TWI647015B - Clean device and method - Google Patents

Abstract

A cleaning device comprises a main body, at least one guiding roller, at least one carrying roller and at least one cleaning member. The guiding roller is connected to the main body, and the guiding roller has a first rotating shaft direction. The carrying roller is connected to the main body, and the carrying roller has a second rotating shaft direction, and the first rotating shaft direction intersects with the second rotating shaft direction. The cleaning member is disposed on the main body.

Description

 Cleaning device and method  

Some embodiments of the present disclosure relate to a cleaning apparatus and method, and more particularly to a cleaning apparatus and method for a semiconductor factory.

As technology grows, integrated circuits are widely used in various fields to promote the vigorous development of the semiconductor industry. In the highly competitive semiconductor industry, semiconductor components must be designed and manufactured under the most efficient conditions. Therefore, the Automated Material Handling System (AMHS) has been widely used in semiconductor manufacturing plants.

In general, automated material distribution systems have an Overhead Hoist Transport System (OHTS), and overhead transmission systems include overhead rails to guide conveyors to transport wafer carrier units, or reticle carriers to different process stations. Between (devices).

According to some embodiments of the present disclosure, the cleaning device includes a main body, at least one guiding roller, at least one carrying roller and at least one cleaning member. The guiding roller is connected to the main body, and the guiding roller has a first rotating shaft direction. The carrying roller is connected to the main body, and the carrying roller has a second rotating shaft direction, and the first rotating shaft direction intersects with the second rotating shaft direction. The cleaning member is disposed on the main body.

According to some embodiments of the disclosure, the cleaning device comprises a main body, at least one guiding roller, at least one carrying roller, a first cleaning component and a second cleaning component. The guide roller is connected to the main body. The carrying roller is connected to the main body, and the carrying roller and the guiding roller are at different heights. The first cleaning member is adjacent to the guide roller and the second cleaning member is adjacent to the carrier roller.

According to some embodiments of the present disclosure, the cleaning method comprises the following steps. Move a body to advance along a track. When moving the body, the first level of the track is cleaned and the second level of the track is cleaned, wherein the level of the first level is different from the level of the second level.

10, 10a, 10b‧‧‧ cleaning device

100‧‧‧ Subject

102‧‧‧Connecting parts

104‧‧‧Connecting parts

110‧‧‧ first side

120‧‧‧ second side

130‧‧‧ third side

200‧‧‧guide wheel

202‧‧‧End

210‧‧‧ shaft

220‧‧‧Auxiliary guide roller

300‧‧‧ carrying roller

310‧‧‧ shaft

400‧‧‧cleaning parts

402‧‧‧ brushes

404‧‧‧ nozzle

406‧‧‧ vacuum assembly

408‧‧‧Connecting parts

410‧‧‧First cleaning parts

420‧‧‧Second cleaning parts

422‧‧‧cleaning actuator

430‧‧‧third cleaning parts

440‧‧‧Four cleaning parts

600‧‧‧ track

610‧‧‧ Guide surface

612‧‧‧Part 1

620‧‧‧ bearing surface

622‧‧‧Part 1

630‧‧‧Auxiliary reinforcement surface

632‧‧‧First auxiliary level

634‧‧‧Second auxiliary vertical plane

640‧‧‧Auxiliary guides

700‧‧‧Actuator

800‧‧‧ camera

910‧‧‧Processing device

920‧‧‧Track Image Analysis Module

930‧‧‧ Track Data Storage Module

940‧‧‧Path Control Module

A1‧‧‧ distance

A2‧‧‧ distance

D1‧‧‧first axis direction

D2‧‧‧second axis direction

N1‧‧‧ normal vector

N2‧‧‧ normal vector

S‧‧‧ accommodation space

Read the following detailed description and the corresponding drawings to understand the various aspects of the disclosure. It should be noted that the various features in the schema do not draw actual scales based on standard practices in the industry. In fact, the dimensions of the features described can be arbitrarily increased or decreased to facilitate clarity of discussion.

1 is a plan view of a cleaning device in accordance with some embodiments of the present disclosure.

Figure 2 is a side elevational view of a cleaning apparatus in accordance with some embodiments of the present disclosure.

Figure 3 is a side view of Figure 2 at different viewing angles.

4 is a schematic diagram of a system of a cleaning device in accordance with some embodiments of the present disclosure.

Figure 5 is a flow diagram of a cleaning method in accordance with some embodiments of the present disclosure.

Figure 6 is a side elevational view of a cleaning device in accordance with another embodiment of the present disclosure.

Figure 7 is a side view of Figure 6 at different viewing angles.

Figure 8 is a side elevational view of a cleaning device in accordance with another embodiment of the present disclosure.

Figure 9 is a side view of Figure 8 at different viewing angles.

The spirit and scope of the present disclosure will be apparent from the following description of the embodiments of the present disclosure, which may be modified and modified by the teachings of the present disclosure. Depart from the spirit and scope of this disclosure. For example, the description "the first feature is formed above or above the second feature", in the embodiment, the first feature and the second feature are included in direct contact; and the first feature and the second feature are also included as indirect The contact has additional features formed between the first feature and the second feature. Moreover, the present disclosure will reuse component numbers and/or text in various examples. The purpose of the repetition is to simplify and clarify, and does not in itself determine the relationship between the various embodiments and/or the configurations in question.

The terminology used herein is for the purpose of describing the particular embodiment In the present disclosure, the singular forms "a" and "the" It is to be understood that the terms "comprises", "comprising" and "comprising" are used to mean the presence of the features, regions, integers, steps, operations, components and/or components, but do not exclude One or more of the features, regions, integers, steps, operations, components, components, and/or combinations thereof are added.

In addition, azimuth-relative vocabulary, such as "under", "below", "below", "above" or "upper" or similar words, is used herein to facilitate the description in the drawings. The relationship of one element or feature to another element or feature. Azimuthally relative terms are used to describe different orientations of the device in use or operation, except to describe the orientation of the device in the drawings. When the device is otherwise set (rotated 90 degrees or other oriented orientation), the orientation relative vocabulary used herein can also be interpreted accordingly.

Refer to both Figure 1 and Figure 2. 1 is a plan view of a cleaning device in accordance with some embodiments of the present disclosure. 2 is a side view of a cleaning device in accordance with some embodiments of the present disclosure. In some embodiments, the cleaning device 10 includes a main body 100, at least one guiding roller 200, at least one carrying roller 300, and at least one cleaning member 400. The guide roller 200 is coupled to the main body 100, and the guide roller 200 has a first rotation axis direction D1. The carrying roller 300 is connected to the main body 100, and the carrying roller 300 has a second rotating shaft direction D2, and the first rotating shaft direction D1 intersects with the second rotating shaft direction D2. The cleaning member 400 is disposed on the main body 100. In other words, the main body 100 is advanced along a track 600 by the guide roller 200 or the carrying roller 300. During the advancement of the main body 100 along the rail 600, the cleaning member 400 connected to the main body 100 also follows the main body. 100 and proceed along track 600. Therefore, when the cleaning member 400 moves along the main body 100 to the rail 600, the cleaning member 400 can remove particles, dust, or foreign matter attached to the rail 600, thereby achieving automatic cleaning of the rail, thereby saving labor and manpower.

Refer to Figures 2 and 3 simultaneously. Figure 3 is a side view of Figure 2 at different viewing angles. In some embodiments, the main body 100 can include a first side surface 110, a second side surface 120, and a third side surface 130. The first side surface 110, the second side surface 120, and the third side surface 130 intersect each other and form a receiving space. S. The accommodating space S may include at least one functional component, such as a drive motor, a circuit board, or other suitable components to assist in the operation of the cleaning device 10, but the disclosure is not limited thereto. For example, the first side 110, the second side 120, and the third side 130 may be a metal shell, a plastic shell, the above combination, or other suitable materials, but the disclosure is not limited thereto.

In some embodiments, as shown in FIGS. 2 and 3 , the guide roller 200 is coupled to the first side 110 of the body 100 , and the carrier roller 300 is coupled to the second side 120 of the body 100 . Further, in some embodiments, the track 600 can include a guiding surface 610 and a bearing surface 620 that intersects the bearing surface 620. When the cleaning device 10 is located on the track 600, the guide roller 200 can be tangential to the guiding surface 610 of the track 600, and the guiding roller 200 can advance along the guiding surface 610. Further, the guide roller 200 can have a rotating shaft 210, and the rotating shaft 210 can be connected to the first side 110 of the main body 100 by the connecting member 102. The axial direction of the rotating shaft 210 is referred to as a first rotating shaft direction D1, and the first rotating shaft direction D1 and the normal vector N1 of the guiding surface 610 are perpendicular to each other. Therefore, the guiding roller 200 can advance along the guiding surface 610 in a rolling manner. .

In some embodiments, when the cleaning device 10 is located on the track 600, the carrier roller 300 can be tangential to the bearing surface 620 of the track 600, and the carrier roller 300 can advance along the bearing surface 620. Further, the carrying roller 300 can have a rotating shaft 310 that is connected to the second side 120 of the main body 100. The axial direction of the rotating shaft 310 is referred to as a second rotating shaft direction D2, and the second rotating shaft direction D2 is perpendicular to the normal vector N2 of the bearing surface 620. Therefore, the carrying roller 300 can advance along the carrying surface 620 in a rolling manner. In this way, by arranging the guiding roller 200 and the carrying roller 300, the main body 100 can advance along the guiding surface 610 of the rail 600 and the bearing surface 620, thereby helping to control the forward direction of the cleaning device 10. In addition, under the interaction of the load bearing roller 300 and the bearing surface 620, the bearing surface 620 can support at least part of the weight of the cleaning device 10, so that the cleaning device 10 can be suspended, thereby facilitating the application of the cleaning device 10 to the overhead type. In the track.

In some embodiments, when the cleaning device 10 is located on the track 600, the first side 110 of the body 100 is parallel to the bearing surface 620, the second side 120 of the body 100 is parallel to the guiding surface 610, and the third of the body 100 The side surface 130 can intersect the bearing surface 620 and the guiding surface 610. At least a portion of the first side 110 can be located above the bearing surface 620, and the second side 120 and the third side 130 can be positioned between the two guiding surfaces 610. In other embodiments, the first rotation axis direction D1 of the guide roller 200 is perpendicular to the normal vector N1 of the guiding surface 610, and the second rotation axis direction D2 of the bearing roller 300 is perpendicular to the normal vector N2 of the bearing surface 620. The spatial position of the first side 110, the second side 120, and the third side 130 can be freely designed, and the disclosure is not limited thereto.

In some embodiments, as shown in FIGS. 2 and 3, the cleaning device 10 further includes an auxiliary guiding roller 220 coupled to the first side 110 of the main body 100 and assisting the guiding roller. The 220 and the guide roller 200 are respectively located on opposite sides of the main body 100. That is, the level at which the auxiliary guide roller 220 is located is different from the level at which the guide roller 200 is located. For example, when the cleaning device 10 is located on the track 600, the auxiliary guide roller 220 is at a level higher than the level at which the guide roller 200 is located.

Further, in some embodiments, as shown in FIG. 1 , the rail 600 may include an auxiliary guiding member 640 disposed adjacent to the curved portion of the rail 600 for assisting in moving to the curved portion. The cleaning device 10 turns. That is, when the cleaning device 10 passes the bend of the track 600, the auxiliary guide roller 220 of the cleaning device 10 can be tangential to a portion of the auxiliary guide 640, thereby helping the cleaning device 10 to turn along the bend of the track 600. .

In some embodiments, as shown in FIGS. 2 and 3, the cleaning member 400 can include a brush 402 that can move with one of the guide roller 200 and the carrier roller 300. Therefore, by moving the guide roller 200, the carrier roller 300, or both, the brush 402 can be moved to generate sufficient shear force to remove particles, dust or foreign matter attached to the track 600. For example, the brush 402 can be a thin flat brush, a pen-like brush, or a rotating brush, but the disclosure is not limited thereto. For example, the material of the brush 402 may be polyvinyl alcohol (PVA), plastic, or nylon, but the disclosure is not limited thereto. For example, in some embodiments, the brush 402 can be a vacuum brush, that is, the brush 402 can be combined with a suction port, and the suction port can be used to vacuum clean the particles, dust or foreign matter under the brush 402, but This disclosure is not limited to this.

In some embodiments, as shown in FIGS. 2 and 3, the cleaning member 400 includes a suction nozzle 404 that is movable along with one of the guide roller 200 and the carrier roller 300. That is, when the main body 100 has a moving path by moving the guide roller 200 or the carrying roller 300 in the rail 600, the suction nozzle 404 also has the same moving path as the main body 100. For example, the nozzle 404 can be a hard nozzle, a soft nozzle, or a combination thereof, but the disclosure is not limited thereto. For example, the nozzle can be a single-stage, multi-stage, or multi-component nozzle, but the disclosure is not limited thereto. In other embodiments, the absorbent nozzle 404 may include an absorbent, an adsorbent, an aerosol modifier, an additive, or a combination thereof, but the disclosure is not limited thereto.

In more detail, in some embodiments, as shown in FIG. 2, the suction nozzle 404 is connected to a dust suction assembly 406, such as a vacuum cleaner or a vacuum generator, and the dust collection assembly 406 can extract the gas in the suction nozzle 404. This provides a pressure differential to remove particles, dust or foreign matter from the track 600 located on the moving path in a suction manner. As shown in FIG. 2, the dust suction assembly 406 can be located below the body 100 and coupled to the first side 110 of the body 100 by a connector 408. Accordingly, the dust suction assembly 406 can be positioned below the track 600 to help avoid over-sized cleaning device 10 above the track 600.

In some embodiments, as shown in FIG. 2, the number of cleaning members 400 is plural, and the plurality of cleaning members 400 are respectively at different levels. In more detail, the cleaning member 400 can be divided into a first cleaning member 410 and a second cleaning member 420. The first cleaning member 410 is adjacent to the guiding roller 200, and the second cleaning member 420 is adjacent to the carrying roller 300. The guiding roller 200 and the carrying roller 300 are at different heights, and the first cleaning member 410 and the second cleaning member 420 are at different heights. For example, when the cleaning device 10 is located on the rail 600, the level of the carrying roller 300 is greater than the level at which the guiding roller 200 is located. Therefore, the level of the first cleaning member 410 is also greater than that of the second cleaning member 420. Level, but this disclosure is not limited to this. As a result, when the first cleaning member 410 and the second cleaning member 420 move along the guiding roller 200 or the carrying roller 300 to the rail 600, the level of the first cleaning member 410 and the second cleaning member 420 are located. The level is different, so the first cleaning member 410 can clean the first portion of the track 600, the second cleaning member 420 can clean the second portion of the track 600, the level of the first portion of the track 600 and the second portion of the track 600 The level of the level is different, so the cleaning device 10 can clean different parts of the track 600 more perfectly.

In some embodiments, as shown in FIG. 2 , the number of the first cleaning members 410 may be plural, and the plurality of first cleaning members 410 are disposed on the first side 110 of the main body 100 at intervals. The first cleaning member 410 is coupled to the main body 100 by a connecting member 102, that is, the connecting member 102 is coupled between the first side 110 of the main body 100 and the first cleaning member 410. For example, the connector 102 can include screws, bolts, snaps, or other suitable fasteners, but the disclosure is not limited thereto. Further, the first cleaning member 410 can be located under the guiding roller 200 by being connected by the connecting member 102. That is, by adjusting the length of the connecting member 102, the position of the first cleaning member 410 can be adjusted such that the level of the first cleaning member 410 is lower than the level of the guiding roller 200. In other embodiments, the level of the first cleaning member 410 may be approximately equal to the level of the guiding roller 200, but the disclosure is not limited thereto.

In some embodiments, as shown in FIG. 2 , the number of the second cleaning members 420 may be plural, and the plurality of second cleaning members 420 are disposed on the opposite second side surfaces 120 of the main body 100 . The second cleaning member 420 is coupled to the main body 100 by a connecting member 104, that is, the connecting member 104 is coupled between the second side 120 of the main body 100 and the second cleaning member 420. For example, the connector 104 can include screws, bolts, snaps, or other suitable fasteners, but the disclosure is not limited thereto. Further, the second cleaning member 420 can be located on the outer side of the carrying roller 300 by the connection of the connecting member 104. Moreover, by adjusting the length and position of the connector 102, the position of the second cleaning member 420 can be adjusted such that the second cleaning member 420 can contact the bearing surface 620 of the track 600 without interfering with the movement of the carrier roller 300. In other embodiments, the second cleaning member 420 can be electrically connected to a cleaning member actuator 422. The cleaning member actuator 422 is for controlling the second cleaning member 420 such that the second cleaning member 420 is movable along the first rotation axis direction D1, and the first rotation axis direction D1 is parallel to the bearing contacted by the second cleaning member 420. The normal vector N2 of the surface 620, but the disclosure is not limited thereto.

In some embodiments, as shown in FIGS. 1 and 2, the track 600 includes an auxiliary reinforcing surface 630, the auxiliary reinforcing surface 630 is parallel to the bearing surface 620, and the level of the bearing surface 620 is different from the auxiliary reinforcement. The level at which face 630 is located. When the cleaning device 10 is located on the track 600, the first cleaning member 410 can contact the auxiliary reinforcement surface 630 of the track 600, and the second cleaning member 420 contacts the bearing surface 620 of the track 600. In other words, when the first cleaning member 410 and the second cleaning member 420 move along the guide roller 200 or the carrying roller 300 to the rail 600, the first cleaning member 410 can remove the particles attached to the auxiliary reinforcing surface 630, Dust or foreign matter, and the second cleaning member 420 can remove particles, dust, or foreign matter attached to the bearing surface 620.

For example, in some embodiments, the first cleaning member 410 may include a brush 402, a suction nozzle 404, an electrostatic cloth, the above combination, or other suitable cleaning elements, but the disclosure is not limited thereto. The second cleaning member 420 may include a brush 402, a suction nozzle 404, an electrostatic cloth, the above combination, or other suitable cleaning elements, but the disclosure is not limited thereto. In some embodiments, the first cleaning member 410 has the same elements as the second cleaning member 420. In other embodiments, depending on the portion of the track 600 to be cleaned by the first cleaning member 410 and the second cleaning member 420, the first cleaning member 410 may have an element different from that of the second cleaning member 420. However, this disclosure is not limited to this.

In some embodiments, as shown in FIG. 2, the number of at least one guiding roller 200 is plural, and the number of at least one carrying roller 300 is plural, and the guiding rollers 200 respectively have the farthest end portions 202. The distance between the two ends 202 of the guide roller 200 is smaller than the shortest distance of the carrying roller 300. Further, the plurality of carrying rollers 300 can be respectively connected to the opposite second side faces 120 of the main body 100. That is, the plurality of carrying rollers 300 can be classified into a first carrying roller 300 and a second carrying roller 300 according to their positions. The first carrying roller 300 is located on the left side of the main body 100 in FIG. 2, and the second carrying roller 300 is located. The right side of the main body 100 has a minimum distance A1 between the first carrying roller 300 and the second carrying roller 300. The plurality of guiding rollers 200 are spaced apart from the same first side 110 of the main body 100, and the end portion 202 of the guiding roller 200 can contact the guiding surface 610 of the rail 600, and the two ends 202 are separated by a distance A2. The horizontal distance A2 between the end portions 202 of the guide roller 200 is smaller than the minimum distance A1 between the carrier rollers 300.

In other words, in some embodiments, as shown in FIG. 2, the guide roller 200 can be in contact with the first portion 612 of the guiding surface 610, and the carrier roller 300 can be in contact with the first portion 622 of the bearing surface 620. The minimum distance between the first portions 622 of the bearing faces 620 is greater than the minimum distance between the first portions 612 of the guide faces 610. That is, the guide roller 200 and the carrier roller 300 of the cleaning device 10 are designed to move in the track 600. For example, in some embodiments, the distance A2 between the two ends 202 of the guide roller 200 is equal to the minimum distance between the first portions 612 of the guiding surface 610, but the disclosure is not limited thereto.

In some embodiments, the cleaning device 10 includes an actuator 700. The actuator 700 is used to control movement of one of the guide roller 200 and the carrier roller 300. In other words, the actuator 700 is configured to control the guide roller 200, the carrier roller 300, or both to move in a rolling manner. The actuator 700 may be disposed in the accommodation space S of the main body 100, and the actuator 700 may be an electric actuator, an electromagnetic actuator, a pneumatic actuator, a hydraulic actuator, a servo pneumatic actuator, a servo hydraulic pressure Actuator, or other suitable actuator, but the disclosure is not limited thereto. For example, the actuator 700 can be a bearing motor or an electric motor, but the disclosure is not limited thereto.

In some embodiments, the cleaning device 10 further includes an imaging device 800, and the imaging device 800 can move along with at least one of the guiding roller 200 and the carrying roller 300. Further, the camera device 800 is used to capture and record the track image of the cleaning device 10 moving on the track 600. For example, the camera device 800 can be disposed on the first side 110, the second side 120, the third side 130, or a combination of the main body 100. Therefore, the camera 800 located on the first side 110 can assist the auxiliary reinforcement of the track 600. The orbital image of the surface 630, the image capturing device 800 on the second side 120 can capture the orbital image of the bearing surface 620 of the track 600, or the orbital image of the guiding surface 610 of the imaging device 800 on the third side 130. The track image of the surface 620, the track image of the auxiliary reinforcement surface 630, or the above combination, but the disclosure is not limited thereto.

Refer to Figure 4. 4 is a schematic diagram of a system of a cleaning device in accordance with some embodiments of the present disclosure. In some embodiments, the cleaning device 10 can include a processing device 910. The processing device 910 can be disposed in the receiving space S of the main body 100, and the imaging device 800 can be electrically connected to the processing device 910. The processing device 910 may be a central processing unit, a control unit, a microprocessor, a server, or other hardware components that can execute instructions, but the disclosure is not limited thereto. When the camera device 800 is electrically connected to the processing device 910, the processing device 910 can control the camera device 800 to capture a track image per unit time, and record the time when each track image is captured and the position of the current track. Further, in some embodiments, the cleaning device 10 can include an orbital image analysis module 920, and the track image analysis module 920 can be used to determine the amount of particles, dust, or foreign matter in the track image, and report a track cleaning state. The processing device 910 is pre-processed. Subsequently, the processing device 910 can issue an instruction to the actuator 700 according to the track cleaning state, and the actuator 700 can adjust the speed at which the guiding roller 200, the carrying roller 300, or both move, thereby adjusting the cleaning member 400 to move. Speed in the track, but this disclosure is not limited to this.

For example, in some embodiments, the track image analysis module 920 can be integrated into the processing device 910. The processing device 910 may be a central processing unit, a control unit, a microprocessor, a server, or other hardware components that can execute instructions, but the disclosure is not limited thereto. In other embodiments, the track image analysis module 920 can be implemented by a computer program and stored in the storage device. The storage device includes a non-transitory computer readable recording medium or other storage device. The computer program includes a plurality of program instructions, which can be executed by a central processing unit to perform the functions of the modules, but the disclosure is not limited thereto.

In some embodiments, the track image captured by the camera device 800 can also serve as a basis for determining the abnormality of the track 600 or other related devices. For example, when an abnormality occurs in a cable, an optical transceiver, an infrared sensing device, or the like in the track 600, if the cleaning device 10 passes the abnormal track for a period of time before the abnormality occurs, the viewing device can also be viewed through the camera. 800 orbital images captured, and the possibility of abnormality is analyzed, or the possibility of abnormality is excluded, but the disclosure is not limited thereto.

In some embodiments, as shown in FIG. 4, the cleaning device 10 can include a track data storage module 930 and a path control module 940. For example, the track data storage module 930 is designed to store the position data of each track, and different coordinate values are defined for different positions of each track and track. Therefore, when the cleaning device 10 is moved to the track, the track data storage module 930 can provide the coordinate value of the track to the path control module 940 of the cleaning device 10 to help ensure that the cleaning device 10 can move in the track according to a preset path. In more detail, the track data storage module 930 and the path control module 940 can be integrated into the processing device 910 of the cleaning device 10, and the processing device 910 can drive the actuator 700 through the instructions provided by the path control module 940. It operates to move the guide roller 200, the carrier roller 300, or both. For example, in some embodiments, the path control module 940 can be written into multiple preset paths, each preset path corresponding to different time points, for example, between the first time point and the second time point. Corresponding to the first track path, and corresponding to the second track path at the second time point and the third time point, but the disclosure is not limited thereto. In this way, by arranging the actuator 700, the track data storage module 930 and the path control module 940, the cleaning device 10 can be designed to automatically move to different track intervals (ie, move to different tracks) at different time periods. path). In other words, the cleaning device 10 can automatically clean different track intervals at different times in conjunction with the function of automatic scheduling.

For example, in some embodiments, the path control of the cleaning device 10 may include a Manufacturing Execution System (MES), and the manufacturing execution system may have a function of planning a transmission path of the object, and an optimal material delivery path. The function, or the function of the transmission path of the record object, etc. The path control module 940 of the cleaning device 10 can control the actuator 700 to adjust the direction of the guiding roller 200, the carrying roller 300 or both according to an instruction issued by the manufacturing execution system, thereby helping to adjust the moving path of the cleaning device 10. However, this disclosure is not limited to this.

In some embodiments, when the cleaning device 10 is applied to a semiconductor factory, the cleaning device 10 can be signally connected to a material control system (MCS) to prevent the cleaning device 10 from colliding with other objects moving on the track. The possibility. Further, the material control system can be connected to a plurality of host computers, and each host is connected to one or more machines. An instrument automation program (EAP) can be embedded in the host to transmit messages and issue commands between the object, the machine and the cleaning device 10. For example, the object moving on the track is used to transfer the wafer carrier unit or the photomask carrying unit between different process machines along the track, but the disclosure is not limited thereto.

Refer to Figure 5. Figure 5 is a flow chart showing the steps of the cleaning method in accordance with some embodiments of the present disclosure. In some embodiments, the cleaning method comprises the following steps. In step S10, a body 100 is moved to advance along a track. In step S20, when moving the main body 100, the first horizontal plane of the rail 600 (that is, the auxiliary reinforcing surface 630) is cleaned, and the second horizontal plane (ie, the bearing surface 620) of the rail 600 is cleaned, wherein the level of the first horizontal plane Water with the second level The flat height is different. In addition, when moving the main body 100, a plurality of orbital images of the track 600 are captured.

Refer to Figures 6 and 7 at the same time. Figure 6 is a side elevational view of a cleaning device in accordance with another embodiment of the present disclosure. Figure 7 is a side view of Figure 6 at different viewing angles. The main difference between the embodiment and the embodiment of FIG. 2 is that the cleaning device 10a further includes a third cleaning member 430, and the third cleaning unit is disposed on the second side 120 and adjacent to the auxiliary guiding member 640. The level of the third cleaning member 430 is different from the level at which the second cleaning member 420 is located, and the level of the third cleaning member 430 is different from the level at which the first cleaning member 410 is located. For example, when the cleaning device 10a is located on the rail 600, the level of the third cleaning member 430 is greater than the level at which the second cleaning member 420 is located, and the level of the third cleaning member 430 is greater than the first cleaning member. The level at which 410 is located. Since the third cleaning member 430 is adjacent to the auxiliary guiding member 640, when the cleaning device 10a passes the auxiliary guiding member 640 of the rail 600, the third cleaning member 430 can remove the particles attached to the auxiliary guiding member 640, Dust or foreign matter, which is good for cleaning all parts of the track.

In more detail, in some embodiments, as shown in FIG. 6, the auxiliary guide 640 includes intersecting first auxiliary horizontal surfaces 632 and second auxiliary vertical surfaces 634, and the first auxiliary horizontal surface 632 is parallel to the bearing surface 620. And the second auxiliary vertical surface 634 is parallel to the guiding surface 610. For example, the third cleaning member 430 is configured to contact the first auxiliary level 632 of the auxiliary guide 640 to clean the first auxiliary level 632. Alternatively, the third cleaning member 430 is disposed to contact the second auxiliary vertical surface 634 of the auxiliary guiding member 640 to clean the second auxiliary vertical surface 634, but the disclosure is not limited thereto. Other details of the present embodiment are substantially as described above, and are not described herein again.

See also Figures 8 and 9. Figure 8 is a side elevational view of a cleaning device in accordance with another embodiment of the present disclosure. Figure 9 is a side view of Figure 8 at different viewing angles. The main difference between the embodiment and the embodiment of FIG. 2 is that the cleaning device 10b further includes a fourth cleaning member 440, and the fourth cleaning member 440 is disposed on the second side surface 120 relatively away from the auxiliary guiding member 640. The level of the fourth cleaning member 440 is different from the level at which the second cleaning member 420 is located, and the level of the fourth cleaning member 440 is different from the level at which the first cleaning member 410 is located. For example, when the cleaning device 10b is located on the rail 600, the level of the fourth cleaning member 440 is higher than the level at which the second cleaning member 420 is located, and the level of the fourth cleaning member 440 is higher than the first level. The level at which the cleaning member 410 is located. Further, the fourth cleaning member 440 is connected to the second side 120 of the main body 100 by the connecting member 102, and the connecting member 104 and the fourth cleaning member 440 are arranged toward the normal vector N2 of the bearing surface 620. That is, the cleaning assembly of the fourth cleaning member 440 (for example, a brush, a nozzle, other suitable cleaning members, or a combination thereof) is directed upwards of FIG. 8, but the disclosure is not limited thereto. Other details of the present embodiment are substantially as described above, and are not described herein again. Other details of the present embodiment are substantially as described above, and are not described herein again.

The features of the several embodiments have been summarized above, and those skilled in the art will appreciate the aspects of the disclosure. Those skilled in the art will appreciate that the present disclosure can be readily utilized to design or refine other processes and structures to achieve the same objectives and/or the same advantages as the embodiments described herein. It is to be understood by those skilled in the art that the present invention is not limited to the spirit and scope of the present disclosure, and various modifications, substitutions and modifications may be made without departing from the spirit and scope of the disclosure.

Claims (8)

A cleaning device comprising: a main body; a pair of guiding rollers connected to a bottom surface of the main body, wherein the guiding rollers have a first rotating shaft direction; a pair of carrying rollers connected to the side of the main body, and the The carrying roller has a second rotating shaft direction, and the first rotating shaft direction intersects with the second rotating shaft direction, wherein the guiding rollers respectively have the farthest end portions, and the distance between the two ends is smaller than the carrying rollers The shortest distance between the two; a first cleaning member disposed on the main body and adjacent to the guiding rollers and a second cleaning member disposed on the main body and adjacent to the carrying rollers, wherein the height of the second cleaning member Greater than the height of the first cleaning member. The cleaning device of claim 1, wherein the first cleaning member and the second cleaning member respectively comprise a nozzle, and the nozzles are movable along with the guiding rollers and the carrying rollers. The cleaning device of claim 1, wherein the first cleaning member and the second cleaning member respectively comprise a brush, and the brushes are movable along with the guiding rollers and the carrying rollers. The cleaning device of claim 1, further comprising: an actuator for controlling movement of the carrying roller and the guiding rollers. A system having a cleaning device, comprising: a rail having a bearing surface, an auxiliary reinforcing surface, and a guiding surface connecting the bearing surface and the auxiliary reinforcing surface, wherein the bearing surface is different from the auxiliary reinforcing surface a horizontal height; and a cleaning device comprising: a main body; at least one guiding roller connecting the main body to contact the guiding surface; at least one carrying roller connecting the main body to contact the bearing surface; a first cleaning member adjacent to And guiding the roller to clean the auxiliary reinforcing surface; and a second cleaning member adjacent to the carrying roller to clean the bearing surface. A system having a cleaning device according to claim 5, further comprising: an imaging device movable along with at least one of the guiding roller and the carrying roller. A cleaning method includes: moving a main body to advance along a track, the track having a bearing surface, an auxiliary reinforcing surface, and a guiding surface connecting the bearing surface and the auxiliary reinforcing surface, wherein the bearing surface and the bearing surface The auxiliary reinforcement surface is at a different level; and when the body is moved, the bearing surface of the track is cleaned and the auxiliary reinforcement surface of the track is cleaned. The cleaning method of claim 7, wherein the plurality of orbital images of the track are captured and recorded while the subject is being moved.