe card device includes: an adapter plate including a board surface and a plurality of electrical contacts on the board surface; and a positioning base body corresponding to one side of the plurality of the electrical contacts And a plurality of rectangular probes disposed on the positioning body, and each of the rectangular probes includes a first contact segment and a second contact segment on opposite sides and extending out of the positioning body And the first contact segments of the plurality of rectangular probes respectively abut the plurality of the electrical contacts; wherein each of the first contact segments and the corresponding electrical contacts The inter-connections are concave-convex and can be kept in contact with each other within a relative displacement amount such that the relative position of each of the first contact segments and the corresponding electrical contacts can be adjusted within the relative displacement And aligning the end edges of the second contact segments of the plurality of rectangular probes with each other; wherein the relative displacement is less than 10 micrometers (μm); wherein each of the rectangular probes and the corresponding In the electrical contact, the electrical contact includes a recess, and the first contact segment a free end portion is movably inserted into the groove within the relative displacement amount, and the free end portion abuts against an inner side wall of the groove, and the free end portion and the groove The bottom of the groove is separated by a distance; wherein, in each of the rectangular probes and the corresponding electrical contacts, the free end comprises two contact arms, and between the two contact arms distance Off, it gradually increases from the direction in which the second contact segment faces the first contact segment. A probe card device includes: an adapter plate including a board surface and a plurality of electrical contacts on the board surface; and a positioning base body corresponding to one side of the plurality of the electrical contacts And a plurality of rectangular probes disposed on the positioning body, and each of the rectangular probes includes a first contact segment and a second contact segment on opposite sides and extending out of the positioning body And the first contact segments of the plurality of rectangular probes respectively abut the plurality of the electrical contacts; wherein each of the first contact segments and the corresponding electrical contacts The inter-connections are concave-convex and can be kept in contact with each other within a relative displacement amount such that the relative position of each of the first contact segments and the corresponding electrical contacts can be adjusted within the relative displacement And aligning the end edges of the second contact segments of the plurality of rectangular probes with each other; wherein the relative displacement is less than 10 micrometers (μm); wherein each of the rectangular probes and the corresponding In the electrical contact, the electrical contact includes a recess, and the first contact segment a free end portion is movably inserted into the groove within the relative displacement amount, and the free end portion abuts against an inner side wall of the groove, and the free end portion and the groove The bottom of the groove is separated by a distance; wherein, in each of the rectangular probes and the corresponding electrical contacts, the electrical contact includes a bump protruding from the board surface, a free end of the rectangular probe is formed with a groove, and the groove is movably sleeved on the protrusion within the relative displacement amount, and the protrusion is spaced apart from the groove bottom of the groove There is a distance. The probe card device of claim 5, wherein the relative displacement amount is further limited to 5 microns or less. A signal transmission module of a probe card device, comprising: An adapter board includes a board surface and a plurality of electrical contacts on the board surface; and a plurality of rectangular probes each including a first contact section and a second contact section on opposite sides And the first contact segments of the plurality of rectangular probes respectively abut the plurality of the electrical contacts; wherein, between each of the first contact segments and the corresponding electrical contacts The connections are concave-convex and can be kept in contact with each other within a relative displacement amount such that the relative position of each of the first contact segments and the corresponding electrical contacts can be adjusted within the relative displacement amount, And aligning the end edges of the second contact segments of the plurality of rectangular probes with each other; wherein the relative displacement amount is 10 micrometers or less; wherein each of the rectangular probes and the corresponding electrical property In the contact, the electrical contact includes a recess, a free end of the first contact segment is movably inserted into the recess within the relative displacement, and the free end Abutting against an inner side wall of the groove, and the free end portion is spaced apart from a groove bottom of the groove The adapter plate includes a substrate, a plurality of metal pads on the substrate, an insulating layer covering the substrate, and a plurality of metal plating layers respectively connected to the plurality of metal pads Wherein the outer surface of the insulating layer is defined as the plate surface, the insulating layer is formed with a plurality of through holes respectively exposing a plurality of the metal pads, and the plurality of metal plating layers are plated on the plurality of An inner side wall of the through hole, and each of the metal pads and the metal plating layers connected are combined to define one of the electrical contacts and collectively surround the groove.